CN1744394A - Automatic calibrating device in positive-branch confocal unstable resonator endoscope - Google Patents
Automatic calibrating device in positive-branch confocal unstable resonator endoscope Download PDFInfo
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Abstract
The automatic calibrating device in the positive branch confocal unstable resonator endoscope comprises: the invention is composed of He-Ne laser, intracavity folding mirror with pinhole structure, scraper mirror with pinhole, convex mirror, Hartmann wave front sensor for detecting quality of laser output beam, main controller and concave mirror with step motor actuator.
Description
Technical field
The invention belongs to the self-checking device of laserresonator chamber mirror, self-checking device in the mirror of positive-branch confocal unstable resonator chamber.
Background technology
The research that flourish, the superlaser of modern communications cause is used and the application of laser radar have proposed high requirement to the quality of Laser Output Beam, and the quality of therefore constantly improving Laser Output Beam is the focus of present world frontier science and technology research.
Discover that the work of high-energy laser unsteady cavity the time can export the almost plane ripple, remove that light beam tilts and the condition of out of focus aberration under also contain a small amount of higher order aberratons, so inclination and out of focus aberration are the principal elements that causes that beam quality degenerates in the chamber.When high-energy laser output laser, environment is very abominable in the chamber, there are very strong flow perturbation and other to influence the factor of optical element imbalance in the chamber, output beam quality will variation like this, influence the application of laser, simultaneously if in the chamber, proofread and correct whole light beam aberrations, not only the device, the control algolithm complexity, and also be difficult to take into account when proofreading and correct multistage aberration, because do not solve the corresponding relation of aberration and laser output power, near field light intensity and PHASE DISTRIBUTION in the laser resonant cavity theoretically; If give chamber external purifying system the correction of all beam qualities in addition, will increase the burden of chamber external purifying system, and also be difficult to the effect that reaches satisfied.
Summary of the invention
Technology of the present invention is dealt with problems: overcome the deficiencies in the prior art, providing a kind of is used in real time, proofread and correct in the unsteady cavity chamber concave mirror accurately with respect to the imbalance of convex lens and scraper mirror, automatically self-checking device in the positive-branch confocal unstable resonator chamber mirror that main aberration in the chamber is compensated, giving the chamber external purifying other influencing factors that make the beam quality variation by this device finishes, thereby improve the instability of high-energy laser when the output laser beam, there is the drift of laser beam, low-frequency vibration, phenomenons such as light distribution changes in time make the quality of output beam reach better state.
Technical solution of the present invention is: self-checking device in the mirror of positive-branch confocal unstable resonator chamber, and its characteristics are to comprise at least following parts:
The He-Ne laser, output laser guidance light, simulation superlaser transmission situation in the chamber, it with the chamber that has small structure in refrative mirror connect firmly and be in the same place;
Have that its effect of refrative mirror is side-coupled output in the chamber of small structure, allow the low energy laser calibration beam pass through;
The scraper mirror that has aperture, its effect are the low energy laser calibration beams that receives refrative mirror in the chamber that has small structure, and side-coupled output, to be used for simulating the transmission route and the export target aligning of superlaser;
Convex lens is connected to the back of scraper mirror, and it and concave mirror make the stable vibration in resonant cavity of light beam together, amplify;
The Hartmann wave front sensor (HS) that high-precision detectable Laser Output Beam quality is arranged, main real-time detection concave mirror is with respect to shake, inclination and the translation of convex lens;
Main control computer is accepted the cavity mirror misalignment signal that Hartmann wave front sensor (HS) detects, and converts the step motor control signal after the processing to, after output to controllor for step-by-step motor drive stepping motor motion;
The concave mirror that has the stepping motor actuator, it accepts control signal and drives concave mirror to do inclination, shake and translational motion with respect to convex lens, makes convex lens and concave mirror keep collimation;
The low energy laser light beam that the He-Ne laser sends passes the aperture of refrative mirror in the chamber, return scraper mirror again after arriving scraper mirror (3), convex lens successively, arriving the former again road of concave mirror after the refrative mirror reflection returns, vibration back and forth, at last from scraper mirror output, Hartmann wave front sensor is measured to be tilted, make concave mirror with respect to refrative mirror collimation in convex lens and the chamber by drive actuator after the data processing of the information via main control computer of shake and translation.
The present invention compared with prior art has following advantage:
1. the present invention has adopted stepper motor driven two-dimensional adjustment frame, and being used for accurately fast, the adjusted open loop convex lens has improved accent chamber efficient along minute surface horizontal diameter pitch rotation with along the vertical diameter left-right rotation of minute surface; Adopted stepper motor driven three-dimensional adjustable shelf, be used for accurately open loop fast and closed-loop adjustment primary mirror (concave mirror), realized dynamic real-time control along minute surface horizontal diameter pitch rotation, along the vertical diameter left-right rotation of minute surface with along optical axis front and back translational motion.This apparatus structure is simple, has saved and has controlled cost;
2. the present invention reaches the optical cavity calibration by rotation of FUZZY ALGORITHMS FOR CONTROL closed-loop control concave mirror and translation, simultaneously by two jockeys, one connects convex lens, scraper mirror and refrative mirror, connection concave mirror and Low-power laser reach relative motion degree of freedom minimizing between the element each several part in the firm as far as possible and chamber of the element of not regulating in the chamber.Regulate the small imbalance that concave mirror could compensate all the other elements like this;
3. the FUZZY ALGORITHMS FOR CONTROL that adopts of the present invention is made up of the fuzzy self-adjusting of a PID controller and mechanism, relatively is applicable to automated calibration system in the chamber that mathematical models is difficult to obtain;
4. the present invention adopts minimum control element and two jockeys to reduce the influence of vibration to whole system, has improved system's possibility of its application in need lightness and moving movement.
Description of drawings
Fig. 1 is the positive-branch confocal unstable resonator structural representation of standard;
Fig. 2 is the improvement structural representation of unsteady cavity among Fig. 1, promptly adds a refrative mirror;
Fig. 3 is a structural representation of the present invention;
Fig. 4 is a Control Software flow chart of the present invention.
Embodiment
Shown in 1 figure, be the positive-branch confocal unstable resonator structural representation of present standard, because refrative mirror of no use, the resonant cavity lateral dimension is longer;
Fig. 2 is the improvement structural representation of unsteady cavity among Fig. 1, promptly adds a refrative mirror, and it has improved the operating efficiency of resonant cavity and has shortened the resonant cavity lateral dimension, and it is not consider the resonant cavity index path under the automated calibration system in the chamber;
As shown in Figure 3, the present invention is made up of He-Ne laser 5, the concave mirror 1 that has Hartmann wave front sensor 8, the main control computer 9 of refrative mirror 4, the scraper mirror 3 that has aperture 16, convex lens 2, detecting laser output beam quality in the chamber of aperture 15 structures and have three adjusting brackets 10 of stepping motor actuator, wherein convex lens 2 is relative approaching with scraper mirror 3 distances, so these 2 chamber mirrors are done as a whole and base 13 is connected and fixed, for guaranteeing convex lens 2 collimation is installed, it has two-dimensional adjustment mechanism 17 when design, it can be regulated among a small circle, and lockable; The relative position of refrative mirror 4 is also extremely important in He-Ne laser 5 and the chamber, so that these two parts are done is as a whole fixing under the connection of connector 12.The part of the far away and relative fragility of distance then is from scraper mirror 3, passes the part of the part of gain media refrative mirror 4 in the chamber and concave mirror 1 refrative mirror 4 in the chamber, and these two parts are easily lacked of proper care.In the practical application among Fig. 34 chamber mirrors very big size is all arranged, be crucial so be connected and fixed.Convex lens 2 and scraper mirror 3 are 45 to be installed, and refrative mirror is an isolating construction in scraper mirror 3, concave mirror 1 and the chamber.Scraper mirror 3 has an aperture 16 to leave unsteady cavity side direction laser coupled output for, and aperture 15 diameters are more slightly bigger than He-Ne beam diameter, and the diameter of aperture 16 is that the size by convex lens 2 and concave mirror 1 calculates according to resonant theory; Refrative mirror 4 is made up of the speculum of two phases an angle of 90 degrees placement each other in the chamber, one of them speculum has aperture 15, this aperture 15 is left the automatic calibration laser light beam of low energy for and is used, a spectroscope 6 is arranged on the direction of the side-coupled output of refrative mirror 4 in the chamber, most of laser-bounce output definite object, the fraction transmission outputs to Hartmann wave front sensor 8 display beams aberration information; Concave mirror 1 is installed on the stepper motor driven three-dimensional regulation frame 10, and three-dimensional regulation frame 10 makes concave mirror 1 pitching and left rotation and right rotation in low-angle, with parallel mobile along optical path direction, and lockable.
The low energy laser light beam that He-Ne laser 5 sends passes the aperture 15 of refrative mirror 4, arrive scraper mirror 3 successively, return scraper mirror 3 behind the convex lens 2 again, arriving the former again road of concave mirror 1 after refrative mirror 4 reflections in the chamber returns, vibration back and forth, at last from scraper mirror 3 outputs, the facula information of Hartmann wave front sensor 8 real-time detection laser beams, the inclination and the out of focus aberration that go out to be used to control by the main wave front restoration algorithm computation of visiting the DSP of device 9, fast aberration information is passed to control program by memory shared, after control program is handled, drive 3-D in mirror adjustment mechanism about 10, pitch rotation moves with parallel, make concave mirror 1 with respect to convex lens 2 collimations, this process can make and comparatively fast reach collimating status in the chamber, and can follow the tracks of the hot spot shake that random disturbances is brought, and beam quality is tended towards stability.
Hartmann sensor 8 can be realized real-time high-precision detecting light beam quality, hot spot chattering frequency when sample frequency can reach laser works, it plays important supervisory function bit in this control system, can also demonstrate the improvement of low order aberration and the trend relation that higher order aberratons changes in real time, thereby can obtain the situation of change of native system remainder when part is controlled, i.e. the improvement situation of entire light quality.
The superlaser light beam is created in the paper plane in Fig. 3, and the top is penetrated in the paper plane, points to Hartmann sensor 8.Guide lights 14 is sent from He-Ne laser 5, and by filter 11, the direction of propagation and superlaser direction of beam propagation are identical.
Resonant cavity utilizes calibration target, autocollimation telescope and light spot shape feature to be calibrated during beginning, when resonant cavity enough collimates, the light beam of laser 5 is just by 15 parallel being radiated on each chamber mirror of refrative mirror aperture in the chamber, calibrate Hartmann sensor 8 this moment, makes the light beam aberration of unsteady cavity collimating status be approximately zero.When optical cavity is interfered or vibrate the generation imbalance, the guide lights 14 that Hartmann sensor 8 detects just has certain aberration, this aberration signal is delivered to main controller 9, main controller 9 drive actuator 10 again makes concave mirror 1 run-off the straight and translation compensation light beam tilt, follow the tracks of shake and chamber mirror translation imbalance, resonant cavity just can keep collimation like this, and guide lights also can be simulated imbalance situation in the superlaser light beam supervision chamber always.
The light beam inclined aberration that master controller 9 detects by Hartmann sensor becomes the three-dimensional controlled quentity controlled variable drive actuator 10 of stepping motor to proofread and correct concave mirror in the chamber with the defocused image differential conversion imbalance, it adopts pid control algorithm and FUZZY ALGORITHMS FOR CONTROL combination, drive actuator 10 is three-dimensional adjustable shelfs of a step motor control, it is that a translation stage is installed in the bottom surface on the basis of actuator 17, this translation stage can move forward and backward along optical axis direction, and by step motor control; Actuator 17 be the two-dimensional adjustment frame it can make convex lens 2 along the minute surface horizontal diameter and vertically diameter do little radian rotation, rotatablely move by step motor control.PID controls basic formula:
U in the formula (t) is the output of PID controller; E (t) is the imbalance angle; K
pBe proportional control factor; T
iBe integration time constant; T
dBe derivative time constant.
Because computer control is a kind of controlling of sampling, disperse, PID adjusting this moment rule should be passed through the numerical formula approximate calculation:
What actuator needed in this calibration system is not the absolute figure of controlled quentity controlled variable, but its increment is used following increment pid control algorithm:
Fuzzy control is specially adapted to be difficult for obtaining the controlled device of accurate model, the control law that it is summed up by operating personnel, use Fuzzy Set Theory, these control laws are write as a string fuzzy condition statement, be used for determining and the Correction and Control rule, make control law be more suitable for controlling object, the control better effects if.Its on-line tuning pid parameter K
p, T
i, T
d, they are with the absolute value of deviation e | functional relation K is arranged between the e|
p=f
1(| e|), K
i=f
2(| e|), K
d=f
3(| e|).This functional relation will lean on the control law of Test Summary to obtain.
Regulated light path to requiring align mode by control system before this before the control system work of the present invention, the judge that reaches align mode requires: the He-Ne guide lights is even from the garden ring light spot image of aperture 16 outputs, the sub-aperture of center and beam size and Hartmann sensor coupling.Calibrate hot spot standard state this moment with Hartmann sensor the back, and demarcating at this moment, wavefront is zero error (what Hartmann sensor was surveyed in the laser real work is exactly the comparison of actual wavefront and standard state wavefront).Back before the actual bright dipping of laser, the control system closed loop, control system just can be followed the tracks of the variation of laser beam wavefront error when the actual bright dipping of laser like this, and master control mirror-concave mirror is taked Real Time Drive, the compensation intravavity perturbations.
As shown in Figure 4, the starting stage: when system started working, whole self check earlier comprised Control Software and hardware; Self check is carried out initialization by the back to system parameters, comprises basic parameters such as setting control system initial velocity, simultaneously Hartmann sensor is carried out initial adjustment, surveys light path to aim at.The calibration stage: the adjusted open loop control system collimates to light path, and is if even, the stable then decidable light path of output facula collimates substantially, opposite if output facula secundly and unstable rule light path also need continue to regulate.The control stage: after light path reached initial collimation, the output steering light that Hartmann sensor detects should be the almost plane ripple, and demarcate the Hartmann this moment, can think that the basic aberration of output light-wave is approximately zero this moment.After Hartmann sensor was demarcated and to be finished, system was in continuous automatic mode, by the real-time detection wave front aberration of transducer, and gave drive unit closed loop calibration light path in real time with the aberration signal of wavefront.
After control system is finished the real time calibration task, system should first open loop after safety shutdown.
Before the task, should calibrate again under the control system.
Claims (9)
1, self-checking device in the mirror of positive-branch confocal unstable resonator chamber is characterized in that comprising following parts:
He-Ne laser (5), output laser guidance light, simulation superlaser transmission situation in the chamber, it connects firmly with refrative mirror (4) is in the same place;
Have refrative mirror (4) in the chamber of aperture (15) structure, its effect is side-coupled output, allows the low energy laser calibration beam pass through;
The scraper mirror (3) that has aperture (16), its effect is the low energy laser calibration beam that receives refrative mirror (4) in the chamber that has small structure, and side-coupled output, aim at the transmission route and the export target of simulating superlaser with this bundle low energy laser light beam;
Convex lens (2) is connected to the back of scraper mirror (3), and it and concave mirror make the stable vibration in resonant cavity of light beam together, amplify;
The Hartmann wave front sensor of high-precision detectable Laser Output Beam quality (8), main real-time detection concave mirror is with respect to shake, inclination and the translation of convex lens;
Main control computer (9) is accepted the cavity mirror misalignment signal that Hartmann wave front sensor (8) detects, and converts the step motor control signal after the processing to, after output to controllor for step-by-step motor drive stepping motor motion;
The concave mirror (1) that has stepping motor actuator (10), it accepts control signal and drives concave mirror (1) to do inclination, shake and translational motion with respect to convex lens (2), makes convex lens (2) and concave mirror (1) keep collimation;
The low energy laser light beam that He-Ne laser (5) sends passes the aperture (15) of refrative mirror (4), return scraper mirror (3) again after arriving scraper mirror (3), convex lens (2) successively, arriving the former again road of concave mirror (1) after refrative mirror in the chamber (4) reflection returns, vibration back and forth, at last from scraper mirror (3) output, Hartmann wave front sensor (8) is measured to be tilted, by drive actuator (10) concave mirror (1) is collimated with respect to refrative mirror (4) in convex lens (2) and the chamber after the data processing of the information via main control computer (9) of shake and translation.
2, the interior self-checking device of positive-branch confocal unstable resonator chamber mirror according to claim 1, it is characterized in that: described convex lens (2) is installed on the stepper motor driven two-dimensional adjustment frame (15), two-dimensional adjustment frame (15) makes convex lens (2) pitching and left rotation and right rotation in low-angle, lockable.
3, the interior self-checking device of positive-branch confocal unstable resonator chamber mirror according to claim 1, it is characterized in that: described concave mirror (1) is installed on the stepper motor driven three-dimensional regulation frame (10), three-dimensional regulation frame (10) makes concave mirror (1) pitching and left rotation and right rotation in low-angle, with parallel mobile along optical path direction, lockable.
4, the interior self-checking device of positive-branch confocal unstable resonator chamber mirror according to claim 1, it is characterized in that: described convex lens (2) is relative approaching with scraper mirror (3) distance, and these 2 chamber mirrors are done as a whole and base (13) connects firmly together.
5, the interior self-checking device of positive-branch confocal unstable resonator chamber mirror according to claim 4, it is characterized in that: described convex lens (2) and scraper mirror (3) are 45 and install.
6, the interior self-checking device of positive-branch confocal unstable resonator chamber mirror according to claim 1, it is characterized in that: master controller (9) adopts pid control algorithm and FUZZY ALGORITHMS FOR CONTROL combination, stable control concave mirror (1) motion.
7, the interior self-checking device of positive-branch confocal unstable resonator chamber mirror according to claim 1, it is characterized in that: in the described chamber that has aperture (15) refrative mirror (4) by two phases each other the speculum placed of an angle of 90 degrees form, one of them speculum has aperture (15).
8, the interior self-checking device of positive-branch confocal unstable resonator chamber mirror according to claim 1, it is characterized in that: a spectroscope (6) is arranged on the direction of the side-coupled output of refrative mirror in described chamber (4), its effect is most of laser-bounce output definite object, and the fraction transmission outputs to Hartmann sensor 8 display beams aberration information.
9, the interior self-checking device of positive-branch confocal unstable resonator chamber mirror according to claim 1 is characterized in that: also be connected to filter (11) behind described He-Ne laser (5).
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| DD226172A3 (en) * | 1983-02-24 | 1985-08-14 | Halle Feinmech Werke Veb | ARRANGEMENT FOR STABILIZING THE OUTPUT PARAMETERS OF A FOLDED LASER RESONATOR |
| CN87216562U (en) * | 1987-12-19 | 1988-11-09 | 浙江大学 | Stably aligned linear polarization output laser |
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