JP7247828B2 - leak tester - Google Patents

Description

The present invention relates to a leak inspection device for inspecting the airtightness of a work.

2. Description of the Related Art Conventionally, there has been known a leak inspection device that inspects airtightness of a work with an opening formed in the work sealed. For example, the leak test apparatus disclosed in Patent Literature 1 seals an opening of a pipe-shaped part joined to a container, and measures the pressure inside the test head with the pressure inside the test head set to negative pressure.

JP-A-2008-96308

While the container of Patent Document 1 is a simple one in which pipe-shaped parts are joined at one point, a workpiece 90 having a plurality of pipe-shaped ports is assumed, as shown in FIG. 4, for example. The workpiece 90 has a plurality of pipe-shaped ports 93, 94, 95 with different diameters protruding from the main body 91 in different directions, thereby communicating an internal space 92 of the main body 91 with the outside. An opening port 96 is formed on the bottom surface of the main body 91 opposite to the ports 93 , 94 , 95 .

Conventionally, in the leakage inspection process for the work 90, first, the bottom surface of the main body 91 is pressed against the flat plate-shaped base jig 18, and the base jig 18 and the opening port 96 are separated by an O-ring provided at the mouth of the opening port 96. is sealed between Next, a coupler corresponding to the size is inserted into the outer periphery of each port 93, 94, 95 and sealed. Each coupler is connected in parallel to the leak tester via an on-off valve. An arbitrary open/close valve is turned on and off, and an arbitrary test pressure is applied from the leak tester at an arbitrary timing, whereby the amount of leakage from the workpiece 90 to the outside is measured by the leak tester.

In conventional semi-automatic equipment, a jig 18 for setting a workpiece 90, and couplers and piping members connected to respective ports 93, 94 and 95 are mounted on a pallet. First, outside the semi-automatic equipment, an operator sets a workpiece 90 on the base jig 18 mounted on a pallet. Subsequently, the operator manually attaches each coupler to each port 93, 94, 95, and drives the sealing mechanism of the coupler to seal. After that, the operator sets the pallet on the semi-automatic equipment and activates the semi-automatic equipment.

Then, the semi-automatic equipment automatically lowers the work holder, connects each port on the side of the work 90 and the port on the side of the leak tester, and performs a leak test on the work 90 . After the inspection, the semi-automatic equipment automatically raises the workpiece holder and separates the connection of each port to make it removable. Then, the operator manually removes the couplers from the respective ports 93, 94, 95 and takes out the workpiece 90 from the pallet.

When an automated facility is applied to this leak inspection process, each port 93, 94, 95 may , the three-dimensional phase of Therefore, in order to attach and detach the coupler correctly, it is necessary to detect the phases in the XYZ directions of the outer peripheral portions of the ports 93, 94, and 95 in advance by an imaging device. Moreover, in order to attach/detach each coupler, it is necessary to grasp each coupler with a hand and attach/detach automatically to a pre-computed phase determination position, for example, by operating a 6-axis robot. Therefore, a large-scale facility is required, and the facility cost increases.

In addition, it is also conceivable to install all the work pieces 90 and piping members such as couplers on a pallet, bring them into the inspection process, and automatically inspect them. In this case, the pallet is expensive because a plurality of piping members such as couplers for connecting the ports 93, 94, 95 on the workpiece 90 side and the ports on the leak tester side are mounted on the pallet. In addition, a large number of pallets are required because the pallets must be circulated in a line equipped with conveyors, pallet changers, and the like. Furthermore, it is necessary to install an attachment/detachment device equipped with an image device and a 6-axis robot for automatic attachment/detachment of the coupler in the line.

The present invention was created in view of this point, and its object is to connect a coupler to each port by simple automatic equipment for a work having a plurality of pipe-shaped ports with different projecting directions. It is to provide a leak test device that is effective.

The present invention is a workpiece (90) having a plurality of pipe-shaped ports (93, 94, 95) with different diameters that project in different directions from a main body (91) and communicate between an internal space (92) of the main body and the outside. In this leakage inspection device, each port is sealed, inspection air is supplied to the internal space from an air supply port (96) provided in the main body, and the airtightness of the workpiece is inspected based on the pressure drop of the inspection air. be.

This leak test device includes a base jig (18), a pressing jig (25), a plurality of couplers (31, 41, 51), a plurality of loaders (36, 46, 56), and a plurality of brackets ( 37, 47, 57), a plurality of follower units (38, 48, 58), an inspection air supply section (16), and a leak tester (60).

The base jig is set with the workpiece positioned by the positioning member (19). The pressing jig presses and holds the work against the base jig.

A coupler is provided corresponding to each port, and can be inserted into the outer periphery of the port to seal the mouth of the port. The loader advances and retracts each coupler along the centerline of the port. A bracket is fixed to the moving part of each loader. The follower unit is attached between each bracket and each coupler, and is capable of offset movement in the XYZ axis directions in three-dimensional space and rotational movement in any plane. to insert the coupler into the outer periphery of the port. The inspection air supply unit supplies inspection air to the air supply port. A leak tester detects a work leak based on the pressure drop of test air.

The coupler has insertion guides (32, 42) that are inserted into the ports (93, 94) with relatively large diameters while fitting to the inner periphery of the ports, depending on the diameter of the corresponding port. is formed at the tip of the coupler, and for a port (95) with a relatively small diameter, the tip of the coupler functions as an extra insertion guide (52) that is inserted while fitting to the outer periphery of the port. is formed in

In the present invention, since the workpiece is positioned and set by the positioning member, variation in the three-dimensional phase of each port due to variation in the position and orientation of setting the workpiece is suppressed. In addition, since each coupler follows the phase of the port and is inserted into the outer peripheral portion of the port by the operation of the follow-up unit, it is possible to absorb the phase variation of each port due to the variation in assembly accuracy with the main body.

In contrast to conventional semi-automated equipment in which workers attach and detach couplers manually, leak inspection can be performed by connecting couplers to each port using simple automatic equipment without introducing an image device or a 6-axis robot into the line. can be implemented.

1 is an overall front view of a leak test device according to one embodiment of the present invention; FIG. II direction arrow directional view of FIG. FIG. 2 is a plan view of the turntable of the leak test device of FIG. 1; FIG. 4 is a diagram showing an example of the shape of a workpiece; 4A and 4B are schematic diagrams for explaining the configuration and operation of a coupler connecting portion; FIG. Sectional drawing of the state which inserted the 1st coupler in the 1st port. Sectional drawing of the state which inserted the 2nd coupler in the 2nd port. Sectional drawing of the state which inserted the 3rd coupler in the 3rd port. Schematic diagram of a follow-up unit. 4 is a flow chart of a leak inspection method according to Comparative Example 1 (semi-automatic equipment); 10 is a flow chart of a leak inspection method according to Comparative Example 2 (automated equipment using an imaging device and a 6-axis robot); 4 is a flow chart of a leak testing method according to an embodiment of the present invention;

(one embodiment)
An embodiment of a leak test device according to the present invention will be described below with reference to the drawings. This leakage inspection apparatus is an apparatus for inspecting airtightness of a work with an opening formed in the work sealed. In particular, the leak test apparatus of this embodiment can connect a coupler to each port by simple automatic equipment for a workpiece having a plurality of pipe-shaped ports with different protruding directions.

The overall configuration of a leak test device 10 according to one embodiment will be described with reference to FIGS. 1 to 3. FIG. The leak test device 10 is provided with a base plate 12 on top of a pedestal 11 and an upper plate 22 above the base plate 12 . A direct drive motor 14 for rotating the turntable 17 and a lower jig 15 positioned right below the work 90 are provided on the base plate 11 . An air cylinder 13 for vertically moving a lower jig 15 along the main axis M is provided below the base plate 11 . The lower jig 15 is provided with an inspection air supply unit 16 that supplies inspection air to an air supply port 96 (see FIG. 4) of the workpiece 90 .

The turntable 17 has an input station where the next workpiece 90I to be inspected is placed, an inspection station where the workpiece 90 currently being inspected is placed, and an unloading station where the inspected workpiece 90E is placed. are arranged around the table axis T at intervals of 120°. The turntable 17 rotates the workpiece 90 between three stations. The works 90I, 90, 90E of each station are positioned by the positioning member 19 and set on the base jig 18. As shown in FIG.

The upper plate 22 is provided with a servo cylinder 23 for vertically moving a pressing jig 25 along the main axis M via a support shaft 24 . The pressing jig 25 is arranged directly above the workpiece 90 in the inspection station, and presses and holds (clamps) the workpiece 90 against the base jig 18 when lowered.

Between the inspection station of the turntable 17 and the upper plate 22 is provided a rotary plate 27 supported by the pillars 21 . Coupler connection mechanisms 30 and 40 are attached to the rotating plate 27 . Detailed configurations and actions of the coupler connection mechanisms 30 and 40 will be described later.

A leak tester 60 is installed on the rear base plate 12 when viewed from the front side, which is the viewing direction in FIG. Air is supplied from an air source to the leak tester 60 via an air dryer 61 , a mist separator 62 and a regulator 63 . The leak tester 60 detects leakage of the workpiece 90 based on the pressure drop of the inspection air supplied to the workpiece 90 by the inspection air supply unit 16 . A general leak test method using the leak tester 60 is a well-known technique, so a detailed description thereof will be omitted.

Next, with reference to FIG. 4, an example of the shape of the workpiece 90 applied to the leak test device of one embodiment will be described. As described in the section [Problems to be Solved by the Invention], the workpiece 90 has a plurality of pipe-shaped ports 93, 94, and 95 with different diameters protruding from the main body 91 in different directions. The space 92 communicates with the outside. The ports are referred to as a first port 93, a second port 94, and a third port 95 in descending order of diameter.

An opening port 96 is formed on the bottom surface of the main body 91 opposite to the ports 93 , 94 , 95 . In this embodiment, since the opening port 96 is used as an air supply port, it is hereinafter referred to as an "air supply port 96". in the leak inspection process. Inspection air is supplied from the inspection air supply unit 16 to the internal space 92 via the air supply port 96 .

Specifically, the workpiece 90 in this example is a valve for controlling water stoppage, distribution, and metering of cooling water for a vehicle engine. Port 95 is connected to the turbocharger. An open port 96 is connected to the engine. In addition, in FIG. 4 and the like, the shape of the main body 91 is simplified and illustrated. Further, FIG. 4 does not show the positioning member 19 for the convenience of being cited in the description of the prior art. In the conventional technology, the workpiece 90 is not always positioned on the base jig 18 .

In the leak test process, the workpiece 90 is attached so that the bottom surface on the opening port 96 side contacts the base jig 18 . Assuming that a plane along the base jig 18 is a reference plane, each port 93, 94, 95 in this example protrudes in each direction on one side of the reference plane. In addition, since the ports 93, 94, and 95 are fastened to the main body 91 with screw bolts via O-rings, the three-dimensional phase varies due to variations in assembling accuracy due to clearance at the time of fastening.

Next, with reference to FIGS. 5 to 9, the configuration and operation of the coupler connecting portion will be described. The workpiece 90 illustrated in FIG. 5 is substantially the same as that illustrated in FIG. 4, but differs in that the positioning member 19 is illustrated. In this embodiment, the workpiece 90 is positioned by the positioning member 19 and set on the base jig 18 . As shown in FIGS. 6 to 8, each port 93, 94, 95 is formed with an outer peripheral portion 931, 941, 951 having a widened outer diameter near the tip. Also, the centerlines of the respective ports 93, 94, 95 are denoted as P, Q, R.

Coupler connection mechanisms 30 , 40 , 50 including couplers 31 , 41 , 51 are provided corresponding to respective ports 93 , 94 , 95 . A first coupler connection mechanism 30 corresponding to the first port 93 is composed of a first coupler 31 , a loader 36 , a bracket 37 and a follower unit 38 . A second coupler connection mechanism 40 corresponding to the second port 94 is composed of a second coupler 41 , a loader 46 , a bracket 47 and a follower unit 48 . A third coupler connection mechanism 50 corresponding to the third port 95 is composed of a third coupler 51 , a loader 56 , a bracket 57 and a follower unit 58 .

Couplers 31 , 41 , 51 are attached to loaders 36 , 46 , 56 via follower units 38 , 48 , 58 and brackets 37 , 47 , 57 . The couplers 31, 41, 51 are provided corresponding to the respective ports 93, 94, 95, and are inserted into the outer peripheral portions 931, 941, 951 of the ports 93, 94, 95 to seal the openings of the ports 93, 94, 95. It is possible.

The loaders 36 , 46 , 56 are composed of air cylinders or the like, and move the couplers 31 , 41 , 51 forward and backward along the centerlines P, Q, R of the ports 93 , 94 , 95 . Brackets 37 , 47 , 57 are fixed to movable portions of loaders 36 , 46 , 56 respectively. A follower unit 38 , 48 , 58 is mounted between each bracket 37 , 47 , 57 and each coupler 31 , 41 , 51 .

Specifically, each coupler 31, 41, 51 has a different guide configuration depending on the diameter of the corresponding port. That is, the first coupler 31 and the second coupler 41 corresponding to the first port 93 and the second port 94 having relatively large diameters and the third coupler 51 corresponding to the third port 95 having a relatively small diameter , the configuration of the guide is different.

As shown in FIG. 6 , the first coupler 31 has an insertion guide 32 at its tip, into which the outer peripheral portion 321 is fitted and inserted into the inner peripheral portion 932 of the first port 93 . Similarly, as shown in FIG. 7 , the second coupler 41 has an insertion guide 42 at its tip that is inserted while the outer peripheral portion 421 is fitted into the inner peripheral portion 942 of the second port 94 . Further, as shown in FIG. 8, the third coupler 51 is formed to function as an external insertion guide 52 that is inserted while its tip portion is fitted to the outer peripheral portion 951 of the third port 95 .

The tips of the insertion guides 32 and 42 are spherical radius chamfered (so-called SR). Also, the mouth of the external insertion guide 52 is chamfered. As a result, when the couplers 31, 41, 51 are inserted into the ports 93, 94, 95, even if the couplers 31, 41, 51 are slightly misaligned with respect to the ports 93, 94, 95, the couplers 31, 41, 51 are 51 can be smoothly guided and inserted into the ports 93,94,95.

Each coupler 31, 41, 51 is provided with a mechanical sealing mechanism that matches the port size, and when inserted into the ports 93, 94, 95, the outer peripheral portions 931, 941, 951 are locked. Sealed. The mechanical seal mechanism presses the packing in the radial direction by, for example, air pressure.

As shown in FIG. 9, the following units 38, 48, 58 are capable of offset movement in the XYZ-axis directions in a three-dimensional space and rotational movement in an arbitrary plane (specifically, the θ-axis and θ-axis on the XY plane). (rotational movement on the α-axis perpendicular to the ). As a result, the couplers 31 , 41 , 51 attached to the follower units 38 , 48 , 58 align the axes according to the positions of the actual centerlines P, Q, R of the ports 93 , 94 , 95 for each workpiece 90 . It can be adjusted to offset or tilt the axis.

In this way, the follower units 38, 48, 58 can detect the phases of the ports 93, 94, 95 when the couplers 31, 41, 51 move forward even if the three-dimensional phases of the ports 93, 94, 95 have variations in assembly accuracy. , the couplers 31 , 41 , 51 are inserted into the outer peripheral portions 931 , 941 , 951 of the ports 93 , 94 , 95 . Therefore, the coupler attachment/detachment operation can be performed only by the linear movement of the loaders 36, 46, and 56. FIG.

Supplementally, each coupler connection mechanism 30, 40, 50 is integrally attached to a common rotary plate 27, as indicated by broken lines in FIG. For each type of workpiece 90, a rotary plate is prepared to which a set of coupler connection mechanisms corresponding to the size and orientation of each port is attached. When changing the model of the workpiece 90 with one leak test apparatus 10, the change of the work can be facilitated by exchanging the whole rotating plate.

In addition, by making the air supply circuit for the loader and coupler attached to each rotary plate independent from the air circuit of the inspection air supply unit 16, it becomes easier to change setups, and the number of air connection members can be minimized. The loss of flow rate is small and the quality of air inspection is improved.

Next, with reference to the flow charts of FIGS. 10 to 12, the leakage inspection process by the leakage inspection device 10 of this embodiment will be described in comparison with a comparative example. Comparative Example 1 is a leak test method using conventional semi-automatic equipment, and Comparative Example 2 is a leak test method using equipment in which the semi-automatic equipment of Comparative Example 1 is directly automated using an imaging device and a 6-axis robot. The symbol "S" in each flow chart means a step. In addition, substantially the same steps are given the same step numbers, and corresponding steps are given the letters A, B, and C at the end of the same step numbers. Reference numerals such as workpieces are omitted in the description of the comparative example, and are described only in the description of the present embodiment.

[Comparative Example 1]
In Comparative Example 1 shown in FIG. 10, the steps indicated by thin dashed-dotted lines indicate manual work performed by the operator. S1 to S6 in the first stage are performed by the operator. The operator sets the workpiece on the jig of the pallet in S1, attaches each coupler to the port in S2, and locks each coupler on the outer periphery of the port in S3. Subsequently, the operator sets the pallet to the inspection section of the automatic equipment in S4B, and turns on the start push button in S5.

S6 to S12 in the middle stage are carried out by automatic equipment. The workpiece is clamped in S6, the test air plug is connected in S7, and the test air is applied from the coupler side in S8. After the leak test is performed by the leak tester in S9, the process ends. In S10, application of the inspection air ends, in S11 the inspection air plug is disconnected, and in S12 the workpiece is unclamped.

S13B to S17 in the final stage are performed again by the operator. The operator takes out the pallet at S13B, unlocks each coupler at the outer periphery of the port at S14, and removes each coupler at S15. Subsequently, the operator takes out the work from the pallet in S16, and transfers it to the next station (indicated as "ST." in the flow chart) in S17.

[Comparative Example 2]
In Comparative Example 2 shown in FIG. 11, S1 to S6 and S13B to S17 performed by the operator in Comparative Example 1 are switched to automatic equipment. The three-dimensional phase of the work port varies due to variations in the work set position and assembly accuracy between the port and the main body, so an image device and a 6-axis robot are required to correctly connect each coupler to the port. becomes. Also, a multi-axis loader is required for automatically conveying the work. Enter the name of the facility to the right of the steps that require these facilities.

In S1, the work is set on a pallet (jig) by the multi-axis loader, and in S16, the work is taken out of the pallet by the multi-axis loader. In S4C, the pallet is transported and set to the inspection section by the multi-axis loader, and in S16C, the pallet is transported to the extraction section by the multi-axis loader. After S4C, S5 for turning on the activation push button in Comparative Example 1 is unnecessary and therefore eliminated.

When each coupler is attached to the port in S2 and when each coupler is removed from the port in S15, the 6-axis robot adjusts the position and orientation of the coupler each time according to the XYZ direction phase of the port detected by the imaging device. Putting on and taking off while adjusting. In addition, descriptions of S3, S14, and S17, in which the subject of the work is different between the operator and the machine compared to Comparative Example 1, and S6 to S12, which are common to Comparative Example 1, will be omitted.

[This embodiment]
FIG. 12 shows the leak inspection process according to this embodiment. For convenience of comparison with Comparative Examples 1 and 2, some of the step numbers are reversed from the order. In S1A, the workpiece 90 is set on the input station of the turntable 17 in place of the pallet of the second comparative example. In S4A, the turntable 17 is rotated to position the work 90 instead of the pallet transport and setting in Comparative Example 2. FIG. The workpiece 90 is clamped by the pressing jig 25 in S6.

In S2A, each coupler connection mechanism 30, 40, 50 inserts each coupler 31, 41, 51 by following the phase of ports 93, 94, 95 by loaders 36, 46, 56 and tracking units 38, 48, 58. do. In S3, the respective couplers 31, 41, 51 are locked at the outer peripheral portions 931, 941, 951 of the ports 93, 94, 95 by mechanical sealing mechanisms, as in Comparative Examples 1 and 2.

The leakage inspection by applying inspection air in S8A, S9, and S10A differs from Comparative Examples 1 and 2 in that the inspection air is supplied not from the coupler side but from the air supply port 96 side on the bottom surface of the workpiece 90. FIG. After S10A, each coupler 31, 41, 51 is unlocked at S14 and each coupler 31, 41, 51 is removed from ports 93, 94, 95 at S15 without the use of an imager or a six-axis robot. The workpiece 90 is then unclamped at S12 and removed from the removal station of the turntable 17 at S16A.

In this embodiment, in addition to abolishing S5 of Comparative Example 1, pallets are not used and the inspection air plug is not required to be attached/detached. , and S13 in which the pallet is transported to the pick-up section are eliminated. Therefore, the number of steps can be reduced. The work setting step S1A on the turntable 17 is performed simultaneously with the removal of the previous work, and the work removal step S16A is performed simultaneously with the setting of the next work. Thereby, the cycle time can be shortened.

(summary)
As described above, in the leak test apparatus 10 of the present embodiment, since the work 90 is positioned and set by the positioning member 19, the three-dimensional position of each of the ports 93, 94, and 95 due to variations in the position and orientation of the work 90 is set. Variation in phase is suppressed. Further, the couplers 31, 41, 51 follow the phases of the ports 93, 94, 95 and are inserted into the outer peripheral portions 931, 941, 951 of the ports 93, 94, 95 by the operation of the tracking units 38, 48, 58. Therefore, phase variations of the ports 93, 94, and 95 due to variations in assembly accuracy with the main body 91 can be absorbed.

As a result, in contrast to conventional semi-automatic equipment in which operators attach and detach couplers manually, simple automatic equipment, that is, straight lines by loaders 36, 46, and 56, can be used without introducing an image device or a 6-axis robot into the line. With only movement, the couplers 31, 41, 51 can be connected to the respective ports 93, 94, 95 for leak testing.

(Other embodiments)
(a) In the workpiece 90 of the above embodiment, the three ports 93, 94, 95 all have different diameters and projecting directions. However, in the work to which the present invention is applied, some or all of the ports may have the same diameter. As for the guide structure of the coupler, only one of the internal guide and the external guide may be used.

As for the projecting directions, at least two of the plurality of ports need only have different projecting directions, and the projecting directions of the other ports may be common (that is, parallel). In that case, with respect to the specific matters of the work in the present invention, it is interpreted that a plurality of ports with different projecting directions have "a plurality of pipe-shaped ports", and the port with a common projecting direction is Interpret as "additional ports" other than

(b) In the workpiece 90 of the above embodiment, the three ports 93 , 94 , 95 protrude to one side of the reference plane along the base jig 18 . In layman's terms, all ports 93, 94, 95 protrude "diagonally upward". In addition, the present invention can basically be applied to workpieces in which some of the ports protrude to the other side of the reference plane, that is, workpieces in which "diagonally upward" ports and "diagonally downward" ports coexist. Applicable.

(c) In the leakage inspection apparatus 10 of the above embodiment, the turntable 17 rotates the three stations of input, inspection, and extraction, but four or more stations including processes before and after inspection and standby are rotated. You can let it run. Alternatively, the workpiece 90 may be linearly moved by a belt or the like instead of the turntable.

(d) The automation of the leak test device envisioned by the present invention is to automatically perform at least the process from setting the workpiece to attaching/detaching the coupler and carrying out the leak test, including transportation before setting and after removal. You don't have to. In other words, this leak test device may be used as a dedicated machine for the leak test process without being limited to forming a part of the production line.

As described above, the present invention is by no means limited to the above embodiments, and can be embodied in various forms without departing from the spirit of the present invention.

10 ... leak test device,
16... Inspection air supply unit,
18 Base jig 19 Positioning member 25 Pressing jig
31, 41, 51... Couplers, 36, 46, 56... Loaders,
37, 47, 57...Bracket, 38,48, 58...Following unit,
60 Leak tester,
90 Workpiece 91 Body 92 Internal space
93... 1st port, 94... 2nd port, 95... 3rd port,
96: Air supply port, opening port.

Claims (2)

For a workpiece (90) having a plurality of pipe-shaped ports (93, 94, 95) with different diameters projecting in different directions from a main body (91) and communicating between an internal space (92) of the main body and the outside, A leakage inspection device that seals each of the ports, supplies inspection air from an air supply port (96) provided in the main body to the internal space, and inspects the airtightness of the work based on the pressure drop of the inspection air. and
a base jig (18) in which the work is positioned and set by a positioning member (19);
a pressing jig (25) for pressing and holding the workpiece against the base jig;
a plurality of couplers (31, 41, 51) provided corresponding to each of the ports and capable of being inserted into the outer periphery of the port to seal the opening of the port;
a plurality of loaders (36, 46, 56) for advancing and retracting each said coupler along the centerline of said port;
a plurality of brackets (37, 47, 57) fixed to the movable portion of each said loader;
It is mounted between each bracket and each coupler, and is capable of offset movement in the XYZ axis directions in three-dimensional space and rotational movement in any plane, and when the coupler advances, the phase of the port a plurality of follower units (38, 48, 58) for following the coupler and inserting the coupler into the outer periphery of the port;
an inspection air supply unit (16) that supplies inspection air to the air supply port;
a leak tester (60) for detecting leakage of the workpiece based on a pressure drop of test air;
with
The coupler, depending on the diameter of the corresponding port,
Insertion guides (32, 42) are formed at the tips of the ports (93, 94) having relatively large diameters, and are inserted while fitting into the inner periphery of the ports.
For the port (95) having a relatively small diameter, the tip of the coupler is formed to function as an external insertion guide (52) to be inserted while being fitted to the outer peripheral portion of the port. Leak test equipment. Rotate the work among at least an input station where the work to be inspected next is placed, an inspection station where the work currently being inspected is placed, and a take-out station where the work after inspection is placed. Leak test device according to claim 1 , comprising a turntable (17).

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