CN116858169A - High-precision high-stability auto-collimation small-angle inspection device and inspection method thereof - Google Patents
High-precision high-stability auto-collimation small-angle inspection device and inspection method thereof Download PDFInfo
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
- B25H1/18—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top in inclination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/047—Accessories, e.g. for positioning, for tool-setting, for measuring probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
- G01B5/0004—Supports
Abstract
The invention discloses a high-precision high-stability auto-collimation small-angle inspection device and a small-angle inspection method, wherein a workbench is supported and placed on a base by a workbench rotating shaft, a workbench rotating shaft seat and a displacement actuator; the displacement actuator drives the workbench to wind around the shaft to generate wide-range high-resolution angle change; the optical axis of the autocollimator is parallel to the axis of the workbench and is positioned at the same height, the angle change of the workbench is reflected by measuring the angle change of a plane reflecting mirror on the end surface of the workbench, and the display and main control module receives angle measurement data in real time and sends displacement driving signals to realize closed loop feedback control of angle generation and measurement; the environment sensor is arranged in the device, can acquire temperature, humidity and pressure information of the current measured environment in real time, and uploads the temperature, humidity and pressure information to the environment compensation module to calculate error compensation quantity caused by environment disturbance, and corrects a driving signal of angle occurrence and an angle value of angle measurement; the invention has the functions of active measurement of environmental parameters and compensation of environmental disturbance, effectively improves the angle generation and measurement precision of the device, and improves the anti-environmental disturbance capability and measurement stability.
Description
Technical Field
The invention belongs to the field of precise small-angle measurement, and particularly relates to a high-precision high-stability auto-collimation small-angle inspection device and an inspection method thereof.
Background
The precise small-angle measurement is an important component in the field of geometric quantity measurement, and has wide application in the fields of ultra-precise machining and manufacturing, semiconductor machining, precise motion control, large-scale equipment machining and assembly and the like. The commonly used precise small-angle measuring instruments include frame type level instruments, strip type level instruments, image combination level instruments, electronic level instruments, auto-collimators and the like, and the angle measuring level is critical to the development of the field.
In order to ensure the measurement performance of the precise small-angle measuring instrument, the precise small-angle measuring instrument needs to be calibrated regularly, and a common calibrating instrument is a small-angle inspection instrument. The small angle inspection instrument is a measuring instrument for generating standard small angles and has the characteristics of high precision, high resolution, high measuring speed, simple structure and the like.
The small angle inspection instrument with a traditional structure is shown in fig. 1, and the device comprises a workbench 1, a workbench rotating shaft 2, a workbench rotating shaft seat 3, a displacement actuator 4, a workbench supporting shaft 5, a base 6, a first positioning indicator 7 and a second positioning indicator 8; the base 6 is horizontally arranged, the workbench 1 is fixedly connected with the workbench rotating shaft 2 and the workbench supporting shaft 5, and two ends of the workbench are respectively supported by the workbench rotating shaft seat 3 and the displacement actuator 4 and are arranged on the base 6; the first positioning indicator 7 and the second positioning indicator 8 are vertically arranged above the workbench 1, the two positioning indicators are parallel and have fixed distance, and the measuring head contacts the surface of the workbench 1. The displacement actuator 4 displaces in the vertical direction to drive the workbench supporting shaft 5 to generate height change, and the workbench 1 rotates slightly around the workbench rotating shaft 2 to drive the upper surface of the workbench 1 to incline; the measuring heads of the two positioning indicators move along the axes of the respective positioning indicators along the height change of the upper surface of the workbench 1 and detect the displacement change; according to the displacement variable quantity of the two positioning indicators and the known distance between the two positioning indicators, the current angle value of the workbench 1 can be calculated; the angle value of the change is calculated by using the tangent principle by placing a gauge block of known thickness under the gauge head of the one-side positioning indicator.
In summary, the small angle inspection apparatus of the conventional structure has the following problems:
1. the angle generation of the traditional small-angle inspection instrument is based on the tangent principle, the accuracy of the generated angle depends on the axial displacement measurement precision of the two positioning indicators, the distance precision of the two positioning indicators and the precision of the gauge block, the angle calculation process comprises a plurality of physical quantities, the angle change of the workbench cannot be directly measured, obvious nonlinear errors exist under a large angle, and the full-range angle generation precision is low;
2. the positioning indicator and the manual gauge block used by the small-angle inspection instrument with the traditional structure adopt a contact type measurement mode, and the situation that the measuring head and the gauge block are worn exists after long-time work, so that small errors exist in the angle, the problem that the precision of the small-angle inspection instrument is reduced is generated, the precision and the service life of the instrument are reduced, and periodic maintenance is needed;
3. the measuring range and the resolution of the angle generated by the small-angle inspection instrument with the traditional structure depend on the measuring range and the resolution of the positioning indicators, the distance between the two positioning indicators and the thickness of the gauge block used; due to comprehensive consideration of instrument structural design, materials and dimensional space of parts and the like, the small-angle inspection instrument is difficult to realize the angle generation of large-range micro-nano radian magnitude high resolution, and has limited verification capability on a high-precision angle measurement instrument;
4. the traditional structure small angle inspection instrument is limited by factors such as device structural design, material thermal expansion, use environment limitation of a positioning indicator and a gauge block, the device is limited to work in an environment with small range change, the angle generation and measurement with highest precision can be realized only in a stable indoor environment or laboratory-level environment, the use range of the small angle inspection instrument is greatly limited, the traditional structure does not comprise an environment active detection and compensation function, and the angle generation and measurement precision can be greatly influenced when the environmental condition changes in the measurement process.
Disclosure of Invention
The invention provides a high-precision high-stability auto-collimation small-angle inspection device and an inspection method thereof, aiming at the problems that a traditional small-angle inspection device has a plurality of physical quantities, the chain length is measured, direct angle measurement cannot be realized, the contact measurement mode has abrasion, the influence of environmental disturbance cannot be measured and compensated, and the like.
The invention is realized by the following technical scheme:
the high-precision high-stability auto-collimation small-angle checking device comprises a workbench 1, a workbench rotating shaft 2, a workbench rotating shaft seat 3, a displacement actuator 4, a base 6, a plane reflecting mirror 9, an auto-collimator 10, an auto-collimator seat 11, a displacement driving module 12, a data acquisition module 13, a display and main control module 14, an environment compensation module 15 and an environment sensor 18;
the base 6 is horizontally arranged, the workbench 1 is fixedly connected with the workbench rotating shaft 2, the workbench rotating shaft 2 is matched with the workbench rotating shaft seat 3 for use, and the workbench rotating shaft seat 3 and the displacement actuator 4 support the two ends of the workbench 1 and are arranged on the base 6; the displacement actuator 4 pushes the movable end of the workbench 1 to slightly rotate around the workbench rotating shaft 2;
the plane reflecting mirror 9 is fixedly connected to the side surface of the movable end of the workbench 1, and the plane reflecting mirror 9 is perpendicular to the upper surface of the workbench 1; the workbench 1 rotates around the shaft to drive the pitch angle of the plane reflecting mirror 9 to change, and the change of the pitch angle of the plane reflecting mirror 9 represents the change of the angle of the workbench 1;
the auto-collimator 10 is fixedly connected to the base 6 by an auto-collimator seat 11, the height of the optical axis of the auto-collimator 10 is consistent with the height of the center of the plane mirror 9, and the optical axis of the auto-collimator 10 is perpendicular to the plane of the plane mirror 9;
the displacement driving module 12 receives a driving signal from the display and main control module 14, and the displacement driving module 12 controls the displacement actuator 4 to generate a responsive displacement change; the data acquisition module 13 acquires photoelectric sensor data generated by measuring angles of the autocollimator 10, and transmits the photoelectric sensor data to the display and main control module 14 to calculate measured angle values;
the environmental sensor 18 uploads the acquisition signal to the environmental compensation module 15.
Further, the environmental sensor 18 includes a temperature sensor 181, a humidity sensor 182, a pressure sensor 183, and a sensor pre-circuit 184;
the sensor pre-circuit 184 amplifies and converts the temperature, humidity and pressure information of the ambient air collected by the temperature sensor 181, the humidity sensor 182 and the pressure sensor 183 into an electrical signal through the sensor pre-circuit 184, and uploads the electrical signal to the ambient compensation module 15.
A small angle inspection method of a high-precision high-stability auto-collimation small angle inspection device, the small angle inspection method applying the high-precision high-stability auto-collimation small angle inspection device, the small angle inspection method comprising the steps of,
step a, starting up the device for self-checking, adjusting the workbench 1 to be in a horizontal state, and stably placing the angle measuring instrument to be measured at the center of the workbench 1;
b, standing and preheating the instrument, and adjusting the angle measurement zero position of the device;
step b, starting verification, and setting the angle change range [ a, b ] of verification]Verification step L 0 The number of assay spots n, i.e. n= (b-a)/L 0 +1, generating n calibration point standard angles a, a+L 0 、a+2L 0 、……、a+(n-2)L 0 、b；
Step c, before verifying the first standard angle, the environmental sensor 18 works, the current environmental parameters of temperature T, humidity W and pressure P are collected, and an error correction function is calculated and generated by the environmental compensation module 15 and is uploaded to the display and main control module 14;
step d, driving the displacement actuator 4 to change the angle of the workbench 1 to a first standard angle a, and generating an original driving signal s 1 The driving signal s1' =f1 (s 1, T, W, P) corrected by the environmental disturbance function, the autocollimator 10 measures the angle value x of the plane mirror 9 in real time 1 Angle value x corrected by environmental disturbance function 1 ’＝f 2 (x 1 T, W, P); wherein f 1 Representing a function, f 2 Representing a function;
step e, recording angle measurement data y of the current measured angle measurement instrument 1 And the ambient disturbance function is corrected, which is measured by the auto-collimator (10) at the momentAngle value x 1 ’；
F, repeating the steps c to e, and measuring environmental parameter data before verification of other verification points by the device sequentially, wherein standard angles a+L of other verification points sequentially occur 0 、a+2L 0 、……、a+(n-2)L 0 B, the driving signals are s in turn 2 、s 3 、……、s (n-1) 、s n The corrected driving signals are s in turn 2 ’、s 3 ’、……、s (n-1) ’、s n ' the measured angle data is sequentially x 2 、x 3 、……、x (n-1) 、x n The standard angle actually generated after correction is x 2 ’、x 3 ’、……、x (n-1) ’、x n ' the recorded angle measurement data of the measured angle measurement instrument are sequentially y 2 、y 3 、……、y (n-1) 、y n ；
And g, the display and main control module 14 processes the stored measurement data according to the verification requirement, outputs a verification report of the measured angle measuring instrument, and completes verification.
Further, the self-check is to test whether the displacement driving function and the angle measuring function are normal in the full range of the angle measurement.
Further, after the angle measurement indication of the auto-collimator 10 is shifted to be stable, the displacement actuator 4 is driven again to make the angle value measured by the auto-collimator 10 be 0, and the position is recorded as the zero position of the angle measurement of the device.
The high-precision high-stability auto-collimation small-angle checking device comprises a workbench 1, a workbench rotating shaft 2, a workbench rotating shaft seat 3, a displacement actuator 4, a base 6, a plane reflecting mirror 9, an auto-collimator 10, an auto-collimator seat 11, a displacement driving module 12, a data acquisition module 13, a display and main control module 14, an environment compensation module 15, an environment sensor 18, a second environment sensor 19 and a strain gauge type pressure sensor 20;
the base 6 is horizontally arranged, the workbench 1 is fixedly connected with the workbench rotating shaft 2, the workbench rotating shaft 2 is matched with the workbench rotating shaft seat 3 for use, and the workbench rotating shaft seat 3 and the displacement actuator 4 support the two ends of the workbench 1 and are arranged on the base 6; the displacement actuator 4 pushes the movable end of the workbench 1 to slightly rotate around the workbench rotating shaft 2;
the plane reflecting mirror 9 is fixedly connected to the side surface of the movable end of the workbench 1, and the plane reflecting mirror 9 is perpendicular to the upper surface of the workbench 1; the workbench 1 rotates around the shaft to drive the pitch angle of the plane reflecting mirror 9 to change, and the change of the pitch angle of the plane reflecting mirror 9 represents the change of the angle of the workbench 1;
the auto-collimator 10 is fixedly connected to the base 6 by an auto-collimator seat 11, the height of the optical axis of the auto-collimator 10 is consistent with the height of the center of the plane mirror 9, and the optical axis of the auto-collimator 10 is perpendicular to the plane of the plane mirror 9;
the second environmental sensor 19 is placed inside the autocollimator 10 for measuring the air temperature T and the pressure information P within the closed environment of the autocollimator 10;
the strain gauge type pressure sensor 20 is arranged on the workbench 1 and is arranged along the longitudinal axis direction of the workbench 1 and is used for measuring micro deformation of the workbench 1 when the workbench is bent and deformed due to gravity, temperature and load;
the displacement driving module 12 receives a driving signal from the display and main control module 14, and the displacement driving module 12 controls the displacement actuator 4 to generate a responsive displacement change; the data acquisition module 13 acquires photoelectric sensor data generated by measuring angles of the autocollimator 10, and transmits the photoelectric sensor data to the display and main control module 14 to calculate measured angle values;
the environmental sensor 18 uploads the acquired signal to the environmental compensation module 15;
the data collected by the second environmental sensor 19 and the strain gauge pressure sensor 20 are sent to the environmental compensation module 15, and the environmental compensation module 15 calculates an environmental disturbance error and uploads a correction value to the display and main control module 14;
further, the environmental sensor 18 includes a temperature sensor 181, a humidity sensor 182, a pressure sensor 183, and a sensor pre-circuit 184;
the sensor pre-circuit 184 amplifies and converts the temperature, humidity and pressure information of the ambient air collected by the temperature sensor 181, the humidity sensor 182 and the pressure sensor 183 into an electrical signal through the sensor pre-circuit 184, and uploads the electrical signal to the ambient compensation module 15.
The beneficial effects of the invention are as follows:
aiming at the problems that the traditional small-angle inspection instrument cannot actively detect the environmental change in the angle generation and measurement process, and is easy to be subjected to the environmental condition change to cause the precision reduction, so that the use environment is limited and the measurement stability is poor, the invention provides the small-angle inspection instrument which is additionally provided with an environmental sensor and an environmental compensation module; the environment sensor can actively measure the temperature, humidity and pressure information of the current environment before each time of measurement of the detection points, generates an angle generation correction function and an angle measurement rest function according to an angle generation and measurement error curve obtained by a pre-calibration test, carries out error correction and compensation on a driving signal and an acquired angle value, and improves the angle generation and measurement precision of the device; compared with the traditional small-angle inspection device, the device has the capability of actively measuring the environmental parameter change and compensating the influence caused by environmental disturbance in real time, can effectively reduce the influence of the environmental change on the device precision in the long-time verification and measurement process, and has the technical advantages of improving the angle measurement precision and the instrument stability.
Aiming at the problems that the angle generation of the traditional small angle inspection instrument adopts the tangent principle and is limited by the positioning indicator and the instrument size, and the large-range high-resolution angle generation and measurement cannot be realized, the invention provides a small angle inspection device based on the auto-collimation principle for angle measurement; based on the auto-collimation principle, the micro angle change is converted into auto-collimation light spot displacement by using optical lever amplification, and the light spot displacement calculation with high precision and high resolution is realized by using a photoelectric sensor and a light spot positioning algorithm, so that the angle measurement with high precision and high resolution is realized; compared with the traditional small-angle inspection device, the angle measurement is carried out by adopting the auto-collimator and is on the same axis with the workbench, and the device has the technical advantages of direct measurement of the angle physical quantity, less physical quantity to be measured, non-contact rapid measurement, high angle measurement precision and high resolution.
Aiming at the problems that the conventional small-angle inspection instrument adopts a mode of placing standard gauge blocks to generate standard angles, and the contact measurement measuring head wear and the superposition of a plurality of gauge blocks have errors and low manual efficiency, the invention adopts a full-automatic angle generation driving and angle measurement mode; the standard angle is automatically calculated and generated according to verification requirements through a software algorithm in the main control module, and the angle generation and angle measurement are automatically carried out in a closed loop feedback mode, so that the accuracy and speed of the standard angle generation are improved; compared with the traditional small-angle inspection device, the device has the advantages that no personnel operation and external interference exist in the verification process, and the device is used for non-contact measurement, so that the verification precision and efficiency are effectively improved, and the service life of the device is prolonged.
Drawings
Fig. 1 is a schematic view of a device of a small angle inspection machine of a conventional structure employing the tangent principle.
Fig. 2 is a front view of the device a of the present invention.
Fig. 3 is a top view of inventive device a.
Fig. 4 is a front view of the device B of the present invention.
In the figure: the device comprises a workbench 1, a workbench rotating shaft 2, a workbench rotating shaft seat 3, a displacement actuator 4, a workbench supporting shaft 5, a base 6, a first positioning indicator 7, a second positioning indicator 8, a plane mirror 9, an auto-collimator 10, an auto-collimator seat 11, a displacement driving module 12, a data acquisition module 13, a display and main control module 14, an environment compensation module 15, an environment sensor 18, a second environment sensor 19 and a strain gauge type pressure sensor 20.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Before the angle of the detection point is generated and measured, the environment sensor is utilized to actively measure the environment parameters, and the driving signal and the angle measured value generated at the angle are corrected through the environment compensation module; and errors caused by environmental disturbance are compensated, and the device identification precision is improved.
Compared with the traditional small-angle inspection instrument device, the invention has the technical advantages of direct non-contact angle measurement of the angle of the workbench, large angle measurement range, high resolution, high automatic measurement efficiency, capability of actively detecting the change of environmental parameters, real-time compensation of angle generation and measurement, and high precision and stability.
Example 1
The embodiment is an embodiment of a high-precision high-stability auto-collimation small-angle inspection device and method.
The high-precision high-stability auto-collimation small-angle inspection device of the embodiment has a structure schematically shown in fig. 2 and 3.
The high-precision high-stability auto-collimation small-angle checking device comprises a workbench 1, a workbench rotating shaft 2, a workbench rotating shaft seat 3, a displacement actuator 4, a base 6, a plane reflecting mirror 9, an auto-collimator 10, an auto-collimator seat 11, a displacement driving module 12, a data acquisition module 13, a display and main control module 14, an environment compensation module 15 and an environment sensor 18;
the base 6 is horizontally arranged, the workbench 1 is fixedly connected with the workbench rotating shaft 2, the workbench rotating shaft 2 is matched with the workbench rotating shaft seat 3 for use, and the workbench rotating shaft seat 3 and the displacement actuator 4 support the two ends of the workbench 1 and are arranged on the base 6; the displacement actuator 4 pushes the movable end of the workbench 1 to slightly rotate around the workbench rotating shaft 2;
the plane reflecting mirror 9 is fixedly connected to the side surface of the movable end of the workbench 1, and the plane reflecting mirror 9 is perpendicular to the upper surface of the workbench 1; the workbench 1 rotates around the shaft to drive the pitch angle of the plane reflecting mirror 9 to change, and the change of the pitch angle of the plane reflecting mirror 9 represents the change of the angle of the workbench 1;
the auto-collimator 10 is fixedly connected to the base 6 by an auto-collimator seat 11, the height of the optical axis of the auto-collimator 10 is consistent with the height of the center of the plane mirror 9, and the optical axis of the auto-collimator 10 is perpendicular to the plane of the plane mirror 9;
the displacement driving module 12 receives a driving signal from the display and main control module 14, and the displacement driving module 12 controls the displacement actuator 4 to generate a responsive displacement change; the data acquisition module 13 acquires photoelectric sensor data generated by measuring angles of the autocollimator 10, and transmits the photoelectric sensor data to the display and main control module 14 to calculate measured angle values;
the environmental sensor 18 uploads the acquisition signal to the environmental compensation module 15.
The environmental compensation module 15 uploads the error caused by the current angle occurrence and the angle measurement due to environmental change to the display and main control module 14 for correction according to the current environmental parameter information.
Further, the environmental sensor 18 includes a temperature sensor, a humidity sensor, a pressure sensor, and a sensor pre-circuit;
the sensor front-end circuit amplifies and converts temperature, humidity and pressure information of ambient air acquired by the temperature sensor, the humidity sensor and the pressure sensor into electric signals through the sensor front-end circuit, and the electric signals are uploaded to the environment compensation module 15.
The angle generation and measurement principle of the invention is as follows:
before each angle is generated and measured, the environment sensor 18 collects the current environment parameter information, and the current environment parameter information is analyzed and processed by the environment compensation module 15 and then the corrected parameters are uploaded to the display and main control module 14; the display and main control module 14 sends a corrected driving signal to the displacement driving module 12 according to the set angle value, so that the displacement actuator 4 generates displacement change, the workbench 1 rotates around the shaft, and the angle change amount changes to the set angle value; at the same time of the driving process, the angle of the plane mirror 9 change measured by the autocollimator and uploaded by the data acquisition module 13 is received and calculated in real time, the environmental disturbance error correction is carried out, the measured angle value is compared with the set angle value after correction, and the display and main control module 14 sends out a driving signal of the corrected angle difference value, so that the closed loop feedback control function of angle occurrence is realized; the process is characterized in that the external environment is measured before each angle generation and measurement are carried out, angle generation signals and angle measurement values are corrected according to pre-calibrated parameters, and the influence of environmental disturbance on the device precision is reduced.
A small angle inspection method of a high-precision high-stability auto-collimation small angle inspection device, the small angle inspection method applying the high-precision high-stability auto-collimation small angle inspection device, the small angle inspection method comprising the steps of,
step a, starting up the device for self-checking, adjusting the workbench 1 to be in a horizontal state, and stably placing the angle measuring instrument to be measured at the center of the workbench 1;
b, standing and preheating the instrument, and adjusting the angle measurement zero position of the device;
step b, starting verification, and setting the angle change range [ a, b ] of verification]Verification step L 0 The number of assay spots n, i.e. n= (b-a)/L 0 +1, generating n calibration point standard angles a, a+L 0 、a+2L 0 、……、a+(n-2)L 0 、b；
Step c, before verifying the first standard angle, the environmental sensor 18 works, the current environmental parameters of temperature T, humidity W and pressure P are collected, and an error correction function is calculated and generated by the environmental compensation module 15 and is uploaded to the display and main control module 14;
step d, driving the displacement actuator 4 to change the angle of the workbench 1 to a first standard angle a, and generating an original driving signal s 1 The driving signal s1' =f1 (s 1, T, W, P) corrected by the environmental disturbance function, the autocollimator 10 measures the angle value x of the plane mirror 9 in real time 1 Angle value x corrected by environmental disturbance function 1 ’＝f 2 (x 1 T, W, P); wherein f 1 Representing a function, f 2 Representing a function;
step e, recording angle measurement data y of the current measured angle measurement instrument 1 And at this time self-alignAngle value x measured by collimator (10) and corrected by environmental disturbance function 1 ’；
F, repeating the steps c to e, and measuring environmental parameter data before verification of other verification points by the device sequentially, wherein standard angles a+L of other verification points sequentially occur 0 、a+2L 0 、……、a+(n-2)L 0 B, the driving signals are s in turn 2 、s 3 、……、s (n-1) 、s n The corrected driving signals are s in turn 2 ’、s 3 ’、……、s (n-1) ’、s n ' the measured angle data is sequentially x 2 、x 3 、……、x (n-1) 、x n The standard angle actually generated after correction is x 2 ’、x 3 ’、……、x (n-1) ’、x n ' the recorded angle measurement data of the measured angle measurement instrument are sequentially y 2 、y 3 、……、y (n-1) 、y n ；
And g, the display and main control module 14 processes the stored measurement data according to the verification requirement, outputs a verification report of the measured angle measuring instrument, and completes verification.
Further, the self-check is to test whether the displacement driving function and the angle measuring function are normal in the full range of the angle measurement.
Further, after the angle measurement indication of the auto-collimator 10 is shifted to be stable, the displacement actuator 4 is driven again to make the angle value measured by the auto-collimator 10 be 0, and the position is recorded as the zero position of the angle measurement of the device.
Example two
The embodiment is an embodiment of a high-precision high-stability auto-collimation small-angle inspection device and method.
An embodiment of the high-precision high-stability auto-collimation small-angle inspection device in this embodiment is shown in fig. 4.
The high-precision high-stability auto-collimation small-angle checking device comprises a workbench 1, a workbench rotating shaft 2, a workbench rotating shaft seat 3, a displacement actuator 4, a base 6, a plane reflecting mirror 9, an auto-collimator 10, an auto-collimator seat 11, a displacement driving module 12, a data acquisition module 13, a display and main control module 14, an environment compensation module 15, an environment sensor 18, a second environment sensor 19 and a strain gauge type pressure sensor 20;
the base 6 is horizontally arranged, the workbench 1 is fixedly connected with the workbench rotating shaft 2, the workbench rotating shaft 2 is matched with the workbench rotating shaft seat 3 for use, and the workbench rotating shaft seat 3 and the displacement actuator 4 support the two ends of the workbench 1 and are arranged on the base 6; the displacement actuator 4 pushes the movable end of the workbench 1 to slightly rotate around the workbench rotating shaft 2;
the plane reflecting mirror 9 is fixedly connected to the side surface of the movable end of the workbench 1, and the plane reflecting mirror 9 is perpendicular to the upper surface of the workbench 1; the workbench 1 rotates around the shaft to drive the pitch angle of the plane reflecting mirror 9 to change, and the change of the pitch angle of the plane reflecting mirror 9 represents the change of the angle of the workbench 1;
the auto-collimator 10 is fixedly connected to the base 6 by an auto-collimator seat 11, the height of the optical axis of the auto-collimator 10 is consistent with the height of the center of the plane mirror 9, and the optical axis of the auto-collimator 10 is perpendicular to the plane of the plane mirror 9;
the second environmental sensor 19 is placed inside the autocollimator 10 for measuring the air temperature T and the pressure information P within the closed environment of the autocollimator 10; so as to analyze and obtain the current state of the optical-mechanical system of the auto-collimator 10 and the change of the refractive index of the air, and more accurately give a correction formula of the angle measurement error of the auto-collimator 10, thereby improving the compensation effect;
the strain gauge type pressure sensor 20 is placed on the workbench 1 and along the long-side axis direction, and can monitor the tiny change of the workbench 1 when the workbench is bent and deformed due to gravity, temperature and load in real time, so as to compensate the angle change between the upper surface of the workbench 1 and the reflecting surface of the end surface plane reflecting mirror 9, and improve the angle generation precision;
the displacement driving module 12 receives a driving signal from the display and main control module 14, and the displacement driving module 12 controls the displacement actuator 4 to generate a responsive displacement change; the data acquisition module 13 acquires photoelectric sensor data generated by measuring angles of the autocollimator 10, and transmits the photoelectric sensor data to the display and main control module 14 to calculate measured angle values;
the environmental sensor 18 uploads the acquired signal to the environmental compensation module 15;
the data collected by the second environmental sensor 19 and the strain gauge pressure sensor 20 are sent to the environmental compensation module 15, and the environmental compensation module 15 calculates an environmental disturbance error and uploads a correction value to the display and main control module 14;
further, the environmental sensor 18 includes a temperature sensor, a humidity sensor, a pressure sensor, and a sensor pre-circuit;
the sensor front-end circuit amplifies and converts temperature, humidity and pressure information of ambient air acquired by the temperature sensor, the humidity sensor and the pressure sensor into electric signals through the sensor front-end circuit, and the electric signals are uploaded to the environment compensation module 15.
The innovation point of the embodiment is that:
aiming at the problems that different functional modules in the small-angle inspection device are different in environmental disturbance variable types, different in influence mechanism and law and incapable of unifying error compensation links, the distributed multi-environment variable disturbance detection and compensation module is added, compared with a single environment sensor and environment compensation module, the device has the technical advantages of carrying out targeted measurement on the influence of different environmental disturbance in different forms under different local scenes such as angle generation links, angle measurement links and environments where a base is located, and the like, effectively analyzing the influence mechanism and action law of different error sources on a response link in the measurement process, providing a more effective high-precision error compensation model function, effectively improving the angle actually generated by the angle of the device and the angle precision actually measured by an autocollimator, effectively improving the closed-loop feedback precision, and further improving the influence of external factors such as environment resistance and gravity resistance of the device and the like and improving the measurement precision.
The embodiment of the high-precision high-stability auto-collimation small-angle inspection method is the same as the first embodiment.
Claims (7)
1. The high-precision high-stability auto-collimation small-angle checking device is characterized by comprising a workbench (1), a workbench rotating shaft (2), a workbench rotating shaft seat (3), a displacement actuator (4), a base (6), a plane reflecting mirror (9), an auto-collimator (10), an auto-collimator seat (11), a displacement driving module (12), a data acquisition module (13), a display and main control module (14), an environment compensation module (15) and an environment sensor (18);
the base (6) is horizontally arranged, the workbench (1) is fixedly connected with the workbench rotating shaft (2), the workbench rotating shaft (2) is matched with the workbench rotating shaft seat (3) for use, and the workbench rotating shaft seat (3) and the displacement actuator (4) support two ends of the workbench (1) and are arranged on the base (6); the displacement actuator (4) pushes the movable end of the workbench (1) to slightly rotate around the workbench rotating shaft (2);
the plane reflecting mirror (9) is fixedly connected to the side face of the movable end of the workbench (1), and the plane reflecting mirror (9) is perpendicular to the upper surface of the workbench (1); the workbench (1) rotates around the shaft to drive the pitch angle of the plane mirror (9) to change, and the change of the pitch angle of the plane mirror (9) represents the change of the angle of the workbench (1);
the auto-collimator (10) is fixedly connected to the base (6) through an auto-collimator seat (11), the height of the optical axis of the auto-collimator (10) is consistent with the central height of the plane mirror (9), and the optical axis of the auto-collimator (10) is perpendicular to the plane of the plane mirror (9);
the displacement driving module (12) receives driving signals from the display and main control module (14), and the displacement driving module (12) controls the displacement actuator (4) to generate responsive displacement changes; the data acquisition module (13) acquires photoelectric sensor data generated by measuring angles of the autocollimator (10) and transmits the photoelectric sensor data to the display and main control module (14) to calculate measured angle values;
the environmental sensor (18) uploads the acquisition signal to an environmental compensation module (15).
2. The high-precision high-stability auto-collimation small-angle inspection device according to claim 1, characterized in that the environmental sensor (18) comprises a temperature sensor (181), a humidity sensor (182), a pressure sensor (183) and a sensor pre-circuit (184);
the sensor pre-circuit (184) amplifies and converts temperature, humidity and pressure information of ambient air collected by the temperature sensor (181), the humidity sensor (182) and the pressure sensor (183) into electric signals through the sensor pre-circuit (184) and uploads the electric signals to the environment compensation module (15).
3. A small angle inspection method of a high-precision high-stability auto-collimation small angle inspection device, characterized in that the small angle inspection method employs the high-precision high-stability auto-collimation small angle inspection device according to any one of claims 1 or 2, the small angle inspection method comprising the steps of,
step a, starting up the device for self-checking, adjusting the workbench (1) to be in a horizontal state, and stably placing the angle measuring instrument to be measured at the center of the workbench (1);
b, standing and preheating the instrument, and adjusting the angle measurement zero position of the device;
step b, starting verification, and setting the angle change range [ a, b ] of verification]Verification step L 0 The number of assay spots n, i.e. n= (b-a)/L 0 +1, generating n calibration point standard angles a, a+L 0 、a+2L 0 、……、a+(n-2)L 0 、b；
C, before verifying the first standard angle, the environment sensor (18) works, the current environment parameters of temperature T, humidity W and pressure P are collected, an error correction function is calculated and generated through the environment compensation module (15), and the error correction function is uploaded to the display and main control module (14);
step d, driving the displacement actuator (4) to change the angle of the workbench (1) to a first standard angle a, and generating an original driving signal s 1 The driving signal s1' =f1 (s 1, T, W, P) corrected by the environmental disturbance function, the autocollimator (10) measures the angle value x of the plane mirror (9) in real time 1 Angle value x corrected by environmental disturbance function 1 ’＝f 2 (x 1 T, W, P); wherein f 1 Representing a function, f 2 Representing a function;
step e, recording angle measurement data y of the current measured angle measurement instrument 1 And the angle value x measured by the auto-collimator (10) and corrected by the environmental disturbance function 1 ’；
F, repeating the steps c to e, and measuring environmental parameter data before verification of other verification points by the device sequentially, wherein standard angles a+L of other verification points sequentially occur 0 、a+2L 0 、……、a+(n-2)L 0 B, the driving signals are s in turn 2 、s 3 、……、s (n-1) 、s n The corrected driving signals are s in turn 2 ’、s 3 ’、……、s (n-1) ’、s n ' the measured angle data is sequentially x 2 、x 3 、……、x (n-1) 、x n The standard angle actually generated after correction is x 2 ’、x 3 ’、……、x (n-1) ’、x n ' the recorded angle measurement data of the measured angle measurement instrument are sequentially y 2 、y 3 、……、y (n-1) 、y n ；
And g, processing the stored measurement data by the display and main control module (14) according to the verification requirement, outputting a verification report of the measured angle measuring instrument, and finishing verification.
4. A small angle inspection method of a high precision high stability auto-collimation small angle inspection device according to claim 3, wherein the self-inspection is whether the displacement driving function and the angle measuring function are normal or not in the full range of the test angle measurement.
5. A small angle inspection method of high precision high stability auto-collimation small angle inspection device according to claim 3, characterized in that after the angle measurement indication of the auto-collimator (10) is shifted to be stable, the displacement actuator (4) is driven again to make the angle value measured by the auto-collimator (10) be 0, and the position is recorded as the zero position of the device angle measurement.
6. The high-precision high-stability auto-collimation small-angle checking device is characterized by comprising a workbench (1), a workbench rotating shaft (2), a workbench rotating shaft seat (3), a displacement actuator (4), a base (6), a plane reflecting mirror (9), an auto-collimator (10), an auto-collimator seat (11), a displacement driving module (12), a data acquisition module (13), a display and main control module (14), an environment compensation module (15), an environment sensor (18), a second environment sensor (19) and a strain gauge type pressure sensor (20);
the base (6) is horizontally arranged, the workbench (1) is fixedly connected with the workbench rotating shaft (2), the workbench rotating shaft (2) is matched with the workbench rotating shaft seat (3) for use, and the workbench rotating shaft seat (3) and the displacement actuator (4) support two ends of the workbench (1) and are arranged on the base (6); the displacement actuator (4) pushes the movable end of the workbench (1) to slightly rotate around the workbench rotating shaft (2);
the plane reflecting mirror (9) is fixedly connected to the side face of the movable end of the workbench (1), and the plane reflecting mirror (9) is perpendicular to the upper surface of the workbench (1); the workbench (1) rotates around the shaft to drive the pitch angle of the plane mirror (9) to change, and the change of the pitch angle of the plane mirror (9) represents the change of the angle of the workbench (1);
the auto-collimator (10) is fixedly connected to the base (6) through an auto-collimator seat (11), the height of the optical axis of the auto-collimator (10) is consistent with the central height of the plane mirror (9), and the optical axis of the auto-collimator (10) is perpendicular to the plane of the plane mirror (9);
the second environment sensor (19) is placed inside the autocollimator (10) and is used for measuring the air temperature T and the pressure information P in the closed environment of the autocollimator (10);
the strain gauge type pressure sensor (20) is arranged on the workbench (1) and is arranged along the longitudinal axis direction of the workbench (1) and is used for measuring micro deformation of the workbench (1) when the workbench is bent and deformed due to gravity, temperature and load;
the displacement driving module (12) receives driving signals from the display and main control module (14), and the displacement driving module (12) controls the displacement actuator (4) to generate responsive displacement changes; the data acquisition module (13) acquires photoelectric sensor data generated by measuring angles of the autocollimator (10) and transmits the photoelectric sensor data to the display and main control module (14) to calculate measured angle values;
the environment sensor (18) uploads the acquired signal to the environment compensation module (15);
the data acquired by the second environment sensor (19) and the strain gauge type pressure sensor (20) are transmitted to the environment compensation module (15), and the environment compensation module (15) calculates an environment disturbance error and uploads the corrected value to the display and main control module (14).
7. The high-precision high-stability auto-collimation small-angle inspection device according to claim 1, characterized in that the environmental sensor (18) comprises a temperature sensor (181), a humidity sensor (182), a pressure sensor (183) and a sensor pre-circuit (184);
the sensor pre-circuit (184) amplifies and converts temperature, humidity and pressure information of ambient air collected by the temperature sensor (181), the humidity sensor (182) and the pressure sensor (183) into electric signals through the sensor pre-circuit (184) and uploads the electric signals to the environment compensation module (15).
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