CN116626167A - Ultrasonic transverse wave attenuation coefficient measuring device and working method - Google Patents

Ultrasonic transverse wave attenuation coefficient measuring device and working method Download PDF

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Publication number
CN116626167A
CN116626167A CN202310651010.0A CN202310651010A CN116626167A CN 116626167 A CN116626167 A CN 116626167A CN 202310651010 A CN202310651010 A CN 202310651010A CN 116626167 A CN116626167 A CN 116626167A
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transverse wave
ultrasonic
attenuation coefficient
ultrasonic transverse
workpiece
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张炯
肖俊峰
李永君
高斯峰
唐文书
南晴
刘全明
徐小卜
马伟
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Xian Thermal Power Research Institute Co Ltd
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Xian Thermal Power Research Institute Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/11—Analysing solids by measuring attenuation of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/4454—Signal recognition, e.g. specific values or portions, signal events, signatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/015—Attenuation, scattering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/30—Nuclear fission reactors

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  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
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  • General Health & Medical Sciences (AREA)
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  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

The invention provides a measuring device and a working method of an ultrasonic transverse wave attenuation coefficient, wherein the device comprises the following components: the ultrasonic detector is used for exciting the ultrasonic transverse wave probe to generate ultrasonic transverse waves, recording echo amplitude of the transverse waves on the reflecting surfaces of the test block and the workpiece to be tested, and sequentially calculating the absorption attenuation coefficient, the scattering attenuation coefficient and the diffusion attenuation coefficient of the workpiece to be tested according to the amplitude; the ultrasonic transverse wave probe is used for being fixed on the coupling surface of the test block or the workpiece to be tested, and transmitting and receiving ultrasonic transverse waves; the test block is designed according to the material property of the workpiece to be tested and the attenuation characteristic of the ultrasonic transverse wave, and is used for receiving the ultrasonic transverse wave and forming an echo on the reflecting surface. According to the invention, the influence of diffusion attenuation in attenuation coefficient measurement is eliminated through the pre-designed test block, the absorption attenuation coefficient, the scattering attenuation coefficient and the diffusion attenuation coefficient of the workpiece to be measured are sequentially calculated, the diffusion attenuation coefficient matched with the shape and the size of the workpiece to be measured is obtained, and the accuracy of ultrasonic transverse wave attenuation coefficient measurement is improved.

Description

Ultrasonic transverse wave attenuation coefficient measuring device and working method
Technical Field
The invention relates to the technical field of measurement of ultrasonic transverse wave attenuation coefficients, in particular to a device for measuring ultrasonic transverse wave attenuation coefficients and a working method thereof.
Background
When an ultrasonic wave propagates in a medium, the energy of the ultrasonic wave in the propagation process of the medium is reduced due to diffusion attenuation caused by the diffusion of an ultrasonic sound beam, absorption attenuation caused by the absorption of ultrasonic energy by the medium and scattering attenuation caused by the scattering of the ultrasonic wave by grain boundaries among medium grains. In general, the attenuation coefficient of the ultrasonic wave is the sum of a diffusion attenuation coefficient, an absorption attenuation coefficient and a scattering attenuation coefficient, and the obtained attenuation coefficient of the ultrasonic wave has important effects on grasping the attenuation rule of an ultrasonic sound field in a medium and qualitative and quantitative determination of defects in the medium.
At present, a thin plate test piece with the same material or similar material to a workpiece to be measured is generally adopted as an ultrasonic transverse wave attenuation coefficient, after the ultrasonic transverse wave obliquely enters the thin plate test piece, the ultrasonic transverse wave is reflected back and forth between the bottom surface of the thin plate test piece and a coupling surface, and the sound pressure of the ultrasonic transverse wave after n times of reflection is obtained by arranging a receiving probe at the span of n times (n=1, 2, 3 and … …) of the coupling surface, so that the attenuation coefficient of the ultrasonic transverse wave in the thin plate is obtained. The attenuation coefficient measured by the method is the sum of the diffusion attenuation coefficient, the absorption attenuation coefficient and the scattering attenuation coefficient, the numerical value of each attenuation coefficient cannot be measured, particularly the diffusion attenuation coefficient is greatly influenced by the shape and the size of the workpiece to be measured, and the diffusion attenuation coefficient measured on the sheet test piece cannot represent the diffusion attenuation coefficient in the workpiece to be measured.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to overcome the defect of inaccurate measurement of the ultrasonic transverse wave attenuation coefficient in the prior art, so that the ultrasonic transverse wave attenuation coefficient measuring device and the working method are provided, the diffusion attenuation coefficient, the scattering attenuation coefficient and the absorption attenuation coefficient of ultrasonic transverse waves of workpieces to be measured with different shapes and sizes can be measured, and the accuracy of the measured attenuation coefficient of the workpieces to be measured is improved.
The technical scheme for solving the technical problems is as follows:
in a first aspect, the present invention provides a device for measuring the attenuation coefficient of ultrasonic transverse waves, the system comprising: an ultrasonic detector, an ultrasonic transverse wave probe and a preset number of test blocks;
the ultrasonic detector is used for exciting the ultrasonic transverse wave transmitting probe to generate ultrasonic transverse waves with preset frequency, recording echo amplitude formed by the ultrasonic transverse waves received by the ultrasonic transverse wave receiving probe on the reflecting surfaces of the test block and the workpiece to be tested, and sequentially calculating the absorption attenuation coefficient, the scattering attenuation coefficient and the diffusion attenuation coefficient of the workpiece to be tested according to the amplitude;
the ultrasonic transverse wave probe comprises an ultrasonic transverse wave transmitting probe and an ultrasonic transverse wave receiving probe, and is used for being fixed on the coupling surface of the test block or the workpiece to be tested, the ultrasonic transverse wave transmitting probe is excited by the ultrasonic detector to generate ultrasonic transverse waves and transmit the ultrasonic transverse waves, and the ultrasonic transverse wave receiving probe receives echoes of the ultrasonic transverse waves and returns the echoes to the ultrasonic detector;
The test block is designed according to the material property of the workpiece to be tested and the attenuation characteristic of the ultrasonic transverse wave, so that the ultrasonic transverse wave propagates in the ultrasonic test block and forms an echo on the reflecting surface, and the echo is used for calculating the absorption attenuation coefficient, the scattering attenuation coefficient and the diffusion attenuation coefficient of the workpiece to be tested;
the test block comprises: the surface roughness, acoustic impedance and materials of the semi-cylindrical test blocks or the isosceles trapezoid test blocks are the same as those of the workpiece to be tested;
the cylindrical surface radius of each semi-cylindrical test block is the same and is set to be larger than the preset multiple of the near field region of the ultrasonic transverse wave probe, the surface roughness is set to be smaller than the first preset proportion of the transverse wave wavelength, and the average grain sizes of the semi-cylindrical test blocks are different from each other and are set to be smaller than the second preset proportion of the transverse wave wavelength;
the distances between the isosceles trapezoid surfaces of the isosceles trapezoid test blocks and the ultrasonic transverse wave incidence point are the same, the distances are set to be larger than the preset multiple of the near field region of the ultrasonic transverse wave probe, the surface roughness is set to be smaller than the first preset proportion of the transverse wave wavelength, the average grain sizes of the isosceles trapezoid test blocks are different from each other, and the average grain sizes of the isosceles trapezoid test blocks are set to be smaller than the second preset proportion of the transverse wave wavelength.
According to the measuring device for the attenuation coefficient of the ultrasonic transverse wave, the semi-cylindrical test block and the isosceles trapezoid test block are designed in advance according to the material property of the workpiece to be measured and the attenuation characteristic of the ultrasonic transverse wave to be measured to serve as test blocks, the ultrasonic transverse wave transmitting probes fixed on the test blocks or the coupling surfaces of the workpiece to be measured are excited by the ultrasonic detector to generate ultrasonic transverse waves with preset frequencies, the ultrasonic transverse waves are transmitted to the corresponding reflecting surfaces, the ultrasonic transverse waves form echoes between the coupling surfaces and the reflecting surfaces, the reflected echoes of the preset times are received through the ultrasonic transverse wave receiving probes, the amplitude of each echo is recorded by the ultrasonic detector, and the absorption attenuation coefficient, the scattering attenuation coefficient and the diffusion attenuation coefficient of the workpiece to be measured on the ultrasonic transverse waves are calculated according to the amplitude. According to the invention, the influence of diffusion attenuation in attenuation coefficient measurement is eliminated through the pre-designed test block, the absorption attenuation coefficient, the scattering attenuation coefficient and the diffusion attenuation coefficient of the ultrasonic transverse wave of the workpiece to be measured are sequentially calculated, the diffusion attenuation coefficient matched with the shape and the size of the workpiece to be measured is obtained, and the accuracy of ultrasonic transverse wave attenuation coefficient measurement is improved.
Optionally, a magnetic attraction or compression device is provided for the ultrasonic transverse wave probe to ensure that the coupling force of the ultrasonic transverse wave probe is consistent when measured on different test blocks or workpieces to be measured.
The preset number of test blocks designed by the invention are the same as the material properties of the workpiece to be tested, and the test blocks are regular in shape and relatively large in size, so that the test blocks and the workpiece to be tested can be ensured to have the same absorption attenuation constant and scattering attenuation constant, and the diffusion attenuation coefficient accords with an attenuation formula. By carrying out ultrasonic transverse wave test on test blocks with different grain sizes, the absorption attenuation constant and the scattering attenuation constant of the test block can be calculated, so that the absorption attenuation coefficient and the scattering attenuation coefficient of a workpiece to be tested are obtained. In order to solve different attenuation constants, different equation sets are required to be obtained, so that ultrasonic transverse wave measurement is required to be carried out on different test blocks and workpieces to be measured, the magnetic attraction or compression device is configured to ensure that the coupling force of the ultrasonic transverse wave probe when the ultrasonic transverse wave probe is fixed on different test blocks or workpieces to be measured is the same, the measured echo amplitude is more accurate, and the accuracy of various attenuation coefficients obtained through calculation can be further improved.
Optionally, fixing an ultrasonic transverse wave probe with ultrasonic transmitting and receiving functions on the coupling surface of the test block according to the ultrasonic transverse wave propagation characteristics; and respectively fixing an ultrasonic transverse wave transmitting probe and an ultrasonic transverse wave receiving probe at different positions on the coupling surface of the workpiece to be detected, wherein the positions are separated by a preset multiple span.
Optionally, if the workpiece to be tested does not have a reflecting surface approximately parallel to the coupling surface, manufacturing a block to be tested with the same acoustic beam diffusion cross-sectional area as that of the ultrasonic transverse wave probe, wherein the thickness, the material and the surface roughness of the block to be tested are the same as those of the workpiece to be tested.
If the workpiece detected by the invention does not have a reflecting surface approximately parallel to the coupling surface, the condition of multiple reflection cannot be formed, and the ultrasonic transverse wave measurement directly influences the formation of echo, so that the calculation of the attenuation coefficient is inaccurate, therefore, the workpiece to be detected with the same material property as the workpiece to be detected can be processed, the workpiece to be detected can be used for replacing the workpiece to be detected to carry out measurement, and the accuracy of the attenuation coefficient measurement can be ensured.
In a second aspect, an embodiment of the present invention provides a working method of a device for measuring an attenuation coefficient of an ultrasonic transverse wave, including the following steps:
determining a coupling surface and a reflecting surface of a test block, selecting a rectangular surface of a semi-cylindrical test block as the coupling surface, and selecting a semi-cylindrical curved surface as the reflecting surface, or selecting the opposite upper surfaces of isosceles trapezoid test blocks as the coupling surfaces and two isosceles trapezoid surfaces as the reflecting surfaces;
respectively fixing ultrasonic transverse wave probes with preset frequency on the coupling surfaces of a preset number of test blocks, and exciting the ultrasonic transverse wave probes to emit ultrasonic transverse waves to the reflecting surfaces corresponding to the test blocks by adopting an ultrasonic detector;
The ultrasonic transverse wave forms echoes between the coupling surface and the reflecting surface of each test block, the ultrasonic transverse wave probe receives echoes of preset times reflected by the reflecting surface of each test block, the ultrasonic detector records the amplitudes of different echoes, the absorption attenuation constant and the scattering attenuation constant are obtained according to the amplitudes, and the absorption attenuation coefficient and the scattering attenuation coefficient of a workpiece to be tested are calculated according to the absorption attenuation constant and the scattering attenuation constant;
selecting two relatively parallel surfaces of a workpiece to be detected as a coupling surface and a reflecting surface respectively, fixing an ultrasonic transverse wave transmitting probe with preset frequency on the coupling surface of the workpiece to be detected, and exciting the ultrasonic transverse wave transmitting probe to transmit ultrasonic transverse waves to the reflecting surface of the workpiece to be detected by adopting an ultrasonic detector;
and the ultrasonic transverse wave forms echo between the coupling surface and the reflecting surface of the workpiece to be detected, the ultrasonic transverse wave receiving probe is fixed at the span position with preset times, the echo at the span position with preset times reflected by the reflecting surface is received, the amplitude of different echoes is recorded by the ultrasonic detector, and the diffusion attenuation coefficient of the workpiece to be detected is calculated according to the amplitude, the absorption attenuation coefficient and the scattering attenuation coefficient.
According to the working method of the measuring device for the ultrasonic transverse wave attenuation coefficient, a semi-cylindrical test block and an isosceles trapezoid test block are designed in advance according to the material property of a workpiece to be measured and the attenuation characteristic of ultrasonic transverse waves to be measured to serve as test blocks, an ultrasonic transverse wave transmitting probe fixed on each test block or the coupling surface of the workpiece to be measured is excited by an ultrasonic detector to generate ultrasonic transverse waves with preset frequency, the ultrasonic transverse waves are transmitted to a corresponding reflecting surface, the ultrasonic transverse waves form echoes between the coupling surface and the reflecting surface, the reflected echoes of preset times are received through an ultrasonic transverse wave receiving probe, the amplitude of each echo is recorded by the ultrasonic detector, the absorption attenuation constant and the scattering attenuation constant of the workpiece to be measured to the ultrasonic transverse waves are calculated according to the echo amplitude of the test blocks, and then the absorption attenuation coefficient and the scattering attenuation coefficient of the workpiece to be measured are calculated, and the diffusion attenuation coefficient of the ultrasonic transverse waves to the workpiece to be measured is calculated according to the absorption attenuation coefficient, the scattering attenuation coefficient and the echo amplitude of the workpiece to be measured. According to the invention, the influence of diffusion attenuation in attenuation coefficient measurement is eliminated through the pre-designed test block, the absorption attenuation coefficient, the scattering attenuation coefficient and the diffusion attenuation coefficient of the workpiece to be measured are sequentially calculated, the diffusion attenuation coefficient matched with the shape and the size of the workpiece to be measured is obtained, and the accuracy of ultrasonic transverse wave attenuation coefficient measurement is improved.
Optionally, on the test block, the incident point and the receiving point of the ultrasonic transverse wave are both central positions of the coupling surface of the test block, and the ultrasonic transverse wave passes through the axis of the semi-cylindrical test block and is emitted along the radial direction of the cross section of the semi-cylindrical test block or is emitted in parallel with the normal direction of the trapezoid surface of the isosceles trapezoid test block; on a workpiece to be measured, the incidence point of the ultrasonic transverse wave is the fixed position of the ultrasonic transverse wave transmitting probe, the receiving point is the fixed position of the ultrasonic transverse wave receiving probe, and the ultrasonic transverse wave is transmitted to the reflecting surface of the workpiece to be measured according to a preset refraction angle.
The invention designs test blocks with different average grain sizes in advance, and ultrasonic transverse waves form echoes on the coupling surface and the reflecting surface of the test block. According to the frequency of the ultrasonic transverse wave, a preset refraction angle and the size of a wafer, a semi-cylindrical or trapezoid test block is designed, so that the emitted transverse wave can be reflected back and forth on a semi-cylindrical surface or reflected back and forth on two waist surfaces of the trapezoid test block after the ultrasonic transverse wave probe is coupled to the upper surface of the test block, and the ultrasonic transverse wave sound pressure after multiple reflections is obtained.
Optionally, the diffusion attenuation coefficient of the semi-cylindrical test block and the isosceles trapezoid test block meets an attenuation formula.
The pre-designed test block can enable the diffusion attenuation coefficient of the test block to meet the attenuation formula due to the special shape design or the relatively larger acoustic beam propagation cross section, so that the influence of diffusion attenuation in the attenuation coefficient measurement can be eliminated. The diffusion attenuation coefficient is calculated through an attenuation formula, so that the diffusion attenuation coefficient can be used as a known quantity in the ultrasonic transverse wave attenuation coefficient measurement process, and the calculation process is simplified.
Optionally, the number of the semi-cylindrical test blocks or the isosceles trapezoid test blocks is at least 2.
The invention obtains the absorption attenuation constant and the scattering attenuation constant by testing the test blocks, and comprises two unknown quantities, so that in the ultrasonic transverse wave attenuation coefficient measurement process, at least one group of binary primary equation sets is generated to ensure that the absorption attenuation constant and the scattering attenuation constant can be calculated, 2 semi-cylindrical test blocks or isosceles trapezoid test blocks are selected in the test process, the 2 test blocks have the same material properties except that the average grain size is different, and only in the measurement process, two groups of binary primary equations can be generated, and a group of binary primary equation sets can be generated by the equation sets in a combined way, so that the equation sets can be guaranteed to have solutions, and the absorption attenuation constant and the scattering attenuation constant can be calculated.
Optionally, the process of receiving, by the ultrasonic transverse wave probe, echoes of preset times reflected by the reflecting surface from each test block, recording, by the ultrasonic detector, amplitudes of different echoes, obtaining an absorption attenuation constant and a scattering attenuation constant according to the amplitudes, and calculating an absorption attenuation coefficient and a scattering attenuation coefficient of a workpiece to be measured according to the absorption attenuation constant and the scattering attenuation constant includes: the ultrasonic transverse wave forms an echo on the reflecting surface of the first test block and the reflecting surface of the second test block; the ultrasonic transverse wave probe receives m echoes and n echoes formed on the reflecting surface of the first test block, and records a first amplitude of the m echoes and a second amplitude of the n echoes through the ultrasonic detector; calculating a first attenuation coefficient of a first test block according to the first amplitude and the second amplitude, and constructing a first equation between the first attenuation coefficient and an absorption attenuation constant and a scattering attenuation constant; the ultrasonic transverse wave probe receives m echoes and n echoes formed on the reflecting surface of the second test block, and records a third amplitude of the m echoes and a fourth amplitude of the n echoes through the ultrasonic detector; calculating a second attenuation coefficient of a second test block according to the third amplitude and the fourth amplitude, and constructing a second equation between the second attenuation coefficient and the absorption attenuation constant and between the second attenuation coefficient and the scattering attenuation constant; the absorption attenuation constant and the scattering attenuation constant are calculated by combining the first equation and the second equation; and calculating the absorption attenuation coefficient and the scattering attenuation coefficient of the workpiece to be measured according to the absorption attenuation constant and the scattering attenuation constant.
According to the invention, through twice ultrasonic transverse wave measurement in the same step, ultrasonic transverse waves with the same frequency form echoes on the coupling surface and the reflecting surface of different test blocks. And selecting echo of preset times, and obtaining attenuation coefficients of the two test blocks through echo amplitude. The attenuation coefficient is the sum of an absorption attenuation coefficient, a scattering attenuation coefficient and a diffusion attenuation coefficient, a fixed relation exists between the absorption attenuation coefficient and the scattering attenuation coefficient and between the absorption attenuation coefficient and the scattering attenuation coefficient respectively, and the diffusion attenuation coefficient can be calculated according to an attenuation formula. Two sets of relations between the attenuation coefficient and the absorption and scattering attenuation constants can thus be obtained. And (3) combining the two binary primary equations to obtain a set of binary primary equation sets. Therefore, the two constants can be solved through a binary one-time equation system, and the absorption attenuation coefficient and the scattering attenuation coefficient of the workpiece to be measured can be calculated by bringing the two constants into a fixed relation corresponding to the workpiece to be measured.
Optionally, the process of fixing the ultrasonic transverse wave receiving probe at a preset multiple span, receiving echoes at the preset multiple span reflected by the reflecting surface, recording the amplitudes of different echoes by the ultrasonic detector, and calculating the diffusion attenuation coefficient of the workpiece to be measured according to the amplitudes, the absorption attenuation coefficient and the diffusion attenuation coefficient includes: the ultrasonic transverse wave forms an echo on a reflecting surface of a workpiece to be detected, and an ultrasonic transverse wave receiving probe is respectively fixed at a first position which is m times of a span and a second position which is n times of a span in a coupling surface and is away from the ultrasonic transverse wave transmitting probe; the ultrasonic transverse wave receiving probe receives m times of span echo of the first position and n times of span echo of the second position respectively, and records a fifth amplitude of the m times of span echo and a sixth amplitude of the n times of span echo through an ultrasonic detector; calculating a third attenuation coefficient of the workpiece to be measured according to the fifth amplitude and the sixth amplitude; and calculating a diffusion attenuation coefficient according to the third attenuation coefficient, the absorption attenuation coefficient and the scattering attenuation coefficient of the workpiece to be measured.
According to the invention, ultrasonic transverse waves with the same frequency act on a workpiece to be measured, echoes are formed on a coupling surface and a reflecting surface of the workpiece to be measured, echoes at different preset multiple spans are selected, the total attenuation coefficient of the workpiece to be measured can be obtained through the amplitude of the echoes, and then the obtained absorption attenuation coefficient and scattering attenuation coefficient are subtracted, so that the diffusion attenuation coefficient of the workpiece to be measured can be obtained. For workpieces to be measured with different shapes and sizes, the absorption attenuation and the scattering attenuation are irrelevant to the shapes and the sizes of the workpieces, but the diffusion attenuation can be influenced, so that the diffusion attenuation of the actual workpieces to be measured is measured, the diffusion attenuation coefficients of the workpieces to be measured with different shapes and sizes can be obtained, and the accuracy of the attenuation coefficient measurement is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic structural diagram of a device for measuring attenuation coefficient of ultrasonic transverse wave according to an embodiment of the present invention;
FIG. 2 is a schematic flow chart of an operation method of a measuring device for attenuation coefficient of ultrasonic transverse wave according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a semi-cylindrical test block structure of a measuring device for an ultrasonic transverse wave attenuation coefficient according to an embodiment of the present invention;
fig. 4 is a schematic diagram of a structure of a workpiece to be measured of a device for measuring an attenuation coefficient of an ultrasonic transverse wave according to an embodiment of the present invention;
fig. 5 is a schematic diagram of an isosceles trapezoid test block structure of a measurement device for an ultrasonic transverse wave attenuation coefficient according to an embodiment of the present invention.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Example 1
The embodiment of the invention provides a measuring device for an ultrasonic transverse wave attenuation coefficient, as shown in fig. 1, the system comprises: an ultrasonic detector, an ultrasonic transverse wave probe and a preset number of test blocks;
the ultrasonic detector is used for exciting the ultrasonic transverse wave transmitting probe to generate ultrasonic transverse waves with preset frequency, recording echo amplitude formed by the ultrasonic transverse waves received by the ultrasonic transverse wave receiving probe on the reflecting surfaces of the test block and the workpiece to be tested, and sequentially calculating the absorption attenuation coefficient, the scattering attenuation coefficient and the diffusion attenuation coefficient of the workpiece to be tested according to the amplitude;
specifically, in the embodiment of the invention, the ultrasonic detector has the function of accurately measuring the amplitude of each echo, and has the function of gain compensation. The ultrasonic detector generates ultrasonic transverse waves by exciting an ultrasonic transverse wave transmitting probe fixed on a coupling surface of a test block or a workpiece to be tested and transmits the ultrasonic transverse waves. The emitted ultrasonic transverse wave forms echo between the coupling surface and the reflecting surface of the test block or the workpiece to be tested through multiple reflection and is received by an ultrasonic transverse wave receiving probe, an ultrasonic detector obtains the amplitude of echo at the preset times or the span of the preset times through the ultrasonic transverse wave receiving probe, and the absorption attenuation coefficient, the scattering attenuation coefficient and the diffusion attenuation coefficient of the workpiece to be tested are calculated in sequence according to the amplitude.
The ultrasonic transverse wave probe comprises an ultrasonic transverse wave transmitting probe and an ultrasonic transverse wave receiving probe, and is used for being fixed on the coupling surface of the test block or the workpiece to be tested, the ultrasonic transverse wave transmitting probe is excited by the ultrasonic detector to generate ultrasonic transverse waves and transmit the ultrasonic transverse waves, and the ultrasonic transverse wave receiving probe receives echoes of the ultrasonic transverse waves and returns the echoes to the ultrasonic detector.
Specifically, in the embodiment of the invention, a magnetic attraction or compression device is arranged around the ultrasonic transverse wave probe to ensure that the coupling force of the ultrasonic transverse wave probe is consistent when measured on different test blocks or workpieces to be measured. In addition, an ultrasonic transverse wave probe with ultrasonic transmitting and receiving functions is fixed on the coupling surface of the test block according to the ultrasonic transverse wave propagation characteristics; and respectively fixing the ultrasonic transverse wave transmitting probe and the ultrasonic transverse wave receiving probe at different positions on the coupling surface of the workpiece to be tested, wherein the different positions are separated by a preset multiple span, and the preset multiple corresponds to the preset times of echo measurement on the test block.
The test block is designed according to the material property of the workpiece to be tested and the attenuation characteristic of the ultrasonic transverse wave, so that the ultrasonic transverse wave propagates in the ultrasonic test block and forms an echo on the reflecting surface, and the echo is used for calculating the absorption attenuation coefficient, the scattering attenuation coefficient and the diffusion attenuation coefficient of the workpiece to be tested; the test block comprises: the surface roughness, acoustic impedance and materials of the semi-cylindrical test blocks or the isosceles trapezoid test blocks are the same as those of the workpiece to be tested; the cylindrical surface radius of each semi-cylindrical test block is the same and is set to be larger than the preset multiple of the near field region of the ultrasonic transverse wave probe, the surface roughness is set to be smaller than the first preset proportion of the transverse wave wavelength, and the average grain sizes of the semi-cylindrical test blocks are different from each other and are set to be smaller than the second preset proportion of the transverse wave wavelength; the distances between the isosceles trapezoid surfaces of the isosceles trapezoid test blocks and the ultrasonic transverse wave incidence point are the same, the distances are set to be larger than the preset multiple of the near field region of the ultrasonic transverse wave probe, the surface roughness is set to be smaller than the first preset proportion of the transverse wave wavelength, the average grain sizes of the isosceles trapezoid test blocks are different from each other, and the average grain sizes of the isosceles trapezoid test blocks are set to be smaller than the second preset proportion of the transverse wave wavelength.
Specifically, in the embodiment of the invention, the test block is designed according to the material property of the workpiece to be tested and the attenuation characteristic of the ultrasonic transverse wave, wherein the ultrasonic transverse wave is within about 2 times of the near field region of the probe, and the attenuation of the ultrasonic transverse wave emitted by the probe mainly consists of absorption attenuation and scattering attenuation, so that the cylindrical surface radius of each semi-cylindrical test block or the distance between the isosceles trapezoid surface of the isosceles trapezoid test block and the incident point of the ultrasonic transverse wave is set to be more than 3 times of the near field region of the ultrasonic transverse wave probe, but the invention is not limited thereto. The surface roughness is set to be less than 1/3 of the transverse wave wavelength, and the average grain sizes are different from each other, but are all set to be less than 1/10 of the transverse wave wavelength, but not limited to this.
In the embodiment of the invention, not every workpiece to be detected just can find two mutually parallel coupling surfaces and reflecting surfaces, thereby forming the condition of multiple reflection. If the workpiece to be measured does not have a reflecting surface approximately parallel to the coupling surface, processing and manufacturing a block to be measured, the thickness, the material and the surface roughness of which are the same as those of the workpiece to be measured, of which the acoustic beam diffusion cross section area is the same as that of the ultrasonic transverse wave probe, and replacing the workpiece to be measured by the block to be measured to measure the attenuation coefficient.
According to the measuring device for the attenuation coefficient of the ultrasonic transverse wave, the semi-cylindrical test block and the isosceles trapezoid test block are designed in advance according to the material property of the workpiece to be measured and the attenuation characteristic of the ultrasonic transverse wave to be measured to serve as test blocks, the ultrasonic transverse wave probe fixed on each test block or the coupling surface of the workpiece to be measured is excited by the ultrasonic detector to generate ultrasonic transverse waves with preset frequency, the ultrasonic transverse waves are emitted to the corresponding reflecting surface, the ultrasonic transverse waves form echoes between the coupling surface and the reflecting surface, the reflected echoes of preset times are received through the ultrasonic transverse wave probe, the amplitude of each echo is recorded by the ultrasonic detector, and the absorption attenuation coefficient, the scattering attenuation coefficient and the diffusion attenuation coefficient of the ultrasonic transverse wave of the workpiece to be measured are calculated according to the amplitude. According to the invention, the influence of diffusion attenuation in attenuation coefficient measurement is eliminated through the pre-designed test block, the absorption attenuation coefficient, the scattering attenuation coefficient and the diffusion attenuation coefficient of the workpiece to be measured are sequentially calculated, the diffusion attenuation coefficient matched with the shape and the size of the workpiece to be measured is obtained, and the accuracy of ultrasonic transverse wave attenuation coefficient measurement is improved.
Example 2
The embodiment of the invention provides a working method of an ultrasonic transverse wave attenuation coefficient measuring device, as shown in fig. 2, the method is based on the device provided in the embodiment 1 to measure the attenuation coefficient, a test block is exemplified by a semi-cylindrical test block, and the method comprises the following steps:
Step S1: determining a coupling surface and a reflecting surface of a test block, selecting a rectangular surface of a semi-cylindrical test block as the coupling surface, and selecting a semi-cylindrical curved surface as the reflecting surface, or selecting the upper surface of an isosceles trapezoid test block as the coupling surface, wherein two isosceles trapezoid surfaces are the reflecting surfaces;
specifically, in the embodiment of the invention, the semi-cylindrical test block is designed in advance according to the material property of the workpiece to be tested and the attenuation characteristic of the ultrasonic transverse wave, and the semi-cylindrical test block is designed according to the frequency, the preset refraction angle and the wafer size of the ultrasonic transverse wave, so that the emitted transverse wave can be reflected back and forth on the semi-cylindrical surface after the ultrasonic transverse wave probe is coupled on the rectangular surface of the semi-cylindrical test block. Therefore, the fixed position of the ultrasonic transverse wave probe is determined by determining the coupling surface and the reflecting surface of the semi-cylindrical test block.
Step S2: and respectively fixing ultrasonic transverse wave probes with preset frequency on the coupling surfaces of a preset number of test blocks, and exciting the ultrasonic transverse wave probes to emit ultrasonic transverse waves to the reflecting surfaces corresponding to the test blocks by adopting an ultrasonic detector.
In particular, inIn the embodiment of the invention, the absorption attenuation constant and the scattering attenuation constant are calculated according to the echo amplitude formed in the test block, the absorption attenuation constant and the scattering attenuation constant comprise two unknown quantities, in the ultrasonic transverse wave attenuation coefficient measurement process, at least one group of binary once equation sets are generated to ensure that the absorption attenuation constant and the scattering attenuation constant can be calculated, so that the number of the semi-cylindrical test blocks is set to be 2, but not limited to the number, the number can be other numbers in practical application, and at least two groups can be set to perform subsequent attenuation constant calculation. The average grain size of the two semi-cylindrical test blocks is d 1 And d 2 The radius of the cylindrical surface is R. In the embodiment of the invention, as shown in FIG. 3, an ultrasonic transverse wave probe with the frequency f is fixed at the average grain size d 1 And the center position of the coupling surface of the semi-cylindrical test block 1 with the radius of the cylindrical surface R is used for enabling the incidence point of the probe to coincide with the center of the upper surface, an ultrasonic transverse wave probe is excited by an ultrasonic detector to generate and emit ultrasonic transverse waves, and the ultrasonic transverse waves pass through the axis of the semi-cylindrical test block and are emitted along the radial direction of the cross section of the semi-cylindrical test block.
Step S3: and the ultrasonic transverse wave probe receives the echo of preset times reflected by the reflecting surface of each test block, records the wave amplitudes of different echoes through the ultrasonic detector, obtains an absorption attenuation constant and a scattering attenuation constant according to the wave amplitudes, and calculates the absorption attenuation coefficient and the scattering attenuation coefficient of the workpiece to be tested according to the absorption attenuation constant and the scattering attenuation constant.
Specifically, in the embodiment of the present invention, the ultrasonic transverse wave probe receives m echoes and n echoes formed on the reflecting surface of the semi-cylindrical test block 1, and records the first amplitude a of the m echoes of the ultrasonic transverse wave on the semi-cylindrical curved surface through the ultrasonic detector m And a second amplitude A of n echoes n (n > m). Calculating a first attenuation coefficient alpha of the semi-cylindrical test block 1 according to the relation between the attenuation coefficient and the echo amplitude 1 . Simultaneously constructing a first attenuation coefficient and an absorption attenuation constant C a Scattering attenuation constant C s Equation therebetween, wherein the attenuation coefficient is the absorption attenuation systemNumber, scattering attenuation coefficient, and the sum of the scattering attenuation coefficients. The semi-cylindrical test block has regular shape and large size, so the diffusion attenuation coefficient alpha d The attenuation formula is satisfied as follows:
the attenuation coefficient of the semi-cylindrical test block 1 is therefore: alpha 1 ＝α a +α s1 + d The equation obtained is shown below:
wherein alpha is 1 Is the first attenuation coefficient alpha of ultrasonic transverse wave on the semi-cylindrical test block 1 a To absorb the attenuation coefficient alpha s1 The scattering attenuation coefficient of the semi-cylindrical test block 1, C a To absorb the decay constant, C s Is the scattering attenuation constant, f is the ultrasonic transverse wave frequency, d 1 The average grain size of the semi-cylindrical test block 1 is that R is the cylindrical surface radius of the semi-cylindrical test block 1, and delta is the single bottom wave reflection loss of the semi-cylindrical test block 1.
Repeating the step S2 and the step S3, and fixing the ultrasonic transverse wave probe with the frequency f at the average grain size d 2 And the center position of the coupling surface of the semi-cylindrical test block 2 with the cylindrical surface radius of R is excited by an ultrasonic detector to generate and emit ultrasonic transverse waves. The ultrasonic transverse wave is formed into an echo on the coupling surface and the reflecting surface of the semi-cylindrical test block 2. The ultrasonic transverse wave probe receives m echoes and n echoes formed on the reflecting surface of the semi-cylindrical test block 2, and records a third amplitude B of the ultrasonic transverse wave in the m echoes of the semi-cylindrical curved surface through the ultrasonic detector , And a fourth amplitude B of m echoes m (n > m). Calculating a second attenuation coefficient alpha of the semi-cylindrical test block 2 according to the relation between the attenuation coefficient and the echo amplitude 2 Simultaneously constructing a second attenuation coefficient and an absorption attenuation constant C a Scattering attenuation constant C s Equation between them is as followsThe following is shown:
wherein alpha is 2 Is the second attenuation coefficient alpha of ultrasonic transverse wave on the semi-cylindrical test block 2 a To absorb the attenuation coefficient alpha s2 The scattering attenuation coefficient of the semi-cylindrical test block 2, C a To absorb the decay constant, C s Is the scattering attenuation constant, f is the ultrasonic transverse wave frequency, d 2 The average grain size of the semi-cylindrical test block 2 is that R is the cylindrical surface radius of the semi-cylindrical test block 2, and delta is the single bottom wave reflection loss of the semi-cylindrical test block 2.
Combining equation (2) and equation (3) to obtain absorption attenuation constant C a Scattering attenuation constant C s ：
According to alpha a ＝ a f and alpha s ＝ s f 4 d 3 The absorption attenuation coefficient and the scattering attenuation coefficient of the workpiece to be measured are obtained through calculation:
wherein d c Is the average grain size of the workpiece to be measured.
Step S4: and respectively taking the two opposite parallel surfaces of the workpiece to be detected as a coupling surface and a reflecting surface of the workpiece to be detected, fixing an ultrasonic transverse wave transmitting probe with preset frequency on the coupling surface of the workpiece to be detected, and exciting the ultrasonic transverse wave transmitting probe to transmit ultrasonic transverse waves to the reflecting surface of the workpiece to be detected by adopting an ultrasonic detector.
Specifically, in the embodiment of the invention, two relatively parallel surfaces of the workpiece to be tested are selected as the coupling surface and the reflecting surface, and if the workpiece to be tested does not have the reflecting surface approximately parallel to the coupling surface, the test workpiece with the same shape rule as the material property of the workpiece to be tested is designed. The ultrasonic transverse wave transmitting probe with the frequency f is fixed at a certain position of a coupling surface of a workpiece to be tested or a test workpiece, the ultrasonic transverse wave receiving probe is fixed at a position with a position interval of a preset multiple span with the ultrasonic transverse wave transmitting probe, and the ultrasonic transverse wave receiving probe is fixed at a position with a position interval of a single multiple span with the ultrasonic transverse wave transmitting probe as shown in fig. 4 by way of example only and not limitation. An ultrasonic detector is adopted to excite an ultrasonic transverse wave transmitting probe to generate ultrasonic transverse waves, and the ultrasonic transverse waves are transmitted according to a preset refraction angle beta.
Step S5: and the ultrasonic transverse wave forms echo between the coupling surface and the reflecting surface of the workpiece to be detected, the ultrasonic transverse wave receiving probe is fixed at the span position with preset times, the echo at the span position with preset times reflected by the reflecting surface is received, the amplitude of different echoes is recorded by the ultrasonic detector, and the diffusion attenuation coefficient of the workpiece to be detected is calculated according to the amplitude, the absorption attenuation coefficient and the scattering attenuation coefficient.
Specifically, in the embodiment of the invention, the ultrasonic transverse wave forms echoes on the coupling surface and the reflecting surface of the workpiece to be measured. The ultrasonic transverse wave receiving probe is respectively fixed at a first position which is separated from the ultrasonic transverse wave transmitting probe by m times of span and a second position which is separated from the ultrasonic transverse wave transmitting probe by n times of span in the coupling surface. The ultrasonic transverse wave receiving probe receives the m-time span echo of the first position and the n-time span echo of the second position respectively, and records a fifth amplitude C of the ultrasonic transverse wave on the m-time span echo of the reflecting surface through the ultrasonic detector m And a sixth amplitude C of n times span echo n (n > m). Calculating a third attenuation coefficient alpha of the workpiece to be measured according to the echo amplitude 3 And according to the obtained absorption attenuation coefficient of the workpiece to be measuredThe diffusion attenuation coefficient is calculated by the following formula:
α dc ＝α 3 -α ac -α sc (9)
wherein H is the thickness of the workpiece to be measured, beta is the preset refraction angle delta of the ultrasonic transverse wave transmitting probe c Is the single bottom wave reflection loss of the workpiece to be measured.
According to the working method of the measuring device for the ultrasonic transverse wave attenuation coefficient, a semi-cylindrical test block and an isosceles trapezoid test block are designed in advance according to the material property of a workpiece to be measured and the attenuation characteristic of ultrasonic transverse waves to be measured to serve as test blocks, an ultrasonic transverse wave transmitting probe fixed on each test block or a coupling surface of the workpiece to be measured is excited by an ultrasonic detector to generate ultrasonic transverse waves with preset frequency, the ultrasonic transverse waves are transmitted to a corresponding reflecting surface, the ultrasonic transverse waves form echoes between the coupling surface and the reflecting surface, the reflected echoes of preset times are received through an ultrasonic transverse wave receiving probe, the amplitude of each echo is recorded by the ultrasonic detector, the absorption attenuation constant and the scattering attenuation constant of the workpiece to be measured to the ultrasonic transverse waves are obtained according to the echo amplitude of the test blocks, the absorption attenuation coefficient and the scattering attenuation coefficient of the workpiece to be measured are calculated, and the diffusion attenuation coefficient of the ultrasonic transverse waves is calculated according to the absorption attenuation coefficient, the scattering attenuation coefficient and the echo amplitude of the workpiece to be measured. According to the invention, the influence of diffusion attenuation in attenuation coefficient measurement is eliminated through the pre-designed test block, the absorption attenuation coefficient, the scattering attenuation coefficient and the diffusion attenuation coefficient of the workpiece to be measured are sequentially calculated, the diffusion attenuation coefficient matched with the shape and the size of the workpiece to be measured is obtained, and the accuracy of ultrasonic transverse wave attenuation coefficient measurement is improved.
Example 3
The embodiment of the invention provides a working method of an ultrasonic transverse wave attenuation coefficient measuring device, which is based on the device provided by the embodiment 1 to measure the attenuation coefficient, wherein a test block takes an isosceles trapezoid test block as an example, and the method comprises the following steps:
step S1: determining a coupling surface and a reflecting surface of a test block, selecting a rectangular surface of a semi-cylindrical test block as the coupling surface, and selecting a semi-cylindrical curved surface as the reflecting surface, or selecting the upper surface of an isosceles trapezoid test block as the coupling surface, wherein two isosceles trapezoid surfaces are the reflecting surfaces;
specifically, in the embodiment of the invention, an isosceles trapezoid test block is designed in advance according to the material property of a workpiece to be tested and the attenuation characteristic of an ultrasonic transverse wave, and the isosceles trapezoid test block is designed according to the frequency, the preset refraction angle and the wafer size of the ultrasonic transverse wave, so that the emitted transverse wave can be reflected back and forth on two waist surfaces of the trapezoid test block after the ultrasonic transverse wave probe is coupled on the upper surface of the isosceles trapezoid test block. Therefore, the fixed position of the ultrasonic transverse wave probe is determined by determining the coupling surface and the reflecting surface of the isosceles trapezoid test block.
Step S2: and respectively fixing ultrasonic transverse wave probes with preset frequency on the coupling surfaces of a preset number of test blocks, and exciting the ultrasonic transverse wave probes to emit ultrasonic transverse waves to the reflecting surfaces corresponding to the test blocks by adopting an ultrasonic detector.
Specifically, in the embodiment of the present invention, the number of isosceles trapezoid test blocks is set to 2, but not limited to this. The average grain size of the two isosceles trapezoid test blocks is d respectively 1 And d 2 The distances from the isosceles trapezoid surface to the ultrasonic incident point are all h. In an embodiment of the present invention, as shown in FIG. 5, an ultrasonic transverse wave probe with frequency f is fixed at an average grain size d 1 And the ultrasonic transverse wave probe is excited by the ultrasonic detector to generate and transmit ultrasonic transverse waves at the center of the coupling surface of the isosceles trapezoid test block 1 with the distance h from the ultrasonic incidence point, and the ultrasonic transverse waves are transmitted to the two isosceles trapezoid surfaces in parallel with the normal direction of the trapezoid surface of the isosceles trapezoid test block.
Step S3: and the ultrasonic transverse wave probe receives the echo of preset times reflected by the reflecting surface of each test block, records the wave amplitudes of different echoes through the ultrasonic detector, obtains an absorption attenuation constant and a scattering attenuation constant according to the wave amplitudes, and calculates the absorption attenuation coefficient and the scattering attenuation coefficient of the workpiece to be tested according to the absorption attenuation constant and the scattering attenuation constant.
Specifically, in the embodiment of the present invention, the ultrasonic transverse wave probe receives m echoes and n echoes formed on the reflecting surface of the isosceles trapezoid test block 1, and records a first amplitude a of the m echoes of the ultrasonic transverse wave on the reflecting surface by the ultrasonic detector m And a second amplitude A of n echoes n (n > m). According to the relation between the attenuation coefficient and the echo amplitude, calculating a first attenuation coefficient alpha of the isosceles trapezoid test block 1 1 . Simultaneously constructing a first attenuation coefficient and an absorption attenuation constant C a Scattering attenuation constant C s The first equation is that the attenuation coefficient is the sum of the absorption attenuation coefficient, the scattering attenuation coefficient and the diffusion attenuation coefficient. The isosceles trapezoid test block has regular shape and relatively large size, so that it has diffusion attenuation coefficient alpha d The attenuation formula is satisfied as follows:
the attenuation coefficient of the isosceles trapezoid block 1 is therefore: alpha 1 ＝α a +α s1 +α d The equation obtained is shown below:
wherein alpha is 1 Is the first attenuation coefficient alpha of ultrasonic transverse wave on the isosceles trapezoid test block 1 a To absorb the attenuation coefficient alpha s1 Is the scattering attenuation coefficient, C, of the isosceles trapezoid test block 1 a To absorb the decay constant, C s Is the scattering attenuation constant, f is the ultrasonic transverse wave frequency, d 1 For the average grain size of the isosceles trapezoid test block 1, h is the distance from the isosceles trapezoid surface of the isosceles trapezoid test block 1 to the ultrasonic incident point, and delta is the single bottom wave reflection loss of the isosceles trapezoid test block 1.
Repeating the step S2 and the step S3, and mixing the frequenciesThe ultrasonic transverse wave probe with the rate f is fixed at the average grain size d 2 And the center position of the coupling surface of the isosceles trapezoid test block 2 with the distance h from the ultrasonic incidence point of the isosceles trapezoid surface is excited by an ultrasonic detector to generate and transmit ultrasonic transverse waves. The ultrasonic transverse wave forms an echo on the coupling surface and the reflecting surface of the isosceles trapezoid test block 2. The ultrasonic transverse wave probe receives m echoes and n echoes formed on the reflecting surface of the isosceles trapezoid test block 2, and records a third amplitude B of the m echoes of the ultrasonic transverse wave on the reflecting surface through the ultrasonic detector m And a fourth amplitude B of n echoes n (n > m). Calculating a second attenuation coefficient alpha of the isosceles trapezoid test block 2 according to the relation between the attenuation coefficient and the echo amplitude 2 . At the same time construct a second attenuation coefficient and an absorption attenuation constant C a Scattering attenuation constant C s The equation between them is as follows:
wherein alpha is 2 Is the second attenuation coefficient alpha of the ultrasonic transverse wave on the isosceles trapezoid test block 2 a To absorb the attenuation coefficient alpha s2 Is the scattering attenuation coefficient, C, of the isosceles trapezoid test block 2 a To absorb the decay constant, C s Is the scattering attenuation constant, f is the ultrasonic transverse wave frequency, d 2 For the average grain size of the isosceles trapezoid test block 2, h is the distance from the isosceles trapezoid surface of the isosceles trapezoid test block 2 to the ultrasonic incident point, and delta is the single bottom wave reflection loss of the isosceles trapezoid test block 2.
Combining equation (11) and equation (12) above, the absorption attenuation constant and the scattering attenuation constant are obtained:
according to alpha a ＝C a f and alpha s ＝C s f 4 d 3 The absorption attenuation coefficient and the scattering attenuation coefficient of the workpiece to be measured are obtained through calculation:
wherein d c Is the average grain size of the workpiece to be measured.
Step S4: and respectively taking the two opposite parallel surfaces of the workpiece to be detected as a coupling surface and a reflecting surface of the workpiece to be detected, fixing an ultrasonic transverse wave transmitting probe with preset frequency on the coupling surface of the workpiece to be detected, and exciting the ultrasonic transverse wave transmitting probe to transmit ultrasonic transverse waves to the reflecting surface of the workpiece to be detected by adopting an ultrasonic detector.
Specifically, in the embodiment of the invention, an ultrasonic transverse wave transmitting probe with the frequency f is fixed at a certain position of a coupling surface of a workpiece to be measured, and an ultrasonic detector is adopted to excite the ultrasonic transverse wave transmitting probe to generate ultrasonic transverse waves, and the ultrasonic transverse waves are transmitted according to a preset refraction angle beta.
Step S5: and the ultrasonic transverse wave forms echo between the coupling surface and the reflecting surface of the workpiece to be detected, the ultrasonic transverse wave receiving probe is fixed at the span position with preset times, the echo at the span position with preset times reflected by the reflecting surface is received, the amplitude of different echoes is recorded by the ultrasonic detector, and the diffusion attenuation coefficient of the workpiece to be detected is calculated according to the amplitude, the absorption attenuation coefficient and the scattering attenuation coefficient.
Specifically, in the embodiment of the invention, the ultrasonic transverse wave forms echoes on the coupling surface and the reflecting surface of the workpiece to be measured. The ultrasonic transverse wave receiving probe is respectively fixed at a first position which is separated from the ultrasonic transverse wave transmitting probe by m times of span and a second position which is separated from the ultrasonic transverse wave transmitting probe by n times of span in the coupling surface. The ultrasonic transverse wave receiving probe receives the m times of span echo of the first position and the n times of span echo of the second position respectively and passes throughThe ultrasonic detector records a fifth amplitude C of an ultrasonic transverse wave echo of m times of the span of the reflecting surface m And a sixth amplitude C of n times span echo n (n > m). Calculating a third attenuation coefficient alpha of the workpiece to be measured according to the echo amplitude 3 And calculating a diffusion attenuation coefficient according to the obtained absorption attenuation coefficient and the obtained scattering attenuation coefficient of the workpiece to be measured, wherein the calculation formula is as follows:
α dc ＝α 3 -α ac -α sc (18)
wherein H is the thickness of the workpiece to be measured, beta is the preset refraction angle delta of the ultrasonic transverse wave transmitting probe c Is the single bottom wave reflection loss of the workpiece to be measured.
Although embodiments of the present invention have been described in connection with the accompanying drawings, various modifications and variations may be made by those skilled in the art without departing from the spirit and scope of the invention, and such modifications and variations are within the scope of the invention as defined by the appended claims.

Claims (10)

1. A device for measuring the attenuation coefficient of ultrasonic transverse waves, comprising: an ultrasonic detector, an ultrasonic transverse wave probe and a preset number of test blocks;
the ultrasonic detector is used for exciting the ultrasonic transverse wave transmitting probe to generate ultrasonic transverse waves with preset frequency, recording echo amplitude formed by the ultrasonic transverse waves received by the ultrasonic transverse wave receiving probe on the reflecting surfaces of the test block and the workpiece to be tested, and sequentially calculating the absorption attenuation coefficient, the scattering attenuation coefficient and the diffusion attenuation coefficient of the workpiece to be tested according to the amplitude;
the ultrasonic transverse wave probe comprises an ultrasonic transverse wave transmitting probe and an ultrasonic transverse wave receiving probe, and is used for being fixed on the coupling surface of the test block or the workpiece to be tested, the ultrasonic transverse wave transmitting probe is excited by the ultrasonic detector to generate ultrasonic transverse waves and transmit the ultrasonic transverse waves, and the ultrasonic transverse wave receiving probe receives echoes of the ultrasonic transverse waves and returns the echoes to the ultrasonic detector;
the test block is designed according to the material property of the workpiece to be tested and the attenuation characteristic of the ultrasonic transverse wave, so that the ultrasonic transverse wave propagates in the ultrasonic test block and forms an echo on the reflecting surface, and the echo is used for calculating the absorption attenuation coefficient, the scattering attenuation coefficient and the diffusion attenuation coefficient of the workpiece to be tested;
The test block comprises: the surface roughness, acoustic impedance and materials of the semi-cylindrical test blocks or the isosceles trapezoid test blocks are the same as those of the workpiece to be tested;
the cylindrical surface radius of each semi-cylindrical test block is the same and is set to be larger than the preset multiple of the near field region of the ultrasonic transverse wave probe, the surface roughness is set to be smaller than the first preset proportion of the transverse wave wavelength, and the average grain sizes of the semi-cylindrical test blocks are different from each other and are set to be smaller than the second preset proportion of the transverse wave wavelength;
the distances between the isosceles trapezoid surfaces of the isosceles trapezoid test blocks and the ultrasonic transverse wave incidence point are the same, the distances are set to be larger than the preset multiple of the near field region of the ultrasonic transverse wave probe, the surface roughness is set to be smaller than the first preset proportion of the transverse wave wavelength, the average grain sizes of the isosceles trapezoid test blocks are different from each other, and the average grain sizes of the isosceles trapezoid test blocks are set to be smaller than the second preset proportion of the transverse wave wavelength.
2. The ultrasonic transverse wave attenuation coefficient measuring device according to claim 1, wherein the ultrasonic transverse wave probe is provided with a magnetic attraction or compression device for ensuring that the coupling force of the ultrasonic transverse wave probe is consistent when measured on different test blocks or workpieces to be measured.
3. The device for measuring attenuation coefficient of ultrasonic transverse wave according to claim 2, wherein,
according to the propagation characteristics of the ultrasonic transverse waves, an ultrasonic transverse wave probe with ultrasonic transmitting and receiving functions is fixed on the coupling surface of the test block;
and respectively fixing an ultrasonic transverse wave transmitting probe and an ultrasonic transverse wave receiving probe at different positions on the coupling surface of the workpiece to be detected, wherein the positions are separated by a preset multiple span.
4. The ultrasonic transverse wave attenuation coefficient measuring device according to claim 1, wherein if the workpiece to be measured does not have a reflecting surface approximately parallel to the coupling surface, a block to be measured having the same acoustic beam diffusion cross-sectional area as the ultrasonic transverse wave probe is manufactured, and the thickness, the material and the surface roughness of the block to be measured are the same as those of the workpiece to be measured.
5. A method of operating a device for measuring the attenuation coefficient of ultrasonic transverse waves, characterized in that the device according to claims 1-4 is used for measuring the attenuation coefficient of ultrasonic transverse waves, the method comprising:
determining a coupling surface and a reflecting surface of a test block, selecting a rectangular surface of a semi-cylindrical test block as the coupling surface, and selecting a semi-cylindrical curved surface as the reflecting surface, or selecting the upper surface of an isosceles trapezoid test block as the coupling surface and two isosceles trapezoid surfaces as the reflecting surfaces;
Respectively fixing ultrasonic transverse wave probes with preset frequency on the coupling surfaces of a preset number of test blocks, and exciting the ultrasonic transverse wave probes to emit ultrasonic transverse waves to the reflecting surfaces corresponding to the test blocks by adopting an ultrasonic detector;
the ultrasonic transverse wave forms echoes between the coupling surface and the reflecting surface of each test block, the ultrasonic transverse wave probe receives echoes of preset times reflected by the reflecting surface of each test block, the ultrasonic detector records the amplitudes of different echoes, the absorption attenuation constant and the scattering attenuation constant are obtained according to the amplitudes, and the absorption attenuation coefficient and the scattering attenuation coefficient of a workpiece to be tested are calculated according to the absorption attenuation constant and the scattering attenuation constant;
selecting two relatively parallel surfaces of a workpiece to be detected as a coupling surface and a reflecting surface respectively, fixing an ultrasonic transverse wave transmitting probe with preset frequency on the coupling surface of the workpiece to be detected, and exciting the ultrasonic transverse wave transmitting probe to transmit ultrasonic transverse waves to the reflecting surface of the workpiece to be detected by adopting an ultrasonic detector;
and the ultrasonic transverse wave forms echo between the coupling surface and the reflecting surface of the workpiece to be detected, the ultrasonic transverse wave receiving probe is fixed at the span position with preset times, the echo at the span position with preset times reflected by the reflecting surface is received, the amplitude of different echoes is recorded by the ultrasonic detector, and the diffusion attenuation coefficient of the workpiece to be detected is calculated according to the amplitude, the absorption attenuation coefficient and the scattering attenuation coefficient.
6. The method of operating an ultrasonic transverse wave attenuation coefficient measuring apparatus according to claim 5, wherein,
on a test block, the incidence point and the receiving point of the ultrasonic transverse wave are the central positions of the coupling surface of the test block, and the ultrasonic transverse wave passes through the axis of the semi-cylindrical test block and is emitted along the radial direction of the cross section of the semi-cylindrical test block or is emitted in parallel with the normal direction of the trapezoid surface of the isosceles trapezoid test block;
on a workpiece to be measured, the incidence point of the ultrasonic transverse wave is the fixed position of the ultrasonic transverse wave transmitting probe, the receiving point is the fixed position of the ultrasonic transverse wave receiving probe, and the ultrasonic transverse wave is transmitted to the reflecting surface of the workpiece to be measured according to a preset refraction angle.
7. The method according to claim 5, wherein the diffusion attenuation coefficients of the semi-cylindrical test block and the isosceles trapezoid test block satisfy the attenuation formula.
8. The method for operating an ultrasonic transverse wave attenuation coefficient measuring device according to claim 5, wherein the number of the semi-cylindrical test blocks or the isosceles trapezoid test blocks is at least 2.
9. The method according to claim 8, wherein the process of receiving, by the ultrasonic transverse wave probe, echoes of the preset times reflected by the reflecting surface from each test block, recording the amplitudes of the different echoes by the ultrasonic detector, obtaining an absorption attenuation constant and a scattering attenuation constant according to the amplitudes, and calculating the absorption attenuation coefficient and the scattering attenuation coefficient of the workpiece to be measured according to the absorption attenuation constant and the scattering attenuation constant comprises:
The ultrasonic transverse wave forms an echo on the reflecting surface of the first test block and the reflecting surface of the second test block;
the ultrasonic transverse wave probe receives m echoes and n echoes formed on the reflecting surface of the first test block, and records a first amplitude of the m echoes and a second amplitude of the n echoes through the ultrasonic detector;
calculating a first attenuation coefficient of a first test block according to the first amplitude and the second amplitude, and constructing a first equation between the first attenuation coefficient and an absorption attenuation constant and a scattering attenuation constant;
the ultrasonic transverse wave probe receives m echoes and n echoes formed on the reflecting surface of the second test block, and records a third amplitude of the m echoes and a fourth amplitude of the n echoes through the ultrasonic detector;
calculating a second attenuation coefficient of a second test block according to the third amplitude and the fourth amplitude, and constructing a second equation between the second attenuation coefficient and the absorption attenuation constant and between the second attenuation coefficient and the scattering attenuation constant;
the absorption attenuation constant and the scattering attenuation constant are calculated by combining the first equation and the second equation;
and calculating the absorption attenuation coefficient and the scattering attenuation coefficient of the workpiece to be measured according to the absorption attenuation constant and the scattering attenuation constant.
10. The method according to claim 9, wherein the step of fixing the ultrasonic transverse wave receiving probe at a preset multiple span, receiving echoes at the preset multiple span reflected by the reflecting surface, recording the amplitudes of the different echoes by the ultrasonic detector, and calculating the diffusion attenuation coefficient of the workpiece to be measured according to the amplitudes, the absorption attenuation coefficient and the scattering attenuation coefficient comprises:
the ultrasonic transverse wave forms an echo on a reflecting surface of a workpiece to be detected, and an ultrasonic transverse wave receiving probe is respectively fixed at a first position which is m times of a span and a second position which is n times of a span in a coupling surface and is away from the ultrasonic transverse wave transmitting probe;
the ultrasonic transverse wave receiving probe receives m times of span echo of the first position and n times of span echo of the second position respectively, and records a fifth amplitude of the m times of span echo and a sixth amplitude of the n times of span echo through an ultrasonic detector;
calculating a third attenuation coefficient of the workpiece to be measured according to the fifth amplitude and the sixth amplitude;
and calculating a diffusion attenuation coefficient according to the third attenuation coefficient, the absorption attenuation coefficient and the scattering attenuation coefficient of the workpiece to be measured.
CN202310651010.0A 2023-06-02 2023-06-02 Ultrasonic transverse wave attenuation coefficient measuring device and working method Pending CN116626167A (en)

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