CN117310292A - System, method and medium for measuring input impedance of high-frequency power supply probe - Google Patents
System, method and medium for measuring input impedance of high-frequency power supply probe Download PDFInfo
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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Abstract
A measurement system for input impedance of a high frequency power probe, comprising: the vector network analysis unit is used for obtaining input impedance corresponding to each frequency of the high-frequency power supply probe in the first frequency range; the signal measuring unit is used for acquiring a response signal divided by the high-frequency power supply probe based on the excitation signal; a signal switching unit; the processing unit is used for obtaining input impedance corresponding to each frequency of the high-frequency power supply probe in the second frequency range based on the response signals of each excitation signal and the output impedance of the signal measuring unit; obtaining input impedance of a high-frequency power supply probe in a frequency band to be measured; and the display unit is used for displaying the input impedance curve. Because the signal measuring unit outputs the excitation signal to the high-frequency power supply probe, the input impedance of the high-frequency power supply probe in the low frequency band is obtained, and the production quality is improved. The application also provides a method and a medium for measuring the input impedance of the high-frequency power supply probe.
Description
Technical Field
The application relates to the technical field of power supply probe measurement, in particular to a system, a method and a medium for measuring input impedance of a high-frequency power supply probe.
Background
The high-frequency power supply probe is a probe specially used for measuring the signal quality of a power supply network, and has the characteristics of high bandwidth, low noise and low high-frequency input impedance. The input impedance is one of three main parameters of the high-frequency power supply probe, and is an important index for measuring the performance of the high-frequency power supply probe, so that it is very important to measure the input impedance curve of the high-frequency power supply probe.
In the current scheme, the input impedance curve of the high-frequency power supply probe in the high frequency band is measured based on the vector network analyzer, and whether the high-frequency power supply probe meets the requirement is judged based on the input impedance curve of the high frequency band. The vector network analyzer cannot measure the input impedance curve of the high-frequency power supply probe in the low frequency band, and the input impedance of the low frequency band can only be ensured by design, so that the input impedance of the high-frequency power supply probe in the low frequency band is difficult to ensure to meet the requirement, and the production quality of the high-frequency power supply probe is influenced. Therefore, new technical solutions are also needed.
Disclosure of Invention
The technical problem that this application mainly solves is that high frequency power supply probe is difficult to guarantee to satisfy the requirement at the input impedance of low frequency channel.
According to a first aspect, in one embodiment there is provided a measurement system for input impedance of a high frequency power probe, comprising:
a vector network analysis unit, configured to output an incident signal to the high-frequency power supply probe at a plurality of frequencies in a first frequency band range when the high-frequency power supply probe is connected, and receive a reflected signal returned by the high-frequency power supply probe based on the incident signal, respectively; based on the incident signals and the reflected signals, input impedance corresponding to each frequency of the high-frequency power supply probe in the first frequency range is obtained;
a signal measurement unit configured to output excitation signals to the high-frequency power supply probe at a plurality of frequencies in a second frequency band range, respectively, when the high-frequency power supply probe is connected, so as to obtain response signals divided by the high-frequency power supply probe based on the excitation signals;
a signal switching unit for connecting the vector network analysis unit with the high-frequency power supply probe and disconnecting the signal measurement unit from the high-frequency power supply probe; or connecting the signal measuring unit with the high-frequency power supply probe and disconnecting the vector network analyzing unit from the high-frequency power supply probe;
the processing unit is used for obtaining input impedance corresponding to each frequency of the high-frequency power supply probe in the second frequency range based on the excitation signals, the response signals and the output impedance of the signal measuring unit; the input impedance of the high-frequency power supply probe in the frequency range to be measured is obtained based on the input impedance of the high-frequency power supply probe in the first frequency range and the second frequency range; the maximum frequency in the second frequency range is larger than or equal to the minimum frequency in the first frequency range and smaller than the maximum frequency in the first frequency range;
and the display unit is used for displaying the input impedance curve of the high-frequency power supply probe in the frequency band to be measured.
In some embodiments, the signal measurement unit comprises:
the signal source module is used for respectively outputting excitation signals at a plurality of frequencies in the second frequency range;
the first end of the reference resistor is connected with the signal source module, and the second end of the reference resistor is connected with the high-frequency power supply probe; the output impedance of the signal measuring unit is equal to the output impedance of the signal source module plus the impedance of the reference resistor;
and the voltage measurement module is used for acquiring the voltage value of the response signal divided by the high-frequency power supply probe based on the excitation signal.
In some embodiments, when the input impedance of the high-frequency power supply probe in the frequency band to be measured is obtained based on the input impedance of the high-frequency power supply probe in the first frequency band range and the second frequency band range, the processing unit is further configured to:
acquiring non-overlapping frequencies in the first frequency range and the second frequency range, and respectively incorporating input impedance corresponding to the non-overlapping frequencies into the input impedance of the frequency range to be measured;
and acquiring the overlapped frequency in the first frequency range and the second frequency range, and determining the input impedance when the overlapped frequency is included in the frequency range to be detected based on the input impedance corresponding to the overlapped frequency in the first frequency range and the second frequency range respectively.
In some embodiments, when determining the input impedance of the overlapped frequency when the overlapped frequency is included in the frequency band to be measured based on the input impedance corresponding to the overlapped frequency in the first frequency band range and the second frequency band range, respectively, the processing unit is further configured to;
and obtaining the average value of the input impedance corresponding to the overlapped frequency in the first frequency range and the second frequency range, and taking the average value as the input impedance when the overlapped frequency is included in the frequency range to be measured.
According to a second aspect, in one embodiment, there is provided a measurement system of input impedance of a high frequency power supply probe, a frequency band to be measured of the high frequency power supply probe including a first frequency band and a second frequency band, the measurement system including:
the signal source module is used for respectively outputting excitation signals to the high-frequency power supply probe at a plurality of frequencies in a second frequency range; wherein the second frequency range includes the second frequency range, and a maximum frequency in the second frequency range is smaller than a maximum frequency in the first frequency range;
the voltage measurement module is used for acquiring a voltage value of a response signal divided by the high-frequency power supply probe based on the excitation signal;
and the processing module is used for obtaining the input impedance corresponding to each frequency of the high-frequency power supply probe in the second frequency range based on the voltage values of the excitation signals and the response signals and the output impedance of the signal source module.
In some embodiments, the signal source module comprises:
the signal source is used for respectively outputting excitation signals at a plurality of frequencies in the second frequency range;
the first end of the reference resistor is connected with the signal source, and the second end of the reference resistor is connected with the high-frequency power supply probe; the output impedance of the signal source module is equal to the output impedance of the signal source plus the impedance of the reference resistor.
According to a third aspect, in one embodiment, there is provided a method for measuring input impedance of a high frequency power supply probe, comprising:
when the vector network analysis unit is connected with the high-frequency power supply probe, outputting a first control signal to the vector network analysis unit so that: the vector network analysis unit outputs incident signals to the high-frequency power supply probe respectively at a plurality of frequencies in a first frequency range, receives reflected signals returned by the high-frequency power supply probe based on the incident signals, and obtains input impedance corresponding to each frequency of the high-frequency power supply probe in the first frequency range based on each incident signal and each reflected signal;
outputting a second control signal to the signal measurement unit when the signal measurement unit is connected to the high-frequency power supply probe such that: the signal measurement unit outputs excitation signals to the high-frequency power supply probe respectively at a plurality of frequencies in a second frequency range so as to acquire response signals divided by the high-frequency power supply probe based on the excitation signals;
based on the excitation signals, the response signals and the output impedance of the signal measuring unit, obtaining input impedance corresponding to each frequency of the high-frequency power supply probe in the second frequency range; obtaining input impedance of the high-frequency power supply probe in a frequency band to be detected based on input impedance of the high-frequency power supply probe in the first frequency band range and the second frequency band range; the maximum frequency in the second frequency range is larger than or equal to the minimum frequency in the first frequency range and smaller than the maximum frequency in the first frequency range;
and displaying the input impedance curve of the high-frequency power supply probe in the frequency band to be tested.
In some embodiments, the obtaining the input impedance of the high-frequency power supply probe in the frequency band to be measured based on the input impedance of the high-frequency power supply probe in the first frequency band range and the second frequency band range includes:
acquiring non-overlapping frequencies in the first frequency range and the second frequency range, and respectively incorporating input impedance corresponding to the non-overlapping frequencies into the input impedance of the frequency range to be measured;
and acquiring the overlapped frequency in the first frequency range and the second frequency range, and determining the input impedance when the overlapped frequency is included in the frequency range to be detected based on the input impedance corresponding to the overlapped frequency in the first frequency range and the second frequency range respectively.
In some embodiments, the determining the input impedance of the overlapped frequency when the overlapped frequency is included in the frequency band to be measured based on the input impedance corresponding to the overlapped frequency in the first frequency band range and the second frequency band range respectively includes:
and obtaining the average value of the input impedance corresponding to the overlapped frequency in the first frequency range and the second frequency range, and taking the average value as the input impedance when the overlapped frequency is included in the frequency range to be measured.
According to a fourth aspect, an embodiment provides a computer readable storage medium having stored thereon a program executable by a processor to implement the method according to the third aspect.
According to the measuring system of the embodiment, the signal measuring unit outputs the excitation signal to the high-frequency power supply probe, the response signal divided by the high-frequency power supply probe based on the excitation signal is obtained, the input impedance of the high-frequency power supply probe in the low frequency band is obtained based on the excitation signal and the response signal, and whether the input impedance of the high-frequency power supply probe meets the requirement can be better judged based on the input impedance of the low frequency band, so that the production quality is improved.
Drawings
FIG. 1 is a schematic diagram of a measurement system according to an embodiment;
FIG. 2 is a schematic diagram of a measurement system according to another embodiment;
FIG. 3 is a schematic diagram of a measurement system according to yet another embodiment;
FIG. 4 is a schematic diagram of a measurement system for measuring input impedance according to one embodiment;
FIG. 5 is a schematic diagram of a measurement system for measuring input impedance according to another embodiment;
FIG. 6 is a graph of input impedance of a high frequency power probe at a low frequency band according to one embodiment;
FIG. 7 is a graph showing the input impedance of a high frequency power probe in the high frequency range according to one embodiment;
FIG. 8 is a graph of input impedance of a high frequency power probe at full frequency band according to one embodiment;
FIG. 9 is a schematic diagram of a measurement system according to one embodiment;
fig. 10 is a flow chart of a measurement method according to an embodiment.
Detailed Description
The present application is described in further detail below with reference to the accompanying drawings by way of specific embodiments. Wherein like elements in different embodiments are numbered alike in association. In the following embodiments, numerous specific details are set forth in order to provide a better understanding of the present application. However, one skilled in the art will readily recognize that some of the features may be omitted, or replaced by other elements, materials, or methods in different situations. In some instances, some operations associated with the present application have not been shown or described in the specification to avoid obscuring the core portions of the present application, and may not be necessary for a person skilled in the art to describe in detail the relevant operations, as will be apparent from the description herein and the general knowledge of one skilled in the art.
Furthermore, the described features, operations, or characteristics of the description may be combined in any suitable manner in various embodiments. Also, various steps or acts in the method descriptions may be interchanged or modified in a manner apparent to those of ordinary skill in the art. Thus, the various orders in the description and drawings are for clarity of description of only certain embodiments, and are not meant to be required orders unless otherwise indicated.
The numbering of the components itself, e.g. "first", "second", etc., is used herein merely to distinguish between the described objects and does not have any sequential or technical meaning. The terms "coupled" and "connected," as used herein, are intended to encompass both direct and indirect coupling (coupling), unless otherwise indicated.
In the current scheme, the input impedance of the high-frequency power supply probe is generally obtained by measuring the S11 parameter (reflection coefficient) of the high-frequency power supply probe through a vector network analyzer and then based on a calculation conversion formula corresponding to the S11 parameter. However, since the lowest measurement frequency of the vector network analyzer cannot reach below KHz, for example, the lowest measurement frequency is only 100KHz, the input impedance of the high-frequency power supply probe at the low frequency band cannot be measured. Moreover, the performance of the high-frequency power supply probe is not evaluated based on the input impedance of the high-frequency power supply probe in the low frequency band in the current scheme, but the input impedance of the high-frequency power supply probe in the low frequency band is ensured by design. However, if the input impedance of the high-frequency power supply probe in the low frequency band is not judged in the production test, the overall performance of the high-frequency power supply probe is affected.
In some embodiments of the present application, the input impedance of the high-frequency power supply probe in the high frequency band is measured by the vector network analysis unit, and the input impedance of the high-frequency power supply probe in the low frequency band is output to the high-frequency power supply probe by the signal measurement unit, and the response signal divided by the high-frequency power supply probe based on the excitation signal is obtained, and the input impedance is obtained based on the excitation signal and the response signal. And finally, obtaining the input impedance of the high-frequency power supply probe in the full frequency range by the input impedance of the high-frequency power supply probe in the high frequency range and the low frequency range. And whether the input impedance of the full frequency band of the high-frequency power supply probe meets the requirement can be judged based on the input impedance of the full frequency band so as to improve the production quality.
Some embodiments provide a measurement system for input impedance of a high-frequency power supply probe, which can be used for measuring input impedance of the high-frequency power supply probe in a high frequency band and a low frequency band, so that an input impedance curve of the high-frequency power supply probe in a full frequency band can be obtained, whether the input impedance of the high-frequency power supply probe meets requirements can be comprehensively evaluated, and production quality is improved. Referring to fig. 1, the measurement system includes a vector network analysis unit 10, a signal measurement unit 20, a signal switching unit 30, a processing unit 40, and a display unit 50, which are respectively described in detail below.
The vector network analysis unit 10 is used for measuring input impedance of the high-frequency power supply probe when the high-frequency power supply probe is connected. In some embodiments, the vector network analysis unit 10 may be implemented by using a vector network analyzer, and is connected to a first end of a high-frequency power supply probe through a measurement end thereof, and a second end of the high-frequency power supply probe is grounded. When the vector network analyzer outputs an incident signal to the high-frequency power supply probe at a certain frequency, the high-frequency power supply probe returns a reflected signal based on the incident signal and is received by the vector network analyzer. Based on the relation between the incident signal and the reflected signal, the S11 parameter (reflection coefficient) of the high-frequency power supply probe can be obtained, and the input impedance of the high-frequency power supply probe at a certain frequency can be finally obtained, for example, the input impedance can be directly obtained by processing the input impedance by a vector network analyzer. In some embodiments, the vector network analysis unit 10 may also be part of a circuit for implementing input impedance measurement in a vector network analyzer, for example, the vector network analysis unit 10 includes an incident signal source module and a directional coupler, where the incident signal source module is used to generate an incident signal and output the incident signal to a first end of the directional coupler, the directional coupler is used to divide the incident signal into power and output the power to the high-frequency power supply probe through a second end thereof, and output the power to perform subsequent signal processing through a third end thereof, a fourth end of the directional coupler is used to output a reflected signal returned by the high-frequency power supply probe, and the reflected signal output by the fourth end of the directional coupler and the incident signal output by the third end of the directional coupler may be processed and analyzed based on the processing unit 40 to obtain the input impedance.
In some embodiments, the vector network analysis unit 10 has the lowest measurement frequency and the highest measurement frequency of the higher frequency when measuring the input impedance of the high frequency power supply probe, so the vector network analysis unit 10 may be used to measure the input impedance of the high frequency power supply probe in the high frequency band. For example, the input impedance of the high-frequency power supply probe in the first frequency range can be measured, the minimum frequency in the first frequency range is greater than or equal to the minimum measurement frequency, the maximum frequency in the first frequency range can be set according to measurement requirements and does not exceed the maximum measurement frequency, and for example, the first frequency range can be 50khz-10Ghz. In some embodiments, when the vector network analysis unit 10 performs input impedance measurement on the high-frequency power supply probe, an incident signal is output to the high-frequency power supply probe at a plurality of frequencies in the first frequency band range, respectively, and a reflected signal returned by the high-frequency power supply probe based on the incident signal is received. For example, the frequency sweep output may be performed at each frequency in the first frequency range, so as to obtain the input impedance corresponding to each frequency in the first frequency range of the high-frequency power supply probe. For example, the input impedance of the high-frequency power supply probe corresponding to each frequency in the first frequency range may be obtained by performing sweep output with a portion of each frequency in the first frequency range and then fitting based on the input impedance corresponding to the portion of each frequency.
The signal measurement unit 20 is used for performing input impedance measurement on the high-frequency power supply probe when the high-frequency power supply probe is connected. In some embodiments, the signal measurement unit 20 has a signal output and a measurement end, wherein the signal output and the measurement end are respectively connected to a first end of the high frequency power probe, and a second end of the high frequency power probe is grounded. When the signal measuring unit 20 outputs the excitation signal at a certain frequency through the signal output terminal, the measuring terminal obtains the response signal divided by the high-frequency power supply probe based on the excitation signal. Based on the output impedance of the signal measuring unit 20 and the voltage proportional relationship between the excitation signal and the response signal, the input impedance of the high-frequency power supply probe at the certain frequency can be obtained.
In some embodiments, the signal measurement unit 20 only needs to measure the low frequency band that cannot be measured by the vector network analysis unit 10 when measuring the input impedance of the high frequency power supply probe. For example, the signal measurement unit 20 may measure the input impedance of the high-frequency power supply probe in the second frequency range, where the maximum frequency in the second frequency range is greater than or equal to the minimum frequency in the first frequency range and less than the maximum frequency in the first frequency range, and the minimum frequency in the second frequency range may be set according to the measurement requirement, so that the first frequency range plus the second frequency range includes the frequency range to be measured of the high-frequency power supply probe, so as to satisfy the measurement of the input impedance of the high-frequency power supply probe in the full frequency range. For example, when the first frequency range is 50khz-10Ghz, the second frequency range may be 0khz-50khz, or may be 0.01khz-100khz, so that the frequency range to be measured of the high-frequency power supply probe may satisfy the range of 0khz-10Ghz. In some embodiments, when the signal measurement unit 20 performs input impedance measurement on the high-frequency power supply probe, excitation signals are output to the high-frequency power supply probe at a plurality of frequencies in the second frequency band range, respectively, and response signals of the high-frequency power supply probe based on the partial voltage of the excitation signals are received. For example, the frequency sweep output may be performed at each frequency in the second frequency range, so as to obtain the input impedance corresponding to each frequency in the second frequency range of the high-frequency power supply probe. For example, the frequency sweep output may be performed by using a portion of each frequency in the second frequency range, and then fitting may be performed based on the input impedance corresponding to the portion of the frequency, so as to obtain the input impedance corresponding to each frequency of the high-frequency power supply probe in the second frequency range.
Referring to fig. 2 and 4, in some embodiments, the signal measurement unit 20 includes a signal source module 22 and a voltage measurement module 24. The signal source module 22 is configured to output excitation signals to the high-frequency power supply probe at a plurality of frequencies in the second frequency range. The voltage measurement module 24 is used for obtaining the voltage value of the response signal divided by the high-frequency power supply probe based on the excitation signal. In some embodiments, the signal source module 22 may be implemented by a signal generator, or may be implemented by a part of a circuit that generates a signal. The voltage measurement module 24 may be implemented by an oscilloscope, a multimeter, or some other circuit, such as a voltage measurement circuit.
In some embodiments, for example, at a certain frequency, where the set value of the excitation signal output by the signal source module 22 is VS and the voltage value of the excitation signal acquired by the voltage measurement module 24 is VT, the input impedance ZIN of the high-frequency power supply probe is:
ZIN=RO*VT/(VS-VT)；
where R0 is the output impedance of the signal source module 22, which is known and is typically 50Ω. Thus, the input impedance of the high-frequency power supply probe at the certain frequency can be calculated. When the frequency sweep output is carried out by each frequency in the second frequency range, the input impedance corresponding to each frequency of the high-frequency power supply probe in the second frequency range can be obtained.
Referring to fig. 3 and 5, in some embodiments, since the high-frequency power supply probe has the characteristics of high low-frequency input impedance and low high-frequency input impedance, the low-frequency input impedance of the high-frequency power supply probe is relatively large and has a relatively large phase difference with the output impedance of the signal source module 22, and meanwhile, the voltage measurement of the excitation signal is also affected by the accuracy of the voltage measurement module 24, so that the input impedance ZIN error of the high-frequency power supply probe is relatively large. For this purpose, the signal measuring unit 20 may also comprise a reference resistor, wherein a first end of the reference resistor is connected to the signal source module 22 and a second end thereof is connected to the first end of the high-frequency power supply probe. At this time, at the certain frequency, the input impedance ZIN of the high-frequency power supply probe is:
ZIN=(RO+R1)*VT/(VS-VT)；
wherein R1 is the impedance of the reference resistor. After the reference resistance is increased, the output impedance of the signal source module 22 is increased, so that the input impedance ZIN measurement accuracy of the high-frequency power supply probe is improved.
The signal switching unit 30 is used to connect the vector network analysis unit 10 with the high-frequency power supply probe and disconnect the signal measurement unit 20 from the high-frequency power supply probe. Alternatively, the signal measurement unit 20 is connected to the high-frequency power supply probe, and the vector network analysis unit 10 is disconnected from the high-frequency power supply probe. In some embodiments, the signal switching unit 30 may be switched by manual wiring, and sends a switching signal to the processing unit 40 after the switching is completed. In some embodiments, the signal switching unit 30 may be an alternative rf switch, and the rf switch may be controlled by the processing unit 40 to implement an automatic switching function.
Referring to fig. 6, the processing unit 40 is configured to obtain each excitation signal and response signal of the signal measurement unit 20, and then obtain input impedance corresponding to each frequency of the high-frequency power supply probe in the second frequency range based on each excitation signal and response signal and output impedance of the signal measurement unit 20. Referring to fig. 7, in some embodiments, the processing unit 40 may directly obtain input impedances corresponding to frequencies of the high-frequency power supply probe measured by the vector network analysis unit 10 in the first frequency range, and the processing unit 40 may also be configured to obtain input impedances corresponding to frequencies of the high-frequency power supply probe in the first frequency range based on the respective incident signals and reflected signals of the vector network analysis unit 10. In some embodiments, the processing unit 40 may be implemented based on a processor, an analog-to-digital converter, or the like for signal processing. In some embodiments, the processing unit 40 may be an upper computer, so that it may be directly connected to the vector network analyzer to obtain input impedance corresponding to each frequency of the high-frequency power supply probe in the first frequency range. The upper computer can also be respectively connected with the signal generator and the oscilloscope, so that the frequency and the set value of the excitation signal are directly obtained, the voltage value of the measured response signal is directly obtained, and the input impedance corresponding to each frequency of the high-frequency power supply probe in the second frequency range is obtained after the data processing is carried out.
In some embodiments, the processing unit 40 may first control the signal switching unit 30 to connect the vector network analysis unit 10 with the high-frequency power supply probe, and complete the input impedance of the high-frequency power supply probe in the first frequency band range. The signal switching unit 30 may be controlled to connect the signal measuring unit 20 with the high-frequency power supply probe first, and complete the input impedance of the high-frequency power supply probe in the second frequency band range.
Referring to fig. 8, in some embodiments, the processing unit 40 is further configured to obtain an input impedance of the high-frequency power probe in the frequency band to be measured based on the input impedance of the high-frequency power probe in the first frequency band range and the second frequency band range. In some embodiments, the processing unit 40 obtains frequencies that are not overlapped in the first frequency range and the second frequency range, and respectively includes input impedances corresponding to the frequencies that are not overlapped into input impedances of the frequency range to be measured. The processing unit 40 obtains the overlapping frequencies in the first frequency range and the second frequency range, and determines the input impedance when the overlapping frequencies are included in the frequency range to be measured based on the input impedance corresponding to the overlapping frequencies in the first frequency range and the second frequency range, respectively. For example, the input impedance of the overlapped frequency may be determined as the input impedance corresponding to the input impedance in the first frequency range, or the input impedance of the overlapped frequency may be determined as the input impedance corresponding to the input impedance in the second frequency range, or weights may be set for the input impedances corresponding to the overlapped frequency in the first frequency range and the second frequency range, respectively, so as to obtain the input impedance when the overlapped frequency is included in the frequency to be measured based on the weights.
In some embodiments, when determining the input impedance of the overlapped frequency, an average value of the input impedance corresponding to the overlapped frequency in the first frequency range and the second frequency range may be obtained, so as to be used as the input impedance when the overlapped frequency is included in the frequency range to be measured, that is, the input impedance and the input impedance occupy the same weight. For example, the input impedance in the first frequency range has (100, 50), (200, 50), (300, 51), and the input impedance in the second frequency range has (1,5000), (10, 5000), (100, 51), where the former digit represents the frequency and the latter digit represents the input impedance. The input impedances into the frequency band under test are (1,5000), (10, 5000), (100, 50.5), (200, 50), (300, 51).
The display unit 50 is used for displaying an input impedance curve of the high-frequency power supply probe in a frequency band to be measured. Wherein the abscissa of the input impedance curve is frequency and the ordinate is input impedance. In some embodiments, the display unit 50 may be a part of a host computer or may be a separate display.
The above description is given of a measurement system for measuring the full-band input impedance of the high-frequency power supply probe, and the following description is given specifically of a measurement system for measuring the low-band input impedance of the high-frequency power supply probe.
In some embodiments, a measurement system for input impedance of a high frequency power probe is provided, where a frequency band to be measured of the high frequency power probe includes a first frequency band of the high frequency band and a second frequency band of the low frequency band, and the measurement system may be used to measure input impedance of the high frequency power probe at the low frequency band. Referring to fig. 9, the measurement system includes a signal source module 22, a voltage measurement module 24, and a processing module 42, each of which is described in detail below.
The signal source module 22 is configured to output excitation signals to the high-frequency power supply probe at a plurality of frequencies in the second frequency band range, respectively. The second frequency range includes the second frequency range, and the maximum frequency in the second frequency range is smaller than the maximum frequency in the first frequency range, for example, when the first frequency range is 50khz-10Ghz and the second frequency range is 0khz-50khz, the second frequency range may be 0khz-50khz or 0khz-100khz. In some embodiments, the signal source module 22 may be implemented based on a signal generator.
The voltage measurement module 24 is used for obtaining the voltage value of the response signal divided by the high-frequency power supply probe based on the excitation signal. In some embodiments, voltage measurement module 24 may be implemented based on an oscilloscope, a multimeter, a voltage measurement circuit.
The processing module 42 is configured to obtain input impedances corresponding to frequencies of the high-frequency power supply probe in the second frequency band range based on the voltage values of the excitation signals and the response signals and the output impedance of the signal source module 22. In some embodiments, the processing module may be implemented based on a host computer.
In some embodiments, the signal source module 22 includes a signal source and a reference resistor, where the signal source is configured to output excitation signals at a plurality of frequencies in the second frequency range, respectively. The first end of the reference resistor is connected with a signal source, and the second end of the reference resistor is connected with a high-frequency power supply probe. Wherein the output impedance of the signal source module 22 is equal to the output impedance of the signal source plus the impedance of the reference resistor.
In the above embodiment, it can be understood that the portion of the measurement system for measuring the input impedance of the full frequency band of the high frequency power supply probe, which is used for measuring the input impedance of the low frequency band of the high frequency power supply probe, is removed, so as to obtain the measurement system for measuring the input impedance of the low frequency band of the high frequency power supply probe.
Some embodiments provide a method for measuring input impedance of a high-frequency power supply probe, which can be applied to the measuring system. Referring to fig. 10, the method includes the steps of:
step 100: the input impedance of the high frequency band is measured. When the vector network analysis unit 10 is connected to the high-frequency power supply probe, a first control signal is output to the vector network analysis unit 10 such that: the vector network analysis unit 10 outputs incident signals to the high-frequency power supply probe at a plurality of frequencies in the first frequency band range, respectively, and receives reflected signals returned by the high-frequency power supply probe based on the incident signals, and obtains input impedances corresponding to the frequencies of the high-frequency power supply probe in the first frequency band range based on the respective incident signals and the reflected signals.
Step 200: the input impedance of the low frequency band is measured. When the signal measurement unit 20 is connected to the high-frequency power supply probe, a second control signal is output to the signal measurement unit 20 such that: the signal measurement unit 20 outputs excitation signals to the high-frequency power supply probe at a plurality of frequencies in the second frequency band range, respectively, to acquire response signals divided by the high-frequency power supply probe based on the excitation signals.
Step 300: and combining to obtain the input impedance of the full frequency band. Based on the respective excitation signals and response signals, and the output impedance of the signal measurement unit 20, obtaining input impedance corresponding to the respective frequencies of the high-frequency power supply probe in the second frequency range; and obtaining the input impedance of the high-frequency power supply probe in the frequency band to be measured based on the input impedance of the high-frequency power supply probe in the first frequency band range and the second frequency band range.
Step 400: an input impedance curve is displayed. And displaying the input impedance curve of the high-frequency power supply probe in the frequency band to be measured.
In some embodiments, obtaining the input impedance of the high frequency power probe in the frequency band to be measured based on the input impedance of the high frequency power probe in the first frequency band range and the second frequency band range includes: acquiring non-overlapping frequencies in the first frequency range and the second frequency range, and respectively incorporating input impedance corresponding to the non-overlapping frequencies into input impedance of the frequency range to be measured; and acquiring the overlapped frequency in the first frequency range and the second frequency range, and determining the input impedance when the overlapped frequency is included in the frequency range to be measured based on the input impedance corresponding to the overlapped frequency in the first frequency range and the second frequency range respectively.
In some embodiments, determining the input impedance of the overlapping frequency when the overlapping frequency is included in the frequency band to be measured based on the input impedance corresponding to the overlapping frequency in the first frequency band range and the second frequency band range, respectively, includes: and obtaining the average value of the input impedance corresponding to the overlapped frequency in the first frequency range and the second frequency range, and taking the average value as the input impedance when the overlapped frequency is included in the frequency range to be measured.
Some embodiments provide a computer readable storage medium having a program stored thereon, the program being executable by a processor to implement the above-described measurement method.
Those skilled in the art will appreciate that all or part of the functions of the various methods in the above embodiments may be implemented by hardware, or may be implemented by a computer program. When all or part of the functions in the above embodiments are implemented by means of a computer program, the program may be stored in a computer readable storage medium, and the storage medium may include: read-only memory, random access memory, magnetic disk, optical disk, hard disk, etc., and the program is executed by a computer to realize the above-mentioned functions. For example, the program is stored in the memory of the device, and when the program in the memory is executed by the processor, all or part of the functions described above can be realized. In addition, when all or part of the functions in the above embodiments are implemented by means of a computer program, the program may be stored in a storage medium such as a server, another computer, a magnetic disk, an optical disk, a flash disk, or a removable hard disk, and the program in the above embodiments may be implemented by downloading or copying the program into a memory of a local device or updating a version of a system of the local device, and when the program in the memory is executed by a processor.
The foregoing description of specific examples has been presented only to aid in the understanding of the present application and is not intended to limit the present application. Several simple deductions, modifications or substitutions may also be made by the person skilled in the art to which the present application pertains, according to the idea of the present application.
Claims (8)
1. A system for measuring input impedance of a high frequency power probe, comprising:
a vector network analysis unit, configured to output an incident signal to the high-frequency power supply probe at a plurality of frequencies in a first frequency band range when the high-frequency power supply probe is connected, and receive a reflected signal returned by the high-frequency power supply probe based on the incident signal, respectively; based on the incident signals and the reflected signals, input impedance corresponding to each frequency of the high-frequency power supply probe in the first frequency range is obtained;
a signal measurement unit configured to output excitation signals to the high-frequency power supply probe at a plurality of frequencies in a second frequency band range, respectively, when the high-frequency power supply probe is connected, so as to obtain response signals divided by the high-frequency power supply probe based on the excitation signals;
a signal switching unit for connecting the vector network analysis unit with the high-frequency power supply probe and disconnecting the signal measurement unit from the high-frequency power supply probe; or connecting the signal measuring unit with the high-frequency power supply probe and disconnecting the vector network analyzing unit from the high-frequency power supply probe;
the processing unit is used for obtaining input impedance corresponding to each frequency of the high-frequency power supply probe in the second frequency range based on the excitation signals, the response signals and the output impedance of the signal measuring unit; the input impedance of the high-frequency power supply probe in the frequency range to be measured is obtained based on the input impedance of the high-frequency power supply probe in the first frequency range and the second frequency range; the maximum frequency in the second frequency range is larger than or equal to the minimum frequency in the first frequency range and smaller than the maximum frequency in the first frequency range;
and the display unit is used for displaying the input impedance curve of the high-frequency power supply probe in the frequency band to be measured.
2. The measurement system of claim 1, wherein the signal measurement unit comprises:
the signal source module is used for respectively outputting excitation signals at a plurality of frequencies in the second frequency range;
the first end of the reference resistor is connected with the signal source module, and the second end of the reference resistor is connected with the high-frequency power supply probe; the output impedance of the signal measuring unit is equal to the output impedance of the signal source module plus the impedance of the reference resistor;
and the voltage measurement module is used for acquiring the voltage value of the response signal divided by the high-frequency power supply probe based on the excitation signal.
3. The measurement system of claim 1, wherein the processing unit is further configured to, when deriving the input impedance of the high frequency power probe in the frequency band to be measured based on the input impedance of the high frequency power probe in the first frequency band range and the second frequency band range:
acquiring non-overlapping frequencies in the first frequency range and the second frequency range, and respectively incorporating input impedance corresponding to the non-overlapping frequencies into the input impedance of the frequency range to be measured;
and acquiring the overlapped frequency in the first frequency range and the second frequency range, and determining the input impedance when the overlapped frequency is included in the frequency range to be detected based on the input impedance corresponding to the overlapped frequency in the first frequency range and the second frequency range respectively.
4. A measurement system according to claim 3, wherein the processing unit is further adapted to, when determining the input impedance of the overlapping frequency when it is included in the frequency band to be measured based on the input impedance of the overlapping frequency respectively corresponding in the first frequency band and the second frequency band;
and obtaining the average value of the input impedance corresponding to the overlapped frequency in the first frequency range and the second frequency range, and taking the average value as the input impedance when the overlapped frequency is included in the frequency range to be measured.
5. A method for measuring input impedance of a high frequency power supply probe, comprising:
when the vector network analysis unit is connected with the high-frequency power supply probe, outputting a first control signal to the vector network analysis unit so that: the vector network analysis unit outputs incident signals to the high-frequency power supply probe respectively at a plurality of frequencies in a first frequency range, receives reflected signals returned by the high-frequency power supply probe based on the incident signals, and obtains input impedance corresponding to each frequency of the high-frequency power supply probe in the first frequency range based on each incident signal and each reflected signal;
outputting a second control signal to the signal measurement unit when the signal measurement unit is connected to the high-frequency power supply probe such that: the signal measurement unit outputs excitation signals to the high-frequency power supply probe respectively at a plurality of frequencies in a second frequency range so as to acquire response signals divided by the high-frequency power supply probe based on the excitation signals;
based on the excitation signals, the response signals and the output impedance of the signal measuring unit, obtaining input impedance corresponding to each frequency of the high-frequency power supply probe in the second frequency range; obtaining input impedance of the high-frequency power supply probe in a frequency band to be detected based on input impedance of the high-frequency power supply probe in the first frequency band range and the second frequency band range; the maximum frequency in the second frequency range is larger than or equal to the minimum frequency in the first frequency range and smaller than the maximum frequency in the first frequency range;
and displaying the input impedance curve of the high-frequency power supply probe in the frequency band to be tested.
6. The measurement method according to claim 5, wherein the obtaining the input impedance of the high-frequency power supply probe in the frequency band to be measured based on the input impedance of the high-frequency power supply probe in the first frequency band range and the second frequency band range includes:
acquiring non-overlapping frequencies in the first frequency range and the second frequency range, and respectively incorporating input impedance corresponding to the non-overlapping frequencies into the input impedance of the frequency range to be measured;
and acquiring the overlapped frequency in the first frequency range and the second frequency range, and determining the input impedance when the overlapped frequency is included in the frequency range to be detected based on the input impedance corresponding to the overlapped frequency in the first frequency range and the second frequency range respectively.
7. The method of claim 6, wherein determining the input impedance of the overlapping frequency when the overlapping frequency is included in the frequency band to be measured based on the input impedance of the overlapping frequency in the first frequency band and the second frequency band, respectively, comprises:
and obtaining the average value of the input impedance corresponding to the overlapped frequency in the first frequency range and the second frequency range, and taking the average value as the input impedance when the overlapped frequency is included in the frequency range to be measured.
8. A computer readable storage medium, characterized in that the medium has stored thereon a program executable by a processor to implement the method of any of claims 5-7.
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