CN111141369A - Gas flow controller flow calibration device for space - Google Patents
Gas flow controller flow calibration device for space Download PDFInfo
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- CN111141369A CN111141369A CN201911363972.6A CN201911363972A CN111141369A CN 111141369 A CN111141369 A CN 111141369A CN 201911363972 A CN201911363972 A CN 201911363972A CN 111141369 A CN111141369 A CN 111141369A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
- G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
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Abstract
The invention discloses a flow calibration device of a gas flow controller for a space, which is provided with a variable volume mechanism, wherein the variable volume mechanism is adopted to provide test gas with unchanged pressure for the gas flow controller for the space to be calibrated, and simultaneously, the other side of the gas flow controller for the space to be calibrated is ensured to be in a vacuum environment, so that the ground calibration problem of the gas flow controller for the space with a vacuum environment at an air outlet is solved, therefore, the flow calibration can be carried out on the gas flow controller with the inlet pressure of 1-3Mpa and the outlet pressure of less than 1000Pa or approaching vacuum, the flow dynamic characteristic of the gas flow controller to be calibrated can be obtained, the time consumption is short, and the accuracy is high.
Description
Technical Field
The invention belongs to the technical field of measurement calibration, and particularly relates to a flow calibration device of a gas flow controller for a space.
Background
The gas flow controller used under normal pressure is generally calibrated by using a gas flow standard device, such as a soap film type, a bell jar type and the like (see "gas flowmeter", edited by the master of steels of shanghao, xu ying hua and prince, china measurement publishing house, 2007). The space gas flow controller is mainly used for accurately supplying the mass of micro-flow gas of a satellite electric propulsion system, a potential control system and the like, the gas flow is controlled to be below 10sccm generally, the inlet working pressure of the controller is 1-3MPa generally, and the outlet is less than 1000Pa or close to vacuum generally. Because the outlet of the gas flow controller is in a low-pressure state and the precision of controlling the gas flow is high, when the conventional method is adopted to calibrate the space flow controller, the existing flow calibration method is not applicable or the calibration data is inaccurate because the calibration state of the gas flow meter is inconsistent with the actual working state.
Disclosure of Invention
In view of this, the invention provides a flow calibration device for a gas flow controller for a space, which can accurately calibrate the flow of the gas flow controller for the space with a vacuum state of an air outlet.
The invention provides a flow calibration device of a gas flow controller for a space, which comprises a volume-variable mechanism and a pressure control system 13;
the pressure control system 13 is hermetically connected with the volume-variable mechanism, and the pressure control system 13 controls the volume of the volume-variable mechanism to keep a set air pressure value in the volume-variable mechanism; the variable volume mechanism is connected with the gas inlet of the gas flow controller to be calibrated in a sealing way to output test gas for the gas flow controller to be calibrated, and the gas outlet of the gas flow controller to be calibrated is kept in a vacuum state; before calibration, the variable volume mechanism is set to be the maximum volume, and the derivative of the volume variable quantity of the variable volume mechanism to the calibration time in the calibration process is the actual flow of the gas flow controller to be calibrated.
Further, the variable volume mechanism comprises a servo motor 2, a horizontal moving mechanism 3 and a corrugated pipe variable volume chamber 4, the servo motor 2, the horizontal moving mechanism 3 and the corrugated pipe variable volume chamber 4 are sequentially and hermetically connected, and the servo motor 2 pushes the horizontal moving mechanism 3 to horizontally move under the control of the pressure control system 13 so that the corrugated pipe variable volume chamber 4 is horizontally compressed.
Further, the device also comprises a comparator 10, an air pressure follow-up device 11, a pressure gauge A1, a pressure gauge B14 and a pressure balance chamber 12;
the variable volume mechanism is hermetically arranged inside the pressure balance cabin 12; the pressure gauge A1 is used for measuring the air pressure in the pressure balance chamber 12; the pressure gauge B14 is used for measuring the air pressure in the variable volume mechanism; two input ends of the comparator 10 are respectively connected with a pressure gauge A1 and a pressure gauge B14 in a sealing manner, and an output end of the comparator 10 is connected with the air pressure follow-up device 11 in a sealing manner; the air pressure follow-up device 11 adjusts the air pressure in the pressure balance chamber 12 to be consistent with the air pressure in the variable capacity mechanism under the control of the comparator 10.
Has the advantages that:
1. the invention designs the variable-volume mechanism, the variable-volume mechanism is adopted to provide the test gas with unchanged pressure for the gas flow controller for the space to be calibrated, meanwhile, the other side of the gas flow controller for the space to be calibrated is ensured to be in a vacuum environment, and the ground calibration problem of the gas flow controller for the space with a vacuum environment at the gas outlet is solved, so that the flow calibration can be carried out on the gas flow controller with the gas inlet pressure of 1-3Mpa and the gas outlet pressure of less than 1000Pa or approaching vacuum, the flow dynamic characteristic of the gas flow controller to be calibrated can be obtained, the time consumption is short, and the accuracy is high.
2. The invention adopts the bellows variable chamber as the air chamber of the variable volume mechanism, and the variable quantity of the volume of the bellows variable chamber can be calculated by measuring the length variable of the bellows variable chamber, thereby effectively reducing the test complexity.
3. According to the invention, the variable volume mechanism is hermetically arranged in the pressure balance cabin, and the air pressure in the variable volume mechanism and the air pressure in the pressure balance cabin are kept the same, so that the variable volume chamber of the corrugated pipe is not easy to deform such as bend, the volume change of the variable volume chamber is only related to the displacement of the horizontal moving mechanism, and the calibration precision is ensured.
Drawings
Fig. 1 is a schematic structural diagram of a flow calibration device of a gas flow controller for a space according to the present invention.
The device comprises a pressure gauge A, a servo motor 2, a horizontal moving mechanism 3, a bellows variable chamber 4, a high-pressure gas cylinder 5, a pressure reducing valve 6, a self-locking valve A7, a self-locking valve B8, a vacuum system 9, a comparator 10, an air pressure follow-up device 11, a pressure balance cabin 12, a pressure control system 13, a pressure gauge B14, a temperature sensor 15, a self-locking valve C16 and a self-locking valve B18.
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
The invention provides a flow calibration device of a gas flow controller for a space, which has the core idea that the actual flow of the flow controller can be obtained by calculating the volume change quantity of a volume-changing mechanism connected with the gas flow controller for the space to be calibrated in unit time.
The invention provides a flow calibration device of a gas flow controller for a space, which comprises a pressure gauge A1, a servo motor 2, a horizontal moving mechanism 3, a corrugated pipe variable chamber 4, a high-pressure gas cylinder 5, a pressure reducing valve 6, a self-locking valve A7, a self-locking valve B8, a vacuum system 9, a comparator 10, an air pressure follow-up device 11, a pressure balance cabin 12, a pressure control system 13, a pressure gauge B14, a temperature sensor 15, a self-locking valve C16 and a self-locking valve B18, wherein a calibration object is the gas flow controller 17 for the space to be calibrated. Wherein, the servo motor 2, the horizontal moving mechanism 3 and the bellows chamber 4 form a volume-changing mechanism.
The high-pressure gas bottle 5 is connected with the bellows variable chamber 4 through a pressure reducing valve 6 and a self-locking valve 7, the bellows variable chamber 4 is connected with a vacuum system 9 through a self-locking valve 8, the bellows variable chamber 4 is connected with a gas flow controller 17 for space through a self-locking valve 16, and the gas flow controller 17 for space is connected with the vacuum system 9 through a self-locking valve 18; the servo motor 2 drives the horizontal moving mechanism 3 to push one end of the bellows variable-volume chamber 4, the bellows variable-volume chamber 4 is connected with the pressure gauge 14 to measure the pressure and feed back to the pressure control system 13, the gas pressure control system 13 is connected with the motor 2 to form a closed loop, the pressure control system 13 measures the temperature of gas through the temperature sensor 15 at the same time, the pressure balance chamber 12 is connected with the pressure gauge 1, the pressure gauge 1 and the pressure gauge 14 send measured pressure signals to the comparator 10, the comparator 10 is connected with the pressure follow-up device 11, and the pressure follow-up device 11 is connected with the pressure balance chamber 12.
The working process of the flow calibration device of the gas flow controller for the space provided by the invention is as follows:
in the initial state, the bellows variable chamber 4 is in the maximum volume state, the self- locking valves 7, 8, 16 and 18 are in the closed state, and the motor 2 is in the locking state; opening the vacuum system 9, opening the self-locking valve 8, and vacuumizing the bellows variable chamber 4; then, the self-locking valve 8 is closed, the self-locking valve 7 is opened, and the bellows variable chamber 4 is filled with the gas in the high-pressure gas cylinder 5 until the pressure gauge 14 indicates the pressure p1Closing the latching valve 7 for a given pressure p; wherein the pressure p1Satisfies 1. ltoreq. p1Less than or equal to 3MPa, and the average sectional area of the corrugated pipe variable chamber 4 is assumed to be A;
the pressure follower 11 will adjust the gas pressure in the pressure balance chamber 12 to make the pressure p displayed by the pressure gauge 12The same pressure as the pressure gauge 14, i.e. p1；
The vacuum system 9 is kept in an open state, the gas flow controller 16 for the space is set at a certain flow rate C, the self- locking valves 18 and 16 are opened in sequence, the time is recorded as 0 time, and the timing is started;
when the pressure p monitored by the pressure gauge 141The pressure control system 13 controls the motor 2 to drive the horizontal moving mechanism 3, and reduces the volume of the bellows variable chamber 4 to increase the pressure of the bellows variable chamber 4 to keep the pressure constant; at the same time, the comparator 10 monitors the pressure gauge 1 to display the pressure p2Displays the pressure p with the pressure gauge 141After the difference, the pressure follower 11 adjusts the gas pressure in the pressure balance chamber 12; in the process, the time and the stroke of the horizontal moving mechanism 3 are sampled at equal intervals; wherein the pressure p1And pressure p2Satisfies the condition | p2-p1|≤0.01p1When the pressure in the pressure balance chamber 12 reaches p1。
When the horizontal movement mechanism 3 is moved to the maximum compression amount of the variable capacity chamber, the space gas flow controller 17 is closed, and the latching valves 16 and 18 are closed in sequence.
At this time, the actual real-time flow rate C' dQ/dt or Ads/dt of the space gas flow controller. That is, the real-time flow rate variation can be obtained by multiplying the average sectional area a of the bellows variable chamber 4 by the derivative of the stroke s of the horizontal movement mechanism 3 with the time t.
Example (b):
in this example, the average cross-sectional area A is 200mm2The bellows variable chamber is taken as an example to illustrate the calibration process of the flow calibration device for the gas flow controller for the space provided by the invention, and the calibration process specifically comprises the following steps:
the initial state is as follows: the bellows variable chamber 4 is in the maximum volume state, the valves 7, 8, 16 and 18 are in the closed state, and the motor 2 is in the locking state, and the average sectional area A of the bellows variable chamber 4 is 200mm2；
Opening the vacuum system 9, opening the self-locking valve 8, and vacuumizing the bellows variable chamber 4;
closing the self-locking valve 8, opening the self-locking valve 7, and filling the bellows variable chamber 4 with gas in the high-pressure gas cylinder 5 until the pressure gauge 14 indicates that the pressure is the designated pressure p1Closing the self-locking valve 7 when p is 1 MPa;
the pressure follower 11 will adjust the gas pressure in the pressure balance chamber 12 until the pressure gauge 1 shows the same pressure as the pressure gauge 14;
the vacuum system 9 is kept in an open state, the space gas flow rate controller 16 is set at a flow rate C of 1sccm to 1ml/min, the valves 18 and 16 are opened in sequence, and the timing is recorded as 0 and timing is started;
when the pressure monitored by the pressure gauge 14 is not equal to the set pressure of 1Mpa, the pressure control system 13 controls the motor 2 to drive the horizontal moving mechanism 3, and the volume of the bellows variable chamber 4 is reduced to increase the pressure of the bellows variable chamber to keep the pressure constant; meanwhile, after the comparator 10 monitors the pressure difference between the pressure gauge 1 and the pressure gauge 14, the pressure follower 11 carries out follow-up regulation on the gas pressure in the pressure balance chamber 12; sampling every 5s for the time and the stroke of the horizontal moving mechanism 3 in the process;
when the horizontal movement mechanism 3 moves to the maximum compression amount of the variable volume chamber, that is, when s is 5mm, the valves 16 and 18 are closed in sequence; at this time, the calibration record table is shown in the following table:
| time t(s) | 0 | 5 | 10 | 15 | 20 | 25 |
| Stroke s (mm) | 0 | 0.42 | 0.87 | 1.26 | 1.66 | 2.07 |
| Volume change (mm3) | 0 | 84 | 174 | 252 | 332 | 414 |
The real-time flow of the gas flow controller can be represented by drawing the relation between the volume and the time, and the slope of each point on the volume change-time line is the real-time dynamic flow.
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (3)
1. A flow calibration device of a gas flow controller for a space is characterized by comprising a volume-variable mechanism and a pressure control system (13);
the pressure control system (13) is connected with the variable volume mechanism in a sealing way, and the pressure control system (13) enables the variable volume mechanism to keep a set air pressure value by controlling the volume of the variable volume mechanism; the variable volume mechanism is connected with the gas inlet of the gas flow controller to be calibrated in a sealing way to output test gas for the gas flow controller to be calibrated, and the gas outlet of the gas flow controller to be calibrated is kept in a vacuum state; before calibration, the variable volume mechanism is set to be the maximum volume, and the derivative of the volume variable quantity of the variable volume mechanism to the calibration time in the calibration process is the actual flow of the gas flow controller to be calibrated.
2. The device according to claim 1, wherein the variable displacement mechanism comprises a servo motor (2), a horizontal movement mechanism (3) and a bellows variable chamber (4), the servo motor (2), the horizontal movement mechanism (3) and the bellows variable chamber (4) are sequentially and hermetically connected, and the servo motor (2) pushes the horizontal movement mechanism (3) to move horizontally under the control of the pressure control system (13) so as to compress the bellows variable chamber (4) horizontally.
3. The device according to claim 2, characterized in that it further comprises a comparator (10), a pneumatic follower (11), a pressure gauge A (1), a pressure gauge B (14) and a pressure balancing compartment (12);
the variable volume mechanism is hermetically arranged inside the pressure balance cabin (12); the pressure gauge A (1) is used for measuring the air pressure in the pressure balance cabin (12); the pressure gauge B (14) is used for measuring the air pressure in the variable volume mechanism; two input ends of the comparator (10) are respectively in sealing connection with the pressure gauge A (1) and the pressure gauge B (14), and an output end of the comparator (10) is in sealing connection with the air pressure follow-up device (11); the air pressure follow-up device (11) adjusts the air pressure in the pressure balance cabin (12) under the control of the comparator (10) to be consistent with the air pressure in the variable capacity mechanism.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911363972.6A CN111141369A (en) | 2019-12-26 | 2019-12-26 | Gas flow controller flow calibration device for space |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911363972.6A CN111141369A (en) | 2019-12-26 | 2019-12-26 | Gas flow controller flow calibration device for space |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112097868A (en) * | 2020-09-11 | 2020-12-18 | 兰州空间技术物理研究所 | Calibration system and method for micro gas flow controller for space |
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| JP2001193879A (en) * | 2000-01-11 | 2001-07-17 | Nippon Telegr & Teleph Corp <Ntt> | Vibration eliminating joint |
| JP2005171946A (en) * | 2003-12-15 | 2005-06-30 | Kansai Paint Co Ltd | Bellows pump |
| CN101458105A (en) * | 2008-12-22 | 2009-06-17 | 中国航天科技集团公司第五研究院第五一○研究所 | Constant pressure type gas flowmeter transfiguration chamber |
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| CN203643006U (en) * | 2013-11-22 | 2014-06-11 | 西安航天计量测试研究所 | Standard colloid flow meter device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112097868A (en) * | 2020-09-11 | 2020-12-18 | 兰州空间技术物理研究所 | Calibration system and method for micro gas flow controller for space |
| CN112097868B (en) * | 2020-09-11 | 2023-10-24 | 兰州空间技术物理研究所 | System and method for calibrating micro-gas flow controller for space |
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Application publication date: 20200512 |