CN117451025A - Single-axis MEMS gyroscope - Google Patents
Single-axis MEMS gyroscope Download PDFInfo
- Publication number
- CN117451025A CN117451025A CN202311711101.5A CN202311711101A CN117451025A CN 117451025 A CN117451025 A CN 117451025A CN 202311711101 A CN202311711101 A CN 202311711101A CN 117451025 A CN117451025 A CN 117451025A
- Authority
- CN
- China
- Prior art keywords
- driving
- sub
- detection
- coupling
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims abstract description 124
- 230000008878 coupling Effects 0.000 claims abstract description 80
- 238000010168 coupling process Methods 0.000 claims abstract description 80
- 238000005859 coupling reaction Methods 0.000 claims abstract description 80
- 244000126211 Hericium coralloides Species 0.000 claims abstract description 30
- 230000009471 action Effects 0.000 claims abstract description 7
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 230000008859 change Effects 0.000 description 9
- 238000006073 displacement reaction Methods 0.000 description 7
- 239000003990 capacitor Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
Abstract
The invention relates to the technical field of gyroscopes, and discloses a single-axis MEMS gyroscope, which comprises: the driving connecting elastic piece is fixed on the driving anchor point; the two driving mass blocks are distributed along the X-axis direction; the detection connecting elastic piece and the four detection mass blocks are connected with the driving mass block through the detection connecting elastic piece; the coupling assembly comprises two coupling elastic pieces and coupling beams connected with the two driving mass blocks, and each coupling elastic piece is connected with the two driving mass blocks and the two detection mass blocks; the four comb tooth driving electrodes are symmetrically distributed in the two driving mass blocks; the four comb teeth drive the detection electrodes and are symmetrically distributed in the two driving mass blocks; when the angular velocity in the X-axis direction is detected, the mass block is driven to move along the Y-axis direction, and the detection mass block moves along the Z-axis direction under the action of the Coriolis force. The single-axis MEMS gyroscope disclosed by the invention has the advantages of large capacitance, good linearity and high sensitivity.
Description
Technical Field
The invention relates to the technical field of gyroscopes, in particular to a single-axis MEMS gyroscope.
Background
The gyroscope is a sensing device for measuring the rotation angle or angular displacement of an object, the micro-electromechanical gyroscope based on the micro-nano processing technology is called an MEMS gyroscope, the MEMS gyroscope realizes the measurement of angular velocity through the Coriolis effect, specifically, when the external angular velocity is detected, the driving mass block can generate resonance motion under the driving action of the driving electrode, the detecting mass block can generate displacement under the action of the Coriolis force, and then the displacement is reflected on the detecting electrode, so that the measurement of the angular velocity is realized. The driving electrode and the driving detection electrode of the MEMS gyroscope commonly used at present are of flat capacitive structures, and the gyroscope of the structure is low in limited capacitance, poor in linearity and low in sensitivity due to the structure.
Disclosure of Invention
Based on the above, the invention aims to provide the single-axis MEMS gyroscope, which solves the problems existing in the prior art, has the characteristics of large capacitance, good linearity and high sensitivity, and improves the stability of the single-axis MEMS gyroscope.
In order to achieve the above purpose, the invention adopts the following technical scheme:
a single axis MEMS gyroscope defining an X-axis direction, a Y-axis direction, and a Z-axis direction that are perpendicular to each other, the single axis MEMS gyroscope comprising:
the device comprises a driving anchor point and a driving connection elastic piece, wherein one end of the driving connection elastic piece is fixed on the driving anchor point, and the driving connection elastic piece extends along the Y-axis direction;
the two driving mass blocks are distributed along the X-axis direction, and each driving mass block is connected with the other end of the driving connecting elastic piece;
the detection connecting elastic piece and the four detection mass blocks are connected with the driving mass blocks through the detection connecting elastic piece, two ends of each driving mass block along the Y-axis direction correspond to the two detection mass blocks respectively, and the detection connecting elastic piece extends along the Y-axis direction;
the coupling assembly comprises a coupling beam and two coupling elastic pieces, each coupling elastic piece is connected with two driving mass blocks and two detection mass blocks, and two ends of the coupling beam are respectively connected with the two driving mass blocks;
the four comb tooth driving electrodes are arranged in one driving mass block along the Y-axis direction, the other two comb tooth driving electrodes are arranged in the other driving mass block along the Y-axis direction, and the four comb tooth driving electrodes are symmetrically distributed in the two driving mass blocks;
the four comb tooth driving detection electrodes are distributed in one driving mass block along the Y-axis direction, the other two comb tooth driving detection electrodes are arranged in the other driving mass block along the Y-axis direction, and the four comb tooth driving detection electrodes are symmetrically distributed in the two driving mass blocks;
when the angular velocity in the X-axis direction is detected, the driving mass block can move along the Y-axis direction, and the detecting mass block moves along the Z-axis direction under the action of the Coriolis force.
As a preferable scheme of unipolar MEMS gyroscope, unipolar MEMS gyroscope still includes the coupling anchor, the coupling elastic component includes coupling frame and four edges the coupling sub-elastic component that Y axle direction extends, the coupling frame with coupling anchor fixed connection, two the one end of coupling sub-elastic component respectively with drive mass links to each other, other two the one end of coupling sub-elastic component respectively with detect mass links to each other, four the other end of coupling sub-elastic component respectively with four angles of coupling frame link to each other.
As a preferable scheme of the single-axis MEMS gyroscope, the coupling beam is a tuning fork coupling beam, the tuning fork coupling beam comprises a coupling sub-beam and two tuning fork pieces, the two tuning fork pieces are respectively positioned at two ends of the coupling sub-beam, and the two tuning fork pieces and the two driving mass blocks are arranged in one-to-one correspondence.
As a preferable scheme of the single-axis MEMS gyroscope, the detection connection elastic piece comprises a detection frame and four detection beams, one ends of the four detection beams are respectively connected with four corners of the detection frame, the other ends of the two detection beams of each detection connection elastic piece are connected with the detection mass block, and the other ends of the other two detection beams are connected with the driving mass block.
As a preferred embodiment of the uniaxial MEMS gyroscope, each of the proof masses is connected to the driving mass by at least two of the proof connection elastic members.
As a preferable scheme of the single-axis MEMS gyroscope, the number of the driving connecting elastic pieces and the number of the driving anchor points are four, the four driving connecting elastic pieces and the four driving anchor points are arranged in one-to-one correspondence, and each driving connecting elastic piece is connected with the top end of one side, deviating from the other driving mass block, of one driving mass block.
As a preferable scheme of the single-axis MEMS gyroscope, the driving mass block is provided with a first avoiding groove, each comb tooth driving electrode comprises a first driving sub-electrode and a second driving sub-electrode, the first driving sub-electrode is positioned in the first avoiding groove and comprises a plurality of first driving sub-comb teeth which are distributed at intervals, the second driving sub-electrode is fixed on the driving mass block and comprises a plurality of second driving sub-comb teeth which are distributed at intervals, and the first driving sub-comb teeth and the second driving sub-comb teeth are sequentially distributed at intervals.
As an optimized scheme of the single-axis MEMS gyroscope, each comb-tooth driving electrode comprises two first driving sub-electrodes and two second driving sub-electrodes, the two first driving sub-electrodes are oppositely arranged in the first avoiding groove, and the two second driving sub-electrodes and the two first driving sub-electrodes are arranged in one-to-one correspondence.
As a preferable scheme of unipolar MEMS gyroscope, be equipped with the second on the drive mass piece and dodge the groove, every broach drive detection electrode all includes first drive detection sub-electrode and second drive detection sub-electrode, first drive detection sub-electrode is located the second dodge the inslot and include a plurality of interval distribution's first drive detection sub-broach, the second drive detection sub-electrode is fixed on the drive mass piece and include a plurality of interval distribution's second drive detection sub-broach, first drive detection sub-broach with second drive detection sub-broach is interval arrangement in proper order.
As a preferable scheme of the single-axis MEMS gyroscope, each comb tooth driving detection electrode comprises two first driving detection sub-electrodes and two second driving detection sub-electrodes, the two first driving detection sub-electrodes are oppositely arranged in the second avoidance groove, and the two first driving detection sub-electrodes and the two second driving detection sub-electrodes are arranged in one-to-one correspondence.
The beneficial effects of the invention are as follows: compared with a flat-plate capacitor structure, the single-axis MEMS gyroscope disclosed by the invention has the advantages that the capacitance is large and the linearity is good, the sensitivity of the single-axis MEMS gyroscope is improved, the displacement amplitude driven by the comb drive electrode can be processed into a larger or smaller range according to the needs of a user, the coupling component can couple the motion of the two drive mass blocks, so that the two drive mass blocks and the like can move in a large reverse direction, the influence of process deviation and external environment change on the output displacement of the drive mass blocks is reduced, the working stability of the single-axis MEMS gyroscope is ensured, when the angular velocity of the outside along the X-axis direction is detected, the comb drive electrode drives the drive mass block to move along the Y-axis direction, the detection mass block moves along the Z-axis direction under the action of the coriolis force, the detection of the angular velocity is finally realized, and the capacitance change detected by the comb drive detection electrode can be used for adjusting the capacitance change of the comb drive electrode in real time, and the stable operation of the single-axis MEMS gyroscope is ensured.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following description will briefly explain the drawings needed in the description of the embodiments of the present invention, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the contents of the embodiments of the present invention and these drawings without inventive effort for those skilled in the art.
FIG. 1 is a schematic diagram of a single axis MEMS gyroscope provided in an embodiment of the present invention;
FIG. 2 is a schematic diagram of a detection state of a single-axis MEMS gyroscope according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a detection connection spring of a single axis MEMS gyroscope provided by an embodiment of the present invention;
FIG. 4 is a schematic diagram of a coupling spring for a single axis MEMS gyroscope provided in an embodiment of the present invention;
FIG. 5 is a schematic diagram of a coupling beam of a single axis MEMS gyroscope provided in an embodiment of the present invention;
fig. 6 is an enlarged view of fig. 1 at circle a.
In the figure:
11. driving an anchor point; 12. coupling anchor points;
21. a driving connection elastic piece; 22. driving the mass block; 221. a first avoidance groove; 222. a second avoidance groove; 2201. a first drive mass; 2202. a second drive mass;
31. detecting the connecting elastic piece; 311. a detection frame; 312. detecting a beam; 32. detecting a mass block; 3201. a first proof mass; 3202. a second proof mass; 3203. a third proof mass; 3204. a fourth proof mass;
41. a coupling beam; 411. coupling the sub-beams; 412. a tuning fork member; 42. a coupling elastic member; 421. a coupling frame; 422. a coupling sub-elastic member;
5. comb teeth driving electrodes; 51. a first driving sub-electrode; 52. a second driving sub-electrode; 501. a first comb-teeth driving electrode; 502. a second comb-teeth driving electrode; 503. a third comb-teeth driving electrode; 504. a fourth comb-teeth driving electrode;
6. the comb teeth drive the detection electrode; 61. a first drive detection sub-electrode; 62. a second drive detection sub-electrode; 601. the first comb teeth drive the detection electrode; 602. the second comb teeth drive the detection electrode; 603. the third comb teeth drive the detection electrode; 604. the fourth comb teeth drive the detection electrode.
Detailed Description
In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first position" and "second position" are two different positions.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixed or removable, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
The present embodiment provides a uniaxial MEMS gyroscope, as shown in fig. 1, defining an X-axis direction, a Y-axis direction, and a Z-axis direction that are perpendicular to each other, and the X-axis direction, the Y-axis direction, and the Z-axis direction are shown in fig. 1 and 2. The single-axis MEMS gyroscope comprises a drive anchor 11, a drive connection elastic piece 21, two drive mass blocks 22, a detection connection elastic piece 31, four detection mass blocks 32, a coupling component, four comb tooth drive electrodes 5 and four comb tooth drive detection electrodes 6, wherein one end of the drive connection elastic piece 21 is fixed on the drive anchor 11, the drive connection elastic piece 21 extends along the Y-axis direction, the two drive mass blocks 22 are distributed along the X-axis direction, each drive mass block 22 is connected with the other end of the drive connection elastic piece 21, each detection mass block 32 is connected with the drive mass block 22 through the detection connection elastic piece 31, two detection mass blocks 32 are respectively corresponding to two detection mass blocks 22 at two ends of each drive mass block 22 along the Y-axis direction, the coupling component comprises a coupling beam 41 and two coupling elastic pieces 42, two ends of the coupling beam 41 are respectively connected with the two drive mass blocks 22, the two comb tooth drive electrodes 5 are arranged in one drive mass block 22 along the Y-axis direction, the two detection mass blocks 5 are arranged in the other drive mass blocks 22 along the Y-axis direction, the two detection mass blocks are symmetrically arranged in the other detection mass blocks 6 along the Y-axis direction, and the other detection mass blocks are arranged in the other detection mass blocks 22 along the Y-axis direction, and the other detection electrodes 6 are symmetrically arranged in the other drive mass blocks 22 along the Y-axis direction, and the other detection electrode directions are arranged in the other detection mass blocks 6. When detecting the angular velocity in the X-axis direction, the driving mass 22 can move in the Y-axis direction, and the detecting mass 32 moves in the Z-axis direction under the effect of coriolis force.
Compared with a flat-plate capacitor structure, the single-axis MEMS gyroscope provided by the embodiment has the advantages that the capacitance of the comb-tooth driving electrode 5 and the comb-tooth driving detection electrode 6 is large and the linearity is good, the sensitivity of the single-axis MEMS gyroscope is improved, the displacement amplitude driven by the comb-tooth driving electrode 5 can be processed into a larger or smaller range according to the needs of a user, the coupling component can couple the motion of the two driving mass blocks 22, the two driving mass blocks 22 and the like to move in opposite directions, the influence of process deviation and external environment changes on the output displacement of the driving mass blocks 22 is reduced, the working stability of the single-axis MEMS gyroscope is ensured, when the angular velocity of the outside along the X-axis direction is detected, the comb-tooth driving electrode 5 drives the driving mass blocks 22 to move along the Y-axis direction, the detection mass blocks 32 move along the Z-axis direction under the action of the coriolis force, the detection of the diagonal velocity is finally realized, and the capacitance change detected by the comb-tooth driving detection electrode 6 can be used for adjusting the capacitance change of the comb-tooth driving electrode 5 in real time, and the stable operation of the single-axis MEMS gyroscope is ensured.
As shown in fig. 2, the two driving masses 22 of the present embodiment are a first driving mass 2201 and a second driving mass 2202, the four detecting masses 32 are a first detecting mass 3201, a second detecting mass 3202, a third detecting mass 3203 and a fourth detecting mass 3204, respectively, wherein the first driving mass 2201 and the second driving mass 2202 are distributed along the X-axis direction, the first detecting mass 3201 and the second detecting mass 3202 are located at the outer sides of two ends of the first driving mass 2201 along the Y-axis direction, the third detecting mass 3203 and the fourth detecting mass 3204 are located at the outer sides of two ends of the second driving mass 2202 along the Y-axis direction, respectively, and the four detecting masses 32 are symmetrically distributed relative to the X-axis and the Y-axis.
As shown in fig. 2, four comb-teeth driving electrodes 5 in this embodiment are a first comb-teeth driving electrode 501, a second comb-teeth driving electrode 502, a third comb-teeth driving electrode 503 and a fourth comb-teeth driving electrode 504, four comb-teeth driving and detecting electrodes 6 are a first comb-teeth driving and detecting electrode 601, a second comb-teeth driving and detecting electrode 602, a third comb-teeth driving and detecting electrode 603 and a fourth comb-teeth driving and detecting electrode 604, the first comb-teeth driving and detecting electrode 601 and the second comb-teeth driving and detecting electrode 602 are distributed along the Y-axis direction and are all located in the first driving mass 2201, the first comb-teeth driving electrode 501 and the second comb-teeth driving and detecting electrode 502 are located between the first comb-teeth driving and detecting electrode 601 and the second comb-teeth driving and detecting electrode 602, and the third comb-teeth driving and detecting electrode 603 and the fourth comb-teeth driving and detecting electrode 604 are distributed along the Y-axis direction and are all located in the second driving mass 2202. The four comb-teeth driving electrodes 5 and the four comb-teeth driving detecting electrodes 6 are symmetrically distributed with respect to the X-axis and the Y-axis.
Defining that the first comb-teeth driving electrode 501 and the fourth comb-teeth driving electrode 504 belong to a first electrode, the second comb-teeth driving electrode 502 and the third comb-teeth driving electrode 503 belong to a second electrode, when the angular velocity in the X-axis direction is detected, alternating voltages with opposite directions are respectively applied to two ends of the first electrode and the second electrode, and alternating electrostatic forces are generated at two ends of the electrodes, so that the first driving mass 2201 and the second driving mass 2202 are driven to reciprocate in the Y-axis direction, and meanwhile, the first detecting mass 3201, the second detecting mass 3202, the third detecting mass 3203 and the fourth detecting mass 3204 are driven by the detecting connecting elastic members 31 to move along the Y-axis direction along with the first driving mass 2201 and the second driving mass 2202, and because of the angular velocity in the X-axis direction, the first detecting mass 3201, the second detecting mass 3202, the third detecting mass 3203 and the fourth detecting mass 3204 all generate coriolis forces along the Z-axis direction.
It should be noted that, in the detection mode, the driving mass 22 moves along the Y-axis direction and the Z-axis direction, the comb-teeth driving electrode 5 drives the driving mass 22 to move, and the comb-teeth driving detection electrode 6 can detect the capacitance change caused by the movement of the driving mass 22, so as to change the capacitance applied to the comb-teeth driving electrode 5, and ensure the stable movement of the single-axis MEMS gyroscope.
The number of the driving connection elastic members 21 and the driving anchor points 11 in this embodiment is four, and each driving connection elastic member 21 is connected to the top end of one side of one driving mass 22 facing away from the other driving mass 22.
The number of the detection connection elastic members 31 in the present embodiment is eight, and each detection mass block 32 is elastically connected with the driving mass block 22 through two detection connection elastic members 31. As shown in fig. 3, the detecting connecting elastic member 31 of the present embodiment includes a detecting frame 311 and four detecting beams 312, one end of each detecting beam 312 is connected to four corners of the detecting frame 311, the other end of each detecting beam 312 of each detecting connecting elastic member 31 is connected to the detecting mass 32, the other ends of the other two detecting beams 312 are connected to the driving mass 22, and an included angle between each detecting beam 312 and the X-axis direction is 30 °.
In other embodiments of the present invention, the structure of the detecting connecting elastic member 31 is not limited to this limitation of the present embodiment, the included angle between the detecting beam 312 and the X-axis direction may be other values, the number of detecting connecting elastic members 31 may be four, twelve or other numbers, and each detecting mass 32 is connected to the driving mass 22 through one, three or other numbers of detecting connecting elastic members 31, which is specifically determined according to practical needs.
As shown in fig. 4, the uniaxial MEMS gyroscope of the present embodiment further includes a coupling anchor point 12, the coupling elastic member 42 includes a coupling frame 421 and four coupling sub-elastic members 422 extending along the Y-axis direction, the coupling frame 421 is fixedly connected with the coupling anchor point 12, so that the coupling frame 421 is fixed on the coupling anchor point 12, one ends of two coupling sub-elastic members 422 are respectively connected with the driving mass block 22, one ends of the other two coupling sub-elastic members 422 are respectively connected with the detecting mass block 32, and the other ends of the four coupling sub-elastic members 422 are respectively connected with four corners of the coupling frame 421. The coupling elastic member 42 of this structure makes the movements of the first driving mass 2201, the second driving mass 2202, the first proof mass 3201, and the third proof mass 3203 not interfere with each other, while the movements of the first driving mass 2201, the second driving mass 2202, the second proof mass 3202, and the fourth proof mass 3204 not interfere with each other.
As shown in fig. 5, the coupling beam 41 in this embodiment is a tuning fork coupling beam, and the tuning fork coupling beam includes a coupling sub-beam 411 and two tuning fork pieces 412, wherein the two tuning fork pieces 412 are respectively located at two ends of the coupling sub-beam 411, the two tuning fork pieces 412 are arranged in one-to-one correspondence with the two driving mass blocks 22, and each tuning fork piece 412 is connected with the same driving mass block 22.
As shown in fig. 1, each driving mass block 22 of the present embodiment is provided with two first avoidance grooves 221, each comb tooth driving electrode 5 includes a first driving sub-electrode 51 and a second driving sub-electrode 52, the first driving sub-electrode 51 of each comb tooth driving electrode 5 is located in one first avoidance groove 221 and includes a plurality of first driving sub-comb teeth distributed at intervals, and the second driving sub-electrode 52 is fixed on the driving mass block 22 and includes a plurality of second driving sub-comb teeth distributed at intervals, and the first driving sub-comb teeth and the second driving sub-comb teeth are sequentially distributed at intervals. That is, the second driving sub-electrode 52 of the present embodiment is directly formed on the driving mass 22, and the first driving sub-electrode 51 is fixed, so that the comb-teeth driving electrode 5 of this structure is convenient to drive the driving mass 22 to move.
Specifically, as shown in fig. 1, each comb-teeth driving electrode 5 of the present embodiment includes two first driving sub-electrodes 51 and two second driving sub-electrodes 52, the two first driving sub-electrodes 51 are disposed in the first avoiding grooves 221 in opposition, and each second driving sub-electrode 52 corresponds to one first driving sub-electrode 51.
As shown in fig. 1, four second avoidance grooves 222 are formed in the driving mass block 22 in this embodiment, as shown in fig. 6, each comb tooth driving detection electrode 6 includes a first driving detection sub-electrode 61 and a second driving detection sub-electrode 62, the first driving detection sub-electrode 61 of each comb tooth driving detection electrode 6 is located in one second avoidance groove 222 and includes a plurality of first driving detection sub-comb teeth distributed at intervals, the second driving detection sub-electrode 62 is fixed on the driving mass block 22 and includes a plurality of second driving detection sub-comb teeth distributed at intervals, and the first driving detection sub-comb teeth and the second driving detection sub-comb teeth are sequentially distributed at intervals. That is, the second drive detection sub-electrode 62 of the present embodiment is formed directly on the drive mass 22, and the first drive detection sub-electrode 61 is fixed and easy to process.
Specifically, as shown in fig. 6, each comb-teeth-drive detection electrode 6 of the present embodiment includes two first drive detection sub-electrodes 61 and two second drive detection sub-electrodes 62, the two first drive detection sub-electrodes 61 are disposed in the second avoidance groove 222 in opposition, and the two second drive detection sub-electrodes 62 and the two first drive detection sub-electrodes 61 are disposed in one-to-one correspondence.
It should be noted that, the uniaxial MEMS gyroscope of this embodiment further includes a substrate, where the driving anchor 11, the coupling anchor 12, the first driving sub-electrode 51 of the comb-teeth driving electrode 5, and the first driving detecting sub-electrode 61 of the comb-teeth driving detecting electrode 6 are all fixed on the substrate, and the driving connection elastic member 21, the driving mass block 22, the detecting connection elastic member 31, the detecting mass block 32, the coupling beam 41, the coupling elastic member 42, the second driving sub-electrode 52 of the comb-teeth driving electrode 5, and the second driving detecting sub-electrode 62 of the comb-teeth driving electrode 5 are all suspended on the substrate and can move relative to the substrate.
The detection mass block 32 and the substrate opposite to the detection mass block 32 form detection capacitors, when the angular velocity along the X-axis direction is detected, the movement of the first detection mass block 3201, the second detection mass block 3202, the third detection mass block 3203 and the fourth detection mass block 3204 along the Z-axis direction causes the change of each detection capacitor, and the detection of the angular velocity along the X-axis direction can be realized according to the change of the capacitance of the four detection capacitors.
Note that the above is only a preferred embodiment of the present invention and the technical principle applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, while the invention has been described in connection with the above embodiments, the invention is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the invention, which is set forth in the following claims.
Claims (10)
1. A single axis MEMS gyroscope defining an X-axis direction, a Y-axis direction, and a Z-axis direction that are perpendicular to each other, the single axis MEMS gyroscope comprising:
the device comprises a driving anchor point and a driving connection elastic piece, wherein one end of the driving connection elastic piece is fixed on the driving anchor point, and the driving connection elastic piece extends along the Y-axis direction;
the two driving mass blocks are distributed along the X-axis direction, and each driving mass block is connected with the other end of the driving connecting elastic piece;
the detection connecting elastic piece and the four detection mass blocks are connected with the driving mass blocks through the detection connecting elastic piece, two ends of each driving mass block along the Y-axis direction correspond to the two detection mass blocks respectively, and the detection connecting elastic piece extends along the Y-axis direction;
the coupling assembly comprises a coupling beam and two coupling elastic pieces, each coupling elastic piece is connected with two driving mass blocks and two detection mass blocks, and two ends of the coupling beam are respectively connected with the two driving mass blocks;
the four comb tooth driving electrodes are arranged in one driving mass block along the Y-axis direction, the other two comb tooth driving electrodes are arranged in the other driving mass block along the Y-axis direction, and the four comb tooth driving electrodes are symmetrically distributed in the two driving mass blocks;
the four comb tooth driving detection electrodes are distributed in one driving mass block along the Y-axis direction, the other two comb tooth driving detection electrodes are arranged in the other driving mass block along the Y-axis direction, and the four comb tooth driving detection electrodes are symmetrically distributed in the two driving mass blocks;
when the angular velocity in the X-axis direction is detected, the driving mass block can move along the Y-axis direction, and the detecting mass block moves along the Z-axis direction under the action of the Coriolis force.
2. The single-axis MEMS gyroscope of claim 1, further comprising a coupling anchor, wherein the coupling elastic member comprises a coupling frame and four coupling sub-elastic members extending along the Y-axis direction, the coupling frame is fixedly connected with the coupling anchor, one end of two coupling sub-elastic members is respectively connected with the driving mass, one end of the other two coupling sub-elastic members is respectively connected with the detecting mass, and the other ends of the four coupling sub-elastic members are respectively connected with four corners of the coupling frame.
3. The uniaxial MEMS gyroscope of claim 1, wherein the coupling beam is a tuning fork coupling beam, the tuning fork coupling beam comprising a coupling sub-beam and two tuning fork pieces, the two tuning fork pieces being located at two ends of the coupling sub-beam, respectively, the two tuning fork pieces being disposed in one-to-one correspondence with the two driving masses.
4. The single-axis MEMS gyroscope of claim 1, wherein the sensing connection elastic member comprises a sensing frame and four sensing beams, one ends of the four sensing beams are respectively connected to four corners of the sensing frame, the other ends of two sensing beams of each sensing connection elastic member are connected to the sensing mass, and the other ends of the other two sensing beams are connected to the driving mass.
5. The single axis MEMS gyroscope of claim 4, wherein each proof mass is connected to the drive mass by at least two proof connection springs.
6. The single-axis MEMS gyroscope of claim 1, wherein the number of the driving connection elastic members and the driving anchor points is four, the four driving connection elastic members are arranged in one-to-one correspondence with the four driving anchor points, and each driving connection elastic member is connected with the top end of one side of the driving mass block, which is away from the other driving mass block.
7. The single-axis MEMS gyroscope of claim 1, wherein the driving mass block is provided with a first avoidance groove, each of the comb-tooth driving electrodes comprises a first driving sub-electrode and a second driving sub-electrode, the first driving sub-electrode is located in the first avoidance groove and comprises a plurality of first driving sub-comb teeth distributed at intervals, the second driving sub-electrode is fixed on the driving mass block and comprises a plurality of second driving sub-comb teeth distributed at intervals, and the first driving sub-comb teeth and the second driving sub-comb teeth are sequentially distributed at intervals.
8. The single-axis MEMS gyroscope of claim 7, wherein each of the comb-teeth drive electrodes includes two first drive sub-electrodes and two second drive sub-electrodes, the two first drive sub-electrodes being disposed opposite one another in the first avoidance slot, the two second drive sub-electrodes being disposed in one-to-one correspondence with the two first drive sub-electrodes.
9. The single-axis MEMS gyroscope of claim 1, wherein the driving mass block is provided with a second avoidance groove, each of the comb teeth driving detection electrodes comprises a first driving detection sub-electrode and a second driving detection sub-electrode, the first driving detection sub-electrode is located in the second avoidance groove and comprises a plurality of first driving detection sub-comb teeth distributed at intervals, the second driving detection sub-electrode is fixed on the driving mass block and comprises a plurality of second driving detection sub-comb teeth distributed at intervals, and the first driving detection sub-comb teeth and the second driving detection sub-comb teeth are sequentially distributed at intervals.
10. The single-axis MEMS gyroscope of claim 9, wherein each of the comb-teeth-drive-detection electrodes includes two first-drive-detection-sub-electrodes and two second-drive-detection-sub-electrodes, the two first-drive-detection-sub-electrodes being disposed in the second avoidance groove in opposition, the two first-drive-detection-sub-electrodes and the two second-drive-detection-sub-electrodes being disposed in one-to-one correspondence.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311711101.5A CN117451025A (en) | 2023-12-13 | 2023-12-13 | Single-axis MEMS gyroscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311711101.5A CN117451025A (en) | 2023-12-13 | 2023-12-13 | Single-axis MEMS gyroscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117451025A true CN117451025A (en) | 2024-01-26 |
Family
ID=89587840
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311711101.5A Pending CN117451025A (en) | 2023-12-13 | 2023-12-13 | Single-axis MEMS gyroscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117451025A (en) |
-
2023
- 2023-12-13 CN CN202311711101.5A patent/CN117451025A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101812971B1 (en) | Micro-gyroscope for detecting motions | |
| CN108507555B (en) | MEMS micromechanical full decoupling closed-loop gyroscope | |
| CN108020220B (en) | Tangential driving double-differential butterfly wing type silicon micro gyroscope and application method thereof | |
| CN102062604A (en) | Capacitive micromachined tuning fork gyroscope | |
| CN102221361B (en) | Capacitive micro machinery gyroscope | |
| CN103900546A (en) | Micro-electromechanical six-axis inertial sensor | |
| CN102636162A (en) | Three-axis micro-mechanical gyroscope | |
| CN220153593U (en) | Decoupling tuning fork silicon micromechanical gyroscope capable of realizing isolation of interference modes | |
| US20230228788A1 (en) | Mems accelerometer | |
| CN109556589B (en) | High overload resistant double-mass-block tuning fork type angular rate gyroscope | |
| CN117330043A (en) | Gyroscope with lever | |
| CN110702088B (en) | Wheel type double-shaft micromechanical gyroscope | |
| CN107782297B (en) | Triaxial MEMS gyroscope | |
| CN116124110A (en) | In-plane torsion type four-mass MEMS gyroscope | |
| CN117451025A (en) | Single-axis MEMS gyroscope | |
| CN209446068U (en) | A kind of double quality blocks tuning-fork type angular rate gyroscope of anti high overload | |
| CN113532408B (en) | Lever structure-based in-plane sensitive axis micromechanical gyroscope | |
| CN113686325B (en) | MEMS fully decoupled gyroscope | |
| CN117553765A (en) | Single-shaft micro-electromechanical gyroscope | |
| CN104236536A (en) | Micro-mechanical three-axis angular velocity transducer | |
| CN117146789A (en) | Device, method and system for detecting angular velocity | |
| CN109163717B (en) | Single-chip triaxial MEMS gyroscope based on wheel-ring form | |
| CN212320730U (en) | Three-axis MEMS gyroscope | |
| CN114609413A (en) | Three-axis accelerometer | |
| CN117629164A (en) | Single-axis gyroscope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |