CN210376122U - Light modulation micro-nano structure and micro-integrated spectrometer - Google Patents
Light modulation micro-nano structure and micro-integrated spectrometer Download PDFInfo
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Abstract
The utility model relates to a spectral equipment technical field especially relates to a structure and little integrated spectrum appearance are received to photomodulation. The light modulation micro-nano structure comprises a light modulation layer positioned on a photoelectric detection layer, wherein the light modulation layer can modulate incident light, so that differential response is formed on the photoelectric detection layer, an original spectrum is conveniently reconstructed, and the defects that the existing spectrometer is too dependent on a precise optical component to make the spectrometer bulky, heavy and expensive are overcome. The light modulation layer comprises a bottom plate and at least one modulation unit, the bottom plate is arranged on the photoelectric detection layer, each modulation unit is located on the bottom plate, a plurality of modulation holes penetrating through the bottom plate are formed in each modulation unit respectively, each modulation hole in the same modulation unit is arranged into a two-dimensional graph structure with a specific arrangement rule, the modulation effect on light with different wavelengths is achieved by utilizing different two-dimensional graph structures, and the analysis accuracy of the spectrometer is improved.
Description
Technical Field
The utility model relates to a spectral equipment technical field especially relates to a structure and little integrated spectrum appearance are received to photomodulation.
Background
A spectrometer is an instrument that obtains spectral information. The spectrum carries abundant information, can be used for material identification, detection and analysis, and is widely applied to the fields of agriculture, biology, chemistry, astronomy, medical treatment, environmental detection, semiconductor industry and the like.
According to the working principle, the existing commercial spectrometers can be divided into two types: monochromator based and fourier transform based. The method specifically comprises the following steps: based on the principle of a monochromator, light with different wavelengths is spatially separated through a grating, and then the light with different wavelengths is filtered out through a slit and detected by a photosensitive element; the Fourier transform principle is that light is divided into two beams, interference is carried out after the light passes through different optical paths, and Fourier transform is carried out on an interference spectrum to obtain an original spectrum.
Both of the above-mentioned prior art spectrometers suffer from the following problems: on the one hand, both types of spectrometers require precision moving beam splitting components, such as gratings, prisms, slits or mirrors, and the requirement for these precision optical components makes the spectrometers bulky, heavy and expensive. In a second aspect, the optical components of the spectrometer must be kept extremely clean and perfectly aligned to ensure product quality, which makes the spectrometer expensive to manufacture and the instrument very delicate, and in the event of a loss of alignment of the optical components, makes repair very complicated, resulting in high maintenance costs. In a third aspect, the higher the accuracy of both types of spectrometers, the longer the required path of light, the more internal space is required, making it difficult to apply them to consumer-grade portable devices.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
The embodiment of the utility model provides a structure and little integrated spectrum appearance are received to photomodulation is received a little to the incident light is received to photomodulation to solve current spectrum appearance and too rely on accurate optical component and make the spectrum appearance bulky, very heavy and expensive defect.
(II) technical scheme
In order to solve the technical problem, the utility model provides a light modulation receives structure a little, including being located the light modulation layer on the photoelectric detection layer, the light modulation layer includes bottom plate and at least one modulation unit, the bottom plate is established on the photoelectric detection layer, each the modulation unit is located on the bottom plate, every be equipped with respectively in the modulation unit a plurality of wear in modulation hole in the bottom plate, it is same each in the modulation unit the modulation hole is arranged into a two-dimensional graph structure that has the specific law of arranging.
In some embodiments, the specific arrangement rule of the two-dimensional graph structure includes:
all the modulation holes in the same two-dimensional graph structure have the same specific cross section shape at the same time, and the modulation holes are arrayed according to the size gradient sequence of the structural parameters; and/or
And each modulation hole in the same two-dimensional graph structure has a specific cross section shape, and the modulation holes are combined and arranged according to the specific cross section shape.
In some embodiments, the structural parameters of the modulation hole comprise an inner diameter, a length of a long axis, a length of a short axis, a rotation angle, a side length or an angle number; the specific cross-sectional shape of the modulation hole includes a circle, an ellipse, a cross, a regular polygon, a star, or a rectangle.
In some embodiments, when the modulation holes are combined and arranged according to a specific cross-sectional shape, the arrangement order is arranged row by row or column by column according to a preset periodic order.
In some embodiments, the bottom of the modulation hole penetrates the bottom plate or does not penetrate the bottom plate.
In some embodiments, the light modulation layer is directly formed on the photodetection layer, the light modulation layer is formed by deposition or etching on the basis of a substrate, and the substrate is located on the photodetection layer; or transferring the prepared light modulation layer to the photoelectric detection layer.
The utility model also provides a little integrated spectrum appearance, this little integrated spectrum appearance includes:
the light modulation micro-nano structure is used for performing light modulation on incident light to obtain a modulated spectrum;
the photoelectric detection layer is positioned below the light modulation micro-nano structure and used for receiving the modulated spectrum and providing differential response to the modulated spectrum;
and the signal processing circuit layer is positioned below the photoelectric detection layer and used for reconstructing the differential response to obtain an original spectrum.
In some embodiments, the micro-integrated spectrometer further comprises:
and the light-transmitting medium layer is positioned between the light modulation micro-nano structure and the photoelectric detection layer.
In some embodiments, the photoelectric detection layer includes at least one detection unit, each micro-light modulation unit of the light modulation micro-nano structure is correspondingly arranged on at least one detection unit, and all the detection units are electrically connected through the signal processing circuit layer.
(III) advantageous effects
The above technical scheme of the utility model following beneficial effect has:
1. the utility model discloses an optical modulation micro-nano structure is including being located the optical modulation layer on the photoelectric detection layer, the optical modulation layer can modulate the incident light, thereby form the difference response on the photoelectric detection layer, so that the reconsitution obtains former spectrum, utilize this optical modulation micro-nano structure can replace various accurate optical component in the current spectrum appearance, thereby realize the applied type of the spectrum appearance in the micro-nano structure field, make little integrated spectrum appearance can be at the condition that does not need the grating, the prism, speculum or other similar space beam splitting component work, it too relies on accurate optical component and makes the spectrum appearance bulky to have solved current spectrum appearance, very heavy and expensive defect.
2. This light modulation layer includes bottom plate and at least one modulation unit, the bottom plate is established on the photoelectric detection layer, each modulation unit is located the bottom plate, be equipped with the modulation hole that a plurality of wore in the bottom plate in every modulation unit respectively, each modulation hole in same modulation unit is arranged into a two-dimensional graph structure that has specific rule of arranging, utilize the modulation effect of different two-dimensional graph structures realization to the light of different wavelengths, this modulation effect includes but not limited to scattering of light, absorption, throw, reflection, interfere, surface plasmon polariton and resonance etc. effect, the difference that utilizes two-dimensional graph structure can also improve spectral response's difference between the different regions, thereby improve the analytical accuracy of spectrum appearance.
3. The problems of precise alignment and the like do not need to be considered for each modulation unit in the optical modulation layer, a spectrometer made based on the optical modulation micro-nano structure can ensure high precision, the optical path does not need to be increased, the internal structure of the spectrometer does not need to be over-large, the micro-integrated spectrometer is more convenient to use, adverse effects on the measurement precision of the spectrometer cannot be caused, the size of the spectrometer can be reduced to the level of a chip, the performance is stable, and the cost is reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an optical modulation micro-nano structure according to a first embodiment of the present invention;
fig. 2 is a cross-sectional view of an optical modulation micro-nano structure according to a first embodiment of the present invention;
fig. 3 is a schematic structural diagram of a light modulation layer according to a first embodiment of the present invention;
fig. 4 is a schematic structural diagram of a photodetection layer according to a first embodiment of the present invention;
fig. 5 is a diagram of the spectrum detection effect of the first embodiment of the present invention;
fig. 6 is a schematic structural view of a light modulation layer according to a second embodiment of the present invention;
fig. 7 is a schematic structural diagram of an optical modulation micro-nano structure according to a third embodiment of the present invention;
fig. 8 is a cross-sectional view of an optical modulation micro-nano structure according to a third embodiment of the present invention;
fig. 9 is a schematic structural diagram of an optical modulation micro-nano structure according to a third embodiment of the present invention;
fig. 10 is a schematic diagram of the relationship between the spectral detection wavelength intensities according to the third embodiment of the present invention;
fig. 11 is a diagram of the spectrum detection effect of the third embodiment of the present invention;
fig. 12 is a cross-sectional view of an optical modulation micro-nano structure according to a fourth embodiment of the present invention;
fig. 13 is a cross-sectional view of an optical modulation micro-nano structure according to a sixth embodiment of the present invention;
fig. 14 is a cross-sectional view of an optical modulation micro-nano structure according to a seventh embodiment of the present invention;
fig. 15 is a schematic structural view of a light modulation layer according to a seventh embodiment of the present invention;
fig. 16 and 17 are schematic process diagrams of a method for manufacturing an optical modulation micro-nano structure according to an eighth embodiment of the present invention, respectively.
Wherein, 1' is a substrate; 1. a light modulation layer; 2. a photodetection layer; 3. a signal processing circuit layer; 4. a light-transmitting medium layer; 5. a modulation unit; 6. a micro-nano well; 7. a detection unit; 8. a gap; 11. a first modulation unit; 12. a second modulation unit; 13. a third modulation unit; 14. a fourth modulation unit; 15. a fifth modulation unit;
Detailed Description
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention. Unless otherwise stated, the micro-nano structure mentioned in the present invention is an abbreviation of the optical modulation micro-nano structure.
The embodiments of the utility model provide an optical modulation micro-nano structure, this micro-nano structure can replace the accurate optical component in the spectrum appearance to realize the accurate modulation to the incident light; the light modulation micro-nano structure can be used for flexibly realizing the modulation effect on light with different wavelengths, the modulation effect comprises but is not limited to the effects of light scattering, absorption, projection, reflection, interference, surface plasmon polariton, resonance and the like, and the difference of spectral response among different areas is improved, so that the analysis precision of a spectrometer is improved.
The light modulation micro-nano structure of the embodiment comprises a light modulation layer 1 positioned on a photoelectric detection layer 2, and the light modulation layer 1 can perform the above modulation effect on incident light. The modulation holes 6 in the same modulation unit 5 on the light modulation layer 1 are arranged into a two-dimensional graph structure with a specific arrangement rule, the modulation effect on light with different wavelengths is realized by using different two-dimensional graph structures, and the difference of spectral response among different regions can be improved by using the difference of the two-dimensional graph structures, so that the analysis precision of the spectrometer is improved.
Based on this micro-nano structure, this the utility model discloses each embodiment still provides a little integrated spectrum appearance. The spectrometer comprises a light modulation micro-nano structure, a photoelectric detection layer 2 and a signal processing circuit layer 3. The spectrometer can modulate incident light by utilizing the light modulation layer 1 of the light modulation micro-nano structure, thereby forming differential response on the photoelectric detection layer 2, facilitating reconstruction to obtain an original spectrum, replacing various precise optical components in the existing spectrometer by utilizing the light modulation micro-nano structure, realizing the application type of the spectrometer in the field of the micro-nano structure, enabling the micro-integrated spectrometer to work under the condition of not needing a grating, a prism, a reflecting mirror or other similar space light splitting elements, and solving the defects that the existing spectrometer is too dependent on the precise optical components to enable the spectrometer to be large in size, heavy and expensive.
The micro-nano structure and the micro-integrated spectrometer of the present invention are described in detail by a plurality of embodiments below.
Example one
As shown in fig. 1, in the micro-integrated spectrometer provided in this embodiment, the light modulation layer 1 on the light modulation micro-nano structure includes a modulation unit 5. All the modulation holes 6 in the modulation unit 5 penetrate the bottom plate. All the modulation holes 6 in the modulation unit 5 have the same specific cross-sectional shape, which is an example of an ellipse in fig. 1 in this embodiment. All the modulation holes 6 are arranged in an array according to the size gradient sequence of the structural parameters to form a two-dimensional graph structure. In the two-dimensional graph structure, all the modulation holes 6 are arranged in an array, and all the modulation holes 6 are arranged row by row and column by column according to the length of the long axis, the length of the short axis and the rotation angle from small to large, so that all the modulation holes 6 integrally form a modulation unit 5 on the bottom plate of the light modulation layer 1.
It can be understood that, as shown in fig. 3, all the modulation holes 6 of the present embodiment are arranged according to the same arrangement rule, that is, the modulation holes 6 are gradually arranged row by row from small to large according to the structural parameters of the length of the long axis, the length of the short axis, and the rotation angle, so that all the modulation holes 6 on the light modulation layer 1 can be regarded as an integral modulation unit 5, or can be arbitrarily divided into a plurality of modulation units 5, and the arbitrarily divided modulation units 5 have different modulation effects on the spectrum, and theoretically, infinite groups of modulated spectrum samples can be obtained, thereby sharply increasing the data amount for reconstructing the original spectrum, and facilitating the recovery of the spectrum pattern of the broadband spectrum. The effect of the modulation of light of different wavelengths by each modulation cell 5 may be determined according to the characteristics of the structural parameters of the modulation aperture 6 in that modulation cell 5.
It is understood that the specific cross-sectional shape of the modulation hole 6 includes a circle, an ellipse, a cross, a regular polygon, a star, a rectangle, etc., and any combination of the above shapes may be used. Correspondingly, the structural parameters of the modulation hole 6 include an inner diameter, a length of a long axis, a length of a short axis, a rotation angle, an angle number or a side length, and the like.
In this embodiment, the thickness of the bottom plate of the light modulation layer 1 is 60nm to 1200nm, and the light modulation layer 1 and the photodetection layer 2 are directly connected or connected through the transparent dielectric layer 4. The photoelectric detection layer 2 is electrically connected with the signal processing circuit layer 3. As shown in fig. 3, all the modulation holes 6 on the optical detection layer are elliptical, the lengths of the major axes and the minor axes of all the elliptical modulation holes 6 are respectively increased row by row, and the horizontal direction in fig. 3 is taken as the horizontal axis, and the vertical direction is taken as the vertical axis, so that all the elliptical modulation holes 6 rotate row by row from the vertical axis to the horizontal axis, and the rotation angle thereof is gradually increased. All the modulation holes 6 constitute an integral two-dimensional pattern structure which is integrally a matrix structure having an area in the range of 5 μm2～4cm2。
In the manufacturing of the optical modulation micro-nano structure, silicon-based materials are selected as the materials of the optical modulation layer 1 and the photoelectric detection layer 2, so that the optical modulation micro-nano structure has good compatibility in the processing of the preparation process. When the light modulation layer 1 is prepared, the light modulation layer 1 may be directly formed on the photodetection layer 2, or the prepared light modulation layer 1 may be transferred to the photodetection layer 2.
Specifically, the direct generation method of the light modulation layer 1 specifically includes: directly depositing and generating a light modulation layer 1 arranged according to the structure shown in fig. 3 on the photoelectric detection layer 2; or a substrate made of a silicon-based material is mounted on the photoelectric detection layer 2, and then micro-nano machining is performed on the substrate according to the structure shown in fig. 3, so that the light modulation layer 1 is obtained.
The process of the direct deposition growth comprises the following steps: firstly, depositing a silicon flat plate with the thickness of 100 nm-400 nm on the photoelectric detection layer 2 by methods of sputtering, chemical vapor deposition and the like. And secondly, drawing a required two-dimensional graph structure on the graph by using a graph transfer method such as photoetching, electron beam exposure and the like, wherein the structure is shown as figure 3. The two-dimensional graph structure specifically comprises: only the minor axis and the rotation angle of the elliptical modulation hole 6 are gradually adjusted, and the major axis of the ellipse is selected from a fixed value of 200 nm-1000 nm, such as 500 nm; the length of the minor axis varies within a range of 120nm to 500nm, the rotation angle of the ellipse varies within a range of 0 to 90 DEG, and the arrangement period of the ellipse is a constant value within a range of 200nm to 1000nm, for example, 500 nm. The overall pattern range of the two-dimensional pattern structure is about a rectangular array structure with a length of 115 μm and a width of 110 μm. And thirdly, etching the silicon flat plate by methods such as reactive ion etching, inductively coupled plasma etching, ion beam etching and the like to obtain the required light modulation layer 1. Finally, the light modulation layer 1 and the photodetection layer 2 are electrically connected to the signal processing circuit layer 3 as a whole.
Further, this embodiment provides a preparation process of another photomodulated micro-nano structure, which specifically includes: and a III-V group detector, specifically a GaAs/InGaAs quantum well detector, is arranged in the photoelectric detection layer 2. As shown in fig. 16, a detector comprising a GaAs substrate 1' and an InGaAs quantum well photodetection layer 2 is flip-chip bonded on a CMOS circuit. As shown in fig. 17, the substrate 1 'is directly thinned, and then micro-nano processing is performed on the substrate 1' to form a two-dimensional pattern structure, thereby forming the light modulation layer 1. The difference between the preparation process and the micro-nano processing tapping is that the upper surface of a photoelectric detection layer 2 consisting of a detector is directly used as a substrate 1' for Weiner processing, so that the tight connection between the processed and prepared light modulation layer 1 and the photoelectric detection layer 2 is ensured, and the effect of light modulation effect influenced by gaps is avoided.
The transfer preparation method of the light modulation layer 1 specifically includes: firstly, a hole is formed on a substrate through micro-nano processing according to the structure shown in fig. 3 to obtain a prepared light modulation layer 1, and then the prepared light modulation layer 1 is transferred to a photoelectric detection layer 2. Specifically, the process of the transfer method of the light modulation layer 1 is: firstly, preparing the light modulation layer 1 on a silicon chip or an SOI (silicon-on-insulator-silicon chip) according to the parameters, then transferring the light modulation layer 1 to the photoelectric detection layer 2 by a transferring method, and finally electrically connecting the light modulation layer 1 and the photoelectric detection layer 2 to the signal processing circuit layer 3.
It can be understood that the light modulation micro-nano structure capable of modulating light according to the embodiment includes, but is not limited to, one-dimensional, two-dimensional photonic crystals, surface plasmons, metamaterials, and super surfaces. Specific materials may include silicon, germanium, silicon germanium materials, compounds of silicon, compounds of germanium, metals, group III-V materials, and the like. Wherein the silicon compound includes, but is not limited to, silicon nitride, silicon dioxide, silicon carbide, and the like. The light-transmitting layer material may include a material with a low refractive index such as silicon dioxide and a high molecular polymer. The photoelectric detector can be selected from a silicon detector (the detection range is 780 nm-1100 nm), a III-V semiconductor (such as InGaAs/InAlAs and GaAs/AlGaAs) detector (the detection range is 1000 nm-2600 nm), an antimonide (such as InSb) detector (the detection range is 1 mu m-6.5 mu m), an HgCdTe detector (the detection range is 0.7-25 mu m) and the like.
The embodiment also provides a micro-integrated spectrometer. As shown in fig. 1, the micro-integrated spectrometer includes the above-mentioned optical modulation micro-nano structure, a photoelectric detection layer 2 and a signal processing circuit. The light modulation micro-nano structure, the photoelectric detection layer 2 and the signal processing circuit are vertically connected from top to bottom and are mutually parallel. The light modulation micro-nano structure is used for carrying out light modulation on incident light to obtain a modulated spectrum; the photoelectric detection layer 2 is used for receiving the modulated spectrum and providing differential response to the modulated spectrum; the signal processing circuit layer 3 is used for processing the differential response based on an algorithm so as to reconstruct and obtain an original spectrum.
The light modulation micro-nano structure described in this embodiment is as described above, and is not described herein again. The photodetection layer 2 according to the present embodiment is shown in fig. 2 and 4. The photoelectric detection layer 2 comprises a plurality of detection units 7, each detection unit 7 in the photoelectric detection layer 2 is provided with at least one photoelectric detector, and the detection range of each photoelectric detector is slightly larger than the structural range of the modulation hole 6. The photoelectric detection layer 2 of an array structure consisting of a plurality of detection units 7 can transmit detected signals to the signal processing circuit layer 3 through electric contacts.
In this embodiment, a plurality of modulation holes 6 may correspond to one detection unit 7 at the same time, or each modulation hole 6 may correspond to one or more detection units 7, that is, each modulation unit 5 corresponds to one or more detection units 7 in the vertical direction, so that it is only necessary that at least one modulation hole 6 corresponds to at least one detection unit 7 in the same modulation unit 5. This structural arrangement ensures that the modulation unit 5 can always modulate incident light of at least one wavelength and that the modulated light can be received by the detection unit 7. In order to prevent the detection units 7 from interfering with each other during operation, a gap 8 is preferably left between two adjacent detection units 7.
The signal processing circuit layer 3 described in this embodiment is provided with an algorithm processing system, and the algorithm processing system can process the differential response based on an algorithm to reconstruct and obtain the original spectrum.
The micro-nano spectrum structure and the micro-integrated spectrometer described in this embodiment have a complete process for spectrum detection: first, when a spectrum is vertically incident from above the light modulation layer 1 and passes through the light modulation micro-nano structure, different response spectra are obtained in different modulation units 5 through modulation of the light modulation layer 1. The modulated response spectra are respectively irradiated onto the photodetection layer 2, and then the response spectra received by the correspondingly arranged detection units 7 are different, so as to obtain differential responses, where the differential responses are obtained by calculating differences between signals of the response spectra obtained by modulating the modulation units 5 respectively. Finally, the signal processing circuit layer 3 processes the differential response by using an algorithm processing system, so that the original spectrum is obtained through reconstruction. The reconstruction process is implemented by a data processing module that includes spectral data preprocessing and a data prediction model. The spectral data preprocessing refers to preprocessing noise existing in the obtained differential response data, and the processing methods adopted in the spectral data preprocessing include, but are not limited to, fourier transform, differentiation, wavelet transform and the like. The data prediction model includes the prediction of blood glucose parameters related to blood glucose concentration and the like obtained from the spectral data information, and the algorithms used by the data prediction model include, but are not limited to, a least square method, a principal component analysis and an artificial neural network.
Fig. 5 shows the spectral analysis effect of the optical modulation micro-nano structure and the spectrometer during the spectral analysis, which are actually prepared according to the above embodiment. As shown in FIG. 5, the micro-nano structure can realize the detection of the spectrum with the spectral range from 600nm to 800nm and the spectral width of 200nm, and achieves the effect of more than 95.1% of the spectral measurement accuracy.
Example two
The structure, principle, spectrum modulation method and preparation method of the light modulation micro-nano structure and the micro-integrated spectrometer described in the second embodiment are basically the same as those of the first embodiment, and the details of the same parts are omitted. The difference lies in that:
as shown in fig. 6, in the micro-nano structure according to this embodiment, an integral modulation unit 5 is disposed on the light modulation layer 1. The modulation holes 6 in the two-dimensional pattern structure provided in the modulation unit 5 have respective specific cross-sectional shapes, and the modulation holes 6 are freely combined and arranged in accordance with the specific cross-sectional shapes. Specifically, in the two-dimensional pattern structure, the specific cross-sectional shapes of some of the modulation holes 6 are the same, the modulation holes 6 having the same specific cross-sectional shape constitute a plurality of modulation hole 6 groups, the specific cross-sectional shapes of the modulation hole 6 groups are different from each other, and all the modulation holes 6 are freely combined.
It can be understood that the modulation unit 5 can be regarded as a modulation unit for a specific wavelength spectrum as a whole, and can be freely divided into a plurality of modulation holes 6, so that the modulation unit can be used for modulating a plurality of different wavelength spectrums, and the flexibility and diversity of light modulation can be increased.
EXAMPLE III
The structure, principle, spectrum modulation method and preparation method of the light modulation micro-nano structure and the micro-integrated spectrometer described in the third embodiment are basically the same as those of the second embodiment, and the details of the same parts are not repeated. The difference lies in that:
as shown in fig. 7 and 8, two or more modulation cells 5 are arranged on the light modulation layer 1 of the light modulation micro-nano structure of the present embodiment. In each modulation unit 5, when the modulation holes 6 are arranged in combination according to a specific cross-sectional shape, the arrangement order is arranged row by row or column by column according to a preset periodic order.
In the present embodiment, all the modulation holes 6 are divided into a plurality of modulation units 5 according to a specific cross-sectional shape, and the specific cross-sectional shapes of the modulation holes 6 in the respective modulation units 5 are different from each other. The modulation holes 6 in the same modulation unit 5 have the same specific cross-sectional shape, but the arrangement sequence of the modulation holes 6 is arranged in an array according to the size gradient sequence of the structural parameters. So that each modulation unit 5 has a different modulation effect and can modulate for different wavelength spectra. The modulation action and/or modulation object of the current modulation unit 5 can be changed by changing the gradient sequence of the structure parameters of the modulation holes 6 in the modulation unit 5 and/or the specific section shape of the modulation holes 6 according to the modulation requirement.
Specifically, as shown in fig. 9, three modulation units 5, namely a first modulation unit 11, a second modulation unit 12, and a third modulation unit 13, are distributed on the bottom plate of the light modulation layer 1. The modulation holes 6 in the first modulation unit 11 are all circular, the structural parameters of each modulation hole 6 are the same, and the first modulation unit 11 has a first modulation mode for the input spectrum; the modulation holes 6 in the second modulation unit 12 are all oval, each modulation hole 6 is arranged periodically and line by line according to the size of the structural parameter, that is, the horizontal oval modulation holes 6 and the vertical oval modulation holes 6 are staggered line by line, and the second modulation unit 12 has a second modulation mode for the input spectrum; the modulation holes 6 in the third modulation unit 13 are all rhombus, and each modulation hole 6 is arranged periodically row by row and column by column according to the size of the structural parameter, that is, the horizontally arranged rhombus modulation holes 6 and the vertically arranged rhombus modulation holes 6 are staggered row by row, and simultaneously, the horizontally arranged rhombus modulation holes 6 and the vertically arranged rhombus modulation holes 6 are staggered column by column, so that the third modulation unit 13 has a third modulation mode for the input spectrum.
It is understood that the "some modulation of light with different wavelengths" described in this embodiment may include, but is not limited to, scattering, absorption, transmission, reflection, interference, surface plasmon, resonance, and the like. The first, second and third light modulation modes are distinguished from each other. By arranging the structure of the modulation holes 6 in the modulation units 5, the difference of spectral response between different units can be improved, and the sensitivity of the difference between different spectrums can be improved by increasing the number of units.
It can be understood that, when measuring for different incident spectra, the modulation effect can be changed by changing the structural parameters of the modulation holes 6 in each modulation unit 5, and the change of the structural parameters includes but is not limited to one of the parameters of the micro-nano structure period, the radius, the side length, the duty ratio, the thickness and the like and any combination thereof.
It can be understood that the micro-integrated spectrometer described in this embodiment may use the modulation unit 5 described in the first embodiment, the modulation unit 5 described in the second embodiment, or a combination of the modulation units 5 described in the first and second embodiments.
In this embodiment, the light modulation layer 1 is made of a silicon nitride plate having a thickness of 200nm to 500 nm. The light modulation layer 1 is provided with 100 to 200 modulation units 5 in total, and each modulation unit 5 has a length of 4 to 60 μm and a width of 4 to 60 μm. Various geometric shapes are selected in each modulation unit 5 to be used as the specific section shapes of the modulation holes 6, the modulation units 5 are periodically arranged in the same shape, and the duty ratio is 10% -90%. The remaining structure is the same as in example 1 or example 2.
Fig. 10 and 11 both show the spectral analysis effect of the optical modulation micro-nano structure and the spectrometer obtained by the actual preparation according to the above embodiment. The micro-nano modulation structure described in this embodiment is mainly used for detecting a single-wavelength spectrum, the effect of the wavelength intensity relationship is shown in fig. 10, the error between the measured spectrum and the center wavelength of the actual spectrum is less than 0.4nm, the detection effect is shown in fig. 11, and the accuracy of the light intensity is more than 99.89%.
Example four
Based on the structure, principle, spectrum modulation method and preparation method of the light modulation micro-nano structure and the micro-integrated spectrometer described in any embodiment, the fourth embodiment provides a light modulation micro-nano structure, a micro-integrated spectrometer and a spectrum modulation method. The same parts are not described again, and the differences are as follows:
as shown in fig. 12, the micro integrated spectrometer according to the fourth embodiment further includes a transparent medium layer 4, and the transparent medium layer 4 is located between the light modulation micro-nano structure and the photodetection layer 2. Specifically, the thickness of the light-transmitting medium layer 4 is 50nm to 1 μm, and the material may be silicon dioxide.
In the micro-integrated spectrometer described in this embodiment, if a process scheme of direct deposition growth is adopted when the light modulation layer 1 is prepared, the light-transmitting dielectric layer 4 may be covered on the spectrum detection layer by chemical vapor deposition, sputtering, spin coating, and the like, and then deposition and etching of the light modulation layer 1 may be performed on the light detection layer. If the transfer process scheme is adopted, the silicon dioxide can be used as a preparation substrate of the light modulation layer 1, the light modulation layer 1 is directly prepared on the upper half part of the substrate through micro-nano drilling, then the lower half part of the silicon dioxide substrate is directly used as a light-transmitting medium layer 4, and the prepared light modulation layer 1 and the prepared light-transmitting medium layer 4 are integrally transferred onto the light detection layer.
It can be understood that the light-transmitting medium layer 4 described in this embodiment can also be configured as follows: the whole light modulation micro-nano structure above the photoelectric detection layer 2 is supported by an external support structure so as to be suspended relative to the photoelectric detection layer 2, and the air part between the light modulation layer 1 and the photoelectric detection layer 2 is the light-transmitting dielectric layer 4.
EXAMPLE five
The fifth embodiment further provides an optical modulation micro-nano structure, a micro-integrated spectrometer and a spectrum modulation method based on the second embodiment. The fifth embodiment is the same as the second embodiment, and the differences are as follows:
in this embodiment, the light modulation layer 1 is made of a silicon carbide flat substrate having a thickness of 150 to 300 nm. The light modulation layer 1 has a total of 150 to 300 units each having a length of 15 to 20 μm and a width of 15 to 20 μm. The specific cross-sectional shapes of the modulation holes 6 in the same modulation unit 5 are all circular, and parameters such as the circular hole period, the hole radius and the duty ratio among the units are different. The specific parameter ranges are as follows: the period range is 180 nm-850 nm, the pore radius range is 20 nm-780 nm, and the duty ratio range is 10% -92%. At least one of the photodetection layers 2 is provided with an InGaAs detector.
The preparation process of the light modulation micro-nano structure adopts a transfer process means of firstly preparing the light modulation layer 1 and then transferring the light modulation layer to the photoelectric detection layer 2.
EXAMPLE six
Based on the structure, principle, spectrum modulation method and preparation method of the light modulation micro-nano structure and the micro-integrated spectrometer described in any embodiment, the sixth embodiment provides a light modulation micro-nano structure, a micro-integrated spectrometer and a spectrum modulation method. The same parts are not described again, and the differences are as follows:
as shown in fig. 13, in the light modulation micro-nano structure according to the seventh embodiment, each modulation hole 6 does not penetrate through the bottom plate. It can be understood that no matter whether the modulation hole 6 penetrates through the bottom plate, the modulation effect on the light modulation micro-nano structure cannot be adversely affected, because the silicon-based material or other materials selected for the light modulation layer 1 are all transparent materials, when a spectrum enters the light modulation layer 1, the modulation effect is affected by the structure of each modulation unit 5, but the bottom of the modulation hole 6 does not adversely affect the spectrum modulation.
In the light modulation micro-nano structure described in this embodiment, the thickness from the bottom of the modulation hole 6 of the light modulation layer 1 to the bottom of the base plate is 60nm to 1200nm, and the thickness of the whole base plate is 120nm to 2000 nm.
EXAMPLE seven
Based on the combination of the above embodiments, the seventh embodiment provides an optical modulation micro-nano structure, a micro-integrated spectrometer and a spectrum modulation method. The same parts are not described again, and the differences are as follows:
as shown in fig. 14 and 15, in the light modulation micro-nano structure according to the seventh embodiment, five modulation units 5, namely a first modulation unit 11, a second modulation unit 12, a third modulation unit 13, a fourth modulation unit 14, and a fifth modulation unit 15, are distributed on a bottom plate of a light modulation layer 1, where the range of the fifth modulation unit 15 is the largest, and the area of the fifth modulation unit is not less than the sum of the first four modulation units.
Specifically, the first modulation unit 11, the second modulation unit 12, the third modulation unit 13, and the fourth modulation unit 14 are arranged in a matrix as a whole, wherein the arrangement of the modulation holes 6 in the first three modulation units 11, 12, and 13 is the same as the arrangement of the modulation holes 6 described in the third embodiment, the specific cross-sectional shapes of the modulation holes 6 of the fourth modulation unit 14 and the first modulation unit 11 are the same and are both circular, but the structural parameters of the modulation holes 6 of the fourth modulation unit 14 are different from the structural parameters of the modulation holes 6 of the first modulation unit 11, specifically, the inner diameter of the modulation holes 6 of the fourth modulation unit 14 is smaller than the inner diameter of the modulation holes 6 of the first modulation unit 11, so that the fourth modulation unit 14 has a fourth modulation mode for the input spectrum. The two-dimensional pattern structure formed by the modulation holes 6 in the fifth modulation unit 15 is the same as the two-dimensional pattern structure described in the first embodiment, and the fifth modulation unit 15 has a fifth modulation mode for the input spectrum.
Therefore, in the light modulation micro-nano structure described in the seventh embodiment, by using the difference of the specific cross-sectional shapes of the different modulation holes 6 in different units and the specific arrangement manner of the modulation holes 6 in the same unit, different modulation effects on the spectra with different wavelengths are realized by changing the specific cross-sectional shapes of the modulation holes 6, the structural parameters of the modulation holes 6 and the arrangement period of the modulation holes 6.
It can be understood that, for the structures of the gradient array modulation units 5 of the first and second embodiments, the arbitrarily divided modulation units 5 have different modulation effects on the spectrum, theoretically, infinite groups of modulated spectrum samples can be obtained, thereby drastically increasing the amount of data used to reconstruct the original spectrum and facilitating the recovery of the spectrum pattern of the broadband spectrum.
With regard to the structure of the periodic modulation unit 5 in the third embodiment, the periodic structure thereof can generate two-dimensional periodic dispersion and resonance effects, and the resonance effects include, but are not limited to, the band control of the photonic crystal and the resonance of the two-dimensional grating. The accuracy of detection for a particular wavelength may be enhanced by resonance effects.
If the modulation units 5 in the above-described first, second, and third embodiments are simultaneously applied to a chip, the above-described two advantages can be combined. When the size range of the top light modulation layer is cut, the light modulation micro-nano structures of the three embodiments can be prepared into structures with micron-scale or even smaller structures, and the method has great significance for the miniaturized production and the use of the micro-integrated spectrometer; the light modulation micro-nano structure is matched with a photoelectric detection layer formed by different photoelectric detectors, so that full-waveband spectrum detection can be realized in principle, and the wide-spectrum detection performance of the spectrometer is more excellent.
In summary, the optical modulation micro-nano structure of the embodiment includes the optical modulation layer 1 located on the photoelectric detection layer 2, the optical modulation layer 1 can modulate incident light, so as to form a differential response on the photoelectric detection layer 2, so as to reconstruct and obtain an original spectrum, and the optical modulation micro-nano structure can be used for replacing various precision optical components in the existing spectrometer, thereby realizing the application type of the spectrometer in the micro-nano structure field, enabling the micro-integrated spectrometer to work without a grating, a prism, a reflector or other similar space light splitting elements, and solving the defects that the existing spectrometer is too dependent on the precision optical components to make the spectrometer bulky, heavy and expensive.
The light modulation layer 1 is provided with a two-dimensional graph structure with a specific arrangement rule by arranging the modulation holes 6 in the same modulation unit 5, the modulation effect on light with different wavelengths is realized by utilizing different two-dimensional graph structures, the modulation effect comprises but not limited to the effects of light scattering, absorption, projection, reflection, interference, surface plasmon polariton, resonance and the like, and the difference of spectral response among different regions can be improved by utilizing the difference of the two-dimensional graph structures, so that the analysis precision of the spectrometer is improved.
The problems of precise alignment and the like do not need to be considered in each modulation unit 5 in the light modulation layer 1, the spectrometer manufactured based on the light modulation micro-nano structure can ensure high precision and does not need to increase the optical path, the internal structure of the spectrometer does not need to be over-large, the micro-integrated spectrometer is more convenient to use and does not completely cause adverse effects on the precision of measurement and calculation of the spectrometer, the size of the spectrometer can be reduced to the level of a chip, the performance is stable, the cost is reduced, and the micro-integrated spectrometer can realize large-scale flow sheet production.
The embodiments of the present invention have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiment was chosen and described in order to best explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention for various embodiments with various modifications as are suited to the particular use contemplated.
In the description of the present invention, unless otherwise specified, "a plurality" and "several" mean two or more; "notched" means, unless otherwise stated, a shape other than a flat cross-section. The terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Claims (9)
1. The utility model provides a light modulation micro-nano structure, its characterized in that, is including being located the light modulation layer on the photoelectric detection layer, the light modulation layer includes bottom plate and at least one modulation unit, the bottom plate is established on the photoelectric detection layer, each the modulation unit is located on the bottom plate, every be equipped with respectively in the modulation unit a plurality of wear in modulation hole in the bottom plate, it is same each in the modulation unit the modulation hole is arranged into a two-dimensional graph structure that has the specific law of arranging.
2. The light modulation micro-nano structure according to claim 1, wherein the specific arrangement rule of the two-dimensional graph structure comprises:
all the modulation holes in the same two-dimensional graph structure have the same specific cross section shape at the same time, and the modulation holes are arrayed according to the size gradient sequence of the structural parameters; and/or
And each modulation hole in the same two-dimensional graph structure has a specific cross section shape, and the modulation holes are combined and arranged according to the specific cross section shape.
3. The light modulating micro-nano structure according to claim 2, wherein the structural parameters of the modulation hole comprise inner diameter, major axis length, minor axis length, rotation angle, side length or angle number; the specific cross-sectional shape of the modulation hole includes a circle, an ellipse, a cross, a regular polygon, a star, or a rectangle.
4. The light modulation micro-nano structure according to claim 2, wherein when the modulation holes are combined and arranged according to a specific cross-sectional shape, the arrangement sequence is arranged row by row or column by column according to a preset periodic sequence.
5. The light-modulating micro-nano structure according to any one of claims 1 to 4, wherein the bottom of the modulation hole penetrates the bottom plate or does not penetrate the bottom plate.
6. The light-modulating micro-nano structure according to any one of claims 1 to 4, wherein the light-modulating layer is directly formed on the photodetecting layer, the light-modulating layer is formed by deposition or etching based on a substrate, and the substrate is located on the photodetecting layer; or transferring the prepared light modulation layer to the photoelectric detection layer.
7. A micro-integrated spectrometer, comprising:
the light modulation micro-nano structure according to any one of claims 1 to 6, used for performing light modulation on incident light to obtain a modulated spectrum;
the photoelectric detection layer is positioned below the light modulation micro-nano structure and used for receiving the modulated spectrum and providing differential response to the modulated spectrum;
and the signal processing circuit layer is positioned below the photoelectric detection layer and used for reconstructing the differential response to obtain an original spectrum.
8. The micro-integrated spectrometer of claim 7, further comprising:
and the light-transmitting medium layer is positioned between the light modulation micro-nano structure and the photoelectric detection layer.
9. The micro-integrated spectrometer according to claim 7, wherein the photo-detection layer comprises at least one detection unit, each micro-light modulation unit of the light modulation micro-nano structure is correspondingly arranged on at least one detection unit, and all the detection units are electrically connected through the signal processing circuit layer.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2022188673A1 (en) * | 2021-03-11 | 2022-09-15 | 上海与光彩芯科技有限公司 | Optical system and design method therefor |
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| WO2023193785A1 (en) * | 2022-04-08 | 2023-10-12 | 北京与光科技有限公司 | Spectrum module, and working method of spectrum chip |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2022188673A1 (en) * | 2021-03-11 | 2022-09-15 | 上海与光彩芯科技有限公司 | Optical system and design method therefor |
| CN115479668A (en) * | 2021-06-16 | 2022-12-16 | 北京与光科技有限公司 | Spectrum analysis device and spectrum video recording method |
| WO2023193785A1 (en) * | 2022-04-08 | 2023-10-12 | 北京与光科技有限公司 | Spectrum module, and working method of spectrum chip |
| WO2023221663A1 (en) * | 2022-05-16 | 2023-11-23 | 北京与光科技有限公司 | Spectral sensor, spectral sensor module, sensor apparatus and electronic device |
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