CN106840417A - One kind is directed to a lot of Shu Jiguang target spots wavefront test device and its method of testing - Google Patents
One kind is directed to a lot of Shu Jiguang target spots wavefront test device and its method of testing Download PDFInfo
- Publication number
- CN106840417A CN106840417A CN201710212789.0A CN201710212789A CN106840417A CN 106840417 A CN106840417 A CN 106840417A CN 201710212789 A CN201710212789 A CN 201710212789A CN 106840417 A CN106840417 A CN 106840417A
- Authority
- CN
- China
- Prior art keywords
- wavefront
- collimation
- translation stage
- rotation platform
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 29
- 238000010998 test method Methods 0.000 title claims abstract description 10
- 238000013519 translation Methods 0.000 claims abstract description 52
- 230000003287 optical effect Effects 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims description 13
- 230000008859 change Effects 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 12
- 230000000007 visual effect Effects 0.000 claims description 8
- 238000013461 design Methods 0.000 claims description 7
- 230000007246 mechanism Effects 0.000 claims description 7
- 238000000354 decomposition reaction Methods 0.000 claims description 6
- 238000009738 saturating Methods 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims 1
- 230000014616 translation Effects 0.000 description 33
- 238000010586 diagram Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J11/00—Measuring the characteristics of individual optical pulses or of optical pulse trains
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/10—Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation
Abstract
A lot of Shu Jiguang target spots wavefront test device and its method of testing are directed to the present invention relates to one kind,The test device includes collimation shrink beam lens,Wavefront sensor,First translation stage,Second translation stage,Adjustment platform and control system,The collimated shrink beam lens shrink beam of laser beam is into directional light,Directional light is incident to Wavefront sensor,The collimation shrink beam lens are located on the first translation stage,And first translation stage can along collimation shrink beam lens optical axis move,First translation stage and Wavefront sensor are located on the second translation stage,The adjustment platform includes the first rotation platform that linear formula is set successively,6-dof motion platform and the second rotation platform being hinged with the second translation stage,The present invention realizes that very multiple laser is tested in the wavefront of target position using a set of test device,Extra light source and equipment need not be increased,Just the fine registration of laser beam and collimation shrink beam lens can be realized,Obtain accurate wavefront distribution,Avoid introducing detecting error.
Description
Technical field
The invention belongs to laser beam quality control technology field, relate in particular to a kind of for a lot of beam laser target
Point wavefront test device and its method of testing.
Background technology
In high power solid-state laser device, to better meet Physical Experiment demand, must be abnormal to Beam Wave-Front at target spot
Change control effectively, thus, the precision measurement of wavefront is an important research content at the position.It is being applied to laser inertia
The a lot of beam laser aid of fusion research field is constrained, laser beam focuses on incidence from the diverse location of target ball, due to target chamber space
It is limited and light beam focuses on same point, it is impossible to set up wavefront sensing device respectively for each light beam.
The content of the invention
For a variety of deficiencies of prior art, in order to solve the above problems, it is proposed that one kind uses a set of test device reality
Test device and its method of testing that now very multiple laser is tested in the wavefront of target position.
To achieve the above object, the present invention provides following technical scheme：
One kind is directed to a lot of Shu Jiguang target spots wavefront test device, including：
With collimation shrink beam lens and Wavefront sensor that optical axis is set, the collimated shrink beam lens shrink beam of laser beam is into parallel
Light, directional light is incident to Wavefront sensor；
First translation stage, the collimation shrink beam lens are located on the first translation stage, and the first translation stage can be along collimation
The optical axis movement of shrink beam lens；
Second translation stage, first translation stage and Wavefront sensor are located on the second translation stage, second translation stage
Bottom be provided with the first electric pushrod；
Adjustment platform, the adjustment platform includes the first rotation platform, six-freedom motion that linear formula is set successively
Platform and the second rotation platform being hinged with the second translation stage, 2 platforms of the 6-dof motion platform are respectively with
One rotation platform, the second rotation platform are fixedly connected, and first rotation platform, the second rotation platform are vertically arranged, and second
Rotation platform is connected with the first electric pushrod；
And control system, the control system respectively with Wavefront sensor, the first rotation platform, six-freedom motion put down
The connection of platform, the second rotation platform and the first electric pushrod.
Further, the bottom of first translation stage is provided with slide mechanism, and the slide mechanism includes fixed plate, sliding panel
And the second electric pushrod being connected with control system, the fixed plate is located at the lower section of sliding panel, and fixed plate is flat with second
Moving stage is fixedly connected, and the sliding panel is fixedly connected with the first translation stage.
Further, the fixed plate upper surface is arranged parallel to collimate the groove of shrink beam lens axis, the sliding panel
Lower surface is provided with the lug with matching grooves, and the motor side and push rod end of second electric pushrod pass through contiguous block and consolidate respectively
Fixed board, sliding panel connection.
Further, first electric pushrod is set along vertical direction, and its motor side is connected with the second rotation platform, its
Push rod end is connected with the second translation stage, and second electric pushrod is along horizontally arranged.
Further, along horizontally arranged, second rotation platform is along vertical direction for first rotation platform
Set.
Further, a lot of beam laser beam has identical beam size, and incident along different directions, through identical Jiao
Away from condenser lens focus on same target spot, the collimation shrink beam lens are matched with condenser lens.
Further, the control system possesses wave front acquisition, wavefront with reference to setting, wavefront Zernike Mode Decompositions and divides
Analysis function.
Separately, the present invention also provides a kind of method of testing for a lot of Shu Jiguang target spots wavefront test device, including as follows
Step：
S1：Test device is placed at target spot, by the laser beam thang-kng of light path to be measured to target spot, and other light paths is closed
Laser；
S2：Adjustment 6-dof motion platform, the laser beam for treating light-metering road is scanned, until laser beam enters
Wavefront sensor visual field；
S3：The first rotation platform, the second rotation platform and the first electric pushrod are adjusted, laser beam is located at wavefront sensing
Device field of view center, adjusts the second electric pushrod, and hot spot bore is consistent with design bore in making Wavefront sensor visual field, record collimation
The position of shrink beam lens is first position；
S4：Control system gathers laser beam wavefront and is set to alignment wavefront reference, carries out laser beam and is contracted with collimation
The alignment function of beam lens；
S5：The second electric pushrod is adjusted, collimation shrink beam lens is reached wavefront defocusing amount minimum value, control system collection swashs
Light Beam Wave-Front is simultaneously set to the reference of device wavefront, adjusts the second electric pushrod, make in Wavefront sensor visual field hot spot bore with
Design bore is consistent, and control system is gathered and obtains laser beam wavefront；
S6：Repeat step S1~S5, gathers and obtains the laser beam wavefront of other light paths.
Further, laser beam includes the second rotary flat of control with the alignment function of collimation shrink beam lens in the step S4
The push rod end length of the anglec of rotation of platform and the first electric pushrod；
The control process of the anglec of rotation of second rotation platform, specifically includes following steps：
S11：The second electric pushrod is adjusted, collimation shrink beam lens are moved a certain distance, the position of record collimation shrink beam lens
The second place is set to, laser beam wavefront is gathered；
S12：Control system passes through wavefront Zernike Mode Decompositions and analytic function, by the defocus in laser beam wavefront
Amount is deducted, and obtains the inclination of wave front amount that laser beam axis has angle and bring with collimation shrink beam lens axis；
S13：Collimation shrink beam lens are reset to first position, and the second rotation platform of control rotates certain angle along single direction
Degree, control system collection laser beam wavefront simultaneously is set to newly be directed at wavefront reference, and repeat step S11~S12, observation wavefront inclines
The change of gradient, if direction change tilt quantity does not occur and value reduces, continues to rotate the second rotation platform in the direction, if
There is no direction change in tilt quantity and value increases, then the second rotation platform is rotated in the reverse direction, if tilt quantity direction is turned over
Turn, then rotate in the reverse direction the second rotation platform；
S14：Repeat step S13, until the introduced inclination of wave front amount of mobile collimation shrink beam lens is less than 1 μm, that is, completes
Laser beam and the alignment function for collimating shrink beam lens.
Further, the anglec of rotation of the control process of the push rod end length of first electric pushrod and the second rotation platform
Control process it is identical, and two kinds of control process can carry out in same sequential.
The beneficial effects of the invention are as follows：
Under the collective effect of the first electric pushrod, the second electric pushrod and adjustment platform, using a set of test device reality
Now very multiple laser is tested in the wavefront of target position, without extra light source and equipment is increased, just can realize laser beam with
The fine registration of shrink beam lens is collimated, accurate wavefront distribution is obtained, it is to avoid introduce detecting error.
Brief description of the drawings
Fig. 1 is overall structure diagram of the invention；
Fig. 2 is overall structure diagram of the invention；
Fig. 3 is overall structure diagram of the invention；
Fig. 4 is to collimate overall wavefront collection figure of the shrink beam lens 1 in first position；
Fig. 5 (a) is to collimate overall wavefront collection figure of the shrink beam lens 1 in the second place；
Fig. 5 (b) is the middle wave front acquisition figures deducted after defocusing amount of Fig. 5 (a)；
Fig. 6 is to adjust the overall wavefront collection figure after the second rotation platform anglec of rotation.
In accompanying drawing：1- collimation shrink beams lens, 2- Wavefront sensors, the translation stages of 3- first, the translation stages of 4- second, 5- are fixed
Plate, 6- sliding panels, the rotation platforms of 7- first, 8- 6-dof motion platforms, 801- platforms, the rotation platforms of 9- second, 10- connections
Block, the electric pushrods of 11- first, the electric pushrods of 12- second, 13- laser beams.
Specific embodiment
In order that those skilled in the art more fully understand technical scheme, it is right with reference to accompanying drawing of the invention
Technical scheme carries out clear, complete description, and based on the embodiment in the application, those of ordinary skill in the art exist
Other the similar embodiments obtained on the premise of not making creative work, should all belong to the scope of the application protection.
Additionally, the direction word mentioned in following examples, for example " on " D score " left side " " right side " etc. be only refer to the attached drawing direction, because
This, the direction word for using is for illustrative and not limiting the invention.
Embodiment one：
As Figure 1-3, it is a kind of to be directed to a lot of Shu Jiguang target spots wavefront test device, including collimation shrink beam lens 1, wavefront
Sensor 2, the first translation stage 3, the second translation stage 4, adjustment platform and control system, a lot of beam laser beam 13 have
Identical beam size, and it is incident along different directions, focus on same target spot, the collimation contracting through the condenser lens of identical focal length
Beam lens 1 and Wavefront sensor 2 are set with optical axis, and into directional light, directional light enters the collimated shrink beam of shrink beam lens 1 of laser beam 13
Wavefront sensor 2 is incident upon, the collimation shrink beam lens 1 are matched with condenser lens, and the matching refers to that laser beam 13 can be whole
It is incident at collimation shrink beam lens 1, and beam size after collimation is consistent with the effective aperture of Wavefront sensor 2.
The collimation shrink beam lens 1 are located on the first translation stage 3, and the bottom of first translation stage 3 is provided with slide mechanism,
In the presence of slide mechanism, first translation stage 3 can be moved along the optical axis of collimation shrink beam lens 1, to ensure to eliminate
Defocus difference between different laser beams 13.First translation stage 3 and Wavefront sensor 2 are located on the second translation stage 4.It is described
Slide mechanism includes fixed plate 5, the electric pushrod 12 of sliding panel 6 and second, and the fixed plate 5 is located at the lower section of sliding panel 6, and
Fixed plate 5 is fixedly connected with the second translation stage 4, and the sliding panel 6 is fixedly connected with the first translation stage 3, that is to say, that fixed plate
5 are connected as one with the second translation stage 4, and sliding panel 6 is connected as one with the first translation stage 3.In order to realize the first translation stage 3
Mobile, the upper surface of the fixed plate 5 is arranged parallel to collimate the groove of the optical axis of shrink beam lens 1, and the lower surface of the sliding panel 6 sets
There is the lug with matching grooves, the lug is located in groove.Motor side and the push rod end difference of second electric pushrod 12
It is connected with fixed plate 5, sliding panel 6 by contiguous block 10, second electric pushrod 12 is electric second along horizontally arranged
In the presence of dynamic push rod 12, sliding panel 6 drives the first translation stage 3 to be moved in groove.
It is described adjustment platform successively include linear formula set the first rotation platform 7,6-dof motion platform 8 and
With the second rotation platform 9,2 platforms 801 of the 6-dof motion platform 8 rotate with the first rotation platform 7, second respectively
Platform 9 is fixedly connected, that is to say, that the adjustment platform is integral type structure.The 6-dof motion platform 8 can be realized
Along the movement and the rotation around these three reference axis of three rectangular co-ordinate direction of principal axis of x, y, z.Second rotation platform 9 and second
Translation stage 4 is hinged, meanwhile, the bottom of second translation stage 4 is provided with the first electric pushrod 11 of vertical direction, first electricity
The motor side of dynamic push rod 11 is connected with the second rotation platform 9, and its push rod end is connected with the second translation stage 4, that is to say, that the first electricity
Dynamic push rod 11 can change the pitching angle between the second translation stage 4 and the second rotation platform 9.First rotation platform 7 along
Horizontally arranged, second rotation platform 9 is set along vertical direction, that is to say, that first rotation platform 7, the
Two rotation platforms 9 are vertically arranged, and in the presence of the first rotation platform 7, the second rotation platform 9, the second translation stage 4 can be realized
Stir up and down, left rotation and right rotation is operated.The second translation stage 4 can be moved along three D translations of rectangular co-ordinate direction of principal axis of x, y, z
Move to target spot, rotation and luffing angle scope are more than the angular range that laser beam 13 is distributed, and each adjustment dimension control
The kinematic accuracy of motor in some tens of pm magnitude, to meet accurate debugging demand.
The control system is revolved with Wavefront sensor 2, the first rotation platform 7,6-dof motion platform 8, second respectively
Turn platform 9, the first electric pushrod 11 and the second electric pushrod 12 to connect, the control system possesses wave front acquisition, wavefront ginseng
Examine setting, wavefront Zernike Mode Decompositions and analytic function.
Embodiment two：
A kind of method of testing for a lot of Shu Jiguang target spots wavefront test device, comprises the following steps：
S1：Test device is placed at target spot, by the thang-kng of laser beam 13 of light path to be measured to target spot, and other light is closed
The laser on road；
S2：Adjustment 6-dof motion platform 8, the laser beam 13 for treating light-metering road is scanned, until laser beam
13 enter the visual field of Wavefront sensor 2；
S3：The first rotation platform 7, the second rotation platform 9 and the first electric pushrod 11 are adjusted, laser beam 13 is located at ripple
The field of view center of front sensor 2, adjusts the second electric pushrod 12, makes hot spot bore and design bore one in the visual field of Wavefront sensor 2
Cause, 1 position of record collimation shrink beam lens is first position, and the design bore is the effective aperture of Wavefront sensor 2；
S4：Control system gathers the wavefront of laser beam 13, and is set to alignment wavefront reference, and now, wavefront is shown as light
The disturbance of Shu Boqian, the disturbance carries out laser beam 13 with collimation shrink beam lens 1 from light path shake, flow perturbation etc.
Alignment function；
S5：The second electric pushrod 12 is adjusted, collimation shrink beam lens 1 is reached wavefront defocusing amount minimum value, control system is adopted
The collection wavefront of laser beam 13 is simultaneously set to the reference of device wavefront, that is to say, that itself aberration of test device is set into device
Wavefront is referred to, and adjusts the second electric pushrod 12, and hot spot bore is consistent with design bore in making the visual field of Wavefront sensor 2, control system
System is gathered and obtains the wavefront of laser beam 13；
S6：Repeat step S1~S5, gathers and obtains the wavefront of laser beam 13 of other light paths.In the first electric pushrod
11st, under the collective effect of the second electric pushrod 12 and adjustment platform, realize very multiple laser in target spot using a set of test device
The wavefront test of position, without extra light source and equipment is increased, just can realize the essence of laser beam 13 and collimation shrink beam lens 1
Close alignment, obtains accurate wavefront distribution, it is to avoid introduce detecting error.
If the incident direction of laser beam 13 has angle with the axis of collimation shrink beam lens 1, detecting error may be introduced, because
This, it is necessary to laser beam 13 is aligned with collimation shrink beam lens 1, to eliminate error.It is saturating by shrink beam is collimated at both not to timing
Mirror 1 is moved along its optical axis, there is certain deviation angle, the deflection angle between the laser beam 13 of mobile preceding outgoing after movement
Degree is presented as tilt quantity on Wavefront sensor 2.Therefore, the laser beam 13 and the alignment function of collimation shrink beam lens 1, need
To be realized by the push rod end length of the anglec of rotation of the second rotation platform 9 of control and the first electric pushrod 11, and both
Control process is identical, and two kinds of control process can be carried out in same sequential, lifts debugging efficiency, it is also possible to carry out in different sequential.
The control process of the anglec of rotation of second rotation platform 9, specifically includes following steps：
S11：The second electric pushrod 12 is adjusted, collimation shrink beam lens 1 are moved a certain distance, record collimation shrink beam lens 1
Position be the second place, the wavefront of laser beam 13 is gathered, now, comprising coming because of the moving belt of collimation shrink beam lens 1 in wavefront
Defocusing amount and the tilt quantity brought with the axis angle of collimation shrink beam lens 1 by the axis of laser beam 13；
S12：Control system by wavefront Zernike Mode Decompositions and analytic function, by the wavefront of laser beam 13 from
Jiao's amount is deducted, and obtains inclination of wave front amount；
S13：Collimation shrink beam lens 1 are reset to first position, and the second rotation platform 9 of control rotates certain angle along single direction
Degree, the control system collection wavefront of laser beam 13 simultaneously is set to newly be directed at wavefront reference, and repeat step S11~S12 observes wavefront
The change of tilt quantity, if direction change tilt quantity does not occur and value reduces, illustrates that direction of rotation is correct, but adjustment amount is not enough,
Then continue to rotate the second rotation platform 9 in the direction, if direction change tilt quantity does not occur and value increases, illustrate direction of rotation
Mistake, then rotate in the reverse direction the second rotation platform 9, if tilt quantity direction overturns, illustrates that adjustment is excessive, then in reverse direction
Rotate the second rotation platform 9；
S14：Repeat step S13, until the introduced inclination of wave front amount of mobile collimation shrink beam lens 1 is less than 1 μm, that is, completes
Laser beam 13 and the alignment function of collimation shrink beam lens 1, that is, complete the alignment function of laser beam 13 and Wavefront sensor 2.
Embodiment three：
The present embodiment by taking the control process of the anglec of rotation of the second rotation platform 9 as an example, laser beam 13 with collimation shrink beam
The alignment procedures of lens 1 are as follows：
When collimation shrink beam lens 1 are in first position, wave front acquisition is carried out using Wavefront sensor 2, as shown in figure 4, whole
Peak-to-valley value (PV) value of body is little, PV=0.3 μm.Collimation shrink beam lens 1 are advanced to up to the second place along optical axis, and ripple is gathered again
Before, such as shown in Fig. 5 (a), PV=20.6 μm, control system is deducted defocusing amount therein by Zernike pattern analyses, is remained
Remaining is just tilt quantity, shown in such as Fig. 5 (b), PV=9.6 μm.
Collimation shrink beam lens 1 are reset to first position, and the second rotation platform 9 of control rotates clockwise certain angle, adopts
Wave front acquisition is carried out with Wavefront sensor 2, as shown in fig. 6, the PV values of entirety are 0.85 μm, that is to say, that mobile collimation shrink beam
The introduced inclination of wave front amount of lens 1 is less than 1 μm, completes alignment function.
Below the present invention is described in detail, the above, only the preferred embodiments of the invention, when can not
Limit the scope of the present invention, i.e., it is all to make impartial change and modification according to the application scope, all should still belong to covering scope of the present invention
It is interior.
Claims (10)
1. it is a kind of to be directed to a lot of Shu Jiguang target spots wavefront test device, it is characterised in that including：
With optical axis set collimation shrink beam lens and Wavefront sensor, the collimated shrink beam lens shrink beam of laser beam into directional light,
Directional light is incident to Wavefront sensor；
First translation stage, the collimation shrink beam lens are located on the first translation stage, and the first translation stage can be along collimation shrink beam
The optical axis movement of lens；
Second translation stage, first translation stage and Wavefront sensor are located on the second translation stage, the bottom of second translation stage
Portion is provided with the first electric pushrod；
Adjustment platform, the adjustment platform includes the first rotation platform, 6-dof motion platform that linear formula is set successively
And the second rotation platform being hinged with the second translation stage, 2 platforms of the 6-dof motion platform respectively with the first rotation
Turn platform, the second rotation platform to be fixedly connected, first rotation platform, the second rotation platform are vertically arranged, and the second rotation
Platform is connected with the first electric pushrod；
And control system, the control system respectively with Wavefront sensor, the first rotation platform, 6-dof motion platform,
Second rotation platform and the first electric pushrod are connected.
2. it is according to claim 1 a kind of to be directed to a lot of Shu Jiguang target spots wavefront test device, it is characterised in that described the
The bottom of one translation stage is provided with slide mechanism, and the slide mechanism includes fixed plate, sliding panel and is connected with control system
Second electric pushrod, the fixed plate is located at the lower section of sliding panel, and fixed plate is fixedly connected with the second translation stage, the slip
Plate is fixedly connected with the first translation stage.
3. it is according to claim 2 a kind of for a lot of Shu Jiguang target spots wavefront test device, it is characterised in that described solid
Fixed board upper surface is arranged parallel to collimate the groove of shrink beam lens axis, and the lower surface of the sliding panel is provided with and matching grooves
Lug, the motor side and push rod end of second electric pushrod are connected by contiguous block with fixed plate, sliding panel respectively.
4. it is according to claim 2 a kind of to be directed to a lot of Shu Jiguang target spots wavefront test device, it is characterised in that described the
One electric pushrod is set along vertical direction, and its motor side is connected with the second rotation platform, and its push rod end connects with the second translation stage
Connect, second electric pushrod is along horizontally arranged.
5. it is according to claim 1 a kind of to be directed to a lot of Shu Jiguang target spots wavefront test device, it is characterised in that described the
Along horizontally arranged, second rotation platform is set one rotation platform along vertical direction.
6. it is according to claim 1 a kind of to be directed to a lot of Shu Jiguang target spots wavefront test device, it is characterised in that it is described very
Multiple laser light beam has identical beam size, and incident along different directions, is focused on together through the condenser lens of identical focal length
One target spot, the collimation shrink beam lens are matched with condenser lens.
7. it is according to claim 6 a kind of for a lot of Shu Jiguang target spots wavefront test device, it is characterised in that the control
System processed possesses wave front acquisition, wavefront with reference to setting, wavefront Zernike Mode Decompositions and analytic function.
8. a kind of method of testing for a lot of Shu Jiguang target spots wavefront test device using as described in claim 1-7, its
It is characterised by, comprises the following steps：
S1：Test device is placed at target spot, by the laser beam thang-kng of light path to be measured to target spot, and swashing for other light paths is closed
Light；
S2：Adjustment 6-dof motion platform, the laser beam for treating light-metering road is scanned, until laser beam enters wavefront
Sensor field of view；
S3：The first rotation platform, the second rotation platform and the first electric pushrod are adjusted, laser beam is regarded positioned at Wavefront sensor
Field center, adjusts the second electric pushrod, and hot spot bore is consistent with design bore in making Wavefront sensor visual field, record collimation shrink beam
The position of lens is first position；
S4：Control system gathers laser beam wavefront and is set to alignment wavefront reference, carries out laser beam saturating with collimation shrink beam
The alignment function of mirror；
S5：The second electric pushrod is adjusted, collimation shrink beam lens is reached wavefront defocusing amount minimum value, control system collection laser light
Shu Boqian is simultaneously set to the reference of device wavefront, adjusts the second electric pushrod, makes hot spot bore and design in Wavefront sensor visual field
Bore is consistent, and control system is gathered and obtains laser beam wavefront；
S6：Repeat step S1~S5, gathers and obtains the laser beam wavefront of other light paths.
9. a kind of method of testing for a lot of Shu Jiguang target spots wavefront test device according to claim 8, its feature
It is that laser beam includes the anglec of rotation of the second rotation platform of control with the alignment function of collimation shrink beam lens in the step S4
The push rod end length of degree and the first electric pushrod；
The control process of the anglec of rotation of second rotation platform, specifically includes following steps：
S11：The second electric pushrod is adjusted, collimation shrink beam lens are moved a certain distance, the position of record collimation shrink beam lens is
The second place, gathers laser beam wavefront；
S12：Control system passes through wavefront Zernike Mode Decompositions and analytic function, by the defocusing amount button in laser beam wavefront
Remove, obtain the inclination of wave front amount that laser beam axis has angle and bring with collimation shrink beam lens axis；
S13：Collimation shrink beam lens are reset to first position, and the second rotation platform of control rotates to an angle along single direction, controls
System acquisition laser beam wavefront processed simultaneously is set to newly be directed at wavefront reference, and repeat step S11~S12 observes inclination of wave front amount
Change, if tilt quantity does not occur direction change and value and reduces, continue to rotate the second rotation platform in the direction, if inclining
There is no direction change in amount and value increases, then rotate in the reverse direction the second rotation platform, if tilt quantity direction overturns,
Rotate in the reverse direction the second rotation platform；
S14：Repeat step S13, until the introduced inclination of wave front amount of mobile collimation shrink beam lens is less than 1 μm, that is, completes laser
Light beam and the alignment function for collimating shrink beam lens.
10. a kind of method of testing for a lot of Shu Jiguang target spots wavefront test device according to claim 9, its feature
It is, the control process of the control process of the push rod end length of first electric pushrod and the anglec of rotation of the second rotation platform
It is identical, and two kinds of control process can carry out in same sequential.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710212789.0A CN106840417B (en) | 2017-04-01 | 2017-04-01 | Wavefront testing device and testing method for multiple laser targets |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710212789.0A CN106840417B (en) | 2017-04-01 | 2017-04-01 | Wavefront testing device and testing method for multiple laser targets |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106840417A true CN106840417A (en) | 2017-06-13 |
| CN106840417B CN106840417B (en) | 2023-08-04 |
Family
ID=59142309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710212789.0A Active CN106840417B (en) | 2017-04-01 | 2017-04-01 | Wavefront testing device and testing method for multiple laser targets |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106840417B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0955706A1 (en) * | 1998-05-04 | 1999-11-10 | Lambda Physik Gesellschaft Zur Herstellung Von Lasern Mbh | Laser system and method for narrow spectral linewidth through wavefront curvature compensation |
| CN1744394A (en) * | 2005-09-29 | 2006-03-08 | 中国科学院光电技术研究所 | Self-checking device in the mirror of positive-branch confocal unstable resonator chamber |
| CN101650157A (en) * | 2009-09-18 | 2010-02-17 | 中国科学院长春光学精密机械与物理研究所 | Detecting method and detecting device of surface-shape error of double curved surface convex reflecting mirror |
| JP2010102745A (en) * | 2008-10-21 | 2010-05-06 | Pulstec Industrial Co Ltd | Method for measuring wavefront aberration of laser light |
| CN101718619A (en) * | 2009-12-08 | 2010-06-02 | 电子科技大学 | Wave-front measuring instrument of collimation deflection beam and measuring method thereof |
| CN102749185A (en) * | 2012-07-06 | 2012-10-24 | 中国科学院西安光学精密机械研究所 | Defocusing amount testing system and method |
-
2017
- 2017-04-01 CN CN201710212789.0A patent/CN106840417B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0955706A1 (en) * | 1998-05-04 | 1999-11-10 | Lambda Physik Gesellschaft Zur Herstellung Von Lasern Mbh | Laser system and method for narrow spectral linewidth through wavefront curvature compensation |
| CN1744394A (en) * | 2005-09-29 | 2006-03-08 | 中国科学院光电技术研究所 | Self-checking device in the mirror of positive-branch confocal unstable resonator chamber |
| JP2010102745A (en) * | 2008-10-21 | 2010-05-06 | Pulstec Industrial Co Ltd | Method for measuring wavefront aberration of laser light |
| CN101650157A (en) * | 2009-09-18 | 2010-02-17 | 中国科学院长春光学精密机械与物理研究所 | Detecting method and detecting device of surface-shape error of double curved surface convex reflecting mirror |
| CN101718619A (en) * | 2009-12-08 | 2010-06-02 | 电子科技大学 | Wave-front measuring instrument of collimation deflection beam and measuring method thereof |
| CN102749185A (en) * | 2012-07-06 | 2012-10-24 | 中国科学院西安光学精密机械研究所 | Defocusing amount testing system and method |
Non-Patent Citations (2)
| Title |
|---|
| 刘兆栋;于丽娜;韩志刚;陈磊;: "五棱镜扫描法检测大口径近红外干涉仪准直波前", 中国激光, no. 04 * |
| 段亚轩;陈永权;赵建科;李坤;田留德;张洁;: "长焦距激光光学系统焦距测试方法", 中国激光, no. 04 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106840417B (en) | 2023-08-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8428454B2 (en) | Method and system for imaging high density biochemical arrays with sub-pixel alignment | |
| CN109416461B (en) | Tilt measurement and correction of coverslips in the optical path of a microscope | |
| CN209406712U (en) | A kind of five axis dispenser systems | |
| CN1268221A (en) | Image quality mapper for progressive eyeglasses | |
| CN102519510B (en) | Calibration device and calibration method of position sensitive sensor | |
| CN104181131B (en) | Infrared modulated luminescence generated by light two-dimensional imaging light path is automatically positioned calibrating installation | |
| CN104807544B (en) | Detection device and method for orbital angular momentum value | |
| CN206627219U (en) | One kind is directed to a lot of Shu Jiguang target spots wavefront test device | |
| CN113188765A (en) | Test system for MTF and anti-dispersion test of visible light detector | |
| CN109459214A (en) | A kind of focal length of convex lens measurement method and device | |
| CN216387599U (en) | Alignment device for optical transceiver system | |
| CN104423181B (en) | Focusing leveling device that a kind of scanning reflection mirror Oscillation Amplitude is automatically adjusted and method | |
| CN106597632A (en) | Ellipsoidal reflector perifocus high-precision positioning device and method | |
| CN106840417A (en) | One kind is directed to a lot of Shu Jiguang target spots wavefront test device and its method of testing | |
| CN109029935B (en) | Integrated measuring device for distance decentration and wave front aberration of optical lens | |
| CN108747001A (en) | Multifunctional monitoring system and monitoring method, pointing method for laser processing | |
| CN116907380A (en) | Accurate alignment method and system for measured mirror of point diffraction interferometer based on image information | |
| CN114001676B (en) | Optical axis automatic alignment method for knife edge instrument detection optical element | |
| Esposito et al. | Development of the first-light AO system for the large binocular telescope | |
| CN113899306A (en) | Four-quadrant detector calibration device and method based on optical tweezers system | |
| CN113009667A (en) | Optical lens optical axis correction device and method | |
| JP3992182B2 (en) | Microscope equipment | |
| KR101846239B1 (en) | Alignment system and method for freeform optics | |
| CN110261065A (en) | A kind of astronomy optical fiber transmission property automatic measurement system | |
| CN116045835B (en) | Ultra-large caliber plane or spherical surface optical interference testing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |