CN114001676B - Optical axis automatic alignment method for knife edge instrument detection optical element - Google Patents
Optical axis automatic alignment method for knife edge instrument detection optical element Download PDFInfo
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- 230000003287 optical effect Effects 0.000 title claims abstract description 91
- 238000000034 method Methods 0.000 title claims description 30
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- 238000003384 imaging method Methods 0.000 claims abstract description 19
- 238000006073 displacement reaction Methods 0.000 claims abstract description 16
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
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Abstract
The device consists of a conventional knife edge instrument, an imaging lens, a CCD camera, a five-dimensional electric regulating mechanism and a computer. The invention uses the point light source of the knife edge instrument as the collimation light source, the imaging system is placed at the back of the knife edge instrument, the imaging system and the knife edge instrument are relatively fixed, the imaging system and the knife edge instrument are used as a whole for subsequent five-dimensional adjustment, the CCD camera detects the imaging light spot after the point light source passes through the optical element, and the problem of coupling between the main optical axis of the light source of the knife edge instrument and the optical axis of the optical element to be measured is solved according to the light spot characteristics. Firstly, aiming at the deflection error, a plurality of images are acquired before and after imaging by using a CCD, and the deflection error is solved and compensated according to the astigmatic degree of an imaging light spot; secondly, aiming at displacement errors, a CCD is used for collecting light spot images on an image plane, and the displacement of the knife edge instrument is adjusted according to the ellipticity of the light spots. Finally, the alignment of the optical axis of the knife edge instrument and the optical axis of the mirror surface to be measured is completed. The invention realizes decoupling and automatic correction of deflection errors and displacement errors through light spot image acquisition and analysis, can obviously improve the debugging and detection efficiency of the knife edge instrument, is easy to implement, and effectively solves the problem of automatic alignment of the optical axes of the knife edge instrument and the element to be detected.
Description
Technical Field
The invention relates to the field of optical workshop detection and automatic control, in particular to an optical axis automatic alignment method for a knife edge instrument detection optical element.
Background
The knife edge method is a traditional optical detection method, spherical light is emitted by a point light source to irradiate an optical element to be detected, returned light spots contain wavefront surface machining errors of the optical element, and a shadow image containing error information can be observed after the knife edge is transversely cut off. In the detection of an optical workshop, the knife edge method has good response to rough machining and preliminary machining of the optical mirror surface, and machining errors can be detected qualitatively. However, the manual adjustment operation method of the incision instrument has high requirements on the experience level of an operator, the adjustment is time-consuming and labor-consuming, the manual alignment needs accurate matching of human eyes and hands, and the incision instrument needs to be continuously moved along the direction vertical to the main optical axis so as to compensate the offset of the incision instrument and the main optical axis. In order to improve the detection efficiency, knife edge instruments gradually develop in the direction of digitalization and automation. The first debugging step of using the knife edge instrument is to realize the alignment of the knife edge instrument and the optical axis of the optical element to be detected, the automatic alignment of the optical axis is a precondition for realizing automation of the knife edge instrument, and the traditional manual optical axis alignment method has the problems of larger subjective error and lower debugging efficiency and can not meet the requirement of automatic and efficient detection in the future.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide an automatic optical axis alignment device and an automatic optical axis alignment method for detecting the wavefront processing error of the surface of an optical element by a knife edge method. The method can remarkably improve the debugging and detecting efficiency of the knife edge instrument.
The technical scheme of the invention is as follows:
an automatic optical axis alignment method for a knife edge detector optical element is characterized by comprising the following steps:
(1) constructing an optical path: the method comprises the steps that a knife edge instrument is arranged on a five-dimensional electric adjusting mechanism, a knife edge is placed near the curvature center of an optical element to be measured, an imaging system and the knife edge instrument are relatively fixed, an image surface of the imaging system falls on the knife edge surface, and the five-dimensional electric adjusting mechanism and the imaging system are respectively connected with a computer;
(2) collecting an image: adjusting a five-dimensional electric adjusting mechanism by using the large Kong Xi light beam light source of the knife edge instrument to enable light spots of the knife edge instrument to enter a field of view of an imaging system, setting the field of view as an initial position, and collecting light spot images before focus, focus and after focus imaged by an optical element to be detected;
(3) initial position a of Y-axis motor around vertical horizontal axis and main optical axis 0 The L-step rotating motor is moved clockwise around the Y axis, spot images are acquired again at the positions before, after and at the focus, andextracting light spot edge information and binarized image information, screening out the image with the longest horizontal axis and the image with the longest vertical axis, and calculating the distance x from meridian focal line to sagittal focal line according to the carried axial position information 0 I.e. the distance from the position with the shortest horizontal axis length of the light spot to the position with the shortest vertical axis length of the light spot;
(4) continuously rotating clockwise by delta 1 angle around the Y-axis direction, collecting facula images at the positions before, after and after the focal point, extracting facula edge information and binarization image information, and calculating the distance x from meridian focal line to sagittal focal line 1 I.e. the distance from the position with the shortest horizontal axis length of the light spot to the position with the shortest vertical axis length of the light spot;
(5) calculating deflection s of knife edge instrument and light source thereof relative to main optical axis of optical element to be measured x The formula is as follows:
rotating the motor s x The knife edge instrument is parallel to the main optical axis of the optical element to be detected in the X direction, the error is (1+ [ V ] 2 ]) m, and m is the step length of the motor in one step;
(6) set the initial position b of the motor around the X axis 0 The L-step rotating motor is moved clockwise around the X-axis direction, spot images are collected at the positions before, after and at the focus, spot edge information is extracted, image information is binarized, and the distance y from meridian focus to sagittal focus is calculated 0 I.e. the distance from the position with the shortest horizontal axis length of the light spot to the position with the shortest vertical axis length of the light spot;
(7) continuously rotating clockwise by delta 1 angle around X-axis direction, collecting facula images at the positions before, after and after the focus, extracting facula edge information and binarization image information, and calculating the distance y from meridian focus to sagittal focus 1 I.e. the distance from the position with the shortest horizontal axis length of the light spot to the position with the shortest vertical axis length of the light spot;
(8) calculating deflection s of knife edge instrument and light source thereof relative to main optical axis of optical element to be measured y The formula is as follows:
rotating the motor s y The knife edge instrument is parallel to the main optical axis of the optical element to be detected in the Y direction, the error is (1+ [ V ] 2 ]) m, and m is the step length of the motor in one step;
(9) initial position c of displacement motor in X-axis direction 0 Comparing the length N of the long axis of the light spot acquired after two times of movement in the X-axis direction x Size, toward N x Less directional movement L steps to c 1 The method comprises the steps of carrying out a first treatment on the surface of the And then continue to move L to c in this direction 2 The method comprises the steps of carrying out a first treatment on the surface of the If c 2 N value ratio c 1 If the N value is large, the step is moved reversely by L/2, and the N values are compared until N appears again x A value inflection point; repeating the steps until the error of the N value before and after the inflection point is smaller than a specific value E, wherein the E value is 2 pixels, and the knife edge instrument is aligned with the main optical axis of the optical element to be detected in the X direction;
the initial position d of the displacement motor in the Y-axis direction is recorded 0 Comparing the length N of the long axis of the light spot acquired after two times of movement in the Y-axis direction y Size, toward N y Less directional movement L steps to d 1 The method comprises the steps of carrying out a first treatment on the surface of the And then continue to move L to d in this direction 2 The method comprises the steps of carrying out a first treatment on the surface of the If d 2 N at y Value ratio d 1 If the N value is large, the reverse movement is performed by L/2 steps, and N is compared y Size until N appears again y A value inflection point; repeating the steps until the error of the N value before and after the inflection point is smaller than the specific value E, and aligning the knife edge instrument with the main optical axis of the optical element to be detected in the Y direction.
The imaging system consists of a CCD camera and a lens thereof.
Compared with the prior art, the invention has the following beneficial effects:
the invention improves the efficiency and the accuracy of the optical detection of the knife edge method, reduces the excessive requirement for the experience of the operator in the manual implementation process of the knife edge method, and can realize the high-precision automatic alignment of the main shaft of the knife edge instrument and the displacement system thereof and the main optical axis of the optical element to be detected.
Drawings
FIG. 1 is a schematic diagram of a system structure of an automatic optical axis alignment device according to the present invention
FIG. 2 is a schematic diagram of the equivalent optical path of the system for automatically aligning an optical axis according to the present invention, showing yaw error adjustment about the Y-axis direction
FIG. 3 is a schematic diagram of the equivalent optical path of the system for automatically aligning an optical axis according to the present invention, showing yaw error adjustment about the X-axis direction
FIG. 4 is a schematic diagram of the equivalent optical path of the system for automatically aligning the optical axis according to the present invention, showing the adjustment of the displacement error in the X-axis direction
FIG. 5 is a schematic diagram of the equivalent optical path of the system for automatically aligning the optical axis according to the present invention, showing the Y-axis direction displacement error adjustment
The specific embodiment is as follows:
the invention is further illustrated in the following examples and figures, which should not be taken to limit the scope of the invention.
Referring to fig. 1, an automatic optical axis alignment device for detecting processing errors of optical elements by a knife edge instrument comprises the knife edge instrument and a displacement system 3 thereof, a CCD camera 5, a lens 4, an optical element 1 to be detected and a computer 6. The knife edge instrument and the displacement system 3 thereof consist of the knife edge instrument and a five-dimensional electric regulating mechanism, the knife edge instrument is arranged on the five-dimensional electric regulating mechanism, an image surface of an imaging system formed by the CCD camera 5 and the lens 4 falls on the knife edge surface, the imaging system and the knife edge instrument are relatively fixed, the follow-up five-dimensional regulation is carried out as a whole, the knife edge is placed near the curvature center of the optical element 1, the output end of the CCD camera 5 is connected with the input end of the computer, and the output end of the computer is connected with the control end of the five-dimensional electric regulating mechanism.
The point light source 2 used in the present invention is a white light source.
The radius of curvature of the optical element 1 is 482mm.
The CCD camera 5 has a resolution of 1200 pixels by 1600 pixels, each pixel having a side length of 5.5 μm.
The motor of the knife edge instrument displacement system 3 is 200 stepping intervals per circle, and the control card of the computer 6 performs 16 steps of subdivision.
Solving the deflection angle by a simultaneous astigmatism formula:
x 0 ＝A1×y 2 +A2×y 4 +A3×y 6
x 1 ＝A1×(y+Δ1) 2 +A2×(y+Δ1) 4 +A3×(y+Δ1) 6
x 2 ＝A1×(y+Δ2) 2 +A2×(y+Δ2) 4 +A3×(y+Δ2) 6
x 3 ＝A1×(y+Δ3) 2 +A2×(y+Δ3) 4 +A3×(y+Δ3) 6
Δ1, Δ2, Δ3 are the angles of each precession;
x 0 、X 1 、X 2 、x 3 the distance from meridian focal line to sagittal focal line is the degree of astigmatism;
a1, A2, A3 and y are the amounts to be solved, and y is the deflection angle. To facilitate solution, this is done with only low-order terms
Algebraic solving of equation:
x 0 ＝A1×y 2
x 1 ＝A1×(y+Δ1) 2
and (3) solving to obtain:
the automatic optical axis requires the following steps:
1. using a large Kong Xi light beam light source of a knife edge instrument, firstly, adjusting a displacement mechanism to enable a light spot of the knife edge instrument to enter a CCD field of view, and collecting light spot images before, after and at the initial position;
2. let the initial position of the Y-axis motor around the vertical horizontal axis and the main optical axis be a 0 The L-step rotating motor is moved clockwise around the Y axis, spot images are collected at the positions before, after and at the focus, spot edge information is extracted, image information is binarized, and the distance X from the meridian focus to the sagittal focus is calculated 0 I.e. the distance from the position with the shortest horizontal axis length of the light spot to the position with the shortest vertical axis length of the light spot;
3. continuously rotating clockwise by delta 1 angle around the Y-axis direction, collecting facula images at the positions before, after and after the focal point, extracting facula edge information, binarizing image information, and calculating the distance X from meridian focal line to sagittal focal line 1 I.e. the distance from the position with the shortest horizontal axis length of the light spot to the position with the shortest vertical axis length of the light spot;
4.Δ1, X 0 、X 1 Carrying out the solution of y by taking the formula, namely, rotating a motor by y, namely, the deflection quantity of a position knife edge instrument and a light source thereof relative to a main optical axis of the mirror surface to be detected, wherein the knife edge instrument is parallel to the main optical axis of the mirror surface to be detected in the X direction, the error is (1+ [ V ] 2) [ m ], and m is the step length of one step of the motor, as shown in figure 2;
5. the initial position of the motor around the X axis is b 0 The L-step rotating motor is moved clockwise around the X-axis direction, spot images are collected at the positions before, after and at the focus, spot edge information is extracted, image information is binarized, and the distance X from meridian focus to sagittal focus is calculated 0 I.e. the distance from the position with the shortest horizontal axis length of the light spot to the position with the shortest vertical axis length of the light spot;
6. continuously rotating clockwise by delta 1 angle around X-axis direction, collecting facula images at the positions before, after and after the focus, extracting facula edge information, binarizing image information, and calculating the distance X from meridian focus to sagittal focus 1 I.e. the distance from the position with the shortest horizontal axis length of the light spot to the position with the shortest vertical axis length of the light spot;
7.Δ1, X 0 、X 1 Carrying out the solution of Y by taking the formula, namely, rotating a motor by Y, namely, carrying out the parallel operation of the knife edge instrument in the Y direction and the main optical axis of the mirror surface to be tested, wherein the error is (1+ [ 2 ]) m, and m is the step length of one step of the motor, as shown in fig. 3, wherein the obtained Y is the deflection quantity of the knife edge instrument and the light source thereof relative to the main optical axis of the mirror surface to be tested;
8. the initial position of the displacement motor in the X-axis direction is c 0 Comparing the length N of the long axis of the light spot acquired by the CCD after twice movement in the X direction, and moving L steps to c in the direction with smaller N 1 The method comprises the steps of carrying out a first treatment on the surface of the And then continue to move L to c in this direction 2 The method comprises the steps of carrying out a first treatment on the surface of the If c 2 N value ratio c 1 If the N value is large, the motion is reversedMoving L/2 steps, comparing N sizes until N value inflection points appear again. Repeating the steps until the error of the N value before and after the inflection point is smaller than a specific value E, and aligning the knife edge instrument with the main optical axis of the mirror surface to be detected in the X direction, as shown in fig. 4;
9. the initial position of the displacement motor in the Y-axis direction is d 0 Comparing the length N of the long axis of the light spot acquired by the CCD after twice movement in the Y direction, and moving L steps to d in the direction with smaller N 1 The method comprises the steps of carrying out a first treatment on the surface of the And then continue to move L to d in this direction 2 The method comprises the steps of carrying out a first treatment on the surface of the If d 2 N value ratio d 1 And if the N value is large, reversely moving the step L/2, and comparing the N values until the inflection point of the N value appears again. Repeating the above steps until the error of the N value before and after the inflection point is smaller than the specific value E, and aligning the knife edge instrument with the main optical axis of the mirror surface to be detected in the Y direction, as shown in FIG. 5.
Claims (2)
1. An automatic optical axis alignment method for a knife edge detector optical element, comprising the steps of:
(1) constructing an optical path: the method comprises the steps that a knife edge instrument is arranged on a five-dimensional electric adjusting mechanism, a knife edge is placed near the curvature center of an optical element to be measured, an imaging system and the knife edge instrument are relatively fixed, an image surface of the imaging system falls on the knife edge surface, and the five-dimensional electric adjusting mechanism and the imaging system are respectively connected with a computer;
(2) collecting an image: adjusting a five-dimensional electric adjusting mechanism by using the large Kong Xi light beam light source of the knife edge instrument to enable light spots of the knife edge instrument to enter a field of view of an imaging system, setting the field of view as an initial position, and collecting light spot images before focus, focus and after focus imaged by an optical element to be detected;
(3) initial position a of Y-axis motor around vertical horizontal axis and main optical axis 0 The L-step rotating motor is moved clockwise around the Y axis, spot images are collected again at the positions before, after and at the focus, spot edge information and binarization image information are extracted, the image with the longest horizontal axis and the image with the longest vertical axis are selected through screening, and the distance x from the meridian focus to the sagittal focus is calculated according to the axial position information carried by the images 0； I.e. the shortest horizontal axis length of the light spotDistance to the shortest vertical axis length of the light spot;
(4) continuously rotating clockwise by delta 1 angle around the Y-axis direction, collecting facula images at the positions before, after and after the focal point, extracting facula edge information and binarization image information, and calculating the distance x from meridian focal line to sagittal focal line 1 I.e. the distance from the position with the shortest horizontal axis length of the light spot to the position with the shortest vertical axis length of the light spot;
(5) calculating deflection s of knife edge instrument and light source thereof relative to main optical axis of optical element to be measured x The formula is as follows:
rotating the motor s x The knife edge instrument is parallel to the main optical axis of the optical element to be measured in the X direction, and the error is that m is the step length of one step of the motor;
(6) set the initial position b of the motor around the X axis 0 The L-step rotating motor is moved clockwise around the X-axis direction, spot images are collected at the positions before, after and at the focus, spot edge information is extracted, image information is binarized, and the distance y from meridian focus to sagittal focus is calculated 0 I.e. the distance from the position with the shortest horizontal axis length of the light spot to the position with the shortest vertical axis length of the light spot;
(7) continuously rotating clockwise by delta 1 angle around X-axis direction, collecting facula images at the positions before, after and after the focus, extracting facula edge information and binarization image information, and calculating the distance y from meridian focus to sagittal focus 1 I.e. the distance from the position with the shortest horizontal axis length of the light spot to the position with the shortest vertical axis length of the light spot;
(8) calculating deflection s of knife edge instrument and light source thereof relative to main optical axis of optical element to be measured y The formula is as follows:
rotating the motor s y The knife edge instrument is parallel to the main optical axis of the optical element to be measured in the Y direction, and the error is thatm is the step length of one step of the motor;
(9) initial position c of displacement motor in X-axis direction 0 Comparing the length N of the long axis of the light spot acquired after two times of movement in the X-axis direction x Size, toward N x Less directional movement L steps to c 1 The method comprises the steps of carrying out a first treatment on the surface of the And then continue to move L to c in this direction 2 The method comprises the steps of carrying out a first treatment on the surface of the If c 2 N value ratio c 1 If the N value is large, the step is moved reversely by L/2, and the N values are compared until N appears again x A value inflection point; repeating the steps until the error of the N value before and after the inflection point is smaller than a specific value E, wherein the E value is 2 pixels, and the knife edge instrument is aligned with the main optical axis of the optical element to be detected in the X direction;
the initial position d of the displacement motor in the Y-axis direction is recorded 0 Comparing the length N of the long axis of the light spot acquired after two times of movement in the Y-axis direction y Size, toward N y Less directional movement L steps to d 1 The method comprises the steps of carrying out a first treatment on the surface of the And then continue to move L to d in this direction 2 The method comprises the steps of carrying out a first treatment on the surface of the If d 2 N at y Value ratio d 1 If the N value is large, the reverse movement is performed by L/2 steps, and N is compared y Size until N appears again y A value inflection point; repeating the steps until the error of the N value before and after the inflection point is smaller than the specific value E, and aligning the knife edge instrument with the main optical axis of the optical element to be detected in the Y direction.
2. The automatic optical axis alignment method for knife edge detector optical element according to claim 1, wherein the imaging system consists of a CCD camera (5) and its lens (4).
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