CN117367326A - Anti-temperature-interference auto-collimation device and method based on local temperature control - Google Patents
Anti-temperature-interference auto-collimation device and method based on local temperature control Download PDFInfo
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- CN117367326A CN117367326A CN202311379440.8A CN202311379440A CN117367326A CN 117367326 A CN117367326 A CN 117367326A CN 202311379440 A CN202311379440 A CN 202311379440A CN 117367326 A CN117367326 A CN 117367326A
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- 238000009529 body temperature measurement Methods 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000005057 refrigeration Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 18
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The invention discloses an anti-temperature interference auto-collimation device based on local temperature control, which comprises an auto-collimation body, wherein a light source, a beam splitting prism, a collimating objective lens fixing piece and a CCD sensor are arranged on the auto-collimation body, a collimating objective lens is arranged on the collimating objective lens fixing piece, light beams emitted by the light source sequentially pass through the beam splitting prism, the collimating objective lens, the beam splitting prism and the CCD sensor, and a thermoelectric refrigerator and a temperature sensor are arranged on the beam splitting prism, the collimating objective lens fixing piece and the CCD sensor. The invention also discloses an anti-temperature interference auto-collimation method based on local temperature control, which can control the temperature fluctuation of local key components of the auto-collimation device within +/-0.1 ℃. The invention can solve the problem that the local key components of the traditional auto-collimation device are easily affected by the temperature change of the working environment, thereby affecting the measurement accuracy and measurement stability of the auto-collimation device.
Description
Technical Field
The invention relates to an anti-temperature interference auto-collimation device and method, in particular to an anti-temperature interference auto-collimation device and method based on local temperature control, and belongs to the technical field of precision measurement.
Background
The auto-collimation device is common equipment for small-angle measurement, and is widely applied to the fields of angle measurement, plane degree measurement of a flat plate, straightness measurement of a guide rail, angle shaking measurement of a shafting and the like. The high-precision auto-collimation device is mainly limited by the use environment, and key components of the traditional auto-collimation device are easily affected by the temperature change of the working environment, so that the measurement precision and the measurement stability of the auto-collimation device are affected.
Disclosure of Invention
The invention aims to solve the problem that the local key components of the traditional auto-collimation device are easily affected by the temperature change of the working environment so as to influence the measurement precision and the measurement stability of the auto-collimation device, and further provides an anti-temperature interference auto-collimation device and method based on local temperature control, wherein a thermoelectric refrigerator is arranged on a beam splitting prism, a collimation objective lens and a CCD sensor for controlling the temperature, and a plurality of temperature sensors are used for measuring the temperatures of the three key components respectively; the microprocessor compares the temperature measured value with a preset temperature value, and the driving circuit controls the thermoelectric cooler to perform closed loop feedback control on the temperature of local key components of the autocollimator in real time, so that the influence of the temperature change of the working environment on the beam splitter prism, the collimating objective lens and the CCD sensor is reduced, and the temperature interference resistance of the autocollimator is improved. Experiments show that the method can control the temperature fluctuation of the local key components of the autocollimator within +/-0.1 ℃, solve the problem that the traditional local key components of the autocollimator are easily affected by the temperature change of the working environment, thereby influencing the measurement accuracy and the measurement stability of the autocollimator, and improve the measurement accuracy and the measurement stability of the autocollimator.
The technical scheme adopted by the invention for solving the problems is as follows:
the utility model provides an anti-temperature interference auto-collimation device based on local temperature control, includes the auto-collimation body, be equipped with light source, beam splitter prism, collimation objective mounting and CCD sensor in the auto-collimation body, install the collimation objective on the collimation objective mounting, the light beam that the light source sent passes beam splitter prism in proper order, the collimation objective, beam splitter prism and CCD sensor, all install thermoelectric cooler and temperature sensor on beam splitter prism, the collimation objective mounting and the CCD sensor, thermoelectric cooler is used for controlling the temperature of beam splitter prism respectively, the collimation objective and CCD sensor, temperature sensor is used for measuring the temperature of beam splitter prism respectively, collimation objective and CCD sensor, thermoelectric cooler and temperature sensor are connected with microprocessor respectively, thermoelectric cooler passes through drive circuit and is connected with microprocessor, temperature sensor passes through acquisition circuit and is connected with microprocessor.
Further, a radiator is arranged outside the thermoelectric cooler.
Further, the collimator lens fixing piece is quadrilateral or octagonal.
Further, the number of thermoelectric coolers on the collimating objective lens fixing piece is a plurality of thermoelectric coolers, and the thermoelectric coolers are uniformly distributed on the upper collimating objective lens fixing piece along the same circumference taking the center of the collimating objective lens as the center of a circle.
Further, the number of the thermoelectric refrigerators on the beam-splitting prism is a plurality of the thermoelectric refrigerators, and the thermoelectric refrigerators are uniformly distributed along the circumference of the beam-splitting prism.
Further, the number of the light splitting prism, the collimating objective lens fixing piece and the temperature sensors on the CCD sensor are respectively several, and the temperature sensors are uniformly distributed along the circumferences of the light splitting prism, the collimating objective lens and the CCD sensor.
Further, the temperature sensor is an infrared temperature sensor.
An anti-temperature interference auto-collimation method based on local temperature control, which is realized by the following steps:
s1: setting a preset temperature by a microprocessor;
s2: measuring the temperature by a temperature sensor;
s3: the microprocessor obtains a temperature measured value in the step S2 through the acquisition circuit;
s4: respectively recording and calculating the temperature of the beam splitting prism, the temperature of the CCD sensor and the temperature of the collimating objective lens through the measured values obtained in the step S3;
s5: comparing the temperature of the light splitting prism obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference, judging whether the absolute value of the temperature difference is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor through the driving circuit;
comparing the temperature of the CCD sensor obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference value, judging whether the absolute value of the temperature difference value is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor through the driving circuit;
comparing the temperature of the collimator lens obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference value, judging whether the absolute value of the temperature difference value is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor through the driving circuit;
s6: comparing the temperature of the beam splitting prism obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the beam splitting prism is higher than the preset temperature or not, if so, controlling the thermoelectric refrigerator to perform refrigeration by the microprocessor through the driving circuit, and if not, controlling the thermoelectric refrigerator to perform heating by the microprocessor through the driving circuit;
comparing the temperature of the CCD sensor obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the CCD sensor is higher than the preset temperature or not, if so, controlling the thermoelectric refrigerator to refrigerate by the microprocessor through the driving circuit, and if not, controlling the thermoelectric refrigerator to heat by the microprocessor through the driving circuit;
comparing the temperature of the collimating lens obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the collimating lens is higher than the preset temperature or not, if so, controlling the thermoelectric refrigerator to refrigerate by the microprocessor through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor through the driving circuit;
s7: and (6) circulating S2 to S6, and completing temperature control.
Further, when the thermoelectric refrigerator and the temperature sensor in S3 are plural, centralized control is adopted for the plural thermoelectric refrigerators and the temperature sensors, and the recording method in S4 adopts a temperature measurement average value.
Further, when the thermoelectric refrigerator and the temperature sensor in S3 are plural, independent control is adopted for the plural thermoelectric refrigerators and the temperature sensors, and the recording method in S4 adopts temperature measurement value-by-value recording.
The beneficial effects of the invention are as follows:
1. aiming at the problem that the measurement precision and stability of the auto-collimator are easily affected by the change of the working temperature; an anti-temperature interference auto-collimation method and device based on local temperature control are provided; the temperature sensor and the thermoelectric refrigerator are arranged on the beam splitting prism, the collimating objective lens and the CCD sensor, and the microprocessor collects temperature measurement values and controls the temperature of local components through the thermoelectric refrigerator; finally, the temperature fluctuation of the beam splitter prism, the collimating objective lens and the CCD sensor is within +/-0.1 ℃, and the temperature interference resistance of the auto-collimator is improved.
2. Aiming at the problem of uneven temperature field of the autocollimator, the temperatures of the beam splitting prism, the collimating objective lens and the CCD sensor are independently controlled, so that the accurate temperature control of key components is realized, the temperatures of the components are basically the same, and the temperature interference resistance of the autocollimator is further improved.
3. Compared with the traditional autocollimator, the heat radiator is additionally arranged outside the instrument, and the temperature control efficiency of the instrument is improved.
Drawings
FIG. 1 is a front view of one embodiment of a temperature disturbance rejection autocollimator based on local temperature control of the present invention.
Fig. 2 is a top view of the embodiment of fig. 1.
Fig. 3 is a right side view of the embodiment of fig. 1.
Fig. 4 is a schematic structural view of an embodiment of the collimator lens holder of the invention.
FIG. 5 is a schematic diagram of a model of an anti-temperature-disturbance auto-collimation device based on local temperature control according to the present invention.
Fig. 6 is a schematic diagram of a first embodiment of the temperature disturbance rejection auto-collimation method based on local temperature control according to the present invention.
Fig. 7 is a schematic diagram of a second embodiment of the temperature disturbance rejection auto-collimation method based on local temperature control according to the present invention.
In the figure: 1. a light source; 2. a beam-splitting prism; 3. a collimator objective; 4. a CCD sensor; 51. a first temperature sensor; 52. a second temperature sensor; 53. a third temperature sensor; 54. a fourth temperature sensor; 55. a fifth temperature sensor; 56. a sixth temperature sensor; 57. a seventh temperature sensor; 58. an eighth temperature sensor; 71. a first thermoelectric refrigerator; 72. a second thermoelectric cooler; 73. a third thermoelectric cooler; 74. a fourth thermoelectric cooler; 75. a fifth thermoelectric cooler; 76. a sixth thermoelectric cooler; 77. a seventh thermoelectric cooler; 91. a first heat sink; 92. a second heat sink; 93. a third heat sink; 94. a fourth radiator; 95. a fifth radiator; 96. a sixth heat sink; 97. a seventh heat sink; 10. a microprocessor; 111. a first temperature acquisition circuit; 112. a second temperature acquisition circuit; 113. a third temperature acquisition circuit; 121. a first driving circuit; 122. a second driving circuit; 123. and a third driving circuit.
Detailed Description
The invention is further described below with reference to the accompanying drawings:
the first embodiment is as follows: referring to fig. 1-7, the embodiment is described, as shown in fig. 1-5, the anti-temperature interference auto-collimation device based on local temperature control in the embodiment includes an auto-collimation body, a light source 1, a beam splitting prism 2, a collimating objective fixing piece and a CCD sensor 4 are arranged in the auto-collimation body, a collimating objective 3 is mounted on the collimating objective fixing piece, and a light beam emitted by the light source 1 sequentially passes through the beam splitting prism 2, the collimating objective 3, the beam splitting prism 2 and the CCD sensor 4. The thermoelectric refrigerators and the temperature sensors are respectively arranged on the beam splitting prism 2, the collimating objective lens fixing piece and the CCD sensor 4, the thermoelectric refrigerators are used for controlling the temperatures of the beam splitting prism 2, the collimating objective lens 3 and the CCD sensor 4 respectively, preferably, the number of the thermoelectric refrigerators on the collimating objective lens fixing piece is a plurality of thermoelectric refrigerators, the plurality of thermoelectric refrigerators are uniformly distributed on the upper collimating objective lens fixing piece along the same circumference taking the center of the collimating objective lens 3 as the center of a circle, the number of the thermoelectric refrigerators on the beam splitting prism 2 is a plurality of thermoelectric refrigerators, and the plurality of thermoelectric refrigerators are uniformly distributed along the circumference of the beam splitting prism 2. The thermoelectric coolers can control the temperature of local components more accurately. The temperature sensors are used for measuring the temperatures of the beam splitting prism 2, the collimating objective 3 and the CCD sensor 4 respectively, and preferably, the beam splitting prism 2, the collimating objective fixing piece and the CCD sensor 4 are provided with a plurality of temperature sensors respectively, and the plurality of temperature sensors are uniformly distributed along the circumferences of the beam splitting prism 2, the collimating objective 3 and the CCD sensor 4 respectively. And meanwhile, a plurality of temperature sensors are used for respectively measuring the temperatures of the three key components, so that the temperatures of the beam splitter prism 2, the collimating objective lens 3 and the CCD sensor 4 can be measured more accurately. The thermoelectric refrigerator and the temperature sensor are respectively connected with the microprocessor 10, the thermoelectric refrigerator is connected with the microprocessor 10 through a driving circuit, and the temperature sensor is connected with the microprocessor 10 through an acquisition circuit. The microprocessor 10 collects the temperature measured value of the temperature sensor, compares the temperature measured value with a preset temperature value, controls the temperature of local components through the thermoelectric refrigerator, and performs closed-loop feedback control on the temperature of the local key components of the auto-collimation device in real time through the driving circuit. The influence of the temperature change of the working environment on the beam splitting prism 2, the collimating objective 3 and the CCD sensor 4 is reduced, so that the temperature interference resistance of the auto-collimation device is improved. Preferably, the temperature sensor is an infrared temperature sensor, and can directly measure the temperature of the components through non-contact measurement, so that the temperature control is more accurate. The collimating objective lens fixing piece is an annular frame which is in a quadrilateral shape and is in a shape suitable for the auto-collimation body, and the collimating objective lens fixing piece is in an octagonal shape, so that the installation of a thermoelectric refrigerator and a temperature sensor is facilitated, and the heating of the collimating objective lens 3 is more uniform. And a radiator is additionally arranged on the outer side of the thermoelectric refrigerator, so that the temperature radiating rate is accelerated, and the temperature control efficiency of the instrument is further improved.
An anti-temperature interference auto-collimation method based on local temperature control, which is realized by the following steps:
s1: setting a preset temperature by the microprocessor 10;
s2: measuring the temperature by a temperature sensor;
s3: the microprocessor 10 obtains the temperature measured value in the S2 through the acquisition circuit;
s4: respectively recording and calculating the temperature of the beam splitting prism 2, the temperature of the CCD sensor 4 and the temperature of the collimating objective 3 through the measured values obtained in the step S3;
s5: comparing the temperature of the beam splitting prism 2 obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference, judging whether the absolute value of the temperature difference is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor 10 through the driving circuit;
comparing the temperature of the CCD sensor 4 obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference, judging whether the absolute value of the temperature difference is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor 10 through the driving circuit;
comparing the temperature of the collimator lens 3 obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference, judging whether the absolute value of the temperature difference is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor 10 through the driving circuit;
s6: comparing the temperature of the beam splitting prism 2 obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the beam splitting prism 2 is higher than the preset temperature, if so, controlling the thermoelectric refrigerator to refrigerate by the microprocessor 10 through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor 10 through the driving circuit;
comparing the temperature of the CCD sensor 4 obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the CCD sensor 4 is higher than the preset temperature, if so, controlling the thermoelectric refrigerator to refrigerate by the microprocessor 10 through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor 10 through the driving circuit;
comparing the temperature of the collimating lens 3 obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the collimating lens 3 is higher than the preset temperature or not, if so, controlling the thermoelectric refrigerator to refrigerate by the microprocessor 10 through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor 10 through the driving circuit;
s7: and (6) circulating S2 to S6, and completing temperature control.
When the thermoelectric refrigerators and the temperature sensors in the step S3 are multiple, centralized control or independent control can be adopted for the thermoelectric refrigerators and the temperature sensors, and when the thermoelectric refrigerators and the temperature sensors are in centralized control, the recording method in the step S4 adopts a temperature measurement average value, so that the temperature measurement error is reduced conveniently; and when the control is independent, the recording method in S4 adopts temperature measurement value-by-value recording so as to lead the components to be heated more uniformly.
Specifically, the beam splitting prism 2 is provided with a first temperature sensor 51 and a second temperature sensor 52 for measuring the temperature value of the beam splitting prism 2, the beam splitting prism 2 is provided with a first thermoelectric refrigerator 71 and a second thermoelectric refrigerator 72 for controlling the temperature of the beam splitting prism 2, a first radiator 91 is installed outside the first thermoelectric refrigerator 71, and a second radiator 92 is installed outside the second thermoelectric refrigerator 72 for accelerating the temperature heat dissipation rate; the third temperature sensor 53 and the fourth temperature sensor 54 are arranged on the CCD sensor 4 and used for measuring the temperature value of the CCD sensor 4, the third thermoelectric cooler 73 is arranged on the CCD sensor 4 and used for controlling the temperature of the CCD sensor 4, and the third radiator 93 is arranged on the outer side of the third thermoelectric cooler 73 and used for accelerating the temperature radiating rate; the collimator lens fixing piece is provided with a fifth temperature sensor 55, a sixth temperature sensor 56, a seventh temperature sensor 57 and an eighth temperature sensor 58 for measuring the temperature value of the collimator lens 3, the collimator lens fixing piece is provided with a fourth thermoelectric refrigerator 74, a fifth thermoelectric refrigerator 75, a sixth thermoelectric refrigerator 76 and a seventh thermoelectric refrigerator 77 for controlling the temperature of the collimator lens 3, a fourth radiator 94 is arranged on the outer side of the fourth thermoelectric refrigerator 74, a fifth radiator 95 is arranged on the outer side of the fifth thermoelectric refrigerator 75, a sixth radiator 96 is arranged on the outer side of the sixth thermoelectric refrigerator 76, and a seventh radiator 97 is arranged on the outer side of the seventh thermoelectric refrigerator 77 for accelerating the temperature heat dissipation rate.
The first temperature acquisition circuit 111 acquires temperature measurement values of the first temperature sensor 51 and the second temperature sensor 52, transmits the temperature measurement values to the microprocessor 10, and sends feedback signals to the first driving circuit 121; the second temperature acquisition circuit 112 acquires temperature measurement values of the third temperature sensor 53 and the fourth temperature sensor 54, transmits the temperature measurement values to the microprocessor 10, and sends feedback signals to the second driving circuit 122; the third temperature acquisition circuit 113 acquires temperature measurement values of the fifth temperature sensor 55, the sixth temperature sensor 56, the seventh temperature sensor 57, and the eighth temperature sensor 58, and transmits the temperature measurement values to the microprocessor 10, and sends feedback signals to the third drive circuit 123. The first driving circuit 121 controls the first thermoelectric refrigerator 71 and the second thermoelectric refrigerator 72 to control the temperature of the splitting prism 2; the second driving circuit 122 controls the third thermoelectric cooler 73 to control the temperature of the CCD sensor 4; the third driving circuit 123 controls the fourth thermoelectric cooler 74, the fifth thermoelectric cooler 75, the sixth thermoelectric cooler 76 and the seventh thermoelectric cooler 77 to control the collimator lens 3 temperature.
The method for realizing the local temperature control-based anti-temperature interference auto-collimation on the local temperature control-based anti-temperature interference auto-collimation device comprises the following specific steps when the average value of temperature measurement is adopted as shown in fig. 6:
s1: setting a preset temperature T0 by the microprocessor 10;
s2: the first temperature sensor 51, the second temperature sensor 52, the third temperature sensor 53, the fourth temperature sensor 54, the fifth temperature sensor 55, the sixth temperature sensor 56, the seventh temperature sensor 57, and the eighth temperature sensor 58 perform temperature measurement;
s3: the microprocessor 10 obtains temperature measurement values T1, T2, T3, T4, T5, T6, T7 and T8 through the first temperature acquisition circuit 111, the second temperature acquisition circuit 112 and the third temperature acquisition circuit 113;
s4: recording and calculating the temperature Tt1= (T1+T2)/2 of the beam splitting prism 2, the temperature Tt2= (T3+T4)/2 of the CCD sensor 4 and the temperature Tt3= (T5+T6+T7+T8)/4 of the collimator lens 3;
s5: comparing the temperature Tt1 of the beam splitting prism 2 obtained in the step S4 with the preset temperature T0 in the step S1, calculating the absolute value |Tt1-T0| of the temperature difference value, judging whether the absolute value |Tt1-T0| >0.1 is met, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor 10 through the driving circuit;
comparing the temperature Tt2 of the CCD sensor 4 obtained in the step S4 with the preset temperature T0 in the step S1, calculating the absolute value |Tt2-T0| of the temperature difference value, judging whether the absolute value |T2-T0| >0.1 is met, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor 10 through the driving circuit;
comparing the temperature Tt3 of the collimator objective 3 obtained in the step S4 with the preset temperature T0 in the step S1, calculating the absolute value |Tt3-T0| of the temperature difference value, judging whether the absolute value |T3-T0| >0.1 is met, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor 10 through the driving circuit;
s6: comparing the temperature Tt1 of the beam splitting prism 2 obtained in the step S4 with the preset temperature T0 in the step S1, judging whether Tt1> T0 is true, if so, controlling the thermoelectric refrigerator to refrigerate by the microprocessor 10 through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor 10 through the driving circuit;
comparing the temperature Tt2 of the CCD sensor 4 obtained in the step S4 with the preset temperature T0 in the step S1, judging whether Tt2> T0 is met, if so, controlling the thermoelectric refrigerator to refrigerate by the microprocessor 10 through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor 10 through the driving circuit;
comparing the temperature Tt3 of the collimator lens 3 obtained in the step S4 with the preset temperature T0 in the step S1, judging whether Tt3> T0 is met, if so, controlling the thermoelectric refrigerator to refrigerate by the microprocessor 10 through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor 10 through the driving circuit;
s7: and (S2) to S6, and finishing the temperature control of key components of the auto-collimation device.
The method for realizing the local temperature control-based anti-temperature interference auto-collimation on the local temperature control-based anti-temperature interference auto-collimation device comprises the following specific steps when the temperature measurement is adopted for value-by-value comparison as shown in fig. 7:
s1: setting a preset temperature T0 by the microprocessor 10;
s2: the first temperature sensor 51, the second temperature sensor 52, the third temperature sensor 53, the fourth temperature sensor 54, the fifth temperature sensor 55, the sixth temperature sensor 56, the seventh temperature sensor 57, and the eighth temperature sensor 58 perform temperature measurement;
s3: the microprocessor 10 obtains temperature measurement values T1, T2, T3, T4, T5, T6, T7 and T8 through the first temperature acquisition circuit 111, the second temperature acquisition circuit 112 and the third temperature acquisition circuit 113;
s4: recording and calculating the temperatures T1 and T2 of the beam splitting prism 2, the temperatures T3 and T4 of the CCD sensor 4 and the temperatures T5, T6, T7 and T8 of the collimating objective lens 3;
s5: comparing the temperatures T1 and T2 of the beam splitting prism 2 obtained in the step S4 with the preset temperature T0 in the step S1, calculating absolute values of temperature difference values of |T1-T0|, |T2-T0|, and judging whether the I T1-T0I >0.1 and the I T2-T0I >0.1 are met respectively, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor 10 through the driving circuit;
comparing the temperatures T3 and T4 of the CCD sensor 4 obtained in the S4 with a preset temperature T0 in the S1, calculating absolute values of temperature difference values |T3-T0| and |T4-T0|, and respectively judging whether the absolute values of the temperature difference values |T3-T0| >0.1 and the absolute values of the temperature difference values |T4-T0| >0.1 are met or not, if yes, entering the next step, otherwise, controlling the thermoelectric refrigerator to stop working by the microprocessor 10 through the driving circuit;
comparing the temperatures T5, T6, T7 and T8 of the collimator objective 3 obtained in the S4 with the preset temperature T0 in the S1, calculating absolute values of temperature difference values of I T5-T0I, I T6-T0I, I T7-T0I and I T8-T0I, and respectively judging whether I T5-T0I >0.1, I T6-T0I >0.1, I T7-T0I >0.1 and I T8-T0I >0.1 are met, if yes, entering the next step, otherwise, controlling the thermoelectric refrigerator to stop working by the microprocessor 10 through the driving circuit;
s6: comparing the temperatures T1 and T2 of the beam splitting prism 2 obtained in the step S4 with a preset temperature T0 in the step S1, and respectively judging whether T1> T0 and T2> T0 are met or not, if yes, controlling the thermoelectric refrigerator to refrigerate by the microprocessor 10 through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor 10 through the driving circuit;
comparing the temperatures T3 and T4 of the CCD sensor 4 obtained in the S4 with a preset temperature T0 in the S1, and respectively judging whether T3> T0 and T4> T0 are met or not, if yes, controlling the thermoelectric refrigerator to refrigerate by the microprocessor 10 through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor 10 through the driving circuit;
comparing the temperatures T5, T6, T7 and T8 of the collimator lens 3 obtained in the S4 with the preset temperature T0 in the S1, and respectively judging whether T5> T0, T6> T0, T7> T0 and T8> T0 are met or not, if yes, controlling the thermoelectric refrigerator to refrigerate by the microprocessor 10 through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor 10 through the driving circuit;
s7: and (S2) to S6, and finishing the temperature control of key components of the auto-collimation device.
The present invention is not limited to the preferred embodiments, but is capable of modification and variation in detail, and other embodiments, such as those described above, of making various modifications and equivalents will fall within the spirit and scope of the present invention.
Claims (10)
1. The utility model provides an anti temperature interference auto-collimation device based on local temperature control, includes the auto-collimation body, be equipped with light source, beam splitting prism, collimation objective mounting and CCD sensor in the auto-collimation body, install the collimation objective on the collimation objective mounting, the light beam that the light source sent passes beam splitting prism, collimation objective, beam splitting prism and CCD sensor in proper order, its characterized in that: the thermoelectric refrigerator is used for controlling the temperatures of the beam splitting prism, the collimating objective lens and the CCD sensor respectively, the temperature sensor is used for measuring the temperatures of the beam splitting prism, the collimating objective lens and the CCD sensor respectively, the thermoelectric refrigerator and the temperature sensor are connected with the microprocessor respectively, the thermoelectric refrigerator is connected with the microprocessor through a driving circuit, and the temperature sensor is connected with the microprocessor through an acquisition circuit.
2. The local temperature control-based temperature interference resistant auto-collimation device of claim 1, wherein: the outer side of the thermoelectric cooler is provided with a radiator.
3. The local temperature control-based temperature interference resistant auto-collimation device of claim 2, wherein: the collimating objective lens fixing piece is quadrilateral or octagonal.
4. A local temperature control based temperature interference resistant auto-collimation device as claimed in claim 3, characterized in that: the thermoelectric refrigerators on the collimating objective lens fixing piece are in a plurality, and the thermoelectric refrigerators are uniformly distributed on the upper collimating objective lens fixing piece along the same circumference taking the center of the collimating objective lens as the center of a circle.
5. The local temperature control-based temperature interference resistant auto-collimation device of claim 2, wherein: the number of the thermoelectric refrigerators on the beam-splitting prism is a plurality of the thermoelectric refrigerators, and the thermoelectric refrigerators are uniformly distributed along the circumference of the beam-splitting prism.
6. The local temperature control-based temperature interference resistant auto-collimation device of claim 1, wherein: the plurality of temperature sensors are respectively arranged on the beam splitting prism, the collimating objective lens fixing piece and the CCD sensor, and the plurality of temperature sensors are uniformly distributed along the circumferences of the beam splitting prism, the collimating objective lens and the CCD sensor.
7. The local temperature control-based temperature interference resistant auto-collimation device of claim 6, wherein: the temperature sensor is an infrared temperature sensor.
8. A local temperature control-based anti-temperature interference auto-collimation method is characterized in that: the method is realized by the following steps:
s1: setting a preset temperature by a microprocessor;
s2: measuring the temperature by a temperature sensor;
s3: the microprocessor obtains a temperature measured value in the step S2 through the acquisition circuit;
s4: respectively recording and calculating the temperature of the beam splitting prism, the temperature of the CCD sensor and the temperature of the collimating objective lens through the measured values obtained in the step S3;
s5: comparing the temperature of the light splitting prism obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference, judging whether the absolute value of the temperature difference is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor through the driving circuit;
comparing the temperature of the CCD sensor obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference value, judging whether the absolute value of the temperature difference value is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor through the driving circuit;
comparing the temperature of the collimator lens obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference value, judging whether the absolute value of the temperature difference value is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor through the driving circuit;
s6: comparing the temperature of the beam splitting prism obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the beam splitting prism is higher than the preset temperature or not, if so, controlling the thermoelectric refrigerator to perform refrigeration by the microprocessor through the driving circuit, and if not, controlling the thermoelectric refrigerator to perform heating by the microprocessor through the driving circuit;
comparing the temperature of the CCD sensor obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the CCD sensor is higher than the preset temperature or not, if so, controlling the thermoelectric refrigerator to refrigerate by the microprocessor through the driving circuit, and if not, controlling the thermoelectric refrigerator to heat by the microprocessor through the driving circuit;
comparing the temperature of the collimating lens obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the collimating lens is higher than the preset temperature or not, if so, controlling the thermoelectric refrigerator to refrigerate by the microprocessor through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor through the driving circuit;
s7: and (6) circulating S2 to S6, and completing temperature control.
9. The local temperature control-based temperature interference resistant auto-collimation method as claimed in claim 8, wherein: when the thermoelectric cooler and the temperature sensor are plural in S3, centralized control is adopted for the plural thermoelectric coolers and the temperature sensors, and the recording method in S4 adopts a temperature measurement average value.
10. The local temperature control-based temperature interference resistant auto-collimation method as claimed in claim 8, wherein: when the thermoelectric refrigerator and the temperature sensor in the step S3 are multiple, independent control is adopted for the thermoelectric refrigerators and the temperature sensors, and the recording method in the step S4 adopts temperature measurement to record value by value.
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