CN117367326A - Anti-temperature-interference auto-collimation device and method based on local temperature control - Google Patents

Abstract

The invention discloses an anti-temperature interference auto-collimation device based on local temperature control, which comprises an auto-collimation body, wherein a light source, a beam splitting prism, a collimating objective lens fixing piece and a CCD sensor are arranged on the auto-collimation body, a collimating objective lens is arranged on the collimating objective lens fixing piece, light beams emitted by the light source sequentially pass through the beam splitting prism, the collimating objective lens, the beam splitting prism and the CCD sensor, and a thermoelectric refrigerator and a temperature sensor are arranged on the beam splitting prism, the collimating objective lens fixing piece and the CCD sensor. The invention also discloses an anti-temperature interference auto-collimation method based on local temperature control, which can control the temperature fluctuation of local key components of the auto-collimation device within +/-0.1 ℃. The invention can solve the problem that the local key components of the traditional auto-collimation device are easily affected by the temperature change of the working environment, thereby affecting the measurement accuracy and measurement stability of the auto-collimation device.

Description

An anti-temperature interference auto-collimation device and method based on local temperature control

Technical field

The invention relates to an anti-temperature interference self-collimation device and a method, in particular to an anti-temperature interference self-alignment device and method based on local temperature control, and belongs to the field of precision measurement technology.

Background technique

The autocollimation device is a commonly used device for small angle measurement. It is widely used in angle measurement, flatness measurement of flat plates, straightness measurement of guide rails, and angular shake measurement of shaft systems. High-precision auto-collimation devices are mainly limited by the use environment. The key components of traditional auto-collimation devices are easily affected by temperature changes in the working environment, thus affecting the measurement accuracy and measurement stability of the auto-collimation device.

Contents of the invention

In order to solve the problem that local key components of traditional autocollimation devices are easily affected by temperature changes in the working environment, thereby affecting the measurement accuracy and measurement stability of the autocollimation device, the present invention further proposes an anti-temperature interference automatic autocollimation device based on local temperature control. A collimation device and method. In this method, a thermoelectric refrigerator is installed on a beam splitter prism, a collimation objective lens, and a CCD sensor to control the temperature. At the same time, multiple temperature sensors are used to measure the temperatures of these three key components respectively; the microprocessor will The temperature measurement value is compared with the preset temperature value, and the thermoelectric refrigerator is controlled by the drive circuit to perform real-time closed-loop feedback control on the temperature of local key components of the autocollimator, which reduces the impact of temperature changes in the working environment on the beam splitting prism, collimating objective lens and CCD sensor, thereby improving the autocollimator's ability to resist temperature interference. Experiments show that this method can control the temperature fluctuation of local key components of the autocollimator within ±0.1°C, solving the problem that local key components of traditional autocollimators are easily affected by temperature changes in the working environment, thereby affecting the performance of the autocollimator. Problems of measurement accuracy and measurement stability, improve the measurement accuracy and measurement stability of the autocollimation device.

The technical solutions adopted by the present invention to solve the above problems are:

An anti-temperature interference self-collimation device based on local temperature control, including a self-collimation body. The self-collimation body is provided with a light source, a beam splitting prism, a collimation objective lens fixture and a CCD sensor. The collimation objective lens fixture is mounted on the A collimating objective lens is installed, and the light beam emitted by the light source passes through the dichroic prism, collimating objective lens, dichroic prism and CCD sensor in sequence. The dichroic prism, collimating objective lens fixture, and CCD sensor are all equipped with thermoelectric coolers and temperature sensors. The thermoelectric The refrigerator is used to control the temperature of the beam splitting prism, the collimating objective lens and the CCD sensor respectively. The temperature sensor is used to measure the temperature of the beam splitting prism, the collimating objective lens and the CCD sensor respectively. The thermoelectric refrigerator and the temperature sensor are respectively connected with the microprocessor. Connection, the thermoelectric cooler is connected to the microprocessor through the driving circuit, and the temperature sensor is connected to the microprocessor through the acquisition circuit.

Furthermore, a radiator is provided outside the thermoelectric refrigerator.

Further, the collimating objective lens fixing member is in a quadrilateral or octagonal shape.

Further, the number of thermoelectric refrigerators on the collimating objective lens holder is several, and several thermoelectric refrigerators are evenly distributed on the upper collimating objective lens holder along the same circle with the center of the collimating objective lens as the center. .

Further, the number of thermoelectric refrigerators on the dichroic prism is several, and the several thermoelectric refrigerators are evenly distributed along the circumferential direction of the dichroic prism.

Further, there are several temperature sensors on the dichroic prism, the collimating objective lens holder, and the CCD sensor respectively, and the several temperature sensors are evenly distributed along the circumferential direction of the dichroic prism, the collimating objective lens, and the CCD sensor.

Further, the temperature sensor is an infrared temperature sensor.

An anti-temperature interference autocollimation method based on local temperature control, which is implemented through the following steps:

S1: Set the preset temperature through the microprocessor;

S2: Temperature measurement through temperature sensor;

S3: The microprocessor obtains the temperature measurement value in S2 through the acquisition circuit;

S4: Record and calculate the dichroic prism temperature, CCD sensor temperature and collimating objective lens temperature using the measured values obtained in S3;

S5: Compare the temperature of the dichroic prism obtained in S4 with the preset temperature in S1, calculate the absolute value of the temperature difference, and determine whether the absolute value of the temperature difference is greater than 0.1. If yes, go to the next step. If not, go to the next step. The microprocessor controls the thermoelectric refrigerator to stop working through the drive circuit;

Compare the CCD sensor temperature obtained in S4 with the preset temperature in S1, calculate the absolute value of the temperature difference, and determine whether the absolute value of the temperature difference is greater than 0.1. If yes, go to the next step. If not, microprocessing The device controls the thermoelectric cooler to stop working through the drive circuit;

Compare the collimating objective lens temperature obtained in S4 with the preset temperature in S1, calculate the absolute value of the temperature difference, and determine whether the absolute value of the temperature difference is greater than 0.1. If yes, proceed to the next step. If yes, otherwise slightly The processor controls the thermoelectric cooler to stop working through the drive circuit;

S6: Compare the temperature of the dichroic prism obtained in S4 with the preset temperature in S1, and determine whether the temperature of the dichroic prism is greater than the preset temperature. If so, the microprocessor controls the thermoelectric refrigerator for cooling through the drive circuit. If so, Otherwise, the microprocessor controls the thermoelectric cooler for heating through the drive circuit;

Compare the CCD sensor temperature obtained in S4 with the preset temperature in S1, and determine whether the CCD sensor temperature is greater than the preset temperature. If yes, the microprocessor controls the thermoelectric refrigerator for cooling through the drive circuit. If not, the microprocessor The processor controls the thermoelectric cooler for heating through the drive circuit;

Compare the collimating objective lens temperature obtained in S4 with the preset temperature in S1, and determine whether the collimating objective lens temperature is greater than the preset temperature. If so, the microprocessor controls the thermoelectric refrigerator for cooling through the drive circuit. If so, Otherwise, the microprocessor controls the thermoelectric cooler for heating through the drive circuit;

S7: Loop from S2 to S6 to complete temperature control.

Furthermore, when there are multiple thermoelectric refrigerators and temperature sensors in S3, centralized control is adopted for the multiple thermoelectric refrigerators and temperature sensors, and the recording method in S4 adopts the average temperature measurement.

Furthermore, when there are multiple thermoelectric refrigerators and temperature sensors in S3, independent control is adopted for the multiple thermoelectric refrigerators and temperature sensors, and the recording method in S4 adopts temperature measurement and value-by-value recording.

The beneficial effects of the present invention are:

1. Aiming at the problem that the measurement accuracy and stability of autocollimators are easily affected by changes in operating temperature; a temperature-resistant autocollimation method and device based on local temperature control is proposed; by using the spectroscopic prism, collimating objective lens and CCD The sensor is equipped with a temperature sensor and a thermoelectric refrigerator. The microprocessor collects the temperature measurement values and controls the temperature of local components through the thermoelectric refrigerator; ultimately, the temperature fluctuations of the beam splitter prism, collimating objective lens and CCD sensor are within ±0.1°C, which improves the accuracy of the sensor. The ability of the collimator to resist temperature interference.

2. In view of the problem of uneven temperature field in which the autocollimator works, by independently controlling the temperature of the beam splitter prism, collimating objective lens and CCD sensor, precise temperature control of key components is achieved, so that the temperature of each component is basically the same. Similarly, the anti-temperature interference ability of the autocollimator is further improved.

3. Compared with traditional autocollimators, a radiator is installed outside the instrument, which improves the temperature control efficiency of the instrument.

Description of the drawings

Figure 1 is a front view of an embodiment of the anti-temperature interference auto-collimation device based on local temperature control of the present invention.

FIG. 2 is a top view of the embodiment of FIG. 1 .

FIG. 3 is a right side view of the embodiment of FIG. 1 .

Figure 4 is a schematic structural diagram of an embodiment of the collimating objective lens fixing member of the present invention.

Figure 5 is a schematic model diagram of the temperature-interference-resistant auto-collimation device based on local temperature control of the present invention.

Figure 6 is a schematic diagram of the first implementation of the anti-temperature interference auto-collimation method based on local temperature control of the present invention.

Figure 7 is a schematic diagram of the second embodiment of the present invention's anti-temperature interference auto-collimation method based on local temperature control.

In the picture: 1. Light source; 2. Beam splitting prism; 3. Collimating objective lens; 4. CCD sensor; 51. First temperature sensor; 52. Second temperature sensor; 53. Third temperature sensor; 54. Fourth temperature sensor ; 55. The fifth temperature sensor; 56. The sixth temperature sensor; 57. The seventh temperature sensor; 58. The eighth temperature sensor; 71. The first thermoelectric refrigerator; 72. The second thermoelectric refrigerator; 73. The third thermoelectric refrigerator Refrigerator; 74. The fourth thermoelectric refrigerator; 75. The fifth thermoelectric refrigerator; 76. The sixth thermoelectric refrigerator; 77. The seventh thermoelectric refrigerator; 91. The first radiator; 92. The second radiator; 93 , The third radiator; 94. The fourth radiator; 95. The fifth radiator; 96. The sixth radiator; 97. The seventh radiator; 10. Microprocessor; 111. The first temperature acquisition circuit; 112. The second temperature collection circuit; 113. The third temperature collection circuit; 121. The first driving circuit; 122. The second driving circuit; 123. The third driving circuit.

Detailed ways

Below, the present invention will be further described in conjunction with the accompanying drawings:

Specific Embodiment 1: This embodiment will be described with reference to Figures 1-7. As shown in Figures 1-5, this embodiment describes an anti-temperature interference auto-collimation device based on local temperature control, including an auto-collimation body. The self-collimating body is provided with a light source 1, a dichroic prism 2, a collimating objective lens holder and a CCD sensor 4. A collimating objective lens 3 is installed on the collimating objective lens holder, and the light beam emitted by the light source 1 passes through the dichroic prism in turn. 2. Collimating objective lens 3, beam splitter prism 2 and CCD sensor 4. Thermoelectric coolers and temperature sensors are installed on the dichroic prism 2, the collimating objective lens holder, and the CCD sensor 4. The thermoelectric coolers are used to control the temperatures of the dichroic prism 2, the collimating objective lens 3, and the CCD sensor 4 respectively. Preferably , the number of thermoelectric refrigerators on the collimating objective lens holder is several, and several thermoelectric refrigerators are evenly distributed on the upper collimating objective lens holder along the same circle with the center of the collimating objective lens 3 as the center, The number of thermoelectric coolers on the dichroic prism 2 is several, and the several thermoelectric coolers are evenly distributed along the circumferential direction of the dichroic prism 2 . Multiple thermoelectric coolers can more accurately control the temperature of local components. The temperature sensor is used to measure the temperature of the dichroic prism 2, the collimating objective lens 3 and the CCD sensor 4 respectively. Preferably, there are several temperature sensors on the dichroic prism 2, the collimating objective lens holder and the CCD sensor 4 respectively. The temperature sensors are evenly distributed along the circumferential direction of the beam splitter prism 2, the collimating objective lens 3 and the CCD sensor 4 respectively. Using multiple temperature sensors to measure the temperatures of these three key components at the same time can more accurately measure the temperatures of the beam splitter prism 2, collimating objective lens 3 and CCD sensor 4. The thermoelectric refrigerator and the temperature sensor are respectively connected to the microprocessor 10. The thermoelectric refrigerator is connected to the microprocessor 10 through a driving circuit, and the temperature sensor is connected to the microprocessor 10 through a collection circuit. The microprocessor 10 collects the temperature measurement value of the temperature sensor and compares the temperature measurement value with the preset temperature value, controls the temperature of the local components through the thermoelectric refrigerator, and controls the thermoelectric refrigerator to control the local key components of the autocollimation device through the drive circuit. The temperature of the device is controlled by closed-loop feedback in real time. The impact of temperature changes in the working environment on the beam splitter prism 2, collimating objective lens 3 and CCD sensor 4 is reduced, thereby improving the anti-temperature interference capability of the autocollimation device. Preferably, the temperature sensor is an infrared temperature sensor, which can directly measure the temperature of components through non-contact measurement, making temperature control more accurate. The collimating objective lens fixing part is an annular frame with a four-sided shape that is compatible with the self-collimating body. The collimating objective lens fixing part is in an octagonal shape, which facilitates the installation of the thermoelectric cooler and the temperature sensor, making the collimation more efficient. The objective lens 3 is heated more evenly. A radiator is installed on the outside of the thermoelectric refrigerator, which speeds up the temperature dissipation rate and further improves the temperature control efficiency of the instrument.

An anti-temperature interference autocollimation method based on local temperature control, which is implemented through the following steps:

S1: Set the preset temperature through the microprocessor 10;

S2: Temperature measurement through temperature sensor;

S3: The microprocessor 10 obtains the temperature measurement value in S2 through the acquisition circuit;

S4: Record and calculate the temperature of the dichroic prism 2, the temperature of the CCD sensor 4 and the temperature of the collimating objective lens 3 respectively through the measurement values obtained in S3;

S5: Compare the temperature of the dichroic prism 2 obtained in S4 with the preset temperature in S1, calculate the absolute value of the temperature difference, and determine whether the absolute value of the temperature difference is greater than 0.1. If yes, go to the next step. If yes, go to the next step. Otherwise, the microprocessor 10 controls the thermoelectric refrigerator to stop working through the drive circuit;

Compare the CCD sensor 4 temperature obtained in S4 with the preset temperature in S1, calculate the absolute value of the temperature difference, and determine whether the absolute value of the temperature difference is greater than 0.1. If yes, go to the next step. If yes, otherwise. The processor 10 controls the thermoelectric refrigerator to stop working through the drive circuit;

Compare the temperature of the collimating objective lens 3 obtained in S4 with the preset temperature in S1, calculate the absolute value of the temperature difference, and determine whether the absolute value of the temperature difference is greater than 0.1. If yes, go to the next step. If not, go to the next step. The microprocessor 10 controls the thermoelectric refrigerator to stop working through the drive circuit;

S6: Compare the temperature of the dichroic prism 2 obtained in S4 with the preset temperature in S1, and determine whether the temperature of the dichroic prism 2 is greater than the preset temperature. If yes, the microprocessor 10 controls the thermoelectric refrigerator through the drive circuit for cooling. , if not, the microprocessor 10 controls the thermoelectric cooler to heat through the driving circuit;

Compare the temperature of the CCD sensor 4 obtained in S4 with the preset temperature in S1, and determine whether the temperature of the CCD sensor 4 is greater than the preset temperature. If so, the microprocessor 10 controls the thermoelectric refrigerator to perform cooling through the drive circuit. If Otherwise, the microprocessor 10 controls the thermoelectric refrigerator to heat through the driving circuit;

Compare the temperature of the collimating objective lens 3 obtained in S4 with the preset temperature in S1, and determine whether the temperature of the collimating objective lens 3 is greater than the preset temperature. If so, the microprocessor 10 controls the thermoelectric refrigerator through the drive circuit for cooling. , if not, the microprocessor 10 controls the thermoelectric cooler to heat through the drive circuit;

S7: Loop from S2 to S6 to complete temperature control.

When there are multiple thermoelectric coolers and temperature sensors in S3, centralized control or independent control can be used for multiple thermoelectric coolers and temperature sensors. When centralized control is used, the recording method in S4 uses the average temperature measurement to facilitate reduction. Small temperature measurement error; when it is independently controlled, the recording method in S4 adopts temperature measurement value-by-value recording to make the components heated more evenly.

Specifically, the dichroic prism 2 is provided with a first temperature sensor 51 and a second temperature sensor 52 for measuring the temperature value of the dichroic prism 2. The dichroic prism 2 is provided with a first thermoelectric cooler 71 and a second thermoelectric cooler 72. , used to control the temperature of the dichroic prism 2, a first radiator 91 is installed outside the first thermoelectric cooler 71, and a second radiator 92 is installed outside the second thermoelectric cooler 72 to speed up the temperature heat dissipation rate; on the CCD sensor 4 A third temperature sensor 53 and a fourth temperature sensor 54 are provided for measuring the temperature value of the CCD sensor 4. A third thermoelectric cooler 73 is provided on the CCD sensor 4 for controlling the temperature of the CCD sensor 4. The third thermoelectric cooler A third radiator 93 is installed on the outside of 73 for accelerating the temperature dissipation rate; a fifth temperature sensor 55, a sixth temperature sensor 56, a seventh temperature sensor 57 and an eighth temperature sensor 58 are provided on the collimating objective lens holder. To measure the temperature value of the collimating objective lens 3, a fourth thermoelectric cooler 74, a fifth thermoelectric cooler 75, a sixth thermoelectric cooler 76 and a seventh thermoelectric cooler 77 are provided on the collimating objective lens holder to control the collimating objective lens 3. temperature, the fourth radiator 94 is installed outside the fourth thermoelectric refrigerator 74, the fifth radiator 95 is installed outside the fifth thermoelectric refrigerator 75, the sixth radiator 96 is installed outside the sixth thermoelectric refrigerator 76, and the seventh thermoelectric refrigerator 76 is installed outside the fourth radiator 94. A seventh radiator 97 is installed outside the refrigerator 77 for accelerating the temperature heat dissipation rate.

The first temperature acquisition circuit 111 collects the temperature measurement values of the first temperature sensor 51 and the second temperature sensor 52 and transmits them to the microprocessor 10 and sends a feedback signal to the first drive circuit 121; the second temperature acquisition circuit 112 collects the third temperature sensor 53 and the temperature measurement values of the fourth temperature sensor 54 are transmitted to the microprocessor 10, and a feedback signal is sent to the second drive circuit 122; the third temperature acquisition circuit 113 collects the fifth temperature sensor 55, the sixth temperature sensor 56, the seventh temperature The temperature measurement values of the sensor 57 and the eighth temperature sensor 58 are transmitted to the microprocessor 10 and a feedback signal is sent to the third driving circuit 123 . The first driving circuit 121 controls the first thermoelectric refrigerator 71 and the second thermoelectric refrigerator 72 to control the temperature of the dichroic prism 2; the second driving circuit 122 controls the third thermoelectric refrigerator 73 to control the temperature of the CCD sensor 4; the third driving circuit 123 controls the temperature of the CCD sensor 4. The fourth thermoelectric cooler 74 , the fifth thermoelectric cooler 75 , the sixth thermoelectric cooler 76 and the seventh thermoelectric cooler 77 control the temperature of the collimating objective lens 3 .

The anti-temperature interference auto-collimation method based on local temperature control implemented on the above-mentioned anti-temperature interference auto-collimation device based on local temperature control is shown in Figure 6. The specific steps when using the temperature measurement average are as follows:

S1: Set the preset temperature T0 through the microprocessor 10;

S2: The first temperature sensor 51 , the second temperature sensor 52 , the third temperature sensor 53 , the fourth temperature sensor 54 , the fifth temperature sensor 55 , the sixth temperature sensor 56 , the seventh temperature sensor 57 , and the eighth temperature sensor 58 are performed. temperature measurement;

S3: The microprocessor 10 obtains the temperature measurement values T1, T2, T3, T4, T5, T6, T7, and T8 through the first temperature acquisition circuit 111, the second temperature acquisition circuit 112, and the third temperature acquisition circuit 113;

S4: Record and calculate the temperature of beam splitter prism 2 Tt1=(T1+T2)/2, the temperature of CCD sensor 4 Tt2=(T3+T4)/2, the temperature of collimating objective lens 3 Tt3=(T5+T6+T7+T8)/ 4;

S5: Compare the temperature Tt1 of the dichroic prism 2 obtained in S4 with the preset temperature T0 in S1, calculate the absolute value of the temperature difference |Tt1-T0|, and determine whether |Tt1-T0|>0.1 is true, and if so, Go to the next step, if not, the microprocessor 10 controls the thermoelectric refrigerator to stop working through the drive circuit;

Compare the CCD sensor 4 temperature Tt2 obtained in S4 with the preset temperature T0 in S1, calculate the absolute value of the temperature difference |Tt2-T0|, and determine whether |Tt2-T0|>0.1 is true. If so, proceed to the next step. Step, if otherwise, the microprocessor 10 controls the thermoelectric refrigerator to stop working through the drive circuit;

Compare the temperature Tt3 of the collimating objective lens 3 obtained in S4 with the preset temperature T0 in S1, calculate the absolute value of the temperature difference |Tt3-T0|, and determine whether |Tt3-T0|>0.1 is true. If yes, enter Next, if not, the microprocessor 10 controls the thermoelectric refrigerator to stop working through the drive circuit;

S6: Compare the temperature Tt1 of the dichroic prism 2 obtained in S4 with the preset temperature T0 in S1, and determine whether Tt1>T0 is true. If so, the microprocessor 10 controls the thermoelectric refrigerator for cooling through the drive circuit. If so, Otherwise, the microprocessor 10 controls the thermoelectric refrigerator to heat through the driving circuit;

Compare the temperature Tt2 of the CCD sensor 4 obtained in S4 with the preset temperature T0 in S1, and determine whether Tt2>T0 is true. If so, the microprocessor 10 controls the thermoelectric refrigerator to perform cooling through the drive circuit. If not, the microprocessor 10 controls the thermoelectric refrigerator for cooling. The processor 10 controls the thermoelectric refrigerator to perform heating through the drive circuit;

Compare the temperature Tt3 of the collimating objective lens 3 obtained in S4 with the preset temperature T0 in S1, and determine whether Tt3>T0 is true. If so, the microprocessor 10 controls the thermoelectric refrigerator for cooling through the drive circuit. If not, The microprocessor 10 controls the thermoelectric refrigerator for heating through the drive circuit;

S7: Loop from S2 to S6 to complete the temperature control of key components of the autocollimation device.

The anti-temperature interference auto-collimation method based on local temperature control implemented on the above-mentioned anti-temperature interference auto-collimation device based on local temperature control is shown in Figure 7. The specific steps for value-by-value comparison using temperature measurement are as follows:

S1: Set the preset temperature T0 through the microprocessor 10;

S2: The first temperature sensor 51 , the second temperature sensor 52 , the third temperature sensor 53 , the fourth temperature sensor 54 , the fifth temperature sensor 55 , the sixth temperature sensor 56 , the seventh temperature sensor 57 , and the eighth temperature sensor 58 are performed. temperature measurement;

S3: The microprocessor 10 obtains the temperature measurement values T1, T2, T3, T4, T5, T6, T7, and T8 through the first temperature acquisition circuit 111, the second temperature acquisition circuit 112, and the third temperature acquisition circuit 113;

S4: Record and calculate the temperatures T1 and T2 of the beam splitter prism 2, the temperatures T3 and T4 of the CCD sensor 4, and the temperatures T5, T6, T7, and T8 of the collimating objective lens 3;

S5: Compare the temperatures T1 and T2 of the dichroic prism 2 obtained in S4 with the preset temperature T0 in S1, calculate the absolute values of the temperature differences |T1-T0|, |T2-T0|, and judge |T1-T0 respectively. Whether |>0.1 and |T2-T0|>0.1 are established, if yes, go to the next step, if not, the microprocessor 10 controls the thermoelectric refrigerator to stop working through the drive circuit;

Compare the CCD sensor 4 temperatures T3 and T4 obtained in S4 with the preset temperature T0 in S1, calculate the absolute values of the temperature differences |T3-T0|, |T4-T0|, and judge |T3-T0|> respectively. 0.1 and |T4-T0|>0.1 are established, if yes, go to the next step, if not, the microprocessor 10 controls the thermoelectric refrigerator to stop working through the drive circuit;

Compare the temperatures T5, T6, T7, and T8 of the collimating objective lens 3 obtained in S4 with the preset temperature T0 in S1, and calculate the absolute values of the temperature differences |T5-T0|, |T6-T0|, and |T7-T0 |, |T8-T0|, and judge whether |T5-T0|>0.1, |T6-T0|>0.1, |T7-T0|>0.1 and |T8-T0|>0.1 respectively. If yes, enter the next step. Step, if otherwise, the microprocessor 10 controls the thermoelectric refrigerator to stop working through the drive circuit;

S6: Compare the temperatures T1 and T2 of the dichroic prism 2 obtained in S4 with the preset temperature T0 in S1, and determine whether T1>T0 and T2>T0 are respectively established. If so, the microprocessor 10 controls the thermoelectric through the drive circuit. The refrigerator performs cooling, if not, the microprocessor 10 controls the thermoelectric refrigerator to perform heating through the drive circuit;

Compare the temperatures T3 and T4 of the CCD sensor 4 obtained in S4 with the preset temperature T0 in S1, and determine whether T3>T0 and T4>T0 are respectively established. If so, the microprocessor 10 controls the thermoelectric refrigerator through the drive circuit. Carry out cooling, if not, the microprocessor 10 controls the thermoelectric refrigerator to heat through the driving circuit;

Compare the collimating objective lens 3 temperatures T5, T6, T7, and T8 obtained in S4 with the preset temperature T0 in S1, and determine whether T5>T0, T6>T0, T7>T0, and T8>T0 are true respectively. If so, If yes, the microprocessor 10 controls the thermoelectric refrigerator to perform cooling through the driving circuit; if not, the microprocessor 10 controls the thermoelectric refrigerator to perform heating through the driving circuit;

S7: Loop from S2 to S6 to complete the temperature control of key components of the autocollimation device.

The above are only preferred embodiments of the present invention and are not intended to limit the present invention in any form. Although the present invention has been disclosed above in preferred embodiments, they are not intended to limit the present invention. Anyone familiar with this field will Skilled persons can make some changes or modifications to equivalent embodiments with equivalent changes using the technical content disclosed above without departing from the scope of the technical solution of the present invention. The technical essence of the invention is within the spirit and principles of the invention, and any simple modifications, equivalent substitutions and improvements made to the above embodiments still fall within the protection scope of the technical solution of the invention.

Claims (10)

1. The utility model provides an anti temperature interference auto-collimation device based on local temperature control, includes the auto-collimation body, be equipped with light source, beam splitting prism, collimation objective mounting and CCD sensor in the auto-collimation body, install the collimation objective on the collimation objective mounting, the light beam that the light source sent passes beam splitting prism, collimation objective, beam splitting prism and CCD sensor in proper order, its characterized in that: the thermoelectric refrigerator is used for controlling the temperatures of the beam splitting prism, the collimating objective lens and the CCD sensor respectively, the temperature sensor is used for measuring the temperatures of the beam splitting prism, the collimating objective lens and the CCD sensor respectively, the thermoelectric refrigerator and the temperature sensor are connected with the microprocessor respectively, the thermoelectric refrigerator is connected with the microprocessor through a driving circuit, and the temperature sensor is connected with the microprocessor through an acquisition circuit.

2. The local temperature control-based temperature interference resistant auto-collimation device of claim 1, wherein: the outer side of the thermoelectric cooler is provided with a radiator.

3. The local temperature control-based temperature interference resistant auto-collimation device of claim 2, wherein: the collimating objective lens fixing piece is quadrilateral or octagonal.

4. A local temperature control based temperature interference resistant auto-collimation device as claimed in claim 3, characterized in that: the thermoelectric refrigerators on the collimating objective lens fixing piece are in a plurality, and the thermoelectric refrigerators are uniformly distributed on the upper collimating objective lens fixing piece along the same circumference taking the center of the collimating objective lens as the center of a circle.

5. The local temperature control-based temperature interference resistant auto-collimation device of claim 2, wherein: the number of the thermoelectric refrigerators on the beam-splitting prism is a plurality of the thermoelectric refrigerators, and the thermoelectric refrigerators are uniformly distributed along the circumference of the beam-splitting prism.

6. The local temperature control-based temperature interference resistant auto-collimation device of claim 1, wherein: the plurality of temperature sensors are respectively arranged on the beam splitting prism, the collimating objective lens fixing piece and the CCD sensor, and the plurality of temperature sensors are uniformly distributed along the circumferences of the beam splitting prism, the collimating objective lens and the CCD sensor.

7. The local temperature control-based temperature interference resistant auto-collimation device of claim 6, wherein: the temperature sensor is an infrared temperature sensor.

8. A local temperature control-based anti-temperature interference auto-collimation method is characterized in that: the method is realized by the following steps:

s1: setting a preset temperature by a microprocessor;

s2: measuring the temperature by a temperature sensor;

s3: the microprocessor obtains a temperature measured value in the step S2 through the acquisition circuit;

s4: respectively recording and calculating the temperature of the beam splitting prism, the temperature of the CCD sensor and the temperature of the collimating objective lens through the measured values obtained in the step S3;

s5: comparing the temperature of the light splitting prism obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference, judging whether the absolute value of the temperature difference is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor through the driving circuit;

comparing the temperature of the CCD sensor obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference value, judging whether the absolute value of the temperature difference value is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor through the driving circuit;

comparing the temperature of the collimator lens obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference value, judging whether the absolute value of the temperature difference value is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor through the driving circuit;

s6: comparing the temperature of the beam splitting prism obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the beam splitting prism is higher than the preset temperature or not, if so, controlling the thermoelectric refrigerator to perform refrigeration by the microprocessor through the driving circuit, and if not, controlling the thermoelectric refrigerator to perform heating by the microprocessor through the driving circuit;

comparing the temperature of the CCD sensor obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the CCD sensor is higher than the preset temperature or not, if so, controlling the thermoelectric refrigerator to refrigerate by the microprocessor through the driving circuit, and if not, controlling the thermoelectric refrigerator to heat by the microprocessor through the driving circuit;

comparing the temperature of the collimating lens obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the collimating lens is higher than the preset temperature or not, if so, controlling the thermoelectric refrigerator to refrigerate by the microprocessor through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor through the driving circuit;

s7: and (6) circulating S2 to S6, and completing temperature control.

9. The local temperature control-based temperature interference resistant auto-collimation method as claimed in claim 8, wherein: when the thermoelectric cooler and the temperature sensor are plural in S3, centralized control is adopted for the plural thermoelectric coolers and the temperature sensors, and the recording method in S4 adopts a temperature measurement average value.

10. The local temperature control-based temperature interference resistant auto-collimation method as claimed in claim 8, wherein: when the thermoelectric refrigerator and the temperature sensor in the step S3 are multiple, independent control is adopted for the thermoelectric refrigerators and the temperature sensors, and the recording method in the step S4 adopts temperature measurement to record value by value.