CN117123024A - Helium purifying equipment and purifying method - Google Patents
Helium purifying equipment and purifying method Download PDFInfo
- Publication number
- CN117123024A CN117123024A CN202311118823.XA CN202311118823A CN117123024A CN 117123024 A CN117123024 A CN 117123024A CN 202311118823 A CN202311118823 A CN 202311118823A CN 117123024 A CN117123024 A CN 117123024A
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- China
- Prior art keywords
- plate
- helium
- filter
- strip
- helium storage
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- Granted
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- 239000001307 helium Substances 0.000 title claims abstract description 235
- 229910052734 helium Inorganic materials 0.000 title claims abstract description 235
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 title claims abstract description 235
- 238000000034 method Methods 0.000 title claims abstract description 21
- 238000003860 storage Methods 0.000 claims abstract description 112
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 74
- 229910001868 water Inorganic materials 0.000 claims abstract description 74
- 238000010438 heat treatment Methods 0.000 claims abstract description 70
- 238000000746 purification Methods 0.000 claims abstract description 49
- 238000005507 spraying Methods 0.000 claims abstract description 35
- 238000004140 cleaning Methods 0.000 claims abstract description 24
- 238000001179 sorption measurement Methods 0.000 claims abstract description 15
- 239000007789 gas Substances 0.000 claims description 38
- 239000007921 spray Substances 0.000 claims description 20
- 230000007246 mechanism Effects 0.000 claims description 18
- 238000001914 filtration Methods 0.000 claims description 15
- 238000007789 sealing Methods 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 9
- 238000007142 ring opening reaction Methods 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims 3
- 238000003825 pressing Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 abstract description 13
- 230000000694 effects Effects 0.000 abstract description 10
- 230000009471 action Effects 0.000 abstract description 5
- 238000011084 recovery Methods 0.000 description 8
- 238000005406 washing Methods 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 244000144992 flock Species 0.000 description 1
- 238000005338 heat storage Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000002440 industrial waste Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
- C01B23/001—Purification or separation processes of noble gases
- C01B23/0036—Physical processing only
- C01B23/0052—Physical processing only by adsorption in solids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
- B01D46/12—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces in multiple arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
- B01D46/12—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces in multiple arrangements
- B01D46/121—V-type arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/66—Regeneration of the filtering material or filter elements inside the filter
- B01D46/79—Regeneration of the filtering material or filter elements inside the filter by liquid process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/06—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with moving adsorbents, e.g. rotating beds
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
- C01B23/001—Purification or separation processes of noble gases
- C01B23/0036—Physical processing only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2256/00—Main component in the product gas stream after treatment
- B01D2256/18—Noble gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
- B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Separation Of Gases By Adsorption (AREA)
Abstract
The utility model relates to the technical field of helium purification and discloses helium purification equipment and a helium purification method, wherein the helium purification equipment comprises a bracket, a purification shell, a rotating shaft, a helium storage plate, a water spraying plate and a heating plate, wherein the rotating shaft drives the helium storage plate to intermittently rotate, so that the helium storage plate sequentially passes through an adsorption area, a cleaning area and a release area, other impurities except helium are filtered under the action of a filter plate, the helium is adsorbed on the helium storage plate, the continuous use effect of the filter plate is maintained along with the cleaning of the water spraying plate, the release of high-purity helium is promoted along with the heating of the heating plate, the purification of helium with high purity is realized, the purity of the helium is improved, and the helium purification rate is improved.
Description
Technical Field
The utility model relates to the technical field of helium purification, in particular to helium purification equipment and a helium purification method.
Background
The helium can realize the rapid cooling of parts in the electronic semiconductor industry, thereby improving the productivity, controlling the heat transfer rate, improving the production efficiency and reducing the defects, the impurity index of the helium in the semiconductor chip industry is improved to the concentration standard of parts per billion at present, but the traditional industry only provides the concentration standard of parts per million, the helium purification technology adopts the metal inspiration reaction principle, removes impurity gas atoms and molecules from gas flow through active elements or surface chemical reaction, adopts a high-performance getter purification material, efficiently removes the impurities such as water, oxygen, carbon monoxide, carbon dioxide, hydrogen, methane, nitrogen and the like in the gas to be below the PPB level at the high temperature of 300 ℃ by a chemical reaction method, successfully uses the helium with the purity of 99.999 percent as a raw material, purifies the helium to 99.9999999 percent, has the capability of stably supplying the PPB level ultrapure helium for a long term in the industries such as semiconductors, integrated circuits, display panels and the like in China, finally discharges the helium along with industrial waste gas, causes a great amount of resource waste, does not meet the growing energy-saving and environment-friendly requirements of people, and can not recover the helium with high-purity after the system is recycled, but the helium can not be recovered again after the system is recycled at present.
The prior art discloses a helium recovery device, which relates to the technical field of helium recovery; the utility model comprises a bottom plate, wherein a recovery box is fixedly arranged on the upper surface of the bottom plate, an air pump is connected to the recovery box, supporting legs are fixedly arranged on the lower surface of the bottom plate, four supporting legs are arranged, an air inlet pipe is connected to the recovery box, a screen plate filter assembly is connected to the air inlet pipe, an active carbon filter assembly is connected to the air inlet pipe, the screen plate filter assembly comprises a rectangular groove and a rectangular frame, the rectangular groove is formed in the air inlet pipe, a clamping groove is formed in the rectangular groove, the rectangular frame can be movably inserted into the air inlet pipe, helium can be led into the recovery box through the air pump by opening the air pump, larger dust particles, flocks and the like can be filtered through a filter screen in the rectangular frame before the helium enters the recovery box, and impurities in the helium can be removed through active carbon in the active carbon box, so that the recovery purity of the helium is improved. The prior art has the problem that the filter screen blockage in the helium purification process can influence the purification efficiency and the purification effect.
Disclosure of Invention
The purpose of the utility model is that: the helium purifying equipment and the purifying method are provided, high-purity helium purification is achieved, purity of extracted helium is improved, and helium purifying rate is improved.
In order to achieve the above object, the present utility model provides a helium purifying apparatus comprising: support, purification casing, pivot, store up helium board, water spray board and hot plate, purification casing is located on the support, purification casing includes chassis, cover shell and top cap, be equipped with adsorption area, washing region and release region in the purification casing, correspond adsorption area department on the chassis and be equipped with the air inlet, correspond washing region department on the chassis and be equipped with the outlet, correspond release region department on the chassis and be equipped with the gas outlet, the pivot is located purification casing is last, just the pivot with purification casing rotates to be connected, store up helium board quantity is three, three helium board is followed the even interval of pivot circumference sets up, every the both sides surface of helium board all is equipped with a filter, on the top cap with the position department that the washing region corresponds is equipped with water spray board, just the quantity of water spray board with the filter is unanimous, on the top cap with the position department that the release region corresponds is equipped with the hot plate, just the quantity of hot plate with the filter is unanimous, be equipped with first removal subassembly and second removal subassembly on the support, first removal subassembly can drive and remove and pass the top cap removal and insert between helium board and the removal of helium board and the heat storage board.
Preferably, the air inlet is provided with an air inlet mechanism, the water outlet is provided with a water draining mechanism, the air outlet is provided with an air outlet mechanism, the air inlet mechanism is an air inlet one-way electromagnetic valve, the water draining mechanism is a water draining one-way electromagnetic valve, and the air outlet mechanism is an air outlet.
Preferably, the bottom plate comprises a bottom shell, the bottom shell is positioned at the bottom end of the bottom plate, the air outlet is positioned on the bottom shell, the air outlet is connected with one end of the strip-shaped plate in an inserting mode, the other end of the strip-shaped plate penetrates through the bottom shell to the outside of the purifying shell, one end of the second elastic piece is in contact with the bottom shell, and the other end of the second elastic piece is in contact with the strip-shaped plate.
Preferably, the inside of the shell is provided with a rotating ring, the rotating ring contacts with the inner wall of the shell, the outer wall of the rotating shaft and the inner wall of the rotating ring are respectively provided with a first clamping part and a second clamping part, and the first clamping part and the second clamping part are used for being clamped with the side edges of the helium storage plate.
Preferably, a first flexible sealing strip is connected between the first clamping part and the side edge corresponding to the movable frame, and a second flexible sealing strip is connected between the second clamping part and the extension plate.
Preferably, the outer lane of filter is equipped with movable frame, the filter with movable frame connects, the both ends of pivot are equipped with the inner circle ring, the both ends of swivel ring are equipped with outer lane ring, movable frame's upper end both sides and lower extreme both sides all are equipped with the bayonet socket, just movable frame's upper end both sides and lower extreme both sides the buckle respectively with inner circle ring with outer lane ring sliding connection.
Preferably, an extension column is arranged in the middle of the upper end of the movable frame, the axial direction of the extension column is perpendicular to the width direction of the movable frame, a ring opening is arranged on the top cover, the ring opening is in sliding connection with the extension column, a slope with an inclined end face facing the helium storage plate is arranged at the end part of the extension column, and the slope is used for sliding along the water spraying plate and the heating plate when the water spraying plate and the heating plate move downwards.
Preferably, an extension plate is arranged on one side of the movable frame, which is close to the rotating ring, a first elastic piece is arranged between the extension plate and the second clamping part, one end of the first elastic piece is in contact with the extension plate, and the other end of the first elastic piece is in contact with the second clamping part.
Preferably, the top cover is provided with a plurality of through holes, and each water spraying plate and each heating plate can be inserted between the helium storage plate and the filtering plate through the top cover through the through holes respectively.
Preferably, the bottom of the chassis and the position of the air outlet are fixedly provided with a bottom shell, the air outlet is positioned in the bottom shell, the bottom shell is provided with an air outlet, a strip-shaped plate matched with the air outlet is inserted in the air outlet, two ends of the strip-shaped plate extend towards the direction of the bottom shell and are provided with guide rods extending outwards through the bottom shell, the bottom shell is provided with guide openings for the guide rods to pass through, and a second elastic piece sleeved on the guide rods is fixedly connected between the bottom shell and the strip-shaped plate.
Preferably, the two ends of the strip plate extend towards the release area to form a protruding block, and when the heating plate is inserted between the filter plate and the helium storage plate and moves in place, the heating plate props against the protruding block to enable the strip plate to move away from the air outlet so that the air outlet is in an open state.
Preferably, the first moving assembly and the second moving assembly comprise frames, guide rails, linear drivers and connecting rods, the water spraying plates and the upper ends of the heating plates are respectively provided with a frame, the upper surfaces of the top covers are provided with upright posts, the upright posts are vertically arranged and axially parallel to the rotating shafts, the frames are provided with arc-shaped strips, the arc-shaped strips are connected with the upright posts, the top covers are vertically provided with the guide rails, the guide rails are in sliding connection with the frames, the output ends of the linear drivers are connected with one ends of the connecting rods, and the other ends of the connecting rods are hinged to the arc-shaped strips.
Preferably, an inner notch is formed on the heating plate and faces to one surface of the helium storage plate, and when the heating plate is inserted between the filtering plate and the helium storage plate, a flowing gap for helium to flow is formed between the heating plate and the helium storage plate.
The utility model also provides a purifying method of the helium purifying equipment, which comprises the following steps:
s1, introducing gas into an adsorption area in the purification shell through the gas inlet;
s2, the rotating shaft rotates to drive the helium storage plate to move to the cleaning area, and helium is adsorbed to the helium storage plate through the filter plate;
s3, the first moving assembly drives the water spraying plate to move downwards into the cleaning area, the water spraying plate is inserted between the helium storage plate and the filter plate in the downwards moving process, the water spraying plate cleans the surface of the filter plate, and water after cleaning is discharged through a water outlet;
s4, the rotating shaft continues to rotate so that the helium storage plate moves into the release area;
s5, the second moving assembly drives the heating plate to move downwards to the release area, the heating plate is inserted between the helium storage plate and the filtering plate in the downwards moving process, the heating plate heats the filtering plate and the helium storage plate simultaneously, and the helium storage plate releases helium and discharges the helium through the air outlet.
Compared with the prior art, the utility model has the beneficial effects that:
the helium storage plate is driven to intermittently rotate through the rotating shaft, so that the helium storage plate sequentially passes through the adsorption area, the cleaning area and the release area, other impurities such as other gases except helium are filtered under the action of the filter plate, the helium is adsorbed on the helium storage plate, the continuous use effect of the filter plate is maintained along with the cleaning of the filter plate by the water spraying plate, the release of high-purity helium is promoted along with the heating of the helium storage plate by the heating plate, the purification of high-purity helium is realized, the purity of helium is improved, and the purification rate of helium is improved;
further, through the movable connection of the movable frame on the outer ring circular ring and the inner ring circular ring, when the water spraying plate and the heating plate are inserted between the filter plate and the helium storage plate, enough gaps are reserved between the filter plate and the helium storage plate, so that helium can be conveniently released, the filter plate can be conveniently cleaned, the helium on the helium storage plate can be effectively released, impurities on the filter plate can be effectively removed, and the helium treatment effect can be improved; through the cooperation of extension post and water spray board and the hot plate that the movable frame upper end set up for water spray board and hot plate move along the slope of extension post at the downmovement in-process, make the filter keep away from the helium storage board gradually, realized the filter and stored up the production in clearance between the helium board, guarantee the normal release of helium, also guarantee the effective washing of filter, improved the effect that helium high purity purified.
Drawings
FIG. 1 is a schematic perspective view of a helium purifying apparatus according to an embodiment of the present utility model;
FIG. 2 is a schematic perspective view of a helium purifying apparatus according to an embodiment of the present utility model rotated by another angle;
FIG. 3 is a top view of a schematic perspective view of a helium purification apparatus according to an embodiment of the present utility model;
FIG. 4 is a partial perspective view of a cross-section of the helium purifying apparatus of an embodiment of the present utility model at A-A of FIG. 3;
FIG. 5 is a perspective view in section of the helium purifying apparatus of an embodiment of the present utility model at B-B of FIG. 3;
FIG. 6 is a schematic view of a partial perspective view of a helium purification apparatus according to an embodiment of the present utility model;
FIG. 7 is a cross-sectional view of a schematic partial perspective view of a helium purification apparatus according to an embodiment of the present utility model;
FIG. 8 is a perspective view in cross-section of a partial perspective view of a helium purification apparatus according to an embodiment of the present utility model;
FIG. 9 is an enlarged schematic view of the helium purifying apparatus of an embodiment of the present utility model at C of FIG. 7;
FIG. 10 is an enlarged schematic view of the helium purifying apparatus of an embodiment of the present utility model at D of FIG. 7;
FIG. 11 is an enlarged schematic view of the helium purifying apparatus of an embodiment of the present utility model at E of FIG. 4;
fig. 12 is an enlarged schematic view of the helium purifying apparatus of the embodiment of the present utility model at F of fig. 3.
In the figure, 1, a bracket; 2. a purge housing; 21. a chassis; 211. an air inlet one-way electromagnetic valve; 212. a drainage one-way solenoid valve; 213. an air outlet; 214. a bottom case; 2141. an exhaust port; 215. a strip-shaped plate; 2151. a guide rod; 2152. a second elastic member; 2153. a bump; 22. a casing; 221. an adsorption zone; 222. a cleaning area; 223. a release region; 23. a top cover; 231. a through hole; 232. a column; 3. a rotating shaft; 31. a rotating ring; 32. a first clamping part; 33. a second clamping part; 4. a helium storage plate; 5. a filter plate; 51. a movable frame; 511. an extension column; 5111. a ramp; 512. an extension plate; 5121. a first elastic member; 513. a first flexible sealing strip; 514. a second flexible sealing strip; 52. an inner ring; 53. an outer ring; 6. a water spraying plate; 7. a heating plate; 71. a flow gap; 8. a first moving assembly; 81. a frame; 811. an arc-shaped strip; 82. a guide rail; 83. a linear driver; 831. a connecting rod; 9. a second moving assembly.
Detailed Description
The following describes in further detail the embodiments of the present utility model with reference to the drawings and examples. The following examples are illustrative of the utility model and are not intended to limit the scope of the utility model.
In the description of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, merely to facilitate description of the present utility model and simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
Furthermore, in the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.
Example 1
As shown in fig. 1 to 12, a helium purifying apparatus according to a preferred embodiment of the present utility model includes: support 1, purifying shell 2, pivot 3, helium storage plate 4, water spray plate 6 and hot plate 7, purifying shell 2 is located support 1, purifying shell 2 includes chassis 21, cover shell 22 and top cap 23, be equipped with adsorption area 221 in the purifying shell 2, wash area 222 and release area 223, be equipped with the air inlet in the corresponding adsorption area 221 department on chassis 21, the corresponding washing area 222 department on chassis 21 is equipped with the outlet, the corresponding release area 223 department on chassis 21 is equipped with the gas outlet on chassis 21, pivot 3 is located purifying shell 2, and pivot 3 and purifying shell 2 rotate and be connected, helium storage plate 4 quantity is three, three helium storage plate 4 evenly sets up along pivot 3 circumference interval, the both sides surface of every helium storage plate 4 all is equipped with a filter 5, be equipped with water spray plate 6 in the position department that corresponds with washing area 222 on top cap 23, and the quantity and filter 5 unanimity of water spray plate 6, be equipped with hot plate 7 in the position department that corresponds with release area 223 on top cap 23, and the quantity and filter 5 unanimity, be equipped with first moving assembly 8 and second moving assembly 9 on the support 1, first moving assembly 8 can drive plate 6 and moving, and insert between 4 and the filter plate 5, the helium storage plate 4 can be moved between the top cap 4 and the top cap 5, the helium storage plate 4 can be moved, and the helium storage plate 4 can be passed between the top cap 5 and the moving assembly is moved.
The air inlet is provided with an air inlet mechanism, the water outlet is provided with a water draining mechanism, the air outlet is provided with an air outlet mechanism, the air inlet mechanism is an air inlet one-way electromagnetic valve 211, the water draining mechanism is a water draining one-way electromagnetic valve 212, and the air outlet mechanism is an air outlet strip opening 213.
When helium is purified, firstly, gas is led into an adsorption area 221 in the purification shell 2 through the air inlet one-way electromagnetic valve 211, the rotating shaft 3 is intermittently rotated through rotating equipment, three helium storage plates 4 on the rotating shaft 3 are driven to move to a cleaning area 222 along with the rotation of the rotating shaft 3, in the moving process of the helium storage plates 4, helium permeates into the filtering plates 5 to be in contact with the helium storage plates 4, impurities such as the rest of gas and the like are filtered outside the filtering plates 5, helium is adsorbed on the helium storage plates 4, after the helium storage plates 4 adsorbed with helium come to the cleaning area 222, the first moving component 8 drives the water spraying plates 6 corresponding to the helium storage plates 4 to pass through corresponding penetrating openings 231 on the top cover 23 and are inserted between the filtering plates 5 and the helium storage plates 4 until the water spraying plates 6 are moved to be in place, water spraying mist starts to spray and clean the filtering plates 5 from inside to outside, impurities on the filtering plates 5 are cleaned, in the moving process of the helium storage plates 4, the helium storage plates 5 are permeated into the filtering plates 5, the rest of gas and the impurities in the cleaning area 222 are filtered outside, thereby the sewage is discharged through the water one-way 212, 3 is rotated, the helium storage plates 4 are continuously absorbed on the helium storage plates 4, after the helium storage plates 4 adsorbed on the helium storage plates come to the cleaning area 222, the helium storage plates are heated, the helium storage plates are continuously, the helium storage plates 4 are continuously heated, the helium storage plates 4 are heated, and the helium storage plates are continuously, and the helium storage plates are heated, and the helium storage plates are continuously discharged through the heating plates, and the heating plates are heated, and the helium storage plates are heated.
Example two
The difference between this embodiment and the first embodiment is that this embodiment further includes a strip plate 215 and a second elastic member 2152, the chassis 21 includes a bottom shell 214, the bottom shell 214 is located at the bottom end of the chassis 21, the air outlet is located on the bottom shell 214, the air outlet is plugged with one end of the strip plate 215, the other end of the strip plate 215 passes through the bottom shell 214 to the outside of the purification housing 2, one end of the second elastic member 2152 contacts with the bottom shell 214, and the other end of the second elastic member 2152 contacts with the strip plate 215.
The inside of the shell 22 is provided with a rotating ring 31, the rotating ring 31 is contacted with the inner wall of the shell 22, the outer wall of the rotating shaft 3 and the inner wall of the rotating ring 31 are respectively provided with a first clamping part 32 and a second clamping part 33, and the first clamping part 32 and the second clamping part 33 are used for being clamped with the side edge of the helium storage plate 4.
As shown in fig. 9 and 10, a first flexible sealing strip 513 is connected between the first clamping portion 32 and the corresponding side edge of the movable frame 51, and a second flexible sealing strip 514 is connected between the second clamping portion 33 and the extension plate 512.
When the movable frame 51 moves along the inner ring circular ring 52 and the outer ring circular ring 53, in order to avoid the situation that impurities such as gas except helium are in contact with the helium storage plate 4 due to gaps between two sides of the movable frame 51 and the rotating shaft 3 and the rotating ring 31, the first flexible sealing strips 513 and the second flexible sealing strips 514 are arranged between two sides of the movable frame 51 and the corresponding first clamping parts 32 and second clamping parts 33, so that a sealing effect is achieved when the movable frame 51 moves, and only helium is ensured to enter between the filter plate 5 and the helium storage plate 4, and release of high-purity helium is effectively ensured.
Other structures of this embodiment are the same as those of the first embodiment, and will not be described here again.
Example III
The difference between this embodiment and the second embodiment is that, as shown in fig. 4-10, the outer ring of the filter plate 5 is provided with a movable frame 51, the filter plate 5 is connected with the movable frame 51, two ends of the rotating shaft 3 are provided with inner ring circular rings 52, two ends of the rotating ring 31 are provided with outer ring circular rings 53, two sides of the upper end and two sides of the lower end of the movable frame 51 are provided with bayonets, and the bayonets on two sides of the upper end and two sides of the lower end of the movable frame 51 are respectively connected with the inner ring circular rings 52 and the outer ring circular rings 53 in a sliding manner.
When the water spraying plate 6 and the heating plate 7 are inserted between the filter plate 5 and the helium storage plate 4, the filter plate 5 is gradually far away from the helium storage plate 4, enough gaps are reserved between the two, and when the filter plate 5 is shifted, the movable frame 51 for mounting the filter plate 5 rotates on the outer ring circular ring 53 and the inner ring circular ring 52 by taking the axis of the rotating shaft 3 as a round point, so that the normal operation of the water spraying plate 6 and the heating plate 7 is effectively ensured.
As shown in fig. 4 to 6, an extension column 511 is provided in the middle of the upper end of the movable frame 51, the axial direction of the extension column 511 is perpendicular to the width direction of the movable frame 51, a ring opening is provided on the top cover 23, the ring opening is slidably connected with the extension column 511, a slope 5111 having an inclined end face facing the helium storage plate 4 is provided at the end of the extension column 511, and the slope 5111 is used for sliding along the water spraying plate 6 and the heating plate 7 when moving downwards.
In the process that the water spray plate 6 and the heating plate 7 are inserted between the filter plate 5 and the helium storage plate 4, the lower ends of the water spray plate 6 and the heating plate 7 are in contact with the extension column 511 of the upper end of the movable frame 51, and since the end of the extension column 511 has the slope 5111 and the slope of the slope 5111 faces the helium storage plate 4, the lower ends of the water spray plate 6 and the heating plate 7 move down along the slope 5111 to thereby urge the movable frame 51 to be pushed away, the filter plate 5 is away from the helium storage plate 4, and a gap is left between the filter plate 5 and the helium storage plate 4.
As shown in fig. 10, an extension plate 512 is disposed on one side of the movable frame 51 near the rotating ring 31, a first elastic member 5121 is disposed between the extension plate 512 and the second clamping portion 33, one end of the first elastic member 5121 contacts with the extension plate 512, and the other end of the first elastic member 5121 contacts with the second clamping portion 33.
When the filter plate 5 is pressed by the water spray plate 6 and the heating plate 7, the filter plate 5 is far away from the helium storage plate 4, the first spring 5121 is in a stretched state, and when the filter plate 5 is not pressed by the water spray plate 6 and the heating plate 7, the filter plate 5 returns to the original position and maintains a narrow gap with the helium storage plate 4, so that helium gas is adsorbed quickly, and the first spring 5121 is restored to a normal state.
The top cover 23 is provided with a plurality of through openings 231, and each water spraying plate 6 and each heating plate 7 can be inserted between the helium storage plate 4 and the filter plate 5 through the top cover 23 through the through openings 231.
As shown in fig. 4, 5 and 11, a bottom shell 214 is fixedly arranged at the bottom of the chassis 21 and at the position of the air outlet 213, the air outlet 213 is arranged in the bottom shell 214, an air outlet 2141 is arranged on the bottom shell 214, a strip plate 215 matched with the air outlet 213 is inserted in the air outlet 213, guide rods 2151 extending outwards through the bottom shell 214 are arranged at two ends of the strip plate 215 towards the direction of the bottom shell 214, guide openings for the guide rods 2151 to pass through are arranged on the bottom shell 214, and a second elastic piece 2152 sleeved on the guide rods 2151 is fixedly connected between the bottom shell 214 and the strip plate 215.
When the high purity helium gas is released, since the heating plate 7 is inserted between the filter plate 5 and the helium storage plate 4 and moves in place, the heating plate 7 ejects the strip plate 215 from the strip opening, the gas outlet 213 is opened accordingly, the high purity helium gas is discharged through the gas outlet 213, and after the heating plate 7 moves out of the release area 223, the second spring 2152 is restored to the normal state from the compressed state under the action of the second spring 2152, so that the strip plate 215 is reinserted into the gas outlet 213, the gas outlet 213 is kept in the closed state, and the high purity helium gas is effectively ensured to be discharged.
As shown in fig. 4, 5 and 11, the two ends of the strip plate 215 extend towards the inside of the release area 223 and are provided with projections 2153, when the heating plate 7 is inserted between the filter plate 5 and the helium storage plate 4 and moved into place, the heating plate 7 presses the projections 2153 to cause the strip plate 215 to move away from the gas outlet 213 so that the gas outlet 213 is opened.
When the heating plate 7 moves to place to eject the strip plate 215, the lower end of the heating plate 7 contacts with the projection 2153, the strip plate 215 is pushed out, and the projection 2153 is still positioned in the air outlet 213, so that the position of the strip plate 215 is ensured to correspond to the air outlet 213 accurately while the air outlet 213 is opened, and the situation that the air outlet 213 cannot be closed due to deviation of air outlet displacement of the strip plate 215 is avoided.
Other structures of this embodiment are the same as those of the embodiment, and will not be described here again.
Example IV
The difference between this embodiment and the third embodiment is that, as shown in fig. 3-5, the first moving assembly 8 and the second moving assembly 9 each include a frame 81, a guide rail 82, a linear driver 83 and a connecting rod 831, the upper ends of the water spraying plate 6 and the heating plate 7 are both provided with the frame 81, the upper surface of the top cover 23 is provided with a column 232, the column 232 is vertically arranged and axially parallel to the axis of rotation 3, the frame 81 is provided with an arc-shaped strip 811, the arc-shaped strip 811 is connected with the column 232, the top cover 23 is vertically provided with the guide rail 82, the guide rail 82 is slidably connected with the frame 81, the output end of the linear driver 83 is connected with one end of the connecting rod 831, and the other end of the connecting rod 831 is hinged with the arc-shaped strip 811.
When the first moving assembly 8 and the second moving assembly 9 respectively move the water spraying plate 6 and the heating plate 7, the connecting rod 831 is driven by the linear driver 83 to act, the more the angle between the connecting rod 831 and the top cover 23 tends to be parallel, the water spraying plate 6 and the heating plate 7 are in a downward moving state, and the more the angle between the connecting rod 831 and the top cover 23 tends to be vertical, the water spraying plate 6 and the heating plate 7 are in an upward moving state, so that the water spraying plate 6 and the heating plate 7 move along the edge directions of the guide rail 82 and the upright post 232.
As shown in fig. 4, 5 and 12, an inner recess is provided in the heating plate 7 on the side facing the helium storage plate 4, and when the heating plate 7 is inserted between the filter plate 5 and the helium storage plate 4, a flow gap 71 through which helium gas flows is formed between the heating plate 7 and the helium storage plate 4.
When the heating plate 7 is inserted between the filter plate 5 and the helium storage plate 4 and moved in place, a flow gap 71 is formed between the side of the heating plate 7 having the inner recess and the helium storage plate 4, the other side of the heating plate 7 is in contact with the filter plate 5, the heating plate 7 heats the helium storage plate 4 with the activation of the heating plate 7, the helium gas is caused to be released, the released helium gas flows in the flow gap 71, and the flow gap 71 is communicated with the gas outlet 213, so that the helium gas flows out from the gas outlet 213, and the filter plate 5 is dried after being heated by the heating plate 7, so that the filtering effect of the subsequent gas is ensured.
Other structures of this embodiment are the same as those of the embodiment, and will not be described here again.
Example five
The utility model also provides a purifying method of the helium purifying equipment, which comprises the following steps:
s1, introducing gas into an adsorption area 221 in the purification shell 2 through a gas inlet;
s2, the rotating shaft 3 rotates to drive the helium storage plate 4 to move to the cleaning area 222, and helium is adsorbed onto the helium storage plate 4 through the filter plate 5;
s3, the first moving assembly 8 drives the water spraying plate 6 to move downwards to the cleaning area 222, the water spraying plate 6 is inserted between the helium storage plate 4 and the filter plate 5 in the downwards moving process, the water spraying plate 6 cleans the surface of the filter plate 5, and water after cleaning is discharged through a water outlet;
s4, continuing to rotate the rotating shaft 3 to enable the helium storage plate 4 to move into the release area 223;
s5, the second moving assembly 9 drives the heating plate 7 to move downwards into the release area 223, the heating plate 7 is inserted between the helium storage plate 4 and the filtering plate 5 in the downwards moving process, the heating plate 7 heats the filtering plate 5 and the helium storage plate 4 simultaneously, and the helium storage plate 4 releases helium and is discharged through the air outlet.
According to the utility model, the helium storage plate 4 is driven to intermittently rotate through the rotating shaft 3, so that the helium storage plate 4 sequentially passes through the adsorption area 221, the cleaning area 222 and the release area 223, impurities such as other gases except helium are filtered out under the action of the filter plate 5, the helium is adsorbed on the helium storage plate 4, the continuous use effect of the filter plate 5 is maintained along with the cleaning of the water spraying plate 6 on the filter plate 5, the release of high-purity helium is promoted along with the heating of the heating plate 7 on the helium storage plate 4, the quality of the helium is improved, and the helium purification rate is improved.
In summary, the embodiment of the utility model provides a helium purifying device and a purifying method, which drive a helium storage plate to intermittently rotate through a rotating shaft, so that the helium storage plate sequentially passes through an adsorption area, a cleaning area and a release area, other impurities such as helium are filtered under the action of a filter plate, the helium is adsorbed on the helium storage plate, the filter plate keeps a continuous using effect along with the cleaning of the filter plate by a water spraying plate, the high-purity helium is promoted to be released along with the heating of the heating plate, the high-purity helium purification is realized, the purity of the helium is improved, and the speed of helium purification is improved; through the cooperation of extension post and water spray board and the hot plate that the movable frame upper end set up for water spray board and hot plate move along the slope of extension post at the downmovement in-process, make the filter keep away from the helium storage board gradually, realized the filter and stored up the production in clearance between the helium board, guarantee the normal release of helium, also guarantee the effective washing of filter, improved the effect that helium high purity purified.
The foregoing is merely a preferred embodiment of the present utility model, and it should be noted that modifications and substitutions can be made by those skilled in the art without departing from the technical principles of the present utility model, and these modifications and substitutions should also be considered as being within the scope of the present utility model.
Claims (14)
1. A helium purification apparatus comprising: support (1), purifying shell (2), pivot (3), helium storage plate (4), water spray plate (6) and hot plate (7), purifying shell (2) are located on support (1), purifying shell (2) are including chassis (21), cover shell (22) and top cap (23), be equipped with adsorption area (221), cleaning area (222) and release area (223) in purifying shell (2), be equipped with the air inlet in the department of corresponding adsorption area (221) on chassis (21), be equipped with the outlet in the department of corresponding cleaning area (222) on chassis (21), be equipped with the gas outlet in the department of corresponding release area (223) on chassis (21), pivot (3) are located purifying shell (2), just pivot (3) with purifying shell (2) rotate and are connected, helium storage plate (4) quantity is three, three helium storage plate (4) are along the circumference evenly spaced setting of pivot (3), and every helium storage plate (4) both sides surface all is equipped with a filter (5) on the chassis (21), be equipped with on the filter (4) and correspond on the position (6) with water spray plate (6) the position is unanimous with water spray plate (6), the utility model discloses a helium storage device, including top cap (23), release region (223) and filter (5), be equipped with hot plate (7) on top cap (23) with the position department that release region (223) corresponds, just the quantity of hot plate (7) with filter (5) are unanimous, be equipped with first removal subassembly (8) and second removal subassembly (9) on support (1), first removal subassembly (8) can drive water spray plate (6) remove, and insert through top cap (23) helium storage plate (4) with between filter (5), second removal subassembly (9) can drive hot plate (7) remove, and insert through top cap (23) helium storage plate (4) with between filter (5).
2. Helium purification equipment according to claim 1, wherein the air inlet is provided with an air inlet mechanism, the water outlet is provided with a water drainage mechanism, the air outlet is provided with an air outlet mechanism, the air inlet mechanism is an air inlet one-way electromagnetic valve (211), the water drainage mechanism is a water drainage one-way electromagnetic valve (212), and the air outlet mechanism is an air outlet strip (213).
3. Helium purification device according to claim 2, further comprising a strip plate (215) and a second elastic member (2152), wherein the chassis (21) comprises a bottom shell (214), wherein the bottom shell (214) is located at the bottom end of the chassis (21), wherein the air outlet is located on the bottom shell (214), wherein the air outlet is plugged with one end of the strip plate (215), wherein the other end of the strip plate (215) passes through the bottom shell (214) to the outside of the purification shell (2), wherein one end of the second elastic member (2152) is in contact with the bottom shell (214), and wherein the other end of the second elastic member (2152) is in contact with the strip plate (215).
4. A helium purification apparatus according to claim 3, wherein a rotating ring (31) is provided inside the casing (22), the rotating ring (31) is in contact with the inner wall of the casing (22), a first clamping part (32) and a second clamping part (33) are provided on the outer wall of the rotating shaft (3) and the inner wall of the rotating ring (31), respectively, and the first clamping part (32) and the second clamping part (33) are used for clamping with the side edge of the helium storage plate (4).
5. Helium purification equipment according to claim 4, characterized in that a first flexible sealing strip (513) is connected between the first clamping part (32) and the corresponding side of the movable frame (51), and a second flexible sealing strip (514) is connected between the second clamping part (33) and the extension plate (512).
6. Helium purification equipment according to claim 5, characterized in that the outer ring of the filter plate (5) is provided with a movable frame (51), the filter plate (5) is connected with the movable frame (51), the two ends of the rotating shaft (3) are provided with inner ring circular rings (52), the two ends of the rotating ring (31) are provided with outer ring circular rings (53), the two sides of the upper end and the two sides of the lower end of the movable frame (51) are provided with bayonets, and the buckles on the two sides of the upper end and the two sides of the lower end of the movable frame (51) are respectively connected with the inner ring circular rings (52) and the outer ring circular rings (53) in a sliding manner.
7. Helium purifying device according to claim 6, characterized in that the middle part of the upper end of the movable frame (51) is provided with an extension column (511), the axial direction of the extension column (511) is perpendicular to the width direction of the movable frame (51), the top cover (23) is provided with a ring opening, the ring opening is in sliding connection with the extension column (511), the end part of the extension column (511) is provided with a slope (5111) with an inclined end face towards the helium storage plate (4), and the slope (5111) is used for sliding along the water spraying plate (6) and the heating plate (7) when moving downwards.
8. Helium purification equipment according to claim 6, characterized in that an extension plate (512) is arranged on one side of the movable frame (51) close to the rotary ring (31), a first elastic piece (5121) is arranged between the extension plate (512) and the second clamping part (33), one end of the first elastic piece (5121) is contacted with the extension plate (512), and the other end of the first elastic piece (5121) is contacted with the second clamping part (33).
9. Helium purification equipment according to claim 2, characterized in that bottom shell (214) is fixedly arranged at the bottom of chassis (21) and at the position of air outlet (213), air outlet (213) is arranged in bottom shell (214), air outlet (2141) is arranged on bottom shell (214), strip plate (215) engaged with air outlet (213) is inserted in air outlet (213), guide rods (2151) extending outwards through bottom shell (214) are arranged at two ends of strip plate (215) towards the direction of bottom shell (214), guide openings for guide rods (2151) to pass through are arranged on bottom shell (214), and second elastic pieces (2152) sleeved on guide rods (2151) are fixedly connected between bottom shell (214) and strip plate (215).
10. Helium purification installation according to claim 1, characterized in that the top cover (23) is provided with a plurality of through openings (231), each of the water spraying plate (6) and each of the heating plates (7) being respectively insertable between the helium storage plate (4) and the filter plate (5) through the top cover (23) through the through openings (231).
11. Helium gas purification installation according to claim 9, wherein the strip (215) is provided with projections (2153) extending at both ends towards the release area (223), wherein the strip (213) is in an open state when the heating plate (7) is inserted between the filter plate (5) and the helium storage plate (4) and moved into place, the heating plate (7) pressing against the projections (2153) causes the strip (215) to move away from the outlet (213).
12. Helium purification device according to any one of claims 1 to 11, characterised in that the first movement assembly (8) and the second movement assembly (9) each comprise a frame (81), a guide rail (82), a linear drive (83) and a connecting rod (831), the upper ends of the water spraying plate (6) and the heating plate (7) are each provided with a frame (81), the upper surface of the top cover (23) is provided with a column (232), the column (232) is vertically arranged and axially parallel to the rotating shaft (3), the frame (81) is provided with an arc-shaped strip (811), the arc-shaped strip (811) is connected with the column (232), the top cover (23) is vertically provided with a guide rail (82), the guide rail (82) is in sliding connection with the frame (81), the output end of the linear drive (83) is connected with one end of the connecting rod (831), and the other end of the connecting rod (831) is hinged with the arc-shaped strip (811).
13. Helium purification installation according to claim 12, characterized in that the heating plate (7) is provided with an internal recess on the side facing the helium storage plate (4), which heating plate (7) forms a flow gap (71) for helium gas to flow between the heating plate (7) and the helium storage plate (4) when the heating plate (7) is inserted between the filter plate (5) and the helium storage plate (4).
14. A method of purifying a helium purifying apparatus, comprising:
s1, introducing gas into an adsorption area (221) in the purification shell (2) through the gas inlet;
s2, the rotating shaft (3) rotates to drive the helium storage plate (4) to move to the cleaning area (222), and helium is adsorbed onto the helium storage plate (4) through the filter plate (5);
s3, the first moving assembly (8) drives the water spraying plate (6) to move downwards into the cleaning area (222), the water spraying plate (6) is inserted between the helium storage plate (4) and the filter plate (5) in the downward moving process, the water spraying plate (6) cleans the surface of the filter plate (5), and water after cleaning is discharged through a water outlet;
s4, continuing to rotate the rotating shaft (3) to enable the helium storage plate (4) to move into the release area (223);
s5, the second moving assembly (9) drives the heating plate (7) to move downwards into the release area (223), the heating plate (7) is inserted between the helium storage plate (4) and the filtering plate (5) in the downward moving process, the heating plate (7) heats the filtering plate (5) and the helium storage plate (4) simultaneously, and the helium storage plate (4) releases helium and discharges the helium through the air outlet.
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|---|---|
| CN117123024B (en) | 2024-07-05 |
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