CN106093461B - A kind of wind speed tester and preparation method thereof based on grapheme material - Google Patents
A kind of wind speed tester and preparation method thereof based on grapheme material Download PDFInfo
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- CN106093461B CN106093461B CN201610368793.1A CN201610368793A CN106093461B CN 106093461 B CN106093461 B CN 106093461B CN 201610368793 A CN201610368793 A CN 201610368793A CN 106093461 B CN106093461 B CN 106093461B
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- wind speed
- graphene
- speed tester
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/08—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring variation of an electric variable directly affected by the flow, e.g. by using dynamo-electric effect
- G01P5/086—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring variation of an electric variable directly affected by the flow, e.g. by using dynamo-electric effect by using special arrangements and constructions for measuring the dynamo-electric effect
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
Abstract
The invention discloses a kind of wind speed tester based on grapheme material, the wind speed tester includes graphene film and polymer double-layer, three-dimensional conformal graphene, the double-layer structure is equipped with an electrode in graphene film face, the conformal graphene of three-dimensional is equipped with another electrode, the double-layer structure and three-dimensional conformal graphene are overlapped by contact surface of polymer, it is connected between electrode by conducting wire, power supply and instrument is connected on the conducting wire.The invention also discloses the preparation methods of the wind speed tester.The wind speed tester can satisfy daily all wind speed tests, can react wind speed variation in real time, and have very high sensitivity and stability.The bio-compatibility of the wind speed tester is good, light-weight, and structure is simple, easy to process, directly obtains after can preparing transfer by grapheme material.
Description
Technical field
The invention belongs to sensor fields, and in particular to a kind of wind speed tester and its preparation side based on grapheme material
Method.
Background technique
" wind speed tester " refers to the senser element that can be experienced wind pressure and wind pressure is converted into usable output signal, effect
It is mainly used for monitoring the important instrument of wind speed, air quantity (air quantity=wind speed × cross-sectional area) size." wind speed detector " mainly by
" high-performance air velocity transducer " and " complete machine micro computer detects controller " two parts composition, therefore can monitor simultaneously and show and be surveyed
The variation of wind speed etc.." wind speed detector " has broad application prospects, on the market, in meteorology, road and bridge, building, ring
Border monitoring, navigation measurement and new energy etc. need to use in the field for carrying out wind speed measurement.Wind speed is aobvious using LED mode number
Show, the measurement range of conventional " wind speed detector " wind speed：0-30m/s, and can set and show the upper limit value and lower limit value of wind speed,
Wind speed detector, which can control output equipment or give a dinner for a visitor from afar, to be shielded device and carries out output alarm.
But " wind speed detector " currently on the market still has many limitations, such as：It structurally needs complicated
Hardware circuit and software program；And mostly application range is relatively narrow, is difficult in high temperature, high humidity, more dirt and direct sunlight
It is applied Deng place；Simultaneously as common in the market propeller type air velocity transducer, three-cup wind speed sensor and ultrasonic wave wind
Fast sensor etc. " wind speed detector ", application is not also overripened at present, and sensitivity is lower, precision is poor, dynamic property one
As the disadvantages of.In view of structure optimization, measurement performance improve, reliability doubles, reduces the factors such as cost, the present invention provides one
Wind speed tester of the kind based on grapheme material.
Graphene is the nanometer material that known world is most thin, most hard as a kind of two-dimensional monoatomic layer thin-film material
Material has excellent mechanical performance.Graphene is the highest substance of mankind's known strength, and also harder than diamond, intensity compares the world
Above best taller upper 100 times of steel.The resistivity of graphene is extremely low, and the speed of electron transfer is exceedingly fast, and has good
Transparency and thermal conductivity are expected to can be used to develop thinner, conductive speed electronic component of new generation faster.Three-dimensional conformal graphite
Alkene possesses excellent mechanical property, high sensitivity and stability, graphene/polymerization in three-dimensional conformal graphene over-assemble
Object structure is used directly for the test of wind pressure, and bigger advantage can be played in sensor field.
Summary of the invention
In view of this, the wind speed tester that the purpose of the present invention is to provide a kind of based on grapheme material and its preparation side
Method, the wind speed tester have simple structure and convenient processing, high sensitivity, light-weight, and it is excellent that flexible and bio-compatibility is good etc.
Point.
In order to achieve the above objectives, the present invention provides the following technical solutions：
1, a kind of wind speed tester based on grapheme material, the wind speed tester includes graphene film and polymer
Double-layer structure, three-dimensional conformal graphene, the double-layer structure are equipped with an electrode, the conformal stone of three-dimensional in graphene film face
Black alkene is equipped with another electrode, and the double-layer structure and three-dimensional conformal graphene are overlapped by contact surface of polymer, between electrode
It is connected by conducting wire, power supply and instrument is connected on the conducting wire.
Preferably, the conformal graphene of three-dimensional uses the quartz substrate surface with three-dimensional grating structure to deposit graphene
It forms.
Preferably, the polymer is PDMS, and PDMS is the english abbreviation of dimethyl silicone polymer.
2, the preparation method of the wind speed tester based on grapheme material, includes the following steps：
1) the three-dimensional conformal graphene of preparation：On quartz substrate surface, preparation has periodic optical grating construction, then uses
Tube-type chemical vapour deposition process deposits graphene film on optical grating construction surface, obtains three-dimensional conformal graphene；
2) graphene film and polymer double-layer are prepared：Stone is prepared using chemical vapour deposition technique on the metallic substrate
Black alkene film forms graphene film and polymer double-layer using polymer transfer graphene；
3) electrode is prepared：Three-dimensional conformal graphene and plain conductor one end are connected to electrode, by graphene film and
The plain conductor other end is connected to electrode, then folds double-layer structure by contact surface of polymer with three-dimensional conformal graphene
It closes.
Further, the preparation method further includes step 4)：The tester is connect with power supply and instrument, is gradually changed
The test of cold air blast velocity progress sensing characteristics.
Preferably, the step 2) metallic substrates are copper foil or nickel foil.
Preferably, production electrode uses silver paste brushing, hot evaporation, DC magnetic cosputtering, silk-screen printing or photolithography method.
The beneficial effects of the present invention are：
Wind speed tester provided by the invention based on grapheme material is by " graphene and polymer double-layer " and " three
Tie up conformal graphene " it is separately connected a termination electrode and is compounded to form up and down, it can satisfy daily all wind speed tests, it can be real-time
Reaction wind speed variation, and have very high sensitivity and stability.The bio-compatibility of the wind speed tester is good, light-weight,
And structure is simple, and it is easy to process, it is directly obtained after transfer being prepared by grapheme material.
Wind speed tester disclosed in this invention can measure wind pressure corresponding to 0-12 grades of wind, and can be obtained by the wind pressure
Corresponding wind speed, it is consistent with the test scope of wind speed tester currently on the market, the wind speed of 0-30m/s can be tested.
Detailed description of the invention
In order to keep the purpose of the present invention, technical scheme and beneficial effects clearer, the present invention provides following attached drawing：
Fig. 1 shows the schematic diagrams that grapheme material is prepared based on CVD method；
Fig. 2 indicates the sectional view of three-dimensional conformal graphene；
The structure of wind speed tester of Fig. 3 expression based on grapheme material；
The wind speed sensing characteristics of Fig. 4 expression wind speed tester；
Fig. 5 indicates the enlarged drawing of electric current and wind pressure corresponding to 0-8 grades of wind scales.
Specific embodiment
Below in conjunction with attached drawing, a preferred embodiment of the present invention will be described in detail.Specific item is not specified in embodiment
The experimental method of part, usually according to conventional conditions or according to the manufacturer's recommendations.
The preparation step of wind speed tester based on grapheme material is as follows：
Step 1：The preparation of graphene film and PDMS double-layer structure
Substrate copper foil is first placed in acetone, 95vol% ethyl alcohol, is respectively cleaned by ultrasonic 2min in pure water, with being dried with nitrogen, then
It is placed in the preparation for carrying out graphene in the vacuum cavity of tubular type CVD system, obtains graphene film, as shown in Figure 1, wherein 1
It is gas reaction cavity for CVD tube furnace, 2,3 be grapheme material, and 4 be growth substrate, and 5 be mechanical pump.By resulting graphite
Spin coating a layer thickness is the PDMS of 50um on alkene film, is placed in 80 DEG C of baking ovens and solidifies PDMS, obtains PDMS/ graphene/copper foil
Structure.Copper foil is etched, then resulting structure deionized water, hydrochloric acid etc. are cleaned repeatedly, is dried with nitrogen and obtains PDMS and graphite
Alkene film bilayer structure.
Step 2：The preparation of three-dimensional conformal graphene
Firstly, using optical grating construction mask plate in quartz substrate photomask surface, development obtains the surfacial pattern of optical grating construction；
Then it is prepared using fluoroform gas come etch quartz substrate with periodic light with method for etching plasma
Grid structure obtains the quartz substrate that surface has three-dimensional grating structure；Using tube-type chemical vapor deposition (CVD) method, such as Fig. 1
It is shown, graphene film is deposited in the quartz substrate that surface has three-dimensional grating structure, three-dimensional conformal graphene is obtained, such as schemes
Shown in 2, wherein 3 indicate grapheme material, 4 indicate growth substrate.Its preparation temperature is 1050 DEG C, sedimentation time 90min, gas
Body type is with flow-rate ratio：Argon gas：Hydrogen：Methane=200:60:5.
Step 3：Make electrode
Silver wire and graphene and one end of the graphene face of PDMS double-layer structure are connected using evaporation deposition method
As electrode.Silver wire and graphene nano wall one end are connected as electrode using ink-jet printing.Graphene is thin
Film and PDMS double-layer structure single electrode and three-dimensional conformal graphene single electrode are piled up as electrode up and down.
Step 4：The production of wind speed tester based on grapheme material and the test of sensing capabilities
The above-mentioned resulting wind speed tester based on grapheme material is connect with power supply, instrument, as shown in figure 3, wherein 3
Indicate grapheme material, 4 indicate growth substrate, and 6 be polymer, and 7 be graphene film, and 8 be metal electrode, and 9 be wind speed, and 10 are
Instrument, 11 be power supply, using formula：Y=8.36 × 10-13·exp[x/58.61]+6.37×10-7·exp[x/506.82]-
5.4×10-7, wherein y represents electric current, and x represents wind pressure, carries out sensing capabilities test to the wind speed tester, obtains as shown in Figure 4
The current value measured under different wind pressure, wherein 0~12 indicate wind scale, Fig. 5 indicate 0-8 grades of wind scales corresponding to
The enlarged drawing of electric current and wind pressure.
It can be seen that by Fig. 4 and Fig. 5, the wind speed tester disclosed by the invention based on grapheme material can pass through voltage electricity
The corresponding upper wind speed size of flow valuve.
Finally, it is stated that preferred embodiment above is only used to illustrate the technical scheme of the present invention and not to limit it, although logical
It crosses above preferred embodiment the present invention is described in detail, however, those skilled in the art should understand that, can be
Various changes are made to it in form and in details, without departing from claims of the present invention limited range.
Claims (7)
1. a kind of wind speed tester based on grapheme material, it is characterised in that：The wind speed tester includes graphene film
With polymer double-layer, three-dimensional conformal graphene, the double-layer structure is equipped with an electrode in graphene film face, and described three
Conformal graphene is tieed up to overlap equipped with another electrode, the double-layer structure and three-dimensional conformal graphene by contact surface of polymer,
It is connected between electrode by conducting wire, power supply and instrument is connected on the conducting wire.
2. a kind of wind speed tester based on grapheme material according to claim 1, which is characterized in that the three-dimensional is conformal
Graphene uses the quartz substrate surface deposition graphene with three-dimensional grating structure to form.
3. a kind of wind speed tester based on grapheme material according to claim 1, which is characterized in that the polymer is
PDMS。
4. the preparation method of the wind speed tester described in any one of claims 1 to 3 based on grapheme material, which is characterized in that
Include the following steps：
1) the three-dimensional conformal graphene of preparation：On quartz substrate surface, preparation has periodic optical grating construction, then uses tubular type
Chemical vapour deposition technique deposits graphene film on optical grating construction surface, obtains three-dimensional conformal graphene；
2) graphene film and polymer double-layer are prepared：Process for preparing graphenes by chemical vapour deposition is used on the metallic substrate
Film forms graphene film and polymer double-layer using polymer transfer graphene；
3) electrode is prepared：Three-dimensional conformal graphene and plain conductor one end are connected to electrode, by graphene film and metal
The conducting wire other end is connected to electrode, then overlaps double-layer structure and three-dimensional conformal graphene by contact surface of polymer.
5. the preparation method of the wind speed tester based on grapheme material according to claim 4, which is characterized in that the system
Preparation Method further includes step 4)：The tester is connect with power supply and instrument, cold air blast velocity is gradually changed and carries out sensing characteristics
Test.
6. the preparation method of the wind speed tester based on grapheme material according to claim 4, which is characterized in that step 2)
The metallic substrates are copper foil or nickel foil.
7. the preparation method of the wind speed tester based on grapheme material according to claim 4, which is characterized in that production electricity
Pole uses silver paste brushing, hot evaporation, DC magnetic cosputtering, silk-screen printing or photolithography method.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107436365B (en) * | 2017-08-14 | 2024-01-30 | 中北大学 | Graphene wind speed and direction sensor |
| CN111308122B (en) * | 2019-12-06 | 2022-02-25 | 云南师范大学 | Gas flow velocity detector and system based on boron-doped silicon quantum dots |
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| CN102338809A (en) * | 2011-06-21 | 2012-02-01 | 南京航空航天大学 | Method and device for airflow electricity generation and flow speed measurement based on graphene |
| CN104018136A (en) * | 2014-04-30 | 2014-09-03 | 中国科学院重庆绿色智能技术研究院 | Method for directly and conformally covering graphene film on full surface of substrate with three-dimensional structure |
| CN104316086A (en) * | 2014-11-13 | 2015-01-28 | 中国科学院重庆绿色智能技术研究院 | Airflow sensor based on graphene nanowall and manufacturing method |
| EP2924444A1 (en) * | 2014-03-28 | 2015-09-30 | AIT Austrian Institute of Technology GmbH | Flow and pressure sensitive graphene sensor |
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2016
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| CN102338809A (en) * | 2011-06-21 | 2012-02-01 | 南京航空航天大学 | Method and device for airflow electricity generation and flow speed measurement based on graphene |
| EP2924444A1 (en) * | 2014-03-28 | 2015-09-30 | AIT Austrian Institute of Technology GmbH | Flow and pressure sensitive graphene sensor |
| CN104018136A (en) * | 2014-04-30 | 2014-09-03 | 中国科学院重庆绿色智能技术研究院 | Method for directly and conformally covering graphene film on full surface of substrate with three-dimensional structure |
| CN104316086A (en) * | 2014-11-13 | 2015-01-28 | 中国科学院重庆绿色智能技术研究院 | Airflow sensor based on graphene nanowall and manufacturing method |
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