CN116989698B - Combined phase microscopic imaging measurement system - Google Patents
Combined phase microscopic imaging measurement system Download PDFInfo
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- CN116989698B CN116989698B CN202311234997.2A CN202311234997A CN116989698B CN 116989698 B CN116989698 B CN 116989698B CN 202311234997 A CN202311234997 A CN 202311234997A CN 116989698 B CN116989698 B CN 116989698B
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- 238000003384 imaging method Methods 0.000 title claims abstract description 38
- 238000005259 measurement Methods 0.000 title claims abstract description 34
- 238000012360 testing method Methods 0.000 claims abstract description 4
- 230000003287 optical effect Effects 0.000 claims description 21
- 238000000386 microscopy Methods 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 abstract description 8
- 238000005305 interferometry Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000013519 translation Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000012984 biological imaging Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a combined phase microscopic imaging measurement system which comprises a laser light source, a first beam splitter, a second beam splitter, a first reflecting mirror, a third beam splitter and a camera, wherein the first beam splitter, the second beam splitter, the first reflecting mirror, the third beam splitter and the camera are sequentially arranged along the light propagation direction of the laser light source; and a second mirror spaced apart from the second beam splitter and a third mirror spaced apart from the first beam splitter; the second beam splitter is provided with a first light outlet and a second light outlet, and the second reflecting mirror is distributed at intervals with the second light outlet and is used for receiving laser of the second light outlet; the first beam splitter is provided with a third light outlet and a fourth light outlet, and the third reflecting mirror is distributed at intervals with the third light outlet and is used for receiving laser of the third light outlet; the third beam splitter is for receiving the laser light reflected via the first mirror and the third mirror. The invention solves the technical problem that the quantitative phase imaging microscope based on the interferometry in the prior art cannot acquire the transmission type phase information and the reflection type phase information of the object to be tested at the same time, thereby leading to inaccurate test results.
Description
Technical Field
The invention relates to the technical field of phase imaging, in particular to a combined phase microscopic imaging measurement system.
Background
The quantitative detection of the phase is an important subject of microscopic three-dimensional morphology measurement technology, and plays an important role in the fields of medical biological imaging, IC (integrated circuit) back-pass, optical micro-lenses, surface morphology detection and the like. Compared with a traditional optical microscope, the quantitative phase imaging can provide higher resolution and richer information, and has the advantages of non-contact, nondestructive, high-precision measurement, real-time imaging and the like.
Interferometry is one of the most common methods in quantitative phase imaging, where both the amplitude and phase information of the object beam can be obtained. The conventional quantitative phase imaging microscope based on the interferometry is generally of a single transmission type or reflection type structure, and does not meet the measurement conditions of a reflection sample and a transmission sample on the premise of not changing the structure, so that the problem of inaccurate test results caused by incapability of acquiring transmission type and reflection type phase information of an object to be tested at the same time can occur.
Disclosure of Invention
The invention aims to overcome the technical defects, and provides a combined phase microscopic imaging measurement system which solves the technical problem that a quantitative phase imaging microscope based on an interferometry cannot acquire transmission type phase information and reflection type phase information of an object to be measured at the same time in the prior art, so that a test result is inaccurate.
In order to achieve the technical purpose, the invention adopts the following technical scheme:
in a first aspect, the invention provides a combined phase microscopic imaging measurement system, which comprises a laser light source, a first beam splitter, a second beam splitter, a first reflecting mirror, a third beam splitter and a camera, wherein the first beam splitter, the second beam splitter, the first reflecting mirror, the third beam splitter and the camera are sequentially arranged along the light propagation direction of the laser light source; and a second mirror having a set pitch distribution with the second beam splitter and a third mirror having a set pitch distribution with the first beam splitter; the laser light source, the first beam splitter, the second beam splitter, the first reflecting mirror, the third beam splitter and the camera are arranged with intervals;
the second beam splitter is provided with a first light outlet and a second light outlet, the second reflecting mirror is distributed at intervals with the second light outlet and is used for receiving the laser of the second light outlet, and the first reflecting mirror is used for receiving the laser of the first light outlet;
the first beam splitter is provided with a third light outlet and a fourth light outlet, the third reflecting mirror is distributed with the third light outlet at intervals and is used for receiving laser light of the third light outlet, the second beam splitter is used for receiving laser light of the fourth light outlet, and the third beam splitter is used for receiving laser light reflected by the first reflecting mirror and the third reflecting mirror.
In some embodiments, the laser collimation filter assembly further comprises a laser collimation filter assembly, wherein the laser collimation filter assembly is located between the laser light source and the first beam splitter along the light propagation direction and is distributed at intervals with the laser light source and the first beam splitter, and the laser collimation filter assembly comprises a first lens, a pinhole and a second lens which are sequentially distributed at intervals along the light propagation direction.
In some embodiments, the laser collimation filter assembly is movable along the direction of the optical path.
In some embodiments, a third lens is further included, the third lens being located between and spaced apart from the first and second beam splitters along a light propagation direction of the laser light source.
In some embodiments, the laser light source further comprises a fourth lens distributed along a light propagation direction of the laser light source, the fourth lens being located between and spaced apart from the first mirror and the third beam splitter.
In some embodiments, a fifth lens is also included, the fifth lens being located between and spaced apart from the second beam splitter and the second mirror.
In some embodiments, the first lens, the second lens, the third lens, the fourth lens, and the fifth lens are all achromatic doublet lenses.
In some embodiments, the laser light source further comprises a first objective lens and a second objective lens spaced apart along a light propagation direction of the laser light source, the first objective lens and the second objective lens being both located between the second beam splitter and the first mirror and both spaced apart from the second beam splitter and the first mirror.
In some embodiments, the device further comprises a to-be-detected object base, wherein the to-be-detected object base is located between the first objective lens and the second objective lens and is distributed at intervals with the first objective lens and the second objective lens.
In some embodiments, the first beam splitter has a first axis of rotation, the second beam splitter has a second axis of rotation, the third beam splitter has a third axis of rotation, the first beam splitter is rotatable about the first axis of rotation, the second beam splitter is rotatable about the second axis of rotation, and the third beam splitter is rotatable about the third beam splitter.
Compared with the prior art, the combined phase microscopic imaging measurement system provided by the invention comprises a laser light source, a first beam splitter, a second beam splitter, a first reflecting mirror, a third beam splitter and a camera which are sequentially distributed at intervals along the light propagation direction; and a second mirror spaced apart from the second beam splitter and a third mirror spaced apart from the first beam splitter; the second beam splitter is provided with a first light outlet and a second light outlet, the second reflecting mirror is distributed at intervals with the second light outlet and is used for receiving the laser of the second light outlet, and the first reflecting mirror is used for receiving the laser of the first light outlet; the first beam splitter is provided with a third light outlet and a fourth light outlet, the third reflecting mirror is distributed with the third light outlet at intervals and is used for receiving laser light of the third light outlet, the second beam splitter is used for receiving laser light of the fourth light outlet, and the third beam splitter is used for receiving laser light reflected by the first reflecting mirror and the third reflecting mirror. The transmission-reflection type phase microscopic imaging measurement system is formed by combining the Michelson interference structure and the Mach-Zehnder interference structure, the thickness and the surface profile information of the measured sample can be measured simultaneously on the premise of not changing the structure, the application range of the measured sample is wider, and the transmission-reflection type phase microscopic imaging measurement system can be used for different types of samples and application fields.
Drawings
FIG. 1 is a schematic diagram of a combined phase microscopy imaging measurement system according to the present invention;
FIG. 2 is an interferogram of a transmission sample collected by an optical path in the combined phase microscopic imaging measurement system provided by the invention;
FIG. 3 is a real three-dimensional morphology diagram recovered from an interference diagram acquired by an optical path in the combined phase microscopic imaging measurement system provided by the invention;
FIG. 4 is an interferogram of a reflected sample collected by an optical path in the combined phase microscopy imaging measurement system provided by the invention;
fig. 5 is a real three-dimensional morphology diagram recovered from an interference diagram acquired by an optical path in the combined phase microscopic imaging measurement system provided by the invention.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
The embodiment of the invention provides a combined phase microscopic imaging measurement system, which is shown in figure 1, and comprises a laser light source 1, a first beam splitter 2, a second beam splitter 3, a first reflecting mirror 4, a third beam splitter 5 and a camera 6 which are sequentially distributed at intervals along the light propagation direction; and a second mirror 7 spaced apart from the second beam splitter 3 and a third mirror 8 spaced apart from the first beam splitter 2;
the second beam splitter 3 is provided with a first light outlet and a second light outlet, the second reflecting mirror 7 is distributed at intervals with the second light outlet and is used for receiving the laser light of the second light outlet, and the first reflecting mirror 4 is used for receiving the laser light of the first light outlet;
the first beam splitter 2 has a third light outlet and a fourth light outlet, the third reflecting mirror 8 is spaced apart from the third light outlet and is used for receiving the laser light of the third light outlet, the second beam splitter 3 is used for receiving the laser light of the fourth light outlet, and the third beam splitter 5 is used for receiving the laser light reflected by the first reflecting mirror 4 and the third reflecting mirror 8.
In this embodiment, a transmission-reflection type phase microscopic imaging measurement system is formed by combining a michelson interference structure and a mach-zehnder interference structure, so that the thickness and surface profile information of a measured sample can be measured simultaneously on the premise of not changing the structure, and the application range of the measured sample is wider, and the transmission-reflection type phase microscopic imaging measurement system can be used for different types of samples and application fields.
The spacing between the individual components of the measuring system can be adjusted, so that the measuring system is more compact, the smaller the spacing between the individual components of the measuring system is within a predetermined spacing range, the better.
Further, the third reflecting mirror 8 is distributed at a certain angle with the laser direction of the second light outlet, the first reflecting mirror 4 is distributed at a certain angle with the laser direction of the first light outlet, the first reflecting mirror 4 receives the laser of the first light outlet and changes the optical path of the laser, the third reflecting mirror 8 receives the laser of the third light outlet and changes the optical path of the laser, and the laser of the first outlet and the laser of the third outlet are converged at a certain position and then enter the third beam splitter 5 through the optical path changes of the first reflecting mirror 4 and the third reflecting mirror 8. It will be appreciated that the relative positions of the first mirror 4 and the third mirror 8 can be adjusted at will, as long as the first mirror 4 and the third mirror 8 can be ensured to collect the laser light of the first outlet and the third outlet to a certain place.
Further, adjusting the position of the second mirror 7 controls the optical path length of the reference beam, thereby changing the optical path length difference between the object light and the reference light to adjust the interference fringes.
It should be noted that, the combined phase microscopic imaging measurement system provided by the embodiment of the invention forms a transmission phase microscopic imaging measurement light path and a reflection phase microscopic imaging measurement light path.
Specifically, the transmission type phase fiber imaging measurement light path is as follows: the laser source 1 emits a Gaussian beam 1A, the Gaussian beam 1A passes through the first beam splitter 2 and is split into two identical laser beams at the second beam splitter 3, wherein the transmitted beam is a first object light beam to form a first object light path; the laser beam reflected by the second beam splitter 3 is turned 180 degrees under the reflection action of the second reflecting mirror 7, and then reflected by the second beam splitter 3 to obtain a reference beam, so as to form a reference light path; interference is generated by combining the reference beam and the first object beam at the third beam splitter 5 based on the above, thereby obtaining an interference image transmitting the sample to be measured. In a specific embodiment, referring to fig. 2, fig. 2 is an interference image of a transmitted sample, and finally, phase information of the transmitted sample is extracted by fourier method, so as to obtain a real three-dimensional morphology structure of the measured object, as shown in fig. 3.
The optical path of the first object light beam is: the first object light beam irradiates the surface of the sample to be measured, penetrates the sample to be measured to form transmitted light, is turned by 90 degrees by the first reflecting mirror 4, then penetrates the third beam splitter 5 in a collimation mode, and is received by the camera 6.
Wherein, the light path of the reference beam is: after being reflected by the second beam splitter 3, reflected by the first beam splitter 2, reflected by the third reflecting mirror 8 and reflected by the third beam splitter 5 in sequence, interference occurs with the first object light beam, and the interference image is received by the camera 6.
Further, the reflective phase microscopic imaging measurement light path is as follows: the laser beam 1A irradiates the surface of the sample to be measured after passing through the first beam splitter 2 and the second beam splitter 3, and reflects the surface of the sample to be measured to obtain a second light beam so as to form a second light path; interference is generated by combining the reference beam and the second light beam at the second beam splitter 3 based on the above, thereby obtaining an interference image reflecting the sample to be measured. In a specific embodiment, referring to fig. 4, in order to obtain an interference image of a reflected measured sample, finally, phase information of the measured sample is extracted by using a fourier method, so as to obtain a real three-dimensional morphology structure of the measured object, as shown in fig. 5.
Wherein, the light path of second light beam is: the object light beam reflected by the measured sample is interfered with the reference beam after passing through the second beam splitter 3, and the interference beam is received by the camera 6 after being reflected by the first beam splitter 2, the third reflecting mirror 8 and the third beam splitter 5 in sequence.
In some embodiments, the laser collimation filter assembly 9 further comprises a laser collimation filter assembly 9, wherein the laser collimation filter assembly 9 is located between the laser light source 1 and the first beam splitter 2 along the light propagation direction and is distributed at intervals with the laser light source 1 and the first beam splitter 2, and the laser collimation filter assembly 9 comprises a first lens 9a, a pinhole 9b and a second lens 9c which are sequentially distributed at intervals along the light propagation direction.
In this embodiment, the gaussian beam passes through the laser collimation filter assembly 9 composed of the first lens 9a, the pinhole 9b and the second lens 9c to filter out surrounding stray light, so as to obtain a uniformly distributed laser beam 1A, and the uniformly distributed laser beam 1A permeates into the first beam splitter 2.
Further, the first lens 9a is placed on the Z-axis translation mount to be movable along the optical path direction. The first lens 9a can be driven to move by controlling the Z-axis translation mounting seat so that the focus of the first lens 9a is exactly at the center of the pinhole 9 b.
In some embodiments, the laser collimation filter assembly 9 is movable along the direction of the optical path.
In the present embodiment, the pinhole 9b is placed on the XY-moving mount so as to be movable in a direction perpendicular to the optical path, and the first lens 9a is placed on the Z-axis translation mount so as to be movable in the optical path direction.
In some embodiments, the optical system further comprises a third lens 10, wherein the third lens 10 is located between the first beam splitter 2 and the second beam splitter 3 along the light propagation direction and is spaced from the first beam splitter 2 and the second beam splitter 3.
In the present embodiment, the third lens 10 has a collimating function, and the laser beam transmitted through the first beam splitter 2 first passes through the third lens 10 and then enters the second beam splitter 3. Further, the reference beam is collimated by the third lens 10, reflected by the first beam splitter 2, reflected by the third mirror 8 and reflected by the third beam splitter 5, and then interferes with the first object beam, and the interference image is received by the camera 6.
In some embodiments, the optical system further comprises a fourth lens 11 distributed along the light propagation direction, wherein the fourth lens 11 is located between the first reflecting mirror 4 and the third beam splitter 5 and is spaced from the first reflecting mirror 4 and the third beam splitter 5.
In this embodiment, the fourth lens 11 is disposed, and after the first object light beam penetrates through the sample to be measured to form a transmitted light, the first mirror 4 deflects the transmitted light by 90 degrees, and then passes through the third beam splitter 5 after being collimated by the fourth lens 11, and is received by the camera 6.
In some embodiments, a fifth lens 12 is further included, the fifth lens 12 being located between the second beam splitter 3 and the second mirror 7 and being spaced apart from the second beam splitter 3 and the second mirror 7.
In this embodiment, by providing the fifth lens 12, the laser beam reflected by the second beam splitter 3 passes through the fifth lens 12 and is turned by 180 degrees under the reflection effect of the second reflecting mirror 7, and then is converged by the fifth lens 12 and reflected by the second beam splitter 3 to obtain a reference beam, so as to form a reference beam path.
In some embodiments, the first lens 9a, the second lens 9c, the third lens 10, the fourth lens 11, and the fifth lens 12 are all achromatic doublet lenses.
In the present embodiment, the first lens 9a, the second lens 9c, the third lens 10, the fourth lens 11, and the fifth lens 12 can be provided with better collimation effects by using an achromatic double cemented lens.
In some embodiments, the optical system further comprises a first objective lens 13 and a second objective lens 14 which are spaced apart along the light propagation direction, wherein the first objective lens 13 and the second objective lens 14 are positioned between the second beam splitter 3 and the first reflecting mirror 4 and are spaced apart from the second beam splitter 3 and the first reflecting mirror 4.
In the present embodiment, the object to be detected can be enlarged by providing the first objective lens 13 and the second objective lens 14, and the resolution of the fiber imaging measurement system can be improved. The third lens 10 can converge the laser beam on the back focal points of the first objective lens 13 and the fifth lens 12, so that the light emitted from the first objective lens 13 and the fifth lens 12 is parallel light. In actual use, the position of the third lens 10 may be adjusted so that the light emitted from the first objective lens 13 and the fifth lens 12 is parallel.
In some embodiments, the first beam splitter 2 has a first axis of rotation, the second beam splitter 3 has a second axis of rotation, the third beam splitter 5 has a third axis of rotation, the first beam splitter 2 is rotatable about the first axis of rotation, the second beam splitter 3 is rotatable about the second axis of rotation, and the third beam splitter 5 is rotatable about the third beam splitter.
In this embodiment, the first beam splitter 2, the second beam splitter 3 and the third beam splitter 5 are rotatable about their respective central axes. The first beam splitter 2, the second beam splitter 3 and the third beam splitter 5 which can rotate are adopted, so that the collimation of the light path can be quickly and accurately adjusted.
In some embodiments, the device further includes a to-be-detected object base 15, where the to-be-detected object base 15 is located between the first objective lens and the second objective lens and is spaced apart from the first objective lens and the second objective lens.
The object to be detected can be better fixed by arranging the object to be detected base 15.
The above-described embodiments of the present invention do not limit the scope of the present invention. Any other corresponding changes and modifications made in accordance with the technical idea of the present invention shall be included in the scope of the claims of the present invention.
Claims (8)
1. The combined phase microscopic imaging measurement system is characterized by comprising a laser light source, a first beam splitter, a second beam splitter, a first reflecting mirror, a third beam splitter and a camera, wherein the first beam splitter, the second beam splitter, the first reflecting mirror, the third beam splitter and the camera are sequentially arranged along the light propagation direction of the laser light source; and a second mirror having a set pitch distribution with the second beam splitter and a third mirror having a set pitch distribution with the first beam splitter; the laser light source, the first beam splitter, the second beam splitter, the first reflecting mirror, the third beam splitter and the camera are arranged with intervals;
the second beam splitter is provided with a first light outlet and a second light outlet, the second reflecting mirror is distributed at intervals with the second light outlet and is used for receiving the laser of the second light outlet, and the first reflecting mirror is used for receiving the laser of the first light outlet;
the first beam splitter is provided with a third light outlet and a fourth light outlet, the third reflecting mirror is distributed at intervals with the third light outlet and is used for receiving the laser of the third light outlet, and the second beam splitter is used for receiving the laser of the fourth light outlet;
the third beam splitter is used for receiving the laser light reflected by the first reflecting mirror and the third reflecting mirror;
the laser collimation filter assembly is positioned between the laser light source and the first beam splitter along the light propagation direction and is distributed at intervals with the laser light source and the first beam splitter, and the laser collimation filter assembly comprises a first lens, a pinhole and a second lens which are sequentially distributed at intervals along the light propagation direction;
the first beam splitter has a first axis of rotation, the second beam splitter has a second axis of rotation, the third beam splitter has a third axis of rotation, the first beam splitter is rotatable about the first axis of rotation, the second beam splitter is rotatable about the second axis of rotation, and the third beam splitter is rotatable about the third beam splitter.
2. The combined phase microscopy imaging measurement system of claim 1, wherein the laser collimation filter assembly is movable along the optical path.
3. The combined phase microscopy imaging measurement system of claim 1, further comprising a third lens positioned between and spaced apart from the first and second beam splitters along a light propagation direction of the laser light source.
4. The combined phase microscopy imaging measurement system of claim 3, further comprising a fourth lens distributed along a light propagation direction of the laser light source, the fourth lens positioned between and spaced apart from the first mirror and the third beam splitter.
5. The combined phase microscopy imaging measurement system of claim 4, further comprising a fifth lens positioned between and spaced apart from the second beam splitter and the second mirror.
6. The combined phase microscopy imaging measurement system of claim 5, wherein the first lens, the second lens, the third lens, the fourth lens, and the fifth lens are all achromatic doublets.
7. The combined phase microscopy imaging measurement system of claim 1, further comprising first and second objective lenses spaced apart along a light propagation direction of the laser light source, the first and second objective lenses each positioned between and spaced apart from the second beam splitter and the first mirror.
8. The combined phase microscopy imaging measurement system of claim 7, further comprising an object under test mount positioned between and spaced apart from the first and second objective lenses.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108415230A (en) * | 2018-05-15 | 2018-08-17 | 许之敏 | A kind of novel changable coke digital holographic microscope |
| CN113219640A (en) * | 2021-05-21 | 2021-08-06 | 深圳技术大学 | Transmission-reflection type digital holographic microscopic system |
| CN115480383A (en) * | 2022-09-23 | 2022-12-16 | 允沃能源科学研究(江苏)有限公司 | Transmission-reflection type digital holographic microscope system |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108415230A (en) * | 2018-05-15 | 2018-08-17 | 许之敏 | A kind of novel changable coke digital holographic microscope |
| CN113219640A (en) * | 2021-05-21 | 2021-08-06 | 深圳技术大学 | Transmission-reflection type digital holographic microscopic system |
| CN115480383A (en) * | 2022-09-23 | 2022-12-16 | 允沃能源科学研究(江苏)有限公司 | Transmission-reflection type digital holographic microscope system |
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