CN116593122A - Multi-parameter film sensing structure on model surface and preparation method thereof - Google Patents
Multi-parameter film sensing structure on model surface and preparation method thereof Download PDFInfo
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- CN116593122A CN116593122A CN202310884763.6A CN202310884763A CN116593122A CN 116593122 A CN116593122 A CN 116593122A CN 202310884763 A CN202310884763 A CN 202310884763A CN 116593122 A CN116593122 A CN 116593122A
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- dry film
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- 238000002360 preparation method Methods 0.000 title claims abstract description 7
- 239000010410 layer Substances 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 15
- 238000000151 deposition Methods 0.000 claims abstract description 10
- 238000004544 sputter deposition Methods 0.000 claims abstract description 10
- 239000011241 protective layer Substances 0.000 claims abstract description 7
- 239000010408 film Substances 0.000 claims description 58
- 239000010409 thin film Substances 0.000 claims description 10
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 9
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000011161 development Methods 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 9
- 238000011065 in-situ storage Methods 0.000 abstract description 5
- 238000000691 measurement method Methods 0.000 abstract description 5
- 230000001360 synchronised effect Effects 0.000 abstract description 5
- 238000012360 testing method Methods 0.000 abstract description 5
- 238000007781 pre-processing Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M9/00—Aerodynamic testing; Arrangements in or on wind tunnels
- G01M9/06—Measuring arrangements specially adapted for aerodynamic testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention relates to the field of wind tunnel tests of aircraft models, and discloses a model surface multi-parameter film sensing structure and a preparation method thereof, wherein a plurality of single-point multi-parameter micro-nano sensing structures are arranged on the film sensing structure, and each single-point multi-parameter micro-nano sensing structure consists of a thermal resistor and a strain sensor; the method comprises the steps of preprocessing the curved surface of a model, and determining the size of a dry film corresponding to the model; exposing the dry film with a plurality of single-point multi-parameter micro-nano sensing structure marks; attaching a dry film on the surface of the model; developing treatment is carried out; sputtering and depositing an insulating layer, a sensitive layer and a protective layer; and removing the residual dry film, and forming the multi-parameter film sensing structure. According to the invention, various sensors are integrated in the flexible film, and the multi-parameter flexible film sensor is conformally prepared on the surface of the model, so that not only can the multi-parameter in-situ synchronous measurement be realized, but also the problem of low precision of a distributed measurement method can be avoided, and the stable and high-precision measurement of various physical parameters of the aircraft can be realized.
Description
Technical Field
The invention relates to the field of wind tunnel tests of aircraft models, in particular to a model surface multi-parameter film sensing structure and a preparation method thereof.
Background
Advanced aircraft have complex aerodynamic profiles and non-standardized structures with surface aerodynamic properties that include mainly a variety of physical field distributions of stress, strain, temperature, etc. In wind tunnel tests, measurement of various physical parameters on the surface of an aircraft model is mainly divided into a discrete point measurement method and a distributed measurement method at present. The discrete point measurement method comprises a silk thread method, a pitot tube method and the like, and mainly is used for measuring physical parameters at specific positions on the surface of a model, but the sensor arrangement of the method is often limited by the space of the model, and in-situ synchronous measurement of various physical parameters cannot be realized. The distributed measurement method mainly uses an oil flow method and an intelligent coating, but the method cannot realize high-stability and high-precision identification of physical parameters.
The invention patent application publication CN104931229a discloses an integrated thin film sensor for measuring the surface heat flow rate in hypersonic flow, comprising: a glass substrate which is a single body and is a flat plate; and each temperature measuring element comprises a metal film prepared by adopting a coating process in a certain area of the glass substrate, wherein adjacent metal films are separated from each other by a certain distance, and all the metal films are regularly arranged and have the same resistance temperature characteristic. Although this application improves the accuracy of the measured data, it still fails to solve the above-mentioned problems.
Disclosure of Invention
In order to solve the technical problems in the prior art, the invention provides a model surface multi-parameter film sensing structure and a preparation method thereof.
The invention adopts the following specific scheme: a multi-parameter film sensing structure on the surface of a model is characterized in that a plurality of single-point multi-parameter micro-nano sensing structures are arranged on the film sensing structure, and each single-point multi-parameter micro-nano sensing structure consists of a thermal resistor and a strain sensor.
In another aspect, the present invention provides a method for preparing a model surface multi-parameter thin film sensing structure, the method comprising the steps of:
firstly, grinding, polishing and cleaning pretreatment is carried out on the curved surface of the model;
step two, determining the dry film size corresponding to the area to be tested of the model;
step three, exposing the dry film with a plurality of single-point multi-parameter micro-nano sensing structure marks;
attaching a dry film on the surface of the model;
step five, developing the dry film;
step six, sputtering and depositing an insulating layer;
step seven, sputtering and depositing a sensitive layer;
step eight, sputtering and depositing a protective layer;
and step nine, removing the residual dry film, and forming the multi-parameter film sensing structure.
The dry film had a size 10mm greater than the size of the area to be tested.
And in the third step, the exposure treatment of the dry film is carried out by exposing the dry film under the ultraviolet light condition.
And (3) standing for 15min after the dry film is subjected to exposure treatment in the step (III).
The fifth step is to use Na with mass fraction of 5% 2 CO 3 The solution was subjected to development treatment.
And step nine, removing the residual dry film by using a NaOH solution with the mass fraction of 5%.
Compared with the prior art, the invention has the following beneficial effects:
according to the invention, various sensors are integrated in the flexible film, and the multi-parameter flexible film sensor is prepared on the surface of the model in a conformal way, so that the measurement accuracy is high, and the multi-parameter characteristic of the surface of the model can be obtained. On the other hand, the invention can realize in-situ synchronous measurement of the multi-lattice temperature and strain on the surface of the model, and improve the wind tunnel test efficiency and the data comparison precision.
Drawings
FIG. 1 is a schematic layer structure of a thin film sensor structure of the present invention.
FIG. 2 is a schematic diagram of a single-point multi-parameter micro-nano sensing structure of the invention.
FIG. 3 is a schematic illustration of the steps for preparing a model surface multiparameter thin film sensing structure of the present invention.
FIG. 4 is a schematic diagram of a model surface multiparameter film sensing architecture of the present invention.
Symbol description:
1. the sensor comprises an insulating layer, a sensitive layer, a protective layer, a single-point multi-parameter micro-nano sensing structure, a thermal resistor, a strain sensor, a model and a dry film.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the present invention is described below by means of specific embodiments shown in the accompanying drawings. It should be understood that the description is only illustrative and is not intended to limit the scope of the invention. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the present invention.
The invention discloses a model surface multi-parameter film sensing structure, which is combined with figures 1-4, wherein a plurality of single-point multi-parameter micro-nano sensing structures are arranged on the film sensing structure, and each single-point multi-parameter micro-nano sensing structure consists of a thermal resistor and a strain sensor.
The invention provides a preparation method of a multi-parameter film sensing structure on a model surface, which comprises the following steps: step one, grinding, polishing and cleaning pretreatment are carried out on the curved surface of the model 7; step two, determining the size of a dry film 8 corresponding to the area to be tested of the model 7; step three, exposing the dry film with a plurality of single-point multi-parameter micro-nano sensing structure marks; attaching a dry film 8 on the surface of the model; step five, developing the dry film 8; step six, sputtering and depositing an insulating layer 1; step seven, sputtering and depositing a sensitive layer 2; step eight, sputtering and depositing a protective layer 3; and step nine, removing the residual dry film 8, and forming a model surface multi-parameter thin film sensing structure with a plurality of single-point multi-parameter micro-nano sensing structures. By a means ofThe dry film 8 has a size 10mm greater than the size of the area to be tested. And in the third step, the exposure treatment of the dry film 8 is carried out by exposing the dry film 8 under the ultraviolet light condition. And in the third step, standing for 15min after the exposure treatment of the dry film 8. The fifth step is to use Na with mass fraction of 5% 2 CO 3 The solution was subjected to development treatment. And step nine, removing the residual dry film 8 by using a NaOH solution with the mass fraction of 5%.
The dry film 8 is provided with a plurality of marks of single-point multi-parameter micro-nano sensing structures, and an insulating layer 1, a sensitive layer 2 and a protective layer 3 are sequentially deposited in the whole dry film range from bottom to top. The insulating layer 1, the sensitive layer 2 and the protective layer 3 deposited at each mark form a single-point multi-parameter micro-nano sensing structure 4, the single-point multi-parameter micro-nano sensing structure 4 consists of a thermal resistor 5 and a strain sensor 6, and the thermal resistor 5 and the strain sensor 6 are respectively connected with electrodes.
The platinum as a sensitive layer material of the thermal resistor 5 has temperature-sensitive property, and the change of the output resistance value of the sensitive layer material timely reflects the change of the surface temperature of the model; the sensitive layer material of the strain sensor 6 is a common piezoresistive material platinum, the sensitive grid structure is deformed after the surface of the model is stressed, and the deformation of the sensitive grid structure is reflected into the change of resistance values at two ends of the electrode, so that the surface strain of the model is represented. The thermal resistance and strain sensors operate synchronously, so that the temperature and strain at that single point on the model surface can be synchronously characterized.
Furthermore, the invention is especially suitable for a model with a circular arc surface, when the surface of the model is a curved surface, the curved surface substrate with the surface of the model as a thin film sensing structure is conformally prepared, a plurality of marks are arranged on a dry film, and the patterns of the temperature strain single-point multi-parameter micro-nano sensing structure are drawn at each mark of the dry film by referring to the temperature sensitive gate patterns and the strain sensitive gate patterns in the existing micro-nano sensing technology, and the multi-lattice thin film sensor is formed by the plurality of single-point multi-parameter micro-nano sensing structures, so that the in-situ synchronous measurement of the temperature and the strain of a plurality of lattices can be realized.
According to the invention, a plurality of sensors are integrated in the flexible film, and the multi-parameter flexible film sensor is conformally prepared on the surface of the model, so that the measurement precision is higher, the multi-parameter characteristic of the surface of the model can be obtained, the in-situ synchronous measurement of the multi-lattice temperature and the strain of the surface of the model can be realized, and the wind tunnel test efficiency and the data comparison precision are improved.
The foregoing drawings and description are only one embodiment of the present invention, but the specific scope of the present invention is not limited to the above description, and any simple replacement or modification within the scope of the technical idea disclosed in the present invention and according to the technical scheme of the present invention should be within the scope of the present invention.
Claims (7)
1. The multi-parameter thin film sensing structure is characterized in that a plurality of single-point multi-parameter micro-nano sensing structures (4) are arranged on the thin film sensing structure, and each single-point multi-parameter micro-nano sensing structure (4) consists of a thermal resistor (5) and a strain sensor (6).
2. A method of preparing a model surface multiparameter thin film sensing structure according to claim 1, comprising the steps of:
step one, polishing and cleaning pretreatment is carried out on the curved surface of the model (7);
step two, determining the size of a dry film (8) corresponding to a region to be tested of the model (7);
step three, exposing the dry film with a plurality of single-point multi-parameter micro-nano sensing structure marks;
attaching a dry film (8) on the surface of the model (7);
step five, developing the dry film (8);
step six, sputtering and depositing an insulating layer (1);
step seven, sputtering and depositing a sensitive layer (2);
step eight, sputtering and depositing a protective layer (3);
and step nine, removing the residual dry film (8), and forming the multi-parameter film sensing structure.
3. Method for the preparation of a model surface multiparameter film sensing structure according to claim 2, characterized in that the dry film (8) has a size 10mm larger than the size of the area to be tested.
4. The method for preparing a multi-parameter film sensor structure on a surface of a model according to claim 3, wherein the exposure treatment of the dry film (8) in the third step is that the dry film (8) is exposed under ultraviolet light.
5. The method for preparing a model surface multi-parameter film sensing structure according to claim 4, wherein the dry film (8) in the third step is left to stand for 15min after exposure treatment.
6. The method for preparing a model surface multi-parameter film sensing structure according to claim 5, wherein the fifth step uses 5% Na by mass fraction 2 CO 3 The solution was subjected to development treatment.
7. The method for preparing a model surface multi-parameter film sensing structure according to claim 6, wherein the step nine is to remove the residual dry film (8) by using a NaOH solution with a mass fraction of 5%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310884763.6A CN116593122A (en) | 2023-07-19 | 2023-07-19 | Multi-parameter film sensing structure on model surface and preparation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310884763.6A CN116593122A (en) | 2023-07-19 | 2023-07-19 | Multi-parameter film sensing structure on model surface and preparation method thereof |
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| CN116593122A true CN116593122A (en) | 2023-08-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202310884763.6A Pending CN116593122A (en) | 2023-07-19 | 2023-07-19 | Multi-parameter film sensing structure on model surface and preparation method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116734929A (en) * | 2023-08-16 | 2023-09-12 | 中北大学 | Distributed multi-parameter test system suitable for aircraft |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101060769A (en) * | 2007-01-26 | 2007-10-24 | 刘飞豹 | A method for producing the 3D products suitable for foldable forming |
| CN104165920A (en) * | 2014-08-07 | 2014-11-26 | 中国人民解放军空军工程大学 | Thin film sensor array and preparation method thereof |
| CN104931229A (en) * | 2015-06-12 | 2015-09-23 | 中国航天空气动力技术研究院 | Integrated thin film sensor for measuring surface heat flow rate in hypersonic flow |
| US20170122783A1 (en) * | 2014-06-13 | 2017-05-04 | MultiDimension Technology Co., Ltd. | Sensor chip used for multi-physical quantity measurement and preparation method thereof |
| CN109855687A (en) * | 2019-02-27 | 2019-06-07 | 中国工程物理研究院化工材料研究所 | A kind of flexibility temperature-strain integrated sensors array and preparation method |
| CN116399398A (en) * | 2023-04-07 | 2023-07-07 | 电子科技大学 | Strain temperature double-parameter high-temperature thin film sensor and preparation method thereof |
-
2023
- 2023-07-19 CN CN202310884763.6A patent/CN116593122A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101060769A (en) * | 2007-01-26 | 2007-10-24 | 刘飞豹 | A method for producing the 3D products suitable for foldable forming |
| US20170122783A1 (en) * | 2014-06-13 | 2017-05-04 | MultiDimension Technology Co., Ltd. | Sensor chip used for multi-physical quantity measurement and preparation method thereof |
| CN104165920A (en) * | 2014-08-07 | 2014-11-26 | 中国人民解放军空军工程大学 | Thin film sensor array and preparation method thereof |
| CN104931229A (en) * | 2015-06-12 | 2015-09-23 | 中国航天空气动力技术研究院 | Integrated thin film sensor for measuring surface heat flow rate in hypersonic flow |
| CN109855687A (en) * | 2019-02-27 | 2019-06-07 | 中国工程物理研究院化工材料研究所 | A kind of flexibility temperature-strain integrated sensors array and preparation method |
| CN116399398A (en) * | 2023-04-07 | 2023-07-07 | 电子科技大学 | Strain temperature double-parameter high-temperature thin film sensor and preparation method thereof |
Non-Patent Citations (1)
| Title |
|---|
| 马炳和;傅博;李建强;邓进军;董拴成;: "溅射-电镀微成型制造柔性热膜传感器阵列", 航空学报, no. 11, pages 2147 - 2151 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116734929A (en) * | 2023-08-16 | 2023-09-12 | 中北大学 | Distributed multi-parameter test system suitable for aircraft |
| CN116734929B (en) * | 2023-08-16 | 2023-11-07 | 中北大学 | Distributed multi-parameter test system suitable for aircraft |
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Application publication date: 20230815 |