CN117504963A - Microfluidic device with liquid flow visualization micro-channel and preparation method thereof - Google Patents
Microfluidic device with liquid flow visualization micro-channel and preparation method thereof Download PDFInfo
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- 239000007788 liquid Substances 0.000 title claims abstract description 89
- 238000012800 visualization Methods 0.000 title claims abstract description 25
- 238000002360 preparation method Methods 0.000 title claims abstract description 21
- 239000000463 material Substances 0.000 claims abstract description 202
- 239000000758 substrate Substances 0.000 claims abstract description 84
- 239000010410 layer Substances 0.000 claims abstract description 52
- 239000011229 interlayer Substances 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims abstract description 19
- 238000000059 patterning Methods 0.000 claims abstract description 19
- 239000003086 colorant Substances 0.000 claims abstract description 8
- 238000005530 etching Methods 0.000 claims description 62
- -1 polyethylene terephthalate Polymers 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 17
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 11
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 11
- 239000004642 Polyimide Substances 0.000 claims description 8
- 229920001721 polyimide Polymers 0.000 claims description 8
- 239000002390 adhesive tape Substances 0.000 claims description 7
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 5
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 5
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 claims description 4
- 239000011112 polyethylene naphthalate Substances 0.000 claims description 4
- 238000009827 uniform distribution Methods 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 abstract description 6
- 230000009977 dual effect Effects 0.000 abstract 1
- 238000007788 roughening Methods 0.000 abstract 1
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- 238000010329 laser etching Methods 0.000 description 5
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00523—Etching material
- B81C1/00531—Dry etching
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Abstract
A microfluidic device with a liquid flow visualization micro-channel and a preparation method thereof are provided, and the preparation method comprises the following steps: patterning the surface of a first substrate material to obtain the first substrate material with a microstructure, wherein the microstructure is used for forming a rough layer on the surface of the first substrate material, and the first substrate material is a transparent or semitransparent flexible material; forming a patterned microchannel penetrating the interlayer material on the transparent interlayer material; bonding the surface with the microstructure on the first substrate material with the intermediate layer material to obtain a bonded material; and bonding the bonded material with a second substrate material, and assembling to obtain the microfluidic device, wherein the second substrate material is a flexible material with different colors from the first substrate material. The method of the invention can realize a dual enhanced liquid visualization solution of surface roughening and material color contrast by using a sandwich layer-by-layer stacked structure and selecting upper and lower interlayer materials of different colors.
Description
Technical Field
The invention relates to the field of micro-nano processing and micro-fluidic chip preparation, in particular to a micro-fluidic device with a liquid flow visualization micro-channel and a preparation method thereof.
Background
The microfluidic device is also called a lab-on-a-chip, is a device for realizing liquid manipulation and analysis under a microscale, and has great application potential in the fields of biology, chemistry and medical analysis. The volume of liquid in a microfluidic device generally needs to be directly observed and quantitatively calculated, and as the liquid flow channel of a conventional microfluidic chip is in a micrometer scale, the liquid flow condition is generally monitored in an auxiliary way through optical equipment and cannot be directly read through human eyes, which is complicated for a portable wearing device.
Traditional microfluidic devices have been developed from MEMS fabrication processes, but the processes are complex and high in mass production costs.
Disclosure of Invention
In view of the above technical problems, the present invention provides a microfluidic device with a liquid flow visualization micro-channel and a method for manufacturing the same, so as to at least partially solve at least one of the above mentioned technical problems.
In order to achieve the above purpose, the technical scheme of the invention is as follows:
as one aspect of the present invention, a method of fabricating a microfluidic device having a liquid flow visualization microchannel is provided.
As another aspect of the present invention, a microfluidic device is provided.
Specifically, as one aspect of the present invention, there is provided a method for manufacturing a microfluidic device having a liquid flow visualization microchannel, comprising: patterning the surface of a first substrate material to obtain the first substrate material with a microstructure, wherein the microstructure is used for forming a rough layer on the surface of the first substrate material, and the first substrate material is a transparent or semitransparent flexible material; forming a patterned microchannel penetrating the interlayer material on the transparent interlayer material; bonding the surface with the microstructure on the first substrate material with the intermediate layer material to obtain a bonded material; and bonding the bonded material with a second substrate material, and assembling to obtain the microfluidic device, wherein the second substrate material is a flexible material with different colors from the first substrate material.
According to some embodiments of the invention, patterning the first substrate material comprises: laser spot etching is performed on the first substrate material to form a patterned first substrate material.
According to some embodiments of the invention, the microstructures are an etched array of uniform distribution and substantially uniform size.
According to some embodiments of the invention, the current of the laser spot etching is 6-9A and the time of the laser spot etching is 0.03-0.08 ms.
According to some embodiments of the invention, forming a patterned fluidic channel through an interlayer material on a transparent interlayer material includes: the intermediate material is subjected to laser continuous etching, and the current of the laser continuous etching is 6-9A.
According to some embodiments of the invention, the method further comprises: alignment marks are set for the first base material, the intermediate layer material and the second base material respectively, and the first base material, the intermediate layer material and the second base material are aligned by the alignment marks before the first base material, the intermediate layer material and the second base material are attached.
According to some embodiments of the invention, the first substrate material and/or the second substrate material comprises at least one of polyethylene terephthalate, polydimethylsiloxane, polyethylene naphthalate, or polyimide, respectively; the middle layer material is double faced adhesive tape material.
According to some embodiments of the invention, further comprising: etching the first substrate material to obtain a first liquid outlet, and communicating the first liquid outlet with the patterning micro-channel through etching; and etching the second substrate material to obtain a second liquid outlet, and communicating the second liquid outlet with the patterning micro-channel through etching to form a path for liquid to flow into and flow out of the patterning micro-channel.
According to some embodiments of the invention, the first substrate material has a thickness of 10 to 1000 μm and the second substrate material has a thickness of 10 to 1000 μm.
As another aspect of the present invention, there is provided a microfluidic device prepared using the preparation method as described above.
Based on the technical scheme, the microfluidic device with the liquid flow visualization micro-channel and the preparation method thereof have at least one or a part of the following beneficial effects:
(1) According to the invention, the material with the microstructure is prepared by patterning the surface of the flexible first substrate material, the rough layer is formed on the surface of the first substrate material, diffuse reflection is formed on the surface of the rough layer by light irradiation, conditions are provided for the reflection difference of the micro flow channels before and after liquid flows, and the sandwich-shaped layer-by-layer stacking structure is formed by combining the second substrate materials with different colors and the intermediate layer material with the patterned micro flow channels, so that the visual effect of flowing liquid is further enhanced. The preparation method can realize the assembly process of the microfluidic device more quickly and efficiently, can observe the flow condition of liquid simply, conveniently and intuitively, and has wide application space in the technical field of microfluidic chips;
(2) Compared with the traditional photoetching technology for preparing the surface microstructure, the preparation method provided by the invention can construct the roughness of the rough layer on the surface of the first substrate by using two modes of continuous etching and point etching of a laser etching machine, can complete the penetrating type cutting of the interlayer material, can complete the preparation process of the microfluidic device by using the same equipment, has lower cost and relatively higher efficiency, and is beneficial to large-scale industrial production. The surface roughness can be changed according to the liquid turbulence condition by selecting laser etchers with different light spot sizes, and a preparation scheme of a customizable micro-fluidic device under different scenes is provided;
(3) The preparation method provided by the invention can flexibly select the upper and lower layer materials with different colors for different types of liquids, enhance the light change caused by liquid flow, and enhance visual resolution while ensuring lower cost.
Drawings
Fig. 1 is a flowchart of a method for manufacturing a microfluidic device with a liquid flow visualization microchannel according to an embodiment of the present invention;
FIG. 2 is a diagram of the steps of etching a first substrate material, an intermediate layer material, and a second substrate material, respectively, and assembling a microfluidic device according to an embodiment of the present invention, wherein A represents a side view of the materials used in each step, and B represents a top view of the materials used in each step;
FIG. 3 is a scanning electron microscope image of a microstructure formed by laser spot etching of a first substrate material in an embodiment of the present invention, wherein a is a partial enlarged image at a 10 μm scale, b is an apparent image at a 20 μm scale, c is an apparent image at a 100 μm scale, and d is an apparent image at a 200 μm scale;
fig. 4 is a chart of a microfluidic device for performing liquid visualization according to embodiment 1 of the present invention, where a is a chart of a fluidic channel visualization test when no liquid flows therethrough, and b is a chart of a fluidic channel visualization test when liquid flows therethrough.
Detailed Description
The present invention will be further described in detail below with reference to specific embodiments and with reference to the accompanying drawings, in order to make the objects, technical solutions and advantages of the present invention more apparent.
It should be understood that the description is only illustrative and is not intended to limit the scope of the invention. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the invention. It may be evident, however, that one or more embodiments may be practiced without these specific details. In addition, in the following description, descriptions of well-known techniques are omitted so as not to unnecessarily obscure the concepts of the present application.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "comprising" as used herein indicates the presence of a feature, step, operation, but does not preclude the presence or addition of one or more other features.
Where expressions like at least one of "A, B and C, etc. are used, the expressions should generally be interpreted in accordance with the meaning as commonly understood by those skilled in the art (e.g.," a system having at least one of A, B and C "shall include, but not be limited to, a system having a alone, B alone, C alone, a and B together, a and C together, B and C together, and/or A, B, C together, etc.). Where a formulation similar to at least one of "A, B or C, etc." is used, in general such a formulation should be interpreted in accordance with the ordinary understanding of one skilled in the art (e.g. "a system with at least one of A, B or C" would include but not be limited to systems with a alone, B alone, C alone, a and B together, a and C together, B and C together, and/or A, B, C together, etc.).
All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It should be noted that the terms used herein should be construed to have meanings consistent with the context of the present specification and should not be construed in an idealized or overly formal manner.
The liquid visualization scheme includes changing the liquid color, inducing liquid turbulence, and changing the reflectivity of the liquid flowing through the front and back flow channel materials. Wherein, the liquid hyperchromic treatment may pollute the liquid itself, resulting in detection errors. The laser etching is to focus the laser with high beam quality on a very small light spot so as to evaporate the material instantaneously, thereby achieving the etching effect.
In the process of realizing the invention, the microstructure is constructed on the surface of the micro-channel, the reflectivity difference of the flow channel before and after the liquid flows is caused to realize the liquid visualization, and the first substrate material and the second substrate material with different colors are selected by using a sandwich layer-by-layer stacking structure of three layers, so that the visual visualization of the liquid flow can be further enhanced.
Fig. 1 is a flowchart of a method for manufacturing a microfluidic device with a liquid flow visualization microchannel according to an embodiment of the present invention. Fig. 2 is a diagram of steps in the etching and assembling of the first substrate material, the intermediate layer material, and the second substrate material, respectively, into a microfluidic device according to an embodiment of the present invention, where a represents a side view of materials used in each step, and B represents a top view of materials used in each step.
According to some embodiments of the present invention, the present invention provides a method for preparing a microfluidic device having a liquid flow visualization microchannel, please refer to fig. 1, which includes steps S101 to S104.
In step S101, patterning is performed on the surface of the first substrate material to obtain a first substrate material with a microstructure, where the microstructure is used to form a rough layer on the surface of the first substrate material, and the first substrate material is a transparent or semitransparent flexible material.
In step S102, patterned fluidic channels are formed through the interlayer material on the transparent interlayer material.
In step S103, the surface having the microstructure on the first base material is bonded to the intermediate layer material, and the bonded material is obtained.
In step S104, the bonded material is bonded to a second substrate material, and the microfluidic device is assembled, where the second substrate material is a flexible material with a color different from that of the first substrate material.
According to some embodiments of the present invention, please refer to the process steps shown in fig. 2, a rough layer is formed on the surface of the first substrate material by patterning the surface of the flexible first substrate material, diffuse reflection is formed on the surface of the rough layer by light irradiation, conditions are provided for the reflection difference of the micro flow channels before and after the liquid flows, and a sandwich-shaped layer-by-layer stacked structure is formed by combining the second substrate materials with different colors and the intermediate layer material with the patterned micro flow channels, so that the visualization effect of the flowing liquid is further enhanced. The preparation method of the invention can realize the assembly process of the microfluidic device more quickly and efficiently, can observe the flow condition of liquid simply, conveniently and intuitively, and has wide application space in the technical field of microfluidic chips.
According to some embodiments of the invention, patterning the first substrate material comprises: laser spot etching is performed on the first substrate material to form a patterned first substrate material. In the related art, a material surface structure is generally constructed by using a photolithography process, which is more delicate but costly, and complicated in preparation steps, which is disadvantageous for mass production. The invention uses laser point etching technology and adopts laser with very small light spot to complete the etching of the microstructure on the surface of the material in a point etching mode, has simple preparation steps and can be popularized in industry.
According to some embodiments of the present invention, the current of the laser spot etching is 6 to 9A, for example, but not limited to, 6A, 6.5A, 7A, 7.5A, 8A, 8.5A or 9A. Preferably, the current of the laser spot etching is 7.5A. The laser spot etching time is 0.03 to 0.08ms, for example, but not limited to, 0.03ms, 0.04ms, 0.05ms, 0.06ms, 0.07ms, or 0.08ms. Preferably, the laser spot etching time is 0.06ms.
According to some embodiments of the present invention, the resolution of the patterned dotting image by laser pitting is 400-700 DPI, for example, but not limited to, 400DPI, 500DPI, 600DPI or 700 DPI. Preferably, the resolution of the dotting image is 600DPI.
According to some embodiments of the invention, the microstructures are an etched array of uniform distribution and substantially uniform size. FIG. 3 is a scanning electron microscope image of a microstructure formed by laser spot etching of a first substrate material in an embodiment of the present invention, wherein a is a partial enlarged image at a 10 μm scale, b is an apparent image at a 20 μm scale, c is an apparent image at a 100 μm scale, and d is an apparent image at a 200 μm scale. As shown in fig. 3, in the laser spot etching mode, laser moves on the surface of the first substrate material in a spot scanning manner, and at the moment of contact, the surface of the first substrate material melts and evaporates to form a circular area with an etching radius of 13-16 μm by taking a central photoelectric as a center, each etching shape is similar to a cone, the central etching depth is relatively deepest, the etching depth gradually decreases outwards along the radius, and according to a-d shown in fig. 3, the etching array on the surface of the first substrate material is uniform in steps and basically uniform in size, and can form a surface roughness layer structure with good structural uniformity.
According to some embodiments of the invention, forming a patterned fluidic channel through an interlayer material on a transparent interlayer material includes: the intermediate material is continuously etched by laser, and the current of the laser continuous etching is 6 to 9A, for example, but not limited to, 6A, 6.5A, 7A, 7.5A, 8A, 8.5A or 9A. Preferably, the laser continuous etching current is 7.5A. And using a laser etching machine, wherein the etching mode is laser continuous etching, and proper current parameters are selected according to the interlayer material to realize the penetrating cutting of the interlayer material.
According to some embodiments of the invention, further comprising: alignment marks are set for the first base material, the intermediate layer material and the second base material respectively, and the first base material, the intermediate layer material and the second base material are aligned by the alignment marks before the first base material, the intermediate layer material and the second base material are attached. The roughness of the side surface of the alignment mark can be reduced by cutting the alignment mark using a laser continuous etching process. And then, aligning the three layers of materials of the first substrate material, the middle layer material and the second substrate material through the alignment mark, and assembling through pressing to obtain the micro-fluidic device with the visualized liquid flow. The pressing time is 10 s-10 minutes, so that the three layers of materials are tightly adhered to each other, and the three layers of materials are tested, and no leakage is ensured when the liquid flows. Using a cross, a circle or other regular shape as the alignment mark and etching the alignment mark by a laser continuous etching mode, continuing as shown in fig. 2, the alignment mark may use a cross having a length and a width of 5mm, for example.
According to some embodiments of the invention, the first substrate material and/or the second substrate material comprises at least one of polyethylene terephthalate, polydimethylsiloxane, polyethylene naphthalate, or polyimide, respectively; the middle layer material is double faced adhesive tape material. Wherein the first substrate material may be selected from polyethylene terephthalate, polydimethylsiloxane, polyethylene naphthalate or transparent polyimide. The intermediate layer material may be selected from different double sided adhesive tapes, preferably, for example, transparent double sided adhesive tape of model 9495LE may be used. The second substrate material is typically a translucent coloured material chosen as a primary principle in contrast to the colour of the first substrate material, more specifically for example a yellow or brown colour may be chosen, for example one of polyethylene terephthalate, polydimethylsiloxane or polyimide.
According to some embodiments of the present invention, the surface of the first substrate material having the microstructure is attached to the intermediate layer material, the intermediate layer material is made of a double-sided tape material, the rough layer covered on the area outside the patterned micro flow channel is filled by the viscosity of the double-sided tape material, so that the area outside the patterned micro flow channel does not exhibit the diffuse reflection phenomenon of light, and the surface of the double-sided tape material is as uniform as possible by using the double-sided tape material, thereby reducing bubbles generated in the attaching process, and after pressing, ensuring that the three layers of materials are tightly combined, so that no liquid leakage occurs. Ensuring the convenience and higher use value of the microfluidic device.
According to some embodiments of the invention, further comprising: and etching the first substrate material to obtain a first liquid outlet, and communicating the first liquid outlet with the patterned micro-channel through etching. And etching the second substrate material to obtain a second liquid outlet, and communicating the second liquid outlet with the patterning micro-channel through etching to form a path for liquid to flow into and flow out of the patterning micro-channel. For example, a laser continuous etching mode may be used, with a current of 7.5A selected to etch the first and second liquid outlets. The shapes of the first liquid outlet and the second liquid outlet can be the same or different, preferably, the shapes of the first liquid outlet and the second liquid outlet are the same regular shape, for example, the first liquid outlet and the second liquid outlet can be round or square. The specific dimensions may be, for example, circles with a diameter of 2mm or squares with a side length of 2 mm.
According to some embodiments of the invention, when the laser is used for continuously etching the patterned micro-channel, the patterned micro-channel is prepared by a penetrating etching method, and the roughness of the side surface of the patterned micro-channel structure is reduced, so that the resistance caused by the side surface of the structure is reduced when the liquid is turbulent. In the patterned micro flow channel, the width of the micro flow channel in the direction parallel to the intermediate layer material is 220 to 260 μm, for example, 220 μm, 230 μm, 240 μm, 250 μm or 260 μm, preferably 240 μm.
According to some embodiments of the invention, the first substrate material has a thickness of 10 to 1000 μm and the second substrate material has a thickness of 10 to 1000 μm.
Preferably, the thickness of the first substrate material is 115 to 135 μm, for example, but not limited to, 115 μm, 120 μm, 125 μm, 130 μm or 135 μm. The thickness of the second base material is 90 to 110 μm, for example, but not limited to, 90 μm, 95 μm, 100 μm, 105 μm or 110 μm.
According to some embodiments of the present invention, the present invention further provides a microfluidic device, which is prepared by using the preparation method described above.
According to some embodiments of the invention, the micro-fluidic device can cause the diffuse reflection phenomenon of light through the existence of a microstructure, generate liquid turbulence and change the condition of changing the reflectivity of the patterned micro-channels before and after the liquid flows, and can observe the existence of the channels in a visual manner more clearly when no liquid flows; when the liquid flows, the reflectivity of the surface of the rough layer is changed in the micro-channel area covered by the liquid, and the color of the position covered by the channel can be observed to be light visually.
The following examples are given to illustrate the technical scheme of the present invention in detail. It should be noted that the following specific embodiments are only examples and are not intended to limit the present invention.
Example 1
Preparing a microfluidic device with a liquid flow visualization microchannel, comprising the steps of:
a polyethylene terephthalate material of 125±10 μm was selected as the transparent first quaternary material. And using a laser point etching mode, performing patterned point scanning treatment on the surface of the polyethylene terephthalate material by adjusting the current to 7.5A, and forming a rough layer of the microstructure, wherein the resolution of a dotting image is adjusted to 600DPI. The laser spot etching time is 0.06ms, and the circular etching radius of the cone bottom surface etched by the laser spot is about 15 mu m, so that a relatively uniform rough layer structure is formed.
A transparent 9495 LE-type double faced adhesive tape with the thickness of 170 μm is selected as an interlayer material, a laser continuous etching mode is used, and 7.5A penetrating type cutting patterning micro-channels are selected as electric current. Wherein the width of the micro flow channel is 240 μm. A brown polyimide material with a thickness of 100 μm was selected as the second base material. And cutting the alignment marks for the polyethylene terephthalate material, the double sided tape material, and the brown polyimide material, respectively, using a laser continuous etching mode with a current of 7.5A.
And cutting a liquid inlet on the brown polyimide material and a liquid outlet on the polyethylene terephthalate material respectively by using a laser continuous etching mode, and communicating the liquid inlet and the liquid outlet with the patterning micro-channels respectively by using laser continuous etching, wherein the shape of the liquid inlet is the same as that of the liquid outlet.
One surface of a surface micro-structure rough layer of the polyethylene terephthalate material faces to the double faced adhesive tape material, the three layers of materials are aligned through the alignment mark and are uniformly pressed for 1 minute by the ground plane, and therefore the tight fitting of the three layers of structures is completed.
And carrying out liquid visual test on the prepared microfluidic device. Fig. 4 is a chart of a microfluidic device for performing liquid visualization according to embodiment 1 of the present invention, where a is a chart of a fluidic channel visualization test when no liquid flows therethrough, and b is a chart of a fluidic channel visualization test when liquid flows therethrough. The prepared visual microfluidic device comprises a liquid inlet, a liquid outlet, an alignment mark and a liquid flow channel. As shown in fig. 4 a, the absence of liquid injection in the micro flow channel is clearly visible due to the presence of the surface microstructure. Fig. 4 b shows the case of liquid injection in the micro flow channel, where the front end of the liquid is located in the central region, the reflectivity of the material surface is changed compared with the non-liquid region, and the color of the region where the liquid exists is obviously lighter. The microfluidic device based on the implementation of the invention can perfectly realize the requirement of liquid visualization, and meanwhile, the preparation process is simple, the cost is low, and the microfluidic device is suitable for mass production.
The polyethylene terephthalate material is subjected to laser etching by using laser spot etching time of 0.03ms, 0.04ms, 0.05ms, 0.06ms, 0.07ms and 0.08ms respectively, and according to experiments, the preparation of the surface microstructure can be well realized by changing the laser residence time during laser etching, so that the surface roughness prepared at different etching time of 0.03-0.08 ms is good, and the preparation method has the advantages of good universality and convenience in rapid customization and application.
The foregoing description of the embodiments has been provided for the purpose of illustrating the general principles of the invention, and is not meant to limit the invention thereto, but to limit the invention thereto, and any modifications, equivalents, improvements and equivalents thereof may be made without departing from the spirit and principles of the invention.
Claims (10)
1. A method of fabricating a microfluidic device having a liquid flow visualization microchannel, comprising:
patterning the surface of a first substrate material to obtain the first substrate material with a microstructure, wherein the microstructure is used for forming a rough layer on the surface of the first substrate material, and the first substrate material is a transparent or semitransparent flexible material;
forming a patterned microchannel through the interlayer material on a transparent interlayer material;
bonding the surface with the microstructure on the first substrate material with the intermediate layer material to obtain a bonded material;
and bonding the bonded material with a second substrate material, and assembling to obtain the microfluidic device, wherein the second substrate material is a flexible material with different colors from the first substrate material.
2. The method of manufacturing according to claim 1, wherein the patterning the first base material comprises:
and performing laser spot etching on the first substrate material to form a patterned first substrate material.
3. The method of claim 1, wherein the microstructures are an etched array of uniform distribution and substantially uniform size.
4. The production method according to claim 2, wherein the current of the laser spot etching is 6 to 9A, and the time of the laser spot etching is 0.03 to 0.08ms.
5. The method of manufacturing of claim 1, wherein the forming patterned fluidic channels through the interlayer material on the transparent interlayer material comprises:
and carrying out laser continuous etching on the interlayer material, wherein the current of the laser continuous etching is 6-9A.
6. The production method according to any one of claims 1 to 5, further comprising:
and respectively setting alignment marks for the first substrate material, the intermediate layer material and the second substrate material, and aligning the first substrate material, the intermediate layer material and the second substrate material by using the alignment marks before bonding the first substrate material, the intermediate layer material and the second substrate material.
7. The production method according to any one of claims 1 to 5, wherein the first base material and/or the second base material each comprises at least one of polyethylene terephthalate, polydimethylsiloxane, polyethylene naphthalate, or polyimide;
the intermediate layer material is a double faced adhesive tape material.
8. The production method according to any one of claims 1 to 5, further comprising:
etching the first substrate material to obtain a first liquid outlet, and communicating the first liquid outlet with the patterning micro-channel through etching;
and etching the second substrate material to obtain a second liquid outlet, and communicating the second liquid outlet with the patterning micro-channel through etching to form a path for liquid to flow into and out of the patterning micro-channel.
9. The production method according to any one of claims 1 to 5, wherein the thickness of the first base material is 10 to 1000 μm and the thickness of the second base material is 10 to 1000 μm.
10. A microfluidic device prepared using the preparation method of any one of claims 1 to 9.
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