CN116858797B - Mid-infrared spectrum analysis system and method based on super-surface calculation reconstruction - Google Patents
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Abstract
The embodiment of the application provides a mid-infrared spectrum analysis system and method based on super-surface calculation reconstruction, and relates to the technical field of spectrum analysis. The mid-infrared spectrum analysis system comprises a super-surface core layer, a substrate and a photoelectric detector array; the super-surface core layer and the substrate are arranged in a stacked manner, the super-surface core layer is provided with a super-surface structure array, the super-surface structure array comprises a plurality of super-surface structures, the spectral responses of the super-surface structures are different, and the spectral responses of all the super-surface structures in the super-surface structure array are gathered into a transmission matrix; the super-surface core layer is arranged above the photoelectric detector array, and the photoelectric detector array comprises a plurality of photoelectric detectors which are in one-to-one correspondence with the super-surface structures; the photoelectric detector is used for receiving optical signals generated after the mid-infrared incident light to be detected passes through the corresponding super-surface structure, and calculating and reconstructing according to the transmission matrix of the super-surface structure array and the optical signals to obtain the spectrum information of the mid-infrared incident light to be detected.
Description
Technical Field
The application relates to the technical field of spectrum analysis, in particular to a mid-infrared spectrum analysis system and method based on super-surface calculation reconstruction.
Background
Spectra are important characterization parameters for studying interactions between energy and substances, such as biochemical studies, gas composition analysis, etc. The mid-infrared band refers to an electromagnetic band with a wavelength of 2-20 mu m, and because the band has an atmospheric transparent window, and simultaneously, object thermal radiation, molecular characteristics and functional group absorption peaks are all located in the band, the mid-infrared band is widely applied to the fields of infrared thermal imaging observation, material composition analysis, free space communication and the like.
At present, most of the researches on miniature spectrometers mainly aim at visible light and near infrared spectrum ranges, and most of mid-infrared spectrometers are bench spectrometers realized by discrete components. Conventional bench top spectrometers typically rely on a combination of cumbersome and bulky dispersive optics, a long optical path, a detector array and piezo-electric moving parts. But the development of small spectrometers is more suitable for a variety of hand-held, portable and integrated applications including crop analysis, food industry line monitoring, marine science research, and the like.
While laboratory bench-top spectrometer systems offer the highest resolution and spectral range in the prior art, small optical spectrometers offer unique advantages over laboratory bench-top spectrometers, such as field and transient measurements, where portability, low power consumption and reduced size are more critical than resolution. Therefore, how to implement a small-sized and real-time mid-infrared spectrum analysis becomes a current hot spot.
Disclosure of Invention
The embodiment of the application aims to provide a mid-infrared spectrum analysis system and method based on super-surface calculation reconstruction, which can reduce the size of mid-infrared spectrum analysis and power consumption, realize real-time mid-infrared spectrum analysis and improve the technical effect of convenience.
In a first aspect, embodiments of the present application provide a mid-infrared spectrum analysis system based on subsurface computing reconstruction, including a subsurface core layer, a substrate, and a photodetector array;
the super-surface core layer and the substrate are arranged in a stacked manner, the super-surface core layer is provided with a super-surface structure array, the super-surface structure array comprises a plurality of super-surface structures, the spectral responses of the super-surface structures are different, and the spectral responses of all the super-surface structures in the super-surface structure array are gathered to form a transmission matrix;
the super-surface core layer is arranged above the photoelectric detector array, the photoelectric detector array comprises a plurality of photoelectric detectors, and the photoelectric detectors are in one-to-one correspondence with the super-surface structures; the photoelectric detector is used for receiving an optical signal generated after the mid-infrared incident light to be detected passes through the corresponding super-surface structure, and performing calculation and reconstruction according to the transmission matrix of the super-surface structure array and the optical signal to obtain the spectrum information of the mid-infrared incident light to be detected.
In the implementation process, the mid-infrared spectrum analysis system based on the super-surface calculation reconstruction introduces a super-surface structure array, wherein the super-surface structure array comprises a plurality of super-surface structures with different spectral responses; therefore, the characteristics that the super surface can introduce spatially-changed electromagnetic or optical response and the wave front is molded into any shape are utilized to design a corresponding super surface structure, so that different spectral responses of the mid-infrared incident light are realized, and different photocurrents can be obtained by the photodetector array in the mid-infrared band range; due to miniaturization of the super surface and real-time response of the detector, spectrum data of the mid-infrared incident light is obtained through transmission matrix processing, and small, ultra-fine and real-time mid-infrared spectrum analysis is realized; therefore, the mid-infrared spectrum analysis system based on the super-surface calculation reconstruction can reduce the size of mid-infrared spectrum analysis and power consumption, realize real-time mid-infrared spectrum analysis and improve the technical effect of convenience.
Further, the super-surface structure is a super-surface structure of a preset matrix grid model, the preset matrix grid model comprises a plurality of grids, and each grid is represented as an etching state and a reserved state of the super-surface structure.
Further, the shape of the super surface structure is one or more of round holes, cylinders, squares and polygons.
Further, the material of the super-surface structure is a chalcogenide material.
Further, the substrate is a medium infrared transparent dielectric substrate, and the substrate is made of one or more of calcium fluoride, barium fluoride, magnesium fluoride, silicon, sapphire and zinc oxide.
In a second aspect, an embodiment of the present application provides a mid-infrared spectrum analysis method based on a super-surface computing reconstruction, which is applied to the mid-infrared spectrum analysis system based on the super-surface computing reconstruction described in any one of the first aspect, and the mid-infrared spectrum analysis method includes:
traversing each of the subsurface structures in the subsurface core, and processing the traversed subsurface structures:
irradiating the calibrated incident light to the super-surface structure, and obtaining transmission spectrum information of the calibrated incident light after the calibrated incident light penetrates through the super-surface structure;
after traversing, obtaining a plurality of transmission spectrum information corresponding to the super-surface structures one by one;
generating a transmission matrix according to the plurality of transmission spectrum information;
integrating a super-surface structure array above a photoelectric detector array, wherein a plurality of super-surface structures in the super-surface structure array are in one-to-one correspondence with a plurality of photoelectric detectors in the photoelectric detector array;
irradiating the mid-infrared incident light to be detected to the super-surface core layer, and generating a photocurrent signal by each photoelectric detector based on the super-surface structure to obtain a plurality of photocurrent signals;
and carrying out calculation and reconstruction based on the transmission matrix and the plurality of photocurrent signals to obtain spectrum information of the mid-infrared incident light to be detected.
Further, the transmission matrix is an m-row×n-column transmission matrix, where m represents the number of super surface structures in the super surface core layer, n represents the number of sampling points for the mid-infrared incident light to be measured, and the calculation formula of the photocurrent signal is as follows:
；
wherein,I i to correspond to the firstiThe photocurrent generated by the individual super-surface structures,F(λ) Is the spectrum information of the mid-infrared incident light to be measured,λrepresented as the wavelength of light,λ 1 the wavelength of light representing the 1 st sampling point of the mid-infrared incident light to be measured,λ n representing the first infrared incident light in the testnThe wavelength of light at the individual sampling points,R i (λ) To correspond to the firstiSpectral response function of the individual subsurface structures.
Further, the step of calculating and reconstructing based on the transmission matrix and the plurality of photocurrent signals to obtain spectrum information of the mid-infrared incident light to be measured includes:
spectral information of mid-infrared incident light to be measuredF(λ) Sparse representation using basis functions asF(λ)＝β(λ)kAnd discretizing a calculation formula of the photocurrent signal to obtain a discretization formula:
；
wherein, thereinβ j (λ j ) To spread out the first light corresponding to the mid-infrared incident light to be measuredjThe basis function of the sampling points is a function of the sampling points,k j is the first one corresponding to the mid-infrared incident light to be measuredjThe correlation coefficient vector of the individual sample points,R ij (λ j ) To correspond to the firstiThe ultra-surface structure corresponds to the first infrared incident light to be measuredjSpectral response functions of the sampling points;
regularizing according to the discrete processing formula to obtain a regularized processing formula:
solving the regularization processing formula based on a preset regularization algorithm and the transmission matrix to obtain regularization parameters and related vector coefficients;
and obtaining the spectrum information of the mid-infrared incident light to be detected according to the regularization parameter, the correlation vector coefficient and the basis function.
Further, the regularization processing formula is:
；
wherein the method comprises the steps ofαIs a regularization parameter which is a function of the data,Rin order to transmit the matrix of the matrix,kas the vector of the correlation coefficient,βas a function of the basis function,Iis a photocurrent.
Further, the step of irradiating the calibrated incident light to the super-surface structure and obtaining the transmission spectrum information of the calibrated incident light after the calibrated incident light passes through the super-surface structure comprises the following steps:
and focusing and irradiating the calibrated incident light to the super-surface structure through one or more of optical lenses such as a reflector, a plano-convex lens, an objective lens and the like to obtain transmission spectrum information of the calibrated incident light after the calibrated incident light penetrates through the super-surface structure.
Additional features and advantages of the disclosure will be set forth in the description which follows, or in part will be obvious from the description, or may be learned by practice of the techniques disclosed herein.
In order to make the above objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments of the present application will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a mid-infrared spectrum analysis system based on super-surface computing reconstruction according to an embodiment of the present application;
FIG. 2 is a schematic view of the shape of a first super surface structure according to an embodiment of the present application;
FIG. 3 is a schematic view of the shape of a second type of subsurface structure provided in an embodiment of the present application;
FIG. 4 is a schematic view of the shape of a third subsurface structure according to an embodiment of the present application;
FIG. 5 is a schematic shape of a fourth subsurface structure according to an embodiment of the present application;
FIG. 6 is a schematic view of the shape of a fifth subsurface structure provided in an embodiment of the present application;
fig. 7 is a schematic flow chart of a mid-infrared spectrum analysis method based on super-surface calculation reconstruction according to an embodiment of the present application;
FIG. 8 is a schematic flow chart of another mid-IR spectrum analysis method based on super-surface computing reconstruction according to an embodiment of the present application;
fig. 9 is a schematic diagram of a spectrum reconstruction effect provided in an embodiment of the present application.
Icon: a super surface structure 101; a super surface core layer 102; a substrate 103; a photodetector array 104.
Detailed Description
The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all, of the embodiments of the present application. The components of the embodiments of the present application, which are generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, as provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, are intended to be within the scope of the present application.
In the present application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate an azimuth or a positional relationship based on that shown in the drawings. These terms are used primarily to better describe the present application and its embodiments and are not intended to limit the indicated device, element or component to a particular orientation or to be constructed and operated in a particular orientation.
Also, some of the terms described above may be used to indicate other meanings in addition to orientation or positional relationships, for example, the term "upper" may also be used to indicate some sort of attachment or connection in some cases. The specific meaning of these terms in this application will be understood by those of ordinary skill in the art as appropriate.
Furthermore, the terms "mounted," "configured," "provided," "connected," and "connected" are to be construed broadly. For example, it may be a fixed connection, a removable connection, or a unitary construction; may be a mechanical connection, or a point connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements, or components. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.
Furthermore, the terms "first," "second," and the like, are used primarily to distinguish between different devices, elements, or components (the particular species and configurations may be the same or different), and are not used to indicate or imply the relative importance and number of devices, elements, or components indicated. Unless otherwise indicated, the meaning of "a plurality" is two or more.
The embodiment of the application provides a mid-infrared spectrum analysis system and method based on super-surface calculation reconstruction, which can be applied to real-time mid-infrared spectrum analysis; the mid-infrared spectrum analysis system based on the super-surface calculation reconstruction introduces a super-surface structure array, wherein the super-surface structure array comprises a plurality of super-surface structures with different spectral responses; therefore, the characteristics that the super surface can introduce spatially-changed electromagnetic or optical response and the wave front is molded into any shape are utilized to design a corresponding super surface structure, so that different spectral responses of the mid-infrared incident light are realized, and different photocurrents can be obtained by the photodetector array in the mid-infrared band range; due to miniaturization of the super surface and real-time response of the detector, spectrum data of the mid-infrared incident light is obtained through transmission matrix processing, and small, ultra-fine and real-time mid-infrared spectrum analysis is realized; therefore, the mid-infrared spectrum analysis system based on the super-surface calculation reconstruction can reduce the size of mid-infrared spectrum analysis and power consumption, realize real-time mid-infrared spectrum analysis and improve the technical effect of convenience.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a mid-infrared spectrum analysis system based on a super-surface computing reconstruction according to an embodiment of the present application, where the mid-infrared spectrum analysis system based on the super-surface computing reconstruction includes a super-surface core layer 102, a substrate 103 and a photodetector array 104;
illustratively, the super-surface core layer 102 and the substrate 103 are stacked, and the super-surface core layer 102 is provided with a super-surface structure array, the super-surface structure array comprises a plurality of super-surface structures 101, the spectral responses of the plurality of super-surface structures 101 are different, and the spectral responses of all the super-surface structures 101 in the super-surface structure array are integrated into a transmission matrix;
illustratively, the subsurface core 102 is disposed above the photodetector array 104, the photodetector array 104 including a plurality of photodetectors in one-to-one correspondence with the plurality of subsurface structures 101; the photoelectric detector is used for receiving an optical signal generated after the mid-infrared incident light to be detected passes through the corresponding super-surface structure, and performing calculation and reconstruction according to the transmission matrix of the super-surface structure array 104 and the optical signal to obtain the spectrum information of the mid-infrared incident light to be detected.
Illustratively, the material of the super surface structure 101 is a chalcogenide material.
In some embodiments, the supersurfaces are all chalcogenide materials including, but not limited to, geSbS materials, a range of chalcogenide compounds such As2Se3, as2S3, and the like; in this application, the chalcogenide material has many advantages in the mid-infrared band, and first, the chalcogenide material has an absorption spectrum over a larger wavelength range including the mid-infrared band. This enables the chalcogenide material to be used to fabricate an optical device that covers the entire mid-infrared band. And the chalcogenide material has high nonlinear optical effect and can generate larger optical response in a middle infrared band. Finally, the sulfur-based material has high chemical stability and thermal stability, and can stably work under high temperature and severe environment. Therefore, the spectral response of the super-surface structure on the material covers the wave band range of 2um-20 um.
Illustratively, the substrate 103 is a mid-infrared transparent dielectric substrate, and the material of the substrate 103 is one or more of calcium fluoride, barium fluoride, magnesium fluoride, silicon, sapphire, and zinc oxide; in other words, the substrate may be a mid-infrared transparent medium of calcium fluoride, barium fluoride, magnesium fluoride, silicon, sapphire, zinc oxide, or the like.
Illustratively, the super surface structures on the super surface core layer 102 include, but are not limited to, round holes, cylinders, squares, polygons; optionally, a reverse design algorithm can be combined, a design target (such as that the cross-correlation coefficient of the spectral response matrix of each super-surface structure is low) is determined first, and then the structural parameters are continuously and iteratively optimized in the computing software until the optimal structure and parameters of the super-surface structure are found. The photodetector array is used for receiving photocurrent generated by light in a mid-infrared band.
Referring to fig. 2 to 6, fig. 2 is a schematic shape diagram of a first type of super surface structure provided in an embodiment of the present application, fig. 3 is a schematic shape diagram of a second type of super surface structure provided in an embodiment of the present application, fig. 4 is a schematic shape diagram of a third type of super surface structure provided in an embodiment of the present application, fig. 5 is a schematic shape diagram of a fourth type of super surface structure provided in an embodiment of the present application, and fig. 6 is a schematic shape diagram of a fifth type of super surface structure provided in an embodiment of the present application.
Illustratively, the shape of the super surface structure is one or more of a circular hole, a cylinder, a square, a polygon.
Illustratively, as shown in fig. 6, the super-surface structure is a super-surface structure of a preset matrix mesh model including a plurality of meshes, each of which is represented as an etching state and a reserved state of the super-surface structure; alternatively, black indicates etching and white indicates retention.
In some embodiments, the structural design of the hypersurface in the present invention is in addition to simple regular patterns (as shown in fig. 2-5);
optionally, in combination with a reverse engineering algorithm, the cross-correlation coefficient of the spectral response function of each super-surface structure is minimized, and specific design steps are exemplified as follows:
1. determining a design target, and defining working wavelength and optical performance;
2. then, carrying out grid division on the core layer to generate a 100 multiplied by 100 grid model, wherein grids are represented by 1 and 0, and 1 and 0 correspond to etching and reserving respectively;
3. the 100 multiplied by 100 grids are randomly distributed by 1 and 0, the simulation of physical parameters is carried out on the device, and proper optimization algorithms such as topology optimization, shape optimization, intelligent algorithm and the like are selected according to the design target and simulation result of the device; the algorithms will automatically adjust the structure and parameters of the device to achieve optimal optical performance, from which the simulation results are compared to meet the requirements of the computational reconstruction algorithm and mid-infrared band, one of which reverse-engineered supersurface structures is shown in fig. 6.
In some embodiments, the preparation method of the super-surface structure of the preset matrix grid model shown in fig. 6 is as follows:
after the optimal super-surface parameters are determined, a core layer is grown on a substrate, then the core layer is spun, a structural pattern is drawn on the chip by using an electron beam lithography technology and a computer, and then a scanning electron microscope is controlled to provide electron beams to expose the surface of a sample, so that a photoresist molecular bond of an exposed area is broken, and a new substance is generated. The inductively coupled plasma etching technique is then used to ionize the reactant gases in the etcher with a high frequency electric field to generate plasmas that react with the sample to etch the sample surface, causing the photoresist and thin films in the non-photoresist areas to be etched away. And then, the interfacial mechanical regulation or chemical reaction is utilized, and three main steps of stripping, aligning and bonding are utilized to finish the transfer of the super surface unit cell, wherein the unit cell with the super surface structure is about 1mm multiplied by 1mm, and the miniaturization requirement of the super surface unit cell is met.
Referring to fig. 7, fig. 7 is a flow chart of a mid-infrared spectrum analysis method based on super-surface computing reconstruction provided in an embodiment of the present application, and the mid-infrared spectrum analysis method based on super-surface computing reconstruction is applied to the mid-infrared spectrum analysis system based on super-surface computing reconstruction shown in fig. 1 to 6, and the method includes the following steps:
s100: traversing each of the subsurface structures in the subsurface core, and processing the traversed subsurface structures: irradiating the calibrated incident light to the super-surface structure, and obtaining transmission spectrum information of the calibrated incident light after the calibrated incident light penetrates through the super-surface structure;
s200: after traversing, obtaining a plurality of transmission spectrum information corresponding to the super-surface structures one by one;
s300: generating a transmission matrix according to the plurality of transmission spectrum information;
s400: integrating a super-surface structure array above the photoelectric detector array, wherein a plurality of super-surface structures in the super-surface structure array are in one-to-one correspondence with a plurality of photoelectric detectors in the photoelectric detector array;
s500: irradiating the mid-infrared incident light to be detected to the super-surface core layer, and generating a photocurrent signal by each photoelectric detector based on the super-surface structure to obtain a plurality of photocurrent signals;
s600: and carrying out calculation and reconstruction based on the transmission matrix and a plurality of photocurrent signals to obtain spectrum information of the mid-infrared incident light to be detected.
Referring to fig. 8, fig. 8 is a flow chart of another mid-infrared spectrum analysis method based on super-surface computing reconstruction according to an embodiment of the present application.
The transmission matrix is exemplified by m rows×n columns, where m represents the number of super surface structures in the super surface core layer, n represents the number of sampling points for the mid-infrared incident light to be measured, and the calculation formula of the photocurrent signal is:
；
wherein,I i to correspond to the firstiThe photocurrent generated by the individual super-surface structures,F(λ) Is the spectrum information of the mid-infrared incident light to be measured,λrepresented as the wavelength of light,λ 1 the wavelength of light representing the 1 st sampling point of the mid-infrared incident light to be measured,λ n representing the first infrared incident light in the testnThe wavelength of light at the individual sampling points,R i (λ) To correspond to the firstiSpectral response function of the individual subsurface structures.
Illustratively, S600: the method for obtaining the spectrum information of the mid-infrared incident light to be detected comprises the following steps of:
s610: spectral information of mid-infrared incident light to be measuredF(λ) Sparse representation using basis functions asF(λ)＝β(λ)kAnd discretizing a calculation formula for processing the photocurrent signals to obtain a discretization formula:
；
wherein, thereinβ j (λ j ) To spread out the first light corresponding to the mid-infrared incident light to be measuredjThe basis function of the sampling points is a function of the sampling points,k j is the first one corresponding to the mid-infrared incident light to be measuredjThe correlation coefficient vector of the individual sample points,R ij (λ j ) To correspond to the firstiThe ultra-surface structure corresponds to the first infrared incident light to be measuredjSpectral response functions of the sampling points;
s620: regularization processing is carried out according to a discrete processing formula, and a regularization processing formula is obtained:
s630: solving a regularization processing formula based on a preset regularization algorithm and a transmission matrix to obtain regularization parameters and related vector coefficients;
s640: and obtaining the spectrum information of the mid-infrared incident light to be detected according to the regularization parameters, the related vector coefficients and the basis function.
Illustratively, the regularization parameters are solved by combining a regularization algorithm with the transmission matrix R to obtain a relevant vector coefficient, and then the relevant vector coefficient is multiplied by a basis function to obtain the spectrum information of the mid-infrared incident light to be detected.
Illustratively, the regularization treatment formula is:
；
wherein the method comprises the steps ofαIs a regularization parameter which is a function of the data,Rin order to transmit the matrix of the matrix,kas the vector of the correlation coefficient,βas a function of the basis function,Iis a photocurrent.
Illustratively, the step of irradiating the nominal incident light to the super-surface structure and obtaining transmission spectrum information of the nominal incident light after passing through the super-surface structure comprises:
and focusing and irradiating the calibrated incident light to the super-surface structure through one or more of optical lenses such as a reflector, a plano-convex lens, an objective lens and the like to obtain transmission spectrum information of the calibrated incident light after the calibrated incident light penetrates through the super-surface structure.
In some implementation scenarios, with reference to fig. 1 to 8, the mid-infrared spectrum analysis method based on the super-surface calculation reconstruction provided in the embodiments of the present application includes the following implementation steps:
1. after the preparation of the super-surface structure is completed, the super-surface structure is required to be actually measured and calibrated, the incident light with a known spectrum is utilized to pass through optical lenses such as a reflector, a plano-convex lens, an objective lens and the like, so that the incident light is focused and irradiated to only one single super-surface structure on a chip, and the actual transmission spectrum is calibrated by combining a photoelectric detector, and the obtained transmission spectrum is compared and simulated;
2. moving the chip to enable light to traverse different positions on the irradiation chip respectively, and then transmitting actual transmission spectrums of different super-surface unit structures on the super-surface chip to a computer to form a transmission matrix;
the computer establishes a one-to-one correspondence between wavelength and spatial intensity distribution through a plurality of super-surface units with different spectral responses; after learning is completed, integrating the super-surface chip above the photodetector array;
3. the photodetectors corresponding to the different subsurface units are then calibrated to represent the photocurrent generated by each unit, corresponding to the measured photocurrentTo a computer. The time required for the measured photocurrent depends on the frame rate of the detector;
4. the set of the spectral responses of all the super-surface structure arrays in the super-surface structure array is the transmission matrix R. The transmission matrix R is m rows by n columns, m representing how many different super surface units are, n representing the number of samples of the incident light. Often the transmission matrix is underdetermined and therefore needs to be solved in combination with various types of computational reconstruction algorithms. Reconstruction of the input spectrum F (lambda) is performed by solving for a spectrum having n unknown wavesLong pointλ n And m measurementsI m Is realized by an underdetermined linear equation set.
Incident light, after passing through the super-surface chip and striking the photodetector, produces a photocurrent, which can be expressed as:
；
wherein the method comprises the steps ofIs a spectral response function of different subsurface units, < >>Is the incident spectrum, +.>Is the photocurrent generated by the corresponding super-surface unit. In the learning calibration process, a transmission matrix R, i.e. a set of spectral responses of all cells, has been obtained. Incidence spectral function->Sparse representation using different basis functions +.>(e.g., based on dictionary learning or sparse representation of a random transmission matrix such as a gaussian function), while since the system of equations is a linear system of equations, it can be discretized into the following form:
；
wherein the method comprises the steps ofFor the basis function of expansion +.>Is a correlation coefficient vector; solving the problem of the above linear equation can be reduced to the following optimization problem:
wherein the method comprises the steps ofIs a regularization parameter; then, by utilizing a regularization algorithm and deep learning and combining a transmission matrix R, measuring photocurrent I to solve the optimization problem and solve regularization parameters +.>Obtaining the correlation vector coefficient->Multiplying the basic function to obtain the spectral information of the incident light +.>；
Therefore, according to the obtained photocurrent information, spectrum information can be obtained through an algorithm, as shown in fig. 9, fig. 9 is a schematic diagram of spectrum reconstruction effect provided by the embodiment of the present application, and a comparison chart of actual incident spectrum information and reconstructed spectrum information is a case that incident light is bimodal;
the mid-infrared spectrum analysis system provided by the embodiment of the application realizes miniaturization, real-time and high-precision mid-infrared spectrum analysis.
Illustratively, compared with the traditional mid-infrared spectrometer, the mid-infrared spectrum analysis system and method provided by the embodiment of the application combine deep learning, regularization and other reconstruction algorithms, have the advantages of high detection speed, ultra-fine spectrum resolution, miniaturization and the like, can identify high resolution and rapid broad spectrum in the range of 2um-20um, and can be widely applied to gas sensing analysis and the like.
In all embodiments of the present application, "large" and "small" are relative terms, "more" and "less" are relative terms, "upper" and "lower" are relative terms, and the description of such relative terms is not repeated herein.
It should be appreciated that reference throughout this specification to "in this embodiment," "in an embodiment of the application," or "as an alternative" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the application. Thus, the appearances of the phrases "in this embodiment," "in this application embodiment," or "as an alternative embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. Those skilled in the art will also appreciate that the embodiments described in the specification are all alternative embodiments and that the acts and modules referred to are not necessarily required in the present application.
In various embodiments of the present application, it should be understood that the size of the sequence numbers of the above processes does not mean that the execution sequence of the processes is necessarily sequential, and the execution sequence of the processes should be determined by the functions and internal logic thereof, and should not constitute any limitation on the implementation process of the embodiments of the present application.
The foregoing is merely specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily think about changes or substitutions within the technical scope of the present application, and the changes and substitutions are intended to be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (5)
1. The mid-infrared spectrum analysis system based on the super-surface calculation reconstruction is characterized by comprising a super-surface core layer, a substrate and a photoelectric detector array;
the super-surface core layer and the substrate are arranged in a stacked manner, the super-surface core layer is provided with a super-surface structure array, the super-surface structure array comprises a plurality of super-surface structures, the spectral responses of the super-surface structures are different, and the spectral responses of all the super-surface structures in the super-surface structure array are gathered to form a transmission matrix;
the super-surface core layer is arranged above the photoelectric detector array, the photoelectric detector array comprises a plurality of photoelectric detectors, and the photoelectric detectors are in one-to-one correspondence with the super-surface structures; the photoelectric detector is used for receiving an optical signal generated after the mid-infrared incident light to be detected passes through the corresponding super-surface structure, and carrying out calculation and reconstruction according to the transmission matrix of the super-surface structure array and the optical signal to obtain the spectrum information of the mid-infrared incident light to be detected;
the super-surface structure is a super-surface structure of a preset matrix grid model, the preset matrix grid model comprises a plurality of grids, and each grid is represented as an etching state and a reserved state of the super-surface structure;
the material of the super-surface structure is a sulfur material;
the mid-infrared spectrum analysis system combines a reverse design algorithm to enable the cross-correlation coefficient of the spectrum response function of each super-surface structure to be the lowest, and the specific design steps are as follows:
step 1, determining a design target, and defining working wavelength and optical performance;
step 2, then carrying out grid division on the core layer to generate a 100 multiplied by 100 grid model, wherein grids are represented by 1 and 0, and 1 and 0 correspond to etching and reservation respectively;
step 3, the grids of 100 multiplied by 100 are randomly distributed by 1 and 0, the physical parameters of the device are simulated, the structure and the parameters of the device are automatically adjusted by selecting a proper optimization algorithm according to the design target and the simulation result of the device, so as to achieve the best optical performance, and the simulation result is compared, so that the requirements of a calculation reconstruction algorithm and a mid-infrared band are met;
the transmission matrix is an m-row x n-column transmission matrix, wherein m represents the number of super surface structures in a super surface core layer, n represents the number of sampling points of the infrared incident light to be detected, and a calculation formula of the photocurrent signal is as follows:
；
wherein,I i to correspond to the firstiProduction of individual super surface structuresThe generated photocurrent is used to generate a photocurrent,F(λ) Is the spectrum information of the mid-infrared incident light to be measured,λrepresented as the wavelength of light,λ 1 the wavelength of light representing the 1 st sampling point of the mid-infrared incident light to be measured,λ n representing the first infrared incident light in the testnThe wavelength of light at the individual sampling points,R i (λ) To correspond to the firstiSpectral response functions of the individual subsurface structures;
the step of calculating and reconstructing according to the transmission matrix of the super surface structure array and the optical signal to obtain the spectrum information of the mid-infrared incident light to be detected comprises the following steps:
spectral information of mid-infrared incident light to be measuredF(λ) Sparse representation using basis functions asF(λ)＝β(λ)kAnd discretizing a calculation formula of the photocurrent signal to obtain a discretization formula:
；
wherein, thereinβ j (λ j ) To spread out the first light corresponding to the mid-infrared incident light to be measuredjThe basis function of the sampling points is a function of the sampling points,k j is the first one corresponding to the mid-infrared incident light to be measuredjThe correlation coefficient vector of the individual sample points,R ij (λ j ) To correspond to the firstiThe ultra-surface structure corresponds to the first infrared incident light to be measuredjSpectral response functions of the sampling points;
regularizing according to the discrete processing formula to obtain a regularized processing formula:
solving the regularization processing formula based on a preset regularization algorithm and the transmission matrix to obtain regularization parameters and related vector coefficients;
obtaining spectrum information of the mid-infrared incident light to be detected according to the regularization parameters, the correlation vector coefficients and the basis function;
the regularization treatment formula is as follows:
；
wherein the method comprises the steps ofαIs a regularization parameter which is a function of the data,Rin order to transmit the matrix of the matrix,kas the vector of the correlation coefficient,βas a function of the basis function,Iis a photocurrent.
2. The mid-infrared spectral analysis system based on subsurface computing reconstruction of claim 1, wherein the shape of the subsurface structure is one or more of circular holes, cylinders, polygons.
3. The mid-infrared spectral analysis system based on subsurface computing reconstruction of claim 1, wherein the substrate is a mid-infrared transparent dielectric substrate and the material of the substrate is one or more of calcium fluoride, barium fluoride, magnesium fluoride, silicon, sapphire, zinc oxide.
4. A mid-infrared spectrum analysis method based on a super-surface calculation reconstruction, characterized by being applied to the mid-infrared spectrum analysis system based on a super-surface calculation reconstruction as claimed in any one of claims 1 to 3, the mid-infrared spectrum analysis method comprising:
traversing each of the subsurface structures in the subsurface core, and processing the traversed subsurface structures:
irradiating the calibrated incident light to the super-surface structure, and obtaining transmission spectrum information of the calibrated incident light after the calibrated incident light penetrates through the super-surface structure;
after traversing, obtaining a plurality of transmission spectrum information corresponding to the super-surface structures one by one;
generating a transmission matrix according to the plurality of transmission spectrum information;
integrating a super-surface structure array above a photoelectric detector array, wherein a plurality of super-surface structures in the super-surface structure array are in one-to-one correspondence with a plurality of photoelectric detectors in the photoelectric detector array;
irradiating the mid-infrared incident light to be detected to the super-surface core layer, and generating a photocurrent signal by each photoelectric detector based on the super-surface structure to obtain a plurality of photocurrent signals;
calculating and reconstructing based on the transmission matrix and the plurality of photocurrent signals to obtain spectrum information of the mid-infrared incident light to be detected;
the transmission matrix is an m-row x n-column transmission matrix, wherein m represents the number of super surface structures in a super surface core layer, n represents the number of sampling points of the infrared incident light to be detected, and the calculation formula of the photocurrent signal is as follows:
；
wherein,I i to correspond to the firstiThe photocurrent generated by the individual super-surface structures,F(λ) Is the spectrum information of the mid-infrared incident light to be measured,λrepresented as the wavelength of light,λ 1 the wavelength of light representing the 1 st sampling point of the mid-infrared incident light to be measured,λ n representing the first infrared incident light in the testnThe wavelength of light at the individual sampling points,R i (λ) To correspond to the firstiSpectral response functions of the individual subsurface structures;
and performing calculation and reconstruction based on the transmission matrix and the plurality of photocurrent signals to obtain spectrum information of the mid-infrared incident light to be detected, wherein the step comprises the following steps:
spectral information of mid-infrared incident light to be measuredF(λ) Sparse representation using basis functions asF(λ)＝β(λ)kAnd discretizing a calculation formula of the photocurrent signal to obtain a discretization formula:
；
wherein, thereinβ j (λ j ) To spread out the first light corresponding to the mid-infrared incident light to be measuredjThe basis function of the sampling points is a function of the sampling points,k j corresponding to the incidence of mid-infrared to be measuredLight firstjThe correlation coefficient vector of the individual sample points,R ij (λ j ) To correspond to the firstiThe ultra-surface structure corresponds to the first infrared incident light to be measuredjSpectral response functions of the sampling points;
regularizing according to the discrete processing formula to obtain a regularized processing formula:
solving the regularization processing formula based on a preset regularization algorithm and the transmission matrix to obtain regularization parameters and related vector coefficients;
obtaining spectrum information of the mid-infrared incident light to be detected according to the regularization parameters, the correlation vector coefficients and the basis function;
the regularization treatment formula is as follows:
；
wherein the method comprises the steps ofαIs a regularization parameter which is a function of the data,Rin order to transmit the matrix of the matrix,kas the vector of the correlation coefficient,βas a function of the basis function,Iis a photocurrent.
5. The method according to claim 4, wherein the step of irradiating the subsurface structure with the calibration incident light and obtaining the transmission spectrum information of the calibration incident light after passing through the subsurface structure comprises:
and focusing and irradiating the calibrated incident light to the super-surface structure through one or more of a reflector, a plano-convex lens and an objective lens to obtain transmission spectrum information of the calibrated incident light after the calibrated incident light penetrates through the super-surface structure.
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| CN116107100A (en) * | 2022-12-29 | 2023-05-12 | 暨南大学 | Tunable super-structured surface based on total sulfur material and construction method thereof |
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| CN110954510A (en) * | 2019-11-15 | 2020-04-03 | 温州森佰生物科技有限公司 | Nano plasma spectrum technology |
| CN115479668A (en) * | 2021-06-16 | 2022-12-16 | 北京与光科技有限公司 | Spectrum analysis device and spectrum video recording method |
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