CN116609908A - Actuator and method for manufacturing actuator - Google Patents

Abstract

An actuator is provided with a magnetic drive mechanism for rotating a movable body holding an optical element relative to a fixed body, wherein when a drive coil of the magnetic drive mechanism is in a non-energized state, the movable body can be held at a fixed position in a rotation direction of the movable body relative to the fixed body, and the cost can be reduced. In the actuator (1), a magnetic attractive force for holding the movable body (3) at a fixed position in the movable body rotation direction when the driving coil (16) is in a non-energized state is generated between the magnetic plate (8) formed in a flat plate shape and the holding magnet (7). A magnetic plate arrangement hole (4 e) for arranging and fixing a magnetic plate is formed in the fixing body (4), and the surface of the magnetic plate arrangement hole on the side of the holding magnet is a contact surface (4 f) which is in contact with the magnetic plate by magnetic attraction force generated between the magnetic plate and the holding magnet. A concave portion (4 g) recessed toward the holding magnet side is formed on the contact surface.

Description

Actuator and method for manufacturing actuator

Technical Field

The present invention relates to an actuator for rotating an optical element. The invention also relates to a method for manufacturing such an actuator.

Background

Conventionally, an image shifting apparatus for vibrating a glass plate (optical glass) through which projection light passes has been known (for example, refer to patent document 1). The image shift device described in patent document 1 is mounted on a projector. The image offset device is provided with: a glass frame for fixing the glass plate; a base rotatably holding the glass frame; and a driving part for rotating the glass frame relative to the base. The driving unit is provided with: a driving magnet fixed on the glass frame; and a driving coil disposed opposite to the driving magnet and fixed to the base.

The image shifting device described in patent document 1 further includes a brake unit for holding the glass frame at a fixed position in the rotational direction of the glass frame relative to the base (that is, for holding the glass frame in a fixed posture relative to the base) when the driving coil is in a non-energized state. The braking section is provided with: one frame side braking magnet fixed to the glass frame; and two base-side braking magnets fixed to the base. The frame-side braking magnet is sandwiched between two base-side braking magnets. When the driving coil is in a non-energized state, the glass frame is held at a fixed position in the rotational direction of the glass frame relative to the base by a magnetic repulsive force generated between the frame-side braking magnet and the two base-side braking magnets.

In the image shifting device described in patent document 1, the position of the base-side brake magnet can be adjusted by a set screw, and the distance between the frame-side brake magnet and the base-side brake magnet can be adjusted. That is, in this image shifting apparatus, the magnetic repulsive force generated between the frame-side brake magnet and the base-side brake magnet can be adjusted by the set screw. Therefore, in this image shifting apparatus, the position of the glass frame with respect to the rotational direction of the base when the driving coil is in the non-energized state can be adjusted.

Prior art literature

Patent literature

Patent document 1: japanese patent application laid-open No. 2019-215466

Disclosure of Invention

The image shift device described in patent document 1 includes a brake unit, and therefore, in the image shift device, when the driving coil is in a non-energized state, the glass frame can be held at a fixed position in the rotational direction of the glass frame with respect to the base. However, in this image shifting apparatus, three brake magnets are required to hold the glass frame at a fixed position in the rotational direction of the glass frame with respect to the base when the driving coil is in the non-energized state, and therefore, the cost of the image shifting apparatus increases.

Accordingly, an object of the present invention is to provide an actuator including a movable body that holds an optical element, a fixed body that rotatably holds the movable body, and a magnetic drive mechanism that rotates the movable body with respect to the fixed body, wherein when a driving coil of the magnetic drive mechanism is in a non-energized state, even if the movable body can be held at a fixed position in a rotation direction of the movable body with respect to the fixed body, the cost can be reduced. The present invention also provides a method for manufacturing such an actuator.

In order to solve the above problems, an actuator according to the present invention includes: a movable body that holds the optical element; a fixed body which is formed in a frame shape in which a movable body is disposed on an inner peripheral side, and which holds the movable body rotatably; a magnetic driving mechanism that rotates the movable body in a direction in which the movable body is inclined with respect to the fixed body; and a holding magnet and a magnetic plate for holding the movable body at a fixed position with respect to the fixed body in a rotational direction of the movable body with respect to the fixed body, wherein the magnetic driving mechanism includes a driving magnet and a driving coil disposed opposite to the driving magnet, the holding magnet is fixed to either one of the movable body and the fixed body, the magnetic plate is formed into a flat plate shape and disposed on one side of the holding magnet in a thickness direction of the magnetic plate, either one of the movable body and the fixed body is formed of a nonmagnetic material, a magnetic plate disposition hole for disposing and fixing the magnetic plate is formed on the other one of the movable body and the fixed body, the holding magnet is formed of two magnetized portions polarized in a first direction orthogonal to the thickness direction of the magnetic plate, between the magnetic plate and the holding magnet, generating a magnetic attraction force for holding the movable body at a fixed position in a movable body rotation direction when the driving coil is in a non-energized state, and defining a position of the movable body in the movable body rotation direction when the driving coil is in a non-energized state by a position of the magnetic plate in a first direction, setting one side of the first direction as a first direction side, setting the other side of the first direction as a first direction side, opening the magnetic plate arrangement hole to at least one first direction side end of any other one of the movable body and the fixed body, a surface of the magnetic plate arrangement hole on a holding magnet side becomes a contact surface with the magnetic plate by the magnetic attraction force generated between the magnetic plate and the holding magnet, a concave portion recessed toward the holding magnet side is formed on the contact surface, the concave portion is formed in a straight line shape from the first direction side end of the magnetic plate arrangement hole toward the first direction other side, and is formed at least to one side end of the magnetic plate in the first direction.

The actuator of the present invention includes a holding magnet and a magnetic plate for holding the movable body at a fixed position with respect to the fixed body in a rotational direction of the movable body with respect to the fixed body, and generates a magnetic attractive force for holding the movable body at the fixed position in the rotational direction of the movable body when the driving coil is in a non-energized state between the magnetic plate formed in a flat plate shape and the holding magnet. Therefore, in the present invention, the movable body can be held at the fixed position in the rotation direction of the movable body when the driving coil is in the non-energized state by the magnetic plate formed in the flat plate shape and the holding magnet. Therefore, in the present invention, even when the driving coil is in the non-energized state, the movable body can be held at the fixed position in the rotation direction of the movable body, and the cost of the actuator can be reduced as compared with the image shifting device described in patent document 1 having three braking magnets.

In the present invention, since the position of the movable body in the movable body rotation direction when the driving coil is in the non-energized state is defined by the position of the magnetic plate in the first direction orthogonal to the thickness direction of the magnetic plate, the position of the movable body in the movable body rotation direction when the driving coil is in the non-energized state can be adjusted by adjusting the position of the magnetic plate in the first direction at the time of manufacturing the actuator.

In the present invention, since the magnetic plate placement hole in which the magnetic plate is placed and fixed is opened on at least one side in the first direction of the other of the movable body and the fixed body, when the actuator is manufactured, the position of the magnetic plate in the first direction can be adjusted by inserting the rod-shaped jig into the magnetic plate placement hole from one side in the first direction of the magnetic plate placement hole, and bringing the front end surface of the jig into contact with the end surface of the magnetic plate placed in the magnetic plate placement hole on one side in the first direction of the magnetic plate before fixation, thereby moving the magnetic plate to the other side in the first direction.

In the present invention, the surface of the holding magnet side of the magnetic plate arrangement hole is a contact surface that contacts the magnetic plate by a magnetic attraction force generated between the magnetic plate and the holding magnet, and a concave portion that is recessed toward the holding magnet side is formed in the contact surface. In the present invention, the recess is formed in a straight line from one end of the magnetic plate arrangement hole in the first direction to the other end of the magnetic plate in the first direction, and is formed at least to one end of the magnetic plate in the first direction.

Therefore, in the present invention, even if the thickness of the magnetic plate is extremely small, and even if chamfering is performed on the edge of the front end surface of the jig formed in a rod shape, the front end surface of the jig partially disposed in the concave portion can be reliably brought into contact with the end surface of the magnetic plate on the first direction side at the time of manufacturing the actuator. Therefore, in the present invention, even if the thickness of the magnetic plate is extremely thin, and even if chamfering is performed on the edge of the front end surface of the jig formed in a rod shape, the position of the magnetic plate in the first direction can be easily adjusted using the jig at the time of manufacturing the actuator.

In the present invention, it is preferable that the concave portions are formed at a plurality of positions with intervals in a second direction orthogonal to the thickness direction and the first direction of the magnetic plate. With this configuration, when the actuator is manufactured, the magnetic plate is easily moved to the other side in the first direction by using the plurality of bar-shaped jigs arranged at intervals in the second direction. Therefore, the position of the magnetic plate in the first direction can be adjusted more easily when the actuator is manufactured.

In the present invention, the magnetic plate arrangement hole is preferably a through hole penetrating the other of the movable body and the fixed body in the first direction, and the recess is preferably formed over the entire area of the magnetic plate arrangement hole in the first direction. With this configuration, even if the magnetic plate is excessively moved to the other side in the first direction when the front end surface of the jig is brought into contact with the end surface of the magnetic plate on the one side in the first direction and the magnetic plate is moved to the other side in the first direction, the jig can be inserted from the other side in the first direction of the magnetic plate placement hole to the magnetic plate placement hole, and the front end surface of the jig, a part of which is placed in the recess, can be reliably brought into contact with the end surface of the magnetic plate on the other side in the first direction and the magnetic plate can be returned to the one side in the first direction.

In the present invention, it is preferable that one side in the thickness direction of the magnetic plate is set to one side in the thickness direction, and the other side in the thickness direction of the magnetic plate is set to the other side in the thickness direction, and a surface on the other side in the thickness direction of the magnetic plate arrangement hole is set to a contact surface, and a second concave portion recessed toward one side in the thickness direction is formed on the surface on the one side in the thickness direction of the magnetic plate arrangement hole, and the second concave portion is formed at the same position as the concave portion in a second direction orthogonal to the thickness direction and the first direction of the magnetic plate, and is formed in the same range as the concave portion in the first direction. With this configuration, even if the width of the magnetic plate placement hole in the thickness direction of the magnetic plate is small, the jig can be inserted into the magnetic plate placement hole by the concave portion and the second concave portion, and the magnetic plate can be moved to the other side in the first direction.

In the present invention, for example, the actuator includes a flat second magnetic plate for holding the movable body at a fixed position with respect to the fixed body in the rotation direction of the movable body, the driving magnet and the holding magnet are fixed to the movable body, the driving coil, the magnetic plate, and the second magnetic plate are fixed to the fixed body, the driving magnet is composed of two magnetized portions polarized in the first direction, a magnetic attractive force for holding the movable body at the fixed position in the rotation direction of the movable body when the driving coil is in the non-energized state is generated between the driving magnet and the second magnetic plate, and a positioning portion for positioning the second magnetic plate in the first direction is formed on the fixed body. In this case, since the position of the second magnetic plate in the first direction is not adjusted, the manufacturing process of the actuator can be simplified.

The actuator of the present invention is manufactured, for example, by a method for manufacturing an actuator including the steps of: a magnetic plate position adjustment step of inserting a rod-shaped jig, a part of which is arranged in the recess, into the magnetic plate arrangement hole from one side in the first direction, and bringing a front end surface of the jig into contact with an end surface of the magnetic plate arranged in the magnetic plate arrangement hole on one side in the first direction before fixing, thereby moving the magnetic plate on the other side in the first direction, and adjusting the position of the magnetic plate in the first direction; and a magnetic plate fixing step of fixing the magnetic plate in the magnetic plate arrangement hole after the magnetic plate position adjustment step.

As described above, in the present invention, in the actuator including the movable body that holds the optical element, the fixed body that holds the movable body so as to be rotatable, and the magnetic drive mechanism that rotates the movable body with respect to the fixed body, even if the movable body can be held at the fixed position in the rotation direction of the movable body with respect to the fixed body when the drive coil of the magnetic drive mechanism is in the non-energized state, the cost of the actuator can be reduced.

Drawings

Fig. 1 is a perspective view of an actuator according to an embodiment of the present invention.

Fig. 2 is a top view of the actuator shown in fig. 1.

Fig. 3 is an exploded perspective view of the actuator shown in fig. 1.

Fig. 4 (a) is a sectional view of the E-E section of fig. 2, and fig. 4 (B) is a sectional view of the F-F section of fig. 2.

Fig. 5 is an enlarged view of a portion G of fig. 2.

Fig. 6 is a diagram for explaining a method of adjusting the vertical position of the magnetic plate shown in fig. 4 (B).

Fig. 7 is a diagram for explaining a structure of a magnetic plate arrangement hole according to another embodiment of the present invention.

Fig. 8 is a diagram for explaining a structure of a magnetic plate arrangement hole according to another embodiment of the present invention.

Detailed Description

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(integral Structure of actuator)

Fig. 1 is a perspective view of an actuator 1 according to an embodiment of the present invention. Fig. 2 is a top view of the actuator 1 shown in fig. 1. Fig. 3 is an exploded perspective view of the actuator 1 shown in fig. 1. Fig. 4 (a) is a sectional view of the E-E section of fig. 2, and fig. 4 (B) is a sectional view of the F-F section of fig. 2.

In the following description, as shown in fig. 1, three directions orthogonal to each other are respectively an X direction, a Y direction, and a Z direction, the X direction is a left-right direction, the Y direction is a front-rear direction, and the Z direction is an up-down direction. The X1 direction side of fig. 1 and the like, which are one side in the left-right direction, the X2 direction side of fig. 1 and the like, which are the opposite sides thereof, are the "left" side, the Y1 direction side of fig. 1 and the like, which are one side in the front-rear direction, is the "front" side, the Y2 direction side of fig. 1 and the like, which are the opposite sides thereof, is the "rear" side, the Z1 direction side of fig. 1 and the like, which are the one side in the up-down direction, is the "up" side, and the Z2 direction side of fig. 1 and the like, which are the opposite sides thereof, is the "down" side.

The actuator 1 of the present embodiment is a device for vibrating an optical glass 2 as an optical element, and is mounted and used in a projector. The optical glass 2 is a glass plate having light transmittance, and is formed in a square flat plate shape. The optical glass 2 constitutes a part of a projection optical system of the projector. In order to improve the image quality of an image projected by a projector, the actuator 1 vibrates the optical glass 2 at a predetermined frequency by a predetermined angle, and periodically changes the posture of the optical glass 2. For example, the actuator 1 vibrates the optical glass 2 at 60 Hz.

The actuator 1 is formed integrally in a flat rectangular parallelepiped shape with a small thickness in the up-down direction. The actuator 1 includes a movable body 3 for holding the optical glass 2 and a fixed body 4 for rotatably holding the movable body 3. The movable body 3 and the fixed body 4 are formed in a frame shape. The optical glass 2 is disposed on the inner peripheral side of the movable body 3. The movable body 3 is disposed on the inner peripheral side of the fixed body 4. The actuator 1 further includes: a magnetic drive mechanism 5 that rotates the movable body 3 in a direction in which the movable body 3 is inclined with respect to the fixed body 4 to vibrate the optical glass 2; a fulcrum portion 6 that serves as a fulcrum for rotation of the movable body 3 with respect to the fixed body 4; and a holding magnet 7 and magnetic plates 8, 9 for holding the movable body 3 at a fixed position with respect to the fixed body 4 in a rotation direction of the movable body 3 with respect to the fixed body 4, that is, in a rotation direction of the movable body. The magnetic plate 9 of the present embodiment is a second magnetic plate.

In the present embodiment, when no current is supplied to the driving coil 16 (i.e., when the driving coil 16 is in a non-energized state) that forms part of the magnetic driving mechanism 5, the movable body 3 is disposed at a predetermined reference position with respect to the fixed body 4 in the movable body rotation direction. When the movable body 3 is disposed at the reference position with respect to the fixed body 4 in the movable body rotation direction, the thickness direction of the optical glass 2 coincides with the up-down direction.

When the movable body 3 is disposed at the reference position with respect to the fixed body 4 in the rotation direction of the movable body, the thickness direction of the optical glass 2 coincides with the optical axis direction of the projection optical system of the projector in the actuator 1 mounted to the projector, and the optical axis of the projection optical system of the projector passes through the center of the optical glass 2. The rotation angle of the movable body 3 with respect to the fixed body 4 when the optical glass 2 vibrates is, for example, smaller than 0.5 °, and is very small. Therefore, the thickness direction of the optical glass 2 is substantially identical to the up-down direction regardless of whether the optical glass 2 vibrates or not.

When viewed from the outer peripheral side of the fixed body 4, the movable body 3 can rotate in a direction in which the movable body 3 is inclined with respect to the fixed body 4. The movable body 3 is rotatable relative to the fixed body 4 in the axial direction of rotation in a first orthogonal direction (V direction in fig. 2) orthogonal to the thickness direction of the optical glass 2. That is, the movable body 3 is rotatable relative to the fixed body 4 about an axis L1 (see fig. 2) having the first orthogonal direction as an axis direction. The first orthogonal direction is orthogonal to the up-down direction. The first orthogonal direction is a direction offset by 45 ° from the front-rear direction in the clockwise direction in fig. 2 when viewed from the upper side. The axis L1 passes through the center of the optical glass 2 when viewed from the thickness direction of the optical glass 2. The fulcrum portions 6 are disposed on both end sides in the first orthogonal direction of the movable body 3.

The movable body 3 is a glass holder for holding the optical glass 2. The movable body 3 is formed of a nonmagnetic material. The movable body 3 is formed of a resin material. As described above, the movable body 3 is formed in a frame shape. Specifically, the movable body 3 is formed in a square or rectangular frame shape. When the movable body 3 is disposed at the reference position with respect to the fixed body 4 in the movable body rotation direction, 2 sides of 4 sides constituting the outer peripheral surface of the movable body 3 having a square or rectangular outer shape are parallel to the left-right direction, and the remaining 2 sides are parallel to the front-rear direction.

The movable body 3 is formed with a magnet arrangement recess 3a in which a driving magnet 15, which will be described later, constituting a part of the magnetic driving mechanism 5 is arranged, and a magnet arrangement recess 3b in which a holding magnet 7 is arranged. The magnet arrangement recess 3a is recessed from the right end of the movable body 3 to the left. The magnet arrangement recess 3b is recessed from the left end of the movable body 3 to the right. The magnet arrangement recesses 3a, 3b are formed over the entire area of the movable body 3 in the thickness direction of the optical glass 2. As shown in fig. 3, the movable body 3 is formed with a protrusion 3c protruding toward both sides in the first orthogonal direction. The protruding portion 3c is formed in a columnar shape. The axial direction of the columnar protrusion 3c coincides with the first orthogonal direction.

As described above, the optical glass 2 is disposed on the inner peripheral side of the movable body 3. The optical glass 2 is fixed to the movable body 3. When the movable body 3 is disposed at the reference position with respect to the fixed body 4 in the movable body rotation direction, 2 sides of 4 sides of the outer peripheral surface of the optical glass 2 having a square outer shape are parallel to the left-right direction, and the remaining 2 sides are parallel to the front-rear direction.

The fixed body 4 is formed of a non-magnetic material. Further, the fixing body 4 is formed of a resin material. As described above, the fixing body 4 is formed in a frame shape. Specifically, the fixing body 4 is formed in a square or rectangular frame shape. 2 sides of the outer peripheral surface 4 of the fixing body 4 having a square or rectangular outer shape are parallel to the left-right direction, and the remaining 2 sides are parallel to the front-rear direction. The fixed body 4 is formed with a coil arrangement recess 4a in which a driving coil 16, which will be described later, constituting a part of the magnetic driving mechanism 5 is arranged, and a magnetic plate arrangement recess 4b in which the magnetic plate 9 is arranged.

The coil arrangement recess 4a and the magnetic plate arrangement recess 4b are formed in the right side portion of the fixed body 4. The coil arrangement recess 4a is recessed from the left end of the right portion of the fixed body 4 to the right side. The coil arrangement recess 4a is formed in the entire area of the fixing body 4 in the up-down direction. The magnetic plate arrangement recess 4b is formed on the right side of the coil arrangement recess 4 a. The magnetic plate arrangement recess 4b is recessed to the right side than the coil arrangement recess 4 a. The magnetic plate placement recess 4b is not formed in the entire vertical direction of the fixed body 4, and a magnetic plate placement portion 4c for placing the magnetic plate 9 is formed on the lower end side of the right side portion of the fixed body 4. The upper surface of the magnetic plate mounting portion 4c is a plane orthogonal to the vertical direction.

The fixed body 4 is formed with: a spring arrangement portion 4d in which a leaf spring 13 described later, which constitutes a part of the fulcrum portion 6, is arranged; and a magnetic plate arrangement hole 4e that arranges and fixes the magnetic plate 8. The spring arrangement portions 4d are formed at two corners on one diagonal of the frame-shaped fixed body 4 formed in a square shape. Specifically, the spring arrangement portion 4d is formed at the corner of the right rear end and the corner of the left front end of the fixed body 4. The magnetic plate arrangement hole 4e is formed in the left side portion of the fixed body 4. The magnetic plate arrangement hole 4e is a through hole penetrating the fixed body 4 in the vertical direction. The magnetic plate placement hole 4e is a rectangular square hole elongated in the front-rear direction. The specific structure of the magnetic plate arrangement hole 4e will be described later.

The fulcrum portion 6 includes: a sphere (ball) 11 formed in a spherical shape; a sphere holding member 12 for holding the sphere 11; and a leaf spring 13 having a concave curved contact surface 13a (see fig. 3) that contacts a part of the ball 11 at a predetermined contact pressure. The sphere 11 is formed of ceramic. The sphere holding member 12 is formed of a metal material. The sphere holding member 12 is formed in a bottomed cylindrical shape, and has a cylindrical portion formed in a cylindrical shape and a bottom portion connected to one end of the cylindrical portion. The inner diameter of the sphere holding member 12 is larger than the outer diameter of the sphere 11.

The sphere holding member 12 is fixed to the protruding portion 3c of the movable body 3. The protrusion 3c is gently pushed from the inner side in the first orthogonal direction into the inner peripheral side of the sphere holding member 12. The sphere holding member 12 is fixed to the protrusion 3c by an adhesive. The ball 11 is disposed on the inner peripheral side of the ball holding member 12. The bottom of the ball holding member 12 is disposed outside the front end surface of the protrusion 3c in the first orthogonal direction. A gap for disposing the ball 11 is formed between the front end surface of the protrusion 3c and the bottom of the ball holding member 12.

A through hole for disposing a part of the ball 11 disposed on the inner peripheral side of the ball holding member 12 outside the ball holding member 12 is formed in the bottom of the ball holding member 12. The inner diameter of the through hole is smaller than the outer diameter of the sphere 11. The ball 11 contacts the bottom surface of the recess formed in the front end surface of the protrusion 3c, and contacts the edge of the through hole. A part of the sphere 11 is disposed outside the sphere holding member 12 in the first orthogonal direction with respect to the bottom of the sphere holding member 12. The sphere 11 is held by the protrusion 3c and the sphere holding member 12 on the movable body 3.

The plate spring 13 is formed by bending a metal plate such as a stainless steel plate having elasticity into a predetermined shape. The leaf spring 13 is formed in a U shape. The leaf springs 13 are disposed in the spring disposition portion 4d such that the shape of the leaf springs 13 is U-shaped when viewed from the up-down direction. The leaf springs 13 disposed at the right rear end and the leaf springs 13 disposed at the left front end are disposed in point symmetry with respect to the center of the optical glass 2 when viewed in the thickness direction of the optical glass 2. The leaf spring 13 is fixed to the spring arrangement portion 4d in a positioned state. The contact surface 13a of the leaf spring 13 contacts a portion of the ball 11 disposed outside the ball holding member 12 from the outside in the first orthogonal direction with a predetermined contact pressure. The plate spring 13 biases the ball 11 toward the inner side in the first orthogonal direction.

The magnetic drive mechanism 5 includes a drive magnet 15 and a drive coil 16 disposed opposite to the drive magnet 15. The driving magnet 15 is fixed to the movable body 3. Specifically, the driving magnet 15 is disposed in the magnet disposition recess 3a and fixed to the right side of the movable body 3. The driving magnet 15 is formed in a rectangular parallelepiped shape elongated in the front-rear direction. The driving magnet 15 is composed of two magnetized portions 15a polarized in the vertical direction. More specifically, the driving magnet 15 is composed of two magnetized portions 15a polarized in the thickness direction of the optical glass 2.

The driving coil 16 is, for example, an air coil formed by winding a wire into an air-core shape. The driving coil 16 is mounted on a flexible printed board 17. The driving coil 16 is disposed in the coil disposition recess 4 a. The flexible printed board 17 is fixed to the fixed body 4. The driving coil 16 is fixed to the fixed body 4 via a flexible printed board 17. The driving magnet 15 and the driving coil 16 are opposed to each other in the left-right direction.

The magnetic drive mechanism 5 rotates the movable body 3 relative to the fixed body 4 in the axial direction in which the first orthogonal direction is the rotation. A hall sensor (not shown) for detecting the rotational position of the movable body 3 with respect to the fixed body 4 is mounted on the flexible printed circuit board 17. The hall sensor is disposed opposite to the driving magnet 15. Current is supplied to the driving coil 16 based on the detection result of the hall sensor.

The holding magnet 7 is fixed to the movable body 3. Specifically, the holding magnet 7 is disposed in the magnet disposition recess 3b and fixed to the left surface side of the movable body 3. The holding magnet 7 is formed in a rectangular parallelepiped shape elongated in the front-rear direction. The holding magnet 7 is constituted by two magnetized portions 7a polarized in the up-down direction, similarly to the driving magnet 15. More specifically, the holding magnet 7 is composed of two magnetized portions 7a polarized in the thickness direction of the optical glass 2.

As shown in fig. 2, the center of the holding magnet 7 in the front-rear direction is offset from the center of the driving magnet 15 in the front-rear direction. Specifically, the center of the holding magnet 7 in the front-rear direction is disposed at a position further to the rear than the center of the driving magnet 15 in the front-rear direction. In the present embodiment, the holding magnet 7 and the driving magnet 15 are arranged in point symmetry with respect to the center of the movable body 3 when viewed from the thickness direction of the optical glass 2. The holding magnet 7 and the driving magnet 15 are arranged in point symmetry with respect to the center of the optical glass 2 when viewed in the thickness direction of the optical glass 2.

The magnetic plate 8 is formed of a metal material having magnetism. The magnetic plate 8 is formed in a flat plate shape. Specifically, the magnetic plate 8 is formed in a slender rectangular flat plate shape. The magnetic plate 8 is thin. For example, the magnetic plate 8 has a thickness of about 0.1 to 0.2 (mm) and is extremely thin. The magnetic plates 8 are arranged such that the thickness direction of the magnetic plates 8 coincides with the left-right direction. That is, the left-right direction (X direction) of the present embodiment is the thickness direction of the magnetic plate 8. The magnetic plate 8 is disposed so that the longitudinal direction of the magnetic plate 8 formed in a rectangular flat plate shape coincides with the front-rear direction.

The magnetic plate 8 is disposed in the magnetic plate disposition hole 4e, and is fixed in the magnetic plate disposition hole 4 e. That is, the magnetic plate 8 is fixed to the fixed body 4. The magnetic plate 8 is fixed to the fixed body 4 by an adhesive. For example, the magnetic plate 8 is fixed to the fixed body 4 by a thermosetting adhesive. The magnetic plate 8 is disposed on the left side of the holding magnet 7. That is, the magnetic plate 8 is arranged on one side of the holding magnet 7 in the thickness direction of the magnetic plate 8. The left side surface of the holding magnet 7 is a plane substantially orthogonal to the left-right direction, and is magnetized to two poles in the up-down direction. When the driving coil 16 is in the non-energized state, the center of the left surface of the holding magnet 7 in the up-down direction and the center of the magnetic plate 8 in the up-down direction coincide in design. In the present embodiment, as described later, before the magnetic plate 8 is fixed to the fixed body 4, the position of the magnetic plate 8 in the up-down direction is adjusted.

The left side (X2 direction side) of the present embodiment is one side in the thickness direction of the magnetic plate 8, i.e., one side in the thickness direction, and the right side (X1 direction side) is the other side in the thickness direction of the magnetic plate 8, i.e., the other side in the thickness direction. The vertical direction (Z direction) of the present embodiment is a first direction orthogonal to the thickness direction of the magnetic plate 8, and the front-rear direction (Y direction) is a second direction orthogonal to the thickness direction and the first direction of the magnetic plate 8. The lower side (Z2 direction side) of the present embodiment is a first direction side which is a first direction side, and the upper side (Z1 direction side) is a first direction other side which is another first direction side.

The magnetic plate 9 is formed in a flat plate shape as in the magnetic plate 8. The magnetic plates 9 are arranged such that the thickness direction of the magnetic plates 9 coincides with the left-right direction. The magnetic plate 9 is disposed such that the longitudinal direction of the magnetic plate 9 formed in a rectangular flat plate shape coincides with the front-rear direction. The magnetic plate 9 is disposed in the magnetic plate disposition recess 4 b. As shown in fig. 4 (a), the magnetic plate 9 is placed on the magnetic plate placing portion 4c, and the lower end surface of the magnetic plate 9 is in contact with the upper surface of the magnetic plate placing portion 4c. That is, the magnetic plate 9 is positioned in the up-down direction.

The magnetic plate mounting portion 4c of the present embodiment serves as a positioning portion for positioning the magnetic plate 9 in the up-down direction as the first direction. That is, the magnetic plate mounting portion 4c as a positioning portion for positioning the magnetic plate 9 in the first direction is formed on the fixed body 4. The magnetic plate 9 is fixed to the flexible printed board 17, and is fixed to the fixed body 4 via the flexible printed board 17. The magnetic plate 9 is disposed on the right side of the driving magnet 15. The right side surface of the driving magnet 15 is a plane substantially orthogonal to the left-right direction, and is magnetized to two poles in the up-down direction. When the driving coil 16 is in the non-energized state, the center of the right side surface of the driving magnet 15 in the up-down direction coincides with the center of the magnetic plate 9 in the up-down direction in design.

In the present embodiment, a magnetic attractive force is generated between the magnetic plate 8 and the holding magnet 7 and between the magnetic plate 9 and the driving magnet 15, and this magnetic attractive force is used to hold the movable body 3 at a fixed position in the movable body rotation direction (that is, to hold the movable body 3 in a fixed posture with respect to the fixed body 4) when the driving coil 16 is in the non-energized state. Specifically, magnetic attractive forces for holding the movable body 3 at the reference position in the movable body rotation direction when the driving coil 16 is in the non-energized state are generated between the magnetic plate 8 and the holding magnet 7 and between the magnetic plate 9 and the driving magnet 15.

In the present embodiment, the position of the movable body 3 in the movable body rotation direction when the driving coil 16 is in the non-energized state can be adjusted by adjusting the position of the magnetic plate 8 in the up-down direction. That is, in the present embodiment, the position of the movable body 3 in the movable body rotation direction when the driving coil 16 is in the non-energized state is defined by the position of the magnetic plate 8 in the up-down direction. In the present embodiment, when the sizes of the magnetic plates 8 and 9 are changed, the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7 and the magnetic attraction force generated between the magnetic plate 9 and the driving magnet 15 are changed. In addition, by changing the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7 and the magnetic attraction force generated between the magnetic plate 9 and the driving magnet 15, the resonance frequency of the actuator 1 when the optical glass 2 is vibrated can be changed.

(Structure of hole for magnetic plate)

Fig. 5 is an enlarged view of a portion G of fig. 2.

As described above, the magnetic plate arrangement hole 4e is a through hole penetrating the fixed body 4 in the vertical direction. That is, the magnetic plate arrangement hole 4e is opened at the upper end of the fixed body 4 and the lower end of the fixed body 4. As described above, the magnetic plate placement hole 4e is a rectangular square hole elongated in the front-rear direction. The width of the magnetic plate arrangement hole 4e in the lateral direction is wider than the thickness of the magnetic plate 8, and the length of the magnetic plate arrangement hole 4e in the front-rear direction is longer than the length of the magnetic plate 8 in the front-rear direction (length in the longitudinal direction). The right surface of the magnetic plate arrangement hole 4e is a contact surface 4f that contacts the magnetic plate 8 by the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7. That is, the surface of the magnetic plate arrangement hole 4e on the holding magnet 7 side serves as the contact surface 4f. The contact surface 4f is a plane orthogonal to the left-right direction.

A concave portion 4g recessed toward the right side (i.e., toward the holding magnet 7 side) is formed in the contact surface 4f. The recess 4g is formed in a straight line from the lower end of the magnetic plate arrangement hole 4e toward the upper side. That is, the concave portion 4g is formed in a linear shape parallel to the vertical direction. The recess 4g of the present embodiment is formed in the entire region of the magnetic plate placement hole 4e in the vertical direction, from the lower end of the magnetic plate placement hole 4e to the upper end of the magnetic plate placement hole 4 e. The concave portions 4g are formed at a plurality of positions with intervals in the front-rear direction. In the present embodiment, the concave portion 4g is formed at both the front end portion and the rear end portion of the contact surface 4f. The side surface of the concave portion 4g is a concave curved surface having an arc shape when viewed from the up-down direction.

The left side surface 4h, which is the surface on the left side of the magnetic plate arrangement hole 4e, is a plane orthogonal to the left-right direction. A recess 4j as a second recess recessed toward the left is formed in the left side surface 4 h. The recess 4j is formed in a straight line from the lower end of the magnetic plate arrangement hole 4e to the upper end of the magnetic plate arrangement hole 4 e. That is, the concave portion 4j is formed in a linear shape parallel to the vertical direction. The recess 4j is formed at the same position as the recess 4g in the front-rear direction. That is, the concave portions 4j are formed at two positions. As described above, the recess 4j is formed from the lower end of the magnetic plate placement hole 4e to the upper end of the magnetic plate placement hole 4e, and is formed in the same range as the recess 4g in the vertical direction.

The side surface of the concave portion 4j is a concave curved surface having an arc shape when viewed from the up-down direction. The radius of curvature of the side surface of the concave portion 4j is equal to the radius of curvature of the side surface of the concave portion 4 g. The center of curvature of the side surface of the concave portion 4j coincides with the center of curvature of the side surface of the concave portion 4g when viewed from the up-down direction.

(actuator manufacturing method)

Fig. 6 is a diagram for explaining a method of adjusting the vertical position of the magnetic plate 8 shown in fig. 4 (B).

In the present embodiment, even if variations in the components constituting the actuator 1 or variations in the manufacture of the actuator 1 occur, the position of the magnetic plate 8 in the up-down direction with respect to the fixed body 4 is adjusted at the final stage of the manufacturing process of the actuator 1 so that the thickness direction of the optical glass 2 coincides with the up-down direction when the driving coil 16 is in the non-energized state. When adjusting the vertical position of the magnetic plate 8, the movable body 3 to which the optical glass 2, the holding magnet 7, and the driving magnet 15 are fixed and the fulcrum portion 6 are mounted on the fixed body 4, and the magnetic plate 9, the driving coil 16, and the flexible printed board 17 are mounted on the fixed body 4.

For the position adjustment in the vertical direction of the magnetic plate 8, a rod-shaped jig 20 is used. The jig 20 is formed in a cylindrical shape. The radius (half of the outer diameter) of the jig 20 is substantially equal to the radius of curvature of the side surfaces of the concave portions 4g, 4 j. In the present embodiment, two jigs 20 are used for adjusting the position of the magnetic plate 8 in the up-down direction. The two jigs 20 are arranged such that the axial direction of the jigs 20 coincides with the up-down direction. The two jigs 20 are arranged with a gap therebetween in the front-rear direction. The pitch in the front-rear direction of the two jigs 20 is equal to the pitch in the front-rear direction of the two concave portions 4 g. The two jigs 20 are connected to a lifting mechanism (not shown) for lifting and lowering the jigs 20. The jig 20 is inserted into the portion of the magnetic plate arrangement hole 4e where the concave portions 4g, 4j are formed. The edge of the front end surface of the jig 20 is chamfered.

In addition, when the position of the magnetic plate 8 in the up-down direction is adjusted, the magnetic plate 8 is disposed in the magnetic plate disposition hole 4 e. The magnetic plate 8 is in contact with the contact surface 4f by the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7. Even in a state where the magnetic plate 8 is not bonded and fixed to the magnetic plate arrangement hole 4e, the magnetic plate 8 is held at a fixed position in the up-down direction by the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7.

The magnetic plate 8 before the vertical position adjustment is disposed at a position lower than the vertical position of the magnetic plate 8 in the design. In this state, as shown in fig. 6 a, the jig 20, a part of which is disposed in the concave portions 4g and 4j, is inserted into the magnetic plate disposition hole 4e from the lower side (that is, the jig 20, the front end face of which faces upward, is inserted into the portion of the magnetic plate disposition hole 4e in which the concave portions 4g and 4j are formed from the lower side), and the front end face of the jig 20 is brought into contact with the lower end face of the magnetic plate 8, which is disposed in the magnetic plate disposition hole 4e before fixing, and the magnetic plate 8 is moved upward, so that the position of the magnetic plate 8 in the up-down direction is adjusted (magnetic plate position adjustment step).

In the magnetic plate position adjustment step, the magnetic plate 8 is gradually moved upward while the inclination of the optical glass 2 is checked by a laser displacement meter, for example. When the thickness direction of the optical glass 2 coincides with the up-down direction, the position adjustment of the magnetic plate 8 in the up-down direction is completed. After the position adjustment of the magnetic plate 8 in the up-down direction is completed, the magnetic plate 8 is fixed in the magnetic plate arrangement hole 4e (magnetic plate fixing step). That is, after the magnetic plate position adjustment step, the magnetic plate 8 is fixed to the magnetic plate placement hole 4 e. Specifically, the magnetic plate 8 is fixed to the magnetic plate arrangement hole 4e with an adhesive.

In the magnetic plate position adjustment step, when the magnetic plate 8 is excessively moved upward, as shown in fig. 6 (B), the jig 20, a part of which is disposed in the concave portions 4g and 4j, is inserted into the magnetic plate disposition hole 4e from above (that is, the jig 20, a front end of which faces downward, is inserted into the portion of the magnetic plate disposition hole 4e in which the concave portions 4g and 4j are formed), and the front end surface of the jig 20 is brought into contact with the upper end surface of the magnetic plate 8 before being fixed, which is disposed in the magnetic plate disposition hole 4e, to move the magnetic plate 8 downward, thereby adjusting the position of the magnetic plate 8 in the up-down direction. After the position adjustment of the magnetic plate 8 in the up-down direction is completed, the magnetic plate 8 is fixed in the magnetic plate arrangement hole 4 e.

(main effects of the present embodiment)

As described above, in the present embodiment, a magnetic attractive force is generated between the magnetic plate 8 and the holding magnet 7 and between the magnetic plate 9 and the driving magnet 15, and this magnetic attractive force is used to hold the movable body 3 at the reference position in the movable body rotation direction when the driving coil 16 is in the non-energized state. Therefore, in the present embodiment, the movable body 3 can be held at the reference position in the movable body rotation direction when the driving coil 16 is in the non-energized state by the thin flat plate-shaped two magnetic plates 8, 9, the one holding magnet 7, and the driving magnet 15 that forms a part of the magnetic driving mechanism 5. Therefore, in the present embodiment, even when the driving coil 16 is in the non-energized state, the movable body 3 can be held at the fixed position in the movable body rotation direction, and the cost of the actuator 1 can be reduced as compared with the image shift device described in patent document 1 having three braking magnets and driving magnets.

In the present embodiment, the position of the movable body 3 in the movable body rotation direction when the driving coil 16 is in the non-energized state is defined by the position of the magnetic plate 8 in the up-down direction. In the present embodiment, when manufacturing the actuator 1, the jig 20, a part of which is disposed in the concave portions 4g and 4j, is inserted into the magnetic plate disposition hole 4e from the lower side, and the front end surface of the jig 20 is brought into contact with the lower end surface of the magnetic plate 8 disposed in the magnetic plate disposition hole 4e before fixing, so that the magnetic plate 8 is moved upward, and the position of the magnetic plate 8 in the up-down direction is adjusted. Therefore, in the present embodiment, the position of the movable body 3 in the movable body rotation direction can be adjusted so that the thickness direction of the optical glass 2 coincides with the up-down direction when the driving coil 16 is in the non-energized state.

In the present embodiment, a concave portion 4g recessed toward the left is formed in the contact surface 4f that contacts the magnetic plate 8 by the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7, and the concave portion 4g is formed in a straight line from the lower end to the upper end of the magnetic plate arrangement hole 4 e. Therefore, in the present embodiment, even if the thickness of the magnetic plate 8 is extremely small, and even if chamfering is performed on the edge of the front end surface of the jig 20 formed in a rod shape, the front end surface of the jig 20 partially disposed in the recess 4g can be reliably brought into contact with the lower end surface of the magnetic plate 8. Therefore, in the present embodiment, even if the thickness of the magnetic plate 8 is extremely small, and even if chamfering is performed on the edge of the front end surface of the jig 20, the position of the magnetic plate 8 in the up-down direction can be easily adjusted using the jig 20.

In the present embodiment, the concave portions 4g are formed at two positions with a space therebetween in the front-rear direction. Therefore, in the present embodiment, the magnetic plate 8 is easily moved in the up-down direction by using the two jigs 20 arranged in a state of being spaced apart in the front-rear direction. Therefore, in the present embodiment, the position of the magnetic plate 8 in the up-down direction can be more easily adjusted.

In the present embodiment, the magnetic plate placement hole 4e is a through hole penetrating the fixing body 4 in the up-down direction, and the recess 4g is formed in the entire area of the magnetic plate placement hole 4e in the up-down direction. Therefore, in the present embodiment, as described above, even if the magnetic plate 8 is excessively moved upward in the magnetic plate position adjustment step, the jig 20 with the front end face facing downward can be inserted from the upper side into the portion of the magnetic plate arrangement hole 4e where the concave portions 4g, 4j are formed, and the front end face of the jig 20 can be reliably brought into contact with the upper end face of the magnetic plate 8 before being fixed, which is arranged in the magnetic plate arrangement hole 4e, to return the magnetic plate 8 to the lower side.

In the present embodiment, a recess 4j recessed toward the left is formed in the left side surface 4h of the magnetic plate placement hole 4e, and the recess 4j is formed at the same position as the recess 4g in the front-rear direction, and is formed over the entire area of the magnetic plate placement hole 4e in the up-down direction. Therefore, in the present embodiment, even if the width of the magnetic plate placement hole 4e in the lateral direction is narrow, the jig 20 can be inserted into the magnetic plate placement hole 4e by the recesses 4g and 4j, and the magnetic plate 8 can be moved in the vertical direction.

In the present embodiment, the magnetic plate 9 is placed on the magnetic plate placement portion 4c of the fixed body 4, and is positioned in the vertical direction, and the position adjustment in the vertical direction of the magnetic plate 9 is not performed. Therefore, in the present embodiment, the manufacturing process of the actuator 1 can be simplified as compared with the case of performing the position adjustment in the vertical direction of the magnetic plate 9.

(other embodiments)

The above-described embodiments are examples of preferred embodiments of the present invention, but the present invention is not limited thereto, and various modifications and changes can be made without changing the gist of the present invention.

In the above embodiment, the recess 4g is formed in the entire area of the magnetic plate arrangement hole 4e in the vertical direction, but the recess 4g may be formed at least in a range from the lower end of the magnetic plate arrangement hole 4e to the lower end of the magnetic plate 8 in the fixed state in the magnetic plate arrangement hole 4e and in a range from the upper end of the magnetic plate arrangement hole 4e to the upper end of the magnetic plate 8 in the fixed state in the magnetic plate arrangement hole 4 e.

In the above embodiment, the entirety of the magnetic plate placement hole 4e penetrates the fixed body 4 in the up-down direction, but only a part of the magnetic plate placement hole 4e may penetrate the fixed body 4 in the up-down direction. For example, as shown in fig. 7, only the portion of the magnetic plate arrangement hole 4e where the concave portions 4g and 4j are formed may penetrate the fixed body 4 in the vertical direction. In this case, for example, the upper end portion of the magnetic plate placement hole 4e penetrating in the vertical direction is a circular hole, and the jig 20 is inserted from the upper side of the fixed body 4 into the portion of the magnetic plate placement hole 4e penetrating in the vertical direction, so that the magnetic plate 8 can be moved downward. Fig. 7 (B) is a sectional view of the H-H section of fig. 7 (a), and fig. 7 (C) is a sectional view of the J-J section of fig. 7 (a).

In the case where only a part of the magnetic plate placement hole 4e penetrates the fixed body 4 in the vertical direction, for example, as shown in fig. 8, only a part of the magnetic plate placement hole 4e where the concave portions 4g and 4j are not formed may penetrate the fixed body 4 in the vertical direction. In this case, for example, an upper end portion of a portion of the magnetic plate arrangement hole 4e penetrating in the vertical direction is a circular hole, and a recess 4p recessed to the right side than the contact surface 4f and a recess 4r recessed to the left side than the left side surface 4h are formed in the portion.

In this case, the jig 20 may be inserted from the upper side of the fixed body 4 into a portion of the magnetic plate arrangement hole 4e penetrating in the vertical direction, and the magnetic plate 8 may be moved downward. In this case, the recess 4g may be formed over the entire area of the magnetic plate placement hole 4e in the vertical direction, but may be formed at least in a range from the lower end of the magnetic plate placement hole 4e to the lower end of the magnetic plate 8 in a fixed state in the magnetic plate placement hole 4 e. Fig. 8 (B) is a sectional view of the K-K section of fig. 8 (a).

In the above embodiment, the magnetic plate arrangement hole 4e may not penetrate the fixed body 4 in the vertical direction. In this case, the magnetic plate arrangement hole 4e is formed to be recessed upward from the lower end of the fixed body 4, for example, and is opened only at the lower end of the fixed body 4. In this case, the recess 4g may be formed in the entire area of the magnetic plate placement hole 4e in the vertical direction, for example, but the recess 4g may be formed at least in a range from the lower end of the magnetic plate placement hole 4e to the lower end of the magnetic plate 8 in a fixed state in the magnetic plate placement hole 4 e.

In the case where the magnetic plate placement hole 4e does not penetrate the fixed body 4 in the vertical direction, the magnetic plate placement hole 4e may be formed to be recessed downward from the upper end of the fixed body 4 and may be opened only at the upper end of the fixed body 4. In this case, the upper side (Z1 direction side) becomes one side in the first direction, and the lower side (Z2 direction side) becomes the other side in the first direction.

In the above embodiment, the jig 20 may not be formed in a cylindrical shape. For example, the jig 20 may be formed in a prismatic shape. In this case, the shape of the side surfaces of the concave portions 4g, 4j when viewed from the vertical direction is a shape corresponding to the shape of the jig 20. In the above embodiment, the recesses 4g and 4j may be formed at three or more positions with a space therebetween in the front-rear direction. The concave portions 4g and 4j may be formed at only one portion.

In the above embodiment, the width of the magnetic plate placement hole 4e in the lateral direction is widened, and even if the recess 4j is not formed in the left side surface 4h, the recess 4j may not be formed in the left side surface 4h as long as the jig 20 can be inserted into the magnetic plate placement hole 4 e. The magnetic plate placement hole 4e may be opened at the left end of the fixed body 4. In the above embodiment, the actuator 1 may not include the magnetic plate 9. In this case, a magnetic attractive force is generated between the magnetic plate 8 and the holding magnet 7 for holding the movable body 3 at the fixed position in the movable body rotation direction when the driving coil 16 is in the non-energized state.

In the above embodiment, the holding magnet 7 may be fixed to the fixed body 4, and the magnetic plate 8 may be fixed to the movable body 3. In this case, a magnetic plate arrangement hole for arranging and fixing the magnetic plate 8 is formed in the movable body 3. In the above embodiment, the driving magnet 15 may be fixed to the fixed body 4, and the driving coil 16 and the magnetic plate 9 may be fixed to the movable body 3. In the above embodiment, the magnetic driving mechanism 5 may further include a driving coil disposed to face the holding magnet 7, in addition to the driving coil 16. In this case, the holding magnet 7 constitutes a part of the magnetic driving mechanism 5, and functions as a driving magnet.

In the above embodiment, the actuator 1 may be used by being mounted on a device other than the projector. In this case, optical elements other than the optical glass 2 may be held by the movable body 3. For example, an optical element such as a lens, a prism, a reflecting plate, or an optical filter may be held by the movable body 3. The imaging element may be held by the movable body 3. When the image pickup device is held by the movable body 3, the actuator 1 is mounted on a camera, for example. The term "optical element" in the present specification also includes an image pickup element.

Symbol description

1 actuator

2 optical glass (optical element)

3 moving body

4 fixing body

4c magnetic plate mounting part (positioning part)

4e magnetic plate arrangement hole

4f contact surface

4g concave part

4h left side surface (surface of the magnetic plate arrangement hole on the thickness direction side)

4j recess (second recess)

5 magnetic driving mechanism

7 magnet for holding

7a magnetization part

8 magnetic plate

9 magnetic plate (second magnetic plate)

15 driving magnet

15a magnetization part

16 driving coil

20 clamp

Thickness direction of X-magnetic plate

The other side in the thickness direction of X1

One side in the X2 thickness direction

Y second direction

Z first direction

Z1 first direction other side

Z2 first direction side.

Claims (6)

1. An actuator, comprising: a movable body that holds the optical element; a fixed body which is formed in a frame shape having the movable body disposed on an inner peripheral side thereof and which holds the movable body rotatably; a magnetic drive mechanism that rotates the movable body in a direction in which the movable body is inclined with respect to the fixed body; and a holding magnet and a magnetic plate for holding the movable body at a fixed position with respect to the fixed body in a rotational direction of the movable body with respect to the fixed body, i.e., in a rotational direction of the movable body with respect to the fixed body,

The magnetic driving mechanism comprises a driving magnet and a driving coil arranged opposite to the driving magnet,

the holding magnet is fixed to either one of the movable body and the fixed body,

the magnetic plate is formed in a flat plate shape and is arranged on one side of the holding magnet in the thickness direction of the magnetic plate,

any other one of the movable body and the fixed body is formed of a non-magnetic material,

a magnetic plate arrangement hole for arranging and fixing the magnetic plate is formed in the other of the movable body and the fixed body,

the holding magnet is composed of two magnetized portions polarized in a first direction orthogonal to a thickness direction of the magnetic plate,

a magnetic attractive force for holding the movable body at a fixed position in the movable body rotation direction when the driving coil is in a non-energized state is generated between the magnetic plate and the holding magnet, and a position of the movable body in the movable body rotation direction when the driving coil is in a non-energized state is specified by a position of the magnetic plate in the first direction,

when one side of the first direction is set as one side of the first direction and the other side of the first direction is set as the other side of the first direction,

The magnetic plate arrangement hole is opened at least at one side end of the first direction of the other one of the movable body and the fixed body,

the surface of the magnetic plate arrangement hole on the holding magnet side is a contact surface that contacts the magnetic plate by a magnetic attraction force generated between the magnetic plate and the holding magnet,

a concave portion recessed toward the holding magnet is formed on the contact surface,

the recess is formed in a straight line from the first-direction one-side end of the magnetic plate arrangement hole toward the first-direction other side, and is formed at least to the first-direction one-side end of the magnetic plate.

2. The actuator of claim 1, wherein the actuator is configured to move the actuator,

the concave portions are formed at a plurality of positions with intervals in a second direction orthogonal to a thickness direction of the magnetic plate and the first direction.

3. An actuator according to claim 1 or 2, wherein,

the magnetic plate arrangement hole is a through hole penetrating the other one of the movable body and the fixed body in the first direction,

the recess is formed in the entire area of the magnetic plate arrangement hole in the first direction.

4. An actuator according to any one of claims 1 to 3, wherein,

when one side in the thickness direction of the magnetic plate is set as one side in the thickness direction and the other side in the thickness direction of the magnetic plate is set as the other side in the thickness direction,

the other side surface of the magnetic plate arrangement hole in the thickness direction is the contact surface,

a second concave portion recessed toward the thickness direction side is formed on the surface of the thickness direction side of the magnetic plate arrangement hole,

the second recess is formed at the same position as the recess in a second direction orthogonal to the thickness direction of the magnetic plate and the first direction, and is formed in the same range as the recess in the first direction.

5. The actuator of any one of claims 1 to 4, wherein,

a second magnetic plate having a flat plate shape for holding the movable body at a fixed position with respect to the fixed body in a rotation direction of the movable body,

the driving magnet and the holding magnet are fixed to the movable body,

the driving coil, the magnetic plate and the second magnetic plate are fixed on the fixed body,

The driving magnet is composed of two magnetized portions polarized in the first direction,

a magnetic attractive force for holding the movable body at a fixed position in the rotation direction of the movable body when the driving coil is in a non-energized state is generated between the driving magnet and the second magnetic plate,

a positioning portion for positioning the second magnetic plate in the first direction is formed on the fixed body.

6. A manufacturing method of an actuator for manufacturing the actuator according to any one of claims 1 to 5, comprising:

a magnetic plate position adjustment step of inserting a rod-shaped jig, a part of which is disposed in the recess, into the magnetic plate disposition hole from the first direction side, and bringing a distal end surface of the jig into contact with an end surface of the magnetic plate disposed in the magnetic plate disposition hole on the first direction side before fixing, thereby moving the magnetic plate to the other side in the first direction, and adjusting a position of the magnetic plate in the first direction; and

and a magnetic plate fixing step of fixing the magnetic plate to the magnetic plate placement hole after the magnetic plate position adjustment step.