CN116705577A - 阴极支承件及离子源 - Google Patents
阴极支承件及离子源 Download PDFInfo
- Publication number
- CN116705577A CN116705577A CN202211453722.3A CN202211453722A CN116705577A CN 116705577 A CN116705577 A CN 116705577A CN 202211453722 A CN202211453722 A CN 202211453722A CN 116705577 A CN116705577 A CN 116705577A
- Authority
- CN
- China
- Prior art keywords
- cathode
- holder
- cathode holder
- flange portion
- adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 5
- 238000004378 air conditioning Methods 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims description 3
- 230000005484 gravity Effects 0.000 description 7
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000002784 hot electron Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022031878A JP2023127907A (ja) | 2022-03-02 | 2022-03-02 | カソード支持具及びイオン源 |
| JP2022-031878 | 2022-03-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116705577A true CN116705577A (zh) | 2023-09-05 |
Family
ID=87843959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211453722.3A Pending CN116705577A (zh) | 2022-03-02 | 2022-11-21 | 阴极支承件及离子源 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2023127907A (ja) |
| CN (1) | CN116705577A (ja) |
-
2022
- 2022-03-02 JP JP2022031878A patent/JP2023127907A/ja active Pending
- 2022-11-21 CN CN202211453722.3A patent/CN116705577A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2023127907A (ja) | 2023-09-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication |