CN220825769U

CN220825769U - Processing equipment

Info

Publication number: CN220825769U
Application number: CN202322713800.5U
Authority: CN
Inventors: 张笑笑; 尹德臻; 郭世锋; 卢凯文
Original assignee: Qingdao Gaoce Technology Co Ltd
Current assignee: Qingdao Gaoce Technology Co Ltd
Priority date: 2023-10-10
Filing date: 2023-10-10
Publication date: 2024-04-23
Anticipated expiration: 2033-10-10

Abstract

The utility model relates to the technical field of electronic product manufacturing, in particular to processing equipment. The utility model aims to solve the technical problem that the calibration operation of the existing chamfering machine on a material taking device is complicated. For this purpose, the processing apparatus of the present utility model includes a frame, a material taking device, a detecting device, and a positioning device, wherein the positioning device is used for positioning a center point of a wafer, the material taking device can transfer the wafer on the positioning device to the detecting device, and the detecting device can detect a position of the center point of the wafer so as to calibrate the material taking device. The center point of the wafer is positioned by arranging the positioning device, the position of the center point of the wafer is detected by combining the detecting device, the material taking device is convenient to calibrate, and the operation is simpler and more convenient.

Description

Processing equipment

Technical Field

The utility model relates to the technical field of electronic product manufacturing, in particular to processing equipment.

Background

Semiconductor wafers are very important materials in various fields such as aerospace, optical fibers, and the like. During processing of wafers, if lapping is directly performed after the wafers are cut from the ingot, chipping is likely to occur, causing wafer scrap, and therefore chamfering of the wafers is required before lapping.

In the process of chamfering a wafer by an existing chamfering machine, the wafer in the material box needs to be transferred to a detecting device by a material taking device, and the position of the center point of the wafer is detected by the detecting device. In order to ensure the processing quality of the wafer, the extending length and the rotating angle of the material taking device are required to be calibrated at intervals, so that larger errors between the actual extending length and the rotating angle of the material taking device and the set extending length and rotating angle are avoided, however, the conventional chamfering machine is complicated in calibration operation of the material taking device, and the use experience of a user is poor.

Accordingly, there is a need in the art for a new solution to the above-mentioned problems.

Disclosure of utility model

In order to solve at least one of the problems in the prior art, namely, the technical problem that the calibration operation of the existing chamfering machine on the material taking device is complicated.

In a first aspect, the application provides a processing apparatus comprising a housing and a take-off device, a detection device and a positioning device mounted on the housing,

The positioning device is used for positioning the center point of the wafer, the material taking device can transfer the wafer on the positioning device to the detecting device, and the detecting device can detect the position of the center point of the wafer so as to calibrate the material taking device.

In the preferable technical scheme of the processing equipment, the positioning device comprises a bearing piece positioning device and a clamping positioning device,

The wafer supporting and positioning device is provided with a fixed positioning groove, the positioning groove is used for positioning the center point of the wafer, and the clamping and positioning device is used for clamping the wafer to position the center point of the wafer.

In a preferred embodiment of the above processing apparatus, the clamping and positioning device includes a first fixing member, a first clamping assembly, a second clamping assembly and a driving assembly mounted on the first fixing member,

The first clamping assembly and the second clamping assembly are oppositely arranged along a first horizontal direction, the driving assembly is in driving connection with the first clamping assembly and the second clamping assembly and can drive the first clamping assembly and the second clamping assembly to synchronously move along the first horizontal direction in opposite directions so as to clamp a wafer, and the driving assembly can also drive the first clamping assembly and the second clamping assembly to synchronously move along the first horizontal direction in opposite directions.

In the preferred technical scheme of the processing device, a first positioning groove is formed in one side, facing the second clamping assembly, of the first clamping assembly, a second positioning groove is formed in one side, facing the first clamping assembly, of the second clamping assembly, and the first positioning groove and the second positioning groove are respectively abutted to edges of two sides of a wafer so as to clamp the wafer.

In a preferred embodiment of the above processing apparatus, the driving assembly includes a driving mechanism, a first rack extending in the first horizontal direction, a second rack and pinion extending in the first horizontal direction,

The driving mechanism is connected with the first clamping assembly and can drive the first clamping assembly to move along the first horizontal direction, the first rack and the second rack are respectively connected with the first clamping assembly and the second clamping assembly, the first rack and the second rack are distributed at intervals along the second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, the gear is rotatably arranged on the first fixing member, and the gear is positioned between the first rack and the second rack and meshed with the first rack and the second rack.

In a preferred embodiment of the above processing apparatus, the driving mechanism includes a driving cylinder, an elastic restoring member extending in the first horizontal direction, and a pushing member connected with the first clamping assembly,

The driving cylinder is connected with the pushing member and can drive the pushing member to drive the first clamping assembly to move away from the second clamping assembly along the first horizontal direction, two ends of the elastic reset member are respectively connected with the first fixing member and the pushing member, and the elastic reset member can drive the pushing member to drive the first clamping assembly to move close to the second clamping assembly along the first horizontal direction after the driving cylinder is de-driven.

In the preferred technical scheme of the processing device, the first fixing member is provided with a first connecting structure, the pushing member is provided with a second connecting structure, two ends of the elastic reset member are respectively connected with the first connecting structure and the second connecting structure, and an initial distance between the first connecting structure and the second connecting structure along the first horizontal direction is adjustable.

In the preferred technical scheme of the processing equipment, the second connecting structure is a connecting rod arranged along the first horizontal direction, the pushing member is provided with a mounting hole, the mounting hole penetrates through the pushing member along the first horizontal direction, the first end of the connecting rod is connected with the elastic reset member, the connecting rod is provided with a thread section at a position close to the second end of the connecting rod, the thread section penetrates through the mounting hole, the thread section is provided with an adjusting nut in threaded fit with the adjusting nut, and one side of the adjusting nut close to the first end of the connecting rod abuts against the pushing member; or alternatively

The second connection structure is a connecting rod arranged along the first horizontal direction, a mounting hole is formed in the pushing member, the first end of the connecting rod is connected with the elastic reset member, a thread section is arranged at a position, close to the second end of the connecting rod, threads matched with the thread section are arranged on the inner wall of the mounting hole, and the thread section is fixed through the threads in a threaded mode with the mounting hole.

In the preferable technical scheme of the processing equipment, the first fixing member comprises a bottom plate which is horizontally arranged, a bearing plate which is horizontally arranged and a supporting column which is vertically arranged,

The bottom plate with the loading board is along vertical direction interval distribution just the bottom plate is located the below of loading board, bottom and the top of support column respectively with the bottom plate with loading board fixed connection or integrative setting, the loading board is used for bearing the wafer, first constant head tank with the second constant head tank is located the top of loading board, actuating mechanism installs on the bottom plate, first rack the second rack with the gear is located the bottom plate with between the loading board.

In a preferred technical solution of the above processing apparatus, the first clamping assembly includes a first clamping member and a first connecting member, the first clamping member is located above the carrier plate, the first positioning slot is provided on the first clamping member, the first connecting member is used for fixedly connecting the first clamping member with the first rack, and the driving mechanism is connected with the first connecting member; the second clamping assembly comprises a second clamping member and a second connecting member, the second clamping member is located above the bearing plate, the second positioning groove is formed in the second clamping member, and the second connecting member is used for fixedly connecting the second clamping member with the second rack.

In a preferred technical scheme of the processing device, the first connecting member comprises a first connecting plate and a first connecting column, the first connecting plate is arranged horizontally, the first connecting plate is positioned between the bottom plate and the bearing plate and is fixedly connected with the first rack, a first through hole extending along the first horizontal direction is formed in a position, corresponding to the first connecting column, of the bearing plate, the bottom end of the first connecting column is fixedly connected with or integrally arranged with the first connecting plate, the top end of the first connecting column penetrates through the first through hole and is fixedly connected with or integrally arranged with the first clamping member, and the driving mechanism is connected with the first connecting plate; the second connecting member comprises a second connecting plate and a second connecting column, wherein the second connecting plate is horizontally arranged, the second connecting plate is located between the bottom plate and the bearing plate and is fixedly connected with the second rack, the bearing plate is provided with a second through hole extending along the first horizontal direction at a position corresponding to the second connecting column, the bottom end of the second connecting column is fixedly connected with the second connecting plate or integrally arranged, and the top end of the second connecting column passes through the second through hole and is fixedly connected with the second clamping member or integrally arranged.

In the preferred technical scheme of the processing equipment, the first clamping member is provided with first hole sites, the number of the first hole sites is at least two and the first hole sites are distributed at intervals along the first horizontal direction, and the top ends of the first connecting columns are fixedly connected with the first hole sites; the second clamping component is provided with second hole sites, the number of the second hole sites is at least two and the second hole sites are distributed at intervals along the first horizontal direction, and the top ends of the second connecting columns are fixedly connected with the second hole sites.

In a preferred technical solution of the above processing apparatus, the clamping and positioning device further includes a first guiding mechanism disposed between the first fixing member and the first clamping assembly, and a second guiding mechanism disposed between the first fixing member and the second clamping assembly, the first guiding mechanism and the second guiding mechanism guiding the first clamping assembly and the second clamping assembly when the first clamping assembly and the second clamping assembly move, respectively.

In a preferred technical solution of the above processing apparatus, the first guiding mechanism includes a first guiding member and a second guiding member that are matched, the first guiding member is connected with the first fixing member, and the second guiding member is connected with the first clamping assembly; the second guide mechanism comprises a third guide member and a fourth guide member which are matched, the third guide member is connected with the first fixing member, and the fourth guide member is connected with the second clamping assembly.

In a preferred technical solution of the above processing apparatus, the first guide member and the third guide member are guide rails extending along the first horizontal direction, and the second guide member and the fourth guide member are guide blocks adapted to the guide rails.

In the preferred technical scheme of the processing device, the piece bearing positioning device comprises a second fixing member and a piece bearing table arranged on the second fixing member, and the positioning groove is formed in the upper surface of the piece bearing table.

In the preferred technical scheme of the processing equipment, the piece bearing table comprises a first piece bearing table and a second piece bearing table, the first piece bearing table and the second piece bearing table are oppositely arranged along a first horizontal direction and are distributed at intervals, the positioning groove comprises a first arc-shaped groove arranged on the upper surface of the first piece bearing table and a second arc-shaped groove arranged on the upper surface of the second piece bearing table, a first positioning point is formed at the first end of the first arc-shaped groove, a second positioning point is formed at the first end of the second arc-shaped groove, and the first positioning point and the second positioning point are positioned on the same straight line extending along the first horizontal direction.

In the preferred technical scheme of the processing equipment, the upper surface of the wafer carrying platform is provided with a plurality of positioning grooves with different sizes.

In the preferred technical scheme of the processing equipment, the number of the piece bearing tables is multiple and the piece bearing tables are distributed at intervals along the vertical direction, and two adjacent piece bearing tables are separated by a spacer bush arranged along the vertical direction.

In a preferred embodiment of the above processing apparatus, the carrier positioning device and the clamping positioning device are distributed in a vertical direction.

In the preferred technical scheme of the processing equipment, the material taking device comprises a lifting assembly, a rotating assembly arranged on the lifting assembly and a telescopic material taking assembly arranged on the rotating assembly, wherein the lifting assembly is used for carrying the rotating assembly and the telescopic material taking assembly to move up and down along the vertical direction, the rotating assembly is used for carrying the telescopic material taking assembly to rotate around the vertical axis, and the telescopic material taking assembly is used for taking and placing wafers.

In a preferred embodiment of the above processing apparatus, the processing apparatus is a chamfering machine.

Under the condition of adopting the technical scheme, the processing equipment provided by the utility model positions the center point of the wafer by arranging the positioning device and detects the position of the center point of the wafer by combining the detection device, so that the material taking device is convenient to calibrate, and the operation is simpler and more convenient.

Furthermore, the processing equipment provided by the utility model can flexibly select according to the size of the wafer by arranging the two different types of positioning devices, namely the wafer bearing positioning device and the clamping positioning device, so that the processing equipment is more convenient to use.

Furthermore, the clamping and positioning device clamps and positions the wafer by adopting the two groups of clamping assemblies which are oppositely arranged and can synchronously move in opposite directions and synchronously move in opposite directions, can be suitable for wafers with different sizes, and greatly improves the application range of the clamping and positioning device.

Still further, the clamping and positioning device provided by the utility model can improve the positioning accuracy by respectively arranging the first positioning groove and the second positioning groove on the first clamping component and the second clamping component to clamp and position the wafer.

Still further, the clamping and positioning device provided by the utility model can avoid the situation that the wafer is damaged due to overlarge clamping force by adopting the elastic restoring force of the elastic restoring member to enable the first clamping component and the second clamping component to clamp the wafer.

Still further, the clamping and positioning device of the utility model can be applicable to more wafers with different sizes by setting the initial distance between the first connecting structure and the second connecting structure along the X direction to be adjustable, thereby further improving the application range of the clamping and positioning device.

Still further, the clamping and positioning device divides the vertical space into three layers of installation spaces by arranging the bottom plates and the bearing plates which are distributed at intervals along the vertical direction, thereby being convenient for the installation and arrangement of each structure.

Still further, the clamping and positioning device of the utility model can be applicable to more wafers with different sizes by arranging at least two first hole sites and second hole sites which are distributed at intervals on the first clamping member and the second clamping member respectively, thereby further improving the application range of the clamping and positioning device.

Furthermore, the wafer carrying and positioning device can position a plurality of wafers with different sizes by arranging the positioning grooves with different sizes on the wafer carrying table, so that the application range of the wafer carrying and positioning device is improved.

Still further, the wafer supporting and positioning device can simultaneously position a plurality of wafers by arranging a plurality of wafer supporting tables.

Drawings

The technical scheme of the present application is described below with reference to the accompanying drawings. In the accompanying drawings:

FIG. 1 is a schematic view of a part of a chamfering machine according to the present application;

FIG. 2 is a schematic view of the material taking apparatus according to the present application;

FIG. 3 is a schematic view of a lifting assembly of the reclaimer device of the present application;

FIG. 4 is a schematic view of the rotating assembly of the reclaimer device of the present application;

FIG. 5 is a schematic view of a telescopic take-off assembly of the take-off device of the present application;

FIG. 6 is a schematic diagram of a telescopic take-off assembly of the take-off device of the present application;

FIG. 7 is a schematic view of a telescopic take-off assembly of the take-off device of the present application;

FIG. 8 is a schematic diagram of the structure of the detecting device of the present application;

FIG. 9 is a schematic structural view of a carrying assembly of the detecting device of the present application;

FIG. 10 is a schematic view of a positioning device according to the present application;

FIG. 11 is a schematic structural view of a carrier positioning device according to the present application;

FIG. 12 is a schematic view of a clamping and positioning device according to the present application;

FIG. 13 is a schematic view of a portion of the structure of the clamping and positioning device of the present application;

fig. 14 is a schematic view of a clamping and positioning device for positioning and clamping a wafer according to the present application.

List of reference numerals

1. A base; 11. a base; 12. a feeding bin support; 10. a magazine;

2. A material taking device;

21. A lifting assembly; 211. a fixing seat; 212. a connecting plate; 213. a lifting motor; 214. a timing belt assembly; 215. a screw rod; 216. a lifting slide block;

22. A rotating assembly; 221. a fixing frame; 222. a first rotation shaft; 223. a rotating member; 224. a first rotating electric machine; 225. a first speed reducer; 226. a first coupling;

23. A telescopic material taking assembly; 231. a telescopic fixing member; 232. a telescopic driving mechanism; 233. a moving member; 234. a drive rack; 235. a first rotating shaft; 236. a second rotating shaft; 237. a first transmission mechanism; 238. a second transmission mechanism; 239. a horizontal guide mechanism; 230. a take-out member; 2321. a telescopic motor; 2322. a third driving pulley; 2323. a third driven pulley; 2324. a third belt; 2325. a translation slider; 2331. a moving block; 2332. a moving rack; 2351. a transmission gear; 2371. a first driving pulley; 2372. a first driven pulley; 2373. a first belt; 2381. a second driving pulley; 2382. a second driven pulley; 2383. a second belt; 2391. a horizontal guide rail; 2392. a guide block; 2301. a body; 2302. a connecting block; 23011. and an air suction hole.

3. A detection device;

31. detecting the fixing member;

32. A carrier assembly; 321. a second rotary drive mechanism; 322. a second rotation shaft; 323. a carrier member; 3211. a connecting flange; 3212. a second rotating electric machine; 3213. a second speed reducer; 3214. a second coupling;

33. A translation assembly; 331. a translation seat; 332. a mounting plate; 34. a side finding detecting member; 341. a signal transmitter; 342. a signal receiver;

4. A piece-bearing positioning device;

41. A positioning groove; 42. a wafer carrying table; 43. a fixed shaft; 44. a spacer bush; 411. a first arc-shaped groove; 412. a second arc-shaped groove; 421. a first sub-wafer stage; 422. a second sub-wafer stage; 4111. a first location point; 4121. a second positioning point;

5. clamping and positioning device;

54. A first fixing member; 541. a bottom plate; 542. a carrying plate; 543. a support column; 5411. a first connection structure; 5421. a first through hole; 5422. a second through hole;

55. a first clamping assembly; 551. a first clamping member; 552. a first connecting member; 5511. a first positioning groove; 5512. a first hole site; 5521. a first connection plate;

56. a second clamping assembly; 561. a second clamping member; 562. a second connecting member; 5611. a second positioning groove; 5612. a second hole site; 5621. a second connecting plate;

57. A drive assembly; 571. a driving mechanism; 572. a first rack; 573. a second rack; 574. a gear; 5711. a driving cylinder; 5712. an elastic return member; 5713. a pushing member; 5714. a second connection structure; 57131. a vertical push rod; 57132. a horizontal push rod; 57141. a connecting rod; 57142. an adjusting nut;

581. A first guide member; 582. a third guide member;

6. and (3) a wafer.

Detailed Description

Preferred embodiments of the present utility model are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are merely for explaining the technical principles of the present utility model, and are not intended to limit the scope of the present utility model. For example, although the embodiments described below are described in connection with chamfering machines, the technical solution of the present utility model is equally applicable to other types of processing equipment, such as thinning machines, etc., and such adjustments and changes to the application object do not depart from the principle and scope of the present utility model, and should be limited to the scope of the present utility model.

It should be noted that, in the description of the present application, terms such as "upper", "lower", "left", "right", and the like indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, which are merely for convenience of description, and do not indicate or imply that the apparatus or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Furthermore, it should be noted that, in the description of the present application, unless explicitly specified and limited otherwise, the terms "mounted," "configured," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application can be understood by those skilled in the art according to the specific circumstances.

Specifically, the utility model provides a chamfering machine which can conduct chamfering grinding on a wafer.

As shown in fig. 1, the chamfering machine of the present utility model comprises a frame 1, a material box 10 mounted on the frame 1, a material taking device 2 and a detecting device 3, wherein the material box 10 is used for storing wafers, the material taking device 2 is used for taking out the wafers in the material box 10 and transferring the wafers to the detecting device 3, and the detecting device 3 is used for detecting the positions of the center points of the wafers.

Illustratively, as shown in fig. 1, the base 1 of the chamfering machine of the present utility model includes a base 11 and an upper bin support 12, and a magazine 10 is fixedly mounted on the top surface of the upper bin support 12.

As shown in fig. 1 and 2, the material taking device 2 of the present utility model includes a lifting assembly 21, a rotating assembly 22 mounted on the lifting assembly 21, and a telescopic material taking assembly 23 mounted on the rotating assembly 22, wherein the lifting assembly 21 is used for moving up and down along a vertical direction with the rotating assembly 22 and the telescopic material taking assembly 23, the rotating assembly 22 is used for rotating along a vertical axis with the telescopic material taking assembly 23, and the telescopic material taking assembly 23 is used for taking and placing wafers.

When a wafer needs to be taken from the material box 10, the rotating assembly 22 can rotate with the telescopic material taking assembly 23 so that the telescopic material taking assembly 23 is aligned with the material box 10, the lifting assembly 21 can move up and down with the rotating assembly 22 and the telescopic material taking assembly 23 together so that the telescopic material taking assembly 23 is aligned with the wafer to be extracted, the telescopic material taking assembly 23 can take down the wafer, and then the rotating assembly 22 rotates with the telescopic material taking assembly 23 to a position aligned with the detection device 3 so as to place the wafer on the detection device 3 for detection.

Preferably, as shown in fig. 2 and 3, the lifting assembly 21 of the present utility model includes a fixing base 211, and a vertical driving mechanism and a connection plate 212 mounted on the fixing base 211, the connection plate 212 is fixedly connected with the rotating assembly 22, and the vertical driving mechanism is connected with the connection plate 212 and can drive the connection plate 212 to move up and down in a vertical direction.

Illustratively, as shown in fig. 2 and 3, the fixing base 211 is disposed along a vertical direction, the vertical driving mechanism includes a lifting motor 213, a synchronous belt assembly 214, a screw 215 and a lifting slider 216, the connecting plate 212 is fixedly connected or integrally disposed with the lifting slider 216, the screw 215 is disposed along the vertical direction, a driving shaft of the lifting motor 213 is connected with a bottom end of the screw 215 through the synchronous belt assembly 214 to drive the screw 215 to rotate, the screw 215 is rotatably mounted on the fixing base 211, the lifting slider 216 is mounted on the screw 215 and can move up and down along the screw 215 along with the rotation of the screw 215, so as to drive the rotating assembly 22 and the telescopic material taking assembly 23 to move up and down through the connecting plate 212.

It should be noted that, the present utility model is not limited to the specific structural form of the vertical driving mechanism, for example, the synchronous belt assembly 214 may be replaced by a gear transmission assembly, or the lifting motor 213 may be directly fixedly connected to the bottom end of the screw rod 215 through a speed reducer, in addition, the screw rod 215 and the lifting slider 216 may be replaced by a gear rack transmission mechanism, etc., and such adjustment and change of the specific structural form of the vertical driving mechanism do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Preferably, as shown in fig. 2 to 4, the rotating assembly 22 of the present utility model includes a rotation fixing member fixedly connected with the lifting assembly 21, a first rotation driving mechanism fixedly installed on the rotation fixing member, a first rotation shaft 222 rotatably installed on the rotation fixing member, and a rotation member 223, the telescopic reclaiming assembly 23 is fixedly installed on the rotation member 223, the first rotation shaft 222 is vertically disposed, and bottom and top ends of the first rotation shaft 222 are fixedly connected with the first rotation driving mechanism and the rotation member 223, respectively, and the first rotation driving mechanism is used for driving the first rotation shaft 222 to rotate, thereby driving the rotation member 223 and the telescopic reclaiming assembly 23 to rotate.

The rotation fixing member is fixedly connected with the connecting plate 212 of the lifting assembly 21, and the first rotation driving mechanism drives the rotation member 223 and the telescopic material taking assembly 23 mounted on the rotation member 223 to rotate by driving the first rotation shaft 222.

It should be noted that, the present utility model is not limited to the rotation range of the rotation member 223, and those skilled in the art may reasonably define the rotation range of the rotation member 223 according to the position of each device of the chamfering machine in practical application, for example, the rotation range of the rotation member 223 may be limited to not more than 90 degrees, or the rotation range of the rotation member 223 may be limited to not more than 180 degrees, or the rotation member 223 may be further rotatable by 360 degrees, etc., which are flexibly adjusted and changed without departing from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

In addition, the specific configuration of the first rotation driving mechanism is not limited, and for example, the first rotation driving mechanism may be configured as a motor and a speed reducer, a motor and a timing belt assembly, a motor and a gear assembly, or the like, so long as the first rotation driving mechanism can drive the first rotation shaft 222 to rotate.

Preferably, as shown in fig. 4, the first rotation driving mechanism of the present utility model includes a first rotation motor 224, a first speed reducer 225 and a first coupling 226 connected in sequence, the first coupling 226 being fixedly connected with the bottom end of the first rotation shaft 222.

Illustratively, as shown in fig. 4, the first speed reducer 225 is fixedly connected with the rotation fixing member, the first rotary motor 224 is installed below the first speed reducer 225, the first coupling 226 is installed above the first speed reducer 225, and the bottom end of the first rotary shaft 222 is fixedly connected with the output shaft of the first speed reducer 225 through the first coupling 226.

Preferably, as shown in fig. 4, the rotation fixing member of the present utility model includes a fixing frame 221 fixedly connected to the lifting assembly 21 and a fixing cylinder (not shown) located at the top end of the fixing frame 221, a portion of the first rotation shaft 222 is located in the fixing cylinder and is rotatably connected to the fixing cylinder, and the first rotation driving mechanism is fixedly connected to the fixing frame 221.

As shown in fig. 2 and 4, the side of the fixing frame 221 of the rotation fixing member is fixedly connected with the connection plate 212 of the lifting assembly 21, the bottom of the fixing frame 221 is provided with a fixing hole, the first speed reducer 225 is installed in the fixing hole, the top end of the first speed reducer 225 penetrates through the fixing hole to extend into the fixing frame 221, the top end of the first rotation shaft 222 extends out of the top of the fixing cylinder and is fixedly connected with the rotation member 223, the bottom end of the first rotation shaft 222 extends out of the bottom of the fixing cylinder and penetrates through the top of the fixing frame 221 to be fixedly connected with the first coupling 226 in the fixing frame 221, the bearing is installed in the fixing cylinder, and the first rotation shaft 222 is rotatably connected with the fixing cylinder through the bearing.

Preferably, as shown in fig. 4 to 7, the telescopic reclaiming assembly 23 of the present utility model includes a telescopic fixing member 231 fixedly connected with the rotating assembly 22, and a telescopic driving mechanism 232, a moving member 233, a driving rack 234, a first rotating shaft 235, a second rotating shaft 236, a first driving mechanism 237, a second driving mechanism 238, a horizontal guiding mechanism 239, and a reclaiming member 230 mounted on the telescopic fixing member 231.

The telescopic driving mechanism 232 is in driving connection with the moving member 233 and can drive the moving member 233 to horizontally move relative to the telescopic fixed member 231, the transmission rack 234 is horizontally arranged and parallel to the moving direction of the moving member 233, the first rotating shaft 235 and the second rotating shaft 236 are rotatably installed on the moving member 233, the first rotating shaft 235 and the second rotating shaft 236 are horizontally arranged and perpendicular to the transmission rack 234, a first end of the first rotating shaft 235 is provided with a transmission gear 2351 meshed with the transmission rack 234, a second end of the first rotating shaft 235 is connected with a first end of the second rotating shaft 236 through a first transmission mechanism 237, a second end of the second rotating shaft 236 is connected with the taking member 230 through a second transmission mechanism 238, the taking member 230 is installed on the moving member 233 and can horizontally move relative to the moving member 233 under the driving of the second transmission mechanism 238, the moving direction of the taking member 230 is consistent with the moving direction of the moving member 233, the horizontal guiding mechanism 239 is installed between the moving member 233 and the taking member 230, and the horizontal guiding mechanism 239 is used for guiding the taking member 230 when the taking member 230 moves relative to the moving member 233.

When a wafer needs to be taken and placed, the telescopic driving mechanism 232 drives the moving member 233 to horizontally move, the moving member 233 drives the transmission gear 2351 on the first rotating shaft 235 to rotate along the transmission rack 234, the transmission gear 2351 drives the first rotating shaft 235 to rotate, the first rotating shaft 235 drives the second rotating shaft 236 to rotate through the first transmission mechanism 237, the second rotating shaft 236 drives the material taking member 230 to horizontally move through the second transmission mechanism 238, and the material taking member 230 has double-stroke telescopic quantity through two-stage transmission.

Preferably, as shown in fig. 6 and 7, the first transmission mechanism 237 includes a first driving pulley 2371, a first driven pulley 2372, and a first transmission belt 2373 connecting the first driving pulley 2371 and the first driven pulley 2372, the first driving pulley 2371 is fixed at a second end of the first rotating shaft 235, and the first driven pulley 2372 is fixed at a first end of the second rotating shaft 236.

In the process of driving the moving member 233 to move by the telescopic driving mechanism 232, the first driving pulley 2371 rotates along with the first rotating shaft 235, and rotates with the first driven pulley 2372 and the second rotating shaft 236 by the first transmission belt 2373.

It should be noted that, the first transmission mechanism 237 is not limited to the pulley transmission set described above, for example, the first transmission mechanism 237 may be configured as a gear transmission set or a sprocket transmission set, and such modifications and changes to the specific structural form of the first transmission mechanism 237 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Of course, the present application preferably provides the first transmission mechanism 237 as the pulley gear set described above, which is convenient for arrangement and can reduce cost.

Preferably, as shown in fig. 5 to 7, the second transmission mechanism 238 includes a second driving pulley 2381, a second driven pulley 2382, and a second transmission belt 2383 connecting the second driving pulley 2381 and the second driven pulley 2382, the second driving pulley 2381 is fixed at a second end of the second rotating shaft 236, the second driven pulley 2382 is rotatably mounted on the moving member 233, the second driven pulley 2382 and the second driving pulley 2381 are spaced apart in a horizontal direction parallel to the transmission rack 234, and the second transmission belt 2383 is fixedly connected with the take-out member 230.

In the process of driving the moving member 233 to move by the telescopic driving mechanism 232, the second driving pulley 2381 rotates along with the second rotating shaft 236, and horizontally moves with the discharging member 230 by the second driving belt 2383.

It should be noted that, the second transmission mechanism 238 is not limited to the pulley transmission set described above, for example, the second transmission mechanism 238 may be configured as a sprocket transmission set, and such modifications and changes to the specific structural form of the second transmission mechanism 238 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Of course, the present application preferably provides the second drive mechanism 238 as a pulley drive train as described above, which reduces both the weight of the telescopic take off assembly 23 and noise.

Preferably, as shown in fig. 5 to 7, the moving member 233 includes a moving block 2331 and a moving frame 2332, the bottom of the moving block 2331 is fixedly connected with the telescopic driving mechanism 232, the first rotating shaft 235 and the second rotating shaft 236 are both installed on the moving block 2331, one end of the moving frame 2332 is fixedly connected with or integrally provided with the moving block 2331 and horizontally extends along the moving direction of the material taking member 230, and the second driven pulley 2382 is rotatably installed at the other end of the moving frame 2332.

As shown in fig. 5 to 7, the moving frame 2332 is horizontally disposed along a moving direction thereof, a rear end of the moving frame 2332 is fixedly connected with the moving block 2331, a front end of the moving frame 2332 extends to a front end of the take-out member 230, the second rotating shaft 236 is positioned obliquely above the first rotating shaft 235, and the second driven pulley 2382 is rotatably mounted at the front end of the moving frame 2332.

Preferably, as shown in fig. 5 to 7, the horizontal guiding mechanism 239 includes a horizontal guide rail 2391 disposed parallel to the driving rack 234 and a guiding block 2392 slidably engaged with the horizontal guide rail 2391, the horizontal guide rail 2391 is fixedly connected with the moving member 233, and the guiding block 2392 is fixedly connected with the material taking member 230.

As shown in fig. 5 to 7, a horizontal guide rail 2391 is fixed on the top surface of the moving frame 2332, a guide block 2392 is fixed on the rear end of the material taking member 230, the guide block 2392 is buckled on the horizontal guide rail 2391, and when the second driving belt 2383 moves horizontally with the material taking member 230, the guide block 2392 slides along the horizontal guide rail 2391 to ensure that the material taking member 230 can move linearly.

In practical applications, the mounting positions of the horizontal rail 2391 and the guide block 2392 may be exchanged, for example, the horizontal rail 2391 may be fixedly connected to the material taking member 230, and the guide block 2392 may be fixedly connected to the moving member 233.

It should be noted that the horizontal guiding mechanism 239 is not limited to the above-described structure of the horizontal guide rail 2391 and the guide block 2392, for example, the horizontal guiding mechanism 239 may be configured as a slider and a chute, etc., and such modifications and changes to the specific structure of the horizontal guiding mechanism 239 should be limited to the protection scope of the present utility model without departing from the principle and scope of the present utility model.

Preferably, as shown in fig. 5 to 7, the material taking member 230 includes a body 2301 and a connection block 2302, the body 2301 is a plate structure, a suction hole 23011 is provided at a front end of the body 2301, a ventilation groove (not shown) communicating with the suction hole 23011 is provided inside the body 2301, the ventilation groove communicates with a vacuum generator of the chamfering machine, and the connection block 2302 fixedly connects a rear end of the body 2301 with the second transmission mechanism 238.

Illustratively, the body 2301 is horizontally disposed along the moving direction thereof, the front end of the body 2301 is provided with a plurality of air suction holes 23011, the rear end of the body 2301 is fixedly connected with the connecting block 2302, the connecting block 2302 is fixedly connected with the second driving belt 2383 of the second driving mechanism 238, the guide block 2392 of the horizontal guide mechanism 239 is fixedly connected with the connecting block 2302, the air vent groove inside the body 2301 is communicated with the vacuum generator through an air pipe, and after the vacuum generator is started, the wafer can be adsorbed at the front end of the body 2301.

Preferably, as shown in fig. 5 to 7, the telescopic driving mechanism 232 of the present application includes a telescopic motor 2321, a third driving pulley 2322, a third driven pulley 2323, a third driving belt 2324, a horizontal screw (not shown in the drawings), and a translation slider 2325 mounted on the horizontal screw, the translation slider 2325 is fixedly connected with the moving member 233, the third driving pulley 2322 is fixed on a driving shaft of the telescopic motor 2321, the third driven pulley 2323 is fixed at one end of the horizontal screw, the third driving belt 2324 connects the third driving pulley 2322 with the third driven pulley 2323, the horizontal screw is rotatably mounted on the telescopic fixing member 231 and is parallel to the driving rack 234, and the translation slider 2325 can move along the horizontal screw along with the rotation of the horizontal screw.

For example, the telescopic motor 2321 is fixed at the front end of the telescopic fixed member 231, and is arranged side by side with the horizontal screw, the top surface of the translation slider 2325 is fixedly connected with the bottom surface of the moving block 2331 of the moving member 233, the telescopic motor 2321 drives the third driving pulley 2322 to rotate, the third driving pulley 2322 drives the third driven pulley 2323 and the horizontal screw to rotate through the third driving belt 2324, and the translation slider 2325 moves back and forth along the horizontal screw with the moving member 233 along with the rotation of the horizontal screw.

It should be noted that, the telescopic driving mechanism 232 of the present utility model is not limited to the specific structural form described above, for example, the "third driving pulley 2322+third driven pulley 2323+third driving belt 2324" may be replaced by a gear driving group or a sprocket rotating group, and the "horizontal screw+translational sliding block 2325" may be replaced by a rack-and-pinion driving mechanism, etc., and such adjustment and change of the specific structural form of the telescopic driving mechanism 232 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Of course, the telescopic driving mechanism 232 is preferably arranged in the above-described structural form, so that the arrangement is convenient and the cost is reduced.

It should be noted that the present utility model is not limited to a specific structural form of the detecting device 3, for example, the detecting device 3 may be set as a visual detecting device described in publication No. CN212331471U, an image of a wafer is acquired by the visual detecting device, and a coordinate of a center point of the wafer is obtained by calculation; alternatively, the detecting device 3 may be configured as a device having a side-finding detecting function, etc., and such adjustments and changes to the specific type of detecting device 3 do not depart from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Preferably, as shown in fig. 8, the detecting device 3 of the present utility model includes a detecting fixing member 31, a carrying assembly 32 mounted on the detecting fixing member 31, a translating assembly 33, and a seeking edge detecting member 34 mounted on the translating assembly 33.

The carrying assembly 32 is configured to carry a wafer and rotate the wafer, and the translating assembly 33 is configured to move in a horizontal direction relative to the detecting fixing member 31.

By arranging the translation assembly 33 on the detection fixing member 31 and installing the edge finding detection member 34 on the translation assembly 33, the horizontal distance between the edge finding detection member 34 and the bearing assembly 32 can be adjusted through the translation assembly 33, so that the detection device 3 can carry out edge finding detection on wafers with different sizes, and the application range of the detection device 3 is improved.

Illustratively, as shown in fig. 8, the edge finding detecting member 34 includes a signal emitter 341 and a signal receiver 342 which are disposed opposite to each other along a vertical direction, the signal emitter 341 is located above the signal receiver 342, the wafer is located between the signal emitter 341 and the signal receiver 342, before the edge finding detection, a horizontal distance between the edge finding detecting member 34 and the carrier component 32 is adjusted according to a specific size of the wafer, during the edge finding detection of the wafer, the signal emitter 341 sends a laser signal, the carrier component 32 rotates with the wafer, the edge data of the wafer is detected by the edge finding detecting member 34, a circumference is fitted according to the edge data of the wafer, and a coordinate of a center point of the wafer is calculated.

Preferably, as shown in fig. 8, the translation assembly 33 of the present utility model includes a translation seat 331 mounted on the detection fixing member 31, and a mounting plate 332 mounted on the translation seat 331, the edge finding detection member 34 is mounted on the mounting plate 332, and the translation seat 331 is capable of moving in a horizontal direction relative to the detection fixing member 31.

Preferably, as shown in fig. 8 and 9, the bearing assembly 32 of the present utility model includes a second rotation driving mechanism 321 installed on the detection fixing member 31, a vertically disposed second rotation shaft 322, and a bearing member 323 installed at the top end of the second rotation shaft 322, and the second rotation driving mechanism 321 is in driving connection with the second rotation shaft 322 and is capable of driving the second rotation shaft 322 to rotate with the bearing member 323.

As shown in fig. 8 and 9, the bearing member 323 of the present utility model is a vacuum chuck, the second rotary driving mechanism 321 includes a connection flange 3211, a second rotary motor 3212, a second speed reducer 3213 and a second coupling 3214, the side portion of the connection flange 3211 is fixedly connected with the detection fixing member 31, the bottom of the connection flange 3211 is provided with a mounting hole, the second speed reducer 3213 is mounted in the mounting hole, the top end of the second speed reducer 3213 extends into the connection flange 3211 through the mounting hole, the second rotary motor 3212 is mounted below the second speed reducer 3213, the second coupling 3214 is mounted above the second speed reducer 3213, and the bottom end of the second rotary shaft 322 passes through the top of the connection flange 3211 and is fixedly connected with the output shaft of the second speed reducer 3213 through the second coupling 3214, that is, the driving shaft of the second rotary motor 3212 is fixedly connected with the bottom end of the second rotary shaft 322 through the second speed reducer 3213 and the second coupling 3214 so as to drive the second rotary shaft 322 to rotate with the vacuum chuck.

It should be noted that, the second rotation driving mechanism 321 of the present utility model is not limited to the above-described structure, for example, the second speed reducer 3213 and the second coupling 3214 may be replaced by a synchronous belt transmission assembly, the second rotation motor 3212 may be disposed on a side surface of the second rotation shaft 322, a driving shaft of the second rotation motor 3212 may be connected to a bottom end of the second rotation shaft 322 by a synchronous belt transmission assembly, or the second speed reducer 3213 and the second coupling 3214 may be replaced by a chain transmission assembly, the second rotation motor 3212 may be disposed on a side surface of the second rotation shaft 322, and a driving shaft of the second rotation motor 3212 may be connected to a bottom end of the second rotation shaft 322 by a chain transmission assembly, or the second rotation shaft 322 may be driven to rotate by a DD direct drive motor, which is not departing from the principle and scope of the present utility model.

Preferably, as shown in fig. 1 and 10, the chamfering machine of the present utility model further comprises positioning means (4, 5) for positioning the center point of the wafer 6, the material taking device 2 being capable of transferring the wafer 6 on the positioning means to the detecting device 3, the detecting device 3 being capable of detecting the position of the center point of the wafer for calibrating the material taking device 2.

Illustratively, the positioning device is mounted on the upper bin support 12 of the chamfering machine, the material taking device 2, the detecting device 3 and the positioning device are distributed in a second horizontal direction (Y direction shown in fig. 1), and the material taking device 2 is located between the detecting device 3 and the positioning device.

The center point of the wafer 6 is positioned by arranging the positioning device, and the position of the center point of the wafer 6 is detected by combining the detection device 3, so that the extension length and the rotation angle of the material taking device 2 are conveniently calibrated.

Specifically, when the extension length and the rotation angle of the material taking member 230 of the telescopic material taking assembly 23 need to be calibrated, the wafer 6 is placed on the positioning device, the center point of the wafer 6 is positioned by the positioning device, so that the distance between the center point of the wafer 6 and the starting point of the material taking member 230 is set to be the set value, the extension of the material taking member 230 is controlled to transfer the wafer 6 on the positioning device to the bearing assembly 32 of the detecting device 3 for detection, whether the center point of the wafer 6 is offset is detected by the detecting device 3, if the center point of the wafer 6 is offset, the extension length and the rotation angle of the material taking member 230 are inaccurate, and compensation correction is needed, otherwise, if the center point of the wafer 6 is not offset, the extension length and the rotation angle of the material taking member 230 are accurate, and the operation is simpler and more convenient.

Preferably, as shown in fig. 10 to 14, the positioning device of the present utility model comprises a wafer-bearing positioning device 4 and a clamping positioning device 5.

Wherein, the wafer supporting positioning device 4 is provided with a fixed positioning groove 41, the positioning groove 41 is used for positioning the center point of the wafer 6, and the clamping positioning device 5 is used for clamping the wafer 6 to position the center point of the wafer 6.

The wafer 6 can be independently positioned by the wafer bearing positioning device 4 and the clamping positioning device 5, wherein the wafer 6 is positioned by the wafer bearing positioning device 4 through the positioning groove 41 arranged on the wafer bearing positioning device, the operation is more convenient, the clamping positioning device 5 is used for positioning in a manner of clamping the wafer 6, the limitation of the wafer size can be avoided, and the application range is wider.

Preferably, as shown in fig. 10, the wafer positioning device 4 and the clamping positioning device 5 are distributed in the vertical direction. In this way, the center point of the wafer positioned by the wafer carrying and positioning device 4 and the center point of the wafer positioned by the clamping and positioning device 5 are positioned on the same vertical line, and the extension length of the material taking member 230 is the same, so that the calibration operation is facilitated.

In practical applications, the carrier positioning device 4 may be disposed above the clamping positioning device 5, or the clamping positioning device 5 may be disposed above the carrier positioning device 4.

Preferably, as shown in fig. 10 and 11, the wafer positioning device 4 of the present utility model includes a second fixing member and a wafer stage 42 mounted on the second fixing member, and the positioning groove 41 is provided on an upper surface of the wafer stage 42.

The second fixing member includes four fixing shafts 43, the four fixing shafts 43 are respectively located at four corners of the wafer carrying platform 42, the top ends of the fixing shafts 43 are fixedly connected with the upper bin support 12 of the chamfering machine, the wafer carrying platform 42 is of a plate-shaped structure arranged horizontally, the wafer carrying platform 42 is made of glass fiber reinforced PEEK (Po LY ETHER ETHER Ketone ) material, good form and position tolerance can be achieved, and scratches on wafers can be avoided, and of course, the wafer carrying platform 42 can be made of other non-metal materials (such as nylon, polyoxymethylene, etc.).

Preferably, as shown in fig. 10 and 11, the number of the carrying platforms 42 is plural and the carrying platforms 42 are spaced apart in the vertical direction, and two adjacent carrying platforms 42 are separated by a spacer 44 arranged in the vertical direction.

Illustratively, the number of the carrying platforms 42 is three, two adjacent carrying platforms 42 are separated by four spacers 44, and the heights of the four spacers 44 are strictly equal, so that each layer of carrying platform 42 has high flatness.

It should be noted that the number of the carrying platforms 42 is not limited to three, for example, the number of the carrying platforms 42 may be two or four, and such specific number of the carrying platforms 42 may be adjusted and changed without departing from the principle and scope of the present utility model, which is limited to the protection scope of the present utility model.

Since the plurality of the wafer stages 42 are identical in structure, the description will be given below taking the wafer stage 42 located at the uppermost layer as an example.

Preferably, as shown in fig. 10 and 11, the upper surface of the wafer stage 42 is provided with a plurality of positioning grooves 41 of different sizes.

By arranging a plurality of positioning grooves 41 with different sizes on the wafer carrying table 42, a plurality of wafers 6 with different sizes can be positioned, and the application range of the wafer carrying positioning device 4 is improved.

Illustratively, the upper surface of the wafer carrier 42 is provided with three positioning grooves 41 with different sizes, the three positioning grooves 41 are distributed along the vertical direction, the size of the positioning groove 41 is increased from bottom to top, the positioning groove 41 at the lowest layer is used for positioning a four-inch wafer, the positioning groove 41 at the middle layer is used for positioning a six-inch wafer, and the positioning groove 41 at the uppermost layer is used for positioning an eight-inch wafer.

It should be noted that the number of the positioning grooves 41 is not limited to three, for example, the number of the positioning grooves 41 may be two or four, and such specific number of the positioning grooves 41 may be adjusted and changed without departing from the principle and scope of the present utility model, which should be limited to the protection scope of the present utility model.

The plurality of positioning grooves 41 are identical except for the size, and the positioning grooves 41 located at the lowermost layer will be described as an example.

Preferably, as shown in fig. 10 and 11, the wafer carrier 42 includes a first sub-wafer carrier 421 and a second sub-wafer carrier 422, the first sub-wafer carrier 421 and the second sub-wafer carrier 422 are disposed opposite to each other along a first horizontal direction (X direction in fig. 10) and are spaced apart, the positioning groove 41 includes a first arc-shaped groove 411 disposed on an upper surface of the first sub-wafer carrier 421 and a second arc-shaped groove 412 disposed on an upper surface of the second sub-wafer carrier 422, a first end of the first arc-shaped groove 411 forms a first positioning point 4111, a first end of the second arc-shaped groove 412 forms a second positioning point 4121, and the first positioning point 4111 and the second positioning point 4121 are located on the same straight line extending along the first horizontal direction.

Wherein, the first arc-shaped slot 411 and the second arc-shaped slot 412 enclose a circular positioning groove 41, the size of the positioning groove 41 is slightly larger than the size of the wafer 6, and after the wafer 6 is placed in the positioning groove 41, the edge of the wafer 6 is abutted against the first positioning point 4111 and the second positioning point 4121 at the same time, so as to complete the positioning of the wafer 6.

Preferably, as shown in fig. 12 to 14, the clamping and positioning device 5 of the present utility model includes a first fixing member 54, and a first clamping assembly 55, a second clamping assembly 56 and a driving assembly 57 mounted on the first fixing member 54.

Wherein the first fixing member 54 is fixedly connected to the upper bin support 12, the first clamping assembly 55 and the second clamping assembly 56 are disposed opposite to each other along a first horizontal direction (X direction as shown in fig. 12), the driving assembly 57 is in driving connection with the first clamping assembly 55 and the second clamping assembly 56, and the driving assembly 57 can drive the first clamping assembly 55 and the second clamping assembly 56 to move synchronously along the first horizontal direction in order to clamp and position a standard wafer (e.g., a wafer 6), and the driving assembly 57 can also drive the first clamping assembly 55 and the second clamping assembly 56 to move synchronously along the first horizontal direction in a reverse direction.

When the wafer 6 needs to be positioned by the clamping and positioning device 5, the wafer 6 is placed between the first clamping component 55 and the second clamping component 56, then the driving component 57 drives the first clamping component 55 to move leftwards in the X direction, the second clamping component 56 simultaneously moves rightwards in the X direction, namely, the first clamping component 55 and the second clamping component 56 synchronously move towards each other, and when the first clamping component 55 and the second clamping component 56 respectively abut against the right edge and the left edge of the wafer 6, the wafer 6 is clamped, so that the wafer 6 is positioned, and when the wafer 6 needs to be removed, the driving component 57 drives the first clamping component 55 to move rightwards in the X direction, and the second clamping component 56 simultaneously moves leftwards in the X direction, namely, the first clamping component 55 and the second clamping component 56 synchronously move reversely.

Preferably, as shown in fig. 12 and 14, a side of the first clamping assembly 55 facing the second clamping assembly 56 is provided with a first positioning groove 5511, a side of the second clamping assembly 56 facing the first clamping assembly 55 is provided with a second positioning groove 5611, and the first positioning groove 5511 and the second positioning groove 5611 respectively abut against edges of both sides of the wafer 6 to clamp the wafer 6.

The first positioning groove 5511 is disposed towards one side of the second positioning groove 5611, the second positioning groove 5611 is disposed towards one side of the first positioning groove 5511, and the wafer 6 is clamped and positioned by the first positioning groove 5511 and the second positioning groove 5611, so that positioning accuracy can be improved. Among them, the first positioning groove 5511 and the second positioning groove 5611 are preferably provided in a V shape.

Preferably, as shown in fig. 12 and 13, the driving assembly 57 of the present utility model includes a driving mechanism 571, a first rack 572 extending in a first horizontal direction, a second rack 573 extending in the first horizontal direction, and a gear 574.

Wherein, actuating mechanism 571 is connected with first clamping subassembly 55 and can drive first clamping subassembly 55 and remove along first horizontal direction, and first rack 572 and second rack 573 are connected with first clamping subassembly 55 and second clamping subassembly 56 respectively, and first rack 572 and second rack 573 are along second horizontal direction (Y direction as shown in fig. 12) interval distribution, and the second horizontal direction is perpendicular with first horizontal direction, and gear 574 rotatable installs on first fixed member 54 and is located between first rack 572 and second rack 573 and with first rack 572 and second rack 573 meshing.

Illustratively, when the driving mechanism 571 drives the first clamping assembly 55 to move leftwards in the X direction, the first rack 572 moves leftwards in the X direction along with the first clamping assembly 55, the first rack 572 drives the gear 574 to rotate clockwise, the gear 574 drives the second rack 573 to move rightwards in the X direction, the second rack 573 drives the second clamping assembly 56 to move rightwards in the X direction, and thus the first clamping assembly 55 and the second clamping assembly 56 synchronously move towards each other in the X direction, whereas when the driving mechanism 571 drives the first clamping assembly 55 to move rightwards in the X direction, the first rack 572 moves rightwards in the X direction along with the first clamping assembly 55, the first rack 572 drives the gear 574 to rotate anticlockwise, the gear 574 drives the second rack 573 to move leftwards in the X direction, and the second rack 573 drives the second clamping assembly 56 to leftwards in the X direction, thus the first clamping assembly 55 and the second clamping assembly 56 synchronously move reversely in the X direction.

It should be noted that, in practical applications, those skilled in the art may set the driving mechanism 571 as a motor driving mechanism, or set the driving mechanism as a hydraulic driving mechanism, or set the driving mechanism as a cylinder driving mechanism, etc., and such modifications and changes to the specific structural type of the driving mechanism 571 do not deviate from the principle and scope of the present utility model, and should be limited in the scope of protection of the present utility model.

Preferably, as shown in fig. 12 and 13, the driving mechanism 571 of the present utility model includes a driving cylinder 5711, an elastic restoring member 5712 extending in a first horizontal direction, and a pushing member 5713 connected with the first clamping assembly 55.

The driving cylinder 5711 is connected with the pushing member 5713 and is capable of driving the pushing member 5713 to move away from the second clamping unit 56 along the first horizontal direction with the first clamping unit 55, two ends of the elastic reset member 5712 are respectively connected with the first fixing member 54 and the pushing member 5713, and the elastic reset member 5712 is capable of moving the pushing member 5713 close to the second clamping unit 56 along the first horizontal direction with the first clamping unit 55 after the driving cylinder 5711 is deactivated.

That is, when the first clamping assembly 55 and the second clamping assembly 56 need to be separated, the driving mechanism 571 drives the pushing member 5713 to move the first clamping assembly 55 and the second clamping assembly 56 in the opposite direction along the X direction, then the wafer 6 is placed between the first clamping assembly 55 and the second clamping assembly 56, the elastic restoring member 5712 is stretched during the movement of the pushing member 5713, and after the driving cylinder 5711 is deactivated, the pushing member 5713 moves the first clamping assembly 55 and the second clamping assembly 56 in the opposite direction along the X direction under the elastic force of the elastic restoring member 5712, so that the wafer 6 is clamped, and damage to the wafer 6 due to too large clamping force can be avoided.

It should be noted that the present utility model is not limited to the specific structure of the elastic restoring member 5712, and for example, a person skilled in the art may set the elastic restoring member 5712 as a spring or an elastic cord.

Preferably, as shown in fig. 13, the first fixing member 54 is provided with a first connecting structure 5411, the pushing member 5713 is provided with a second connecting structure 5714, two ends of the elastic restoring member 5712 are respectively connected with the first connecting structure 5411 and the second connecting structure 5714, and an initial distance between the first connecting structure 5411 and the second connecting structure 5714 along the first horizontal direction is adjustable.

By setting the initial distance between the first connection structure 5411 and the second connection structure 5714 in the X direction to be adjustable, it is convenient to apply wafers 6 of different sizes, for example, if the size of the wafer 6 is large, the initial distance between the first connection structure 5411 and the second connection structure 5714 in the X direction can be increased, whereas if the size of the wafer 6 is small, the initial distance between the first connection structure 5411 and the second connection structure 5714 in the X direction can be shortened.

Wherein, the initial distance between the first connection structure 5411 and the second connection structure 5714 along the X direction refers to the distance between the first connection structure 5411 and the second connection structure 5714 along the X direction when the first clamping assembly 55 and the second clamping assembly 56 are located at the initial positions.

In a first preferred case, as shown in fig. 13, the second connection structure 5714 is a connection rod 57141 disposed along a first horizontal direction, a mounting hole (not shown) is provided in the push member 5713, the mounting hole penetrates the push member 5713 along the first horizontal direction, a first end (left end of the connection rod 57141 as viewed in fig. 13) of the connection rod 57141 is connected with the elastic restoring member 5712, the connection rod 57141 is provided with a threaded section (not shown) near a second end (right end of the connection rod 57141 as viewed in fig. 13) thereof, the threaded section penetrates the mounting hole in the push member 5713, and an adjusting nut 57142 in threaded engagement therewith is mounted on the threaded section, and a side (left side of the adjusting nut 57142 as viewed in fig. 13) of the adjusting nut 57142 near the first end of the connection rod 57141 abuts against the push member 5713.

Illustratively, as shown in fig. 13, the first connection structure 5411 is a fixed column fixedly mounted on the first fixing member 54, the left end of the elastic restoring member 5712 is fixedly connected with the fixed column, the right end of the elastic restoring member 5712 is fixedly connected with the left end of the connecting rod 57141, the connecting rod 57141 has a threaded section near the right end thereof, an adjusting nut 57142 is mounted on the threaded section, and an initial distance between the left end of the connecting rod 57141 and the fixed column can be adjusted by the adjusting nut 57142, for example, if the size of the wafer 6 is smaller, the connecting rod 57141 can be made closer to the fixed column by rotating the adjusting nut 57142 counterclockwise, the initial distance between the left end of the connecting rod 57141 and the fixed column can be shortened, whereas if the size of the wafer 6 is larger, the connecting rod 57141 can be made away from the fixed column by rotating the adjusting nut 57142 clockwise, and the initial distance between the left end of the connecting rod 57141 and the fixed column can be increased.

In a second preferred case, some adjustments may be made in the first preferred case, specifically, the second connection structure 5714 is still a connection rod 57141 disposed along the first horizontal direction, the first end of the connection rod 57141 is connected to the elastic restoring member 5712, the connection rod 57141 is provided with a threaded section near the second end thereof, the pushing member 5713 is still provided with a mounting hole, and the inner wall of the mounting hole is provided with threads adapted to the threaded section, and the threaded section is screwed and fixed with the mounting hole through the threads, so that the setting of the adjusting nut 57142 may be omitted, the initial distance between the left end of the connection rod 57141 and the fixed column may be adjusted directly by rotating the connection rod 57141, the mounting hole may penetrate the pushing member 5713, or may not penetrate the pushing member 5713, and a person skilled in the art may flexibly set according to specific situations.

In both the above-mentioned preferred cases, the initial distance between the first connection structure 5411 and the second connection structure 5714 along the X direction is adjusted by changing the position of the second connection structure 5714, in practical application, the second connection structure 5714 may be set to be fixed, the first connection structure 5411 may be set to be position-changeable, the initial distance between the first connection structure 5411 and the second connection structure 5714 along the X direction may be adjusted by changing the position of the first connection structure 5411, for example, or the first connection structure 5411 may be set to be a fixed column, a plurality of fixing holes may be provided on the first fixing member 54, the plurality of fixing holes may be spaced along the X direction, and the bottom ends of the fixing columns may be inserted into the fixing holes, so that the initial distance between the first connection structure 5411 and the second connection structure 5714 along the X direction may be adjusted by changing the installation position of the fixing column, or the first connection structure 5411 and the second connection structure 5714 may be set to be position-changeable, which may be flexibly adjusted and changed without deviating from the scope of the present utility model.

In addition, it should be noted that the first connection structure 5411 of the present utility model is not limited to the fixing column described above, and for example, the first connection structure 5411 may be provided as a fixing block or a fixing plate, or the like.

Preferably, as shown in fig. 12 to 14, the first fixing member 54 of the present utility model includes a base plate 541 disposed horizontally, a carrier plate 542 disposed horizontally, and a support column 543 disposed vertically.

Wherein, the bottom plate 541 and the carrier plate 542 are distributed along the vertical direction at intervals, and the bottom plate 541 is located below the carrier plate 542, the bottom and the top of the supporting column 543 are respectively fixedly connected or integrally arranged with the bottom plate 541 and the carrier plate 542, the carrier plate 542 is used for carrying the wafer 6, the first positioning groove 5511 and the second positioning groove 5611 are located above the carrier plate 542, the driving mechanism 571 is installed on the bottom plate 541, and the first rack 572, the second rack 573 and the gear 574 are all located between the bottom plate 541 and the carrier plate 542.

As shown in fig. 12 and 13, the carrier plate 542 is formed by two plates distributed at intervals along the X direction, the number of the supporting columns 543 is four, the four supporting columns 543 enclose a rectangular structure, the two plates of the carrier plate 542 are fixedly connected with the bottom plate 541 through the two supporting columns 543, the driving cylinder 5711 is fixedly mounted on the bottom surface of the bottom plate 541, the pushing member 5713 includes a vertical push rod 57131 and a horizontal push rod 57132, the bottom end of the vertical push rod 57131 is fixedly connected with a piston rod of the driving cylinder 5711, the top end of the vertical push rod 57131 is fixedly connected with or integrally arranged with one end of the horizontal push rod 57132, the horizontal push rod 57132 is located between the bottom plate 541 and the carrier plate 542, the horizontal push rod 57132 is fixedly connected with the first clamping assembly 55, the first connecting structure 5411 is disposed on the top surface of the bottom plate 541, the second connecting structure 5714 is disposed on the horizontal push rod 57132, the first rack 572, the second rack 573 and the gear 574 are located between the bottom plate 541 and the carrier plate 542, the gear 574 is rotatably mounted on the bottom plate 5713, a part of the first clamping assembly 55 is located on the top surface of the carrier plate 542, the first clamping assembly 55 is located between the other part of the first clamping assembly and the bottom plate 541 is located between the other part of the carrier plate 541.

The installation arrangement of the structures is facilitated by dividing the base plate 541 and the carrier plate 542, which are spaced apart in the vertical direction, into three mounting spaces.

It should be noted that, the carrying plate 542 of the present utility model is not limited to be composed of two plate bodies spaced apart along the X direction, for example, the carrying plate 542 may be configured as a unitary plate body structure, and the number of the supporting columns 543 is not limited to four, for example, three or six, etc. of the supporting columns 543, and such adjustment and modification of the specific number of the supporting columns 543 should be within the scope of the present utility model.

Preferably, as shown in fig. 12 and 13, the first clamping assembly 55 of the present utility model includes a first clamping member 551 and a first connecting member 552, the first clamping member 551 is located above the carrier plate 542, the first positioning slot 5511 is provided on the first clamping member 551, the first connecting member 552 is used for fixedly connecting the first clamping member 551 with the first rack 572, and the driving mechanism 571 is connected with the first connecting member 552; the second clamping assembly 56 includes a second clamping member 561 and a second connecting member 562, the second clamping member 561 being located above the carrier plate 542, the second positioning groove 5611 being provided to the second clamping member 561, the second connecting member 562 being for fixedly connecting the second clamping member 561 to the second rack 573.

Illustratively, the first clamping member 551 is a first clamping plate, a first positioning slot 5511 is disposed on the left side of the first clamping plate, the second clamping member 561 is a second clamping plate, a second positioning slot 5611 is disposed on the right side of the second clamping plate, the first clamping plate is fixedly connected with the first rack 572 through the first connecting member 552, the first connecting member 552 is further fixedly connected with the pushing member 5713 of the driving mechanism 571, and the second clamping plate is fixedly connected with the second rack 573 through the second connecting member 562.

It should be noted that the first clamping member 551 and/or the second clamping member 561 of the present utility model are not limited to the above-described clamping plates, and for example, the first clamping member 551 and/or the second clamping member 561 may be provided as clamping blocks, etc., and such modifications and changes to the specific structural forms of the first clamping member 551 and the second clamping member 561 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

It should be further noted that, in practical applications, the first connecting member 552 and/or the second connecting member 562 may be provided as a connecting plate or a connecting rod, etc. such modifications and changes to the specific structural forms of the first connecting member 552 and the second connecting member 562 are not limited to the principle and scope of the present utility model.

Preferably, as shown in fig. 12 to 14, the first connecting member 552 of the present utility model includes a first connecting plate 5521 disposed horizontally and a first connecting post (not shown) disposed vertically, the first connecting plate 5521 being located between the base plate 541 and the carrier plate 542 and being fixedly connected to the first rack 572, the carrier plate 542 being provided with a first through hole 5421 extending in a first horizontal direction at a position corresponding to the first connecting post, a bottom end of the first connecting post being fixedly connected to or integrally disposed with the first connecting plate 5521, a top end of the first connecting post being fixedly connected to or integrally disposed with the first clamping member 551 through the first through hole 5421, and the driving mechanism 571 being connected to the first connecting plate 5521; the second connecting member 562 includes a horizontally disposed second connecting plate 5621 and a vertically disposed second connecting post (not shown in the drawings), the second connecting plate 5621 is located between the base plate 541 and the carrier plate 542 and fixedly connected with the second rack 573, the carrier plate 542 is provided with a second through hole 5422 extending along the first horizontal direction at a position corresponding to the second connecting post, a bottom end of the second connecting post is fixedly connected or integrally disposed with the second connecting plate 5621, and a top end of the second connecting post passes through the second through hole 5422 and is fixedly connected or integrally disposed with the second clamping member 561.

Illustratively, the first connecting plate 5521 is an L-shaped structure, a portion of the first connecting plate 5521 disposed along the X-direction is fixedly connected with the first rack 572, a portion of the first connecting plate 5521 disposed along the Y-direction is fixedly connected with the first clamping member 551 through a first connecting column, a portion of the first connecting plate 5521 disposed along the Y-direction is also fixedly connected with the pushing member 5713 of the driving mechanism 571, the first connecting column can freely move in the first through hole 5421 along the X-direction, the second connecting plate 5621 is also an L-shaped structure, a portion of the second connecting plate 5621 disposed along the X-direction is fixedly connected with the second rack 573, a portion of the second connecting plate 5621 disposed along the Y-direction is fixedly connected with the second clamping member 561 through a second connecting column, and the second connecting column can freely move in the second through hole 5422 along the X-direction.

The number of the first connection posts is not limited, for example, only one first connection post may be provided, or a plurality of first connection posts may be provided, and the plurality of first connection posts are spaced apart along the Y direction.

Preferably, as shown in fig. 14, the first clamping member 551 is provided with at least two first hole sites 5512, and the first hole sites 5512 are distributed at intervals along the first horizontal direction, and the top ends of the first connecting columns are fixedly connected with the first hole sites 5512; the second clamping member 561 is provided with second hole sites 5612, at least two second hole sites 5612 are distributed at intervals along the first horizontal direction, and the top ends of the second connecting columns are fixedly connected with the second hole sites 5612.

As shown in fig. 14, the first clamping member 551 is provided with two first hole sites 5512 along the X direction, the second clamping member 561 is also provided with two second hole sites 5612 along the X direction, when the size of the wafer 6 is smaller, the first connecting column and the second connecting column can be respectively and fixedly connected with the first hole sites 5512 and the second hole sites 5612 on the outer side, and when the size of the wafer 6 is larger, the first connecting column and the second connecting column can be respectively and fixedly connected with the first hole sites 5512 and the second hole sites 5612 in the middle, so that the clamping and positioning device of the utility model can adapt to wafers 6 with more sizes.

It should be noted that, in order to improve the connection stability between the first clamping member 551 and the first connection plate 5521, the number of the first connection columns is preferably two, the two first connection columns are spaced apart along the Y direction, and accordingly, two first hole sites 5512 are also provided on the first clamping member 551 along the Y direction, that is, four first hole sites 5512 are provided on the first clamping member 551 in total, two groups, and likewise, in order to improve the connection stability between the second clamping member 561 and the second connection plate 5621, the number of the second connection columns is also preferably two, the two second connection columns are spaced apart along the Y direction, and accordingly, two second hole sites 5612 are also provided on the second clamping member 561 along the Y direction, that is, four second hole sites 5612 are provided on the second clamping member 561 in total, and two groups.

In addition, it should be noted that the number of the first hole sites 5512 and the second hole sites 5612 disposed along the X direction is not limited to two, for example, three or four, etc., and such flexible adjustment and modification should be limited within the scope and spirit of the present utility model.

Preferably, as shown in fig. 12 and 13, the clamping and positioning device of the present utility model further includes a first guide mechanism provided between the first fixing member 54 and the first clamping assembly 55, and a second guide mechanism provided between the first fixing member 54 and the second clamping assembly 56, the first guide mechanism and the second guide mechanism guiding the first clamping assembly 55 and the second clamping assembly 56 when the first clamping assembly 55 and the second clamping assembly 56 are moved, respectively.

Preferably, as shown in fig. 12 and 13, the first guide mechanism includes a mating first guide member 581 and second guide member (not shown), one of the first guide member 581 and the second guide member being connected to the first fixing member 54, the other of the first guide member 581 and the second guide member being connected to the first clamping assembly 55; the second guide mechanism includes mating third and fourth guide members 582, one of which is coupled to the first stationary member 54 and the other of which is coupled to the second clamping assembly 56 (not shown).

It should be noted that, in practical applications, the first guide member 581 and the second guide member may be configured to have a structure in which a guide rail is matched with a guide block, or the first guide member 581 and the second guide member may be configured to have a structure in which a guide groove is matched with a guide rib, or the first guide member 581 and the second guide member may be configured to have a structure in which a guide rod is matched with a guide hole, etc., which are not departing from the principle and scope of the present utility model, and such modifications and changes to the specific structural forms of the first guide member 581 and the second guide member should be limited to the protection scope of the present utility model.

In addition, it should be noted that, in practical applications, the third guide member 582 and the fourth guide member may be configured to have a structure in which a guide rail is matched with a guide block, or the third guide member 582 and the fourth guide member may be configured to have a structure in which a guide groove is matched with a guide rib, or the third guide member 582 and the fourth guide member may be configured to have a structure in which a guide rod is matched with a guide hole, etc., which are not departing from the principle and scope of the present utility model, and such modifications and changes to the specific structural forms of the third guide member 582 and the fourth guide member should be limited to the scope of the present utility model.

Preferably, as shown in fig. 12 and 13, the first guide member 581 and the third guide member 582 are guide rails extending in the first horizontal direction, and the second guide member and the fourth guide member are guide blocks adapted to the guide rails.

Illustratively, two guide rails are fixedly mounted on the top surface of the bottom plate 541 and are spaced apart along the Y direction, and two guide blocks are fixedly mounted on the bottom surfaces of the first connection plate 5521 and the second connection plate 5621, respectively.

Furthermore, those skilled in the art will appreciate that while some embodiments described herein include some features but not others included in other embodiments, combinations of features of different embodiments are meant to be within the scope of the application and form different embodiments. For example, in the claims of the present application, any of the claimed embodiments may be used in any combination.

Thus far, the technical solution of the present application has been described in connection with the preferred embodiments shown in the drawings, but it is easily understood by those skilled in the art that the scope of protection of the present application is not limited to these specific embodiments. Equivalent modifications and substitutions for related technical features may be made by those skilled in the art without departing from the principles of the present application, and such modifications and substitutions will fall within the scope of the present application.

Claims

1. A processing device is characterized by comprising a machine base, a material taking device, a detection device and a positioning device which are arranged on the machine base,

2. The processing apparatus of claim 1, wherein the positioning device comprises a wafer-receiving positioning device and a clamping positioning device,

3. The apparatus of claim 2, wherein the clamp positioning device comprises a first stationary member and a first clamp assembly, a second clamp assembly, and a drive assembly mounted on the first stationary member,

The first clamping assembly and the second clamping assembly are oppositely arranged along a first horizontal direction, the driving assembly can drive the first clamping assembly and the second clamping assembly to synchronously move along the first horizontal direction so as to clamp a wafer, and the driving assembly can also drive the first clamping assembly and the second clamping assembly to synchronously move along the first horizontal direction in a reverse direction.

4. A processing apparatus according to claim 3, wherein a side of the first clamping assembly facing the second clamping assembly is provided with a first positioning groove, a side of the second clamping assembly facing the first clamping assembly is provided with a second positioning groove, and the first positioning groove and the second positioning groove respectively abut against edges of both sides of the wafer to clamp the wafer.

5. The processing apparatus of claim 4 wherein said drive assembly comprises a drive mechanism, a first rack extending in said first horizontal direction, a second rack and pinion extending in said first horizontal direction,

The driving mechanism can drive the first clamping assembly to move along the first horizontal direction, the first rack and the second rack are respectively connected with the first clamping assembly and the second clamping assembly, the first rack and the second rack are distributed at intervals along the second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, the gear is rotatably arranged on the first fixing member, and the gear is located between the first rack and the second rack and meshed with the first rack and the second rack.

6. The apparatus of claim 5, wherein the drive mechanism includes a drive cylinder, a resilient return member extending in the first horizontal direction, and a push member coupled to the first clamping assembly,

The driving cylinder can drive the pushing member to drive the first clamping assembly to move along the first horizontal direction away from the second clamping assembly, two ends of the elastic reset member are respectively connected with the first fixing member and the pushing member, and the elastic reset member can drive the pushing member to drive the first clamping assembly to move along the first horizontal direction close to the second clamping assembly after the driving cylinder is not driven.

7. The processing apparatus according to claim 6, wherein the first fixing member is provided with a first connecting structure, the pushing member is provided with a second connecting structure, both ends of the elastic restoring member are respectively connected with the first connecting structure and the second connecting structure, and an initial distance between the first connecting structure and the second connecting structure along the first horizontal direction is adjustable.

8. The processing apparatus according to claim 7, wherein the second connection structure is a connection rod arranged along the first horizontal direction, a mounting hole is formed in the pushing member, the mounting hole penetrates through the pushing member along the first horizontal direction, a first end of the connection rod is connected with the elastic restoring member, a thread section is arranged on the connection rod near a second end of the connection rod, the thread section penetrates through the mounting hole, an adjusting nut in threaded fit with the thread section is mounted on the thread section, and one side of the adjusting nut near the first end of the connection rod abuts against the pushing member; or alternatively

9. The processing apparatus of claim 5, wherein the first securing member comprises a horizontally disposed base plate, a horizontally disposed carrier plate, and a vertically disposed support column,

10. The machining apparatus of claim 9, wherein the first clamping assembly includes a first clamping member and a first connecting member, the first clamping member being located above the carrier plate, the first positioning slot being located in the first clamping member, the first connecting member being configured to fixedly connect the first clamping member to the first rack, the driving mechanism being connected to the first connecting member;

the second clamping assembly comprises a second clamping member and a second connecting member, the second clamping member is located above the bearing plate, the second positioning groove is formed in the second clamping member, and the second connecting member is used for fixedly connecting the second clamping member with the second rack.

11. The processing apparatus according to claim 10, wherein the first connecting member includes a first connecting plate disposed horizontally and a first connecting column disposed vertically, the first connecting plate being located between the bottom plate and the carrier plate and being fixedly connected with the first rack, the carrier plate being provided with a first through hole extending in the first horizontal direction at a position corresponding to the first connecting column, a bottom end of the first connecting column being fixedly connected with or integrally disposed with the first connecting plate, a top end of the first connecting column being fixedly connected with or integrally disposed with the first clamping member through the first through hole, the driving mechanism being connected with the first connecting plate;

The second connecting member comprises a second connecting plate and a second connecting column, wherein the second connecting plate is horizontally arranged, the second connecting plate is located between the bottom plate and the bearing plate and is fixedly connected with the second rack, the bearing plate is provided with a second through hole extending along the first horizontal direction at a position corresponding to the second connecting column, the bottom end of the second connecting column is fixedly connected with the second connecting plate or integrally arranged, and the top end of the second connecting column passes through the second through hole and is fixedly connected with the second clamping member or integrally arranged.

12. The processing apparatus according to claim 11, wherein first hole sites are provided on the first clamping member, the number of the first hole sites is at least two and distributed at intervals along the first horizontal direction, and the top ends of the first connecting posts are fixedly connected with the first hole sites;

The second clamping component is provided with second hole sites, the number of the second hole sites is at least two and the second hole sites are distributed at intervals along the first horizontal direction, and the top ends of the second connecting columns are fixedly connected with the second hole sites.

13. A machining apparatus according to claim 3, wherein the clamping and positioning device further comprises a first guide mechanism provided between the first fixing member and the first clamping assembly and a second guide mechanism provided between the first fixing member and the second clamping assembly, the first guide mechanism and the second guide mechanism guiding the first clamping assembly and the second clamping assembly, respectively, when the first clamping assembly and the second clamping assembly are moved.

14. The machining apparatus of claim 13 wherein the first guide mechanism includes cooperating first and second guide members, the first guide member being coupled to the first stationary member and the second guide member being coupled to the first clamping assembly;

The second guide mechanism comprises a third guide member and a fourth guide member which are matched, the third guide member is connected with the first fixing member, and the fourth guide member is connected with the second clamping assembly.

15. The processing apparatus of claim 14, wherein the first guide member and the third guide member are guide rails extending in the first horizontal direction, and the second guide member and the fourth guide member are guide blocks adapted to the guide rails.

16. The processing apparatus according to claim 2, wherein the wafer positioning device includes a second fixing member and a wafer stage mounted on the second fixing member, and the positioning groove is provided on an upper surface of the wafer stage.

17. The processing apparatus according to claim 16, wherein the sheet carrying table includes a first sub-sheet carrying table and a second sub-sheet carrying table, the first sub-sheet carrying table and the second sub-sheet carrying table are disposed opposite to each other in a first horizontal direction and are spaced apart from each other, the positioning groove includes a first arc-shaped groove provided on an upper surface of the first sub-sheet carrying table and a second arc-shaped groove provided on an upper surface of the second sub-sheet carrying table, a first positioning point is formed at a first end of the first arc-shaped groove, a second positioning point is formed at a first end of the second arc-shaped groove, and the first positioning point and the second positioning point are located on the same line extending in the first horizontal direction.

18. The processing apparatus of claim 17, wherein the upper surface of the wafer carrier is provided with a plurality of different sized positioning grooves.

19. The processing apparatus according to claim 17, wherein the number of the carrying platforms is plural and is distributed at intervals in the vertical direction, and two adjacent carrying platforms are separated by a spacer arranged in the vertical direction.

20. The processing apparatus of claim 2, wherein the wafer-holding positioning device and the clamping positioning device are distributed in a vertical direction.

21. The processing apparatus of any one of claims 1 to 20, wherein the reclaiming apparatus comprises a lifting assembly, a rotating assembly mounted on the lifting assembly, and a telescopic reclaiming assembly mounted on the rotating assembly, the lifting assembly being configured to move up and down in a vertical direction with the rotating assembly and the telescopic reclaiming assembly, the rotating assembly being configured to rotate about a vertical axis with the telescopic reclaiming assembly, the telescopic reclaiming assembly being configured to pick and place wafers.

22. The processing apparatus according to any one of claims 1 to 20, wherein the processing apparatus is a chamfering machine.