JP2023119115A - Actuator and method for manufacturing actuator - Google Patents

Abstract

To provide an actuator having constitution in which a magnetic drive mechanism revolving, around a fixed body, a movable body holding an optical element, and in which even when the movable body can be held at a predetermined position in the direction of revolving movement of the movable body around the fixed body when the drive coil of the magnetic drive mechanism is in an unpowered state, and which enables reduction of the cost of the actuator even the actuator has the aforementioned constitution.SOLUTION: In an actuator 1, a magnetic attraction force for holding a movable body 3 at a given position in the direction of rotational movement of the movable body when a drive coil 16 is an unpowered state is generated between a magnetic plate 8 which is formed in a tabular shape and a holding magnet 7. A magnetic plate arrangement hole 4e is formed in a fixed body 4, in which hole the magnetic plate 8 is arranged and fixed in place, the face of the magnetic plate arrangement hole 4e on the holding magnet 7 side constituting a contact face 4f that the magnetic plate 8 is brought into contact by the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7. A concave portion 4g which is recessed toward the holding magnet 7 side is formed in the contact face 4f.SELECTED DRAWING: Figure 2

Description

The present invention relates to actuators for rotating optical elements. The invention also relates to a method of manufacturing such an actuator.

2. Description of the Related Art Conventionally, there has been known an image shifting device for vibrating a glass plate (optical glass) through which projection light is transmitted (see, for example, Patent Document 1). The image shifting device described in Patent Document 1 is installed in a projector. This image shifting device includes a glass frame to which a glass plate is fixed, a base that rotatably holds the glass frame, and a driving section that rotates the glass frame with respect to the base. The drive unit includes a drive magnet fixed to the glass frame and a drive coil arranged to face the drive magnet and fixed to the base.

Further, the image shifting device described in Patent Document 1 is for holding the glass frame at a fixed position in the rotation direction of the glass frame with respect to the base (that is, with respect to the base) when the drive coil is in a non-energized state. (for holding the glass frame in a fixed position). The braking portion includes one frame-side braking magnet fixed to the glass frame and two base-side braking magnets fixed to the base. The frame-side braking magnet is sandwiched between two base-side braking magnets. When the driving coil is not energized, the magnetic repulsion generated between the frame-side braking magnet and the two base-side braking magnets keeps the glass frame at a fixed position in the rotation direction of the glass frame with respect to the base. is held in

Further, in the image shifting device described in Patent Document 1, the position of the base-side braking magnet can be adjusted by a set screw, and the distance between the frame-side braking magnet and the base-side braking magnet can be adjusted. It is possible to adjust. That is, in this image shifting device, the set screw makes it possible to adjust the magnetic repulsive force generated between the frame-side braking magnet and the base-side braking magnet. Therefore, in this image shifting device, it is possible to adjust the position of the glass frame in the rotation direction of the glass frame with respect to the base when the driving coil is in the non-energized state.

JP 2019-215466 A

Since the image shifting device described in Patent Document 1 includes a braking unit, the image shifting device keeps the glass frame at a fixed position in the rotation direction of the glass frame with respect to the base when the drive coil is in a non-energized state. It is possible to hold with However, in this image shifting device, three braking magnets are required to hold the glass frame at a fixed position in the rotation direction of the glass frame with respect to the base when the drive coil is not energized. , the cost of the image shifter increases.

Accordingly, an object of the present invention is to provide an actuator that includes a movable body that holds an optical element, a fixed body that rotatably holds the movable body, and a magnetic drive mechanism that rotates the movable body with respect to the fixed body, Cost can be reduced even if the movable body can be held at a fixed position in the direction of rotation of the movable body with respect to the fixed body when the drive coil of the magnetic drive mechanism is in a non-energized state. An object of the present invention is to provide an actuator. Another object of the present invention is to provide a method for manufacturing such an actuator.

In order to solve the above-described problems, the actuator of the present invention includes a movable body that holds an optical element, and a fixed body that is formed in a frame shape in which the movable body is arranged on the inner peripheral side and that holds the movable body rotatably. a magnetic drive mechanism for rotating the movable body in a direction in which the movable body is tilted with respect to the fixed body; It comprises a holding magnet and a magnetic plate for holding it at a fixed position. The magnetic drive mechanism comprises a driving magnet and a driving coil arranged opposite to the driving magnet. It is fixed to one of the fixed bodies, the magnetic plate is formed in a flat plate shape and is arranged on one side of the holding magnet in the thickness direction of the magnetic plate, and the other of the movable body and the fixed body is non-magnetic. It is made of a magnetic material, and the other of the movable body and the fixed body is formed with a magnetic plate placement hole in which the magnetic plate is placed and fixed. The magnetic plate is composed of two magnetized portions polarized in one direction, and has a magnetic attraction force for holding the movable body at a fixed position in the rotational direction of the movable body when the drive coil is in a non-energized state. and the holding magnet, the position of the magnetic plate in the first direction defines the position of the movable body in the rotation direction of the movable body when the driving coil is in the non-energized state, and the other side in the first direction is the other side in the first direction. , the surface of the magnetic plate arrangement hole on the side of the holding magnet is a contact surface with which the magnetic plate comes into contact due to the magnetic attraction force generated between the magnetic plate and the holding magnet. A recess that is recessed toward the magnet side is formed, and the recess is formed linearly from one end of the magnetic plate arrangement hole toward the other side in the first direction, and is formed at least in the first direction of the magnetic plate. It is characterized by being formed up to one side end.

The actuator of the present invention includes a holding magnet and a magnetic plate for holding the movable body at a fixed position with respect to the fixed body in the movable body rotational direction, which is the rotational direction of the movable body with respect to the fixed body. When the driving coil is in a non-energized state, a magnetic attraction force is generated between the magnetic plate formed in a shape and the holding magnet to hold the movable body at a fixed position in the rotational direction of the movable body. there is Therefore, in the present invention, when the drive coil is not energized, the movable body can be held at a fixed position in the rotational direction of the movable body by the flat magnetic plate and the holding magnet. Become. Therefore, in the present invention, even if it is possible to hold the movable body at a fixed position in the rotating direction of the movable body when the driving coil is in a non-energized state, the three braking magnets are provided in Patent Document 1. It is possible to reduce the cost of the actuator as compared with the image shifting device described in 1.

Further, in the present invention, the position of the movable body in the rotation direction of the movable body when the driving coil is in the non-energized state is defined by the position of the magnetic plate in the first direction perpendicular to the thickness direction of the magnetic plate. Therefore, by adjusting the position of the magnetic plate in the first direction when manufacturing the actuator, it is possible to adjust the position of the movable body in the rotating direction of the movable body when the driving coil is in the non-energized state.

Further, in the present invention, since the magnetic plate placement hole in which the magnetic plate is placed and fixed is open on at least one side of the other of the movable body and the fixed body in the first direction, the magnetic plate A rod-shaped jig is inserted into the magnetic plate arranging hole from one side of the arranging hole in the first direction, and the jig is attached to the end surface of the magnetic plate before being fixed, which is arranged in the magnetic plate arranging hole, on the one side in the first direction. It is possible to adjust the position of the magnetic plate in the first direction by moving the magnetic plate to the other side in the first direction by bringing the tip surface into contact.

Further, in the present invention, the surface of the magnetic plate arrangement hole on the side of the holding magnet serves as a contact surface with which the magnetic plate contacts due to the magnetic attraction force generated between the magnetic plate and the holding magnet. is formed with a recess that is recessed toward the holding magnet side. Further, in the present invention, the concave portion is formed linearly from one end of the magnetic plate arrangement hole in the first direction toward the other side in the first direction, and is formed at least to the one end of the magnetic plate in the first direction. ing.

Therefore, in the present invention, for example, even if the thickness of the magnetic plate is extremely thin, or even if the edge of the tip surface of the rod-shaped jig is chamfered, the actuator can be manufactured. , the tip surface of the jig partly arranged in the recess can be reliably brought into contact with the end surface of the magnetic plate on one side in the first direction. Therefore, in the present invention, even if the thickness of the magnetic plate is extremely thin, or even if the edge of the tip surface of the rod-shaped jig is chamfered, the jig can be used when manufacturing the actuator. can be used to easily adjust the position of the magnetic plate in the first direction.

In the present invention, it is preferable that the recessed portions are formed at a plurality of locations while being spaced apart in a second direction perpendicular to the thickness direction of the magnetic plate and the first direction. With this configuration, when manufacturing the actuator, it becomes easier to move the magnetic plate to the other side in the first direction by using a plurality of rod-shaped jigs arranged in the second direction at intervals. Therefore, it becomes possible to more easily adjust the position of the magnetic plate in the first direction when manufacturing the actuator.

In the present invention, the magnetic plate placement hole is a through hole that penetrates the other of the movable body and the fixed body in the first direction, and the concave portion is formed over the entire area of the magnetic plate placement hole in the first direction. is preferred. With this configuration, when the tip surface of the jig is brought into contact with the end surface of the magnetic plate on one side in the first direction to move the magnetic plate to the other side in the first direction, the magnetic plate is moved to the other side in the first direction. Even if it is pushed too far, the jig is inserted into the magnetic plate arrangement hole from the other side of the magnetic plate arrangement hole in the first direction, and the tip surface of the jig partly arranged in the concave portion is placed in the first direction of the magnetic plate. It is possible to return the magnetic plate to the one side in the first direction by reliably contacting the end face on the other side in the one direction.

In the present invention, assuming that one side of the magnetic plate in the thickness direction is one side in the thickness direction and the other side in the thickness direction of the magnetic plate is the other side in the thickness direction, the other side in the thickness direction of the magnetic plate arrangement hole is The surface is a contact surface, and the surface on one side in the thickness direction of the magnetic plate placement hole is formed with a second recess that is recessed toward the one side in the thickness direction. It is preferably formed at the same position as the recess in a second direction orthogonal to the thickness direction and the first direction, and in the same range as the recess in the first direction. With this configuration, even if the width of the magnetic plate placement hole in the thickness direction of the magnetic plate is narrow, the jig can be inserted into the magnetic plate placement hole using the concave portion and the second concave portion, and the jig can be inserted in the first direction. It becomes possible to move the magnetic plate to the side.

In the present invention, for example, the actuator includes a flat second magnetic plate for holding the movable body at a fixed position with respect to the fixed body in the rotating direction of the movable body, and the driving magnet and the holding magnet are movable. The driving coil, the magnetic plate and the second magnetic plate are fixed to the fixed body, the driving magnet is composed of two magnetized parts polarized in the first direction, and the driving coil is In the non-energized state, a magnetic attraction force is generated between the driving magnet and the second magnetic plate for holding the movable body at a fixed position in the rotating direction of the movable body. is formed with a positioning portion for positioning the second magnetic plate. In this case, since the position of the second magnetic plate in the first direction is not adjusted, the manufacturing process of the actuator can be simplified.

In the actuator of the present invention, for example, a rod-shaped jig partly arranged in the concave portion is inserted into the magnetic plate arrangement hole from one side in the first direction, and an unfixed magnet is arranged in the magnetic plate arrangement hole. a magnetic plate position adjusting step of adjusting the position of the magnetic plate in the first direction by bringing the tip end face of a jig into contact with the end face of the plate on one side in the first direction to move the magnetic plate to the other side in the first direction; It is manufactured by an actuator manufacturing method including a magnetic plate fixing step of fixing the magnetic plate in the magnetic plate placement hole after the plate position adjusting step.

As described above, according to the present invention, an actuator including a movable body that holds an optical element, a fixed body that rotatably holds the movable body, and a magnetic drive mechanism that rotates the movable body with respect to the fixed body To reduce the cost of an actuator even if it is possible to hold a movable body at a fixed position in the rotational direction of the movable body with respect to the fixed body when the drive coil of the magnetic drive mechanism is in a non-energized state. becomes possible.

1 is a perspective view of an actuator according to an embodiment of the invention; FIG. FIG. 2 is a plan view of the actuator shown in FIG. 1; FIG. 2 is an exploded perspective view of the actuator shown in FIG. 1; (A) is a cross-sectional view of the EE cross section of FIG. 2, and (B) is a cross-sectional view of the FF cross section of FIG. FIG. 3 is an enlarged view of a G portion of FIG. 2; It is a figure for demonstrating the adjustment method of the position of the up-down direction of the magnetic plate shown to FIG. 4(B). FIG. 9 is a diagram for explaining the configuration of magnetic plate placement holes according to another embodiment of the present invention; FIG. 9 is a diagram for explaining the configuration of magnetic plate placement holes according to another embodiment of the present invention;

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Overall configuration of actuator)
FIG. 1 is a perspective view of an actuator 1 according to an embodiment of the invention. FIG. 2 is a plan view of the actuator 1 shown in FIG. 1. FIG. 3 is an exploded perspective view of the actuator 1 shown in FIG. 1. FIG. 4A is a cross-sectional view of the EE cross section of FIG. 2, and FIG. 4B is a cross-sectional view of the FF cross section of FIG.

In the following description, as shown in FIG. 1 and the like, the three mutually orthogonal directions are the X direction, the Y direction, and the Z direction, respectively, with the X direction being the left-right direction, the Y direction being the front-rear direction, and the Z direction being the up-down direction. . In addition, the X1 direction side in FIG. 1 etc., which is one side in the left-right direction, is the “right” side, and the opposite side, the X2 direction side in FIG. 1 etc., is the “left” side. The Y1 direction side of 1, etc. is defined as the "front" side, the opposite Y2 direction side in FIG. 1 etc. is defined as the "rear" side, and the Z1 direction side in FIG. and the Z2 direction side in FIG.

The actuator 1 of this embodiment is a device for vibrating an optical glass 2 as an optical element, and is used by being mounted on a projector. The optical glass 2 is a glass plate having light transmittance and is formed in a square plate shape. The optical glass 2 forms part of the projection optical system of the projector. The actuator 1 periodically changes the posture of the optical glass 2 by vibrating the optical glass 2 at a predetermined frequency at a constant angle in order to improve the image quality of the image projected by the projector. For example, actuator 1 vibrates optical glass 2 at 60 Hz.

The actuator 1 is formed in a flat rectangular parallelepiped shape with a thin vertical thickness as a whole. The actuator 1 includes a movable body 3 that holds an optical glass 2 and a fixed body 4 that holds the movable body 3 rotatably. The movable body 3 and fixed body 4 are formed in a frame shape. The optical glass 2 is arranged on the inner peripheral side of the movable body 3 . The movable body 3 is arranged on the inner peripheral side of the fixed body 4 . The actuator 1 also includes a magnetic drive mechanism 5 that rotates the movable body 3 in a direction in which the movable body 3 is tilted with respect to the fixed body 4 to vibrate the optical glass 2 , and a rotation mechanism of the movable body 3 with respect to the fixed body 4 . A fulcrum portion 6 serving as a fulcrum, and a holding magnet 7 and magnetism for holding the movable body 3 at a fixed position with respect to the fixed body 4 in the rotating direction of the movable body 3 relative to the fixed body 4 . plates 8,9. The magnetic plate 9 of this embodiment is a second magnetic plate.

In this embodiment, when current is not supplied to a driving coil 16 (described later) that constitutes a part of the magnetic driving mechanism 5 (that is, when the driving coil 16 is in a non-energized state), the movable body rotates. The movable body 3 is arranged at a predetermined reference position with respect to the fixed body 4 in the direction. When the movable body 3 is arranged at the reference position with respect to the fixed body 4 in the rotating direction of the movable body, the thickness direction and the vertical direction of the optical glass 2 coincide.

Further, when the movable body 3 is arranged at the reference position with respect to the fixed body 4 in the rotating direction of the movable body, the actuator 1 mounted on the projector does not correspond to the thickness direction of the optical glass 2 and the projection optical system of the projector. The direction of the optical axis is the same, and the optical axis of the projection optical system of the projector passes through the center of the optical glass 2 . The rotation angle of the movable body 3 with respect to the fixed body 4 when the optical glass 2 vibrates is, for example, less than 0.5°, which is very small. Therefore, regardless of whether the optical glass 2 vibrates or not, the thickness direction of the optical glass 2 substantially coincides with the vertical direction.

The movable body 3 is rotatable in a direction in which the movable body 3 is inclined with respect to the fixed body 4 when viewed from the outer peripheral side of the fixed body 4 . Further, the movable body 3 is rotatable with respect to the fixed body 4 with the first orthogonal direction (V direction in FIG. 2) orthogonal to the thickness direction of the optical glass 2 as the axial direction of rotation. That is, the movable body 3 is rotatable with respect to the fixed body 4 about an axis L1 (see FIG. 2) whose axial direction is the first orthogonal direction. The first orthogonal direction is orthogonal to the vertical direction. In addition, the first orthogonal direction is a direction shifted 45° clockwise in FIG. 2 with respect to the front-rear direction when viewed from above. The axis L1 passes through the center of the optical glass 2 when viewed from the thickness direction of the optical glass 2 . The fulcrum portions 6 are arranged on both end sides of the movable body 3 in the first orthogonal direction.

The movable body 3 is a glass holder that holds the optical glass 2 . The movable body 3 is made of a non-magnetic material. Moreover, the movable body 3 is made of a resin material. The movable body 3 is formed in a frame shape as described above. Specifically, the movable body 3 is formed in a square or rectangular frame shape. When the movable body 3 is placed at the reference position with respect to the fixed body 4 in the rotating direction of the movable body, two of the four sides forming the outer peripheral surface of the movable body 3 having a square or rectangular outer shape. are parallel to the left-right direction, and the remaining two sides are parallel to the front-rear direction.

The movable body 3 is formed with a magnet placement recess 3a in which a drive magnet 15 (to be described later) that constitutes a part of the magnetic drive mechanism 5 is placed, and a magnet placement recess 3b in which a holding magnet 7 is placed. . The magnet placement recess 3a is recessed from the right end of the movable body 3 toward the left. The magnet arrangement concave portion 3b is recessed from the left end of the movable body 3 toward the right side. The magnet placement recesses 3 a and 3 b are formed over the entire area of the movable body 3 in the thickness direction of the optical glass 2 . Further, as shown in FIG. 3, the movable body 3 is formed with protrusions 3c that protrude toward both sides in the first orthogonal direction. The projecting portion 3c is formed in a cylindrical shape. The axial direction of the projection 3c formed in a cylindrical shape coincides with the first orthogonal direction.

As described above, the optical glass 2 is arranged on the inner peripheral side of the movable body 3 . Optical glass 2 is fixed to movable body 3 . When the movable body 3 is arranged at the reference position with respect to the fixed body 4 in the rotating direction of the movable body, two of the four sides of the outer peripheral surface of the optical glass 2 having a square outer shape direction, and the remaining two sides are parallel to the front-rear direction.

The fixed body 4 is made of a non-magnetic material. Moreover, the fixed body 4 is made of a resin material. The fixed body 4 is formed in a frame shape as described above. Specifically, the fixed body 4 is formed in a square or rectangular frame shape. Two of the four sides forming the outer peripheral surface of the fixed body 4 having a square or rectangular outer shape are parallel to the left-right direction, and the remaining two sides are parallel to the front-rear direction. . The fixed body 4 is formed with a coil placement recess 4a in which a drive coil 16, which will be described later and which constitutes a part of the magnetic drive mechanism 5, is placed, and a magnetic plate placement recess 4b in which the magnetic plate 9 is placed. .

The coil placement recess 4 a and the magnetic plate placement recess 4 b are formed on the right side of the fixed body 4 . The coil placement recess 4 a is recessed rightward from the left end of the right side of the fixed body 4 . The coil placement recess 4a is formed over the entire area of the fixed body 4 in the vertical direction. The magnetic plate placement recess 4b is formed on the right side of the coil placement recess 4a. The magnetic plate placement recess 4b is recessed to the right of the coil placement recess 4a. The magnetic plate placement recess 4b is not formed in the entire area of the fixed body 4 in the vertical direction. formed. The upper surface of the magnetic plate mounting portion 4c is a plane perpendicular to the vertical direction.

Further, the fixed body 4 is formed with a spring placement portion 4d in which a later-described leaf spring 13 constituting a part of the fulcrum portion 6 is placed, and a magnetic plate placement hole 4e in which the magnetic plate 8 is placed and fixed. It is The spring placement portions 4d are formed at two corners on one diagonal line of the fixed body 4 formed in a square frame shape. Specifically, the spring placement portions 4 d are formed at the right rear end corner and the left front end corner of the fixed body 4 . A magnetic plate placement hole 4 e is formed on the left side of the fixed body 4 . The magnetic plate placement hole 4e is a through hole that penetrates the fixed body 4 in the vertical direction. Moreover, the magnetic plate placement hole 4e is a rectangular hole elongated in the front-rear direction. A specific configuration of the magnetic plate placement hole 4e will be described later.

The fulcrum portion 6 includes a sphere (ball) 11 formed in a spherical shape, a sphere holding member 12 for holding the sphere 11, and a concave curved contact surface 13a that contacts a portion of the sphere 11 with a predetermined contact pressure. (see FIG. 3) is provided with a leaf spring 13 formed thereon. The sphere 11 is made of ceramics. The sphere holding member 12 is made of a metal material. The sphere holding member 12 is formed in a bottomed cylindrical shape having a cylindrical portion and a bottom portion connected to one end of the cylindrical portion. The inner diameter of the sphere holding member 12 is larger than the outer diameter of the sphere 11 .

The ball holding member 12 is fixed to the protrusion 3c of the movable body 3. As shown in FIG. The projecting portion 3c is lightly press-fitted into the inner peripheral side of the ball holding member 12 from the inside in the first orthogonal direction. The sphere holding member 12 is fixed to the protrusion 3c with an adhesive. The sphere 11 is arranged on the inner peripheral side of the sphere holding member 12 . The bottom portion of the sphere holding member 12 is arranged outside the tip surface of the protrusion 3c in the first orthogonal direction. Between the tip surface of the protrusion 3c and the bottom of the ball holding member 12, a gap is formed for placing the ball 11 therein.

A through-hole is formed in the bottom of the sphere holding member 12 to allow a part of the sphere 11 arranged on the inner peripheral side of the sphere holding member 12 to be arranged outside the sphere holding member 12 . The inner diameter of this through hole is smaller than the outer diameter of the spherical body 11 . The sphere 11 is in contact with the bottom surface of the recess formed in the tip end surface of the protrusion 3c, and is in contact with the edge of the through hole. A portion of the sphere 11 is arranged outside the bottom of the sphere holding member 12 in the first orthogonal direction and outside the sphere holding member 12 . The sphere 11 is held on the movable body 3 by the protrusion 3 c and the sphere holding member 12 .

The plate spring 13 is formed by bending a metal plate, such as a stainless steel plate, into a predetermined shape. The leaf spring 13 is formed in a U shape. The plate spring 13 is arranged in the spring arrangement portion 4d so that the shape of the plate spring 13 when viewed from above and below is U-shaped. When viewed from the thickness direction of the optical glass 2 , the plate spring 13 arranged at the right rear end and the plate spring 13 arranged at the left front end are arranged point-symmetrically with respect to the center of the optical glass 2 . there is The plate spring 13 is fixed to the spring placement portion 4d in a positioned state. The contact surface 13a of the leaf spring 13 is in contact with a part of the sphere 11 arranged outside the sphere holding member 12 from the outside in the first orthogonal direction with a predetermined contact pressure. The leaf spring 13 biases the spherical body 11 inward in the first orthogonal direction.

The magnetic drive mechanism 5 includes a drive magnet 15 and a drive coil 16 arranged to face the drive magnet 15 . A driving magnet 15 is fixed to the movable body 3 . Specifically, the driving magnet 15 is arranged in the magnet placement recess 3 a and fixed to the right side of the movable body 3 . The driving magnet 15 is formed in a rectangular parallelepiped shape elongated in the front-rear direction. The driving magnet 15 is composed of two magnetized portions 15a that are vertically polarized. More specifically, the driving magnet 15 is composed of two magnetized portions 15a that are polarized in the thickness direction of the optical glass 2. As shown in FIG.

The drive coil 16 is, for example, an air-core coil formed by winding a conducting wire in an air-core shape. The drive coil 16 is mounted on a flexible printed circuit board 17 . Further, the driving coil 16 is arranged in the coil arrangement concave portion 4a. The flexible printed circuit board 17 is fixed to the fixed body 4 . The drive coil 16 is fixed to the fixed body 4 via a flexible printed circuit board 17 . The driving magnet 15 and the driving coil 16 face each other in the left-right direction.

The magnetic drive mechanism 5 rotates the movable body 3 with respect to the fixed body 4 with the first orthogonal direction as the axial direction of rotation. A Hall sensor (not shown) for detecting the rotational position of the movable body 3 with respect to the fixed body 4 is mounted on the flexible printed circuit board 17 . The Hall sensor is arranged to face the driving magnet 15 . A current is supplied to the driving coil 16 based on the detection result of the hall sensor.

A holding magnet 7 is fixed to the movable body 3 . Specifically, the holding magnet 7 is arranged in the magnet placement recess 3 b and fixed to the left side of the movable body 3 . The holding magnet 7 is formed in a rectangular parallelepiped shape elongated in the front-rear direction. The holding magnet 7 is constructed in the same manner as the driving magnet 15, and is composed of two magnetized portions 7a polarized in the vertical direction. More specifically, the holding magnet 7 is composed of two magnetized portions 7 a polarized in the thickness direction of the optical glass 2 .

As shown in FIG. 2, the longitudinal center of the holding magnet 7 and the longitudinal center of the driving magnet 15 are offset in the longitudinal direction. Specifically, the center of the holding magnet 7 in the front-rear direction is arranged behind the center of the drive magnet 15 in the front-rear direction. In this embodiment, the holding magnet 7 and the driving magnet 15 are arranged point-symmetrically with respect to the center of the movable body 3 when viewed from the thickness direction of the optical glass 2 . Further, when viewed from the thickness direction of the optical glass 2 , the holding magnet 7 and the driving magnet 15 are arranged point-symmetrically with respect to the center of the optical glass 2 .

The magnetic plate 8 is made of a metal material having magnetism. The magnetic plate 8 is formed in a flat plate shape. Specifically, the magnetic plate 8 is formed in an elongated rectangular plate shape. The thickness of the magnetic plate 8 is reduced. For example, the thickness of the magnetic plate 8 is about 0.1 to 0.2 (mm), which is very thin. The magnetic plate 8 is arranged so that the thickness direction of the magnetic plate 8 is aligned with the left-right direction. That is, the left-right direction (X direction) in this embodiment is the thickness direction of the magnetic plate 8 . Moreover, the magnetic plate 8 is arranged so that the longitudinal direction of the magnetic plate 8 formed in a rectangular flat plate shape coincides with the front-rear direction.

The magnetic plate 8 is arranged in the magnetic plate placement hole 4e and fixed in the magnetic plate placement hole 4e. That is, the magnetic plate 8 is fixed to the stationary body 4 . The magnetic plate 8 is fixed to the fixed body 4 with an adhesive. For example, the magnetic plate 8 is fixed to the fixed body 4 with a thermosetting adhesive. Also, the magnetic plate 8 is arranged on the left side of the holding magnet 7 . That is, the magnetic plate 8 is arranged on one side of the holding magnet 7 in the thickness direction of the magnetic plate 8 . The left side surface of the holding magnet 7 is a plane substantially perpendicular to the horizontal direction, and is magnetized to have two poles in the vertical direction. When the driving coil 16 is in a non-energized state, the vertical center of the left side surface of the holding magnet 7 and the vertical center of the magnetic plate 8 coincide in the vertical direction by design. In this embodiment, the position of the magnetic plate 8 in the vertical direction is adjusted before the magnetic plate 8 is fixed to the fixed body 4, as will be described later.

The left side (X2 direction side) of this embodiment is one side in the thickness direction of the magnetic plate 8, and the right side (X1 direction side) is the other side in the thickness direction of the magnetic plate 8. is the other side in the thickness direction. The vertical direction (Z direction) of this embodiment is the first direction orthogonal to the thickness direction of the magnetic plate 8, and the front-back direction (Y direction) is the thickness direction of the magnetic plate 8 and the first direction. It is a second direction orthogonal to . Furthermore, the lower side (Z2 direction side) of this embodiment is one side in the first direction, which is one side in the first direction, and the upper side (Z1 direction side) is the other side in the first direction, which is the first direction side. It is on the other side of the direction.

The magnetic plate 9 is configured in the same manner as the magnetic plate 8 and formed in a flat plate shape. The magnetic plate 9 is arranged so that the thickness direction of the magnetic plate 9 is aligned with the left-right direction. Moreover, the magnetic plate 9 is arranged so that the longitudinal direction of the magnetic plate 9 formed in a rectangular flat plate shape coincides with the front-rear direction. The magnetic plate 9 is arranged in the magnetic plate arrangement recess 4b. As shown in FIG. 4A, the magnetic plate 9 is mounted on the magnetic plate mounting portion 4c, and the lower end surface of the magnetic plate 9 is in contact with the upper surface of the magnetic plate mounting portion 4c. That is, the magnetic plate 9 is positioned vertically.

The magnetic plate placing portion 4c of this embodiment serves as a positioning portion for positioning the magnetic plate 9 in the vertical direction, which is the first direction. That is, the fixed body 4 is formed with a magnetic plate placing portion 4c as a positioning portion for positioning the magnetic plate 9 in the first direction. Also, the magnetic plate 9 is fixed to a flexible printed circuit board 17 and fixed to the fixed body 4 via the flexible printed circuit board 17 . The magnetic plate 9 is arranged on the right side of the driving magnet 15 . The right side surface of the driving magnet 15 is a plane that is substantially perpendicular to the horizontal direction, and is magnetized to have two poles in the vertical direction. When the drive coil 16 is in a non-energized state, the vertical center of the right side surface of the drive magnet 15 and the vertical center of the magnetic plate 9 coincide in the vertical direction by design.

In this embodiment, when the drive coil 16 is in a non-energized state, the movable body 3 is held at a fixed position in the rotating direction of the movable body (that is, the movable body 3 is held in a fixed posture with respect to the fixed body 4). A magnetic attraction force (for holding) is generated between the magnetic plate 8 and the holding magnet 7 and between the magnetic plate 9 and the driving magnet 15 . Specifically, when the drive coil 16 is in a non-energized state, the magnetic attraction force for holding the movable body 3 at the reference position in the movable body rotation direction is generated between the magnetic plate 8 and the holding magnet 7. and between the magnetic plate 9 and the drive magnet 15 .

Further, in this embodiment, by adjusting the position of the magnetic plate 8 in the vertical direction, it is possible to adjust the position of the movable body 3 in the rotational direction of the movable body when the drive coil 16 is in a non-energized state. It's becoming That is, in this embodiment, the vertical position of the magnetic plate 8 defines the position of the movable body 3 in the rotational direction of the movable body when the driving coil 16 is in the non-energized state. In this embodiment, if the sizes of the magnetic plates 8 and 9 are changed, the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7 and the magnetic force between the magnetic plate 9 and the driving magnet 15 can be increased. The resulting magnetic attraction changes. Further, by changing the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7 and the magnetic attraction force generated between the magnetic plate 9 and the driving magnet 15, the optical glass 2 is vibrated. It is possible to change the resonance frequency of the actuator 1 at that time.

(Structure of magnetic plate arrangement hole)
FIG. 5 is an enlarged view of part G in FIG.

As described above, the magnetic plate placement hole 4e is a through hole that penetrates the fixed body 4 in the vertical direction. That is, the magnetic plate placement hole 4 e is open at the upper end of the fixed body 4 and the lower end of the fixed body 4 . Further, as described above, the magnetic plate placement hole 4e is a rectangular hole elongated in the front-rear direction. The width of the magnetic plate placement hole 4e in the left-right direction is wider than the thickness of the magnetic plate 8, and the length of the magnetic plate placement hole 4e in the front-rear direction is the length of the magnetic plate 8 in the front-rear direction (long side direction length). A right side surface of the magnetic plate arrangement hole 4 e is a contact surface 4 f with which the magnetic plate 8 contacts due to the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7 . That is, the surface of the magnetic plate placement hole 4e on the side of the holding magnet 7 is a contact surface 4f. 4 f of contact surfaces are planes orthogonal to the left-right direction.

The contact surface 4f is formed with a recess 4g recessed rightward (that is, toward the holding magnet 7 side). The concave portion 4g is formed linearly upward from the lower end of the magnetic plate placement hole 4e. That is, the recess 4g is formed in a straight line parallel to the vertical direction. The concave portion 4g of this embodiment is formed over the entire area of the magnetic plate arrangement hole 4e in the vertical direction, and is formed from the lower end of the magnetic plate arrangement hole 4e to the upper end of the magnetic plate arrangement hole 4e. In addition, the recessed portions 4g are formed at a plurality of locations spaced apart in the front-rear direction. In this embodiment, recessed portions 4g are formed at two locations, a front end portion and a rear end portion, of the contact surface 4f. A side surface of the concave portion 4g when viewed from above and below is an arc-shaped concave curved surface.

A left side surface 4h, which is the left side surface of the magnetic plate placement hole 4e, is a plane perpendicular to the left-right direction. A left side surface 4h is formed with a recessed portion 4j as a second recessed portion recessed toward the left side. The recess 4j is formed linearly from the lower end of the magnetic plate arrangement hole 4e to the upper end of the magnetic plate arrangement hole 4e. That is, the recess 4j is formed in a straight line parallel to the vertical direction. The recess 4j is formed at the same position as the recess 4g in the front-rear direction. That is, the recesses 4j are formed at two locations. Further, as described above, the recess 4j is formed from the lower end of the magnetic plate placement hole 4e to the upper end of the magnetic plate placement hole 4e, and is formed in the same range as the recess 4g in the vertical direction.

A side surface of the recess 4j when viewed from above and below is an arc-shaped concave curved surface. The radius of curvature of the side surface of the recess 4j is equal to the radius of curvature of the side surface of the recess 4g. When viewed from above and below, the center of curvature of the side surface of the recess 4j coincides with the center of curvature of the side surface of the recess 4g.

(Manufacturing method of actuator)
FIG. 6 is a diagram for explaining a method of adjusting the vertical position of the magnetic plate 8 shown in FIG. 4(B).

In this embodiment, even if there are variations in the parts that make up the actuator 1 and manufacturing variations in the actuator 1, the thickness direction and the vertical direction of the optical glass 2 when the drive coil 16 is in the non-energized state are the same. In the final stage of the manufacturing process of the actuator 1, the vertical position of the magnetic plate 8 with respect to the fixed body 4 is adjusted so as to match. When the vertical position of the magnetic plate 8 is adjusted, the movable body 3 and the fulcrum 6 to which the optical glass 2, the holding magnet 7 and the driving magnet 15 are fixed are attached to the fixed body 4, and the magnetic plate 9. A driving coil 16 and a flexible printed circuit board 17 are attached to the fixed body 4 .

A rod-shaped jig 20 is used for vertical position adjustment of the magnetic plate 8 . The jig 20 is formed in a cylindrical shape. The radius (half of the outer diameter) of the jig 20 is approximately equal to the radius of curvature of the side surfaces of the recesses 4g and 4j. In this embodiment, two jigs 20 are used for vertical position adjustment of the magnetic plate 8 . The two jigs 20 are arranged such that the axial direction of the jigs 20 is aligned with the vertical direction. Also, the two jigs 20 are arranged with a gap therebetween in the front-rear direction. The pitch in the front-back direction of the two jigs 20 is equal to the pitch in the front-back direction of the two concave portions 4g. The two jigs 20 are connected to an elevating mechanism (not shown) that elevates the jigs 20 . The jig 20 is inserted into a portion of the magnetic plate placement hole 4e where the concave portions 4g and 4j are formed. The edge of the tip surface of the jig 20 is chamfered.

Further, when the vertical position of the magnetic plate 8 is adjusted, the magnetic plate 8 is arranged in the magnetic plate arrangement hole 4e. The magnetic plate 8 is in contact with the contact surface 4 f due to the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7 . Even when the magnetic plate 8 is not adhesively fixed in the magnetic plate placement hole 4e, the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7 keeps the magnetic plate 8 at a fixed position in the vertical direction. there is

The magnetic plate 8 before the position adjustment in the vertical direction is arranged below the design position of the magnetic plate 8 in the vertical direction. In this state, as shown in FIG. 6(A), a jig 20 partly arranged in the concave portions 4g and 4j is inserted from below into the magnetic plate arrangement hole 4e (that is, the tip face faces upward). The jig 20 is inserted from below into the portion of the magnetic plate arrangement hole 4e where the recesses 4g and 4j are formed, and the magnetic plate 8 before being fixed is inserted into the magnetic plate arrangement hole 4e. The tip surface of the jig 20 is brought into contact with the lower end surface to move the magnetic plate 8 upward to adjust the position of the magnetic plate 8 in the vertical direction (magnetic plate position adjustment step).

In the magnetic plate position adjusting step, for example, the magnetic plate 8 is gradually moved upward while checking the tilt of the optical glass 2 with a laser displacement meter. When the thickness direction of the optical glass 2 coincides with the vertical direction, the positional adjustment of the magnetic plate 8 in the vertical direction is completed. After the position adjustment of the magnetic plate 8 in the vertical direction is completed, the magnetic plate 8 is fixed in the magnetic plate arrangement hole 4e (magnetic plate fixing step). That is, after the magnetic plate position adjusting process, the magnetic plate 8 is fixed in the magnetic plate arrangement hole 4e. Specifically, the magnetic plate 8 is fixed in the magnetic plate arrangement hole 4e by an adhesive.

Further, in the magnetic plate position adjustment step, if the magnetic plate 8 is moved too far upward, before fixing the magnetic plate 8 to the magnetic plate arrangement hole 4e, as shown in FIG. The jig 20 partially arranged in the concave portions 4g and 4j is inserted into the magnetic plate arrangement hole 4e from above (that is, the jig 20 with its tip facing downward is inserted into the concave portion of the magnetic plate arrangement hole 4e). 4g and 4j are formed), and the tip surface of the jig 20 is brought into contact with the upper end surface of the magnetic plate 8 before being fixed, which is arranged in the magnetic plate arrangement hole 4e. 8 is moved downward to adjust the position of the magnetic plate 8 in the vertical direction. After the positional adjustment of the magnetic plate 8 in the vertical direction is completed, the magnetic plate 8 is fixed in the magnetic plate arrangement hole 4e.

(Main effects of this form)
As described above, in this embodiment, when the driving coil 16 is in the non-energized state, the magnetic attraction force for holding the movable body 3 at the reference position in the rotational direction of the movable body is the magnetic plate 8 and the holding force. , and between the magnetic plate 9 and the driving magnet 15 . Therefore, in this embodiment, two thin plate-like magnetic plates 8 and 9, one holding magnet 7, and a driving magnet 15 constituting a part of the magnetic driving mechanism 5 are used to form the driving coil 16. is in a non-energized state, the movable body 3 can be held at the reference position in the rotational direction of the movable body. Therefore, in this embodiment, even if it is possible to hold the movable body 3 at a fixed position in the rotating direction of the movable body when the driving coil 16 is in a non-energized state, the three braking magnets and the driving magnets are provided. It is possible to reduce the cost of the actuator 1 as compared with the image shifting device described in Patent Document 1 having a magnet.

In this embodiment, the vertical position of the magnetic plate 8 defines the position of the movable body 3 in the rotational direction of the movable body when the driving coil 16 is in the non-energized state. Further, in this embodiment, when the actuator 1 is manufactured, the jig 20 partly arranged in the concave portions 4g and 4j is inserted from below into the magnetic plate arrangement hole 4e, and the jig 20 is arranged in the magnetic plate arrangement hole 4e. The tip surface of the jig 20 is brought into contact with the lower end surface of the magnetic plate 8 before being fixed, and the magnetic plate 8 is moved upward to adjust the position of the magnetic plate 8 in the vertical direction. Therefore, in this embodiment, it is possible to adjust the position of the movable body 3 in the rotational direction of the movable body so that the thickness direction of the optical glass 2 when the drive coil 16 is not energized matches the vertical direction. be possible.

Further, in this embodiment, the contact surface 4f with which the magnetic plate 8 contacts due to the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7 is formed with a recess 4g recessed toward the left. is formed linearly from the lower end to the upper end of the magnetic plate arrangement hole 4e. Therefore, in this embodiment, even if the thickness of the magnetic plate 8 is very thin, and even if the edge of the tip surface of the rod-shaped jig 20 is chamfered, a part of the recess is It becomes possible to bring the tip surface of the jig 20 arranged in 4g into contact with the lower end surface of the magnetic plate 8 without fail. Therefore, in this embodiment, even if the thickness of the magnetic plate 8 is very thin, or even if the edge of the tip surface of the jig 20 is chamfered, the jig 20 can be used to move the magnetic plate 8 . It is possible to easily adjust the position of the vertical direction.

In this embodiment, the recesses 4g are formed at two locations spaced apart in the front-rear direction. Therefore, in this embodiment, it becomes easy to move the magnetic plate 8 in the vertical direction by using two jigs 20 that are arranged with an interval therebetween in the front-rear direction. Therefore, in this embodiment, the vertical position of the magnetic plate 8 can be adjusted more easily.

In this embodiment, the magnetic plate placement hole 4e is a through hole that penetrates the fixed body 4 in the vertical direction, and the concave portion 4g is formed over the entire area of the magnetic plate placement hole 4e in the vertical direction. Therefore, in this embodiment, as described above, even if the magnetic plate 8 is excessively moved upward in the magnetic plate position adjustment process, the jig 20 with the tip surface facing downward can be placed in the magnetic plate placement hole 4e. The jig 20 is inserted from above into the recesses 4g and 4j of the magnetic plate arrangement hole 4e, and the tip surface of the jig 20 is securely brought into contact with the upper end surface of the magnetic plate 8 before being fixed, which is arranged in the magnetic plate arrangement hole 4e. It becomes possible to return the magnetic plate 8 to the lower side.

In this embodiment, a recess 4j recessed leftward is formed in the left side surface 4h of the magnetic plate placement hole 4e. The recess 4j is formed at the same position as the recess 4g in the front-back direction, It is formed over the entire area of the magnetic plate placement hole 4e. Therefore, in this embodiment, even if the width of the magnetic plate arrangement hole 4e in the horizontal direction is narrow, the jig 20 can be inserted into the magnetic plate arrangement hole 4e using the concave portions 4g and 4j, and the magnetic plate 8 can be vertically moved. can be moved.

In this embodiment, the magnetic plate 9 is mounted on the magnetic plate mounting portion 4c of the fixed body 4 and positioned in the vertical direction, and the position of the magnetic plate 9 in the vertical direction is not adjusted. Therefore, in this embodiment, the manufacturing process of the actuator 1 can be simplified as compared with the case where the position of the magnetic plate 9 is adjusted in the vertical direction.

(Other embodiments)
The embodiment described above is an example of the preferred embodiment of the present invention, but the present invention is not limited to this, and various modifications can be made without departing from the gist of the present invention.

In the above embodiment, the recess 4g is formed over the entire area of the magnetic plate placement hole 4e in the vertical direction, but the recess 4g is fixed in the magnetic plate placement hole 4e at least from the lower end of the magnetic plate placement hole 4e. and a range from the upper end of the magnetic plate arrangement hole 4e to the upper end of the magnetic plate 8 fixed in the magnetic plate arrangement hole 4e. I wish I had.

In the embodiment described above, the entire magnetic plate arrangement hole 4e penetrates the fixed body 4 in the vertical direction, but only a part of the magnetic plate arrangement hole 4e may penetrate the fixed body 4 in the vertical direction. For example, as shown in FIG. 7, only the portions of the magnetic plate placement hole 4e where the recesses 4g and 4j are formed may penetrate through the fixed body 4 in the vertical direction. In this case, for example, the upper end of the portion of the magnetic plate arrangement hole 4e that penetrates in the vertical direction is a round hole, and the portion of the magnetic plate arrangement hole 4e that penetrates in the vertical direction is a circular hole. A jig 20 can be inserted from above the fixed body 4 to move the magnetic plate 8 downward. 7(B) is a cross-sectional view of the HH cross section of FIG. 7(A), and FIG. 7(C) is a cross-sectional view of the JJ cross section of FIG. 7(A).

If only a portion of the magnetic plate placement hole 4e penetrates the fixed body 4 in the vertical direction, recesses 4g and 4j are formed in the magnetic plate placement hole 4e, as shown in FIG. Only the part that is not covered may penetrate through the fixed body 4 in the vertical direction. In this case, for example, the upper end of the portion of the magnetic plate placement hole 4e that penetrates in the vertical direction is a round hole, and this portion has a recess 4p recessed to the right of the contact surface 4f. and a recessed portion 4r recessed leftward from the left side surface 4h.

Also in this case, it is possible to move the magnetic plate 8 downward by inserting the jig 20 from the upper side of the fixed body 4 into the vertically penetrating portion of the magnetic plate arrangement hole 4e. ing. In this case, the recess 4g may be formed over the entire area of the magnetic plate placement hole 4e in the vertical direction, but at least it is fixed in the magnetic plate placement hole 4e from the lower end of the magnetic plate placement hole 4e. It suffices if it is formed in a range up to the lower end of the magnetic plate 8 in the folded state. Note that FIG. 8B is a cross-sectional view taken along line KK of FIG. 8A.

In the embodiment described above, the magnetic plate placement hole 4e does not have to pass through the fixed body 4 in the vertical direction. In this case, the magnetic plate placement hole 4 e is formed, for example, so as to be recessed upward from the lower end of the fixed body 4 , and is open only at the lower end of the fixed body 4 . In this case, the recess 4g may be formed over the entire area of the magnetic plate placement hole 4e in the vertical direction, but the recess 4g extends at least from the lower end of the magnetic plate placement hole 4e to the magnetic plate placement hole 4e. It is sufficient that it is formed in a range up to the lower end of the magnetic plate 8 fixed in the hole 4e.

Further, when the magnetic plate arrangement hole 4e does not penetrate the fixed body 4 in the vertical direction, the magnetic plate arrangement hole 4e is formed so as to be recessed downward from the upper end of the fixed body 4. Only the upper end of 4 may be open. In this case, the upper side (Z1 direction side) is one side in the first direction, and the lower side (Z2 direction side) is the other side in the first direction.

In the embodiment described above, the jig 20 does not have to be cylindrical. For example, the jig 20 may be formed in a prism shape. In this case, the shape of the side surfaces of the recesses 4g and 4j when viewed from above and below is a shape corresponding to the shape of the jig 20. As shown in FIG. Moreover, in the above-described embodiment, the concave portions 4g and 4j may be formed at three or more locations with a space therebetween in the front-rear direction. Also, the recesses 4g and 4j may be formed only at one location.

In the above-described embodiment, the jig 20 can be inserted into the magnetic plate arranging hole 4e even if the width of the magnetic plate arranging hole 4e in the left-right direction is large and the concave portion 4j is not formed on the left side surface 4h. , the recess 4j may not be formed on the left side surface 4h. Further, the magnetic plate placement hole 4 e may be opened at the left end of the fixed body 4 . Further, in the embodiment described above, the actuator 1 does not have to include the magnetic plate 9 . In this case, when the drive coil 16 is not energized, the magnetic attraction force for holding the movable body 3 at a fixed position in the rotating direction of the movable body is generated by the magnetic plate 8 and the holding magnet 7. occur between

In the form described above, the holding magnet 7 may be fixed to the fixed body 4 and the magnetic plate 8 may be fixed to the movable body 3 . In this case, the movable body 3 is formed with a magnetic plate arrangement hole in which the magnetic plate 8 is arranged and fixed. Further, in the embodiment described above, the driving magnet 15 may be fixed to the fixed body 4 and the driving coil 16 and the magnetic plate 9 may be fixed to the movable body 3 . Furthermore, in the embodiment described above, the magnetic driving mechanism 5 may include a driving coil arranged to face the holding magnet 7 in addition to the driving coil 16 . In this case, the holding magnet 7 constitutes a part of the magnetic driving mechanism 5 and functions as a driving magnet.

In the form described above, the actuator 1 may be used by being mounted on a device other than a projector. In this case, optical elements other than the optical glass 2 may be held by the movable body 3 . For example, the movable body 3 may hold an optical element such as a lens, a prism, a reflector, or an optical filter. Also, the imaging device may be held by the movable body 3 . When the movable body 3 holds the imaging element, the actuator 1 is mounted on a camera, for example. An "optical element" in this specification also includes an imaging device.

1 actuator 2 optical glass (optical element)
3 Movable Body 4 Fixed Body 4c Magnetic Plate Mounting Part (Positioning Part)
4e Magnetic plate placement hole 4f Contact surface 4g Recess 4h Left side surface (surface on one side in the thickness direction of the magnetic plate placement hole)
4j recess (second recess)
5 magnetic drive mechanism 7 holding magnet 7a magnetized portion 8 magnetic plate 9 magnetic plate (second magnetic plate)
15 Drive magnet 15a Magnetized portion 16 Drive coil 20 Jig X Magnetic plate thickness direction X1 Thickness direction other side X2 Thickness direction one side Y Second direction Z First direction Z1 First direction other side Z2 one direction one side

Claims (6)

a movable body that holds an optical element; a fixed body that is formed in the shape of a frame in which the movable body is arranged on an inner peripheral side and rotatably holds the movable body; and the movable body with respect to the fixed body and a magnetic driving mechanism for rotating the movable body in a direction in which the movable body is tilted, and a magnetic drive mechanism for holding the movable body at a fixed position with respect to the fixed body in a rotating direction of the movable body relative to the fixed body. a holding magnet and a magnetic plate for
The magnetic drive mechanism includes a drive magnet and a drive coil arranged opposite to the drive magnet,
The holding magnet is fixed to one of the movable body and the fixed body,
The magnetic plate is formed in a flat plate shape and arranged on one side of the holding magnet in the thickness direction of the magnetic plate,
the other of the movable body and the fixed body is made of a non-magnetic material,
A magnetic plate placement hole in which the magnetic plate is placed and fixed is formed in the other of the movable body and the fixed body,
The holding magnet is composed of two magnetized portions polarized in a first direction perpendicular to the thickness direction of the magnetic plate,
When the drive coil is in a non-energized state, a magnetic attraction force is generated between the magnetic plate and the holding magnet for holding the movable body at a fixed position in the rotational direction of the movable body, and The position of the magnetic plate in the first direction defines the position of the movable body in the rotating direction of the movable body when the drive coil is in a non-energized state,
Assuming that one side in the first direction is the one side in the first direction and the other side in the first direction is the other side in the first direction,
the magnetic plate arrangement hole is open at least at one end in the first direction of the other of the movable body and the fixed body;
A surface of the magnetic plate arrangement hole on the side of the holding magnet serves as a contact surface with which the magnetic plate comes into contact due to a magnetic attraction force generated between the magnetic plate and the holding magnet,
The contact surface is formed with a recess that is recessed toward the holding magnet,
The concave portion is formed linearly from one side end of the magnetic plate arrangement hole toward the other side in the first direction, and is formed at least to the one side end of the magnetic plate in the first direction. An actuator characterized by: 2. The actuator according to claim 1, wherein the recessed portions are formed at a plurality of locations spaced apart in a second direction orthogonal to the thickness direction of the magnetic plate and the first direction. the magnetic plate arrangement hole is a through hole that penetrates the other of the movable body and the fixed body in the first direction;
3. The actuator according to claim 1, wherein the recess is formed over the entire area of the magnetic plate placement hole in the first direction. Assuming that one side in the thickness direction of the magnetic plate is one side in the thickness direction and the other side in the thickness direction of the magnetic plate is the other side in the thickness direction,
The surface of the magnetic plate placement hole on the other side in the thickness direction is the contact surface,
A second recess recessed toward the one side in the thickness direction is formed on the surface of the magnetic plate placement hole on the one side in the thickness direction,
The second recess is formed at the same position as the recess in a second direction orthogonal to the thickness direction of the magnetic plate and the first direction, and is formed in the same range as the recess in the first direction. 4. The actuator according to any one of claims 1 to 3, characterized in that: a flat second magnetic plate for holding the movable body at a fixed position with respect to the fixed body in the rotational direction of the movable body;
The driving magnet and the holding magnet are fixed to the movable body,
The drive coil, the magnetic plate and the second magnetic plate are fixed to the fixed body,
The driving magnet is composed of two magnetized portions polarized in the first direction,
When the drive coil is in a non-energized state, a magnetic attraction force is generated between the drive magnet and the second magnetic plate for holding the movable body at a fixed position in the rotational direction of the movable body. ,
5. The actuator according to claim 1, wherein the fixed body is formed with a positioning portion for positioning the second magnetic plate in the first direction. A method for manufacturing an actuator according to any one of claims 1 to 5,
A rod-shaped jig partly arranged in the recess is inserted into the magnetic plate arrangement hole from one side in the first direction, and the magnetic plate before being fixed is arranged in the magnetic plate arrangement hole. A magnetic plate position adjusting step of adjusting the position of the magnetic plate in the first direction by bringing the tip end face of the jig into contact with the end face on one side in the first direction to move the magnetic plate to the other side in the first direction. and a magnetic plate fixing step of fixing the magnetic plate in the magnetic plate placement hole after the magnetic plate position adjusting step.

Images