CN117518397A - Dual-drive quick reflector system and adjusting method thereof - Google Patents
Dual-drive quick reflector system and adjusting method thereof Download PDFInfo
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- CN117518397A CN117518397A CN202311649149.8A CN202311649149A CN117518397A CN 117518397 A CN117518397 A CN 117518397A CN 202311649149 A CN202311649149 A CN 202311649149A CN 117518397 A CN117518397 A CN 117518397A
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- 238000000034 method Methods 0.000 title claims abstract description 12
- 239000000919 ceramic Substances 0.000 claims abstract description 56
- 238000006073 displacement reaction Methods 0.000 claims abstract description 45
- 230000009471 action Effects 0.000 claims description 8
- 238000009434 installation Methods 0.000 claims description 7
- 230000009977 dual effect Effects 0.000 claims description 6
- 238000005259 measurement Methods 0.000 abstract description 5
- 239000002131 composite material Substances 0.000 abstract description 4
- 230000008859 change Effects 0.000 description 5
- 230000001276 controlling effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002068 genetic effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- 238000005457 optimization Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/198—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
- G02B7/1827—Motorised alignment
Abstract
The invention discloses a dual-drive quick reflector system and an adjusting method thereof, belonging to the field of quick reflectors. The strategy of composite control of the voice coil motor driver component and the piezoelectric ceramic driver component is adopted to complete large-angle and high-precision control of the light beam. The characteristics of large driving displacement of the voice coil motor driver and large layout adjustment angle of the three-point type driver are combined, so that large-angle adjustment of light beams can be realized, angle measurement is completed through an angle sensor, and closed-loop control is further realized. The high-precision adjustment of the light beam is realized by combining the characteristic of high precision of the piezoelectric ceramic driver, and the angle is measured by the angle sensor so as to realize closed-loop control. The composite control quick reflector system has the advantages of large control angle and high control precision.
Description
Technical Field
The invention belongs to the technical field of quick reflectors, and particularly relates to a dual-drive quick reflector system and an adjusting method thereof.
Background
The fast reflector is used in the light source and the receiving end to regulate light beam, and may be used in correcting the inclination error in light path, stabilizing the direction of light beam, fast tracking system, etc. and has the advantages of small size, fast response speed, high control precision, etc.
However, the existing quick reflector still has the following problems: (1) Because the piezoelectric ceramic is limited by small driving displacement, the piezoelectric ceramic rapid reflecting mirror has small angle range for adjusting the light beam, and can not meet the requirement for large-angle adjustment. (2) The voice coil motor quick reflector has a large adjusting range for light beams, but has low adjusting precision, and cannot meet the increasingly severe use requirements.
Disclosure of Invention
The invention provides a dual-drive quick reflector system and an adjusting method thereof, which realize the regulation and control of light beams with large deflection angle and high precision.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
a dual-drive quick mirror system comprising a first mirror plate and a second mirror plate, the first mirror plate being mounted on a first mirror mount; the second reflector plate is assembled on the second mirror bracket; the first eyeglass frame and the second eyeglass frame are respectively arranged on the mounting base through a first central flexible hinge and a second central flexible hinge; the reflected light rays incident on the first reflecting mirror plate can be received by the second reflecting mirror plate; a voice coil motor driver component is arranged between the first mirror bracket and the mounting base; and a piezoelectric ceramic driver component is arranged between the second mirror bracket and the mounting base.
Further, the voice coil motor driver assembly comprises three voice coil motor drivers, a magnet rotor of the voice coil motor is fixedly connected with the mirror base, and a coil stator of the voice coil motor is mounted on the mounting base.
Further, the three voice coil motor drivers are uniformly arranged on the same circumference, the plane where the initial position of the upper end face of the first reflecting mirror plate is located is a plane P1, the projection of one voice coil motor driver on the plane P1 falls on a positive half shaft of a Y1 shaft, and the Y1 shaft is on a horizontal line passing through the midpoint of the upper end face of the first reflecting mirror plate.
Further, the device also comprises a first feedback component, wherein the first feedback component comprises two capacitive displacement sensors, the projections of the two capacitive displacement sensors on a plane P1 respectively fall on an X1 axis positive half shaft and a Y1 axis positive half shaft, the plane P1 is a plane where the initial position of the upper end face of the first reflecting mirror plate is located, and the Y1 axis is on a horizontal line passing through the midpoint of the upper end face of the first reflecting mirror plate, and the Y1 axis is reversely rotated by 90 degrees along the plane P1 to obtain an X1 axis.
Further, the piezoelectric ceramic driver assembly comprises four piezoelectric ceramic drivers, the upper ends of the piezoelectric ceramic drivers are fixedly connected with the second eyeglass frame, and the lower ends of the piezoelectric ceramic drivers are connected with the mounting base.
Further, the four piezoelectric ceramic drivers are uniformly arranged on the same circumference, and projections of the four piezoelectric ceramic drivers on a plane P2 fall on positive and negative half shafts of an X2 axis and a Y2 axis respectively; the plane P2 is a plane where the initial position of the upper end face of the second reflecting mirror plate is located, a vertical plane passing through the midpoint of the upper end face of the first reflecting mirror plate and the midpoint of the upper end face of the second reflecting mirror plate is recorded as a vertical plane A, the X2 axis is an intersecting line passing through the vertical plane A and the plane P2, the X2 axis is anticlockwise rotated by 90 degrees on the plane P2 to obtain a Y2 axis, and the Y2 axis is perpendicular to the vertical plane A and the X2 axis and passes through the midpoint of the upper end face of the second reflecting mirror plate 6.
Further, the device also comprises a second feedback assembly, the second feedback assembly comprises four capacitive displacement sensors, projections of the four capacitive displacement sensors on a plane P2 respectively fall on an X2 axis positive half axis, a negative half axis and a Y2 axis positive half axis, the plane P2 is a plane where the initial position of the upper end face of the second reflecting lens is located, a vertical plane passing through the midpoint of the upper end face of the first reflecting lens and the midpoint of the upper end face of the second reflecting lens is recorded as a vertical plane A, the X2 axis is an intersecting line of the vertical plane A and the plane P2, and the X2 axis is anticlockwise rotated by 90 degrees on the plane P2 to obtain the Y2 axis.
Further, the working stroke of the voice coil motor driver assembly is higher than 50mm, and the precision is higher than 10nm; the working stroke of the piezoelectric ceramic driver component is higher than 100 mu m, and the precision is higher than 1nm.
A method of adjusting a dual drive fast mirror system, comprising the steps of:
step 1, controlling a first reflection lens to complete angular rotation of +/-20 degrees around an X1 axis and a Y1 axis through the push-pull action of a voice coil motor driver assembly, so as to realize large-angle regulation and control of incident light;
and 2, controlling the piezoelectric ceramic driver component to control the second reflecting lens to complete the angular rotation of +/-2 mrad around the X2 axis and the Y2 axis, so that the small-angle regulation and control of incident light are met, and the reflected light is irradiated to a target position.
Further, in step 2, the piezoelectric ceramic driver assembly is controlled by a method combining feedforward control and fuzzy PID control.
Compared with the prior art, the invention has at least the following beneficial technical effects:
according to the invention, the push-pull action of the voice coil motor driver is adopted to complete the adjustment of the pose of the reflecting mirror so as to realize the rough adjustment of the light beam, and the characteristics of large driving displacement of the voice coil motor driver and large layout adjustment angle of the three-point type driver are combined, so that the large angle adjustment of the light beam can be realized; the roughly-regulated light beam adopts the push-pull action of the piezoelectric ceramic driver to complete the regulation of the position and the posture of the reflecting mirror, thereby realizing the high-precision fine regulation of the light beam, combining the characteristic of high precision of the piezoelectric ceramic driver and meeting the requirement of the high-precision regulation of the light beam. Through the combination of the two, the light beam regulation and control with large deflection angle and high precision is realized.
Furthermore, the voice coil motor driver adopts a three-point layout, and has a larger deflection range compared with the traditional four-point driving. Meanwhile, the problem of plane over-positioning existing in four-point driving is solved, so that the processing and mounting requirements are reduced, and the structural performance of the system is improved.
Furthermore, the reflecting mirror part controlled by the voice coil motor adopts two angle sensors to finish the measurement of the angle, thereby realizing the closed-loop control of the voice coil motor driver part. In the coarse adjustment part, two angle adjusters are adopted, so that the measurement requirement of the system can be met, and the cost of the system can be effectively reduced.
Furthermore, the piezoelectric ceramic driver adopts four-point layout, the reflector part controlled by the piezoelectric ceramic driver is a fine adjustment part of the system to the light beam, and the four-point layout can ensure that the system has better stability and can effectively improve the control precision to the light beam.
Furthermore, the mirror part controlled by the piezoelectric ceramic adopts four angle sensors to finish the measurement of angles, thereby realizing the closed-loop control of the piezoelectric ceramic driver part. In the fine adjustment part, two pairs of angle sensors are adopted to respectively measure the rotation angles of the X axis and the Y axis, so that the measurement accuracy of the system can be effectively improved, and the influence of the axial error of the system can be eliminated through calculation.
The adjusting method has the advantages of wide angle adjusting range and high adjusting precision, and can meet the adjusting requirements of large angle and high precision.
Drawings
FIG. 1 is a block diagram of a compound control fast mirror system with large yaw angle and high accuracy;
FIG. 2 is a schematic diagram of a compound control fast mirror wide angle adjustment;
fig. 3 is a schematic structural diagram of the layout of the driving and feedback components under the first reflecting mirror plate 1;
FIG. 4 is a schematic diagram of the layout of the driving and feedback components under the second mirror plate 6;
fig. 5 is a flow chart of piezo ceramic actuator control.
In the accompanying drawings: 1. a first reflecting mirror; 2. a first frame; 3. a voice coil motor driver assembly; 4. a first central flexible hinge; 5. a first feedback component; 6. a second reflecting mirror; 7. a second frame; 8. a piezoelectric ceramic driver assembly; 9. the second center is more flexible; 10. a second feedback assembly; 11. and (5) installing a base.
Detailed Description
In order to make the purpose and technical scheme of the invention clearer and easier to understand. The present invention will now be described in further detail with reference to the drawings and examples, which are given for the purpose of illustration only and are not intended to limit the invention thereto.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more. In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Referring to fig. 1 to 4, the present example provides a dual-drive fast mirror system with a large yaw angle and high precision, comprising a first mirror plate 1, a first mirror mount 2, a voice coil motor driver assembly 3, a first central flexible hinge 4, a first feedback assembly 5, a second mirror plate 6, a second mirror mount 7, a piezoceramic driver assembly 8, a central flexible hinge 9, a second feedback assembly 10, and a base 11.
The first reflector plate 1 is assembled above the first mirror frame 2; the second mirror plate 6 is fitted over the second frame 7; in the initial state, the first reflecting mirror plate 1 and the second reflecting mirror plate 6 are symmetrically arranged about the central axis of the chassis 11, and the reflected light incident on the first reflecting mirror plate 1 can be received by the second reflecting mirror plate 6. Preferably, the included angle between the first reflecting mirror plate 1 and the horizontal plane in the initial state is 45 degrees, and the included angle between the first reflecting mirror plate 1 and the horizontal plane is 135 degrees.
The mounting base 11 is arranged below the first eyeglass frame 2 and the second eyeglass frame 7, the first eyeglass frame 2 is connected with the mounting base 11 through the first central flexible hinge 4, and the second eyeglass frame 7 is connected with the mounting base 11 through the second central flexible hinge 9; the upper end of the first central flexible hinge 4 is rotationally connected with a first central installation interface arranged on the first mirror bracket 2, and the lower end of the first central flexible hinge 4 is fixedly connected with a second central installation interface arranged on the installation base 11; the upper end of the second central flexible hinge 9 is rotationally connected with a third central installation interface arranged on the second mirror bracket 7, and the lower end of the second central flexible hinge 9 is fixedly connected with a fourth central installation interface arranged on the installation base 11. The voice coil motor driver assembly 3 is arranged between the first frame 2 and the mounting base 11; a piezoceramic actuator assembly 8 arranged between the second frame 7 and the mounting base 11; the first feedback assembly 5 is disposed between the first frame 2 and the mounting base 11, and the second feedback assembly 10 is disposed between the second frame 7 and the mounting base 11.
The voice coil motor driver assembly 3 adopts three voice coil motor drivers with working strokes higher than 50mm and precision reaching 10nm, and is uniformly arranged on a circumference, wherein the projection of one voice coil motor driver on a plane (hereinafter referred to as a plane P1) where the initial position of the upper end surface of the first reflector 1 is located falls on a positive half shaft of the Y1 axis. The first reflection mirror plate 1 is rotated around the X1 axis and the Y1 axis by a large angle by linear displacement of the three voice coil motor drivers.
The vertical plane passing through the midpoint of the upper end surface of the first reflecting mirror plate 1 and the midpoint of the upper end surface of the second reflecting mirror plate 6 simultaneously is denoted as a vertical plane A, the X1 axis is the intersection line of the vertical plane A and the plane where the upper end surface of the first reflecting mirror plate 1 is located, and the right lower part of the X1 axis is the positive direction of the X1 axis; the X1 axis is rotated 90 degrees anticlockwise on the plane P1 to obtain a Y1 axis, the Y1 axis is perpendicular to the plumb plane A and the X1 axis, and passes through the middle point of the upper end face of the first reflecting lens 1, and the positive direction of the Y1 axis is perpendicular to the plane shown in FIG. 1 and inwards.
The magnet rotor of the voice coil motor is fixedly connected with the first mirror bracket 2 in a pasting mode, and the coil stator of the voice coil motor is fixed on the mounting base 11 in a pasting mode.
The voice coil motor driver assembly 3 can control the first reflecting mirror plate 1 to complete the angle rotation of +/-20 degrees around the X1 axis and the Y1 axis, complete the large-angle adjustment of the incident light, and achieve the adjustment precision higher than 1 mu rad at the same time, so that the reflected light is incident on the second reflecting mirror plate 6 at the incident angle with the precision higher than 1 mu rad.
The first feedback assembly 5 adopts two capacitive displacement sensors, is installed on the base 11, the projections of the two capacitive displacement sensors on the plane P1 fall on an X1 positive half shaft and a Y1 positive half shaft respectively, displacement detection of the first reflecting lens 1 is achieved, the detected displacement is transmitted to the controller, actual displacement of the voice coil motor driver is calculated in the controller according to the displacement of the sensors and the position relation between the sensors and the driver, then the error of expected displacement and actual displacement is calculated, corresponding control quantity is calculated according to a control algorithm, the control quantity is input into the voice coil motor driver, and closed-loop control of the voice coil motor is achieved.
The piezoelectric ceramic driver component part adopts four piezoelectric ceramic drivers with working strokes higher than 100 mu m and precision higher than 1nm, and is uniformly arranged on a circumference, and the projection of the piezoelectric ceramic driver component part on a plane (hereinafter referred to as a plane P2) where the initial position of the upper end surface of the second reflecting lens 6 is located falls on positive and negative half shafts of an X2 axis and a Y2 axis respectively. The rotation of the second mirror plate 6 about the X2 axis and the Y2 axis is achieved by linear displacement of the four piezo ceramic actuators in combination with the central hinge 9.
The X2 axis is an intersection line passing through the plane of the plumb plane A and the plane of the upper end face of the second reflecting mirror plate 6, and the right upper part of the X2 axis is the positive direction of the X2 axis; the X2 axis is rotated 90 degrees anticlockwise on the plane P2 to obtain a Y2 axis, the Y2 axis is perpendicular to the plumb plane A and the X2 axis, and passes through the middle point of the upper end face of the second reflecting lens 6, and the positive direction of the Y2 axis is perpendicular to the plane shown in FIG. 1 and inwards.
The upper end of the piezoelectric ceramic driver is fixedly connected with the second mirror bracket 7 in a pasting mode, and the lower end of the piezoelectric ceramic driver is fixedly connected with the mounting base 11 in a pasting mode.
The adjustment of the angular adjustment precision of the reflected light after reflection of the first mirror plate 1 to be higher than 0.1 mu rad is accomplished by means of a fast second mirror plate 6 controlled by a piezo-ceramic actuator assembly 8.
The second feedback assembly 10 adopts four capacitive displacement sensors, is installed on the base 11, the projections of the capacitive displacement sensors on the plane P2 fall on an X2 axis positive half axis, a negative half axis and a Y2 axis positive half axis and a negative half axis respectively, the capacitive displacement sensors are uniformly arranged on the same circle according to a phase difference of 90 degrees, displacement detection of the second reflecting lens 6 is achieved, the detected displacement is transmitted to the controller, actual displacement of the piezoelectric ceramic driver is calculated in the controller according to the displacement of the sensor and the position relation between the sensor and the driver, then the error of expected displacement and the actual displacement is calculated, corresponding control quantity is calculated according to a control algorithm, and the control quantity is input into the piezoelectric ceramic driver to achieve closed-loop control of the piezoelectric ceramic.
The voice coil motor driver assembly part adopts three voice coil motor drivers with 120-degree angle difference, and the position and the posture of the reflecting mirror are adjusted through the push-pull action of the three voice coil motor drivers so as to realize the rough adjustment of light beams. The characteristics of large driving displacement of the voice coil motor driver and large layout adjustment angle of the three-point type driver are combined, so that large-angle adjustment of light beams can be realized. The piezoelectric ceramic driver part adopts four piezoelectric ceramic drivers with 90-degree angle difference, which are respectively arranged on positive and negative half shafts of an X2 shaft and a Y2 shaft, and the position and the posture of the reflecting mirror are adjusted through the push-pull action of the four piezoelectric ceramics so as to realize the fine adjustment of the light beam. The high-precision adjustment of the light beam is realized by combining the characteristic of high precision of the piezoelectric ceramic driver. The composite control quick reflector system has the advantages of large control angle and high control precision.
The invention adopts the strategy of composite control of the voice coil motor driver component and the piezoelectric ceramic driver component to complete the large-angle and high-precision control of the light beam.
A method of adjusting a quick mirror system, comprising the steps of:
step 1) controlling the first reflecting mirror plate 1 to complete the angle rotation of +/-20 degrees around the X1 axis and the Y1 axis through the push-pull action of the three voice coil motor drivers, so that the large-angle regulation and control of incident light are realized, and meanwhile, the regulation precision of the first reflecting mirror plate 1 is higher than 1 mu rad, so that the reflected light is incident to the second reflecting mirror plate 6 at the incident angle with the precision higher than 1 mu rad.
Step 2) controlling the second reflecting mirror plate 6 to complete the angle rotation around X2 axis and Y2 axis + -2 mrad through the push-pull action of the four piezoelectric ceramic drivers, meeting the small angle regulation and control requirement of incident light, and simultaneously enabling the regulation precision of the second reflecting mirror plate 6 to be higher than 0.1 mu rad, thereby realizing the high-precision regulation of reflected light.
Step 3) the reflected light is made to enter the second reflecting mirror 6 by completing the large-angle and low-precision regulation and control of the incident light by the first reflecting mirror 1; the second reflecting mirror plate 6 adjusts the light reflected by the first reflecting mirror plate 1 with a small angle and high precision, so that the reflected light irradiates the target position, and the large-angle and high-precision adjustment and control of the incident light are realized on the whole adjusting and controlling system.
The control algorithm of the piezoelectric ceramic driver adopts a method of combining feedforward control and fuzzy PID control, and realizes high-precision and rapid adjustment of the piezoelectric ceramic driver. The control of the piezoelectric ceramic is influenced by the hysteresis characteristic of the piezoelectric ceramic, the hysteresis modeling and model identification are carried out on the piezoelectric ceramic driver, and then a feedforward control part is established based on the inverse function of the hysteresis model, so that the influence of the hysteresis characteristic of the piezoelectric ceramic on the control of the piezoelectric ceramic is reduced. The fuzzy PID control can change parameters in control according to specific control conditions, so that the control speed and control accuracy of the system are improved.
And optimizing membership functions and fuzzy rules of fuzzy PID control by adopting a genetic algorithm. The fuzzy PID is used as a key algorithm for closed-loop control of the piezoelectric ceramic driver, and has important influence on the control accuracy of the system. Membership functions and fuzzy rule tables in fuzzy control are often formulated based on experiences of experts and are not optimal functions and rule tables, so that optimization algorithms such as genetic algorithms can be combined to optimize the membership functions and the fuzzy rule tables, and better control effects are achieved.
Referring to fig. 5, a control algorithm of a piezoelectric ceramic driver includes the steps of:
s1) inputting the expected output displacement into a feedforward controller to obtain a control voltage corresponding to the expected output displacement;
s2) inputting control voltage into the piezoelectric ceramic driver to drive the piezoelectric ceramic driver to generate actual displacement;
s3) measuring the actual displacement of the piezoelectric ceramic driver through a displacement sensor, and transmitting the actual displacement into a controller; the controller calculates a difference E between the expected output displacement and the actual output displacement and a change rate dE/dt of the difference E;
s4) inputting a difference E between the expected displacement and the actual displacement and a change rate dE/dt of the difference into a fuzzy controller, and calculating the change amounts delta Kp, delta Ki and delta Kd of control parameters Kp, ki and Kd in a PID controller in the fuzzy controller so as to change the parameters in the PID controller;
s5) inputting the difference value of the expected displacement and the actual displacement into a PID controller to obtain an adjustment value of a control quantity, superposing the control voltage corresponding to the expected output displacement calculated in the feedforward controller, and transmitting the summed control quantity to a driver to further realize the output displacement of the piezoelectric ceramic driver, so as to realize the closed-loop control of the piezoelectric ceramic driver.
The above is only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited by this, and any modification made on the basis of the technical scheme according to the technical idea of the present invention falls within the protection scope of the claims of the present invention.
Claims (10)
1. A dual-drive quick mirror system, characterized by comprising a first mirror plate (1) and a second mirror plate (6), said first mirror plate (1) being mounted on a first frame (2); the second reflector (6) is assembled on a second mirror bracket (7); the first eyeglass frame (2) and the second eyeglass frame (7) are respectively arranged on the installation base (11) through a first central flexible hinge (4) and a second central flexible hinge (9); the reflected light incident on the first mirror plate (1) can be received by the second mirror plate (6);
a voice coil motor driver assembly (3) is arranged between the first mirror bracket (2) and the mounting base (11); a piezoelectric ceramic driver component (8) is arranged between the second mirror bracket (7) and the mounting base (11).
2. A dual drive fast mirror system according to claim 1, wherein the voice coil motor driver assembly comprises three voice coil motor drivers, the magnet mover of the voice coil motor being fixedly connected to the mirror mount (2), the coil stator of the voice coil motor being mounted on the mounting base (11).
3. A dual-drive quick mirror system according to claim 2, wherein the three voice coil motor drivers are uniformly arranged on the same circumference, and the plane in which the initial position of the upper end face of the first reflecting mirror plate (1) is located is a plane P1, wherein the projection of one voice coil motor driver on the plane P1 falls on the positive half axis of the Y1 axis, and the Y1 axis is on the horizontal line passing through the midpoint of the upper end face of the first reflecting mirror plate (1).
4. The dual-drive quick mirror system according to claim 2, further comprising a first feedback assembly (5), wherein the first feedback assembly (5) comprises two capacitive displacement sensors, projections of the two capacitive displacement sensors on a plane P1 respectively fall on an X1 axis positive half axis and a Y1 axis positive half axis, the plane P1 is a plane where an initial position of an upper end face of the first reflecting mirror (1) is located, and the Y1 axis is on a horizontal line passing through a midpoint of the upper end face of the first reflecting mirror (1), and the Y1 axis is turned reversely by 90 degrees along the plane P1 to obtain the X1 axis.
5. A dual-drive fast mirror system according to claim 1, wherein the piezoceramic actuator assembly (8) comprises four piezoceramic actuators, the upper ends of which are fixedly connected to the second mirror mount (7), and the lower ends of which are connected to the mounting base (11).
6. The dual drive fast mirror system according to claim 5, wherein the four piezoceramic drives are uniformly arranged on the same circumference, and projections of the four piezoceramic drives on plane P2 fall on positive and negative half-axes of X2 axis and Y2 axis, respectively; the plane P2 is a plane where the initial position of the upper end face of the second reflecting mirror plate (6) is located, a vertical plane passing through the midpoint of the upper end face of the first reflecting mirror plate (1) and the midpoint of the upper end face of the second reflecting mirror plate (6) is a vertical plane A, the X2 axis is an intersecting line passing through the vertical plane A and the plane P2, the X2 axis is anticlockwise rotated by 90 degrees on the plane P2 to obtain a Y2 axis, and the Y2 axis is perpendicular to the vertical plane A and the X2 axis and passes through the midpoint of the upper end face of the second reflecting mirror plate 6.
7. The dual-drive quick mirror system according to claim 5, further comprising a second feedback assembly (10), wherein the second feedback assembly (10) comprises four capacitive displacement sensors, projections of the four capacitive displacement sensors on a plane P2 respectively fall on positive and negative half axes of an X2 axis and positive and negative half axes of a Y2 axis, the plane P2 is a plane where an initial position of an upper end face of the second mirror plate (6) is located, a vertical plane passing through a midpoint of the upper end face of the first mirror plate (1) and a midpoint of the upper end face of the second mirror plate (6) is a vertical plane a, the X2 axis is an intersection line of the vertical plane a and the plane P2, and the X2 axis is turned counterclockwise by 90 degrees in the plane P2 to obtain the Y2 axis.
8. A dual drive fast mirror system according to claim 1, characterized in that the working stroke of the voice coil motor driver assembly (3) is higher than 50mm with an accuracy higher than 10nm; the working stroke of the piezoelectric ceramic driver component (8) is higher than 100 mu m, and the precision is higher than 1nm.
9. A method of adjusting a dual drive fast mirror system according to claim 1, comprising the steps of:
step 1, controlling a first reflection lens (1) to complete angular rotation of +/-20 degrees around an X1 axis and a Y1 axis through the push-pull action of a voice coil motor driver assembly (3), so as to realize large-angle regulation and control of incident light;
and 2, controlling the second reflecting mirror plate (6) to complete the angle rotation around the X2 axis and the Y2 axis plus or minus 2mrad by controlling the piezoelectric ceramic driver component (8), so as to meet the small angle regulation and control of incident light and enable the reflected light to irradiate to a target position.
10. A method of adjusting a dual drive fast mirror system according to claim 9, wherein in step 2 the piezo ceramic actuator assembly (8) is controlled by a combination of feed forward control and fuzzy PID control.
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| CN202311649149.8A CN117518397A (en) | 2023-12-04 | 2023-12-04 | Dual-drive quick reflector system and adjusting method thereof |
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| CN202311649149.8A CN117518397A (en) | 2023-12-04 | 2023-12-04 | Dual-drive quick reflector system and adjusting method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117784399A (en) * | 2024-02-28 | 2024-03-29 | 安徽瑞控信光电技术股份有限公司 | Array quick reflection mirror |
| CN117806026A (en) * | 2024-02-28 | 2024-04-02 | 安徽瑞控信光电技术股份有限公司 | High-precision light beam switching device and quick reflection mirror |
-
2023
- 2023-12-04 CN CN202311649149.8A patent/CN117518397A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117784399A (en) * | 2024-02-28 | 2024-03-29 | 安徽瑞控信光电技术股份有限公司 | Array quick reflection mirror |
| CN117806026A (en) * | 2024-02-28 | 2024-04-02 | 安徽瑞控信光电技术股份有限公司 | High-precision light beam switching device and quick reflection mirror |
| CN117806026B (en) * | 2024-02-28 | 2024-05-03 | 安徽瑞控信光电技术股份有限公司 | High-precision light beam switching device and quick reflection mirror |
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