CN117293002A - Miniaturized solar blind ultraviolet image intensifier tube and preparation method thereof - Google Patents
Miniaturized solar blind ultraviolet image intensifier tube and preparation method thereof Download PDFInfo
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- CN117293002A CN117293002A CN202311239916.8A CN202311239916A CN117293002A CN 117293002 A CN117293002 A CN 117293002A CN 202311239916 A CN202311239916 A CN 202311239916A CN 117293002 A CN117293002 A CN 117293002A
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- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 3
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- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 2
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- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- QZRLETONGKUVFA-UHFFFAOYSA-N [K].[Cs] Chemical compound [K].[Cs] QZRLETONGKUVFA-UHFFFAOYSA-N 0.000 description 1
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- 239000011195 cermet Substances 0.000 description 1
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- JNKJTXHDWHQVDL-UHFFFAOYSA-N potassiotellanylpotassium Chemical compound [K][Te][K] JNKJTXHDWHQVDL-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/50—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output
- H01J31/506—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output tubes using secondary emission effect
- H01J31/507—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output tubes using secondary emission effect using a large number of channels, e.g. microchannel plates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
Abstract
The invention discloses a miniaturized solar blind ultraviolet image intensifier tube and a preparation method thereof, wherein the miniaturized solar blind ultraviolet image intensifier tube is mainly used as a core detection device of an unmanned aerial vehicle corona detection platform, the image intensifier tube adopts a double-close-attached focusing structure, an input light window adopts solar blind ultraviolet band high-transmittance materials, a conductive base film adopts a metal simple substance and a composite film which give consideration to conductivity and transmittance, a photoelectric cathode part adopts a solar blind ultraviolet film, a tube shell part adopts a multilayer metal ceramic structure tube shell, a gain part adopts a customized microchannel plate assembly, and a fluorescent screen part adopts a fiber optic faceplate, fluorescent powder and aluminum film structure. The image intensifier tube has the technical characteristics of high detection sensitivity of solar blind ultraviolet band, good signal-to-noise ratio, small volume, light weight and the like, and is used for realizing the detection of solar blind ultraviolet signals; meanwhile, the device has the advantages of small volume, light weight and the like, and is suitable for the use requirement of a miniaturized and light-weight detection device for an unmanned aerial vehicle platform in the field of electric power detection.
Description
Technical Field
The invention belongs to the field of photoelectric detection and imaging, and particularly relates to a miniaturized solar blind ultraviolet image intensifier tube and a preparation method thereof.
Background
The solar blind ultraviolet detection technology has been widely applied in the field of corona detection. If aging or faults exist in the high-voltage circuit and the power equipment locally, different forms of discharge such as corona, flashover or arc can occur, so that equipment faults are caused, and the transmission of power is affected. When faults occur, weak ultraviolet radiation components are released, the radiation components are in a solar blind ultraviolet band and are matched with a response spectrum of a solar blind ultraviolet detection device, and the ultraviolet detection technology has the advantages of being high in sensitivity, good in signal to noise ratio and the like and is widely applied to the field of electric power detection.
With the development of the electric power industry in China, the electric power detection technology market is gradually turned to intelligent and large-scale application, and the defects of low working efficiency, high running cost and the like exist in the working mode based on manpower and inspection robots in the current stage, so that the development of an automatic corona detection scheme based on an unmanned aerial vehicle platform is needed.
As the core detection device of the electric power inspection scheme, the volume and the weight of the ultraviolet image intensifier tube severely restrict the application and popularization of the ultraviolet detection technology on the unmanned aerial vehicle platform, and the volume and the weight of the existing ultraviolet detection device do not meet the application requirements, so that the practical application requirements of the unmanned aerial vehicle platform, such as long endurance and the like, are not facilitated.
Disclosure of Invention
The invention aims to provide a miniaturized solar blind ultraviolet image intensifier tube and a preparation method thereof, and the ultraviolet image intensifier tube which has the performance of solar blind ultraviolet detection, volume, weight and the like is specially designed according to the use requirement of an unmanned aerial vehicle corona detection platform on an ultraviolet detection device, so that the solar blind ultraviolet detection function of the image intensifier tube is realized, and meanwhile, the miniaturized and light structural characteristics are realized, and the use requirement of the unmanned aerial vehicle corona detection platform is met.
In order to achieve the above purpose, the invention adopts the following technical scheme: a miniaturized solar blind ultraviolet image intensifier tube comprises an input light window, a conductive bottom film, an ultraviolet photocathode, a metal ceramic structure tube shell, a microchannel plate assembly and a fluorescent screen assembly; the photoelectric conversion device comprises an input light window, a conductive bottom film and an ultraviolet photocathode, wherein the conductive bottom film is used for realizing charge supplement after photoelectrons are emitted by the photocathode, the ultraviolet photocathode is used for absorbing solar blind ultraviolet signals and emitting photoelectrons with the number proportional to the intensity of the input signals, the metal ceramic structure tube shell is used for maintaining a high vacuum environment in an image intensifier tube and introducing electric signals, and the fluorescent screen assembly is used for receiving the photoelectrons after multiplication of a microchannel plate assembly and converting the electric signals into optical signals; the luminescent screen assembly and the metal ceramic structured envelope are welded into a sealed structure by a metal welding process.
Further, the miniaturized solar blind ultraviolet image intensifier tube is used for detecting signals of solar blind ultraviolet wave bands, an effective detection area is a photosensitive surface with the diameter not smaller than 10mm, the outline size of the ultraviolet image intensifier tube is not larger than phi 25mm multiplied by 15mm, and the weight of the ultraviolet image intensifier tube is not more than 20g.
Further, the air tightness requirement leakage rate of the parts such as the input light window, the metal ceramic structure tube shell, the fluorescent screen assembly and the like is better than 1.0x10 -10 mbar·l/s。
Further, the ultraviolet image intensifier tube is sealed in an ultra-high vacuum environment by adopting an indium-tin alloy material high-temperature fusion sealing process or a pure indium cold pressing sealing process, and the vacuum degree in the ultraviolet image intensifier tube after the sealing is finished is better than 1.0 multiplied by 10 -5 Pa is used for keeping working environments of photoelectron generation, movement, multiplication and conversion in the tube, ensuring solar blind ultraviolet signal detection, sealing the metal ceramic structure tube shell and the fluorescent screen assembly by adopting processes such as laser welding, argon arc welding and the like, and sealing the input optical window and the metal ceramic structure tube shell by adopting an indium-tin alloy heat sealing process or a pure indium cold pressing sealing process.
Furthermore, the input light window is made of quartz or glass material with higher transmittance at 220 nm-280 nm of solar blind ultraviolet band, such as JGS series quartz, and the transmittance of 220 nm-280 nm band is better than 85%; the input light window is divided into a central effective detection area and an edge sealing electrode area, the central effective detection area sequentially covers the conductive bottom film and the ultraviolet photocathode, and the edge sealing electrode area covers the sealing electrode film material.
Further, the conductive bottom film is used for timely supplementing charges after photoelectrons are emitted by the photocathode, is a metal simple substance or a composite metal film which is attached to the effective area of the inner surface of the input light window and has good conductive performance, is selected from one of film materials such as metal chromium, metal nickel, metal molybdenum, composite metal nichrome, indium tin oxide and the like, and has an area resistance of less than 10 7 The comprehensive transmittance of the solar blind ultraviolet band of omega/≡is 220 nm-280 nm and is better than 50%, and the film coating process is realized by adopting film preparation technologies such as magnetron sputtering, electron beam evaporation and the like.
Further, the ultraviolet photocathode film is a solar blind ultraviolet photocathode film prepared by passing through a conductive bottom film, has higher quantum conversion efficiency on a 220 nm-280 nm solar blind wave band, and is selected from one of ultraviolet photocathode film materials such as cesium telluride, rubidium telluride, potassium telluride, rubidium cesium telluride, potassium cesium telluride, alGaN and the like.
Further, the metal ceramic structure tube shell is formed by adopting a plurality of layers of metal electrode rings, ceramic rings and solder for brazing, wherein the metal material is kovar alloy, and the ceramic ring material is 95% Al 2 O 3 The ceramic and brazing solder piece is silver-copper solder, copper solder or palladium-silver-copper solder with the thickness of 0.05 mm-0.1 mm.
Further, the microchannel plate assembly realizes the structure and gain stability of two or more microchannel plates through a combination process, the effective working diameter is 10.5mm, the working voltage is in the range of 1200V-2400V, and the electronic gain of over 1600V is better than 1.0X10 5 。
Further, the fluorescent screen component is a metal conductive aluminum film manufactured after a fluorescent powder layer is manufactured on a substrate of the optical fiber panel sealing part, the fluorescent powder used for the fluorescent screen is one of fluorescent powder of P20, P43, P46, P47 and other types, the aluminum film is a metal aluminum film which is prepared by adopting film preparation technologies such as magnetron sputtering, electron beam evaporation and the like and has high conductivity and reflection performance, the purity is more than 4N, and the panel used for the fluorescent screen is a window which can be used for efficient transmission and coupling of optical signals such as an optical fiber panel and optical glass.
The output window material of the fluorescent screen assembly is an optical fiber panel, the optical fiber panel and the metal kovar sealing disc are sealed through a low-melting-point glass sealing process, and the air tightness requirement leakage rate of the optical fiber panel sealing part is superior to 1.0 multiplied by 10 -10 mbar·l/s。
A preparation method of a miniaturized solar blind ultraviolet image intensifier tube comprises the following steps:
step A: sequentially completing assembly of the kovar alloy parts, the solder sheets and the ceramic rings, putting the assembled assembly into a vacuum furnace, heating to 860 ℃, naturally cooling to room temperature after heat preservation for 2 hours, taking out the metal ceramic structure tube shell, melting the solder sheets in the heat preservation process, and brazing the kovar metal parts and the ceramic rings together to form the metal ceramic structure tube shell;
and (B) step (B): the input optical window is cleaned and then is matched with an evaporation mould to be placed into an electron beam evaporation table for vacuumizing operation until the vacuum degree is better than 3.0x10 -3 Starting to evaporate the nichrome after Pa, setting the evaporation rate to be 0.1-0.2 nm/s, setting the thickness to be 9-10 nm, completing the manufacture of the conductive base film after the set value is reached, deflating the electron beam evaporation table, and taking out the input light window;
step C: the extracted input optical window is matched with a new evaporation mould to be placed into an electron beam evaporation table for vacuumizing operation, and the vacuum degree is better than 3.0x10 -3 Starting an evaporation procedure when Pa, firstly evaporating a chromium film, setting the evaporation rate to be 0.5-1 nm/s, setting the thickness to be 200-300 nm, finishing the preparation of the chromium film when the thickness of the chromium film reaches a set value, then evaporating a gold film on the surface of the chromium film, setting the evaporation rate to be 0.5-1 nm/s, setting the thickness to be 400-600 nm, finishing the preparation of a sealing electrode when the thickness of the gold film reaches the set value, deflating an electron beam evaporation table, and taking out an input optical window;
step D: combining two micro-channel plates according to the direction of the inclined chamfer angle of the channel to form a micro-channel plate assembly;
step E: coating fluorescent powder on the upper surface of the optical fiber panel sealing part to form a fluorescent powder layer, reinforcing the optical fiber panel sealing part by using reinforcing liquid, and finally placing the optical fiber panel sealing part coated with the fluorescent powder layer into an electron beam evaporation table for vacuumizing operation until the vacuum degree is superior to 3.0 multiplied by 10 -3 Starting an evaporation procedure in Pa, firstly, evaporating an aluminum film, setting the evaporation rate to be 0.5-1 nm/s, setting the thickness to be 90-120 nm, completing the manufacture of the conductive aluminum film after the set value is reached, deflating an electron beam evaporation table, and taking out a fluorescent screen assembly;
step F: the metal ceramic structure tube shell and the fluorescent screen assembly are sealed and welded by argon arc welding process, and the leak rate is better than 1.0 multiplied by 10 -10 mbar.l/s; then the metal ceramic structure tube shell is filled, the solid side of the micro-channel plate component is compacted by using a metal clamping ring for fixing, and the effective area of the micro-channel plate component and the fluorescent screen component are kept aligned in the middle inside the metal ceramic structure tube shell;
step G: the assembled metal ceramic structural tube shell and the input light window which is manufactured by the conductive bottom film and the sealing electrode are respectively put into a tube shell baking cavity and a photocathode manufacturing cavity of special equipment for vacuum transfer and sealing, and are synchronously put into the photocathode manufacturing cavity and ultraviolet photocathode manufacturing materials together with the input light window, and vacuumized through the vacuum cavity until the vacuum degree reaches 1.0 multiplied by 10 -4 After Pa, baking and exhausting the metal ceramic structure tube shell, the alkali metal evaporation source and the input light window at high temperature, keeping the temperature at 310 ℃ for 15 hours, then starting to cool, and after the temperature is cooled to room temperature, performing electronic cleaning on the microchannel plate assembly;
step H: and (C) after the step G is completed, the temperature is increased to the manufacturing temperature of the photocathode, a layer of photocathode which has photoelectric emission in the wavelength range of 220-280 nm is manufactured on the surface of the conductive bottom film of the input light window, after the photocathode is manufactured, the manufactured input light window is transferred to the position right above the metal ceramic structure tube shell in the tube shell baking cavity by using a mechanical transfer device of vacuum transfer equipment and falls down, the input light window and the metal ceramic structure tube shell are sealed, then the vacuum transfer and sealing equipment is cooled to room temperature, and the solar blind ultraviolet image intensifier tube is taken out.
The invention realizes the design goal of the miniaturized device through the compact structural design of the metal part, the ceramic ring part, the solder sheet and the microchannel plate and the technological improvements of photoelectric cathode manufacture, fluorescent screen manufacture, device treatment and the like, and has the following beneficial effects compared with the prior art:
the performance of the solar blind ultraviolet core detector in the existing corona detection field is maintained, the design difficulty of miniaturization and light weight of a core detection device in an unmanned aerial vehicle platform is solved, the application requirement of the unmanned aerial vehicle platform is met, and the application range and monitoring efficiency of the ultraviolet detection technology in the corona detection field are effectively improved; the main performance of the ultraviolet image intensifier tube is tested, the effective detection diameter is not less than 10mm, the external dimension is not more than phi 25mm multiplied by 15mm, and the weight is not more than 20g, so that the application requirement of the unmanned aerial vehicle corona detection platform is met.
Drawings
Fig. 1 is a structural outline structure diagram of a miniaturized solar blind ultraviolet image intensifier tube.
FIG. 2 is a schematic view of the structure of a photocathode of a miniaturized solar blind ultraviolet image intensifier tube.
Fig. 3 is a schematic structural view of a miniaturized solar blind ultraviolet image intensifier tube dual-block microchannel plate assembly.
Fig. 4 is a schematic diagram of a miniaturized solar blind ultraviolet image intensifier tube cermet tube shell structure.
Fig. 5 is a schematic view of a miniaturized solar blind ultraviolet image intensifier tube luminescent screen assembly.
The figures indicate: 1-input light window, 2-conductive bottom film, 3-ultraviolet photocathode, 4-metal ceramic structure tube shell, 5-microchannel plate component, 6-fluorescent screen component, 7-sealing electrode, 8-microchannel plate component solid edge, 9-microchannel plate component effective area, 10-kovar alloy part, 11-solder sheet, 12-ceramic ring, 13-conductive aluminum film, 14-fluorescent powder layer and 15-optical fiber panel sealing piece.
Detailed Description
The technical scheme of the present invention will be described in further detail with reference to specific examples, but the present invention is not limited to the technical scheme of the following examples.
Examples
The technical scheme of the present invention will be described with reference to fig. 1 to 5: as shown in fig. 3, two microchannel plates are combined into a microchannel plate assembly 5, and the diameter of an effective area 9 of the microchannel plate assembly is 10.5mm and slightly larger than the effective diameter of the ultraviolet photocathode 3; as shown in fig. 4, the assembly of the kovar alloy part 10 and the ceramic ring 12 is completed according to a certain sequence through a solder sheet 11, and the metal ceramic structure tube shell 4 is prepared through a brazing process, and the air tightness meets the sealing requirement of a vacuum device; as shown in fig. 5, a phosphor layer 14 and a conductive aluminum film 13 are sequentially formed on the surface of the optical fiber panel sealing member 15 to form the luminescent screen assembly 6; welding the fluorescent screen assembly 6 and the metal ceramic structure tube shell 4 into a sealing structure through a metal welding process; the microchannel plate assembly 5 is arranged in the metal ceramic structure tube shell 4, and the microchannel plate is fixed by pressing the elastic material in the solid edge 8 area of the microchannel plate assembly, so that the effective area 9 of the microchannel plate is arranged in the metal ceramic structure tube shell 4 in a centered manner, and meanwhile, the good contact between the input surface and the output surface of the microchannel plate assembly 5 and the contacted kovar alloy parts 10 is realized; as shown in FIG. 2, the metal ceramic structured tube shell 4 after being assembled with the microchannel plate assembly 5 and the fluorescent screen assembly 6 is welded is sealed with the input optical window 1, the step surface of the input optical window 1 is provided with a metal sealing electrode 7, and the central effective surface (phi 10mm area) of the input optical window 1 is provided with a resistance superior to 10 7 And preparing a layer of ultraviolet photocathode 3 film with higher response to 220-280 nm solar blind ultraviolet band on the conductive base film 2 of omega/≡.
The kovar alloy part 10 adopted by the metal ceramic structure tube shell 4 is processed into a size meeting the design requirement; the metal material adopted by the optical fiber panel sealing member 15 is kovar metal, and the output window is an optical fiber panel prepared by adopting an optical fiber material commonly used in industry; the ceramic ring 12 is made of 95% Al 2 O 3 Ceramic and processing into a specific shape according to the metal ceramic structure shell 4; the input optical window 1 is made of a JGS series quartz material commonly used in industry; the solder sheet 11 is made of silver-copper alloy material, and the thickness range is 0.04 mm-0.10 mm; the microchannel plate assembly 5 is custom developed and developed by domestic professional microchannel plate manufacturers, the diameter is phi 16mm, and the channel length is longAbout 0.4mm in length/diameter ratio of 40:1, the outer diameter is 16mm, and the diameter of an effective area is 10.5mm; the luminescent screen assembly 6 is produced by an electro-vacuum standard process, and the phosphor label P20 is used for the phosphor layer 14.
The manufacturing process of the invention comprises the following steps:
a: referring to fig. 4, the kovar alloy part 10, the solder piece 11 and the ceramic ring 12 are assembled in sequence, the assembled assembly is placed into a vacuum furnace, the temperature is raised to 860 ℃, the temperature is naturally lowered to room temperature after 2 hours of heat preservation, the metal ceramic structure tube shell 4 is taken out, the solder piece 11 is melted in the heat preservation process, and the kovar metal part 10 and the ceramic ring 12 are brazed together to form the metal ceramic structure tube shell 4.
B: referring to fig. 2, the input optical window 1 is cleaned and then is matched with an evaporation mold to be placed into an electron beam evaporation table for vacuumizing operation, and the vacuum degree is better than 3.0x10 -3 Starting to evaporate nichrome after Pa, setting the evaporation rate to be 0.1-0.2 nm/s, setting the thickness to be 9-10 nm, completing the manufacture of the conductive base film 2 after the set value is reached, deflating the electron beam evaporation table, and taking out the input light window 2;
c: referring to fig. 2, the extracted input optical window 2 is placed in an electron beam evaporation table together with a new evaporation mold to perform vacuum pumping operation until the vacuum degree is better than 3.0x10 -3 Starting an evaporation procedure when Pa, firstly evaporating a chromium film, setting the evaporation rate to be 0.5-1 nm/s, setting the thickness to be 200-300 nm, finishing the preparation of the chromium film when the thickness of the chromium film reaches a set value, then evaporating a gold film on the surface of the chromium film, setting the evaporation rate to be 0.5-1 nm/s, setting the thickness to be 400-600 nm, finishing the preparation of a sealing electrode 7 when the thickness of the gold film reaches the set value, deflating an electron beam evaporation table, and taking out an input optical window 2;
d: referring to fig. 3, two microchannel plates are combined in a "V" shape according to the channel chamfer angle direction to form a microchannel plate assembly 5.
E: referring to fig. 5, P43 phosphor is coated on the upper surface of the optical fiber panel sealing member 15 to form a phosphor layer 14, reinforcement treatment is performed by using a reinforcement liquid, and finally the optical fiber panel sealing member 15 coated with the phosphor layer 14 is placed in an electron beam evaporation table to perform vacuum pumping operation until the vacuum degree is superior to 3.0x10 -3 And starting an evaporation procedure in Pa, firstly evaporating an aluminum film, setting the evaporation rate to be 0.5-1 nm/s, setting the thickness to be 90-120 nm, finishing the manufacture of the conductive aluminum film 13 after the set value is reached, deflating an electron beam evaporation table, and taking out the fluorescent screen assembly 6.
F: referring to fig. 1, the metal-ceramic structured envelope 4 and the luminescent screen assembly 6 are first sealed and welded by an argon arc welding process, with a leak rate superior to 1.0x10 -10 mbar.l/s; and then the metal ceramic structure tube shell 4 is filled, and the solid edges 8 of the micro-channel plate assembly are compacted by using metal clamping rings to fix, so that the effective area 9 of the micro-channel plate assembly and the fluorescent screen assembly 6 are aligned in the middle inside the metal ceramic structure tube shell 4.
G: the assembled metal ceramic structural tube shell 4, the input light window 1 which is manufactured by the conductive bottom film 2 and the sealing electrode 7 are respectively put into a tube shell baking cavity and a photocathode manufacturing cavity of special equipment for vacuum transfer and sealing, the tube shell baking cavity and the photocathode manufacturing cavity are synchronously put into the photocathode manufacturing cavity together with the input light window 1, and ultraviolet photocathode 3 manufacturing materials such as indium telluride alloy, cesium evaporation source, potassium evaporation source and the like are also put into the photocathode manufacturing cavity, and the vacuum is pumped through the vacuum cavity until the vacuum degree reaches 1.0x10 -4 And (3) after Pa, carrying out high-temperature baking and exhausting on the metal ceramic structure tube shell 4, the alkali metal evaporation source and the input optical window 1, keeping the temperature at 310 ℃ for 15 hours, then starting cooling, and carrying out electronic cleaning on the microchannel plate assembly after the temperature is cooled to room temperature, wherein the total cleaning amount is not less than 100 mu A.h.
H: after the step G is completed, the temperature is increased to the manufacturing temperature (170 ℃) of the photocathode, a layer of photocathode (TeKCs) with photoelectric emission in the wavelength range of 220-280 nm is manufactured on the surface of the conductive base film 2 of the input optical window 1, after the photocathode is manufactured, the manufactured input optical window 1 is transferred to the position right above the metal ceramic structure tube shell 4 in the tube shell baking cavity by using a mechanical transfer device of vacuum transfer equipment, and is gently dropped, the sealing between the input optical window 1 and the metal ceramic structure tube shell 4 is completed, then the vacuum transfer and sealing equipment is cooled to the room temperature, and the solar blind ultraviolet image intensifier tube is taken out.
The invention develops technical researches by the structural design of parts such as an input optical window, a metal ceramic tube shell, a fluorescent screen and the like in the image intensifier tube and matching with a micro-channel plate with a customized structure, and successfully solves the technical problems of high sensitivity, high gain, miniaturization and light weight of the solar blind ultraviolet image intensifier tube. And manufacturing the solar blind ultraviolet image intensifier tube which meets the requirements of the unmanned plane platform and has the advantages of solar blind ultraviolet response, miniaturization and light weight.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, not for limiting the same, wherein the parts not described in detail are common general knowledge of the person skilled in the art. The protection scope of the invention is defined by the claims, and any equivalent changes based on the technical teaching of the invention are also within the protection scope of the invention.
Claims (10)
1. The miniature solar blind ultraviolet image intensifier tube is characterized by comprising an input light window (1), a conductive bottom film (2), an ultraviolet photocathode (3), a metal ceramic structure tube shell (4), a microchannel plate assembly (5) and a fluorescent screen assembly (6); the photoelectric conversion device comprises an input light window (1), a conductive base film (2) and a ultraviolet photocathode (3), wherein the conductive base film (2) is used for realizing charge supplement after photoelectrons are emitted by the photocathode, the ultraviolet photocathode (3) is used for absorbing solar blind ultraviolet signals and emitting photoelectrons with the number proportional to the intensity of the input signals, a metal ceramic structure tube shell (4) is used for maintaining a high vacuum environment in an image intensifier tube and introducing electric signals, and a fluorescent screen assembly (6) is used for receiving the photoelectrons multiplied by a microchannel plate assembly (5) and converting the electric signals into optical signals; the luminescent screen assembly (6) and the metal ceramic structure tube shell (4) are welded into a sealing structure through a metal welding process.
2. The miniaturized solar blind ultraviolet image intensifier tube according to claim 1, characterized in that said input optical window (1) is made of quartz or glass material, and the transmittance of the wave band of 220 nm-280 nm is better than 85%; the input light window (1) is divided into a central effective detection area and an edge sealing electrode area, the central effective detection area sequentially covers the conductive base film (2) and the ultraviolet photocathode (3), and the edge sealing electrode area covers the sealing electrode film material.
3. The miniaturized solar blind ultraviolet image intensifier tube according to claim 1, characterized in that said conductive bottom film (2) is a metal simple substance or composite metal film attached to the effective area of the inner surface of the input light window (1), and the area resistance is less than 10 7 The comprehensive transmittance of the solar blind ultraviolet band of omega/≡,220 nm-280 nm is better than 50%.
4. The miniaturized solar blind ultraviolet image intensifier tube according to claim 1, characterized in that the ultraviolet photocathode (3) film is a solar blind ultraviolet photocathode film prepared by passing through a conductive base film.
5. The miniaturized solar blind ultraviolet image intensifier tube according to claim 1, characterized in that said metal ceramic structured tube shell (4) is made of multi-layer metal electrode ring, ceramic ring and solder by brazing, wherein the metal material is kovar alloy, and the ceramic ring material is 95% Al 2 O 3 The ceramic, brazing solder piece (11) is silver-copper solder, copper solder or palladium-silver-copper solder with the thickness of 0.05 mm-0.1 mm.
6. A miniaturized solar blind ultraviolet image intensifier tube according to claim 1, characterized in that said microchannel plate assembly (5) is a combination of more than two microchannel plates.
7. A miniaturized solar blind ultraviolet image intensifier tube according to claim 1, characterized in that said luminescent screen assembly (6) is made of a metallic conductive aluminium film (13) after a layer of phosphor (14) is made on the base of the optical fibre panel seal (15).
8. A miniaturized solar blind ultraviolet image intensifier tube according to claim 7, characterized in that said luminescent screen assembly (6) output window material is an optical fiber panel, and is sealed with a metal kovar sealing plate by a low melting point glass sealing process, and the air tightness requirement leakage rate of the optical fiber panel sealing member (15) is better than 1.0 x 10 -10 mbar·l/s。
9. The miniaturized solar blind ultraviolet image intensifier tube according to claim 1, wherein the miniaturized solar blind ultraviolet image intensifier tube is used for detecting signals of solar blind ultraviolet band, an effective detection area is a photosensitive surface with a diameter not smaller than 10mm, and the outline dimension of the ultraviolet image intensifier tube is not larger than phi 25mm x 15mm.
10. A method for manufacturing a miniaturized solar blind ultraviolet image intensifier tube according to any of claims 1-9, characterized in that it comprises the following steps:
step A: sequentially completing assembly of the kovar alloy part (10), the solder piece (11) and the ceramic ring (12), putting the assembled assembly into a vacuum furnace, heating to 860 ℃, preserving heat for 2 hours, naturally cooling to room temperature, taking out the metal ceramic structure tube shell (4), melting the solder piece (11) in the heat preservation process, and brazing the kovar metal part (10) and the ceramic ring (12) together to form the metal ceramic structure tube shell (4);
and (B) step (B): the input light window (1) is cleaned and then is matched with an evaporation mould to be placed into an electron beam evaporation table for vacuumizing operation, and the vacuum degree is better than 3.0x10 -3 Starting to evaporate nichrome after Pa, setting the evaporation rate to be 0.1-0.2 nm/s, setting the thickness to be 9-10 nm, completing the manufacture of the conductive base film (2) after the set value is reached, deflating the electron beam evaporation table, and taking out the input light window (2);
step C: the extracted input optical window (2) is matched with a new evaporation mould to be placed into an electron beam evaporation table for vacuumizing operation until the vacuum degree is better than 3.0 multiplied by 10 -3 Starting an evaporation procedure when Pa, firstly, evaporating a chromium film, setting the evaporation rate to be 0.5-1 nm/s, setting the thickness to be 200-300 nm, finishing the preparation of the chromium film when the thickness of the chromium film reaches a set value, then evaporating a gold film on the surface of the chromium film, setting the evaporation rate to be 0.5-1 nm/s, setting the thickness to be 400-600 nm, finishing the preparation of a sealing electrode (7) when the thickness of the gold film reaches the set value, deflating an electron beam evaporation table, and taking out an input optical window (2);
step D: the two micro-channel plates are combined into a micro-channel plate assembly (5) according to the direction of the inclined chamfer angle of the channel;
step E: coating fluorescent powder on the upper surface of an optical fiber panel sealing member (15) to form a fluorescent powder layer (14), reinforcing the optical fiber panel sealing member by using reinforcing liquid, and finally placing the optical fiber panel sealing member (15) coated with the fluorescent powder layer (14) into an electron beam evaporation table for vacuumizing until the vacuum degree is better than 3.0 multiplied by 10 -3 Starting an evaporation procedure in Pa, firstly evaporating an aluminum film, setting the evaporation rate to be 0.5-1 nm/s, setting the thickness to be 90-120 nm, finishing the manufacture of the conductive aluminum film (13) after the set value is reached, deflating an electron beam evaporation table, and taking out a fluorescent screen assembly (6);
step F: the metal ceramic structure tube shell (4) and the fluorescent screen assembly (6) are welded in a sealing way by using an argon arc welding process, and the leak rate is better than 1.0 multiplied by 10 -10 mbar.l/s; then the metal ceramic structure tube shell (4) is filled, and the metal clamping ring is utilized to compact the solid edge (8) of the micro-channel plate assembly for fixing, so that the effective area (9) of the micro-channel plate assembly and the fluorescent screen assembly (6) are aligned in the metal ceramic structure tube shell (4) in the middle;
step G: the assembled metal ceramic structural tube shell (4) and the input light window (1) which is manufactured by the conductive bottom film (2) and the sealing electrode (7) are respectively filled into a tube shell baking cavity and a photocathode manufacturing cavity of special vacuum transferring and sealing equipment, the tube shell baking cavity and the photocathode manufacturing cavity are synchronously filled with the input light window (1) with the photocathode manufacturing cavity, and the ultraviolet photocathode (3) manufacturing material is vacuumized through a vacuum cavity until the vacuum degree reaches 1.0 multiplied by 10 -4 After Pa, baking and exhausting the metal ceramic structure tube shell (4), the alkali metal evaporation source and the input light window (1) at a high temperature, keeping the temperature at 310 ℃ for 15 hours, then starting to cool, and after the temperature is cooled to room temperature, carrying out electronic cleaning on the microchannel plate assembly;
step H: after the step G is completed, the temperature is increased to the manufacturing temperature of the photocathode, a layer of photocathode with photoelectric emission in the wavelength range of 220-280 nm is manufactured on the surface of the conductive base film (2) of the input optical window (1), after the photocathode is manufactured, the manufactured input optical window (1) is transferred to the position right above the metal ceramic structure tube shell (4) in the tube shell baking cavity by using a mechanical transfer device of vacuum transfer equipment, and falls down, so that the input optical window (1) and the metal ceramic structure tube shell (4) are sealed, then the vacuum transfer and sealing equipment is cooled to the room temperature, and the solar blind ultraviolet image intensifier tube is taken out.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311239916.8A CN117293002A (en) | 2023-09-24 | 2023-09-24 | Miniaturized solar blind ultraviolet image intensifier tube and preparation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311239916.8A CN117293002A (en) | 2023-09-24 | 2023-09-24 | Miniaturized solar blind ultraviolet image intensifier tube and preparation method thereof |
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| CN117293002A true CN117293002A (en) | 2023-12-26 |
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|---|---|---|---|
| CN202311239916.8A Pending CN117293002A (en) | 2023-09-24 | 2023-09-24 | Miniaturized solar blind ultraviolet image intensifier tube and preparation method thereof |
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| Country | Link |
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| CN (1) | CN117293002A (en) |
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2023
- 2023-09-24 CN CN202311239916.8A patent/CN117293002A/en active Pending
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