JP2659236B2 - Ultrasonic probe - Google Patents
Ultrasonic probeInfo
- Publication number
- JP2659236B2 JP2659236B2 JP1024796A JP2479689A JP2659236B2 JP 2659236 B2 JP2659236 B2 JP 2659236B2 JP 1024796 A JP1024796 A JP 1024796A JP 2479689 A JP2479689 A JP 2479689A JP 2659236 B2 JP2659236 B2 JP 2659236B2
- Authority
- JP
- Japan
- Prior art keywords
- coating film
- vibrator
- acoustic impedance
- test material
- ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Transducers For Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ この発明は例えば被検材の欠陥検出ならびに厚さ測定
などを行う超音波測定器に用いられる超音波探触子、特
に被検材表面に被着された塗装膜を介しての超音波の送
波ならびに受波に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an ultrasonic probe used for an ultrasonic measuring device for detecting a defect of a test material and measuring a thickness of the test material. The present invention relates to the transmission and reception of ultrasonic waves through a coated coating film.
［従来の技術］ 第４図は従来の超音波探触子の一例を示す断面図であ
り、 図において、１は超音波の送波ならびに受波を行う振
動子、４は振動子１からその背面方向へ送波される超音
波を減衰させるバッキング、５はケース、６はコネク
タ、７は塗装膜付被検材、８は欠陥検出ならびに厚さ測
定される被検材、９は被検材８表面に被着された塗装
膜、11は振動子１の前面に設けられ音響インピーダンス
の整合ならびにその機械的損耗を保護する前面層であ
る。[Prior Art] FIG. 4 is a cross-sectional view showing an example of a conventional ultrasonic probe. In FIG. 4, reference numeral 1 denotes a vibrator for transmitting and receiving ultrasonic waves, and 4 denotes a vibrator 1 from the vibrator 1. Backing to attenuate the ultrasonic wave transmitted to the back direction, 5 is a case, 6 is a connector, 7 is a test material with a coating film, 8 is a test material for detecting defects and measuring thickness, 9 is a test material A coating film 11 applied to the surface 8 is a front layer provided on the front surface of the vibrator 1 to match the acoustic impedance and protect its mechanical wear.
上記のような従来の超音波探触子では、振動子１の背
面には振動子１から背面方向に発生した超音波パルスを
吸収し減衰させるバッキング４が配設され、振動子１の
前面には超音波探触子が塗装膜付被検材７上を摺動する
際、その機械的損耗を保護するため耐摩耗性のすぐれた
アルミナや超硬合金などの硬質材料を用いた前面層11が
設けられている。振動子１表面の損傷を保護すると共に
両者の音響インピーダンスの整合を図る前面層11には、
振動子１の音響インピーダンスZ0と被検材８の音響イン
ピーダンスとの相乗平均に近似した音響インピーダンス
の材料が選定され超音波伝搬効率を向上させている。In the conventional ultrasonic probe as described above, a backing 4 that absorbs and attenuates an ultrasonic pulse generated from the vibrator 1 in the rear direction is disposed on the back of the vibrator 1, and is provided on the front of the vibrator 1. Is a front layer 11 made of a hard material such as alumina or cemented carbide having excellent wear resistance in order to protect the mechanical wear when the ultrasonic probe slides on the specimen 7 with the coating film. Is provided. The front layer 11, which protects the surface of the vibrator 1 from damage and matches the acoustic impedance of both,
A material having an acoustic impedance close to the geometric mean of the acoustic impedance Z 0 of the vibrator 1 and the acoustic impedance of the test material 8 is selected to improve the ultrasonic wave propagation efficiency.
超音波探触子が例えばプラスチック材の塗装膜９にて
被着された鋼材の被検材８よりなる塗装膜付被検材７を
摺動してその欠陥検出や厚さ測定を行うとき、塗装膜９
表面に凹凸があると硬質材料よりなる前面層11は密着で
きないので空隙が生じ、ここにカプラントなどが充填さ
れて均一な状態の境界面が得られず、更に前面層11と塗
装膜９との音響インピーダンスが大きく異なり、従って
振動子１と塗装膜付被検材７との音響インピーダンスの
整合が行えない。For example, when the ultrasonic probe slides on the test piece 7 with a coating film made of the steel test piece 8 coated with the plastic coating film 9 to detect the defect or measure the thickness, Paint film 9
If the surface has irregularities, the front layer 11 made of a hard material cannot be in close contact, so that a gap is generated, and a couplant or the like is filled therein, and a uniform boundary surface cannot be obtained. The acoustic impedance is greatly different, and therefore, it is not possible to match the acoustic impedance between the vibrator 1 and the test material 7 with a coating film.
上記超音波探触子から塗装膜付被検材７に超音波を送
波するとその境界面に起因して反射エコーが生ずる。When an ultrasonic wave is transmitted from the ultrasonic probe to the specimen 7 with a coating film, a reflected echo is generated due to the boundary surface.
第５図は従来の塗装膜付被検材からの反射エコーの一
例であり、 Ｔは送信信号、S,S1…Snは被検材８の表面エコーなら
びにその多重エコー、B1は被検材８底面からの１回反射
エコー、B2は被検材８底面からの２回反射エコー、B3は
被検材８底面からの３回反射エコーである。FIG. 5 is an example of a reflection echo from a conventional coating film with a material being tested, T is the transmitted signal, S, S 1 ... S n is the surface echo and multiple echo thereof Hikenzai 8, the B 1 to be One reflection echo from the bottom surface of the test material 8, B 2 is a double reflection echo from the bottom surface of the test material 8, and B 3 is a three reflection echo from the bottom surface of the test material 8.
振動子１前面に設けられた前面層11と被検材８との間
の塗装膜９内には多重エコーが発生して、被検材８から
の欠陥エコーや底面エコーに重畳される。この結果、多
重エコーの干渉による信号対雑音比が劣化して、欠陥検
出や厚さ測定における被検材８内欠陥エコーや底面エコ
ーが明瞭に識別できない。Multiple echoes are generated in the coating film 9 between the front surface layer 11 provided on the front surface of the vibrator 1 and the test material 8, and are superimposed on the defect echo and the bottom echo from the test material 8. As a result, the signal-to-noise ratio deteriorates due to the interference of the multiple echoes, and the defect echoes and bottom echoes in the test piece 8 in defect detection and thickness measurement cannot be clearly identified.
［発明の解決しようとする課題］ 上記のような従来の超音波探触子では、塗装膜９にて
被着された被検材８の塗装膜付被検材７に超音波探触子
を配置して超音波の送波ならびに受波を行い被検材８の
欠陥検出や厚さ測定を行うとき、 硬質材料の前面層11は凹凸をなす塗装膜９に密着でき
ないことがあり空隙が生じて、境界面の状態が不均一と
なり更に前面送11と塗装膜９との音響インピーダンスも
大きく異なり、音響インピーダンスの不整合により多重
エコーが発生すると共に超音波の伝搬効率が低下する。
多重エコーは鋼材などの被検材８からの内部欠陥エコー
や底面エコーに重畳して信号対雑音比を劣化させこれら
信号が明瞭に識別できない。[Problem to be Solved by the Invention] In the conventional ultrasonic probe as described above, the ultrasonic probe is attached to the test material 7 with the coating film of the test material 8 attached with the coating film 9. When the ultrasonic wave is transmitted and received and the defect detection and the thickness measurement of the test material 8 are performed, the front layer 11 of the hard material may not be able to adhere to the unevenly formed coating film 9, resulting in a gap. As a result, the state of the boundary surface becomes non-uniform, and the acoustic impedances of the front surface feed 11 and the coating film 9 also differ greatly. Due to the acoustic impedance mismatch, multiple echoes are generated and the ultrasonic wave propagation efficiency is reduced.
The multiple echoes are superimposed on internal defect echoes or bottom surface echoes from the test material 8 such as a steel material and deteriorate the signal-to-noise ratio, so that these signals cannot be clearly distinguished.
従ってこれら超音波探触子を用いた超音波深傷におけ
る被検材８微小欠陥の検出や、超音波厚さ測定における
被検材８厚さの高精度測定ができないという問題点があ
った。Therefore, there is a problem that it is not possible to detect minute defects of the test material 8 in the ultrasonic deep wound using these ultrasonic probes and to measure the thickness of the test material 8 in the ultrasonic thickness measurement with high accuracy.
この発明はかかる問題点を解決するためになされたも
ので、塗装膜付被検材７の欠陥検出や厚さ測定に際し、
塗装膜９との音響インピーダンスの整合が図れて被検材
８への超音波伝搬効率が向上でき、塗装膜９の境界面に
起因して発生する多重エコーが抑制され、被検材８内微
小欠陥エコーならびに被検材８厚さ測定用エコーの信号
対雑音比が改善できる超音波探触子を得ることを目的と
する。The present invention has been made in order to solve such a problem, and when detecting a defect or measuring a thickness of the test material 7 with a coating film,
Acoustic impedance matching with the coating film 9 is achieved, so that the efficiency of ultrasonic wave propagation to the test material 8 can be improved, multiple echoes generated due to the boundary surface of the coating film 9 are suppressed, and minute It is an object of the present invention to obtain an ultrasonic probe capable of improving the signal-to-noise ratio of a defect echo and an echo for measuring the thickness of a test object 8.
［課題を解決するための手段］ この発明に係る超音波探触子は、振動子前面に配設さ
れ振動子と塗装膜との相乗平均をなす音響インピーダン
スを呈しその厚さが振動子の固有周波数に基づく波長の
1/4をなす第１前面層と、第１前面層の前面に配設され
る塗装膜と等価な音響インピーダンスを呈し弾性部材よ
りなる第２前面層を設けたものである。[Means for Solving the Problems] An ultrasonic probe according to the present invention has an acoustic impedance which is arranged on the front surface of a vibrator and forms a geometric mean of a vibrator and a coating film, and whose thickness is unique to the vibrator. Of wavelength based on frequency
It comprises a first front layer constituting 1/4 and a second front layer made of an elastic member and having an acoustic impedance equivalent to that of a coating film disposed on the front surface of the first front layer.
［作 用］ この発明においては、振動子前面に振動子と塗装膜と
の音響インピーダンスの整合を図る第１前面層、ならび
に塗装膜と等価な音響インピーダンスの弾性部材よりな
る第２前面層が設けられているので、塗装膜付被検材表
面に例えば凹凸があっても、これに超音波探触子を当接
したとき、第２前面層は上記塗装膜に密着でき、その境
界面に空隙などの発生がなく両者の音響インピーダンス
が等しいので一体構成品と等価に見倣すことができる。[Operation] In the present invention, a first front layer for matching the acoustic impedance between the vibrator and the coating film and a second front layer made of an elastic member having an acoustic impedance equivalent to the coating film are provided on the front surface of the vibrator. Therefore, even if the surface of the test material with a coating film has irregularities, for example, when the ultrasonic probe is brought into contact with the surface, the second front layer can be in close contact with the coating film, and a gap is formed at the boundary surface. Since the two have the same acoustic impedance without generation of the like, it can be imitated as an integrated component.
従って第１前面層による振動子と塗装膜との音響イン
ピーダンスの整合により、上記境界面に起因し発生する
多重エコーが抑制できて被検材への超音波伝搬効率が向
上するので、被検材内欠陥エコーや底面エコーの信号対
雑音比が改善され、この超音波探触子を用いての振動子
を付勢するパルス信号に応じる超音波パルスによる被検
材の微小欠陥の検出ならびに厚さ測定における測定精度
の向上が再現性良くできる。Therefore, by matching the acoustic impedance between the transducer and the coating film by the first front layer, it is possible to suppress the multiple echoes generated due to the boundary surface and to improve the ultrasonic wave propagation efficiency to the test material. The signal-to-noise ratio of internal defect echoes and bottom echoes has been improved, and the ultrasonic probe uses this ultrasonic probe to detect minute defects and thickness of specimens using ultrasonic pulses in response to pulse signals that energize the transducer. Measurement accuracy in measurement can be improved with good reproducibility.
［実施例］ この発明の一実施例を添付図面を参照して詳細に説明
する。Embodiment An embodiment of the present invention will be described in detail with reference to the accompanying drawings.
第１図はこの発明の一実施例を示す断面図で、図にお
いて、1,4,5,6,７,8,9は上記従来探触子と同一であり、
２は振動子１の音響インピーダンスZ0と塗装膜９の音響
インピーダンスZ2の相乗平均をなす音響インピーダンス
を呈し振動子１前面に配設された第１前面層、３は塗装
膜９と等価な音響インピーダンスZ2を呈し且つ弾性部材
よりなる第２前面層を示している。FIG. 1 is a cross-sectional view showing one embodiment of the present invention, in which 1, 4, 5, 6, 7 , 8, 9 are the same as the above-mentioned conventional probe,
Reference numeral 2 denotes a first front layer disposed on the front surface of the vibrator 1, and 3 denotes a coating impedance which is equivalent to a geometric mean of the acoustic impedance Z 0 of the vibrator 1 and the acoustic impedance Z 2 of the coating film 9. 2 shows a second front layer having an acoustic impedance Z2 and made of an elastic member.
上記のように構成された超音波探触子においては、コ
ネクタ６を介してパルス信号により付勢される振動子１
は超音波パルスを発生する。振動子１の背面に発生した
超音波パルスは配設されているバッキング４により吸収
且つ減衰され、振動子１前面から放射される超音波パル
スへの干渉が抑制される。In the ultrasonic probe configured as described above, the vibrator 1 urged by the pulse signal through the connector 6
Generates an ultrasonic pulse. The ultrasonic pulse generated on the back surface of the vibrator 1 is absorbed and attenuated by the backing 4 provided, and interference with the ultrasonic pulse radiated from the front surface of the vibrator 1 is suppressed.
振動子１の前面には第１前面層２ならびに第２前面層
３が設けられ、振動子１により発生した超音波パルスは
これらを介して放射される。A first front layer 2 and a second front layer 3 are provided on the front surface of the vibrator 1, and the ultrasonic pulse generated by the vibrator 1 is radiated through these.
第１前面層２は振動子１の音響インピーダンスZ0と塗
装膜９の音響インピーダンスZ2の相乗平均をなす音響イ
ンピーダンスZ1 と等価の材料を用いて、その厚さは振動子１の固有周波
数に基づく波長の1/4とする。The first front layer 2 is the acoustic impedance Z 1 forming the geometric mean of the acoustic impedance Z 2 of the acoustic impedance Z 0 and paint film 9 of the vibrator 1 The thickness is set to / 4 of the wavelength based on the natural frequency of the vibrator 1.
第２前面層３は塗装膜９と等価な音響インピーダンス
Z2を呈し且つ塗装膜９表面の凹凸に密着できる弾性部
材、例えばふっ素ゴムを用いる。塗装膜９の音響インピ
ーダンスZ2はプラスチックの材質や混合するフィラーの
種類にもよるが約3.5×106Kg/m2secで、ふっ素ゴムの音
響インピーダンスは3.4〜3.7×106Kg/m2secであり、相
互に近似した値を呈し両者の音響インピーダンスは整合
が図れるので一体構成品と等価に見倣すことができる。The second front layer 3 has an acoustic impedance equivalent to the coating film 9
An elastic member exhibiting Z 2 and capable of closely adhering to irregularities on the surface of the coating film 9, for example, fluoro rubber is used. The acoustic impedance Z 2 of the coating film 9 is about 3.5 × 10 6 Kg / m 2 sec, depending on the material of the plastic and the type of filler mixed, and the acoustic impedance of the fluoro rubber is 3.4 to 3.7 × 10 6 Kg / m 2. sec, the values are close to each other, and the acoustic impedance of both can be matched, so that it can be imitated as equivalent to an integrated component.
超音波探触子と塗装膜付被検材７との間における超音
波の送波ならびに受波において、振動子１は第１前面層
２と前面層３を介して塗装膜８とは相互に音響インピー
ダンスの整合が図れる。In transmitting and receiving ultrasonic waves between the ultrasonic probe and the test material with a coating film 7 , the vibrator 1 mutually reciprocates with the coating film 8 via the first front layer 2 and the front layer 3. The acoustic impedance can be matched.
第２図は塗装膜付被検材からの反射エコーの一例で、
T,S,B1,B2は上記従来例と同一であり、振動子１から送
波される超音波パルスは音響インピーダンスの整合とふ
っ素ゴム内超音波伝搬における減衰作用により塗装膜８
の境界面に起因する多重エコーが抑制でき、振動子１の
発生する超音波パルスは最大効率にて被検材９へ伝達さ
れ、塗装膜付被検材７からは、信号対雑音比のすぐれた
比検材８内欠陥エコーや被検材８からの単一の表面エコ
ーならびに底面エコーが得られる。Fig. 2 shows an example of the reflection echo from the test material with a coating film.
T, S, B 1 , and B 2 are the same as those in the conventional example described above. The ultrasonic pulse transmitted from the vibrator 1 is applied to the coating film 8 by matching the acoustic impedance and attenuating the ultrasonic wave propagation in the fluoro rubber.
The multiple echoes caused by the boundary surface can be suppressed, the ultrasonic pulse generated by the vibrator 1 is transmitted to the test material 9 with the maximum efficiency, and the signal-to-noise ratio is excellent from the test material 7 with the coating film. Thus, a defect echo in the specific inspection material 8 and a single surface echo and a bottom surface echo from the inspection material 8 are obtained.
上記のとおり第１前面層２はその音響インピーダンス
Z1が振動子１と塗装膜９との相乗平均をなし、その厚さ
は振動子１の固有周波数に基づく波長の1/4で、更に塗
装膜９と等価な音響インピーダンスZ1を呈する弾性部材
の第２前面層３は、塗装膜９に凹凸があっても常時密着
でき一体構成品と等価的に見倣されるので、振動子１と
塗装膜９とは常に音響インピーダンスの整合ができる。
従って欠陥エコーや底面エコーの信号対雑音比が改善さ
れ明瞭に識別できるので、超音波探傷における被検材８
の微小欠陥検出ならびに超音波厚さ測定における被検材
９の高精度測定が再現性良く行える。As described above, the first front layer 2 has its acoustic impedance
Z 1 forms the geometric mean of the vibrator 1 and the coating film 9, and has a thickness that is の of the wavelength based on the natural frequency of the vibrator 1, and further exhibits an acoustic impedance Z 1 equivalent to the coating film 9. The second front layer 3 of the member can always be in close contact with the coating film 9 even if the coating film 9 has irregularities and can be regarded as equivalent to an integrated component, so that the acoustic impedance of the vibrator 1 and the coating film 9 can always be matched. .
Accordingly, the signal-to-noise ratio of the defect echo and the bottom echo can be improved and the discrimination can be made clearly.
In this case, high-precision measurement of the test material 9 can be performed with good reproducibility in the detection of minute defects and the ultrasonic thickness measurement.
塗装膜付被検材７への超音波探触子の垂直配置につい
て示したが斜角配置についても同等の作用が行える。Although the vertical arrangement of the ultrasonic probe on the test material 7 with the coating film has been described, the same operation can be performed with the oblique arrangement.
第３図はこの発明の他の実施例を示す断面図であり、
構成は上記実施例と同一であるが、第２前面層３はその
形状がくさび形をなし、塗装膜付被検材７に配置して塗
装膜９と密着させ更に音響インピーダンスを等価にする
と、被検材８へ加わる超音波は斜角入斜をなし板の探傷
や溶接部の検査が行える斜角探触子として利用できる。FIG. 3 is a sectional view showing another embodiment of the present invention.
Although the configuration is the same as that of the above-described embodiment, the second front layer 3 has a wedge shape, is disposed on the test material 7 with a coating film, is brought into close contact with the coating film 9, and furthermore has an equivalent acoustic impedance. The ultrasonic wave applied to the test material 8 can be used as a bevel probe that can make a bevel and perform flaw detection of a plate and inspection of a welded portion.
本発明による超音波探触子は振動子を複数用いて、超
音波の送波ならびに被検材８からの反射エコーの受波を
それぞれ分割配置された振動子により行っても多重エコ
ーが抑制され信号対雑音比が改善できる。The ultrasonic probe according to the present invention suppresses multiple echoes even when a plurality of transducers are used to transmit ultrasonic waves and receive reflected echoes from the test material 8 by the divided transducers. The signal to noise ratio can be improved.
［発明の効果］ この発明は以上説明したとおり、振動子の前面に音響
インピーダンスの整合を図る第１前面層と弾性部材より
なる第２前面層を設ける簡単な構造により、 第１前面層はその厚さが振動子の固有周波数に基づく
波長の1/4をなし且つ振動子と塗装膜との相乗平均の音
響インピーダンスを呈し、第２前面層は塗装膜と等価な
音響インピーダンスをなし常時これと密着できるので、
振動子と塗装膜と十分な音響整合が図られ、境界面に起
因する多重エコーが抑制できて、被検材からの欠陥エコ
ーや底面エコーの信号対雑音比が改善され明瞭に識別で
きる。[Effect of the Invention] As described above, the present invention has a simple structure in which a first front layer for matching acoustic impedance and a second front layer made of an elastic member are provided on the front surface of a vibrator. The thickness forms a quarter of the wavelength based on the natural frequency of the vibrator, and exhibits a geometric mean acoustic impedance between the vibrator and the coating film, and the second front layer has an acoustic impedance equivalent to the coating film and always has the same impedance. Because you can adhere
Sufficient acoustic matching between the vibrator and the coating film is achieved, multiple echoes due to the boundary surface can be suppressed, and the signal-to-noise ratio of the defect echo or the bottom echo from the test material is improved and can be clearly identified.
従って超音波探傷における微小欠陥検出や超音波厚さ
測定における被検材の高精度測定が再現性良く行える効
果がある。Accordingly, there is an effect that high-precision measurement of a test material can be performed with good reproducibility in the detection of minute defects in ultrasonic flaw detection and the measurement of ultrasonic thickness.
第１図はこの発明の一実施例を示す断面図、 第２図は塗装膜付被検材の反射エコー、 第３図はこの発明の他の実施例を示す断面図、 第４図は従来の超音波探触子の一例を示す断面図、 第５図は従来の塗装膜付被検材の反射エコーである。 図において、１は振動子、２は第１前面層、３は第２前
面層、４はバッキング、５はケース、６はコネクタ、７
は塗装膜付被検材、８は被検材、９は塗装膜である。 なお、各図中同一符号は同一または相当部分を示す。FIG. 1 is a sectional view showing one embodiment of the present invention, FIG. 2 is a reflection echo of a test material with a coating film, FIG. 3 is a sectional view showing another embodiment of the present invention, and FIG. FIG. 5 is a cross-sectional view showing an example of the ultrasonic probe of FIG. 5, and FIG. 5 is a reflection echo of the conventional test piece with a coating film. In the figure, 1 is a vibrator, 2 is a first front layer, 3 is a second front layer, 4 is a backing, 5 is a case, 6 is a connector, 7
Is a test material with a coating film, 8 is a test material, and 9 is a coating film. In the drawings, the same reference numerals indicate the same or corresponding parts.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭59−17338（ＪＰ，Ａ) 特開 昭63−13497（ＪＰ，Ａ) 特開 昭62−233149（ＪＰ，Ａ) 特開 昭61−53899（ＪＰ，Ａ) ──────────────────────────────────────────────────続 き Continuation of front page (56) References JP-A-59-17338 (JP, A) JP-A-63-13497 (JP, A) JP-A-62-233149 (JP, A) JP-A-61-233 53899 (JP, A)
Claims (2)
の前面層が設けられ、塗装膜が被着された塗装膜付被検
材に当接して超音波の送波ならびに受波を行う超音波探
触子において、 振動子前面に配設され上記振動子の音響インピーダンス
と上記塗装膜の音響インピーダンスとの相乗平均をなす
音響インピーダンスを呈しその厚さが上記振動子の固有
周波数に基づく波長の1/4をなす第１前面層と、上記第
１前面層の前面に配設され上記塗装膜と等価な音響イン
ピーダンスを呈し弾性部材よりなる第２前面層とを備え
たことを特徴とする超音波探触子。An ultrasonic wave is transmitted and received by contacting a test material with a coating film on which a backing is disposed on a back surface of a transducer and a plurality of front layers are provided on a front surface thereof. In the ultrasonic probe, a wavelength based on the natural frequency of the vibrator, the acoustic impedance being a geometric mean of the acoustic impedance of the vibrator and the acoustic impedance of the coating film, which is disposed on the front of the vibrator, is presented. And a second front layer disposed on the front surface of the first front layer and having an acoustic impedance equivalent to that of the coating film and made of an elastic member. Ultrasonic probe.
とする特許請求の範囲第１項記載の超音波探触子。2. The ultrasonic probe according to claim 1, wherein said second front layer is made of fluoro rubber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1024796A JP2659236B2 (en) | 1989-02-03 | 1989-02-03 | Ultrasonic probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1024796A JP2659236B2 (en) | 1989-02-03 | 1989-02-03 | Ultrasonic probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02205771A JPH02205771A (en) | 1990-08-15 |
| JP2659236B2 true JP2659236B2 (en) | 1997-09-30 |
Family
ID=12148153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1024796A Expired - Lifetime JP2659236B2 (en) | 1989-02-03 | 1989-02-03 | Ultrasonic probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2659236B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2555525B2 (en) * | 1993-03-31 | 1996-11-20 | 株式会社酒井鉄工所 | Sensor for acoustoelastic stress measurement by surface SH wave |
| WO2004065954A1 (en) * | 2003-01-17 | 2004-08-05 | The Tokyo Electric Power Company, Incorporated | Ultrasonic probe |
| US7194907B2 (en) | 2003-06-16 | 2007-03-27 | R/D Tech Instruments Inc. | Method for measuring part thickness having an external coating using impedance matching delay lines |
| DE102007042663A1 (en) * | 2007-09-10 | 2009-03-12 | Krohne Ag | ultrasound probe |
| JP2019015634A (en) * | 2017-07-07 | 2019-01-31 | 東京電力ホールディングス株式会社 | Double crystal probe, measurement detection system, and method for measurement and detection |
-
1989
- 1989-02-03 JP JP1024796A patent/JP2659236B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02205771A (en) | 1990-08-15 |
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