CN117222873A - 热电堆型传感器和传感器阵列 - Google Patents

热电堆型传感器和传感器阵列 Download PDF

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Publication number
CN117222873A
CN117222873A CN202280031882.0A CN202280031882A CN117222873A CN 117222873 A CN117222873 A CN 117222873A CN 202280031882 A CN202280031882 A CN 202280031882A CN 117222873 A CN117222873 A CN 117222873A
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CN
China
Prior art keywords
type
sensor
thermopile
photonic crystal
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280031882.0A
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English (en)
Chinese (zh)
Inventor
高桥宏平
藤金正树
田中浩之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Publication of CN117222873A publication Critical patent/CN117222873A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/023—Particular leg structure or construction or shape; Nanotubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/046—Materials; Selection of thermal materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/10—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects
    • H10N10/17—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects characterised by the structure or configuration of the cell or thermocouple forming the device
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/80—Constructional details
    • H10N10/85—Thermoelectric active materials
    • H10N10/851—Thermoelectric active materials comprising inorganic compositions
    • H10N10/853—Thermoelectric active materials comprising inorganic compositions comprising arsenic, antimony or bismuth
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/80—Constructional details
    • H10N10/85—Thermoelectric active materials
    • H10N10/857—Thermoelectric active materials comprising compositions changing continuously or discontinuously inside the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G01J2005/123—Thermoelectric array

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
CN202280031882.0A 2021-05-11 2022-04-19 热电堆型传感器和传感器阵列 Pending CN117222873A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021-080449 2021-05-11
JP2021080449 2021-05-11
PCT/JP2022/018143 WO2022239610A1 (ja) 2021-05-11 2022-04-19 サーモパイル型センサ及びセンサアレイ

Publications (1)

Publication Number Publication Date
CN117222873A true CN117222873A (zh) 2023-12-12

Family

ID=84029551

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280031882.0A Pending CN117222873A (zh) 2021-05-11 2022-04-19 热电堆型传感器和传感器阵列

Country Status (5)

Country Link
US (1) US12487126B2 (https=)
EP (1) EP4339567A4 (https=)
JP (1) JPWO2022239610A1 (https=)
CN (1) CN117222873A (https=)
WO (1) WO2022239610A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110006536A (zh) * 2017-12-11 2019-07-12 松下知识产权经营株式会社 红外线传感器及其辐射热测量计红外线受光部的冷却方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022102827A (ja) * 2020-12-25 2022-07-07 パナソニックＩｐマネジメント株式会社 赤外線センサ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2748953B2 (ja) * 1993-12-13 1998-05-13 日本電気株式会社 熱型赤外線センサ
JP2009180682A (ja) * 2008-01-31 2009-08-13 Ritsumeikan 赤外線センサ
JP5569134B2 (ja) * 2010-05-10 2014-08-13 セイコーエプソン株式会社 熱型光検出装置および電子機器
WO2014168894A2 (en) 2013-04-07 2014-10-16 The Regents Of The University Of Colorado, A Body Corporate Nanophononic metamaterials
JP6311133B2 (ja) 2016-06-13 2018-04-18 パナソニックＩｐマネジメント株式会社 赤外線センサ
JP7232978B2 (ja) * 2017-12-11 2023-03-06 パナソニックＩｐマネジメント株式会社 赤外線センサおよび赤外線センサのボロメータ赤外線受光部を冷却する方法
EP3798591A4 (en) * 2018-05-22 2021-07-28 Panasonic Intellectual Property Management Co., Ltd. INFRARED SENSOR AND PHONONIC CRYSTAL
WO2020174731A1 (ja) * 2019-02-28 2020-09-03 パナソニックＩｐマネジメント株式会社 赤外線センサ、赤外線センサアレイ、及び赤外線センサの製造方法
JP7336729B2 (ja) * 2019-05-21 2023-09-01 パナソニックＩｐマネジメント株式会社 ガスセンサ
CN110514315A (zh) * 2019-09-05 2019-11-29 北京交通大学 一种基于热电半导体的双功能薄膜传感器及其制备方法
WO2021079732A1 (ja) * 2019-10-25 2021-04-29 パナソニックＩｐマネジメント株式会社 熱電変換装置、熱電変換装置の制御方法、熱電変換装置を用いて対象物を冷却及び／又は加熱する方法及び電子デバイス

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110006536A (zh) * 2017-12-11 2019-07-12 松下知识产权经营株式会社 红外线传感器及其辐射热测量计红外线受光部的冷却方法
CN110006536B (zh) * 2017-12-11 2024-06-28 松下知识产权经营株式会社 红外线传感器及其辐射热测量计红外线受光部的冷却方法

Also Published As

Publication number Publication date
US12487126B2 (en) 2025-12-02
WO2022239610A1 (ja) 2022-11-17
JPWO2022239610A1 (https=) 2022-11-17
EP4339567A1 (en) 2024-03-20
US20240068875A1 (en) 2024-02-29
EP4339567A4 (en) 2024-10-09

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