CN117054682B - A dual-axis adjustable acceleration sensor based on modal localization - Google Patents
A dual-axis adjustable acceleration sensor based on modal localization Download PDFInfo
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
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Abstract
本发明公开了一种基于模态局部化的双轴可调加速度传感器，包括：用于感受重力加速度的质量块，质量块四周布置四组相同的驱动检测单元，质量块左右驱动检测单元用来检测x方向的加速度，其中质量块上下驱动检测单元用来检测y方向的加速度；驱动检测单元包括第一谐振器和第二谐振器；第一音叉梁与第二音叉梁之间通过静电耦合，耦合电源输出耦合电压加载在与第二音叉梁相连的所述第一固定端，耦合电源用于调整所述第一音叉梁和所述第二音叉梁之间的静电耦合强度；第一音叉梁通过第一驱动电极调节驱动力；所述第二音叉梁通过第二驱动电极调节驱动力；本发明实现传感器灵敏度、分辨率和探测范围的在线调整，具有灵敏度高，鲁棒性强等优点。
The invention discloses a dual-axis adjustable acceleration sensor based on modal localization, comprising: a mass block for sensing gravity acceleration, four groups of identical drive detection units arranged around the mass block, the left and right drive detection units of the mass block are used to detect acceleration in the x direction, wherein the up and down drive detection units of the mass block are used to detect acceleration in the y direction; the drive detection unit comprises a first resonator and a second resonator; a first tuning fork beam and a second tuning fork beam are coupled electrostatically, a coupling power supply outputs a coupling voltage loaded on the first fixed end connected to the second tuning fork beam, and the coupling power supply is used to adjust the electrostatic coupling strength between the first tuning fork beam and the second tuning fork beam; the first tuning fork beam adjusts the driving force through a first drive electrode; the second tuning fork beam adjusts the driving force through a second drive electrode; the invention realizes online adjustment of sensor sensitivity, resolution and detection range, and has the advantages of high sensitivity, strong robustness and the like.
Description
Technical Field
The invention relates to the technical field of micro-electromechanical systems, in particular to a dual-axis adjustable acceleration sensor based on modal localization, and belongs to the field of sensors.
Background
Acceleration sensors are commonly used in various medical, transportation, aerospace, etc. Acceleration sensors are generally classified into capacitive, piezoresistive and resonant types according to different detection mechanisms. Among them, a resonant acceleration sensor is widely used due to a quasi-digital signal and high sensitivity, and its detection principle is to detect a shift in the frequency of a resonator by affecting a change in the axial force of the resonator by the inertial force of a mass. To improve frequency sensitivity, sensitivity is typically improved by optimizing the geometry of the resonator and amplifying the inertial forces using a leverage mechanism. The zhang et al patent at "Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity,"(Sensors(Basel),vol.15,no.12,pp.30293-310,Dec 3 2015.) proposes a new acceleration sensor design that achieves higher sensitivity by optimizing the resonator configuration and optimizing the performance of the amplifying lever, but the temperature sensitive nature of the resonant accelerometer still exists. Zhang et al in "An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupled Resonators,"(Journal of Microelectromechanical Systems,vol.25,no.2,pp.286-296,2016) propose a uniaxial acceleration sensor based on modal localization effects with good sensitivity and good temperature sensitivity resistance.
In summary, the resonant acceleration sensor based on the frequency shift output mode is susceptible to the influence of external environment, and the acceleration sensor introducing the modal localization effect has better anti-interference capability, so the inventor provides a differential dual-axis sensor based on the modal localization effect.
Disclosure of Invention
In order to solve the technical problems that the resonant acceleration sensor is difficult to raise due to frequency shift type output sensitivity and has poor sensitivity and robustness to the external environment, the invention provides a dual-axis adjustable acceleration sensor based on modal localization, which adopts a resonator consisting of fixed supporting beams with equal length, the two clamped beams are coupled through static electricity, so that the coupling strength is convenient to adjust, the optimal coupling strength in theory is achieved, any structural optimization is not needed, and the method has the advantages of being simple in process, stable in configuration, easy to process and the like, and can be widely applied to various aspects. The invention adopts the following specific technical scheme:
The dual-axis adjustable acceleration sensor based on modal localization comprises a mass block for sensing gravitational acceleration, wherein four groups of same driving detection units are arranged around the mass block, the left and right driving detection units of the mass block are used for detecting acceleration in the x direction, and the up and down driving detection units of the mass block are used for detecting acceleration in the y direction;
the drive detection units have the same function;
The driving detection unit comprises a first resonator and a second resonator, wherein the displacement of the mass block (1) is caused under the action of external acceleration, the displacement of the mass block (1) can cause amplitude-frequency change of the corresponding first resonator and second resonator to finish detection, and the first resonator and the second resonator are symmetrically arranged;
the first resonator is formed by a first tuning fork beam;
The second resonator is formed by a second tuning fork beam;
The first tuning fork beam and the second tuning fork beam are variable in length and equal in length;
The first tuning fork beam is arranged above the second tuning fork beam;
The two ends of the first tuning fork beam are fixed through a first fixed end and a fourth fixed end respectively;
The two ends of the second tuning fork beam are respectively fixed through the first fixed end, the first micro-lever structure and the first micro-lever structure;
The first micro-lever structure is connected with the mass block through a first axial decoupling structure;
The second micro-lever structure is connected with the mass block through the second axial decoupling structure;
Wherein the first tuning fork beam and the second tuning fork beam are coupled through static electricity, coupling power supply output coupling voltage is loaded on the first fixed end connected with the second tuning fork beam, the coupling power supply is used for adjusting the electrostatic coupling strength between the first tuning fork beam and the second tuning fork beam;
The second tuning fork beam adjusts the driving force through a second driving electrode;
The first tuning fork beam and the second tuning fork beam respectively detect amplitude and frequency through the first detection electrode and the second detection electrode.
Further, the length of the first driving electrode is equal to the length of the second driving electrode, and the width of the first driving electrode is equal to the width of the second driving electrode.
Further, the length of the first detection electrode is equal to the length of the second detection electrode, and the width of the first detection electrode is equal to the width of the second detection electrode.
Further, the length of the first driving electrode is equal to the tuning fork length of the first tuning fork beam, the width of the first driving electrode is equal to the width of the first tuning fork beam, the length of the second driving electrode is equal to the tuning fork length of the second tuning fork beam, and the width of the second driving electrode is equal to the width of the second tuning fork beam.
Further, a gap between the first driving electrode and the first tuning fork beam is equal to a gap between the second driving electrode and the second tuning fork beam, which is equal to a distance between the second tuning fork beam and the first tuning fork beam.
Compared with the prior art, the invention has the following advantages:
1. the invention has the characteristic of easy adjustment of coupling strength, and the coupling strength between the clamped beams can be changed only by voltage adjustment;
2. The invention adopts the axial decoupling device, and realizes the detection of the bidirectional acceleration of a single resonator through the mechanical property of the axial decoupling device;
3. the invention uses the mode localization phenomenon, and when the device is subjected to extremely small disturbance, the device can cause the abrupt change of the characteristic value and the amplitude ratio, and has ultrahigh sensitivity.
In summary, the invention provides a differential acceleration sensor based on modal localization effect, which changes the electrostatic coupling strength by adjusting the coupling voltage, thereby realizing the on-line adjustment of the sensitivity and resolution of the sensor. The first tuning fork beam and the second tuning fork beam are driven by the first fixed excitation electrode and the second fixed excitation electrode respectively, when the mass block moves due to acceleration, the amplitude of the two resonators is changed through the lever, and the amplitude ratio of the two resonators is calculated to obtain the acceleration. Compared with the traditional frequency shift output mode, the amplitude ratio output has better capability of resisting the interference of the external environment, better robustness and higher sensitivity.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings may be obtained according to the drawings without inventive effort to a person skilled in the art.
FIG. 1 is a schematic structural diagram of a dual-axis tunable acceleration sensor based on modal localization in an embodiment of the present invention;
FIG. 2 (a) is a diagram showing the amplitude-frequency characteristic of a transverse tuning fork beam in a balanced state in an embodiment of the present invention;
FIG. 3 (a) is a graph showing the relative amplitude ratio of the first transverse clamped beam when 1g of acceleration disturbance is applied in the y-axis direction at a coupling voltage of 217V according to an embodiment of the present invention;
(b) In the embodiment of the invention, under the condition that 1g of acceleration disturbance is applied in the y-axis direction when the coupling voltage is 217V, the relative amplitude ratio change curve of the second transverse clamped beam is obtained;
FIG. 4 (a) is a graph showing the relative amplitude ratio of the first longitudinal clamped beam in the case of a disturbance of 1g applied in the y-axis direction according to an embodiment of the present invention;
(b) In the embodiment of the invention, a relative amplitude ratio change curve of the second longitudinal clamped beam is applied under the condition of 1g of acceleration disturbance in the y-axis direction;
In the figure, 1, a mass block, 2, a driving detection unit, 2-1, a first fixed end, 2-2 and a second fixed end, 2-3, a first driving electrode, 2-4, a second driving electrode, 2-5, a first detection electrode, 2-6, a second detection electrode, 2-7, a first tuning fork beam, 2-8, a second tuning fork beam, 2-9, a third fixed end, 2-10, a fourth fixed end, 2-11, a fifth fixed end, 2-12, a first micro-lever structure, 2-13, a second micro-lever, 2-14, a first axial decoupling structure, 2-15 and a second axial decoupling structure.
Detailed Description
In order that those skilled in the art will better understand the present invention, a technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
The inventor researches show that the mode localization phenomenon is introduced into the accelerometer, and the sensitivity of the sensor can be greatly improved by adopting a novel sensitivity mechanism taking a characteristic value or an amplitude ratio and the like as output measurement, and the sensitivity can be still higher under the condition that structural optimization is not needed or a lever is used. In a weakly coupled system of approximately symmetry, which introduces modal localization effects, when the sensor is disturbed, this will lead to a disruption of the symmetry of the system and thus to a sharp change in the characteristic state and amplitude ratio, based on which an acceleration sensor with extremely high sensitivity is designed.
As shown in fig. 1, the present invention provides a schematic structural diagram of a dual-axis adjustable acceleration sensor based on modal localization, including:
The mass block 1 is used for sensing gravitational acceleration, four groups of identical driving detection units 2 are arranged around the mass block, and when the mass block 1 is displaced under the action of external acceleration, amplitude frequency change of the detection units is caused, namely a first detection unit and a second detection unit which are arranged on the left side and the right side of the mass 1 in the horizontal direction of the mass 1;
the first detection unit, the second detection unit, the third detection unit and the fourth detection unit have the same structure;
The mass block 1 drives a first detection unit and a second detection unit on the left side and the right side to detect acceleration in the x direction, and the mass block 1 drives a third detection unit and a fourth detection unit on the upper side and the lower side to detect acceleration in the y direction;
The detection unit 2 comprises a first resonator and a second resonator, wherein the first resonator and the second resonator are symmetrically arranged, the first resonator and the second resonator have the same structure, and the first resonator and the second resonator are used for detecting amplitude-frequency change caused by displacement change of the mass block 1 caused by external acceleration;
The first resonator is formed by first tuning fork beams 2-7;
the second resonator is formed by a second tuning fork beam 2-8;
The first tuning fork beam 2-7 and the second tuning fork beam 2-8 are variable in length and equal in length;
The first tuning fork beam 2-7 is arranged above the second tuning fork beam 2-8;
two ends of the first tuning fork beam 2-7 are fixed through a first fixed end 2-1 and a fourth fixed end 2-10 respectively;
Two ends of the second tuning fork beam 2-8 are respectively fixed with the first micro-lever structure 2-12 and the second micro-lever structure 2-13 through a second fixed end 2-2;
The first micro-lever structure 2-12 is connected with the mass 1 through a first axial decoupling structure 2-14;
the second micro-lever structure 2-13 is connected with the mass 1 through a second axial decoupling structure 2-15;
Wherein, the first tuning fork beam 2-7 and the second tuning fork beam 2-8 are coupled by static electricity, a coupling power supply outputs coupling voltage to load on the first fixed end 2-1 connected with the second tuning fork beam 2-8, and the coupling power supply is used for adjusting the static electricity coupling strength between the first tuning fork beam 2-7 and the second tuning fork beam 2-8;
The first tuning fork beam 2-7 adjusts the driving force through the first driving electrode 2-3, and the second tuning fork beam 2-8 adjusts the driving force through the second driving electrode 2-4.
The first tuning fork beam 2-7 detects amplitude and frequency through the first detection electrode 2-5;
The second tuning fork beam 2-8 detects amplitude and frequency through the second detection electrode 2-6;
the length of the first driving electrode 2-3 is equal to the length of the second driving electrode 2-4, and the width of the first driving electrode 2-3 is equal to the width of the second driving electrode 2-4.
The length of the first detection electrode 2-6 is equal to the length of the second detection electrode 2-7, and the width of the first detection electrode 2-6 is equal to the width of the second detection electrode 2-7.
The length of the first driving electrode 2-3 is equal to the tuning fork length of the first tuning fork beam 2-7, the width of the first driving electrode 2-3 is equal to the width of the first tuning fork beam 2-7, the length of the second driving electrode 2-4 is equal to the tuning fork length of the second tuning fork beam 2-8, and the width of the second driving electrode 2-4 is equal to the width of the second tuning fork beam 2-8.
The gap between the first driving electrode 2-3 and the first tuning fork beam 2-7 is equal to the gap between the second driving electrode 2-4 and the second tuning fork beam 2-8, which is equal to the distance between the second tuning fork beam 2-8 and the first tuning fork beam 2-7.
The invention provides a differential acceleration sensor based on modal localization effect, which changes electrostatic coupling strength by adjusting coupling voltage to realize on-line adjustment of sensitivity and resolution of the sensor. The first tuning fork beam and the second tuning fork beam are driven by the first fixed excitation electrode and the second fixed excitation electrode respectively, when the mass block moves under the action of external disturbance, the amplitude is caused to change, and the magnitude of the dip angle can be obtained by calculating the amplitude ratio of the two resonators. Compared with the traditional frequency shift output mode, the amplitude ratio output has better capability of resisting the interference of the external environment, better robustness and higher sensitivity.
Example 1
The differential acceleration sensor based on the modal localization effect provided by the invention is described below with a specific example.
In the embodiment of the invention shown in fig. 1, a differential acceleration sensor based on modal localization effect is shown, a mass block is connected with a resonator through an amplifying lever, when the mass block moves under the action of external acceleration, the axial stress of the resonator is changed, the resonator in a balanced state is broken, so that energy localization is caused, and the magnitude of the external acceleration is calculated by measuring the amplitude ratio of the two resonators.
Compared with the traditional mechanical coupling structure, the invention adopts static electricity for coupling, can adjust the coupling strength in real time, and is easy to realize low coupling rigidity. In the embodiment of the present invention, according to the dimensions in the structural parameter table 1 of the present invention, the amplitude-frequency characteristic diagram of the acceleration sensor of the present invention in the balanced state is shown in fig. 2, in which the abscissa is the frequency (kHz) and the ordinate is the amplitude (μm).
TABLE 1
FIG. 2 (a) is a diagram showing the amplitude-frequency characteristic of a transverse tuning fork beam in a balanced state in an embodiment of the present invention;
Fig. 2 is a graph showing amplitude-frequency characteristic variation curves of the transverse and longitudinal resonators in the balanced state according to the embodiment of the present invention.
FIG. 3 (a) is a graph showing the relative amplitude ratio of the first transverse clamped beam when 1g of acceleration disturbance is applied in the y-axis direction at a coupling voltage of 217V according to an embodiment of the present invention;
(b) In the embodiment of the invention, under the condition that 1g of acceleration disturbance is applied in the y-axis direction when the coupling voltage is 217V, the relative amplitude ratio change curve of the second transverse clamped beam is obtained;
FIG. 4 (a) is a graph showing the relative amplitude ratio of the first longitudinal clamped beam in the case of a disturbance of 1g applied in the y-axis direction according to an embodiment of the present invention;
(b) In the embodiment of the invention, a relative amplitude ratio change curve of the second longitudinal clamped beam is applied under the condition of 1g of acceleration disturbance in the y-axis direction;
FIG. 3 is a graph showing the relative amplitude ratio of two transverse clamped beams under a disturbance of 1g applied in the y-axis direction, according to an embodiment of the present invention.
FIG. 4 is a graph showing the relative amplitude ratio of two longitudinal clamped beams under a disturbance of 1g acceleration applied in the y-axis direction, and comparing the result with the result in FIG. 3, the acceleration sensor has good decoupling capability.
Claims (5)
1. The dual-axis adjustable acceleration sensor based on modal localization is characterized by comprising a mass block (1) for sensing gravitational acceleration, wherein four groups of same driving detection units (2) are arranged around the mass block (1), the left and right driving detection units (2) of the mass block (1) are used for detecting acceleration in the x direction, and the up and down driving detection units (2) of the mass block (1) are used for detecting acceleration in the y direction;
the drive detection units have the same function;
the detection unit comprises a first resonator and a second resonator, wherein the displacement of the mass block (1) is caused under the action of external acceleration, and the displacement of the mass block (1) can cause amplitude-frequency change of the corresponding first resonator and second resonator to finish detection;
the first resonator and the second resonator are symmetrically arranged;
The first resonator is formed by a first tuning fork beam (2-7);
the second resonator is formed by a second tuning fork beam (2-8);
the first tuning fork beam (2-7) and the second tuning fork beam (2-8) are variable in length and equal in length;
The first tuning fork beam (2-7) is arranged above the second tuning fork beam (2-8);
Two ends of the first tuning fork beam (2-7) are fixed through a first fixed end (2-1) and a fourth fixed end (2-11) respectively;
Two ends of the second tuning fork beam (2-8) are respectively fixed through a first fixed end (2-2), a first micro-lever structure (2-12) and a second micro-lever structure (2-13);
The first micro-lever structure (2-12) is connected with the mass block (1) through a first axial decoupling structure;
The second micro-lever structure (2-13) is connected with the mass block (10) through a second axial decoupling structure (2-15);
wherein the first tuning fork beam (2-7) and the second tuning fork beam (2-8) are coupled through static electricity, a coupling power supply outputs coupling voltage to be loaded on the first fixed end (2-2) connected with the second tuning fork beam (2-8), and the coupling power supply is used for adjusting the static electricity coupling strength between the first tuning fork beam (2-7) and the second tuning fork beam (2-8);
The first tuning fork beam (2-7) adjusts driving force through a first driving electrode (2-3), and the second tuning fork beam (2-8) adjusts driving force through a second driving electrode (2-4);
The first tuning fork beam (2-7) and the second tuning fork beam (2-8) detect amplitude and frequency through a first detection electrode (2-5) and a second detection electrode (2-6) respectively.
2. A dual axis adjustable acceleration sensor based on modal localization according to claim 1, characterized in, that the length of the first driving electrode (2-3) is equal to the length of the second driving electrode (2-4), the width of the first driving electrode (2-3) is equal to the width of the second driving electrode (2-4).
3. A dual axis adjustable acceleration sensor based on modal localization according to claim 1, characterized in, that the length of the first detection electrode (2-5) is equal to the length of the second detection electrode (2-6), the width of the first detection electrode (2-5) is equal to the width of the second detection electrode (2-6).
4. A dual-axis adjustable acceleration sensor based on modal localization according to claim 1, characterized in, that the length of the first driving electrode (2-3) is equal to the tuning fork length of the first tuning fork beam (2-7), the width of the first driving electrode (2-3) is equal to the width of the first tuning fork beam (2-7);
the length of the second driving electrode (2-4) is equal to the tuning fork length of the second tuning fork beam (2-8), and the width of the second driving electrode (2-4) is equal to the width of the second tuning fork beam (2-8).
5. A dual axis tunable acceleration sensor based on modal localization according to claim 1, characterized in, that the gap between the first driving electrode (2-3) and the first tuning fork beam (2-7) is equal to the gap between the second driving electrode (2-4) and the second tuning fork beam (2-8), equal to the distance between the second tuning fork beam (2-8) and the first tuning fork beam (2-7).
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104781677A (en) * | 2012-09-04 | 2015-07-15 | 剑桥企业有限公司 | Dual and triple axis inertial sensors and methods of inertial sensing |
| CN105737811A (en) * | 2016-04-19 | 2016-07-06 | 西安交通大学 | Resonant type MEMS full-scale inclination angle sensor |
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| CN102495236A (en) * | 2011-11-24 | 2012-06-13 | 北京航空航天大学 | High-sensitivity dual-axis silicon-micro resonance accelerometer |
| CN102539832B (en) * | 2012-01-13 | 2013-04-24 | 北京航空航天大学 | Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian' |
| US10545167B2 (en) * | 2015-10-20 | 2020-01-28 | Analog Devices, Inc. | Multiple-axis resonant accelerometers |
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| CN110780089B (en) * | 2019-11-11 | 2021-10-01 | 上海交通大学 | Weakly coupled resonant microaccelerometer with adjustable sensitivity |
| CN112230017B (en) * | 2020-10-15 | 2022-04-01 | 中国科学院空天信息创新研究院 | Weakly coupled MEMS accelerometer |
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| CN112710865B (en) * | 2020-12-11 | 2022-02-25 | 大连理工大学 | Adjustable acceleration sensor based on modal localization effect |
| KR102452565B1 (en) * | 2021-02-16 | 2022-10-06 | 한국기술교육대학교 산학협력단 | Design method of multi-axis MEMS gyro sensor with low cross-axis sensitivity |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104781677A (en) * | 2012-09-04 | 2015-07-15 | 剑桥企业有限公司 | Dual and triple axis inertial sensors and methods of inertial sensing |
| CN105737811A (en) * | 2016-04-19 | 2016-07-06 | 西安交通大学 | Resonant type MEMS full-scale inclination angle sensor |
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