CN105403799B - Electrostatic transducer analysis method for reliability and system - Google Patents
Electrostatic transducer analysis method for reliability and system Download PDFInfo
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- CN105403799B CN105403799B CN201511003922.9A CN201511003922A CN105403799B CN 105403799 B CN105403799 B CN 105403799B CN 201511003922 A CN201511003922 A CN 201511003922A CN 105403799 B CN105403799 B CN 105403799B
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
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Abstract
The present invention relates to a kind of electrostatic transducer analysis method for reliability and system, input electrode and bias electrode to electrostatic transducer apply bias voltage；Shock loading is applied to electrostatic transducer according to preset impact magnitude, carries out mechanical shock.The resistance value between the input electrode and output electrode of electrostatic transducer is monitored during mechanical shock；The amplitude of the bias voltage is adjusted, and in resistance value from infinity to during finite value saltus step, measurement obtains minimum bias voltage in order and the output that electrostatic transducer under present percussion magnitude generates false triggering.It realizes under the conditions of certain mechanical shock, obtain the minimum bias voltage in order that movable tablet can be caused to pull down and generate false triggering, it supports the shock resistance design of electrostatic transducer and to the caused prediction for contacing action by mistake of mechanical shock and electrostatic force coupling and prevention etc., improves the stability and reliability of electrostatic transducer.
Description
Technical field
The present invention relates to instrument test technical fields, more particularly to a kind of electrostatic transducer analysis method for reliability and are
System.
Background technology
The capacitor that the conductor that electrostatic transducer can store opposite charges by two is formed functionally includes sensing
Device and actuator, common electrostatic MEMS (Micro Electro Mechanical Systems, MEMS) device packet
Include RF (Radio Frequency, radio frequency) mems switch, MEMS inertia devices, MEMS pressure sensor etc..Using electrostatic force as drive
Dynamic plate capacitor structure, typically a parallel-plate fix (fixed tablet), another tablet hangs branch by mechanical spring
(movable tablet) will generate electrostatic force when on two parallel-plates during making alive, and electrostatic force subtracts the gap between two tablets
Few, so as to cause displacement and mechanical return force, under static balancing, mechanical return force is equal in magnitude with electrostatic force, and direction is opposite.
Wherein, mechanical return force is with polar plate position linear change, and electrostatic force is then with polar plate position nonlinear change.
In actual application environment, mechanical shock is inevitable.Under mechanical shock effect, position will occur for movable tablet
It moves, even if being analyzed by front it is recognised that the voltage being applied at this time between tablet does not change, but due between two tablets
Gap change, it will electrostatic force is caused also to change, this may result in switch and malfunctions：It originally should not
Under the bias voltage conditions being in contact, due to the effect of external mechanical impact, switch is caused unexpected closure contact occur dynamic
Make, seriously affected stability and reliability that product uses.
Invention content
Based on this, it is necessary to can assay electrostatic transducer stability and reliability in view of the above-mentioned problems, providing one kind
Electrostatic transducer analysis method for reliability and system.
A kind of electrostatic transducer analysis method for reliability, includes the following steps：
Input electrode and bias electrode to electrostatic transducer apply bias voltage, and the bias voltage is more than the electrostatic
Energy converter keeps voltage and less than the actuation voltage of the electrostatic transducer；
Shock loading is applied to the electrostatic transducer according to preset impact magnitude, carries out mechanical shock；
The resistance value between the input electrode and output electrode of the electrostatic transducer is monitored during mechanical shock；
The amplitude of the bias voltage is adjusted, and in the resistance value from infinity to during finite value saltus step, measurement obtains
The electrostatic transducer generates minimum bias voltage in order and the output of false triggering under present percussion magnitude.
A kind of electrostatic transducer reliability analysis system, including：
Voltage applies module, applies bias voltage for the input electrode to electrostatic transducer and bias electrode, described inclined
It puts voltage and keeps voltage and less than the actuation voltage of the electrostatic transducer more than the electrostatic transducer；
Mechanical shock module for applying shock loading to the electrostatic transducer according to preset impact magnitude, carries out
Mechanical shock；
Resistance value monitoring modular, for monitoring the input electrode of the electrostatic transducer and output electricity during mechanical shock
Resistance value between pole；
Computing module is biased, for adjusting the amplitude of the bias voltage, and in the resistance value from infinity to limited
When being worth saltus step, measure and obtain minimum bias voltage in order and output that the electrostatic transducer under present percussion magnitude generates false triggering.
Above-mentioned electrostatic transducer analysis method for reliability and system apply the input electrode and bias electrode of electrostatic transducer
Add bias voltage；Shock loading is applied to electrostatic transducer according to preset impact magnitude, carries out mechanical shock.In mechanical shock
Resistance value between the input electrode and output electrode of monitoring electrostatic transducer in the process；The amplitude of the bias voltage is adjusted,
And in resistance value from infinity to during finite value saltus step, measurement obtains electrostatic transducer under present percussion magnitude and generates false triggering
Minimum bias voltage in order simultaneously exports.It realizes under the conditions of certain mechanical shock, acquisition can cause movable tablet to pull down and generate mistake
The minimum bias voltage in order of triggering supports the shock resistance of electrostatic transducer to design and to caused by mechanical shock and electrostatic force coupling
The prediction for contacing action by mistake and prevention etc., improve the stability and reliability of electrostatic transducer.
Description of the drawings
Fig. 1 is the flow chart of electrostatic transducer analysis method for reliability in an embodiment；
Fig. 2 is the test philosophy schematic diagram of actuation voltage and holding voltage in an embodiment；
The flow chart of electrostatic transducer analysis method for reliability in another embodiments of Fig. 3；
Fig. 4 is the structure chart of electrostatic transducer reliability analysis system in an embodiment；
Fig. 5 is the structure chart of electrostatic transducer reliability analysis system in another embodiment.
Specific embodiment
A kind of electrostatic transducer analysis method for reliability, being coupled suitable for mechanical shock with electrostatic force can to electrostatic transducer
The analysis influenced by property.Since the size of electrostatic force in itself is the function of displacement, when being applied to the two of plate capacitor structure
During voltage increase on a parallel-plate, electrostatic force increases with the increase of charge.Meanwhile the increase of power subtracts clearance height
It is small, and the reduction of clearance height makes capacitance, charge and electric field increase successively.Under electrostatic force, when movable treadmill exercise
During at 2/3rds of two tablet gaps, with the increase of voltage between two tablets, the increase of electrostatic force is far longer than restoring force
Increase, as a result, the generation of movable tablet stays to contact with fixed tablet.
Definition makes voltage of the movable treadmill exercise at 2/3rds of two tablet gaps be actuation voltage Vpi, then more than
Analysis is as can be seen that when the bias voltage between two tablets is V>VpiWhen, movable tablet generation is stayed and is contacted with fixed tablet,
When the bias voltage between two tablets is V<VpiWhen, then two tablets will not be in contact.Based on the characteristic, can build a variety of quiet
Electric MEMS device, such as RF mems switches, bias voltage using between two tablets is as control signal：Work as V>VpiWhen, switch electrode
Contact realizes the function of switch "ON", works as V<VpiWhen, switch electrode keeps open circuit, realizes the function of "Off".
RF mems switches are three end structures, including input electrode (corresponding to movable tablet), output electrode and bias electrode
(corresponding to fixed tablet), according to the operation principle of RF mems switches, apply a direct current between input electrode and bias electrode
Bias voltage V>VpiIf, then input electrode will pulled down to and be contacted with output electrode, form the transmission path of radiofrequency signal,
Voltage V is kept when the bias voltage V between input electrode and bias electrode is less thanpo(V<Vpo) if, then input electrode disconnect with
The contact of output electrode forms open circuit.
For RF mems switches, between a radio-frequency voltage V is applied to two parallel metal sheets, the overlapping of parallel-plate
Region is A, spacing g, can define radio-frequency voltage V：
V (t)=V0cos(2πft)
Wherein V0It is amplitude, f is the time for frequency and t.The voltage generates an electrostatic force FRF.Do not consider capacitance mismatch,
It does not reflect, then the electrostatic force is:
Wherein ε0It is the dielectric constant of free space.The low frequency part of the power corresponds to the power born between plate, the power
Equivalent DC voltage is equal to:
Therefore, the radio-frequency voltage being applied between tablet, all there are one equivalent voltage VeqMake to generate electrostatic between parallel-plate
Power, in shock environment, impact and the coupling of equivalent DC voltage may result in movable tablet drop-down and generate malfunction,
Even if equivalent DC voltage is less than the actuation voltage V under the switch normal conditionpi。
For ease of understanding, full text explains electrostatic transducer analysis method for reliability by taking RF mems switches as an example
Illustrate, as shown in Figure 1, including the following steps：
Step S140：Input electrode and bias electrode to electrostatic transducer apply bias voltage.Bias voltage is more than quiet
Electric transducer keeps voltage and less than the actuation voltage of electrostatic transducer.Suitable fixture can specifically be first passed through by RF MEMS
Switch is fixed on shock testing machine, subsequently to carry out mechanical shock test.By RF mems switches, circuit diagram carries out as shown in Figure 2
Connection, the input electrode 1a of RF mems switches 1 is connected with the negative terminal 2a with the DC power supply 2 of voltage scanning, partially
Electrode 1c is put with the anode 2b of DC power supply 2 to be connected；Instrument 3 of the input electrode 1a with being capable of real-time testing resistance is negative simultaneously
End 3a is connected, and output electrode 1b is connected with the anode 3b of instrument 3.
The holding voltage V of RF mems switches can be measured in advancepoWith actuation voltage Vpi, RF mems switches is kept to be in logical
After electricity condition, the value range for applying bias voltage Vb, Vb to input electrode 1a and bias electrode 1c is：Vpo<Vb<Vpi, simultaneously
The resistance value R between input electrode 1a and output electrode 1b can be also monitored by instrument 3.
Step S150：Shock loading is applied to electrostatic transducer according to preset impact magnitude, carries out mechanical shock.It is default
The specific value of impact magnitude can be chosen according to actual conditions.In shock environment, mechanical shock pulse can make movable tablet
Displacement is generated, the mechanical shock for certain magnitude under conditions of RF mems switches do not power on, may not cause to input
The making contact of electrode 1a and output electrode 1b, but when on the input electrode 1a of RF mems switches there are during radiofrequency signal, etc.
It imitates in a radiofrequency signal equivalent voltage VeqMake to generate electrostatic force between parallel-plate, since mechanical shock and the coupling of electrostatic force are made
With may result in input electrode 1a and be pulled down to and contacted with output electrode 1b.
If in impact moment, input electrode 1a and output electrode 1b making contacts, but after impact terminates, input electrode
1a is just separated with output electrode 1b, then input electrode 1a just will be with mechanical shock with the length of the time of contact of output electrode 1b
Pulse width with magnitude, according to method in GJB548B-2005 2002.1 to the regulation of mechanical shock, 500g peak values accelerate
The respective pulses width of degree is 1ms, and the pulse width of 20000g peak accelerators is only 0.2ms, in the time span, such as
Fruit judges whether be in contact between the two by the contact resistance between real-time testing input electrode 1a and output electrode 1b
Will be extremely difficult, because the period of change of contact resistance is too small, instrument 3 is difficult to so quickly respond and obtain real-time testing number
According to particularly, it is generally necessary to the acquisition and preservation of data be carried out by PC work stations, at this time due to PC work stations and instrument in experiment
The limitation of communication speed between table 3 is more difficult to carry out sampling and the guarantor of contact resistance with the sampling period of millisecond or nanosecond
It deposits, so as to be difficult to judge whether be in contact between impact process input electrode 1a and output electrode 1b.
From the foregoing it will be appreciated that as the equivalent voltage V of radiofrequency signaleqIt falls in Vpo<Veq<VpiIn the range of when, then individually equivalent electricity
Press VeqInput electrode 1a will not be caused to be contacted with output electrode 1b, but if after being coupled with the mechanical shock of extraneous certain magnitude
Input electrode 1a is caused to be contacted with output electrode 1b, then after mechanical shock terminates, input electrode 1a and output electrode 1b is still
Contact condition can be kept, is separated without terminating with shock pulse, therefore, based on the characteristic, can be obtained by experimental test
It obtains under certain impact magnitude, the minimum equivalent voltage V for being in contact input electrode 1a and output electrode 1beq, so as to support RF
Shock resistance design, the power termination in shock environment of mems switch design and couple institute to mechanical shock and electrostatic force
The caused prediction for contacing action by mistake and prevention etc..It is using direct current biasing in the present embodiment for the convenience of analysis of experiments
Voltage VbInstead of Veq。
Step S160：The resistance between the input electrode and output electrode of electrostatic transducer is monitored during mechanical shock
Value.The situation of change of resistance value R in impact process is detected, if there is the saltus step from infinity to finite value in resistance value R,
It can determine, under the coupling of the bias voltage and mechanical shock, input electrode 1a is contacted simultaneously with output electrode 1b
Contact condition is still kept after the blow, and then can be calculated corresponding to specific mechanical shock, makes switch input electrode 1a and output
The minimum equivalent voltage V that electrode 1b is in contacteq(bias voltage Vb)。
Step S170：The amplitude of bias voltage is adjusted, and in resistance value from infinity to during finite value saltus step, measurement obtains
Electrostatic transducer generates minimum bias voltage in order and the output of false triggering under present percussion magnitude.
Specifically, according to during mechanical shock resistance value R whether there is saltus step from infinity to finite value, adjust
The mode of the amplitude calculating minimum bias voltage in order of bias voltage corresponds to different.It, can after minimum bias voltage in order is calculated
Output is shown to display screen, also be may be output to master controller and is stored.
In one of the embodiments, as shown in figure 3, before step S140, electrostatic transducer analysis method for reliability is also
It may include step S110 to step S130.
Step S110：Input electrode and bias electrode to electrostatic transducer apply round-trip linear ramp, and right
Resistance value between the input electrode and output electrode of electrostatic transducer is monitored.Specifically as shown in Fig. 2, equally can be by straight
Galvanic electricity source 2 applies input electrode 1a and bias electrode 1c round-trip linear ramp (Vmin→Vmax→Vmin), wherein, Vmax
For upper limit value, than the actuation voltage V of RF mems switch 1piPredicted value it is big, to ensure that scanning process occurs input electrode 1a's
Drop-down, VminFor lower limiting value, than the holding voltage V of RF mems switch 1poPredicted value it is small, with ensure scanning voltage decline mistake
Journey input electrode 1a disconnects the contact with output electrode 1b.While carrying out voltage scanning, with 3 synchronism detection of instrument and note down
Resistance value R between input electrode 1a and output electrode 1b.
Step S120：When resistance value becomes finite value from infinity, the amplitude of corresponding voltage is obtained as electrostatic transducing
The actuation voltage of device.After completing voltage scanning, the resistance value between input electrode 1a and output electrode 1b is become from infinity
Corresponding bias voltage is actuation voltage V during finite valuepi。
Step S130：When resistance value becomes infinity from finite value, the amplitude of corresponding voltage is obtained as electrostatic transducing
The holding voltage of device.Resistance value between input electrode 1a and output electrode 1b is corresponding inclined when becoming infinity from finite value
Voltage is put to keep voltage Vpo。
The actuation voltage of electrostatic transducer and holding voltage are measured in the present embodiment, in order to carry out follow-up test
Operation.If in addition, resistance value between input electrode 1a and output electrode 1b do not occur from infinity become finite value or
Infinitely great process is become from finite value, can also expand voltage scan range, and repeat step S110 to step S130, until obtaining
Obtain actuation voltage VpiWith holding voltage Vpo。
Step S170 specifically may include step 174 to step 178 in one of the embodiments,.
Step 174：Whether resistance value there is the saltus step from infinity to finite value in the mechanical impact process of detection.Pass through instrument
Whether table 3 saltus step from infinity to finite value can occurs by detection resistance value R in real time, if so, carrying out step 176；If it is not, then
Carry out step 178.
Step 176：The amplitude of bias voltage is reduced with predetermined amplitude and continues mechanical shock, resistance value will be detected from nothing
The poor big amplitude to bias voltage after finite value saltus step as minimum bias voltage in order and exports.
Specifically, a=(V are enabledb-Vpo)/n, wherein, n is positive integer, and value is determined according to the target call of experiment, and will
Bias voltage between input electrode 1a and bias electrode 1c is set as Vb- ma, wherein 1≤m≤n, repeats mechanical shock
And detection resistance value R.Gradually increase m from small to large, until m=n or mechanical shock process input electrode 1a and output electrode
1b is not in contact.
If bias voltage is VbDuring-ma, mechanical shock process input electrode 1a and output electrode 1b is in contact, and
VbDuring (m-1) a, mechanical shock process input electrode 1a and output electrode 1b is not in contact, then can determine, in experiment institute
Under the impact magnitude of setting, it is V that can lead to the minimum bias voltage in order that input electrode 1a and output electrode 1b is in contactb-ma。
Step 178：To set the amplitude of amplitude increase bias voltage and continue mechanical shock, resistance value will be detected from nothing
The poor big amplitude to bias voltage after finite value saltus step as minimum bias voltage in order and exports.
Enable b=(Vpi-Vb)/N, wherein, N is positive integer, and the value of N is determined according to the target call of experiment, by input electricity
Bias voltage between pole 1a and bias electrode 1c is set as Vb+ Mb, wherein 1≤M≤N, repeats mechanical shock and detect
Resistance value R.Gradually increase M from small to large, until M=N or impact process input electrode 1a and output electrode 1b is in contact.
If bias voltage is VbDuring+Mb, input electrode 1a and output electrode 1b is in contact during mechanical shock, and
In VbDuring+(M-1) b, input electrode 1a and output electrode 1b is not in contact during mechanical shock, then can determine, is being tried
It tests under set impact magnitude, it is V that can lead to the minimum bias voltage in order that input electrode 1a and output electrode 1b is in contactb+
Mb。
In one of the embodiments, before step 174, step S170 further includes step 172.
Step 172：Whether the variable quantity for keeping voltage and actuation voltage of electrostatic transducer is big before and after detection mechanical shock
In predetermined threshold value, if so, replacing electrostatic transducer, and return to step S140, test is re-started；If it is not, then carry out step
174.The specific value of predetermined threshold value is adjustable, and actuation voltage and the guarantor of RF mems switches are remeasured after mechanical shock is carried out
Voltage is held, actuation voltage is more than with the variable quantity there are one parameter in holding voltage before and after mechanical shock is compared in the present embodiment
5%, then replace RF mems switches and return to step S140.
Actuation voltage is carried out after mechanical shock and keeps voltage detecting, electrostatic is replaced if variable quantity is more than predetermined threshold value
Energy converter re-starts test, and whether monitoring impact process causes the mechanical damage of movable tablet, so as to judge whether to be suitable as
Further analysis of experiments still needs replacing device, it is ensured that the validity of bias voltage minimum value finally obtained improves
Test accuracy and reliability.It is appreciated that changing the amplitude of bias voltage each time in step 174 and step 176, carry out
After whether mechanical shock and detection resistance value R the saltus step from infinity to finite value occur, it can also compare mechanical shock again
Front and rear electrostatic transducer keeps whether the variable quantity of voltage and actuation voltage is more than predetermined threshold value, is changed if so, replacing electrostatic
Energy device re-starts test, if otherwise continuing to test, further improves test accuracy and reliability.
In one of the embodiments, with continued reference to Fig. 3, after step S160, electrostatic transducer analysis method for reliability
It may also include step S180.
Step S180：Impact magnitude is adjusted, and in resistance value from infinity to during finite value saltus step, measurement obtains current inclined
The minimum mechanical for putting electrostatic transducer generation false triggering under voltage is impacted and is exported.
Step S180 specifically can be before step S170, also can be after step S170.Magnitude and real is impacted by adjusting
When resistance value R is monitored, impact and export from infinity to measuring minimum mechanical during finite value saltus step in resistance value, so as to
It obtains and (V is less than for a bias voltagepi) minimum mechanical of false triggering can be caused to impact, preferably support the anti-of electrostatic transducer
Impact designs and to the caused prediction for contacing action by mistake of mechanical shock and electrostatic force coupling and prevention etc..Step S180's
Detailed process is similar with step S170, and details are not described herein.
Above-mentioned electrostatic transducer analysis method for reliability realizes under the conditions of certain mechanical shock, acquisition can cause can
Dynamic tablet pulls down and generates the minimum bias voltage in order of false triggering, and the shock resistance of electrostatic transducer is supported to design and to mechanical shock
Caused prediction for contacing action by mistake and prevention etc. with electrostatic force coupling improve the stability of electrostatic transducer and reliable
Property.
The present invention also provides a kind of electrostatic transducer reliability analysis systems, are coupled suitable for mechanical shock with electrostatic force
Analysis to electrostatic transducer reliability effect.Equally to electrostatic transducer analysis method for reliability by taking RF mems switches as an example
It is explained, as shown in figure 4, applying module 140, mechanical shock module 150,160 and of resistance value monitoring modular including voltage
Bias computing module 170.
Voltage applies module 140 and is used to apply bias voltage to the input electrode and bias electrode of electrostatic transducer.Biasing
Voltage is more than the actuation voltage for keeping voltage and being less than electrostatic transducer of electrostatic transducer.Suitable fixture can specifically be first passed through
RF mems switches are fixed on shock testing machine, subsequently to carry out mechanical shock test.RF mems switches is electric as shown in Figure 2
Road figure is attached, and measures the holding voltage V of RF mems switches in advancepoWith actuation voltage Vpi, RF mems switches is kept to be in
After energized state, bias voltage V is applied to input electrode 1a and bias electrode 1cb, VbValue range be：Vpo<Vb<Vpi, together
When can also pass through instrument 3 monitor input electrode 1a and output electrode 1b between resistance value R.
Mechanical shock module 150 is used to apply shock loading to electrostatic transducer according to preset impact magnitude, carries out machine
Tool impacts.The specific value of preset impact magnitude can be chosen according to actual conditions.It is from the foregoing it will be appreciated that equivalent when radiofrequency signal
Voltage VeqIt falls in Vpo<Veq<VpiIn the range of when, then individual equivalent voltage VeqIt will not lead to input electrode 1a and output electrode 1b
Contact, but if with input electrode 1a being caused to be contacted with output electrode 1b after the mechanical shock coupling of extraneous certain magnitude, then
After mechanical shock terminates, input electrode 1a and output electrode 1b can still keep contact condition, without with shock pulse
Terminate and separate, therefore, based on the characteristic, can by under experimental test acquisition certain impact magnitude, make input electrode 1a with it is defeated
Go out the minimum equivalent voltage V that electrode 1b is in contacteq, so as to support the shock resistance of RF mems switches design, in shock environment
Power termination design and to the caused prediction for contacing action by mistake of mechanical shock and electrostatic force coupling and prevention etc..For
The convenience of analysis of experiments is using DC offset voltage V in the present embodimentbInstead of equivalent voltage Veq。
Resistance value monitoring modular 160 is used to during mechanical shock monitor the input electrode and output electrode of electrostatic transducer
Between resistance value.The situation of change of resistance value R in impact process is detected, if resistance value R occurs from infinity to limited
The saltus step of value, then can determine, under the coupling of the bias voltage and mechanical shock, input electrode 1a and output electrode 1b is sent out
It has given birth to and has contacted and throw away holding contact condition after the blow, and then can calculate corresponding to specific mechanical shock, made switch input electricity
The minimum equivalent voltage V that pole 1a and output electrode 1b is in contacteq(bias voltage Vb)。
Biasing computing module 170 is used to adjust the amplitude of bias voltage, and in resistance value from infinity to finite value saltus step
When, it measures and obtains minimum bias voltage in order and output that electrostatic transducer under present percussion magnitude generates false triggering.Specifically, according to
Whether resistance value R there is the saltus step from infinity to finite value during mechanical shock, and the amplitude for adjusting bias voltage calculates
The mode of minimum bias voltage in order corresponds to different.After minimum bias voltage in order is calculated, it may be output to display screen and shown
Show, also may be output to master controller and stored.
In one of the embodiments, as shown in figure 5, electrostatic transducer reliability analysis system further includes scanning monitoring mould
Block 110, the first acquisition module 120 and the second acquisition module 130.
Monitoring module 110 is scanned to be used to apply input electrode and bias electrode of the module 140 to electrostatic transducer in voltage
Before applying bias voltage, input electrode and bias electrode to electrostatic transducer apply round-trip linear ramp, and right
Resistance value between the input electrode and output electrode of electrostatic transducer is monitored.
Specifically as shown in Fig. 2, can equally pass through DC power supply 2 applies input electrode 1a and bias electrode 1c on round-trip line
Property scanning voltage (Vmin→Vmax→Vmin), wherein, VmaxFor upper limit value, than the actuation voltage V of RF mems switch 1piPredicted value
Greatly, to ensure that the drop-down of input electrode 1a, V occur for scanning processminFor lower limiting value, than the holding voltage V of RF mems switch 1po
Predicted value it is small, with ensure scanning voltage decline process input electrode 1a disconnect the contact with output electrode 1b.Carry out voltage
While scanning, with 3 synchronism detection of instrument and the resistance value R between input electrode 1a and output electrode 1b is noted down.
First acquisition module 120 is used for when resistance value becomes finite value from infinity, and the amplitude for obtaining corresponding voltage is made
Actuation voltage for electrostatic transducer.After completing voltage scanning, resistance value between input electrode 1a and output electrode 1b by
It is actuation voltage V that infinity, which becomes corresponding bias voltage during finite value,pi。
Second acquisition module 130 is used for when resistance value becomes infinity from finite value, and the amplitude for obtaining corresponding voltage is made
Holding voltage for electrostatic transducer.When resistance value between input electrode 1a and output electrode 1b becomes infinity from finite value
Corresponding bias voltage is keeps voltage Vpo。
The actuation voltage of electrostatic transducer and holding voltage are measured in the present embodiment, in order to carry out follow-up test
Operation.If in addition, resistance value between input electrode 1a and output electrode 1b do not occur from infinity become finite value or
Infinitely great process is become from finite value, scanning monitoring module 110 can also expand voltage scan range and repeat to measure, until
Obtain actuation voltage VpiWith holding voltage Vpo。
Biasing computing module 170 includes transition detection unit, the first computing unit and second in one of the embodiments,
Computing unit.
Transition detection unit is used to detect whether resistance value in mechanical impact process jump from infinity to finite value occurs
Become.Saltus step from infinity to finite value whether can occur by detection resistance value R in real time by instrument 3.
First computing unit is used for when the saltus step from infinity to finite value occurs in resistance value during mechanical shock, with
Predetermined amplitude reduces the amplitude of bias voltage and continues mechanical shock, will detect resistance value after infinity to finite value saltus step
The amplitude of bias voltage is as minimum bias voltage in order and exports.
Specifically, a=(V are enabledb-Vpo)/n, wherein, n is positive integer, and value is determined according to the target call of experiment, and will
Bias voltage between input electrode 1a and bias electrode 1c is set as Vb- ma, wherein 1≤m≤n, repeats mechanical shock
And detection resistance value R.Gradually increase m from small to large, until m=n or mechanical shock process input electrode 1a and output electrode
1b is not in contact.
If bias voltage is VbDuring-ma, mechanical shock process input electrode 1a and output electrode 1b is in contact, and
VbDuring (m-1) a, mechanical shock process input electrode 1a and output electrode 1b is not in contact, then can determine, in experiment institute
Under the impact magnitude of setting, it is V that can lead to the minimum bias voltage in order that input electrode 1a and output electrode 1b is in contactb-ma。
Second computing unit is used for when resistance value during mechanical shock does not occur the saltus step from infinity to finite value,
To set the amplitude of amplitude increase bias voltage and continue mechanical shock, resistance value will be detected from infinity to finite value saltus step
The amplitude of bias voltage as minimum bias voltage in order and exports afterwards.
Enable b=(Vpi-Vb)/N, wherein, N is positive integer, and the value of N is determined according to the target call of experiment, by input electricity
Bias voltage between pole 1a and bias electrode 1c is set as Vb+ Mb, wherein 1≤M≤N, repeats mechanical shock and detect
Resistance value R.Gradually increase M from small to large, until M=N or impact process input electrode 1a and output electrode 1b is in contact.
If bias voltage is VbDuring+Mb, input electrode 1a and output electrode 1b is in contact during mechanical shock, and
In VbDuring+(M-1) b, input electrode 1a and output electrode 1b is not in contact during mechanical shock, then can determine, is being tried
It tests under set impact magnitude, it is V that can lead to the minimum bias voltage in order that input electrode 1a and output electrode 1b is in contactb+
Mb。
Biasing computing module 170 may also include variation comparing unit in one of the embodiments,.
Variation comparing unit is used for whether the resistance value in transition detection unit detects mechanical impact process to occur from infinite
Big to arrive before the saltus step of finite value, the holding voltage of electrostatic transducer and the variable quantity of actuation voltage are before and after detection mechanical shock
It is no to be more than predetermined threshold value, if so, replacing electrostatic transducer, and voltage is controlled to apply module 140 again to electrostatic transducer
Input electrode and bias electrode apply bias voltage；If it is not, then control resistance in the mechanical impact process of transition detection unit detection
Whether value there is the saltus step from infinity to finite value.The specific value of predetermined threshold value is adjustable, more mechanical punching in the present embodiment
It hits front and rear actuation voltage and keeps in voltage there are one the variable quantity of parameter more than 5%.
Actuation voltage is carried out after mechanical shock and keeps voltage detecting, electrostatic is replaced if variable quantity is more than predetermined threshold value
Energy converter re-starts test, and whether monitoring impact process causes the mechanical damage of movable tablet, so as to judge whether to be suitable as
Further analysis of experiments still needs replacing device, it is ensured that the validity of bias voltage minimum value finally obtained improves
Test accuracy and reliability.It is appreciated that the first computing unit and the second computing unit change the width of bias voltage each time
After whether value, progress mechanical shock and detection resistance value R the saltus step from infinity to finite value occur, it can also compare machine again
Whether the variable quantity of the holding voltage of electrostatic transducer and actuation voltage is more than predetermined threshold value before and after tool impact, if so, replacing
Electrostatic transducer re-starts test, if otherwise continuing to test, further improves test accuracy and reliability.
In one of the embodiments, with continued reference to Fig. 5, electrostatic transducer reliability analysis system further includes shock calculation
Module 180.
Shock calculation module 180 is used to monitor electrostatic transducer during mechanical shock in resistance value monitoring modular 160
After resistance value between input electrode and output electrode, impact magnitude is adjusted, and jumped from infinity to finite value in resistance value
During change, the minimum mechanical that measurement obtains electrostatic transducer generation false triggering under present offset voltage is impacted and is exported.
Magnitude is impacted by adjusting and resistance value R is monitored in real time, in resistance value from infinity to finite value saltus step
When measure minimum mechanical and impact and export, (V is less than for a bias voltage so as to obtainpi) minimum mechanical of false triggering can be caused
Impact preferably supports the shock resistance design of electrostatic transducer and to contacing by mistake caused by mechanical shock and electrostatic force coupling
Prediction and prevention of action etc..Shock calculation module 180 calculates the detailed process of minimum mechanical impact and biasing computing module 170
Similar, details are not described herein.
Above-mentioned electrostatic transducer reliability analysis system realizes under the conditions of certain mechanical shock, acquisition can cause can
Dynamic tablet pulls down and generates the minimum bias voltage in order of false triggering, and the shock resistance of electrostatic transducer is supported to design and to mechanical shock
Caused prediction for contacing action by mistake and prevention etc. with electrostatic force coupling improve the stability of electrostatic transducer and reliable
Property.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, it is all considered to be the range of this specification record.
Embodiment described above only expresses the several embodiments of the present invention, and description is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that those of ordinary skill in the art are come
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Range.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (8)
1. a kind of electrostatic transducer analysis method for reliability, which is characterized in that include the following steps：
Input electrode and bias electrode to electrostatic transducer apply round-trip linear ramp, and to the electrostatic transducer
Input electrode and output electrode between resistance value be monitored；
When the resistance value becomes finite value from infinity, the amplitude of corresponding voltage is obtained as under the electrostatic transducer
Pull-up voltage；
When the resistance value becomes infinity from finite value, guarantor of the amplitude of corresponding voltage as the electrostatic transducer is obtained
Hold voltage；
Input electrode and bias electrode to electrostatic transducer apply bias voltage, and the bias voltage is more than the electrostatic transducing
Device keeps voltage and less than the actuation voltage of the electrostatic transducer；
Shock loading is applied to the electrostatic transducer according to preset impact magnitude, carries out mechanical shock；
The resistance value between the input electrode and output electrode of the electrostatic transducer is monitored during mechanical shock；
The amplitude of the bias voltage is adjusted, and in the resistance value from infinity to during finite value saltus step, measurement obtains current
Impact minimum bias voltage in order and output that the electrostatic transducer under magnitude generates false triggering.
2. electrostatic transducer analysis method for reliability according to claim 1, which is characterized in that described to adjust the biasing
The amplitude of voltage, and in the resistance value from infinity to during finite value saltus step, measurement obtains described quiet under present percussion magnitude
Electric transducer generates the step of minimum bias voltage in order of false triggering and output, includes the following steps：
Whether resistance value described in the mechanical impact process of detection there is the saltus step from infinity to finite value；
If so, reduce the amplitude of the bias voltage and continue mechanical shock, will detect the resistance value from infinity to
The amplitude of the bias voltage as the minimum bias voltage in order and exports after finite value saltus step；
If it is not, then the resistance value will be detected to set the amplitude of the amplitude increase bias voltage and continue mechanical shock
The amplitude of the bias voltage as the minimum bias voltage in order and exports after infinity to finite value saltus step.
3. electrostatic transducer analysis method for reliability according to claim 2, which is characterized in that the detection mechanical shock
It is further comprising the steps of before whether the resistance value the step of saltus step from infinity to finite value occurs in the process：
Detect the electrostatic transducer before and after the mechanical shock whether the variable quantity of voltage and actuation voltage is kept to be more than pre-
If threshold value,
If so, replacing electrostatic transducer, and return to the input electrode to electrostatic transducer and bias electrode application biasing
The step of voltage；
If it is not, then carrying out whether resistance value described in the mechanical impact process of detection saltus step from infinity to finite value occurs
The step of.
4. electrostatic transducer analysis method for reliability according to claim 1, which is characterized in that described in mechanical shock
After the step of resistance value between the input electrode and output electrode of the electrostatic transducer is monitored in journey, following step is further included
Suddenly：
The impact magnitude is adjusted, and in the resistance value from infinity to during finite value saltus step, measurement obtains current bias electricity
The minimum mechanical for depressing the electrostatic transducer generation false triggering is impacted and is exported.
5. a kind of electrostatic transducer reliability analysis system, which is characterized in that including：
Monitoring module is scanned, applies round-trip linear ramp for the input electrode to electrostatic transducer and bias electrode,
And the resistance value between the input electrode and output electrode of the electrostatic transducer is monitored；
First acquisition module, for when the resistance value becomes finite value from infinity, obtaining the amplitude conduct of corresponding voltage
The actuation voltage of the electrostatic transducer；
Second acquisition module, for when the resistance value becomes infinity from finite value, obtaining the amplitude conduct of corresponding voltage
The holding voltage of the electrostatic transducer；
Voltage applies module, applies bias voltage, the biased electrical for the input electrode to electrostatic transducer and bias electrode
Pressure keeps voltage and less than the actuation voltage of the electrostatic transducer more than the electrostatic transducer；
Mechanical shock module for applying shock loading to the electrostatic transducer according to preset impact magnitude, carries out machinery
Impact；
Resistance value monitoring modular, for monitored during mechanical shock the input electrode of the electrostatic transducer and output electrode it
Between resistance value；
Computing module is biased, for adjusting the amplitude of the bias voltage, and is jumped from infinity to finite value in the resistance value
During change, measure and obtain minimum bias voltage in order and output that the electrostatic transducer under present percussion magnitude generates false triggering.
6. electrostatic transducer reliability analysis system according to claim 5, which is characterized in that the biasing computing module
Including：
Transition detection unit, for detecting whether resistance value described in mechanical impact process jump from infinity to finite value occurs
Become；
First computing unit, during for occurring the saltus step from infinity to finite value in the resistance value during mechanical shock,
The amplitude of the bias voltage is reduced with predetermined amplitude and continues mechanical shock, the resistance value will be detected from infinity to having
The amplitude of the bias voltage as the minimum bias voltage in order and exports after limit value saltus step；
Second computing unit does not occur the saltus step from infinity to finite value for resistance value described during mechanical shock
When, to set the amplitude of the amplitude increase bias voltage and continue mechanical shock, the resistance value will be detected from infinity
The amplitude of the bias voltage as the minimum bias voltage in order and exports after to finite value saltus step.
7. electrostatic transducer reliability analysis system according to claim 6, which is characterized in that the biasing computing module
Including：
Change comparing unit, for the transition detection unit detect resistance value described in mechanical impact process whether occur from
Before infinity to the saltus step of finite value, the holding voltage of the electrostatic transducer and drop-down electricity before and after the mechanical shock are detected
Whether the variable quantity of pressure is more than predetermined threshold value, if so, replacing electrostatic transducer, and it is right again that the voltage is controlled to apply module
The input electrode and bias electrode of electrostatic transducer apply bias voltage；If it is not, then control the transition detection unit detection machine
Whether resistance value described in tool impact process there is the saltus step from infinity to finite value.
8. electrostatic transducer reliability analysis system according to claim 5, which is characterized in that further include：
Shock calculation module, for monitoring the defeated of the electrostatic transducer during mechanical shock in the resistance value monitoring modular
After entering the resistance value between electrode and output electrode, the impact magnitude is adjusted, and in the resistance value from infinity to having
During limit value saltus step, measure and obtain the electrostatic transducer under present offset voltage and generate the minimum mechanical impact of false triggering and defeated
Go out.
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| CN109489605B (en) * | 2018-10-25 | 2020-08-04 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method, device and system for measuring thickness of parallel movable electrode |
| CN109373914B (en) * | 2018-10-25 | 2020-08-04 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method, device and system for measuring thickness of non-parallel movable electrode |
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| US7493815B1 (en) * | 2006-06-07 | 2009-02-24 | The Research Foundation Of The State University Of New York | MEMS switch triggered by shock and/or acceleration |
| CN104569494A (en) * | 2013-10-07 | 2015-04-29 | 马克西姆综合产品公司 | Systems and methods to determine stiction failures in MEMS devices |
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