CN105629105B - electrostatic transducer reliability test method and system - Google Patents
electrostatic transducer reliability test method and system Download PDFInfo
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- CN105629105B CN105629105B CN201511003921.4A CN201511003921A CN105629105B CN 105629105 B CN105629105 B CN 105629105B CN 201511003921 A CN201511003921 A CN 201511003921A CN 105629105 B CN105629105 B CN 105629105B
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Abstract
The present invention relates to a kind of electrostatic transducer reliability test method and system, input electrode and bias electrode to electrostatic transducer apply bias voltage, and apply DC voltage to the input electrode and output electrode of electrostatic transducer through preset divider resistance；Shock loading is applied to electrostatic transducer according to preset impact magnitude, carries out mechanical shock.The voltage at divider resistance both ends is monitored during mechanical shock；The amplitude of bias voltage is adjusted, and when the voltage at divider resistance both ends is more than predetermined voltage threshold, measure and obtain minimum bias voltage in order and output that electrostatic transducer under present percussion magnitude generates false triggering.It realizes under the conditions of certain mechanical shock, obtain the minimum bias voltage in order that movable tablet can be caused to pull down and generate false triggering, it supports the shock resistance design of electrostatic transducer and to the caused prediction for contacing action by mistake of mechanical shock and electrostatic force coupling and prevention etc., improves the stability and reliability of electrostatic transducer.
Description
Technical field
The present invention relates to instrument test technical fields, more particularly to a kind of electrostatic transducer reliability test method and are
System.
Background technology
The capacitor that the conductor that electrostatic transducer can store opposite charges by two is formed functionally includes sensing
Device and actuator, common electrostatic MEMS (Micro Electro Mechanical Systems, MEMS) device packet
Include RF (Radio Frequency, radio frequency) mems switch, MEMS inertia devices, MEMS pressure sensor etc..Using electrostatic force as drive
Dynamic plate capacitor structure, typically a parallel-plate fix (fixed tablet), another tablet hangs branch by mechanical spring
(movable tablet) will generate electrostatic force when on two parallel-plates during making alive, and electrostatic force subtracts the gap between two tablets
Few, so as to cause displacement and mechanical return force, under static balancing, mechanical return force is equal in magnitude with electrostatic force, and direction is opposite.
Wherein, mechanical return force is with polar plate position linear change, and electrostatic force is then with polar plate position nonlinear change.
In actual application environment, mechanical shock is inevitable.Under mechanical shock effect, position will occur for movable tablet
It moves, even if the voltage being applied at this time between tablet does not change, but since the gap between two tablets changes, it will
Electrostatic force is caused also to change, and this may result in the biased electrical press strip that switch appearance malfunction should not be in contact originally
Under part, due to the effect of external mechanical impact, switch is caused unexpected closure contact action occur, has seriously affected product use
Stability and reliability.
Invention content
Based on this, it is necessary to a kind of improve the quiet of electrostatic transducer stability and reliability in view of the above-mentioned problems, providing
Electric transducer reliability test method and system.
A kind of electrostatic transducer reliability test method, includes the following steps：
Input electrode and bias electrode to electrostatic transducer apply bias voltage, and through preset divider resistance to described
The input electrode and output electrode of electrostatic transducer apply DC voltage, and the bias voltage is less than under the electrostatic transducer
Pull-up voltage；
Shock loading is applied to the electrostatic transducer according to preset impact magnitude, carries out mechanical shock；
The voltage at the divider resistance both ends is monitored during mechanical shock；
The amplitude of the bias voltage is adjusted, and when the voltage at the divider resistance both ends is more than predetermined voltage threshold,
It measures and obtains minimum bias voltage in order and output that the electrostatic transducer under present percussion magnitude generates false triggering.
A kind of electrostatic transducer reliability test system, including：
Voltage applies module, applies bias voltage, and through pre- for the input electrode to electrostatic transducer and bias electrode
If divider resistance DC voltage is applied to the input electrode and output electrode of the electrostatic transducer, the bias voltage is less than
The actuation voltage of the electrostatic transducer；
Mechanical shock module for applying shock loading to the electrostatic transducer according to preset impact magnitude, carries out
Mechanical shock；
Voltage monitoring module, for monitoring the voltage at the divider resistance both ends during mechanical shock；
Computing module is biased, for adjusting the amplitude of the bias voltage, and the voltage at the divider resistance both ends is big
When predetermined voltage threshold, measure and obtain the minimum bias voltage in order that the electrostatic transducer under present percussion magnitude generates false triggering
And it exports.
Above-mentioned electrostatic transducer reliability test method and system apply the input electrode and bias electrode of electrostatic transducer
Add bias voltage, and DC voltage is applied to the input electrode and output electrode of electrostatic transducer through preset divider resistance；Root
Shock loading is applied to electrostatic transducer according to preset impact magnitude, carries out mechanical shock.The monitoring point during mechanical shock
The voltage at piezoresistance both ends；The amplitude of bias voltage is adjusted, and when the voltage at divider resistance both ends is more than predetermined voltage threshold,
It measures and obtains minimum bias voltage in order and output that electrostatic transducer under present percussion magnitude generates false triggering.It realizes in certain machine
Under the conditions of tool impact, the minimum bias voltage in order that movable tablet can be caused to pull down and generate false triggering is obtained, supports electrostatic transducer
Shock resistance design and to the caused prediction for contacing action by mistake of mechanical shock and electrostatic force coupling and prevention etc., improve
The stability and reliability of electrostatic transducer.
Description of the drawings
Fig. 1 is the flow chart of electrostatic transducer reliability test method in an embodiment；
Fig. 2 is the principle of event monitoring that input electrode and output are in contact under mechanical shock and electrostatic force coupling
Structure chart；
Fig. 3 is the flow chart of electrostatic transducer reliability test method in another embodiment；
Fig. 4 is the test philosophy figure that voltage and actuation voltage are kept in an embodiment；
Fig. 5 is the structure chart of electrostatic transducer reliability test system in an embodiment；
Fig. 6 is the structure chart of electrostatic transducer reliability test system in another embodiment.
Specific embodiment
A kind of electrostatic transducer reliability test method, being coupled suitable for mechanical shock with electrostatic force can to electrostatic transducer
The analysis influenced by property.Since the size of electrostatic force in itself is the function of displacement, when being applied to the two of plate capacitor structure
During voltage increase on a parallel-plate, electrostatic force increases with the increase of charge.Meanwhile the increase of power subtracts clearance height
It is small, and the reduction of clearance height makes capacitance, charge and electric field increase successively.Under electrostatic force, when movable treadmill exercise
During at 2/3rds of two tablet gaps, with the increase of voltage between two tablets, the increase of electrostatic force is far longer than restoring force
Increase, as a result, the generation of movable tablet stays to contact with fixed tablet.
Definition makes voltage of the movable treadmill exercise at 2/3rds of two tablet gaps be actuation voltage Vpi, then more than
Analysis is as can be seen that when the bias voltage between two tablets is V>VpiWhen, movable tablet generation is stayed and is contacted with fixed tablet,
When the bias voltage between two tablets is V<VpiWhen, then two tablets will not be in contact.Based on the characteristic, can build a variety of quiet
Electric MEMS device, such as RF mems switches, bias voltage using between two tablets is as control signal：Work as V>VpiWhen, switch electrode
Contact realizes the function of switch "ON", works as V<VpiWhen, switch electrode keeps open circuit, realizes the function of "Off".
RF mems switches are three end structures, including input electrode (corresponding to movable tablet), output electrode and bias electrode
(corresponding to fixed tablet), according to the operation principle of RF mems switches, apply a direct current between input electrode and bias electrode
Bias voltage V>VpiIf, then input electrode will pulled down to and be contacted with output electrode, form the transmission path of radiofrequency signal,
Voltage V is kept when the bias voltage V between input electrode and bias electrode is less thanpo(V<Vpo) if, then input electrode disconnect with
The contact of output electrode forms open circuit.
For RF mems switches, between a radio-frequency voltage V is applied to two parallel metal sheets, the overlapping of parallel-plate
Region is A, spacing g, can define radio-frequency voltage V：
V (t)=V0cos(2πft)
Wherein V0It is amplitude, f is the time for frequency and t.The voltage generates an electrostatic force FRF.Do not consider capacitance mismatch,
It does not reflect, then the electrostatic force is:
Wherein ε0It is the dielectric constant of free space.The low frequency part of the power corresponds to the power born between plate, the power
Equivalent DC voltage is equal to:
Therefore, the radio-frequency voltage being applied between tablet, all there are one equivalent voltage VeqMake to generate electrostatic between parallel-plate
Power, in shock environment, impact and the coupling of equivalent DC voltage may result in movable tablet drop-down and generate malfunction,
Even if equivalent DC voltage is less than the actuation voltage V under the switch normal conditionpi。
For ease of understanding, full text explains electrostatic transducer reliability test method by taking RF mems switches as an example
Illustrate, as shown in Figure 1, the above method includes the following steps：
Step S140：Input electrode and bias electrode to electrostatic transducer apply bias voltage, and through preset partial pressure
Resistance applies DC voltage to the input electrode and output electrode of electrostatic transducer.
Bias voltage is less than the actuation voltage of electrostatic transducer.Suitable fixture can specifically be first passed through by RF mems switches
It is fixed on shock testing machine, subsequently to carry out mechanical shock test.By RF mems switches, circuit diagram is attached as shown in Figure 2,
DC power supply 2 connect respectively with the input electrode 1a of RF mems switches 1 and bias electrode 1c by its both ends 2a and 2b so as to
It applies bias voltage Vb, output electrode 1b connect with one end of divider resistance 4, meanwhile, the other end of divider resistance 4 is connected to
The anode of power supply 3, the other end of power supply 3 are connected with the cathode 2a of input electrode 1a and DC power supply 2.Voltage monitoring instrument 5
The both ends of divider resistance 4 are connected to, oscillograph specifically can be used in voltage monitoring instrument 5.
The actuation voltage V of RF mems switches can be measured in advancepi, RF mems switches is kept to be in energized state, and to defeated
Enter electrode 1a and bias electrode 1c and apply bias voltage Vb, wherein Vb<Vpi, set and power supply 3 made to be in output state.
Step S150：Shock loading is applied to electrostatic transducer according to preset impact magnitude, carries out mechanical shock.It is default
The specific value of impact magnitude can be chosen according to actual conditions.In shock environment, mechanical shock pulse can make movable tablet
Displacement is generated, the mechanical shock for certain magnitude under conditions of RF mems switches do not power on, may not cause to input
The making contact of electrode 1a and output electrode 1b, but when on the input electrode 1a of RF mems switches there are during radiofrequency signal, etc.
It imitates in a radiofrequency signal equivalent voltage VeqMake to generate electrostatic force between parallel-plate, since mechanical shock and the coupling of electrostatic force are made
With may result in input electrode 1a and be pulled down to and contacted with output electrode 1b.
If in impact moment, input electrode 1a and output electrode 1b making contacts, but after impact terminates, input electrode
1a is just separated with output electrode 1b, then input electrode 1a just will be with mechanical shock with the length of the time of contact of output electrode 1b
Pulse width with magnitude, according to method in GJB548B-2005 2002.1 to the regulation of mechanical shock, 500g peak values accelerate
The respective pulses width of degree is 1ms, and the pulse width of 20000g peak accelerators is only 0.2ms, in the time span, such as
Fruit judges whether be in contact between the two by the contact resistance between real-time testing input electrode 1a and output electrode 1b
Will be extremely difficult, because the period of change of contact resistance is too small, the instrument of test resistance value is difficult to so quickly respond and obtain
Real-time testing data, particularly, in experiment usually require by PC work stations carry out data acquisition and preservation, at this time due to
The limitation of communication speed between the instrument of PC work stations and test resistance value, is more difficult to the sampling period with millisecond or nanosecond
The sampling and preservation of contact resistance are carried out, so as to be difficult to judge whether sent out between impact process input electrode 1a and output electrode 1b
Raw contact.
Therefore, to judge mechanical shock and electrostatic force coupling process, if lead to input electrode 1a and output electrode
Be in contact between 1b, and under the conditions of can further obtaining certain mechanical shock based on the technology, can make input electrode 1a with
The minimum bias voltage in order V being in contact between output electrode 1bb, so as to support the shock resistance of RF mems switches design, impact
Power termination in environment designs and to mechanical shock and electrostatic force the coupling caused prediction and prevention that contact action by mistake
Deng.It is using bias voltage V for the convenience of analysis of experiments, in the present embodimentbInstead of equivalent voltage Veq。
Step S160：The voltage at divider resistance both ends is monitored during mechanical shock.It detects and electricity is divided in impact process
The voltage change situation at 4 both ends is hindered, the trigger parameter of voltage monitoring instrument 5 can be configured in advance, when voltage monitoring instrument 5
Trigger recording is generated, then it is believed that the voltage for occurring divider resistance both ends during mechanical shock is more than predetermined voltage threshold
Situation.As long as mechanical shock and the coupling of electrostatic force cause input electrode 1a and output electrode 1b to be in contact, Er Qiewu
Contact is still maintained by input electrode 1a after impact and output electrode 1b or contact disconnects, and can be realized to contacting thing
The record of part corresponds to specific mechanical shock so as to further obtain, sends out switch input electrode 1a and output electrode 1b
The minimum equivalent voltage V of raw contacteq(bias voltage Vb)。
Specifically, it is assumed that the output of power supply 3 is V3, the contact resistance between input electrode 1a and output electrode 1b is Rab,
It can precalculate to obtain.The resistance value of divider resistance 4 is R4, then V3Partial pressure V on divider resistance 434For：
It is smaller value by the output voltage setting of power supply 3, such as 0.1V or smaller, to prevent input electrode 1a and output electricity
Pole 1b flows through the electric current of contact interface when contacting too big and cause the adhesion of input electrode 1a and output electrode 1b, while according to connecing
Get an electric shock resistance RabChoose suitable R4, it is ensured that R4>Rab, such as R4=10Rab, so that input electrode 1a and bias electrode in mechanical shock
When the coupling of electrostatic force between 1c is in contact input electrode 1a and output electrode 1b, the output voltage of power supply 3 is big
Part is all fallen in divider resistance R4On, while ensure will not be excessive by the electric current of contact interface.
Voltage monitoring instrument 5 is set as single triggering state, and triggering level sets to compare V34It is small, such as 0.5V34, then when defeated
Enter when not being in contact between electrode 1a and output electrode 1b, V34Be 0, when mechanical shock and the coupling of electrostatic force make it is defeated
Enter when being in contact between electrode 1a and output electrode 1b, then in Contact, V34Value as shown in above formula, voltage can be made at this time
Measuring instrument 5 generates a trigger recording.Even if after shock pulse, the contact between input electrode 1a and output electrode 1b
It turns off, according to the above, voltage monitoring instrument 5 always generates a trigger recording.
Step S170：The amplitude of bias voltage is adjusted, and when the voltage at divider resistance both ends is more than predetermined voltage threshold,
It measures and obtains minimum bias voltage in order and output that electrostatic transducer under present percussion magnitude generates false triggering.
Specifically, predeterminated voltage threshold is more than according to the voltage for whether occurring divider resistance both ends during mechanical shock
Value, adjust bias voltage amplitude calculate minimum bias voltage in order mode correspond to it is different.Minimum biased electrical is being calculated
After pressure, it may be output to display screen and shown, also may be output to master controller and stored.
In one of the embodiments, as shown in figure 3, before step S140, electrostatic transducer reliability test method is also
Including step S110 to step S130.
Step S110：Input electrode and bias electrode to electrostatic transducer apply round-trip linear ramp, and right
Resistance value between the input electrode and output electrode of electrostatic transducer is monitored.Specifically as shown in figure 4, RF MEMS are opened
The input electrode 1a of pass 1 is connected with the negative terminal 2a with the DC power supply 2 of voltage scanning, bias electrode 1c and direct current
The anode 2b in source 2 is connected；The negative terminal 6a of instrument 6 of the input electrode 1a with being capable of real-time testing resistance is connected simultaneously, exports
Electrode 1b is connected with the anode 6b of instrument 6.
Round-trip linear ramp (V applies input electrode 1a and bias electrode 1c by DC power supply 2min→Vmax
→Vmin), wherein, VmaxFor upper limit value, than the actuation voltage V of RF mems switch 1piPredicted value it is big, with ensure scanning process send out
The drop-down of raw input electrode 1a, VminFor lower limiting value, than the holding voltage V of RF mems switch 1poPredicted value it is small, to ensure to sweep
The process input electrode 1a for retouching voltage decline disconnects the contact with output electrode 1b.It is same with instrument 6 while carrying out voltage scanning
Pacing tries and notes down the resistance value R between input electrode 1a and output electrode 1b.
Step S120：When resistance value becomes finite value from infinity, the amplitude of corresponding voltage is obtained as electrostatic transducing
The actuation voltage of device.After completing voltage scanning, the resistance value between input electrode 1a and output electrode 1b is become from infinity
Corresponding bias voltage is actuation voltage V during finite valuepi。
Step S130：When resistance value becomes infinity from finite value, the amplitude of corresponding voltage is obtained as electrostatic transducing
The holding voltage of device.Resistance value between input electrode 1a and output electrode 1b is corresponding inclined when becoming infinity from finite value
Voltage is put to keep voltage Vpo。
The actuation voltage of electrostatic transducer and holding voltage are measured in the present embodiment, in order to carry out follow-up test
Operation.If in addition, resistance value between input electrode 1a and output electrode 1b do not occur from infinity become finite value or
Infinitely great process is become from finite value, can also expand voltage scan range, and repeat step S110 to step S130, until obtaining
Obtain actuation voltage VpiWith holding voltage Vpo。
Step S170 specifically may include step 174 to step 178 in one of the embodiments,.
Step 174：The voltage for divider resistance both ends whether occur in the mechanical impact process of detection is more than predetermined voltage threshold.
With continued reference to Fig. 2, the voltage at 4 both ends of divider resistance is monitored by voltage monitoring instrument 5, if electricity during mechanical shock
Pressure measuring instrument 5 is triggered, then it is assumed that the voltage for occurring divider resistance both ends during mechanical shock is more than default electricity
Threshold value is pressed, carries out step 176；Otherwise step 178 is carried out.
Step 176：The amplitude of bias voltage is reduced with predetermined amplitude and continues mechanical shock, will detect divider resistance two
The amplitude of bias voltage as minimum bias voltage in order and exports when the voltage at end is more than predetermined voltage threshold.
Specifically, a=V is enabledb/ n, wherein, n is positive integer, and value is determined according to the target call of experiment, and will input electricity
Bias voltage between pole 1a and bias electrode 1c is set as Vb- ma, wherein 1≤m≤n, repeats mechanical shock and detect
The voltage at divider resistance both ends gradually increases m from small to large, until m=n or mechanical shock process input electrode 1a and output
Electrode 1b is not in contact.
If bias voltage is VbDuring-ma, input electrode 1a and output electrode 1b is in contact during mechanical shock, and
In VbDuring (m-1) a, input electrode 1a and output electrode 1b is not in contact during mechanical shock, then can determine, is being tried
It tests under set impact magnitude, it is V that can lead to the minimum bias voltage in order that input electrode 1a and output electrode 1b is in contactb-
ma。
Step 178：To set the amplitude of amplitude increase bias voltage and continue mechanical shock, divider resistance two will be detected
The amplitude of bias voltage as minimum bias voltage in order and exports when the voltage at end is more than predetermined voltage threshold.
Enable b=(Vpi-Vb)/N, wherein, N is positive integer, and the value of N is determined according to the target call of experiment, by input electricity
Bias voltage between pole 1a and bias electrode 1c is set as Vb+ Mb, wherein 1≤M≤N, repeats mechanical shock and detect
The voltage at divider resistance both ends gradually increases M from small to large, until input electrode 1a and output electrode 1b during mechanical shock
It is in contact.
If bias voltage is VbDuring+Mb, input electrode 1a and output electrode 1b is in contact during mechanical shock, and
In VbDuring+(M-1) b, input electrode 1a and output electrode 1b is not in contact during mechanical shock, then can determine, is being tried
It tests under set impact magnitude, it is V that can lead to the minimum bias voltage in order that input electrode 1a and output electrode 1b is in contactb+
Mb。
It is for whether the voltage for divider resistance both ends occur is more than predetermined voltage threshold above, carries out in two kinds of situation
It adjusts, the amplitude of bias voltage is gradually decreased or increased so that it is determined that minimum bias voltage in order.It is appreciated that in other embodiment
In, the method similar to dichotomy can also be used faster to obtain minimum bias voltage in order, to save test number (TN), improve experiment effect
Rate.
In one of the embodiments, before step 174, step S170 further includes step 172.
Step 172：Whether the variable quantity for keeping voltage and actuation voltage of electrostatic transducer is big before and after detection mechanical shock
In predetermined threshold value, if so, replacing electrostatic transducer, and return to step S140, test is re-started；If it is not, then carry out step
174.If the specific value of threshold value is adjustable, actuation voltage and the holding of RF mems switches are remeasured after mechanical shock is carried out
Voltage compares before and after mechanical shock actuation voltage in the present embodiment and keeps in voltage that there are one the variable quantities of parameter to be more than 5%,
Then replace RF mems switches and return to step S140.
Actuation voltage is carried out after mechanical shock and keeps voltage detecting, electrostatic is replaced if variable quantity is more than predetermined threshold value
Energy converter re-starts test, and whether monitoring impact process causes the mechanical damage of movable tablet, so as to judge whether to be suitable as
Further analysis of experiments still needs replacing device, it is ensured that the validity of bias voltage minimum value finally obtained improves
Test accuracy and reliability.It is appreciated that changing the amplitude of bias voltage each time in step 174 and step 176, carry out
Mechanical shock and after detecting the voltage at divider resistance both ends, can also compare the holding electricity of electrostatic transducer before and after mechanical shock again
Whether the variable quantity of pressure and actuation voltage is more than predetermined threshold value, if so, replacing electrostatic transducer re-starts test, if otherwise
Continue to test, further improve test accuracy and reliability.
In one of the embodiments, with continued reference to Fig. 3, after step S160, electrostatic transducer reliability test method
Further include step S180.
Step S180：Impact magnitude is adjusted, and when the voltage at divider resistance both ends is more than predetermined voltage threshold, is measured
The minimum mechanical of electrostatic transducer generation false triggering is impacted and is exported under to present offset voltage.
Step S180 specifically can be before step S170, also can be after step S170.Magnitude and real is impacted by adjusting
When the voltage at divider resistance both ends is monitored, divider resistance both ends voltage be more than predetermined voltage threshold when measure minimum
Mechanical shock simultaneously exports, and (is less than V for a bias voltage so as to obtainpi) minimum mechanical of false triggering can be caused to impact, more preferably
The shock resistance of ground support electrostatic transducer designs and to contacing the pre- of action by mistake caused by mechanical shock and electrostatic force coupling
Survey and prevention etc..The detailed process of step S180 is similar with step S170, and details are not described herein.
Above-mentioned electrostatic transducer reliability test method realizes under the conditions of certain mechanical shock, acquisition can cause can
Dynamic tablet pulls down and generates the minimum bias voltage in order of false triggering, and the shock resistance of electrostatic transducer is supported to design and to mechanical shock
Caused prediction for contacing action by mistake and prevention etc. with electrostatic force coupling improve the stability of electrostatic transducer and reliable
Property.
The present invention also provides a kind of electrostatic transducer reliability test systems, are coupled suitable for mechanical shock with electrostatic force
Analysis to electrostatic transducer reliability effect.Similarly, to electrostatic transducer reliability test side by taking RF mems switches as an example
Method is explained, as shown in figure 5, above system, which includes voltage, applies module 140, mechanical shock module 150, voltage monitoring
Module 160 and biasing computing module 170.
Voltage applies module 140 and is used to apply bias voltage, and pass through to the input electrode and bias electrode of electrostatic transducer
Preset divider resistance applies DC voltage to the input electrode and output electrode of electrostatic transducer.
Bias voltage is less than the actuation voltage of electrostatic transducer.Suitable fixture can specifically be first passed through by RF mems switches
It is fixed on shock testing machine, subsequently to carry out mechanical shock test.By RF mems switches, circuit diagram is attached as shown in Figure 2,
The actuation voltage V of RF mems switches can be measured in advancepi, RF mems switches is kept to be in energized state, and to input electrode 1a
Apply bias voltage V with bias electrode 1cb, wherein Vb<Vpi, set and power supply 3 made to be in output state.
Mechanical shock module 150 is used to apply shock loading to electrostatic transducer according to preset impact magnitude, carries out machine
Tool impacts.The specific value of preset impact magnitude can be chosen according to actual conditions.To judge that mechanical shock is coupled with electrostatic force
Mechanism, if cause to be in contact between input electrode 1a and output electrode 1b, and can further be obtained based on the technology
Under the conditions of certain mechanical shock, the minimum bias voltage in order V being in contact between input electrode 1a and output electrode 1b can be madeb,
So as to support the shock resistance of RF mems switches design, the power termination design in shock environment and to mechanical shock and quiet
The caused prediction for contacing action by mistake of electric power coupling and prevention etc..It is to make in the present embodiment for the convenience of analysis of experiments
With bias voltage VbInstead of equivalent voltage Veq。
Voltage monitoring module 160 is used to during mechanical shock monitor the voltage at divider resistance both ends.Detection was impacted
The voltage change situation at 4 both ends of divider resistance in journey, can in advance be configured the trigger parameter of voltage monitoring instrument 5, work as electricity
Measuring instrument 5 is pressed to generate trigger recording, then it is believed that occurring the voltage at divider resistance both ends during mechanical shock more than pre-
If the situation of voltage threshold.As long as mechanical shock and the coupling of electrostatic force cause input electrode 1a and output electrode 1b to occur
Contact, and input electrode 1a and output electrode 1b still maintains contact after impacting or contact disconnects, it can
Realize to contact event record, so as to further obtain correspond to specific mechanical shock, make switch input electrode 1a with
The minimum equivalent voltage V that output electrode 1b is in contacteq(bias voltage Vb)。
Specifically, it is assumed that the output of power supply 3 is V3, the contact resistance between input electrode 1a and output electrode 1b is Rab,
It can precalculate to obtain.The resistance value of divider resistance 4 is R4, then V3Partial pressure V on divider resistance 434For：
It is smaller value by the output voltage setting of power supply 3, such as 0.1V or smaller, to prevent input electrode 1a and output electricity
Pole 1b flows through the electric current of contact interface when contacting too big and cause the adhesion of input electrode 1a and output electrode 1b, while according to connecing
Get an electric shock resistance RabChoose suitable R4, it is ensured that R4>Rab, such as R4=10Rab, so that input electrode 1a and bias electrode in mechanical shock
When the coupling of electrostatic force between 1c is in contact input electrode 1a and output electrode 1b, the output voltage of power supply 3 is big
Part is all fallen in divider resistance R4On, while ensure will not be excessive by the electric current of contact interface.
Voltage monitoring instrument 5 is set as single triggering state, and triggering level sets to compare V34It is small, such as 0.5V34, then when defeated
Enter when not being in contact between electrode 1a and output electrode 1b, V34Be 0, when mechanical shock and the coupling of electrostatic force make it is defeated
Enter when being in contact between electrode 1a and output electrode 1b, then in Contact, V34Value as shown in above formula, voltage can be made at this time
Measuring instrument 5 generates a trigger recording.Even if after shock pulse, the contact between input electrode 1a and output electrode 1b
It turns off, according to the above, voltage monitoring instrument 5 always generates a trigger recording.
Biasing computing module 170 is used to adjusting the amplitude of bias voltage, and the voltage at divider resistance both ends be more than it is default
During voltage threshold, measure and obtain minimum bias voltage in order and output that electrostatic transducer under present percussion magnitude generates false triggering.Tool
Body, predetermined voltage threshold is more than according to the voltage for whether occurring divider resistance both ends during mechanical shock, adjusts biasing
The mode of the amplitude calculating minimum bias voltage in order of voltage corresponds to different.It is exportable after minimum bias voltage in order is calculated
It is shown to display screen, also may be output to master controller and stored.
In one of the embodiments, as shown in fig. 6, electrostatic transducer reliability test system further includes scanning monitoring mould
Block 110, the first acquisition module 120 and the second acquisition module 130.
Monitoring module 110 is scanned to be used to apply input electrode and bias electrode of the module 140 to electrostatic transducer in voltage
Apply bias voltage, and through preset divider resistance the input electrode and output electrode of electrostatic transducer are applied DC voltage it
Before, input electrode and bias electrode to electrostatic transducer apply round-trip linear ramp, and to the defeated of electrostatic transducer
The resistance value entered between electrode and output electrode is monitored.Specifically as shown in figure 4, by DC power supply 2 to input electrode 1a
Apply round-trip linear ramp (V with bias electrode 1cmin→Vmax→Vmin), wherein, VmaxFor upper limit value, than RF MEMS
The actuation voltage V of switch 1piPredicted value it is big, to ensure that the drop-down of input electrode 1a, V occur for scanning processminFor lower limiting value, than
The holding voltage V of RF mems switches 1poPredicted value it is small, with ensure scanning voltage decline process input electrode 1a disconnect with it is defeated
Go out the contact of electrode 1b.While carrying out voltage scanning, with 6 synchronism detection of instrument and input electrode 1a and output electrode are noted down
Resistance value R between 1b.
First acquisition module 120 is used for when resistance value becomes finite value from infinity, and the amplitude for obtaining corresponding voltage is made
Actuation voltage for electrostatic transducer.After completing voltage scanning, resistance value between input electrode 1a and output electrode 1b by
It is actuation voltage V that infinity, which becomes corresponding bias voltage during finite value,pi。
Second acquisition module 130 is used for when resistance value becomes infinity from finite value, and the amplitude for obtaining corresponding voltage is made
Holding voltage for electrostatic transducer.When resistance value between input electrode 1a and output electrode 1b becomes infinity from finite value
Corresponding bias voltage is keeps voltage Vpo。
The actuation voltage of electrostatic transducer and holding voltage are measured in the present embodiment, in order to carry out follow-up test
Operation.If in addition, resistance value between input electrode 1a and output electrode 1b do not occur from infinity become finite value or
Infinitely great process is become from finite value, can also expand voltage scan range and repeats to measure, until obtaining actuation voltage
VpiWith holding voltage Vpo。
Biasing computing module 170 specifically may include voltage detection unit, the first computing unit in one of the embodiments,
With the second computing unit.
Voltage detection unit is used to detect the voltage for whether occurring divider resistance both ends in mechanical impact process more than default
Voltage threshold.With continued reference to Fig. 2, the voltage at 4 both ends of divider resistance is monitored by voltage monitoring instrument 5, if machinery punching
Voltage monitoring instrument 5 is triggered during hitting, then it is assumed that the voltage at divider resistance both ends occurs during mechanical shock
More than predetermined voltage threshold.
The voltage that first computing unit is used to occur during mechanical shock divider resistance both ends is more than predeterminated voltage threshold
During value, the amplitude of bias voltage is reduced with predetermined amplitude and continues mechanical shock, it is big in the voltage for detecting divider resistance both ends
The amplitude of bias voltage as minimum bias voltage in order and exports when predetermined voltage threshold.
Specifically, a=V is enabledb/ n, wherein, n is positive integer, and value is determined according to the target call of experiment, and will input electricity
Bias voltage between pole 1a and bias electrode 1c is set as Vb- ma, wherein 1≤m≤n, repeats mechanical shock and detect
The voltage at divider resistance both ends gradually increases m from small to large, until m=n or mechanical shock process input electrode 1a and output
Electrode 1b is not in contact.
If bias voltage is VbDuring-ma, input electrode 1a and output electrode 1b is in contact during mechanical shock, and
In VbDuring (m-1) a, input electrode 1a and output electrode 1b is not in contact during mechanical shock, then can determine, is being tried
It tests under set impact magnitude, it is V that can lead to the minimum bias voltage in order that input electrode 1a and output electrode 1b is in contactb-
ma。
The voltage that second computing unit is used to not occur during mechanical shock divider resistance both ends is more than predeterminated voltage
During threshold value, to set the amplitude of amplitude increase bias voltage and continue mechanical shock, in the voltage for detecting divider resistance both ends
The amplitude of bias voltage as minimum bias voltage in order and exports during more than predetermined voltage threshold.
Enable b=(Vpi-Vb)/N, wherein, N is positive integer, and the value of N is determined according to the target call of experiment, by input electricity
Bias voltage between pole 1a and bias electrode 1c is set as Vb+ Mb, wherein 1≤M≤N, repeats mechanical shock and detect
The voltage at divider resistance both ends gradually increases M from small to large, until input electrode 1a and output electrode 1b during mechanical shock
It is in contact.
If bias voltage is VbDuring+Mb, input electrode 1a and output electrode 1b is in contact during mechanical shock, and
In VbDuring+(M-1) b, input electrode 1a and output electrode 1b is not in contact during mechanical shock, then can determine, is being tried
It tests under set impact magnitude, it is V that can lead to the minimum bias voltage in order that input electrode 1a and output electrode 1b is in contactb+
Mb。
It is for whether the voltage for divider resistance both ends occur is more than predetermined voltage threshold above, carries out in two kinds of situation
It adjusts, the amplitude of bias voltage is gradually decreased or increased so that it is determined that minimum bias voltage in order.It is appreciated that in other embodiment
In, the method similar to dichotomy can also be used faster to obtain minimum bias voltage in order, to save test number (TN), improve experiment effect
Rate.
Biasing computing module 170 may also include variation comparing unit in one of the embodiments,.
Variation comparing unit is used for divider resistance both ends whether occur in voltage detection unit detects mechanical impact process
Voltage be more than before predetermined voltage threshold, detect the change for keeping voltage and actuation voltage of electrostatic transducer before and after mechanical shock
Whether change amount is more than predetermined threshold value；If so, replacing electrostatic transducer, and voltage is controlled to apply module 140, electrostatic is changed again
The input electrode and bias electrode of energy device apply bias voltage, and through preset divider resistance to the input electrode of electrostatic transducer
Apply DC voltage with output electrode；Whether divided in the mechanical impact process of voltage detection unit detection if it is not, then controlling
The voltage at resistance both ends is more than predetermined voltage threshold.The specific value of predetermined threshold value is adjustable, and mechanical shock is compared in the present embodiment
Variable quantity in front and rear actuation voltage and holding voltage there are one parameter replaces RF mems switches more than 5%.
Actuation voltage is carried out after mechanical shock and keeps voltage detecting, electrostatic is replaced if variable quantity is more than predetermined threshold value
Energy converter re-starts test, and whether monitoring impact process causes the mechanical damage of movable tablet, so as to judge whether to be suitable as
Further analysis of experiments still needs replacing device, it is ensured that the validity of bias voltage minimum value finally obtained improves
Test accuracy and reliability.It is appreciated that the first computing unit and the second computing unit change the width of bias voltage each time
Value after carrying out mechanical shock and detecting the voltage at divider resistance both ends, can also compare electrostatic transducer before and after mechanical shock again
The variable quantity for keeping voltage and actuation voltage whether be more than predetermined threshold value, if so, replacing electrostatic transducer re-starts survey
Examination, if otherwise continuing to test, further improves test accuracy and reliability.
In one of the embodiments, with continued reference to Fig. 6, electrostatic transducer reliability test system further includes shock calculation
Module 180.
Shock calculation module 180 is used to monitor divider resistance both ends during mechanical shock in voltage monitoring module 160
Voltage after, adjust impact magnitude, and when the voltage at divider resistance both ends is more than predetermined voltage threshold, measurement obtains current
The minimum mechanical of electrostatic transducer generation false triggering is impacted and is exported under bias voltage.
Magnitude is impacted by adjusting and the voltage at divider resistance both ends is monitored in real time, the electricity at divider resistance both ends
Pressure measures minimum mechanical when being more than predetermined voltage threshold and impacts and export, and (is less than V for a bias voltage so as to obtainpi) can lead
The minimum mechanical impact of false triggering is caused, preferably supports the shock resistance design of electrostatic transducer and to mechanical shock and electrostatic force
The caused prediction for contacing action by mistake of coupling and prevention etc..Shock calculation module 180 calculates the specific mistake of minimum mechanical impact
Journey is similar with biasing computing module 170, and details are not described herein.
Above-mentioned electrostatic transducer reliability test system realizes under the conditions of certain mechanical shock, acquisition can cause can
Dynamic tablet pulls down and generates the minimum bias voltage in order of false triggering, and the shock resistance of electrostatic transducer is supported to design and to mechanical shock
Caused prediction for contacing action by mistake and prevention etc. with electrostatic force coupling improve the stability of electrostatic transducer and reliable
Property.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, it is all considered to be the range of this specification record.
Embodiment described above only expresses the several embodiments of the present invention, and description is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that those of ordinary skill in the art are come
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Range.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (10)
1. a kind of electrostatic transducer reliability test method, which is characterized in that include the following steps：
Input electrode and bias electrode to electrostatic transducer apply bias voltage, and through preset divider resistance to the electrostatic
The input electrode and output electrode of energy converter apply DC voltage, and the bias voltage is less than the drop-down electricity of the electrostatic transducer
Pressure；
Shock loading is applied to the electrostatic transducer according to preset impact magnitude, carries out mechanical shock；
The voltage at the divider resistance both ends is monitored during mechanical shock；
The amplitude of the bias voltage is adjusted, and when the voltage at the divider resistance both ends is more than predetermined voltage threshold, is measured
Obtain minimum bias voltage in order and output that the electrostatic transducer under present percussion magnitude generates false triggering.
2. electrostatic transducer reliability test method according to claim 1, which is characterized in that described to adjust the biasing
The amplitude of voltage, and when the voltage at the divider resistance both ends is more than predetermined voltage threshold, measurement obtains present percussion magnitude
Under electrostatic transducer the step of generating minimum bias voltage in order and the output of false triggering, include the following steps：
The voltage for the divider resistance both ends whether occur in the mechanical impact process of detection is more than predetermined voltage threshold；
If so, reducing the amplitude of the bias voltage with predetermined amplitude and continuing mechanical shock, the partial pressure electricity will be detected
The amplitude of the bias voltage when voltage at both ends is more than the predetermined voltage threshold is hindered as the minimum bias voltage in order and defeated
Go out；
If it is not, then the partial pressure electricity will be detected to set the amplitude of the amplitude increase bias voltage and continue mechanical shock
The amplitude of the bias voltage when voltage at both ends is more than the predetermined voltage threshold is hindered as the minimum bias voltage in order and defeated
Go out.
3. electrostatic transducer reliability test method according to claim 2, which is characterized in that the detection mechanical shock
Before the step of voltage for whether occurring the divider resistance both ends in the process is more than predetermined voltage threshold, following step is further included
Suddenly：
Detect the electrostatic transducer before and after the mechanical shock whether the variable quantity of voltage and actuation voltage is kept to be more than pre-
If threshold value；
If so, replacing electrostatic transducer, and return to the input electrode to electrostatic transducer and bias electrode application biasing
Voltage, and through preset divider resistance to the step of input electrode and output electrode the application DC voltage of the electrostatic transducer
Suddenly；
If it is not, the voltage for then carrying out whether occurring the divider resistance both ends in the mechanical impact process of the detection is more than default electricity
The step of pressing threshold value.
4. electrostatic transducer reliability test method according to claim 1, which is characterized in that described in mechanical shock
It is further comprising the steps of after the step of voltage at the divider resistance both ends is monitored in journey：
The impact magnitude is adjusted, and when the voltage at the divider resistance both ends is more than predetermined voltage threshold, measurement is worked as
The minimum mechanical of the electrostatic transducer generation false triggering is impacted and is exported under preceding bias voltage.
5. electrostatic transducer reliability test method according to claim 1, which is characterized in that described to electrostatic transducer
Input electrode and bias electrode apply bias voltage, and through preset divider resistance to the input electrode of the electrostatic transducer
It is further comprising the steps of before the step of applying DC voltage with output electrode：
Input electrode and bias electrode to electrostatic transducer apply round-trip linear ramp, and to the electrostatic transducer
Input electrode and output electrode between resistance value be monitored；
When the resistance value becomes finite value from infinity, the amplitude of corresponding voltage is obtained as under the electrostatic transducer
Pull-up voltage；
When the resistance value becomes infinity from finite value, guarantor of the amplitude of corresponding voltage as the electrostatic transducer is obtained
Hold voltage.
6. a kind of electrostatic transducer reliability test system, which is characterized in that including：
Voltage applies module, applies bias voltage, and through preset for the input electrode to electrostatic transducer and bias electrode
Divider resistance applies DC voltage to the input electrode and output electrode of the electrostatic transducer, and the bias voltage is less than described
The actuation voltage of electrostatic transducer；
Mechanical shock module for applying shock loading to the electrostatic transducer according to preset impact magnitude, carries out machinery
Impact；
Voltage monitoring module, for monitoring the voltage at the divider resistance both ends during mechanical shock；
Computing module is biased, for adjusting the amplitude of the bias voltage, and the voltage at the divider resistance both ends is more than in advance
If it during voltage threshold, measures and obtains the electrostatic transducer under present percussion magnitude and generate the minimum bias voltage in order of false triggering and defeated
Go out.
7. electrostatic transducer reliability test system according to claim 6, which is characterized in that the biasing computing module
Including：
Voltage detection unit, for detecting the voltage for whether occurring the divider resistance both ends in mechanical impact process more than default
Voltage threshold；
First computing unit, for occurring the voltage at the divider resistance both ends during mechanical shock more than the default electricity
When pressing threshold value, the amplitude of the bias voltage is reduced with predetermined amplitude and continues mechanical shock, will detect the divider resistance
The amplitude of the bias voltage as the minimum bias voltage in order and exports when the voltage at both ends is more than the predetermined voltage threshold；
Second computing unit is more than described preset for not occurring the voltage at the divider resistance both ends during mechanical shock
During voltage threshold, to set the amplitude of the amplitude increase bias voltage and continue mechanical shock, the partial pressure electricity will be detected
The amplitude of the bias voltage when voltage at both ends is more than the predetermined voltage threshold is hindered as the minimum bias voltage in order and defeated
Go out.
8. electrostatic transducer reliability test system according to claim 7, which is characterized in that the biasing computing module
It further includes：
Change comparing unit, for whether there is the divider resistance in the mechanical impact process of voltage detection unit detection
The voltage at both ends is more than before predetermined voltage threshold, detect before and after the mechanical shock holding voltage of the electrostatic transducer and
Whether the variable quantity of actuation voltage is more than predetermined threshold value；If so, replacing electrostatic transducer, and the voltage is controlled to apply module
Bias voltage is applied to the input electrode of electrostatic transducer and bias electrode again, and through preset divider resistance to the electrostatic
The input electrode and output electrode of energy converter apply DC voltage；If it is not, then control the voltage detection unit detection machinery punching
It hits the voltage for whether occurring the divider resistance both ends in the process and is more than predetermined voltage threshold.
9. electrostatic transducer reliability test system according to claim 6, which is characterized in that further include：
Shock calculation module, for monitoring the divider resistance both ends during mechanical shock in the voltage monitoring module
After voltage, the impact magnitude is adjusted, and when the voltage at the divider resistance both ends is more than predetermined voltage threshold, measure
The minimum mechanical of the electrostatic transducer generation false triggering is impacted and is exported under to present offset voltage.
10. electrostatic transducer reliability test system according to claim 6, which is characterized in that further include：
Monitoring module is scanned, the input electrode and bias electrode of electrostatic transducer are applied partially for applying module in the voltage
Put voltage, and through preset divider resistance the input electrode and output electrode of the electrostatic transducer are applied DC voltage it
Before, input electrode and bias electrode to electrostatic transducer apply round-trip linear ramp, and to the electrostatic transducer
Input electrode and output electrode between resistance value be monitored；
First acquisition module, for when the resistance value becomes finite value from infinity, obtaining the amplitude conduct of corresponding voltage
The actuation voltage of the electrostatic transducer；
Second acquisition module, for when the resistance value becomes infinity from finite value, obtaining the amplitude conduct of corresponding voltage
The holding voltage of the electrostatic transducer.
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| CN108362961A (en) * | 2018-01-31 | 2018-08-03 | 蔚来汽车有限公司 | Method and system for measuring parameter of automobile high voltage device when by hitting |
| CN109297397B (en) * | 2018-10-25 | 2020-07-31 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method, device and system for measuring thickness of movable electrode of electrostatic transducer |
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