CN116583784A - 抗蚀剂组合物及抗蚀剂图案形成方法 - Google Patents

抗蚀剂组合物及抗蚀剂图案形成方法 Download PDF

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Publication number
CN116583784A
CN116583784A CN202180083315.5A CN202180083315A CN116583784A CN 116583784 A CN116583784 A CN 116583784A CN 202180083315 A CN202180083315 A CN 202180083315A CN 116583784 A CN116583784 A CN 116583784A
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CN
China
Prior art keywords
group
component
resist
mass
substituent
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Pending
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CN202180083315.5A
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English (en)
Chinese (zh)
Inventor
平野智之
米村幸治
中川裕介
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Tokyo Ohka Kogyo Co Ltd
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Tokyo Ohka Kogyo Co Ltd
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Publication of CN116583784A publication Critical patent/CN116583784A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CN202180083315.5A 2020-12-21 2021-12-21 抗蚀剂组合物及抗蚀剂图案形成方法 Pending CN116583784A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020211619 2020-12-21
JP2020-211619 2020-12-21
PCT/JP2021/047337 WO2022138648A1 (ja) 2020-12-21 2021-12-21 レジスト組成物及びレジストパターン形成方法

Publications (1)

Publication Number Publication Date
CN116583784A true CN116583784A (zh) 2023-08-11

Family

ID=82159762

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180083315.5A Pending CN116583784A (zh) 2020-12-21 2021-12-21 抗蚀剂组合物及抗蚀剂图案形成方法

Country Status (5)

Country Link
US (1) US20240302743A1 (https=)
JP (1) JP7542653B2 (https=)
KR (1) KR102811141B1 (https=)
CN (1) CN116583784A (https=)
WO (1) WO2022138648A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110297398A (zh) * 2018-03-23 2019-10-01 信越化学工业株式会社 感光树脂组合物、感光树脂层合体和图案形成方法
WO2020137921A1 (ja) * 2018-12-28 2020-07-02 富士フイルム株式会社 感活性光線性又は感放射線性樹脂組成物、レジスト膜、パターン形成方法、及び、電子デバイスの製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3655030B2 (ja) 1996-12-10 2005-06-02 東京応化工業株式会社 ネガ型化学増幅型レジスト組成物
JP4152810B2 (ja) * 2003-06-13 2008-09-17 東京応化工業株式会社 ポジ型レジスト組成物およびレジストパターン形成方法
JP6159701B2 (ja) * 2013-11-29 2017-07-05 富士フイルム株式会社 感活性光線性又は感放射線性樹脂組成物、及び、パターン形成方法
KR102125252B1 (ko) * 2015-12-25 2020-06-22 후지필름 가부시키가이샤 감활성광선성 또는 감방사선성 수지 조성물, 감활성광선성 또는 감방사선성막, 패턴 형성 방법, 및 전자 디바이스의 제조 방법
JP2019070676A (ja) * 2016-03-02 2019-05-09 富士フイルム株式会社 平坦化膜の製造方法、感活性光線性または感放射線性の平坦化膜形成用組成物、平坦化膜、および、電子デバイスの製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110297398A (zh) * 2018-03-23 2019-10-01 信越化学工业株式会社 感光树脂组合物、感光树脂层合体和图案形成方法
WO2020137921A1 (ja) * 2018-12-28 2020-07-02 富士フイルム株式会社 感活性光線性又は感放射線性樹脂組成物、レジスト膜、パターン形成方法、及び、電子デバイスの製造方法

Also Published As

Publication number Publication date
JP7542653B2 (ja) 2024-08-30
JPWO2022138648A1 (https=) 2022-06-30
US20240302743A1 (en) 2024-09-12
KR102811141B1 (ko) 2025-05-21
WO2022138648A1 (ja) 2022-06-30
KR20230098899A (ko) 2023-07-04

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