CN116715021B - Vacuum adsorption active cell - Google Patents
Vacuum adsorption active cell Download PDFInfo
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- CN116715021B CN116715021B CN202310932701.8A CN202310932701A CN116715021B CN 116715021 B CN116715021 B CN 116715021B CN 202310932701 A CN202310932701 A CN 202310932701A CN 116715021 B CN116715021 B CN 116715021B
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- 238000001179 sorption measurement Methods 0.000 title claims abstract description 113
- 230000007246 mechanism Effects 0.000 claims abstract description 49
- 210000001503 joint Anatomy 0.000 claims description 13
- 230000009471 action Effects 0.000 claims description 5
- 239000013589 supplement Substances 0.000 claims description 5
- 238000005086 pumping Methods 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 210000004027 cell Anatomy 0.000 abstract description 7
- 210000005056 cell body Anatomy 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 9
- 230000001502 supplementing effect Effects 0.000 description 9
- 230000008569 process Effects 0.000 description 8
- 238000007599 discharging Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 238000007689 inspection Methods 0.000 description 5
- 230000032258 transport Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 238000005265 energy consumption Methods 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The application discloses vacuum adsorption active cell, including active cell body and air feed mechanism, the active cell body is equipped with the first air pump that is used for providing the negative pressure and is used for connecting adsorption equipment's vacuum joint, air feed mechanism is equipped with the second air pump that is used for providing negative pressure or malleation, the active cell still includes pipe-line system, pipe-line system includes first gas circuit, second gas circuit and third gas circuit, first gas circuit intercommunication first air pump and vacuum joint, second gas circuit intercommunication second air pump and first gas circuit, be equipped with first solenoid valve on the second gas circuit, third gas circuit intercommunication second air pump and first gas circuit. According to the vacuum adsorption rotor, positive pressure inflation is provided by the second air pump, so that the pressure difference between the inside and the outside of the adsorption equipment is reduced rapidly until the air pressure between the inside and the outside is balanced, and a workpiece is fallen off from the adsorption equipment rapidly; negative pressure air suction is provided through the second air pump, so that the vacuum degree of the first air circuit can be timely supplemented, and the adsorption bearing requirement of a workpiece is met.
Description
Technical Field
The application relates to the technical field of conveying equipment, in particular to a vacuum adsorption rotor.
Background
The conveying processing line generally comprises a mover for carrying and transporting the workpiece or moving the workpiece to different stations for processing, wherein vacuum suction is one of the common modes of workpiece carrying and fixing.
In the related art, a workpiece is generally sucked in a vacuum suction manner by matching an air pump with a suction device. When the workpiece is required to be discharged, the air pump is turned off, and the workpiece is discharged by slowly entering external air into the air path to balance the pressure difference between the inside and the outside of the adsorption equipment, so that the discharging process is extremely slow, and the conveying efficiency of the workpiece is greatly influenced; meanwhile, because the power of the air pump is certain, and the mover moves violently, the situations of insufficient vacuum degree of an air path, unstable workpiece adsorption and the like easily occur in the transportation process. Therefore, how to accelerate the work piece discharging efficiency and timely supplement the vacuum degree of the gas path becomes a problem to be solved.
Content of the application
The embodiment of the application provides a vacuum adsorption rotor, which can solve the problems that the workpiece unloading process is slow and the vacuum degree of a gas path cannot be timely supplemented.
The embodiment of the application provides a vacuum adsorption rotor, which comprises a rotor body and a gas supply mechanism, wherein the rotor body is provided with a first gas pump for providing negative pressure and a vacuum joint for connecting adsorption equipment, the gas supply mechanism is provided with a second gas pump for providing negative pressure or positive pressure, the rotor further comprises a pipeline system, the pipeline system comprises a first gas path, a second gas path and a third gas path, and the first gas path is communicated with the first gas pump and the vacuum joint; the second air passage is communicated with the second air pump and the first air passage, and a first electromagnetic valve is arranged on the second air passage; the third air passage is communicated with the second air pump and the first air passage; the vacuum adsorption mover has three modes, in the first mode, the first air pump provides negative pressure, negative pressure gas flows to the adsorption equipment through the first air path, and the adsorption equipment generates internal and external pressure difference to adsorb a workpiece; in a second mode, the second air pump provides positive pressure, and positive pressure gas flows to the first air channel through the second air channel and balances the pressure difference of the adsorption equipment so as to enable the workpiece to rapidly fall off from the adsorption equipment; in the third mode, the second air pump provides negative pressure, and negative pressure gas flows to the first air channel through the third air channel to supplement the vacuum degree of the first air channel. According to the vacuum adsorption rotor, the workpiece can be quickly separated from the adsorption equipment in the second mode; the vacuum degree of the first air passage can be timely supplemented in the third mode, so that the adsorption bearing requirement of the workpiece is met.
In some embodiments, the first air passage is provided with a plurality of vacuum joints for communicating the first air pump and the plurality of vacuum joints; the second air circuit comprises a first main circuit communicated with the second air pump and a plurality of first branches branched from the first main circuit, and each first branch is provided with a first electromagnetic valve; the third air circuit comprises a second main circuit communicated with the first main circuit and a plurality of second branches forked from the second main circuit; each first air passage is communicated with one first branch passage, and each first air passage is communicated with one second branch passage. Therefore, the effects of rapidly discharging workpieces and supplementing the vacuum degree of the gas path in a plurality of adsorption devices or a plurality of areas on one adsorption device can be realized.
In some embodiments, a second electromagnetic valve is disposed on each first air passage, and the second electromagnetic valve is closer to the first air pump than the connection point of the first air passage and the second air passage and the connection point of the first air passage and the third air passage. Therefore, by controlling the second electromagnetic valve to selectively block or communicate the corresponding first air paths, one or more of the first air paths can be conducted and the idle first air paths can be blocked, so that unnecessary electric energy consumption of the idle air paths is avoided.
In some of these embodiments, a one-way valve is provided on each of the second branches, the one-way valves being arranged to allow gas to flow only from the first gas path to the second main path. Therefore, the third air passage can be prevented from influencing the vacuum degree of the first air passage.
In some embodiments, each first air path is provided with an air pressure measuring meter, and the air pressure measuring meter is used for monitoring the vacuum degree of the corresponding first air path; the rotor body is further provided with a wireless control module, the wireless control module is respectively and electrically connected with the air pressure measuring meter and the second air pump, and the wireless control module is configured to: and controlling the start-stop and working modes of the second air pump according to the display numerical value of the air pressure measuring meter. Can realize the automatic 'vacuum filling' function of the active cell,
in some embodiments, the mover body is further provided with a pneumatic connector, the pipeline system further comprises a fourth air channel, the fourth air channel is communicated with the first main channel and the pneumatic connector, and the pneumatic connector is used for connecting the adsorption equipment and driving the adsorption equipment to execute pneumatic action through positive pressure provided by the second air pump.
In some of these embodiments, the mover body is provided with a first gas port and the gas supply mechanism is provided with a second gas port, the first gas port and the second gas port having an engaged state and a disengaged state, in which the first gas port and the second gas port interface to fluidly couple the mover body to the gas supply mechanism. So can separate the active cell body and air feed mechanism each other, reduce the removal burden of active cell body.
In some embodiments, the mover body is further provided with a positive pressure connector, a negative pressure connector, a first multi-way pipe connector and a second multi-way pipe connector; the first air port is respectively connected with the positive pressure joint and the negative pressure joint; one interface of the first multi-way pipe connector is connected with the positive pressure connector, and the other interfaces are respectively connected with the first electromagnetic valves in a one-to-one correspondence manner; one interface of the second multi-way pipe connector is connected with the negative pressure connector, and the other interfaces are respectively connected with the vacuum connectors in a one-to-one correspondence manner; one interface of the vacuum connector is used for connecting adsorption equipment, the other interface is connected with the first air pump, the other interface is connected with the first electromagnetic valve, and the other interface is connected with the second multi-way pipe connector; the second air pump is connected with the second air port; wherein: the first air pump and the connecting pipeline of the vacuum joint form the first air path;
the connecting pipeline for connecting the second air pump and the second air port and the connecting pipeline for sequentially connecting the first air port, the positive pressure joint and the first multi-way pipe joint form the first main pipeline, the first main pipeline is branched at the first multi-way pipe joint, and the connecting pipeline for sequentially connecting the first multi-way pipe joint, the first electromagnetic valve and the vacuum joint form the first branch pipeline; the connecting pipelines of the first air port, the negative pressure joint and the second multi-way pipe joint are sequentially connected to form a second main pipeline, the second main pipeline is branched at the second multi-way pipe joint, and the connecting pipeline of the second multi-way pipe joint and the vacuum joint is connected to form a second branch pipeline.
In some embodiments, the rotor body is further provided with a permanent magnet array and a sliding block, wherein the permanent magnet array is used for being magnetically matched with the stator track so as to provide driving force for the motion of the rotor body; the sliding block is used for being connected with the stator track in a sliding mode so as to limit the moving direction of the rotor body.
In some of these embodiments, one or more of the following conditions are met: the first air pump is an air suction air pump; the second air pump is a pumping and inflating dual-purpose air pump; the first electromagnetic valve is a normally-closed two-way electromagnetic valve; the rotor body is further provided with a power supply mechanism, the power supply mechanism is in sliding contact type electric connection with the stator track and is electrically connected with the first air pump, and the power of the stator track is transmitted to the first air pump through the power supply mechanism so as to supply power for the first air pump.
Based on the vacuum adsorption rotor of the embodiment of the application, when a workpiece is required to be adsorbed, the vacuum adsorption rotor works in a first mode, a first air pump works to provide negative pressure, negative pressure gas flows to adsorption equipment through a first air path, and the adsorption equipment connected to a vacuum joint generates adsorption force through internal and external pressure difference to adsorb the workpiece; when the workpiece is required to be discharged, the vacuum adsorption rotor works in a second mode, the second air pump provides positive pressure, and positive pressure gas flows into the first air channel through the second air channel, so that the pressure difference between the inside and the outside of the adsorption equipment is quickly reduced until the air pressure between the inside and the outside is balanced, the workpiece is quickly fallen off from the adsorption equipment, and the discharging efficiency of the workpiece is greatly improved; when the vacuum degree in the first air channel is insufficient and the adsorption force of the adsorption equipment cannot meet the load bearing requirement of the workpiece, the vacuum adsorption rotor works in a third mode, the second air pump provides negative pressure, negative pressure gas flows to the first air channel through the third air channel to supplement the vacuum degree of the first air channel, so that the adsorption load bearing requirement of the workpiece is met, and the workpiece adsorption and transportation stability is improved.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of the connection of gas paths of a vacuum suction mover according to an embodiment of the present application;
FIG. 2 is a schematic perspective view of a vacuum chuck according to an embodiment of the present application;
FIG. 3 is a schematic perspective view of a direction of the mover body in FIG. 2;
FIG. 4 is a schematic perspective view of another direction of the mover body in FIG. 2;
FIG. 5 is a schematic perspective view of the air supply mechanism of FIG. 2;
FIG. 6 is a schematic diagram of the arrangement of the gas circuit elements in one direction of the mover body in FIG. 2;
fig. 7 is a schematic diagram of gas circuit component arrangement in another direction of the mover body in fig. 2.
The reference numerals of the elements in the drawings are as follows: a first air passage 1; a second air path 2; a first main path 2A; a first branch 2B; a third air path 3; a second main path 3A; a second branch 3B; a fourth air path 4; a mover body 10; a pneumatic control box 11; a first air pump 111; a vacuum fitting 112; a first solenoid valve 113; a second solenoid valve 114; an air pressure gauge 115; a pneumatic fitting 116; a first multi-way pipe joint 117; a second multi-way pipe fitting 118; a second positive pressure fitting 119; a second negative pressure joint 1110; a third multi-way pipe joint 1111; a wireless control module 12; an air intake block 13; a first air port 131; a first positive pressure fitting 132; a first negative pressure joint 133; a base 14; a power supply mechanism 15; a receiving groove 16; a permanent magnet array 17; a slider 18; a gas supply mechanism 20; a second gas port 21; a base 22; an air tap 23; a first switching valve 24; a pneumatic unit 25; a second switching valve 26; resetting the cylinder 27.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the present application.
It should be noted that the description as it relates to "first", "second", etc. in the present invention is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implying an indication of the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless specifically stated and limited otherwise, the terms "connected," "affixed," and the like are to be construed broadly, and for example, "affixed" may be a fixed connection, a removable connection, or an integral body; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
The vacuum adsorption mode adopted by the rotor in the prior art has the technical problem that the workpiece unloading process is slow and the vacuum degree of the gas path cannot be timely supplemented.
In order to solve the above technical problems, an embodiment of the present application provides a vacuum adsorption mover, and fig. 1 is a schematic diagram of air path connection of the vacuum adsorption mover according to an embodiment of the present application, referring to fig. 1, the vacuum adsorption mover includes a mover body 10, an air supply mechanism 20, and a pipeline system. Wherein, the rotor body 10 is provided with a first air pump 111 for providing negative pressure and a vacuum joint 112 for connecting the adsorption equipment, the air supply mechanism 20 is provided with a second air pump for providing negative pressure or positive pressure, and the pipeline system comprises a first air channel 1, a second air channel 2 and a third air channel 3. The first air channel 1 is communicated with the first air pump 111 and the vacuum joint 112, the second air channel 2 is communicated with the second air pump and the first air channel 1, the second air channel 2 is provided with a first electromagnetic valve 113, and the third air channel 3 is communicated with the second air pump and the first air channel 1. The vacuum adsorption active cell of this application embodiment is through vacuum adsorption principle, can bear the weight of the work piece and transport the work piece or remove the work piece and carry out processing to different stations, and this vacuum adsorption active cell has three modes: when the workpiece is required to be adsorbed, the vacuum adsorption rotor works in a first mode, the first air pump 111 provides negative pressure, negative pressure air flows to adsorption equipment through the first air path 1, and the adsorption equipment connected to the vacuum joint 112 generates adsorption force through internal and external pressure difference to adsorb the workpiece, so that a vacuumizing effect is realized; when the workpiece is required to be discharged, the vacuum adsorption rotor works in a second mode, the second air pump provides positive pressure, positive pressure air flows into the first air channel 1 through the second air channel 2, so that the pressure difference between the inside and outside of the adsorption equipment is quickly reduced until the air pressure between the inside and outside of the adsorption equipment is balanced, the workpiece is quickly fallen off from the adsorption equipment to finish the discharging operation of the workpiece, the vacuum breaking effect is realized, the first electromagnetic valve 113 is arranged on the second air channel 2, and the second air channel 2 can be completely opened or closed as required, so that the on-off of the second air channel 2 is controlled; when the vacuum degree in the first air channel 1 is insufficient and the adsorption force of the adsorption equipment cannot meet the load bearing requirement of a workpiece, the vacuum adsorption rotor works in a third mode, the second air pump provides negative pressure, negative pressure gas flows to the first air channel 1 through the third air channel 3 to supplement the vacuum degree of the first air channel 1, so that the adsorption load bearing requirement of the workpiece is met, and the vacuum supplementing effect is realized. The vacuum adsorption active cell of this application embodiment, through the gas circuit structure of special design, make it have the aforesaid multiple functions such as "evacuation", "broken vacuum" and "mending vacuum", wherein "broken vacuum" function can realize the unloading in the twinkling of an eye of work piece, has greatly improved the unloading efficiency of work piece, and then improves transportation and operating efficiency, and the vacuum degree to first gas circuit 1 can be in time mended to "mending vacuum" function simultaneously, improves work piece absorption and transportation stability.
It should be noted that, the mover body 10 moves on a stator track and transports a workpiece, the mover is a magnetomotive mover, the stator track is a magnetomotive track, and a plurality of mover bodies 10 may be simultaneously disposed on the same stator track. Referring to fig. 2, in the embodiment shown, a containing groove 16 is disposed on the mover body 10, the extending direction of the containing groove 16 is consistent with the extending direction of the stator track, the containing groove 16 extends to penetrate through two ends of the mover body 10, a permanent magnet array 17 is disposed on two opposite side walls or one of two side walls of the containing groove 16, and the permanent magnet array 17 is preferably a plurality of permanent magnets that can be arranged to form a halbach array, so as to obtain a more ideal unilateral magnetic field and improve the driving force of the mover. The rotor body 10 is further provided with a sliding block 18, and the sliding block 18 is used for being matched with the stator track, and can be in sliding connection or rolling connection in particular, so as to limit the moving direction of the rotor body 10. The stator track is provided with an armature winding, the armature winding is arranged between two opposite side walls of the accommodating groove 16 through a notch of the accommodating groove 16, the sliding block 18 is in sliding fit with the stator track, a magnetic field is generated when the armature winding is electrified, the permanent magnet array 17 generates driving force under the current excitation of a coil of the armature winding, the sliding block 18 is pushed to slide along the track, and the whole rotor body 10 is pushed to move along the track. The specific working principle of the magnetomotive force track is disclosed in the related technology, and the description of the specific working principle is omitted.
The first air pump 111 is arranged on the rotor body 10, so that the first air pump 111 can move along with the rotor body 10 to adsorb a workpiece at any station, the rotor has high degree of freedom, is limited by pipeline connection and has low air supply stability. The air supply mechanism 20 and the rotor body 10 are mutually separated, the second air pump is arranged on the air supply mechanism 20, the air supply mechanism 20 can be fixedly connected with the stator track or independently arranged, and the specific arrangement position is determined according to the working procedures of the workpiece at different stations. For example, in some embodiments, the mover body 10 is cyclically reciprocated along the stator rail at each station, and each station may be divided into a processing station, a discharging station, an inspection station, etc. depending on functions and processes, and the air supply mechanism 20 may be provided at the discharging station and the inspection station. When the rotor body 10 carries a workpiece and is transported to a processing station for processing, the vacuum pumping function of the rotor body 10 is only needed at the moment, and the workpiece can be realized by means of the first air pump 111 and the first air channel 1 on the rotor body 10 without participation of the air supply mechanism 20; when the rotor body 10 carries the workpiece and transports the workpiece to the unloading station to unload the workpiece, the rotor body 10 can be connected with the air supply mechanism 20 of the unloading station, a second air pump of the air supply mechanism 20 is communicated with the first air channel 1 through a second air channel 2, the second air pump provides positive pressure, the vacuum breaking function is realized, and the workpiece can be unloaded instantaneously; when the rotor body 10 bears the workpiece and transports the workpiece to the inspection station, if the vacuum degree of the first air passage 1 is detected to be insufficient, the rotor body 10 can be connected with the air supply mechanism 20 of the inspection station, the second air pump of the air supply mechanism 20 is communicated with the first air passage 1 through the third air passage 3, the second air pump provides negative pressure, the function of 'supplementing vacuum' is realized, and the vacuum degree of the first air passage 1 is ensured to meet the requirement that the workpiece is stably borne on the adsorption equipment.
The first air pump 111 is used for providing negative pressure, and specifically, an air pump such as a rotary vane vacuum pump, a diaphragm vacuum pump, a roots vacuum pump, or the like may be selected. The second air pump is used for providing positive pressure or negative pressure, and particularly can be used for selecting the dual-purpose air pump capable of exhausting and inflating. The vacuum connector 112 is connected to an adsorption device, and the structural form of the adsorption device is not limited herein, for example, when the workpiece to be adsorbed is a metal piece or a glass piece, the adsorption device may be a vacuum chuck; when the workpiece to be adsorbed is a flexible film piece or a brittle sheet, the adsorption equipment can also be a vacuum platform, a vacuum adsorption roller and the like.
In some embodiments, one mover body 10 may need to be connected to a plurality of suction devices simultaneously to simultaneously convey a plurality of workpieces; or the size of the adsorption force generated in different areas on one adsorption device needs to be adjusted according to the different structures of the workpieces. Referring further to fig. 1, for each vacuum suction mover, the first air path 1 may be provided with a plurality of vacuum connectors 112 to communicate with the first air pump 111; the second air path 2 may include a first main path 2A communicating with the second air pump and a plurality of first branches 2B branching from the first main path 2A, and each first branch 2B is provided with a first electromagnetic valve 113; the third gas path 3 may include a second main path 3A communicating with the first main path 2A and a plurality of second branches 3B branched from the second main path 3A; each first air channel 1 is communicated with a first branch 2B, and each first air channel 1 is communicated with a second branch 3B. In this way, the vacuum connectors 112 can be connected to a plurality of adsorption devices or respectively communicate with a plurality of areas on one adsorption device, and the functions of "vacuumizing", "breaking" and "supplementing vacuum" of a plurality of adsorption devices or a plurality of areas on one adsorption device are realized through a plurality of first air paths 1, a plurality of first branches 2B formed by branching and a plurality of second branches 3B.
Further, each first air channel 1 is provided with a second electromagnetic valve 114, and the second electromagnetic valve 114 is closer to the first air pump 111 relative to the connection point of the first air channel 1 and the second air channel 2 and the connection point of the first air channel 1 and the third air channel 3. That is, the first air path 1 and the first branch 2B are connected at a first connection point, the first air path 1 and the second branch 3B are connected at a second connection point, and the second solenoid valve 114 is disposed between the first air pump 111 and the first connection point and between the first air pump 111 and the second connection point, so that the second solenoid valve 114 can only block the negative pressure air generated by the first air pump 111. The second solenoid valve 114 is preferably a two-way solenoid pneumatic valve, and can be fully opened or closed as required, so as to control the on-off of the corresponding air path. When the plurality of adsorption devices connected by the vacuum connector 112 or the plurality of areas on one adsorption device do not need to work completely, one or a plurality of the first air paths 1 can be conducted and the idle first air paths 1 can be blocked by controlling the second electromagnetic valve 114 to selectively block or communicate the corresponding first air paths 1, so that unnecessary electric energy consumption generated by the simultaneous work of the idle air paths is avoided, the ineffective load borne by the first air pump 111 is reduced, and the accurate control of the workpiece adsorption process is realized.
Preferably, a one-way valve is provided on each second branch 3B. The one-way valve is configured to: only the gas is allowed to flow from the first gas path 1 in the direction of the second main path 3A, and the gas is not allowed to flow from the second main path 3A in the direction of the first gas path 1. Thus, when the first air pump 111 works and negative pressure is formed in the first air passage 1, air flows from the vacuum connector 112 to the direction of the first air pump 111, and the check valve is equivalent to blocking the second branch 3B, so that the third air passage 3 is prevented from affecting the vacuum degree of the first air passage 1. Similarly, the first electromagnetic valve 113 of the first branch circuit 2B is in a normally closed state when no "vacuum breaking" is needed, and the vacuum degree of the first air circuit 1 is not affected. In addition, when one of the plurality of first air paths 1 falls off or leaks, air cannot enter the other first air paths 1 through the first branch 2B or the second branch 3B so as to damage the vacuum degree of the other first air paths 1, the vacuumizing processes of the first air paths 1 are not affected, and the adsorption success rate of the mover body 10 is high and the failure rate is low.
In order to monitor the vacuum degree of the first air path 1 conveniently and further control the suction force of the adsorption equipment, the first air path 1 is also provided with an air pressure measuring meter 115. The barometer 115 may be a bourdon tube or a film vacuum gauge which uses mechanical properties to measure; or Pirani, thermocouple vacuum gauge, etc. that utilize the aerodynamic effect to measure. By arranging the air pressure measuring meter 115, the working condition of the first air pump 111 is controlled in real time, and when the conditions of leakage, falling off and the like of the pipeline occur, the pipeline can be timely found and overhauled.
Referring to fig. 2, further, the mover body 10 is further provided with a wireless control module 12, the wireless control module 12 is electrically connected to the air pressure meter 115 and the second air pump, and the wireless control module 12 is configured to: the start-stop and operation modes of the second air pump are controlled according to the display values of the air pressure gauge 115. The second air pump has an inflation mode for supplying positive pressure air and an air extraction mode for supplying negative pressure air. The wireless control module 12 is used for realizing the automatic 'vacuum filling' function of the mover, and the specific control logic is as follows: when the rotor body 10 carries a workpiece and transports the workpiece to an inspection station, the air pressure measuring meter 115 monitors the vacuum degree of the first air path 1 and transmits data to the wireless control module 12, the wireless control module 12 stores a vacuum degree preset value meeting the adsorption requirement, and when the vacuum degree value of the air pressure measuring meter 115 is smaller than the preset value, the wireless control module 12 automatically controls the second air pump to start in an air extraction mode and perform 'vacuum supplementing' operation until the vacuum degree of the first air path 1 meets the preset requirement. In addition, a plurality of electric control air path elements in the pipeline system, such as the first air pump 111, the first electromagnetic valve 113, the second electromagnetic valve 114, and the like on the mover body 10, can be electrically connected with the wireless control module 12, for example, through wires. Some components can be automatically controlled by the wireless control module 12, for example, when the mover body 10 only needs to perform a "vacuuming" operation, the wireless control module 12 can control the first air pump 111 to be started; when the mover body 10 needs to perform the "vacuum breaking" operation, the wireless control module 12 may control the first air pump 111 to be turned off, the first electromagnetic valve 113 to be turned on, and the second air pump to be started in the inflation mode. Still other components may be manually controlled by a switch on the wireless control module 12, for example, when all of the plurality of adsorption devices connected by the vacuum connector 112 are not required, a portion of the second solenoid valve 114 may be manually controlled to close, and the remaining second solenoid valve 114 is normally in a normally open state and is not required to be operated. The control part can be integrated by arranging the wireless control module 12, so that the whole conveying or processing control of the rotor is facilitated, and the operation control of operators is facilitated.
In some embodiments, the adsorption device may also have a pneumatic function, for example, the adsorption device is a pneumatic mechanical arm with an adsorption function, a linearly movable vacuum platform, etc., and for realizing pneumatic driving of the adsorption device, the mover body 10 is further provided with a pneumatic connector 116, and the pipeline system further includes a fourth air channel 4, where the fourth air channel 4 is connected to the first main channel 2A of the second air channel 2 and the pneumatic connector 116. Thus, when the second air pump charges the second air channel 2, the positive pressure air can flow to the adsorption device through the fourth air channel 4 and the pneumatic connector 116 to drive the adsorption device to perform pneumatic action. By connecting the fourth air path 4 to the first main path 2A, the first electromagnetic valve 113 in a closed state in a normal state blocks the connection between the first branch path 2B and the first air path 1, so that the vacuum breaking operation is not triggered by mistake when the adsorption equipment executes the pneumatic action.
Referring to fig. 2 to 7, the above-mentioned pipeline system is shown on the rotor body 10 and the air supply mechanism 20 as follows:
wherein the mover body 10 is provided with a first air port 131, the air supply mechanism 20 is provided with a second air port 21, the first air port 131 and the second air port 21 have an engaged state and a disengaged state, and in the engaged state, the first air port 131 is in butt joint with the second air port 21 to fluidly couple the mover body 10 with the air supply mechanism 20.
Specifically, referring to fig. 2 and 4, an air inlet block 13 is disposed on the mover body 10, a first air port 131 is formed on the air inlet block 13, and SNS permanent magnet arrays are disposed on the air inlet block 13 and around the first air port 131; the air supply mechanism 20 includes a housing (not shown in the figure), the second air port 21 is exposed on the housing, and an N-pole permanent magnet array is arranged on the housing around the second air port 21. When the rotor body 10 moves on the stator track until the first air port 131 is close to the second air port 21, the spatial positions of the S-level permanent magnets on the air inlet block 13 and the S-level permanent magnets on the shell are close to generate the force of like polarity repulsion, so that the air inlet block 13 and the air supply mechanism 20 are prevented from generating physical interference. When the mover body 10 moves to the position where the first air port 131 corresponds to the second air port 21, the space positions of the N-level permanent magnets on the air inlet block 13 and the S-level permanent magnets on the housing are close to generate opposite attraction force, so that the first air port 131 is butted with the second air port 21, and the internal air passage of the mover body 10 is communicated and coupled with the internal air passage of the air supply mechanism 20. The related art is described in the patent document with publication number CN109178941a, and is not described here. Preferably, in order to further enhance the connection tightness between the first air port 131 and the second air port 21, sealing rings may be provided at both the first air port 131 and the second air port 21.
Referring to fig. 5, the air supply mechanism 20 further includes a base 22, an air tap 23, a first switch valve 24, a pneumatic unit 25, a second switch valve 26, and a reset cylinder 27. Wherein, the air tap 23, the first switch valve 24, the pneumatic unit 25, the second switch valve 26 and the reset cylinder 27 are all arranged on the base 22. Specifically, the air tap 23 may be a three-way pipe joint, and a second air pump (not shown) is connected to one joint of the air tap 23. The first switch valve 24 and the second switch valve 26 are respectively connected with the other two joints of the air tap 23 through pipelines. The pneumatic unit 25 may be a slider 18 mechanism and is slidably connected to the base 22, the second air port 21 is opened on the pneumatic unit 25, the second air port 21 is exposed on the housing of the air supply mechanism 20, and the permanent magnet array arranged around the second air port 21 moves synchronously with the pneumatic unit 25. An air passage is arranged in the pneumatic unit 25, the pneumatic unit 25 is connected with the first switch valve 24 through a pipeline so as to enable the second air pump to be communicated with the second air port 21, and the sliding direction of the pneumatic unit 25 is consistent with the movement butt joint direction of the second air port 21 towards the first air port 131. The reset cylinder 27 is connected with the second switch valve 26 through a pipeline so that the second air pump is communicated with the reset cylinder 27, the reset cylinder 27 acts on the pneumatic unit 25, and after ventilation, the piston stretches out to push the pneumatic unit 25 so that the pneumatic unit 25 moves towards the direction that the second air port 21 is far away from the first air port 131. The specific working process is as follows: when the rotor body 10 moves to the position that the first air port 131 corresponds to the second air port 21, the pneumatic unit 25 slides towards the rotor body 10 under the action of magnetic force, so that the first air port 131 is in butt joint with the second air port 21, the first air port 131 and the second air port 21 are in a joint state, at the moment, gas generated by the air supply of the second air pump flows into the first air port 131 along the air tap 23, the first switch valve 24, the pneumatic unit 25 and the second air port 21 in sequence, and the gas flows to the opposite direction when the second air pump sucks, and the first switch valve 24 is used for controlling the on-off of the gas circuit. When the mover body 10 needs to be separated from the air supply mechanism 20, the second air pump supplies air, the first switch valve 24 is closed, the second switch valve 26 is opened, the air generated by the second air pump flows to the reset cylinder 27 along the air tap 23 and the second switch valve 26 in sequence, the reset cylinder 27 stretches out of the piston to push the pneumatic unit 25 to slide in a direction away from the mover body 10, and the magnetic adsorption force of the permanent magnet on the air inlet block 13 and the shell is overcome, so that the first air port 131 and the second air port 21 are in a separated state. Thus, the first air port 131 and the second air port 21 are conveniently and quickly connected or separated, friction or interference between the air inlet block 13 and the air supply mechanism 20 can be avoided, dust and particles are reduced, and the running safety and cleanliness of the equipment are improved.
Referring to fig. 3, the pneumatic control box 11 is disposed on the mover body 10, and the shape of the pneumatic control box 11 is not limited, and may be square, polygonal, irregular, etc., and the pneumatic control box 11 is used for providing a mounting base for the first air pump 111 and a part of pipeline components and protecting the internal components. The first air pump 111 and the first electromagnetic valve 113 are both disposed in the air control box 11, and specifically can be in a fixing manner such as screwing, clamping, bonding, etc., and a plurality of ventilation openings are formed in the air control box 11, so that the air flow in the air control box 11 is facilitated when the first air pump 111 works. The vacuum connector 112 may be provided outside the pneumatic control box 11 to facilitate connection with the adsorption apparatus.
More specifically, the mover body 10 is further provided with a positive pressure joint, a negative pressure joint, a first multi-way pipe joint 117, and a second multi-way pipe joint 118. Referring to fig. 6 and 7, the positive pressure joint includes a first positive pressure joint 132 and a second positive pressure joint 119 which are connected by a pipeline, the negative pressure joint includes a first negative pressure joint 133 and a second negative pressure joint 1110 which are connected by a pipeline, the first positive pressure joint 132 and the first negative pressure joint 133 are disposed on the air intake block 13, and the second positive pressure joint 119 and the second negative pressure joint 1110 are disposed on the air control box 11. The air inlet block 13 is installed outside the air control box 11, and an air passage is formed inside the air inlet block 13, so that the air inlet block 13 is equivalent to a three-way pipe joint, and the first air inlet 131, the first positive pressure joint 132 and the first negative pressure joint 133 are mutually communicated. The first multi-way pipe joint 117 and the second multi-way pipe joint 118 are both arranged in the pneumatic control box 11, the first multi-way pipe joint 117 is provided with a plurality of interfaces, one interface of the first multi-way pipe joint 117 is connected with the second positive pressure joint 119 through a pipeline, and the other interfaces are respectively connected with the plurality of first electromagnetic valves 113 in a one-to-one correspondence manner; the second multi-way pipe joint 118 has a plurality of joints, one joint of the second multi-way pipe joint 118 is connected with the second negative pressure joint 1110 through a pipeline, and the other joints are respectively connected with the plurality of vacuum joints 112 through pipelines; the vacuum connection 112 may be a four-way connection having four connections, one for connecting with the adsorption apparatus via tubing, the other for connecting with the first air pump 111 via tubing, the further connection with the first solenoid valve 113, the further connection with the second multi-way connection 118.
The arrangement forms a specific connection structure of the pipeline system. Wherein, the connecting pipeline of the first air pump 111 and the vacuum connector 112 forms a first air path 1; the connecting pipeline for connecting the second air pump and the second air port 21 and the pipeline sequentially connecting the first air port 131, the positive pressure joint and the first multi-way joint 117 form a first main pipeline 2A of the second air path 2, the first main pipeline 2A is branched at the first multi-way joint 117, and the connecting pipeline sequentially connecting the first multi-way joint 117, the first electromagnetic valve 113 and the vacuum joint 112 forms a first branch pipeline 2B of the second main pipeline 3A; the connecting pipeline sequentially connecting the first air port 131, the negative pressure joint and the second multi-way pipe joint 118 forms a second main pipeline 3A of the third air circuit 3, the second main pipeline 3A is branched at the second multi-way pipe joint 118, and the connecting pipeline connecting the second multi-way pipe joint 118 and the vacuum joint 112 forms a second branch pipeline 3B of the third air circuit 3.
In addition, the second electromagnetic valve 114 is installed in the air control box 11, and in the air path structure, the second electromagnetic valve 114 is provided on the connection line between the first air pump 111 and the vacuum connector 112. The check valve may be integrally formed with the second multi-way pipe joint 118 or the vacuum joint 112, and may specifically be disposed at an interface of the second multi-way pipe joint 118 connected to the vacuum joint 112 or at an interface of the vacuum joint 112 connected to the second multi-way pipe joint 118. The air pressure measuring meter 115 is installed on the outer side of the air control box 11, for example, on the side wall of the air control box 11, so that an operator can intuitively read data through the air pressure measuring meter 115, and in the air path structure, the air pressure measuring meter 115 is arranged on a connecting pipeline of the first air pump 111 and the vacuum connector 112. The air control box 11 is provided with a base 14 towards one side of the stator track, and the wireless control module 12 and the air inlet block 13 are both mounted on the base 14, but the mounting positions of the wireless control module 12 and the air inlet block 13 are not limited in this embodiment, and the wireless control module 12 and the air inlet block 13 can be mounted at other suitable positions of the rotor body 10. The pneumatic connector 116 is provided with a plurality of pneumatic connectors and is arranged on the outer side of the pneumatic control box 11 and is convenient to be connected with adsorption equipment, a third multi-way pipe connector 1111 is further arranged in the pneumatic control box 11, the third multi-way pipe connector 1111 is arranged on a pipeline between the second positive pressure connector 119 and the first multi-way pipe connector 117, the third multi-way pipe connector 1111 is provided with a plurality of interfaces, two interfaces are respectively connected with the second positive pressure connector 119 and the first multi-way pipe connector 117, the other interfaces are respectively connected with the plurality of pneumatic connectors 116 in a one-to-one correspondence manner, so that a specific connection structure of the fourth air circuit 4 is formed, and the pipeline between the third multi-way pipe connector 1111 and the pneumatic connectors 116 forms the fourth air circuit 4. The rotor body 10 is further provided with a power supply mechanism 15, the power supply mechanism 15 can be installed on the base 14, the power supply mechanism 15 is electrically connected with the stator track in a sliding contact mode and is electrically connected with the first air pump 111, the stator track can be electrified, and the power of the stator guide rail can be transmitted to the first air pump 111 through the power supply mechanism 15 by arranging the power supply mechanism 15, so that the first air pump 111 works under power driving without connecting a cable or arranging a storage battery, and the moving burden of the rotor body 10 is reduced.
It should be noted that, for the sake of convenience of observation, only the connectors and the gas path elements are shown in the drawings of the embodiments of the present application, but the gas pipe lines between the connectors and the gas path elements are not shown, and in actual use, the gas pipes should be well connected, and the specific connection relationship is based on the description in the specification. In addition, the connection modes between the air pipe and each connector and between the air pipe and the air path element comprise but are not limited to flange connection, socket connection, clamping sleeve connection and the like; each joint can be independently arranged in the pneumatic control box 11, and can be integrally formed with the air passage structure inside the pneumatic control box 11, and the pneumatic control box 11 only exposes the interface part, so that the pneumatic control box is beneficial to the installation connection of the air passage structure.
In some embodiments, only one first air pump 111 may be provided, and one first air pump 111 performs a "vacuuming" operation on a plurality of first air paths 1 at the same time. Alternatively, as in the illustrated embodiment, the first air pumps 111 may be provided with multiple sets, each set including one or more air pumps, and each set of first air pumps 111 is connected to one vacuum connector 112 through one first air path 1. The plurality of vacuum joints 112 are connected with a plurality of adsorption devices or are communicated with a plurality of areas on one adsorption device, so that the required adsorption force of each adsorption device or each area can be different, through the arrangement, the vacuum degree matched with the required adsorption force is provided for different adsorption devices or areas through different first air pump 111 groups, the adsorption stability of a workpiece is improved, meanwhile, compared with the scheme adopting one first air pump 111, the independent pressure supply of each first air passage 1 is easier to realize, the vacuum degree provided by each first air passage 1 is higher, the vacuum dissipation is slower, and the adsorption effect is better.
In the illustrated embodiment, the second air path 2 and the third air path 3 are each branched from one main path to form a plurality of branches, and in other embodiments, a plurality of second air paths 2 and third air paths 3 may be further provided to perform "vacuum breaking" and "vacuum supplementing" operations on each first air path 1. In the illustrated embodiment, only one second air pump is provided and can perform air extraction or inflation operation respectively, in other embodiments, two second air pumps may be further provided, one second air pump performs inflation operation and is communicated with the first air channel 1 through the second air channel 2, the other second air pump performs air extraction operation and is communicated with the first air channel 1 through the third air channel 3, and the two second air pumps perform vacuum breaking operation and vacuum supplementing operation respectively, so that the specific air channel structure can be designed correspondingly. In the illustrated embodiment, in order to reduce the weight of the mover body 10 and reduce the moving load of the mover body 10, the mover body 10 and the air supply mechanism 20 are separately arranged, in other embodiments, the air supply mechanism 20 may also be directly arranged on the mover body 10, and the second air pump moves along with the mover body 10, so as to realize the operations of breaking vacuum and supplementing vacuum in real time, and the visible specific scheme of the redundant structure on the air supply mechanism 20 is simplified. It can be understood that, under the guidance of the foregoing embodiments, different structural forms of the mover with the functions of "vacuumizing", "breaking vacuum" and "supplementing vacuum" formed according to different numbers of air pumps, numbers of air channels, connection forms of the air channels and structures are all within the protection scope of the present application.
The foregoing description of the preferred embodiments of the present application is not intended to be limiting, but is intended to cover any and all modifications, equivalents, and alternatives falling within the spirit and principles of the present application.
Claims (6)
1. The vacuum adsorption rotor is characterized by comprising a rotor body and an air supply mechanism, wherein the rotor body is provided with a first air port, a positive pressure connector, a negative pressure connector, a first multi-way pipe connector, a second multi-way pipe connector, a first air pump for providing negative pressure and a vacuum connector for connecting adsorption equipment, and the first air port is respectively connected with the positive pressure connector and the negative pressure connector;
the air supply mechanism is provided with a second air port and a second air pump for providing negative pressure or positive pressure, the first air port and the second air port have an engagement state and a separation state, and in the engagement state, the first air port and the second air port are in butt joint so as to enable the rotor body to be in fluid coupling with the air supply mechanism;
the mover further includes a pipe system including:
the first air passage is communicated with the first air pump and the vacuum joint;
the second air passage is communicated with the second air pump and the first air passage, and a first electromagnetic valve is arranged on the second air passage;
the third air passage is communicated with the second air pump and the first air passage;
the vacuum adsorption mover has three modes, in the first mode, the first air pump provides negative pressure, negative pressure gas flows to the adsorption equipment through the first air path, and the adsorption equipment generates internal and external pressure difference to adsorb a workpiece; in a second mode, the second air pump provides positive pressure, and positive pressure gas flows to the first air channel through the second air channel and balances the pressure difference of the adsorption equipment so as to enable the workpiece to rapidly fall off from the adsorption equipment; in a third mode, the second air pump provides negative pressure, and negative pressure gas flows to the first air channel through the third air channel to supplement the vacuum degree of the first air channel;
the first air passage is provided with a plurality of vacuum joints for communicating the first air pump and the plurality of vacuum joints;
the second air circuit comprises a first main circuit communicated with the second air pump and a plurality of first branches branched from the first main circuit, and each first branch is provided with a first electromagnetic valve;
the third air circuit comprises a second main circuit communicated with the first main circuit and a plurality of second branches forked from the second main circuit;
each first air passage is communicated with one first branch and one second branch;
a one-way valve is arranged on each second branch and is arranged to only allow gas to flow from the first gas path to the second main path;
one interface of the first multi-way pipe connector is connected with the positive pressure connector, and the other interfaces are respectively connected with the first electromagnetic valves in a one-to-one correspondence manner;
one interface of the second multi-way pipe connector is connected with the negative pressure connector, and the other interfaces are respectively connected with the vacuum connectors in a one-to-one correspondence manner;
one interface of the vacuum connector is used for connecting adsorption equipment, the other interface is connected with the first air pump, the other interface is connected with the first electromagnetic valve, and the other interface is connected with the second multi-way pipe connector; the second air pump is connected with the second air port;
the first air pump and the connecting pipeline of the vacuum joint form the first air path;
the connecting pipeline for connecting the second air pump and the second air port and the connecting pipeline for sequentially connecting the first air port, the positive pressure joint and the first multi-way pipe joint form the first main pipeline, the first main pipeline is branched at the first multi-way pipe joint, and the connecting pipeline for sequentially connecting the first multi-way pipe joint, the first electromagnetic valve and the vacuum joint form the first branch pipeline;
the connecting pipelines of the first air port, the negative pressure joint and the second multi-way pipe joint are sequentially connected to form a second main pipeline, the second main pipeline is branched at the second multi-way pipe joint, and the connecting pipeline of the second multi-way pipe joint and the vacuum joint is connected to form a second branch pipeline.
2. The vacuum adsorption mover of claim 1, wherein a second solenoid valve is provided on each of the first air passages, the second solenoid valve being closer to the first air pump than to the connection point of the first air passage and the second air passage and the connection point of the first air passage and the third air passage.
3. The vacuum adsorption mover of claim 1, wherein each first air path is provided with an air pressure measuring meter, and the air pressure measuring meter is used for monitoring the vacuum degree of the corresponding first air path;
the rotor body is further provided with a wireless control module, the wireless control module is respectively and electrically connected with the air pressure measuring meter and the second air pump, and the wireless control module is configured to: and controlling the start-stop and working modes of the second air pump according to the display numerical value of the air pressure measuring meter.
4. The vacuum adsorption mover of claim 1, wherein the mover body is further provided with a pneumatic connector, the piping system further comprises a fourth air passage, the fourth air passage communicates with the first main passage and the pneumatic connector, and the pneumatic connector is used for connecting an adsorption device and driving the adsorption device to perform a pneumatic action by positive pressure provided by the second air pump.
5. The vacuum adsorption mover of claim 1, wherein the mover body is further provided with a permanent magnet array and a slider, the permanent magnet array being for magnetically cooperating with the stator track to provide a driving force for the mover body to move; the sliding block is used for being connected with the stator track in a sliding mode so as to limit the moving direction of the rotor body.
6. The vacuum-adsorbed mover of claim 1, wherein one or more of the following conditions are satisfied:
the first air pump is an air suction air pump;
the second air pump is a pumping and inflating dual-purpose air pump;
the first electromagnetic valve is a normally-closed two-way electromagnetic valve;
the rotor body is further provided with a power supply mechanism, the power supply mechanism is in sliding contact type electric connection with the stator track and is electrically connected with the first air pump, and the power of the stator track is transmitted to the first air pump through the power supply mechanism so as to supply power for the first air pump.
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| CN202310932701.8A CN116715021B (en) | 2023-07-26 | 2023-07-26 | Vacuum adsorption active cell |
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| CN202310932701.8A CN116715021B (en) | 2023-07-26 | 2023-07-26 | Vacuum adsorption active cell |
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Address after: 201100, 1st Floor, Building 8, No. 333 Wanfang Road, Minhang District, Shanghai Applicant after: Guoli Zhizao (Shanghai) Technology Co.,Ltd. Address before: 201100 room 1, building 8, No. 333, Wanfang Road, Minhang District, Shanghai Applicant before: SHANGHAI GOLYTEC AUTOMATION Co.,Ltd. |
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