CN117367325A - Global temperature control-based anti-temperature interference auto-collimation device and method - Google Patents

Global temperature control-based anti-temperature interference auto-collimation device and method Download PDF

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Publication number
CN117367325A
CN117367325A CN202311379424.9A CN202311379424A CN117367325A CN 117367325 A CN117367325 A CN 117367325A CN 202311379424 A CN202311379424 A CN 202311379424A CN 117367325 A CN117367325 A CN 117367325A
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temperature
light path
measuring light
microprocessor
auto
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张岱溪
石剑
谭久彬
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Harbin Institute of Technology
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Harbin Institute of Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Control Of Temperature (AREA)

Abstract

The invention discloses an anti-temperature interference auto-collimation device based on global temperature control, which comprises an auto-collimation body, wherein a light source, a beam splitting prism, a collimating objective lens and a CCD sensor are arranged in the auto-collimation body, light beams emitted by the light source sequentially pass through the beam splitting prism, the collimating objective lens, the beam splitting prism and the CCD sensor, a first measuring light path is formed between the light source and the beam splitting prism, a second measuring light path is formed between the beam splitting prism and the CCD sensor, a third measuring light path is formed between the beam splitting prism and the collimating objective lens, thermoelectric coolers and temperature sensors are uniformly distributed in the first measuring light path, the second measuring light path and the third measuring light path, and the anti-temperature interference auto-collimation method based on global temperature control is further disclosed, and the method can control the temperature gradient in the auto-collimation device to be less than 0.1 ℃. The invention can solve the problem that the traditional auto-collimation device is easily affected by the temperature change of the working environment, thereby affecting the measurement accuracy and measurement stability of the auto-collimation device.

Description

Global temperature control-based anti-temperature interference auto-collimation device and method
Technical Field
The invention relates to an anti-temperature interference auto-collimation device and method, in particular to an anti-temperature interference auto-collimation device and method based on global temperature control, and belongs to the technical field of precision measurement.
Background
The auto-collimation device is an instrument for measuring the small angle offset by utilizing the optical auto-collimation principle, and is widely used for precision measurement such as angle detection of an optical element, platform flatness detection, shaking of a mechanical shaft system, straightness detection of a precision guide rail and the like. In the prior art, the traditional auto-collimation device is easily influenced by the temperature change of the working environment, so that the measurement accuracy and the measurement stability of the auto-collimation device are influenced.
Disclosure of Invention
The invention aims to solve the problem that the traditional auto-collimation device is easily affected by the temperature change of the working environment so as to influence the measurement precision and the measurement stability of the auto-collimation device, and further provides an anti-temperature interference auto-collimation device and a method based on global temperature control, wherein a constant temperature light pipe is designed by using a thermoelectric cooler and a temperature sensor, and a plurality of constant temperature light pipes are used for covering an auto-collimation measurement light path; the temperature sensor measures the temperature in each light pipe, the microprocessor compares the measured temperature with the preset temperature, and the driving circuit controls the thermoelectric refrigerator to perform closed loop feedback control on the temperature of the constant temperature light pipe in real time, so that the temperature of a propagation medium in all measuring light paths of the autocollimator can be controlled, the temperature interference resistance of the autocollimator is greatly improved, the problem that the measuring precision and the measuring stability of the traditional autocollimator are easily influenced by the temperature change of the working environment is solved, and the measuring precision and the measuring stability of the autocollimator are improved.
The technical scheme adopted by the invention for solving the problems is as follows:
an anti-temperature interference auto-collimation device based on global temperature control is characterized in that a light source, a beam splitting prism, a collimating objective lens and a CCD sensor are arranged in the auto-collimation body, light beams emitted by the light source sequentially pass through the beam splitting prism, the collimating objective lens, the beam splitting prism and the CCD sensor, a first measuring light path is formed between the light source and the beam splitting prism, a second measuring light path is formed between the beam splitting prism and the CCD sensor, a third measuring light path is formed between the beam splitting prism and the collimating objective lens, thermoelectric coolers and temperature sensors are uniformly distributed in the first measuring light path, the second measuring light path and the third measuring light path, the thermoelectric coolers are used for controlling the temperatures of the first measuring light path, the second measuring light path and the third measuring light path, the temperature sensors are used for measuring the temperatures of the first measuring light path, the second measuring light path and the third measuring light path, the thermoelectric coolers and the temperature sensors are respectively connected with a microprocessor, the thermoelectric coolers are connected with the microprocessor through a driving circuit, and the temperature sensors are connected with the microprocessor through an acquisition circuit.
Further, the number of the thermoelectric coolers is a plurality of, and the thermoelectric coolers are uniformly distributed along the circumferences of the first measuring light path, the second measuring light path and the third measuring light path respectively.
Further, the first measuring light path, the second measuring light path and the third measuring light path are respectively formed by splicing a plurality of thermoelectric coolers, and the thermoelectric coolers are respectively contacted end to end along the circumferential directions of the first measuring light path, the second measuring light path and the third measuring light path.
Further, the number of the temperature sensors is a plurality, and the plurality of the temperature sensors are uniformly distributed on the measuring light paths along the same circumference taking the centers of the first measuring light path, the second measuring light path and the third measuring light path as circle centers.
Further, the temperature sensor is an infrared temperature sensor.
An anti-temperature interference auto-collimation method based on global temperature control is realized by the following steps:
s1: setting a preset temperature by a microprocessor;
s2: measuring the temperature by a temperature sensor;
s3: the microprocessor obtains a temperature measured value in the step S2 through the acquisition circuit;
s4: respectively recording and calculating the temperatures of the first measuring light path, the second measuring light path and the third measuring light path through the measured values obtained in the step S3;
s5: comparing the temperature of the first measuring light path obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference value, judging whether the absolute value of the temperature difference value is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric cooler to stop working by the microprocessor through the driving circuit;
comparing the temperature of the second measuring light path obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference value, judging whether the absolute value of the temperature difference value is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric cooler to stop working by the microprocessor through the driving circuit;
comparing the temperature of the third measuring light path obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference value, judging whether the absolute value of the temperature difference value is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric cooler to stop working by the microprocessor through the driving circuit;
s6: comparing the temperature of the first measuring light path obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the first measuring light path is higher than the preset temperature or not, if so, controlling the thermoelectric refrigerator to refrigerate by the microprocessor through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor through the driving circuit;
comparing the temperature of the second measuring light path obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the second measuring light path is higher than the preset temperature, if so, controlling the thermoelectric refrigerator to refrigerate by the microprocessor through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor through the driving circuit;
comparing the temperature of the third measuring light path obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the third measuring light path is higher than the preset temperature, if so, controlling the thermoelectric cooler to cool by the microprocessor through the driving circuit, otherwise, controlling the thermoelectric cooler to heat by the microprocessor through the driving circuit;
s7: and (6) circulating S2 to S6, and completing temperature control.
The beneficial effects of the invention are as follows:
1. aiming at the problem that the measurement precision and stability of the auto-collimator are easily affected by the change of the working temperature; an anti-temperature interference auto-collimation method and device based on global temperature control are provided; the microprocessor collects the measured value of the internal temperature of the constant-temperature light pipe and controls the thermoelectric cooler to carry out closed-loop control on the temperature of the constant-temperature light pipe through the driving circuit by additionally arranging the constant-temperature light pipe on the measuring light path; meanwhile, the constant temperature light pipe completely covers the autocollimator measuring light path, and the temperature of the autocollimator measuring light path is globally controlled; finally, the internal temperature fluctuation of the instrument is within +/-0.1 ℃, and the temperature interference resistance of the autocollimator is improved.
2. Aiming at the problem of nonuniform temperature field in the constant-temperature light pipe, calculating an average temperature value of the constant-temperature light pipe as the internal temperature value of the constant-temperature light pipe by a temperature measurement mode of surrounding type multipoint measurement, and controlling the internal temperature of the constant-temperature light pipe by a thermoelectric refrigerator; finally, the internal temperature gradient of the instrument is less than 0.1 ℃.
Drawings
FIG. 1 is a schematic diagram of the structural principle of an embodiment of the anti-temperature-interference auto-collimation device based on global temperature control of the present invention.
Fig. 2 is a schematic structural view of an embodiment of the first measuring light path of the present invention.
FIG. 3 is a schematic diagram of an embodiment of a second measurement light path of the present invention.
Fig. 4 is a schematic structural view of an embodiment of the third measuring light path of the present invention.
FIG. 5 is a schematic diagram of one embodiment of a global temperature control based anti-temperature interference auto-collimation method of the present invention.
In the figure: 1. a light source; 2. a beam-splitting prism; 3. a collimator objective; 4. a CCD sensor; 501. a first temperature sensor; 502. a second temperature sensor; 503. a third temperature sensor; 504. a fourth temperature sensor; 505. a fifth temperature sensor; 506. a sixth temperature sensor; 507. a seventh temperature sensor; 508. an eighth temperature sensor; 509. a ninth temperature sensor; 510. a tenth temperature sensor; 511. an eleventh temperature sensor; 512. a twelfth temperature sensor; 601. a first thermoelectric refrigerator; 602. a second thermoelectric cooler; 603. a third thermoelectric cooler; 604. a fourth thermoelectric cooler; 605. a fifth thermoelectric cooler; 606. a sixth thermoelectric cooler; 607. a seventh thermoelectric cooler; 608. an eighth thermoelectric cooler; 609. a ninth thermoelectric cooler; 610. a tenth thermoelectric cooler; 611. an eleventh thermoelectric cooler; 612. a twelfth thermoelectric cooler; 81. a first measuring light path; 82. a second measuring light path; 83. a third measuring light path; 10. a microprocessor; 111. a first temperature acquisition circuit; 112. a second temperature acquisition circuit; 113. a third temperature acquisition circuit; 121. a first driving circuit; 122. a second driving circuit; 123. and a third driving circuit.
Detailed Description
The invention is further described below with reference to the accompanying drawings:
the first embodiment is as follows: referring to fig. 1-5, the embodiment, as shown in fig. 1-4, of the anti-temperature interference auto-collimation device based on global temperature control, which includes an auto-collimation body, a light source 1, a beam splitting prism 2, a collimating objective 3 and a CCD sensor 4 are disposed in the auto-collimation body, a light beam emitted by the light source 1 sequentially passes through the beam splitting prism 2, the collimating objective 3, the beam splitting prism 2 and the CCD sensor 4, a first measurement light path 81 is formed between the light source 1 and the beam splitting prism 2, a second measurement light path 82 is formed between the beam splitting prism 2 and the CCD sensor 4, a third measurement light path 83 is formed between the beam splitting prism 2 and the collimating objective 3, thermoelectric coolers and temperature sensors are uniformly distributed in the first measurement light path 81, the second measurement light path 82 and the third measurement light path 83, preferably, the number of thermoelectric coolers is a plurality of thermoelectric coolers are respectively along the first measurement light path 81, the second measurement light path 82 and the third measurement light path 83, and a plurality of thermoelectric coolers are uniformly distributed along the circumferential direction of the first measurement light path 81, the second measurement light path 82 and the third measurement light path 83, and the thermoelectric coolers are more capable of precisely controlling the temperature. The first measuring light path 81, the second measuring light path 82 and the third measuring light path 83 are respectively formed by splicing a plurality of thermoelectric coolers, the thermoelectric coolers are respectively contacted end to end along the circumferences of the first measuring light path 81, the second measuring light path 82 and the third measuring light path 83 in sequence, the plurality of thermoelectric coolers completely cover the measuring light paths of the auto-collimation device, and the temperature of a propagation medium in all measuring light paths of the auto-collimation device can be controlled. The temperature sensors are used for measuring the temperatures of the first measuring light path 81, the second measuring light path 82 and the third measuring light path 83, preferably, the number of the temperature sensors is a plurality of, the plurality of the temperature sensors are uniformly distributed on the measuring light paths along the same circumference taking the centers of the first measuring light path 81, the second measuring light path 82 and the third measuring light path 83 as the circle centers, the temperatures of the measuring light paths are measured by using the plurality of the temperature sensors, and the temperatures of the first measuring light path 81, the second measuring light path 82 and the third measuring light path 83 can be measured more accurately. The thermoelectric refrigerator and the temperature sensor are respectively connected with the microprocessor 10, the thermoelectric refrigerator is connected with the microprocessor 10 through a driving circuit, and the temperature sensor is connected with the microprocessor 10 through an acquisition circuit.
The microprocessor 10 compares the measured temperature with a preset temperature, the driving circuit controls the thermoelectric cooler to perform closed-loop feedback control on the temperature of the constant-temperature light pipe in real time, the microprocessor 10 collects temperature measured values of the first measuring light path 81, the second measuring light path 82 and the third measuring light path 83, compares the temperature measured values with the preset temperature values, controls the temperatures of all measuring light paths through the thermoelectric cooler, and controls the thermoelectric cooler to perform closed-loop feedback control on the temperatures of all measuring light paths of the auto-collimation device in real time. Therefore, the temperature of a propagation medium in all measuring light paths of the auto-collimation device can be controlled, the temperature interference resistance of the auto-collimation device is greatly improved, and the problem that the measuring precision and the measuring stability of the traditional auto-collimation device are easily affected by the temperature change of the working environment is solved. Preferably, the temperature sensor is an infrared temperature sensor, and can directly measure the temperature of the components through non-contact measurement, so that the temperature control is more accurate.
An anti-temperature interference auto-collimation method based on global temperature control is shown in fig. 5, and is realized by the following steps:
s1: setting a preset temperature by the microprocessor 10;
s2: measuring the temperature by a temperature sensor;
s3: the microprocessor 10 obtains the temperature measured value in the S2 through the acquisition circuit;
s4: recording and calculating temperatures of the first measuring light path 81, the second measuring light path 82 and the third measuring light path 83 respectively from the measured values obtained in S3;
s5: comparing the temperature of the first measuring light path 81 obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference value, judging whether the absolute value of the temperature difference value is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric cooler to stop working by the microprocessor 10 through the driving circuit;
comparing the temperature of the second measuring light path 82 obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference value, judging whether the absolute value of the temperature difference value is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric cooler to stop working by the microprocessor 10 through the driving circuit;
comparing the temperature of the third measuring light path 83 obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference value, judging whether the absolute value of the temperature difference value is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric cooler to stop working by the microprocessor 10 through the driving circuit;
s6: comparing the temperature of the first measuring light path 81 obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the first measuring light path 81 is higher than the preset temperature or not, if yes, controlling the thermoelectric refrigerator to refrigerate by the microprocessor 10 through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor 10 through the driving circuit;
comparing the temperature of the second measuring light path 82 obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the second measuring light path 82 is higher than the preset temperature, if yes, controlling the thermoelectric refrigerator to refrigerate by the microprocessor 10 through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor 10 through the driving circuit;
comparing the temperature of the third measuring light path 83 obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the third measuring light path 83 is higher than the preset temperature, if so, controlling the thermoelectric cooler by the microprocessor 10 through the driving circuit to perform refrigeration, otherwise, controlling the thermoelectric cooler by the microprocessor 10 through the driving circuit to perform heating;
s7: and (6) circulating S2 to S6, and completing temperature control.
Specifically, a first temperature sensor 501, a second temperature sensor 502, a third temperature sensor 503 and a fourth temperature sensor 504 are uniformly distributed in the first measurement light path 81, and are used for measuring the temperature value of the first measurement light path 81; the first thermoelectric cooler 601, the second thermoelectric cooler 602, the third thermoelectric cooler 603 and the fourth thermoelectric cooler 604 are spliced and uniformly distributed in the first measuring light path 81, namely, the first thermoelectric cooler 601, the second thermoelectric cooler 602, the third thermoelectric cooler 603 and the fourth thermoelectric cooler 604 are installed around the first measuring light path 81 and used for controlling the temperature of the first measuring light path 81. A fifth temperature sensor 505, a sixth temperature sensor 506, a seventh temperature sensor 507 and an eighth temperature sensor 508 are uniformly distributed in the second measurement light path 82, and are used for measuring the temperature value of the second measurement light path 82; the fifth thermoelectric cooler 605, the sixth thermoelectric cooler 606, the seventh thermoelectric cooler 607 and the eighth thermoelectric cooler 608, namely the fifth thermoelectric cooler 605, the sixth thermoelectric cooler 606, the seventh thermoelectric cooler 607 and the eighth thermoelectric cooler 608, are assembled and uniformly distributed in the second measuring light path 82, and are installed around the second measuring light path 82 for controlling the temperature of the second measuring light path 82. A ninth temperature sensor 509, a tenth temperature sensor 510, an eleventh temperature sensor 511 and a twelfth temperature sensor 512 are uniformly distributed in the third measuring light path 83, and are used for measuring the temperature value of the third measuring light path 83; the ninth thermoelectric cooler 609, the tenth thermoelectric cooler 610, the eleventh thermoelectric cooler 611 and the twelfth thermoelectric cooler 612, that is, the ninth thermoelectric cooler 609, the tenth thermoelectric cooler 610, the eleventh thermoelectric cooler 611 and the twelfth thermoelectric cooler 612, are assembled and uniformly distributed in the third measuring light path 83, and are installed around the third measuring light path 83, so as to control the temperature of the third measuring light path 83. The first temperature acquisition circuit 111 acquires temperature measurement values of the first temperature sensor 501, the second temperature sensor 502, the third temperature sensor 503 and the fourth temperature sensor 504, transmits the temperature measurement values to the microprocessor 10, and sends feedback signals to the first driving circuit 121; the second temperature acquisition circuit 112 acquires temperature measurement values of the fifth temperature sensor 505, the sixth temperature sensor 506, the seventh temperature sensor 507 and the eighth temperature sensor 508, transmits the temperature measurement values to the microprocessor 10, and sends feedback signals to the second driving circuit 122; the third temperature acquisition circuit 113 acquires temperature measurement values of the ninth temperature sensor 509, the tenth temperature sensor 510, the eleventh temperature sensor 511, and the twelfth temperature sensor 512, and transmits the temperature measurement values to the microprocessor 10, and sends feedback signals to the third drive circuit 113. The first driving circuit 121 controls the first thermoelectric cooler 601, the second thermoelectric cooler 602, the third thermoelectric cooler 603, and the fourth thermoelectric cooler 604 to control the temperature of the first measurement optical path 81; the second driving circuit 122 controls the fifth thermoelectric cooler 605, the sixth thermoelectric cooler 606, the seventh thermoelectric cooler 607, and the eighth thermoelectric cooler 608 to control the temperature of the second measurement optical path 82; the third driving circuit 113 controls the ninth thermoelectric cooler 609, the tenth thermoelectric cooler 610, the eleventh thermoelectric cooler 611, and the twelfth thermoelectric cooler 612 to control the temperature of the third measurement optical path 83.
The anti-temperature-interference auto-collimation method based on the global temperature control, which is realized on the anti-temperature-interference auto-collimation device based on the global temperature control, is shown in fig. 1, and comprises the following specific steps:
s1: setting a preset temperature T0 by the microprocessor 10;
s2: the first temperature sensor 501, the second temperature sensor 502, the third temperature sensor 503, the fourth temperature sensor 504, the fifth temperature sensor 505, the sixth temperature sensor 506, the seventh temperature sensor 507, the eighth temperature sensor 508, the ninth temperature sensor 509, the tenth temperature sensor 510, the eleventh temperature sensor 511, and the twelfth temperature sensor 512 perform temperature measurement;
s3: the microprocessor 10 obtains temperature measurement values T1, T2, T3, T4, T5, T6, T7, T8, T9, T10, T11, T12 through the first temperature acquisition circuit 111, the second temperature acquisition circuit 112, and the third temperature acquisition circuit 113;
s4: recording and calculating the first measurement light path 81 temperature tt1= (t1+t2+t3+t4)/4, the second measurement light path 82 temperature tt2= (t5+t6+t7+t8)/4, and the third measurement light path 83 temperature tt3= (t9+t10+t11+t12)/4;
s5: comparing the temperature Tt1 of the first measuring light path 81 obtained in the step S4 with the preset temperature T0 in the step S1, calculating the absolute value |Tt1-T0| of the temperature difference value, judging whether the absolute value |Tt1-T0| >0.1 is met, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor 10 through the driving circuit;
comparing the temperature Tt2 of the second measuring light path 82 obtained in the step S4 with the preset temperature T0 in the step S1, calculating the absolute value |Tt2-T0| of the temperature difference value, judging whether the absolute value |T2-T0| >0.1 is met, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor 10 through the driving circuit;
comparing the temperature Tt3 of the third measuring light path 83 obtained in the step S4 with the preset temperature T0 in the step S1, calculating the absolute value |Tt3-T0| of the temperature difference value, judging whether the absolute value |T3-T0| >0.1 is met, if yes, entering the next step, and if not, controlling the thermoelectric refrigerator to stop working by the microprocessor 10 through the driving circuit;
s6: comparing the temperature Tt1 of the first measuring light path 81 obtained in the step S4 with the preset temperature T0 in the step S1, judging whether Tt1> T0 is met, if yes, controlling the thermoelectric refrigerator to refrigerate by the microprocessor 10 through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor 10 through the driving circuit;
comparing the temperature Tt2 of the second measuring light path 82 obtained in the step S4 with the preset temperature T0 in the step S1, judging whether Tt2> T0 is met, if yes, controlling the thermoelectric refrigerator to refrigerate by the microprocessor 10 through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor 10 through the driving circuit;
comparing the temperature Tt3 of the third measuring light path 83 obtained in the step S4 with the preset temperature T0 in the step S1, judging whether Tt3> T0 is met, if yes, controlling the thermoelectric cooler by the microprocessor 10 through the driving circuit to perform refrigeration, otherwise, controlling the thermoelectric cooler by the microprocessor 10 through the driving circuit to perform heating;
s7: and (3) circulating S2 to S6, and completing the temperature control of the auto-collimation device.
The present invention is not limited to the preferred embodiments, but is capable of modification and variation in detail, and other embodiments, such as those described above, of making various modifications and equivalents will fall within the spirit and scope of the present invention.

Claims (6)

1. The utility model provides an anti temperature interference auto-collimation device based on global temperature control, auto-collimation body, be equipped with light source, beam splitting prism, collimating objective and CCD sensor in the auto-collimation body, the light beam that the light source sent passes beam splitting prism, collimating objective, beam splitting prism and CCD sensor in proper order, forms first measuring light path between light source and the beam splitting prism, forms second measuring light path between beam splitting prism and the CCD sensor, forms third measuring light path between beam splitting prism and the collimating objective, its characterized in that: the thermoelectric refrigerator is used for controlling the temperatures of the first measuring light path, the second measuring light path and the third measuring light path, the temperature sensor is used for measuring the temperatures of the first measuring light path, the second measuring light path and the third measuring light path, the thermoelectric refrigerator and the temperature sensor are respectively connected with the microprocessor, the thermoelectric refrigerator is connected with the microprocessor through a driving circuit, and the temperature sensor is connected with the microprocessor through a collecting circuit.
2. The global temperature control-based temperature interference resistant auto-collimation device of claim 1, wherein: the thermoelectric coolers are distributed uniformly along the circumferences of the first measuring light path, the second measuring light path and the third measuring light path respectively.
3. The global temperature control-based temperature interference resistant auto-collimation device of claim 2, wherein: the first measuring light path, the second measuring light path and the third measuring light path are respectively formed by splicing a plurality of thermoelectric coolers, and the thermoelectric coolers are respectively contacted end to end along the circumferential directions of the first measuring light path, the second measuring light path and the third measuring light path.
4. The global temperature control-based temperature interference resistant auto-collimation device of claim 1, wherein: the number of the temperature sensors is a plurality of, and the temperature sensors are uniformly distributed on the measuring light paths along the same circumference taking the centers of the first measuring light path, the second measuring light path and the third measuring light path as circle centers.
5. The global temperature control-based temperature interference resistant auto-collimation device of claim 4, wherein: the temperature sensor is an infrared temperature sensor.
6. The anti-temperature interference auto-collimation method based on global temperature control is characterized by comprising the following steps of: the method is realized by the following steps:
s1: setting a preset temperature by a microprocessor;
s2: measuring the temperature by a temperature sensor;
s3: the microprocessor obtains a temperature measured value in the step S2 through the acquisition circuit;
s4: respectively recording and calculating the temperatures of the first measuring light path, the second measuring light path and the third measuring light path through the measured values obtained in the step S3;
s5: comparing the temperature of the first measuring light path obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference value, judging whether the absolute value of the temperature difference value is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric cooler to stop working by the microprocessor through the driving circuit;
comparing the temperature of the second measuring light path obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference value, judging whether the absolute value of the temperature difference value is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric cooler to stop working by the microprocessor through the driving circuit;
comparing the temperature of the third measuring light path obtained in the step S4 with the preset temperature in the step S1, calculating the absolute value of the temperature difference value, judging whether the absolute value of the temperature difference value is larger than 0.1 or not, if yes, entering the next step, and if not, controlling the thermoelectric cooler to stop working by the microprocessor through the driving circuit;
s6: comparing the temperature of the first measuring light path obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the first measuring light path is higher than the preset temperature or not, if so, controlling the thermoelectric refrigerator to refrigerate by the microprocessor through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor through the driving circuit;
comparing the temperature of the second measuring light path obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the second measuring light path is higher than the preset temperature, if so, controlling the thermoelectric refrigerator to refrigerate by the microprocessor through the driving circuit, otherwise, controlling the thermoelectric refrigerator to heat by the microprocessor through the driving circuit;
comparing the temperature of the third measuring light path obtained in the step S4 with the preset temperature in the step S1, judging whether the temperature of the third measuring light path is higher than the preset temperature, if so, controlling the thermoelectric cooler to cool by the microprocessor through the driving circuit, otherwise, controlling the thermoelectric cooler to heat by the microprocessor through the driving circuit;
s7: and (6) circulating S2 to S6, and completing temperature control.
CN202311379424.9A 2023-10-24 2023-10-24 Global temperature control-based anti-temperature interference auto-collimation device and method Pending CN117367325A (en)

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CN202311379424.9A CN117367325A (en) 2023-10-24 2023-10-24 Global temperature control-based anti-temperature interference auto-collimation device and method

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