CN116819807A - Method for preparing electro-optic modulator and electro-optic modulator - Google Patents
Method for preparing electro-optic modulator and electro-optic modulator Download PDFInfo
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- CN116819807A CN116819807A CN202310844759.7A CN202310844759A CN116819807A CN 116819807 A CN116819807 A CN 116819807A CN 202310844759 A CN202310844759 A CN 202310844759A CN 116819807 A CN116819807 A CN 116819807A
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0316—Electrodes
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The application relates to a preparation method of an electro-optic modulator and the electro-optic modulator, which is characterized in that a micro-nano optical fiber substrate is obtained based on drawing of a whole transmission optical fiber, opposite positive and negative tuning electrode plates are prepared in a coupling area of the micro-nano optical fiber substrate, the prepared electro-optic waveguide is parallel along the axial direction of the micro-nano optical fiber substrate, is adsorbed in the coupling area of the micro-nano optical fiber substrate and is positioned between the positive and negative tuning electrode plates, and finally the coupling area of the micro-nano optical fiber substrate with the adsorbed electro-optic waveguide is packaged to obtain the electro-optic modulator. The application adopts the transmission optical fiber to directly draw to obtain the micro-nano optical fiber substrate, and then the micro-nano optical fiber substrate is adsorbed by the electro-optic waveguide to form a parallel waveguide coupling structure, so that high-speed electro-optic modulation is realized, the input and output of broadband optical signals can be directly completed in the micro-nano optical fiber substrate without additional optical fiber welding or optical fiber coupling, and the application belongs to an all-fiber type electro-optic modulator, so that the insertion loss of the electro-optic modulator is obviously reduced.
Description
Technical Field
The present application relates to the field of optical communications technologies, and in particular, to a method for manufacturing an electro-optical modulator and an electro-optical modulator.
Background
With the popularization of big data, internet of things and artificial intelligence technology, the communication industry is rapidly developed, and optical fiber communication has the advantages of wide transmission frequency band, high anti-interference performance, small signal attenuation and the like, and is a most main signal transmission mode in the communication industry over other communication modes such as cable and microwave communication. The electro-optical modulator is a key device for optical fiber communication, can realize electro-optical conversion and information loading, converts high-speed electric signals into optical signals, and performs high-speed, large-capacity and long-distance transmission through the optical fiber, thereby playing an important role in the transmission quality of the optical fiber communication.
In the conventional technology, electro-optical modulators in optical fiber communication mainly comprise four major classes according to materials: lithium niobate modulators, inP-based modulators, silicon-based modulators, and organic polymer modulators. Lithium niobate electro-optic modulators have become the most widely used modulator in optical fiber communications today, benefiting from low waveguide loss, high electro-optic efficiency, and the like. However, because the current electro-optical modulator almost adopts an optical waveguide to construct a Mach-Zehnder interferometer structure, the input end and the output end of the broadband optical signal need to be butt-coupled with the tail fiber, so that a larger insertion loss (generally more than 3 dB) is caused.
Disclosure of Invention
Based on this, it is necessary to provide a method for manufacturing an electro-optical modulator and an electro-optical modulator, aiming at the technical problem that the insertion loss of the conventional electro-optical modulator is large.
A method of making an electro-optic modulator, the method comprising:
preparing opposite positive and negative tuning electrode plates in a coupling area of a micro-nano optical fiber substrate, wherein the micro-nano optical fiber substrate is obtained by drawing based on a transmission optical fiber;
adsorbing an electro-optic waveguide on a coupling area of the micro-nano optical fiber substrate along the axial direction of the micro-nano optical fiber substrate and between the positive and negative tuning electrode plates, wherein the electro-optic waveguide is made of a material with an electro-optic effect;
and packaging the coupling area of the micro-nano optical fiber substrate adsorbed with the electric optical waveguide to obtain the electro-optic modulator.
In one embodiment, the electro-optic waveguide is a lithium niobate nanowire.
In one embodiment, the method further comprises:
determining a coupling wavelength of the lithium niobate nanowire;
and obtaining a target design size of the lithium niobate nanowire based on the coupling wavelength analysis, and preparing the lithium niobate nanowire based on the target design size.
In one embodiment, the Z-crystal orientation of the lithium niobate nanowires between the positive and negative tuning electrode plates is consistent with the direction of the electric field generated by the positive and negative tuning electrode plates.
In one embodiment, the transmission fiber is a common single mode fiber, a photonic crystal fiber, or a microstructured fiber.
In one embodiment, the micro-nano optical fiber substrate is drawn by a cyclic tapering and oxyhydrogen flame fusion method based on a transmission optical fiber.
In one embodiment, the positive and negative tuning electrode plates are parallel plate electrodes made of gold material.
In one embodiment, the preparing opposite positive and negative tuning electrode plates in the coupling region of the micro-nano fiber substrate includes:
uniformly evaporating gold material in the coupling area of the micro-nano optical fiber substrate, and controlling evaporation parameters to obtain a gold film layer with preset thickness;
removing the middle area of the gold film layer by a focused ion beam micro-nano processing method, and etching to obtain opposite positive and negative gold parallel plate electrodes;
and welding gold wire leads to the positive and negative gold parallel plate electrodes respectively by a femtosecond laser welding method to obtain opposite positive and negative tuning electrode plates.
In one embodiment, the packaging the coupling area of the micro-nano optical fiber substrate to which the electro-optic waveguide is adsorbed to obtain an electro-optic modulator includes:
filling aerogel in a coupling area of the micro-nano optical fiber substrate adsorbed with the electro-optic waveguide and curing the aerogel by ultraviolet light;
and (5) performing reinforced packaging through a microwave packaging process of the optoelectronic device to obtain the electro-optic modulator.
In one embodiment, an electro-optic modulator is provided, including a micro-nano optical fiber substrate, positive and negative tuning electrode plates, and an electro-optic waveguide, wherein the positive and negative tuning electrode plates are disposed in a coupling region of the micro-nano optical fiber substrate, and the electro-optic waveguide is adsorbed in the coupling region of the micro-nano optical fiber substrate along an axial direction of the micro-nano optical fiber substrate and is disposed between the positive and negative tuning electrode plates.
According to the preparation method of the electro-optic modulator and the electro-optic modulator, the micro-nano optical fiber substrate obtained by drawing the whole transmission optical fiber is used for preparing the opposite positive and negative tuning electrode plates in the coupling area of the micro-nano optical fiber substrate, the prepared electro-optic waveguide is parallel to the coupling area of the micro-nano optical fiber substrate along the axial direction of the micro-nano optical fiber substrate and is positioned between the positive and negative tuning electrode plates, and finally the coupling area of the micro-nano optical fiber substrate with the adsorbed electro-optic waveguide is packaged, so that the electro-optic modulator is obtained. The application adopts the transmission optical fiber to directly draw to obtain the micro-nano optical fiber substrate, and then the micro-nano optical fiber substrate is adsorbed by the electro-optic waveguide to form a parallel waveguide coupling structure, so that high-speed electro-optic modulation is realized, the input and output of broadband optical signals can be directly completed in the micro-nano optical fiber substrate without additional optical fiber welding or optical fiber coupling, and the application belongs to an all-fiber type electro-optic modulator, so that the insertion loss of the electro-optic modulator is obviously reduced.
Drawings
FIG. 1 is a flow chart of a method of manufacturing an electro-optic modulator according to one embodiment;
FIG. 2 is a schematic illustration of a drawing process of a micro-nano fiber substrate in one embodiment;
FIG. 3 is a flow chart of a method of fabricating an electro-optic modulator according to another embodiment;
FIG. 4 is a flow chart of steps for preparing positive and negative tuning electrode plates in one embodiment;
FIG. 5 is a flow chart illustrating a packaging process for an electro-optic modulator according to one embodiment;
fig. 6 is a schematic diagram of the operation of an electro-optic modulator according to one embodiment.
Detailed Description
The present application will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present application more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.
It will be understood that the terms first, second, etc. as used herein may be used to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish one element from another element. For example, a first resistance may be referred to as a second resistance, and similarly, a second resistance may be referred to as a first resistance, without departing from the scope of the application. Both the first resistor and the second resistor are resistors, but they are not the same resistor.
It is to be understood that in the following embodiments, "connected" is understood to mean "electrically connected", "communicatively connected", etc., if the connected circuits, modules, units, etc., have electrical or data transfer between them.
As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," and/or the like, specify the presence of stated features, integers, steps, operations, elements, components, or groups thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or groups thereof.
As described in the background art, with the popularization of big data, internet of things and artificial intelligence technology, the communication industry is rapidly developing, and optical fiber communication has become the most important signal transmission mode in the communication industry over other communication modes such as cable and microwave communication due to the advantages of wide transmission frequency band, high anti-interference performance, small signal attenuation and the like. The electro-optical modulator is a key device for optical fiber communication, can realize electro-optical conversion and information loading, converts high-speed electric signals into optical signals, and performs high-speed, large-capacity and long-distance transmission through the optical fiber, thereby playing an important role in the transmission quality of the optical fiber communication. In the conventional technology, electro-optical modulators in optical fiber communication mainly comprise four major classes according to materials: lithium niobate modulators, inP-based modulators, silicon-based modulators, and organic polymer modulators. Lithium niobate electro-optic modulators have become the most widely used modulator in optical fiber communications today, benefiting from low waveguide loss, high electro-optic efficiency, and the like. However, because the current electro-optical modulator almost adopts an optical waveguide to construct a Mach-Zehnder interferometer structure, the input end and the output end of the broadband optical signal need to be butt-coupled with the tail fiber, so that a larger insertion loss (generally more than 3 dB) is caused.
Based on the above, the present application provides a method for manufacturing an electro-optical modulator, so as to solve the above technical problem of larger insertion loss of the conventional electro-optical modulator.
In one embodiment, as shown in fig. 1, there is provided a method for manufacturing an electro-optic modulator, the method comprising the following S100 to S600, wherein:
s100: and preparing opposite positive and negative tuning electrode plates in a coupling area of the micro-nano optical fiber substrate, wherein the micro-nano optical fiber substrate is obtained based on transmission optical fiber drawing.
The micro-nano optical fiber is a substrate element for preparing the electro-optic modulator, the coupling area of the micro-nano optical fiber is a micro-nano optical fiber section with a diameter in a micron-nanometer level and a constant size, an electro-optic waveguide and positive and negative tuning electrode plates for applying voltage to the electro-optic waveguide to generate an electro-optic effect are arranged in the micro-nano optical fiber section, and the micro-nano optical fiber is used as a substrate of the electro-optic modulator, so that the waveguide directional coupling effect is facilitated, and further the light intensity modulation of a broadband light signal is realized.
Specifically, the method for preparing the opposite positive and negative tuning electrode plates in the coupling area of the micro-nano optical fiber substrate is not unique, and the opposite positive and negative tuning electrode plates can be prepared in the coupling area of the micro-nano optical fiber substrate by adopting the methods of magnetron sputtering, electron beam evaporation, thermal evaporation, electroplating and the like. Specifically, positive tuning electrode plates and negative tuning electrode plates can be respectively prepared at corresponding positions of coupling areas of the micro-nano optical fiber substrate, or a whole tuning electrode plate can be prepared, and then an intermediate area is removed by an etching method based on the distance between the two electrode plates, so that opposite positive and negative tuning electrode plates are obtained.
In addition, the micro-nano optical fiber substrate is obtained by drawing a transmission optical fiber based on the whole piece, and the drawn micro-nano optical fiber substrate can also comprise transition areas at two ends except a coupling area, wherein the transition areas can comprise a conical area and an original diameter area. It will be appreciated that the diameter of the tapered region is graded from the diameter of the original transmission fiber to the diameter of the coupling region on the order of microns to nanometers as the draw proceeds.
It will be appreciated that the taper of the tapered region described above is determined by the drawing method and that the taper of this region will affect the overall insertion loss of the micro-nano fiber during transmission of the broadband optical signal. Furthermore, in order to minimize transmission loss during optical transmission, the taper of the tapered region is controlled. In one embodiment, the micro-nano fiber substrate is drawn by cyclic tapering and oxyhydrogen flame fusion processes based on a transmission fiber. The transmission fiber can be realized by adopting a common single-mode fiber, a photonic crystal fiber or a microstructure fiber.
The process of drawing the micro-nano optical fiber substrate by the cyclic tapering and oxyhydrogen flame fusion method based on the transmission optical fiber is explained below by taking the transmission optical fiber as a common single-mode optical fiber as an example.
Specifically, as shown in fig. 2, the step of drawing the micro-nano optical fiber substrate by a cyclic tapering and oxyhydrogen flame fusion method based on the transmission optical fiber includes:
the first moving clamp and the second moving clamp are fixed at the preset clamping position of the common single-mode optical fiber, and the oxyhydrogen flame output device is arranged at the preset heating position of the common single-mode optical fiber;
in a first preset time period, the first moving clamp holder is controlled to adopt a first preset speed V through the first long-stroke displacement platform while outputting oxyhydrogen flame for heating 0 Moving in the first direction, and controlling the second moving clamp holder to adopt a second preset speed V through the second long-stroke displacement platform 1 Moving in a first direction;
in a second preset time period, the first moving clamp holder is controlled to adopt a second preset speed V through the first long-stroke displacement platform while outputting oxyhydrogen flame for heating 1 Moving in a second direction, and controlling the second moving clamp holder to adopt a first preset speed V through a second long-stroke displacement platform 0 Moving in a second direction;
and circularly drawing based on the motion process of the two preset time periods until the micro-nano optical fiber substrate meeting the preset diameter is obtained.
The running time of the first preset time period and the running time of the second preset time period can be the same, both the running time and the running time are T, and the first direction and the second direction are opposite directions.
It can be appreciated that after the first preset period of time, the stretching degree of the common single mode fiber is from L 0 ＝V 0 Stretching x T to L in first direction 1 ＝V 1 X T, i.e. length L 0 The single mode fiber of (2) is stretched by Δl=l after being heated by oxyhydrogen flame 1 －L 0 While the heated single mode fiber portion is uniformly attenuated. After the second preset time period, the single-mode optical fiber is again taken from L 0 ＝V 0 Stretching x T to L in the second direction 1 ＝V 1 X T, realize Δl=l 1 －L 0 Is a tensile length of (a).
Regarding the first preset time period and the second preset time period as one time period, the deformation amount of the common single-mode fiber is 2 delta L, and L is the middle position of the two delta L stretching amounts 0 The length of fibre being stretched twice, i.e. L in the intermediate position 0 The length of the fiber is unchanged but the diameter is uniformly attenuated. And then can make this L 0 Length of (length)The fiber portion serves as a coupling region and the region of 2Δl serves as a transition region.
After the circulation of the first preset time period and the second preset time period for N times, the single-mode optical fiber finally becomes the micro-nano optical fiber comprising a coupling area and two transition areas, wherein the length of the coupling area is still L 0 The transition regions are respectively positioned at two ends of the coupling region and have lengths of N×ΔL, so that the total length of the micro-nano optical fiber is L=2NΔL+L 0 . The diameter of the micro-nano optical fiber coupling area prepared by the process is assumed to be D (N) Diameter D by using the same volume of material (N) Can be calculated by the following formula:
L 0 ＝V 0 ×T
L 1 ＝N(V 1 －V 0 )
D (N) ＝D*(V 0 /V 1 ) N
wherein D is the diameter of a common single-mode fiber, and N is the number of cycles. The diameter of the finally obtained coupling region can be controlled by controlling the parameters such as the moving speed, the running time and the cycle times of the long-stroke displacement platform in the drawing process, so that the taper of the tapered region is obtained based on the diameter of the coupling region and the diameter of the common single-mode fiber, and the transmission loss in the optical transmission process is minimized.
In this embodiment, the micro-nano optical fiber substrate for transmission is formed by drawing based on a common communication single mode fiber, that is, the transmission of the broadband optical signal is directly completed in the micro-nano optical fiber substrate, and the mach-zehnder interferometer structure is not required to be constructed by adopting an optical waveguide, and further, the fusion and coupling process of the optical waveguide and the transmission optical fiber is not involved, so that the insertion loss of the prepared electro-optic modulator is obviously reduced. In addition, as the head end and the tail end of the drawn micro-nano optical fiber substrate are original diameter areas, namely original single-mode optical fibers, the ultra-low loss fusion between the micro-nano optical fiber substrate and a broadband light source and between the micro-nano optical fiber substrate and a tail end output optical fiber can be realized by adopting a fusion splicer in the prior art, and further, low-loss long-distance signal transmission is realized.
S400: the electro-optic waveguide is adsorbed to the coupling area of the micro-nano optical fiber substrate along the axial direction of the micro-nano optical fiber substrate and is positioned between the positive tuning electrode plate and the negative tuning electrode plate, and the electro-optic waveguide is made of a material with an electro-optic effect.
The electro-optic waveguide is an element forming a parallel waveguide coupling structure with the micro-nano optical fiber substrate, when an optical signal passes through the micro-nano optical fiber substrate, a waveguide directional coupling effect occurs at a wavelength position with equal effective refractive indexes, so that light at the wavelength position in a fiber core of the micro-nano optical fiber substrate is coupled to the electro-optic waveguide and radiated out, and a loss zone is formed on an output spectrum of the micro-nano optical fiber substrate. Further, as the electro-optic waveguide is made of a material with an electro-optic effect, the effective refractive index of the electro-optic waveguide changes along with an external electric field between the positive and negative tuning electrode plates, so that the drift of coupling wavelength on a transmission spectrum is caused, the modulation of light intensity at the directional coupling wavelength is realized, and the intensity modulation of various forms of input optical signals in the micro-nano optical fiber substrate can be realized by loading different voltage signals between the positive and negative tuning electrode plates. The material for preparing the electro-optic waveguide is not limited, and can be lithium niobate, potassium dihydrogen phosphate KDP, gallium arsenide, cadmium telluride or the like.
Based on the above, the electro-optic waveguide needs to be adsorbed to the coupling area of the micro-nano optical fiber substrate along the axial direction of the micro-nano optical fiber substrate, so as to form a parallel waveguide coupling structure with the micro-nano optical fiber substrate. Specifically, after the opposite positive and negative tuning electrode plates are prepared in the coupling region of the micro-nano optical fiber substrate, the electro-optic waveguide can be adsorbed to the coupling region of the micro-nano optical fiber substrate along the axial direction of the micro-nano optical fiber substrate and positioned between the positive and negative tuning electrode plates. And then under the modulation of an external electric field between the positive and negative tuning electrode plates, the intensity modulation of various forms of input optical signals in the micro-nano optical fiber substrate is realized based on the electro-optic effect of the electro-optic waveguide.
It can be understood that the electro-optic waveguide can also be processed by a micro-nano process to achieve a diameter on the order of micro-to nano-meters, so that the dimension of the electro-optic waveguide is matched with the micro-nano optical fiber substrate to improve the occurrence effect of the directional coupling effect of the waveguide. Further in embodiments of the application, the electro-optic waveguide is a nanowire electro-optic waveguide. Correspondingly, the electro-optic waveguide may be a lithium niobate nanowire, a KDP-potassium dihydrogen phosphate nanowire, a gallium arsenide nanowire, a cadmium telluride nanowire, or the like. Further, in the case where the electro-optic waveguide is a nanowire electro-optic waveguide, both the nanowire electro-optic waveguide and the micro-nano optical fiber substrate are micro-nano level elements. The adsorption mode between the two can be realized by utilizing a micro-probe to control the nanowire electric optical waveguide to be arranged at a designated position above the coupling region of the micro-nano optical fiber substrate in parallel along the axial direction of the micro-nano optical fiber substrate through a micro-operation technology, and then the two can be adsorbed based on Van der Waals force between the nanowires to form a parallel waveguide coupling structure. It can be understood that the micro-operation technology is a high-precision micro-operation system, and the multi-dimensional attitude control and the rapid, efficient and accurate transfer of the nanowire electric optical waveguide can be realized based on the fine motion control capability and the real-time monitoring of the camera, so that the occurrence effect of the waveguide directional coupling effect is improved.
In addition, the preparation of the electro-optic waveguide and the micro-nano optical fiber substrate can be prepared before the preparation of the electro-optic modulator, or can be prepared synchronously with the electro-optic modulator, and the preparation is not limited.
S600: and packaging the coupling area of the micro-nano optical fiber substrate adsorbed with the electric optical waveguide to obtain the electro-optic modulator.
Specifically, the grooves and gaps of the coupling region can be filled and packaged, so that the prepared photoelectric modulator is more stable. The packaging mode is not unique, and the packaged electro-optical modulator can be obtained by firstly filling the gaps in the electro-optical modulator with aerogel or an insulating buffer material and then packaging the filled outer surface with a reinforcing material.
According to the preparation method of the electro-optic modulator, the micro-nano optical fiber substrate is obtained based on the drawing of the whole transmission optical fiber, the opposite positive and negative tuning electrode plates are prepared in the coupling area of the micro-nano optical fiber substrate, the prepared electro-optic waveguide is parallel to the axial direction of the micro-nano optical fiber substrate and is adsorbed in the coupling area of the micro-nano optical fiber substrate and is positioned between the positive and negative tuning electrode plates, and finally the coupling area of the micro-nano optical fiber substrate with the adsorbed electro-optic waveguide is packaged, so that the electro-optic modulator is obtained. The application adopts the transmission optical fiber to directly draw to obtain the micro-nano optical fiber substrate, and then the micro-nano optical fiber substrate is adsorbed by the electro-optic waveguide to form a parallel waveguide coupling structure, so that high-speed electro-optic modulation is realized, the input and output of broadband optical signals can be directly completed in the micro-nano optical fiber substrate without additional optical fiber welding or optical fiber coupling, and the application belongs to an all-fiber type electro-optic modulator, so that the insertion loss of the electro-optic modulator is obviously reduced.
In one embodiment, the electro-optic waveguide is a lithium niobate nanowire. The lithium niobate nanowire can be prepared based on a mature lithium niobate wafer in a preparation process. Specifically, a lithium niobate thin film with the thickness reaching the micro-nano size can be prepared by firstly preparing a lithium niobate wafer, and then a lithium niobate nanowire is prepared based on the lithium niobate thin film. It will be appreciated that the manner in which the dimensions are reduced from lithium niobate wafers and thin lithium niobate films to lithium niobate nanowires is not exclusive and may be achieved by grinding and polishing the lithium niobate wafers or thin lithium niobate films, or may be achieved by conventional photolithographic processing.
In the embodiment, the electro-optic waveguide is prepared from a lithium niobate material with an excellent electro-optic effect, so that the prepared electro-optic modulator has the advantages of high response speed, low driving voltage, low power consumption and the like.
In one embodiment, as shown in fig. 3, the method for preparing an electro-optic modulator further includes the following steps S200 to S300, where:
s200: the coupling wavelength of the lithium niobate nanowire is determined.
The coupling wavelength is a wavelength corresponding to an effective refractive index when the lithium niobate nanowire and the micro-nano optical fiber substrate generate waveguide directional coupling effect, and in this case, light at the wavelength in the fiber core of the micro-nano optical fiber substrate is coupled to the lithium niobate nanowire and radiated, so that a loss band is formed on an output spectrum.
Specifically, in order to make the electro-optical modulator prepared more convenient to perform light intensity modulation on the broadband optical signal, the coupling wavelength of the lithium niobate nanowire can be determined based on the designated wavelength of the communication band of the broadband optical signal. Further, when the lithium niobate nanowire is not energized, the optical signals at the coupling wavelength (i.e., the designated wavelength of the communication band of the broadband optical signal) are substantially coupled to the lithium niobate nanowire and radiated away, at which time the output light intensity is small. When the electric fields of the positive tuning electrode and the negative tuning electrode are controlled, the effective refractive index of the lithium niobate nanowire is gradually increased in the process of changing the external voltage of the lithium niobate nanowire from 0 to half-wave voltage, the optical signals coupled into the lithium niobate nanowire are gradually decreased, the phase is gradually changed from 0 to pi, and the output light intensity is gradually increased.
S300: and obtaining a target design size of the lithium niobate nanowire based on the coupling wavelength analysis, and preparing the lithium niobate nanowire based on the target design size.
The target design dimensions of the lithium niobate nanowire may include parameters such as thickness, width, and length of the lithium niobate nanowire. The thickness of the lithium niobate nanowire can be determined based on the thickness of the prepared lithium niobate thin film, for example, the minimum thickness of the lithium niobate thin film prepared by common production is 0.3um (micrometer) and 0.36um.
Specifically, a parallel waveguide coupling structure model formed by the lithium niobate nanowire and the micro-nano optical fiber substrate can be constructed based on COMSOL physical field simulation software, and further, the mode coupling characteristics of the lithium niobate nanowire and the micro-nano optical fiber substrate under the single-mode condition are researched by adopting a finite element method based on the coupling wavelength (namely the optimal energy distribution), so that the target width and the target length of the lithium niobate nanowire are obtained through gradual optimization analysis, and the coupling wavelength of the lithium niobate nanowire under the condition of no voltage application is consistent with the appointed wavelength of a communication wave band of a broadband optical signal (the appointed wavelength of the communication wave band of the broadband optical signal is 1550nm (nanometers)). Further, the lithium niobate nanowire can be prepared by adopting a photoetching process or other grinding processes and the like on the lithium niobate thin film based on the target design size of the lithium niobate nanowire obtained by analysis.
In this embodiment, the coupling wavelength of the lithium niobate nanowire is determined based on the designated wavelength of the communication band of the broadband optical signal, and after the target design size of the lithium niobate nanowire is obtained by analysis, the prepared electro-optical modulator can realize more convenient light intensity modulation based on half-wave voltage by preparing the lithium niobate nanowire based on the target design size.
In one embodiment, the Z-crystal orientation of the lithium niobate nanowires between the positive and negative tuning electrode plates is aligned with the direction of the electric field generated by the positive and negative tuning electrode plates.
The lithium niobate is a material formed by a crystal structure, wherein the lithium niobate crystal comprises X, Y crystal directions and Z crystal directions, and dielectric constant components of different crystal directions are different. The component with the greatest dielectric constant is the component along the Z crystal direction (γ33=32.2pm/V). Based on the above, in order to fully utilize the maximum component gamma 33 of the dielectric constant of the lithium niobate crystal and efficiently adjust the refractive index of the lithium niobate nanowire, the direction of the maximum component gamma 33 of the lithium niobate crystal should be ensured to be consistent with the direction of the externally applied electric field, that is, the direction of the electric field generated by the positive and negative tuning electrode plates, so that the electro-optical modulator has the electro-optical modulation effect with the maximum efficiency.
Specifically, when preparing a lithium niobate thin film based on a lithium niobate wafer, the tangential direction of the lithium niobate wafer is generally the thickness direction of the lithium niobate thin film, and then the X-cut, the Y-cut or the Z-cut can be selected when obtaining the lithium niobate thin film. However, when the lithium niobate nanowire is prepared based on the lithium niobate thin film, the X-cut lithium niobate thin film can process the length direction along the Y crystal direction of the lithium niobate crystal, and the Y-cut lithium niobate thin film can process the length direction along the X crystal direction of the lithium niobate crystal, so that the Z crystal direction of the X-cut and Y-cut lithium niobate nanowire is consistent, the lithium niobate nanowire can be conveniently arranged on the coupling area of the micro-nano optical fiber substrate in the same mode, and the situation that the maximum electro-optic modulation effect cannot be achieved due to the fact that the placement direction of the Z crystal direction is not noticed in the preparation process is avoided.
In one embodiment, the positive and negative tuning electrode plates are parallel plate electrodes made of gold material. It will be appreciated that the positive and negative tuning electrode plates are two parallel plate electrodes disposed opposite and symmetrical about the lithium niobate nanowire and may be made of an electrically conductive metallic material, such as a titanium material, a gold material, a chromium material, a platinum material, or the like. In this embodiment the positive and negative tuning electrode plates are made of gold material, and correspondingly, in one embodiment, as shown in fig. 4, S100 comprises S120 to S160, wherein:
s120: and uniformly evaporating gold material in the coupling area of the micro-nano optical fiber substrate, and controlling evaporation parameters to obtain a gold film layer with preset thickness.
Specifically, through the thermal evaporation technology, the gold material is uniformly evaporated in the plane of the coupling area of the micro-nano optical fiber substrate, and through controlling evaporation parameters such as evaporation time, evaporation current and the like, the gold film layer with the required preset thickness can be obtained. The preset thickness of the required gold film layer can be calculated in advance based on a theoretical mode. The method specifically comprises the steps of firstly constructing an equivalent circuit of the electro-optic modulator according to the structure of the parallel electrode plates, and obtaining the working frequency of the electro-optic modulator based on theoretical analysis and calculation. And then, the initial structure size of the electrode plate is designed by combining the high-frequency working characteristic of the system, a circuit cascade model is established through SPICE and other software, and then, the initial structure size is optimized successively through the simulation result to obtain the target structure size of the parallel plate electrode. The target structure size comprises the thickness, the width and the length of the parallel plate electrodes, and further comprises parameters such as the interval between the two parallel plate electrodes.
S140: and removing the middle area of the gold film layer by a focused ion beam micro-nano processing method, and etching to obtain the opposite positive and negative gold parallel plate electrodes. Specifically, based on the target structure size of the parallel plate electrode obtained by the analysis, the middle area of the gold film layer can be removed by a focused ion beam micro-nano processing method, and the whole gold film layer is separated to obtain two opposite gold parallel plate electrodes.
S160: and welding gold wire leads to the positive and negative gold parallel plate electrodes respectively by a femtosecond laser welding method to obtain opposite positive and negative tuning electrode plates. Specifically, two gold wire leads are respectively welded with positive and negative gold parallel plate electrodes in high quality and precision by a high-frequency femtosecond laser welding technology. The positive and negative gold parallel plate electrodes can be respectively connected to the positive and negative electrodes of an external power supply through gold wire leads so as to obtain an electric field for regulating and controlling the coupling resonance peak generated by the power supply.
In the embodiment, the size and the arrangement position of the positive and negative tuning electrodes are reasonably designed, so that the lithium niobate nanowire can be modulated with the fastest effective refractive index, and the response speed of the electro-optical modulator is further improved.
In one embodiment, as shown in fig. 5, S600 includes the following S620 to S640, wherein:
s620: and filling aerogel in the coupling area of the micro-nano optical fiber substrate adsorbed with the electric optical waveguide and curing the coupling area by ultraviolet light. Specifically, first, the low refractive index aerogel is filled from above the electro-optic waveguide, and cured by ultraviolet light irradiation, so that the electro-optic modulator is simply packaged.
S640: and (5) performing reinforced packaging through a microwave packaging process of the optoelectronic device to obtain the electro-optic modulator. And further, the mature high-speed photoelectronic device microwave packaging technology is utilized to carry out intensified packaging on the photoelectric modulator after simple packaging, so that the packaging of the all-fiber photoelectric modulator is completed, and preparation is made for subsequent performance test.
Based on the same inventive concept, the embodiment of the application also provides an electro-optical modulator prepared by the preparation method of the electro-optical modulator. The implementation of the solution provided by the electro-optic modulator is similar to that described in the above method, so specific limitations in one or more embodiments of the electro-optic modulator provided below may be referred to above as limitations on the preparation method of the electro-optic modulator, and will not be repeated here.
In one embodiment, an electro-optic modulator is provided that includes a micro-nano optical fiber substrate, positive and negative tuning electrode plates disposed in a coupling region of the micro-nano optical fiber substrate, and an electro-optic waveguide that is adsorbed to the coupling region of the micro-nano optical fiber substrate along an axial direction of the micro-nano optical fiber substrate and is located between the positive and negative tuning electrode plates.
Specifically, the micro-nano optical fiber substrate is a substrate element of an electro-optic modulator, a coupling area is a micro-nano optical fiber section with a diameter in a micron-nanometer level and a constant size, an electro-optic waveguide and a positive tuning electrode and a negative tuning electrode which apply voltage to the electro-optic waveguide to generate an electro-optic effect are arranged in the micro-nano optical fiber section, and the micro-nano optical fiber substrate is used as a substrate of the electro-optic modulator, is favorable for generating a waveguide directional coupling effect, and further realizes light intensity modulation of a broadband optical signal.
Further, the electro-optic waveguide is an element forming a parallel waveguide coupling structure with the micro-nano optical fiber substrate, when an optical signal passes through the micro-nano optical fiber substrate, a waveguide directional coupling effect occurs at a wavelength with equal effective refractive indexes, so that light at the wavelength in the fiber core of the micro-nano optical fiber substrate is coupled to the electro-optic waveguide and radiated out, and a loss zone is formed on the output spectrum of the micro-nano optical fiber substrate. Further, since the material of the electro-optic waveguide has an electro-optic effect, when the electro-optic waveguide is loaded with a voltage, as shown in fig. 6, the effective refractive index of the electro-optic waveguide changes along with the external electric field between the positive tuning electrode and the negative tuning electrode, so that the drift of the coupling wavelength on the transmission spectrum is caused, the modulation of the light intensity at the directional coupling wavelength is realized, and the intensity modulation of various forms of input optical signals in the micro-nano optical fiber substrate can be realized by loading different voltage signals between the positive tuning electrode and the negative tuning electrode. The preparation materials used for the electro-optic waveguide are not limited, and can be lithium niobate, potassium dihydrogen phosphate, gallium arsenide, cadmium telluride or the like. Based on the above, the electro-optic waveguide needs to be adsorbed to the coupling area of the micro-nano optical fiber substrate along the axial direction of the micro-nano optical fiber substrate, so as to form a parallel waveguide coupling structure with the micro-nano optical fiber substrate.
It can be understood that the electro-optic waveguide can also be processed by a micro-nano process to achieve a diameter on the order of micro-to nano-meters, so that the dimension of the electro-optic waveguide is matched with the micro-nano optical fiber substrate to improve the occurrence effect of the directional coupling effect of the waveguide. Further in embodiments of the application, the electro-optic waveguide is a nanowire electro-optic waveguide. Correspondingly, the electro-optic waveguide may be a lithium niobate nanowire, a KDP-potassium dihydrogen phosphate nanowire, a gallium arsenide nanowire, a cadmium telluride nanowire, or the like.
In the embodiment, the full-optical fiber type high-speed electro-optic modulator based on mode coupling of the micro-nano optical fiber and the lithium niobate nanowire adopts a high-frequency electric field to modulate the refractive index of the lithium niobate nanowire through the Pockels effect, so that the high-speed modulation of the coupling light intensity of the micro-nano optical fiber core is realized, the full-optical fiber type high-speed electro-optic modulator is obtained, the insertion loss of the electro-optic modulator is obviously reduced, and meanwhile, the large extinction ratio, the large bandwidth and the low half-wave voltage are realized.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the application. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of protection of the present application is to be determined by the appended claims.
Claims (10)
1. A method of making an electro-optic modulator, the method comprising:
preparing opposite positive and negative tuning electrode plates in a coupling area of a micro-nano optical fiber substrate, wherein the micro-nano optical fiber substrate is obtained by drawing based on a transmission optical fiber;
adsorbing an electro-optic waveguide on a coupling area of the micro-nano optical fiber substrate along the axial direction of the micro-nano optical fiber substrate and between the positive and negative tuning electrode plates, wherein the electro-optic waveguide is made of a material with an electro-optic effect;
and packaging the coupling area of the micro-nano optical fiber substrate adsorbed with the electric optical waveguide to obtain the electro-optic modulator.
2. The method of manufacturing an electro-optic modulator of claim 1, wherein the electro-optic waveguide is a lithium niobate nanowire.
3. A method of making an electro-optic modulator according to claim 2, further comprising:
determining a coupling wavelength of the lithium niobate nanowire;
and obtaining a target design size of the lithium niobate nanowire based on the coupling wavelength analysis, and preparing the lithium niobate nanowire based on the target design size.
4. The method of claim 2, wherein the Z-crystal orientation of the lithium niobate nanowires between the positive and negative tuning electrode plates is aligned with the direction of the electric field generated by the positive and negative tuning electrode plates.
5. The method of claim 1, wherein the transmission fiber is a common single mode fiber, a photonic crystal fiber, or a microstructured fiber.
6. The method of claim 5, wherein the micro-nano optical fiber substrate is drawn by cyclic tapering and oxyhydrogen flame fusion based on a transmission fiber.
7. The method of claim 1, wherein the positive and negative tuning electrode plates are parallel plate electrodes made of gold material.
8. The method for manufacturing an electro-optic modulator according to claim 7, wherein the preparing opposite positive and negative tuning electrode plates in the coupling region of the micro-nano fiber substrate comprises:
uniformly evaporating gold material in the coupling area of the micro-nano optical fiber substrate, and controlling evaporation parameters to obtain a gold film layer with preset thickness;
removing the middle area of the gold film layer by a focused ion beam micro-nano processing method, and etching to obtain opposite positive and negative gold parallel plate electrodes;
and welding gold wire leads to the positive and negative gold parallel plate electrodes respectively by a femtosecond laser welding method to obtain opposite positive and negative tuning electrode plates.
9. The method for manufacturing an electro-optic modulator according to any one of claims 1 to 8, wherein the encapsulating the coupling region of the micro-nano fiber substrate to which the electro-optic waveguide is adsorbed, comprises:
filling aerogel in a coupling area of the micro-nano optical fiber substrate adsorbed with the electro-optic waveguide and curing the aerogel by ultraviolet light;
and (5) performing reinforced packaging through a microwave packaging process of the optoelectronic device to obtain the electro-optic modulator.
10. The electro-optic modulator is characterized by comprising a micro-nano optical fiber substrate, positive and negative tuning electrode plates and an electro-optic waveguide, wherein the positive and negative tuning electrode plates are arranged in a coupling area of the micro-nano optical fiber substrate, and the electro-optic waveguide is adsorbed in the coupling area of the micro-nano optical fiber substrate along the axial direction of the micro-nano optical fiber substrate and is positioned between the positive and negative tuning electrode plates.
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