CN116593068A - Vacuum synchronism measuring system, method and control method of SPERF device - Google Patents

Vacuum synchronism measuring system, method and control method of SPERF device Download PDF

Info

Publication number
CN116593068A
CN116593068A CN202310496058.9A CN202310496058A CN116593068A CN 116593068 A CN116593068 A CN 116593068A CN 202310496058 A CN202310496058 A CN 202310496058A CN 116593068 A CN116593068 A CN 116593068A
Authority
CN
China
Prior art keywords
sperf
vacuum
time
optical fiber
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310496058.9A
Other languages
Chinese (zh)
Inventor
程江南
杨济华
金成刚
刘长雁
万杰
鄂鹏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
Original Assignee
Harbin Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology filed Critical Harbin Institute of Technology
Priority to CN202310496058.9A priority Critical patent/CN116593068A/en
Publication of CN116593068A publication Critical patent/CN116593068A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00Control of fluid pressure
    • G05D16/20Control of fluid pressure characterised by the use of electric means
    • G05D16/2006Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G05D16/2026Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

A vacuum synchronism measuring system, a method and a control method of a SPERF device relate to the technical field of space plasma environment simulation. The invention aims to solve the problems that the time delay from the start of inflation to the time when vacuum meets the condition can not be accurately measured and the experimental requirement can not be met in the conventional SPERF device experiment. The invention provides a vacuum synchronism measuring system, a method and a control method suitable for a SPERF device, which can measure high synchronism of an inflation system and a vacuum gauge measuring value, give out vacuum curve requirements meeting experimental requirements according to the characteristics of the inflation system and the vacuum gauge, and provide a vacuum pressure and a control method of a vacuum curve meeting the experimental requirements.

Description

Vacuum synchronism measuring system, method and control method of SPERF device
Technical Field
The invention belongs to the technical field of space plasma environment simulation.
Background
The operation mode of the near-earth space plasma environment simulation cabin in the SPERF device (space plasma environment simulation and research device) is a ready and triggered burst mode, the effective experiment time is required to be less than or equal to 100ms, and the requirement on the synchronism of each piece of equipment is also high. The vacuum pressure of the working medium gas in the vacuum tank is an important parameter of the plasma experiment, and the success or failure of the experiment is related, so that special equipment is needed to adjust the vacuum pressure of the working medium gas in the vacuum tank. The vacuum control system is an important component of the near-earth space plasma environment simulation cabin, and can provide a vacuum working environment required by experiments for the near-earth space plasma environment simulation cabin.
As shown in fig. 1, three vacuum gauges (cold gauges) are installed on a vacuum tank of a conventional SPERF apparatus, and are used to measure the pressure on the inner wall side of the vacuum tank. The vacuum control system reads vacuum values from the three cold gauges in an RS485 communication mode, and the scanning period is 500ms. Meanwhile, the vacuum control system also controls the vacuum acquisition equipment to extract the gas in the vacuum tank in a DP communication mode so as to maintain the vacuum state of the vacuum tank. The inflation system consists of a driver and 8 piezoelectric ceramic valves and is used for filling working medium gas (hydrogen H2) into the vacuum tank. Wherein the driver supplies power to the piezoceramic valve through the coaxial line to control the piezoceramic valve switch. The timing synchronization system triggers the driver through the triggering optical fiber, so as to control the opening time and the closing time of the piezoelectric ceramic valve. The timing synchronization system, the vacuum control system and the inflation system driver respectively conduct data interaction with the central control system in a TCP/IP communication mode, an OPC communication mode and an RS422 communication mode, and receive the centralized control of the central control system, wherein the data interaction period is 1s.
In the experimental process of the SPERF device, in order to ensure the concentration and pressure of working medium gas, the pressure control in the vacuum tank adopts a mode of pumping and filling simultaneously, namely: the vacuum control system controls the vacuum acquisition equipment to extract the gas in the vacuum tank, continuously pump out leaked air, and when the pressure in the vacuum tank is reduced to 1e-4Pa, the gas filling system fills working medium gas into the vacuum tank to maintain the concentration and the pressure of the working medium gas in a short time. And the experiment process requires that the experiment is started after the vacuum environment reaches the standard in the period of 9.9e-2Pa to 1e-2Pa, and the experiment duration is not more than 100ms.
The inflation system is triggered by a timing synchronization system and keeps high-synchronism working with other equipment of the near-earth space plasma environment simulation cabin (the time deviation is less than 1us level). However, the inflation system data and the vacuum gauge measurement data are summarized in the central control system, and the data summarizing period is 1s, so that the synchronism of the inflation system data and the vacuum gauge measurement data is more than 1s, the time delay from the start of inflation to the time when the vacuum meets the condition cannot be accurately measured, and the experimental requirement cannot be met.
Disclosure of Invention
The invention aims to solve the problems that when the existing SPERF device is used for experiments, the time delay from the start of inflation to the time when vacuum meets the conditions cannot be accurately measured, and the experiment requirements cannot be met, and provides a system, a method and a control method for measuring the vacuum synchronism of the SPERF device.
The vacuum synchronism measuring method of the SPERF device specifically comprises the following steps:
a path of reference optical fiber with the same triggering time and pulse width as those of the triggering optical fiber is connected to a timing synchronization system of the SPERF device, and the triggering optical fiber is an optical fiber for outputting a triggering signal to an inflation system of the SPERF device by the timing synchronization system;
the time T of the rising edge of the trigger signal is acquired through the reference optical fiber 0
The analog voltage signal acquired by the ith vacuum gauge when the SPERF device performs the jth experiment is acquired, and the analog voltage signal is recorded to reach the experimental pressure P 0 Time T of (2) ij I=1, 2, I, I is the number of vacuum gauges in the SPERF device, and j is more than or equal to 5;
calculate T 0 And T is ij Time interval delta T between ij And an absolute value of a difference between every two time intervals;
the maximum absolute value is selected as the rising edge of the trigger signal until the vacuum gauge measurement value reaches the experimental pressure P 0 Is set, is provided.
A vacuum synchronicity measurement system of a SPERF device, the vacuum synchronicity measurement system comprising: the acquisition unit, the timing unit, the calculation unit and the measurement unit,
the timing synchronization system of the SPERF device is connected with a reference optical fiber which has the same trigger time and pulse width as those of the trigger optical fiber, and the reference optical fiber is connected with the trigger signal input end of the acquisition unit, so that the acquisition unit can receive the trigger signal simultaneously with the inflation system of the SPERF device, and the trigger optical fiber is an optical fiber for outputting the trigger signal to the inflation system of the SPERF device by the timing synchronization system;
the analog voltage signal output end of the vacuum gauge in the SPERF device is connected with the analog voltage signal input end of the acquisition unit;
the timing unit is used for recording the time T when the acquisition unit receives the rising edge of the trigger signal 0 And the analog voltage signal acquired by the ith vacuum gauge reaches the experimental pressure P when the SPERF device performs the jth experiment 0 Time T of (2) ij I=1, 2, I, I is the number of vacuum gauges in the SPERF device, and j is more than or equal to 5;
the calculating unit is used for calculating T 0 And T is ij Time interval delta T between ij And the absolute value of the difference between every two time intervals,
the measuring unit is used for selecting the maximum absolute value as the rising edge of the trigger signal until the vacuum gauge measuring value reaches the experimental pressure P 0 Is set, is provided.
The control method of the SPERF device specifically comprises the following steps:
the method for measuring the vacuum synchronism of the SPERF device is adopted to measure the time jitter T;
controlling the valve position of the piezoceramic valve by adjusting the threshold voltage of the driver in the SPERF device until deltat BA > T+t, where Δt BA Vacuum pressure measurement during inflation of the vacuum tank for the SPERF device was from 80% p 0 Rising to P 0 T is the measured reaction time of the vacuum gauge in the SPERF device, P 0 Is the experimental pressure;
pulse width of the piezoelectric ceramic valve is adjusted by adjusting pulse width of the trigger signal until the peak value of vacuum pressure measurement reaches P 0
Adjusting the pumping rate of the vacuum acquisition equipment through a vacuum control system of the SPERF device until deltat AC > T+t, where Δt AC Vacuum pressure measurement from P for vacuum tank of SPERF device after inflation is completed 0 Down to 80% P 0 Is a time interval of (a) for a time period of (b).
Further, the above experimental pressure P 0 Between 9.9e-7Pa and 1e-2 Pa.
Further, the voltage range of the analog voltage signal of the vacuum gauge in the SPERF device is 0V to 10V.
Further, the reference optical fiber is connected with the acquisition unit through a photoelectric converter.
Further, t=50 ms. The invention has the following effects: the invention can measure the high synchronism of the inflation system and the vacuum gauge measurement value and provide a vacuum working environment meeting the experimental requirements.
The invention provides a vacuum synchronism measuring system, a method and a control method suitable for a SPERF device, which can measure high synchronism of an inflation system and a vacuum gauge measuring value, give out vacuum curve requirements meeting experimental requirements according to the characteristics of the inflation system and the vacuum gauge, and provide a vacuum pressure and a control method of a vacuum curve meeting the experimental requirements.
Drawings
FIG. 1 is a schematic diagram of the operation of an inflation system and a vacuum control system in a conventional SPERF device;
FIG. 2 is a schematic diagram of a system for measuring vacuum synchronicity of a SPERF device according to the present invention;
FIG. 3 is a schematic diagram of experimental pressure requirements.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention. It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other.
The first embodiment is as follows: the method for measuring vacuum synchronism of the SPERF device according to the present embodiment will be specifically described with reference to fig. 2, and specifically is as follows:
and a reference optical fiber with the same triggering time and pulse width as those of the triggering optical fiber is connected to the timing synchronization system of the SPERF device, and the triggering optical fiber is an optical fiber for outputting a triggering signal to the inflation system of the SPERF device by the timing synchronization system.
The time T of the rising edge of the trigger signal is acquired through the reference optical fiber 0
The analog voltage signal acquired by the ith vacuum gauge when the SPERF device performs the jth experiment is acquired, and the analog voltage signal is recorded to reach the experimental pressure P 0 Time T of (2) ij ,i=1,2,3,j≥5。
Calculate T 0 And T is ij Time interval delta T between ij And calculate DeltaT ij Absolute value of the difference from the remaining (3 j-1) time intervals.
The maximum absolute value is selected as the rising edge of the trigger signal until the vacuum gauge measurement value reaches the experimental pressure P 0 Is set, is provided.
Wherein, the experimental pressure P 0 The voltage range of the analog voltage signal of the vacuum gauge in the SPERF device is 0V-10V between 9.9e-7Pa and 1e-2 Pa.
The second embodiment is as follows: referring to fig. 2, a vacuum synchronism measurement system of a SPERF device according to the present embodiment includes: the device comprises an acquisition unit, a timing unit, a calculation unit and a measurement unit. The sampling rate of the acquisition unit is 1M/s, the number of sampling channels is 12, and the input voltage range is 0V-100V.
In this embodiment, the three vacuum gauges of the SPERF device include analog output ports, and can connect analog voltage signals to analog voltage signal input terminals of the acquisition unit. The vacuum gauge can realize no delay from the vacuum gauge measurement value to the acquisition system in an analog output mode.
The timing synchronization system of the SPERF device is connected with a reference optical fiber which has the same trigger time and pulse width as those of the trigger optical fiber, and the reference optical fiber is connected with the trigger signal input end of the acquisition unit through a photoelectric converter, so that the acquisition unit can receive the trigger signal simultaneously with the inflation system of the SPERF device. The driver output voltage controls the switch of the piezoelectric ceramic valve, the working medium gas is filled into the vacuum tank, and the triggering optical fiber is an optical fiber for outputting a triggering signal to the inflation system of the SPERF device by the timing synchronization system.
The timing unit is used for recording the time T when the acquisition unit receives the rising edge of the trigger signal 0 And the analog voltage signal acquired by the ith vacuum gauge reaches the experimental pressure P when the SPERF device performs the jth experiment 0 Time T of (2) ij ,i=1,2,3,j≥5。
The calculating unit is used for calculating T 0 And T is ij Time interval delta T between ij And calculate DeltaT ij Absolute value of the difference from the remaining (3 j-1) time intervals.
The measuring unit is used for selecting the maximum absolute value as the rising edge of the trigger signal until the vacuum gauge measuring value reaches the experimental pressure P 0 Is set, is provided.
Wherein, the experimental pressure P 0 The voltage range of the analog voltage signal of the vacuum gauge in the SPERF device is 0V-10V between 9.9e-7Pa and 1e-2 Pa.
And a third specific embodiment: referring to fig. 3, specifically describing the control method of the SPERF device according to the present embodiment, considering that the measurement response time t=50 ms of the vacuum gauge is considered, and the accuracy range is 20%, the vacuum curve satisfying the vacuum pressure required for the experiment is as shown in fig. 3, and the timing synchronization system starts to inflate at the point D and ends to inflate at the point E; point A is the peak value P of the vacuum pressure measurement 0 (experimental pressure); during the inflation process, the measured value of the vacuum pressure reaches 80% P at the point B 0 The method comprises the steps of carrying out a first treatment on the surface of the After the inflation is finished, the measured value of the vacuum pressure reaches 80% P at the moment of the point C 0
The time jitter T is measured by the vacuum synchronization measurement method of the SPERF device according to the above embodiment.
Controlling the valve position of the piezoceramic valve by adjusting the threshold voltage of the driver in the SPERF device until deltat BA > T+t, where Δt BA Vacuum pressure measurement during inflation of the vacuum tank for the SPERF device was from 80% p 0 Rising to P 0 T is the measured reaction time of the vacuum gauge in the SPERF device.
Pulse width of the piezoelectric ceramic valve is adjusted by adjusting pulse width of the trigger signal until the peak value of vacuum pressure measurement reaches P 0
Adjusting the pumping rate of the vacuum acquisition equipment through a vacuum control system of the SPERF device until deltat AC > T+t, where Δt AC Vacuum pressure measurement from P for vacuum tank of SPERF device after inflation is completed 0 Down to 80% P 0 Is a time interval of (a) for a time period of (b).
Although the invention herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the present invention. It is therefore to be understood that numerous modifications may be made to the illustrative embodiments and that other arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims. It should be understood that the different dependent claims and the features described herein may be combined in ways other than as described in the original claims. It is also to be understood that features described in connection with separate embodiments may be used in other described embodiments.

Claims (10)

  1. A method for measuring vacuum synchronism of a SPERF device, characterized in that,
    a path of reference optical fiber with the same triggering time and pulse width as those of the triggering optical fiber is connected to a timing synchronization system of the SPERF device, and the triggering optical fiber is an optical fiber for outputting a triggering signal to an inflation system of the SPERF device by the timing synchronization system;
    the time T of the rising edge of the trigger signal is acquired through the reference optical fiber 0
    The analog voltage signal acquired by the ith vacuum gauge when the SPERF device performs the jth experiment is acquired, and the analog voltage signal is recorded to reach the experimental pressure P 0 Time T of (2) ij I=1, 2, I, I is the number of vacuum gauges in the SPERF device, and j is more than or equal to 5;
    calculate T 0 And T is ij Time interval delta T between ij And an absolute value of a difference between every two time intervals;
    the maximum absolute value is selected as the rising edge of the trigger signal until the vacuum gauge measurement value reaches the experimental pressure P 0 Is set, is provided.
  2. 2. The method for measuring vacuum synchronicity of a SPERF device according to claim 1, wherein,
    the experimental pressure P 0 Between 9.9e-7Pa and 1e-2 Pa.
  3. 3. The method for measuring vacuum synchronism of a SPERF device according to claim 1 or 2, characterized in that a voltage range of an analog voltage signal of a vacuum gauge in the SPERF device is 0V to 10V.
  4. A vacuum synchronicity measurement system of a sperf device, the vacuum synchronicity measurement system comprising: the acquisition unit, the timing unit, the calculation unit and the measurement unit,
    the timing synchronization system of the SPERF device is connected with a reference optical fiber which has the same trigger time and pulse width as those of the trigger optical fiber, and the reference optical fiber is connected with the trigger signal input end of the acquisition unit, so that the acquisition unit can receive the trigger signal simultaneously with the inflation system of the SPERF device, and the trigger optical fiber is an optical fiber for outputting the trigger signal to the inflation system of the SPERF device by the timing synchronization system;
    the analog voltage signal output end of the vacuum gauge in the SPERF device is connected with the analog voltage signal input end of the acquisition unit;
    the timing unit is used for recording the time T when the acquisition unit receives the rising edge of the trigger signal 0 And the analog voltage signal acquired by the ith vacuum gauge reaches the experimental pressure P when the SPERF device performs the jth experiment 0 Time T of (2) ij I=1, 2, I, I is the number of vacuum gauges in the SPERF device, and j is more than or equal to 5;
    the calculating unit is used for calculating T 0 And T is ij Time interval delta T between ij And the absolute value of the difference between every two time intervals,
    the measuring unit is used for selecting the maximum absolute value as the rising edge of the trigger signal until the vacuum gauge measuring value reaches the experimental pressure P 0 Is set, is provided.
  5. 5. The vacuum synchronicity measurement system of a SPERF device of claim 4,
    the experimental pressure P 0 Between 9.9e-7Pa and 1e-2 Pa.
  6. 6. The system of claim 4, wherein the analog voltage signal of the vacuum gauge in the SPERF device has a voltage range of 0V to 10V.
  7. 7. The system of claim 4, 5 or 6, wherein the reference fiber is connected to the acquisition unit via a photoelectric converter.
  8. A control method of a SPERF device, characterized in that,
    measuring time jitter T by using the vacuum synchronism measuring method of the SPERF device according to any one of the claims 1 to 3;
    controlling the valve position of the piezoceramic valve by adjusting the threshold voltage of the driver in the SPERF device until deltat BA > T+t, where Δt BA Vacuum pressure measurement during inflation of the vacuum tank for the SPERF device was from 80% p 0 Rising to P 0 T is the measured reaction time of the vacuum gauge in the SPERF device, P 0 Is the experimental pressure;
    by adjustingPulse width of the piezoelectric ceramic valve is regulated by regulating pulse width of the trigger signal until the peak value of vacuum pressure measurement reaches P 0
    Adjusting the pumping rate of the vacuum acquisition equipment through a vacuum control system of the SPERF device until deltat AC > T+t, where Δt AC Vacuum pressure measurement from P for vacuum tank of SPERF device after inflation is completed 0 Down to 80% P 0 Is a time interval of (a) for a time period of (b).
  9. 9. The control method of a SPERF device of claim 8, wherein t = 50ms.
  10. 10. The control method of a SPERF device according to claim 8 or 9, wherein,
    the experimental pressure P 0 Between 9.9e-7Pa and 1e-2 Pa.
CN202310496058.9A 2023-05-05 2023-05-05 Vacuum synchronism measuring system, method and control method of SPERF device Pending CN116593068A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310496058.9A CN116593068A (en) 2023-05-05 2023-05-05 Vacuum synchronism measuring system, method and control method of SPERF device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310496058.9A CN116593068A (en) 2023-05-05 2023-05-05 Vacuum synchronism measuring system, method and control method of SPERF device

Publications (1)

Publication Number Publication Date
CN116593068A true CN116593068A (en) 2023-08-15

Family

ID=87592953

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310496058.9A Pending CN116593068A (en) 2023-05-05 2023-05-05 Vacuum synchronism measuring system, method and control method of SPERF device

Country Status (1)

Country Link
CN (1) CN116593068A (en)

Similar Documents

Publication Publication Date Title
US9791867B2 (en) Flow control device equipped with flow monitor
US6913031B2 (en) Pulse shot type flow controller and pulse shot type flow controlling method
US9261884B2 (en) Apparatus for dividing and supplying gas and method for dividing and supplying gas by use of this apparatus
CN102460643B (en) Substrate coating apparatus
US20140223988A1 (en) Pressure gauge calibration apparatus
WO2000040346A1 (en) Method and device for injecting a fixed quantity of liquid
TW200519360A (en) Systems and methods for measurement of low liquid flow rates
US10386864B2 (en) Mass flow controller and a method for controlling a mass flow rate
JP3670900B2 (en) Transmitter automatic calibration method and transmitter automatic calibration apparatus
EP0540915A1 (en) Fine pressure control system for high pressure gas
CN116593068A (en) Vacuum synchronism measuring system, method and control method of SPERF device
US20090299659A1 (en) Method for determining the total leak rate of systems impinged upon by pressure,and control apparatus for carrying out said method
US6825591B2 (en) Method for controlling a piezoelectric drive and a piezoelectric drive for the implementation of the method
US8690009B2 (en) Automated vacuum assisted valve priming system and methods of use
JP3037439B2 (en) Pressure injection device for capillary electrophoresis device
KR101997394B1 (en) Apparatus for measuring gas and method for measuring the gas
EP3109714A1 (en) Feedback control device
US8241590B2 (en) Discharge volume control method, discharge pressure control method, and microbody forming method
CN105629105B (en) electrostatic transducer reliability test method and system
CN112945544A (en) Intelligent setting pressure measuring system for safety valve
US10248137B2 (en) Method for controlling flow rate of fluid, mass flow rate control device for executing method, and mass flow rate control system utilizing mass flow rate control device
JP5011812B2 (en) Method for discharging liquid into cell and microinjection apparatus
CN113237613A (en) Positive pressure leak hole calibration method and device
KR20100108690A (en) Flow rate controlling apparatus using gas pressure control in liquid material supplying apparatus
CN111141369A (en) Gas flow controller flow calibration device for space

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination