CN111380486A - High-resolution angular displacement measuring device and method for micro-thrust measurement - Google Patents

High-resolution angular displacement measuring device and method for micro-thrust measurement Download PDF

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CN111380486A
CN111380486A CN202010217268.6A CN202010217268A CN111380486A CN 111380486 A CN111380486 A CN 111380486A CN 202010217268 A CN202010217268 A CN 202010217268A CN 111380486 A CN111380486 A CN 111380486A
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杨文将
冀宇
刘朝鑫
宋东彬
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Beihang University
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Abstract

本发明公开了一种用于微小推力测量的高分辨率角位移测量装置及其方法。测量装置包括激光位移传感器、支架、阿基米德测量块、数据采集仪,阿基米德测量块随被测目标同轴转动,其外径随方位角呈线性增加,通过测量激光传感器和阿基米德测量块侧表面之间的距离变化解算被测目标的角位移;测量步骤包括(1)激光位移传感器发射测量光测量其与阿基米德测量块侧表面之间的距离,(2)数据采集仪采集并记录激光文位移传感器输出的模拟信号电压,(3)通过输出电压的变化来解算被测目标的角位移。本发明原理简单,测量时响应速度快,测量分辨率高,解决了现有角位移测量方法原理复杂、制作成本高、调试难度大等不足。

Figure 202010217268

The invention discloses a high-resolution angular displacement measuring device and a method for measuring micro thrust. The measuring device includes a laser displacement sensor, a bracket, an Archimedes measuring block, and a data acquisition instrument. The Archimedes measuring block rotates coaxially with the measured target, and its outer diameter increases linearly with the azimuth angle. Calculate the angular displacement of the measured target by changing the distance between the side surfaces of the Kimede measurement block; the measurement step includes (1) the laser displacement sensor emits measurement light to measure the distance between it and the side surface of the Archimedes measurement block, ( 2) The data acquisition instrument collects and records the analog signal voltage output by the laser text displacement sensor, and (3) calculates the angular displacement of the measured target through the change of the output voltage. The invention has the advantages of simple principle, fast response speed during measurement and high measurement resolution, and solves the shortcomings of the existing angular displacement measurement method, such as complex principle, high manufacturing cost, and difficulty in debugging.

Figure 202010217268

Description

一种用于微小推力测量的高分辨率角位移测量装置及其方法A high-resolution angular displacement measuring device and method for measuring tiny thrust

技术领域technical field

本发明涉及测量技术领域,具体是一种用于微小推力测量的高分辨率角位移测量装置及其方法。The invention relates to the technical field of measurement, in particular to a high-resolution angular displacement measurement device and a method for measuring tiny thrust.

背景技术Background technique

微推力器的地面推力测量是其研制过程中必不可少的一个关键环节,微小推力的精确测量可以为其设计改进、参数选择和性能评估提供必要的参考数据。微推力器的推力通常为mN级甚至μN级,难以通过力传感器直接测量,现有的微小推力测量装置大多通过测量台架在推力作用下的位移或形变来计算推力大小。其中,MIT和北航分别提出了一种基于磁悬浮轴承的微小推力测量方式,该方法通过测量悬浮转子在推力器作用下的角位移来计算微小推力。然而,微推力器的推重比非常小,通常低于<10-5,对角位移测量分辨率提出了很高的要求。The ground thrust measurement of the micro-thrust is an indispensable key link in its development process. The precise measurement of the micro-thrust can provide necessary reference data for its design improvement, parameter selection and performance evaluation. The thrust of the micro thruster is usually mN or even μN, which is difficult to measure directly by force sensors. Most of the existing micro thrust measurement devices calculate the thrust by measuring the displacement or deformation of the bench under the action of thrust. Among them, MIT and Beihang respectively proposed a micro-thrust measurement method based on magnetic suspension bearings, which calculates the micro-thrust by measuring the angular displacement of the suspended rotor under the action of the thruster. However, the thrust-to-weight ratio of microthrusters is very small, typically below <10 -5 , placing high demands on the resolution of angular displacement measurements.

本发明提出了一种用于微小推力测量的高分辨率角位移测量装置及其方法,具有响应速度快、测量分辨率高、制作成本低等显著优点。The invention proposes a high-resolution angular displacement measuring device and a method for measuring tiny thrust, which have the remarkable advantages of fast response speed, high measurement resolution, low manufacturing cost and the like.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于:针对上述问题,提供一种用于微小推力测量的高分辨率角位移测量装置及其方法。本发明的技术方案如下:The purpose of the present invention is to provide a high-resolution angular displacement measuring device and a method for measuring micro-thrust in view of the above problems. The technical scheme of the present invention is as follows:

一种用于微小推力测量的高分辨率角位移测量装置,包括:激光位移传感器,所述传感器可以将被测目标的位移变化输出为模拟信号电压,其响应时间不超过5ms,测量分辨率可达2μm;支架,所述支架用于固定安装激光位移传感器,可以调节激光传感器的竖直高度和水平位置;数据采集仪,所述采集仪可以接收并记录采集激光位移传感器输出的模拟信号;阿基米德测量块,所述测量块与被测试目标同轴固定连接并随之同步转动,该测量块外径R(单位:mm)随方位角θ(单位:°)的增大而成线性增加,满足如下数学关系:A high-resolution angular displacement measurement device for micro thrust measurement, comprising: a laser displacement sensor, the sensor can output the displacement change of the measured target as an analog signal voltage, the response time is not more than 5ms, and the measurement resolution can be up to 2 μm; bracket, which is used to fix the laser displacement sensor, and can adjust the vertical height and horizontal position of the laser sensor; data acquisition instrument, which can receive and record the analog signal output by the laser displacement sensor; A Kimed measuring block, the measuring block is coaxially and fixedly connected with the tested target and rotates synchronously with it, the outer diameter R (unit: mm) of the measuring block is linear with the increase of the azimuth angle θ (unit: °) increase, to satisfy the following mathematical relationship:

R=72+(1/5)×θ(0≤θ≤360°)R=72+(1/5)×θ(0≤θ≤360°)

相应的,所述阿基米德测量块的角度变化量Δθ(单位:°)满足如下数学关系:Correspondingly, the angle change Δθ (unit: °) of the Archimedes measurement block satisfies the following mathematical relationship:

Δθ=5×ΔRΔθ=5×ΔR

其中,ΔR(单位:mm)为阿基米德测量块的外径变化量。激光位移传感器的测量分辨率为0.002mm,对应的角位移测量分辨率为0.01°。Among them, ΔR (unit: mm) is the change in the outer diameter of the Archimedes measuring block. The measurement resolution of the laser displacement sensor is 0.002mm, and the corresponding angular displacement measurement resolution is 0.01°.

一种用于微小推力测量的高分辨率角位移测量方法,包括如下步骤:A high-resolution angular displacement measurement method for micro thrust measurement, comprising the following steps:

(1)所述激光位移传感器发射测量光测量其与阿基米德测量块的侧表面之间的距离L(单位:mm);(1) The laser displacement sensor emits measuring light to measure the distance L (unit: mm) between it and the side surface of the Archimedes measuring block;

(2)所述数据采集仪采集并记录激光位移传感器输出的模拟信号电压U(单位:V);(2) The data acquisition instrument collects and records the analog signal voltage U (unit: V) output by the laser displacement sensor;

(3)根据模拟信号电压的变化量ΔU(单位:V)解算所述阿基米德测量块的角位移变化量Δθ(单位:°)。(3) Calculate the angular displacement variation Δθ (unit: °) of the Archimedes measurement block according to the variation ΔU (unit: V) of the analog signal voltage.

进一步的,所述步骤(3)中,所述数据采集仪记录的模拟信号U的变化量ΔU满足如下数学关系:Further, in the step (3), the variation ΔU of the analog signal U recorded by the data acquisition instrument satisfies the following mathematical relationship:

ΔU=ΔL=ΔRΔU=ΔL=ΔR

其中,ΔL(单位:mm)为激光位移传感器和阿基米德测量块之间距离的变化量。Among them, ΔL (unit: mm) is the variation of the distance between the laser displacement sensor and the Archimedes measurement block.

在任意时刻,待测机构的角位移为:At any time, the angular displacement of the mechanism to be tested is:

Δθ=5×ΔUΔθ=5×ΔU

本发明的优点在于:The advantages of the present invention are:

1)原理简单,只需测量一个物理量U,即可解算出被测目标的角位移Δθ;1) The principle is simple, the angular displacement Δθ of the measured target can be calculated only by measuring a physical quantity U;

2)响应速度快,激光位移传感器的响应时间不超过5ms;2) The response speed is fast, and the response time of the laser displacement sensor does not exceed 5ms;

3)测量分辨率高,激光位移传感器的测量分辨率可达2μm,相应的角位移测量分辨率可达0.01°;3) The measurement resolution is high, the measurement resolution of the laser displacement sensor can reach 2μm, and the corresponding angular displacement measurement resolution can reach 0.01°;

4)非接触式测量,对被测目标的运动状态不会造成任何干扰。4) Non-contact measurement will not cause any interference to the motion state of the measured target.

附图说明Description of drawings

图1为本发明的测量装置示意图;1 is a schematic diagram of a measuring device of the present invention;

图2为本发明的阿基米德测量块示意图;Fig. 2 is the schematic diagram of Archimedes measuring block of the present invention;

图3为本发明的测量原理示意图;Fig. 3 is the measurement principle schematic diagram of the present invention;

图4为本发明的测量方法流程图。FIG. 4 is a flow chart of the measurement method of the present invention.

1-激光位移传感器;2-阿基米德测量块;3-支架;4-数据采集仪。1-Laser displacement sensor; 2-Archimedes measuring block; 3-Bracket; 4-Data acquisition instrument.

具体实施方式Detailed ways

下面将结合附图和实施例对本发明作进一步的详细说明。The present invention will be further described in detail below with reference to the accompanying drawings and embodiments.

本发明一种基于激光位移传感器的非接触式高分辨率角位移测量装置,所述测量装置如图1所示,包括激光位移传感器1,阿基米德测量块2,支架3,数据采集仪4;The present invention is a non-contact high-resolution angular displacement measuring device based on a laser displacement sensor. As shown in FIG. 1, the measuring device includes a laser displacement sensor 1, an Archimedes measuring block 2, a bracket 3, and a data acquisition instrument. 4;

所述激光位移传感器1可将检测到的距离变化ΔL转化为模拟信号ΔU输出,且距离每变化1mm,输出电压相应变化1V,即:The laser displacement sensor 1 can convert the detected distance change ΔL into an analog signal ΔU output, and for every 1mm change in the distance, the output voltage correspondingly changes by 1V, that is:

ΔU=ΔLΔU=ΔL

所述激光位移传感器1的测量重复性误差不超过2μm,响应时间不超过5ms;The measurement repeatability error of the laser displacement sensor 1 does not exceed 2μm, and the response time does not exceed 5ms;

所述激光位移传感器1通过螺钉固定于所述支架3上,测量时保持静止;The laser displacement sensor 1 is fixed on the bracket 3 by screws, and remains stationary during measurement;

所述支架3包括竖直和水平两个直线导轨,测量前调节激光位移传感器1与阿基米德测量块2保持同一高度,并调节激光位移传感器1的发射端对准阿基米德测量块2的圆心;The bracket 3 includes two vertical and horizontal linear guide rails. Before the measurement, the laser displacement sensor 1 and the Archimedes measurement block 2 are adjusted to maintain the same height, and the emitting end of the laser displacement sensor 1 is adjusted to align with the Archimedes measurement block. 2 the center of the circle;

所述阿基米德测量块2通过高精度线切割加工而成,中心有螺纹孔,通过螺钉与被测目标同轴固定连接,测量时随被测目标同步转动,其外径R随方位角的增大而线性增加,满足如下数学关系:The Archimedes measuring block 2 is processed by high-precision wire cutting, and has a threaded hole in the center, which is coaxially and fixedly connected to the measured target through screws. During measurement, it rotates synchronously with the measured target, and its outer diameter R varies with the azimuth angle. increases linearly with the increase of , satisfying the following mathematical relationship:

R=72+(1/5)×θ(0≤θ≤360°)R=72+(1/5)×θ(0≤θ≤360°)

所述数据采集仪4与计算机连接,可以采集并记录激光位移传感器1输出的模拟信号电压。The data acquisition instrument 4 is connected with the computer, and can collect and record the analog signal voltage output by the laser displacement sensor 1 .

本发明一种用于微小推力测量的高分辨率角位移测量方法,所述测量步骤如图4所示,包括:A high-resolution angular displacement measurement method for micro thrust measurement of the present invention, the measurement steps are shown in Figure 4, including:

步骤一,所述激光位移传感器1发射测量光测量其与阿基米德测量块2的侧表面之间的距离L;Step 1, the laser displacement sensor 1 emits measurement light to measure the distance L between it and the side surface of the Archimedes measurement block 2;

进一步的,所述激光位移传感器1和所述阿基米德测量块2的侧表面之间的距离变化量ΔL满足如下数学关系:Further, the distance variation ΔL between the laser displacement sensor 1 and the side surface of the Archimedes measurement block 2 satisfies the following mathematical relationship:

ΔL=ΔR=(1/5)×ΔθΔL=ΔR=(1/5)×Δθ

步骤二,所述数据采集仪4采集并记录所述激光位移传感器输出的模拟信号电压U;Step 2, the data acquisition instrument 4 collects and records the analog signal voltage U output by the laser displacement sensor;

步骤三,根据模拟信号电压的变化量ΔU解算所述阿基米德测量块的角位移变化量Δθ。Step 3: Calculate the angular displacement variation Δθ of the Archimedes measurement block according to the variation ΔU of the analog signal voltage.

进一步的,所述数据采集仪4所记录的模拟信号U的变化量ΔU满足如下数学关系:Further, the variation ΔU of the analog signal U recorded by the data acquisition instrument 4 satisfies the following mathematical relationship:

ΔU=ΔL=ΔR=(1/5)×ΔθΔU=ΔL=ΔR=(1/5)×Δθ

因此,在任意时刻,被测目标的角位移为Δθ=5×ΔUTherefore, at any time, the angular displacement of the measured target is Δθ=5×ΔU

本发明提出了一种用于微小推力测量的高分辨率角位移测量装置,并揭示了相应的测量方法,通过阿基米德测量块将角位移变化转换为测量块和激光位移传感器之间的距离变化,原理简单、测量分辨率高、响应速度快,具有很强的实用性。The present invention proposes a high-resolution angular displacement measuring device for micro thrust measurement, and discloses a corresponding measuring method, which converts the angular displacement change into the difference between the measuring block and the laser displacement sensor through the Archimedes measuring block. The distance changes, the principle is simple, the measurement resolution is high, the response speed is fast, and it has strong practicability.

Claims (4)

1.一种用于微小推力测量的高分辨率角位移测量装置,其特征在于,包括激光位移传感器、用于安装并调整激光传感器高度和水平位置的支架、阿基米德测量块、采集并记录激光传感器输出信号的数据采集仪。1. a high-resolution angular displacement measuring device for tiny thrust measurement, characterized in that it comprises a laser displacement sensor, a bracket for installing and adjusting the height and horizontal position of the laser sensor, an Archimedes measurement block, a collection and A data collector that records the output signal of the laser sensor. 激光位移传感器通过螺钉固定于支架上,通过支架调节其与阿基米德测量块保持同一高度,其激光发射端对准阿基米德测量块圆心;阿基米德测量块通过高精度线切割加工而成,中心有螺纹孔,通过螺钉与被测目标同轴固定连接,测量时随被测目标同步转动;数据采集仪与计算机连接,可以采集并记录激光位移传感器输出的模拟信号电压。The laser displacement sensor is fixed on the bracket by screws, and the bracket is adjusted to maintain the same height as the Archimedes measuring block, and its laser emitting end is aligned with the center of the Archimedes measuring block; the Archimedes measuring block is cut by high-precision wire It is machined and has a threaded hole in the center, which is coaxially and fixedly connected to the measured target through screws, and rotates synchronously with the measured target during measurement; the data acquisition instrument is connected to the computer, which can collect and record the analog signal voltage output by the laser displacement sensor. 2.如权利要求1所述的一种用于微小推力测量的高分辨率角位移测量装置,其特征在于,阿基米德测量块的外径随方位角呈线性增加,其外径R和角度θ满足如下数学关系:2. A high-resolution angular displacement measuring device for measuring tiny thrust as claimed in claim 1, wherein the outer diameter of the Archimedes measuring block increases linearly with the azimuth angle, and its outer diameter R and The angle θ satisfies the following mathematical relationship: R=72+(1/5)×θ (0≤θ≤360°)R=72+(1/5)×θ (0≤θ≤360°) 3.一种用于微小推力测量的高分辨率角位移测量方法,其特征在于,包括如下步骤:3. a high-resolution angular displacement measuring method for tiny thrust measurement, is characterized in that, comprises the steps: (1)激光位移传感器发射测量光测量其与阿基米德测量块侧表面之间的距离;(1) The laser displacement sensor emits measuring light to measure the distance between it and the side surface of the Archimedes measuring block; (2)数据采集仪采集并记录激光位移传感器输出的模拟信号电压;(2) The data acquisition instrument collects and records the analog signal voltage output by the laser displacement sensor; (3)根据模拟信号电压的变化量解算阿基米德测量块的角位移变化量。(3) Calculate the angular displacement variation of the Archimedes measuring block according to the variation of the analog signal voltage. 4.如权利要求3所述的一种用于微小推力测量的高分辨率角位移测量装置方法,其特征在于,利用特殊设计的阿基米德测量块,将被测目标的角位移变化转化为激光位移传感器和阿基米德测量块侧表面之间的距离变化,测量分辨可达0.01°。4. a kind of high-resolution angular displacement measuring device method for tiny thrust measurement as claimed in claim 3, is characterized in that, utilizes the Archimedes measuring block of special design, the angular displacement change of the measured target is converted into For the distance change between the laser displacement sensor and the side surface of the Archimedes measurement block, the measurement resolution can reach 0.01°.
CN202010217268.6A 2020-03-25 2020-03-25 High-resolution angular displacement measuring device and method for micro-thrust measurement Pending CN111380486A (en)

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