CN110954510A - Nano plasma spectrum technology - Google Patents

Nano plasma spectrum technology Download PDF

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CN110954510A
CN110954510A CN201911121855.9A CN201911121855A CN110954510A CN 110954510 A CN110954510 A CN 110954510A CN 201911121855 A CN201911121855 A CN 201911121855A CN 110954510 A CN110954510 A CN 110954510A
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light
lspr
spectrum
photoelectric detector
nanoplasmon
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王毅
张庆文
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Wenzhou Senbai Biotechnology Co ltd
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    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity
    • G01N21/552Attenuated total reflection
    • G01N21/553Attenuated total reflection and using surface plasmons
    • G01N21/554Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance

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Abstract

The invention discloses a nano plasma spectrum technology, which comprises the following steps: the device comprises a Local Surface Plasmon Resonance (LSPR) super array chip, a photoelectric detector and a calculation module; the light to be measured is irradiated on the LSPR super-array chip, is absorbed and filtered by the transmission units at different positions on the chip and is collected by the photoelectric detector at corresponding positions, the light intensity data sets at different positions are recorded by the calculation module, and the spectrum of the light to be measured is reconstructed by an algorithm. The method can adjust the spectral resolution and spectral range of detection without depending on the traditional dispersive optical device, thereby achieving the effect of improving the spectral resolution and the detection range while the volume is reduced, and the structural design is very simple. The LSPR chip has high industrialization degree and good chemical stability, is very suitable for batch production and wide application, and greatly reduces the cost.

Description

Nano plasma spectrum technology
Technical Field
The invention relates to the technical field of spectrum sensing, in particular to a nano plasma spectrum technology.
Background
The traditional spectral analysis technique is to separate the light to be measured in space or time by a grating or a narrow-band filter. The spectrometers implemented by the grating are classified into two types, one is a spectrometer based on a diffraction grating, and the incident light can be spatially separated by using the diffraction effect when the light passes through the grating. The other type is a spectrometer based on interference effect, materials with different refractive indexes are processed into a layered structure, so that the reflected light of incident light on the upper surface and the lower surface of a medium forms interference, and the interference phenomenon of light with different wavelengths is obtained by adjusting the optical path difference, so that the spectral information of the incident light is obtained. The spectrometer using the narrow-band filter is generally based on the adjustable narrow-band filter, signal light can be separated in time, and the intensity of light with different wavelengths can be obtained at different moments by adjusting the transmission frequency of the filter, so that the effect of the spectrometer is achieved.
Most of the novel spectrometers implement the analysis of spectral information based on broadband filters and algorithms. The two types of spectrometers are generally classified into two types, in which a spatial light modulator is used to implement a plurality of hadamard matrices for regulating and controlling light paths, and spectral information of incident light can be calculated by combining received optical signals and related algorithms. Another class is spectrometers based on broadband filter films of quantum dots or organic dye arrays. The spectrum is reconstructed by integrating a plurality of different photosensitive materials to carry out broadband filtering and combining a related algorithm.
However, although the conventional diffraction grating spectrometer has powerful analysis function and high measurement accuracy and spectral resolution, certain parameter balance exists between the volume size and the resolution and between the measurement spectral ranges, and the mutual restriction between the parameters makes the conventional diffraction grating spectrometer incapable of being further optimized. In addition, the processing difficulty of the spectrometer based on the interference effect is very high, and the measurable spectral range is small, so that a device needs to be prepared again when spectral information of different wave bands is measured, and the use scene of the spectrometer is very limited. Finally, the spectral measurement range of the spectrometer based on the tunable narrowband optical filter is limited by the dynamic range of the filter, so that the spectral measurement with high bandwidth is difficult to realize, and the optical filter in the spectrometer enables the light transmittance of incident light to be very low and the use efficiency of signal light to be low. In a novel spectrometer, the spectrometer based on Hadamard transform comprises a plurality of systems such as a light splitting system, a light modulation system and a calculation algorithm, and the complex system structure basically cannot be practically applied. The spectrometer based on the broadband filtering film of the quantum dot or organic dye array can simultaneously improve the spectral measurement range and the spectral resolution by increasing the types of the constituent materials. Although the problem of mutual restriction among diffraction grating spectrometer parameters is solved, the synthesis process is very complex, unnecessary fluorescence noise is possibly generated, the preparation and packaging difficulty is high, the chemical stability is high, and the mass production and the application are very unfavorable.
Therefore, how to develop a spectrometer with small size, high resolution, large measurement range (bandwidth), high weak light sensitivity, simple structure and low manufacturing cost is a problem that needs to be solved by those skilled in the art.
Disclosure of Invention
In view of the above, the present invention provides a nano-plasma spectroscopy technology, wherein the related LSPR technology is a localized surface plasmon resonance technology, and has a very strong selective absorption function for photon energy.
In order to achieve the purpose, the invention adopts the following technical scheme:
a nanoplasmon spectroscopy technique comprising: the LSPR super array chip comprises an LSPR super array chip, a photoelectric detector and a calculation module;
the LSPR super array chip is arranged in parallel with the photoelectric detector, and the photoelectric detector is connected with the computing module;
the LSPR super array chip comprises light response units with different absorption spectra, wherein the light response units are used for absorbing and filtering light rays;
the photoelectric detector is used for acquiring a light intensity data set of light to be detected after the light to be detected penetrates through the light response units at different positions;
and the calculation module is used for receiving and processing the light intensity data set collected by the photoelectric detector and reconstructing a spectrum of light to be measured.
Preferably, the material of the light response unit is a metal thin film having an LSPR effect.
Preferably, the structure of the light response unit is at least one or two combinations of a nanopore array or a nanoparticle array.
Preferably, the purpose of enabling different photoresponsive units to have different absorption spectra is achieved by adjusting the constituent materials of the nanopores or the particle arrays of the photoresponsive units, the sizes, the distribution densities and the surface modifications of the nanopores or the nanoparticles.
Preferably, the purpose of adjusting the resolution and the measurement range of the nano plasma spectrometer is achieved by adjusting the arrangement combination and the coverage range of the absorption spectrum of the light response unit in the LSPR super array chip.
A photometry method of a nano plasma spectrum technology comprises the following specific steps:
the light to be measured is irradiated on the LSPR super-array chip, is absorbed and filtered by each light response unit at different positions on the chip, and is collected by the photoelectric detector at the corresponding position, the light intensity data sets at different positions are recorded by the calculation module, and the spectrum of the light to be measured is reconstructed by an algorithm.
Preferably, the algorithm for reconstructing the spectrum uses the following calculation formula:
Figure BDA0002275661530000031
wherein S (λ) is the spectrum of any incident light, specifically a light intensity curve as a function of wavelength λ; t isi(λ) is the transmission spectrum of the photoresponsive cell i, in particular the transmission intensity curve as a function of the wavelength λ; i isiIs the sum of the intensities of light transmitted through the photo-responsive element i as measured by the photo-detector.
Preferably, the method of optimizing the reconstructed spectrum includes, but is not limited to, neural network algorithms, deep learning, and machine learning methods.
Compared with the prior art, the invention discloses a nano-plasma spectroscopy technology, wherein the related LSPR technology is a local surface plasmon resonance technology. The nanometer plasma spectrum technology adopts an LSPR super array chip to split a light to be measured in a two-dimensional space, and then an algorithm is used for later reconstruction, so that the spectrum of the light to be measured is obtained.
The invention can obtain the photoresponse units with different absorption spectra by adjusting the constituent materials, the sizes, the space density, the surface modification and the like of the LSPR metal nanostructure array. And then, the spectral resolution and the spectral range of detection are adjusted by selecting a super-array chip consisting of different photoresponse units and the coverage range of the absorption spectrum of the super-array chip. Therefore, the invention does not depend on the traditional dispersive optical device, thereby achieving the effect of improving the spectral resolution and the detection range while reducing the volume. In addition, compared with a narrow-band filter, the LSPR super-array chip can more effectively collect spectral information of light to be detected in a unit area, so that the sensitivity of the technology to weak light detection is improved. More particularly, the device of the whole technology is composed of an LSPR super array chip and a photoelectric detector, and the structural design is very simple. The LSPR chip has high industrialization degree and good chemical stability, is very suitable for batch production and wide application, and greatly reduces the cost.
Aiming at the application aspect, the spectrometer disclosed by the invention has small volume, high flexibility and low manufacturing cost of industrial mass production, and can be widely applied to various industries, such as the fields of environmental monitoring, industrial control, chemical analysis, food quality detection, material analysis, clinical examination, aerospace remote sensing, scientific education and the like. Therefore, a brand new dimension is added for the information acquisition of the society and people in China, and the acquisition of big data and the development of artificial intelligence analysis can be greatly promoted.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Figure 1 the accompanying drawing is a schematic structural view provided by the present invention,
the system comprises a 1-LSPR super array chip, a 2-photodetector and a 3-photoresponse unit, wherein the LSPR super array chip is connected with a light source;
FIG. 2 is a schematic diagram of an LSPR super array chip according to the present invention;
FIG. 3 is a graph showing absorption spectra of various photoresponsive elements provided by the present invention;
FIG. 4 is a flow chart of the optical detection provided by the present invention;
FIG. 5 is a schematic diagram of a computing module provided by the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the invention discloses a nano plasma spectrum technology, which comprises the following steps: the LSPR super array chip comprises an LSPR super array chip 1, a photoelectric detector 2 and a calculation module;
as shown in fig. 1, an LSPR super array chip 1 and a photodetector 2 are arranged in parallel, and the photodetector 2 is connected with a computing module;
the LSPR super array chip 1 comprises light response units 3 with different absorption spectra, wherein the light response units 3 are used for absorbing and filtering light;
the photoelectric detector 2 is used for acquiring a light intensity data set of light to be detected after the light to be detected penetrates through the light response units 3 at different positions;
and the calculation module is used for receiving and processing the light intensity data set collected by the photoelectric detector 2 and reconstructing a spectrum of light to be detected.
It should be noted that: the photodetector 2 may also be a miniature photodetector array. The conversion material of the photodetector 2 may also be replaced by other novel photoelectric materials, such as perovskite (perovskite), carbon dots, quantum dots, carbon nanotubes, graphene, surface plasmon materials, and the like.
Further, the material of the transmission unit is a metal thin film having an LSPR effect, such as gold nanoparticles/rods/discs, other metal thin films, and the like.
Further, the structure of the light response unit 3 is at least one of a nanopore array or a nanoparticle array or a combination of the two, as shown in fig. 2. The photoresponsive elements 3 can be made in other non-arrayed ways, such as strips, discs, 3D structures, etc., with the detection taking place rapidly one by one with the aid of photodetectors.
Further, the purpose of making different light response units 3 have different absorption spectra is achieved by adjusting the constituent materials of the nanopore or particle array, the size, distribution density, and surface modification of the nanopores or particles, as shown in fig. 3.
Furthermore, the purpose of adjusting the resolution and the measurement range of the nano plasma spectrometer is achieved by adjusting the arrangement and the coverage range of the absorption spectrum of the photoresponse unit 3 in the LSPR super array chip 1.
A photometry method of nano-plasma spectroscopy, as shown in fig. 4, includes the following steps:
the light to be measured is irradiated on the LSPR super-array chip 1, is absorbed and filtered by each transmission unit at different positions on the chip, and is collected by the photoelectric detector 2 at corresponding positions, the light intensity data sets at different positions are recorded by the calculation module, and the spectrum of the light to be measured is reconstructed by an algorithm.
It should be noted that: the optical path mode can be made into a reflection optical path mode instead of a transmission optical path mode. The LSPR super array chip 1 may exist in a built-in configuration mode independent of the photodetector 2 or camera, etc.
Further, as shown in fig. 5, the algorithm for reconstructing the spectrum uses the following calculation formula:
Figure BDA0002275661530000061
wherein S (λ) is the spectrum of any incident light, specifically a light intensity curve as a function of wavelength λ; t isi(λ) is the transmission spectrum of the transmission cell i, specifically the transmission intensity curve as a function of the wavelength λ; i isiIs the sum of the intensities of light transmitted through the transmission cell i measured by the photodetector 2.
It should be noted that: in actual practice, I cannot be infinitely large (i.e., I)iNot infinite) and is accompanied by systematic noise, it is necessary to ultimately obtain a reconstructed spectrum according to a linear least squares regression or other mathematical algorithm model.
Further, the method for optimizing the reconstructed spectrum at least further comprises a neural network algorithm, deep learning and machine learning.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (8)

1. A nanoplasmon spectroscopy technique comprising: the system comprises an LSPR super array chip (1), a photoelectric detector (2) and a calculation module;
the LSPR super array chip (1) and the photoelectric detector (2) are arranged in parallel, and the photoelectric detector (2) is connected with the computing module;
the LSPR super array chip (1) comprises light response units (3) with different absorption spectra, wherein the light response units (3) are used for absorbing and filtering light rays;
the photoelectric detector (2) is used for collecting light intensity data sets of light to be detected after the light penetrates through the light response units (3) at different positions;
and the computing module is used for receiving and processing the light intensity data set collected by the photoelectric detector (2) and reconstructing a spectrum of light to be detected.
2. A nanoplasmon spectroscopy as claimed in claim 1, wherein the material of said photo-responsive element (3) is a metal film with LSPR effect.
3. A nanoplasmon spectroscopy as claimed in claim 1, wherein said photo-responsive element (3) is structured as at least one or a combination of a nanopore array or a nanoparticle array.
4. A nanoplasmon spectroscopy as claimed in claim 3, wherein the different light-responsive units (3) have different absorption spectra by adjusting the constituent materials of said light-responsive units (3), the size, distribution density and surface modification of nanopores or nanoparticles.
5. The nanoplasmon spectroscopy technique as claimed in claim 1, wherein the purpose of adjusting the resolution and measurement range of the nanoplasmon spectrometer is achieved by adjusting the arrangement combination and coverage of the absorption spectrum of the photoresponsive cell (3).
6. A photometry method of a nano plasma spectrum technology is characterized in that light to be measured is irradiated onto an LSPR super array chip (1), absorbed and filtered by each photoresponse unit (3) at different positions on the chip, collected by a photoelectric detector (2) at corresponding positions, recorded in light intensity data sets at different positions through a calculation module, and used for reconstructing a spectrum of the light to be measured through an algorithm.
7. A photometry method of nanoplasmon spectroscopy as claimed in claim 6, wherein the algorithm for reconstructing the spectrum uses the following calculation:
Figure FDA0002275661520000011
wherein S (λ) is the spectrum of any incident light, specifically a light intensity curve as a function of wavelength λ; t isi(λ) is the transmission spectrum of said photoresponsive element (3) i, in particular the transmission intensity curve as a function of the wavelength λ; i isiIs the sum of the intensities of light transmitted through the light-responsive unit (3) i as measured by the photodetector (2).
8. The photometric method according to nanoplasmon spectroscopy of claim 6 wherein the method of optimizing the reconstructed spectra includes but is not limited to neural network algorithms, deep learning and machine learning methods.
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111854949A (en) * 2020-07-27 2020-10-30 清华大学 Weak light spectrum detection chip and weak light spectrum detection method
CN112017867A (en) * 2020-08-26 2020-12-01 北京科技大学 Electric signal output element with spectral resolution capability and method
CN112505021A (en) * 2020-11-11 2021-03-16 温州医科大学 Nano plasma spectral imaging method, device and instrument
WO2021093220A1 (en) * 2019-11-14 2021-05-20 量准(上海)医疗器械有限公司 Biological detection device and detection method using gold nanopore array chip
CN114354512A (en) * 2021-12-14 2022-04-15 之江实验室 Quantum dot thin film spectrum detection instrument and application method thereof
CN116858797A (en) * 2023-09-04 2023-10-10 中山大学 Mid-infrared spectrum analysis system and method based on super-surface calculation reconstruction
CN112505021B (en) * 2020-11-11 2024-10-25 温州医科大学 Nanometer plasma spectrum imaging method, device and instrument

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CN105628199A (en) * 2014-10-26 2016-06-01 中国科学院重庆绿色智能技术研究院 Chip spectrograph with sub-wavelength metal structure
CN106768331A (en) * 2016-12-22 2017-05-31 陈明烨 Quantum dot array spectrum sensor
CN109642822A (en) * 2016-08-22 2019-04-16 三星电子株式会社 Spectrometer and the spectral measurement method for utilizing it

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Publication number Priority date Publication date Assignee Title
CN105628199A (en) * 2014-10-26 2016-06-01 中国科学院重庆绿色智能技术研究院 Chip spectrograph with sub-wavelength metal structure
CN109642822A (en) * 2016-08-22 2019-04-16 三星电子株式会社 Spectrometer and the spectral measurement method for utilizing it
CN106768331A (en) * 2016-12-22 2017-05-31 陈明烨 Quantum dot array spectrum sensor

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021093220A1 (en) * 2019-11-14 2021-05-20 量准(上海)医疗器械有限公司 Biological detection device and detection method using gold nanopore array chip
CN111854949A (en) * 2020-07-27 2020-10-30 清华大学 Weak light spectrum detection chip and weak light spectrum detection method
CN112017867A (en) * 2020-08-26 2020-12-01 北京科技大学 Electric signal output element with spectral resolution capability and method
CN112017867B (en) * 2020-08-26 2021-11-09 北京科技大学 Electric signal output element with spectral resolution capability and method
CN112505021A (en) * 2020-11-11 2021-03-16 温州医科大学 Nano plasma spectral imaging method, device and instrument
CN112505021B (en) * 2020-11-11 2024-10-25 温州医科大学 Nanometer plasma spectrum imaging method, device and instrument
CN114354512A (en) * 2021-12-14 2022-04-15 之江实验室 Quantum dot thin film spectrum detection instrument and application method thereof
CN116858797A (en) * 2023-09-04 2023-10-10 中山大学 Mid-infrared spectrum analysis system and method based on super-surface calculation reconstruction
CN116858797B (en) * 2023-09-04 2024-01-19 中山大学 Mid-infrared spectrum analysis system and method based on super-surface calculation reconstruction

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Application publication date: 20200403