CN117400206A

CN117400206A - Workpiece fixing mechanism and measuring device

Info

Publication number: CN117400206A
Application number: CN202310854942.5A
Authority: CN
Inventors: 片町省三; 松屋直树
Original assignee: Tokyo Seimitsu Co Ltd
Current assignee: Tokyo Seimitsu Co Ltd
Priority date: 2022-07-15
Filing date: 2023-07-12
Publication date: 2024-01-16

Abstract

The invention provides a workpiece fixing mechanism and a measuring device capable of automating fixing of a workpiece. A workpiece fixing mechanism held on a rotatable table (12) is provided with: a holding unit (22) that holds a workpiece on a table, operates by supplying or sucking gas, and maintains a state of holding the workpiece by maintaining a pressurized state or a negative pressure state; a gas pressure source (34) that generates positive or negative pressure; first coupler sections (28, 42) connected to a gas pressure source via a first pipe; second coupler units (30, 44) which are provided on the table, are connected to the holding unit via second piping, are connectable to the first coupler unit, and are separable from the first coupler unit so as to be capable of holding the pressure state of the holding unit; and a first driving unit (52) that moves the first coupler unit forward and backward in the connection direction with respect to the second coupler unit located at the first position, and connects and disconnects the first coupler unit to and from the second coupler unit.

Description

Workpiece fixing mechanism and measuring device

Technical Field

The present invention relates to a workpiece fixing mechanism and a measuring apparatus, and more particularly to a workpiece fixing mechanism and a measuring apparatus provided with a rotatable table.

Background

In an apparatus that performs processing such as measurement by rotating a workpiece (for example, a measurement object) such as a table rotation type roundness measuring apparatus, the workpiece may be fixed to the table so that the workpiece does not move during rotation of the workpiece.

Patent document 1 describes a clamp for fixing a workpiece to a table by negative pressure. Patent document 1 discloses that a valve is provided in a suction line to separate a clamp from a negative pressure source while maintaining a negative pressure state.

Prior art literature

Patent literature

Patent document 1: japanese patent laid-open publication 2016-211985

Disclosure of Invention

Problems to be solved by the invention

However, in the apparatus including the workpiece fixing mechanism as described above, automation is also required for automating the process. Patent document 1 has a problem that the fixation cannot be automated because the valve is manually opened and closed.

The present invention has been made in view of such circumstances, and an object thereof is to provide a workpiece fixing mechanism and a measuring apparatus capable of automating fixing of a workpiece.

Means for solving the problems

In order to solve the above-described problems, a first aspect of the workpiece fixing mechanism according to the present invention is a workpiece fixing mechanism for holding a workpiece on a rotatable table, the workpiece fixing mechanism including: a holding unit that holds a workpiece on a table, operates by supplying or sucking gas, and maintains a state of holding the workpiece by maintaining a pressurized state or a negative pressure state; a gas pressure source that generates positive or negative pressure; a first coupler unit connected to a gas pressure source via a first pipe; a second coupler unit which is provided on the table, is connected to the holding unit via a second pipe, is connectable to the first coupler unit, and is separable from the first coupler unit so as to be capable of holding the pressure state of the holding unit; and a first driving unit that moves the first coupler unit forward and backward in the connection direction with respect to the second coupler unit located at the first position, and connects and disconnects the first coupler unit to and from the second coupler unit.

A second aspect of the workpiece fixing mechanism according to the present invention is the workpiece fixing mechanism according to the first aspect, further comprising a first support portion detachably attached to the table and supporting the second coupler portion in a region radially outside the table.

A third aspect of the work fixing mechanism of the present invention is the work fixing mechanism of the second aspect, wherein the first support portion elastically supports the second coupler portion.

A fourth aspect of the workpiece fixing mechanism according to the present invention is the workpiece fixing mechanism according to the first aspect, further comprising a second support portion that elastically supports the first drive portion.

A fifth aspect of the workpiece fixing mechanism according to the present invention is the workpiece fixing mechanism according to any one of the first to fourth aspects, comprising: a positioning member that abuts against the second coupler section to position the second coupler section at the first position; and a second driving unit that moves the positioning member between a second position located on the movement locus of the second coupler unit and a third position retracted from the movement locus of the second coupler unit.

A sixth aspect of the workpiece fixing mechanism according to the present invention is the measuring device according to the fifth aspect, wherein the second driving section moves the positioning member and the first driving section in a body-to-body manner, and the first coupler section is disposed at the first position when the positioning member is located at the second position.

A seventh aspect of the workpiece fixing mechanism according to the present invention is the measuring device according to the sixth aspect, wherein one of the second coupler portion and the positioning member has a magnet portion, and the other of the second coupler portion and the positioning member has a magnetic body portion, and the second coupler portion is magnetically attracted to the positioning member.

An eighth aspect of the workpiece fixing mechanism according to the present invention is the workpiece fixing mechanism according to any one of the first to fourth aspects, wherein a connection direction of the first coupler section with respect to the second coupler section is set parallel to a rotation axis of the table.

A ninth aspect of the work fixing mechanism of the present invention is the work fixing mechanism of the third aspect, wherein the first support portion elastically supports the second coupler portion via a leaf spring.

A tenth aspect of the work fixing mechanism according to the present invention is the work fixing mechanism according to the fourth aspect, wherein the second support portion elastically supports the first drive portion via a leaf spring.

An eleventh aspect of the workpiece fixing mechanism according to the present invention is the workpiece fixing mechanism according to any one of the first to fourth aspects, wherein the first driving section includes a third support section that comes into contact with a rear end portion of the second coupler section in a connection direction when the first coupler section is connected to the second coupler section, thereby supporting the second coupler section.

A twelfth aspect of the work fixing mechanism according to the present invention is the work fixing mechanism according to the first aspect, wherein the first coupler section and the second coupler section are disposed on a rotation axis of the table, and the first driving section moves the first coupler section forward and backward along the rotation axis of the table, and connects and disconnects the first coupler section to and from the second coupler section.

A thirteenth aspect of the workpiece fixing mechanism according to the present invention is the workpiece fixing mechanism according to any one of the first, second, third, fourth, and twelfth aspects, wherein the table is supported via a gas bearing.

A fourteenth aspect of the measuring apparatus according to the present invention is the workpiece fixing mechanism according to any one of the first, second, third, fourth, and twelfth aspects, wherein the displacement of the surface of the workpiece is detected in synchronization with the rotation angle of the table, and the roundness or cylindricity of the workpiece is measured.

Effects of the invention

According to the present invention, the fixing of the workpiece can be automated.

Drawings

Fig. 1 is a front view of the roundness measuring apparatus.

Fig. 2 is a front view showing the structure of the automatic workpiece fixing mechanism.

Fig. 3 is a plan view showing the structure of the automatic workpiece fixing mechanism.

Fig. 4 is a view from 4-4 of fig. 3.

Fig. 5 is a conceptual diagram of a system for supplying and exhausting air to and from an air chuck (an example of an air chuck) using a coupler (coupler).

Fig. 6 is an explanatory diagram of the operation of the coupler.

Fig. 7 is a front view of the workpiece automatic fixing mechanism in a state where the first coupler and the second coupler are located at the supply and exhaust positions.

Fig. 8 is a plan view of the workpiece automatic fixing mechanism in a state where the first coupler and the second coupler are located at the supply and exhaust positions.

Fig. 9 is a block diagram of a control system of the workpiece automatic securing mechanism.

Fig. 10 is a flowchart showing a sequence of actions of fixing a workpiece.

Fig. 11 is a flowchart showing a sequence of operations for releasing the fixation of the workpiece.

Fig. 12 is a plan view showing another example of setting of the connection direction of the coupler.

Fig. 13 is a plan view showing another example of setting of the connection direction of the coupler.

Fig. 14 is a front view showing the configuration of a main part of the roundness measuring apparatus.

Fig. 15 is a cross-sectional view showing the configuration of a main part of the roundness measuring apparatus of the third embodiment.

Description of the reference numerals

1: roundness measuring apparatus, 10: base, 12: work table, 12A: first connection interface, 12B: flow path, 12C: second connection port, 14: table rotation mechanism, 14M: motor, 14S: rotational position detector, 16: detector, 16A: stylus, 18: detector movement mechanism, 18A: upright post, 18B: carrier, 18C: arm, 18D: detector holder, 20: automatic workpiece fixing mechanism, 22: air chuck, 24: supply and exhaust mechanism, 26: coupler, 28: first coupler, 28A: first coupler body, 28B: fixed valve, 28C: fixed valve support plate, 28D: movable sleeve, 28E: coil spring, 28b1: shaft portion of fixed valve, 28b2: valve portion of fixed valve, 28d: opening portion of movable sleeve, 30: second coupler, 30A: second coupler body, 30B: movable valve, 30C: movable valve support plate, 30D: coil spring, 30a: opening portion of second coupler body, 30b1: shaft portion, 30b2: valve portion, 32: first pipe, 32A: main piping, 32P: air supply piping, 32R: exhaust pipe, 34: compressed air source, 36: solenoid valve, 38: second piping, 40: coupler automatic connection mechanism, 42: first block, 42A: flow path of the first block, 44: second block, 44A: flow path of the second block, 46: second block support portion, 46A: leaf spring, 46B: bracket, 48: first drive unit, 50: first frame, 50H: horizontal portion of first frame, 50V: vertical portion of first frame, 52: first actuator, 52A: actuator body of first actuator, 52B: sliding table of first actuator, 54: second drive unit, 56: second frame, 56A: screw, 56H: horizontal portion of second frame, 56V: vertical portion of second frame, 58: second actuator, 58A: actuator body of the second actuator, 58B: sliding table of second actuator, 60: support pin, 60A: bracket, 62: locating pin, 62A: bracket, 70: controller, 80: elastic support portion, 82: main support, 82A: leaf spring, 82B: bracket, 84: auxiliary supporting portion, 84A: coil spring, 86: bracket, 110: air bearing, 110A: shaft portion of air bearing, 110B: bearing portion of air bearing, 112A: first support frame, 112B: second support frame, 114: rotation transmission mechanism, 116: drive shaft, 116A: flow path, 118: chuck, 118A: groove portion of chuck, 120: chuck pins, 120A: ball portion of collet pin, 122: driven side pulley, 124: drive side pulley, 126: drive belt, 128: bearing, 130: connector, 132: piping for relay, 134: connection piping, 136: actuator, 138: bracket, C: movement track of the second coupler, P: supply and exhaust position, W: workpiece, θ: a rotation axis of the workbench.

Detailed Description

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

First embodiment

Here, a case where the work fixing mechanism of the present invention is applied to a table-rotating roundness measuring apparatus will be described as an example. The table rotation type roundness measuring apparatus is a roundness measuring apparatus that fixes a detector side and rotates the table side to measure a workpiece (for example, a measurement object).

Fig. 1 is a front view of the roundness measuring apparatus. The X-direction, Y-direction, and Z-direction are shown in fig. 1. The X direction, Y direction and Z direction are mutually orthogonal. As an example, the X direction and the Y direction are horizontal directions, and the Z direction is vertical direction. An axis parallel to the X direction is defined as an X axis, an axis parallel to the Y direction is defined as a Y axis, and an axis parallel to the Z direction is defined as a Z axis.

The roundness measuring apparatus 1 of the present embodiment is configured as a roundness measuring apparatus having a function of automatically fixing a workpiece W. The function of automatically fixing the workpiece W is achieved by the workpiece automatic fixing mechanism 20.

[ basic Structure of roundness measuring apparatus ]

First, the basic configuration of the table-rotating roundness measuring apparatus 1 will be described in general.

In the table rotation type roundness measuring apparatus 1, the workpiece W is held on the table 12, and the displacement of the surface of the workpiece W is detected by the detector in synchronization with the rotation angle of the table 12, so that data (polar coordinate data) necessary for calculating the roundness and the like are obtained. The roundness measuring apparatus 1 shown in fig. 1 is a so-called contact type roundness measuring apparatus. In the contact type roundness measuring apparatus, a stylus (also referred to as a measuring tool or a stylus) is brought into contact with the surface of the workpiece W to detect displacement of the surface of the workpiece W.

As shown in fig. 1, the roundness measuring apparatus 1 includes a base 10, a table 12, a table rotating mechanism 14 that rotates the table 12, a detector 16, a detector moving mechanism 18 that moves the detector 16, and the like.

The base 10 is a support table (base) for supporting each part of the roundness measuring apparatus 1. As shown in fig. 1, the roundness measuring apparatus 1 of the present embodiment has a rectangular parallelepiped base 10.

The table 12 has a disk-like shape and rotates about a rotation axis θ. The rotation axis θ is set parallel to the Z axis. As described later, in the roundness measuring apparatus 1 of the present embodiment, the air chuck 22 is provided on the table 12, and the workpiece W is held on the table 12 via the air chuck 22. Although omitted for convenience, the table 12 is preferably provided with a centering mechanism, a pitching (tilting) mechanism, and the like. The centering mechanism is a mechanism for adjusting the center position of the table 12. The pitch mechanism is a mechanism for adjusting the inclination of the table 12.

The table rotation mechanism 14 includes a support portion (not shown) that rotatably supports the table 12, a motor 14M as a rotation driving source, a rotation transmission mechanism (not shown) that transmits rotation of the motor 14M to the table, a rotation position detector 14S that detects a rotation position of the table 12, and the like. The support portion includes a bearing, which is constituted by, for example, a gas bearing (for example, an air bearing) (for example, refer to fig. 15). The rotational position detector 14S is constituted by, for example, a rotary encoder, and detects the rotational position of the rotation axis θ of the table 12, thereby detecting the rotational position of the table 12 (the position of a point on the table 12 that becomes a reference).

The detector 16 is a contact detector. The contact detector 16 has a stylus 16A, and detects displacement of the surface of the workpiece W by bringing the tip of the stylus 16A into contact with the surface of the workpiece W. More specifically, the displacement amount of the tip of the stylus 16A is detected, and the displacement of the surface of the workpiece W is detected. The displacement of the stylus 16A is detected by, for example, a differential transformer or the like.

The detector moving mechanism 18 moves the detector 16 in the Z direction and the X direction on the base 10. As shown in fig. 1, the detector moving mechanism 18 includes a column 18A provided on the base 10, a carriage 18B moving along the column 18A, an arm 18C held by the carriage 18B, a detector holder 18D provided at the tip of the arm 18C, and the like. The column 18A is arranged along the Z direction. The carriage 18B is driven by a driving mechanism (not shown) provided in the column 18A to move along the column 18A. Thus, the carriage 18B moves (lifts) in the Z direction. The arm 18C is driven by a driving mechanism (not shown) provided in the carriage 18B to move forward and backward in the X direction. The detector 16 is held by a detector holder 18D provided at the front end of the arm 18C. The detector 16 moves in the Z direction by moving the carriage 18B along the column 18A, and moves in the X direction by moving the arm 18C forward and backward.

The basic configuration of the roundness measuring apparatus 1 (the configuration other than the workpiece automatic fixing mechanism 20) is as described above. The measurement was performed in the following order. First, the workpiece W is set on the table 12. Next, the stylus 16A of the detector 16 is brought into contact with the surface of the workpiece W. Next, the table 12 is rotated. During rotation of the table 12, displacement of the surface of the workpiece W is detected by the detector 16, and polar coordinate data is acquired. The obtained data is processed to calculate the roundness or cylindricity. The arithmetic processing is performed by a data processing device (not shown). The data processing apparatus is configured by a computer (e.g., a personal computer) having a processor and a memory, and functions as a data processing apparatus by executing a predetermined program. The data processing device may be integrated with the roundness measuring device 1, or may be configured as a separate device.

[ automatic workpiece fixing mechanism ]

[ Structure of automatic workpiece fixing mechanism ]

Next, a mechanism for automatically fixing the workpiece W (also referred to as "workpiece automatic fixing mechanism") will be described. Here, a case where a columnar workpiece W is measured will be described as an example. The automatic workpiece fixing mechanism is an example of the workpiece fixing mechanism.

Fig. 2 is a front view showing the structure of the automatic workpiece fixing mechanism. Fig. 3 is a plan view showing the structure of the automatic workpiece fixing mechanism. In addition, FIG. 4 is a view from 4-4 of FIG. 3.

The automatic workpiece fixing mechanism 20 includes an air chuck 22 for holding the workpiece W on the table 12, and a supply/exhaust mechanism 24 for supplying and exhausting gas (compressed gas, for example, air (compressed air)) to and from the air chuck 22.

[ air chuck ]

The air chuck 22 is a chuck device that operates using air. Here, the chuck device is not limited to the air chuck 22, and a chuck device (air chuck) that operates using a gas other than air (air) may be used. As an example, in the present embodiment, the air chuck 22 is constituted by a so-called three-jaw air chuck. The three-jaw air chuck 22 has three jaws arranged radially as shown in fig. 3. The three claws are expanded and contracted by the supply and exhaust of air. More specifically, the air is supplied (pressurized) to move radially inward. Further, the air is discharged (air is opened) and moved to the outside in the radial direction. The three claws grip (clamp) the workpiece W by moving radially inward. In addition, the three claws release (loosen) the workpiece W by moving radially outward. The air chuck 22 maintains a state of holding the workpiece W by maintaining a pressurized state. That is, the clamp-based locked state is maintained. Such air chucks are well known. Therefore, a detailed description of the structure thereof is omitted.

The air chuck 22 is positioned and disposed on the table 12 in such a manner that the center of the grip coincides with the center of the table 12. Thus, the air chuck 22 is disposed coaxially with respect to the table 12 (disposed on the rotation axis θ). An air chuck 22 provided on the table 12 is fixed to the table 12 by screws or the like. Thus, when the table 12 is rotated, the air chuck 22 rotates integrally with the table 12. In the present embodiment, the air chuck 22 is an example of a holding portion.

[ air supply and exhaust mechanism ]

The air supply/exhaust mechanism 24 supplies and exhausts air to and from the air chuck 22 using the coupler 26. In particular, in the roundness measuring apparatus 1 of the present embodiment, the so-called leak-free coupler 26 is used to supply and discharge air to and from the air chuck 22. The leak-free coupler is a coupler that can be separated in a pressurized state (pressurized separation). The leak-free coupler can suppress leakage of air for a long time even if it is separated by a leak-free mechanism. Thus, the pressure state can be maintained for a long time. First, a system for supplying and exhausting air to and from the air chuck 22 using the coupler 26 will be generally described.

[ System for supplying and exhausting air to and from an air chuck Using a coupler ]

Fig. 5 is a conceptual diagram of a system for supplying and exhausting air using an air chuck of a coupler.

The coupler 26 is composed of a first coupler 28 on the socket side and a second coupler 30 on the plug side. The first coupler 28 and the second coupler 30 are configured to be capable of being connected to and disconnected from each other. Here, "connected" means connected to each other in a state where the flow paths of the air circuits can communicate with each other, that is, connected to each other in an air circuit.

The first coupler 28 is a coupler on the pressure source side. The first coupler 28 is connected to a compressed air source 34 via a first pipe 32. The compressed air source 34 is constituted by, for example, an air compressor, and supplies compressed air. The compressed air source 34 is an example of a gas pressure source that generates positive pressure.

The first pipe 32 is composed of a main pipe 32A, an air supply pipe 32P, and an air discharge pipe 32R. The main pipe 32A is a pipe connected to the first coupler 28. The main pipe 32A is constituted by a flexible pipe. The supply pipe 32P and the exhaust pipe 32R are connected to the main pipe 32A via a three-port solenoid valve 36. The air supply pipe 32P is a pipe connected to the compressed air source 34. The exhaust pipe 32R is an open-air pipe. The solenoid valve 36 selectively switches the connection destination of the main pipe 32A. That is, the connection destination of the main pipe 32A is switched to the supply pipe 32P or the discharge pipe 32R. The main pipe 32A is connected to the air supply pipe 32P, whereby the first coupler 28 is connected to the compressed air source 34. Thereby, air can be supplied from the compressed air source 34 via the first coupler 28. On the other hand, by connecting the main pipe 32A to the exhaust pipe 32R, air can be discharged through the first coupler 28.

As shown in fig. 5, the first coupler 28 includes a first coupler body 28A, a fixed valve 28B, a fixed valve support plate 28C, a movable sleeve 28D, a coil spring 28E, and the like.

The first coupler body 28A has a cylindrical shape, and includes a fixed valve 28B, a fixed valve support plate 28C, a movable sleeve 28D, a coil spring 28E, and the like therein.

The fixed valve 28B has a cylindrical shaft portion 28B1 and an inverted circular truncated cone-shaped valve portion 28B2 provided at the tip of the shaft portion 28B 1. The fixed valve 28B is disposed along the axis of the first coupler body 28A, and is fixedly provided inside the first coupler body 28A.

The fixed valve support plate 28C is a member that supports the fixed valve 28B. The fixed valve support plate 28C is formed of a circular plate-like plate having a plurality of openings (flow passages) 28C, and is fixedly provided inside the first coupler body 28A. The fixed valve 28B is fixedly provided to the first coupler body 28A by being supported by the fixed valve support plate 28C, and is disposed along the axis of the first coupler body 28A.

The movable sleeve 28D is provided slidably along the shaft at the inner peripheral portion of the first coupler body 28A. The movable sleeve 28D has a tapered opening 28D at the center of the tip. The opening 28d has a shape corresponding to the shape (inverted circular truncated cone shape) of the valve portion 28B2 of the fixed valve 28B, and is opened and closed by the valve portion 28B2. Fig. 5 shows a state in which the opening 28d is closed. Since the opening 28D is closed, the distal end surface of the movable sleeve 28D and the distal end surface of the valve portion 28b2 are positioned on the same plane (so-called coplanar state). In a state where the opening 28D is closed, the movable sleeve 28D is disposed so as to protrude by a predetermined amount from the front end surface of the first coupler body 28A.

The coil spring 28E is disposed along the axis of the fixed valve 28B, and biases the movable sleeve 28D in a direction (upward in fig. 5) protruding from the front end surface of the first coupler body 28A. The direction protruding from the front end surface of the first coupler body 28A is the direction closing the opening 28d.

The first coupler 28 configured as described above opens the opening 28D by pushing in the movable sleeve 28D against the urging force of the coil spring 28E. Then, by releasing the pushing force, the movable sleeve 28D is automatically returned to the original position by the urging force of the coil spring 28E, and the opening 28D is closed.

The second coupler 30 is a pressure-holding-side coupler. The second coupler 30 is connected to the air chuck 22 via a second pipe 38. The second pipe 38 is constituted by a flexible pipe.

As shown in fig. 5, the second coupler 30 includes a second coupler body 30A, a movable valve 30B, a movable valve support plate 30C, a coil spring 30D, and the like.

The second coupler body 30A has a cylindrical shape, and a movable valve 30B, a movable valve support plate 30C, a coil spring 30D, and the like are disposed therein. The second coupler body 30A has an opening 30A at the center of the front end thereof. The opening 30a has a tapered shape, and has a shape in which the diameter of the inner peripheral portion is reduced toward the tip.

The movable valve 30B has a cylindrical shaft portion 30B1 and a valve portion 30B2 provided at the tip of the shaft portion 30B 1. The shape of the front end of the valve portion 30b2 has a shape (truncated cone shape) corresponding to the shape of the opening portion 30A of the second coupler body 30A. The movable valve 30B is disposed along the axis of the second coupler body 30A, and is supported so as to be movable along the axis. The opening 30A of the second coupler body 30A is opened and closed by the movable valve 30B moving back and forth along the shaft. Fig. 5 shows a state in which the opening 30a is closed. In a state where the opening 30A is closed, the front end surface of the valve portion 30b2 and the front end surface of the second coupler body 30A are positioned on the same surface (so-called coplanar state).

The movable valve support plate 30C is a member for supporting the movable valve 30B, and supports the movable valve 30B so as to be movable along the shaft. The movable valve support plate 30C is formed of a circular plate-like plate having a plurality of openings (flow paths) 30C, and is fixedly provided inside the second coupler body 30A.

The coil spring 30D is disposed along the axis of the movable valve 30B, and biases the movable valve 30B in the direction of the front end of the second coupler body 30A (downward in fig. 5). The direction of the front end of the second coupler body 30A is the direction of closing the opening 30A.

The second coupler 30 configured as described above opens the opening 30a by pushing in the movable valve 30B against the biasing force of the coil spring 30D. Then, by releasing the pushing force, the movable valve 30B is automatically returned to the original position by the urging force of the coil spring 30D, and the opening 30a is closed.

Fig. 6 is an explanatory diagram of the operation of the coupler. Fig. 6 (a) shows a state in which the coupler is separated. Fig. 6 (B) shows a state in which the coupler is connected.

The coupling of the couplers 26 is performed by coaxially disposing the first coupler 28 and the second coupler 30 so as to face each other and relatively moving one of them toward the other. Fig. 6 shows an example of a case where connection is performed by moving the first coupler 28 toward the second coupler 30.

When the first coupler 28 is coaxially moved toward the second coupler 30, the distal end face of the first coupler body 28A and the distal end face of the second coupler body 30A abut against each other as shown in fig. 6 (B). In this state, the movable sleeve 28D of the first coupler 28 is pushed by the second coupler body 30A, and retreats rearward (downward in fig. 6). As a result, the opening 28D of the movable sleeve 28D is opened. On the other hand, the movable valve 30B of the second coupler 30 is pushed by the fixed valve 28B of the first coupler 28, and retreats rearward (upward in fig. 6). As a result, the opening 30A of the second coupler body 30A is opened. By opening the openings, the flow paths (air circuits) communicate with each other, and air can be supplied and discharged.

In the case of disconnection, the first coupler 28 and the second coupler 30 are separated from each other. Specifically, the first coupler 28 is moved in a direction away from the second coupler 30.

When the first coupler 28 and the second coupler 30 are separated, as shown in fig. 6 a, the movable sleeve 28D of the first coupler 28 moves in the front end direction (upward in fig. 6) due to the urging force of the coil spring 28E. Thereby, the opening 28D of the movable sleeve 28D is closed by the fixed valve 28B. Further, the movable valve 30B of the second coupler 30 is moved in the front end direction (downward direction in fig. 6) by the urging force of the coil spring 30D. Thereby, the opening 30A of the second coupler body 30A is closed by the movable valve 30B. By closing the opening 30A of the second coupler body 30A, the pressure state of the air chuck 22 to which the second coupler 30 is connected is maintained. In this way, the first coupler 28 and the second coupler 30 are configured to be connectable to each other and separable while maintaining a pressure state.

The holding of the workpiece W by the air chuck 22 is performed in the following order.

The air chuck 22 is in a released state (a state in which the claws are opened). The connection destination of the main pipe 32A of the first pipe 32 is set as the air supply pipe 32P.

First, a workpiece W is set in the air chuck 22. Next, the coupler 26 is connected. Namely, the first coupler 28 and the second coupler 30 are connected to each other. This allows air to be supplied to the air chuck 22. After connection of the coupler 26, air is supplied from a compressed air source 34 to pressurize the air chuck 22. Thereby, the air chuck 22 operates, and the workpiece W is held by the air chuck 22.

When the air chuck 22 is pressurized to a predetermined pressure, the supply of air is stopped. After that, the coupler 26 is separated. As described above, the second coupler 30 maintains a pressure state even if it is separated. Thus, the pressurized state of the air chuck 22 is maintained. This can maintain the state of holding the workpiece W. That is, the locked state by the clamp can be maintained.

The loosening of the work W is performed in the following order.

First, the solenoid valve 36 is driven to switch the connection destination of the main pipe 32A of the first pipe 32 to the exhaust pipe 32R. After that, the coupler 26 is connected. Namely, the first coupler 28 and the second coupler 30 are connected to each other. Thereby, air of the air chuck 22 is discharged, and the work W is released. After the air is exhausted, the coupler 26 is separated.

As described above, by connecting the coupler 26, air can be supplied to the air chuck 22, and air can be discharged from the air chuck 22. Further, since the coupler 26 can maintain a pressure state even when it is separated, the air chuck 22 can maintain a state of holding the workpiece W even when it is separated from the compressed air source 34. That is, the locked state by the clamp can be maintained.

[ automatic coupler connection mechanism ]

The air supply and exhaust mechanism 24 has a mechanism for automatically connecting and disconnecting the coupler 26. The coupling and decoupling of the coupler 26 is performed by the coupler automatic coupling mechanism 40.

As shown in fig. 2 and 3, the automatic coupler connecting mechanism 40 includes a first block 42 for attaching the first coupler 28, a second block 44 for attaching the second coupler 30, a second block support 46 for supporting the second block 44 on the table 12, a first driving unit 48 for moving the first block 42 forward and backward along the connecting direction of the coupler 26, a second driving unit 54 for moving the first driving unit 48 forward and backward, a support pin 60 for supporting the second coupler 30 by abutting against the rear end portion of the second coupler 30 in the connecting direction when the first coupler 28 is connected to the second coupler 30, and a positioning pin 62 for positioning the second coupler 30 at a predetermined position when the first coupler 28 is connected to the second coupler 30.

The first block 42 has a rectangular parallelepiped shape. The first block 42 has a fitting portion of the first coupler 28. The first block 42 has a connection portion of the first pipe 32. The first pipe 32 connected to the first block 42 is connected to the first coupler 28 via a flow path 42A (see fig. 5) provided inside the first block 42. The integral body of the first coupler 28 and the first block 42 is an example of the first coupler section.

The second block 44 has a rectangular parallelepiped shape. The second block 44 has a fitting portion of the second coupler 30. The second block 44 has a connection portion of the second pipe 38. The second pipe 38 connected to the second block 44 is connected to the second coupler 30 via a flow path 44A (see fig. 5) provided in the second block 44. The integral body of the second coupler 30 and the second block 44 is an example of the second coupler section.

The second block support 46 is provided at a predetermined position on the table 12, and supports the second block 44 at a predetermined position with respect to the table 12. The second block 44 is supported in a predetermined posture with respect to the table 12. The second block support portion 46 supports the second block 44 on the table 12 via the leaf spring 46A. The leaf spring 46A is disposed perpendicularly to the rotation axis θ of the table 12. I.e. horizontally. One end (base end) of the leaf spring 46A is fixed to the table 12. More specifically, one end is fastened to a bracket 46B attached to the table 12 by screw threads, and is fixed to the table 12. The bracket 46B is fastened to the side surface of the table 12 by screw threads, for example. Therefore, the bracket 46B is detachable from the table 12, and the plate spring 46A is detachable from the table 12. The second block 44 is screwed by a screw and is attached to the other end (front end) of the leaf spring 46A.

The second block 44 supported by the second block support portion 46 is disposed in a region radially outside the table 12. The second coupler 30 mounted on the second block 44 is disposed downward (vertically downward) along the rotation axis θ of the table 12. Therefore, the connection direction of the coupler 26 is set to be a direction (vertical direction) along the rotation axis θ of the table 12.

The second block 44 supported by the second block support portion 46 is elastically supported by the table 12 via a leaf spring 46A. The direction in which the leaf spring 46A is deflected is a direction along the rotation axis θ (vertical direction) of the table 12, and is a direction along the connection direction of the coupler 26. In the present embodiment, the second block support portion 46 is an example of the first support portion.

The first driving unit 48 includes a first frame 50 and a first actuator 52.

The first frame 50 is a frame that supports the first actuator 52. The first frame 50 has a horizontal portion 50H and a vertical portion 50V orthogonal to each other, and has an L-shape as a whole. The vertical portion 50V of the first frame 50 is disposed along the rotation axis θ of the table 12.

The first actuator 52 moves the first block 42 forward and backward along the connection direction (vertical direction) of the coupler 26. The first actuator 52 is constituted by, for example, a rodless cylinder (air cylinder), and has an actuator main body 52A as a fixed portion and a slide table 52B as a movable portion. The first actuator 52 directly moves the slide table 52B with respect to the actuator main body 52A by the energy of the compressed air. The first actuator 52 is attached to the vertical portion 50V of the first frame 50 so as to move the slide table 52B in the connection direction (vertical direction) of the coupler 26. In the present embodiment, the first actuator 52 is an example of the first driving section.

The first block 42 is mounted to the slide table 52B so as to move integrally with the slide table 52B. The first block 42 is attached to the slide table 52B such that the first coupler 28 is disposed vertically upward along the rotation axis θ of the table 12. Thus, when the first coupler 28 and the second coupler 30 are coaxially positioned, they can be disposed so as to face each other.

The second driving unit 54 includes a second frame 56 and a second actuator 58.

The second frame 56 is a frame that supports a second actuator 58. The second frame 56 has a horizontal portion 56H and a vertical portion 56V orthogonal to each other, and has an L-shape as a whole. The second frame 56 is integrated with the base 10 by attaching the vertical portion 56V to the base 10 of the roundness measuring apparatus 1. The second frame 56 is mounted by, for example, screws 56A. Therefore, the second frame 56 is detachably attached to the base 10. The horizontal portion 56H of the second frame 56 attached to the base 10 is disposed orthogonal to the rotation axis θ of the table 12.

The second actuator 58 horizontally moves the first driving unit 48 forward and backward toward the table 12. The second actuator 58 is constituted by, for example, a rodless cylinder (air cylinder), and has an actuator main body 58A as a fixed portion and a slide table 58B as a movable portion. The second actuator 58 directly moves the slide table 58B with respect to the actuator main body 58A by the energy of the compressed air. The second actuator 58 is attached to the horizontal portion 56H of the second frame 56 such that the slide table 58B is disposed orthogonal to the rotation axis θ of the table 12. The second actuator 58 is attached to the horizontal portion 56H of the second frame 56 so as to move the slide table 58B along the X axis. In the present embodiment, the second actuator 58 is an example of the second driving section.

The horizontal portion 50H of the first frame 50 of the first driving unit 48 is mounted to the slide table 58B. Thus, when the slide table 58B is moved, the first driving unit 48 is horizontally advanced and retreated toward the table 12.

The first driving unit 48 and the second driving unit 54 adjust the installation position so that the first coupler 28 moves forward and backward horizontally in the radial direction of the table 12. In the present embodiment, as shown in fig. 3, the installation position is adjusted so that the first coupler 28 moves forward and backward along a straight line L passing through the center of the table 12 and orthogonal to the rotation axis θ of the table 12. In particular, in the present embodiment, the straight line L is set along the X axis. Accordingly, the first driving unit 48 and the second driving unit 54 are set so as to move the first coupler 28 forward and backward along the X axis.

The support pin 60 is provided to the first drive unit 48. The support pin 60 is mounted to the actuator body 52A of the first actuator 52 via a bracket 60A. The position where the support pin 60 is mounted is a position on the extension line of the connection direction of the first coupler 28. In the present embodiment, the support pin 60 is disposed vertically above the first coupler 28. The support pin 60 has a cylindrical shape, for example, and is disposed along the Y direction. The support pin 60 is an example of the third support portion.

The positioning pin 62 is provided to the first driving unit 48. The positioning pin 62 is attached to the vertical portion 50V of the first frame 50 via a bracket 62A. The positioning pin 62 is mounted at a position where the positioning pin 62 abuts against the side surface of the second block 44 when the first coupler 28 and the second coupler 30 are coaxially positioned. The positioning pin 62 has a cylindrical shape, for example, and is disposed along the Z direction. The positioning pin 62 is in line contact with the second block 44 because of its cylindrical shape.

In the present embodiment, the positioning pin 62 is formed of a magnet. On the other hand, the second block 44 is made of a magnetic material (e.g., iron). This allows the second block 44 to be magnetically attracted to the positioning pin 62, and allows the second coupler 30 to be held at a predetermined position. The positioning pin 62 is formed of a magnet, and the second block 44 is formed of a magnetic material, thereby functioning as follows. That is, when the second block 44 is brought close to the positioning pin 62, the second block 44 can be automatically pulled toward the positioning pin 62 by magnetic force. Accordingly, even if the alignment is not accurately performed, the second coupler 30 can be automatically positioned at a predetermined position. In the present embodiment, the positioning pin 62 is an example of a positioning member. The positioning pin 62 made of a magnet is an example of a magnet portion. The second block 44 made of a magnetic material is an example of a magnetic material portion.

[ connection of coupler by automatic coupler connection mechanism ]

The coupling 26 is connected by the automatic coupling mechanism 40 as follows.

The coupling 26 is connected by positioning the first coupling 28 and the second coupling 30 at predetermined supply and exhaust positions. First, the supply and exhaust position will be described.

As described above, the second coupler 30 is attached to the table 12 via the second block support 46. Thus, rotates with the table 12. As shown in fig. 3, when the table 12 is rotated, the second coupler 30 rotates along a circle C centered on the rotation axis θ of the table 12. Circle C is the movement trace of the second coupler 30. The intersection of the circle C and the straight line L (the intersection on the first coupler 28 side) is the supply/exhaust position P of the coupler 26. The supply and exhaust position P is an example of the first position.

The first coupler 28 moves between the supply and exhaust position and the standby position by being moved back and forth along the straight line L by the second driving unit 54. The standby position is set to be a position separated from the air supply and exhaust position by a predetermined distance. This position is a position where the second block 44 does not contact the positioning pin 62 or the like even if the table 12 is rotated. Fig. 2 and 3 show a state in which the first coupler 28 is located at the standby position.

The first coupler 28 is located at the standby position except when connected. When the coupler 26 is connected, first, the second actuator 58 is driven to position the first coupler 28 at the supply/exhaust position P. When the first coupler 28 is positioned at the gas supply and discharge position P, the positioning pin 62 is disposed at a predetermined position (referred to as "contact position") on the movement locus (circle C) of the second coupler 30. The abutment position is a position where the second block 44 abuts against the positioning pin 62 when the second coupler 30 is located at the air supply and exhaust position P. When the first coupler 28 is positioned at the standby position, the positioning pin 62 is retracted from the movement locus of the second coupler 30 and positioned at a predetermined position (referred to as a "non-contact position"). The non-abutment position is a position where the table 12 is not in contact with the second block 44 even if rotated. The abutment position is an example of the second position. The non-contact position is an example of the third position. When the first coupler 28 is positioned at the gas supply and discharge position P, the second coupler 30 is not positioned at the gas supply and discharge position P. For example, the position (in particular, the position where the magnetic force of the positioning pin 62 is not applied) rotated by a predetermined amount from the air supply/exhaust position P.

After the first coupler 28 is positioned at the gas supply and discharge position P, the drive motor 14M rotates the table 12, and the second coupler 30 is positioned at the gas supply and discharge position P. At this time, the motor 14M is driven as follows, and the second coupler 30 is positioned at the air supply and exhaust position P. That is, the driving of the motor 14M is stopped before the second coupler 30 is located at the air supply and discharge position P, and the restriction force in the rotation direction of the table 12 is eliminated. When the driving of the motor 14M is stopped before the second coupler 30 is positioned at the air supply and discharge position P and the restriction force in the rotation direction of the table 12 is removed, the second block 44 is pulled toward the positioning pin 62 by the magnetic force and magnetically attracted to the positioning pin 62. Thereby, the second block 44 is stopped by abutting against the positioning pin 62. In addition, the second coupler 30 is thereby located at the air supply and exhaust position P.

The position at which the rotation of the motor 14M is stopped is set on the upstream side of the supply and exhaust position P in the rotation direction of the table 12, and is set within a range in which the magnetic force of the positioning pin 62 acts. That is, the second block 44 can be set in a range in which the second block is pulled up by the magnetic force of the positioning pin 62 and magnetically attracted to the positioning pin 62 even when the rotation of the table 12 is stopped.

Fig. 7 and 8 are front and top views of the workpiece automatic fixing mechanism. Fig. 7 and 8 show a state in which the first coupler and the second coupler are located at the supply and exhaust positions.

As shown in fig. 7 and 8, the first coupler 28 and the second coupler 30 are coaxially arranged at the air supply and exhaust position P. The first coupler 28 and the second coupler 30 are disposed opposite to each other with a predetermined gap therebetween when located at the air supply/exhaust position P.

As shown in fig. 7 and 8, when the second coupler 30 is located at the gas supply and discharge position P, the second block 44 is located directly below the support pin 60. At this time, the second block 44 is located directly under the support pin 60 in a non-contact state. That is, the second block 44 is disposed directly under the support pin 60 with a slight gap between the second block and the support pin 60.

After the first coupler 28 and the second coupler 30 are positioned at the air supply and exhaust position P, the first actuator 52 is driven to move the first coupler 28 by a predetermined amount toward the second coupler 30. Thereby, the first coupler 28 is connected to the second coupler 30.

In connection, the rear end (upper end) of the second block 44 abuts against the support pin 60, and the connection is supported. That is, the force pressing the second coupler 30 is received by the support pin 60. This enables the first coupler 28 and the second coupler 30 to be reliably connected.

As described above, the coupler 26 is connected so as to press the first coupler 28 against the second coupler 30. Therefore, when the first coupler 28 is connected to the second coupler 30, an axial force acts on the second coupler 30. However, in the roundness measuring apparatus 1 of the present embodiment, the second coupler 30 is elastically supported by the table 12 via the leaf spring 46A, and therefore, transmission of the force received at the time of connection to the table 12 can be suppressed. This can suppress the unnecessary load applied to the table 12. This works particularly effectively in the case of supporting the table 12 with air bearings. That is, it is possible to suppress a load exceeding the capacity from acting on the air bearing. In particular, tilting of the table 12 and damage to the support portion due to a load exceeding the capacity can be effectively suppressed.

When the coupler 26 is separated, the first actuator 52 is driven to move the first coupler 28 downward by a predetermined amount. Thereby, the first coupler 28 is retracted from the second coupler 30, and the first coupler 28 is separated from the second coupler 30.

After the coupler 26 is disconnected, the second actuator 58 is driven to move the first coupler 28 to the standby position. That is, as shown in fig. 2 and 3, the entire first driving unit 48 is separated from the table 12. Thus, the positioning pin 62 is retracted from the movement locus (circle C) of the second coupler 30, and the table 12 can be freely rotated.

[ control System for automatic workpiece fixing mechanism ]

The automatic workpiece fixing mechanism 20 controls the overall operation by the controller 70. The controller 70 is constituted by a computer including a processor, a memory, and the like, for example. That is, the computer functions as the controller 70 by executing a predetermined program.

The controller 70 controls the driving of the motor 14M, and controls the rotation of the table 12. The table 12 detects its rotational position by the rotational position detector 14S. The controller 70 detects the position of the second coupler 30 based on the detection result of the rotational position detector 14S.

The controller 70 controls the driving of the compressed air source 34 and the supply of air. The controller 70 controls the solenoid valve 36 to control switching of the connection destination of the first pipe 32. By setting the connection destination of the first pipe 32 as the compressed air source 34, air supply to the air chuck 22 can be performed. Further, by setting the connection destination of the first pipe 32 as the exhaust pipe 32R whose atmosphere is open, exhaust from the air chuck 22 can be performed.

The controller 70 controls the driving of the second actuator 58, and controls the advancing and retreating movement of the first driving unit 48 with respect to the table 12. More specifically, the first coupler 28 is controlled to move forward and backward between the standby position and the supply and exhaust position P. In addition, the controller 70 controls the driving of the first actuator 52, and controls the advancing and retreating movement of the first coupler 28 with respect to the second coupler 30. I.e. to control the connection and disconnection of the coupler 26.

[ action of automatic workpiece fixing mechanism ]

Next, the operation of fixing (clamping) and releasing (loosening) the workpiece W using the workpiece automatic fixing mechanism 20 will be described.

First, a method of fixing the workpiece W using the automatic workpiece fixing mechanism 20 will be described.

Fig. 10 is a flowchart showing a sequence of actions of fixing a workpiece.

First, a workpiece W is supplied to the air chuck 22 (step S1). The workpiece W is automatically supplied by a robot or the like, for example. The air chuck 22 is in a released state when supplied. I.e. in a state in which three jaws are open. The workpiece W is disposed in the center of the three claws of the air chuck 22.

After the work W is supplied to the air chuck 22, the second actuator 58 is driven to move the first coupler 28 from the standby position to the air supply and exhaust position P (step S2). The first coupler 28 is positioned at the gas supply and discharge position P, and the positioning pin 62 is positioned at the abutting position.

Next, the motor 14M of the table 12 is driven to move the second coupler 30 to the supply/exhaust position P (step S3). At this time, as described above, the motor 14M stops driving immediately before the second coupler 30 is located at the air supply and exhaust position P, and the restriction force in the rotation direction is eliminated. After the driving of the motor 14M is stopped, the second coupler 30 moves by the magnetic force of the positioning pin 62. The second block 44 is magnetically attracted to the positioning pin 62, and is stopped at the air supply and exhaust position P, and is kept stopped.

When the second coupler 30 is located at the gas supply/discharge position P, the first coupler 28 and the second coupler 30 are coaxially disposed and are disposed opposite to each other with a predetermined gap therebetween, as shown in fig. 7 and 8. After that, the coupler 26 is connected (step S4). The couplers 26 are connected by moving the first coupler 28 toward the second coupler 30 by a prescribed amount using the first actuator 52. This allows air to be supplied to the air chuck 22.

After the coupling 26 is connected, the solenoid valve 36 is controlled to set the connection destination of the first pipe 32 as the compressed air source 34 (step S5). Thereafter, the compressed air source 34 is driven to supply air to the air chuck 22. By supplying air to the air chuck 22, the workpiece W set in the air chuck 22 is held by the air chuck 22.

When a predetermined amount of air is supplied to the air chuck 22, the supply of air is stopped. I.e., the driving of the compressed air source 34 is stopped. After that, the coupler 26 is separated (step S7). The first actuator 52 lowers the first coupler 28 by a predetermined amount and withdraws from the second coupler 30, thereby separating the coupler 26.

As described above, the coupler 26 of the present embodiment is constituted by a so-called leak-free coupler. Thus, pressure separation is enabled. That is, the pressure state (pressurized state) of the air chuck 22 can be maintained even after separation. This makes it possible to maintain the clamped state of the workpiece W even after the coupler 26 is separated.

After the coupling 26 is separated, the second actuator 58 is driven, and the first coupling 28 is moved from the air supply/exhaust position P to the standby position as shown in fig. 2 and 3 (step S8). The first coupler 28 moves to the standby position, and the positioning pin 62 moves to the non-contact position. That is, the movement is to a position retreated from the movement locus (circle C) of the second coupler 30. Thereby, the table 12 can be rotated.

Thereafter, the workpiece W is measured using the detector 16.

Next, a method of releasing the fixation of the workpiece W will be described.

When the measurement is completed, first, the second actuator 58 is driven to move the first coupler 28 from the standby position to the air supply/exhaust position P (step S11). The first coupler 28 is positioned at the gas supply and discharge position P, and the positioning pin 62 is positioned at the abutting position.

Next, the motor 14M of the table 12 is driven to move the second coupler 30 to the supply/exhaust position P (step S12). This enables the coupler 26 to be connected.

After that, the coupler 26 is connected (step S13). That is, the first coupler 28 moves toward the second coupler 30 by a predetermined amount, and is connected to the second coupler 30.

After the coupling 26 is connected, the solenoid valve 36 is controlled to set the connection destination of the first pipe 32 as the exhaust pipe 32R (step S14). Thereby, the air in the air chuck 22 is discharged, and the gripping of the workpiece W is released. I.e. loosening the workpiece W.

After that, the coupler 26 is separated (step S15). That is, the first coupler 28 descends by a predetermined amount and retreats from the second coupler 30.

After the coupling 26 is separated, the second actuator 58 is driven, and the first coupling 28 is moved from the air supply/exhaust position P to the standby position as shown in fig. 2 and 3 (step S16). The first coupler 28 moves to the standby position, and the positioning pin 62 moves to the non-contact position.

Thereafter, the workpiece W is recovered from the air chuck 22 (step S17). The work W is automatically collected by a robot, for example, similarly to the case of supply.

As described above, according to the roundness measuring apparatus 1 of the present embodiment, the workpiece W can be automatically fixed and released by the workpiece automatic fixing mechanism 20. This can automate the supply and recovery of the workpiece W and can automate the measurement.

Further, by elastically supporting the second coupler 30 on the table 12, the coupler 26 can be connected and disconnected without applying an unnecessary load to the table 12. This allows stable support even when the table 12 is supported via an air bearing, for example.

The automatic workpiece fixing mechanism 20 is attached to the table 12 and the base 10 as a so-called exterior unit, and can be used without performing special modification of the apparatus. That is, the present invention can be used in a conventional roundness measuring apparatus.

Modification example

[ setting of connection Direction of coupler ]

In the above embodiment, the connection direction of the coupler 26 is aligned with the direction (vertical direction) of the rotation axis θ of the table 12, but the setting of the connection direction of the coupler 26 is not limited thereto. For example, the direction perpendicular to the rotation axis θ of the table 12 may be set.

Fig. 12 and 13 are plan views showing another example of setting the connection direction of the coupler. Fig. 12 and 13 show examples in which the connection direction of the coupler 26 is the Y direction. In this case, the first coupler 28 is moved in the Y direction, and the couplers 26 are connected. Fig. 12 shows a state in which the first coupler 28 is positioned at the standby position. Fig. 13 shows a state in which the first coupler 28 is connected to the second coupler 30.

The first coupler 28 is disposed along the Y direction because the first coupler 28 is moved along the Y direction to connect the couplers 26. The second coupler 30 is disposed perpendicularly to the rotation axis θ of the table 12, and is disposed along a tangential direction of a circle centered on the rotation axis θ of the table 12.

Further, since the first coupler 28 is moved in the Y direction, the first driving unit 48 is arranged in the Y direction. That is, the first actuator 52 is attached to the first frame 50 so as to move the first coupler 28 in the Y direction.

The leaf spring 46A of the second block support portion 46 is attached so as to flex in the connecting direction when the coupler 26 is connected. Specifically, the table 12 is arranged along the radial direction.

In the automatic coupler connecting mechanism 40 of the present example, there is no positioning pin, and the support pin 60 also functions as a positioning pin. Accordingly, in this example, the support pin 60 is constituted by a magnet.

The coupling 26 is connected as follows.

First, the drive motor 14M rotates the table 12, and stops the second coupler 30 at a predetermined position. This position is a position where the integrated body of the second coupler 30 and the second block 44 is disposed between the first coupler 28 and the support pin 60.

Next, the second actuator 58 is driven to advance the first driving unit 48 toward the table 12, and the first coupler 28 is positioned at a predetermined position. This position is referred to as the supply/exhaust position of the first coupler 28 in this example. When the first coupler 28 is positioned at the supply/discharge position, the second block 44 is magnetically attracted to the support pin 60, and the second coupler 30 is positioned at a predetermined position in a predetermined posture. This position is referred to as the supply/exhaust position of the second coupler 30 in this example. The second coupler 30 is disposed along the Y direction when located at the air supply and exhaust position. When both the first coupler 28 and the second coupler 30 are positioned at the supply and exhaust positions, they are coaxially disposed and disposed to face each other with a predetermined interval therebetween. When the first actuator 52 is driven to move the first coupler 28 toward the second coupler 30 by a predetermined amount in this state, the first coupler 28 is connected to the second coupler 30.

In this way, the first coupler 28 can be moved in the horizontal direction to connect the couplers 26.

[ locating Pin ]

In the above embodiment, the entire first driving unit 48 including the support pin 60 and the positioning pin 62 is moved forward and backward with respect to the table 12, but only the positioning pin 62 may be moved forward and backward with respect to the table 12. That is, since only the positioning pin 62 substantially blocks the rotation of the table 12, only the positioning pin 62 can be retracted from the movement locus of the second coupler 30. In this case, the first driving unit 48 including the support pin 60 is fixed at a constant position. The support pins 60 and the first coupler 28 are preferably provided so as to sufficiently secure the interval therebetween so as not to hinder the rotation of the table 12 (so as not to come into contact with the second coupler 30). The support pin 60 is preferably configured to be movable in a forward and backward direction as required.

In the structure in which only the positioning pin 62 is moved, the direction in which the positioning pin 62 is moved is not particularly limited. For example, the positioning pin 62 may be moved forward and backward along the rotation axis θ of the table 12 to move between the abutment position and the non-abutment position.

In the above embodiment, the positioning pin 62 itself is formed of a magnet in order to magnetically attract the second block 44, but a part of the positioning pin 62 may be formed of a magnet. For example, the magnet may be incorporated in the positioning pin 62 made of a magnetic material to generate a magnetic force. Similarly, the second block 44 may be constituted by a magnetic material in only a part thereof. For example, only the portion abutting on the positioning pin 62 may be made of a magnetic material.

In the above embodiment, the positioning pin 62 side is formed of a magnet, but the second block side 44 may be formed of a magnet.

[ support Structure of second coupler ]

In the above embodiment, the second coupler 30 is supported via the leaf spring 46A, but the structure for supporting the second coupler 30 is not limited to this. The second coupler 30 may be elastically supported. For example, the spring is elastically supported by a coil spring. In addition to the springs, the springs may be elastically supported by an elastic body such as rubber or elastomer.

[ first actuator and second actuator ]

In the above embodiment, the first actuator 52 and the second actuator 58 are constituted by the rodless cylinder, but the configuration of the first actuator 52 and the second actuator 58 is not limited to this. For example, the motor may be driven by a linear motor, a feed screw mechanism, or the like.

Second embodiment

In the first embodiment, the second coupler 30 is elastically supported, so that unnecessary load is suppressed from being applied to the table 12 at the time of connection of the coupler 26. In the present embodiment, the first coupler 28 is elastically supported. Specifically, the first actuator 52 is elastically supported by the first frame 50.

The configuration of the roundness measuring apparatus 1 according to the first embodiment is substantially the same as that of the first embodiment except for the supporting structures of the first coupler 28 and the second coupler 30. Therefore, only the supporting structures of the first coupler 28 and the second coupler 30 will be described below.

As shown in fig. 14, in the roundness measuring apparatus of the present embodiment, the first actuator 52 is elastically supported by the first frame 50 via the elastic support portion 80.

The elastic support portion 80 is composed of a main support portion 82 and an auxiliary support portion 84. In the present embodiment, the elastic support portion 80 is an example of the second support portion.

The main support portion 82 elastically supports the first actuator 52 via a leaf spring 82A. One end of the plate spring 82A is fixed to the actuator main body 52A of the first actuator 52 via a bracket 82B. In addition, the other end of the plate spring 82A is fixed to the top of the vertical portion 50V of the first frame 50. Thereby, the first actuator 52 is elastically supported by the first frame 50. The direction in which the leaf spring 46A is deflected is a direction (vertical direction) along the rotation axis θ of the table 12. Which is the direction along the connection direction of the coupler 26.

The auxiliary support portion 84 assists the support of the first actuator 52 by the main support portion 82. The auxiliary support portion 84 has a coil spring 84A, and supports the self weight of the first actuator 52 and its assembly by the coil spring 84A.

The first actuator 52 is supported by the auxiliary support portion 84, and is substantially supported in the Z direction (vertical direction) in the unloaded state. Therefore, the first coupler 28 is also supported substantially in the Z direction in the unloaded state.

The second coupler 30 is fixed to the table 12 via a bracket 86. The bracket 86 is fastened to the side of the table 12 by screw threads, and is fixed to the table 12. Therefore, the second coupler 30 can be attached to and detached from the table 12.

The coupling method of the coupler 26 is the same as that of the roundness measuring apparatus 1 of the first embodiment described above.

First, the second actuator 58 is driven to position the first coupler 28 at the supply/exhaust position P. When the first coupler 28 is positioned at the gas supply and discharge position P, the positioning pin 62 is disposed at the contact position of the second coupler 30.

Then, the motor 14M of the table 12 is driven to rotate the table 12, and the second coupler 30 is positioned at the gas supply and discharge position P. As in the first embodiment, the motor 14M is stopped before the second coupler 30 is located at the supply/exhaust position P. The second coupler 30 is magnetically attracted to the positioning pin 62 by the second block 44, and is stopped and held at the air supply and exhaust position P.

The first coupler 28 and the second coupler 30 are disposed coaxially with each other and disposed opposite to each other with a predetermined gap therebetween, while being positioned at the gas supply and discharge position P.

Thereafter, the first actuator 52 is driven to move the first coupler 28 toward the second coupler 30 by a predetermined amount. Thereby, the first coupler 28 is connected to the second coupler 30. At the time of connection, an axial force acts on the second coupler 30, but the elastic support portion 80 suppresses transmission of the force to the table 12.

After the coupler 26 is disconnected, the second actuator 58 is driven to move the first coupler 28 to the standby position. Thus, the positioning pin 62 is retracted from the movement locus of the second coupler 30, and the table 12 can be freely rotated.

The modification of the first embodiment can be applied to the roundness measuring apparatus of the present embodiment as appropriate.

Third embodiment

Fig. 15 is a cross-sectional view showing the configuration of a main part of the roundness measuring apparatus.

The roundness measuring apparatus according to the present embodiment is configured such that a mechanism for supplying air to and discharging air from the air chuck 22 is incorporated in the apparatus main body.

As shown in fig. 15, the table 12 is supported by the base 10 via an air bearing 110. The air bearing 110 feeds compressed air between the shaft portion 110A and the bearing portion 110B, and supports the shaft portion 110A in a noncontact manner by air pressure. Compressed air is supplied from an air source not shown. Such an air bearing 110 is well known. Therefore, a detailed description of the structure thereof is omitted. The bearing is not limited to the air bearing 110, and a gas bearing using a gas other than air (air) may be used. The bearing portion 110B of the air bearing 110 is fixed to a first support frame 112A provided on the base 10. The air bearing 110 is connected to the table 12 at a shaft portion 110A. The table 12 is connected to the shaft portion 110A coaxially. Thereby, the table 12 is supported by the base 10 via the air bearing 110.

The table 12 is driven to rotate by a motor 14M. The rotation of the motor 14M is transmitted to the table 12 via the rotation transmission mechanism 114. The rotation transmission mechanism 114 includes a drive shaft 116, a chuck 118, a chuck pin 120, a driven pulley 122, a driving pulley 124, a driving belt 126, and the like.

The drive shaft 116 is rotatably supported by a second support frame 112B attached to the first support frame 112A via a bearing 128. The drive shaft 116 is disposed coaxially with the lower portion of the air bearing 110. Thus, the drive shaft 116 and the table 12 are coaxially arranged.

The collet 118 is mounted to the drive shaft 116. The collet 118 has a groove 118A at a front end. The collet pin 120 is mounted to the shaft portion 110a of the air bearing 110. The collet pin 120 has a ball portion 120A in a spherical shape at a front end (lower end). The ball portion 120A of the collet pin 120 connects the collet 118 and the collet pin 120 in a rotationally transmissive manner by being inserted into the slot portion 118A of the collet 118. The chuck 118 is connected to the chuck pins 120, and the drive shaft 116 is rotatably connected to the shaft portion 110A of the air bearing 110.

The driven-side pulley 122 is mounted to the drive shaft 116. The drive-side pulley 124 is mounted to the output shaft of the motor 14M. The drive belt 126 is wound around the driven-side pulley 122 and the drive-side pulley 124. Thus, when the motor 14M is driven, rotation thereof is transmitted from the driving pulley 124 to the driven pulley 122 via the driving belt 126, and the driving shaft 116 is rotated. Then, the shaft portion 110A of the air bearing 110 is rotated by the rotation of the drive shaft 116, and the table 12 connected to the shaft portion 110A is rotated.

The drive shaft 116 is hollow and has a flow path 116a therein. The second coupler 30 is integrally mounted at the lower end portion of the driving shaft 116 via the second block 44. The second coupler 30 attached to the drive shaft 116 is disposed coaxially with the drive shaft 116 and vertically downward. The second coupler 30 attached to the drive shaft 116 communicates with the flow path 116A of the drive shaft 116 via the second block 44. Since the drive shaft 116 is disposed coaxially with the table 12, the second coupler 30 is also disposed coaxially with the table 12. That is, the second coupler 30 is disposed on the rotation axis of the table 12.

A flexible relay pipe 132 is connected to the upper end of the drive shaft 116 via a connector 130. The other end of the relay pipe 132 is connected to a first connection port 12A provided in the center of the lower surface of the table 12. The table 12 has a flow path 12B therein, and one end of the flow path 12B communicates with the first connection port 12A. The other end of the flow path 12B communicates with a second connection port 12C provided on the side surface of the table 12. The air chuck 22 is connected to the second connection port 12C of the table 12 via a flexible connection pipe 134. Thereby, the air chuck 22 is connected to the second coupler 30. In the present embodiment, pipes (the flow path 116A of the drive shaft 116, the relay pipe 132, the flow path 12B of the table 12, the connection pipe 134, and the like) connecting the air chuck 22 and the second coupler 30 are examples of the second pipe.

The first coupler 28 is mounted on the first block 42 and is disposed coaxially on the lower portion of the second coupler 30. The first coupler 28 is disposed vertically upward and is disposed opposite to the second coupler 30 with a predetermined gap therebetween.

The first coupler 28 is driven by the actuator 136 to advance and retreat in the vertical direction (Z direction). Specifically, the device moves between the connection position and the disconnection position by advancing and retreating in the vertical direction. The first coupler 28 is connected to the second coupler 30 by being located at a connection position. In addition, the second coupler 30 is separated from the first coupler by a predetermined distance by being located at the separation position. I.e. separated from the second coupler 30 by being in a separated position. Fig. 15 shows a state in which the first coupler 28 is located at the separation position. The actuator 136 is constituted by, for example, a cylinder (an example is an air cylinder), and the first block 42 is connected to a lever portion as a movable portion via a bracket 138. In the present embodiment, the actuator 136 is an example of the first driving unit. The actuator 136 is fixed to the base 10 via a bracket not shown.

The mechanism for supplying and exhausting air including the coupler 26 is constructed as described above. The coupling 26 is connected as follows.

In the case of coupling the coupler 26, the actuator 136 is driven to move the first coupler 28 to the coupling position. Thereby, the first coupler 28 is connected to the second coupler 30.

In the case of supplying air, the connection destination of the first pipe 32 is set to the compressed air source 34 by the solenoid valve 36, and air is supplied from the compressed air source 34.

In the case of exhaust, the connection destination of the first pipe 32 is set to an exhaust pipe 32R whose atmosphere is open by a solenoid valve 36.

In the case of disengaging the coupler 26, the actuator 136 is driven to move the first coupler 28 toward the disengaged position. Thereby, the first coupler 28 is separated from the second coupler 30.

As described above, in the roundness measuring apparatus of the present embodiment, the air chuck 22 can be automatically supplied and discharged. This makes it possible to automatically fix and release the workpiece W.

In the roundness measuring apparatus of the present embodiment, the coupling and the decoupling of the coupler 26 are performed coaxially with the air bearing 110. This can suppress tilting of the table 12 when the coupler 26 is connected and disconnected. In addition, damage to the support portion of the table 12 can be suppressed.

In the present embodiment, a cylinder is used as the actuator 136, but the configuration of the actuator 136 is not limited to this. For example, the motor may be driven by a linear motor, a feed screw mechanism, or the like.

Other embodiments

[ holding portion of workpiece ]

In the above embodiment, the case where the work W is held by the air chuck 22 has been described, but the means (holding portion) for holding the work W on the table 12 is not limited to this. The work W may be held by a pressurized state by being supplied with air or by a negative pressure state by being sucked by air.

The holding portion of the structure that operates by the supply of the gas includes, for example, a holding portion of a structure that operates by the supply of a gas other than air such as nitrogen.

As the holding portion having a structure that operates by suction of air, for example, a vacuum chuck or the like can be exemplified. In this case, instead of the compressed air source 34, a suction source constituted by an ejector or the like is used as the gas pressure source. The suction source is an example of a gas pressure source that generates negative pressure.

[ measuring apparatus ]

In the above embodiment, the description has been given taking, as an example, the case where the present invention is applied to the roundness measuring apparatus, but the application of the present invention is not limited to this. The present invention can be applied to a measuring apparatus including a rotatable table and measuring an object to be measured held on the table. Therefore, the present invention can be applied to, for example, a three-dimensional measuring apparatus including a rotatable table.

In the above-described embodiment, the case where the present invention is applied to a so-called contact-type roundness measuring apparatus has been described as an example, but the present invention can also be applied to a so-called non-contact-type roundness measuring apparatus. The non-contact roundness measuring apparatus detects displacement of the surface of the workpiece W using an optical sensor such as a laser displacement meter.

The device to which the workpiece fixing mechanism of the present invention is applied is not limited to the roundness measuring device. For example, the present invention can be applied to a device that holds a workpiece and rotates the workpiece to perform processing (for example, measurement, machining, and the like), for example, a shape measuring device, a rotary machining device, a lathe machining device, and the like.

Claims

1. A workpiece fixing mechanism for fixing a workpiece held on a rotatable table, wherein,

the workpiece fixing mechanism includes:

a holding unit that holds the work on the table, operates by supplying or sucking gas, and maintains a state of holding the work by maintaining a pressurized state or a negative pressure state;

a gas pressure source that generates positive or negative pressure;

a first coupler unit connected to the gas pressure source via a first pipe;

A second coupler unit which is provided on the table, is connected to the holding unit via a second pipe, is connectable to the first coupler unit, and is separable from the first coupler unit so as to be capable of holding a pressure state of the holding unit; and

and a first driving unit that moves the first coupler unit forward and backward in a connection direction with respect to the second coupler unit located at a first position, and connects and disconnects the first coupler unit to and from the second coupler unit.

2. The workpiece fixture of claim 1, wherein,

the workpiece fixing mechanism includes a first support portion detachably attached to the table and supporting the second coupler portion in a region radially outside the table.

3. The workpiece fixture of claim 2, wherein,

the first support portion elastically supports the second coupler portion.

4. The workpiece fixture of claim 1, wherein,

the workpiece fixing mechanism includes a second support portion that elastically supports the first drive portion.

5. The workpiece fixture according to any one of claims 1 to 4, wherein,

The workpiece fixing mechanism includes:

a positioning member that abuts against the second coupler section to position the second coupler section at the first position; and

and a second driving unit that moves the positioning member between a second position located on the movement locus of the second coupler unit and a third position retracted from the movement locus of the second coupler unit.

6. The workpiece fixture of claim 5, wherein,

the second driving part integrally moves the positioning member and the first driving part,

the first coupler portion is disposed at the first position when the positioning member is located at the second position.

7. The workpiece fixture of claim 6, wherein,

one of the second coupler portion and the positioning member has a magnet portion, and the other of the second coupler portion and the positioning member has a magnetic body portion, and the second coupler portion is magnetically attracted to the positioning member.

8. The workpiece fixture according to any one of claims 1 to 4, wherein,

the connection direction of the first coupler section with respect to the second coupler section is set to be parallel to the rotation axis of the table.

9. The workpiece fixture as claimed in claim 3, wherein,

the first support portion elastically supports the second coupler portion via a leaf spring.

10. The workpiece fixture of claim 4, wherein,

the second support portion elastically supports the first drive portion via a leaf spring.

11. The workpiece fixture according to any one of claims 1 to 4, wherein,

the first driving unit has a third support portion that comes into contact with a rear end portion of the second coupler portion in a connection direction when the first coupler portion is connected to the second coupler portion, thereby supporting the second coupler portion.

12. The workpiece fixture of claim 1, wherein,

the first coupler section and the second coupler section are disposed on a rotation axis of the table,

the first driving unit moves the first coupler unit forward and backward along the rotation axis of the table, and connects and disconnects the first coupler unit to and from the second coupler unit.

13. The workpiece fixture according to any one of claims 1, 2, 3, 4, 12, wherein,

the table is supported via a gas bearing.

14. An assay device, wherein,

the measuring apparatus comprising the workpiece fixing mechanism according to any one of claims 1, 2, 3, 4, and 12,

the measuring device detects displacement of the surface of the workpiece in synchronization with the rotation angle of the table, and measures roundness or cylindricity of the workpiece.