CN108022819A - A kind of high-gain, high resolution, the production method of heavy caliber image intensifier tube - Google Patents
A kind of high-gain, high resolution, the production method of heavy caliber image intensifier tube Download PDFInfo
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- CN108022819A CN108022819A CN201711296397.3A CN201711296397A CN108022819A CN 108022819 A CN108022819 A CN 108022819A CN 201711296397 A CN201711296397 A CN 201711296397A CN 108022819 A CN108022819 A CN 108022819A
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- cathode
- image intensifier
- production method
- high resolution
- heavy caliber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/50—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output
- H01J31/506—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output tubes using secondary emission effect
- H01J31/507—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output tubes using secondary emission effect using a large number of channels, e.g. microchannel plates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
Abstract
The invention discloses a kind of high-gain,High resolution,The production method of heavy caliber image intensifier tube,By cathode flange disk,Anode flange disk,Mounting ring,Contact four kinds of kovar alloy metal working parts of ring form tube shell with ceramic cylinder by soldering,In tube shell upper end,Cathode flange disk passes through one piece of major diameter cathode panel of indium stannum alloy sealing-in (effective diameter >=φ 40mm),Plating is formed with the metal layer with tube shell sealing-in on the big step of cathode panel,Form cathode input window,One layer of conductance layer substrate of pre-production on the inside small stair face of cathode panel,One layer of photocathode for there are response photoelectron emissions to 360nm~800nm spectral regions is made again,The a piece of major diameter anode plate output window (effective diameter >=φ 40mm) with fluorescent screen is welded in the lower end of tube shell,The MCP of 1 elongated channel is installed between cathode input window and anode plate output window；Solve image intensifier tube high-gain and the contradiction of high resolution, realize the effect do not lost resolving power and greatly improve gain.
Description
Technical field
The invention mainly relates to a kind of high-gain, high resolution, heavy caliber image intensifier tube production method.For measure and
Study the spy such as the detection of high speed fine particle or material high speed, the issue of the time-space resolution power of transient changing process, power spectrum, intensity judgement
Property.It can be used for other large-scale weak light detections and imaging system and platform.
Background technology
Image intensifier tube belongs to electrovacuum image device.Theory and practice shows that the photocathode based on photoemission principle is true
Casement picture pipe has the function of spectrum conversion function, brightness enhancing, high speed imaging etc., in addition to well-known military use, in original
It is sub can have in fast-response, the super fast response field such as industry, laser-produced fusion, bioengineering and ballistic research it is irreplaceable important
Effect.For detection for high speed, slight photo-electric signal, there is the advantage that quantum efficiency height, high gain, response time are short.
From optical theory, the diminution of optical imagery area, is necessarily accompanied with the reduction of imaging light energy and information content.
This component influences to faint optical signal imaging is especially prominent, and high speed, transient process generally all have humble illumination environment, micro-
The characteristics of time sense imaging of low light signals, nanosecond or picosecond, therefore for the core device of transient state imaging detection system
For part image intensifier tube, it is necessary to be provided simultaneously with the property such as the image-input face of bigger, higher gain, higher spatial resolution
Can just meet the needs of transient changing process study, test.
Heavy caliber, high-gain, high resolution picture reinforced pipe have begun to the research and survey applied to High-speed transient process at present
Examination field.It is such to require to use heavy caliber image input windows as pipe, target emanation energy can be more effectively collected, is caught
More target informations；Using microchannel plate (microchannel plate is referred to as MCP) as electron multiplier, the work(of brightness enhancing is realized
Energy.But as pipe performance because the MCP type electron multiplications technology of use is different and difference, be especially embodied in gain and resolving power
On energy.
1) list MCP electron multiplication technologies：With reference to Fig. 1, using 1 routine MCP, MCP under normal voltage (800V), gain
It can only achieve 102~103Left and right, resolving power generally can reach 38lp/mm to 40lp/mm or so, such as further improve MCP voltages
To improve gain, the adverse effect such as image forming tube dark background increase, resolving power decline can be made, does not reach technical requirements；
2) double MCP electron multiplications technologies：With reference to Fig. 2, using the double MCP electron multiplications similar to domestic and international high-gain device
System structure, installs 2 MCP between photocathode and fluorescent screen, more than two orders of magnitude reaches although can improve gain
104~105Left and right, but the problem of inevitably bring resolving power to be greatly reduced 50%, while reliability is less than monolithic MCP's
As pipe, technical requirements are not reached yet.
The content of the invention
The main task and purpose of the present invention is to be difficult to realize at the same time on image intensifier tube according to high-gain and high resolution
Technological deficiency, specially design a kind of high-gain, high resolution, heavy caliber image intensifier tube, can hardly lose resolving power
In the case of, achieve the purpose that to greatly improve product gain, solve high-gain and the contradiction of high resolution, effectively improve image intensifying
Pipe is detected in high speed fine particle, the image quality in transient study field, meets requirement.
To achieve the above objectives, the present invention uses following technical scheme：
A kind of high-gain, high resolution, the production method of heavy caliber image intensifier tube, by cathode flange disk, anode flange disk,
Mounting ring, contact four kinds of kovar alloy metal working parts of ring and ceramic cylinder form tube shell by soldering, in tube shell upper end, cathode
Ring flange is by one piece of major diameter cathode panel of indium stannum alloy sealing-in (effective diameter >=φ 40mm), on the big step of cathode panel
Plating is formed with the metal layer with tube shell sealing-in, forms cathode input window, the pre-production on the inside small stair face of cathode panel
One layer of conductance layer substrate, then one layer of photocathode for having response photoelectron emissions to 360nm~800nm spectral regions is made,
The a piece of major diameter anode plate output window (effective diameter >=φ 40mm) with fluorescent screen is welded in the lower end of tube shell, defeated in cathode
Enter to install the MCP of 1 elongated channel between window and anode plate output window.
Further, the MCP of the elongated channel is the porous template made of more glass fiber single filament materials arrange
Shape electron multiplication element.
Further, a diameter of φ 50mm of the MCP of the elongated channel, passage length 0.5mm or so, passage length is with leading to
Road aperture ratio reaches the gain of more than 60: 1,900V plate voltage, currents not less than 5000.
Further, the material of the ceramic cylinder is A-95 aluminium oxide ceramics.
Further, the cathode flange disk, anode flange disk, mounting ring, contact four kinds of kovar alloy metal working parts of ring
It is brazed to form tube shell by weld tabs with ceramic cylinder.
Further, the weld tabs is silver-bearing copper palldium alloy packing ring, and thickness is 0.04mm~0.10mm.
Further, the cathode panel, anode plate output window are made of optical fiber window material.
Further, the conductance layer surface resistance is 900~1300 Ω/.
Further, the material of the photocathode is CsNa2KSb.
Further, 1 elongated channel is installed with opening trim ring between the cathode input window and anode plate output window
MCP.
The present invention is proved by practical application：The purpose of development is fully achieved；The main performance of image intensifier tube after tested：It is cloudy
Very effective diameter is not less than 10 not less than 40mm, gain5, equivalent background illumination be not more than 2.5 × 10-7Lx, central space are differentiated
Not less than 45lp/mm, reach the advanced level of international similar product.
Compared with prior art, the invention has the advantages that：
Solve high-gain and the contradiction of high resolution, realize and reach significantly in the case where hardly losing resolving power
The technique effect of product gain is improved, effectively improves image intensifier tube in the detection of high speed fine particle, the imaging in transient study field
Quality.
Brief description of the drawings
Below in conjunction with the accompanying drawings, the implementation to the present invention is described in further detail.
Fig. 1 is existing list MCP image intensifier tube basic structure schematic diagrams.
Fig. 2 is existing double MCP image intensifier tubes basic structure schematic diagrams.
Fig. 3 is elongated channel MCP image intensifier tube concrete structure schematic diagrams of the present invention.
Fig. 4 is the process flow chart of embodiment of the present invention.
Fig. 5 is shell sealing-in schematic diagram of the present invention.
Fig. 6 is that cathode panel of the present invention is coated with metal layer schematic diagram.
Fig. 7 is cathode panel plating conductance layer process flow chart of the present invention.
Fig. 8 is that cathode flange disk of the present invention fills, dissolves indium stannum alloy schematic diagram.
Fig. 9 is that anode plate of the present invention is welded and elongated channel MCP assembling schematic diagrams.
Figure 10 is elongated channel MCP platings deielectric-coating process flow chart of the present invention.
Figure 11 is elongated channel MCP platings deielectric-coating schematic diagram of the present invention.
Figure 12 is the present invention as tube cathode makes schematic diagram.
Indicated in figure：1- cathode panels, 2- indium stannum alloys, 3- cathode flange disks, 4- ceramic cylinders, 5- contact rings, 6- openings
Trim ring, 7- mounting rings, the double MCP of 8-MCP, 8a- mono- MCP, 8b-, 9- ceramic cylinders, 10- weld tabs, 11- anode flange disks, 12- solders,
13- anode plate output windows, 14- metal layers, 15- cathodes make cavity, 16- mechanical delivery devices, 17- exhaust passages, 18- alkali
Metal evaporator, 19- apparatus for producing tube, 20- sealing flanges.
Embodiment
Technical scheme is described in further details with reference to specific embodiment, but the present invention does not limit to
In the technical solution of following embodiments.
Embodiment
It is respectively as shown in Figure 1 and Figure 2 list MCP image intensifier tubes, double MCP image intensifier tubes, is all the prior art.
Technical scheme is illustrated with reference to Fig. 3, Fig. 4：By cathode flange disk 3, contact ring 5,7 and of mounting ring
11 4 kinds of kovar alloy metal working parts of anode flange disk form tube shell with ceramic cylinder 4,9 by the soldering of weld tabs 10, in tube shell
Upper end, cathode flange disk 3 are coated with the big step of cathode panel 1 by 2 sealing-in of indium stannum alloy, one piece of major diameter cathode panel 1
Have and the metal layer of tube shell sealing-in 14, composition cathode input window, the pre-production one on the inside small stair face of cathode panel 1
Layer conductance layer substrate, conductance layer surface resistance is 900~1300 Ω/, then makes one layer and have to 360nm~800nm spectral regions
The photocathode (CsNa2KSb) of photoelectron emissions is responded, a piece of major diameter anode with fluorescent screen is welded in the lower end of tube shell
Panel output window 13,1 a diameter of φ 50mm, elongated channel length are installed between input window and output window with opening trim ring 6
Special MCP8.
11 4 kinds of the cathode flange disk 3, contact ring 5, mounting ring 7 and anode flange disk kovar alloy metal working part materials
Material is kovar alloy, material trademark 4J34；The material of ceramic cylinder 4,9 is A-95 aluminium oxide ceramics；Cathode panel 1, anode surface
Plate 13 is optical fiber window material general in image intensifier and electrovacuum industry；Weld tabs 10 is silver-bearing copper palldium alloy gasket thickness
For 0.04mm~0.10mm；MCP8 is the porous type tabular electron multiplication member made of more glass fiber single filament materials arrange
Part, is produced, a diameter of φ 50mm, passage length 0.5mm or so, passage length and passage by professional production producer by national standard
Aperture ratio (L/dc) reaches the gain of more than 60: 1,900V plate voltage, currents not less than 5000.And the conventional a diameter of φ of MCP
25mm~φ 33mm, passage length 0.3mm or so, passage length are under 55: 1,800V plate voltages with passage aperture ratio (L/dc)
Current gain is not less than 1600.
The manufacture craft of the present invention：
A, with reference to Fig. 5, in 11 4 cathode flange disk 3, contact ring 5, mounting ring 7 and anode flange disk kovar alloy metal working
A silver-bearing copper palldium alloy weld tabs 10 is respectively filled between part and ceramic cylinder 4,9, the component installed is put into vacuum drying oven, temperature is raised to
1100 DEG C, room temperature is naturally cooling to when insulation 2.5 is small afterwards, the good shell of sealing-in is taken out, (in insulating process, due to weld tabs 10
Fusing, by cathode flange disk 3, contact ring 5,11 4 kinds of kovar alloy metal working parts of mounting ring 7 and anode flange disk and ceramic cylinder
4th, 9 seal, form shell shell)；
B, with reference to Fig. 6, cathode panel 1 is put into vacuum coating equipment, when the vacuum of coating machine reaches 5 × 10-5During support, beat
Electron gun is driven, using the chromium evaporation source in electron-beam evaporator heating crucible, metal is coated with the big step of cathode panel 1
Film, evaporation rate are set asThickness is set asWhen every layer thickness reaches setting value, it is coated with
Finish, deflate to coating machine cavity, when air pressure is equal to normal pressure, take out cathode panel 1；
C, with reference to Fig. 7, cathode conductance layer substrate is coated with, by a certain amount of nichrome (Ni:Cr=30%:70%) fritter
Thin slice is put into crucible, the cathode panel 1 with metal film is put into the vacuum coating equipment evaporation pylon tray for being coated with cathode substrate
In, vacuumize；Pressure reaches 5 × 10-5During support, start plated film, thicknesses of layers is set as corresponding with 300~900 Ω of surface resistance/
Thickness, evaporation rate is set asWhen thickness reaches setting value, it is coated with to finish and coating machine cavity is put
Gas, when air pressure is equal to normal pressure, takes out cathode panel 1；
D, with reference to Fig. 8, by a certain amount of indium stannum alloy (In:Sn=55%:45%) 2 particle inserts cathode flange disk 3
Groove in, shell is put into vacuum drying oven, 5 × 10-5Vacuum drying oven is heated up under the vacuum condition of support, heat shell and melt indium
The particle of tin alloy 2, is filled in the groove of cathode flange disk 3, under 500 DEG C of temperature conditionss with making 2 even compact of indium stannum alloy
Keep the temperature 12 it is small when after be down to room temperature naturally, taking-up shell；
E, with reference to Fig. 9, it is welded a piece of major diameter with fluorescent screen with solder 12 on the lower-end anode ring flange 11 of shell
Anode plate output window 13, welding and assembling method is consistent with conventional image intensifier anode plate welding and assembling method, forms band anode output window
Shell component；
F, with reference to Figure 10, Figure 11, the magnesium oxide particle of a certain amount of 1~3mm of granularity is put into coating machine crucible,
MCP 8 is put into the evaporation pylon tray of vacuum coating equipment, is vacuumized；Pressure reaches 5 × 10-5During support, in the input terminal of MCP 8
Plated film, thicknesses of layers L are set as 10~200 μm, and evaporation rate is set asWhen thickness reaches setting value, it is coated with
Finish and deflate to coating machine cavity, when air pressure is equal to normal pressure, take out MCP8；
G, with reference to Fig. 9, the special MCP8 of elongated channel length after being cleaned with 99% EtOH Sonicate, loads in shell,
The opening trim ring for being 1mm~1.2mm with thickness compresses, material 0Cr19Ni9；
H, with reference to Figure 12, by the cathode panel 1 for having plated metal layer and conductance layer and MCP 8 is installed with anode output window 13
Shell loads apparatus for producing tube 19, and connection sealing flange 20 is put into the transfer cavity 14 of photocathode making apparatus, with equipment
Band cathode panel 1, is sent into cathode and makes cavity 15, the upper end of alkali metal evaporator 18 is placed in, through row by mechanical delivery device 16
Gas passage 17 vacuumizes, and when 350 DEG C of exhausts 12 are small, vacuum reaches 10-8During below mbar, 50 DEG C are cooled to, MCP 8 is carried out
Electron scrubbing, cleans total amount with water and is not less than 200 μ Ah；
I, with reference to Figure 12, after completing H steps, temperature is risen to the temperature (200 DEG C) of cathode making, with conductive layer
Cathode panel 3 small stair on, make one layer to there is the photocathode of photoemission in 360nm~800nm wave-length coverages
(CsNa2KSb), after photocathode completes, the temperature of equipment is maintained at 110 DEG C~130 DEG C, is passed using vacuum machine
Delivery device 16 will make the cathode panel 1 of photocathode film layer, is delivered to the top of apparatus for producing tube 19, gently puts down,
Indium stannum alloy 2 with being melted in 3 groove of cathode flange disk on shell seals, and is afterwards down to the temperature of cathode making apparatus
Room temperature, takes out Manufactured image intensifier tube.
Key technology of the present invention in making is：In cathode input window and anode output window, only load 1 lengthening
The special MCP of passage, reliability are higher than the picture pipe using 2 MCP.Successfully solve the gain of heavy caliber picture pipe and improve two numbers
While magnitude, technical barrier that resolving power index remains unchanged.Produce the high-gain met the requirements, high resolution, great Kou
Footpath image intensifier tube.
Claims (10)
1. a kind of high-gain, high resolution, the production method of heavy caliber image intensifier tube, it is characterised in that by cathode flange disk
(3), anode flange disk (11), mounting ring (7), contact (5) four kinds of kovar alloy metal working parts of ring and ceramic cylinder (4) pass through soldering
Tube shell is formed, in tube shell upper end, cathode flange disk (3) passes through one piece of major diameter cathode panel (1) of indium stannum alloy (2) sealing-in
(effective diameter >=φ 40mm), on the big step of cathode panel (1) plating be formed with and the metal layer of tube shell sealing-in (14), form cloudy
Pole input window, one layer of conductance layer substrate of pre-production on the inside small stair face of cathode panel (1), then make one layer it is right
360nm~800nm spectral regions have the photocathode of response photoelectron emissions, and a piece of band fluorescent screen is welded in the lower end of tube shell
Major diameter anode plate output window (13) (effective diameter >=φ 40mm), in cathode input window and anode plate output window (13)
Between install 1 elongated channel MCP (8).
2. a kind of high-gain according to claim 1, high resolution, the production method of heavy caliber image intensifier tube, its feature
It is, the MCP (8) of the elongated channel is the porous type tabular electron multiplication made of more glass fiber single filament materials arrange
Element.
3. a kind of high-gain according to claim 1, high resolution, the production method of heavy caliber image intensifier tube, its feature
It is, MCP (8) a diameter of φ 50mm of the elongated channel, passage length 0.5mm, passage length reach with passage aperture ratio
More than 60: 1.
4. a kind of high-gain according to claim 1, high resolution, the production method of heavy caliber image intensifier tube, its feature
It is, the material of the ceramic cylinder (4) is A-95 aluminium oxide ceramics.
5. a kind of high-gain according to claim 1, high resolution, the production method of heavy caliber image intensifier tube, its feature
It is, the cathode flange disk (3), anode flange disk (11), mounting ring (7), contact (5) four kinds of kovar alloy metal working parts of ring
Tube shell is formed by weld tabs (10) soldering with ceramic cylinder (4).
6. a kind of high-gain according to claim 5, high resolution, the production method of heavy caliber image intensifier tube, its feature
It is, the weld tabs (10) is silver-bearing copper palldium alloy packing ring, and thickness is 0.04mm~0.10mm.
7. according to a kind of any high-gains of claim 1-6, high resolution, heavy caliber image intensifier tube production method,
It is characterized in that, the cathode panel (1), anode plate output window (13) are made of optical fiber window material.
8. according to a kind of any high-gains of claim 1-6, high resolution, heavy caliber image intensifier tube production method,
It is characterized in that, the conductance layer surface resistance is 900~1300 Ω/.
9. according to a kind of any high-gains of claim 1-6, high resolution, heavy caliber image intensifier tube production method,
It is characterized in that, the material of the photocathode is CsNa2KSb.
10. according to a kind of any high-gains of claim 1-6, high resolution, heavy caliber image intensifier tube production method,
It is characterized in that, 1 elongated channel is installed with opening trim ring (6) between the cathode input window and anode plate output window (13)
MCP (8).
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| CN201711296397.3A CN108022819A (en) | 2017-12-08 | 2017-12-08 | A kind of high-gain, high resolution, the production method of heavy caliber image intensifier tube |
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| CN201711296397.3A CN108022819A (en) | 2017-12-08 | 2017-12-08 | A kind of high-gain, high resolution, the production method of heavy caliber image intensifier tube |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111463099A (en) * | 2020-05-09 | 2020-07-28 | 北方夜视技术股份有限公司 | Near-contact focusing type photomultiplier |
| CN111883413A (en) * | 2020-07-23 | 2020-11-03 | 北方夜视技术股份有限公司 | Close-contact type micro-channel plate type photomultiplier with large opening area ratio |
| CN112863977A (en) * | 2021-01-14 | 2021-05-28 | 北方夜视技术股份有限公司 | High-resolution low-light-level image intensifier tube |
| CN112885682A (en) * | 2021-01-14 | 2021-06-01 | 北方夜视技术股份有限公司 | Conductive and sealing film for multi-alkali photocathode substrate and preparation method thereof |
| CN113053708A (en) * | 2021-01-14 | 2021-06-29 | 北方夜视技术股份有限公司 | Cathode flange plate for realizing close-proximity focusing of super-second-generation image intensifier and processing method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111463099A (en) * | 2020-05-09 | 2020-07-28 | 北方夜视技术股份有限公司 | Near-contact focusing type photomultiplier |
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| CN111883413A (en) * | 2020-07-23 | 2020-11-03 | 北方夜视技术股份有限公司 | Close-contact type micro-channel plate type photomultiplier with large opening area ratio |
| CN111883413B (en) * | 2020-07-23 | 2022-07-08 | 北方夜视技术股份有限公司 | Close-contact type micro-channel plate type photomultiplier with large opening area ratio |
| CN112863977A (en) * | 2021-01-14 | 2021-05-28 | 北方夜视技术股份有限公司 | High-resolution low-light-level image intensifier tube |
| CN112885682A (en) * | 2021-01-14 | 2021-06-01 | 北方夜视技术股份有限公司 | Conductive and sealing film for multi-alkali photocathode substrate and preparation method thereof |
| CN113053708A (en) * | 2021-01-14 | 2021-06-29 | 北方夜视技术股份有限公司 | Cathode flange plate for realizing close-proximity focusing of super-second-generation image intensifier and processing method |
| CN113053708B (en) * | 2021-01-14 | 2022-04-29 | 北方夜视技术股份有限公司 | Cathode flange plate for realizing close-proximity focusing of super-second-generation image intensifier and processing method |
| CN112885682B (en) * | 2021-01-14 | 2022-07-26 | 北方夜视技术股份有限公司 | Conductive and sealing film for multi-alkali photoelectric cathode substrate and preparation method thereof |
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