WO2022196440A1 - Optical element driving device - Google Patents

Optical element driving device Download PDF

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Publication number
WO2022196440A1
WO2022196440A1 PCT/JP2022/009989 JP2022009989W WO2022196440A1 WO 2022196440 A1 WO2022196440 A1 WO 2022196440A1 JP 2022009989 W JP2022009989 W JP 2022009989W WO 2022196440 A1 WO2022196440 A1 WO 2022196440A1
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WO
WIPO (PCT)
Prior art keywords
optical element
holding member
element holding
driving device
fixed
Prior art date
Application number
PCT/JP2022/009989
Other languages
French (fr)
Japanese (ja)
Inventor
潤 安藤
清行 伊藤
丈剛 村山
拓也 加藤
Original Assignee
アルプスアルパイン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アルプスアルパイン株式会社 filed Critical アルプスアルパイン株式会社
Priority to CN202280016618.XA priority Critical patent/CN116940891A/en
Priority to JP2023506995A priority patent/JP7467762B2/en
Publication of WO2022196440A1 publication Critical patent/WO2022196440A1/en

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B30/00—Camera modules comprising integrated lens units and imaging units, specially adapted for being embedded in other devices, e.g. mobile phones or vehicles
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B5/00—Adjustment of optical system relative to image or object surface other than for focusing
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules

Definitions

  • the present disclosure relates to an optical element driving device.
  • a lens driving device in which a movable part and a fixed part are connected by a suspension wire with four balls arranged between the movable part and the fixed part (see Patent Document 1).
  • the movable portion is arranged so as to be biased toward the fixed portion and come into contact with the fixed portion.
  • this lens driving device uses the frictional force acting between the ball and each of the fixed and movable parts when moving the movable part to which the lens is attached and converging it on the target position. Therefore, in this lens driving device, there is a possibility that the settling time, which is the time from when a command for moving the movable portion to the target position is input until the movable portion settles to the target position, becomes long. be.
  • an optical element driving device that can more quickly move an optical element such as a lens to a target position.
  • An optical element driving device comprises a stationary member including a base member, an optical element holding member disposed above the base member and capable of holding an optical element, the base member and the optical element. a support member arranged between the holding member; a biasing member that biases the optical element holding member downward; and a driving mechanism for moving along the optical element holding member, wherein the optical element holding member has a housing portion for housing a vibration damping member, and the fixed side member has a distal end portion inserted into the housing portion. and the distal end of the protrusion is in contact with the damping member provided in the housing.
  • the optical element driving device described above can move the optical element to the target position more quickly.
  • FIG. 1 is a perspective view of an optical element driving device;
  • FIG. 1 is an exploded perspective view of an optical element driving device;
  • FIG. 4 is an exploded perspective view of a lower member; It is an exploded perspective view of a movable side member.
  • FIG. 4 is a bottom perspective view of an optical element holding member to which a biasing member is attached; It is a lower perspective view of the optical element holding member to which a magnet is further attached. It is a lower perspective view of the optical element holding member to which the support member is further attached. It is an exploded perspective view of a fixed side member.
  • FIG. 3 is a perspective view of a biasing member, metal member, wire and base member; FIG.
  • FIG. 4 is a perspective view of a biasing member, metal members and wires; It is a left side view of the whole lower member. 4 is an enlarged view of a biasing member attached to the optical element holding member; FIG. It is a left side view of the whole lower member. It is a top view of an optical element drive.
  • 1 is a cross-sectional view of an optical element driving device;
  • FIG. 1 is a cross-sectional view of an optical element driving device;
  • FIG. FIG. 4 is a top view of a damping member, magnets, coils, and an insulating substrate;
  • FIG. 4 is a top view of an optical element holding member;
  • FIG. 11 is an exploded perspective view of another configuration example of the optical element driving device;
  • FIG. 11 is a perspective view of another configuration example of the base member;
  • FIG. 10 is a top view of another configuration example of the optical element holding member;
  • FIG. 11 is a top view of still another configuration example of the optical element holding member;
  • FIG. 1 is a perspective view of the optical element driving device 101.
  • FIG. FIG. 2 is an exploded perspective view of the optical element driving device 101 composed of the case 4 and the lower member LB, showing a state where the case 4 is separated from the lower member LB.
  • FIG. 3 is an exploded perspective view of the lower member LB, showing a state where the movable member MB is separated from the fixed member FB.
  • FIG. 4 is an exploded perspective view of the movable-side member MB.
  • 5A to 5C are bottom perspective views of the movable side member MB.
  • FIG. 6 is an exploded perspective view of the fixed member FB.
  • X1 represents one direction of the X-axis forming the three-dimensional orthogonal coordinate system
  • X2 represents the other direction of the X-axis
  • Y1 represents one direction of the Y-axis forming the three-dimensional orthogonal coordinate system
  • Y2 represents the other direction of the Y-axis
  • Z1 represents one direction of the Z-axis forming the three-dimensional orthogonal coordinate system
  • Z2 represents the other direction of the Z-axis.
  • the X1 side of the optical element driving device 101 corresponds to the front side (front side) of the optical element driving device 101
  • the X2 side of the optical element driving device 101 corresponds to the rear side of the optical element driving device 101. (back side).
  • the Y1 side of the optical element driving device 101 corresponds to the left side of the optical element driving device 101
  • the Y2 side of the optical element driving device 101 corresponds to the right side of the optical element driving device 101
  • the Z1 side of the optical element driving device 101 corresponds to the upper side of the optical element driving device 101 (object side)
  • the Z2 side of the optical element driving device 101 corresponds to the lower side of the optical element driving device 101 (image sensor side). corresponds to The same applies to other members in other drawings.
  • the optical element driving device 101 is a device for moving the optical element OE as shown in FIG. 2 on a virtual plane parallel to the XY plane.
  • the optical element OE is shown as having a substantially rectangular parallelepiped shape, but may have other shapes such as a cylindrical shape.
  • illustration of the optical element OE is omitted for clarity.
  • the optical element OE is a lens body, mirror, prism, optical filter, or the like.
  • the lens body is a cylindrical lens barrel with at least one lens.
  • the optical element OE is a lens body.
  • the optical element driving device 101 includes a case 4 and a lower member LB which are part of the fixed side member FB.
  • the case 4 is a cover member that covers the lower member LB.
  • the case 4 is produced by punching, drawing, and the like on a plate material formed of non-magnetic metal such as austenitic stainless steel. Since the case 4 is made of non-magnetic metal, the case 4 does not magnetically affect the drive mechanism DM and the like that use electromagnetic force.
  • the case 4 has a lidded rectangular cylindrical outer shape that defines the storage portion 4s.
  • the case 4 includes a substantially rectangular cylindrical outer wall portion 4A, and a substantially rectangular annular flat plate-shaped top plate portion provided so as to be continuous with the upper end (the end on the Z1 side) of the outer peripheral wall portion 4A. 4B and.
  • a substantially rectangular opening 4K is formed in the center of the top plate portion 4B.
  • the outer peripheral wall portion 4A includes a first side plate portion 4A1 to a fourth side plate portion 4A4.
  • the first side plate portion 4A1 and the third side plate portion 4A3 face each other, and the second side plate portion 4A2 and the fourth side plate portion 4A4 face each other.
  • the second side plate portion 4A2 and the fourth side plate portion 4A4 extend perpendicularly to the first side plate portion 4A1 and the third side plate portion 4A3. Further, as shown in FIG. 1, the case 4 is joined to the base member 18 with an adhesive to form a housing HS together with the base member 18. As shown in FIG.
  • the lower member LB as shown in FIG. 3, includes a wire 8, an insulating substrate 17, a base member 18, and a movable member MB, which are part of the fixed member FB.
  • the wire 8 is configured to movably support the movable member MB in the direction parallel to the XY plane with respect to the fixed member FB.
  • the wire 8 is a suspension wire made of a highly elastic metal material, and includes a first wire 8A to a fourth wire 8D.
  • each of the first wire 8A to the fourth wire 8D has its lower end (Z2 side end) fixed to the metal member 7 by soldering or adhesive or the like, and its upper end (Z1 side end) is fixed to the biasing member 6 by soldering, adhesive, or the like.
  • the metal member 7 is a member embedded in the base member 18 .
  • the movable-side member MB is supported by the first wire 8A to the fourth wire 8D so as to be movable in the X-axis direction and the Y-axis direction, which are parallel to the XY plane.
  • the insulating substrate 17 is a substrate on which a conductive pattern is formed.
  • the insulating substrate 17 may be any of a flexible printed circuit board, a rigid printed circuit board, and a flexible rigid printed circuit board.
  • the insulating substrate 17 is a multilayer substrate and includes the coil 9 that constitutes the drive mechanism DM.
  • the coil 9 is a film-type coil formed on the insulating substrate 17 by a conductive pattern, and includes first to fourth coils 9A to 9D, as shown in FIG.
  • the coil 9 may be of the wound type or of the laminated type.
  • the drive mechanism DM includes a first drive mechanism that moves the movable-side member MB along the X-axis direction, and a second drive mechanism that moves the movable-side member MB along the Y-axis direction.
  • the first drive mechanism includes a first coil 9A and a third coil 9C provided on the insulating substrate 17, a first magnet 5A that is spaced apart so as to face the first coil 9A in the Z-axis direction, and a Z and a third magnet 5C spaced apart so as to face the third coil 9C in the axial direction.
  • the second drive mechanism includes a second coil 9B and a fourth coil 9D provided on the insulating substrate 17, a second magnet 5B spaced apart so as to face the second coil 9B in the Z-axis direction, a Z and a fourth magnet 5D spaced apart so as to face the fourth coil 9D in the axial direction.
  • An optical element driving device 101 having a substantially rectangular parallelepiped shape is mounted on, for example, a main substrate (not shown).
  • the coil 9 is connected to a current supply source through the insulating substrate 17, the metal member 7 and the main substrate.
  • the driving mechanism DM When the coil 9 is energized, the driving mechanism DM generates an electromagnetic force along a direction parallel to the XY plane.
  • the optical element driving device 101 utilizes electromagnetic force along the direction parallel to the XY plane by the driving mechanism DM, and as the optical element OE along the direction parallel to the XY plane A shift function (camera shake correction function) can be realized by moving the lens.
  • the movable side member MB includes an optical element holding member 2, a damping member 3, a magnet 5, and a biasing member 6, as shown in FIG.
  • the damping member 3 is configured to suppress vibration of the movable member MB with respect to the fixed member FB.
  • the vibration damping member 3 is configured to elastically expand and contract according to the movement of the movable member MB with respect to the fixed member FB.
  • the damping member 3 is configured to suppress vibration of the movable member MB without affecting the original movement of the movable member MB.
  • the damping member 3 is a gel-like damper material formed by curing a fluid resin (adhesive) with ultraviolet light or heat.
  • the damping member 3 may be made of other materials such as thermosetting resin, UV-curable resin, thermosetting silicone rubber, or UV-curable silicone rubber.
  • the damping member 3 has a fine dot pattern for clarity. The same applies to other drawings.
  • the damping member 3 is held on the upper surface of the optical element holding member 2 so as to be movable together with the optical element holding member 2 that constitutes the movable member MB. It is arranged so as to contact a part of the case 4 that constitutes the fixed member FB.
  • the magnets 5 include first magnets 5A to fourth magnets 5D.
  • each of the first magnet 5A to the fourth magnet 5D is a rectangular parallelepiped permanent magnet magnetized to have two poles, the inner side being magnetized to the S pole and the outer side being magnetized to the N pole. ing.
  • FIG. 4 shows a cross pattern of the portion magnetized to the N pole.
  • Each of the first magnet 5A to the fourth magnet 5D is arranged apart from the coil 9 so as to face the coil 9 in the Z-axis direction.
  • Each of the first magnet 5A to the fourth magnet 5D may be magnetized with an N pole on the inside and an S pole on the outside.
  • the optical element holding member 2 is configured to hold the optical element OE and the magnet 5.
  • the optical element holding member 2 is formed by injection molding synthetic resin such as liquid crystal polymer (LCP).
  • LCP liquid crystal polymer
  • the optical element holding member 2 is a substantially rectangular annular frame body RF when viewed from above, and the first magnet 5A to the fourth magnet 5D are located below each of the four sides that constitute the frame body RF. placed. Each of the first magnet 5A to the fourth magnet 5D is fixed to the optical element holding member 2 with an adhesive.
  • the optical element holding member 2 includes a through hole 2K extending parallel to the Z axis.
  • the optical element OE is fixed to the inner peripheral surface of the through hole 2K with an adhesive.
  • a pedestal portion 2d is provided on the end face of the optical element holding member 2 on the subject side (Z1 side). As shown in FIG. 3, the inner portion 6i of the biasing member 6 is attached to the pedestal portion 2d.
  • a housing portion 2Q is provided on the end face of the optical element holding member 2 on the object side (Z1 side).
  • the damping member 3 is accommodated in the accommodating portion 2Q.
  • the housing portion 2Q is a concave portion recessed in the Z2 direction and includes a first housing portion 2Q1 to a fourth housing portion 2Q4.
  • a first damping member 3A is housed in the first housing portion 2Q1
  • a second damping member 3B is housed in the second housing portion 2Q2
  • a third damping member 3C is housed in the third housing portion 2Q3.
  • the fourth damping member 3D is accommodated in the fourth accommodation portion 2Q4.
  • the accommodating portion 2Q may be a through hole extending parallel to the Z-axis. Since the accommodation portion 2Q configured as a through hole allows air to flow out in the Z2 direction, it has the effect of facilitating the injection of the vibration damping member 3 (fluid adhesive) before hardening from the Z1 side. bring.
  • a concave portion 2R (see FIG. 5A) is provided on the end surface of the optical element holding member 2 on the imaging element side (Z2 side).
  • the magnet 5 is housed in the recess 2R.
  • the recess 2R includes a first recess 2R1 to a fourth recess 2R4.
  • the first recess 2R1 houses the first magnet 5A
  • the second recess 2R2 houses the second magnet 5B
  • the third recess 2R3 houses the third magnet 5C.
  • a fourth magnet 5D is accommodated in the fourth recess 2R4.
  • the optical element holding member 2 is provided with a rough dot pattern for clarity.
  • a circular concave portion 2S (see FIG. 5A) is provided on the end surface of the optical element holding member 2 on the imaging element side (Z2 side). The upper portion of the support member 11 is accommodated in the circular recess 2S.
  • the support member 11 is a member for supporting the optical element holding member 2 so that the optical element holding member 2 can move in the direction parallel to the XY plane.
  • the support member 11 is a metal ball having a spherical shape.
  • the support member 11 may be made of a material other than metal, such as resin or ceramics.
  • the support member 11 includes four balls (first ball 11A to fourth ball 11D).
  • the circular recess 2S includes a first circular recess 2S1 to a fourth circular recess 2S4. Then, as shown in FIG. 5C, the upper portion of the first ball 11A is accommodated in the first circular recess 2S1, the upper portion of the second ball 11B is accommodated in the second circular recess 2S2, and the third circular recess 2S1 accommodates the upper portion of the second ball 11B.
  • the recess 2S3 accommodates the upper portion of the third ball 11C, and the fourth circular recess 2S4 accommodates the upper portion of the fourth ball 11D.
  • the lower portions of the first to fourth balls 11A to 11D are accommodated in circular recesses 18S (see FIG. 6) formed on the upper surface of the base member 18. As shown in FIG.
  • the biasing member 6 is configured to bias the optical element holding member 2 downward.
  • the biasing member 6 is a leaf spring.
  • the leaf spring is made of a metal plate whose main material is, for example, a copper alloy, a titanium-copper alloy (titanium-copper), or a copper-nickel alloy (nickel-tin-copper).
  • the biasing member 6 is arranged on the end face of the optical element holding member 2 on the Z1 side, as shown in FIG.
  • the biasing member 6 has an inner portion 6i as a movable side support portion fixed to the optical element holding member 2 and an outer portion 6e as a fixed side support portion fixed to the fixed side member FB via the wire 8. and a resilient arm 6g located between the inner portion 6i and the outer portion 6e.
  • the inner portion 6i includes a first inner portion 6i1 to a fourth inner portion 6i4, the outer portion 6e includes a first outer portion 6e1 to a fourth outer portion 6e4, and the elastic arm portion 6g includes a fourth inner portion 6i1 to a fourth inner portion 6i4. It includes one elastic arm portion 6g1 to a fourth elastic arm portion 6g4.
  • a through hole 6x through which the upper end of the wire 8 is inserted and fixed is formed in the outer portion 6e.
  • the first outer portion 6e1 is formed with a first through hole 6x1 through which the upper end of the first wire 8A is inserted and fixed, and the second outer portion 6e2 is formed with the upper end of the second wire 8B.
  • a second through hole 6x2 is formed through which the part is inserted and fixed.
  • the third outer portion 6e3 is formed with a third through hole 6x3 through which the upper end of the third wire 8C is inserted and fixed, and the fourth outer portion 6e4 is formed with the upper end of the fourth wire 8D.
  • a fourth through hole 6x4 is formed to be inserted and fixed.
  • the upper end of the wire 8 and the outer portion 6e of the biasing member 6 are joined by solder.
  • the inner portion 6i is attached to the pedestal portion 2d (see FIG. 4) of the optical element holding member 2 as described above.
  • the inner portion 6i is fixed to the upper surface of the optical element holding member 2 (surface on the Z1 side).
  • a circular protruding portion 2t (see FIG. 4) that protrudes upward (in the Z1 direction) is formed.
  • Fixing of the inner portion 6i is realized by inserting the protrusion 2t into the through hole TH1 (see FIG. 4) formed in the inner portion 6i and applying an adhesive.
  • the fixing of the inner portion 6i may be achieved by inserting the protrusion 2t into the through hole TH1 formed in the inner portion 6i and performing hot crimping or cold crimping.
  • the insulating substrate 17 is a multi-layer substrate attached to the base member 18, and is configured to allow electrical connection between the coil 9 and the sensor 10 and the outside. Specifically, in addition to the conductive pattern connected to the coil 9, the insulating substrate 17 includes solder lands for mounting the sensor 10, conductive patterns, and the like (hereinafter referred to as "conductive patterns, etc.”). It is included. An opening 17K is formed in the center of the insulating substrate 17. As shown in FIG.
  • the base member 18 is formed by injection molding using synthetic resin such as liquid crystal polymer.
  • the base member 18 has a substantially rectangular contour in top view and has an opening 18K in the center.
  • the base member 18 is provided with a fine dot pattern for clarity.
  • An insulating substrate 17 is fixed to the upper surface of the base member 18 on the subject side (Z1 side surface) with an adhesive.
  • the opening 18K corresponds to the opening 17K formed in the insulating substrate 17.
  • a recess 18B for accommodating the sensor 10 is formed on the upper surface of the base member 18.
  • the recess 18B includes a first recess 18B1 and a second recess 18B2.
  • the sensor 10 is configured to detect the position of the movable side member MB.
  • a plurality of sensors 10 are provided so as to detect the displacement of the movable member MB in the X-axis direction and the displacement in the Y-axis direction.
  • the sensor 10 includes a first sensor 10A and a second sensor 10B.
  • the sensor 10 is accommodated in the recess 18B while attached to the lower side (Z2 side) of the insulating substrate 17.
  • the first sensor 10A is housed in the first recess 18B1
  • the second sensor 10B is housed in the second recess 18B2.
  • the senor 10 is composed of a Hall element, and by measuring the output voltage of the Hall element that changes according to the magnitude of the magnetic field from the magnet 5 received by the Hall element, the movable sensor including the magnet 5 is detected. It is configured to be able to detect the position of the side member MB.
  • the sensor 10 is a giant magneto-resistive effect (GMR) element, a semiconductor magneto-resistive (SMR) element, an anisotropic magneto-resistive (AMR) element, or a tunnel magneto-resistive (Tunnel Magneto Resistive: TMR) element or other magnetoresistive element may be used to detect the position of the movable side member MB.
  • GMR giant magneto-resistive effect
  • SMR semiconductor magneto-resistive
  • AMR anisotropic magneto-resistive
  • TMR tunnel magneto-resistive
  • a circular recess 18S for accommodating the support member 11 is formed on the upper surface of the base member 18. As shown in FIG. Specifically, at the four corners of the base member 18, there are four circular recesses 18S (first circular recess 18S1 to fourth circular recess 18S4) are formed.
  • the metal member 7 is embedded in the base member 18 by insert molding.
  • the metal member 7 is formed of, for example, a metal plate containing a material such as copper, iron, or an alloy containing them as a main component.
  • 7A and 7B are perspective views of biasing member 6, metal member 7, and wire 8.
  • FIG. 7A shows the relationship between the metal member 7 embedded in the base member 18 and the biasing member 6 and wire 8 .
  • FIG. 7B shows the relationship between the metal member 7 not embedded in the base member 18, the biasing member 6, and the wire 8.
  • the base member 18 is provided with a fine dot pattern for clarity.
  • the metal member 7 has a corner portion 7C exposed from the base member 18 and a connecting portion 7D that connects two adjacent corner portions 7C.
  • the corner 7C includes a first corner 7C1 to a fourth corner 7C4.
  • the connecting portion 7D includes a first connecting portion 7D1 connecting the first corner portion 7C1 and the second corner portion 7C2, a second connecting portion 7D2 connecting the second corner portion 7C2 and the third corner portion 7C3, and a third corner portion 7D2. It includes a third connecting portion 7D3 connecting the portion 7C3 and the fourth corner portion 7C4, and a fourth connecting portion 7D4 connecting the fourth corner portion 7C4 and the first corner portion 7C1.
  • the first wire 8A has its upper end joined to the first outer portion 6e1 of the biasing member 6 and its lower end joined to the first corner 7C1 of the metal member 7.
  • the second wire 8B has its upper end joined to the second outer portion 6e2 of the biasing member 6 and its lower end joined to the second corner 7C2 of the metal member 7.
  • the third wire 8C has its upper end joined to the third outer portion 6e3 of the biasing member 6 and its lower end joined to the third corner 7C3 of the metal member 7.
  • the fourth wire 8D has its upper end joined to the fourth outer portion 6e4 of the biasing member 6 and its lower end joined to the fourth corner 7C4 of the metal member 7. As shown in FIG.
  • FIGS. 8A to 8C are left side views of the lower member LB.
  • FIG. 8A is a left side view of the entire lower member LB, showing the state of the lower member LB when the optical element holding member 2 is in the initial state.
  • the initial state of the optical element holding member 2 means the state of the optical element holding member 2 when no current is supplied to the coil 9 .
  • FIG. 8B is an enlarged view of range R1 surrounded by a dashed line in FIG. 8A.
  • FIG. 8C is a left side view of the entire lower member LB, showing the state of the lower member LB when the optical element holding member 2 is displaced forward (X1 side) by a distance G2.
  • FIGS. 8A and 8C illustration of the insulating substrate 17 is omitted for clarity.
  • 8A to 8C a coarse dot pattern is applied to the optical element holding member 2, and a fine dot pattern is applied to the base member 18 in FIGS. 8A and 8C.
  • the biasing member 6 is The outer portion 6e is configured to be lower than the inner portion 6i in the vertical direction (Z-axis direction).
  • the third outer portion 6e3 of the biasing member 6 fixed to the third corner portion 7C3 of the metal member 7 via the third wire 8C is the third outer portion 6e3 of the biasing member 6. It is configured to be positioned lower (on the side of the base member 18) than the second inner portion 6i2 and the third inner portion 6i3 by a distance G1. That is, the third elastic arm portion 6g3 is configured to be in an elastically deformed state. The same applies to the first elastic arm portion 6g1, the second elastic arm portion 6g2, and the fourth elastic arm portion 6g4.
  • the biasing member 6 can press the optical element holding member 2 downward (Z2 direction) as indicated by the arrow AR1 regardless of whether the optical element holding member 2 is in the initial state. . Specifically, the optical element holding member 2 is pressed against the upper portion of the ball serving as the support member 11 whose lower portion is accommodated in the circular recess 18S formed on the upper surface of the base member 18 . Therefore, even when the optical element holding member 2 is displaced from the initial state, the biasing member 6 keeps the optical element holding member 2 and the support member 11 in contact with each other, It can maintain a stable contact state.
  • each of the first ball 11A to the fourth ball 11D forming the support member 11 is in a state of being able to roll in the direction parallel to the XY plane. It is sandwiched between the base member 18 and the base member 18 . Therefore, the optical element holding member 2 does not rotate (tilt) about the X axis and does not rotate (tilt) about the Y axis. It can translate along VP1. Mechanically, this parallel movement consists of elastic deformation of the elastic arm portion 6g of the biasing member 6, rolling of the first ball 11A to the fourth ball 11D, and movement of the first wire 8A as shown in FIG. 8C. to the bending of each of the fourth wires 8D.
  • Each of the first to fourth balls 11A to 11D forming the support member 11 rolls on one of the optical element holding member 2 and the base member 18 in a direction parallel to the XY plane. Instead, it may be sandwiched between the optical element holding member 2 and the base member 18 so as to be slidable and rotatable on the spot. Alternatively, each of the first ball 11A to the fourth ball 11D may be sandwiched between the optical element holding member 2 and the base member 18 in a rollable and slidably rotatable state. In these configurations as well, the optical element holding member 2 does not rotate (tilt) about the X-axis and rotate (tilt) about the Y-axis along the virtual plane VP1 parallel to the XY plane. Can move parallel.
  • FIGS. 9A to 9C are diagrams showing configuration examples of the optical element driving device 101.
  • FIG. 9A is a top view of the optical element driving device 101.
  • FIG. 9B is a cross-sectional view of the optical element driving device 101 viewed from the X1 side on a virtual plane parallel to the YZ plane including the dashed-dotted line L1 in FIG. 9A.
  • 9C is a cross-sectional view of the optical element driving device 101 viewed from the X1 side on a virtual plane parallel to the YZ plane including the dashed-dotted line L2 in FIG. 9A.
  • the vibration damping member 3 moving together with the optical element holding member 2 as the movable side member MB is arranged so as to come into contact with the protrusion 4T formed on the top plate portion 4B of the case 4 to hold the optical element. It is arranged in a housing portion 2Q (see FIG. 9B) formed on the upper surface of the member 2. As shown in FIG. 9A, the vibration damping member 3 moving together with the optical element holding member 2 as the movable side member MB is arranged so as to come into contact with the protrusion 4T formed on the top plate portion 4B of the case 4 to hold the optical element. It is arranged in a housing portion 2Q (see FIG. 9B) formed on the upper surface of the member 2. As shown in FIG.
  • the projecting portion 4T is composed of four bending pieces (first bending piece 4T1 to fourth bending piece 4T4) formed at the edge of the opening 4K in the center of the top plate portion 4B.
  • the second bending piece 4T2 is placed inside the second vibration damping member 3B accommodated in the second accommodating portion 2Q2 formed on the upper surface of the optical element holding member 2. It is configured such that the tip portion TP is inserted.
  • the fourth bending piece 4T4 is configured such that the distal end portion TP thereof enters the fourth damping member 3D accommodated in the fourth accommodation portion 2Q4 formed on the upper surface of the optical element holding member 2. there is The same applies to the first bent piece 4T1 and the third bent piece 4T3.
  • the drive mechanism DM displaces the optical element holding member 2 parallel to the virtual plane VP1 (see FIG. 8C) and positions it at the target position, the optical element holding member 2 is positioned at the target position. can be suppressed from vibrating with the center of vibration. Therefore, compared to the case without the vibration damping member 3, the optical element holding member 2 can be displaced from the current position to the target position after the current is supplied to the coil 9. It is possible to shorten the settling time, which is the time it takes to reach the target position.
  • FIG. 9C shows a state in which each of the first balls 11A and the second balls 11B constituting the support member 11 can roll in the direction parallel to the XY plane, and is positioned between the optical element holding member 2 and the base member 18. It shows a state sandwiched between. Specifically, FIG. 9C shows the inner bottom surface (Z1 side surface) of a circular recess 2S formed in the lower surface of the optical element holding member 2 and the inner bottom surface of a circular recess 18S formed in the upper surface of the base member 18. (the surface on the Z2 side) is a plane parallel to the XY plane.
  • FIG. 9C shows the inner bottom surface (Z1 side surface) of a circular recess 2S formed in the lower surface of the optical element holding member 2 and the inner bottom surface of a circular recess 18S formed in the upper surface of the base member 18. (the surface on the Z2 side) is a plane parallel to the XY plane.
  • FIG. 9C also shows that the diameter of the first ball 11A is smaller than the diameter of the first circular recess 2S1 and smaller than the diameter of the first circular recess 18S1 in the Y-axis direction.
  • FIG. 9C also shows that the diameter of the second ball 11B is smaller than the diameter of the second circular recess 2S2 and smaller than the diameter of the second circular recess 18S2 in the Y-axis direction.
  • FIG. 9C shows a configuration in which the first ball 11A and the second ball 11B are sandwiched between the optical element holding member 2 and the base member 18 in a state in which they can roll in directions parallel to the XY plane. is shown. The same applies to the third ball 11C and the fourth ball 11D.
  • the optical element driving device 101 can rotate (tilt) the optical element holding member 2 around the X-axis and rotate (tilt) the optical element holding member 2 around the Y-axis.
  • the optical element holding member 2 can be moved parallel to the XY plane with respect to the member 18 .
  • the optical element driving device 101 may move the optical element holding member 2 parallel to the XY plane with respect to the base member 18 while rotating the optical element holding member 2 around the Z axis.
  • FIG. 10 is a top view of the damping member 3, the magnet 5, the coil 9, and the insulating substrate 17, which are the components of the optical element driving device 101.
  • FIG. 10 illustration of components other than the damping member 3, the magnet 5, the coil 9, and the insulating substrate 17 is omitted for clarity.
  • the magnet 5 is indicated by a dashed line so that the state of the coil 9 located below the magnet 5 can be seen.
  • the drive mechanism DM includes a plurality of magnets 5 (first magnets 5A to 4th magnets 5D) fixed to the optical element holding member 2 (not shown in FIG. 10), and the magnets 5 so as to face the plurality of magnets 5. and a plurality of coils 9 (first coil 9A to fourth coil 9D) provided on an insulating substrate 17.
  • the damping member 3 is housed in a housing portion 2Q formed on the upper surface of the optical element holding member 2 so as to be positioned inside the magnet 5 when viewed from above.
  • the position inside the magnet 5 means a position closer to the central axis AX1 of the optical element holding member 2, which is the central axis of the optical element OE, than the magnet 5 is.
  • the first damping member 3A is arranged on the upper surface of the optical element holding member 2 so as to be positioned inside (the X2 side) of the first magnet 5A
  • the second damping member 3B is positioned inside the first magnet 5A. It is arranged on the upper surface of the optical element holding member 2 so as to be positioned inside (Y2 side) of 5B.
  • damping member 3 is arranged on the upper surface of the optical element holding member 2 so as to be positioned above the magnet 5 in a front view, as shown in FIG. 9B.
  • a position above the magnet 5 means a position higher than the magnet 5 in the Z-axis direction.
  • This configuration has the effect of preventing the size of the optical element driving device 101 from increasing due to the addition of the damping member 3 . This is because, in this configuration, the damping member 3 is attached to the existing structure of the optical element holding member 2 . That is, in this configuration, it is not necessary to add a structure for attaching the damping member 3 .
  • FIG. 11 is a top view of the optical element holding member 2.
  • the corner 2C of the optical element holding member 2 is provided with a dot pattern so that the corner 2C and the side 2E can be distinguished from each other.
  • the division between the corner portion 2C and the side portion 2E shown in FIG. 11 is an example, and the division may be made according to another criterion.
  • the four housing portions 2Q for housing the damping member 3 are configured to be symmetrical with respect to a virtual plane VP2 that includes the central axis AX1 of the optical element holding member 2 and is parallel to the YZ plane. It is Moreover, the four housing portions 2Q are configured to be symmetrical with respect to a virtual plane VP3 that includes the central axis AX1 of the optical element holding member 2 and is parallel to the XZ plane.
  • the optical element holding member 2 is a frame RF having four corners 2C (first corner 2C1 to fourth corner 2C4) and four sides 2E (first side 2E1 to fourth side 2E4). is configured to form Each of the four housing portions 2Q is arranged so as to be adjacent to the edge of the through hole 2K.
  • the first accommodating portion 2Q1 is provided in the inner portion (the portion on the X2 side) of the first side portion 2E1
  • the second accommodating portion 2Q2 is provided in the inner portion (the portion on the Y2 side) of the second side portion 2E2.
  • the third accommodation portion 2Q3 is provided in the inner portion (X1 side portion) of the third side portion 2E3
  • the fourth accommodation portion 2Q4 is provided in the inner portion (Y1 side portion) of the fourth side portion 2E4. ).
  • This configuration in which the four housing portions 2Q are provided in a well-balanced manner around the central axis AX1, is such that when the movable side member MB (optical element holding member 2) is displaced with respect to the fixed side member FB, the vibration damping member 3 is displaced. Undesirable force acting on the movable side member MB (optical element holding member 2) due to elastic deformation can be prevented.
  • housing portion 2Q may be provided on the outer side portion of the side portion 2E, or may be provided on the corner portion 2C. Moreover, two or more housing portions 2Q may be provided on one side portion 2E.
  • FIG. 12 is an exploded perspective view of the optical element driving device 101A.
  • the optical element driving device 101A is different from the optical element driving device 101 in that the biasing member 6 is configured to be directly attached to the base member 18 .
  • the optical element driving device 101 is configured such that the biasing member 6 is attached to the base member 18 via the wire 8 .
  • the base member 18 has four columnar portions 18P (first columnar portion 18P1 to fourth columnar portion 18P4) at four corners. is configured to
  • the biasing member 6 includes one inner portion 6i, four outer portions 6e (first outer portion 6e1 to fourth outer portion 6e4), and between the inner portion 6i and the four outer portions 6e. It is configured to have elastic arm portions 6g (first elastic arm portion 6g1 to fourth elastic arm portion 6g4).
  • FIG. 13 is a top perspective view of the base member 18 to which the biasing member 6 is attached. In FIG. 13, the base member 18 is marked with a dot pattern for clarity.
  • first outer portion 6e1 of the biasing member 6 is attached to the upper end surface of the first columnar portion 18P1
  • the second outer portion 6e2 of the biasing member 6 is attached to the upper end surface of the second columnar portion 18P2.
  • third outer portion 6e3 of the biasing member 6 is attached to the upper end surface of the third columnar portion 18P3
  • the fourth outer portion 6e4 of the biasing member 6 is attached to the upper end surface of the fourth columnar portion 18P4.
  • the fixing of the outer portion 6e to the upper end surface of the columnar portion 18P is achieved by inserting the protrusion 18t projecting upward from the upper end surface of the columnar portion 18P into the through hole TH2 (see FIG. 12) formed in the outer portion 6e. It is realized by applying an adhesive.
  • the fixing of the outer portion 6e to the upper end surface of the columnar portion 18P is realized by inserting the projection portion 18t into the through hole TH2 formed in the outer portion 6e and performing hot or cold crimping. good too.
  • the optical element driving device 101A can be manufactured with a smaller number of parts than the optical element driving device 101 while achieving the same effect as the optical element driving device 101.
  • the optical element driving device 101A has two projections 4T (a left bent piece 4TL and a right bent piece 4TR) formed on the case 4 and two damping members 3 provided on the optical element holding member 2. It differs from the optical element driving device 101 in this point.
  • the optical element driving device 101 has four protrusions 4T formed on the case 4 and four vibration damping members 3 provided on the optical element holding member 2 .
  • the damping member 3 includes a left damping member 3L provided on the upper surface of the second side portion 2E2 of the optical element holding member 2, and an optical damping member 3L. and a right damping member 3R provided on the upper surface of the fourth side portion 2E4 of the element holding member 2.
  • FIG. 14A the vibration damping member 3 is housed in a housing portion 2Q formed on the upper surface of the optical element holding member 2.
  • FIG. 14A and 14B are top views of the optical element holding member 2.
  • FIG. 14A is a top view of the optical element holding member 2 that constitutes the optical element driving device 101A.
  • FIG. 14B is a top view of another example of the optical element holding member 2 that constitutes the optical element driving device 101A.
  • the housing portion 2Q is formed on the left side housing portion 2QL formed on the upper surface of the second side portion 2E2 of the optical element holding member 2 and on the upper surface of the fourth side portion 2E4 of the optical element holding member 2. and a right accommodation portion 2QR.
  • the left accommodation portion 2QL is provided in the central portion of the second side portion 2E2
  • the right accommodation portion 2QR is provided in the central portion of the fourth side portion 2E4.
  • the left damping member 3L is housed in the left housing portion 2QL
  • the right damping member 3R is housed in the right housing portion 2QR.
  • the left damping member 3L and the right damping member 3R are symmetrical with respect to a virtual plane VP4 that includes the central axis AX1 of the optical element holding member 2 and is parallel to the YZ plane. It is configured to be symmetrical with respect to a virtual plane VP5 that includes AX1 and is parallel to the XZ plane.
  • This configuration in which the two accommodating portions 2Q are provided in a well-balanced manner with the central axis AX1 interposed therebetween, prevents the damping member 3 from vibrating when the movable side member MB (optical element holding member 2) is displaced with respect to the fixed side member FB. Undesirable force acting on the movable side member MB (optical element holding member 2) due to elastic deformation can be prevented.
  • the housing portion 2Q is configured to have a rectangular or elliptical outer shape when viewed from above, but is configured to have a circular or polygonal outer shape when viewed from above. may have been
  • the housing portion 2Q may be provided in a portion other than the central portion of the side portion 2E.
  • the housing portion 2Q may be provided on the inner portion of the side portion 2E or may be provided on the outer portion of the side portion 2E.
  • the accommodating part 2Q may be provided at the corner.
  • two or more housing portions 2Q may be provided on one side portion 2E.
  • the housing portion 2Q may be composed only of the rear housing portion 2QB formed on the upper surface of the third side portion 2E3 of the optical element holding member 2.
  • the optical element driving device 101 includes, for example, as shown in FIGS.
  • An optical element holding member 2 arranged above the member 18 and capable of holding the optical element OE, a support member 11 arranged between the base member 18 and the optical element holding member 2, and the optical element holding member 2 as a base.
  • the biasing member 6 that biases the member 18 side downward, and the optical element holding member 2 supported by the supporting member 11 are perpendicular to the vertical direction (the direction in which the base member 18 and the optical element holding member 2 face each other).
  • a driving mechanism DM for moving along a plane (virtual plane VP1 (see FIG. 8C) parallel to the XY plane orthogonal to the Z axis).
  • the drive mechanism DM is configured as an electromagnetic drive mechanism having at least a coil 9 and a magnet 5 in the example shown in FIG.
  • the optical element holding member 2 has an accommodating portion 2Q (see FIG. 4) that accommodates the damping member 3.
  • the case 4 that constitutes the fixed member FB has a projecting portion 4T whose tip portion TP is inserted into the accommodating portion 2Q. A tip portion TP of the projecting portion 4T is in contact with the damping member 3 provided in the housing portion 2Q.
  • the optical element driving device 101 can more quickly move the optical element OE to the target position. That is, the optical element driving device 101 can shorten the time until the displacement (movement) settles down when the optical element holding member 2 moves.
  • the damping member 3 can quickly converge the vibration of the optical element holding member 2 (optical element OE) about the target position when the optical element holding member 2 (optical element OE) is positioned at the target position. Because we can.
  • the fixed-side member FB desirably includes a housing HS (case 4) having an outer peripheral wall portion 4A and a top plate portion 4B.
  • the optical element holding member 2 is arranged inside the housing HS.
  • the housing portion 2Q formed on the upper surface of the optical element holding member 2 is open upward (on the side of the top plate portion 4B).
  • the projecting portion 4T is configured to extend downward (toward the base member 18 side) from the top plate portion 4B so that the tip portion TP is inserted into the housing portion 2Q.
  • This configuration ensures that the vibration damping member 3 is held in the housing portion 2Q, and can prevent the vibration damping member 3 from falling off from the optical element holding member 2.
  • the top plate portion 4B is desirably made of a metal plate and has an opening 4K.
  • the projecting portion 4T is configured by a bent piece that is bent at the edge of the opening 4K.
  • the protruding portion 4T includes first bending piece 4T1 to fourth bending piece 4T4.
  • This configuration has the effect of realizing a damping structure using the damping member 3 without excessively increasing the number of parts by using the existing member (case 4).
  • the drive mechanism DM desirably includes a plurality of magnets 5 fixed to the optical element holding member 2 and a plurality of coils 9 supported by the base member 18 so as to face the magnets 5 .
  • the accommodating portion 2Q is arranged inside the magnet 5 when viewed from above.
  • This configuration has the effect of suppressing an increase in the dimension of the driving mechanism DM in the Z-axis direction and realizing a thin optical element driving device 101 .
  • the optical element holding member 2 is configured to form a frame RF including four side portions 2E, as shown in FIG.
  • the accommodating portion 2Q is provided on each of the four side portions 2E.
  • the accommodation portion 2Q may be provided on one, two, or three of the four side portions 2E.
  • This configuration has the effect of suppressing an increase in the size of the optical element driving device 101 because the empty space in the side portion 2E of the optical element holding member 2 is used to form the housing portion 2Q.
  • the biasing member 6 is typically a leaf spring, and has an inner portion 6i as a movable side support portion fixed to the optical element holding member 2 and a fixed side support portion 6i fixed to the fixed side member FB. It includes an outer portion 6e and a resilient arm 6g located between the inner portion 6i and the outer portion 6e.
  • the outer portion 6e as a fixed-side support portion is fixed to the base member 18 via a suspension wire, or fixed directly to the base member 18.
  • the outer portion 6e is fixed to corners 7C of the metal member 7 embedded in the base member 18 via wires 8 as suspension wires.
  • the outer portion 6e is directly fixed to the columnar portion 18P of the base member 18 without suspension wires.
  • This configuration brings about the effect that the movable side member MB can be easily pressed downward by the leaf spring having a simple configuration.
  • the support member 11 is, for example, a plurality of balls arranged between the base member 18 and the optical element holding member 2.
  • the support member 11 includes a circular recess 2S (see FIG. 5A) formed in the lower surface of the optical element holding member 2 and a circular recess 18S formed in the upper surface of the base member 18 (see FIG. 6). ) and four balls (first ball 11A to fourth ball 11D).
  • This configuration has the effect of easily maintaining the distance between the movable-side member MB and the fixed-side member FB when the movable-side member MB moves in parallel with a ball having a simple configuration.
  • the lower end of the wire 8 is fixed to the corner 7C of the metal member 7 embedded in the base member 18. It may be fixed.
  • the accommodating portion 2Q for accommodating the damping member 3 is formed so as to open upward on the upper surface of the optical element holding member 2. It may be formed so as to open sideways.
  • the projecting portion 4T may be formed as a bent piece extending inward from the outer peripheral wall portion 4A of the case 4 .
  • the housing portion 2Q may be formed on the lower surface of the optical element holding member 2.
  • the projecting portion may be configured to extend upward from the upper surface of the base member 18 .
  • the support member 11 is configured using four balls, but may be configured using one or more shafts and one or more rails. It may be configured using
  • the optical element driving device 101 is configured so that the optical element holding member 2 can move in any direction along the virtual plane VP1 parallel to the XY plane. 2 may be configured so that the movement direction thereof is limited.
  • the optical element driving device 101 may be configured so that the optical element holding member 2 can move only in the X-axis direction, or can be configured so that the optical element holding member 2 can move only in the Y-axis direction. good too.
  • damping member 3A first damping member 3B ... second damping member 3C ... third damping member 3D ; fourth damping member 3L ... left damping member 3R ... right damping member 4 ...
  • Fourth outer part 6g Elastic arm 6g1... First elastic arm 6g2... Second elastic arm 6g3... Third elastic arm 6g4... Fourth elastic arm 6i... Inner portion 6i1... First inner part 6i2... Second inner part 6i3 ... third inner part 6i4 ... fourth inner part 6x ... through hole 6x1 ... first through hole 6x2 ... second through hole 6x3 ... third through hole 6x4 ... third 4 through holes 7... metal member 7C... corner 7C1... first corner 7C2... second corner 7C3... third corner 7C4... fourth corner 7D... ⁇ Connecting portion 7D1... First connecting portion 7 D2... second connecting part 7D3... third connecting part 7D4... fourth connecting part 8... wire 8A... first wire 8B...

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Lens Barrels (AREA)

Abstract

This optical element driving device (101) comprises: a fixed-side member (FB) including a base member (18); an optical element holding member (2) disposed above the base member (18) and capable of holding an optical element; a support member disposed between the base member (18) and the optical element holding member (2); a biasing member (6) which biases the optical element holding member (2) downward; and a driving mechanism for moving the optical element holding member (2) supported by the support member along a plane perpendicular to the vertical direction. The optical element holding member (2) has a receiving portion for receiving a vibration damping member (3). A case (4) serving as the fixed-side member (FB) has a protruding portion (4T) having a tip portion inserted into the receiving portion. The tip portion of the protruding portion (4T) is in contact with the vibration damping member (3) provided in the receiving portion.

Description

光学素子駆動装置Optical element driver
　本開示は、光学素子駆動装置に関する。 The present disclosure relates to an optical element driving device.
　従来、可動部と固定部との間に四つのボールが配置された状態で、可動部と固定部とがサスペンションワイヤによって連結されるレンズ駆動装置が知られている（特許文献１参照。）。このレンズ駆動装置では、可動部は、固定部側に付勢されて固定部に接触できるように配置されている。 Conventionally, there is known a lens driving device in which a movable part and a fixed part are connected by a suspension wire with four balls arranged between the movable part and the fixed part (see Patent Document 1). In this lens driving device, the movable portion is arranged so as to be biased toward the fixed portion and come into contact with the fixed portion.
特開２０１９－１５８９０６号公報JP 2019-158906 A
　しかしながら、このレンズ駆動装置は、レンズが取り付けられた可動部を移動させて目標位置に収束させる際に、ボールと固定部及び可動部のそれぞれとの間に作用する摩擦力を利用している。そのため、このレンズ駆動装置では、可動部を目標位置に移動させるための指令が入力されてから可動部がその目標位置に落ち着くまでの時間である整定時間（セトリングタイム）が長くなってしまうおそれがある。 However, this lens driving device uses the frictional force acting between the ball and each of the fixed and movable parts when moving the movable part to which the lens is attached and converging it on the target position. Therefore, in this lens driving device, there is a possibility that the settling time, which is the time from when a command for moving the movable portion to the target position is input until the movable portion settles to the target position, becomes long. be.
　そこで、レンズ等の光学素子をより迅速に目標位置に移動させることができる光学素子駆動装置を提供することが望ましい。 Therefore, it is desirable to provide an optical element driving device that can more quickly move an optical element such as a lens to a target position.
　本発明の実施形態に係る光学素子駆動装置は、ベース部材を含む固定側部材と、前記ベース部材の上方に配置され、光学素子を保持可能な光学素子保持部材と、前記ベース部材と前記光学素子保持部材との間に配置された支持部材と、前記光学素子保持部材を下側へ付勢する付勢部材と、前記支持部材に支持された前記光学素子保持部材を上下方向と直交する平面に沿って移動させる駆動機構と、を備えた光学素子駆動装置において、前記光学素子保持部材は、制振部材を収容する収容部を有し、前記固定側部材は、先端部が前記収容部に挿入される突出部を有し、前記突出部の前記先端部は、前記収容部に設けられた前記制振部材と接触している。 An optical element driving device according to an embodiment of the present invention comprises a stationary member including a base member, an optical element holding member disposed above the base member and capable of holding an optical element, the base member and the optical element. a support member arranged between the holding member; a biasing member that biases the optical element holding member downward; and a driving mechanism for moving along the optical element holding member, wherein the optical element holding member has a housing portion for housing a vibration damping member, and the fixed side member has a distal end portion inserted into the housing portion. and the distal end of the protrusion is in contact with the damping member provided in the housing.
　上述の光学素子駆動装置は、光学素子をより迅速に目標位置に移動させることができる。 The optical element driving device described above can move the optical element to the target position more quickly.
光学素子駆動装置の斜視図である。1 is a perspective view of an optical element driving device; FIG. 光学素子駆動装置の分解斜視図である。1 is an exploded perspective view of an optical element driving device; FIG. 下側部材の分解斜視図である。FIG. 4 is an exploded perspective view of a lower member; 可動側部材の分解斜視図である。It is an exploded perspective view of a movable side member. 付勢部材が取り付けられた光学素子保持部材の下方斜視図である。FIG. 4 is a bottom perspective view of an optical element holding member to which a biasing member is attached; 更に磁石が取り付けられた光学素子保持部材の下方斜視図である。It is a lower perspective view of the optical element holding member to which a magnet is further attached. 更に支持部材が取り付けられた光学素子保持部材の下方斜視図である。It is a lower perspective view of the optical element holding member to which the support member is further attached. 固定側部材の分解斜視図である。It is an exploded perspective view of a fixed side member. 付勢部材、金属部材、ワイヤ、及びベース部材の斜視図である。FIG. 3 is a perspective view of a biasing member, metal member, wire and base member; 付勢部材、金属部材、及びワイヤの斜視図である。FIG. 4 is a perspective view of a biasing member, metal members and wires; 下側部材の全体の左側面図である。It is a left side view of the whole lower member. 光学素子保持部材に取り付けられた付勢部材の拡大図である。4 is an enlarged view of a biasing member attached to the optical element holding member; FIG. 下側部材の全体の左側面図である。It is a left side view of the whole lower member. 光学素子駆動装置の上面図である。It is a top view of an optical element drive. 光学素子駆動装置の断面図である。1 is a cross-sectional view of an optical element driving device; FIG. 光学素子駆動装置の断面図である。1 is a cross-sectional view of an optical element driving device; FIG. 制振部材、磁石、コイル、及び絶縁基板の上面図である。FIG. 4 is a top view of a damping member, magnets, coils, and an insulating substrate; 光学素子保持部材の上面図である。FIG. 4 is a top view of an optical element holding member; 光学素子駆動装置の別の構成例の分解斜視図である。FIG. 11 is an exploded perspective view of another configuration example of the optical element driving device; ベース部材の別の構成例の斜視図である。FIG. 11 is a perspective view of another configuration example of the base member; 光学素子保持部材の別の構成例の上面図である。FIG. 10 is a top view of another configuration example of the optical element holding member; 光学素子保持部材の更に別の構成例の上面図である。FIG. 11 is a top view of still another configuration example of the optical element holding member;
　以下、本発明の実施形態に係る光学素子駆動装置１０１について図面を参照して説明する。図１は、光学素子駆動装置１０１の斜視図である。図２は、ケース４と下側部材ＬＢとで構成される光学素子駆動装置１０１の分解斜視図であり、ケース４が下側部材ＬＢから分離された状態を示す。図３は、下側部材ＬＢの分解斜視図であり、可動側部材ＭＢが固定側部材ＦＢから分離された状態を示す。図４は、可動側部材ＭＢの分解斜視図である。図５Ａ～図５Ｃは、可動側部材ＭＢの下方斜視図である。図６は、固定側部材ＦＢの分解斜視図である。 An optical element driving device 101 according to an embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view of the optical element driving device 101. FIG. FIG. 2 is an exploded perspective view of the optical element driving device 101 composed of the case 4 and the lower member LB, showing a state where the case 4 is separated from the lower member LB. FIG. 3 is an exploded perspective view of the lower member LB, showing a state where the movable member MB is separated from the fixed member FB. FIG. 4 is an exploded perspective view of the movable-side member MB. 5A to 5C are bottom perspective views of the movable side member MB. FIG. 6 is an exploded perspective view of the fixed member FB.
　図１～図６において、Ｘ１は、三次元直交座標系を構成するＸ軸の一方向を表し、Ｘ２は、Ｘ軸の他方向を表す。また、Ｙ１は、三次元直交座標系を構成するＹ軸の一方向を表し、Ｙ２は、Ｙ軸の他方向を表す。同様に、Ｚ１は、三次元直交座標系を構成するＺ軸の一方向を表し、Ｚ２は、Ｚ軸の他方向を表す。図１及び図２では、光学素子駆動装置１０１のＸ１側は、光学素子駆動装置１０１の前側（正面側）に相当し、光学素子駆動装置１０１のＸ２側は、光学素子駆動装置１０１の後側（背面側）に相当する。また、光学素子駆動装置１０１のＹ１側は、光学素子駆動装置１０１の左側に相当し、光学素子駆動装置１０１のＹ２側は、光学素子駆動装置１０１の右側に相当する。また、光学素子駆動装置１０１のＺ１側は、光学素子駆動装置１０１の上側（被写体側）に相当し、光学素子駆動装置１０１のＺ２側は、光学素子駆動装置１０１の下側（撮像素子側）に相当する。他の図における他の部材についても同様である。 1 to 6, X1 represents one direction of the X-axis forming the three-dimensional orthogonal coordinate system, and X2 represents the other direction of the X-axis. Y1 represents one direction of the Y-axis forming the three-dimensional orthogonal coordinate system, and Y2 represents the other direction of the Y-axis. Similarly, Z1 represents one direction of the Z-axis forming the three-dimensional orthogonal coordinate system, and Z2 represents the other direction of the Z-axis. 1 and 2, the X1 side of the optical element driving device 101 corresponds to the front side (front side) of the optical element driving device 101, and the X2 side of the optical element driving device 101 corresponds to the rear side of the optical element driving device 101. (back side). The Y1 side of the optical element driving device 101 corresponds to the left side of the optical element driving device 101 , and the Y2 side of the optical element driving device 101 corresponds to the right side of the optical element driving device 101 . The Z1 side of the optical element driving device 101 corresponds to the upper side of the optical element driving device 101 (object side), and the Z2 side of the optical element driving device 101 corresponds to the lower side of the optical element driving device 101 (image sensor side). corresponds to The same applies to other members in other drawings.
　光学素子駆動装置１０１は、ＸＹ平面に平行な仮想平面において図２に示すような光学素子ＯＥを移動させるための装置である。図２では、明瞭化のため、光学素子ＯＥは、略直方体形状を有するように表されているが、円柱形状等の他の形状を有していてもよい。また、図２以外の図では、明瞭化のため、光学素子ＯＥの図示は省略されている。光学素子ＯＥは、レンズ体、ミラー、プリズム、又は光学フィルタ等である。レンズ体は、少なくとも１枚のレンズを備えた筒状のレンズバレルである。本実施形態では、光学素子ＯＥは、レンズ体である。 The optical element driving device 101 is a device for moving the optical element OE as shown in FIG. 2 on a virtual plane parallel to the XY plane. In FIG. 2, for clarity, the optical element OE is shown as having a substantially rectangular parallelepiped shape, but may have other shapes such as a cylindrical shape. In the drawings other than FIG. 2, illustration of the optical element OE is omitted for clarity. The optical element OE is a lens body, mirror, prism, optical filter, or the like. The lens body is a cylindrical lens barrel with at least one lens. In this embodiment, the optical element OE is a lens body.
　光学素子駆動装置１０１は、図１及び図２に示すように、固定側部材ＦＢの一部であるケース４及び下側部材ＬＢを含んで構成されている。 As shown in FIGS. 1 and 2, the optical element driving device 101 includes a case 4 and a lower member LB which are part of the fixed side member FB.
　ケース４は、下側部材ＬＢを覆うカバー部材である。本実施形態では、ケース４は、オーステナイト系ステンレス鋼等の非磁性金属で形成された板材に抜き加工及び絞り加工等を施して作製されている。非磁性金属で形成されているため、ケース４は、電磁力を利用する駆動機構ＤＭ等に磁気的な悪影響を及ぼすことはない。 The case 4 is a cover member that covers the lower member LB. In this embodiment, the case 4 is produced by punching, drawing, and the like on a plate material formed of non-magnetic metal such as austenitic stainless steel. Since the case 4 is made of non-magnetic metal, the case 4 does not magnetically affect the drive mechanism DM and the like that use electromagnetic force.
　ケース４は、図２に示すように、収納部４ｓを定める有蓋矩形筒状の外形を有する。具体的には、ケース４は、略矩形筒状の外周壁部４Ａと、外周壁部４Ａの上端（Ｚ１側の端）と連続するように設けられた略矩形環状且つ平板状の天板部４Ｂと、を有する。天板部４Ｂの中央には、略矩形の開口４Ｋが形成されている。外周壁部４Ａは、第１側板部４Ａ１～第４側板部４Ａ４を含む。第１側板部４Ａ１と第３側板部４Ａ３とは互いに対向し、第２側板部４Ａ２と第４側板部４Ａ４とは互いに対向している。また、第２側板部４Ａ２及び第４側板部４Ａ４は、第１側板部４Ａ１及び第３側板部４Ａ３に対して垂直に延びる。また、ケース４は、図１に示すように、接着剤によってベース部材１８に接合されてベース部材１８とともに筐体ＨＳを構成する。 As shown in FIG. 2, the case 4 has a lidded rectangular cylindrical outer shape that defines the storage portion 4s. Specifically, the case 4 includes a substantially rectangular cylindrical outer wall portion 4A, and a substantially rectangular annular flat plate-shaped top plate portion provided so as to be continuous with the upper end (the end on the Z1 side) of the outer peripheral wall portion 4A. 4B and. A substantially rectangular opening 4K is formed in the center of the top plate portion 4B. The outer peripheral wall portion 4A includes a first side plate portion 4A1 to a fourth side plate portion 4A4. The first side plate portion 4A1 and the third side plate portion 4A3 face each other, and the second side plate portion 4A2 and the fourth side plate portion 4A4 face each other. The second side plate portion 4A2 and the fourth side plate portion 4A4 extend perpendicularly to the first side plate portion 4A1 and the third side plate portion 4A3. Further, as shown in FIG. 1, the case 4 is joined to the base member 18 with an adhesive to form a housing HS together with the base member 18. As shown in FIG.
　下側部材ＬＢは、図３に示すように、固定側部材ＦＢの一部であるワイヤ８、絶縁基板１７、及びベース部材１８と、可動側部材ＭＢと、を含む。 The lower member LB, as shown in FIG. 3, includes a wire 8, an insulating substrate 17, a base member 18, and a movable member MB, which are part of the fixed member FB.
　ワイヤ８は、固定側部材ＦＢに対して、ＸＹ平面に平行な方向に可動側部材ＭＢを移動可能に支持するように構成されている。本実施形態では、ワイヤ８は、弾性に優れた金属材料で形成されたサスペンションワイヤであり、第１ワイヤ８Ａ～第４ワイヤ８Ｄを含む。第１ワイヤ８Ａ～第４ワイヤ８Ｄのそれぞれは、図３に示すように、下端部（Ｚ２側の端部）が半田又は接着剤等によって金属部材７に固定され、且つ、上端部（Ｚ１側の端部）が半田又は接着剤等によって付勢部材６に固定される。金属部材７は、ベース部材１８に埋設された部材である。 The wire 8 is configured to movably support the movable member MB in the direction parallel to the XY plane with respect to the fixed member FB. In this embodiment, the wire 8 is a suspension wire made of a highly elastic metal material, and includes a first wire 8A to a fourth wire 8D. As shown in FIG. 3, each of the first wire 8A to the fourth wire 8D has its lower end (Z2 side end) fixed to the metal member 7 by soldering or adhesive or the like, and its upper end (Z1 side end) is fixed to the biasing member 6 by soldering, adhesive, or the like. The metal member 7 is a member embedded in the base member 18 .
　この構成により、可動側部材ＭＢは、第１ワイヤ８Ａ～第４ワイヤ８Ｄによって、ＸＹ平面に平行な方向であるＸ軸方向とＹ軸方向のそれぞれに移動可能に支持されている。 With this configuration, the movable-side member MB is supported by the first wire 8A to the fourth wire 8D so as to be movable in the X-axis direction and the Y-axis direction, which are parallel to the XY plane.
　絶縁基板１７は、導電パターンが形成された基板である。絶縁基板１７は、フレキシブルプリント基板、リジッドプリント基板、及びフレキシブルリジッドプリント基板の何れであってもよい。本実施形態では、絶縁基板１７は、多層基板であり、駆動機構ＤＭを構成するコイル９を含む。コイル９は、導電パターンによって絶縁基板１７に形成されたフィルムタイプのコイルであり、図３に示すように、第１コイル９Ａ～第４コイル９Ｄを含む。コイル９は、巻線タイプであってもよく、積層タイプであってもよい。 The insulating substrate 17 is a substrate on which a conductive pattern is formed. The insulating substrate 17 may be any of a flexible printed circuit board, a rigid printed circuit board, and a flexible rigid printed circuit board. In this embodiment, the insulating substrate 17 is a multilayer substrate and includes the coil 9 that constitutes the drive mechanism DM. The coil 9 is a film-type coil formed on the insulating substrate 17 by a conductive pattern, and includes first to fourth coils 9A to 9D, as shown in FIG. The coil 9 may be of the wound type or of the laminated type.
　駆動機構ＤＭは、Ｘ軸方向に沿って可動側部材ＭＢを移動させる第１駆動機構、及び、Ｙ軸方向に沿って可動側部材ＭＢを移動させる第２駆動機構を含む。 The drive mechanism DM includes a first drive mechanism that moves the movable-side member MB along the X-axis direction, and a second drive mechanism that moves the movable-side member MB along the Y-axis direction.
　第１駆動機構は、絶縁基板１７に設けられた第１コイル９Ａ及び第３コイル９Ｃと、Ｚ軸方向において第１コイル９Ａと対向するように離間して配置される第１磁石５Ａと、Ｚ軸方向において第３コイル９Ｃと対向するように離間して配置される第３磁石５Ｃと、を含む。 The first drive mechanism includes a first coil 9A and a third coil 9C provided on the insulating substrate 17, a first magnet 5A that is spaced apart so as to face the first coil 9A in the Z-axis direction, and a Z and a third magnet 5C spaced apart so as to face the third coil 9C in the axial direction.
　第２駆動機構は、絶縁基板１７に設けられた第２コイル９Ｂ及び第４コイル９Ｄと、Ｚ軸方向において第２コイル９Ｂと対向するように離間して配置される第２磁石５Ｂと、Ｚ軸方向において第４コイル９Ｄと対向するように離間して配置される第４磁石５Ｄと、を含む。 The second drive mechanism includes a second coil 9B and a fourth coil 9D provided on the insulating substrate 17, a second magnet 5B spaced apart so as to face the second coil 9B in the Z-axis direction, a Z and a fourth magnet 5D spaced apart so as to face the fourth coil 9D in the axial direction.
　略直方体形状を有する光学素子駆動装置１０１は、例えば、メイン基板（図示せず。）の上に取り付けられる。コイル９は、絶縁基板１７、金属部材７、及びメイン基板を介して電流供給源に接続される。コイル９に電流が流れると、駆動機構ＤＭは、ＸＹ平面に平行な方向に沿った電磁力を発生させる。 An optical element driving device 101 having a substantially rectangular parallelepiped shape is mounted on, for example, a main substrate (not shown). The coil 9 is connected to a current supply source through the insulating substrate 17, the metal member 7 and the main substrate. When the coil 9 is energized, the driving mechanism DM generates an electromagnetic force along a direction parallel to the XY plane.
　例えば、光学素子ＯＥがレンズである場合、光学素子駆動装置１０１は、駆動機構ＤＭによるＸＹ平面に平行な方向に沿った電磁力を利用し、ＸＹ平面に平行な方向に沿って光学素子ＯＥとしてのレンズを移動させることでシフト機能（手振れ補正機能）を実現できる。 For example, when the optical element OE is a lens, the optical element driving device 101 utilizes electromagnetic force along the direction parallel to the XY plane by the driving mechanism DM, and as the optical element OE along the direction parallel to the XY plane A shift function (camera shake correction function) can be realized by moving the lens.
　可動側部材ＭＢは、図４に示すように、光学素子保持部材２と、制振部材３と、磁石５と、付勢部材６と、を含む。 The movable side member MB includes an optical element holding member 2, a damping member 3, a magnet 5, and a biasing member 6, as shown in FIG.
　制振部材３は、固定側部材ＦＢに対する可動側部材ＭＢの振動を抑制できるように構成されている。制振部材３は、固定側部材ＦＢに対する可動側部材ＭＢの移動に応じて弾性的に伸縮できるように構成されている。本実施形態では、制振部材３は、可動側部材ＭＢの本来の動きに影響を与えることなく、可動側部材ＭＢの振動を抑制できるように構成されている。具体的には、制振部材３は、流動性のある樹脂（接着剤）を紫外線又は熱で硬化させることで形成されるゲル状ダンパー材である。制振部材３は、熱硬化性樹脂、紫外線硬化性樹脂、熱硬化性シリコーンゴム、又は紫外線硬化性シリコーンゴム等の他の材料で形成されてもよい。図４では、明瞭化のため、制振部材３に細かいドットパターンが付されている。他の図においても同様である。 The damping member 3 is configured to suppress vibration of the movable member MB with respect to the fixed member FB. The vibration damping member 3 is configured to elastically expand and contract according to the movement of the movable member MB with respect to the fixed member FB. In this embodiment, the damping member 3 is configured to suppress vibration of the movable member MB without affecting the original movement of the movable member MB. Specifically, the damping member 3 is a gel-like damper material formed by curing a fluid resin (adhesive) with ultraviolet light or heat. The damping member 3 may be made of other materials such as thermosetting resin, UV-curable resin, thermosetting silicone rubber, or UV-curable silicone rubber. In FIG. 4, the damping member 3 has a fine dot pattern for clarity. The same applies to other drawings.
　より具体的には、制振部材３は、可動側部材ＭＢを構成する光学素子保持部材２とともに移動できるように光学素子保持部材２の上面に保持された状態で、図１に示すように、固定側部材ＦＢを構成するケース４の一部と接触するように配置されている。 More specifically, as shown in FIG. 1, the damping member 3 is held on the upper surface of the optical element holding member 2 so as to be movable together with the optical element holding member 2 that constitutes the movable member MB. It is arranged so as to contact a part of the case 4 that constitutes the fixed member FB.
　磁石５は、第１磁石５Ａ～第４磁石５Ｄを含む。本実施形態では、第１磁石５Ａ～第４磁石５Ｄのそれぞれは、２極に着磁された直方体形状の永久磁石であり、内側がＳ極に着磁され、外側がＮ極に着磁されている。図４は、Ｎ極に着磁された部分をクロスパターンで示している。第１磁石５Ａ～第４磁石５Ｄのそれぞれは、Ｚ軸方向においてコイル９と対向するようにコイル９から離間して配置されている。第１磁石５Ａ～第４磁石５Ｄのそれぞれは、内側がＮ極に着磁され、外側がＳ極に着磁されていてもよい。 The magnets 5 include first magnets 5A to fourth magnets 5D. In this embodiment, each of the first magnet 5A to the fourth magnet 5D is a rectangular parallelepiped permanent magnet magnetized to have two poles, the inner side being magnetized to the S pole and the outer side being magnetized to the N pole. ing. FIG. 4 shows a cross pattern of the portion magnetized to the N pole. Each of the first magnet 5A to the fourth magnet 5D is arranged apart from the coil 9 so as to face the coil 9 in the Z-axis direction. Each of the first magnet 5A to the fourth magnet 5D may be magnetized with an N pole on the inside and an S pole on the outside.
　光学素子保持部材２は、光学素子ＯＥ及び磁石５を保持できるように構成されている。本実施形態では、光学素子保持部材２は、液晶ポリマー（ＬＣＰ）等の合成樹脂を射出成形することで形成されている。図４に示す例では、光学素子保持部材２は、上面視で略矩形環状の枠体ＲＦであり、枠体ＲＦを構成する四辺のそれぞれの下側に第１磁石５Ａ～第４磁石５Ｄが配置される。第１磁石５Ａ～第４磁石５Ｄは何れも、光学素子保持部材２に接着剤で固定されている。 The optical element holding member 2 is configured to hold the optical element OE and the magnet 5. In this embodiment, the optical element holding member 2 is formed by injection molding synthetic resin such as liquid crystal polymer (LCP). In the example shown in FIG. 4, the optical element holding member 2 is a substantially rectangular annular frame body RF when viewed from above, and the first magnet 5A to the fourth magnet 5D are located below each of the four sides that constitute the frame body RF. placed. Each of the first magnet 5A to the fourth magnet 5D is fixed to the optical element holding member 2 with an adhesive.
　具体的には、光学素子保持部材２は、図４に示すように、Ｚ軸に平行に延びるように形成された貫通孔２Ｋを含む。本実施形態では、光学素子ＯＥは、貫通孔２Ｋの内周面に接着剤で固定される。 Specifically, as shown in FIG. 4, the optical element holding member 2 includes a through hole 2K extending parallel to the Z axis. In this embodiment, the optical element OE is fixed to the inner peripheral surface of the through hole 2K with an adhesive.
　また、光学素子保持部材２の被写体側（Ｚ１側）の端面には台座部２ｄが設けられている。台座部２ｄには、図３に示すように、付勢部材６の内側部分６ｉが取り付けられる。 A pedestal portion 2d is provided on the end face of the optical element holding member 2 on the subject side (Z1 side). As shown in FIG. 3, the inner portion 6i of the biasing member 6 is attached to the pedestal portion 2d.
　また、光学素子保持部材２の被写体側（Ｚ１側）の端面には収容部２Ｑが設けられている。収容部２Ｑには、制振部材３が収容される。本実施形態では、収容部２Ｑは、Ｚ２方向に凹んだ凹部であり、第１収容部２Ｑ１～第４収容部２Ｑ４を含む。第１収容部２Ｑ１には、第１制振部材３Ａが収容され、第２収容部２Ｑ２には、第２制振部材３Ｂが収容され、第３収容部２Ｑ３には、第３制振部材３Ｃが収容され、第４収容部２Ｑ４には、第４制振部材３Ｄが収容される。なお、収容部２Ｑは、Ｚ軸に平行に延びる貫通孔であってもよい。貫通孔として構成される収容部２Ｑは、Ｚ２方向への空気の流出を可能にするため、硬化前の制振部材３（流動性のある接着剤）のＺ１側からの注入を促進できるという効果をもたらす。 In addition, a housing portion 2Q is provided on the end face of the optical element holding member 2 on the object side (Z1 side). The damping member 3 is accommodated in the accommodating portion 2Q. In the present embodiment, the housing portion 2Q is a concave portion recessed in the Z2 direction and includes a first housing portion 2Q1 to a fourth housing portion 2Q4. A first damping member 3A is housed in the first housing portion 2Q1, a second damping member 3B is housed in the second housing portion 2Q2, and a third damping member 3C is housed in the third housing portion 2Q3. is accommodated, and the fourth damping member 3D is accommodated in the fourth accommodation portion 2Q4. Note that the accommodating portion 2Q may be a through hole extending parallel to the Z-axis. Since the accommodation portion 2Q configured as a through hole allows air to flow out in the Z2 direction, it has the effect of facilitating the injection of the vibration damping member 3 (fluid adhesive) before hardening from the Z1 side. bring.
　また、光学素子保持部材２の撮像素子側（Ｚ２側）の端面には凹部２Ｒ（図５Ａ参照。）が設けられている。凹部２Ｒには、磁石５が収容される。本実施形態では、凹部２Ｒは、第１凹部２Ｒ１～第４凹部２Ｒ４を含む。図５Ｂに示すように、第１凹部２Ｒ１には、第１磁石５Ａが収容され、第２凹部２Ｒ２には、第２磁石５Ｂが収容され、第３凹部２Ｒ３には、第３磁石５Ｃが収容され、第４凹部２Ｒ４には、第４磁石５Ｄが収容される。なお、図５Ａ～図５Ｃでは、明瞭化のため、光学素子保持部材２には粗いドットパターンが付されている。 In addition, a concave portion 2R (see FIG. 5A) is provided on the end surface of the optical element holding member 2 on the imaging element side (Z2 side). The magnet 5 is housed in the recess 2R. In this embodiment, the recess 2R includes a first recess 2R1 to a fourth recess 2R4. As shown in FIG. 5B, the first recess 2R1 houses the first magnet 5A, the second recess 2R2 houses the second magnet 5B, and the third recess 2R3 houses the third magnet 5C. A fourth magnet 5D is accommodated in the fourth recess 2R4. 5A to 5C, the optical element holding member 2 is provided with a rough dot pattern for clarity.
　また、光学素子保持部材２の撮像素子側（Ｚ２側）の端面には円形凹部２Ｓ（図５Ａ参照。）が設けられている。円形凹部２Ｓには、支持部材１１の上側部分が収容される。 In addition, a circular concave portion 2S (see FIG. 5A) is provided on the end surface of the optical element holding member 2 on the imaging element side (Z2 side). The upper portion of the support member 11 is accommodated in the circular recess 2S.
　支持部材１１は、光学素子保持部材２がＸＹ平面に平行な方向に移動できるように光学素子保持部材２を支持するための部材である。本実施形態では、支持部材１１は、球形状を有する金属製のボールである。支持部材１１は、樹脂又はセラミックス等の金属以外の材料で形成されていてもよい。具体的には、支持部材１１は、四つのボール（第１ボール１１Ａ～第４ボール１１Ｄ）を含む。 The support member 11 is a member for supporting the optical element holding member 2 so that the optical element holding member 2 can move in the direction parallel to the XY plane. In this embodiment, the support member 11 is a metal ball having a spherical shape. The support member 11 may be made of a material other than metal, such as resin or ceramics. Specifically, the support member 11 includes four balls (first ball 11A to fourth ball 11D).
　より具体的には、円形凹部２Ｓは、第１円形凹部２Ｓ１～第４円形凹部２Ｓ４を含む。そして、図５Ｃに示すように、第１円形凹部２Ｓ１には、第１ボール１１Ａの上側部分が収容され、第２円形凹部２Ｓ２には、第２ボール１１Ｂの上側部分が収容され、第３円形凹部２Ｓ３には、第３ボール１１Ｃの上側部分が収容され、第４円形凹部２Ｓ４には、第４ボール１１Ｄの上側部分が収容される。なお、第１ボール１１Ａ～第４ボール１１Ｄのそれぞれの下側部分は、ベース部材１８の上面に形成された円形凹部１８Ｓ（図６参照。）に収容される。 More specifically, the circular recess 2S includes a first circular recess 2S1 to a fourth circular recess 2S4. Then, as shown in FIG. 5C, the upper portion of the first ball 11A is accommodated in the first circular recess 2S1, the upper portion of the second ball 11B is accommodated in the second circular recess 2S2, and the third circular recess 2S1 accommodates the upper portion of the second ball 11B. The recess 2S3 accommodates the upper portion of the third ball 11C, and the fourth circular recess 2S4 accommodates the upper portion of the fourth ball 11D. The lower portions of the first to fourth balls 11A to 11D are accommodated in circular recesses 18S (see FIG. 6) formed on the upper surface of the base member 18. As shown in FIG.
　付勢部材６は、光学素子保持部材２を下方に付勢するように構成されている。本実施形態では、付勢部材６は、板ばねである。板ばねは、例えば、銅合金、チタン銅系合金（チタン銅）、又は銅ニッケル合金（ニッケルすず銅）等を主な材料とした金属板から作製されている。 The biasing member 6 is configured to bias the optical element holding member 2 downward. In this embodiment, the biasing member 6 is a leaf spring. The leaf spring is made of a metal plate whose main material is, for example, a copper alloy, a titanium-copper alloy (titanium-copper), or a copper-nickel alloy (nickel-tin-copper).
　付勢部材６は、図３に示すように、光学素子保持部材２のＺ１側の端面に配置されている。そして、付勢部材６は、光学素子保持部材２に固定される可動側支持部としての内側部分６ｉと、ワイヤ８を介して固定側部材ＦＢに固定される固定側支持部としての外側部分６ｅと、内側部分６ｉと外側部分６ｅとの間に位置する弾性腕部６ｇと、を含む。 The biasing member 6 is arranged on the end face of the optical element holding member 2 on the Z1 side, as shown in FIG. The biasing member 6 has an inner portion 6i as a movable side support portion fixed to the optical element holding member 2 and an outer portion 6e as a fixed side support portion fixed to the fixed side member FB via the wire 8. and a resilient arm 6g located between the inner portion 6i and the outer portion 6e.
　具体的には、内側部分６ｉは、第１内側部分６ｉ１～第４内側部分６ｉ４を含み、外側部分６ｅは、第１外側部分６ｅ１～第４外側部分６ｅ４を含み、弾性腕部６ｇは、第１弾性腕部６ｇ１～第４弾性腕部６ｇ４を含む。 Specifically, the inner portion 6i includes a first inner portion 6i1 to a fourth inner portion 6i4, the outer portion 6e includes a first outer portion 6e1 to a fourth outer portion 6e4, and the elastic arm portion 6g includes a fourth inner portion 6i1 to a fourth inner portion 6i4. It includes one elastic arm portion 6g1 to a fourth elastic arm portion 6g4.
　外側部分６ｅには、ワイヤ８の上端部が挿通され且つ固定される貫通孔６ｘが形成されている。具体的には、第１外側部分６ｅ１には、第１ワイヤ８Ａの上端部が挿通され且つ固定される第１貫通孔６ｘ１が形成され、第２外側部分６ｅ２には、第２ワイヤ８Ｂの上端部が挿通され且つ固定される第２貫通孔６ｘ２が形成されている。同様に、第３外側部分６ｅ３には、第３ワイヤ８Ｃの上端部が挿通され且つ固定される第３貫通孔６ｘ３が形成され、第４外側部分６ｅ４には、第４ワイヤ８Ｄの上端部が挿通され且つ固定される第４貫通孔６ｘ４が形成されている。本実施形態では、ワイヤ８の上端部と付勢部材６の外側部分６ｅとは半田で接合されている。 A through hole 6x through which the upper end of the wire 8 is inserted and fixed is formed in the outer portion 6e. Specifically, the first outer portion 6e1 is formed with a first through hole 6x1 through which the upper end of the first wire 8A is inserted and fixed, and the second outer portion 6e2 is formed with the upper end of the second wire 8B. A second through hole 6x2 is formed through which the part is inserted and fixed. Similarly, the third outer portion 6e3 is formed with a third through hole 6x3 through which the upper end of the third wire 8C is inserted and fixed, and the fourth outer portion 6e4 is formed with the upper end of the fourth wire 8D. A fourth through hole 6x4 is formed to be inserted and fixed. In this embodiment, the upper end of the wire 8 and the outer portion 6e of the biasing member 6 are joined by solder.
　付勢部材６が光学素子駆動装置１０１に組み込まれた際には、内側部分６ｉは、上述のように、光学素子保持部材２の台座部２ｄ（図４参照。）に取り付けられる。そして、内側部分６ｉは、光学素子保持部材２の上面（Ｚ１側の面）に固定される。台座部２ｄの上面（Ｚ１側の面）には、上方（Ｚ１方向）に突出する丸形凸状の突起部２ｔ（図４参照。）が形成されている。内側部分６ｉの固定は、内側部分６ｉに形成された貫通孔ＴＨ１（図４参照。）に突起部２ｔが挿通され且つ接着剤が塗布されることによって実現される。なお、内側部分６ｉの固定は、内側部分６ｉに形成された貫通孔ＴＨ１に突起部２ｔが挿通され且つ熱かしめ又は冷間かしめが施されることによって実現されてもよい。 When the biasing member 6 is incorporated into the optical element driving device 101, the inner portion 6i is attached to the pedestal portion 2d (see FIG. 4) of the optical element holding member 2 as described above. The inner portion 6i is fixed to the upper surface of the optical element holding member 2 (surface on the Z1 side). On the upper surface (Z1 side surface) of the pedestal portion 2d, a circular protruding portion 2t (see FIG. 4) that protrudes upward (in the Z1 direction) is formed. Fixing of the inner portion 6i is realized by inserting the protrusion 2t into the through hole TH1 (see FIG. 4) formed in the inner portion 6i and applying an adhesive. The fixing of the inner portion 6i may be achieved by inserting the protrusion 2t into the through hole TH1 formed in the inner portion 6i and performing hot crimping or cold crimping.
　絶縁基板１７は、図６に示すように、ベース部材１８に取り付けられる多層基板であり、コイル９及びセンサ１０のそれぞれと外部との通電が可能となるように構成されている。具体的には、絶縁基板１７には、コイル９に接続される導電パターン以外にも、センサ１０を実装するための半田ランド及び導電パターン等（以下、「導電パターン等」とする。）の構成が含まれている。また、絶縁基板１７の中央には開口１７Ｋが形成されている。 As shown in FIG. 6, the insulating substrate 17 is a multi-layer substrate attached to the base member 18, and is configured to allow electrical connection between the coil 9 and the sensor 10 and the outside. Specifically, in addition to the conductive pattern connected to the coil 9, the insulating substrate 17 includes solder lands for mounting the sensor 10, conductive patterns, and the like (hereinafter referred to as "conductive patterns, etc."). It is included. An opening 17K is formed in the center of the insulating substrate 17. As shown in FIG.
　ベース部材１８は、液晶ポリマー等の合成樹脂を用いた射出成形によって形成される。本実施形態では、ベース部材１８は、図６に示すように、上面視で略矩形状の輪郭を有し、中央に開口１８Ｋを有する。なお、図６では、明瞭化のため、ベース部材１８には細かいドットパターンが付されている。ベース部材１８の被写体側の面（Ｚ１側の面）である上面には、接着剤により絶縁基板１７が固定される。開口１８Ｋは、絶縁基板１７に形成された開口１７Ｋに対応している。また、ベース部材１８の上面には、センサ１０を収容する凹部１８Ｂが形成されている。凹部１８Ｂは、第１凹部１８Ｂ１及び第２凹部１８Ｂ２を含む。 The base member 18 is formed by injection molding using synthetic resin such as liquid crystal polymer. In this embodiment, as shown in FIG. 6, the base member 18 has a substantially rectangular contour in top view and has an opening 18K in the center. In addition, in FIG. 6, the base member 18 is provided with a fine dot pattern for clarity. An insulating substrate 17 is fixed to the upper surface of the base member 18 on the subject side (Z1 side surface) with an adhesive. The opening 18K corresponds to the opening 17K formed in the insulating substrate 17. As shown in FIG. A recess 18B for accommodating the sensor 10 is formed on the upper surface of the base member 18. As shown in FIG. The recess 18B includes a first recess 18B1 and a second recess 18B2.
　センサ１０は、可動側部材ＭＢの位置を検出できるように構成されている。本実施形態では、センサ１０は、可動側部材ＭＢのＸ軸方向における変位とＹ軸方向における変位とを検出できるように複数設けられている。図６に示す例では、センサ１０は、第１センサ１０Ａと第２センサ１０Ｂとを含む。センサ１０は、絶縁基板１７の下側（Ｚ２側）に取り付けられた状態で凹部１８Ｂ内に収容される。具体的には、第１センサ１０Ａは第１凹部１８Ｂ１内に収容され、第２センサ１０Ｂは第２凹部１８Ｂ２内に収容される。 The sensor 10 is configured to detect the position of the movable side member MB. In this embodiment, a plurality of sensors 10 are provided so as to detect the displacement of the movable member MB in the X-axis direction and the displacement in the Y-axis direction. In the example shown in FIG. 6, the sensor 10 includes a first sensor 10A and a second sensor 10B. The sensor 10 is accommodated in the recess 18B while attached to the lower side (Z2 side) of the insulating substrate 17. As shown in FIG. Specifically, the first sensor 10A is housed in the first recess 18B1, and the second sensor 10B is housed in the second recess 18B2.
　図６に示す例では、センサ１０は、ホール素子で構成され、ホール素子が受ける磁石５からの磁界の大きさに応じて変化するホール素子の出力電圧を測定することで、磁石５を含む可動側部材ＭＢの位置を検出できるように構成されている。但し、センサ１０は、巨大磁気抵抗効果（Giant Magneto Resistive effect: GMR）素子、半導体磁気抵抗（Semiconductor Magneto Resistive: SMR）素子、異方性磁気抵抗（Anisotropic Magneto Resistive: AMR）素子、又はトンネル磁気抵抗（Tunnel Magneto Resistive: TMR）素子等の磁気抵抗素子を利用して可動側部材ＭＢの位置を検出するように構成されていてもよい。 In the example shown in FIG. 6, the sensor 10 is composed of a Hall element, and by measuring the output voltage of the Hall element that changes according to the magnitude of the magnetic field from the magnet 5 received by the Hall element, the movable sensor including the magnet 5 is detected. It is configured to be able to detect the position of the side member MB. However, the sensor 10 is a giant magneto-resistive effect (GMR) element, a semiconductor magneto-resistive (SMR) element, an anisotropic magneto-resistive (AMR) element, or a tunnel magneto-resistive (Tunnel Magneto Resistive: TMR) element or other magnetoresistive element may be used to detect the position of the movable side member MB.
　また、ベース部材１８の上面には、支持部材１１を収容する円形凹部１８Ｓが形成されている。具体的には、ベース部材１８の四隅には、四つの支持部材１１（第１ボール１１Ａ～第４ボール１１Ｄ）を収容するための四つの円形凹部１８Ｓ（第１円形凹部１８Ｓ１～第４円形凹部１８Ｓ４）が形成されている。 A circular recess 18S for accommodating the support member 11 is formed on the upper surface of the base member 18. As shown in FIG. Specifically, at the four corners of the base member 18, there are four circular recesses 18S (first circular recess 18S1 to fourth circular recess 18S4) are formed.
　また、ベース部材１８には、金属部材７がインサート成形によって埋め込まれている。金属部材７は、例えば、銅、鉄、又はそれらを主成分とする合金等の材料を含む金属板で形成される。図７Ａ及び図７Ｂは、付勢部材６、金属部材７、及びワイヤ８の斜視図である。具体的には、図７Ａは、ベース部材１８に埋め込まれた状態の金属部材７と、付勢部材６及びワイヤ８との関係を示す。図７Ｂは、ベース部材１８に埋め込まれていない状態の金属部材７と、付勢部材６及びワイヤ８との関係を示す。なお、図７Ａでは、明瞭化のため、ベース部材１８には細かいドットパターンが付されている。 Also, the metal member 7 is embedded in the base member 18 by insert molding. The metal member 7 is formed of, for example, a metal plate containing a material such as copper, iron, or an alloy containing them as a main component. 7A and 7B are perspective views of biasing member 6, metal member 7, and wire 8. FIG. Specifically, FIG. 7A shows the relationship between the metal member 7 embedded in the base member 18 and the biasing member 6 and wire 8 . FIG. 7B shows the relationship between the metal member 7 not embedded in the base member 18, the biasing member 6, and the wire 8. FIG. In addition, in FIG. 7A, the base member 18 is provided with a fine dot pattern for clarity.
　本実施形態では、金属部材７は、ベース部材１８から露出する角部７Ｃと、隣り合う二つの角部７Ｃを繋ぐ連結部７Ｄと、を有する。具体的には、角部７Ｃは、第１角部７Ｃ１～第４角部７Ｃ４を含む。連結部７Ｄは、第１角部７Ｃ１と第２角部７Ｃ２とを連結する第１連結部７Ｄ１、第２角部７Ｃ２と第３角部７Ｃ３とを連結する第２連結部７Ｄ２、第３角部７Ｃ３と第４角部７Ｃ４とを連結する第３連結部７Ｄ３、及び、第４角部７Ｃ４と第１角部７Ｃ１とを連結する第４連結部７Ｄ４を含む。 In this embodiment, the metal member 7 has a corner portion 7C exposed from the base member 18 and a connecting portion 7D that connects two adjacent corner portions 7C. Specifically, the corner 7C includes a first corner 7C1 to a fourth corner 7C4. The connecting portion 7D includes a first connecting portion 7D1 connecting the first corner portion 7C1 and the second corner portion 7C2, a second connecting portion 7D2 connecting the second corner portion 7C2 and the third corner portion 7C3, and a third corner portion 7D2. It includes a third connecting portion 7D3 connecting the portion 7C3 and the fourth corner portion 7C4, and a fourth connecting portion 7D4 connecting the fourth corner portion 7C4 and the first corner portion 7C1.
　第１ワイヤ８Ａは、上端部が付勢部材６の第１外側部分６ｅ１に接合され、下端部が金属部材７の第１角部７Ｃ１に接合されている。同様に、第２ワイヤ８Ｂは、上端部が付勢部材６の第２外側部分６ｅ２に接合され、下端部が金属部材７の第２角部７Ｃ２に接合されている。また、第３ワイヤ８Ｃは、上端部が付勢部材６の第３外側部分６ｅ３に接合され、下端部が金属部材７の第３角部７Ｃ３に接合されている。また、第４ワイヤ８Ｄは、上端部が付勢部材６の第４外側部分６ｅ４に接合され、下端部が金属部材７の第４角部７Ｃ４に接合されている。 The first wire 8A has its upper end joined to the first outer portion 6e1 of the biasing member 6 and its lower end joined to the first corner 7C1 of the metal member 7. As shown in FIG. Similarly, the second wire 8B has its upper end joined to the second outer portion 6e2 of the biasing member 6 and its lower end joined to the second corner 7C2 of the metal member 7. As shown in FIG. The third wire 8C has its upper end joined to the third outer portion 6e3 of the biasing member 6 and its lower end joined to the third corner 7C3 of the metal member 7. As shown in FIG. The fourth wire 8D has its upper end joined to the fourth outer portion 6e4 of the biasing member 6 and its lower end joined to the fourth corner 7C4 of the metal member 7. As shown in FIG.
　次に、図８Ａ～図８Ｃを参照し、付勢部材６の機能について説明する。図８Ａ～図８Ｃは、下側部材ＬＢの左側面図である。具体的には、図８Ａは、下側部材ＬＢの全体の左側面図であり、光学素子保持部材２が初期状態にあるときの下側部材ＬＢの状態を示す。光学素子保持部材２の初期状態は、コイル９に電流が供給されていないときの光学素子保持部材２の状態を意味する。図８Ｂは、図８Ａにおける破線で囲まれた範囲Ｒ１の拡大図である。図８Ｃは、下側部材ＬＢの全体の左側面図であり、光学素子保持部材２が前側（Ｘ１側）に距離Ｇ２だけ変位したときの下側部材ＬＢの状態を示す。なお、図８Ａ及び図８Ｃでは、明瞭化のため、絶縁基板１７の図示が省略されている。また、図８Ａ～図８Ｃでは光学素子保持部材２に粗いドットパターンが付され、図８Ａ及び図８Ｃではベース部材１８に細かいドットパターンが付されている。 Next, the function of the biasing member 6 will be described with reference to FIGS. 8A to 8C. 8A to 8C are left side views of the lower member LB. Specifically, FIG. 8A is a left side view of the entire lower member LB, showing the state of the lower member LB when the optical element holding member 2 is in the initial state. The initial state of the optical element holding member 2 means the state of the optical element holding member 2 when no current is supplied to the coil 9 . FIG. 8B is an enlarged view of range R1 surrounded by a dashed line in FIG. 8A. FIG. 8C is a left side view of the entire lower member LB, showing the state of the lower member LB when the optical element holding member 2 is displaced forward (X1 side) by a distance G2. 8A and 8C, illustration of the insulating substrate 17 is omitted for clarity. 8A to 8C, a coarse dot pattern is applied to the optical element holding member 2, and a fine dot pattern is applied to the base member 18 in FIGS. 8A and 8C.
　付勢部材６は、内側部分６ｉが可動側部材ＭＢ（光学素子保持部材２）に取り付けられ且つ外側部分６ｅがワイヤ８を介して固定側部材ＦＢ（金属部材７）に取り付けられたときに、上下方向（Ｚ軸方向）において外側部分６ｅが内側部分６ｉよりも低くなるように構成されている。 When the inner portion 6i is attached to the movable side member MB (optical element holding member 2) and the outer portion 6e is attached to the fixed side member FB (metal member 7) via the wire 8, the biasing member 6 is The outer portion 6e is configured to be lower than the inner portion 6i in the vertical direction (Z-axis direction).
　具体的には、図８Ｂに示すように、第３ワイヤ８Ｃを介して金属部材７の第３角部７Ｃ３に固定される付勢部材６の第３外側部分６ｅ３は、付勢部材６の第２内側部分６ｉ２及び第３内側部分６ｉ３よりも距離Ｇ１だけ下方（ベース部材１８側）に位置するように構成されている。すなわち、第３弾性腕部６ｇ３は、弾性的に変形した状態となるように構成されている。第１弾性腕部６ｇ１、第２弾性腕部６ｇ２、及び第４弾性腕部６ｇ４についても同様である。 Specifically, as shown in FIG. 8B, the third outer portion 6e3 of the biasing member 6 fixed to the third corner portion 7C3 of the metal member 7 via the third wire 8C is the third outer portion 6e3 of the biasing member 6. It is configured to be positioned lower (on the side of the base member 18) than the second inner portion 6i2 and the third inner portion 6i3 by a distance G1. That is, the third elastic arm portion 6g3 is configured to be in an elastically deformed state. The same applies to the first elastic arm portion 6g1, the second elastic arm portion 6g2, and the fourth elastic arm portion 6g4.
　この構成により、付勢部材６は、光学素子保持部材２が初期状態にあるか否かにかかわらず、矢印ＡＲ１で示すように、光学素子保持部材２を下方（Ｚ２方向）に押し付けることができる。具体的には、光学素子保持部材２は、ベース部材１８の上面に形成された円形凹部１８Ｓにその下側部分が収容されている支持部材１１としてのボールの上側部分に押し付けられる。そのため、付勢部材６は、光学素子保持部材２が初期状態から変位している場合であっても、光学素子保持部材２と支持部材１１とが接触し且つ支持部材１１とベース部材１８とが接触した状態を安定的に維持できる。 With this configuration, the biasing member 6 can press the optical element holding member 2 downward (Z2 direction) as indicated by the arrow AR1 regardless of whether the optical element holding member 2 is in the initial state. . Specifically, the optical element holding member 2 is pressed against the upper portion of the ball serving as the support member 11 whose lower portion is accommodated in the circular recess 18S formed on the upper surface of the base member 18 . Therefore, even when the optical element holding member 2 is displaced from the initial state, the biasing member 6 keeps the optical element holding member 2 and the support member 11 in contact with each other, It can maintain a stable contact state.
　図８Ａ～図８Ｃに示す例では、支持部材１１を構成している第１ボール１１Ａ～第４ボール１１Ｄのそれぞれは、ＸＹ平面に平行な方向に転動可能な状態で光学素子保持部材２とベース部材１８との間に挟持されている。そのため、光学素子保持部材２は、Ｘ軸回りに回転（傾斜）することなく、且つ、Ｙ軸回りに回転（傾斜）することなく、例えば矢印ＡＲ２で示すように、ＸＹ平面に平行な仮想平面ＶＰ１に沿って平行移動できる。この平行移動は、機械的には、付勢部材６の弾性腕部６ｇの弾性変形と、第１ボール１１Ａ～第４ボール１１Ｄのそれぞれの転動と、図８Ｃに示すような第１ワイヤ８Ａ～第４ワイヤ８Ｄのそれぞれの湾曲とによって実現される。なお、支持部材１１を構成している第１ボール１１Ａ～第４ボール１１Ｄのそれぞれは、光学素子保持部材２及びベース部材１８の一方に対しては、ＸＹ平面に平行な方向に転動することなく、その場で摺動回転可能な状態となるように、光学素子保持部材２とベース部材１８との間に挟持されていてもよい。或いは、第１ボール１１Ａ～第４ボール１１Ｄのそれぞれは、転動可能で且つ摺動回転可能な状態で、光学素子保持部材２とベース部材１８との間に挟持されていてもよい。これらの構成においても、光学素子保持部材２は、Ｘ軸回りに回転（傾斜）することなく、且つ、Ｙ軸回りに回転（傾斜）することなく、ＸＹ平面に平行な仮想平面ＶＰ１に沿って平行移動できる。 In the example shown in FIGS. 8A to 8C, each of the first ball 11A to the fourth ball 11D forming the support member 11 is in a state of being able to roll in the direction parallel to the XY plane. It is sandwiched between the base member 18 and the base member 18 . Therefore, the optical element holding member 2 does not rotate (tilt) about the X axis and does not rotate (tilt) about the Y axis. It can translate along VP1. Mechanically, this parallel movement consists of elastic deformation of the elastic arm portion 6g of the biasing member 6, rolling of the first ball 11A to the fourth ball 11D, and movement of the first wire 8A as shown in FIG. 8C. to the bending of each of the fourth wires 8D. Each of the first to fourth balls 11A to 11D forming the support member 11 rolls on one of the optical element holding member 2 and the base member 18 in a direction parallel to the XY plane. Instead, it may be sandwiched between the optical element holding member 2 and the base member 18 so as to be slidable and rotatable on the spot. Alternatively, each of the first ball 11A to the fourth ball 11D may be sandwiched between the optical element holding member 2 and the base member 18 in a rollable and slidably rotatable state. In these configurations as well, the optical element holding member 2 does not rotate (tilt) about the X-axis and rotate (tilt) about the Y-axis along the virtual plane VP1 parallel to the XY plane. Can move parallel.
　次に、図９Ａ～図９Ｃを参照し、可動側部材ＭＢとともに移動する制振部材３と固定側部材ＦＢとの関係について説明する。図９Ａ～図９Ｃは、光学素子駆動装置１０１の構成例を示す図である。具体的には、図９Ａは、光学素子駆動装置１０１の上面図である。図９Ｂは、図９Ａの一点鎖線Ｌ１を含むＹＺ平面に平行な仮想平面における、Ｘ１側から見た光学素子駆動装置１０１の断面図である。図９Ｃは、図９Ａの一点鎖線Ｌ２を含むＹＺ平面に平行な仮想平面における、Ｘ１側から見た光学素子駆動装置１０１の断面図である。 Next, with reference to FIGS. 9A to 9C, the relationship between the damping member 3 that moves together with the movable member MB and the fixed member FB will be described. 9A to 9C are diagrams showing configuration examples of the optical element driving device 101. FIG. Specifically, FIG. 9A is a top view of the optical element driving device 101. FIG. 9B is a cross-sectional view of the optical element driving device 101 viewed from the X1 side on a virtual plane parallel to the YZ plane including the dashed-dotted line L1 in FIG. 9A. 9C is a cross-sectional view of the optical element driving device 101 viewed from the X1 side on a virtual plane parallel to the YZ plane including the dashed-dotted line L2 in FIG. 9A.
　図９Ａに示すように、可動側部材ＭＢとしての光学素子保持部材２とともに移動する制振部材３は、ケース４の天板部４Ｂに形成された突出部４Ｔと接触するように、光学素子保持部材２の上面に形成された収容部２Ｑ（図９Ｂ参照。）内に配置されている。 As shown in FIG. 9A, the vibration damping member 3 moving together with the optical element holding member 2 as the movable side member MB is arranged so as to come into contact with the protrusion 4T formed on the top plate portion 4B of the case 4 to hold the optical element. It is arranged in a housing portion 2Q (see FIG. 9B) formed on the upper surface of the member 2. As shown in FIG.
　具体的には、突出部４Ｔは、天板部４Ｂの中央にある開口４Ｋの縁部に形成された四つの折り曲げ片（第１折り曲げ片４Ｔ１～第４折り曲げ片４Ｔ４）によって構成されている。 Specifically, the projecting portion 4T is composed of four bending pieces (first bending piece 4T1 to fourth bending piece 4T4) formed at the edge of the opening 4K in the center of the top plate portion 4B.
　より具体的には、図９Ｂに示すように、第２折り曲げ片４Ｔ２は、光学素子保持部材２の上面に形成された第２収容部２Ｑ２内に収容されている第２制振部材３Ｂ内にその先端部ＴＰが入り込むように構成されている。また、第４折り曲げ片４Ｔ４は、光学素子保持部材２の上面に形成された第４収容部２Ｑ４内に収容されている第４制振部材３Ｄ内にその先端部ＴＰが入り込むように構成されている。第１折り曲げ片４Ｔ１及び第３折り曲げ片４Ｔ３についても同様である。 More specifically, as shown in FIG. 9B, the second bending piece 4T2 is placed inside the second vibration damping member 3B accommodated in the second accommodating portion 2Q2 formed on the upper surface of the optical element holding member 2. It is configured such that the tip portion TP is inserted. In addition, the fourth bending piece 4T4 is configured such that the distal end portion TP thereof enters the fourth damping member 3D accommodated in the fourth accommodation portion 2Q4 formed on the upper surface of the optical element holding member 2. there is The same applies to the first bent piece 4T1 and the third bent piece 4T3.
　この構成により、制振部材３は、駆動機構ＤＭが光学素子保持部材２を仮想平面ＶＰ１（図８Ｃ参照。）に平行に変位させて目標位置に位置付けるときに、光学素子保持部材２が目標位置を振動中心として振動してしまうのを抑制することができる。そのため、制振部材３は、制振部材３がない場合に比べ、光学素子保持部材２を現在位置から目標位置に変位させるためにコイル９に電流が供給されてから光学素子保持部材２がその目標位置に落ち着くまでの時間である整定時間（セトリングタイム）を短縮できる。 With this configuration, when the drive mechanism DM displaces the optical element holding member 2 parallel to the virtual plane VP1 (see FIG. 8C) and positions it at the target position, the optical element holding member 2 is positioned at the target position. can be suppressed from vibrating with the center of vibration. Therefore, compared to the case without the vibration damping member 3, the optical element holding member 2 can be displaced from the current position to the target position after the current is supplied to the coil 9. It is possible to shorten the settling time, which is the time it takes to reach the target position.
　図９Ｃは、支持部材１１を構成している第１ボール１１Ａ及び第２ボール１１Ｂのそれぞれが、ＸＹ平面に平行な方向に転動可能な状態で光学素子保持部材２とベース部材１８との間に挟持された状態を示す。具体的には、図９Ｃは、光学素子保持部材２の下面に形成された円形凹部２Ｓの内底面（Ｚ１側の面）、及び、ベース部材１８の上面に形成された円形凹部１８Ｓの内底面（Ｚ２側の面）が何れもＸＹ平面に平行な平面であることを示している。また、図９Ｃは、Ｙ軸方向において、第１ボール１１Ａの直径が、第１円形凹部２Ｓ１の直径よりも小さく、且つ、第１円形凹部１８Ｓ１の直径よりも小さいことを示している。また、図９Ｃは、Ｙ軸方向において、第２ボール１１Ｂの直径が、第２円形凹部２Ｓ２の直径よりも小さく、且つ、第２円形凹部１８Ｓ２の直径よりも小さいことを示している。このように、図９Ｃは、第１ボール１１Ａ及び第２ボール１１ＢのそれぞれがＸＹ平面に平行な方向に転動可能な状態で光学素子保持部材２とベース部材１８との間に挟持される構成を示している。第３ボール１１Ｃ及び第４ボール１１Ｄについても同様である。この構成により、光学素子駆動装置１０１は、Ｘ軸回りに光学素子保持部材２を回転（傾斜）させることなく、且つ、Ｙ軸回りに光学素子保持部材２を回転（傾斜）させることなく、ベース部材１８に対して光学素子保持部材２をＸＹ平面に平行に移動させることができる。なお、光学素子駆動装置１０１は、Ｚ軸回りに光学素子保持部材２を回転させながら、ベース部材１８に対して光学素子保持部材２をＸＹ平面に平行に移動させてもよい。 FIG. 9C shows a state in which each of the first balls 11A and the second balls 11B constituting the support member 11 can roll in the direction parallel to the XY plane, and is positioned between the optical element holding member 2 and the base member 18. It shows a state sandwiched between. Specifically, FIG. 9C shows the inner bottom surface (Z1 side surface) of a circular recess 2S formed in the lower surface of the optical element holding member 2 and the inner bottom surface of a circular recess 18S formed in the upper surface of the base member 18. (the surface on the Z2 side) is a plane parallel to the XY plane. FIG. 9C also shows that the diameter of the first ball 11A is smaller than the diameter of the first circular recess 2S1 and smaller than the diameter of the first circular recess 18S1 in the Y-axis direction. FIG. 9C also shows that the diameter of the second ball 11B is smaller than the diameter of the second circular recess 2S2 and smaller than the diameter of the second circular recess 18S2 in the Y-axis direction. Thus, FIG. 9C shows a configuration in which the first ball 11A and the second ball 11B are sandwiched between the optical element holding member 2 and the base member 18 in a state in which they can roll in directions parallel to the XY plane. is shown. The same applies to the third ball 11C and the fourth ball 11D. With this configuration, the optical element driving device 101 can rotate (tilt) the optical element holding member 2 around the X-axis and rotate (tilt) the optical element holding member 2 around the Y-axis. The optical element holding member 2 can be moved parallel to the XY plane with respect to the member 18 . The optical element driving device 101 may move the optical element holding member 2 parallel to the XY plane with respect to the base member 18 while rotating the optical element holding member 2 around the Z axis.
　次に、図１０を参照し、制振部材３と磁石５及びコイル９との位置関係について説明する。図１０は、光学素子駆動装置１０１の構成要素である制振部材３、磁石５、コイル９、及び絶縁基板１７の上面図である。なお、図１０では、明瞭化のため、制振部材３、磁石５、コイル９、及び絶縁基板１７以外の構成要素の図示が省略されている。また、図１０では、磁石５の下方に位置するコイル９の状態が分かるように、磁石５は、破線で示されている。 Next, referring to FIG. 10, the positional relationship between the damping member 3 and the magnets 5 and coils 9 will be described. FIG. 10 is a top view of the damping member 3, the magnet 5, the coil 9, and the insulating substrate 17, which are the components of the optical element driving device 101. FIG. 10, illustration of components other than the damping member 3, the magnet 5, the coil 9, and the insulating substrate 17 is omitted for clarity. Also, in FIG. 10, the magnet 5 is indicated by a dashed line so that the state of the coil 9 located below the magnet 5 can be seen.
　駆動機構ＤＭは、光学素子保持部材２（図１０では図示せず。）に固定された複数の磁石５（第１磁石５Ａ～第４磁石５Ｄ）と、それら複数の磁石５と対向するように絶縁基板１７に設けられた複数のコイル９（第１コイル９Ａ～第４コイル９Ｄ）と、を含んで構成されている。 The drive mechanism DM includes a plurality of magnets 5 (first magnets 5A to 4th magnets 5D) fixed to the optical element holding member 2 (not shown in FIG. 10), and the magnets 5 so as to face the plurality of magnets 5. and a plurality of coils 9 (first coil 9A to fourth coil 9D) provided on an insulating substrate 17.
　そして、制振部材３は、上面視において磁石５の内側に位置するように、光学素子保持部材２の上面に形成された収容部２Ｑ内に収容されている。磁石５の内側の位置は、磁石５よりも光学素子ＯＥの中心軸である光学素子保持部材２の中心軸ＡＸ１に近い位置を意味する。 The damping member 3 is housed in a housing portion 2Q formed on the upper surface of the optical element holding member 2 so as to be positioned inside the magnet 5 when viewed from above. The position inside the magnet 5 means a position closer to the central axis AX1 of the optical element holding member 2, which is the central axis of the optical element OE, than the magnet 5 is.
　具体的には、第１制振部材３Ａは、第１磁石５Ａの内側（Ｘ２側）に位置するように光学素子保持部材２の上面に配置され、第２制振部材３Ｂは、第２磁石５Ｂの内側（Ｙ２側）に位置するように光学素子保持部材２の上面に配置されている。第３制振部材３Ｃ及び第４制振部材３Ｄについても同様である。 Specifically, the first damping member 3A is arranged on the upper surface of the optical element holding member 2 so as to be positioned inside (the X2 side) of the first magnet 5A, and the second damping member 3B is positioned inside the first magnet 5A. It is arranged on the upper surface of the optical element holding member 2 so as to be positioned inside (Y2 side) of 5B. The same applies to the third damping member 3C and the fourth damping member 3D.
　なお、制振部材３は、図９Ｂに示すように、正面視において磁石５の上側に位置するように光学素子保持部材２の上面に配置されている。磁石５の上側の位置は、Ｚ軸方向において磁石５よりも高い位置を意味する。 Note that the damping member 3 is arranged on the upper surface of the optical element holding member 2 so as to be positioned above the magnet 5 in a front view, as shown in FIG. 9B. A position above the magnet 5 means a position higher than the magnet 5 in the Z-axis direction.
　この構成は、制振部材３を追加することによって光学素子駆動装置１０１のサイズが大きくなってしまうのを防止できるという効果をもたらす。この構成では、光学素子保持部材２における既存の構造上に制振部材３が取り付けられるためである。すなわち、この構成では、制振部材３を取り付けるための構造を追加する必要がないためである。 This configuration has the effect of preventing the size of the optical element driving device 101 from increasing due to the addition of the damping member 3 . This is because, in this configuration, the damping member 3 is attached to the existing structure of the optical element holding member 2 . That is, in this configuration, it is not necessary to add a structure for attaching the damping member 3 .
　次に、図１１を参照し、光学素子保持部材２における収容部２Ｑの配置について説明する。図１１は、光学素子保持部材２の上面図である。図１１では、光学素子保持部材２の角部２Ｃと辺部２Ｅとが区別できるように、角部２Ｃにドットパターンが付されている。なお、図１１に示す角部２Ｃと辺部２Ｅとの区分は一例であり、別の基準で区分されていてもよい。 Next, with reference to FIG. 11, the arrangement of the housing portion 2Q in the optical element holding member 2 will be described. FIG. 11 is a top view of the optical element holding member 2. FIG. In FIG. 11, the corner 2C of the optical element holding member 2 is provided with a dot pattern so that the corner 2C and the side 2E can be distinguished from each other. Note that the division between the corner portion 2C and the side portion 2E shown in FIG. 11 is an example, and the division may be made according to another criterion.
　図１１に示す例では、制振部材３を収容するための四つの収容部２Ｑは、光学素子保持部材２の中心軸ＡＸ１を含みＹＺ平面に平行な仮想平面ＶＰ２に関して面対称となるように構成されている。また、四つの収容部２Ｑは、光学素子保持部材２の中心軸ＡＸ１を含みＸＺ平面に平行な仮想平面ＶＰ３に関して面対称となるように構成されている。 In the example shown in FIG. 11, the four housing portions 2Q for housing the damping member 3 are configured to be symmetrical with respect to a virtual plane VP2 that includes the central axis AX1 of the optical element holding member 2 and is parallel to the YZ plane. It is Moreover, the four housing portions 2Q are configured to be symmetrical with respect to a virtual plane VP3 that includes the central axis AX1 of the optical element holding member 2 and is parallel to the XZ plane.
　光学素子保持部材２は、四つの角部２Ｃ（第１角部２Ｃ１～第４角部２Ｃ４）と四つの辺部２Ｅ（第１辺部２Ｅ１～第４辺部２Ｅ４）とを有する枠体ＲＦを形成するように構成されている。そして、四つの収容部２Ｑは何れも貫通孔２Ｋの縁に隣接するように配置されている。具体的には、第１収容部２Ｑ１は、第１辺部２Ｅ１の内側部分（Ｘ２側の部分）に設けられ、第２収容部２Ｑ２は、第２辺部２Ｅ２の内側部分（Ｙ２側の部分）に設けられ、第３収容部２Ｑ３は、第３辺部２Ｅ３の内側部分（Ｘ１側の部分）に設けられ、第４収容部２Ｑ４は、第４辺部２Ｅ４の内側部分（Ｙ１側の部分）に設けられている。 The optical element holding member 2 is a frame RF having four corners 2C (first corner 2C1 to fourth corner 2C4) and four sides 2E (first side 2E1 to fourth side 2E4). is configured to form Each of the four housing portions 2Q is arranged so as to be adjacent to the edge of the through hole 2K. Specifically, the first accommodating portion 2Q1 is provided in the inner portion (the portion on the X2 side) of the first side portion 2E1, and the second accommodating portion 2Q2 is provided in the inner portion (the portion on the Y2 side) of the second side portion 2E2. ), the third accommodation portion 2Q3 is provided in the inner portion (X1 side portion) of the third side portion 2E3, and the fourth accommodation portion 2Q4 is provided in the inner portion (Y1 side portion) of the fourth side portion 2E4. ).
　四つの収容部２Ｑが中心軸ＡＸ１の回りにバランス良く設けられたこの構成は、固定側部材ＦＢに対して可動側部材ＭＢ（光学素子保持部材２）が変位したときに、制振部材３の弾性変形によって可動側部材ＭＢ（光学素子保持部材２）に不所望の力が作用してしまうのを防止できる。 This configuration, in which the four housing portions 2Q are provided in a well-balanced manner around the central axis AX1, is such that when the movable side member MB (optical element holding member 2) is displaced with respect to the fixed side member FB, the vibration damping member 3 is displaced. Undesirable force acting on the movable side member MB (optical element holding member 2) due to elastic deformation can be prevented.
　なお、収容部２Ｑは、辺部２Ｅの外側部分に設けられていてもよく、角部２Ｃに設けられていてもよい。また、収容部２Ｑは、一つの辺部２Ｅに二つ以上設けられていてもよい。 Note that the housing portion 2Q may be provided on the outer side portion of the side portion 2E, or may be provided on the corner portion 2C. Moreover, two or more housing portions 2Q may be provided on one side portion 2E.
　次に、図１２を参照し、光学素子駆動装置１０１の別の構成例である光学素子駆動装置１０１Ａについて説明する。図１２は、光学素子駆動装置１０１Ａの分解斜視図である。 Next, an optical element driving device 101A, which is another configuration example of the optical element driving device 101, will be described with reference to FIG. FIG. 12 is an exploded perspective view of the optical element driving device 101A.
　光学素子駆動装置１０１Ａは、付勢部材６がベース部材１８に直接取り付けられるように構成されている点で、光学素子駆動装置１０１と異なる。この点に関し、光学素子駆動装置１０１は、付勢部材６がワイヤ８を介してベース部材１８に取り付けられるように構成されている。 The optical element driving device 101A is different from the optical element driving device 101 in that the biasing member 6 is configured to be directly attached to the base member 18 . In this regard, the optical element driving device 101 is configured such that the biasing member 6 is attached to the base member 18 via the wire 8 .
　具体的には、光学素子駆動装置１０１Ａでは、ベース部材１８は、図１３に示すように、四つの角部に四つの柱状部１８Ｐ（第１柱状部１８Ｐ１～第４柱状部１８Ｐ４）を有するように構成されている。また、付勢部材６は、一つの内側部分６ｉと、四つの外側部分６ｅ（第１外側部分６ｅ１～第４外側部分６ｅ４）と、内側部分６ｉと四つの外側部分６ｅのそれぞれとの間に位置する弾性腕部６ｇ（第１弾性腕部６ｇ１～第４弾性腕部６ｇ４）とを有するように構成されている。図１３は、付勢部材６が取り付けられたベース部材１８の上方斜視図である。図１３では、明瞭化のため、ベース部材１８にドットパターンが付されている。 Specifically, in the optical element driving device 101A, as shown in FIG. 13, the base member 18 has four columnar portions 18P (first columnar portion 18P1 to fourth columnar portion 18P4) at four corners. is configured to In addition, the biasing member 6 includes one inner portion 6i, four outer portions 6e (first outer portion 6e1 to fourth outer portion 6e4), and between the inner portion 6i and the four outer portions 6e. It is configured to have elastic arm portions 6g (first elastic arm portion 6g1 to fourth elastic arm portion 6g4). FIG. 13 is a top perspective view of the base member 18 to which the biasing member 6 is attached. In FIG. 13, the base member 18 is marked with a dot pattern for clarity.
　より具体的には、付勢部材６の第１外側部分６ｅ１は、第１柱状部１８Ｐ１の上端面に取り付けられ、付勢部材６の第２外側部分６ｅ２は、第２柱状部１８Ｐ２の上端面に取り付けられ、付勢部材６の第３外側部分６ｅ３は、第３柱状部１８Ｐ３の上端面に取り付けられ、付勢部材６の第４外側部分６ｅ４は、第４柱状部１８Ｐ４の上端面に取り付けられている。 More specifically, the first outer portion 6e1 of the biasing member 6 is attached to the upper end surface of the first columnar portion 18P1, and the second outer portion 6e2 of the biasing member 6 is attached to the upper end surface of the second columnar portion 18P2. , the third outer portion 6e3 of the biasing member 6 is attached to the upper end surface of the third columnar portion 18P3, and the fourth outer portion 6e4 of the biasing member 6 is attached to the upper end surface of the fourth columnar portion 18P4. It is
　柱状部１８Ｐの上端面への外側部分６ｅの固定は、外側部分６ｅに形成された貫通孔ＴＨ２（図１２参照。）に柱状部１８Ｐの上端面から上方へ突出する突起部１８ｔが挿通され且つ接着剤が塗布されることによって実現される。なお、柱状部１８Ｐの上端面への外側部分６ｅの固定は、外側部分６ｅに形成された貫通孔ＴＨ２に突起部１８ｔが挿通され且つ熱かしめ又は冷間かしめが施されることによって実現されてもよい。 The fixing of the outer portion 6e to the upper end surface of the columnar portion 18P is achieved by inserting the protrusion 18t projecting upward from the upper end surface of the columnar portion 18P into the through hole TH2 (see FIG. 12) formed in the outer portion 6e. It is realized by applying an adhesive. The fixing of the outer portion 6e to the upper end surface of the columnar portion 18P is realized by inserting the projection portion 18t into the through hole TH2 formed in the outer portion 6e and performing hot or cold crimping. good too.
　この構成により、光学素子駆動装置１０１Ａは、光学素子駆動装置１０１と同じ効果を実現しながらも、光学素子駆動装置１０１よりも少ない部品点数で製造され得る。 With this configuration, the optical element driving device 101A can be manufactured with a smaller number of parts than the optical element driving device 101 while achieving the same effect as the optical element driving device 101.
　また、光学素子駆動装置１０１Ａは、ケース４に形成された二つの突出部４Ｔ（左側折り曲げ片４ＴＬ及び右側折り曲げ片４ＴＲ）と光学素子保持部材２に設けられた二つの制振部材３とを有する点で、光学素子駆動装置１０１と異なる。この点に関し、光学素子駆動装置１０１は、ケース４に形成された四つの突出部４Ｔと光学素子保持部材２に設けられた四つの制振部材３とを有する。 Further, the optical element driving device 101A has two projections 4T (a left bent piece 4TL and a right bent piece 4TR) formed on the case 4 and two damping members 3 provided on the optical element holding member 2. It differs from the optical element driving device 101 in this point. In this regard, the optical element driving device 101 has four protrusions 4T formed on the case 4 and four vibration damping members 3 provided on the optical element holding member 2 .
　具体的には、光学素子駆動装置１０１Ａでは、制振部材３は、図１２に示すように、光学素子保持部材２の第２辺部２Ｅ２の上面に設けられた左側制振部材３Ｌと、光学素子保持部材２の第４辺部２Ｅ４の上面に設けられた右側制振部材３Ｒと、を含む。 Specifically, in the optical element driving device 101A, as shown in FIG. 12, the damping member 3 includes a left damping member 3L provided on the upper surface of the second side portion 2E2 of the optical element holding member 2, and an optical damping member 3L. and a right damping member 3R provided on the upper surface of the fourth side portion 2E4 of the element holding member 2.
　より具体的には、制振部材３は、図１４Ａに示すように、光学素子保持部材２の上面に形成された収容部２Ｑ内に収容されている。図１４Ａ及び図１４Ｂは、光学素子保持部材２の上面図である。図１４Ａは、光学素子駆動装置１０１Ａを構成する光学素子保持部材２の上面図である。図１４Ｂは、光学素子駆動装置１０１Ａを構成する光学素子保持部材２の別の一例の上面図である。 More specifically, as shown in FIG. 14A, the vibration damping member 3 is housed in a housing portion 2Q formed on the upper surface of the optical element holding member 2. As shown in FIG. 14A and 14B are top views of the optical element holding member 2. FIG. FIG. 14A is a top view of the optical element holding member 2 that constitutes the optical element driving device 101A. FIG. 14B is a top view of another example of the optical element holding member 2 that constitutes the optical element driving device 101A.
　図１４Ａに示す例では、収容部２Ｑは、光学素子保持部材２の第２辺部２Ｅ２の上面に形成された左側収容部２ＱＬと、光学素子保持部材２の第４辺部２Ｅ４の上面に形成された右側収容部２ＱＲと、を含む。左側収容部２ＱＬは、第２辺部２Ｅ２の中央部分に設けられ、右側収容部２ＱＲは、第４辺部２Ｅ４の中央部分に設けられている。左側制振部材３Ｌは、左側収容部２ＱＬ内に収容され、右側制振部材３Ｒは、右側収容部２ＱＲ内に収容されている。 In the example shown in FIG. 14A, the housing portion 2Q is formed on the left side housing portion 2QL formed on the upper surface of the second side portion 2E2 of the optical element holding member 2 and on the upper surface of the fourth side portion 2E4 of the optical element holding member 2. and a right accommodation portion 2QR. The left accommodation portion 2QL is provided in the central portion of the second side portion 2E2, and the right accommodation portion 2QR is provided in the central portion of the fourth side portion 2E4. The left damping member 3L is housed in the left housing portion 2QL, and the right damping member 3R is housed in the right housing portion 2QR.
　そして、左側制振部材３Ｌと右側制振部材３Ｒとは、光学素子保持部材２の中心軸ＡＸ１を含みＹＺ平面に平行な仮想平面ＶＰ４に関して面対称となり、且つ、光学素子保持部材２の中心軸ＡＸ１を含みＸＺ平面に平行な仮想平面ＶＰ５に関して面対称となるように構成されている。 The left damping member 3L and the right damping member 3R are symmetrical with respect to a virtual plane VP4 that includes the central axis AX1 of the optical element holding member 2 and is parallel to the YZ plane. It is configured to be symmetrical with respect to a virtual plane VP5 that includes AX1 and is parallel to the XZ plane.
　二つの収容部２Ｑが中心軸ＡＸ１を挟んでバランス良く設けられたこの構成は、固定側部材ＦＢに対して可動側部材ＭＢ（光学素子保持部材２）が変位したときに、制振部材３の弾性変形によって可動側部材ＭＢ（光学素子保持部材２）に不所望の力が作用してしまうのを防止できる。 This configuration, in which the two accommodating portions 2Q are provided in a well-balanced manner with the central axis AX1 interposed therebetween, prevents the damping member 3 from vibrating when the movable side member MB (optical element holding member 2) is displaced with respect to the fixed side member FB. Undesirable force acting on the movable side member MB (optical element holding member 2) due to elastic deformation can be prevented.
　なお、収容部２Ｑは、上述の実施形態では、上面視で矩形状又は楕円形状の外形を呈するように構成されているが、上面視で、円形状又は多角形状等の外形を呈するように構成されていてもよい。 In addition, in the above-described embodiment, the housing portion 2Q is configured to have a rectangular or elliptical outer shape when viewed from above, but is configured to have a circular or polygonal outer shape when viewed from above. may have been
　また、収容部２Ｑは、辺部２Ｅの中央部分以外の部分に設けられていてもよい。例えば、収容部２Ｑは、辺部２Ｅの内側部分に設けられていてもよく、辺部２Ｅの外側部分に設けられていてもよい。また、収容部２Ｑは、角部に設けられていてもよい。また、収容部２Ｑは、一つの辺部２Ｅに二つ以上設けられていてもよい。 Also, the housing portion 2Q may be provided in a portion other than the central portion of the side portion 2E. For example, the housing portion 2Q may be provided on the inner portion of the side portion 2E or may be provided on the outer portion of the side portion 2E. Moreover, the accommodating part 2Q may be provided at the corner. Moreover, two or more housing portions 2Q may be provided on one side portion 2E.
　また、収容部２Ｑは、図１４Ｂに示すように、光学素子保持部材２の第３辺部２Ｅ３の上面に形成された後側収容部２ＱＢのみで構成されていてもよい。 Further, as shown in FIG. 14B, the housing portion 2Q may be composed only of the rear housing portion 2QB formed on the upper surface of the third side portion 2E3 of the optical element holding member 2. FIG.
　上述のように、本発明の実施形態に係る光学素子駆動装置１０１は、例えば図２及び図３に示すように、ベース部材１８を含む固定側部材ＦＢと、ベース部材１８と対向するようにベース部材１８の上方に配置され、光学素子ＯＥを保持可能な光学素子保持部材２と、ベース部材１８と光学素子保持部材２との間に配置された支持部材１１と、光学素子保持部材２をベース部材１８側である下側へ付勢する付勢部材６と、支持部材１１に支持された光学素子保持部材２を上下方向（ベース部材１８と光学素子保持部材２とが対向する方向）と直交する平面（Ｚ軸と直交するＸＹ平面に平行な仮想平面ＶＰ１（図８Ｃ参照。））に沿って移動させる駆動機構ＤＭと、を備えている。駆動機構ＤＭは、図３に示す例では、少なくともコイル９及び磁石５を有する電磁駆動機構として構成されている。光学素子保持部材２は、制振部材３を収容する収容部２Ｑ（図４参照。）を有する。固定側部材ＦＢを構成するケース４は、先端部ＴＰが収容部２Ｑに挿入される突出部４Ｔを有する。突出部４Ｔの先端部ＴＰは、収容部２Ｑに設けられた制振部材３と接触している。 As described above, the optical element driving device 101 according to the embodiment of the present invention includes, for example, as shown in FIGS. An optical element holding member 2 arranged above the member 18 and capable of holding the optical element OE, a support member 11 arranged between the base member 18 and the optical element holding member 2, and the optical element holding member 2 as a base. The biasing member 6 that biases the member 18 side downward, and the optical element holding member 2 supported by the supporting member 11 are perpendicular to the vertical direction (the direction in which the base member 18 and the optical element holding member 2 face each other). and a driving mechanism DM for moving along a plane (virtual plane VP1 (see FIG. 8C) parallel to the XY plane orthogonal to the Z axis). The drive mechanism DM is configured as an electromagnetic drive mechanism having at least a coil 9 and a magnet 5 in the example shown in FIG. The optical element holding member 2 has an accommodating portion 2Q (see FIG. 4) that accommodates the damping member 3. As shown in FIG. The case 4 that constitutes the fixed member FB has a projecting portion 4T whose tip portion TP is inserted into the accommodating portion 2Q. A tip portion TP of the projecting portion 4T is in contact with the damping member 3 provided in the housing portion 2Q.
　この構成により、光学素子駆動装置１０１は、光学素子ＯＥをより迅速に目標位置に移動させることができる。すなわち、光学素子駆動装置１０１は、光学素子保持部材２が移動した際に、その変位（移動）が落ち着くまでの時間を短縮することができる。光学素子保持部材２（光学素子ＯＥ）を目標位置に位置付けるときに発生する目標位置を振動中心とした光学素子保持部材２（光学素子ＯＥ）の振動を制振部材３によって早期に収束させることができるためである。 With this configuration, the optical element driving device 101 can more quickly move the optical element OE to the target position. That is, the optical element driving device 101 can shorten the time until the displacement (movement) settles down when the optical element holding member 2 moves. The damping member 3 can quickly converge the vibration of the optical element holding member 2 (optical element OE) about the target position when the optical element holding member 2 (optical element OE) is positioned at the target position. Because we can.
　固定側部材ＦＢは、望ましくは、外周壁部４Ａ及び天板部４Ｂを有する筐体ＨＳ（ケース４）を含む。そして、光学素子保持部材２は、筐体ＨＳ内に配置される。この場合、光学素子保持部材２の上面に形成されている収容部２Ｑは、上方（天板部４Ｂ側）が開放されている。そして、突出部４Ｔは、天板部４Ｂから下方（ベース部材１８側）に延び先端部ＴＰが収容部２Ｑに挿入されるように構成される。 The fixed-side member FB desirably includes a housing HS (case 4) having an outer peripheral wall portion 4A and a top plate portion 4B. The optical element holding member 2 is arranged inside the housing HS. In this case, the housing portion 2Q formed on the upper surface of the optical element holding member 2 is open upward (on the side of the top plate portion 4B). The projecting portion 4T is configured to extend downward (toward the base member 18 side) from the top plate portion 4B so that the tip portion TP is inserted into the housing portion 2Q.
　この構成は、制振部材３が確実に収容部２Ｑ内に保持されるようにし、制振部材３が光学素子保持部材２から脱落するといった不具合が発生してしまうのを抑制できる。 This configuration ensures that the vibration damping member 3 is held in the housing portion 2Q, and can prevent the vibration damping member 3 from falling off from the optical element holding member 2.
　天板部４Ｂは、望ましくは、金属板によって形成されているとともに開口４Ｋを有する。この場合、突出部４Ｔは、開口４Ｋの縁部で折り曲げられた折り曲げ片によって構成されている。図９Ａ～図９Ｃに示す例では、突出部４Ｔは、第１折り曲げ片４Ｔ１～第４折り曲げ片４Ｔ４を含む。 The top plate portion 4B is desirably made of a metal plate and has an opening 4K. In this case, the projecting portion 4T is configured by a bent piece that is bent at the edge of the opening 4K. In the example shown in FIGS. 9A to 9C, the protruding portion 4T includes first bending piece 4T1 to fourth bending piece 4T4.
　この構成は、既存の部材（ケース４）を利用することにより、部品点数を過度に増加させることなく、制振部材３を用いた制振構造を実現できるという効果をもたらす。 This configuration has the effect of realizing a damping structure using the damping member 3 without excessively increasing the number of parts by using the existing member (case 4).
　駆動機構ＤＭは、望ましくは、光学素子保持部材２に固定された複数の磁石５と、磁石５と対向するようにベース部材１８に支持された複数のコイル９とを含む。この場合、収容部２Ｑは、上面視において、磁石５よりも内側に配置されている。 The drive mechanism DM desirably includes a plurality of magnets 5 fixed to the optical element holding member 2 and a plurality of coils 9 supported by the base member 18 so as to face the magnets 5 . In this case, the accommodating portion 2Q is arranged inside the magnet 5 when viewed from above.
　この構成は、駆動機構ＤＭのＺ軸方向における寸法が大きくなるのを抑制でき、光学素子駆動装置１０１の薄型化を実現できるという効果をもたらす。 This configuration has the effect of suppressing an increase in the dimension of the driving mechanism DM in the Z-axis direction and realizing a thin optical element driving device 101 .
　光学素子保持部材２は、図１１に示すように、四つの辺部２Ｅを含む枠体ＲＦを形成するように構成されている。そして、収容部２Ｑは、四つの辺部２Ｅのそれぞれに設けられている。但し、収容部２Ｑは、四つの辺部２Ｅのうちの一つ、二つ、又は三つに設けられていてもよい。 The optical element holding member 2 is configured to form a frame RF including four side portions 2E, as shown in FIG. The accommodating portion 2Q is provided on each of the four side portions 2E. However, the accommodation portion 2Q may be provided on one, two, or three of the four side portions 2E.
　この構成は、光学素子保持部材２の辺部２Ｅにおける空きスペースを利用して収容部２Ｑが形成されるようにするため、光学素子駆動装置１０１の大型化を抑制できるという効果をもたらす。 This configuration has the effect of suppressing an increase in the size of the optical element driving device 101 because the empty space in the side portion 2E of the optical element holding member 2 is used to form the housing portion 2Q.
　付勢部材６は、典型的には、板ばねであり、光学素子保持部材２に固定される可動側支持部としての内側部分６ｉと、固定側部材ＦＢに固定される固定側支持部としての外側部分６ｅと、内側部分６ｉと外側部分６ｅとの間に位置する弾性腕部６ｇと、を含む。 The biasing member 6 is typically a leaf spring, and has an inner portion 6i as a movable side support portion fixed to the optical element holding member 2 and a fixed side support portion 6i fixed to the fixed side member FB. It includes an outer portion 6e and a resilient arm 6g located between the inner portion 6i and the outer portion 6e.
　固定側支持部としての外側部分６ｅは、サスペンションワイヤを介してベース部材１８に固定され、或いは、ベース部材１８に直接的に固定される。図７Ａに示す例では、外側部分６ｅは、サスペンションワイヤとしてのワイヤ８を介してベース部材１８に埋め込まれた金属部材７の角部７Ｃに固定されている。或いは、図１３に示す例では、外側部分６ｅは、サスペンションワイヤを介することなく、ベース部材１８の柱状部１８Ｐに直接的に固定されている。 The outer portion 6e as a fixed-side support portion is fixed to the base member 18 via a suspension wire, or fixed directly to the base member 18. In the example shown in FIG. 7A, the outer portion 6e is fixed to corners 7C of the metal member 7 embedded in the base member 18 via wires 8 as suspension wires. Alternatively, in the example shown in FIG. 13, the outer portion 6e is directly fixed to the columnar portion 18P of the base member 18 without suspension wires.
　この構成は、簡単な構成を有する板ばねにより、可動側部材ＭＢの下方への押し付けが容易に実現されるという効果をもたらす。 This configuration brings about the effect that the movable side member MB can be easily pressed downward by the leaf spring having a simple configuration.
　支持部材１１は、例えば、ベース部材１８と光学素子保持部材２との間に配置された複数のボールである。図３に示す例では、支持部材１１は、光学素子保持部材２の下面に形成された円形凹部２Ｓ（図５Ａ参照。）とベース部材１８の上面に形成された円形凹部１８Ｓ（図６参照。）との間に配置される四つのボール（第１ボール１１Ａ～第４ボール１１Ｄ）である。 The support member 11 is, for example, a plurality of balls arranged between the base member 18 and the optical element holding member 2. In the example shown in FIG. 3, the support member 11 includes a circular recess 2S (see FIG. 5A) formed in the lower surface of the optical element holding member 2 and a circular recess 18S formed in the upper surface of the base member 18 (see FIG. 6). ) and four balls (first ball 11A to fourth ball 11D).
　この構成は、簡単な構成を有するボールにより、可動側部材ＭＢが平行移動する際の可動側部材ＭＢと固定側部材ＦＢとの間の距離の維持が容易に実現されるという効果をもたらす。 This configuration has the effect of easily maintaining the distance between the movable-side member MB and the fixed-side member FB when the movable-side member MB moves in parallel with a ball having a simple configuration.
　以上、本発明の好ましい実施形態について詳説した。しかしながら、本発明は、上述した実施形態に制限されることはない。上述した実施形態は、本発明の範囲を逸脱することなしに、種々の変形及び置換等が適用され得る。また、上述の実施形態を参照して説明された特徴のそれぞれは、技術的に矛盾しない限り、適宜に組み合わされてもよい。 The preferred embodiment of the present invention has been described in detail above. However, the invention is not limited to the embodiments described above. Various modifications and replacements may be applied to the above-described embodiments without departing from the scope of the present invention. Also, each of the features described with reference to the above-described embodiments may be combined as appropriate as long as they are not technically inconsistent.
　例えば、上述の実施形態では、ワイヤ８の下端部は、ベース部材１８に埋設された金属部材７の角部７Ｃに固定されているが、ベース部材１８に重ねられるプリント配線基板又は絶縁基板１７に固定されていてもよい。 For example, in the above-described embodiment, the lower end of the wire 8 is fixed to the corner 7C of the metal member 7 embedded in the base member 18. It may be fixed.
　また、上述の実施形態では、制振部材３を収容するための収容部２Ｑは、光学素子保持部材２の上面において上方に開放するように形成されているが、光学素子保持部材２の側面において側方に開放するように形成されていてもよい。この場合、突出部４Ｔは、ケース４の外周壁部４Ａから内側に延びる折り曲げ片として形成されていてもよい。或いは、収容部２Ｑは、光学素子保持部材２の下面に形成されていてもよい。この場合、突出部は、ベース部材１８の上面から上方に延びるように構成されていてもよい。 In the above-described embodiment, the accommodating portion 2Q for accommodating the damping member 3 is formed so as to open upward on the upper surface of the optical element holding member 2. It may be formed so as to open sideways. In this case, the projecting portion 4T may be formed as a bent piece extending inward from the outer peripheral wall portion 4A of the case 4 . Alternatively, the housing portion 2Q may be formed on the lower surface of the optical element holding member 2. FIG. In this case, the projecting portion may be configured to extend upward from the upper surface of the base member 18 .
　また、上述の実施形態では、支持部材１１は、四つのボールを利用して構成されているが、一つ又は複数のシャフトを利用して構成されていてもよく、一つ又は複数のレールを利用して構成されていてもよい。 Further, in the above-described embodiment, the support member 11 is configured using four balls, but may be configured using one or more shafts and one or more rails. It may be configured using
　また、上述の実施形態では、光学素子駆動装置１０１は、ＸＹ平面に平行な仮想平面ＶＰ１に沿って光学素子保持部材２が任意の方向に移動できるように構成されているが、光学素子保持部材２の移動方向が限定されるように構成されていてもよい。例えば、光学素子駆動装置１０１は、光学素子保持部材２がＸ軸方向のみに移動できるように構成されていてもよく、光学素子保持部材２がＹ軸方向のみに移動できるように構成されていてもよい。 In the above-described embodiment, the optical element driving device 101 is configured so that the optical element holding member 2 can move in any direction along the virtual plane VP1 parallel to the XY plane. 2 may be configured so that the movement direction thereof is limited. For example, the optical element driving device 101 may be configured so that the optical element holding member 2 can move only in the X-axis direction, or can be configured so that the optical element holding member 2 can move only in the Y-axis direction. good too.
　本願は、２０２１年３月１７日に出願した日本国特許出願２０２１－０４３８９７号に基づく優先権を主張するものであり、この日本国特許出願の全内容を本願に参照により援用する。 This application claims priority based on Japanese Patent Application No. 2021-043897 filed on March 17, 2021, and the entire contents of this Japanese Patent Application are incorporated herein by reference.
　２・・・光学素子保持部材　２Ｃ・・・角部　２Ｃ１・・・第１角部　２Ｃ２・・・第２角部　２Ｃ３・・・第３角部　２Ｃ４・・・第４角部　２ｄ・・・台座部　２Ｅ・・・辺部　２Ｅ１・・・第１辺部　２Ｅ２・・・第２辺部　２Ｅ３・・・第３辺部　２Ｅ４・・・第４辺部　２Ｋ・・・貫通孔　２Ｑ・・・収容部　２Ｑ１・・・第１収容部　２Ｑ２・・・第２収容部　２Ｑ３・・・第３収容部　２Ｑ４・・・第４収容部　２ＱＢ・・・後側収容部　２ＱＬ・・・左側収容部　２ＱＲ・・・右側収容部　２Ｒ・・・凹部　２Ｒ１・・・第１凹部　２Ｒ２・・・第２凹部　２Ｒ３・・・第３凹部　２Ｒ４・・・第４凹部　２Ｓ・・・円形凹部　２Ｓ１・・・第１円形凹部　２Ｓ２・・・第２円形凹部　２Ｓ３・・・第３円形凹部　２Ｓ４・・・第４円形凹部　２ｔ・・・突起部　３・・・制振部材　３Ａ・・・第１制振部材　３Ｂ・・・第２制振部材　３Ｃ・・・第３制振部材　３Ｄ・・・第４制振部材　３Ｌ・・・左側制振部材　３Ｒ・・・右側制振部材　４・・・ケース　４Ａ・・・外周壁部　４Ａ１・・・第１側板部　４Ａ２・・・第２側板部　４Ａ３・・・第３側板部　４Ａ４・・・第４側板部　４Ｂ・・・天板部　４Ｋ・・・開口　４ｓ・・・収納部　４Ｔ・・・突出部　４Ｔ１・・・第１折り曲げ片　４Ｔ２・・・第２折り曲げ片　４Ｔ３・・・第３折り曲げ片　４Ｔ４・・・第４折り曲げ片　４ＴＬ・・・左側折り曲げ片　４ＴＲ・・・右側折り曲げ片　５・・・磁石　５Ａ・・・第１磁石　５Ｂ・・・第２磁石　５Ｃ・・・第３磁石　５Ｄ・・・第４磁石　６・・・付勢部材　６ｅ・・・外側部分　６ｅ１・・・第１外側部分　６ｅ２・・・第２外側部分　６ｅ３・・・第３外側部分　６ｅ４・・・第４外側部分　６ｇ・・・弾性腕部　６ｇ１・・・第１弾性腕部　６ｇ２・・・第２弾性腕部　６ｇ３・・・第３弾性腕部　６ｇ４・・・第４弾性腕部　６ｉ・・・内側部分　６ｉ１・・・第１内側部分　６ｉ２・・・第２内側部分　６ｉ３・・・第３内側部分　６ｉ４・・・第４内側部分　６ｘ・・・貫通孔　６ｘ１・・・第１貫通孔　６ｘ２・・・第２貫通孔　６ｘ３・・・第３貫通孔　６ｘ４・・・第４貫通孔　７・・・金属部材　７Ｃ・・・角部　７Ｃ１・・・第１角部　７Ｃ２・・・第２角部　７Ｃ３・・・第３角部　７Ｃ４・・・第４角部　７Ｄ・・・連結部　７Ｄ１・・・第１連結部　７Ｄ２・・・第２連結部　７Ｄ３・・・第３連結部　７Ｄ４・・・第４連結部　８・・・ワイヤ　８Ａ・・・第１ワイヤ　８Ｂ・・・第２ワイヤ　８Ｃ・・・第３ワイヤ　８Ｄ・・・第４ワイヤ　９・・・コイル　９Ａ・・・第１コイル　９Ｂ・・・第２コイル　９Ｃ・・・第３コイル　９Ｄ・・・第４コイル　１０・・・センサ　１０Ａ・・・第１センサ　１０Ｂ・・・第２センサ　１１・・・支持部材　１１Ａ・・・第１ボール　１１Ｂ・・・第２ボール　１１Ｃ・・・第３ボール　１１Ｄ・・・第４ボール　１７・・・絶縁基板　１７Ｋ・・・開口　１８・・・ベース部材　１８Ｂ・・・凹部　１８Ｂ１・・・第１凹部　１８Ｂ２・・・第２凹部　１８Ｋ・・・開口　１８Ｐ・・・柱状部　１８Ｐ１・・・第１柱状部　１８Ｐ２・・・第２柱状部　１８Ｐ３・・・第３柱状部　１８Ｐ４・・・第４柱状部　１８Ｓ・・・円形凹部　１８Ｓ１・・・第１円形凹部　１８Ｓ２・・・第２円形凹部　１８Ｓ３・・・第３円形凹部　１８Ｓ４・・・第４円形凹部　１８ｔ・・・突起部　１０１・・・光学素子駆動装置　ＤＭ・・・駆動機構　ＦＢ・・・固定側部材　ＨＳ・・・筐体　ＬＢ・・・下側部材　ＭＢ・・・可動側部材　ＯＥ・・・光学素子　ＲＦ・・・枠体　ＴＨ１、ＴＨ２・・・貫通孔　ＴＰ・・・先端部 2... Optical element holding member 2C... Corner 2C1... First corner 2C2... Second corner 2C3... Third corner 2C4... Fourth corner 2d... Pedestal part 2E... side part 2E1... first side part 2E2... second side part 2E3... third side part 2E4... fourth side part 2K... through hole 2Q... Storage part 2Q1... First storage part 2Q2... Second storage part 2Q3... Third storage part 2Q4... Fourth storage part 2QB... Rear side storage part 2QL... Left side storage part 2QR ... right housing part 2R... recessed part 2R1... first recessed part 2R2... second recessed part 2R3... third recessed part 2R4... fourth recessed part 2S... circular recessed part 2S1... third 1 circular recess 2S2... 2nd circular recess 2S3... 3rd circular recess 2S4... 4th circular recess 2t... projection 3... damping member 3A... first damping member 3B ... second damping member 3C ... third damping member 3D ... fourth damping member 3L ... left damping member 3R ... right damping member 4 ... case 4A ...・Peripheral wall portion 4A1...first side plate portion 4A2...second side plate portion 4A3...third side plate portion 4A4...fourth side plate portion 4B...top plate portion 4K...opening 4s・・・Accommodating part 4T・・・Protruding part 4T1・・・First bending piece 4T2・・・Second bending piece 4T3・・・Third bending piece 4T4・・・Fourth bending piece 4TL・・・Left bending piece 4TR ... Right bending piece 5... Magnet 5A... First magnet 5B... Second magnet 5C... Third magnet 5D... Fourth magnet 6... Biasing member 6e... Outer part 6e1... First outer part 6e2... Second outer part 6e3... Third outer part 6e4... Fourth outer part 6g... Elastic arm 6g1... First elastic arm 6g2... Second elastic arm 6g3... Third elastic arm 6g4... Fourth elastic arm 6i... Inner portion 6i1... First inner part 6i2... Second inner part 6i3 ... third inner part 6i4 ... fourth inner part 6x ... through hole 6x1 ... first through hole 6x2 ... second through hole 6x3 ... third through hole 6x4 ... third 4 through holes 7... metal member 7C... corner 7C1... first corner 7C2... second corner 7C3... third corner 7C4... fourth corner 7D... · Connecting portion 7D1... First connecting portion 7 D2... second connecting part 7D3... third connecting part 7D4... fourth connecting part 8... wire 8A... first wire 8B... second wire 8C... third wire 8D... Fourth wire 9... Coil 9A... First coil 9B... Second coil 9C... Third coil 9D... Fourth coil 10... Sensor 10A... Third 1 sensor 10B... second sensor 11... support member 11A... first ball 11B... second ball 11C... third ball 11D... fourth ball 17... insulating substrate 17K ... opening 18 ... base member 18B ... recess 18B1 ... first depression 18B2 ... second depression 18K ... opening 18P ... columnar section 18P1 ... first columnar section 18P2 2nd column 18P3 3rd column 18P4 4th column 18S Circular recess 18S1 1st circular recess 18S2 2nd circular recess 18S3 3rd Circular concave portion 18S4... Fourth circular concave portion 18t... Protruding portion 101... Optical element drive unit DM... Drive mechanism FB... Fixed side member HS... Housing LB... Lower side member MB... Movable side member OE... Optical element RF... Frame body TH1, TH2... Through hole TP... Tip

Claims (8)

  1. 　ベース部材を含む固定側部材と、
    　前記ベース部材の上方に配置され、光学素子を保持可能な光学素子保持部材と、
    　前記ベース部材と前記光学素子保持部材との間に配置された支持部材と、
    　前記光学素子保持部材を下側へ付勢する付勢部材と、
    　前記支持部材に支持された前記光学素子保持部材を上下方向と直交する平面に沿って移動させる駆動機構と、を備えた光学素子駆動装置において、
    　前記光学素子保持部材は、制振部材を収容する収容部を有し、
    　前記固定側部材は、先端部が前記収容部に挿入される突出部を有し、
    　前記突出部の前記先端部は、前記収容部に設けられた前記制振部材と接触していることを特徴とする光学素子駆動装置。     a stationary member including a base member;
    an optical element holding member disposed above the base member and capable of holding an optical element;
    a support member disposed between the base member and the optical element holding member;
    a biasing member that biases the optical element holding member downward;
    and a drive mechanism for moving the optical element holding member supported by the support member along a plane perpendicular to the vertical direction, wherein
    The optical element holding member has an accommodation portion that accommodates a damping member,
    the stationary member has a protruding portion whose tip end is inserted into the accommodating portion,
    The optical element driving device, wherein the tip portion of the projecting portion is in contact with the damping member provided in the accommodating portion.
  2. 　前記固定側部材は、外周壁部及び天板部を有する筐体を含み、
    　前記収容部は、上方が開放されており、
    　前記光学素子保持部材は、前記筐体内に配置され、
    　前記突出部は、前記天板部から延び前記先端部が前記収容部に挿入されるように構成されている、
    　請求項１に記載の光学素子駆動装置。     the fixed side member includes a housing having an outer peripheral wall portion and a top plate portion;
    The housing part is open at the top,
    The optical element holding member is arranged in the housing,
    The protruding portion extends from the top plate portion and the tip portion is configured to be inserted into the accommodating portion,
    The optical element driving device according to claim 1.
  3. 　前記天板部は、金属板によって形成されているとともに、開口を有し、
    　前記突出部は、前記開口の縁部で折り曲げられた折り曲げ片によって構成されている、
    　請求項２に記載の光学素子駆動装置。     The top plate portion is formed of a metal plate and has an opening,
    The projecting portion is configured by a bent piece that is bent at the edge of the opening,
    3. The optical element driving device according to claim 2.
  4. 　前記駆動機構は、前記光学素子保持部材に固定された複数の磁石と、前記磁石と対向するように前記ベース部材に支持された複数のコイルとを含み、
    　上面視において、前記収容部は、前記磁石よりも内側に配置されている、
    　請求項１乃至請求項３の何れかに記載の光学素子駆動装置。     The drive mechanism includes a plurality of magnets fixed to the optical element holding member and a plurality of coils supported by the base member so as to face the magnets,
    In a top view, the accommodation portion is arranged inside the magnet,
    4. The optical element driving device according to any one of claims 1 to 3.
  5. 　前記光学素子保持部材は、四つの辺部を含む枠体を形成するように構成されており、
    　前記収容部は、四つの前記辺部の少なくとも一つに設けられている、
    　請求項１乃至請求項４の何れかに記載の光学素子駆動装置。     The optical element holding member is configured to form a frame including four sides,
    The housing portion is provided on at least one of the four side portions,
    5. The optical element driving device according to any one of claims 1 to 4.
  6. 　前記付勢部材は、板ばねであり、
    　前記板ばねは、前記光学素子保持部材に固定される可動側支持部と、前記固定側部材に固定される固定側支持部と、前記可動側支持部と前記固定側支持部との間に位置する弾性腕部と、を含む、
    　請求項１乃至請求項５の何れかに記載の光学素子駆動装置。     The biasing member is a leaf spring,
    The leaf spring is positioned between a movable-side support portion fixed to the optical element holding member, a fixed-side support portion fixed to the fixed-side member, and the movable-side support portion and the fixed-side support portion. and an elastic arm that
    6. The optical element driving device according to any one of claims 1 to 5.
  7. 　前記固定側支持部は、サスペンションワイヤを介して前記ベース部材に固定され、或いは、前記ベース部材に直接的に固定される、
    　請求項６に記載の光学素子駆動装置。     The fixed-side support part is fixed to the base member via a suspension wire, or is fixed directly to the base member,
    7. The optical element driving device according to claim 6.
  8. 　前記支持部材は、前記ベース部材と前記光学素子保持部材との間に配置された複数のボールである、
    　請求項１乃至請求項７の何れかに記載の光学素子駆動装置。     wherein the support member is a plurality of balls arranged between the base member and the optical element holding member;
    The optical element driving device according to any one of claims 1 to 7.
PCT/JP2022/009989 2021-03-17 2022-03-08 Optical element driving device WO2022196440A1 (en)

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Citations (6)

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Publication number Priority date Publication date Assignee Title
JP2007155801A (en) * 2005-11-30 2007-06-21 Mitsumi Electric Co Ltd Camera module
WO2015045527A1 (en) * 2013-09-27 2015-04-02 シャープ株式会社 Camera module
CN106842479A (en) * 2015-12-07 2017-06-13 三星电机株式会社 Camera model
JP2017219779A (en) * 2016-06-10 2017-12-14 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． Lens unit
JP2020166129A (en) * 2019-03-29 2020-10-08 エーエーシー コミュニケーション テクノロジーズ（ジョウシュウ）カンパニーリミテッド Camera lens drive device
JP2021140017A (en) * 2020-03-04 2021-09-16 日本電産コパル株式会社 Lens unit drive device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007155801A (en) * 2005-11-30 2007-06-21 Mitsumi Electric Co Ltd Camera module
WO2015045527A1 (en) * 2013-09-27 2015-04-02 シャープ株式会社 Camera module
CN106842479A (en) * 2015-12-07 2017-06-13 三星电机株式会社 Camera model
JP2017219779A (en) * 2016-06-10 2017-12-14 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． Lens unit
JP2020166129A (en) * 2019-03-29 2020-10-08 エーエーシー コミュニケーション テクノロジーズ（ジョウシュウ）カンパニーリミテッド Camera lens drive device
JP2021140017A (en) * 2020-03-04 2021-09-16 日本電産コパル株式会社 Lens unit drive device

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