CN203981127U - Miniature rotary element roundness measuring device based on diffraction pattern - Google Patents
Miniature rotary element roundness measuring device based on diffraction pattern Download PDFInfo
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- CN203981127U CN203981127U CN201420297182.9U CN201420297182U CN203981127U CN 203981127 U CN203981127 U CN 203981127U CN 201420297182 U CN201420297182 U CN 201420297182U CN 203981127 U CN203981127 U CN 203981127U
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Abstract
The utility model discloses a kind of miniature rotary element roundness measuring device based on diffraction pattern.Specifically comprise helium-neon laser, fiber optic splitter, optical fiber collimator, chopper, wedge shape blade, lens, CCD imaging probe, miniature rotary element to be measured, computing machine; The He-Ne Lasers that helium-neon laser sends is through fiber optic splitter beam splitting, He-Ne Lasers after beam splitting enters optical fiber collimator and becomes collimate in parallel light beam, collimate in parallel light beam passes the gap of wedge shape blade and miniature rotary element to be measured formation after chopper modulation, form diffraction light scioptics through the He-Ne Lasers in gap and be imaged as diffraction pattern to CCD imaging probe, in miniature rotary element rotation process to be measured, the diffraction pattern image collecting is passed to computing machine by CCD imaging probe, and computing machine calculates the circularity of miniature rotary element to be measured according to diffraction pattern.The utility model has improved precision and the speed of the roundness measurement of miniature rotary class component, realizes the non-cpntact measurement of circularity.
Description
Technical field
The utility model belongs to roundness measurement field, relates in particular to a kind of miniature rotary element roundness measuring device based on diffraction pattern.
Background technology
Miniature rotary class part is the most a kind of part in precise light electronic product, and deviation from circular from is an important precision index of high-precision rotary body part, and the size of deviation from circular from is the key of product quality often.Because miniature rotary class part object geometric scale is less, load mould, cut trickle on part surface often occur in random mode, and the relative error that simple roundness measurement method is measured as ring standard gauge method, V-block method and two point measurement methods etc. is very large.In actual standard metering and accurate detection, usually use roundness measuring equipment and three coordinate measuring machine, they are the most desirable, the most effective surveying instruments during off-line product detects.Improve the roundness measurement precision of part and can improve interchangeability of parts, quality of fit, rotating accuracy, friction and serviceable life, reduce mistake and receive and scrappage, so the research of deviation from circular from detection technique has obvious economic worth.
The physical dimension of miniature rotary class part is less, presents the error features different from the slewing parts of stock size, and therefore any relatively little source of error all can produce larger impact.In miniature rotary class part, uncertainty, the randomness of roundness measurement source of error and the feature that is difficult to avoid become a difficult point of miniature rotary class part processing.Acting force in process between cutter and workpiece, the ess-strain of material and misoperation equal error source all can increase deviation from circular from.The patent No. be CN1056744A's " detection method of circularity and roundness measuring equipment " announced a kind of employing and reduced the precision of rotation axis system and the separation of the auxiliary error that realizes roundness measurement with the method for high-precision standard round exemplar is eliminated and suppresses.The patent No. be CN102175207A's " a kind of based on oppositely and the high precision circularity detection method of multisensor method combination " announced a kind of disk that adopts two centres of gyration coincidences measuring workpieces measured, separate the turn error of main shaft by the sensor signal of two groups of opposite sign but equal magnitude on two groups of disks, then measure the circularity of measured workpiece.The patent No. be CN101608893A's " needle roller, small roller roundness measuring instrument " announced a kind of method that adopts lever and spring circular error signal doubled to amplify, then carry out roundness measurement and obtain higher accurate apparatus and method.The most modes that adopt physical construction and sensor probe of apparatus and method of existing roundness measurement are measured circularity, and therefore measurement result is easily subject to the impact such as mechanical vibration, mechanical clearance and produces larger measuring error.
Summary of the invention
The purpose of this utility model is for the deficiencies in the prior art, proposes a kind of miniature rotary element roundness measuring device based on diffraction pattern, improves precision and the speed of the roundness measurement of existing miniature rotary class component, realizes the non-cpntact measurement of circularity.
It is as follows that the utility model solves the technical scheme that its technical matters adopts:
Miniature rotary element roundness measuring device based on diffraction pattern, comprises helium-neon laser, fiber optic splitter, optical fiber collimator, chopper, wedge shape blade, lens, CCD imaging probe, miniature rotary element to be measured, computing machine;
The He-Ne Lasers that helium-neon laser sends is through fiber optic splitter beam splitting, He-Ne Lasers after beam splitting enters optical fiber collimator by optical fiber and becomes collimate in parallel light beam, collimate in parallel light beam is through chopper modulation, He-Ne Lasers after modulation is through the gap of wedge shape blade and miniature rotary element to be measured formation, form diffraction light scioptics through the He-Ne Lasers in gap and be imaged as diffraction pattern to CCD imaging probe, in the process that miniature rotary element to be measured rotates, the diffraction pattern image collecting is passed to computing machine by CCD imaging probe, computing machine calculates the circularity of miniature rotary element to be measured according to diffraction pattern.
Miniature rotary element to be measured is by fixture fixed placement on the platform that rotatablely moves, and the speed of platform by motion platform controller controlled motion rotatablely moves.
Laser after chopper modulation is through the gap of wedge shape blade and miniature rotary element to be measured formation, and the width of establishing gap is d, and the distance of lens 7 and CCD imaging probe is f, and the width d in gap can arrive by formula (1):
Wherein, x
nfor the distance at n level dark fringe centre distance central authorities' zero order fringe center in diffraction pattern.
He-Ne Lasers that described helium-neon laser sends is divided into four bundles through fiber optic splitter, and every bundle He-Ne Lasers after beam splitting all enters optical fiber collimator by optical fiber and becomes collimate in parallel light beam.
Wedge shape blade is symmetricly set on miniature rotary element to be measured four orientation up and down, and wedge shape blade is identical with the distance of miniature rotary element to be measured.
Computing machine calculates the circularity of miniature rotary element to be measured according to diffraction pattern, specifically, according to standard GB/T/T7235-2004 regulation, adopt the method for minimum two-multiply law (LSC), Minimum Area method (MZC), maximum inscribed circle method (MIC) or minimum circumscribed circle method (MCC) to calculate circularity.
The utility model beneficial effect is as follows:
The first, as the non-contacting circularity detection device of one, the miniature rotary element roundness measuring device based on diffraction pattern can be realized the roundness measurement of the pivoted member of miniature sizes, and the measurement result of this device is highly sensitive, and measuring accuracy can reach 0.1 μ m.
Second, roundness measurement method based on optical diffraction method has non-contacting feature, the error that can avoid deformation that in measuring process, gauge head stress produces to cause, eliminate the Touch error in traditional Mechanical measurement method, vibrations error, very applicable in the occasion of emphasizing precision and detection speed.
The 3rd, by the regulating action of chopper, the method for analyzing by coherent signal can reduce the impact that the fluctuation of helium-neon laser output intensity brings, and improves the accuracy of detection of diffraction pattern.
The 4th, the non-contacting detection mode based on optical diffraction can be omitted loaded down with trivial details miniature rotary component fixture, makes this pick-up unit go for the pivoted member of different geometrical size, is especially applicable to the measurement of miniature rotary element.
Brief description of the drawings
Fig. 1 is the utility model structural representation;
Fig. 2 is the fixing schematic diagram of miniature rotary class component;
Fig. 3 is the method schematic diagram of roundness calculation.
In figure, helium-neon laser 1, fiber optic splitter 2, optical fiber collimator 3, chopper 4, wedge shape blade 5, CCD imaging probe 6, lens 7, computing machine 8, miniature rotary element 9 to be measured, the platform 10 that rotatablely moves, fixture 11, motion platform controller 12.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail.
As shown in Figure 1, the miniature rotary element roundness measuring device based on diffraction pattern, comprises helium-neon laser 1, fiber optic splitter 2, optical fiber collimator 3, chopper 4, wedge shape blade 5, lens 7, CCD imaging probe 6, miniature rotary element 9 to be measured, computing machine 8.
The He-Ne Lasers that helium-neon laser 1 sends is divided into four bundles through fiber optic splitter 2, He-Ne Lasers after beam splitting enters optical fiber collimator 3 by optical fiber and becomes collimate in parallel light beam, collimate in parallel light beam is modulated through chopper 4, the gap that He-Ne Lasers process wedge shape blade 5 after modulation and miniature rotary element 9 to be measured form, form diffraction light scioptics 7 through the He-Ne Lasers in gap and be imaged as diffraction pattern to CCD imaging probe 6, in the process that miniature rotary element 9 to be measured rotates, the diffraction pattern image collecting is passed to computing machine 8 by CCD imaging probe 6, computing machine 8 calculates the circularity of miniature rotary element 9 to be measured according to diffraction pattern.
As shown in Figure 2, miniature rotary element 9 to be measured is by fixture 11 fixed placement on the platform 10 that rotatablely moves, and the platform 10 that rotatablely moves is by the speed of motion platform controller 12 controlled motions, and computing machine 8 is by command driven motion platform controller 12.
As shown in Figure 3, the gap that laser process wedge shape blade 5 after chopper 4 modulation and miniature rotary element 9 to be measured form, if the width in gap is d, the distance of lens 7 and CCD imaging probe 6 is f, and the width d in gap can arrive by formula (1):
Wherein, x
nfor the distance at n level dark fringe centre distance central authorities' zero order fringe center in diffraction pattern.According to the gap width d measuring, computing machine adopts the regulation according to standard GB/T/T7235-2004, adopts the method for minimum two-multiply law (LSC), Minimum Area method (MZC), maximum inscribed circle method (MIC) or minimum circumscribed circle method (MCC) to calculate circularity.
Claims (4)
1. the miniature rotary element roundness measuring device based on diffraction pattern, is characterized in that comprising helium-neon laser, fiber optic splitter, optical fiber collimator, chopper, wedge shape blade, lens, CCD imaging probe, miniature rotary element to be measured, computing machine;
The He-Ne Lasers that helium-neon laser sends is through fiber optic splitter beam splitting, He-Ne Lasers after beam splitting enters optical fiber collimator by optical fiber and becomes collimate in parallel light beam, collimate in parallel light beam is through chopper modulation, He-Ne Lasers after modulation is through the gap of wedge shape blade and miniature rotary element to be measured formation, form diffraction light scioptics through the He-Ne Lasers in gap and be imaged as diffraction pattern to CCD imaging probe, in the process that miniature rotary element to be measured rotates, the diffraction pattern image collecting is passed to computing machine by CCD imaging probe, computing machine calculates the circularity of miniature rotary element to be measured according to diffraction pattern.
2. the miniature rotary element roundness measuring device based on diffraction pattern as claimed in claim 1, it is characterized in that miniature rotary element to be measured by fixture fixed placement on the platform that rotatablely moves, the speed of platform by motion platform controller controlled motion rotatablely moves.
3. the miniature rotary element roundness measuring device based on diffraction pattern as claimed in claim 1, it is characterized in that the He-Ne Lasers that helium-neon laser sends is divided into four bundles through fiber optic splitter, and every bundle He-Ne Lasers after beam splitting all enters optical fiber collimator by optical fiber and becomes collimate in parallel light beam.
4. the miniature rotary element roundness measuring device based on diffraction pattern as claimed in claim 1, it is characterized in that being symmetricly set on miniature rotary element to be measured four orientation up and down at wedge shape blade, and wedge shape blade is identical with the distance of miniature rotary element to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420297182.9U CN203981127U (en) | 2014-06-05 | 2014-06-05 | Miniature rotary element roundness measuring device based on diffraction pattern |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420297182.9U CN203981127U (en) | 2014-06-05 | 2014-06-05 | Miniature rotary element roundness measuring device based on diffraction pattern |
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| CN203981127U true CN203981127U (en) | 2014-12-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201420297182.9U Expired - Fee Related CN203981127U (en) | 2014-06-05 | 2014-06-05 | Miniature rotary element roundness measuring device based on diffraction pattern |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105865372A (en) * | 2016-06-16 | 2016-08-17 | 四川理工学院 | Pipeline roundness value automatic detection system and detection method |
| CN109341577A (en) * | 2018-10-19 | 2019-02-15 | 北京市机械施工有限公司 | A kind of steel pipe processing ovality detection device |
| CN114061491A (en) * | 2021-11-30 | 2022-02-18 | 北京理工大学珠海学院 | Method for observing micropore defect by laser |
-
2014
- 2014-06-05 CN CN201420297182.9U patent/CN203981127U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105865372A (en) * | 2016-06-16 | 2016-08-17 | 四川理工学院 | Pipeline roundness value automatic detection system and detection method |
| CN109341577A (en) * | 2018-10-19 | 2019-02-15 | 北京市机械施工有限公司 | A kind of steel pipe processing ovality detection device |
| CN109341577B (en) * | 2018-10-19 | 2020-06-12 | 北京市机械施工有限公司 | Steel pipe machining ovality detection device |
| CN114061491A (en) * | 2021-11-30 | 2022-02-18 | 北京理工大学珠海学院 | Method for observing micropore defect by laser |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141203 Termination date: 20170605 |