CN221065673U

CN221065673U - Processing Equipment

Info

Publication number: CN221065673U
Application number: CN202322719787.4U
Authority: CN
Inventors: 徐公志; 尹德臻; 牛银星; 张笑笑; 宋玉玮; 卢凯文
Original assignee: Qingdao Gaoce Technology Co Ltd
Current assignee: Gaoce Shenchuang Shanghai Technology Co ltd
Priority date: 2023-10-10
Filing date: 2023-10-10
Publication date: 2024-06-04
Anticipated expiration: 2033-10-10

Abstract

The utility model relates to the technical field of electronic element manufacturing, in particular to processing equipment. The utility model aims to solve the problem of low material transfer efficiency of the existing processing equipment. The processing equipment comprises a first material box, a second material box, a material taking device, a detecting device, a first material transferring device, a second material transferring device, a grinding device and a cleaning device, wherein the material taking device is used for transferring materials in the first material box to the detecting device, the first material transferring device is used for transferring detected materials from the detecting device to the grinding device, the second material transferring device is used for transferring ground materials from the grinding device to the cleaning device, and the second material transferring device is used for transferring cleaned materials from the cleaning device to the material taking device and placing the materials into the second material box through the material taking device. The material taking device and the two material transferring devices are arranged to transfer materials among the devices, so that the working efficiency of the processing equipment is greatly improved.

Description

Processing equipment

Technical Field

The utility model relates to the technical field of electronic element manufacturing, in particular to processing equipment.

Background

Semiconductor wafers are very important materials in various fields such as aerospace, optical fibers, and the like. During processing of wafers, if lapping is directly performed after the wafers are cut from the ingot, chipping is likely to occur, causing wafer scrap, and therefore chamfering of the wafers is required before lapping.

Semiconductor wafer is except silicon wafer, still has silicon carbide wafer, sapphire wafer etc. and current beveler carries out chamfer processing in-process to the wafer, needs to shift the wafer through material transfer device between magazine, detection device, grinding device and belt cleaning device, however, current beveler's material transfer inefficiency, leads to each device to often appear idle condition, has led to very big waste.

Accordingly, there is a need in the art for a new solution to the above-mentioned problems.

Disclosure of utility model

In order to solve at least one of the above problems in the prior art, that is, in order to solve the technical problem of low material transfer efficiency of the existing processing apparatus, the present application provides a processing apparatus including a first magazine, a second magazine, a material taking device, a detecting device, a first material transfer device, a second material transfer device, a grinding device, and a cleaning device,

The first material box is used for storing materials to be processed, the second material box is used for storing processed materials, the material taking device is used for transferring the materials in the first material box to the detection device, the detection device is used for detecting the materials, the first material transferring device is used for transferring the detected materials from the detection device to the grinding device, the grinding device is used for grinding the materials, the second material transferring device is used for transferring the ground materials from the grinding device to the cleaning device, the cleaning device is used for cleaning the materials,

The second material transfer device is also used for transferring the cleaned material from the cleaning device to the material taking device and placing the material into the second material box through the material taking device.

In the preferred technical solution of the above processing apparatus, the processing apparatus further includes a positioning device, the positioning device is configured to position a center point of the material, the material taking device is further configured to transfer the material on the positioning device to the detecting device, and the detecting device is configured to detect a position of the center point of the material so as to calibrate the material taking device.

In a preferred embodiment of the above processing apparatus, the positioning device includes a first fixing member, a first clamping assembly, a second clamping assembly and a clamping driving assembly mounted on the first fixing member,

The first clamping assembly and the second clamping assembly are oppositely arranged along a first horizontal direction, the clamping driving assembly can drive the first clamping assembly and the second clamping assembly to synchronously move along the first horizontal direction so as to clamp materials, and the clamping driving assembly can also drive the first clamping assembly and the second clamping assembly to synchronously move along the first horizontal direction in a reverse direction.

In the preferred technical scheme of the processing equipment, a first positioning groove is formed in one side, facing the second clamping assembly, of the first clamping assembly, a second positioning groove is formed in one side, facing the first clamping assembly, of the second clamping assembly, and the first positioning groove and the second positioning groove are respectively abutted to edges of two sides of a material so as to clamp the material.

In a preferred embodiment of the above processing apparatus, the clamping driving assembly includes a clamping driving mechanism, a first rack extending in the first horizontal direction, a second rack and pinion extending in the first horizontal direction,

The clamping driving mechanism can drive the first clamping assembly to move along the first horizontal direction, the first rack and the second rack are respectively connected with the first clamping assembly and the second clamping assembly, the first rack and the second rack are distributed at intervals along the second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, the gear is rotatably arranged on the first fixing member, and the gear is located between the first rack and the second rack and meshed with the first rack and the second rack.

In a preferred embodiment of the above processing apparatus, the clamping driving mechanism includes a clamping cylinder, an elastic restoring member extending in the first horizontal direction, and a pushing member connected with the first clamping assembly,

The clamping cylinder can drive the pushing member to move away from the second clamping assembly along the first horizontal direction, two ends of the elastic reset member are respectively connected with the first fixing member and the pushing member, and the elastic reset member can enable the pushing member to move close to the second clamping assembly along the first horizontal direction after the clamping cylinder is not driven.

In the preferred technical scheme of the processing device, the first fixing member is provided with a first connecting structure, the pushing member is provided with a second connecting structure, two ends of the elastic reset member are respectively connected with the first connecting structure and the second connecting structure, and an initial distance between the first connecting structure and the second connecting structure along the first horizontal direction is adjustable.

In the preferred technical scheme of the processing equipment, the second connecting structure is a connecting rod arranged along the first horizontal direction, the pushing member is provided with a mounting hole, the mounting hole penetrates through the pushing member along the first horizontal direction, the first end of the connecting rod is connected with the elastic reset member, the connecting rod is provided with a thread section at a position close to the second end of the connecting rod, the thread section penetrates through the mounting hole, the thread section is provided with an adjusting nut in threaded connection with the adjusting nut, and one side of the adjusting nut close to the first end of the connecting rod is abutted against the pushing member; or alternatively

The second connection structure is a connecting rod arranged along the first horizontal direction, a mounting hole is formed in the pushing member, the first end of the connecting rod is connected with the elastic reset member, a thread section is arranged at a position, close to the second end of the connecting rod, threads matched with the thread section are arranged on the inner wall of the mounting hole, and the thread section is fixed through the threads in a threaded mode with the mounting hole.

In the preferable technical scheme of the processing equipment, the first fixing member comprises a bottom plate which is horizontally arranged, a bearing plate which is horizontally arranged and a supporting column which is vertically arranged,

The bottom plate with the loading board is along vertical direction interval distribution, the bottom plate is located the below of loading board, bottom and the top of support column respectively with the bottom plate with loading board fixed connection or integrative setting, the loading board is used for carrying the material, first constant head tank with the second constant head tank is located the top of loading board, press from both sides tight actuating mechanism and install on the bottom plate, first rack the second rack with the gear is located the bottom plate with between the loading board.

In a preferred technical solution of the above processing apparatus, the first clamping assembly includes a first clamping member and a first connecting member, the first clamping member is located above the carrier plate, the first positioning slot is provided on the first clamping member, the first connecting member is used for fixedly connecting the first clamping member with the first rack, and the clamping driving mechanism is connected with the first connecting member;

The second clamping assembly comprises a second clamping member and a second connecting member, the second clamping member is located above the bearing plate, the second positioning groove is formed in the second clamping member, and the second connecting member is used for fixedly connecting the second clamping member with the second rack.

In a preferred technical scheme of the processing device, the first connecting member comprises a first connecting plate and a first connecting column, the first connecting plate is arranged horizontally, the first connecting plate is located between the bottom plate and the bearing plate and is fixedly connected with the first rack, a first through hole extending along the first horizontal direction is formed in a position, corresponding to the first connecting column, of the bearing plate, the bottom end of the first connecting column is fixedly connected with or integrally arranged with the first connecting plate, the top end of the first connecting column penetrates through the first through hole and is fixedly connected with or integrally arranged with the first clamping member, and the clamping driving mechanism is connected with the first connecting plate;

The second connecting member comprises a second connecting plate and a second connecting column, wherein the second connecting plate is horizontally arranged, the second connecting plate is located between the bottom plate and the bearing plate and is fixedly connected with the second rack, the bearing plate is provided with a second through hole extending along the first horizontal direction at a position corresponding to the second connecting column, the bottom end of the second connecting column is fixedly connected with the second connecting plate or integrally arranged, and the top end of the second connecting column passes through the second through hole and is fixedly connected with the second clamping member or integrally arranged.

In the preferred technical scheme of the processing equipment, the first clamping member is provided with first hole sites, the number of the first hole sites is at least two and the first hole sites are distributed at intervals along the first horizontal direction, and the top ends of the first connecting columns are fixedly connected with the first hole sites;

The second clamping component is provided with second hole sites, the number of the second hole sites is at least two and the second hole sites are distributed at intervals along the first horizontal direction, and the top ends of the second connecting columns are fixedly connected with the second hole sites.

In a preferred technical solution of the above processing apparatus, the positioning device further includes a first clamping guide mechanism disposed between the first fixing member and the first clamping assembly, and a second clamping guide mechanism disposed between the first fixing member and the second clamping assembly, the first clamping guide mechanism and the second clamping guide mechanism respectively guide the first clamping assembly and the second clamping assembly when the first clamping assembly and the second clamping assembly move.

In a preferred technical solution of the above processing apparatus, the first clamping guide mechanism includes a first clamping guide member and a second clamping guide member that are matched, the first clamping guide member is connected with the first fixing member, and the second clamping guide member is connected with the first clamping assembly;

The second clamping guide mechanism comprises a third clamping guide member and a fourth clamping guide member which are matched, the third clamping guide member is connected with the first fixing member, and the fourth clamping guide member is connected with the second clamping assembly.

In the preferred technical scheme of the processing equipment, the positioning device comprises a second fixing member and a piece bearing table arranged on the second fixing member, and a positioning groove for positioning the center point of the material is formed in the piece bearing table.

In the preferred technical scheme of the processing equipment, the piece bearing table comprises a first piece bearing table and a second piece bearing table, the first piece bearing table and the second piece bearing table are oppositely arranged along a first horizontal direction and are distributed at intervals, the positioning groove comprises a first arc-shaped groove arranged on the upper surface of the first piece bearing table and a second arc-shaped groove arranged on the upper surface of the second piece bearing table, a first positioning point is formed at the first end of the first arc-shaped groove, a second positioning point is formed at the first end of the second arc-shaped groove, and the first positioning point and the second positioning point are positioned on the same straight line extending along the first horizontal direction.

In the preferred technical scheme of the processing equipment, the material taking device comprises a lifting assembly, a rotating assembly arranged on the lifting assembly and a telescopic material taking assembly arranged on the rotating assembly, wherein the lifting assembly is used for carrying the rotating assembly and the telescopic material taking assembly to move up and down along the vertical direction, the rotating assembly is used for carrying the telescopic material taking assembly to rotate around the vertical axis, and the telescopic material taking assembly is used for taking and placing materials.

In the preferred technical scheme of the processing equipment, the detection device comprises a detection fixing member, and a first detection assembly and a second detection assembly which are installed on the detection fixing member, wherein the first detection assembly is used for detecting the position of the center point of the material, and the second detection assembly is used for detecting the thickness of the material.

In the preferred technical scheme of the processing equipment, the first detection assembly comprises a detection bearing assembly, a translation assembly and a side finding detection member, wherein the detection bearing assembly is installed on the detection fixing member, the translation assembly is installed on the translation assembly and is used for bearing materials and can rotate with the materials, and the translation assembly can move along the horizontal direction relative to the detection fixing member.

In a preferred technical solution of the above processing apparatus, the second detecting assembly includes a supporting cantilever mounted on the detecting fixing member and a thickness detecting mechanism, a first end of the supporting cantilever is fixedly connected with the detecting fixing member, and the thickness detecting mechanism is mounted on a second end of the supporting cantilever.

In the preferable technical scheme of the processing equipment, the supporting cantilever comprises a connecting block, a first cantilever and a second cantilever, the first cantilever is positioned above the second cantilever and is distributed with the second cantilever at intervals along the vertical direction, one side surface of the connecting block is fixedly connected with the detection fixing member, the other side surface of the connecting block is fixedly connected with or integrally arranged with the first end of the first cantilever and the first end of the second cantilever,

The thickness detection mechanism comprises a thickness detection member and a bearing member, wherein the thickness detection member is installed at the second end of the first cantilever, a detection probe of the thickness detection member is arranged downwards along the vertical direction, the bearing member is installed at the second end of the second cantilever, and the bearing member is used for bearing materials and is located between the first cantilever and the second cantilever.

In the preferable technical scheme of the processing equipment, the first material transfer device comprises a first translation driving component, a first lifting driving component arranged on the first translation driving component, a rotation driving component arranged on the first lifting driving component, a first connecting arm horizontally arranged and a first sucker for taking materials,

The first translation driving component can drive the first lifting driving component to move along a first horizontal direction, the first lifting driving component can drive the rotation driving component to move vertically, one end of the first connecting arm is connected with the rotation driving component, the first sucker is arranged at the other end of the first connecting arm,

The rotary driving assembly is used for driving the first connecting arm to drive the first sucker to rotate between a material taking position and a material placing position, the first sucker is located at the material taking position and can suck materials located on the detection device, and the first sucker is located at the material placing position and can place the materials in the grinding device.

In a preferred technical solution of the above processing apparatus, the first material transferring device further includes a first limit stop member and a second limit stop member connected to the rotation driving assembly, the first limit stop member is capable of blocking the first connecting arm so that the first suction cup on the first connecting arm stops at the discharge level, and the second limit stop member is capable of blocking the first connecting arm so that the first suction cup on the first connecting arm stops at the discharge level.

In the preferable technical scheme of the processing equipment, the second material transfer device comprises a second translational driving assembly, a second lifting driving assembly arranged on the second translational driving assembly, a second connecting arm horizontally arranged, a second sucking disc and a third sucking disc,

The second lifting driving assembly can drive the second lifting driving assembly to move along the first horizontal direction, the second lifting driving assembly is connected with one end of the second connecting arm and can drive the second connecting arm to move vertically, the second sucker and the third sucker are both installed at the other end of the second connecting arm, the second connecting arm extends along the second horizontal direction, and the second horizontal direction is perpendicular to the first horizontal direction.

In a preferred technical solution of the above processing apparatus, the second suction cup is located below the third suction cup, an adsorption surface of the second suction cup is disposed downward, and an adsorption surface of the third suction cup is disposed upward.

In a preferred technical scheme of the processing equipment, the grinding device comprises a grinding component, a first horizontal driving component, a second horizontal driving component arranged on the first horizontal driving component, a grinding bearing component arranged on the second horizontal driving component,

The grinding assembly is used for grinding materials, the first horizontal driving assembly can drive the second horizontal driving assembly to move along the first horizontal direction, the second horizontal driving assembly can drive the grinding bearing assembly to move along the second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, and the grinding bearing assembly is used for bearing the materials and can rotate with the materials.

In a preferred technical solution of the above processing apparatus, the grinding device further includes a first lifting driving mechanism mounted on the second horizontal driving assembly, and the first lifting driving mechanism can drive the grinding bearing assembly to move up and down along a vertical direction.

In a preferred technical scheme of the processing equipment, the grinding assembly comprises a grinding fixing member, a grinding motor, a grinding transmission assembly, a main shaft assembly, a grinding wheel and a supporting assembly which are arranged on the grinding fixing member,

The grinding motor is located the side of main shaft subassembly, the grinding motor pass through grinding drive assembly with the first end drive connection of main shaft subassembly is in order to drive main shaft subassembly is rotatory, the emery wheel is used for carrying out the grinding to the material and fixed mounting is in the second end of main shaft subassembly, the second end of main shaft subassembly with the fixed component of grinding is connected, supporting component support in between main shaft subassembly's first end and the second end, supporting component is right main shaft subassembly's holding power with grinding drive assembly is right main shaft subassembly's direction of force is opposite.

In the preferred technical scheme of the processing equipment, the supporting assembly comprises a supporting block and a tightening screw, a threaded hole matched with the tightening screw is formed in the grinding fixing member, a first end of the supporting block is supported on the spindle assembly, and one end of the tightening screw penetrates through the threaded hole and is supported at a second end of the supporting block.

In the preferred technical scheme of the processing device, a limiting groove is formed in the end face of the first end of the supporting block, and a part of the spindle assembly is located in the limiting groove.

In a preferred technical solution of the above processing apparatus, the opening size of the limiting groove gradually decreases along the direction from the first end toward the second end of the supporting block.

In the preferable technical scheme of the processing equipment, the cleaning device comprises a cleaning fixing member, a spin-drying component, a flushing component, a material taking sucker and a second lifting driving mechanism which are arranged on the cleaning fixing member,

The cleaning fixing member is provided with a cleaning chamber, at least one part of the spin-drying assembly is positioned in the cleaning chamber, the spin-drying assembly is used for bearing materials and can rotate with the materials, the flushing assembly is used for flushing the materials positioned on the spin-drying assembly,

The second lifting driving mechanism can drive the material taking sucker to vertically move, the material taking sucker is located right above the spin-drying assembly, and the material taking sucker is used for transferring materials on the spin-drying assembly to the second material transferring device.

In a preferred embodiment of the above processing apparatus, the processing apparatus is a chamfering machine.

Under the condition of adopting the technical scheme, the processing equipment provided by the utility model has the advantages that the material is transferred among the devices by arranging the material taking device, the first material transferring device and the second material transferring device, so that the working efficiency of the processing equipment is greatly improved.

Furthermore, the processing equipment provided by the utility model is used for positioning the center point of the material by arranging the positioning device, detecting the position of the center point of the wafer by combining the detection device, and compensating and correcting the extension length and the rotation angle of the material taking device.

Still further, the positioning device clamps and positions materials by adopting two groups of clamping assemblies which are oppositely arranged and can synchronously move in opposite directions and synchronously move in opposite directions, can be suitable for materials with various sizes, and greatly improves the application range of the positioning device.

Still further, according to the positioning device disclosed by the utility model, the first positioning groove and the second positioning groove are respectively arranged on the first clamping assembly and the second clamping assembly to clamp and position the material, so that the positioning accuracy can be improved.

Still further, according to the positioning device disclosed by the utility model, the first clamping component and the second clamping component clamp materials by adopting the elastic restoring force of the elastic restoring component, so that the situation that the materials are damaged due to overlarge clamping force can be avoided.

Still further, the positioning device of the utility model can be suitable for more materials with different sizes by setting the initial distance between the first connecting structure and the second connecting structure along the X direction to be adjustable, thereby further improving the application range of the positioning device.

Still further, the positioning device divides the vertical space into three layers of installation spaces by arranging the bottom plates and the bearing plates which are distributed at intervals along the vertical direction, thereby being convenient for the installation and arrangement of each structure.

Still further, the positioning device of the utility model can be suitable for more materials with different sizes by arranging at least two first hole sites and second hole sites which are distributed at intervals on the first clamping member and the second clamping member respectively, thereby further improving the application range of the positioning device.

Furthermore, the positioning device can position a plurality of materials with different sizes by arranging the positioning grooves with different sizes on the wafer bearing table, so that the application range of the positioning device is improved.

Still further, the first detection component of the utility model can adjust the horizontal distance between the edge finding detection component and the detection bearing component through the translation component by installing the edge finding detection component on the translation component, so that the first detection component can be suitable for materials with different sizes, and the application range of the first detection component is improved.

Still further, the first material transfer device of the utility model drives the first connecting arm to rotate between the material taking position and the material placing position by arranging the rotary driving component so as to improve the working efficiency of material transfer without moving the first sucker along the second horizontal direction, thereby being more convenient for arrangement.

Still further, the first material transfer device provided by the utility model can accurately stop the first sucker at the discharging position and the material taking position by arranging the limit stop component to carry out limit stop on the first connecting arm, so that the reliability of the device is improved.

Still further, the second material transfer device of the utility model can prevent the cleaned material from being polluted by arranging the second sucker and the third sucker to transfer the material before cleaning and the material after cleaning respectively.

Still further, according to the second material transferring device disclosed by the utility model, the second sucker is arranged below the third sucker, after the second sucker is used for placing materials on the spin-drying table of the cleaning device, the third sucker does not need to be horizontally moved, and the material taking sucker on the cleaning device can be used for transferring the cleaned materials to the third sucker, so that the working efficiency is greatly improved.

Furthermore, the grinding device disclosed by the utility model can improve the material transferring efficiency by arranging the two horizontal driving assemblies to drive the grinding bearing assembly to horizontally move, and in addition, the center point of the grinding bearing assembly is conveniently aligned with the center point of the material, so that the processing quality of the material is improved.

Still further, the grinding component only fixes one end of the main shaft component, and the other end of the main shaft component is a free end, and in the installation process, the other end of the main shaft component can be fixed through the cooperation of the supporting component and the grinding transmission component, so that the installation difficulty is greatly reduced, and the assembly efficiency of the grinding component is improved.

Still further, the grinding assembly is matched with the threaded hole on the grinding fixing member by adopting the jacking screw, so that the position of the supporting block can be conveniently adjusted, the operation is simple, and the assembly efficiency is improved.

Still further, the grinding component provided by the utility model has the advantages that the limiting groove is formed in the supporting block, the main shaft component is limited through the limiting groove, and the stability is better.

Still further, the grinding assembly of the utility model can further improve the stability of the spindle assembly by arranging the limit groove to be approximately of a V-shaped structure.

Still further, the cleaning device of the utility model is convenient for transferring the materials on the spin-drying assembly to the third sucker on the second material transferring device by arranging the material taking sucker right above the spin-drying assembly.

Drawings

The technical scheme of the present application is described below with reference to the accompanying drawings. In the accompanying drawings:

FIG. 1 is a schematic view of a chamfering machine according to the present application;

FIG. 2 is a schematic view of the material taking apparatus according to the present application;

FIG. 3 is a schematic view of the rotating assembly of the reclaimer device of the present application;

FIG. 4 is a schematic view of a telescopic take-off assembly of the take-off device according to the present application;

FIG. 5 is a schematic diagram of a telescopic take-off assembly of the take-off device of the present application;

FIG. 6 is a schematic view of a telescopic take-off assembly of the take-off device of the present application;

FIG. 7 is a schematic diagram of the structure of the detecting device of the present application;

FIG. 8 is a schematic view of a positioning device according to the present application;

FIG. 9 is a schematic view of a positioning device according to the present application;

FIG. 10 is a schematic view of a positioning device according to the present application;

FIG. 11 is a schematic view of a portion of a positioning device according to the present application;

FIG. 12 is a schematic view of a positioning apparatus for positioning and clamping a wafer according to the present application;

FIG. 13 is a schematic view of the structure of the material transfer support, the first material transfer apparatus and the second material transfer apparatus of the present utility model;

FIG. 14 is a schematic view of the structure of the material transfer support, the first translational drive assembly, and the second translational drive assembly of the present utility model;

FIG. 15 is a schematic view of a first material transfer apparatus according to the present utility model;

FIG. 16 is a schematic diagram of a first material transfer apparatus according to the present utility model;

FIG. 17 is a schematic diagram III of a first material transfer apparatus according to the present utility model;

FIG. 18 is a schematic diagram of a second material transfer apparatus according to the present utility model;

FIG. 19 is a second schematic structural view of the second material transfer apparatus according to the present utility model;

FIG. 20 is a schematic view showing a part of the structure of the grinding apparatus of the present utility model;

FIG. 21 is a schematic view of the grinding assembly of the present utility model;

FIG. 22 is a schematic view of a portion of the structure of the grinding assembly of the present application;

FIG. 23 is a schematic structural view of a spindle assembly of the grinding assembly of the present application;

FIG. 24 is a schematic view of the structure of the cleaning device of the present application;

fig. 25 is a schematic structural view of a spin-drying assembly of the washing apparatus of the present application.

List of reference numerals

1. A base;

11. A base; 12. a feeding bin support; 13. a material transfer support seat; 131. a first guide member; 132. a second guide member; 133. a third guide member;

2. A material taking device;

21. A lifting assembly; 211. lifting the fixing seat; 212. lifting the connecting plate; 213. a lifting motor; 214. a timing belt assembly; 215. a screw rod; 216. a lifting slide block; 22. a rotating assembly; 221. a fixing frame; 222. a first rotation shaft; 223. a rotating member; 224. a first rotating electric machine; 225. a first speed reducer; 226. a first coupling; 23. a telescopic material taking assembly; 231. a telescopic fixing member; 232. a telescopic driving mechanism; 233. a moving member; 234. a drive rack; 235. a first rotating shaft; 236. a second rotating shaft; 237. a first transmission mechanism; 238. a second transmission mechanism; 239. a horizontal guide mechanism; 230. a take-out member; 2321. a telescopic motor; 2322. a third driving pulley; 2323. a third driven pulley; 2324. a third belt; 2325. a translation slider; 2331. a moving block; 2332. a moving rack; 2351. a transmission gear; 2371. a first driving pulley; 2372. a first driven pulley; 2373. a first belt; 2381. a second driving pulley; 2382. a second driven pulley; 2383. a second belt; 2391. a horizontal guide rail; 2392. a guide block; 2301. a body; 2302. a connecting block; 23011. a first suction hole.

3. A detection device;

31. Detecting the fixing member; 311. a fixed bracket; 32. detecting a bearing assembly; 321. a second rotary drive mechanism; 322. a second rotation shaft; 323. detecting the bearing member; 3211. a connecting flange; 3212. a second rotating electric machine; 3213. a second speed reducer; 3214. a second coupling; 33. a translation assembly; 331. a translation seat; 332. a mounting plate; 34. a side finding detecting member; 341. a signal transmitter; 342. a signal receiver; 35. a thickness detection mechanism; 351. a thickness detection member; 352. a carrier member; 36. supporting the cantilever; 361. a first cantilever; 362. a second cantilever; 363. a connecting block;

41. a first magazine; 42. a second magazine;

5. a positioning device;

51. A positioning groove; 511. a first arc-shaped groove; 512. a second arc-shaped groove; 5111. a first location point; 5121. a second positioning point; 52. a wafer carrying table; 521. a first sub-wafer stage; 522. a second sub-wafer stage; 53. a fixed shaft; 531. a spacer bush; 54. a first fixing member; 541. a bottom plate; 542. a carrying plate; 543. a support column; 5411. a first connection structure; 5421. a first through hole; 5422. a second through hole; 55. a first clamping assembly; 551. a first clamping member; 552. a first connecting member; 5511. a first positioning groove; 5512. a first hole site; 5521. a first connection plate; 56. a second clamping assembly; 561. a second clamping member; 562. a second connecting member; 5611. a second positioning groove; 5612. a second hole site; 5621. a second connecting plate; 57. a clamping drive assembly; 571. a clamping driving mechanism; 572. a first rack; 573. a second rack; 574. a gear; 5711. a clamping cylinder; 5712. an elastic return member; 5713. a pushing member; 5714. a second connection structure; 57131. a vertical push rod; 57132. a horizontal push rod; 57141. a connecting rod; 57142. an adjusting nut; 581. a first clamping guide member; 582. a third clamping guide member;

6. A first material transfer device;

61. A first translational drive mechanism; 611. a first translation motor; 612. a first horizontal lead screw; 613. a first slider; 62. a first horizontal slider; 63. a first lifting seat; 64. a rotary drive assembly; 641. a mounting base; 642. a rotary cylinder; 65. a first connecting arm; 66. a first suction cup; 67. a first limit bolt; 68. a first lock nut; 69. the second limit bolt; 60. a vertical guide rail;

7. a second material transfer device;

71. A second translational drive mechanism; 711. a second translation motor; 712. the second horizontal lead screw; 72. a second horizontal slider; 73. a second elevation drive assembly; 731. a bracket; 732. a second lifting cylinder; 74. a second connecting arm; 75. a second suction cup; 76. a third suction cup;

8. a grinding device;

81. A first horizontal drive assembly; 811. a first motor; 812. a first translation seat; 82. a second horizontal drive assembly; 821. a second motor; 822. a second translation seat; 83. a third slider; 84. grinding the bearing assembly; 841. a lifting seat; 842. a third rotation shaft; 843. grinding the carrier member; 85. a grinding assembly; 851. grinding the fixed member; 852. a grinding driving mechanism; 8521. grinding the motor; 8522. a driving pulley; 8523. a transmission belt; 853. grinding the shaft body; 854. grinding wheel; 856. a clamping sleeve; 8561. an opening; 8562. an adjusting screw; 8563. a flange plate; 8564. a first positioning structure; 857. a support assembly; 8571. a support block; 8572. tightly pushing the screw; 85711. a limit groove;

9. A cleaning device;

91. Cleaning the fixing member; 911. cleaning the chamber; 912. cleaning the fixing seat; 913. a protective cover; 92. a spin-drying assembly; 921. spin-drying the main shaft; 922. a spin-drying table; 923. spin-drying the motor; 924. spin-drying the synchronous belt group; 9211. spin-drying the shaft body; 9212. spin-drying the shaft sleeve; 9221. a second suction hole; 9241. spin-drying the driving belt wheel; 9242. spin-drying the transmission belt; 9243. spin-drying the driven belt wheel; 93. a water spray pipe; 941. a material taking sucker; 942. a third cylinder; 943. a third connecting arm; 95. an air blowing pipe;

10. And (3) a wafer.

Detailed Description

Preferred embodiments of the present utility model are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are merely for explaining the technical principles of the present utility model, and are not intended to limit the scope of the present utility model. For example, although the embodiments described below are described in connection with chamfering machines, the teachings of the present utility model are equally applicable to other types of processing equipment, and such adjustments and changes to the application object do not depart from the principles and scope of the present utility model, and are intended to be limited thereto.

It should be noted that, in the description of the present application, terms such as "upper", "lower", "left", "right", and the like, refer to directions or positional relationships based on the directions or positional relationships shown in the drawings, which are merely for convenience of description, and do not indicate or imply that the apparatus or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," "third," "fourth," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Furthermore, it should be noted that, in the description of the present application, unless explicitly specified and limited otherwise, the terms "mounted," "configured," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application can be understood by those skilled in the art according to the specific circumstances.

The utility model provides a chamfering machine which is used for chamfering and grinding a wafer.

As shown in fig. 1, the chamfering machine of the present utility model includes a first magazine 41, a second magazine 42, a material taking device 2, a detecting device 3, a first material transferring device 6, a second material transferring device 7, a grinding device 8, and a cleaning device 9.

Wherein the first magazine 41 is used for storing a material to be processed (e.g. a wafer 10), the second magazine 42 is used for storing a processed wafer, the pick-up device 2 is used for transferring the wafer 10 in the first magazine 41 to the inspection device 3, the inspection device 3 is used for inspecting the wafer 10, the first material transfer device 6 is used for transferring the inspected wafer 10 from the inspection device 3 to the grinding device 8, the grinding device 8 is used for grinding the wafer 10, the second material transfer device 7 is used for transferring the ground wafer 10 from the grinding device 8 to the cleaning device 9, the cleaning device 9 is used for cleaning the wafer 10, and the second material transfer device 7 is also used for transferring the cleaned wafer 10 from the cleaning device 9 to the pick-up device 2 and placing the wafer 10 into the second magazine 42 by the pick-up device 2.

In the process of chamfering and grinding the wafer 10, firstly, the material taking device 2 transfers the wafer 10 to be processed in the first material box 41 to the detection device 3 for detection, the wafer 10 after the detection is qualified is transferred to the grinding device 8 for chamfering and grinding by the first material transferring device 6, the wafer 10 after the grinding is transferred to the cleaning device 9 for cleaning by the second material transferring device 7, the wafer 10 after the cleaning is transferred to the material taking device 2 by the second material transferring device 7, and finally, the processed wafer 10 is put into the second material box 42 by the material taking device 2.

Illustratively, as shown in fig. 1, the first magazine 41, the second magazine 42, the material taking device 2, the detecting device 3, the grinding device 8 and the cleaning device 9 are all mounted on the frame 1 of the chamfering machine, wherein the frame 1 includes a base 11, an upper bin support 12 and a material transfer support 13, the first magazine 41 and the second magazine 42 are all fixedly mounted on the top surface of the upper bin support 12, the material taking device 2, the grinding device 8 and the cleaning device 9 are all mounted on the base 11, the first material transferring device 6 and the second material transferring device 7 are all mounted on the material transfer support 13, and the material taking device 2, the grinding device 8 and the cleaning device 9 are distributed in a first horizontal direction (X direction in fig. 1), the grinding device 8 is located between the material taking device 2 and the cleaning device 9, the detecting device 3, the first material transferring device 6 and the second material transferring device 7 are also distributed in a first horizontal direction, and the first horizontal direction (Y direction in a second horizontal direction in fig. 1) and the material taking device 2 and the second horizontal direction.

Preferably, as shown in fig. 1 and 2, the material taking device 2 of the present utility model includes a lifting assembly 21, a rotating assembly 22 mounted on the lifting assembly 21, and a telescopic material taking assembly 23 mounted on the rotating assembly 22, wherein the lifting assembly 21 is used for moving up and down along a vertical direction with the rotating assembly 22 and the telescopic material taking assembly 23, the rotating assembly 22 is used for rotating along a vertical axis with the telescopic material taking assembly 23, and the telescopic material taking assembly 23 is used for taking and placing the wafer 10.

When the wafer 10 needs to be taken out from the first material box 41, the rotating assembly 22 can rotate with the telescopic material taking assembly 23, so that the telescopic material taking assembly 23 is aligned with the first material box 41 in the horizontal direction, the lifting assembly 21 can move up and down with the rotating assembly 22 and the telescopic material taking assembly 23, so that the telescopic material taking assembly 23 is aligned with the wafer 10 to be extracted in the height direction, the telescopic material taking assembly 23 is used for taking down the wafer 10, and then the rotating assembly 22 rotates with the telescopic material taking assembly 23 to a position aligned with the detecting device 3, so that the wafer 10 is placed on the detecting device 3 for detection.

Preferably, as shown in fig. 2, the lifting assembly 21 of the present utility model includes a lifting fixing seat 211, and a vertical driving mechanism and a lifting connection plate 212 mounted on the lifting fixing seat 211, wherein the lifting connection plate 212 is fixedly connected with the rotating assembly 22, and the vertical driving mechanism is connected with the lifting connection plate 212 and can drive the lifting connection plate 212 to move up and down along the vertical direction.

Illustratively, as shown in fig. 2, the lifting fixing seat 211 is disposed along a vertical direction, the vertical driving mechanism includes a lifting motor 213, a synchronous belt assembly 214, a screw 215 and a lifting slider 216, the lifting connection plate 212 is fixedly connected or integrally disposed with the lifting slider 216, the screw 215 is disposed along the vertical direction, a driving shaft of the lifting motor 213 is connected with a bottom end of the screw 215 through the synchronous belt assembly 214 to drive the screw 215 to rotate, the screw 215 is rotatably mounted on the lifting fixing seat 211, and the lifting slider 216 is mounted on the screw 215 and can move up and down along the screw 215 along with the rotation of the screw 215 to drive the rotating assembly 22 and the telescopic material taking assembly 23 to move up and down through the lifting connection plate 212.

It should be noted that, the present utility model is not limited to the specific structural form of the vertical driving mechanism, for example, the synchronous belt assembly 214 may be replaced by a gear transmission assembly, or the lifting motor 213 may be directly fixedly connected to the bottom end of the screw rod 215 through a speed reducer, in addition, the screw rod 215 and the lifting slider 216 may be replaced by a gear rack transmission mechanism, etc., and such adjustment and change of the specific structural form of the vertical driving mechanism do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Preferably, as shown in fig. 2 and 3, the rotating assembly 22 of the present utility model includes a rotation fixing member fixedly connected with the lifting assembly 21, a first rotation driving mechanism fixedly installed on the rotation fixing member, a first rotation shaft 222 rotatably installed on the rotation fixing member, and a rotation member 223, the telescopic reclaiming assembly 23 is fixedly installed on the rotation member 223, the first rotation shaft 222 is vertically disposed, a bottom end and a top end of the first rotation shaft 222 are fixedly connected with the first rotation driving mechanism and the rotation member 223, respectively, and the first rotation driving mechanism is used for driving the first rotation shaft 222 to rotate, thereby driving the rotation member 223 and the telescopic reclaiming assembly 23 to rotate.

The rotation fixing member is fixedly connected with the lifting connection plate 212 of the lifting assembly 21, and the first rotation driving mechanism drives the rotation member 223 and the telescopic material taking assembly 23 mounted on the rotation member 223 to rotate by driving the first rotation shaft 222.

It should be noted that, the present utility model is not limited to the rotation range of the rotation member 223, and those skilled in the art may reasonably define the rotation range of the rotation member 223 according to the position of each device of the chamfering machine in practical application, for example, the rotation range of the rotation member 223 may be limited to not more than 90 degrees, or the rotation range of the rotation member 223 may be limited to not more than 180 degrees, or the rotation member 223 may be further rotatable by 360 degrees, etc., which are flexibly adjusted and changed without departing from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

In addition, the specific configuration of the first rotation driving mechanism is not limited, and for example, the first rotation driving mechanism may be configured as a motor and a speed reducer, a motor and a timing belt assembly, a motor and a gear assembly, or the like, so long as the first rotation driving mechanism can drive the first rotation shaft 222 to rotate.

Preferably, as shown in fig. 3, the first rotation driving mechanism of the present utility model includes a first rotation motor 224, a first speed reducer 225 and a first coupling 226 connected in sequence, the first coupling 226 being fixedly connected with the bottom end of the first rotation shaft 222.

Illustratively, as shown in fig. 3, the first speed reducer 225 is fixedly connected with the rotation fixing member, the first rotary motor 224 is installed below the first speed reducer 225, the first coupling 226 is installed above the first speed reducer 225, and the bottom end of the first rotary shaft 222 is fixedly connected with the output shaft of the first speed reducer 225 through the first coupling 226.

Preferably, as shown in fig. 3, the rotation fixing member of the present utility model includes a fixing frame 221 fixedly connected to the lifting assembly 21 and a fixing cylinder (not shown) located at the top end of the fixing frame 221, a portion of the first rotation shaft 222 is located in the fixing cylinder and is rotatably connected to the fixing cylinder, and the first rotation driving mechanism is fixedly connected to the fixing frame 221.

As shown in fig. 2 and 3, the side of the fixing frame 221 of the rotation fixing member is fixedly connected with the lifting connection plate 212 of the lifting assembly 21, the bottom of the fixing frame 221 is provided with a fixing hole, the first speed reducer 225 is installed in the fixing hole, the top end of the first speed reducer 225 penetrates through the fixing hole to extend into the fixing frame 221, the top end of the first rotation shaft 222 extends out of the top of the fixing cylinder and is fixedly connected with the rotation member 223, the bottom end of the first rotation shaft 222 extends out of the bottom of the fixing cylinder and penetrates through the top of the fixing frame 221 to be fixedly connected with the first coupling 226 in the fixing frame 221, the bearing is installed in the fixing cylinder, and the first rotation shaft 222 is rotatably connected with the fixing cylinder through the bearing.

Preferably, as shown in fig. 4 to 6, the telescopic reclaiming assembly 23 of the present utility model includes a telescopic fixing member 231 fixedly connected with the rotating assembly 22, and a telescopic driving mechanism 232, a moving member 233, a driving rack 234, a first rotating shaft 235, a second rotating shaft 236, a first driving mechanism 237, a second driving mechanism 238, a horizontal guiding mechanism 239, and a reclaiming member 230 mounted on the telescopic fixing member 231.

The telescopic driving mechanism 232 is in driving connection with the moving member 233 and can drive the moving member 233 to horizontally move relative to the telescopic fixed member 231, the transmission rack 234 is horizontally arranged and parallel to the moving direction of the moving member 233, the first rotating shaft 235 and the second rotating shaft 236 are rotatably installed on the moving member 233, the first rotating shaft 235 and the second rotating shaft 236 are horizontally arranged and perpendicular to the transmission rack 234, a first end of the first rotating shaft 235 is provided with a transmission gear 2351 meshed with the transmission rack 234, a second end of the first rotating shaft 235 is connected with a first end of the second rotating shaft 236 through a first transmission mechanism 237, a second end of the second rotating shaft 236 is connected with the taking member 230 through a second transmission mechanism 238, the taking member 230 is installed on the moving member 233 and can horizontally move relative to the moving member 233 under the driving of the second transmission mechanism 238, the moving direction of the taking member 230 is consistent with the moving direction of the moving member 233, the horizontal guiding mechanism 239 is installed between the moving member 233 and the taking member 230, and the horizontal guiding mechanism 239 is used for guiding the taking member 230 when the taking member 230 moves relative to the moving member 233.

When the wafer 10 needs to be taken and placed, the telescopic driving mechanism 232 drives the moving member 233 to horizontally move, the moving member 233 drives the transmission gear 2351 on the first rotating shaft 235 to rotate along the transmission rack 234, the transmission gear 2351 drives the first rotating shaft 235 to rotate, the first rotating shaft 235 drives the second rotating shaft 236 to rotate through the first transmission mechanism 237, the second rotating shaft 236 drives the taking member 230 to horizontally move through the second transmission mechanism 238, and the taking member 230 has double-stroke telescopic capacity through two-stage transmission.

Preferably, as shown in fig. 5 and 6, the first transmission mechanism 237 includes a first driving pulley 2371, a first driven pulley 2372, and a first transmission belt 2373 connecting the first driving pulley 2371 and the first driven pulley 2372, the first driving pulley 2371 is fixed at a second end of the first rotating shaft 235, and the first driven pulley 2372 is fixed at a first end of the second rotating shaft 236.

In the process of driving the moving member 233 to move by the telescopic driving mechanism 232, the first driving pulley 2371 rotates along with the first rotating shaft 235, and rotates with the first driven pulley 2372 and the second rotating shaft 236 by the first transmission belt 2373.

It should be noted that, the first transmission mechanism 237 is not limited to the pulley transmission set described above, for example, the first transmission mechanism 237 may be configured as a gear transmission set or a sprocket transmission set, and such modifications and changes to the specific structural form of the first transmission mechanism 237 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Of course, the present application preferably provides the first transmission mechanism 237 as the pulley gear set described above, which is convenient for arrangement and can reduce cost.

Preferably, as shown in fig. 4 to 6, the second transmission mechanism 238 includes a second driving pulley 2381, a second driven pulley 2382, and a second transmission belt 2383 connecting the second driving pulley 2381 and the second driven pulley 2382, the second driving pulley 2381 is fixed at a second end of the second rotating shaft 236, the second driven pulley 2382 is rotatably mounted on the moving member 233, the second driven pulley 2382 and the second driving pulley 2381 are spaced apart in a horizontal direction parallel to the transmission rack 234, and the second transmission belt 2383 is fixedly connected with the take-out member 230.

In the process of driving the moving member 233 to move by the telescopic driving mechanism 232, the second driving pulley 2381 rotates along with the second rotating shaft 236, and horizontally moves with the discharging member 230 by the second driving belt 2383.

It should be noted that, the second transmission mechanism 238 is not limited to the pulley transmission set described above, for example, the second transmission mechanism 238 may be configured as a sprocket transmission set, and such modifications and changes to the specific structural form of the second transmission mechanism 238 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Of course, the present application preferably provides the second drive mechanism 238 as a pulley drive train as described above, which reduces both the weight of the telescopic take off assembly 23 and noise.

Preferably, as shown in fig. 4 to 6, the moving member 233 includes a moving block 2331 and a moving frame 2332, the bottom of the moving block 2331 is fixedly connected with the telescopic driving mechanism 232, the first rotating shaft 235 and the second rotating shaft 236 are both installed on the moving block 2331, one end of the moving frame 2332 is fixedly connected with or integrally provided with the moving block 2331 and horizontally extends along the moving direction of the material taking member 230, and the second driven pulley 2382 is rotatably installed at the other end of the moving frame 2332.

Illustratively, the moving frame 2332 is horizontally disposed along a moving direction thereof, the rear end of the moving frame 2332 is fixedly connected with the moving block 2331, the front end of the moving frame 2332 extends to the front end of the take-out member 230, the second rotating shaft 236 is positioned obliquely above the first rotating shaft 235, and the second driven pulley 2382 is rotatably mounted at the front end of the moving frame 2332.

Preferably, as shown in fig. 4 to 6, the horizontal guiding mechanism 239 includes a horizontal guide rail 2391 disposed parallel to the driving rack 234 and a guiding block 2392 slidably engaged with the horizontal guide rail 2391, the horizontal guide rail 2391 is fixedly connected with the moving member 233, and the guiding block 2392 is fixedly connected with the material taking member 230.

Illustratively, the horizontal guide rail 2391 is fixed on the top surface of the moving frame 2332, the guide block 2392 is fixed on the rear end of the material taking member 230, the guide block 2392 is buckled on the horizontal guide rail 2391, and when the second driving belt 2383 moves horizontally with the material taking member 230, the guide block 2392 slides along the horizontal guide rail 2391 to ensure that the material taking member 230 can move linearly.

In practical applications, the mounting positions of the horizontal rail 2391 and the guide block 2392 may be exchanged, for example, the horizontal rail 2391 may be fixedly connected to the material taking member 230, and the guide block 2392 may be fixedly connected to the moving member 233.

It should be noted that the horizontal guiding mechanism 239 is not limited to the above-described structure of the horizontal guide rail 2391 and the guide block 2392, for example, the horizontal guiding mechanism 239 may be configured as a slider and a chute, etc., and such modifications and changes to the specific structure of the horizontal guiding mechanism 239 should be limited to the protection scope of the present utility model without departing from the principle and scope of the present utility model.

Preferably, as shown in fig. 4 to 6, the material taking member 230 includes a body 2301 and a connection block 2302, the body 2301 is a plate structure, a first air suction hole 23011 is provided at a front end of the body 2301, an air vent groove (not shown) communicating with the first air suction hole 23011 is provided inside the body 2301, the air vent groove communicates with a vacuum generator of the chamfering machine, and the connection block 2302 fixedly connects a rear end of the body 2301 with the second transmission mechanism 238.

Illustratively, the body 2301 is horizontally disposed along the moving direction thereof, the front end of the body 2301 is provided with a plurality of first air suction holes 23011, the rear end of the body 2301 is fixedly connected with the connecting block 2302, the connecting block 2302 is fixedly connected with the second driving belt 2383 of the second driving mechanism 238, the guide block 2392 of the horizontal guide mechanism 239 is fixedly connected with the connecting block 2302, the air vent groove inside the body 2301 is communicated with the vacuum generator through an air pipe, and after the vacuum generator is started, the wafer 10 can be adsorbed at the front end of the body 2301.

Preferably, as shown in fig. 4 to 6, the telescopic driving mechanism 232 of the present application includes a telescopic motor 2321, a third driving pulley 2322, a third driven pulley 2323, a third driving belt 2324, a horizontal screw (not shown in the drawings), and a translation slider 2325 mounted on the horizontal screw, the translation slider 2325 is fixedly connected with the moving member 233, the third driving pulley 2322 is fixed on a driving shaft of the telescopic motor 2321, the third driven pulley 2323 is fixed at one end of the horizontal screw, the third driving belt 2324 connects the third driving pulley 2322 with the third driven pulley 2323, the horizontal screw is rotatably mounted on the telescopic fixing member 231 and is parallel to the driving rack 234, and the translation slider 2325 can move along the horizontal screw along with the rotation of the horizontal screw.

For example, the telescopic motor 2321 is fixed at the front end of the telescopic fixed member 231, and is arranged side by side with the horizontal screw, the top surface of the translation slider 2325 is fixedly connected with the bottom surface of the moving block 2331 of the moving member 233, the telescopic motor 2321 drives the third driving pulley 2322 to rotate, the third driving pulley 2322 drives the third driven pulley 2323 and the horizontal screw to rotate through the third driving belt 2324, and the translation slider 2325 moves back and forth along the horizontal screw with the moving member 233 along with the rotation of the horizontal screw.

It should be noted that, the telescopic driving mechanism 232 of the present utility model is not limited to the specific structural form described above, for example, the "third driving pulley 2322+third driven pulley 2323+third driving belt 2324" may be replaced by a gear driving group or a sprocket rotating group, and the "horizontal screw+translational sliding block 2325" may be replaced by a rack-and-pinion driving mechanism, etc., and such adjustment and change of the specific structural form of the telescopic driving mechanism 232 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Of course, the telescopic driving mechanism 232 is preferably arranged in the above-described structural form, so that the arrangement is convenient and the cost is reduced.

Preferably, as shown in fig. 1 and 7, the inspection apparatus 3 of the present utility model includes an inspection fixing member 31, a first inspection assembly for inspecting the position of the center point of the wafer, and a second inspection assembly for inspecting the thickness of the wafer, which are mounted on the inspection fixing member 31.

The first detecting component detects the position of the center point of the wafer 10 to obtain the coordinates of the center point of the wafer 10, so as to determine whether the wafer 10 is offset, if the wafer 10 is offset, the position of the wafer 10 may be corrected, or the movement parameters of the first material transferring device 6 or the grinding device 8 may be compensated according to the coordinates of the center point of the wafer 10, so as to ensure that the center point of the wafer 10 is aligned with the center point of the carrying member (typically a vacuum chuck) on the grinding device 8 for carrying the wafer 10.

The thickness of the wafer 10 is detected by the second detecting component to determine whether the thickness of the wafer 10 meets the design requirement, and if the thickness of the wafer 10 meets the design requirement, the wafer 10 is placed on the first detecting component for detection.

It should be noted that, the present utility model is not limited to a specific structural form of the first detection component, for example, the first detection component may be set as a visual detection component introduced in the publication number CN 212331471U, an image of a wafer is acquired through the visual detection component, and a coordinate of a center point of the wafer is obtained through calculation; alternatively, the first detecting assembly may be configured as a device having a side-finding detecting function, etc., and the specific type of adjustment and modification of the first detecting assembly may be made without departing from the principles and scope of the present utility model, which is to be limited in scope by the appended claims.

Preferably, as shown in fig. 7, the first detecting assembly of the present utility model includes a detecting carrier assembly 32 mounted on a detecting fixing member 31, a translating assembly 33, and a edge finding detecting member 34 mounted on the translating assembly 33.

Wherein, the detection fixing member 31 is mounted on the base 11, the detection bearing assembly 32 is used for bearing the wafer 10 and can rotate with the wafer 10, and the translation assembly 33 can move along the horizontal direction relative to the detection fixing member 31.

By arranging the translation assembly 33 on the detection fixing member 31 and installing the edge finding detection member 34 on the translation assembly 33, the horizontal distance between the edge finding detection member 34 and the detection bearing assembly 32 can be adjusted through the translation assembly 33, so that the detection device 3 can carry out edge finding detection on wafers with different sizes, and the application range of the detection device 3 is improved.

As shown in fig. 7, the edge finding detecting member 34 includes a signal transmitter 341 and a signal receiver 342 which are disposed opposite to each other along a vertical direction, the signal transmitter 341 is located above the signal receiver 342, the wafer is located between the signal transmitter 341 and the signal receiver 342, a horizontal distance between the edge finding detecting member 34 and the detecting carrier 32 is adjusted according to a specific size of the wafer before the edge finding detection, the signal transmitter 341 sends a laser signal during the edge finding detection of the wafer, the detecting carrier 32 rotates with the wafer, the edge data of the wafer is detected by the edge finding detecting member 34, a circle is fitted according to the edge data of the wafer, and coordinates of a center point of the wafer are calculated.

Preferably, as shown in fig. 7, the translation assembly 33 of the present utility model includes a translation seat 331 mounted on the detection fixing member 31, and a mounting plate 332 mounted on the translation seat 331, the edge finding detection member 34 is mounted on the mounting plate 332, and the translation seat 331 is capable of moving in a horizontal direction relative to the detection fixing member 31.

Preferably, as shown in fig. 7, the detection bearing assembly 32 of the present utility model includes a second rotation driving mechanism 321 mounted on the detection fixing member 31, a vertically disposed second rotation shaft 322, and a detection bearing member 323 mounted on the top end of the second rotation shaft 322, wherein the second rotation driving mechanism 321 is in driving connection with the second rotation shaft 322 and is capable of driving the second rotation shaft 322 to rotate with the detection bearing member 323.

As shown in fig. 7, the detection bearing member 323 of the present utility model is a vacuum chuck, the second rotary driving mechanism 321 includes a connection flange 3211, a second rotary motor 3212, a second speed reducer 3213 and a second coupling 3214, the side portion of the connection flange 3211 is fixedly connected with the detection fixing member 31, a mounting hole is provided at the bottom of the connection flange 3211, the second speed reducer 3213 is mounted in the mounting hole, the top end of the second speed reducer 3213 extends into the connection flange 3211 through the mounting hole, the second rotary motor 3212 is mounted below the second speed reducer 3213, the second coupling 3214 is mounted above the second speed reducer 3213, and the bottom end of the second rotary shaft 322 passes through the top of the connection flange 3211 and is fixedly connected with the output shaft of the second speed reducer 3213 through the second coupling 3214, that is, the driving shaft of the second rotary motor 3212 is fixedly connected with the bottom end of the second rotary shaft 322 through the second speed reducer 3213 and the second coupling 3214, so as to drive the second rotary shaft 322 to rotate with the vacuum chuck.

It should be noted that, the second rotation driving mechanism 321 of the present utility model is not limited to the above-described structure, for example, the second speed reducer 3213 and the second coupling 3214 may be replaced by a synchronous belt transmission assembly, the second rotation motor 3212 may be disposed on a side surface of the second rotation shaft 322, a driving shaft of the second rotation motor 3212 may be connected to a bottom end of the second rotation shaft 322 by a synchronous belt transmission assembly, or the second speed reducer 3213 and the second coupling 3214 may be replaced by a chain transmission assembly, the second rotation motor 3212 may be disposed on a side surface of the second rotation shaft 322, and a driving shaft of the second rotation motor 3212 may be connected to a bottom end of the second rotation shaft 322 by a chain transmission assembly, or the second rotation shaft 322 may be driven to rotate by a DD direct drive motor, which is not departing from the principle and scope of the present utility model.

Preferably, as shown in fig. 7, the second sensing assembly of the present utility model includes a supporting cantilever 36 mounted on the sensing fixing member 31, a first end of the supporting cantilever 36 being fixedly connected with the sensing fixing member 31, and a thickness sensing mechanism 35 mounted on a second end of the supporting cantilever 36.

Illustratively, as shown in fig. 7, the detecting and fixing member 31 is provided with a fixing bracket 311, the supporting cantilever 36 is horizontally disposed, the right end of the supporting cantilever 36 is fixedly connected with the fixing bracket 311, the thickness detecting mechanism 35 is mounted at the left end of the supporting cantilever 36, and the thickness detecting mechanism 35 is used for detecting the thickness of the wafer.

It should be noted that the present utility model is not limited to the specific structural form of the thickness detection mechanism 35, for example, those skilled in the art may set the thickness detection mechanism as a single probe detection mechanism, or may set the thickness detection mechanism as a dual probe detection mechanism, etc., and such modifications and changes to the specific structural form of the thickness detection mechanism 35 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Preferably, as shown in fig. 7, the supporting cantilever 36 includes a first cantilever 361, a second cantilever 362 and a connection block 363, the first cantilever 361 is located above the second cantilever 362 and is spaced apart from the second cantilever 362 in a vertical direction, one side of the connection block 363 is fixedly connected with the detection fixing member 31, the other side of the connection block 363 is fixedly connected or integrally provided with the first ends of the first cantilever 361 and the second cantilever 362, the thickness detection mechanism 35 includes a thickness detection member 351 and a carrying member 352, the thickness detection member 351 is mounted at the second end of the first cantilever 361, a detection probe of the thickness detection member 351 is disposed downward in the vertical direction, the carrying member 352 is mounted at the second end of the second cantilever 362, and the carrying member 352 is used for carrying a wafer and is located between the first cantilever 361 and the second cantilever 362.

In the thickness detection of the wafer 10, the wafer 10 is placed on the carrier member 352 by the pick-up device 2, and then the probes of the thickness detection member 351 are extended downward to the upper surface of the wafer 10, and the thickness of the wafer 10 can be obtained according to the extending length of the probes.

Preferably, as shown in fig. 1 and 8, the chamfering machine of the present utility model further includes a positioning device 5, the positioning device 5 is used for positioning the center point of the wafer, the material taking device 2 is further capable of transferring the wafer on the positioning device 5 to the detecting device 3, and the detecting device 3 is capable of detecting the position of the center point of the wafer so as to calibrate the material taking device 2.

Illustratively, the positioning device 5 is mounted on an upper bin support 12 with the reclaimer device 2, the inspection device 3 and the positioning device 5 being distributed along a second horizontal direction (Y direction shown in fig. 1), wherein the reclaimer device 2 is located between the inspection device 3 and the positioning device 5.

The center point of the wafer is positioned by arranging the positioning device 5, and the position of the center point of the wafer is detected by combining the detecting device 3, so that the extension length and the rotation angle of the material taking device 2 are conveniently calibrated.

Specifically, the center point of the wafer is positioned by the positioning device 5, so that the distance between the center point of the wafer and the starting point of the material taking member 230 is set as a set value, the material taking member 230 is controlled to extend to transfer the wafer on the positioning device 5 to the detection bearing assembly 32 of the detection device 3 for detection, whether the center point of the wafer is deviated or not is detected by the edge finding detection member 34 of the detection device 3, if the center point of the wafer deviates, the extending length and the rotation angle of the material taking member 230 are inaccurate, compensation correction is required, specifically, the operation parameters of the telescopic motor 2321 and the first rotation motor 224 are compensated and corrected, otherwise, if the center point of the wafer does not deviate, the extending length and the rotation angle of the material taking member 230 are accurate, compensation correction is not required, and the operation is simpler and more convenient.

It should be noted that the present utility model is not limited to the specific structural form of the positioning device 5, and two specific embodiments of the positioning device 5 are described in detail below with reference to fig. 8 to 12.

A first embodiment of the positioning device will be described with reference to fig. 10 to 12.

As shown in fig. 10 to 12, the positioning device of the present embodiment includes a first fixing member 54, and a first clamping assembly 55, a second clamping assembly 56, and a clamping driving assembly 57 mounted on the first fixing member 54.

Wherein the first fixing member 54 is fixedly connected to the upper bin support 12, the first clamping assembly 55 and the second clamping assembly 56 are disposed opposite to each other in a first horizontal direction (X direction as shown in fig. 10), the clamping driving assembly 57 is in driving connection with the first clamping assembly 55 and the second clamping assembly 56, and the clamping driving assembly 57 is capable of driving the first clamping assembly 55 and the second clamping assembly 56 to move synchronously in the first horizontal direction in opposite directions to clamp and position the wafer, and the clamping driving assembly 57 is also capable of driving the first clamping assembly 55 and the second clamping assembly 56 to move synchronously in opposite directions in the first horizontal direction.

When the wafer needs to be positioned by adopting the positioning device, the wafer is placed between the first clamping component 55 and the second clamping component 56, then the clamping driving component 57 drives the first clamping component 55 to move leftwards in the X direction, the second clamping component 56 simultaneously moves rightwards in the X direction, namely, the first clamping component 55 and the second clamping component 56 synchronously move towards each other, and when the first clamping component 55 and the second clamping component 56 respectively abut against the right edge and the left edge of the wafer, the wafer is clamped, so that the wafer is positioned, and when the wafer needs to be taken out, the clamping driving component 57 drives the first clamping component 55 to move rightwards in the X direction, and the second clamping component 56 simultaneously moves leftwards in the X direction, namely, the first clamping component 55 and the second clamping component 56 synchronously move reversely.

Preferably, as shown in fig. 1, 7 and 10, the rotation axis of the rotation assembly 22 of the material taking device 2 (i.e. the first rotation axis 222), the rotation axis of the detection bearing assembly 32 of the detection device 3 (i.e. the second rotation axis 322) and the center point of the wafer positioned by the positioning device 5 are located on the same straight line extending along the second horizontal direction.

Preferably, as shown in fig. 10 and 12, a side of the first clamping assembly 55 facing the second clamping assembly 56 is provided with a first positioning groove 5511, a side of the second clamping assembly 56 facing the first clamping assembly 55 is provided with a second positioning groove 5611, and the first positioning groove 5511 and the second positioning groove 5611 respectively abut against edges of both sides of the wafer to clamp the wafer.

Wherein, first constant head tank 5511 is the opening setting towards one side of second constant head tank 5611, and second constant head tank 5611 is the opening setting towards one side of first constant head tank 5511 as well, presss from both sides tight location with the wafer through first constant head tank 5511 and second constant head tank 5611, can improve the accuracy of location. Among them, the first positioning groove 5511 and the second positioning groove 5611 are preferably provided in a V shape.

Preferably, as shown in fig. 10 and 11, the clamping drive assembly 57 of the present utility model includes a clamping drive mechanism 571, a first rack 572 extending in a first horizontal direction, a second rack 573 extending in the first horizontal direction, and a gear 574.

The clamping driving mechanism 571 is connected with the first clamping assembly 55 and can drive the first clamping assembly 55 to move along a first horizontal direction, the first rack 572 and the second rack 573 are respectively connected with the first clamping assembly 55 and the second clamping assembly 56, the first rack 572 and the second rack 573 are distributed at intervals along a second horizontal direction (a Y direction as shown in fig. 11), the second horizontal direction is perpendicular to the first horizontal direction, and the gear 574 is rotatably mounted on the first fixing member 54 and located between the first rack 572 and the second rack 573 and meshed with the first rack 572 and the second rack 573.

Illustratively, when the clamping driving mechanism 571 drives the first clamping assembly 55 to move leftwards in the X direction, the first rack 572 moves leftwards with the first clamping assembly 55 in the X direction, the first rack 572 drives the gear 574 to rotate clockwise, the gear 574 drives the second rack 573 to move rightwards in the X direction, the second rack 573 drives the second clamping assembly 56 to move rightwards in the X direction, and thus the first clamping assembly 55 and the second clamping assembly 56 synchronously move towards each other in the X direction, whereas when the clamping driving mechanism 571 drives the first clamping assembly 55 to move rightwards in the X direction, the first rack 572 moves rightwards with the first clamping assembly 55 in the X direction, the first rack 572 drives the gear 574 to rotate anticlockwise, the gear 574 drives the second rack 573 to move leftwards in the X direction, and the second rack 573 drives the second clamping assembly 56 to leftwards in the X direction, and thus the first clamping assembly 55 and the second clamping assembly 56 synchronously move reversely in the X direction.

It should be noted that, in practical applications, those skilled in the art may set the clamping driving mechanism 571 as a motor driving mechanism, or as a hydraulic driving mechanism, or further set the clamping driving mechanism 571 as a cylinder driving mechanism, etc., and such adjustments and changes on the specific structural type of the clamping driving mechanism 571 should be limited within the scope of the present utility model without departing from the principle and scope of the present utility model.

Preferably, as shown in fig. 10 and 11, the clamping driving mechanism 571 of the present utility model includes a clamping cylinder 5711, an elastic return member 5712 extending in a first horizontal direction, and a push member 5713 connected with the first clamping assembly 55.

The clamping cylinder 5711 is connected with the pushing member 5713 and is capable of driving the pushing member 5713 to move away from the second clamping unit 56 along the first horizontal direction with the first clamping unit 55, two ends of the elastic reset member 5712 are respectively connected with the first fixing member 54 and the pushing member 5713, and the elastic reset member 5712 is capable of moving the pushing member 5713 close to the second clamping unit 56 along the first horizontal direction with the first clamping unit 55 after the clamping cylinder 5711 is deactivated.

That is, when the first clamping assembly 55 and the second clamping assembly 56 need to be separated, the pushing member 5713 is driven by the clamping driving mechanism 571 to move the first clamping assembly 55 and the second clamping assembly 56 in the opposite direction along the X direction, then the wafer is placed between the first clamping assembly 55 and the second clamping assembly 56, the elastic restoring member 5712 is stretched during the movement of the pushing member 5713, and after the clamping cylinder 5711 is deactivated, the pushing member 5713 moves the first clamping assembly 55 and the second clamping assembly 56 in the opposite direction along the X direction under the elastic force of the elastic restoring member 5712, thereby clamping the wafer, and damage to the wafer due to too large clamping force can be avoided.

It should be noted that the present utility model is not limited to the specific structure of the elastic restoring member 5712, and for example, a person skilled in the art may set the elastic restoring member 5712 as a spring or an elastic cord.

Preferably, as shown in fig. 11, the first fixing member 54 is provided with a first connecting structure 5411, the pushing member 5713 is provided with a second connecting structure 5714, two ends of the elastic restoring member 5712 are respectively connected with the first connecting structure 5411 and the second connecting structure 5714, and an initial distance between the first connecting structure 5411 and the second connecting structure 5714 along the first horizontal direction is adjustable.

By setting the initial distance between the first connection structure 5411 and the second connection structure 5714 in the X direction to be adjustable, it is convenient to apply wafers of different sizes, for example, if the size of the wafer is large, the initial distance between the first connection structure 5411 and the second connection structure 5714 in the X direction can be increased, whereas if the size of the wafer is small, the initial distance between the first connection structure 5411 and the second connection structure 5714 in the X direction can be shortened.

Wherein, the initial distance between the first connection structure 5411 and the second connection structure 5714 along the X direction refers to the distance between the first connection structure 5411 and the second connection structure 5714 along the X direction when the first clamping assembly 55 and the second clamping assembly 56 are located at the initial positions.

In a first preferred case, as shown in fig. 11, the second connection structure 5714 is a connection rod 57141 disposed along a first horizontal direction, a mounting hole (not shown) is provided in the push member 5713, the mounting hole penetrates the push member 5713 along the first horizontal direction, a first end (left end of the connection rod 57141 as viewed in fig. 11) of the connection rod 57141 is connected to the elastic restoring member 5712, the connection rod 57141 is provided with a threaded section (not shown) near a second end (right end of the connection rod 57141 as viewed in fig. 12) thereof, the threaded section penetrates the mounting hole in the push member 5713, and an adjusting nut 57142 in threaded engagement therewith is mounted on the threaded section, and a side (left side of the adjusting nut 57142 as viewed in fig. 11) of the adjusting nut 57142 near the first end of the connection rod 57141 abuts against the push member 5713.

Illustratively, as shown in fig. 11, the first connection structure 5411 is a fixed column fixedly mounted on the first fixing member 54, the left end of the elastic restoring member 5712 is fixedly connected with the fixed column, the right end of the elastic restoring member 5712 is fixedly connected with the left end of the connecting rod 57141, the connecting rod 57141 has a threaded section near the right end thereof, an adjusting nut 57142 is mounted on the threaded section, and an initial distance between the left end of the connecting rod 57141 and the fixed column can be adjusted by the adjusting nut 57142, for example, if the size of the wafer is smaller, the connecting rod 57141 can be closer to the fixed column by rotating the adjusting nut 57142 counterclockwise, the initial distance between the left end of the connecting rod 57141 and the fixed column can be shortened, whereas if the size of the wafer is larger, the connecting rod 57141 can be away from the fixed column by rotating the adjusting nut 57142 clockwise, and the initial distance between the left end of the connecting rod 57141 and the fixed column can be increased.

In a second preferred case, some adjustments may be made in the first preferred case, specifically, the second connection structure 5714 is still a connection rod 57141 disposed along the first horizontal direction, the first end of the connection rod 57141 is connected to the elastic restoring member 5712, the connection rod 57141 is provided with a threaded section near the second end thereof, the pushing member 5713 is still provided with a mounting hole, and the inner wall of the mounting hole is provided with threads adapted to the threaded section, and the threaded section is screwed and fixed with the mounting hole through the threads, so that the setting of the adjusting nut 57142 may be omitted, the initial distance between the left end of the connection rod 57141 and the fixed column may be adjusted directly by rotating the connection rod 57141, the mounting hole may penetrate the pushing member 5713, or may not penetrate the pushing member 5713, and a person skilled in the art may flexibly set according to specific situations.

In both the above-mentioned preferred cases, the initial distance between the first connection structure 5411 and the second connection structure 5714 along the X direction is adjusted by changing the position of the second connection structure 5714, in practical application, the second connection structure 5714 may be set to be fixed, the first connection structure 5411 may be set to be position-changeable, the initial distance between the first connection structure 5411 and the second connection structure 5714 along the X direction may be adjusted by changing the position of the first connection structure 5411, for example, or the first connection structure 5411 may be set to be a fixed column, a plurality of fixing holes may be provided on the first fixing member 54, the plurality of fixing holes may be spaced along the X direction, and the bottom ends of the fixing columns may be inserted into the fixing holes, so that the initial distance between the first connection structure 5411 and the second connection structure 5714 along the X direction may be adjusted by changing the installation position of the fixing column, or the first connection structure 5411 and the second connection structure 5714 may be set to be position-changeable, which may be flexibly adjusted and changed without deviating from the scope of the present utility model.

In addition, it should be noted that the first connection structure 5411 of the present utility model is not limited to the fixing column described above, and for example, the first connection structure 5411 may be provided as a fixing block or a fixing plate, or the like.

Preferably, as shown in fig. 10 to 12, the first fixing member 54 of the present utility model includes a base plate 541 disposed horizontally, a carrier plate 542 disposed horizontally, and a support column 543 disposed vertically.

Wherein, bottom plate 541 and loading board 542 are along vertical direction interval distribution to bottom plate 541 is located the below of loading board 542, and the bottom and the top of support column 543 respectively with bottom plate 541 and loading board 542 fixed connection or integrative setting, loading board 542 is used for carrying the wafer, and first constant head tank 5511 and second constant head tank 5611 are located the top of loading board 542, and clamping driving mechanism 571 installs on bottom plate 541, and first rack 572, second rack 573 and gear 574 all are located between bottom plate 541 and the loading board 542.

As shown in fig. 10 and 11, the carrier plate 542 is formed by two plates distributed at intervals along the X direction, the number of the supporting columns 543 is four, the four supporting columns 543 enclose a rectangular structure, the two plates of the carrier plate 542 are fixedly connected with the bottom plate 541 through the two supporting columns 543, the clamping cylinder 5711 is fixedly mounted on the bottom surface of the bottom plate 541, the pushing member 5713 includes a vertical push rod 57131 and a horizontal push rod 57132, the bottom end of the vertical push rod 57131 is fixedly connected with a piston rod of the clamping cylinder 5711, the top end of the vertical push rod 57131 is fixedly connected with or integrally arranged with one end of the horizontal push rod 57132, the horizontal push rod 57132 is located between the bottom plate 541 and the carrier plate 542, the horizontal push rod 57132 is fixedly connected with the first clamping assembly 55, the first connecting structure 5411 is disposed on the top surface of the bottom plate 541, the second connecting structure 5714 is disposed on the horizontal push rod 57132, the first rack 572, the second rack 573 and the gear 574 are located between the bottom plate 541 and the carrier plate 542, the gear 574 is rotatably mounted on the bottom plate 5713, a part of the first clamping assembly 55 is located on the top surface of the carrier plate 542, the first clamping assembly 55 is located between the other part of the clamping assembly 55 and the bottom plate 541 is located between the other part of the carrier plate 541.

The installation arrangement of the structures is facilitated by dividing the base plate 541 and the carrier plate 542, which are spaced apart in the vertical direction, into three mounting spaces.

It should be noted that, the carrying plate 542 of the present utility model is not limited to be composed of two plate bodies spaced apart along the X direction, for example, the carrying plate 542 may be configured as a unitary plate body structure, and the number of the supporting columns 543 is not limited to four, for example, three or six, etc. of the supporting columns 543, and such adjustment and modification of the specific number of the supporting columns 543 should be within the scope of the present utility model.

Preferably, as shown in fig. 10 and 11, the first clamping assembly 55 of the present utility model includes a first clamping member 551 and a first connection member 552, the first clamping member 551 is located above the carrier plate 542, the first positioning slot 5511 is provided on the first clamping member 551, the first connection member 552 is used for fixedly connecting the first clamping member 551 with the first rack 572, and the clamping driving mechanism 571 is connected with the first connection member 552; the second clamping assembly 56 includes a second clamping member 561 and a second connecting member 562, the second clamping member 561 being located above the carrier plate 542, the second positioning groove 5611 being provided to the second clamping member 561, the second connecting member 562 being for fixedly connecting the second clamping member 561 to the second rack 573.

Illustratively, the first clamping member 551 is a first clamping plate, a first positioning slot 5511 is disposed on the left side of the first clamping plate, the second clamping member 561 is a second clamping plate, a second positioning slot 5611 is disposed on the right side of the second clamping plate, the first clamping plate is fixedly connected with the first rack 572 through the first connecting member 552, the first connecting member 552 is further fixedly connected with the pushing member 5713 of the clamping driving mechanism 571, and the second clamping plate is fixedly connected with the second rack 573 through the second connecting member 562.

It should be noted that the first clamping member 551 and/or the second clamping member 561 of the present utility model are not limited to the above-described clamping plates, and for example, the first clamping member 551 and/or the second clamping member 561 may be provided as clamping blocks, etc., and such modifications and changes to the specific structural forms of the first clamping member 551 and the second clamping member 561 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

It should be further noted that, in practical applications, the first connecting member 552 and/or the second connecting member 562 may be provided as a connecting plate or a connecting rod, etc. such modifications and changes to the specific structural forms of the first connecting member 552 and the second connecting member 562 are not limited to the principle and scope of the present utility model.

Preferably, as shown in fig. 10 to 12, the first connection member 552 of the present utility model includes a first connection plate 5521 disposed horizontally and a first connection post (not shown) disposed vertically, the first connection plate 5521 being located between the base plate 541 and the carrier plate 542 and being fixedly connected to the first rack 572, the carrier plate 542 being provided with a first through hole 5421 extending in a first horizontal direction at a position corresponding to the first connection post, a bottom end of the first connection post being fixedly connected to or integrally disposed with the first connection plate 5521, a top end of the first connection post being fixedly connected to or integrally disposed with the first clamping member 551 through the first through hole 5421, and the clamping driving mechanism 571 being connected to the first connection plate 5521; the second connecting member 562 includes a horizontally disposed second connecting plate 5621 and a vertically disposed second connecting post (not shown in the drawings), the second connecting plate 5621 is located between the base plate 541 and the carrier plate 542 and fixedly connected with the second rack 573, the carrier plate 542 is provided with a second through hole 5422 extending along the first horizontal direction at a position corresponding to the second connecting post, a bottom end of the second connecting post is fixedly connected or integrally disposed with the second connecting plate 5621, and a top end of the second connecting post passes through the second through hole 5422 and is fixedly connected or integrally disposed with the second clamping member 561.

Illustratively, the first connecting plate 5521 is an L-shaped structure, a portion of the first connecting plate 5521 disposed along the X-direction is fixedly connected with the first rack 572, a portion of the first connecting plate 5521 disposed along the Y-direction is fixedly connected with the first clamping member 551 through a first connecting column, a portion of the first connecting plate 5521 disposed along the Y-direction is also fixedly connected with the pushing member 5713 of the clamping driving mechanism 571, the first connecting column can freely move in the first through hole 5421 along the X-direction, the second connecting plate 5621 is also an L-shaped structure, a portion of the second connecting plate 5621 disposed along the X-direction is fixedly connected with the second rack 573, a portion of the second connecting plate 5621 disposed along the Y-direction is fixedly connected with the second clamping member 561 through a second connecting column, and the second connecting column can freely move in the second through hole 5422 along the X-direction.

The number of the first connection posts is not limited, for example, only one first connection post may be provided, or a plurality of first connection posts may be provided, and the plurality of first connection posts are spaced apart along the Y direction.

Preferably, as shown in fig. 12, the first clamping member 551 is provided with at least two first hole sites 5512, and the first hole sites 5512 are distributed at intervals along the first horizontal direction, and the top ends of the first connecting columns are fixedly connected with the first hole sites 5512; the second clamping member 561 is provided with second hole sites 5612, at least two second hole sites 5612 are distributed at intervals along the first horizontal direction, and the top ends of the second connecting columns are fixedly connected with the second hole sites 5612.

As shown in fig. 12, the first clamping member 551 is provided with two first hole sites 5512 along the X direction, the second clamping member 561 is also provided with two second hole sites 5612 along the X direction, when the size of the wafer is smaller, the first connecting column and the second connecting column can be respectively and fixedly connected with the first hole sites 5512 and the second hole sites 5612 on the outer side, and when the size of the wafer is larger, the first connecting column and the second connecting column can be respectively and fixedly connected with the first hole sites 5512 and the second hole sites 5612 in the middle, so that the positioning device of the present utility model can adapt to wafers with more sizes.

It should be noted that, in order to improve the connection stability between the first clamping member 551 and the first connection plate 5521, the number of the first connection columns is preferably two, the two first connection columns are spaced apart along the Y direction, and accordingly, two first hole sites 5512 are also provided on the first clamping member 551 along the Y direction, that is, four first hole sites 5512 are provided on the first clamping member 551 in total, two groups, and likewise, in order to improve the connection stability between the second clamping member 561 and the second connection plate 5621, the number of the second connection columns is also preferably two, the two second connection columns are spaced apart along the Y direction, and accordingly, two second hole sites 5612 are also provided on the second clamping member 561 along the Y direction, that is, four second hole sites 5612 are provided on the second clamping member 561 in total, and two groups.

In addition, it should be noted that the number of the first hole sites 5512 and the second hole sites 5612 disposed along the X direction is not limited to two, for example, three or four, etc., and such flexible adjustment and modification should be limited within the scope and spirit of the present utility model.

Preferably, as shown in fig. 10 and 11, the positioning device of the present embodiment further includes a first clamping guide mechanism provided between the first fixing member 54 and the first clamping assembly 55, and a second clamping guide mechanism provided between the first fixing member 54 and the second clamping assembly 56, the first clamping guide mechanism and the second clamping guide mechanism guiding the first clamping assembly 55 and the second clamping assembly 56 when the first clamping assembly 55 and the second clamping assembly 56 are moved, respectively.

Preferably, as shown in fig. 10 and 11, the first clamping guide mechanism includes a mating first clamping guide member 581 and a second clamping guide member (not shown), the first clamping guide member 581 being connected to the first securing member 54, the first clamping guide member 581 being connected to the first clamping assembly 55; the second clamp guide mechanism includes a mating third clamp guide member 582 and a fourth clamp guide member (not shown), the third clamp guide member 582 being coupled to the first stationary member 54 and the fourth clamp guide member being coupled to the second clamp assembly 56.

It should be noted that, in practical applications, the first clamping guide member 581 and the second clamping guide member may be configured to have a structure in which a guide rail is matched with a guide block, or the first clamping guide member 581 and the second clamping guide member may be configured to have a structure in which a guide groove is matched with a guide rib, or the first clamping guide member 581 and the second clamping guide member may be configured to have a structure in which a guide rod is matched with a guide hole, etc., which do not deviate from the principle and scope of the present utility model, and such adjustment and change of the specific structural forms of the first clamping guide member 581 and the second clamping guide member should be limited in the protection scope of the present utility model.

In addition, it should be noted that, in practical applications, the third clamping guide member 582 and the fourth clamping guide member may be configured to have a structure in which a guide rail is matched with a guide block, or the third clamping guide member 582 and the fourth clamping guide member may be configured to have a structure in which a guide groove is matched with a guide rib, or the third clamping guide member 582 and the fourth clamping guide member may be configured to have a structure in which a guide rod is matched with a guide hole, etc., which are not departing from the principle and scope of the present utility model, and such modifications and changes on the specific structural forms of the third clamping guide member 582 and the fourth clamping guide member should be limited in the scope of protection of the present utility model.

Preferably, as shown in fig. 10 and 11, the first clamping guide member 581 and the third clamping guide member 582 are guide rails extending in the first horizontal direction, and the second clamping guide member and the fourth clamping guide member are guide blocks adapted to the guide rails.

Illustratively, two guide rails are fixedly mounted on the top surface of the bottom plate 541 and are spaced apart along the Y direction, and two guide blocks are fixedly mounted on the bottom surfaces of the first connection plate 5521 and the second connection plate 5621, respectively.

A second embodiment of the positioning device 5 is described below in connection with fig. 8 and 9.

As shown in fig. 8 and 9, the positioning device 5 of the present embodiment includes a second fixing member and a wafer support 52 mounted on the second fixing member, and a positioning groove 51 is provided on the wafer support 52, and the positioning groove 51 is used for positioning a center point of a wafer.

The second fixing member includes four fixing shafts 53, the four fixing shafts 53 are respectively located at four corners of the wafer carrying platform 52, the top ends of the fixing shafts 53 are fixedly connected with the upper bin support 12 of the chamfering machine, the wafer carrying platform 52 is of a plate-shaped structure which is horizontally arranged, the wafer carrying platform 52 is made of glass fiber reinforced PEEK (Po LY ETHER ETHER Ketone ) material, which can have good form and position tolerance, and can avoid scratching the wafer, of course, the wafer carrying platform 52 can also be made of other non-metal materials (such as nylon, polyoxymethylene, etc.).

Preferably, as shown in fig. 1, 7 and 9, the material taking device 2, the detecting device 3 and the positioning device 5 are distributed along the second horizontal direction (Y direction shown in fig. 1 or 9), wherein the material taking device 2 is located between the detecting device 3 and the positioning device 5, and the rotation axis (i.e. the first rotation axis 222) of the rotating component 22 of the material taking device 2, the rotation axis (i.e. the second rotation axis 322) of the detecting bearing component 32 of the detecting device 3 and the center point of the wafer positioned by the positioning device 5 are located on the same straight line extending along the second horizontal direction.

Preferably, as shown in fig. 8 and 9, the number of the carrying platforms 52 is plural and the carrying platforms 52 are distributed at intervals in the vertical direction, and two adjacent carrying platforms 52 are separated by a spacer 531 arranged in the vertical direction.

Illustratively, the number of the carrying platforms 52 is three, two adjacent carrying platforms 52 are separated by four spacers 531, and the heights of the four spacers 531 are strictly equal, so that each layer of carrying platform 52 has high flatness.

It should be noted that the number of the carrying platforms 52 is not limited to three, for example, the number of the carrying platforms 52 may be two or four, and such specific number of the carrying platforms 52 may be adjusted and changed without departing from the principle and scope of the present utility model, which is limited to the protection scope of the present utility model.

Since the plurality of the wafer stages 52 are identical in structure, the description will be given below taking the wafer stage 52 located at the uppermost layer as an example.

Preferably, as shown in fig. 8 and 9, the upper surface of the wafer stage 52 is provided with a plurality of positioning grooves 51 of different sizes.

By arranging a plurality of positioning grooves 51 with different sizes on the wafer carrying table 52, a plurality of wafers with different sizes can be positioned, and the application range of the positioning device is improved.

Illustratively, the upper surface of the wafer carrier 52 is provided with three positioning grooves 51 with different sizes, the three positioning grooves 51 are distributed along the vertical direction, the size of the positioning grooves 51 is increased from bottom to top, the positioning groove 51 at the lowest layer is used for positioning four inches of wafers, the positioning groove 51 at the middle layer is used for positioning six inches of wafers, and the positioning groove 51 at the uppermost layer is used for positioning eight inches of wafers.

It should be noted that the number of the positioning grooves 51 is not limited to three, for example, the number of the positioning grooves 51 may be two or four, and such specific number of the positioning grooves 51 may be adjusted and changed without departing from the principle and scope of the present utility model, which should be limited to the protection scope of the present utility model.

The plurality of positioning grooves 51 are identical except for the size, and the positioning grooves 51 located at the lowermost layer will be described as an example.

Preferably, as shown in fig. 8 and 9, the carrying platform 52 includes a first sub carrying platform 521 and a second sub carrying platform 522, the first sub carrying platform 521 and the second sub carrying platform 522 are oppositely disposed and spaced along a first horizontal direction (X direction in fig. 8), the positioning groove 51 includes a first arc-shaped groove 511 disposed on an upper surface of the first sub carrying platform 521 and a second arc-shaped groove 512 disposed on an upper surface of the second sub carrying platform 522, a first end of the first arc-shaped groove 511 forms a first positioning point 5111, a first end of the second arc-shaped groove 512 forms a second positioning point 5121, and the first positioning point 5111 and the second positioning point 5121 are located on the same straight line extending along the first horizontal direction.

The first arc-shaped groove 511 and the second arc-shaped groove 512 enclose a circular positioning groove 51, the size of the positioning groove 51 is slightly larger than that of the wafer, and after the wafer is placed in the positioning groove 51, the edge of the wafer is abutted against the first positioning point 5111 and the second positioning point 5121 at the same time, so that the positioning of the wafer is completed.

It should be noted that, the chamfering machine of the present utility model may be equipped with the two positioning devices described above at the same time, and as shown in fig. 8, the two positioning devices described above are distributed in the vertical direction.

The two positioning devices described above can both independently position the wafer, wherein the positioning device described in the second implementation positions the wafer through the positioning groove 51 arranged on the positioning device, the operation is more convenient, the positioning device described in the first implementation adopts the mode of clamping the wafer to position the wafer, the limitation of the size of the wafer 10 can be avoided, and the application range is wider.

Preferably, as shown in fig. 1 and 13-17, the first material transfer device 6 of the present application includes a first translational drive assembly, a first lifting drive assembly mounted on the first translational drive assembly, a rotary drive assembly 64 mounted on the first lifting drive assembly, a first connecting arm 65 disposed horizontally, and a first suction cup 66 for taking material.

Wherein, first translation drive assembly can drive first lift drive assembly and remove along first horizontal direction (the X direction in fig. 1 and 13), first lift drive assembly is connected with rotary drive assembly 64, and can drive rotary drive assembly 64 vertical movement, rotary drive assembly 64 is connected with one end of first link arm 65, and can drive first link arm 65 and rotate around vertical axis, first sucking disc 66 installs the other end at first link arm 65, rotary drive assembly 64 is used for driving first link arm 65 to take first sucking disc 66 to rotate between getting the material level and putting the material level, first sucking disc 66 can absorb the material that is located on detection device 3 when being located the material level, first sucking disc 66 can place the material in grinding device 8 when being located the material level.

Illustratively, the first translational drive assembly includes a first translational drive mechanism 61 and a first horizontal slide 62, the first translational drive assembly is mounted on the first horizontal slide 62, the first translational drive mechanism 61 is configured to drive the first horizontal slide 62 to move in a first horizontal direction, and the first suction cup 66 is in communication with a vacuum generator of the chamfering machine.

In a specific operation process, the first horizontal sliding seat 62 is driven by the first translation driving mechanism 61 to move to the first setting position with the first lifting driving assembly, the rotation driving assembly 64, the first connecting arm 65 and the first suction cup 66, then the rotation driving assembly 64 drives the first connecting arm 65 to rotate 90 degrees clockwise with the first suction cup 66, so that the first suction cup 66 rotates to the material taking position, as shown in fig. 15, the first connecting arm 65 extends along the first horizontal direction, the first suction cup 66 is located at the material taking position, the first suction cup 66 is located just above the wafer 10 on the detection bearing member 323 of the detection device 3, then the first lifting driving assembly drives the rotation driving assembly 64, the first connecting arm 65 and the first suction cup 66 to move vertically downwards, when the first suction cup 66 approaches the wafer 10, the vacuum generator in communication with the first chuck 66 is started, a negative pressure environment is generated in the first chuck 66, the wafer 10 is adsorbed on the bottom surface of the first chuck 66, then the first lifting driving assembly drives the rotation driving assembly 64, the first connecting arm 65, the first chuck 66 and the wafer 10 to vertically move upwards, then the first translation driving mechanism 61 drives the first horizontal sliding seat 62 to move to a second set position with the first lifting driving assembly, the rotation driving assembly 64, the first connecting arm 65, the first chuck 66 and the wafer 10, then the rotation driving assembly 64 drives the first connecting arm 65 to rotate anticlockwise by 90 degrees with the first chuck 66, the first chuck 66 rotates to a discharging position, as shown in fig. 16, the first connecting arm 65 extends along a second horizontal direction, the first chuck 66 at this time is positioned at the discharging position, and then the wafer 10 is placed in the grinding device 8.

It should be noted that, the rotation angle of the first suction cup 66 from the taking position to the placing position is not limited to the above-mentioned 90 degrees, for example, the rotation angle of the first suction cup 66 from the taking position to the placing position may be 120 degrees or 60 degrees, etc., and those skilled in the art may flexibly set according to actual requirements in practical applications.

In addition, it should be noted that the number of the first suction cups 66 is not limited in the present utility model, for example, when the size of the wafer 10 is small, only one first suction cup 66 may be provided, and when the size of the wafer 10 is large, a plurality of first suction cups 66 may be provided, and the plurality of first suction cups 66 are distributed along the horizontal direction to commonly suck the wafer 10.

It should be further noted that, in practical applications, those skilled in the art may set the first translation driving mechanism 61 as a motor driving mechanism, a hydraulic driving mechanism, or an air driving mechanism, etc., and such modifications and changes to the specific structural form of the first translation driving mechanism 61 should be limited within the scope and spirit of the present utility model.

Preferably, as shown in fig. 14, the first translation driving mechanism 61 of the present utility model includes a first translation motor 611, a first horizontal screw 612, and a first slider 613 mounted on the first horizontal screw 612, where the first slider 613 is fixedly connected to or integrally provided with the first horizontal slide 62, and the first translation motor 611 is used for driving the first horizontal screw 612 to rotate, and the first slider 613 moves horizontally along the length direction of the first horizontal screw 612 along with the rotation of the first horizontal screw 612.

The first sliding block 613 is provided with a threaded hole in threaded connection with the first horizontal screw rod 612, when the first translation motor 611 drives the first horizontal screw rod 612 to rotate clockwise, the first sliding block 613 moves horizontally leftwards along the first horizontal screw rod 612, and when the first translation motor 611 drives the first horizontal screw rod 612 to rotate anticlockwise, the first sliding block 613 moves horizontally rightwards along the first horizontal screw rod 612.

Preferably, as shown in fig. 15 to 17, the first material transferring apparatus 6 of the present utility model further includes a first limit stop member connected to the rotation driving assembly 64, the first limit stop member being capable of blocking the first connection arm 65 to stop the first suction cup 66 on the first connection arm 65 at the discharging position, and a second limit stop member being capable of blocking the first connection arm 65 to stop the first suction cup 66 on the first connection arm 65 at the discharging position.

Through setting up first limit stop component and second limit stop component and carrying out limit stop to first linking arm 65, can make the first sucking disc 66 on the first linking arm 65 stop in putting the position and get the material position accurately for the operation of getting of putting of wafer 10 can accomplish smoothly, is favorable to improving work efficiency.

It should be noted that, in practical applications, those skilled in the art may arrange the first limit stop member and the second limit stop member with a stop block, a stop plate, a stop post, or the like, and such adjustments and changes to the specific structural forms of the first limit stop member and the second limit stop member do not deviate from the principle and scope of the present utility model, and should be limited in the protection scope of the present utility model.

Preferably, as shown in fig. 17, the first limit stop member includes a first limit bolt 67 horizontally disposed and a first lock nut 68 mounted on the first limit bolt 67, the rotary driving assembly 64 is provided with a first threaded hole, the first limit bolt 67 is in threaded connection with the first threaded hole, one end of the first limit bolt 67 is used for stopping and limiting the first connecting arm 65, the other end of the first limit bolt 67 passes through the first threaded hole and is in threaded connection with the first lock nut 68, and the first lock nut 68 is abutted to the rotary driving assembly 64.

Through setting up first limit stop component to first limit bolt 67 to set up the first screw hole rather than the looks adaptation on rotary drive assembly 64, make first limit bolt 67 can follow the horizontal direction and remove for rotary drive assembly 64, so be convenient for calibrate the stop position of first linking arm 65, in order to ensure that the stopper through first limit bolt 67 makes the first sucking disc 66 on the first linking arm 65 stop at the material level accurately, after the calibration, lock first limit bolt 67 through first lock nut 68, avoid first limit bolt 67 to take place to remove.

Preferably, as shown in fig. 16 and 17, the second limit stop member includes a second limit bolt 69 disposed horizontally and a second lock nut (not shown in the drawings) mounted on the second limit bolt 69, the rotation driving assembly 64 is provided with a second threaded hole, the second limit bolt 69 is in threaded connection with the second threaded hole, one end of the second limit bolt 69 is used for stopping the first connecting arm 65, the other end of the second limit bolt 69 passes through the second threaded hole and is in threaded connection with the second lock nut, and the second lock nut is abutted against the rotation driving assembly 64.

Through setting up the second limit stop component as second limit bolt 69 to set up the second screw hole rather than looks adaptation on rotary drive assembly 64, make second limit bolt 69 can follow the horizontal direction and remove for rotary drive assembly 64, so be convenient for calibrate the stop position of first linking arm 65, in order to ensure that the stopper through second limit bolt 69 makes the first sucking disc 66 on the first linking arm 65 stop in getting the material position accurately, after the calibration, lock second limit bolt 69 through the second lock nut, avoid second limit bolt 69 to take place the removal.

It should be noted that, in practical applications, those skilled in the art may set the rotation driving assembly 64 as a motor driving mechanism or an air pressure driving mechanism, etc., and such modifications and changes of the specific structural form of the rotation driving assembly 64 are not limited to the principle and scope of the present utility model.

Preferably, as shown in fig. 15 to 17, the rotary driving unit 64 of the present utility model includes a mount 641 connected to the first elevation driving unit and a rotary cylinder 642 fixed to the mount 641, the rotary cylinder 642 being connected to one end of the first connecting arm 65.

Illustratively, a revolving cylinder 642 is fixed on the top surface of the mounting base 641, one end of the first connecting arm 65 is located below the revolving cylinder 642 and is connected by the revolving cylinder 642, and the revolving cylinder 642 drives the first connecting arm 65 to rotate between a fetching position and a discharging position with the first suction cup 66.

The first limit stop member and the second limit stop member described above are disposed on the mounting base 641 of the rotary drive assembly 64.

It should be noted that, in practical applications, those skilled in the art may set the first lifting driving assembly as a motor driving mechanism, a hydraulic driving mechanism, or an air driving mechanism, etc., and such modifications and changes to the specific structural form of the first lifting driving assembly do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Preferably, as shown in fig. 13 to 17, the first elevation driving assembly of the present utility model includes a first elevation seat 63 coupled to the first horizontal sliding seat 62, and a first elevation cylinder (not shown) mounted on the first elevation seat 63, the first elevation cylinder being coupled to the mounting seat 641.

Illustratively, the bottom surface of the first lifting seat 63 is fixedly connected to the top surface of the first horizontal slide 62, the first lifting cylinder is fixedly connected to the mounting seat 641 of the rotary driving assembly 64, and the first lifting cylinder drives the mounting seat 641 to move vertically with the rotary cylinder 642, the first connecting arm 65 and the first suction cup 66. Wherein the first lifting cylinder is preferably provided as a rodless cylinder.

Preferably, as shown in fig. 15 to 17, the first material transferring apparatus 6 of the present utility model further includes a lifting guide block (not shown) provided on the mounting block 641 and a vertical guide rail 60 provided on the first lifting block 63, the lifting guide block cooperating with the vertical guide rail 60 to guide the mounting block 641 during the up-and-down movement of the mounting block 641 with respect to the first lifting block 63.

Illustratively, the first lifting base 63 has two vertical guide rails 60 spaced apart in a horizontal direction mounted thereon, and the mounting base 641 has two lifting guide blocks spaced apart in a vertical direction mounted at positions corresponding to each vertical guide rail 60.

Preferably, as shown in fig. 13, 14, 18 and 19, the second material transfer apparatus 7 of the present utility model includes a second translational driving assembly, a second elevating driving assembly 73 mounted on the second translational driving assembly, a horizontally disposed second connecting arm 74, a second suction cup 75 and a third suction cup 76.

Wherein, the second translation driving assembly can drive the second lift driving assembly 73 to move along the first horizontal direction (X direction in fig. 13), the second lift driving assembly 73 is connected with one end of the second connecting arm 74 and can drive the second connecting arm 74 to move vertically, the second sucking disc 75 and the third sucking disc 76 are both installed at the other end of the second connecting arm 74, and the second connecting arm 74 extends along the second horizontal direction (Y direction in fig. 13).

By providing the second suction cup 75 and the third suction cup 76 to transfer the wafer 10 before cleaning and the wafer 10 after cleaning, respectively, the wafer 10 after cleaning can be prevented from being contaminated.

Illustratively, a second material transfer device is also mounted on the material transfer support 13, and a second translational drive assembly includes a second translational drive mechanism 71 and a second horizontal slide 72, with a second elevation drive assembly 73 mounted on the second horizontal slide 72, the second translational drive mechanism 71 for driving the second horizontal slide 72 to move in the first horizontal direction.

In a specific working process, after the wafer 10 is ground by the grinding device 8, the second horizontal sliding seat 72 is driven by the second horizontal sliding seat 71 to move horizontally to a position close to the wafer 10 with the second sucking disc 75, the wafer 10 is taken down, then the wafer 10 is placed on the cleaning device 9 for cleaning by the second horizontal sliding seat 72 being driven by the second horizontal sliding seat 71 to move to the cleaning device 9 with the second sucking disc 75 and the wafer 10, and the cleaned wafer 10 is sucked by the third sucking disc 76 and transferred to the material taking device 2.

It should be noted that, in practical applications, those skilled in the art may set the second lifting driving assembly 73 as a motor driving mechanism, a hydraulic driving mechanism, or an air driving mechanism, etc., and such modifications and changes to the specific structural form of the second lifting driving assembly 73 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

In addition, it should be noted that the number of the second suction cups 75 is not limited, for example, when the size of the wafer 10 is small, only one second suction cup 75 may be provided, when the size of the wafer 10 is large, a plurality of second suction cups 75 may be provided, the plurality of second suction cups 75 are distributed along the horizontal direction and jointly suction the wafer 10, and similarly, the present utility model does not limit the number of the third suction cups 76, and one or more third suction cups 76 may be provided according to the size of the wafer 10.

Preferably, as shown in fig. 14, the second translation driving mechanism 71 of the present utility model includes a second translation motor 711, a second horizontal screw 712, and a second slider (not shown) mounted on the second horizontal screw 712, the second slider being fixedly connected to or integrally provided with the second horizontal slider 72, the second translation motor 711 being configured to drive the second horizontal screw 712 to rotate, and the second slider being horizontally moved along the length direction of the second horizontal screw 712 along with the rotation of the second horizontal screw 712.

The second slider is provided with a threaded hole in threaded connection with the second horizontal screw 712, when the second horizontal screw 712 is driven by the second translation motor 711 to rotate clockwise, the second slider moves horizontally leftwards along the second horizontal screw 712, and when the second horizontal screw 712 is driven by the second translation motor 711 to rotate anticlockwise, the second slider moves horizontally rightwards along the second horizontal screw 712.

Preferably, as shown in fig. 13, 18 and 19, the second elevation driving assembly 73 includes a bracket 731 and a second elevation cylinder 732 mounted on the bracket 731, the bracket 731 being fixedly mounted on the second horizontal slider 72, the second elevation cylinder 732 being connected to one end of the second connection arm 74.

Preferably, as shown in fig. 18 and 19, the second suction cup 75 is located below the third suction cup 76, the suction surface of the second suction cup 75 is disposed downward and the suction surface of the third suction cup 76 is disposed upward.

Illustratively, as shown in fig. 18 and 19, the bottom surface of the second chuck 75 is provided with a suction hole (not shown in the drawings), the second chuck 75 is communicated with the vacuum generator through an air pipe, after the vacuum generator is started, a negative pressure environment is generated in the second chuck 75, the wafer 10 is firmly adsorbed on the bottom surface of the second chuck 75, the top surface of the third chuck 76 is also provided with a suction hole, the third chuck 76 is also communicated with the vacuum generator through an air pipe, after the vacuum generator is started, a negative pressure environment is generated in the third chuck 76, the wafer 10 is firmly adsorbed on the top surface of the third chuck 76, wherein the vacuum generator communicated with the second chuck 75 and the vacuum generator communicated with the third chuck 76 are preferably two independent vacuum generators, and each vacuum generator is independently controlled to operate.

Preferably, as shown in fig. 14, the first horizontal slide 62 and the second horizontal slide 72 are distributed along the first horizontal direction, and the material transfer support 13 is provided with a guiding mechanism for guiding the first horizontal slide 62 and the second horizontal slide 72 when the first horizontal slide 62 and the second horizontal slide 72 move relative to the material transfer support 13.

Preferably, as shown in fig. 14, the guiding mechanism of the present utility model includes a first guiding member 131, a second guiding member 132 and a third guiding member 133, the first guiding member 131, the second guiding member 132 and the third guiding member 133 are fixedly connected with the first horizontal slide 62, the second horizontal slide 72 and the material transferring support 13, respectively, the first guiding member 131 cooperates with the third guiding member 133 for guiding the first horizontal slide 62, and the second guiding member 132 cooperates with the third guiding member 133 for guiding the second horizontal slide 72.

That is, the first horizontal slider 62 and the second horizontal slider 72 share the third guide member 133, so that the structure is simplified more, which is advantageous in optimizing the overall layout.

Preferably, as shown in fig. 14, the number of the third guide members 133 is two and is spaced apart along a second horizontal direction (Y direction shown in fig. 14), the first translational driving mechanism 61 and the second translational driving mechanism 71 are located between the two third guide members 133, the second horizontal direction is perpendicular to the first horizontal direction, the number of the first guide members 131 is at least two and is respectively engaged with the corresponding third guide members 133, and the number of the second guide members 132 is at least two and is respectively engaged with the corresponding third guide members 133.

By providing two third guide members 133 together guiding the first horizontal slide 62 and the second horizontal slide 72, the guiding accuracy is better, and in addition, by providing the first translational driving mechanism 61 and the second translational driving mechanism 71 between the two third guide members 133, the layout is more reasonable and the occupied space is smaller.

It should be noted that the specific structural forms of the first guide member 131, the second guide member 132 and the third guide member 133 are not limited, for example, a structure in which a guide rail is matched with a guide block may be provided, a structure in which a guide groove is matched with a guide plate may be provided, a structure in which a guide post is matched with a guide hole may be provided, etc., and such flexible adjustment and modification do not deviate from the principle and scope of the present utility model, and are all limited in the scope of protection of the present utility model.

Preferably, as shown in fig. 14, the first guide member 131 is a first guide block, the second guide member 132 is a second guide block, and the third guide member 133 is a horizontal guide rail extending along the first horizontal direction, and both the first guide block and the second guide block are adapted to the horizontal guide rail.

Preferably, as shown in fig. 1, the number of grinding devices 8 is at least two.

Illustratively, as shown in fig. 1, the number of grinding devices 8 is two, and the two grinding devices 8 are distributed along the first horizontal direction, i.e., the chamfering machine of the present utility model is double-station.

It should be noted that the number of the grinding devices 8 is not limited to the above two, and may be, for example, three or four, or the like.

Preferably, as shown in fig. 1, 20 and 21, the grinding apparatus 8 of the present utility model includes a grinding assembly 85, a first horizontal drive assembly 81, a second horizontal drive assembly 82 mounted on the first horizontal drive assembly 81, and a grinding carriage assembly 84 mounted on the second horizontal drive assembly 82.

The grinding assembly 85 is used for chamfering and grinding the wafer 10, the first horizontal driving assembly 81 can drive the second horizontal driving assembly 82 to move along a first horizontal direction (X direction shown in fig. 1 or 20), the second horizontal driving assembly 82 can drive the grinding carrier assembly 84 to move along a second horizontal direction (Y direction shown in fig. 1 or 20), the second horizontal direction is perpendicular to the first horizontal direction, and the grinding carrier assembly 84 is used for carrying the wafer 10 and can rotate with the wafer 10.

The wafer 10 is placed on the top surface of the grind carriage assembly 84 and the wafer 10 is rotated by the grind carriage assembly 84 during the chamfer grinding process.

In the process that the first material transferring device 6 moves towards the grinding device 8 with the wafer 10, the first horizontal driving assembly 81 and the second horizontal driving assembly 82 drive the grinding bearing assembly 84 to move towards the first material transferring device 6, so that the working efficiency can be improved.

Preferably, as shown in fig. 20, the first horizontal driving assembly 81 of the present utility model includes a first horizontal driving mechanism and a first translation seat 812, the first horizontal driving mechanism is in driving connection with the first translation seat 812 and is capable of driving the first translation seat 812 to move along a first horizontal direction, and the second horizontal driving assembly is mounted on the first translation seat 812.

As shown in fig. 1 and 20, the first horizontal driving mechanism is installed on the base 11, and is located below the first translation seat 812, and the first horizontal driving mechanism includes a first motor 811, a first screw (not shown in the drawing) extending along a first horizontal direction, and a first slider (not shown in the drawing) installed on the first screw, a top end of the first slider is fixedly connected with a bottom surface of the first translation seat 812, a driving shaft of the first motor 811 is connected with the first screw and can drive the first screw to rotate, and the first slider moves along a length direction of the first screw along with the rotation of the first screw along with the first translation seat 812.

It should be noted that, the first horizontal driving mechanism of the present utility model is not limited to the above-mentioned structure of the first motor 811, the first screw and the first slider, for example, the first screw and the first slider may be replaced by a rack and a gear, or the first horizontal driving mechanism may be provided as a hydraulic driving mechanism, etc., and such adjustment and modification of the specific structure of the first horizontal driving mechanism do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Preferably, as shown in fig. 20, the second horizontal driving assembly 82 of the present utility model includes a second horizontal driving mechanism mounted on the first translation seat 812 and a second translation seat 822, the second horizontal driving mechanism is drivingly connected with the second translation seat 822 and is capable of driving the second translation seat 822 to move in a second horizontal direction, and the rotary driving assembly is mounted on the second translation seat 822.

As shown in fig. 20, the second horizontal driving mechanism is disposed below the second translation seat 822, and the second horizontal driving mechanism includes a second motor 821, a second screw rod (not shown) extending along a second horizontal direction, and a second slider (not shown) mounted on the second screw rod, wherein a top end of the second slider is fixedly connected to a bottom surface of the second translation seat 822, and a driving shaft of the second motor 821 is connected to the second screw rod and is capable of driving the second screw rod to rotate, and the second slider moves along a length direction of the second screw rod along with the second translation seat 822 along with the rotation of the second screw rod.

It should be noted that the second horizontal driving mechanism of the present utility model is not limited to the above-mentioned second motor 821, the second horizontal screw and the second slider, for example, the second horizontal screw and the second slider may be replaced by a rack and a gear, or the second horizontal driving mechanism may be provided as a hydraulic driving mechanism, etc., and such adjustments and changes to the specific structural form of the second horizontal driving mechanism do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Preferably, as shown in fig. 20, the grinding apparatus 8 of the present utility model further includes a first lifting driving mechanism mounted on the second horizontal driving assembly 82, and the first lifting driving mechanism is connected to the grinding carriage assembly 84 and is capable of driving the grinding carriage assembly 84 to move up and down in the vertical direction.

Illustratively, as shown in fig. 20, the first lifting driving mechanism of the present utility model includes a third motor (not shown) mounted on the second translation seat 822 of the second horizontal driving assembly 82, a vertical screw (not shown) and a third slider 83 mounted on the vertical screw, a side portion of the third slider 83 is fixedly connected to the grinding carriage assembly 84, a driving shaft of the third motor is connected to the vertical screw and can drive the vertical screw to rotate, and the third slider 83 moves up and down along the vertical direction with the grinding carriage assembly 84 along with the rotation of the vertical screw.

It should be noted that the first lifting driving mechanism of the present utility model is not limited to the above-described structure of the third motor, the vertical screw and the third slider 83, for example, the vertical screw and the third slider may be replaced by a rack and a gear, or the first lifting driving mechanism may be provided as a hydraulic driving mechanism, etc., and such adjustment and change of the specific structure of the first lifting driving mechanism do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Preferably, as shown in fig. 20, the grinding carriage assembly 84 of the present utility model includes a lifting base 841 mounted on the second lifting base 822, a third rotation driving mechanism mounted on the lifting base 841, and a grinding carriage member 843 mounted on the top end of the third rotation driving mechanism, wherein the first lifting driving mechanism (specifically, the third slider 83 of the first lifting driving mechanism) is connected to the lifting base 841, the third rotation driving mechanism is used for rotating with the grinding carriage member 843, and the grinding carriage member 843 is used for carrying the wafer 10.

Illustratively, the third rotary driving mechanism includes a fourth motor, a speed reducer, and a third rotary shaft 842 disposed vertically, the grinding carrier member 843 is fixedly mounted on the top end of the third rotary shaft 842, the driving shaft of the fourth motor is fixedly connected with the bottom end of the third rotary shaft 842 through the speed reducer, and the fourth motor can rotate with the grinding carrier member 843 by driving the third rotary shaft 842.

It should be noted that, the third rotation driving mechanism is not limited to the above-mentioned structure of the fourth motor, the speed reducer and the third rotation shaft 842, for example, the speed reducer may be replaced by a synchronous belt transmission assembly, the fourth motor may be disposed on a side surface of the third rotation shaft 842, a driving shaft of the fourth motor may be in driving connection with a bottom end of the third rotation shaft 842 through the synchronous belt transmission assembly, or the speed reducer may be replaced by a chain transmission assembly, the fourth motor may be disposed on a side surface of the third rotation shaft 842, a driving shaft of the fourth motor may be in driving connection with the bottom end of the third rotation shaft 842 through the chain transmission assembly, or the DD direct driving motor may be directly used to drive the third rotation shaft 842 to rotate, so that the adjustment and change of the specific structure of the third rotation driving mechanism do not deviate from the principle and scope of the present utility model.

Preferably, as shown in fig. 20, the abrasive carrier 843 of the present utility model is a vacuum chuck.

Wherein, the top surface of vacuum chuck is equipped with the suction port, and vacuum chuck passes through the vacuum generator intercommunication of trachea and beveler, and after starting vacuum generator, the interior negative pressure environment that produces of vacuum chuck can firmly adsorb the top surface at vacuum chuck with wafer 10.

It should be noted that, in order to facilitate the communication between the vacuum chuck and the vacuum generator, the third rotation shaft 842 may be provided with an air channel in the third rotation shaft 842, the top end of the air channel extends to the top of the third rotation shaft 842 and is communicated with the vacuum chuck, the bottom end of the air channel extends to the bottom end of the third rotation shaft 842, a rotary joint is installed at the bottom end of the third rotation shaft 842, one end of the rotary joint is communicated with the bottom end of the air channel, and the other end of the rotary joint is communicated with the vacuum generator through an air pipe.

Preferably, as shown in fig. 21 to 23, the grinding assembly 85 of the present utility model includes a grinding fixing member 851, and a grinding drive mechanism 852, a spindle, and a grinding wheel 854 mounted on the grinding fixing member 851. The grinding drive mechanism 852 is connected to a first end of the spindle (a lower end of the spindle as viewed in fig. 23) and is capable of driving the spindle to rotate, and the grinding wheel 854 is used for grinding a wafer and is fixedly mounted on a second end of the spindle (an upper end of the spindle as viewed in fig. 23).

As shown in fig. 21 to 23, the grinding fixing member 851 is an exemplary fixing frame, the fixing frame is mounted on the base 11, the spindle is vertically disposed, the spindle is mounted in the fixing frame, the upper end of the spindle extends out from the top of the fixing frame, the lower end of the spindle is fixedly connected with the grinding driving mechanism 852, and during the process of grinding the wafer 10, the grinding driving mechanism 852 drives the spindle to rotate at a high speed with the grinding wheel 854, and chamfer grinding is performed on the wafer 10 by the grinding wheel 854 rotating at a high speed.

Preferably, as shown in fig. 21 and 23, the grinding drive mechanism 852 of the present utility model includes a grinding motor 8521 and a grinding transmission assembly, the grinding motor 8521 being located on a side of the spindle and being drivingly connected to the first end of the spindle through the grinding transmission assembly.

Illustratively, the grinding motor 8521 is disposed at the left side of the main shaft, and an output shaft of the grinding motor 8521 is disposed vertically upward and is drivingly connected to the lower end of the main shaft through a grinding transmission assembly, and the grinding motor 8521 rotates at a high speed with the main shaft through the grinding transmission assembly.

The spindle includes a grinding shaft body 853 and a shaft sleeve (not shown in the drawing) sleeved on the grinding shaft body 853, the shaft sleeve is fixedly connected with the grinding fixing member 851, the grinding shaft body 853 can rotate relative to the shaft sleeve, a first end (a lower end of the grinding shaft body 853 as viewed in fig. 23) of the grinding shaft body 853 extends from a lower end of the shaft sleeve and is connected with the grinding transmission assembly, and a second end (an upper end of the grinding shaft body 853 as viewed in fig. 23) of the grinding shaft body 853 extends from an upper end of the shaft sleeve and is fixedly connected with the grinding wheel 854.

It should be noted that, in practical applications, those skilled in the art may set the grinding transmission assembly as a belt grinding transmission assembly, or may set the grinding transmission assembly as a chain grinding transmission assembly, etc., and such modifications and changes to the specific structural form of the grinding transmission assembly do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Preferably, as shown in fig. 21, the grinding transmission assembly of the present utility model includes a grinding driving pulley 8522, a driven pulley (not shown in the drawings), and a grinding belt 8523 for connecting the grinding driving pulley 8522 and the driven pulley, the grinding driving pulley 8522 being fixedly connected to a driving shaft of the grinding motor 8521, and the driven pulley being fixedly connected to or integrally provided with a first end of the main shaft.

In operation, the grinding drive pulley 8522 is driven to rotate by the grinding motor 8521, and the grinding drive pulley 8522 rotates with the driven pulley and the grinding shaft body 853 of the main shaft through the grinding drive belt 8523, wherein the driven pulley may be fixed to the grinding shaft body 853 of the main shaft through welding or screwing, or the driven pulley may be directly machined on the grinding shaft body 853, even if the driven pulley is integrally provided with the grinding shaft body 853.

Preferably, as shown in fig. 21 to 23, the grinding assembly 85 of the present utility model further includes a clamping sleeve 856 which is sleeved on and clamps the spindle, a first end of the spindle (a lower end of the spindle as viewed in fig. 23) extending from a first end of the clamping sleeve 856 (a lower end of the clamping sleeve 856 as viewed in fig. 23) and connected to the grinding transmission assembly, and a second end of the spindle (an upper end of the spindle as viewed in fig. 23) extending from a second end of the clamping sleeve 856 (an upper end of the clamping sleeve 856 as viewed in fig. 23) and fixedly connected to the grinding wheel 854.

The clamping sleeve 856 is sleeved on the shaft sleeve of the main shaft and clamps the shaft sleeve, as shown in fig. 23, the main shaft and the clamping sleeve 856 form a main shaft assembly together, the main shaft is fixedly connected with the grinding fixing member 851 through the clamping sleeve 856, the lower end of the grinding shaft body 853 of the main shaft extends out of the lower end of the clamping sleeve 856, the upper end of the grinding shaft body 853 extends out of the upper end of the clamping sleeve 856, the upper end and the lower end of the shaft sleeve can extend out of the clamping sleeve 856 or not, and a person skilled in the art can flexibly set the upper end and the lower end of the shaft sleeve, and of course, the shaft sleeve is preferably not made to extend out of the clamping sleeve 856.

Illustratively, as shown in fig. 23, the clamping sleeve 856 is provided with an opening 8561 extending along an axial direction thereof, one side of the opening 8561 is provided with a plurality of adjusting screws 8562 (which are spaced apart along the axial direction of the clamping sleeve 856), the other side of the opening 8561 is provided with a threaded hole (not shown) at a position corresponding to each of the adjusting screws 8562, the adjusting screws 8562 are screwed with the threaded holes, and the width of the opening 8561 can be adjusted by the adjusting screws 8562, thereby adjusting the clamping force of the clamping sleeve 856, wherein the larger the width of the opening 8561, the smaller the clamping force of the clamping sleeve 856, and conversely, the smaller the width of the opening 8561, the larger the clamping force of the clamping sleeve 856.

Preferably, as shown in fig. 21 and 22, the grinding assembly 85 of the present utility model further includes a support assembly 857, the second end of the spindle assembly is connected to the grinding fixing member 851, the support assembly 857 is supported between the first end and the second end of the spindle assembly, and the supporting force of the support assembly 857 on the spindle assembly is opposite to the acting force of the grinding transmission assembly on the spindle assembly.

Illustratively, the second end of the clamping sleeve 856 (the upper end of the clamping sleeve 856 as viewed in fig. 21) is fixedly connected to the grinding fixture 851, the support member 857 is supported at the first end of the clamping sleeve 856 (the lower end of the clamping sleeve 856 as viewed in fig. 21), the support member 857 is positioned at the left side of the clamping sleeve 856, the support member 857 is supported at the left side of the clamping sleeve 856, that is, the support member 857 is oriented to the right side of the spindle assembly, the grinding motor 8521 is positioned at the left side of the spindle assembly, the grinding belt 8523 of the grinding drive assembly is oriented to the left side of the spindle assembly, that is, the force of the grinding drive assembly is oriented to the left side of the spindle assembly, which is opposite to the direction of the support member 857 is oriented to the support force of the spindle assembly, so as to fix the first end of the spindle assembly.

It should be noted that, in practical applications, the upper end and the lower end of the spindle assembly may be fixedly connected to the grinding fixing member 851, and in this case, the support assembly 857 may be omitted.

Of course, the upper end of the main shaft assembly is preferably fixedly connected with the grinding fixing member 851, so that the lower end of the main shaft assembly is kept in a free state, and the other end of the main shaft assembly is fixed through the cooperation of the supporting assembly 857 and the grinding transmission assembly during installation, so that the installation difficulty is greatly reduced, and the assembly efficiency of the grinding device is improved.

It should be further noted that the specific structural form of the support member 857 is not limited by the present utility model, for example, the support member 857 may be configured as a support block having a wedge surface, or the support member 857 may be configured as a support column, etc., and such modifications and changes to the specific structural form of the support member 857 do not deviate from the principle and scope of the present utility model and should be limited to the protection scope of the present utility model.

Preferably, as shown in fig. 21 and 22, the support assembly 857 of the present utility model includes a support block 8571 and a tightening screw 8572, the grinding fixing member 851 is provided with a threaded hole (not shown) adapted to the tightening screw 8572, a first end of the support block 8571 is supported on the spindle assembly, and an end of the tightening screw 8572 passes through the threaded hole and is supported on a second end of the support block 8571.

By rotating the jack screw 8572, the position of the support block 8571 can be adjusted, and the operation is more convenient.

Illustratively, as shown in fig. 21 and 22, the jacking screw 8572 is disposed in a horizontal direction, the right end of the jacking screw 8572 is supported at the left end of the supporting block 8571, the right end of the supporting block 8571 is supported at the left side surface of the clamping sleeve 856 of the spindle assembly, and the jacking screw 8572 is rotated clockwise to move rightward against the supporting block 8571, whereas the jacking screw 8572 is rotated counterclockwise to move leftward with the jacking screw 8572.

Preferably, as shown in fig. 21 and 22, the end surface of the first end of the support block 8571 of the present utility model is provided with a limit groove 85711, and a portion of the spindle assembly is located in the limit groove 85711.

As shown in fig. 21 and 22, the right end surface of the supporting block 8571 is provided with a limiting groove 85711, and the left part of the clamping sleeve 856 of the spindle assembly is located in the limiting groove 85711, and is limited by the limiting groove 85711, so that the stability is better.

Preferably, as shown in fig. 21 and 22, the opening size of the limit groove 85711 gradually decreases in the direction of the first end toward the second end of the support block 8571.

Illustratively, as shown in fig. 21 and 22, the right end surface of the supporting block 8571 is provided with a limit groove 85711, the opening size of the left side of the limit groove 85711 is small, the opening size of the right side is large, the structure is similar to a V-shaped structure, and two side surfaces of the limit groove 85711 are tangent to the outer wall of the clamping sleeve 856.

Preferably, as shown in fig. 21 and 22, the second end of the clamping sleeve 856 is provided with a flange plate 8563, and the flange plate 8563 is fixedly connected with the grinding fixing member 851.

Illustratively, a flange plate 8563 is provided at the upper end of the clamping sleeve 856, and a flange plate 8563 is fixedly coupled to the top of the grinding fixing member 851 by bolts.

Preferably, as shown in fig. 23, a first end of the clamping sleeve 856 is provided with a first positioning structure 8564, and a second positioning structure is provided on the spindle, and the first positioning structure 8564 abuts against the second positioning structure to axially position the spindle.

When the spindle is installed, the spindle is inserted into the clamping sleeve 856, and when the first positioning structure 8564 abuts against the second positioning structure, the spindle is installed in place, and the spindle is clamped by tightening the adjusting screw 8562.

It should be noted that, in practical application, the first positioning structure 8564 and the second positioning structure may be configured to match the positioning block with the positioning plate, or may also be configured to match the positioning block with the positioning rib, or may also be configured to match the positioning plate with the positioning plate, etc., and such adjustment and modification of the specific structural forms of the first positioning structure 8564 and the second positioning structure do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Preferably, as shown in fig. 23, the first positioning structure 8564 is a positioning block, and the second positioning structure is an end surface of the first end of the shaft sleeve of the main shaft.

Illustratively, when the spindle is installed, the lower end of the spindle is inserted into the clamping sleeve 856 from the upper end of the clamping sleeve 856, and when the lower end surface of the spindle sleeve abuts against the positioning block located at the lower end of the clamping sleeve 856, the spindle is installed in place, the adjusting screw 8562 is tightened to clamp the spindle, and only the lower end of the grinding shaft body 853 of the spindle protrudes from the lower end of the clamping sleeve 856.

Preferably, as shown in fig. 24 and 25, the cleaning apparatus 9 of the present utility model includes a cleaning fixing member 91, and a spin-drying assembly 92, a rinsing assembly, a take-out suction cup 941 and a second elevating driving mechanism mounted on the cleaning fixing member 91.

Wherein, wash the fixed member 91 and have wash the cavity 911, the at least part that spin-dries the subassembly 92 is located and washs the cavity 911, spin-dry the subassembly 92 and be used for bearing wafer 10 and take the wafer 10 rotatory, wash the subassembly and be used for washing the wafer 10 that is located spin-dry the subassembly 92, the second lift driving mechanism can drive and get the material sucking disc 941 vertical movement, get the material sucking disc 941 and be located the spin-dry the subassembly 92 directly over, get the material sucking disc 941 and be used for taking off the wafer 10 that washs and transfer to the second material transfer device 7 from spin-dry the subassembly 92.

The surface of the wafer 10 subjected to grinding is provided with a lot of powder, the cleaning device disclosed by the utility model can clean the powder on the wafer 10, specifically, the wafer 10 can be placed on the spin-drying component 92, the flushing component can spray water on the wafer 10 so as to flush the powder on the wafer 10, the spin-drying component 92 can rotate at a high speed with the wafer 10 so as to spin-dry the wafer 10, after the wafer 10 is spin-dried, the second lifting driving mechanism drives the material taking sucker 941 to vertically move downwards, the wafer 10 is taken off from the spin-drying component 92 through the material taking sucker 941, when the second material transferring device 7 transfers the wafer 10 subjected to grinding to the spin-drying component 92, the third sucker 76 on the second material transferring device 7 is positioned right below the material taking sucker 941, the cleaned wafer 10 can be transferred to the third sucker 76, and the working efficiency of the chamfering machine is greatly improved.

Illustratively, the cleaning fixing member 91 includes a cleaning fixing base 912 mounted on the base 11 and a cleaning protecting cover 913 disposed on the cleaning fixing base 912, wherein a bottom end of the cleaning protecting cover 913 is fixedly connected to or integrally disposed with a top surface of the cleaning fixing base 912, a cleaning chamber 911 is formed inside the cleaning protecting cover 913, and a top of the cleaning chamber 911 is provided with an opening for facilitating the taking and placing of the wafer 10.

It should be noted that, in practical applications, those skilled in the art may set the second lifting driving mechanism as a motor driving mechanism, or may set the second lifting driving mechanism as a hydraulic driving mechanism, or may set the second lifting driving mechanism as a cylinder driving mechanism, etc., and such specific types of adjustment and modification of the second lifting driving mechanism do not deviate from the principle and scope of the present utility model, and should be limited in the scope of protection of the present utility model.

In addition, it should be noted that the number of the material taking suction cups 941 is not limited, for example, when the size of the wafer 10 is small, only one material taking suction cup 941 may be provided, and when the size of the wafer 10 is large, a plurality of material taking suction cups 941 may be provided, and the plurality of material taking suction cups 941 are distributed along the horizontal direction to jointly absorb the wafer 10.

Preferably, as shown in fig. 24 and 25, the second lifting driving mechanism of the present utility model includes a third cylinder 942 and a third connecting arm 943, two ends of the third connecting arm 943 are respectively connected with the third cylinder 942 and the material taking suction cup 941, and the third cylinder 942 drives the material taking suction cup 941 to move up and down along the vertical direction through the third connecting arm 943.

As shown in fig. 24 and 25, the third cylinder 942 is installed outside the cleaning chamber 911, the third connecting arm 943 is horizontally disposed, one end of the third connecting arm 943 is fixedly connected with a piston rod of the third cylinder 942, the other end of the third connecting arm 943 extends from above the cleaning chamber 911 to above the spin-drying table 922 of the spin-drying assembly 92, and the material taking suction cup 941 is installed at the other end of the third connecting arm 943 just above the spin-drying table 922 so as to absorb the wafer 10 on the spin-drying table 922.

After the wafer 10 is cleaned, the third air cylinder 942 descends to a position close to the spin-drying table 922 through the third connecting arm 943 with the material taking sucker 941, the material taking sucker 941 sucks the wafer 10 on the spin-drying table 922, and the third air cylinder 942 moves upwards through the third connecting arm 943 with the material taking sucker 941 and the wafer 10.

Preferably, as shown in fig. 24 and 25, the spin-drying assembly 92 of the present utility model includes a spin-drying driving mechanism, a spin-drying main shaft 921, and a spin-drying table 922, the spin-drying driving mechanism is drivingly connected to the spin-drying main shaft 921 and is capable of driving the spin-drying main shaft 921 to rotate, the spin-drying main shaft 921 is vertically disposed and a top end of the spin-drying main shaft 921 extends into the cleaning chamber 911 from a bottom of the cleaning chamber 911, the spin-drying table 922 is fixedly installed at the top end of the spin-drying main shaft 921, the spin-drying table 922 is used for carrying the wafer 10, and the material taking suction cup 941 is located right above the spin-drying table 922.

As illustrated in fig. 24 and 25, a spin-drying driving mechanism is fixedly installed on the cleaning mount 912 of the cleaning fixing member 91, the spin-drying driving mechanism being located outside the cleaning chamber 911, a top surface of the cleaning mount 912 being provided with a through hole through which the spin-drying spindle 921 passes, and the spin-drying driving mechanism driving the spin-drying spindle 921 to rotate at a high speed with the spin-drying table 922 and the wafer 10 on the spin-drying table 922 during the cleaning of the wafer 10 to spin-dry the wafer 10.

It should be noted that, in practical applications, those skilled in the art may set the spin-drying driving mechanism in a structure of a motor and a speed reducer, or in a structure of a motor and a synchronous belt set, etc., and such modifications and changes to the specific structure of the spin-drying driving mechanism do not deviate from the principle and scope of the present utility model, and should be limited in the protection scope of the present utility model.

Preferably, as shown in fig. 25, the top surface of the spin-drying table 922 is provided with at least one second suction hole 9221, and a second ventilation groove (not shown) communicating with the second suction hole 9221 is provided in the spin-drying table 922, and the second ventilation groove communicates with the vacuum generator.

The wafer 10 to be cleaned is placed on the top surface of the spin-drying table 922, a vacuum generator is started, a negative pressure environment is generated in the spin-drying table 922, the wafer 10 is firmly adsorbed on the top surface of the spin-drying table 922, the wafer 10 is prevented from being separated from the spin-drying table 922 in the spin-drying process, after the wafer 10 is cleaned, the vacuum generator is turned off, and the wafer 10 is taken away by the material taking sucker 941.

It should be noted that the number of the second suction holes 9221 is not limited in the present utility model, and those skilled in the art may set the number of the second suction holes 9221 to one or more, however, it is preferable to set the number of the second suction holes 9221 to a plurality to increase the adsorption force of the spin-drying table 922 to the wafer 10.

In addition, it should be noted that the shape of the second air suction hole 9221 is not limited by the present utility model, and those skilled in the art may set the second air suction hole 9221 to be circular, square, or elongated, etc., and such flexible adjustment and modification are not limited to the principle and scope of the present utility model.

In addition, the vacuum generator for the spin stand 922 and the vacuum generator for the take-out suction cup 941 are independent, and each is independently controlled to operate.

Preferably, the spin-drying main shaft 921 is provided therein with a second air passage (not shown) extending in an axial direction thereof, and top and bottom ends of the second air passage are respectively communicated with the second air passage groove and the vacuum generator.

Illustratively, as shown in fig. 25, the spin spindle 921 includes a spin shaft 9211 and a spin shaft sleeve 9212 sleeved on the spin shaft 9211, the spin shaft sleeve 9212 is fixedly connected with the cleaning fixing base 912 of the cleaning fixing member 91, the spin shaft 9211 is rotatable relative to the spin shaft sleeve 9212, the top end of the spin shaft 9211 is fixedly connected with the spin table 922, the second air passage extends from the top end of the spin shaft 9211 to the bottom end of the spin shaft 9211, the top end of the second air passage is communicated with the second air passage in the spin table 922, and a rotary joint is mounted at the bottom end of the second air passage and is communicated with the vacuum generator through an air pipe.

Preferably, as shown in fig. 24 and 25, the spin-drying driving mechanism includes a spin-drying motor 923 and a spin-drying synchronization band set 924, and the spin-drying motor 923 is in driving connection with the spin-drying main shaft 921 through the spin-drying synchronization band set 924.

As shown in fig. 24 and 25, the spin motor 923 is vertically installed on the cleaning fixing base 912 of the cleaning fixing member 91, the driving shaft of the spin motor 923 is disposed downward, and the spin synchronous belt set 924 includes a spin driving pulley 9241 fixedly installed on the driving shaft of the spin motor 923, a spin driven pulley 9243 fixedly installed on the spin shaft body 9211 of the spin spindle 921, and a spin driving belt 9242 for connecting the spin driving pulley 9241 and the spin driven pulley 9243, the spin driving pulley 9241 is driven to rotate by the spin motor 923, the spin driving pulley 9241 is driven to rotate by the spin driving belt 9242, the spin driven pulley 9243 and the spin shaft body 9211 are driven to rotate by the spin driving belt 9211, and the spin shaft body 9211 is driven to rotate by the spin table 922 and the wafer 10.

Preferably, as shown in fig. 24, the cleaning apparatus 9 of the present utility model further includes an air blowing assembly for blowing air toward the wafer 10 on the spin-drying assembly 92.

By providing the air blowing assembly to blow air onto the wafer 10, the cleaning efficiency of the wafer 10 can be improved.

Illustratively, as shown in fig. 24, the blowing assembly includes an air pump (not shown) and a blowing pipe 95 communicated with the air pump, the blowing pipe 95 extends into the cleaning chamber 911, and in the process of cleaning the wafer 10, the air pump is started to blow air towards the wafer 10 through the blowing pipe 95, so that the wafer 10 is dried as soon as possible, and the cleaning efficiency is improved.

Preferably, as shown in fig. 24, the flushing assembly of the present utility model includes a water storage member (not shown), a water pump (not shown) installed in the water storage member, and a water spray pipe 93 communicating with the water pump, the water spray pipe 93 extending into the cleaning chamber 911.

When the wafer 10 needs to be washed, a water pump is started, the water pump pumps clean water in the water storage component into the water spraying pipe 93, and the water spraying pipe 93 sprays water towards the wafer 10 to wash away powder on the wafer 10.

Furthermore, those skilled in the art will appreciate that while some embodiments described herein include some features but not others included in other embodiments, combinations of features of different embodiments are meant to be within the scope of the application and form different embodiments. For example, in the claims of the present application, any of the claimed embodiments may be used in any combination.

Thus far, the technical solution of the present application has been described in connection with the preferred embodiments shown in the drawings, but it is easily understood by those skilled in the art that the scope of protection of the present application is not limited to these specific embodiments. Equivalent modifications and substitutions for related technical features may be made by those skilled in the art without departing from the principles of the present application, and such modifications and substitutions will fall within the scope of the present application.

Claims

1. A processing equipment, characterized in that the processing equipment includes a first material box, a second material box, a material taking device, a detection device, a first material transfer device, a second material transfer device, a grinding device and a cleaning device,

The first material box is used to store materials to be processed, the second material box is used to store processed materials, the material taking device is used to transfer the materials in the first material box to the detection device, the detection device is used to detect the materials, the first material transfer device is used to transfer the detected materials from the detection device to the grinding device, the grinding device is used to grind the materials, the second material transfer device is used to transfer the ground materials from the grinding device to the cleaning device, the cleaning device is used to clean the materials,

The second material transfer device is also used to transfer the cleaned material from the cleaning device to the material taking device and the material taking device puts the material into the second material box.

2. The processing equipment according to claim 1 is characterized in that the processing equipment also includes a positioning device, which is used to locate the center point of the material. The material picking device can also transfer the material on the positioning device to the detection device, and the detection device can detect the position of the center point of the material so as to calibrate the material picking device.

3. The processing equipment according to claim 2, characterized in that the positioning device comprises a first fixing member and a first clamping assembly, a second clamping assembly and a clamping drive assembly installed on the first fixing member,

The first clamping assembly and the second clamping assembly are arranged relatively to each other along a first horizontal direction, and the clamping drive assembly can drive the first clamping assembly and the second clamping assembly to move toward each other synchronously along the first horizontal direction to clamp the material. The clamping drive assembly can also drive the first clamping assembly and the second clamping assembly to move synchronously in the opposite direction along the first horizontal direction.

4. The processing equipment according to claim 3 is characterized in that a first positioning groove is provided on a side of the first clamping component facing the second clamping component, and a second positioning groove is provided on a side of the second clamping component facing the first clamping component, and the first positioning groove and the second positioning groove are respectively abutted against the edges on both sides of the material to clamp the material.

5. The processing equipment according to claim 4, characterized in that the clamping drive assembly comprises a clamping drive mechanism, a first rack extending along the first horizontal direction, a second rack extending along the first horizontal direction and a gear,

The clamping drive mechanism can drive the first clamping assembly to move along the first horizontal direction, the first rack and the second rack are respectively connected to the first clamping assembly and the second clamping assembly, the first rack and the second rack are spaced apart along the second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, the gear is rotatably mounted on the first fixed member, the gear is located between the first rack and the second rack and meshes with the first rack and the second rack.

6. The processing equipment according to claim 5, characterized in that the clamping drive mechanism comprises a clamping cylinder, an elastic reset member extending along the first horizontal direction, and a pushing member connected to the first clamping assembly,

The clamping cylinder can drive the pushing member to move with the first clamping assembly along the first horizontal direction away from the second clamping assembly. The two ends of the elastic reset member are respectively connected to the first fixed member and the pushing member. The elastic reset member can make the pushing member move with the first clamping assembly along the first horizontal direction toward the second clamping assembly after the clamping cylinder is released from drive.

7. The processing equipment according to claim 6 is characterized in that a first connecting structure is provided on the first fixing member, a second connecting structure is provided on the pushing member, two ends of the elastic reset member are respectively connected to the first connecting structure and the second connecting structure, and an initial distance between the first connecting structure and the second connecting structure along the first horizontal direction is adjustable.

8. The processing equipment according to claim 7 is characterized in that the second connecting structure is a connecting rod arranged along the first horizontal direction, the pushing member is provided with a mounting hole, the mounting hole passes through the pushing member along the first horizontal direction, the first end of the connecting rod is connected to the elastic reset member, the connecting rod is provided with a threaded section at a position close to its second end, the threaded section passes through the mounting hole, an adjusting nut threadedly matched therewith is installed on the threaded section, and the side of the adjusting nut close to the first end of the connecting rod abuts against the pushing member; or

The second connecting structure is a connecting rod arranged along the first horizontal direction, the pushing member is provided with a mounting hole, the first end of the connecting rod is connected to the elastic reset member, the connecting rod is provided with a threaded section at a position close to its second end, the inner wall of the mounting hole is provided with a thread matching the threaded section, and the threaded section is screwed and fixed to the mounting hole through the thread.

9. The processing equipment according to claim 5, characterized in that the first fixing member comprises a horizontally arranged bottom plate, a horizontally arranged bearing plate and a vertically arranged support column,

The base plate and the supporting plate are spaced apart in the vertical direction, the base plate is located below the supporting plate, the bottom end and the top end of the support column are respectively fixedly connected to or integrally arranged with the base plate and the supporting plate, the supporting plate is used to carry materials, the first positioning groove and the second positioning groove are located above the supporting plate, the clamping drive mechanism is installed on the base plate, and the first rack, the second rack and the gear are located between the base plate and the supporting plate.

10. The processing equipment according to claim 9, characterized in that the first clamping assembly comprises a first clamping member and a first connecting member, the first clamping member is located above the carrying plate, the first positioning groove is provided on the first clamping member, the first connecting member is used to fix the first clamping member and the first rack, and the clamping drive mechanism is connected to the first connecting member;

The second clamping assembly includes a second clamping member and a second connecting member, the second clamping member is located above the supporting plate, the second positioning groove is provided on the second clamping member, and the second connecting member is used to fix the second clamping member to the second rack.

11. The processing equipment according to claim 10 is characterized in that the first connecting member includes a first connecting plate arranged horizontally and a first connecting column arranged vertically, the first connecting plate is located between the bottom plate and the bearing plate and is fixedly connected to the first rack, the bearing plate is provided with a first through hole extending along the first horizontal direction at a position corresponding to the first connecting column, the bottom end of the first connecting column is fixedly connected to or integrally arranged with the first connecting plate, the top end of the first connecting column passes through the first through hole and is fixedly connected to or integrally arranged with the first clamping member, and the clamping drive mechanism is connected to the first connecting plate;

The second connecting member includes a horizontally arranged second connecting plate and a vertically arranged second connecting column. The second connecting plate is located between the base plate and the supporting plate and is fixedly connected to the second rack. The supporting plate is provided with a second through hole extending along the first horizontal direction at a position corresponding to the second connecting column. The bottom end of the second connecting column is fixedly connected to or integrally arranged with the second connecting plate, and the top end of the second connecting column passes through the second through hole and is fixedly connected to or integrally arranged with the second clamping member.

12. The processing equipment according to claim 11, characterized in that the first clamping member is provided with a first hole, the number of the first hole is at least two and the first hole is spaced apart and distributed along the first horizontal direction, and the top end of the first connecting column is fixedly connected to the first hole;

The second clamping member is provided with second holes, the number of the second holes is at least two and they are distributed at intervals along the first horizontal direction, and the top end of the second connecting column is fixedly connected to the second hole.

13. The processing equipment according to claim 3 is characterized in that the positioning device also includes a first clamping guide mechanism arranged between the first fixed member and the first clamping assembly and a second clamping guide mechanism arranged between the first fixed member and the second clamping assembly, and the first clamping guide mechanism and the second clamping guide mechanism respectively guide the first clamping assembly and the second clamping assembly when the first clamping assembly and the second clamping assembly move.

14. The processing equipment according to claim 13, characterized in that the first clamping guide mechanism comprises a first clamping guide member and a second clamping guide member that cooperate with each other, the first clamping guide member is connected to the first fixing member, and the second clamping guide member is connected to the first clamping assembly;

The second clamping guide mechanism includes a third clamping guide member and a fourth clamping guide member that cooperate with each other. The third clamping guide member is connected to the first fixing member, and the fourth clamping guide member is connected to the second clamping assembly.

15. The processing equipment according to claim 2, characterized in that the positioning device comprises a second fixing member and a wafer support table installed on the second fixing member, and the wafer support table is provided with a positioning groove for positioning the center point of the material.

16. The processing equipment according to claim 15 is characterized in that the wafer support table includes a first sub-wafer support table and a second sub-wafer support table, the first sub-wafer support table and the second sub-wafer support table are arranged relatively to each other and spaced apart along a first horizontal direction, the positioning groove includes a first arc-shaped groove provided on the upper surface of the first sub-wafer support table and a second arc-shaped groove provided on the upper surface of the second sub-wafer support table, the first end of the first arc-shaped groove forms a first positioning point, the first end of the second arc-shaped groove forms a second positioning point, and the first positioning point and the second positioning point are located on the same straight line extending along the first horizontal direction.

17. The processing equipment according to claim 1 is characterized in that the material picking device includes a lifting assembly, a rotating assembly installed on the lifting assembly, and a telescopic material picking assembly installed on the rotating assembly, the lifting assembly is used to move the rotating assembly and the telescopic material picking assembly up and down in a vertical direction, the rotating assembly is used to rotate the telescopic material picking assembly around a vertical axis, and the telescopic material picking assembly is used to pick up and place materials.

18. The processing equipment according to claim 1 is characterized in that the detection device includes a detection fixing component and a first detection component and a second detection component installed on the detection fixing component, the first detection component is used to detect the position of the center point of the material, and the second detection component is used to detect the thickness of the material.

19. The processing equipment according to claim 18 is characterized in that the first detection component includes a detection bearing component installed on the detection fixed component, a translation component and an edge-finding detection component installed on the translation component, the detection bearing component is used to carry materials and can rotate with the materials, and the translation component can move in a horizontal direction relative to the detection fixed component.

20. The processing equipment according to claim 18 is characterized in that the second detection component includes a supporting cantilever and a thickness detection mechanism installed on the detection fixing component, the first end of the supporting cantilever is fixedly connected to the detection fixing component, and the thickness detection mechanism is installed on the second end of the supporting cantilever.

21. The processing equipment according to claim 20, characterized in that the supporting cantilever comprises a connecting block, a first cantilever and a second cantilever, the first cantilever is located above the second cantilever and is spaced apart from the second cantilever in the vertical direction, one side of the connecting block is fixedly connected to the detection fixing member, and the other side of the connecting block is fixedly connected to or integrally arranged with the first end of the first cantilever and the first end of the second cantilever,

The thickness detection mechanism includes a thickness detection component and a load-bearing component. The thickness detection component is installed at the second end of the first cantilever. The detection probe of the thickness detection component is arranged downward in the vertical direction. The load-bearing component is installed at the second end of the second cantilever. The load-bearing component is used to carry materials and is located between the first cantilever and the second cantilever.

22. The processing equipment according to claim 1, characterized in that the first material transfer device comprises a first translation drive assembly, a first lifting drive assembly installed on the first translation drive assembly, a rotation drive assembly installed on the first lifting drive assembly, a first horizontally arranged connecting arm and a first suction cup for taking materials,

The first translation drive assembly can drive the first lifting drive assembly to move along a first horizontal direction, and the first lifting drive assembly can drive the rotation drive assembly to move vertically. One end of the first connecting arm is connected to the rotation drive assembly, and the first suction cup is installed at the other end of the first connecting arm.

The rotary drive assembly is used to drive the first connecting arm to rotate with the first suction cup between a material picking position and a material discharge position. When the first suction cup is located at the material picking position, it can absorb the material on the detection device. When the first suction cup is located at the material discharge position, it can place the material on the grinding device.

23. The processing equipment according to claim 22 is characterized in that the first material transfer device also includes a first limit stop member and a second limit stop member connected to the rotary drive assembly, the first limit stop member can block the first connecting arm so that the first suction cup on the first connecting arm stops at the material discharge position, and the second limit stop member can block the first connecting arm so that the first suction cup on the first connecting arm stops at the material picking position.

24. The processing equipment according to claim 1, characterized in that the second material transfer device comprises a second translation drive assembly, a second lifting drive assembly installed on the second translation drive assembly, a horizontally arranged second connecting arm, a second suction cup and a third suction cup,

The second translation drive assembly can drive the second lifting drive assembly to move along the first horizontal direction. The second lifting drive assembly is connected to one end of the second connecting arm and can drive the second connecting arm to move vertically. The second suction cup and the third suction cup are both installed at the other end of the second connecting arm. The second connecting arm extends along the second horizontal direction, and the second horizontal direction is perpendicular to the first horizontal direction.

25. The processing equipment according to claim 24 is characterized in that the second suction cup is located below the third suction cup, the suction surface of the second suction cup is arranged downward and the suction surface of the third suction cup is arranged upward.

26. The processing equipment according to claim 1, characterized in that the grinding device comprises a grinding assembly, a first horizontal drive assembly, a second horizontal drive assembly installed on the first horizontal drive assembly, and a grinding bearing assembly installed on the second horizontal drive assembly.

The grinding assembly is used to grind materials, the first horizontal driving assembly can drive the second horizontal driving assembly to move along a first horizontal direction, the second horizontal driving assembly can drive the grinding supporting assembly to move along a second horizontal direction, the second horizontal direction is arranged perpendicular to the first horizontal direction, and the grinding supporting assembly is used to carry materials and can rotate with the materials.

27. The processing equipment according to claim 26 is characterized in that the grinding device also includes a first lifting drive mechanism installed on the second horizontal drive assembly, and the first lifting drive mechanism can drive the grinding support assembly to move up and down in the vertical direction.

28. The processing equipment according to claim 26, characterized in that the grinding assembly comprises a grinding fixed component and a grinding motor, a grinding transmission component, a spindle component, a grinding wheel and a supporting component installed on the grinding fixed component,

The grinding motor is located on the side of the spindle assembly, and the grinding motor is driven and connected to the first end of the spindle assembly through the grinding transmission assembly to drive the spindle assembly to rotate. The grinding wheel is used to grind the material and is fixedly installed on the second end of the spindle assembly. The second end of the spindle assembly is connected to the grinding fixing member. The support assembly is supported between the first end and the second end of the spindle assembly, and the supporting force of the support assembly on the spindle assembly is opposite to the direction of the force applied to the spindle assembly by the grinding transmission assembly.

29. The processing equipment according to claim 28 is characterized in that the support assembly includes a support block and a tightening screw, the grinding fixing component is provided with a threaded hole adapted to the tightening screw, the first end of the support block is supported on the spindle assembly, and one end of the tightening screw passes through the threaded hole and is supported on the second end of the support block.

30 . The processing equipment according to claim 29 , wherein a limiting groove is provided on the end surface of the first end of the support block, and a portion of the spindle assembly is located in the limiting groove.

31. The processing equipment according to claim 30 is characterized in that the opening size of the limiting groove gradually decreases along the direction from the first end to the second end of the support block.

32. The processing equipment according to any one of claims 1 to 31, characterized in that the cleaning device comprises a cleaning fixing member and a spin-drying assembly, a flushing assembly, a material taking suction cup and a second lifting drive mechanism installed on the cleaning fixing member,

The cleaning fixing component has a cleaning chamber, at least a part of the spin-drying assembly is located in the cleaning chamber, the spin-drying assembly is used to carry materials and can rotate with the materials, and the flushing assembly is used to flush the materials located on the spin-drying assembly.

The second lifting drive mechanism can drive the material picking suction cup to move vertically. The material picking suction cup is located directly above the spin-drying component. The material picking suction cup is used to transfer the material on the spin-drying component to the second material transfer device.

33. The processing equipment according to any one of claims 1 to 31, characterized in that the processing equipment is a chamfering machine.