CN117207012A

CN117207012A - Processing Equipment

Info

Publication number: CN117207012A
Application number: CN202311305863.5A
Authority: CN
Inventors: 郭世锋; 徐公志; 杨勇; 孙光荣
Original assignee: Qingdao Gaoce Technology Co Ltd
Current assignee: Qingdao Gaoce Technology Co Ltd
Priority date: 2023-10-10
Filing date: 2023-10-10
Publication date: 2023-12-12

Abstract

The application relates to the technical field of electronic element manufacturing, in particular to processing equipment. The application aims to solve the problem of small application range of the wafer positioning device of the existing chamfering machine. The positioning device of the processing equipment comprises a fixing member, a first clamping assembly, a second clamping assembly and a driving assembly, wherein the first clamping assembly and the second clamping assembly are oppositely arranged along a first horizontal direction, the driving assembly is in driving connection with the first clamping assembly and the second clamping assembly and can drive the first clamping assembly and the second clamping assembly to synchronously move along the first horizontal direction to clamp a wafer, and the driving assembly can also drive the first clamping assembly and the second clamping assembly to synchronously move along the first horizontal direction in a reverse direction. The clamping assembly which is arranged oppositely and can synchronously move is adopted to clamp and position the wafer, so that the wafer clamping device can be suitable for wafers of various sizes, and the application range of the positioning device is greatly widened.

Description

Processing equipment

Technical Field

The application relates to the technical field of electronic element manufacturing, in particular to processing equipment.

Background

Semiconductor wafers are very important materials in various fields such as aerospace, optical fibers, and the like. During processing of wafers, if lapping is directly performed after the wafers are cut from the ingot, chipping is likely to occur, causing wafer scrap, and therefore chamfering of the wafers is required before lapping.

In the process of chamfering a wafer by an existing chamfering machine, the wafer in the material box needs to be transferred to a detecting device by a material taking device, and the position of the center point of the wafer is detected by the detecting device. In order to ensure the processing quality of the wafer, the extending length of the material fork of the material taking device needs to be calibrated at intervals, so that the fact that the extending length of the material fork is larger than the set extending length is avoided, when the calibration is performed, the wafer needs to be placed on the wafer positioning device, and the wafer is positioned through the wafer positioning device, however, the existing wafer positioning device can only position the wafer with a fixed size, so that the application range of the wafer positioning device is smaller, and the use experience of a user is affected.

Accordingly, there is a need in the art for a new solution to the above-mentioned problems.

Disclosure of Invention

In order to solve at least one of the problems in the prior art, namely, the technical problem of small application range of the wafer positioning device of the existing chamfering machine.

In a first aspect, the present application provides a machining apparatus comprising a housing and a positioning device mounted on the housing, the positioning device comprising a stationary member and first, second and drive assemblies mounted on the stationary member,

The first clamping assembly and the second clamping assembly are oppositely arranged along a first horizontal direction, the driving assembly is in driving connection with the first clamping assembly and the second clamping assembly and can drive the first clamping assembly and the second clamping assembly to synchronously move along the first horizontal direction in opposite directions so as to clamp a wafer, and the driving assembly can also drive the first clamping assembly and the second clamping assembly to synchronously move along the first horizontal direction in opposite directions.

In the preferred technical scheme of the processing device, a first positioning groove is formed in one side, facing the second clamping assembly, of the first clamping assembly, a second positioning groove is formed in one side, facing the first clamping assembly, of the second clamping assembly, and the first positioning groove and the second positioning groove are respectively abutted to edges of two sides of a wafer so as to clamp the wafer.

In a preferred embodiment of the above processing apparatus, the driving assembly includes a driving mechanism, a first rack extending in the first horizontal direction, a second rack and pinion extending in the first horizontal direction,

the driving mechanism is connected with the first clamping assembly and can drive the first clamping assembly to move along the first horizontal direction, the first rack and the second rack are respectively connected with the first clamping assembly and the second clamping assembly, the first rack and the second rack are distributed at intervals along the second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, and the gear is rotatably arranged on the fixing member and located between the first rack and the second rack and meshed with the first rack and the second rack.

In a preferred embodiment of the above processing apparatus, the driving mechanism includes a driving cylinder, an elastic restoring member extending in the first horizontal direction, and a pushing member connected with the first clamping assembly,

the driving cylinder is connected with the pushing member and can drive the pushing member to drive the first clamping assembly to move along the first horizontal direction away from the second clamping assembly, two ends of the elastic reset member are respectively connected with the fixing member and the pushing member, and the elastic reset member can drive the pushing member to drive the first clamping assembly to move along the first horizontal direction close to the second clamping assembly after the driving cylinder is not driven.

In the preferred technical scheme of the processing device, the fixing member is provided with a first connecting structure, the pushing member is provided with a second connecting structure, two ends of the elastic reset member are respectively connected with the first connecting structure and the second connecting structure, and the initial distance between the first connecting structure and the second connecting structure along the first horizontal direction is adjustable.

In the preferred technical scheme of the processing equipment, the second connecting structure is a connecting rod arranged along the first horizontal direction, the pushing member is provided with a mounting hole, the mounting hole penetrates through the pushing member along the first horizontal direction, the first end of the connecting rod is connected with the elastic reset member, the connecting rod is provided with a thread section at a position close to the second end of the connecting rod, the thread section penetrates through the mounting hole, the thread section is provided with an adjusting nut in threaded fit with the adjusting nut, and one side of the adjusting nut close to the first end of the connecting rod abuts against the pushing member; or alternatively

The second connection structure is a connecting rod arranged along the first horizontal direction, a mounting hole is formed in the pushing member, the first end of the connecting rod is connected with the elastic reset member, a thread section is arranged at a position, close to the second end of the connecting rod, threads matched with the thread section are arranged on the inner wall of the mounting hole, and the thread section is fixed through the threads in a threaded mode with the mounting hole.

In the preferable technical scheme of the processing equipment, the fixing member comprises a bottom plate arranged horizontally, a bearing plate arranged horizontally and a supporting column arranged vertically,

the bottom plate with the loading board is along vertical direction interval distribution just the bottom plate is located the below of loading board, bottom and the top of support column respectively with the bottom plate with loading board fixed connection or integrative setting, the loading board is used for bearing the wafer, first constant head tank with the second constant head tank is located the top of loading board, actuating mechanism installs on the bottom plate, first rack the second rack with the gear is located the bottom plate with between the loading board.

In a preferred technical solution of the above processing apparatus, the first clamping assembly includes a first clamping member and a first connecting member, the first clamping member is located above the carrier plate, the first positioning slot is provided on the first clamping member, the first connecting member is used for fixedly connecting the first clamping member with the first rack, and the driving mechanism is connected with the first connecting member; the second clamping assembly comprises a second clamping member and a second connecting member, the second clamping member is located above the bearing plate, the second positioning groove is formed in the second clamping member, and the second connecting member is used for fixedly connecting the second clamping member with the second rack.

In a preferred technical scheme of the processing device, the first connecting member comprises a first connecting plate and a first connecting column, the first connecting plate is arranged horizontally, the first connecting plate is positioned between the bottom plate and the bearing plate and is fixedly connected with the first rack, a first through hole extending along the first horizontal direction is formed in a position, corresponding to the first connecting column, of the bearing plate, the bottom end of the first connecting column is fixedly connected with or integrally arranged with the first connecting plate, the top end of the first connecting column penetrates through the first through hole and is fixedly connected with or integrally arranged with the first clamping member, and the driving mechanism is connected with the first connecting plate; the second connecting member comprises a second connecting plate and a second connecting column, wherein the second connecting plate is horizontally arranged, the second connecting plate is located between the bottom plate and the bearing plate and is fixedly connected with the second rack, the bearing plate is provided with a second through hole extending along the first horizontal direction at a position corresponding to the second connecting column, the bottom end of the second connecting column is fixedly connected with the second connecting plate or integrally arranged, and the top end of the second connecting column passes through the second through hole and is fixedly connected with the second clamping member or integrally arranged.

In the preferred technical scheme of the processing equipment, the first clamping member is provided with first hole sites, the number of the first hole sites is at least two and the first hole sites are distributed at intervals along the first horizontal direction, and the top ends of the first connecting columns are fixedly connected with the first hole sites; the second clamping component is provided with second hole sites, the number of the second hole sites is at least two and the second hole sites are distributed at intervals along the first horizontal direction, and the top ends of the second connecting columns are fixedly connected with the second hole sites.

In a preferred technical solution of the above processing apparatus, the positioning device further includes a first guiding mechanism disposed between the fixing member and the first clamping assembly, and a second guiding mechanism disposed between the fixing member and the second clamping assembly, and the first guiding mechanism and the second guiding mechanism guide the first clamping assembly and the second clamping assembly when the first clamping assembly and the second clamping assembly move, respectively.

In a preferred technical solution of the above processing apparatus, the first guiding mechanism includes a first guiding member and a second guiding member, which are matched, the first guiding member is connected with the fixing member, and the second guiding member is connected with the first clamping assembly; the second guide mechanism comprises a third guide member and a fourth guide member which are matched, the third guide member is connected with the fixing member, and the fourth guide member is connected with the second clamping assembly.

In a preferred technical solution of the above processing apparatus, the first guide member and the third guide member are guide rails extending along the first horizontal direction, and the second guide member and the fourth guide member are guide blocks adapted to the guide rails.

In a preferred embodiment of the above processing apparatus, the processing apparatus is a chamfering machine.

Under the condition of adopting the technical scheme, the positioning device of the processing equipment clamps and positions the wafer by adopting the two groups of clamping assemblies which are oppositely arranged and can synchronously move in opposite directions and synchronously move in opposite directions, so that the positioning device can be suitable for wafers with various sizes, and the application range of the positioning device is greatly improved.

Furthermore, the positioning device provided by the invention can improve the positioning accuracy by respectively arranging the first positioning groove and the second positioning groove on the first clamping assembly and the second clamping assembly to clamp and position the wafer.

Still further, the positioning device of the invention can avoid the situation that the wafer is damaged due to overlarge clamping force by adopting the elastic restoring force of the elastic restoring component to enable the first clamping component and the second clamping component to clamp the wafer.

Still further, the positioning device of the present application can be applied to more wafers with different sizes by setting the initial distance between the first connection structure and the second connection structure along the X direction to be adjustable, so that the application range of the positioning device is further improved.

Still further, the positioning device divides the vertical space into three layers of installation spaces by arranging the bottom plates and the bearing plates which are distributed at intervals along the vertical direction, thereby being convenient for the installation and arrangement of each structure.

Still further, the positioning device of the application can be suitable for more wafers with different sizes by arranging at least two first hole sites and second hole sites which are distributed at intervals on the first clamping member and the second clamping member respectively, thereby further improving the application range of the positioning device.

Drawings

The technical scheme of the present application is described below with reference to a chamfering machine and accompanying drawings. In the accompanying drawings:

FIG. 1 is a schematic view of a part of a chamfering machine according to the present application;

FIG. 2 is a schematic view of a positioning device according to the present application;

FIG. 3 is a schematic view of a portion of a positioning device according to the present application;

FIG. 4 is a schematic view of a wafer positioning and clamping device according to the present application.

List of reference numerals

1. A base; 11. a base; 12. a feeding bin support; 10. a magazine; 2. a material taking device; 3. a detection device; 4. a fixing member; 41. a bottom plate; 42. a carrying plate; 43. a support column; 411. a first connection structure; 421. a first through hole; 422. a second through hole; 5. a first clamping assembly; 51. a first clamping member; 52. a first connecting member; 511. a first positioning groove; 512. a first hole site; 521. a first connection plate; 6. a second clamping assembly; 61. a second clamping member; 62. a second connecting member; 611. a second positioning groove; 612. a second hole site; 621. a second connecting plate; 7. a drive assembly; 71. a driving mechanism; 72. a first rack; 73. a second rack; 74. a gear; 711. a driving cylinder; 712. an elastic return member; 713. a pushing member; 714. a second connection structure; 7131. a vertical push rod; 7132. a horizontal push rod; 7141. a connecting rod; 7142. an adjusting nut; 81. a first guide member; 82. a third guide member; 9. and (3) a wafer.

Detailed Description

Preferred embodiments of the present application are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are merely for explaining the technical principles of the present application, and are not intended to limit the scope of the present application. For example, although the embodiments described below are described in connection with chamfering machines, the technical solution of the present application is equally applicable to other types of processing equipment, such as thinning machines, etc., and such adjustments and changes to the application object do not depart from the principle and scope of the present application, and should be limited to the scope of the present application.

It should be noted that, in the description of the present application, terms such as "upper", "lower", "left", "right", and the like indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, which are merely for convenience of description, and do not indicate or imply that the apparatus or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Furthermore, it should be noted that, in the description of the present application, unless explicitly specified and limited otherwise, the terms "mounted," "configured," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application can be understood by those skilled in the art according to the specific circumstances.

Specifically, the application provides a chamfering machine which can conduct chamfering grinding on a wafer.

As shown in fig. 1, the chamfering machine of the present invention comprises a machine base 1, a material box 10, a material taking device 2 and a detecting device 3, wherein the material box 10 is arranged on the machine base 1, the material taking device 2 is used for storing wafers, the material taking device 2 is used for taking out the wafers in the material box 10 and transferring the wafers to the detecting device 3, and the detecting device 3 is used for detecting the center position of the wafers.

Illustratively, as shown in fig. 1, the base 1 of the chamfering machine includes a base 11 and an upper bin support 12, and a magazine 10 is fixedly mounted on the top surface of the upper bin support 12.

The material taking device 2 comprises a lifting assembly, a rotating assembly arranged on the lifting assembly and a telescopic material taking assembly arranged on the rotating assembly, wherein the telescopic material taking assembly is used for taking and placing wafers. When the wafer needs to be taken from the material box 10, the rotating assembly can rotate around the vertical axis with the telescopic material taking assembly so that the telescopic material taking assembly is aligned with the material box 10, the lifting assembly can move up and down with the rotating assembly and the telescopic material taking assembly so that the telescopic material taking assembly is aligned with the wafer to be extracted, the telescopic material taking assembly can take down the wafer, and then the rotating assembly rotates to a position aligned with the detection device 3 with the telescopic material taking assembly, so that the wafer is placed on the detection device 3 for detection.

The telescopic material taking assembly mainly comprises a material fork and a telescopic driving mechanism, wherein the telescopic driving mechanism is used for driving the material fork to move along the horizontal direction, and the extending length of the material fork needs to be calibrated at intervals so as to ensure that the telescopic material taking assembly can accurately take and put wafers.

In the prior art, when the extending length of the material fork needs to be calibrated, the wafer 9 is placed on the wafer positioning device to be positioned, then the material taking device 2 takes down the wafer 9 on the wafer positioning device and transfers the wafer 9 to the detecting device 3, the detecting device 3 detects whether the center point of the wafer 9 is offset, if the center point of the wafer 9 is offset, the extending length of the material fork is inaccurate, and compensation and calibration are needed.

As known from the background art, the existing wafer positioning device can only position a wafer with a fixed size, and has a limited application range.

The invention provides a positioning device which can be used on the chamfering machine, and can be used for positioning wafers with different sizes, so that the application range is greatly improved. Wherein the positioning means may be mounted on the upper bin support 12.

As shown in fig. 2 to 4, the positioning device of the present invention includes a fixing member 4, a first clamping assembly 5, a second clamping assembly 6, and a driving assembly 7 mounted on the fixing member 4.

Wherein the first clamping assembly 5 and the second clamping assembly 6 are oppositely disposed along a first horizontal direction (X direction as shown in fig. 2), the driving assembly 7 is in driving connection with the first clamping assembly 5 and the second clamping assembly 6, and the driving assembly 7 can drive the first clamping assembly 5 and the second clamping assembly 6 to synchronously move along the first horizontal direction in a opposite direction so as to clamp and position the wafer, and the driving assembly 7 can also drive the first clamping assembly 5 and the second clamping assembly 6 to synchronously move reversely along the first horizontal direction.

When the wafer 9 needs to be clamped, the wafer 9 is placed between the first clamping component 5 and the second clamping component 6, then the driving component 7 drives the first clamping component 5 to move leftwards in the X direction, the second clamping component 6 simultaneously moves rightwards in the X direction, namely, the first clamping component 5 and the second clamping component 6 synchronously move towards each other, and when the first clamping component 5 and the second clamping component 6 respectively abut against the right edge and the left edge of the wafer 9, the wafer 9 is clamped, so that the positioning of the wafer 9 is realized, when the wafer 9 needs to be removed, the driving component 7 drives the first clamping component 5 to move rightwards in the X direction, and the second clamping component 6 simultaneously moves leftwards in the X direction, namely, the first clamping component 5 and the second clamping component 6 synchronously move reversely.

Preferably, as shown in fig. 2 and 4, a side of the first clamping assembly 5 facing the second clamping assembly 6 is provided with a first positioning groove 511, a side of the second clamping assembly 6 facing the first clamping assembly 5 is provided with a second positioning groove 611, and the first positioning groove 511 and the second positioning groove 611 respectively abut against edges of two sides of the wafer 9 to clamp the wafer 9.

The first positioning groove 511 is disposed towards one side of the second positioning groove 611, and the second positioning groove 611 is disposed towards one side of the first positioning groove 511, so that the wafer 9 is clamped and positioned by the first positioning groove 511 and the second positioning groove 611, thereby improving positioning accuracy. Wherein, the first positioning groove 511 and the second positioning groove 611 are preferably provided in a V shape.

Preferably, as shown in fig. 2 and 3, the driving assembly 7 of the present invention includes a driving mechanism 71, a first rack gear 72 extending in a first horizontal direction, a second rack gear 73 extending in the first horizontal direction, and a gear 74.

Wherein, actuating mechanism 71 is connected with first clamping assembly 5 and can drive first clamping assembly 5 to remove along first horizontal direction, and first rack 72 and second rack 73 are connected with first clamping assembly 5 and second clamping assembly 6 respectively, and first rack 72 and second rack 73 are along second horizontal direction (Y direction as shown in fig. 2) interval distribution, and second horizontal direction is perpendicular with first horizontal direction, and gear 74 rotatable mounting is on fixed member 4 and is located between first rack 72 and second rack 73 and with first rack 72 and second rack 73 meshing.

Illustratively, when the driving mechanism 71 drives the first clamping assembly 5 to move leftwards in the X direction, the first rack 72 moves leftwards in the X direction along with the first clamping assembly 5, the first rack 72 drives the gear 74 to rotate clockwise, the gear 74 drives the second rack 73 to move rightwards in the X direction, the second rack 73 drives the second clamping assembly 6 to move rightwards in the X direction, so that the first clamping assembly 5 and the second clamping assembly 6 synchronously move towards each other in the X direction, whereas when the driving mechanism 71 drives the first clamping assembly 5 to move rightwards in the X direction, the first rack 72 moves rightwards in the X direction along with the first clamping assembly 5, the first rack 72 drives the gear 74 to rotate anticlockwise, the gear 74 drives the second rack 73 to move leftwards in the X direction, and the second rack 73 drives the second clamping assembly 6 to move leftwards in the X direction, so that the first clamping assembly 5 and the second clamping assembly 6 synchronously move reversely in the X direction.

It should be noted that, in practical applications, those skilled in the art may set the driving mechanism 71 as a motor driving mechanism, or as a hydraulic driving mechanism, or further set the driving mechanism of a cylinder, etc., and such modifications and changes to the specific structure of the driving mechanism 71 do not deviate from the principle and scope of the present invention, and should be limited to the protection scope of the present invention.

Preferably, as shown in fig. 2 and 3, the driving mechanism 71 of the present invention includes a driving cylinder 711, an elastic restoring member 712 extending in a first horizontal direction, and a pushing member 713 connected to the first clamping assembly 5.

Wherein, drive cylinder 711 is connected with pushing member 713 and can drive pushing member 713 to move away from second clamping assembly 6 along first horizontal direction with first clamping assembly 5, and elastic reset member 712 is connected with fixed member 4 and pushing member 713 respectively at both ends, and elastic reset member 712 can make pushing member 713 move close to second clamping assembly 6 along first horizontal direction with first clamping assembly 5 after drive cylinder 711 is deactivated.

That is, when it is necessary to separate the first clamping assembly 5 and the second clamping assembly 6, the driving mechanism 71 drives the pushing member 713 to move the first clamping assembly 5 and the second clamping assembly 6 in the opposite direction of X, then the wafer 9 is placed between the first clamping assembly 5 and the second clamping assembly 6, the elastic restoring member 712 is stretched during the movement of the pushing member 713, and after the driving cylinder 711 is deactivated, the pushing member 713 moves the first clamping assembly 5 and the second clamping assembly 6 in the opposite direction of X under the elastic force of the elastic restoring member 712, thereby clamping the wafer 9, and thus damage to the wafer 9 due to too large clamping force can be avoided.

It should be noted that the present invention is not limited to the specific structural form of the elastic restoring member 712, and for example, a person skilled in the art may provide the elastic restoring member 712 as a spring or an elastic cord, etc.

Preferably, as shown in fig. 3, the fixing member 4 is provided with a first connection structure 411, the pushing member 713 is provided with a second connection structure 714, and both ends of the elastic restoring member 712 are respectively connected with the first connection structure 411 and the second connection structure 714, and an initial distance between the first connection structure 411 and the second connection structure 714 along the first horizontal direction is adjustable.

By setting the initial distance between the first connection structure 411 and the second connection structure 714 in the X direction to be adjustable, it is convenient to apply wafers 9 of different sizes, for example, if the size of the wafer 9 is large, the initial distance between the first connection structure 411 and the second connection structure 714 in the X direction can be increased, whereas if the size of the wafer 9 is small, the initial distance between the first connection structure 411 and the second connection structure 714 in the X direction can be shortened.

Wherein, the initial distance between the first connection structure 411 and the second connection structure 714 along the X direction refers to the distance between the first connection structure 411 and the second connection structure 714 along the X direction when the first clamping assembly 5 and the second clamping assembly 6 are located at the initial position.

In a first preferred case, as shown in fig. 3, the second connection structure 714 is a connection rod 7141 disposed along a first horizontal direction, a mounting hole (not shown in the drawing) is provided on the pushing member 713, the mounting hole penetrates through the pushing member 713 along the first horizontal direction, a first end (left end of the connection rod 7141 as viewed in fig. 3) of the connection rod 7141 is connected with the elastic restoring member 712, the connection rod 7141 is provided with a threaded section (not shown in the drawing) near a second end (right end of the connection rod 7141 as viewed in fig. 3) thereof, the threaded section penetrates through the mounting hole on the pushing member 713, and an adjusting nut 7142 in threaded engagement with the threaded section is mounted on the side (left side of the adjusting nut 7142 as viewed in fig. 3) of the first end of the adjusting nut 7142, and the side of the adjusting nut 7142 near the first end of the connection rod 7141 abuts against the pushing member 713.

As illustrated in fig. 3, the first connection structure 411 is a fixed column fixedly installed on the fixed member 4, the left end of the elastic restoring member 712 is fixedly connected with the fixed column, the right end of the elastic restoring member 712 is fixedly connected with the left end of the connecting rod 7141, the connecting rod 7141 has a threaded section near the right end thereof, an adjusting nut 7142 is installed on the threaded section, and an initial distance between the left end of the connecting rod 7141 and the fixed column can be adjusted through the adjusting nut 7142, for example, if the size of the wafer 9 is smaller, the connecting rod 7141 can be closer to the fixed column by rotating the adjusting nut 7142 counterclockwise, the initial distance between the left end of the connecting rod 7141 and the fixed column can be shortened, whereas if the size of the wafer 9 is larger, the connecting rod 7141 can be away from the fixed column by rotating the adjusting nut 7142 clockwise, and the initial distance between the left end of the connecting rod 7141 and the fixed column can be increased.

In a second preferred case, some adjustments may be made in the first preferred case, specifically, the second connection structure 714 is still a connection rod 7141 disposed along the first horizontal direction, the first end of the connection rod 7141 is connected to the elastic restoring member 712, the connection rod 7141 is provided with a threaded section near the second end thereof, and the pushing member 713 is also provided with a mounting hole, except that the inner wall of the mounting hole is provided with a thread adapted to the threaded section, and the threaded section is screwed and fixed with the mounting hole through the thread, so that the adjusting nut 7142 may be omitted, the initial distance between the left end of the connection rod 7141 and the fixing post may be adjusted directly by rotating the connection rod 7141, and the mounting hole may penetrate the pushing member 713 or may not penetrate the pushing member 713, and a person skilled in the art may flexibly set according to the specific situation.

In both the above-mentioned preferred cases, the initial distance between the first connection structure 411 and the second connection structure 714 along the X direction is adjusted by changing the position of the second connection structure 714, in practical applications, the second connection structure 714 may be fixed, the first connection structure 411 may be arranged to be position-changeable, the initial distance between the first connection structure 411 and the second connection structure 714 along the X direction may be adjusted by changing the position of the first connection structure 411, for example, or the first connection structure 411 may be arranged as a fixed column, a plurality of fixing holes may be provided on the fixing member 4, and the plurality of fixing holes may be spaced along the X direction, and the bottom ends of the fixing columns may be inserted into the fixing holes, so that the initial distance between the first connection structure 411 and the second connection structure 714 along the X direction may be adjusted by changing the installation position of the fixing column, or the first connection structure 411 and the second connection structure 714 may be arranged to be position-changeable, which may be flexibly adjusted and changed without departing from the principle and scope of the present invention.

In addition, it should be noted that the first connection structure 411 of the present invention is not limited to the fixing post described above, and for example, the first connection structure 411 may be provided as a fixing block or a fixing plate.

Preferably, as shown in fig. 2 to 4, the fixing member 4 of the present invention includes a bottom plate 41 disposed horizontally, a carrying plate 42 disposed horizontally, and a supporting column 43 disposed vertically.

Wherein, bottom plate 41 and loading board 42 are along vertical direction interval distribution to bottom plate 41 is located the below of loading board 42, and bottom and the top of support column 43 respectively with bottom plate 41 and loading board 42 fixed connection or integrative setting, loading board 42 is used for bearing wafer 9, first constant head tank 511 and second constant head tank 611 are located the top of loading board 42, and actuating mechanism 71 installs on bottom plate 41, and first rack 72, second rack 73 and gear 74 all are located between bottom plate 41 and the loading board 42.

As shown in fig. 2 and 3, the carrying plate 42 is formed by two plates distributed at intervals along the X direction, the number of the supporting columns 43 is four, the four supporting columns 43 enclose a rectangular structure, the two plates of the carrying plate 42 are fixedly connected with the bottom plate 41 through the two supporting columns 43, the driving cylinder 711 is fixedly mounted on the bottom surface of the bottom plate 41, the pushing member 713 includes a vertical push rod 7131 and a horizontal push rod 7132, the bottom end of the vertical push rod 7131 is fixedly connected with a piston rod of the driving cylinder 711, the top end of the vertical push rod 7131 is fixedly connected with or integrally arranged with one end of the horizontal push rod 7132, the horizontal push rod 7132 is positioned between the bottom plate 41 and the carrying plate 42, the horizontal push rod 7132 is fixedly connected with the first clamping assembly 5, the first connecting structure 411 is arranged on the top surface of the bottom plate 41, the second connecting structure 714 is arranged on the horizontal push rod 7132, the first rack 72, the second rack 73 and the gear 74 are positioned between the bottom plate 41 and the carrying plate 42, the gear 74 is rotatably mounted on the bottom plate 41, a part of the first clamping assembly 5 is positioned above the carrying plate 42, the other part of the first clamping assembly 5 is positioned between the bottom plate 41 and the carrying plate 42.

The bottom plate 41 and the bearing plate 42 which are distributed at intervals along the vertical direction are divided into three layers of installation spaces, so that the installation and arrangement of each structure are facilitated.

It should be noted that, the carrying plate 42 of the present invention is not limited to be composed of two plate bodies spaced apart along the X direction, for example, the carrying plate 42 may be configured as a unitary plate body structure, and the number of the supporting columns 43 is not limited to four, for example, three or six, etc. of the supporting columns 43, and such adjustment and modification of the specific number of the supporting columns 43 should be limited to the scope and spirit of the present invention.

Preferably, as shown in fig. 2 and 3, the first clamping assembly 5 of the present invention includes a first clamping member 51 and a first connecting member 52, the first clamping member 51 is located above the carrier plate 42, the first positioning slot 511 is provided on the first clamping member 51, the first connecting member 52 is used for fixedly connecting the first clamping member 51 with the first rack 72, and the driving mechanism 71 is connected with the first connecting member 52; the second clamping assembly 6 includes a second clamping member 61 and a second connecting member 62, the second clamping member 61 is located above the carrier plate 42, the second positioning groove 611 is provided on the second clamping member 61, and the second connecting member 62 is used for fixedly connecting the second clamping member 61 with the second rack 73.

Illustratively, the first clamping member 51 is a first clamping plate, a first positioning slot 511 is disposed on the left side of the first clamping plate, the second clamping member 61 is a second clamping plate, a second positioning slot 611 is disposed on the right side of the second clamping plate, the first clamping plate is fixedly connected with the first rack 72 through the first connecting member 52, the first connecting member 52 is further fixedly connected with the pushing member 713 of the driving mechanism 71, and the second clamping plate is fixedly connected with the second rack 73 through the second connecting member 62.

It should be noted that the first clamping member 51 and/or the second clamping member 61 of the present invention are not limited to the above-described clamping plates, and for example, the first clamping member 51 and/or the second clamping member 61 may be provided as clamping blocks, etc., and such modifications and changes to the specific structural forms of the first clamping member 51 and the second clamping member 61 do not deviate from the principle and scope of the present invention, and should be limited to the protection scope of the present invention.

It should be further noted that, in practical applications, the first connecting member 52 and/or the second connecting member 62 may be provided as a connecting plate or a connecting rod, etc., and such modifications and changes to the specific structural forms of the first connecting member 52 and the second connecting member 62 do not deviate from the principle and scope of the present invention, and should be limited to the protection scope of the present invention.

Preferably, as shown in fig. 2 to 4, the first connecting member 52 of the present invention includes a first connecting plate 521 disposed horizontally and a first connecting post (not shown) disposed vertically, the first connecting plate 521 being located between the bottom plate 41 and the carrier plate 42 and being fixedly connected with the first rack gear 72, the carrier plate 42 being provided with a first through hole 421 extending in a first horizontal direction at a position corresponding to the first connecting post, a bottom end of the first connecting post being fixedly connected with or integrally disposed with the first connecting plate 521, a top end of the first connecting post being fixedly connected with or integrally disposed with the first clamping member 51 through the first through hole 421, and the driving mechanism 71 being connected with the first connecting plate 521; the second connecting member 62 includes a second connecting plate 621 disposed horizontally and a second connecting post (not shown in the drawing) disposed vertically, the second connecting plate 621 is located between the bottom plate 41 and the carrier plate 42 and fixedly connected with the second rack 73, the carrier plate 42 is provided with a second through hole 422 extending along the first horizontal direction at a position corresponding to the second connecting post, a bottom end of the second connecting post is fixedly connected or integrally disposed with the second connecting plate 621, and a top end of the second connecting post passes through the second through hole 422 and is fixedly connected or integrally disposed with the second clamping member 61.

Illustratively, the first connecting plate 521 has an L-shaped structure, a portion of the first connecting plate 521 disposed along the X-direction is fixedly connected with the first rack 72, a portion of the first connecting plate 521 disposed along the Y-direction is fixedly connected with the first clamping member 51 through a first connecting post, the portion of the first connecting plate 521 disposed along the Y-direction is also fixedly connected with the pushing member 713 of the driving mechanism 71, the first connecting post can freely move in the first through hole 421 along the X-direction, the second connecting plate 621 is also of an L-shaped structure, the portion of the second connecting plate 621 disposed along the X-direction is fixedly connected with the second rack 73, the portion of the second connecting plate 621 disposed along the Y-direction is fixedly connected with the second clamping member 61 through a second connecting post, and the second connecting post can freely move in the second through hole 422 along the X-direction.

The number of the first connection posts is not limited, for example, only one first connection post may be provided, or a plurality of first connection posts may be provided, and the plurality of first connection posts may be distributed at intervals along the Y direction.

Preferably, as shown in fig. 4, the first clamping member 51 is provided with at least two first hole sites 512, which are distributed at intervals along the first horizontal direction, and the top ends of the first connecting columns are fixedly connected with the first hole sites 512; the second clamping member 61 is provided with second hole sites 612, the number of the second hole sites 612 is at least two, the second hole sites 612 are distributed at intervals along the first horizontal direction, and the top ends of the second connecting columns are fixedly connected with the second hole sites 612.

As shown in fig. 4, the first clamping member 51 is provided with two first hole sites 512 along the X direction, the second clamping member 61 is also provided with two second hole sites 612 along the X direction, when the size of the wafer 9 is smaller, the first connecting column and the second connecting column can be respectively and fixedly connected with the first hole site 512 and the second hole site 612 on the outer side, and when the size of the wafer 9 is larger, the first connecting column and the second connecting column can be respectively and fixedly connected with the first hole site 512 and the second hole site 612 in the middle, so that the positioning device of the invention can adapt to wafers 9 with more sizes.

It should be noted that, in order to enhance the connection stability between the first clamping member 51 and the first connecting plate 521, the number of the first connecting posts is preferably two, the two first connecting posts are spaced apart along the Y direction, and accordingly, two first hole sites 512 are also provided on the first clamping member 51 along the Y direction, that is, four first hole sites 512 are provided on the first clamping member 51 in total, two groups, and likewise, in order to enhance the connection stability between the second clamping member 61 and the second connecting plate 621, the number of the second connecting posts is preferably two, the two second connecting posts are spaced apart along the Y direction, and correspondingly, two second hole sites 612 are also provided on the second clamping member 61 along the Y direction, that is, four second hole sites 612 are provided on the second clamping member 61 in total, and two groups.

It should be noted that the number of the first hole sites 512 and the second hole sites 612 disposed along the X direction is not limited to two, for example, three or four, and the like, and such flexible adjustment and modification should be limited within the scope and spirit of the present invention.

Preferably, as shown in fig. 2 and 3, the positioning device of the present invention further includes a first guiding mechanism provided between the fixing member 4 and the first clamping assembly 5, and a second guiding mechanism provided between the fixing member 4 and the second clamping assembly 6, the first guiding mechanism and the second guiding mechanism guiding the first clamping assembly 5 and the second clamping assembly 6 when the first clamping assembly 5 and the second clamping assembly 6 move, respectively.

Preferably, as shown in fig. 2 and 3, the first guiding mechanism comprises a first guiding member 81 and a second guiding member (not shown) which are matched, the first guiding member 81 is connected with the fixing member 4, and the second guiding member is connected with the first clamping assembly 5; the second guide mechanism includes a mating third guide member 82 and a fourth guide member (not shown), the third guide member 82 being coupled to the securing member 4 and the fourth guide member being coupled to the second clamping assembly 6.

It should be noted that, in practical applications, the first guide member 81 and the second guide member may be configured to have a structure in which a guide rail is matched with a guide block, or the first guide member 81 and the second guide member may be configured to have a structure in which a guide groove is matched with a guide rib, or further, the first guide member 81 and the second guide member may be configured to have a structure in which a guide rod is matched with a guide hole, etc., which do not deviate from the principle and scope of the present invention, and such adjustments and changes to the specific structural forms of the first guide member 81 and the second guide member should be limited to the scope of the present invention.

In addition, it should be noted that, in practical applications, the third guiding member 82 and the fourth guiding member may be configured to have a structure that the guide rail is matched with the guiding block, or the third guiding member 82 and the fourth guiding member may be configured to have a structure that the guiding slot is matched with the guiding rib, or further, the third guiding member 82 and the fourth guiding member may be configured to have a structure that the guiding rod is matched with the guiding hole, etc., and such modifications and changes on the specific structural forms of the third guiding member 82 and the fourth guiding member should not deviate from the principle and scope of the present invention, and should be limited within the protection scope of the present invention.

Preferably, as shown in fig. 2 and 3, the first guide member 81 and the third guide member 82 are guide rails extending in the first horizontal direction, and the second guide member and the fourth guide member are guide blocks adapted to the guide rails.

Illustratively, two guide rails are fixedly mounted on the top surface of the bottom plate 41 and are spaced apart along the Y direction, and two guide blocks are fixedly mounted on the bottom surfaces of the first connecting plate 521 and the second connecting plate 621, respectively.

Furthermore, those skilled in the art will appreciate that while some embodiments described herein include some features but not others included in other embodiments, combinations of features of different embodiments are meant to be within the scope of the application and form different embodiments. For example, in the claims of the present application, any of the claimed embodiments may be used in any combination.

Thus far, the technical solution of the present application has been described in connection with the preferred embodiments shown in the drawings, but it is easily understood by those skilled in the art that the scope of protection of the present application is not limited to these specific embodiments. Equivalent modifications and substitutions for related technical features may be made by those skilled in the art without departing from the principles of the present application, and such modifications and substitutions will fall within the scope of the present application.

Claims

1. A processing device is characterized by comprising a machine base and a positioning device arranged on the machine base, wherein the positioning device comprises a fixed component, a first clamping component, a second clamping component and a driving component which are arranged on the fixed component,

the first clamping assembly and the second clamping assembly are oppositely arranged along a first horizontal direction, the driving assembly can drive the first clamping assembly and the second clamping assembly to synchronously move along the first horizontal direction so as to clamp a wafer, and the driving assembly can also drive the first clamping assembly and the second clamping assembly to synchronously move along the first horizontal direction in a reverse direction.

2. The processing apparatus of claim 1, wherein a side of the first clamping assembly facing the second clamping assembly is provided with a first positioning slot, a side of the second clamping assembly facing the first clamping assembly is provided with a second positioning slot, and the first positioning slot and the second positioning slot respectively abut against edges of both sides of the wafer to clamp the wafer.

3. The processing apparatus of claim 2 wherein said drive assembly comprises a drive mechanism, a first rack extending in said first horizontal direction, a second rack and pinion extending in said first horizontal direction,

The driving mechanism can drive the first clamping assembly to move along the first horizontal direction, the first rack and the second rack are respectively connected with the first clamping assembly and the second clamping assembly, the first rack and the second rack are distributed at intervals along the second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, the gear is rotatably arranged on the fixing member, and the gear is located between the first rack and the second rack and meshed with the first rack and the second rack.

4. The apparatus of claim 3 wherein said drive mechanism includes a drive cylinder, a resilient return member extending in said first horizontal direction, and a push member connected to said first clamping assembly,

the driving cylinder can drive the pushing member to drive the first clamping assembly to move along the first horizontal direction away from the second clamping assembly, two ends of the elastic reset member are respectively connected with the fixing member and the pushing member, and after the driving cylinder is relieved of driving, the elastic reset member can drive the pushing member to drive the first clamping assembly to move along the first horizontal direction close to the second clamping assembly.

5. The processing apparatus according to claim 4, wherein the fixing member is provided with a first connecting structure, the pushing member is provided with a second connecting structure, both ends of the elastic restoring member are connected with the first connecting structure and the second connecting structure, respectively, and an initial distance between the first connecting structure and the second connecting structure along the first horizontal direction is adjustable.

6. The processing apparatus according to claim 5, wherein the second connection structure is a connection rod arranged along the first horizontal direction, the pushing member is provided with a mounting hole, the mounting hole penetrates through the pushing member along the first horizontal direction, a first end of the connection rod is connected with the elastic restoring member, the connection rod is provided with a thread section near a second end thereof, the thread section penetrates through the mounting hole, an adjusting nut in threaded fit with the thread section is mounted on the thread section, and one side of the adjusting nut near the first end of the connection rod abuts against the pushing member; or alternatively

7. The processing apparatus of claim 3, wherein the fixing member comprises a horizontally disposed base plate, a horizontally disposed carrier plate, and a vertically disposed support column,

the bottom plate with the loading board is along vertical direction interval distribution, the bottom plate is located the below of loading board, bottom and the top of support column respectively with the bottom plate with loading board fixed connection or integrative setting, the loading board is used for bearing the wafer, first constant head tank with the second constant head tank is located the top of loading board, actuating mechanism installs on the bottom plate, first rack the second rack with the gear is located the bottom plate with between the loading board.

8. The machining apparatus of claim 7, wherein the first clamping assembly includes a first clamping member and a first connecting member, the first clamping member being located above the carrier plate, the first positioning slot being located in the first clamping member, the first connecting member being configured to fixedly connect the first clamping member to the first rack, the driving mechanism being connected to the first connecting member;

The second clamping assembly comprises a second clamping member and a second connecting member, the second clamping member is located above the bearing plate, the second positioning groove is formed in the second clamping member, and the second connecting member is used for fixedly connecting the second clamping member with the second rack.

9. The processing apparatus according to claim 8, wherein the first connecting member includes a first connecting plate disposed horizontally and a first connecting column disposed vertically, the first connecting plate being located between the bottom plate and the carrier plate and being fixedly connected with the first rack, the carrier plate being provided with a first through hole extending in the first horizontal direction at a position corresponding to the first connecting column, a bottom end of the first connecting column being fixedly connected with or integrally disposed with the first connecting plate, a top end of the first connecting column being fixedly connected with or integrally disposed with the first clamping member through the first through hole, the driving mechanism being connected with the first connecting plate;

the second connecting member comprises a second connecting plate and a second connecting column, wherein the second connecting plate is horizontally arranged, the second connecting plate is located between the bottom plate and the bearing plate and is fixedly connected with the second rack, the bearing plate is provided with a second through hole extending along the first horizontal direction at a position corresponding to the second connecting column, the bottom end of the second connecting column is fixedly connected with the second connecting plate or integrally arranged, and the top end of the second connecting column passes through the second through hole and is fixedly connected with the second clamping member or integrally arranged.

10. The processing apparatus according to claim 9, wherein first hole sites are provided on the first clamping member, the number of the first hole sites is at least two and are distributed at intervals along the first horizontal direction, and the top ends of the first connecting posts are fixedly connected with the first hole sites;

the second clamping component is provided with second hole sites, the number of the second hole sites is at least two and the second hole sites are distributed at intervals along the first horizontal direction, and the top ends of the second connecting columns are fixedly connected with the second hole sites.

11. The processing apparatus according to any one of claims 1 to 10, wherein the positioning device further comprises a first guiding mechanism provided between the fixing member and the first clamping assembly and a second guiding mechanism provided between the fixing member and the second clamping assembly, the first guiding mechanism and the second guiding mechanism being for guiding the first clamping assembly and the second clamping assembly, respectively.

12. The machining apparatus of claim 11 wherein the first guide mechanism includes cooperating first and second guide members, the first guide member being connected to the stationary member and the second guide member being connected to the first clamping assembly;

The second guide mechanism comprises a third guide member and a fourth guide member which are matched, the third guide member is connected with the fixing member, and the fourth guide member is connected with the second clamping assembly.

13. The processing apparatus of claim 12, wherein the first guide member and the third guide member are guide rails extending in the first horizontal direction, and the second guide member and the fourth guide member are guide blocks adapted to the guide rails.

14. The processing apparatus according to any one of claims 1 to 10, wherein the processing apparatus is a chamfering machine.