CN102156032B - Precisely-driven vibrating platform - Google Patents

Precisely-driven vibrating platform Download PDF

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Publication number
CN102156032B
CN102156032B CN 201110039211 CN201110039211A CN102156032B CN 102156032 B CN102156032 B CN 102156032B CN 201110039211 CN201110039211 CN 201110039211 CN 201110039211 A CN201110039211 A CN 201110039211A CN 102156032 B CN102156032 B CN 102156032B
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displacement
output terminal
platform
terminal bar
driver
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CN102156032A (en
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杨斌堂
孟光
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Shanghai Jiaotong University
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Shanghai Jiaotong University
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Abstract

The invention provides a precisely-driven vibrating platform, belonging to the technical field of precise driving. The vibrating platform comprises a supporting rack, at least one driving mechanism arranged in the supporting rack, and a vibrating platform that is connected with the driving mechanism. In the invention, based on the telescopic deformation of an intelligent material, direct displacement is generated to drive the vibration; the vibrating platform has a simple structure, reliability, high driving efficiency and precisely controllable amplitude, can realize the broad width from nanometer to several millimeters and the wide frequency from quasi-static to high frequency, and has large-load vibration capability.

Description

The accurate shaking table that drives
Technical field
What the present invention relates to is the device in a kind of accurate Driving technique field, specifically is a kind of accurate shaking table that drives.
Background technology
In the last few years, because the development of micro-nano device and super hot investment casting art, pressed for a kind ofly for micro-nano and disturb the Active Vibration Control shaking platform, be used for solving little vibration problem of micro-nano device and ultraprecise process.At present since vibratory equipment mainly realized by hydraulic pressure, pneumatic, electromagnetism and mechanical vibration mode.These vibratory equipments are owing to be to be realized by hydraulic pressure, pneumatic and mechanical vibration behavior, it is many that its vibratory drive realizes forming link, the multi-part drive gap, the dimensional accuracy error of each parts etc., make this base part in the realization that drives, can not realize the vibration performance of micro-nano amplitude, therefore can not make micro/nano level Active Vibration Control shaking platform.
Find through the retrieval to prior art, China Patent No. 200520036395, authorize and disclosed " a kind of shaking table " in open day on 01 24th, 2007, this technology comprises: vibrating motor, vibration table and spring, vibrating motor is installed between stand and the vibration table, spring(-supported) mount is located between stand and the vibration table, offers a plurality of screw pilot holes etc. on the vibration table.This shaking table is simple and reliable for non-accurate large amplitude displacement vibration, but can not realize for micro-nano precision vibration, because its vibration source, namely vibrating motor self can not produce micro-nano and vibration.So, to realize that based on the vibratory equipment of traditional approach micro-nano magnitude vibration equipment is difficult to realize.
Summary of the invention
The present invention is directed to the prior art above shortcomings, a kind of accurate shaking table that drives is provided, produce direct displacement drive vibration based on the intellectual material dilatation, be that a kind of simple in structure, reliability and driving efficient height, amplitude are accurately controlled, can realize by the wide cut of nanometer to some millimeters, and can realize the wideband from the quasistatic to the high frequency and the platform with heavy load vibration ability.
The present invention is achieved by the following technical solutions, the present invention includes: bracing frame, be arranged at least one driving mechanism in the bracing frame and be attached thereto the shaking platform that connects.
Described driving mechanism is any one in following two kinds of forms:
1) driver and fixedly connected displacement output terminal bar with it, the top of this displacement take-off lever with drive platform and be hinged.
Described driver is provided with drive displacement enlarger and fixedly connected displacement enlargement output terminal bar with it, the top of this displacement enlargement output terminal bar with drive platform and be hinged.
Be provided with the piezoelectric type pull pressure sensor between described driver and the driver take-off lever.
2) driver, frame-type body and be attached thereto displacement enlargement output terminal bar and the driver displacement take-off lever that connects, wherein: driver displacement take-off lever is horizontally placed in the frame-type body of ellipsoidal structure and driver is positioned at the middle part of driver displacement take-off lever, and displacement enlargement output terminal bar is arranged at the top of the frame-type body of ellipsoidal structure.
Described driver displacement take-off lever and the contacted position of frame-type body are equipped with snap ring.
Described displacement enlargement output terminal bar and driver displacement take-off lever and the contacted position of carriage are equipped with linear bearing.
Described shaking platform comprises: drive platform, elastic support, driving platform guidepost, electromagnetism control chucking releasing mechanism, wherein: drive the top that platform guidepost, elastic support and driving platform are set in turn in bracing frame, drive platform and be connected with driving platform guidepost, displacement enlargement output terminal bar and direct displacement output terminal bar respectively, electromagnetism control chucking releasing mechanism is positioned at and drives platform and be connected in displacement enlargement output terminal bar and direct displacement output terminal bar outside.
Described electromagnetism control chucking releasing mechanism comprises: the trapezoidal hole of even number that mirror image arranges and corresponding solenoid and steel ball thereof, wherein: the trapezoidal hole of even number is symmetricly set in to be positioned at and drives platform and be positioned at displacement enlargement output terminal bar or the periphery of direct displacement output terminal bar, the solenoid correspondence is arranged at last base or the bottom in trapezoidal hole, and steel ball is movably set in the trapezoidal hole.
The width on the last base in described trapezoidal hole is greater than the diameter of steel ball, and the width of bottom is less than the diameter of steel ball.
Described drive displacement enlarger is mechanical structure for amplifying or hydraulic pressure structure for amplifying, wherein:
Described mechanical structure for amplifying is hinged with displacement enlargement output terminal bar and driver take-off lever respectively lever or lever group, and the input arm of force of this lever or lever group is less than the output arm of force.
Described hydraulic pressure structure for amplifying is hinged with displacement enlargement output terminal bar and driver take-off lever respectively hydraulic pump, and the input pressure area of this hydraulic pump is greater than the output pressure area.
Described hinged spherical linkage or the cross-garnet butt of all adopting realized.
Drive shaking table for precision proposed by the invention, can also be that some so accurate shaking tables that drive are used in combination, and drive the large platform of fulcrum, multifreedom motion more than.Comprise: large platform, cross-garnet butt, big linear bearing, overall framework, spherical linkage and spherical linkage push rod.Wherein several displacement enlargement output terminal bars or directly displacement output terminal bar pass overall framework and the corresponding cross hinge is connected.Cross-garnet butt is connected with large platform again.Between displacement enlargement output terminal bar or direct displacement output terminal bar and the overall framework big linear bearing can be installed.Spherical linkage is installed in center, large platform lower surface, and the spherical linkage push rod passes the big linear bearing that is installed on the overall framework.
Compared with prior art, the electromagnetic permanent magnet combined excited vibration platform of this power control type has the following advantages:
1. realized combination vibration shaking table micro-nano and the millimeter higher level; Realize that easily large amplitude drives; Also realize small amplitude easily; Vibration displacement is accurately controlled.
2, oscillating movement drives and is direct driving, and mechanism is simple, good rigidly, good reliability;
3, drive vibration frequency and can apply electric signal control by the outside fully, can realize that quasistatic arrives the wideband vibration of high frequency;
4, have structure sensing link, be applied to driving force on the measured piece in the vibratory drive process and can be implemented and monitor, thus the convenient closed-loop control that realizes vibration-testing.
5, convenient combination realizes that the combination multiple degrees of freedoms that drive drive big shaking table more.This multiple degrees of freedom drives and can be used for controlling platform pivot angle orientation.
Mechanism of the present invention can be used for development and requires to produce wideband, wide cut, high precision vibratory drive vibration testing instrument and equipment, is widely used in various vibration-testings or platform pivot angle orientation control field.
Description of drawings
The accurate shaking table structural representation that drives of Fig. 1.
Fig. 2 is provided with the accurate structural representation that drives shaking table of power sensor.
Fig. 3 electromagnetism chucking releasing means synoptic diagram;
Wherein: (a) being release conditions, (b) is gripping orientation.
Fig. 4 lever displacement structure for amplifying synoptic diagram.
Fig. 5 hydraulic displacement structure for amplifying synoptic diagram.
Fig. 6 drives and amplifies integrated drives structure synoptic diagram.
Fig. 7 drives the integrated drives structure of amplification and is installed in the accurate mounting structure synoptic diagram that drives in the shaking table as driver.
Three accurate shaking table combination driving Three Degree Of Freedom large platform structural representations that drive of Fig. 8.
Fig. 9 spherical linkage syndeton concerns synoptic diagram.
Figure 10 cross-garnet butt structural representation.
Embodiment
Below embodiments of the invention are elaborated, present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, present embodiment comprises: bracing frame 1, be arranged at a driving mechanism 2 in the bracing frame 1 and be attached thereto the shaking platform 3 that connects.
Described driving mechanism 2 is: the driver 4 that from bottom to top sets gradually, driver take-off lever 5 and drive displacement enlarger 6 and be arranged at drive displacement enlarger 6 respectively and driver take-off lever 5 on displacement enlargement output terminal bar 7 and direct displacement output terminal bar 8.
As shown in Figure 2, be provided with piezoelectric type pull pressure sensor 9 between described driver 4 and the driver take-off lever 5;
Described shaking platform 3 comprises: drive platform 10, elastic support 11, driving platform guidepost 12, electromagnetism control chucking releasing mechanism 13, wherein: drive platform guidepost 12, elastic support 11 and drive the top that platform 10 is set in turn in bracing frame 1, drive platform 10 and be connected with driving platform guidepost 12, displacement enlargement output terminal bar 7 and direct displacement output terminal bar 8 respectively, electromagnetism control chucking releasing mechanism 13 is positioned at and drives platform 10 and be connected in displacement enlargement output terminal bar 7 and direct displacement output terminal bar 8 outsides.
Shown in Fig. 3 (a) and Fig. 3 (b), described electromagnetism control chucking releasing mechanism 13 comprises: the trapezoidal hole 14 of even number that mirror image arranges and corresponding solenoid 15 and steel ball 16 thereof, wherein: the trapezoidal hole 14 of even number is symmetricly set in to be positioned at and drives platform 10 and be positioned at displacement enlargement output terminal bar 7 or the periphery of direct displacement output terminal bar 8, solenoid 15 correspondences are arranged at last base or the bottom in trapezoidal hole 14, and steel ball 16 is drawn together and is arranged in the trapezoidal hole 14.
The width on the last base in described trapezoidal hole 14 is greater than the diameter of steel ball 16, and the width of bottom is less than the diameter of steel ball 16.
Described drive displacement enlarger 6 is mechanical structure for amplifying or hydraulic pressure structure for amplifying, wherein:
As shown in Figure 4, mechanical structure for amplifying is hinged with displacement enlargement output terminal bar 7 and driver take-off lever 5 respectively lever or lever group 17, and the input arm of force of this lever group 17 is less than the output arm of force.
As shown in Figure 5, the hydraulic pressure structure for amplifying is hinged with displacement enlargement output terminal bar 7 and driver take-off lever 5 respectively hydraulic pump 18, and the input pressure area of this hydraulic pump 18 is greater than the output pressure area.
The course of work of present embodiment is:
The shaking table of present embodiment, driving mechanism 2 is by the external drive effect during work, driver 4 is wherein encouraged, driver 4 elongations, should extend displacement simultaneously by 5 outputs of driver take-off lever, be delivered on the displacement enlargement output terminal bar 7 after being delivered to drive displacement enlarger 6 simultaneously and then having the enlarger effect that this displacement is amplified, the output displacement of driver take-off lever 5 also is directly delivered on the direct displacement output terminal bar 8 of rigidity in this process.Afterwards, displacement enlargement output terminal bar 7 and direct displacement output terminal bar 8 pass the electromagnetism control chucking releasing mechanism 13 in the shaking platform 3, if only convey electromagnetism control chucking releasing mechanism 13 work of displacement enlargement output terminal bar 7 contacts, it will be stuck displacement enlargement output terminal bar 7, be equivalent to displacement enlargement output terminal bar 7 this moment and be connected with shaking platform 3, platform 3 will produce the displacement that is applied and amplified through drive displacement enlarger 6 by driver 4 so.At this moment, if cancel excitation to driver 4, driver 4 is with retracted for clearance, and this shrinks drive displacement will pull back the shaking platform of raising just now 3 along same before displacement bang path, and shaking platform 3 deadweights simultaneously also will promote this process of pulling back.Like this, apply and cancel the process of external drive for driving mechanism 2, shaking platform 3 has been realized a lifting and the drop-down process that resets.Repeat to apply excitation, shaking platform 3 will produce repeatedly the action of reciprocal up-down vibration so, and this vibration be through displacement amplify than large-amplitude vibration.
In like manner, if only convey electromagnetism control chucking releasing mechanism 13 work of direct displacement output terminal bar 8 contacts, it will be stuck direct displacement output terminal bar 8, and the direct displacement drive vibration processes that generation driving mechanism 2 is implemented, in such cases, though vibration displacement is not exaggerated, can produce small accurate displacement amplitude vibration.
Realize through process as described below with realization dispose procedure for 13 pairs of take-off levers of electromagnetism control chucking releasing mechanism are stuck:
As Fig. 3 left side diagram, when upper and lower solenoid 10 is produced magnetic field absorption steel ball 10 to the outer end in upper and lower hole, when displacement this moment output terminal bar moves up and down, can not be tied, and be in release conditions.When middle solenoid 10 is produced magnetic field absorption steel ball 10 to the inner end in upper and lower hole, when displacement this moment output terminal bar moves up and down, displacement output terminal bar will be subjected to 10 constraints of hole 14 inwalls extruding steel ball, and simultaneously restrained up and down, thereby the shifter output terminal bar is stuck.
In like manner, for as Fig. 3 the right diagram, by electromagnetic action, steel ball 10 is adsorbed onto the inner end in upper and lower hole, and forms displacement output terminal bar release conditions; Steel ball 10 is adsorbed onto the outer end in upper and lower hole, and forms the stuck state of displacement output terminal bar.
For the situation that between driver 4 and driver take-off lever 5, is provided with piezoelectric type pull pressure sensor 9, follow the strain of driver take-off lever 5, all by the variation of stress, this stress can be by 9 perception of piezoelectric type pull pressure sensor, and then the expulsive force that produces in shaking table 3 vibration processes can be implemented perception.
So far, the described shaking table of present embodiment can be realized vibration processes, and can realize the vibration processes that large amplitude and little amplitude switch, and the exciting force that produces in the vibration processes can be perceived.
Embodiment 2
As shown in Figure 6, described driving mechanism 2 is: driver 4, frame-type body and be attached thereto displacement enlargement output terminal bar 7 and the driver 4 displacement take-off levers that connect, wherein: driver 4 displacement take-off levers are horizontally placed in the frame-type body of ellipsoidal structure and driver 4 is positioned at the middle part of driver 4 displacement take-off levers, and displacement enlargement output terminal bar 7 is arranged at the top of the frame-type body of ellipsoidal structure.
Described driver 4 displacement take-off levers and the contacted position of frame-type body are equipped with snap ring;
Described displacement enlargement output terminal bar 7 and driver 4 displacement take-off levers and the contacted position of carriage are equipped with linear bearing.
This driving mechanism 2 can act on formation vibration platform apparatus as shown in Figure 7.It is to act on driver 4 by external drive to the displacement that displacement take-off lever 5 produces, the displacement that driver 4 produces horizontal direction, and make that the frame-type body of ellipsoidal structure is strutted in the horizontal direction, shrink at vertical direction simultaneously, descend and drive displacement take-off lever 5, and then drive shaking table 3 moves down.Cancel the excitation to driver 4, driver 4 retracted for clearance, and the elastic reset of the frame-type body of ellipsoidal structure, and make the frame-type body of ellipsoidal structure shrink in the horizontal direction, stretch at vertical direction simultaneously, move on the displacement take-off lever 5 and drive, and then drive shaking table 3 moves up.Repeat this process and will produce the shaking table vibration.
Embodiment 3
As Fig. 7-shown in Figure 9, present embodiment comprises: bracing frame 1, be arranged in the bracing frame 1 one or three driving mechanisms 2 and be attached thereto the shaking platform 3 that connects.
Described driving mechanism 2 is by driver 4 and fixedly connected driver take-off lever 5 with it, the top of this driver take-off lever 5 with drive platform 4 and be hinged.
Described hinged spherical linkage or the cross-garnet butt 19 of all adopting realized.
During work, the three-degree-of-freedom motion of realization is: three of three fulcrum places accurate drives moving up and down of shaking platform 4 that shaking tables act on simultaneously; And one of them fulcrum is motionless, the swing form of two kinds of minute angles that two other moves simultaneously; Thereby realize reciprocal line motion and two rotation campaigns, a three degree of freedom motion platform like this.

Claims (6)

1. the accurate shaking table that drives is characterized in that, comprises bracing frame, is arranged at least one driving mechanism in the bracing frame and is attached thereto the shaking platform that connects;
Described driving mechanism comprises, driver, frame-type body and be attached thereto displacement enlargement output terminal bar and the driver displacement take-off lever that connects, wherein, driver displacement take-off lever is horizontally placed in the frame-type body of ellipsoidal structure and driver is positioned at the middle part of driver displacement take-off lever, and displacement enlargement output terminal bar is arranged at the top of the frame-type body of ellipsoidal structure;
Described driver is provided with drive displacement enlarger and fixedly connected displacement enlargement output terminal bar with it, the top of described displacement enlargement output terminal bar with drive platform and be hinged;
Described shaking platform comprises: drive platform, elastic support, driving platform guidepost, electromagnetism control chucking releasing mechanism, wherein, drive the top that platform guidepost, elastic support and driving platform are set in turn in bracing frame, drive platform and be connected with driving platform guidepost, displacement enlargement output terminal bar and direct displacement output terminal bar respectively, electromagnetism control chucking releasing mechanism is positioned at and drives platform and be connected in displacement enlargement output terminal bar and direct displacement output terminal bar outside.
2. the accurate shaking table that drives according to claim 1 is characterized in that described drive displacement enlarger is mechanical structure for amplifying or hydraulic pressure structure for amplifying, wherein:
Described mechanical structure for amplifying is hinged with displacement enlargement output terminal bar and driver displacement take-off lever respectively lever or lever group, and the input arm of force of described lever or lever group is less than the output arm of force;
Described hydraulic pressure structure for amplifying is hinged with displacement enlargement output terminal bar and driver take-off lever respectively hydraulic pump, and the input pressure area of described hydraulic pump is greater than the output pressure area.
3. the accurate shaking table that drives according to claim 1 is characterized in that described driver displacement take-off lever and the contacted position of frame-type body are equipped with snap ring.
4. the accurate shaking table that drives according to claim 1 is characterized in that described displacement enlargement output terminal bar and driver displacement take-off lever and the contacted position of bracing frame are equipped with linear bearing.
5. precision according to claim 1 drives shaking table, it is characterized in that, described electromagnetism control chucking releasing mechanism comprises: the trapezoidal hole of even number that mirror image arranges and corresponding solenoid and steel ball thereof, wherein, the trapezoidal hole of even number is symmetricly set in to be positioned at and drives platform and be positioned at displacement enlargement output terminal bar or the periphery of direct displacement output terminal bar, the solenoid correspondence is arranged between the last base or bottom and two holes in trapezoidal hole, and steel ball is movably set in the trapezoidal hole.
6. the accurate shaking table that drives according to claim 5 is characterized in that the width on the last base in described trapezoidal hole is greater than the diameter of steel ball, and the width of bottom is less than the diameter of steel ball.
CN 201110039211 2011-02-17 2011-02-17 Precisely-driven vibrating platform Active CN102156032B (en)

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CN103557931B (en) * 2013-11-11 2016-05-18 广东工业大学 A kind of ultrasonic amplitude measurement mechanism and method based on constant force control
CN105806580B (en) * 2016-06-01 2018-07-13 吉林大学 Stiffness variable wideband resonance mechanism
CN109443679A (en) * 2018-11-30 2019-03-08 中国航空工业集团公司沈阳飞机设计研究所 A kind of vibration experiment

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2518096Y (en) * 2002-01-28 2002-10-23 孙卫平 Energy saving vibrating platform
CN1900660A (en) * 2006-07-19 2007-01-24 中国航空工业第一集团公司北京长城计量测试技术研究所 Electric angle vibrative table
CN201364233Y (en) * 2008-12-11 2009-12-16 浙江工业大学 Three-degree-of-freedom mechanical vibration environment test platform

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5357447B2 (en) * 2008-06-06 2013-12-04 三菱重工業株式会社 Vibration test equipment

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2518096Y (en) * 2002-01-28 2002-10-23 孙卫平 Energy saving vibrating platform
CN1900660A (en) * 2006-07-19 2007-01-24 中国航空工业第一集团公司北京长城计量测试技术研究所 Electric angle vibrative table
CN201364233Y (en) * 2008-12-11 2009-12-16 浙江工业大学 Three-degree-of-freedom mechanical vibration environment test platform

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开2009-294150A 2009.12.17

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