CN117784399A - An array fast reflex mirror - Google Patents
An array fast reflex mirror Download PDFInfo
- Publication number
- CN117784399A CN117784399A CN202410217613.4A CN202410217613A CN117784399A CN 117784399 A CN117784399 A CN 117784399A CN 202410217613 A CN202410217613 A CN 202410217613A CN 117784399 A CN117784399 A CN 117784399A
- Authority
- CN
- China
- Prior art keywords
- mirror
- small
- reflector
- array fast
- assemblies
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000011514 reflex Effects 0.000 title abstract description 29
- 230000000712 assembly Effects 0.000 claims abstract description 55
- 238000000429 assembly Methods 0.000 claims abstract description 55
- 239000000523 sample Substances 0.000 claims description 19
- 238000005259 measurement Methods 0.000 description 4
- 239000000314 lubricant Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000002344 surface layer Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000007123 defense Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
Abstract
本发明公开了一种阵列快反镜，涉及反射镜技术领域，包括：镜托、多个小型反射镜组件和控制装置；多个小型反射镜组件设置于镜托的一个端面；控制装置与镜托连接并能够驱动镜托相对于镜托的初始位置所在平面倾斜相应角度以带动多个小型反射镜组件同步移动；控制装置分别与每个小型反射镜组件连接并控制每个小型反射镜组件的镜面所在平面相对于其镜面初始位置倾斜相应角度。本发明提供的阵列快反镜采用镜托和多个小型反射镜组件配合，将多个小型反射镜组件设置于镜托上，通过镜托实现大转角，小型反射镜组件的转动惯量低，可以实现小范围高速往复运动，可实现高带宽。
The invention discloses an array fast reflex mirror, which relates to the technical field of mirrors. It includes: a mirror holder, a plurality of small mirror assemblies and a control device; a plurality of small mirror assemblies are arranged on one end face of the mirror holder; the control device and the mirror The holder is connected and can drive the mirror holder to tilt at a corresponding angle relative to the plane where the initial position of the mirror holder is located to drive multiple small mirror assemblies to move synchronously; the control device is connected to each small mirror assembly and controls the movement of each small mirror assembly. The plane where the mirror surface is located is tilted at a corresponding angle relative to the initial position of the mirror surface. The array fast reflex mirror provided by the present invention uses a mirror holder to cooperate with multiple small mirror assemblies. Multiple small mirror assemblies are arranged on the mirror holder. Large rotation angles are achieved through the mirror holder. The small mirror assemblies have a low moment of inertia and can Achieve high-speed reciprocating motion in a small range and achieve high bandwidth.
Description
技术领域Technical Field
本发明涉及反射镜技术领域，尤其是涉及一种阵列快反镜。The invention relates to the technical field of reflectors, and in particular to an array fast-reflecting mirror.
背景技术Background technique
快速控制反射镜（Fast Steering Mirror，FSM），简称快反镜，是控制反射镜的转动从而使反射光束在一维或二维方向上，对光传播方向进行高精度、高动态的控制，实现光束在所需转角范围内的快速精确指向，应用在激光制导、光电侦查、光电对抗、激光武器、空间探测、激光雷达、激光通信等领域中实现系统精密跟踪、稳瞄、稳像等。采用快反镜替代传统的框架结构，可改善系统的性能，上述领域通常要求快反镜具有较高的工作带宽、角分辨率、指向精度和转角范围，对系统的环境适应性等也有很高要求。Fast Steering Mirror (FSM), referred to as Fast Steering Mirror, controls the rotation of the mirror so that the reflected beam can be reflected in one or two dimensions and perform high-precision and highly dynamic control of the light propagation direction to achieve The rapid and precise pointing of the beam within the required angle range is used in laser guidance, photoelectric reconnaissance, photoelectric countermeasures, laser weapons, space detection, laser radar, laser communications and other fields to achieve system precision tracking, stable aiming, and image stabilization. Using fast mirrors to replace the traditional frame structure can improve the performance of the system. The above fields usually require fast mirrors to have high operating bandwidth, angular resolution, pointing accuracy and angle range, and also have high environmental adaptability to the system. Require.
当前快反镜中主要根据驱动方式的不同分为压电陶瓷（PZT）驱动和音圈电机（VCM）驱动两大类。PZT驱动器的优点是结构简单、体积小、分辨率高、响应快、推力大、发热少、无杂散电磁场，缺点是其行程相对较小，只有几十微米，用于快反镜中无法实现较大转角范围。PZT还存在迟滞特性、耐低温性能差的缺点。音圈电机是基于洛伦兹力原理制造的一种驱动电机，其工作原理是通电线圈(导体)放在磁场内就会产生力，力的大小与施加在线圈上的电流成比例。通常由磁缸、线圈等组成，具有运动行程大、驱动电压低等优点。采用VCM驱动，可使快反镜系统转角范围大、承载能力强，且对振动、冲击等工作环境具有较强的适应性。在国防军工领域的系统中，大多采用音圈电机驱动的快反镜。Currently, fast reflex mirrors are mainly divided into two categories: piezoelectric ceramic (PZT) drive and voice coil motor (VCM) drive according to different driving methods. The advantages of the PZT driver are simple structure, small size, high resolution, fast response, large thrust, low heat generation, and no stray electromagnetic field. The disadvantage is that its stroke is relatively small, only tens of microns, which cannot be achieved when used in fast mirrors. Large turning range. PZT also has the disadvantages of hysteresis characteristics and poor low temperature resistance. The voice coil motor is a drive motor based on the Lorentz force principle. Its working principle is that a energized coil (conductor) will generate a force when placed in a magnetic field. The size of the force is proportional to the current applied to the coil. Usually composed of magnetic cylinders, coils, etc., it has the advantages of large motion stroke and low driving voltage. The use of VCM drive enables the fast mirror system to have a large rotation angle range, strong load-bearing capacity, and strong adaptability to working environments such as vibration and impact. In the systems in the field of national defense and military industry, most of the fast mirrors driven by voice coil motors are used.
传统快反镜由于运动部件转动惯量低，能够实现较高的扫描速度，但是用于扫描补偿应用中，长时间的小范围高速往复运动，会使得轴承寿命很低，很快就发生磨损，从而使系统的精度降低。轴承的耐高低温特性不好。Traditional fast mirrors can achieve high scanning speeds due to the low moment of inertia of moving parts. However, when used in scanning compensation applications, long-term small-scale high-speed reciprocating motion will cause the bearing life to be very short and wear out quickly, thus Reduce the accuracy of the system. The high and low temperature resistance of bearings is not good.
传统大口径快反镜以及小口径快反镜很难同时满足大转角以及高带宽这两个指标。It is difficult for traditional large-diameter fast reflex mirrors and small-diameter fast reflex mirrors to meet the two indicators of large rotation angle and high bandwidth at the same time.
发明内容Contents of the invention
本发明的目的是提供一种阵列快反镜，可以同时实现大角度偏转和高带宽，可满足不同场景下的应用需要。The purpose of the present invention is to provide an array fast reflection mirror that can achieve large-angle deflection and high bandwidth at the same time, and can meet application needs in different scenarios.
为解决上述问题，本发明的第一方面提供了一种阵列快反镜，其特征在于，包括：镜托、多个小型反射镜组件和控制装置；In order to solve the above problems, the first aspect of the present invention provides an array fast reflector, characterized in that it comprises: a mirror holder, a plurality of small reflector assemblies and a control device;
多个所述小型反射镜组件设置于所述镜托的一个端面；A plurality of the small reflector assemblies are arranged on an end surface of the mirror holder;
所述控制装置与所述镜托连接并能够驱动所述镜托相对于所述镜托的初始位置所在平面倾斜相应角度以带动多个所述小型反射镜组件同步移动；The control device is connected to the mirror holder and can drive the mirror holder to tilt at a corresponding angle relative to the plane where the initial position of the mirror holder is located to drive a plurality of the small mirror assemblies to move synchronously;
所述控制装置分别与每个所述小型反射镜组件连接并控制每个所述小型反射镜组件的镜面所在平面相对于其镜面初始位置倾斜相应角度。The control device is connected to each of the small reflector assemblies respectively and controls the plane where the mirror surface of each of the small reflector assemblies is located to tilt at a corresponding angle relative to the initial position of the mirror surface.
优选地，所述小型反射镜组件包括：反射镜本体和驱动单元；Preferably, the small reflector assembly comprises: a reflector body and a driving unit;
所述驱动单元设置在所述镜托上，所述驱动单元的输出端与所述反射镜本体连接，所述驱动单元依据控制信号控制对应的所述小型反射镜组件相对于所述小型反射镜组件所在平面倾斜相应角度。The driving unit is arranged on the mirror holder, the output end of the driving unit is connected to the mirror body, and the driving unit controls the corresponding small mirror assembly relative to the small mirror according to the control signal. The plane on which the component is located is tilted at a corresponding angle.
优选地，每相邻的两个所述小型反射镜组件上的所述反射镜本体之间均具有气隙。Preferably, there is an air gap between the reflector bodies on each two adjacent small reflector assemblies.
优选地，所述反射镜本体的形状为正六边形。Preferably, the shape of the reflector body is a regular hexagon.
优选地，多个所述小型反射镜组件呈规则排列。Preferably, a plurality of the small mirror assemblies are arranged regularly.
优选地，所述阵列快反镜还包括：基座和柔性铰链组件；Preferably, the array fast reflection mirror further comprises: a base and a flexible hinge assembly;
所述柔性铰链组件的一端连接所述镜托，另一端连接所述基座；One end of the flexible hinge assembly is connected to the mirror holder, and the other end is connected to the base;
所述控制装置包括安装于所述基座上的驱动组件，所述驱动组件用于驱动所述镜托相对于其初始位置所在平面倾斜相应角度。The control device comprises a driving assembly mounted on the base, and the driving assembly is used to drive the mirror holder to tilt at a corresponding angle relative to the plane where the mirror holder is located at an initial position.
优选地，所述柔性铰链组件至少一个十字交叉式柔性铰链；Preferably, the flexible hinge assembly comprises at least one cross-type flexible hinge;
当所述十字交叉式柔性铰链的数量为一个时，所述十字交叉式柔性铰链的顶部与所述镜托的底部连接，所述十字交叉式柔性铰链的底部设置在所述基座中心位置；When the number of the crisscross flexible hinge is one, the top of the crisscross flexible hinge is connected to the bottom of the mirror holder, and the bottom of the crisscross flexible hinge is arranged at the center of the base;
当所述十字交叉式柔性铰链的数量为多个时，多个所述十字交叉式柔性铰链层叠设置，位于最上层的所述十字交叉式柔性铰链的顶部与所述镜托的底部连接，位于最下层的所述十字交叉式柔性铰链的底部设置在所述基座中心位置。When the number of the cross-type flexible hinges is multiple, a plurality of the cross-type flexible hinges are arranged in a stack, and the top of the uppermost cross-type flexible hinge is connected to the bottom of the mirror holder. The bottom of the lowermost cross-type flexible hinge is disposed at the center of the base.
优选地，所述驱动组件包括若干个音圈电机；Preferably, the driving assembly comprises a plurality of voice coil motors;
所述基座朝向所述镜托的端面设有与所述音圈电机一一对应的音圈电机槽；The end surface of the base facing the mirror holder is provided with a voice coil motor slot corresponding to the voice coil motor;
每个所述音圈电机设置于对应的所述音圈电机槽内，所有音圈电机用于驱动所述镜托相对于所述镜托的初始位置所在平面倾斜相应角度。Each voice coil motor is disposed in a corresponding voice coil motor slot, and all voice coil motors are used to drive the mirror holder to tilt at a corresponding angle relative to the plane where the mirror holder's initial position is.
优选地，所述阵列快反镜还包括多对电涡流探头；Preferably, the array fast mirror also includes multiple pairs of eddy current probes;
多对所述电涡流探头安装于所述基座朝向所述镜托的端面；A plurality of pairs of the eddy current probes are installed on the end surface of the base facing the mirror holder;
每一对所述电涡流探头用于测量所述镜托在两个所述电涡流探头连线所在方向上的倾斜角度。Each pair of the eddy current probes is used to measure the inclination angle of the mirror holder in the direction where the two eddy current probes are connected.
优选地，所述阵列快反镜还包括至少一个限位块；Preferably, the array fast reflex mirror further includes at least one limiting block;
所述基座朝向所述镜托设有与所述限位块一一对应的限位块凹槽；The base is provided with a limiting block groove corresponding to the limiting block one-to-one toward the mirror holder;
至少一个所述限位块安装于对应的所述限位块凹槽内，至少一个所述限位块用于限制所述镜托的转动角度。At least one of the limiting blocks is installed in the corresponding limiting block groove, and at least one of the limiting blocks is used to limit the rotation angle of the mirror holder.
本发明的上述技术方案具有如下有益的技术效果：The above technical solution of the present invention has the following beneficial technical effects:
本发明提供的阵列快反镜采用镜托和多个小型反射镜组件配合，将多个小型反射镜组件设置于镜托上，通过镜托实现大转角，小型反射镜组件的转动惯量低，可以实现小范围高速往复运动，可实现高带宽，综上所述，本发明提供的阵列快反镜可以同时实现大角度偏转和高带宽，可满足不同场景下的应用需要。The array fast reflex mirror provided by the present invention adopts a mirror holder and multiple small mirror assemblies to cooperate. Multiple small mirror assemblies are arranged on the mirror holder, and a large rotation angle is achieved through the mirror holder. The small mirror assembly has a low moment of inertia and can Achieving small-range high-speed reciprocating motion can achieve high bandwidth. To sum up, the array fast mirror provided by the present invention can simultaneously achieve large-angle deflection and high bandwidth, which can meet application needs in different scenarios.
采用柔性铰链组件作为柔性支撑，相比于滚珠轴承具有较长的寿命，具有较好的耐高低温特性。无润滑剂，可用于真空，同时转角范围也足够大。The flexible hinge component is used as a flexible support, which has a longer life than ball bearings and has better high and low temperature resistance. It is lubricant-free, can be used under vacuum, and has a wide angle range.
在基座内部布置电涡流探头结构，从而减小了快反镜的总体高度，结构更紧凑。The eddy current probe structure is arranged inside the base, thereby reducing the overall height of the fast reflector and making the structure more compact.
附图说明Description of the drawings
图1示出了本发明一个实施方式的阵列快反镜的分解结构示意图。Figure 1 shows a schematic exploded structural view of an array fast mirror according to an embodiment of the present invention.
图2示出了本发明一个实施方式的阵列快反镜的俯视示意图。FIG. 2 shows a schematic top view of an array fast reflector according to an embodiment of the present invention.
图3示出了本发明一个实施方式的阵列快反镜立体结构示意图。Figure 3 shows a schematic three-dimensional structural diagram of an array fast reflector according to an embodiment of the present invention.
图4示出了本发明一个实施方式的基体俯视示意图。Figure 4 shows a schematic top view of the base body according to one embodiment of the present invention.
图5示出了本发明另一个实施方式的阵列快反镜立体结构示意图。FIG. 5 shows a schematic diagram of a three-dimensional structure of an array fast reflection mirror according to another embodiment of the present invention.
附图标记说明：Explanation of reference symbols:
1-镜托；2-反射镜本体；3-气隙；4-基座；5-音圈电机；6-音圈电机槽；7-电涡流探头；8-十字交叉式柔性铰链；9-限位块；10-驱动单元。1-Mirror holder; 2-Mirror body; 3-Air gap; 4-Base; 5-Voice coil motor; 6-Voice coil motor slot; 7-Eddy current probe; 8-Cross flexible hinge; 9- Limit block; 10-drive unit.
具体实施方式Detailed ways
为使本发明的目的、技术方案和优点更加清楚明了，下面结合具体实施方式并参照附图，对本发明进一步详细说明。应该理解，这些描述只是示例性的，而并非要限制本发明的范围。此外，在以下说明中，省略了对公知结构和技术的描述，以避免不必要地混淆本发明的概念。In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention is further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are only exemplary and are not intended to limit the scope of the present invention. In addition, in the following description, the description of well-known structures and technologies is omitted to avoid unnecessary confusion of the concept of the present invention.
显然，所描述的实施例是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.
此外，下面所描述的本发明不同实施方式中所涉及的技术特征只要彼此之间未构成冲突就可以相互结合。In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
以下将参照附图更详细地描述本发明。在各个附图中，相同的元件采用类似的附图标记来表示。为了清楚起见，附图中的各个部分没有按比例绘制。The invention will be described in more detail below with reference to the accompanying drawings. In the various drawings, identical elements are designated with similar reference numerals. For the sake of clarity, parts of the figures are not drawn to scale.
快速控制反射镜（Fast Steering Mirror，FSM），简称快反镜，是控制反射镜的转动从而使反射光束在一维或二维方向上，对光传播方向进行高精度、高动态的控制，实现光束在所需转角范围内的快速精确指向，应用在激光制导、光电侦查、光电对抗、激光武器、空间探测、激光雷达、激光通信等领域中实现系统精密跟踪、稳瞄、稳像等。采用快反镜替代传统的框架结构，可改善系统的性能，上述领域通常要求快反镜具有较高的工作带宽、角分辨率、指向精度和转角范围，对系统的环境适应性等也有很高要求。Fast Steering Mirror (FSM), referred to as fast mirror, controls the rotation of the mirror so that the reflected light beam can be controlled in one or two dimensions with high precision and high dynamics to control the direction of light propagation, and realize fast and accurate pointing of the light beam within the required angular range. It is used in laser guidance, optoelectronic reconnaissance, optoelectronic countermeasures, laser weapons, space detection, laser radar, laser communication and other fields to realize system precision tracking, stabilization of aiming and image, etc. Using fast mirrors to replace traditional frame structures can improve the performance of the system. The above fields usually require fast mirrors to have high working bandwidth, angular resolution, pointing accuracy and angular range, and also have high requirements for the environmental adaptability of the system.
当前快反镜中主要根据驱动方式的不同分为压电陶瓷（PZT）驱动和音圈电机（VCM）驱动两大类。PZT驱动器的优点是结构简单、体积小、分辨率高、响应快、推力大、发热少、无杂散电磁场，缺点是其行程相对较小，只有几十微米，用于快反镜中无法实现较大转角范围。PZT还存在迟滞特性、耐低温性能差的缺点。音圈电机是基于洛伦兹力原理制造的一种驱动电机，其工作原理是通电线圈(导体)放在磁场内就会产生力，力的大小与施加在线圈上的电流成比例。通常由磁缸、线圈等组成，具有运动行程大、驱动电压低等优点。采用VCM驱动，可使快反镜系统转角范围大、承载能力强，且对振动、冲击等工作环境具有较强的适应性。在国防军工领域的系统中，大多采用音圈电机驱动的快反镜。Currently, fast reflex mirrors are mainly divided into two categories: piezoelectric ceramic (PZT) drive and voice coil motor (VCM) drive according to different driving methods. The advantages of the PZT driver are simple structure, small size, high resolution, fast response, large thrust, low heat generation, and no stray electromagnetic field. The disadvantage is that its stroke is relatively small, only tens of microns, which cannot be achieved when used in fast mirrors. Large turning range. PZT also has the disadvantages of hysteresis characteristics and poor low temperature resistance. The voice coil motor is a drive motor based on the Lorentz force principle. Its working principle is that a energized coil (conductor) will generate a force when placed in a magnetic field. The size of the force is proportional to the current applied to the coil. Usually composed of magnetic cylinders, coils, etc., it has the advantages of large motion stroke and low driving voltage. The use of VCM drive enables the fast mirror system to have a large rotation angle range, strong load-bearing capacity, and strong adaptability to working environments such as vibration and impact. In the systems in the field of national defense and military industry, most of the fast mirrors driven by voice coil motors are used.
传统快反镜由于运动部件转动惯量低，能够实现较高的扫描速度，但是用于扫描补偿应用中，长时间的小范围高速往复运动，会使得轴承寿命很低，很快就发生磨损，从而使系统的精度降低。轴承的耐高低温特性不好。Traditional fast mirrors can achieve high scanning speeds due to the low moment of inertia of moving parts. However, when used in scanning compensation applications, long-term small-scale high-speed reciprocating motion will cause the bearing life to be very short and wear out quickly, thus Reduce the accuracy of the system. The high and low temperature resistance of bearings is not good.
传统大口径快反镜以及小口径快反镜很难同时满足大转角以及高带宽这两个指标。It is difficult for traditional large-diameter fast reflex mirrors and small-diameter fast reflex mirrors to meet the two indicators of large rotation angle and high bandwidth at the same time.
为了解决上述问题，本发明提供了一种阵列快反镜，用于解决上述问题。In order to solve the above problems, the present invention provides an array fast reflex mirror to solve the above problems.
实施例1Example 1
参照图1-5，本发明的一个实施方式中提供的阵列快反镜，包括：镜托1、多个小型反射镜组件和控制装置；多个小型反射镜组件设置于镜托1的一个端面；控制装置与镜托1连接并能够驱动镜托1相对于镜托1的初始位置所在平面倾斜相应角度以带动多个小型反射镜组件同步移动；控制装置分别与每个小型反射镜组件连接并控制每个小型反射镜组件的镜面所在平面相对于其镜面初始位置倾斜相应角度。Referring to Figures 1-5, an array fast reflex mirror provided in one embodiment of the present invention includes: a mirror holder 1, a plurality of small mirror assemblies and a control device; a plurality of small mirror assemblies are arranged on one end surface of the mirror holder 1 ; The control device is connected to the mirror holder 1 and can drive the mirror holder 1 to tilt at a corresponding angle relative to the plane where the initial position of the mirror holder 1 is located to drive multiple small mirror assemblies to move synchronously; the control device is connected to each small mirror assembly respectively and The plane of the mirror surface of each small mirror assembly is controlled to tilt at a corresponding angle relative to the initial position of the mirror surface.
同时，控制装置设置于基座4内部，都采用轻量化结构设计，这里不做特意说明。At the same time, the control device is arranged inside the base 4, and adopts a lightweight structural design, which is not specifically explained here.
本发明提供的阵列快反镜采用镜托1和多个小型反射镜组件配合，将多个小型反射镜组件设置于镜托1上，通过镜托1实现大转角，小型反射镜组件的转动惯量低，可以实现小范围高速往复运动，可实现高带宽，综上，本发明提供的阵列快反镜可以同时实现大角度偏转和高带宽，可满足不同场景下的应用需要。The array fast reflex mirror provided by the present invention uses a mirror holder 1 and a plurality of small mirror assemblies to cooperate. The plurality of small mirror assemblies are arranged on the mirror holder 1, and a large rotation angle is achieved through the mirror holder 1, and the rotational inertia of the small mirror assemblies is Low, high-speed reciprocating movement in a small range can be achieved, and high bandwidth can be achieved. In summary, the array fast mirror provided by the present invention can simultaneously achieve large-angle deflection and high bandwidth, and can meet application needs in different scenarios.
实施例2Example 2
参照图1-5，本发明的一个实施方式中提供的阵列快反镜，包括：镜托1、多个小型反射镜组件和控制装置；多个小型反射镜组件设置于镜托1的一个端面；控制装置与镜托1连接并能够驱动镜托1相对于镜托1的初始位置所在平面倾斜相应角度以带动多个小型反射镜组件同步移动；控制装置分别与每个小型反射镜组件连接并控制每个小型反射镜组件的镜面所在平面相对于其镜面初始位置倾斜相应角度。Referring to Figures 1-5, an array fast reflex mirror provided in one embodiment of the present invention includes: a mirror holder 1, a plurality of small mirror assemblies and a control device; a plurality of small mirror assemblies are arranged on one end surface of the mirror holder 1 ; The control device is connected to the mirror holder 1 and can drive the mirror holder 1 to tilt at a corresponding angle relative to the plane where the initial position of the mirror holder 1 is located to drive multiple small mirror assemblies to move synchronously; the control device is connected to each small mirror assembly respectively and The plane of the mirror surface of each small mirror assembly is controlled to tilt at a corresponding angle relative to the initial position of the mirror surface.
作为优选的实施方式，小型反射镜组件包括：反射镜本体2和驱动单元10；驱动单元10设置在镜托1上，驱动单元10的输出端与反射镜本体2连接，驱动单元10依据控制信号控制对应的小型反射镜组件相对于小型反射镜组件所在平面倾斜相应角度。As a preferred embodiment, the small mirror assembly includes: a mirror body 2 and a driving unit 10; the driving unit 10 is arranged on the mirror holder 1, and the output end of the driving unit 10 is connected to the mirror body 2. The driving unit 10 responds to the control signal Control the corresponding small mirror assembly to tilt at a corresponding angle relative to the plane where the small mirror assembly is located.
进一步的，相邻的两个小型反射镜组件上的反射镜本体2之间具有气隙3。反射镜本体2为正六边形。多个小型反射镜组件呈规则排列。Furthermore, there is an air gap 3 between the mirror bodies 2 on two adjacent small mirror assemblies. The reflector body 2 is in the shape of a regular hexagon. Multiple small mirror assemblies are arranged regularly.
多个小型反射镜组件呈规则排列指的是多个小型反射镜组件按照一种有序、重复或对称的方式进行布局，例如线性排列、对称排列、网格排列或有序的辐射状排列等，例如图1和2所示的结构中，七个小型反射镜组件中的一个位于中心，其他六个小型反射镜组件呈一个环形且均匀绕设于位于中心的小型反射镜组件的四周，当然，作为替代性地，小型反射镜组件的数量可以更多，环形也可以设置为多个且由内向外依次设置，这种结构的变化不偏离本发明的发明构思，也属于本发明的保护范围。The regular arrangement of multiple small reflector assemblies refers to the arrangement of multiple small reflector assemblies in an orderly, repetitive or symmetrical manner, such as linear arrangement, symmetrical arrangement, grid arrangement or ordered radial arrangement, etc. , for example, in the structure shown in Figures 1 and 2, one of the seven small mirror assemblies is located in the center, and the other six small reflector assemblies are in a ring shape and evenly arranged around the small reflector assembly in the center. Of course, , as an alternative, the number of small mirror assemblies can be more, and the ring shape can also be provided in multiples and arranged sequentially from the inside to the outside. Such structural changes do not deviate from the inventive concept of the present invention and also belong to the protection scope of the present invention. .
进一步的，反射镜本体2之间的气隙3宽度为1-2mm。Furthermore, the width of the air gap 3 between the reflector bodies 2 is 1-2 mm.
进一步的，反射镜本体2边长为40mm。Further, the length of the two sides of the reflector body is 40mm.
驱动单元10能控制反射镜本体2在两个维度运动。The driving unit 10 can control the movement of the mirror body 2 in two dimensions.
实施例3Example 3
参照图1-5，本发明的一个实施方式中提供的阵列快反镜，包括：镜托1、多个小型反射镜组件和控制装置；多个小型反射镜组件设置于镜托1的一个端面；控制装置与镜托1连接并能够驱动镜托1相对于镜托1的初始位置所在平面倾斜相应角度以带动多个小型反射镜组件同步移动；控制装置分别与每个小型反射镜组件连接并控制每个小型反射镜组件的镜面所在平面相对于其镜面初始位置倾斜相应角度。Referring to Figures 1-5, an array fast reflex mirror provided in one embodiment of the present invention includes: a mirror holder 1, a plurality of small mirror assemblies and a control device; a plurality of small mirror assemblies are arranged on one end surface of the mirror holder 1 ; The control device is connected to the mirror holder 1 and can drive the mirror holder 1 to tilt at a corresponding angle relative to the plane where the initial position of the mirror holder 1 is located to drive multiple small mirror assemblies to move synchronously; the control device is connected to each small mirror assembly respectively and The plane of the mirror surface of each small mirror assembly is controlled to tilt at a corresponding angle relative to the initial position of the mirror surface.
小型反射镜组件包括：反射镜本体2和驱动单元10；驱动单元10设置在镜托1上，驱动单元10的输出端与反射镜本体2连接，驱动单元10依据控制信号控制对应的小型反射镜组件相对于小型反射镜组件所在平面倾斜相应角度。The small reflector assembly includes: a reflector body 2 and a driving unit 10; the driving unit 10 is arranged on the mirror support 1, and the output end of the driving unit 10 is connected to the reflector body 2. The driving unit 10 controls the corresponding small reflector assembly to tilt at a corresponding angle relative to the plane where the small reflector assembly is located according to a control signal.
阵列快反镜还包括：基座4和柔性铰链组件；柔性铰链组件的一端连接镜托1，另一端连接基座4。The array fast reflex mirror also includes: a base 4 and a flexible hinge assembly; one end of the flexible hinge assembly is connected to the mirror holder 1, and the other end is connected to the base 4.
控制装置包括安装于基座4上的驱动组件，驱动组件用于驱动镜托1相对于其初始位置所在平面倾斜相应角度。The control device includes a driving component installed on the base 4. The driving component is used to drive the lens holder 1 to tilt at a corresponding angle relative to the plane where its initial position is.
具体而言，镜托1位于基座4上方，呈规则多边形形状，且主边边长为400mm。Specifically, the lens holder 1 is located above the base 4, has a regular polygon shape, and has a main side length of 400 mm.
在本实施例提供的阵列快反镜中，镜托1与基座4采用铰链组件支撑，相比于滚珠轴承具有较长的寿命，具有较好的耐高低温特性。无润滑剂，可在真空环境中使用。In the array fast reflex mirror provided in this embodiment, the mirror holder 1 and the base 4 are supported by hinge components, which have a longer life than ball bearings and have better high and low temperature resistance. No lubricants and can be used in vacuum environments.
实施例4Example 4
参照图1-5，本发明的一个实施方式中提供的阵列快反镜，包括：镜托1、多个小型反射镜组件和控制装置；多个小型反射镜组件设置于镜托1的一个端面；控制装置与镜托1连接并能够驱动镜托1相对于镜托1的初始位置所在平面倾斜相应角度以带动多个小型反射镜组件同步移动；控制装置分别与每个小型反射镜组件连接并控制每个小型反射镜组件的镜面所在平面相对于其镜面初始位置倾斜相应角度。Referring to Figures 1-5, an array fast reflex mirror provided in one embodiment of the present invention includes: a mirror holder 1, a plurality of small mirror assemblies and a control device; a plurality of small mirror assemblies are arranged on one end surface of the mirror holder 1 ; The control device is connected to the mirror holder 1 and can drive the mirror holder 1 to tilt at a corresponding angle relative to the plane where the initial position of the mirror holder 1 is located to drive multiple small mirror assemblies to move synchronously; the control device is connected to each small mirror assembly respectively and The plane of the mirror surface of each small mirror assembly is controlled to tilt at a corresponding angle relative to the initial position of the mirror surface.
小型反射镜组件包括：反射镜本体2和驱动单元10；驱动单元10设置在镜托1上，驱动单元10的输出端与反射镜本体2连接，驱动单元10依据控制信号控制对应的小型反射镜组件相对于小型反射镜组件所在平面倾斜相应角度。The small mirror assembly includes: a mirror body 2 and a driving unit 10; the driving unit 10 is arranged on the mirror holder 1; the output end of the driving unit 10 is connected to the mirror body 2; the driving unit 10 controls the corresponding small mirror according to the control signal The assembly is tilted at a corresponding angle relative to the plane of the small mirror assembly.
阵列快反镜还包括：基座4和柔性铰链组件；柔性铰链组件的一端连接镜托1，另一端连接基座4。The array fast reflex mirror also includes: a base 4 and a flexible hinge assembly; one end of the flexible hinge assembly is connected to the mirror holder 1, and the other end is connected to the base 4.
控制装置包括安装于基座4上的驱动组件，驱动组件用于驱动镜托1相对于其初始位置所在平面倾斜相应角度。The control device includes a driving component installed on the base 4. The driving component is used to drive the lens holder 1 to tilt at a corresponding angle relative to the plane where its initial position is.
作为优选的实施方式，柔性铰链组件包括至少一个十字交叉式柔性铰链8；As a preferred embodiment, the flexible hinge assembly includes at least one crisscross flexible hinge 8;
当十字交叉式柔性铰链8的数量为一个时，十字交叉式柔性铰链8的顶部与镜托1的底部连接，十字交叉式柔性铰链8的底部设置在基座4中心位置；When the number of the cross-type flexible hinge 8 is one, the top of the cross-type flexible hinge 8 is connected to the bottom of the mirror holder 1, and the bottom of the cross-type flexible hinge 8 is arranged at the center of the base 4;
当十字交叉式柔性铰链8的数量为多个时，多个十字交叉式柔性铰链8层叠设置，位于最上层的十字交叉式柔性铰链8的顶部与镜托1的底部连接，位于最下层的十字交叉式柔性铰链8的底部设置在基座4中心位置。When the number of the cross-type flexible hinges 8 is multiple, the plurality of cross-type flexible hinges 8 are arranged in a stack. The top of the cross-type flexible hinge 8 located on the uppermost layer is connected to the bottom of the lens holder 1 , and the cross-type flexible hinges 8 located on the lowermost layer are connected to the bottom of the lens holder 1 . The bottom of the cross-type flexible hinge 8 is arranged at the center of the base 4 .
进一步的，柔性铰链相比于滚珠轴承具有较长的寿命，具有较好的耐高低温特性。不需要润滑剂，可用于真空环境中。实际中采用两个十字交叉式柔性支撑组合作为振镜的柔性支撑。Furthermore, flexible hinges have a longer life than ball bearings and have better high and low temperature resistance. No lubricants are required and can be used in vacuum environments. In practice, two crisscross flexible support combinations are used as the flexible support of the galvanometer.
进一步的，十字交叉式柔性铰链8可以选用的材料主要有钛合金、铍青铜、不锈钢等；Furthermore, the materials that can be used for the cross-type flexible hinge 8 mainly include titanium alloy, beryllium bronze, stainless steel, etc.;
进一步的，一对十字交叉式柔性铰链8采用相互垂直的弹性片实现反射镜主镜的设定角度偏转。Furthermore, a pair of cross-type flexible hinges 8 use mutually perpendicular elastic pieces to realize the set angle deflection of the main mirror of the reflector.
实施例5Example 5
本发明的一个实施方式中提供的阵列快反镜，包括：镜托1、多个小型反射镜组件和控制装置；多个小型反射镜组件设置于镜托1的一个端面；控制装置与镜托1连接并能够驱动镜托1相对于镜托1的初始位置所在平面倾斜相应角度以带动多个小型反射镜组件同步移动；控制装置分别与每个小型反射镜组件连接并控制每个小型反射镜组件的镜面所在平面相对于其镜面初始位置倾斜相应角度。An array fast reflex mirror provided in one embodiment of the present invention includes: a mirror holder 1, a plurality of small mirror assemblies and a control device; a plurality of small mirror assemblies are arranged on one end face of the mirror holder 1; the control device and the mirror holder 1 is connected and can drive the mirror holder 1 to tilt at a corresponding angle relative to the plane where the initial position of the mirror holder 1 is located to drive multiple small mirror assemblies to move synchronously; the control device is connected to each small mirror assembly and controls each small mirror. The plane where the mirror surface of the component is located is tilted at a corresponding angle relative to the initial position of the mirror surface.
小型反射镜组件包括：反射镜本体2和驱动单元10；驱动单元10设置在镜托1上，驱动单元10的输出端与反射镜本体2连接，驱动单元10依据控制信号控制对应的小型反射镜组件相对于小型反射镜组件所在平面倾斜相应角度。The small mirror assembly includes: a mirror body 2 and a driving unit 10; the driving unit 10 is arranged on the mirror holder 1; the output end of the driving unit 10 is connected to the mirror body 2; the driving unit 10 controls the corresponding small mirror according to the control signal The assembly is tilted at a corresponding angle relative to the plane of the small mirror assembly.
阵列快反镜还包括：基座4和柔性铰链组件；柔性铰链组件的一端连接镜托1，另一端连接基座4。The array fast reflex mirror also includes: a base 4 and a flexible hinge assembly; one end of the flexible hinge assembly is connected to the mirror holder 1, and the other end is connected to the base 4.
控制装置包括安装于基座4上的驱动组件，驱动组件用于驱动镜托1相对于其初始位置所在平面倾斜相应角度。The control device includes a driving component installed on the base 4. The driving component is used to drive the lens holder 1 to tilt at a corresponding angle relative to the plane where its initial position is.
作为优选的实施方式，驱动组件包括若干个音圈电机5；基座4朝向镜托1的端面设有与音圈电机5一一对应的音圈电机槽6；每个音圈电机5设置于音圈电机槽6内，所有音圈电机5用于驱动镜托1相对于镜托1初始位置所在平面倾斜相应角度。As a preferred embodiment, the driving assembly includes a plurality of voice coil motors 5; the end surface of the base 4 facing the mirror support 1 is provided with voice coil motor grooves 6 corresponding to the voice coil motors 5 one by one; each voice coil motor 5 is arranged in the voice coil motor groove 6, and all voice coil motors 5 are used to drive the mirror support 1 to tilt at a corresponding angle relative to the plane where the mirror support 1 is initially located.
音圈电机5包括线圈和磁钢，放置于音圈电机槽6内，音圈电机5有4个，每2个为一对，连接为一条直线，驱动镜托1在直线所在的方向上转动。The voice coil motor 5 includes a coil and a magnet, and is placed in the voice coil motor slot 6. There are four voice coil motors 5, and every two are a pair, connected as a straight line, and drive the mirror holder 1 to rotate in the direction of the straight line. .
在本发明的实施例中，通过在述基座4内设置音圈电机槽6，将音圈电机5设置在音圈电机槽6内，降低了整体高度，提高了空间利用率。In the embodiment of the present invention, by providing the voice coil motor slot 6 in the base 4 and disposing the voice coil motor 5 in the voice coil motor slot 6, the overall height is reduced and the space utilization is improved.
实施例6Example 6
参照图1-5，本发明的一个实施方式中提供的阵列快反镜，包括：镜托1、多个小型反射镜组件和控制装置；多个小型反射镜组件设置于镜托1的一个端面；控制装置与镜托1连接并能够驱动镜托1相对于镜托1的初始位置所在平面倾斜相应角度以带动多个小型反射镜组件同步移动；控制装置分别与每个小型反射镜组件连接并控制每个小型反射镜组件的镜面所在平面相对于其镜面初始位置倾斜相应角度。Referring to Figures 1-5, an array fast reflex mirror provided in one embodiment of the present invention includes: a mirror holder 1, a plurality of small mirror assemblies and a control device; a plurality of small mirror assemblies are arranged on one end surface of the mirror holder 1 ; The control device is connected to the mirror holder 1 and can drive the mirror holder 1 to tilt at a corresponding angle relative to the plane where the initial position of the mirror holder 1 is located to drive multiple small mirror assemblies to move synchronously; the control device is connected to each small mirror assembly respectively and The plane of the mirror surface of each small mirror assembly is controlled to tilt at a corresponding angle relative to the initial position of the mirror surface.
小型反射镜组件包括：反射镜本体2和驱动单元10；驱动单元10设置在镜托1上，驱动单元10的输出端与反射镜本体2连接，驱动单元10依据控制信号控制对应的小型反射镜组件相对于小型反射镜组件所在平面倾斜相应角度。The small mirror assembly includes: a mirror body 2 and a driving unit 10; the driving unit 10 is arranged on the mirror holder 1; the output end of the driving unit 10 is connected to the mirror body 2; the driving unit 10 controls the corresponding small mirror according to the control signal The assembly is tilted at a corresponding angle relative to the plane of the small mirror assembly.
阵列快反镜还包括：基座4和柔性铰链组件；柔性铰链组件的一端连接镜托1，另一端连接基座4。The array fast reflex mirror also includes: a base 4 and a flexible hinge assembly; one end of the flexible hinge assembly is connected to the mirror holder 1, and the other end is connected to the base 4.
控制装置包括安装于基座4上的驱动组件，驱动组件用于驱动镜托1相对于其初始位置所在平面倾斜相应角度。The control device includes a driving component installed on the base 4. The driving component is used to drive the lens holder 1 to tilt at a corresponding angle relative to the plane where its initial position is.
作为优选的实施方式，还包括多对电涡流探头7；多对电涡流探头7安装于基座4朝向镜托1的端面；每一对电涡流探头7包括两个电涡流探头7；每一对电涡流探头7用于测量镜托1在两个电涡流探头7连线所在方向上的倾斜角度。As a preferred embodiment, it also includes multiple pairs of eddy current probes 7; multiple pairs of eddy current probes 7 are installed on the end surface of the base 4 facing the mirror holder 1; each pair of eddy current probes 7 includes two eddy current probes 7; The pair of eddy current probes 7 is used to measure the tilt angle of the mirror holder 1 in the direction where the two eddy current probes 7 are connected.
具体而言，电涡流探头7有4个，设置于音圈电机槽6旁，两两相对，在同一方向上采用2个电涡流探头进行差动测量，提高测量精度，从而减小温漂等对测量结果的影响。电涡流探头7设置在基座4内，减小了快反镜的总体高度，使结构更紧凑。Specifically, there are four eddy current probes 7, which are arranged next to the voice coil motor slot 6, facing each other. Two eddy current probes are used in the same direction for differential measurement to improve measurement accuracy, thereby reducing temperature drift, etc. influence on measurement results. The eddy current probe 7 is arranged in the base 4, which reduces the overall height of the fast reflector and makes the structure more compact.
实施例7Example 7
参照图1-5，本发明的一个实施方式中提供的阵列快反镜，包括：镜托1、多个小型反射镜组件和控制装置；多个小型反射镜组件设置于镜托1的一个端面；控制装置与镜托1连接并能够驱动镜托1相对于镜托1的初始位置所在平面倾斜相应角度以带动多个小型反射镜组件同步移动；控制装置分别与每个小型反射镜组件连接并控制每个小型反射镜组件的镜面所在平面相对于其镜面初始位置倾斜相应角度。Referring to Figures 1-5, an array fast reflex mirror provided in one embodiment of the present invention includes: a mirror holder 1, a plurality of small mirror assemblies and a control device; a plurality of small mirror assemblies are arranged on one end surface of the mirror holder 1 ; The control device is connected to the mirror holder 1 and can drive the mirror holder 1 to tilt at a corresponding angle relative to the plane where the initial position of the mirror holder 1 is located to drive multiple small mirror assemblies to move synchronously; the control device is connected to each small mirror assembly respectively and The plane where the mirror surface of each small mirror assembly is located is controlled to tilt at a corresponding angle relative to the initial position of the mirror surface.
小型反射镜组件包括：反射镜本体2和驱动单元10；驱动单元10设置在镜托1上，驱动单元10的输出端与反射镜本体2连接，驱动单元10依据控制信号控制对应的小型反射镜组件相对于小型反射镜组件所在平面倾斜相应角度。The small reflector assembly includes: a reflector body 2 and a driving unit 10; the driving unit 10 is arranged on the mirror support 1, and the output end of the driving unit 10 is connected to the reflector body 2. The driving unit 10 controls the corresponding small reflector assembly to tilt at a corresponding angle relative to the plane where the small reflector assembly is located according to a control signal.
阵列快反镜还包括：基座4和柔性铰链组件；柔性铰链组件的一端连接镜托1，另一端连接基座4。The array fast reflex mirror also includes: a base 4 and a flexible hinge assembly; one end of the flexible hinge assembly is connected to the mirror holder 1, and the other end is connected to the base 4.
控制装置包括安装于基座4上的驱动组件，驱动组件用于驱动镜托1相对于其初始位置所在平面倾斜相应角度。The control device includes a driving assembly installed on the base 4. The driving assembly is used to drive the lens holder 1 to tilt at a corresponding angle relative to the plane where its initial position is.
作为优选的实施方式，还包括至少一个限位块9；As a preferred embodiment, it also includes at least one limiting block 9;
基座4朝向镜托1设有与限位块9一一对应的限位块凹槽；The base 4 is provided with a limit block groove corresponding to the limit block 9 toward the mirror holder 1;
至少一个限位块9安装于限位块凹槽内，至少一个限位块（9）用于限制镜托1的倾斜角度。At least one limiter block 9 is installed in the limiter block groove, and at least one limiter block (9) is used to limit the inclination angle of the lens holder 1 .
在本实施例提供的阵列快反镜通过设置限位块9对镜托1的转动行程进行限位，避免由于转动角度过大造成柔性铰链组件损坏；通过将限位块9设置在限位块凹槽内，减小了高度。In the array quick reflex mirror provided in this embodiment, the rotation stroke of the mirror holder 1 is limited by setting the limit block 9 to avoid damage to the flexible hinge component due to an excessive rotation angle; by setting the limit block 9 on the limit block Within the groove, the height is reduced.
实施例8Example 8
参照图1-5，本发明的一个实施方式中提供的阵列快反镜，包括：镜托1、多个小型反射镜组件和控制装置；多个小型反射镜组件设置于镜托1的一个端面；控制装置与镜托1连接并能够驱动镜托1相对于镜托1的初始位置所在平面倾斜相应角度以带动多个小型反射镜组件同步移动；控制装置分别与每个小型反射镜组件连接并控制每个小型反射镜组件的镜面所在平面相对于其镜面初始位置倾斜相应角度。1-5, an array fast reflector provided in one embodiment of the present invention comprises: a mirror support 1, a plurality of small reflector assemblies and a control device; the plurality of small reflector assemblies are arranged on an end face of the mirror support 1; the control device is connected to the mirror support 1 and can drive the mirror support 1 to tilt at a corresponding angle relative to the plane where the initial position of the mirror support 1 is located so as to drive the plurality of small reflector assemblies to move synchronously; the control device is respectively connected to each small reflector assembly and controls the plane where the mirror surface of each small reflector assembly is located to tilt at a corresponding angle relative to the initial position of its mirror surface.
小型反射镜组件包括：反射镜本体2和驱动单元10；驱动单元10设置在镜托1上，驱动单元10的输出端与反射镜本体2连接，驱动单元10依据控制信号控制对应的小型反射镜组件相对于小型反射镜组件所在平面倾斜相应角度。The small mirror assembly includes: a mirror body 2 and a driving unit 10; the driving unit 10 is arranged on the mirror holder 1; the output end of the driving unit 10 is connected to the mirror body 2; the driving unit 10 controls the corresponding small mirror according to the control signal The assembly is tilted at a corresponding angle relative to the plane of the small mirror assembly.
作为优选的实施方式，镜托1和反射镜本体2均包括结构主体和表层；表层设置于结构主体和的外表面；结构主体的材料为铍、硅、熔融石英/石英、SiC、BK7、蓝宝石Al2O3、MgF2中的一种或多种；表层为金、保护银。As a preferred embodiment, the mirror holder 1 and the reflector body 2 both include a structural body and a surface layer; the surface layer is arranged on the outer surface of the structural body; the material of the structural body is one or more of beryllium, silicon, fused quartz/quartz, SiC, BK7, sapphire Al2O3, MgF2; the surface layer is gold and protective silver.
综上所述，本发明旨在保护一种阵列快反镜，阵列快反镜包括：镜托1、多个小型反射镜组件和控制装置；多个小型反射镜组件设置于镜托1的一个端面；控制装置与镜托1连接并能够驱动镜托1相对于镜托1的初始位置所在平面倾斜相应角度以带动多个小型反射镜组件同步移动；控制装置分别与每个小型反射镜组件连接并控制每个小型反射镜组件的镜面所在平面相对于其镜面初始位置倾斜相应角度。To sum up, the present invention aims to protect an array fast reflex mirror. The array fast reflex mirror includes: a mirror holder 1, a plurality of small mirror assemblies and a control device; a plurality of small mirror assemblies are arranged on one side of the mirror holder 1 End surface; the control device is connected to the mirror holder 1 and can drive the mirror holder 1 to tilt at a corresponding angle relative to the plane where the initial position of the mirror holder 1 is located to drive multiple small mirror assemblies to move synchronously; the control device is connected to each small mirror assembly respectively. And control the plane where the mirror surface of each small mirror assembly is located to tilt at a corresponding angle relative to the initial position of the mirror surface.
本发明实施例的有益效果是：The beneficial effects of the embodiments of the present invention are:
1.采用大口径镜托加小型小镜可满足不同场景下的应用需要，同时满足高带宽以及大转角的要求。1. The use of a large-diameter lens holder and a small mirror can meet the application needs in different scenarios, while meeting the requirements of high bandwidth and large turning angles.
2.采用十字交叉式柔性铰链作为柔性支撑，相比于滚珠轴承具有较长的寿命，具有较好的耐高低温特性；无需使用润滑剂，可用于真空环境，同时转角范围也足够大。2. The cross-type flexible hinge is used as a flexible support. Compared with ball bearings, it has a longer life and better resistance to high and low temperatures. It does not require the use of lubricants and can be used in vacuum environments. At the same time, the angle range is large enough.
3.在反射镜壳体内部布置电涡流转角测量结构，从而减小了快反镜的总体高度，结构更紧凑。3. The eddy current angle measurement structure is arranged inside the reflector housing, thereby reducing the overall height of the fast reflector and making the structure more compact.
应当理解的是，本发明的上述具体实施方式仅仅用于示例性说明或解释本发明的原理，而不构成对本发明的限制。因此，在不偏离本发明的精神和范围的情况下所做的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。此外，本发明所附权利要求旨在涵盖落入所附权利要求范围和边界、或者这种范围和边界的等同形式内的全部变化和修改例。It should be understood that the above-described specific embodiments of the present invention are only used to illustrate or explain the principles of the present invention, and do not constitute a limitation of the present invention. Therefore, any modifications, equivalent substitutions, improvements, etc. made without departing from the spirit and scope of the present invention shall be included in the protection scope of the present invention. Furthermore, it is intended that the appended claims of the present invention cover all changes and modifications that fall within the scope and boundaries of the appended claims, or equivalents of such scopes and boundaries.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410217613.4A CN117784399A (en) | 2024-02-28 | 2024-02-28 | An array fast reflex mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410217613.4A CN117784399A (en) | 2024-02-28 | 2024-02-28 | An array fast reflex mirror |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117784399A true CN117784399A (en) | 2024-03-29 |
Family
ID=90380229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410217613.4A Pending CN117784399A (en) | 2024-02-28 | 2024-02-28 | An array fast reflex mirror |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117784399A (en) |
Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101388625A (en) * | 2007-09-10 | 2009-03-18 | 上海华达运新能源科技有限公司 | Solar concentration electricity generating apparatus |
| WO2011069876A1 (en) * | 2009-12-08 | 2011-06-16 | Alcatel Lucent | An optical beam scanner |
| CN103543526A (en) * | 2013-09-29 | 2014-01-29 | 华中科技大学 | Array typed laser scanner |
| CN108449045A (en) * | 2018-04-24 | 2018-08-24 | 北京兆阳光热技术有限公司 | A kind of speculum module production method, structure, light focusing unit structure and power station |
| CN208953786U (en) * | 2018-12-11 | 2019-06-07 | 北京瑞控信科技有限公司 | A kind of quick reflex lens device based on the connection of cross flexible hinge |
| CN209233696U (en) * | 2018-11-19 | 2019-08-09 | 北京瑞控信科技有限公司 | A kind of voice coil motor and fast mirror |
| CN110955012A (en) * | 2019-11-18 | 2020-04-03 | 西安应用光学研究所 | Double-shaft stable and rapid reflecting mirror device based on flexible hinge |
| US20200355801A1 (en) * | 2017-08-21 | 2020-11-12 | Jenoptik Optical Systems Gmbh | Transmitting device for a lidar scanner having a scanning mirror covered by a cover element |
| US20210011132A1 (en) * | 2019-07-09 | 2021-01-14 | Microvision, Inc. | Arrayed MEMS Mirrors for Large Aperture Applications |
| CN113281898A (en) * | 2021-05-25 | 2021-08-20 | 中国科学院上海微系统与信息技术研究所 | MEMS micro-mirror unit and MEMS micro-mirror array |
| CN113805158A (en) * | 2020-06-17 | 2021-12-17 | 英飞凌科技股份有限公司 | MEMS scanner suspension system enabling high frequency and high mechanical tilt angle of large mirrors |
| WO2023061713A1 (en) * | 2021-10-14 | 2023-04-20 | Carl Zeiss Smt Gmbh | Multi-mirror array |
| CN116400476A (en) * | 2023-06-08 | 2023-07-07 | 北京瑞控信科技股份有限公司 | Moving coil type quick reflector based on flexible support |
| CN116449526A (en) * | 2023-06-16 | 2023-07-18 | 季华实验室 | Quick reflector device |
| CN117518397A (en) * | 2023-12-04 | 2024-02-06 | 西安交通大学 | A dual-driven fast reflector system and its adjustment method |
-
2024
- 2024-02-28 CN CN202410217613.4A patent/CN117784399A/en active Pending
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101388625A (en) * | 2007-09-10 | 2009-03-18 | 上海华达运新能源科技有限公司 | Solar concentration electricity generating apparatus |
| WO2011069876A1 (en) * | 2009-12-08 | 2011-06-16 | Alcatel Lucent | An optical beam scanner |
| CN103543526A (en) * | 2013-09-29 | 2014-01-29 | 华中科技大学 | Array typed laser scanner |
| US20200355801A1 (en) * | 2017-08-21 | 2020-11-12 | Jenoptik Optical Systems Gmbh | Transmitting device for a lidar scanner having a scanning mirror covered by a cover element |
| CN108449045A (en) * | 2018-04-24 | 2018-08-24 | 北京兆阳光热技术有限公司 | A kind of speculum module production method, structure, light focusing unit structure and power station |
| CN209233696U (en) * | 2018-11-19 | 2019-08-09 | 北京瑞控信科技有限公司 | A kind of voice coil motor and fast mirror |
| CN208953786U (en) * | 2018-12-11 | 2019-06-07 | 北京瑞控信科技有限公司 | A kind of quick reflex lens device based on the connection of cross flexible hinge |
| US20210011132A1 (en) * | 2019-07-09 | 2021-01-14 | Microvision, Inc. | Arrayed MEMS Mirrors for Large Aperture Applications |
| CN110955012A (en) * | 2019-11-18 | 2020-04-03 | 西安应用光学研究所 | Double-shaft stable and rapid reflecting mirror device based on flexible hinge |
| CN113805158A (en) * | 2020-06-17 | 2021-12-17 | 英飞凌科技股份有限公司 | MEMS scanner suspension system enabling high frequency and high mechanical tilt angle of large mirrors |
| CN113281898A (en) * | 2021-05-25 | 2021-08-20 | 中国科学院上海微系统与信息技术研究所 | MEMS micro-mirror unit and MEMS micro-mirror array |
| WO2023061713A1 (en) * | 2021-10-14 | 2023-04-20 | Carl Zeiss Smt Gmbh | Multi-mirror array |
| CN116400476A (en) * | 2023-06-08 | 2023-07-07 | 北京瑞控信科技股份有限公司 | Moving coil type quick reflector based on flexible support |
| CN116449526A (en) * | 2023-06-16 | 2023-07-18 | 季华实验室 | Quick reflector device |
| CN117518397A (en) * | 2023-12-04 | 2024-02-06 | 西安交通大学 | A dual-driven fast reflector system and its adjustment method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102323656B (en) | High-frequency response two-dimensional micro angular deflection control reflector based on double-shaft flexible hinge | |
| CN115097594B (en) | Large-caliber large-corner high-bandwidth voice coil motor fast-reflection mirror device | |
| CN103543526B (en) | A kind of array laser scanner | |
| CN100350280C (en) | Fast steering reflection mirror with giant magnetostrictive driver | |
| CN115097593B (en) | One-dimensional high-speed moving magnetic type flexible support quick reflector | |
| US20140198367A1 (en) | Translation Mirror Based Beam Steering Mechanism With Ultrahigh Frequency Response And High Sensitivity | |
| CN115356824B (en) | Quick reflector adopting fusing locking structure | |
| CN116400476A (en) | Moving coil type quick reflector based on flexible support | |
| CN110764072A (en) | Duplex bearing mirror and laser radar that shakes | |
| CN116430576A (en) | One-dimensional flexible supporting moving magnetic quick reflecting mirror | |
| CN102354050B (en) | Micro angular swing control reflecting mirror followed by flexible auxiliary arm with superhigh angular sensitivity and high frequency response | |
| CN112803711A (en) | Voice coil actuator for angular motion | |
| CN117784398B (en) | Two-dimensional large-angle moving-magnet type quick reflection mirror | |
| CN117784399A (en) | An array fast reflex mirror | |
| Marth et al. | Latest experience in design of piezoelectric-driven fine-steering mirrors | |
| CN115343825B (en) | High-bandwidth moving-iron type voice coil motor fast-reflection mirror device | |
| CN118259419A (en) | High-load quick reflector device | |
| US4831291A (en) | Differentially wound electromagnetic actuator | |
| KR20060124079A (en) | Scanning Micromirrors and Electromagnetic Driven 2-Axis Scanning Micromirror Devices | |
| US9500854B2 (en) | Beam steering mirror device | |
| CN111090083B (en) | Scanning galvanometer and laser radar | |
| CN116719145B (en) | Two-dimensional non-frame large-angle quick reflector | |
| ES2898459T3 (en) | Optical element positioning devices | |
| CN113009686A (en) | Multi-degree-of-freedom rotary control direct-push type quick reflecting mirror | |
| CN221124992U (en) | Moving iron type two-dimensional driving micro-vibrating mirror |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20240329 |
|
| RJ01 | Rejection of invention patent application after publication |