CN117784399A - Array quick reflection mirror - Google Patents
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- CN117784399A CN117784399A CN202410217613.4A CN202410217613A CN117784399A CN 117784399 A CN117784399 A CN 117784399A CN 202410217613 A CN202410217613 A CN 202410217613A CN 117784399 A CN117784399 A CN 117784399A
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Abstract
The invention discloses an array quick reflection mirror, which relates to the technical field of reflection mirrors and comprises the following components: a lens holder, a plurality of small-sized lens assemblies and a control device; the small-sized reflector assemblies are arranged on one end face of the reflector support; the control device is connected with the mirror support and can drive the mirror support to incline by a corresponding angle relative to a plane where an initial position of the mirror support is located so as to drive the plurality of small-sized mirror assemblies to synchronously move; the control device is respectively connected with each small-sized reflector assembly and controls the plane of the reflector of each small-sized reflector assembly to incline by a corresponding angle relative to the initial position of the reflector. The array quick reflection mirror provided by the invention adopts the mirror support to be matched with the plurality of small reflection mirror components, the plurality of small reflection mirror components are arranged on the mirror support, the large rotation angle is realized through the mirror support, the rotation inertia of the small reflection mirror components is low, the small-range high-speed reciprocating motion can be realized, and the high bandwidth can be realized.
Description
Technical Field
The invention relates to the technical field of reflectors, in particular to an array fast reflector.
Background
The fast control reflector (Fast Steering Mirror, FSM), short for fast reflector, is to control the rotation of the reflector to control the light propagation direction in one or two dimensions, to realize the fast and accurate direction of the light beam in the required angle range, and to realize the precise tracking, stable aiming, stable image, etc. in laser guidance, photoelectric investigation, photoelectric countermeasure, laser weapon, space detection, laser radar, laser communication, etc. The rapid reflecting mirror is adopted to replace the traditional frame structure, so that the performance of the system can be improved, the rapid reflecting mirror is generally required to have higher working bandwidth, angular resolution, pointing precision and rotation angle range in the field, and high requirements on the environmental adaptability of the system and the like are also required.
Currently, the fast reflection mirrors are mainly divided into two main types of piezoelectric ceramic (PZT) driving and Voice Coil Motor (VCM) driving according to different driving modes. The PZT driver has the advantages of simple structure, small volume, high resolution, quick response, large thrust, less heat generation and no stray electromagnetic field, and has the defects of relatively small stroke of tens of micrometers, and can not realize a larger rotation angle range in a quick reflection mirror. PZT also has disadvantages of poor hysteresis characteristics and low temperature resistance. The voice coil motor is a driving motor manufactured based on the lorentz force principle, and the working principle is that an electrified coil (conductor) generates force when placed in a magnetic field, and the magnitude of the force is proportional to the current applied to the coil. Usually consists of a magnetic cylinder, a coil and the like, and has the advantages of large movement stroke, low driving voltage and the like. The VCM driving is adopted, so that the quick reflection mirror system has a large rotation angle range and strong bearing capacity, and has strong adaptability to working environments such as vibration, impact and the like. In the system in the field of national defense and military industry, a quick reflection mirror driven by a voice coil motor is mostly adopted.
The traditional quick reflecting mirror can realize higher scanning speed due to low rotational inertia of a moving part, but is used for scanning compensation application, and long-time small-range high-speed reciprocating motion can lead the service life of a bearing to be very low, and abrasion is generated quickly, so that the precision of a system is reduced. The high and low temperature resistance of the bearing is poor.
The traditional large-caliber quick reflection mirror and the small-caliber quick reflection mirror are difficult to meet two indexes of large rotation angle and high bandwidth at the same time.
Disclosure of Invention
The invention aims to provide an array fast reflecting mirror which can realize large-angle deflection and high bandwidth at the same time and can meet application requirements in different scenes.
To solve the above problem, a first aspect of the present invention provides an array fast reflecting mirror, which is characterized by comprising: a lens holder, a plurality of small-sized lens assemblies and a control device;
the small-sized reflector assemblies are arranged on one end face of the reflector support;
the control device is connected with the mirror support and can drive the mirror support to incline by a corresponding angle relative to a plane where an initial position of the mirror support is located so as to drive the small-sized mirror assemblies to synchronously move;
the control device is respectively connected with each small-sized reflecting mirror component and controls the plane of the mirror surface of each small-sized reflecting mirror component to incline by a corresponding angle relative to the initial position of the mirror surface.
Preferably, the compact mirror assembly comprises: a mirror body and a driving unit;
the driving unit is arranged on the mirror support, the output end of the driving unit is connected with the mirror body, and the driving unit controls the corresponding small mirror assembly to incline by a corresponding angle relative to the plane where the small mirror assembly is located according to a control signal.
Preferably, there is an air gap between the mirror bodies on each adjacent two of the small mirror assemblies.
Preferably, the reflector body is in the shape of a regular hexagon.
Preferably, a plurality of said small mirror assemblies are arranged in a regular pattern.
Preferably, the array fast reflecting mirror further comprises: a base and a flexible hinge assembly;
one end of the flexible hinge component is connected with the mirror support, and the other end of the flexible hinge component is connected with the base;
the control device comprises a driving component which is arranged on the base and is used for driving the lens holder to incline by a corresponding angle relative to the plane where the initial position of the lens holder is located.
Preferably, the flexible hinge assembly is at least one crisscrossed flexible hinge;
when the number of the cross-shaped flexible hinges is one, the top of the cross-shaped flexible hinges is connected with the bottom of the mirror support, and the bottom of the cross-shaped flexible hinges is arranged at the center of the base;
when the number of the cross type flexible hinges is multiple, the cross type flexible hinges are arranged in a stacked mode, the top of the cross type flexible hinge located at the uppermost layer is connected with the bottom of the mirror support, and the bottom of the cross type flexible hinge located at the lowermost layer is arranged at the center of the base.
Preferably, the driving assembly comprises a plurality of voice coil motors;
the end face, facing the mirror support, of the base is provided with voice coil motor grooves which are in one-to-one correspondence with the voice coil motors;
each voice coil motor is arranged in the corresponding voice coil motor groove, and all the voice coil motors are used for driving the mirror support to incline by a corresponding angle relative to the plane where the initial position of the mirror support is located.
Preferably, the array fast reflecting mirror further comprises a plurality of pairs of eddy current probes;
the eddy current probes are arranged on the end face of the base, facing the lens holder, of the lens holder;
each pair of eddy current probes is used for measuring the inclination angle of the lens holder in the direction of the connecting line of the two eddy current probes.
Preferably, the array quick reflection mirror further comprises at least one limiting block;
the base faces the lens holder and is provided with limiting block grooves which are in one-to-one correspondence with the limiting blocks;
at least one limiting block is arranged in the corresponding limiting block groove, and at least one limiting block is used for limiting the rotation angle of the lens holder.
The technical scheme of the invention has the following beneficial technical effects:
the array fast reflecting mirror provided by the invention adopts the mirror support to be matched with the plurality of small reflecting mirror components, the plurality of small reflecting mirror components are arranged on the mirror support, the large rotation angle is realized through the mirror support, the small reflecting mirror components have low rotational inertia, the small-range high-speed reciprocating motion can be realized, the high bandwidth can be realized, and in conclusion, the array fast reflecting mirror provided by the invention can simultaneously realize the large-angle deflection and the high bandwidth, and can meet the application requirements in different scenes.
The flexible hinge assembly is used as a flexible support, so that the ball bearing has longer service life and better high and low temperature resistance compared with a ball bearing. The vacuum pump has no lubricant, can be used for vacuum, and has a large enough rotation angle range.
The eddy current probe structure is arranged in the base, so that the overall height of the quick reflection mirror is reduced, and the structure is more compact.
Drawings
Fig. 1 is a schematic diagram showing an exploded structure of an array fast mirror according to an embodiment of the present invention.
FIG. 2 shows a schematic top view of an array fast mirror according to one embodiment of the present invention.
Fig. 3 shows a schematic perspective view of an array fast reflector according to an embodiment of the present invention.
Fig. 4 shows a schematic top view of a substrate according to an embodiment of the invention.
Fig. 5 shows a schematic perspective view of an array fast reflector according to another embodiment of the present invention.
Reference numerals illustrate:
1-a lens holder; a 2-mirror body; 3-air gap; 4-a base; 5-a voice coil motor; 6-a voice coil motor groove; 7-an eddy current probe; 8-crisscrossed flexible hinge; 9-limiting blocks; 10-drive unit.
Detailed Description
The objects, technical solutions and advantages of the present invention will become more apparent by the following detailed description of the present invention with reference to the accompanying drawings. It should be understood that the description is only illustrative and is not intended to limit the scope of the invention. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the present invention.
It will be apparent that the described embodiments are some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
The invention will be described in more detail below with reference to the accompanying drawings. Like elements are denoted by like reference numerals throughout the various figures. For clarity, the various features of the drawings are not drawn to scale.
The fast control reflector (Fast Steering Mirror, FSM), short for fast reflector, is to control the rotation of the reflector to control the light propagation direction in one or two dimensions, to realize the fast and accurate direction of the light beam in the required angle range, and to realize the precise tracking, stable aiming, stable image, etc. in laser guidance, photoelectric investigation, photoelectric countermeasure, laser weapon, space detection, laser radar, laser communication, etc. The rapid reflecting mirror is adopted to replace the traditional frame structure, so that the performance of the system can be improved, the rapid reflecting mirror is generally required to have higher working bandwidth, angular resolution, pointing precision and rotation angle range in the field, and high requirements on the environmental adaptability of the system and the like are also required.
Currently, the fast reflection mirrors are mainly divided into two main types of piezoelectric ceramic (PZT) driving and Voice Coil Motor (VCM) driving according to different driving modes. The PZT driver has the advantages of simple structure, small volume, high resolution, quick response, large thrust, less heat generation and no stray electromagnetic field, and has the defects of relatively small stroke of tens of micrometers, and can not realize a larger rotation angle range in a quick reflection mirror. PZT also has disadvantages of poor hysteresis characteristics and low temperature resistance. The voice coil motor is a driving motor manufactured based on the lorentz force principle, and the working principle is that an electrified coil (conductor) generates force when placed in a magnetic field, and the magnitude of the force is proportional to the current applied to the coil. Usually consists of a magnetic cylinder, a coil and the like, and has the advantages of large movement stroke, low driving voltage and the like. The VCM driving is adopted, so that the quick reflection mirror system has a large rotation angle range and strong bearing capacity, and has strong adaptability to working environments such as vibration, impact and the like. In the system in the field of national defense and military industry, a quick reflection mirror driven by a voice coil motor is mostly adopted.
The traditional quick reflecting mirror can realize higher scanning speed due to low rotational inertia of a moving part, but is used for scanning compensation application, and long-time small-range high-speed reciprocating motion can lead the service life of a bearing to be very low, and abrasion is generated quickly, so that the precision of a system is reduced. The high and low temperature resistance of the bearing is poor.
The traditional large-caliber quick reflection mirror and the small-caliber quick reflection mirror are difficult to meet two indexes of large rotation angle and high bandwidth at the same time.
In order to solve the above problems, the present invention provides an array fast mirror for solving the above problems.
Example 1
Referring to fig. 1-5, an array fast mirror provided in one embodiment of the present invention includes: a lens holder 1, a plurality of small-sized mirror assemblies and a control device; a plurality of small-sized reflecting mirror components are arranged on one end face of the mirror support 1; the control device is connected with the mirror support 1 and can drive the mirror support 1 to incline by a corresponding angle relative to a plane where the initial position of the mirror support 1 is located so as to drive the plurality of small-sized mirror assemblies to synchronously move; the control device is respectively connected with each small-sized reflector assembly and controls the plane of the reflector of each small-sized reflector assembly to incline by a corresponding angle relative to the initial position of the reflector.
Meanwhile, the control device is disposed inside the base 4, and is designed in a lightweight structure, which is not specifically described herein.
The array fast reflecting mirror provided by the invention adopts the mirror support 1 to be matched with the plurality of small reflecting mirror components, the plurality of small reflecting mirror components are arranged on the mirror support 1, the large rotation angle is realized through the mirror support 1, the small reflecting mirror components have low moment of inertia, small-range high-speed reciprocating motion can be realized, and high bandwidth can be realized.
Example 2
Referring to fig. 1-5, an array fast mirror provided in one embodiment of the present invention includes: a lens holder 1, a plurality of small-sized mirror assemblies and a control device; a plurality of small-sized reflecting mirror components are arranged on one end face of the mirror support 1; the control device is connected with the mirror support 1 and can drive the mirror support 1 to incline by a corresponding angle relative to a plane where the initial position of the mirror support 1 is located so as to drive the plurality of small-sized mirror assemblies to synchronously move; the control device is respectively connected with each small-sized reflector assembly and controls the plane of the reflector of each small-sized reflector assembly to incline by a corresponding angle relative to the initial position of the reflector.
As a preferred embodiment, the compact mirror assembly includes: a mirror body 2 and a driving unit 10; the driving unit 10 is arranged on the mirror support 1, the output end of the driving unit 10 is connected with the mirror body 2, and the driving unit 10 controls the corresponding small mirror assembly to incline by a corresponding angle relative to the plane of the small mirror assembly according to the control signal.
Further, there is an air gap 3 between the mirror bodies 2 on adjacent two of the small mirror assemblies. The mirror body 2 is regular hexagonal. The plurality of small mirror assemblies are arranged in a regular pattern.
The plurality of small mirror assemblies are regularly arranged, that is, the plurality of small mirror assemblies are arranged in an orderly, repeated or symmetrical manner, such as a linear arrangement, a symmetrical arrangement, a grid arrangement or an orderly radial arrangement, for example, in the structure shown in fig. 1 and 2, one of the seven small mirror assemblies is located at the center, and the other six small mirror assemblies are in a ring shape and uniformly wound around the small mirror assembly located at the center, and of course, alternatively, the number of small mirror assemblies can be more, the ring shape can be also be a plurality of small mirror assemblies and sequentially arranged from inside to outside, and the structural change does not deviate from the inventive concept of the present invention and also belongs to the protection scope of the present invention.
Further, the width of the air gap 3 between the mirror bodies 2 is 1-2mm.
Further, the side length of the mirror body 2 is 40mm.
The drive unit 10 is capable of controlling the movement of the mirror body 2 in two dimensions.
Example 3
Referring to fig. 1-5, an array fast mirror provided in one embodiment of the present invention includes: a lens holder 1, a plurality of small-sized mirror assemblies and a control device; a plurality of small-sized reflecting mirror components are arranged on one end face of the mirror support 1; the control device is connected with the mirror support 1 and can drive the mirror support 1 to incline by a corresponding angle relative to a plane where the initial position of the mirror support 1 is located so as to drive the plurality of small-sized mirror assemblies to synchronously move; the control device is respectively connected with each small-sized reflector assembly and controls the plane of the reflector of each small-sized reflector assembly to incline by a corresponding angle relative to the initial position of the reflector.
The compact mirror assembly includes: a mirror body 2 and a driving unit 10; the driving unit 10 is arranged on the mirror support 1, the output end of the driving unit 10 is connected with the mirror body 2, and the driving unit 10 controls the corresponding small mirror assembly to incline by a corresponding angle relative to the plane of the small mirror assembly according to the control signal.
The array fast mirror further comprises: a base 4 and a flexible hinge assembly; one end of the flexible hinge component is connected with the lens holder 1, and the other end is connected with the base 4.
The control device comprises a driving component arranged on the base 4, and the driving component is used for driving the lens holder 1 to incline by a corresponding angle relative to the plane where the initial position of the lens holder is located.
Specifically, the lens holder 1 is located above the base 4, has a regular polygonal shape, and has a main side length of 400mm.
In the array fast reflecting mirror provided by the embodiment, the mirror support 1 and the base 4 are supported by adopting the hinge assembly, so that the array fast reflecting mirror has longer service life compared with a ball bearing, and has better high and low temperature resistance. No lubricant and can be used in vacuum environment.
Example 4
Referring to fig. 1-5, an array fast mirror provided in one embodiment of the present invention includes: a lens holder 1, a plurality of small-sized mirror assemblies and a control device; a plurality of small-sized reflecting mirror components are arranged on one end face of the mirror support 1; the control device is connected with the mirror support 1 and can drive the mirror support 1 to incline by a corresponding angle relative to a plane where the initial position of the mirror support 1 is located so as to drive the plurality of small-sized mirror assemblies to synchronously move; the control device is respectively connected with each small-sized reflector assembly and controls the plane of the reflector of each small-sized reflector assembly to incline by a corresponding angle relative to the initial position of the reflector.
The compact mirror assembly includes: a mirror body 2 and a driving unit 10; the driving unit 10 is arranged on the mirror support 1, the output end of the driving unit 10 is connected with the mirror body 2, and the driving unit 10 controls the corresponding small mirror assembly to incline by a corresponding angle relative to the plane of the small mirror assembly according to the control signal.
The array fast mirror further comprises: a base 4 and a flexible hinge assembly; one end of the flexible hinge component is connected with the lens holder 1, and the other end is connected with the base 4.
The control device comprises a driving component arranged on the base 4, and the driving component is used for driving the lens holder 1 to incline by a corresponding angle relative to the plane where the initial position of the lens holder is located.
As a preferred embodiment, the flexible hinge assembly comprises at least one crisscrossed flexible hinge 8;
when the number of the cross-shaped flexible hinges 8 is one, the top of the cross-shaped flexible hinges 8 is connected with the bottom of the lens holder 1, and the bottom of the cross-shaped flexible hinges 8 is arranged at the center of the base 4;
when the number of the cross-shaped flexible hinges 8 is multiple, the multiple cross-shaped flexible hinges 8 are stacked, the top of the cross-shaped flexible hinge 8 positioned at the uppermost layer is connected with the bottom of the lens holder 1, and the bottom of the cross-shaped flexible hinge 8 positioned at the lowermost layer is arranged at the center of the base 4.
Further, the flexible hinge has longer service life compared with the ball bearing, and has better high and low temperature resistance. No lubricant is required and can be used in a vacuum environment. In practice, two crossed flexible support combinations are adopted as flexible supports of the vibrating mirror.
Further, materials which can be selected for the cross flexible hinge 8 mainly include titanium alloy, beryllium bronze, stainless steel and the like;
further, the pair of crisscross flexible hinges 8 adopts mutually perpendicular elastic sheets to realize the set angle deflection of the mirror main mirror.
Example 5
An array fast mirror provided in an embodiment of the present invention includes: a lens holder 1, a plurality of small-sized mirror assemblies and a control device; a plurality of small-sized reflecting mirror components are arranged on one end face of the mirror support 1; the control device is connected with the mirror support 1 and can drive the mirror support 1 to incline by a corresponding angle relative to a plane where the initial position of the mirror support 1 is located so as to drive the plurality of small-sized mirror assemblies to synchronously move; the control device is respectively connected with each small-sized reflector assembly and controls the plane of the reflector of each small-sized reflector assembly to incline by a corresponding angle relative to the initial position of the reflector.
The compact mirror assembly includes: a mirror body 2 and a driving unit 10; the driving unit 10 is arranged on the mirror support 1, the output end of the driving unit 10 is connected with the mirror body 2, and the driving unit 10 controls the corresponding small mirror assembly to incline by a corresponding angle relative to the plane of the small mirror assembly according to the control signal.
The array fast mirror further comprises: a base 4 and a flexible hinge assembly; one end of the flexible hinge component is connected with the lens holder 1, and the other end is connected with the base 4.
The control device comprises a driving component arranged on the base 4, and the driving component is used for driving the lens holder 1 to incline by a corresponding angle relative to the plane where the initial position of the lens holder is located.
As a preferred embodiment, the drive assembly comprises several voice coil motors 5; the end face of the base 4 facing the mirror support 1 is provided with voice coil motor grooves 6 which are in one-to-one correspondence with the voice coil motors 5; each voice coil motor 5 is arranged in the voice coil motor groove 6, and all the voice coil motors 5 are used for driving the mirror support 1 to incline by corresponding angles relative to the plane where the initial position of the mirror support 1 is located.
The voice coil motor 5 includes coil and magnet steel, places in voice coil motor groove 6, and voice coil motor 5 has 4, and every 2 are a pair of, connect to a straight line, drive mirror support 1 rotates in the direction that the straight line is located.
In the embodiment of the invention, the voice coil motor 5 is arranged in the voice coil motor groove 6 by arranging the voice coil motor groove 6 in the base 4, so that the overall height is reduced, and the space utilization rate is improved.
Example 6
Referring to fig. 1-5, an array fast mirror provided in one embodiment of the present invention includes: a lens holder 1, a plurality of small-sized mirror assemblies and a control device; a plurality of small-sized reflecting mirror components are arranged on one end face of the mirror support 1; the control device is connected with the mirror support 1 and can drive the mirror support 1 to incline by a corresponding angle relative to a plane where the initial position of the mirror support 1 is located so as to drive the plurality of small-sized mirror assemblies to synchronously move; the control device is respectively connected with each small-sized reflector assembly and controls the plane of the reflector of each small-sized reflector assembly to incline by a corresponding angle relative to the initial position of the reflector.
The compact mirror assembly includes: a mirror body 2 and a driving unit 10; the driving unit 10 is arranged on the mirror support 1, the output end of the driving unit 10 is connected with the mirror body 2, and the driving unit 10 controls the corresponding small mirror assembly to incline by a corresponding angle relative to the plane of the small mirror assembly according to the control signal.
The array fast mirror further comprises: a base 4 and a flexible hinge assembly; one end of the flexible hinge component is connected with the lens holder 1, and the other end is connected with the base 4.
The control device comprises a driving component arranged on the base 4, and the driving component is used for driving the lens holder 1 to incline by a corresponding angle relative to the plane where the initial position of the lens holder is located.
As a preferred embodiment, a plurality of pairs of eddy current probes 7 are also included; a plurality of pairs of eddy current probes 7 are arranged on the end face of the base 4 facing the lens holder 1; each pair of eddy current probes 7 comprises two eddy current probes 7; each pair of eddy current probes 7 is used for measuring the inclination angle of the lens holder 1 in the direction of the connecting line of the two eddy current probes 7.
Specifically, the number of the eddy current probes 7 is 4, the eddy current probes are arranged beside the voice coil motor groove 6, are opposite to each other, and perform differential measurement by adopting 2 eddy current probes in the same direction, so that the measurement accuracy is improved, and the influence of temperature drift and the like on the measurement result is reduced. The eddy current probe 7 is arranged in the base 4, so that the overall height of the quick reflection mirror is reduced, and the structure is more compact.
Example 7
Referring to fig. 1-5, an array fast mirror provided in one embodiment of the present invention includes: a lens holder 1, a plurality of small-sized mirror assemblies and a control device; a plurality of small-sized reflecting mirror components are arranged on one end face of the mirror support 1; the control device is connected with the mirror support 1 and can drive the mirror support 1 to incline by a corresponding angle relative to a plane where the initial position of the mirror support 1 is located so as to drive the plurality of small-sized mirror assemblies to synchronously move; the control device is respectively connected with each small-sized reflector assembly and controls the plane of the reflector of each small-sized reflector assembly to incline by a corresponding angle relative to the initial position of the reflector.
The compact mirror assembly includes: a mirror body 2 and a driving unit 10; the driving unit 10 is arranged on the mirror support 1, the output end of the driving unit 10 is connected with the mirror body 2, and the driving unit 10 controls the corresponding small mirror assembly to incline by a corresponding angle relative to the plane of the small mirror assembly according to the control signal.
The array fast mirror further comprises: a base 4 and a flexible hinge assembly; one end of the flexible hinge component is connected with the lens holder 1, and the other end is connected with the base 4.
The control device comprises a driving component arranged on the base 4, and the driving component is used for driving the lens holder 1 to incline by a corresponding angle relative to the plane where the initial position of the lens holder is located.
As a preferred embodiment, at least one stopper 9 is also included;
the base 4 is provided with limiting block grooves which are in one-to-one correspondence with the limiting blocks 9 towards the lens holder 1;
at least one limiting block 9 is arranged in the limiting block groove, and the at least one limiting block (9) is used for limiting the inclination angle of the lens holder 1.
The array quick reflection mirror provided by the embodiment limits the rotation travel of the mirror support 1 by arranging the limiting block 9, so that the damage of a flexible hinge assembly caused by overlarge rotation angle is avoided; by arranging the stopper 9 in the stopper groove, the height is reduced.
Example 8
Referring to fig. 1-5, an array fast mirror provided in one embodiment of the present invention includes: a lens holder 1, a plurality of small-sized mirror assemblies and a control device; a plurality of small-sized reflecting mirror components are arranged on one end face of the mirror support 1; the control device is connected with the mirror support 1 and can drive the mirror support 1 to incline by a corresponding angle relative to a plane where the initial position of the mirror support 1 is located so as to drive the plurality of small-sized mirror assemblies to synchronously move; the control device is respectively connected with each small-sized reflector assembly and controls the plane of the reflector of each small-sized reflector assembly to incline by a corresponding angle relative to the initial position of the reflector.
The compact mirror assembly includes: a mirror body 2 and a driving unit 10; the driving unit 10 is arranged on the mirror support 1, the output end of the driving unit 10 is connected with the mirror body 2, and the driving unit 10 controls the corresponding small mirror assembly to incline by a corresponding angle relative to the plane of the small mirror assembly according to the control signal.
As a preferred embodiment, the mirror support 1 and the mirror body 2 each comprise a structural body and a surface layer; the surface layer is arranged on the outer surfaces of the structural main body and the outer surface; the structural main body is made of one or more of beryllium, silicon, fused quartz/quartz, siC, BK7, sapphire Al2O3 and MgF 2; the surface layer is gold and protective silver.
In summary, the present invention is directed to an array fast reflecting mirror, comprising: a lens holder 1, a plurality of small-sized mirror assemblies and a control device; a plurality of small-sized reflecting mirror components are arranged on one end face of the mirror support 1; the control device is connected with the mirror support 1 and can drive the mirror support 1 to incline by a corresponding angle relative to a plane where the initial position of the mirror support 1 is located so as to drive the plurality of small-sized mirror assemblies to synchronously move; the control device is respectively connected with each small-sized reflector assembly and controls the plane of the reflector of each small-sized reflector assembly to incline by a corresponding angle relative to the initial position of the reflector.
The embodiment of the invention has the beneficial effects that:
1. the large-caliber mirror support and the small-sized mirror can meet the application requirements in different scenes and simultaneously meet the requirements of high bandwidth and large rotation angle.
2. The cross flexible hinge is adopted as a flexible support, so that the ball bearing has longer service life and better high and low temperature resistance compared with a ball bearing; the vacuum pump can be used in vacuum environment without using lubricant, and the rotation angle range is large enough.
3. The eddy current corner measuring structure is arranged in the reflector shell, so that the overall height of the quick reflector is reduced, and the structure is more compact.
It is to be understood that the above-described embodiments of the present invention are merely illustrative of or explanation of the principles of the present invention and are in no way limiting of the invention. Accordingly, any modification, equivalent replacement, improvement, etc. made without departing from the spirit and scope of the present invention should be included in the scope of the present invention. Furthermore, the appended claims are intended to cover all such changes and modifications that fall within the scope and boundary of the appended claims, or equivalents of such scope and boundary.
Claims (10)
1. An array fast mirror, comprising: a lens holder (1), a plurality of small-sized reflecting mirror components and a control device;
the small-sized reflecting mirror components are arranged on one end face of the mirror support (1);
the control device is connected with the mirror support (1) and can drive the mirror support (1) to incline by a corresponding angle relative to a plane where an initial position of the mirror support (1) is located so as to drive the small-sized mirror assemblies to synchronously move;
the control device is respectively connected with each small-sized reflecting mirror component and controls the plane of the mirror surface of each small-sized reflecting mirror component to incline by a corresponding angle relative to the initial position of the mirror surface.
2. The array fast reflector of claim 1,
the compact mirror assembly includes: a mirror body (2) and a drive unit (10);
the driving unit (10) is arranged on the mirror support (1), the output end of the driving unit (10) is connected with the mirror body (2), and the driving unit (10) controls the corresponding small mirror assembly to incline by a corresponding angle relative to the plane where the small mirror assembly is located according to a control signal.
3. The array fast reflector of claim 2,
an air gap (3) is arranged between the reflector bodies (2) on every two adjacent small reflector assemblies.
4. An array fast reflector as claimed in claim 2, characterized in that the reflector body (2) is in the shape of a regular hexagon.
5. The array fast reflector of claim 1,
the plurality of small mirror assemblies are arranged in a regular manner.
6. The array fast reflector of claim 1,
the array fast mirror further comprises: a base (4) and a flexible hinge assembly;
one end of the flexible hinge component is connected with the mirror support (1), and the other end of the flexible hinge component is connected with the base (4);
the control device comprises a driving component arranged on the base (4), and the driving component is used for driving the lens holder (1) to incline by a corresponding angle relative to the plane where the initial position of the lens holder is located.
7. The array fast reflector of claim 6, wherein the flexible hinge assembly comprises at least one crisscrossed flexible hinge (8);
when the number of the cross-shaped flexible hinges (8) is one, the top of the cross-shaped flexible hinges (8) is connected with the bottom of the lens holder (1), and the bottom of the cross-shaped flexible hinges (8) is arranged at the center of the base (4);
when the number of the cross-shaped flexible hinges (8) is multiple, the cross-shaped flexible hinges (8) are arranged in a stacked mode, the top of the cross-shaped flexible hinge (8) located at the uppermost layer is connected with the bottom of the mirror support (1), and the bottom of the cross-shaped flexible hinge (8) located at the lowermost layer is arranged at the center of the base (4).
8. The array fast reflector of claim 6, wherein the drive assembly comprises a number of voice coil motors (5);
the end face of the base (4) facing the mirror support (1) is provided with voice coil motor grooves (6) which are in one-to-one correspondence with the voice coil motors (5);
each voice coil motor (5) is arranged in the corresponding voice coil motor groove (6), and all the voice coil motors (5) are used for driving the mirror support (1) to incline by a corresponding angle relative to the plane where the initial position of the mirror support (1) is located.
9. The array fast mirror according to claim 8, further comprising a plurality of pairs of eddy current probes (7);
the eddy current probes (7) are arranged on the end face of the base (4) facing the lens holder (1);
each pair of eddy current probes (7) is used for measuring the inclination angle of the lens holder (1) in the direction of the connecting line of the two eddy current probes (7).
10. An array fast mirror according to claim 9, characterized in that the array fast mirror further comprises at least one stopper (9);
the base (4) is provided with limiting block grooves which are in one-to-one correspondence with the limiting blocks (9) towards the mirror support (1);
at least one limiting block (9) is arranged in the corresponding limiting block groove, and at least one limiting block (9) is used for limiting the rotation angle of the lens holder (1).
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| CN202410217613.4A CN117784399A (en) | 2024-02-28 | 2024-02-28 | Array quick reflection mirror |
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| CN202410217613.4A CN117784399A (en) | 2024-02-28 | 2024-02-28 | Array quick reflection mirror |
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