CN116465352A - Large-range high-resolution auto-collimation small-angle inspection device and inspection method thereof - Google Patents

Large-range high-resolution auto-collimation small-angle inspection device and inspection method thereof Download PDF

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Publication number
CN116465352A
CN116465352A CN202310475332.4A CN202310475332A CN116465352A CN 116465352 A CN116465352 A CN 116465352A CN 202310475332 A CN202310475332 A CN 202310475332A CN 116465352 A CN116465352 A CN 116465352A
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China
Prior art keywords
angle
workbench
auto
displacement
rotating shaft
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CN202310475332.4A
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Chinese (zh)
Inventor
于洋
谭久彬
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Harbin Institute of Technology
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Harbin Institute of Technology
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Priority to CN202310475332.4A priority Critical patent/CN116465352A/en
Publication of CN116465352A publication Critical patent/CN116465352A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
    • B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
    • B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
    • B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
    • B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
    • B25H1/18—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top in inclination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042—Calibration or calibration artifacts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/047—Accessories, e.g. for positioning, for tool-setting, for measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0004—Supports

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention relates to the field of precise small-angle measurement, and provides a large-range high-resolution auto-collimation small-angle inspection device and an inspection method, wherein a workbench is supported and placed on a base by a workbench rotating shaft, a workbench rotating shaft seat and a displacement actuator; the displacement actuator is formed by axially connecting a motor lead screw and piezoelectric ceramics, can simultaneously generate wide-range high-resolution displacement, and drives the workbench to wind around the shaft to generate wide-range high-resolution angle change; the automatic collimator and the automatic collimator seat are fixedly arranged on the base, the optical axis is parallel to the axis of the workbench and is positioned at the same height, the angle change of the workbench is reflected by measuring the angle change of the plane mirror on the end surface of the workbench, the display and main control module receives angle measurement data in real time and sends displacement driving signals, and closed loop feedback control of angle generation and measurement is realized; the invention adopts the compound driving device to realize the angle generation and autocollimator angle measurement technology, and has the technical advantages of wide range and high resolution angle generation and measurement function, high angle measurement precision and speed, automatic non-contact measurement process and high measurement efficiency.

Description

Large-range high-resolution auto-collimation small-angle inspection device and inspection method thereof
Technical Field
The invention belongs to the field of precise small-angle measurement, and particularly relates to a large-range high-resolution auto-collimation small-angle inspection device and an inspection method thereof.
Background
The precise small-angle measurement is an important component in the field of geometric quantity measurement, and has wide application in the fields of ultra-precise machining and manufacturing, semiconductor machining, precise motion control, large-scale equipment machining and assembly and the like. The commonly used precise small-angle measuring instruments include frame type level instruments, strip type level instruments, image combination level instruments, electronic level instruments, auto-collimators and the like, and the angle measuring level is critical to the development of the field.
In order to ensure the measurement performance of the precise small-angle measuring instrument, the precise small-angle measuring instrument needs to be calibrated regularly, and a common calibrating instrument is a small-angle inspection instrument. The small angle inspection instrument is a measuring instrument for generating standard small angles and has the characteristics of high precision, high resolution, high measuring speed, simple structure and the like.
The small angle inspection instrument with a traditional structure is shown in fig. 1, and the device comprises a workbench 1, a workbench rotating shaft 2, a workbench rotating shaft seat 3, a displacement actuator 4, a workbench supporting shaft 5, a base 6, a first positioning indicator 7 and a second positioning indicator 8; the base 6 is horizontally arranged, the workbench 1 is fixedly connected with the workbench rotating shaft 2 and the workbench supporting shaft 5, and two ends of the workbench are respectively supported by the workbench rotating shaft seat 3 and the displacement actuator 4 and are arranged on the base 6; the first positioning indicator 7 and the second positioning indicator 8 are vertically arranged above the workbench 1, the two positioning indicators are parallel and have fixed distance, and the measuring head contacts the surface of the workbench 1. The displacement actuator 4 displaces in the vertical direction to drive the workbench supporting shaft 5 to generate height change, and the workbench 1 rotates slightly around the workbench rotating shaft 2 to drive the upper surface of the workbench 1 to incline; the measuring heads of the two positioning indicators move along the axes of the respective positioning indicators along the height change of the upper surface of the workbench 1 and detect the displacement change; according to the displacement variable quantity of the two positioning indicators and the known distance between the two positioning indicators, the current angle value of the workbench 1 can be calculated; the angle value of the change is calculated by using the tangent principle by placing a gauge block of known thickness under the gauge head of the one-side positioning indicator.
In summary, the small angle inspection apparatus of the conventional structure has the following problems:
1. the angle generation of the traditional small-angle inspection instrument is based on the tangent principle, the accuracy of the generated angle depends on the axial displacement measurement precision of the two positioning indicators, the distance precision of the two positioning indicators and the precision of the gauge block, the angle calculation process comprises a plurality of physical quantities, the angle change of the workbench cannot be directly measured, obvious nonlinear errors exist under a large angle, and the full-range angle generation precision is low;
2. the positioning indicator and the manual gauge block used by the small-angle inspection instrument with the traditional structure adopt a contact type measurement mode, and the situation that the measuring head and the gauge block are worn exists after long-time work, so that small errors exist in the angle, the problem that the precision of the small-angle inspection instrument is reduced is generated, the precision and the service life of the instrument are reduced, and periodic maintenance is needed;
3. the measuring range and the resolution of the angle generated by the small-angle inspection instrument with the traditional structure depend on the measuring range and the resolution of the positioning indicators, the distance between the two positioning indicators and the thickness of the gauge block used; due to comprehensive consideration of instrument structural design, materials and dimensional space of parts and the like, the small-angle inspection instrument is difficult to realize the angle generation of large-range micro-nano radian magnitude high resolution, and has limited verification capability on a high-precision angle measurement instrument.
Disclosure of Invention
The invention provides a wide-range high-resolution auto-collimation small-angle inspection device and an inspection method thereof, aiming at the problems that a traditional small-angle inspection device has a plurality of physical quantities, the chain length is measured, direct angle measurement cannot be realized, the contact measurement mode has abrasion, the wide-range high-resolution angle cannot be realized, and the like; the angle measuring device has the technical advantages of direct non-contact angle measurement of the angle of the workbench, large angle measuring range, high resolution, high automatic measuring efficiency and the like.
The invention is realized by the following technical scheme:
the device comprises a workbench 1, a workbench rotating shaft 2, a workbench rotating shaft seat 3, a displacement actuator 4, a base 6, a plane reflecting mirror 9, an autocollimator 10, an autocollimator seat 11, a displacement driving module 12, a data acquisition module 13 and a display and main control module 14;
the base 6 is horizontally arranged, the workbench 1 is fixedly connected with the workbench rotating shaft 2, the workbench rotating shaft 2 is matched with the workbench rotating shaft seat 3 for use, two ends of the workbench 1 are respectively supported by the workbench rotating shaft seat 3 and the displacement actuator 4, and the workbench rotating shaft seat 3 and the displacement actuator 4 are both arranged on the base 6;
the plane reflecting mirror 9 is fixedly arranged on the side surface of the movable end of the workbench 1, and the plane reflecting mirror 9 is perpendicular to the upper surface of the workbench 1; the workbench 1 rotates around the shaft to drive the pitch angle of the plane mirror 9 to change, and the change of the pitch angle of the plane mirror 9 represents the change of the angle of the workbench 1;
the auto-collimator 10 is fixedly connected to the base 6 through an auto-collimator seat 11, the height of the optical axis of the auto-collimator 10 is consistent with the central height of the plane mirror 9, and the optical axis of the auto-collimator 10 is perpendicular to the plane of the plane mirror 9;
the displacement driving module 12 receives a driving signal from the display and main control module 14 and controls the displacement actuator 4 to generate a responsive displacement change; the data acquisition module 13 acquires photoelectric sensor data generated by measuring angles of the autocollimator 10, and transmits the photoelectric sensor data to the display and main control module 14 for calculating measured angle values.
Further, the displacement actuator 4 comprises a motor and a screw 41, a connector 42 and piezoelectric ceramics 43
The displacement actuator 4 is formed by connecting a motor, a lead screw 41, a connector 42 and piezoelectric ceramics 43 in series on the same axis, wherein the motor and the lead screw 41 are used for generating large-range low-resolution displacement, the piezoelectric ceramics 43 are used for generating small-range high-resolution displacement, and the connector 42 plays a role of fixed connection to jointly realize the large-range high-resolution displacement;
the displacement actuator 4 pushes the movable end of the workbench 1 to slightly rotate around the workbench rotating shaft 2.
The method for checking the wide-range high-resolution auto-collimation small angle comprises the following steps of:
step a, starting up the device for self-checking, adjusting the workbench 1 to be in a horizontal state, and stably placing the angle measuring instrument to be measured at the center of the workbench 1;
b, standing and preheating the instrument, and adjusting the angle measurement zero position of the device;
step c, setting verification parameters of the angle measuring instrument to be measured, and setting the verification angle change ranges [ a, b ]]Verification step L 0 The number of assay spots n, i.e. n= (b-a)/L 0 +1, generating n calibration point standard angles a, a+L 0 、a+2L 0 、……、a+(n-2)L 0 、b；
Step d, verification is carried out according to the set parameters;
and e, the display and main control module 14 processes the stored standard angle data and measurement data according to the verification requirement, and outputs a verification report of the measured angle measuring instrument to finish verification.
Further, the self-check is to test whether the displacement driving function and the angle measuring function are normal in the full range of the angle measurement.
Further, after the angle measurement indication of the auto-collimator 10 is shifted to be stable, the displacement actuator 4 is driven again to make the angle value measured by the auto-collimator 10 be 0, and the position is recorded as the zero position of the angle measurement of the device.
Further, the assay procedure is that,
step d1, driving the motor of the displacement actuator 4 and the screw 41 to change the angle of the workbench 1, enabling the angle value measured by the auto-collimator 10 to approach the first calibration point standard angle a, driving the piezoelectric ceramic 43 again to enable the angle value measured by the auto-collimator 10 to be equal to the first calibration point standard angle a when the difference value is within the range of travel of the piezoelectric ceramic 43, and recording the angle indication x of the measured angle measuring instrument at the current moment 1 ；
Step d2, repeating the step d1, and sequentially generating other standard angles a+L of the verification points by the device 0 、a+2L 0 、……、a+(n-2)L 0 B, sequentially recording the angle indication x of the measured angle measuring instrument 2 、x 3 、……、x (n-1) 、x n 。
The large-range high-resolution auto-collimation small-angle inspection device comprises a workbench 1, a workbench rotating shaft 2, a workbench rotating shaft seat 3, a first displacement actuator 16, a second displacement actuator 17, a base 6, a plane reflecting mirror 9, an auto-collimator 10, an auto-collimator seat 11, a displacement driving module 12, a data acquisition module 13 and a display and main control module 14;
the base 6 is horizontally arranged, the center of the workbench 1 is fixedly connected with the workbench rotating shaft 2, the workbench rotating shaft 2 is matched with the workbench rotating shaft seat 3 for use, the two ends of the workbench 1 are respectively supported by the first displacement actuator 16 and the second displacement actuator 17, and the workbench rotating shaft seat 3, the first displacement actuator 16 and the second displacement actuator 17 are all arranged on the base 6;
the plane reflecting mirror 9 is fixedly arranged on the side surface of the movable end of the workbench 1, and the plane reflecting mirror 9 is perpendicular to the upper surface of the workbench 1; the workbench 1 rotates around the shaft to drive the pitch angle of the plane mirror 9 to change, and the change of the pitch angle of the plane mirror 9 represents the change of the angle of the workbench 1;
the auto-collimator 10 is fixedly connected to the base 6 through an auto-collimator seat 11, the height of the optical axis of the auto-collimator 10 is consistent with the central height of the plane mirror 9, and the optical axis of the auto-collimator 10 is perpendicular to the plane of the plane mirror 9;
the displacement driving module 12 receives a driving signal from the display and main control module 14 and controls the displacement actuator 4 to generate a responsive displacement change; the data acquisition module 13 acquires photoelectric sensor data generated by measuring angles of the autocollimator 10, and transmits the photoelectric sensor data to the display and main control module 14 for calculating measured angle values.
The beneficial effects of the invention are as follows:
1. aiming at the problem that the stroke of a single one-side displacement driver is overlarge when a large-range angle occurs, a structure is provided in which the position of a rotating shaft of a workbench is moved to the center of the workbench, and the displacement drivers are symmetrically arranged at two ends of the workbench; when the same angle change is generated on the workbench, the two ends of the workbench are simultaneously moved reversely by analysis from the geometric relation, the displacement is equal in size and opposite in direction, and the pivoting radius is half of the original pivoting radius, so that the strokes of the first displacement actuator and the second displacement actuator are only half of the original pivoting radius, and the technical advantages of nonlinear errors of angle occurrence and angle measurement are effectively reduced.
2. The device aims at the problems that the workbench is bent and deformed when the supporting span of the workbench is large and the load is large, and in the proposed device structure, the gravity center and the support of the workbench are both positioned at the geometric center, so that the bending deformation of the workbench caused by the gravity of the workbench and the gravity of a measured angle measuring instrument is effectively reduced, the shape and position relationship between the upper surface of the workbench and the plane reflecting mirror is ensured, and the angle generation and measuring precision is improved.
3. The device aims at the problems that the supporting span of a workbench is large, the workbench center simultaneously has angle and height change when the workbench rotates around a workbench rotating shaft on one side, in the proposed device structure, the workbench is positioned at the geometric center when rotating, the height hardly changes, when a measured angle measuring instrument is placed at the center of the workbench, only angle change components exist, the height change components are reduced, the influence of coupling on the precision of the actually-generated angle is reduced, and the measuring precision of the device is improved.
Drawings
Fig. 1 is a schematic diagram of a conventional apparatus.
Fig. 2 is a front view of a first construction of the present invention.
Fig. 3 is a top view of a first construction of the present invention.
Fig. 4 is a front view of a second construction of the present invention.
Fig. 5 is a top view of a second construction of the present invention.
Fig. 6 is a schematic structural view of the displacement actuator of the compound driving device of the present invention.
1 workbench, 2 workbench rotating shafts, 3 workbench rotating shaft seats, 4 displacement actuators, 41 motors, lead screws, 42 connectors, 43 piezoelectric ceramics, 5 workbench supporting shafts, 6 bases, 7 first positioning indicators, 8 second positioning indicators, 9 plane reflectors, 10 autocollimators, 11 autocollimators, 12 displacement driving modules, 13 data acquisition modules, 14 display and main control modules, 16 first displacement actuators and 17 second displacement actuators
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
The embodiment is a wide-range high-resolution auto-collimation small-angle inspection device and an inspection method.
The schematic structural diagrams of the embodiment of the wide-range high-resolution auto-collimation small-angle inspection device of the embodiment are shown in fig. 2 and 3, and the composite driving device is shown in fig. 6.
The device comprises a workbench 1, a workbench rotating shaft 2, a workbench rotating shaft seat 3, a displacement actuator 4 (comprising a motor, a screw 41, a connector 42 and piezoelectric ceramics 43), a base 6, a plane mirror 9, an autocollimator 10, an autocollimator seat 11, a displacement driving module 12, a data acquisition module 13 and a display and main control module 14.
The base 6 is horizontally arranged, the workbench 1 is fixedly connected with the workbench rotating shaft 2, and two ends of the workbench 1 are respectively supported by the workbench rotating shaft seat 3 and the displacement actuator 4 and are arranged on the base 6; the displacement actuator 4 can push the movable end of the workbench 1 to slightly rotate around the workbench rotating shaft 2;
the plane reflecting mirror 9 is fixedly connected to the side surface of the movable end of the workbench 1 and is vertical to the upper surface of the workbench 1; the workbench 1 rotates around the shaft to drive the plane mirror 9 to change the pitch angle, and the change of the pitch angle of the plane mirror 9 represents the change of the angle of the workbench 1;
the auto-collimator 10 is fixedly connected to the base 6 by an auto-collimator seat 11, the height of the optical axis of the auto-collimator 10 is consistent with the height of the center of the plane mirror 9, and the optical axis is perpendicular to the plane of the plane mirror 9;
the displacement actuator 4 is formed by connecting a motor, a lead screw 41, a connector 42 and piezoelectric ceramics 43 in series on the same axis, wherein the motor and the lead screw 41 are used for generating large-range low-resolution displacement, the piezoelectric ceramics 43 are used for generating small-range high-resolution displacement, and the connector 42 plays a role of fixed connection to jointly realize the large-range high-resolution displacement;
the displacement driving module 12 receives a driving signal from the display and main control module 14 and controls the displacement actuator 4 to generate a responsive displacement change; the data acquisition module 13 acquires photoelectric sensor data generated by measuring angles of the autocollimator 10, and transmits the photoelectric sensor data to the display and main control module 14 for calculating measured angle values.
The measurement principle of this embodiment is as follows:
the display and main control module 14 sends a driving signal to the displacement driving module 12 according to the set angle value to enable the displacement actuator 4 to generate displacement change; firstly, a motor and a screw 41 are driven to change the height of a movable end of a workbench 1, so that the workbench rotates around a workbench rotating shaft 2, the workbench 1 drives a plane reflecting mirror 9 on the end face to incline, the pitch angle of the plane reflecting mirror 9 is changed, the angle change amount reaches the vicinity of a set angle value, and the angle difference value is within the stroke range of piezoelectric ceramics 43; the piezoelectric ceramics 43 are driven to generate high-precision micro displacement to adjust the angle change of the workbench 1 and the plane mirror 9 until the angle of the change of the workbench 1 is consistent with the set angle value; the driving process is simultaneously carried out, the changing angle of the plane reflecting mirror 9 measured by the autocollimator and uploaded by the data acquisition module 13 is received and calculated in real time, and compared with the set angle value, the display and main control module 14 sends out a driving signal of the angle difference value, so that the closed loop feedback control function of the angle is realized.
The embodiment of the wide-range high-resolution auto-collimation small-angle inspection method of the embodiment comprises the following steps:
step a, starting up the device for self-checking, testing whether a displacement driving function and an angle measuring function are normal in the full range of angle measurement, driving a displacement actuator 4 to enable a workbench 1 to be in a horizontal state, and stably placing a measured angle measuring instrument in the center of the workbench 1;
b, standing the instrument for preheating for a period of time, driving the displacement actuator 4 again to enable the angle value measured by the auto-collimator 10 to be 0 after the angle measurement indication of the auto-collimator 10 drifts to be stable, and recording the position as a device angle measurement zero position;
step b, starting verification, and setting the angle change range [ a, b ] of verification]Verification step L 0 The number of assay spots n, i.e. n= (b-a)/L 0 +1, generating n calibration point standard angles a, a+L 0 、a+2L 0 、……、a+(n-2)L 0 、b；
Step c, driving a motor of the displacement actuator 4 and a lead screw 41 to change the angle of the workbench 1, enabling the angle value measured by the auto-collimator 10 to be close to a first calibration point standard angle a, driving the piezoelectric ceramic 43 again to enable the angle value measured by the auto-collimator 10 to be equal to the first calibration point standard angle a when the difference value is within the range of travel of the piezoelectric ceramic 43, and recording an angle indication x1 of a measured angle measuring instrument at the current moment;
step d, repeating the step c, and sequentially generating other standard angles a+L of the verification points by the device 0 、a+2L 0 、……、a+(n-2)L 0 B, sequentially recording the angle indication x of the measured angle measuring instrument 2 、x 3 、……、x (n-1) 、x n ；
And e, the display and main control module 14 processes the stored standard angle data and measurement data according to the verification requirement, and outputs a verification report of the measured angle measuring instrument to finish verification.
Example two
The embodiment is a wide-range high-resolution auto-collimation small-angle inspection device and method.
The embodiment of the wide-range high-resolution auto-collimation small-angle inspection device of the embodiment is shown in fig. 4 and 5 in structural schematic views.
On the basis of the first embodiment, the displacement actuator 4 is removed, the workbench rotating shaft 2 and the workbench rotating shaft seat 3 are arranged at the center position of the workbench 1, the first displacement actuator 16 and the second displacement actuator 17 are additionally arranged at two sides of the workbench 1 respectively, and the displacement driving module 12 can drive the first displacement actuator 16 and the second displacement actuator 17 to generate displacement changes with equal magnitude and opposite direction simultaneously;
the placement positions of the first displacement actuator 16 and the second displacement actuator 17 are symmetrical relative to the center of the workbench 1 and are positioned on the axis of the workbench 1; the first displacement actuator 16 and the second displacement actuator 17 have the same composite driving structure as the displacement actuator 4, and the displacement driving response characteristics of the first displacement actuator 16 and the second displacement actuator 17 are the same.
The embodiment of the wide-range high-resolution auto-collimation small-angle inspection method of the embodiment comprises the following steps:
step a, starting up the device for self-checking, testing whether the displacement driving function and the angle measuring function are normal in the full range of angle measurement, driving the first displacement actuator 16 and the second displacement actuator 17 to enable the workbench 1 to be in a horizontal state, and stably placing the angle measuring instrument to be measured in the center position of the workbench 1;
b, standing the instrument for preheating for a period of time, driving the first displacement actuator 16 and the second displacement actuator 17 again after the angle measurement indication of the auto-collimator 10 drifts to be stable, enabling the angle value measured by the auto-collimator 10 to be 0, and recording the position as a device angle measurement zero position;
step b, starting verification, and setting the angle change range [ a, b ] of verification]Verification step L 0 The number of assay spots n, i.e. n= (b-a)/L 0 +1, generating n calibration point standard angles a, a+L 0 、a+2L 0 、……、a+(n-2)L 0 、b；
Step c, driving the first displacement actuator 16 and the second displacement actuator 17 to change the angle of the workbench 1, enabling the angle value measured by the auto-collimator 10 to be close to the first calibration point standard angle a, driving the first displacement actuator 16 and the second displacement actuator 17 again to enable the angle value measured by the auto-collimator 10 to be equal to the first calibration point standard angle a within the range of the travel of the piezoelectric ceramics 43, and recording the angle indication x1 of the measured angle measuring instrument at the current moment;
step d, repeating the step c, and sequentially generating other standard angles a+L of the verification points by the device 0 、a+2L 0 、……、a+(n-2)L 0 B, sequentially recording the angle indication x of the measured angle measuring instrument 2 、x 3 、……、x (n-1) 、x n ；
And e, the display and main control module 14 processes the stored standard angle data and measurement data according to the verification requirement, and outputs a verification report of the measured angle measuring instrument to finish verification.

Claims (7)

1. A wide-range high-resolution auto-collimation small-angle inspection device is characterized in that: the inspection device comprises a workbench (1), a workbench rotating shaft (2), a workbench rotating shaft seat (3), a displacement actuator (4), a base (6), a plane mirror (9), an autocollimator (10), an autocollimator seat (11), a displacement driving module (12), a data acquisition module (13) and a display and main control module (14);
the base (6) is horizontally arranged, the workbench (1) is fixedly connected with the workbench rotating shaft (2), the workbench rotating shaft (2) is matched with the workbench rotating shaft seat (3) for use, the workbench rotating shaft seat (3) and the displacement actuator (4) support the two ends of the workbench (1) respectively, and the workbench rotating shaft seat (3) and the displacement actuator (4) are both arranged on the base (6);
the plane reflecting mirror (9) is fixedly arranged on the side surface of the movable end of the workbench (1), and the plane reflecting mirror (9) is perpendicular to the upper surface of the workbench (1); the workbench (1) rotates around the shaft to drive the pitch angle of the plane reflecting mirror (9) to change, and the change of the pitch angle of the plane reflecting mirror (9) represents the change of the angle of the workbench (1);
the auto-collimator (10) is fixedly connected to the base (6) through an auto-collimator seat (11), the height of the optical axis of the auto-collimator (10) is consistent with the central height of the plane mirror (9), and the optical axis of the auto-collimator (10) is perpendicular to the plane of the plane mirror (9);
the displacement driving module (12) receives driving signals from the display and main control module (14) and controls the displacement actuator (4) to generate responsive displacement changes; the data acquisition module (13) acquires photoelectric sensor data generated by measuring angles of the autocollimator (10) and transmits the photoelectric sensor data to the display and main control module (14) to calculate measured angle values.
2. The wide-range high-resolution auto-collimation small-angle inspection device according to claim 1, wherein: the displacement actuator (4) comprises a motor, a screw (41), a connector (42) and piezoelectric ceramics (43)
The displacement actuator (4) is formed by connecting a motor and a screw rod (41), a connector (42) and piezoelectric ceramics (43) in series on the same axis, wherein the motor and the screw rod (41) are used for generating large-range low-resolution displacement, the piezoelectric ceramics (43) are used for generating small-range high-resolution displacement, and the connector (42) plays a role of fixed connection to jointly realize large-range high-resolution displacement;
the displacement actuator (4) pushes the movable end of the workbench (1) to slightly rotate around the workbench rotating shaft (2).
3. A wide-range high-resolution auto-collimation small-angle inspection method is characterized in that: the inspection method uses the large-range high-resolution auto-collimation small-angle inspection device as claimed in any one of claims 1-2, and the inspection method specifically comprises the following steps:
step a, starting up the device for self-checking, adjusting the workbench (1) to be in a horizontal state, and stably placing the angle measuring instrument to be measured at the center of the workbench (1);
b, standing and preheating the instrument, and adjusting the angle measurement zero position of the device;
step c, setting verification parameters of the angle measuring instrument to be measured, and setting the verification angle change ranges [ a, b ]]Verification step L 0 The number of assay spots n, i.e. n= (b-a)/L 0 +1, generating n calibration point standard angles a, a+L 0 、a+2L 0 、……、a+(n-2)L 0 、b；
Step d, verification is carried out according to the set parameters;
and e, processing the stored standard angle data and the measured data by the display and main control module (14) according to the verification requirement, outputting a verification report of the measured angle measuring instrument, and finishing verification.
4. A wide-range high-resolution auto-collimation small-angle inspection method according to claim 3, characterized in that: the self-checking is to test whether the displacement driving function and the angle measuring function are normal in the full range of the angle measurement.
5. A wide-range high-resolution auto-collimation small-angle inspection method according to claim 3, characterized in that: after the angle measurement indication of the auto-collimator (10) is shifted to be stable, the displacement actuator (4) is driven again to enable the angle measurement value of the auto-collimator (10) to be 0, and the position is recorded as a device angle measurement zero position.
6. A wide-range high-resolution auto-collimation small-angle inspection method according to claim 3, characterized in that: the verification process is that,
step d1, driving a motor and a screw (41) of a displacement actuator (4) to change the angle of a workbench (1), enabling an angle value measured by an auto-collimator (10) to be close to a first calibration point standard angle a, driving the piezoelectric ceramic (43) again to enable the angle value measured by the auto-collimator (10) to be equal to the first calibration point standard angle a within the range of travel of the piezoelectric ceramic (43), and recording an angle indication x of a measured angle measuring instrument at the current moment 1 ；
Step d2, repeating the step d1, and sequentially generating other standard angles a+L of the verification points by the device 0 、a+2L 0 、……、a+(n-2)L 0 B, sequentially recording the angle indication x of the measured angle measuring instrument 2 、x 3 、……、x (n-1) 、x n 。
7. A wide-range high-resolution auto-collimation small-angle inspection device is characterized in that: the inspection device comprises a workbench (1), a workbench rotating shaft (2), a workbench rotating shaft seat (3), a first displacement actuator (16), a second displacement actuator (17), a base (6), a plane reflecting mirror (9), an autocollimator (10), an autocollimator seat (11), a displacement driving module (12), a data acquisition module (13) and a display and main control module (14);
the base (6) is horizontally arranged, the center of the workbench (1) is fixedly connected with the workbench rotating shaft (2), the workbench rotating shaft (2) is matched with the workbench rotating shaft seat (3) for use, the two ends of the workbench (1) are respectively supported by the first displacement actuator (16) and the second displacement actuator (17), and the workbench rotating shaft seat (3), the first displacement actuator (16) and the second displacement actuator (17) are all arranged on the base (6);
the plane reflecting mirror (9) is fixedly arranged on the side surface of the movable end of the workbench (1), and the plane reflecting mirror (9) is perpendicular to the upper surface of the workbench (1); the workbench (1) rotates around the shaft to drive the pitch angle of the plane reflecting mirror (9) to change, and the change of the pitch angle of the plane reflecting mirror (9) represents the change of the angle of the workbench (1);
the auto-collimator (10) is fixedly connected to the base (6) through an auto-collimator seat (11), the height of the optical axis of the auto-collimator (10) is consistent with the central height of the plane mirror (9), and the optical axis of the auto-collimator (10) is perpendicular to the plane of the plane mirror (9);
the displacement driving module (12) receives driving signals from the display and main control module (14) and controls the displacement actuator (4) to generate responsive displacement changes; the data acquisition module (13) acquires photoelectric sensor data generated by measuring angles of the autocollimator (10) and transmits the photoelectric sensor data to the display and main control module (14) to calculate measured angle values.
CN202310475332.4A 2023-04-28 2023-04-28 Large-range high-resolution auto-collimation small-angle inspection device and inspection method thereof Pending CN116465352A (en)

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