CN117433664A - Static calibration device for thin film thermopile heat flow sensor - Google Patents
Static calibration device for thin film thermopile heat flow sensor Download PDFInfo
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- CN117433664A CN117433664A CN202311192333.4A CN202311192333A CN117433664A CN 117433664 A CN117433664 A CN 117433664A CN 202311192333 A CN202311192333 A CN 202311192333A CN 117433664 A CN117433664 A CN 117433664A
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- 230000003068 static effect Effects 0.000 title claims abstract description 41
- 239000010409 thin film Substances 0.000 title claims abstract description 24
- 238000007493 shaping process Methods 0.000 claims abstract description 23
- 230000035945 sensitivity Effects 0.000 claims abstract description 4
- 238000001816 cooling Methods 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000003044 adaptive effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
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- 238000010438 heat treatment Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000005457 Black-body radiation Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K19/00—Testing or calibrating calorimeters
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- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The invention provides a static calibration device of a thin film thermopile heat flow sensor, which relates to the technical field of sensors and comprises a laser, a shaping module, a beam splitter, a diaphragm and a processor; the laser emits laser beams with different powers; the shaping module shapes the laser beam to obtain first parallel light with uniform energy density; the beam splitter divides the first parallel light into second parallel light and third parallel light according to a set percentage; the second parallel light acts on the standard sensor; the diaphragm limits the third parallel light to obtain fourth parallel light with a set light spot size; fourth parallel light acts on the sensor to be calibrated; and the processor obtains the sensitivity of the sensor to be calibrated according to the output of the sensor to be calibrated and the output of the standard sensor. The invention has the advantages of high upper limit of heat flow, simple operation, high stability, good repeatability, high precision and batch calibration.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a static calibration device for a thin film thermopile heat flow sensor.
Background
The heat flux measurement technique is important in many temperature measurement applications, in particular in the fields of aviation, aerospace and the like, and the radiation heat flux density is an important measurement parameter. In order to reasonably design a thermal protection system of the surface of the aircraft, the thermal effect of hypersonic flow needs to be studied, and a heat flow distribution rule of each position of the surface of the aircraft is measured by using a heat flow sensor. Accurate calibration of heat flow test sensors has been one of the challenges in the field of thermal engineering.
The existing static calibration method of the heat flow sensor is as follows: 1) The calibration system consists of a main hot plate, a protection hot plate, a bottom protection hot plate, a cold plate and a heat insulation material, wherein a sensor is arranged in one-dimensional uniform heat flow, and the purpose of improving the heat flow is realized by changing the voltage of the main hot plate. However, the method has the advantages of complex equipment structure, low heat flow value, narrow requirements on the testing range of the sensor, complex operation and incapability of rapidly realizing static calibration of a plurality of heat flow sensors; 2) The halogen lamp method is characterized in that a quartz lamp is used for heating, the power of a quartz lamp tube is controlled through a heating control system to obtain required heat flow, and a heat flow sensor to be calibrated and a standard heat flow sensor are placed at the central symmetry position of the quartz lamp by adopting a contrast calibration method to realize static calibration; the method has the advantages that the upper limit of the generated heat flow value is low, the repeatability is poor, and the batch calibration of the heat flow sensor cannot be realized; 3) According to the blackbody radiation method, a blackbody furnace is used as a heat flow source, the temperature of a blackbody cavity is stabilized at a set temperature, a heat flow sensor extends into the blackbody cavity, the induction surface of the heat flow sensor is positioned at a proper position, and total heat flow, the output voltage of the heat flow sensor, the error of the output voltage of the heat flow sensor, the pressure in the cavity, convection heat flow and total uncertainty are tested and calculated. The method has the advantages of complex operation, low upper limit of heat flow, high equipment cost and complex calculation.
Disclosure of Invention
The invention aims to provide a static calibration device for a thin film thermopile heat flow sensor, which is combined with optical devices such as a Galileo type aspheric lens, a diaphragm and the like by taking a high-power laser as a radiation source, and completes batch static calibration of the heat flow sensor under the condition of realizing large heat flow, and has the advantages of high heat flow upper limit, simple operation, high stability, good repeatability, high precision and batch calibration.
A thin film thermopile thermal flow sensor static calibration device, comprising: the device comprises a laser, a shaping module, a beam splitter, a diaphragm and a processor;
the processor controls the laser to emit laser beams with different powers;
the shaping module is used for shaping the laser beam to obtain first parallel light with uniform energy density;
the beam splitter divides the first parallel light into second parallel light and third parallel light according to a set percentage;
the second parallel light acts on the standard sensor; the diaphragm limits the third parallel light to obtain fourth parallel light with a set light spot size; the fourth parallel light acts on the sensor to be calibrated;
the processor acquires a first output signal of the standard sensor and a second output signal of the sensor to be calibrated in real time;
the processor obtains a control quantity of the next moment by combining an adaptive PID control algorithm according to the first output signal and the second output signal at the current moment, and the processor controls the laser to emit the laser beam with set power at the next moment based on the control quantity;
the processor fits the first output signals at all moments to obtain a standard fitting curve; the processor fits the second output signals at all times to obtain a fitting curve to be calibrated;
and the processor obtains the sensitivity of the sensor to be calibrated according to the standard fitting curve and the fitting curve to be calibrated.
Optionally, the static calibration device further comprises: a water cooling module;
the water cooling module is used for cooling the shaping module, the beam splitter, the laser and the diaphragm, so that the shaping module, the beam splitter, the laser and the diaphragm work in a set temperature range.
Optionally, the shaping module includes: a collimator, a plano-concave aspherical mirror and a plano-convex aspherical mirror;
the optical axes of the plano-concave aspherical mirror and the plano-convex aspherical mirror are rotationally symmetrical; the plano-concave aspherical mirror and the plano-convex aspherical mirror form a Galileo aspherical lens;
the collimator compresses the divergence angle of the laser beam to obtain fifth parallel light;
and shaping the fifth parallel light by the Galileo type aspheric lens to obtain the first parallel light with uniform energy density.
Optionally, the set percentage is 5%:95%.
Optionally, the static calibration device further comprises: a first stepping motor;
the processor controls the first stepping motor to adjust the light hole of the diaphragm so as to limit the third parallel light through the light hole and obtain the fourth parallel light with the set light spot size.
Optionally, the static calibration device further comprises: the second stepping motor, the disc and the supporting frame;
the second stepping motor is fixedly arranged on the supporting frame, and an output shaft of the second stepping motor is fixedly connected with the circle center of the disc;
a plurality of clamps are arranged on the side surface, away from the second stepping motor, of the disc;
each clamp is used for clamping a plurality of sensors to be calibrated; each clamp is circumferentially distributed;
the processor controls the second stepping motor to drive the disc to rotate so as to realize static calibration of different sensors to be calibrated.
Optionally, the static calibration device further comprises: a voltage control module;
the voltage control module outputs a direct current control voltage signal with a set voltage value to the laser according to the control quantity at the next moment so as to enable the laser to emit the laser beam with set power at the next moment.
Optionally, the beam splitter is a non-polarizing beam splitter.
Optionally, the laser is a semiconductor laser.
The invention has the following effects:
the static calibration device of the thin film thermopile heat flow sensor adopts the high-power optical fiber output semiconductor laser as an ideal heat flow source, has the advantages of high laser output power, adjustable laser spot size, simple laser output frequency modulation, uniform heat flow output, convenient operation, high safety, strong stability, good repeatability, small energy loss, accurate, stable and controllable output heat flow, and realizes MW/m 2 The level large heat flow calibration improves the heat flow calibration precision, and can simultaneously carry out static calibration of a plurality of thin film thermopile heat flow sensors, thereby realizing batch static calibration of the thin film thermopile heat flow sensors.
According to the static calibration device for the thin film thermopile heat flow sensor, the beam splitter is used for dividing laser energy into two parts, so that the calibration stability is improved, and the static calibration of the sensor to be calibrated is realized; and the aperture is used for adjusting the size of a laser spot, so that a laser beam accurately acts on a sensitive surface of the sensor to be calibrated.
Drawings
FIG. 1 is a schematic diagram of a static calibration device of a thin film thermopile heat flow sensor according to the invention;
FIG. 2 is a block diagram of a static calibration device of a thin film thermopile heat flow sensor according to the present invention.
In the figure: 1. a laser; 2. a shaping module; 3. a beam splitter; 4. a diaphragm; 5. a processor; 6. a water cooling module; 7. a first stepping motor; 8. a second stepping motor; 9. a disc; 10. a support frame; 11. a voltage control module; 12. a standard sensor; 13. a sensor to be calibrated; 21. a collimator; 22. a plano-concave aspherical mirror; 23. plano-convex aspherical mirror.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic diagram of a static calibration device of a thin film thermopile heat flow sensor according to the invention; FIG. 2 is a block diagram of a static calibration device of a thin film thermopile heat flow sensor according to the present invention. As shown in fig. 1 and 2, the present invention provides a static calibration device for a thin film thermopile heat flow sensor, which comprises: a laser 1, a shaping module 2, a beam splitter 3, a diaphragm 4 and a processor 5.
The processor 5 controls the laser 1 to emit laser beams of different powers. Specifically, the laser 1 is a semiconductor laser 1.
The shaping module 2 shapes the laser beam to obtain first parallel light with uniform energy density.
The shaping module 2 comprises: a collimator 21, a plano-concave aspherical mirror 22 and a plano-convex aspherical mirror 23.
The optical axes of the plano-concave aspherical mirror 22 and the plano-convex aspherical mirror 23 are rotationally symmetrical; the plano-concave aspherical mirror 22 and the plano-convex aspherical mirror 23 constitute galilean aspherical lenses.
The collimator 21 compresses the divergence angle of the laser beam to obtain fifth parallel light.
And shaping the fifth parallel light by the Galilean aspheric lens to obtain first parallel light with uniform energy density.
The beam splitter 3 splits the first parallel light into a second parallel light and a third parallel light by a set percentage. Preferably, the percentage is set to 5%:95%. The beam splitter 3 is a non-polarizing beam splitter. The beam splitter 3 is composed of two right angle prisms, and separates the transmitted light and the reflected light according to a set percentage, and the working wave band is 700nm-1100nm.
The second parallel light is applied to the standard sensor 12; the diaphragm 4 limits the third parallel light to obtain fourth parallel light with a set spot size; the fourth parallel light is applied to the sensor 13 to be calibrated. The diaphragm 4 is an adjustable diaphragm, and is made of alumina ceramic.
The processor 5 acquires the first output signal of the standard sensor 12 and the second output signal of the sensor 13 to be calibrated in real time.
The processor 5 obtains the control quantity of the next moment according to the first output signal and the second output signal of the current moment and the self-adaptive PID control algorithm, and the processor 5 controls the laser 1 to emit the laser beam with the set power at the next moment based on the control quantity.
The processor 5 fits the first output signals at all moments to obtain a standard fitting curve; and the processor 5 fits the second output signals at all times to obtain a fitting curve to be calibrated.
The processor 5 obtains the sensitivity of the sensor 13 to be calibrated according to the standard fitting curve and the fitting curve to be calibrated.
Further, the static calibration device further comprises: and a water cooling module 6.
The water cooling module 6 is used for cooling the shaping module 2, the beam splitter 3, the laser 1 and the diaphragm 4, so that the shaping module 2, the beam splitter 3, the laser 1 and the diaphragm 4 operate in a set temperature range.
In order to limit the third parallel light, the static calibration device further comprises: a first stepper motor 7.
The processor 5 controls the first stepping motor 7 to adjust the light transmission hole of the diaphragm 4 so as to limit the third parallel light through the light transmission hole, and obtain fourth parallel light with a set spot size.
In order to realize batch static calibration, the static calibration device further comprises: a second stepper motor 8, a disc 9 and a support frame 10.
The second stepping motor 8 is fixedly arranged on the supporting frame 10, and an output shaft of the second stepping motor 8 is fixedly connected with the circle center of the disc 9.
The side of the disc 9 facing away from the second stepper motor 8 is provided with a number of clamps.
Each clamp is used for clamping a plurality of sensors 13 to be calibrated; the clamps are circumferentially distributed.
The processor 5 controls the second stepping motor 8 to drive the disc 9 to rotate so as to realize the static calibration of different sensors 13 to be calibrated.
In order to realize accurate control to the laser 1, the static calibration device further includes: a voltage control module 11.
The voltage control module 11 outputs a dc control voltage signal with a set voltage value to the laser 1 according to the control amount at the next time, so that the laser 1 emits a laser beam with a set power at the next time. The voltage control module 11 selects PXIe-5515 data acquisition card.
The above examples are only illustrative of the preferred embodiments of the present invention and are not intended to limit the scope of the present invention, and various modifications and improvements made by those skilled in the art to the technical solution of the present invention should fall within the scope of protection defined by the claims of the present invention without departing from the spirit of the present invention.
Claims (9)
1. The static calibration device of the thin film thermopile heat flow sensor is characterized by comprising the following components: the device comprises a laser, a shaping module, a beam splitter, a diaphragm and a processor;
the processor controls the laser to emit laser beams with different powers;
the shaping module is used for shaping the laser beam to obtain first parallel light with uniform energy density;
the beam splitter divides the first parallel light into second parallel light and third parallel light according to a set percentage;
the second parallel light acts on the standard sensor; the diaphragm limits the third parallel light to obtain fourth parallel light with a set light spot size; the fourth parallel light acts on the sensor to be calibrated;
the processor acquires a first output signal of the standard sensor and a second output signal of the sensor to be calibrated in real time;
the processor obtains a control quantity of the next moment by combining an adaptive PID control algorithm according to the first output signal and the second output signal at the current moment, and the processor controls the laser to emit the laser beam with set power at the next moment based on the control quantity;
the processor fits the first output signals at all moments to obtain a standard fitting curve; the processor fits the second output signals at all times to obtain a fitting curve to be calibrated;
and the processor obtains the sensitivity of the sensor to be calibrated according to the standard fitting curve and the fitting curve to be calibrated.
2. The thin film thermopile heat flow sensor static calibration device of claim 1, further comprising: a water cooling module;
the water cooling module is used for cooling the shaping module, the beam splitter, the laser and the diaphragm, so that the shaping module, the beam splitter, the laser and the diaphragm work in a set temperature range.
3. The thin film thermopile heat flow sensor static calibration device of claim 1, wherein the shaping module comprises: a collimator, a plano-concave aspherical mirror and a plano-convex aspherical mirror;
the optical axes of the plano-concave aspherical mirror and the plano-convex aspherical mirror are rotationally symmetrical; the plano-concave aspherical mirror and the plano-convex aspherical mirror form a Galileo aspherical lens;
the collimator compresses the divergence angle of the laser beam to obtain fifth parallel light;
and shaping the fifth parallel light by the Galileo type aspheric lens to obtain the first parallel light with uniform energy density.
4. The thin film thermopile heat flow sensor static calibration device of claim 1, wherein the set percentage is 5%:95%.
5. The thin film thermopile heat flow sensor static calibration device of claim 1, further comprising: a first stepping motor;
the processor controls the first stepping motor to adjust the light hole of the diaphragm so as to limit the third parallel light through the light hole and obtain the fourth parallel light with the set light spot size.
6. The thin film thermopile heat flow sensor static calibration device of claim 1, further comprising: the second stepping motor, the disc and the supporting frame;
the second stepping motor is fixedly arranged on the supporting frame, and an output shaft of the second stepping motor is fixedly connected with the circle center of the disc;
a plurality of clamps are arranged on the side surface, away from the second stepping motor, of the disc;
each clamp is used for clamping a plurality of sensors to be calibrated; each clamp is circumferentially distributed;
the processor controls the second stepping motor to drive the disc to rotate so as to realize static calibration of different sensors to be calibrated.
7. The thin film thermopile heat flow sensor static calibration device of claim 1, further comprising: a voltage control module;
the voltage control module outputs a direct current control voltage signal with a set voltage value to the laser according to the control quantity at the next moment so as to enable the laser to emit the laser beam with set power at the next moment.
8. The thin film thermopile thermal flow sensor static calibration apparatus of claim 1, wherein the beam splitter is a non-polarizing beam splitter.
9. The thin film thermopile heat flow sensor static calibration device of claim 1, wherein the laser is a semiconductor laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311192333.4A CN117433664A (en) | 2023-09-15 | 2023-09-15 | Static calibration device for thin film thermopile heat flow sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311192333.4A CN117433664A (en) | 2023-09-15 | 2023-09-15 | Static calibration device for thin film thermopile heat flow sensor |
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| CN117433664A true CN117433664A (en) | 2024-01-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202311192333.4A Pending CN117433664A (en) | 2023-09-15 | 2023-09-15 | Static calibration device for thin film thermopile heat flow sensor |
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| CN (1) | CN117433664A (en) |
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- 2023-09-15 CN CN202311192333.4A patent/CN117433664A/en active Pending
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