CN116577073A - Measuring system and method for effective emission length of emission grating - Google Patents
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Abstract
本发明提供一种发射光栅有效发射长度的测量系统及测量方法,所述测量系统包括:进光耦合器、光分束器、第一出光耦合器及第二出光耦合器;其中,进光耦合器用于接收入射光束;光分束器与所述进光耦合器连接,并具有第一分光端及第二分光端,并且第一分光端与发射光栅连接,第一出光耦合器与发射光栅连接,将经发射光栅衰减后的第一分光光束出射为第一出射光束;第二出光耦合器与第二分光端连接,出射第二出射光束。本发明提供的发射光栅有效发射长度的测量系统及测量方法能够解决因工艺误差导致制备得到的发射光栅的有效发射长度与仿真设计得到的光栅长度不符,不能得到准确的发射光栅有效发射长度的问题。
The present invention provides a measurement system and method for measuring the effective emission length of a transmission grating, the measurement system comprising: an optical input coupler, an optical beam splitter, a first output optical coupler and a second output optical coupler; wherein, the input optical coupler The optical beam splitter is used to receive the incident light beam; the optical beam splitter is connected to the light-incoming coupler, and has a first light-splitting end and a second light-splitting end, and the first light-splitting end is connected to the emission grating, and the first light-out coupler is connected to the emission grating , outputting the first split beam attenuated by the emission grating as the first outgoing beam; the second outgoing coupler is connected with the second splitting end to emit the second outgoing beam. The measurement system and method for measuring the effective emission length of the emission grating provided by the present invention can solve the problem that the effective emission length of the emission grating prepared due to process errors does not match the grating length obtained by simulation design, and the accurate effective emission length of the emission grating cannot be obtained. .
Description
技术领域technical field
本发明涉及激光雷达领域,特别是涉及一种发射光栅有效发射长度的测量系统及测量方法。The invention relates to the field of laser radar, in particular to a measurement system and a measurement method for the effective emission length of an emission grating.
背景技术Background technique
硅基光学相控阵可以实现快速、任意位置的扫描,是实现全固态激光雷达的重要方案之一;常见的硅基光学相控阵通过发射单元将光束发射出去实现波束扫描,如何实现相控阵大的扫描范围和高的分辨率是当前研究的热点。Silicon-based optical phased array can realize fast scanning at any position, which is one of the important solutions to realize all-solid-state lidar; common silicon-based optical phased array emits beams through the transmitting unit to realize beam scanning, how to realize phase control Large scanning range and high resolution are the hotspots of current research.
光学相控阵的分辨率由发射阵列的孔径决定,其中发射光栅的有效发射长度决定了相控阵纵向扫描的分辨率,因此,为了提高光学相控阵波束扫描的分辨率,增大发射光栅的有效发射长度是一种有效方式。The resolution of the optical phased array is determined by the aperture of the emission array, and the effective emission length of the emission grating determines the resolution of the longitudinal scanning of the phased array. Therefore, in order to improve the resolution of the beam scanning of the optical phased array, the increase of the emission grating The effective launch length of is an effective way.
其中,关于发射光栅的仿真方法已经有大量的研究工作提出,但是由于工艺制备导致的刻蚀深度误差、掩膜对准误差、波导侧壁粗糙等原因,造成发射光栅的实际有效发射长度与仿真结果不符的情况因此,由此需要一种测试发射光栅的有效发射长度的检测方法。Among them, a lot of research work has been put forward on the simulation method of the emission grating, but due to the etching depth error, mask alignment error, rough waveguide side wall and other reasons caused by the process preparation, the actual effective emission length of the emission grating is different from the simulation method. Inconsistent Results Therefore, there is thus a need for a detection method for testing the effective emission length of an emission grating.
发明内容Contents of the invention
鉴于以上所述现有技术的缺点,本发明的目的在于提供一种发射光栅有效发射长度的测量系统及测量方法,用于解决因工艺误差导致的制备得到的发射光栅的有效发射长度与仿真设计得到的光栅长度不符,不能正确得到准确的发射光栅有效发射长度的问题。In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a measurement system and method for measuring the effective emission length of the emission grating, which is used to solve the problem of the effective emission length and simulation design of the prepared emission grating caused by process errors. The length of the obtained grating does not match, and the accurate effective emission length of the emission grating cannot be obtained correctly.
为实现上述目的及其他相关目的,本发明提供一种发射光栅有效发射长度的测量系统,与发射光栅连接,用于测量所述发射光栅的有效发射长度,所述发射光栅有效发射长度测量系统包括:进光耦合器、光分束器、第一出光耦合器及第二出光耦合器;其中,In order to achieve the above purpose and other related purposes, the present invention provides a measurement system for the effective emission length of the emission grating, which is connected to the emission grating for measuring the effective emission length of the emission grating, and the measurement system for the effective emission length of the emission grating includes : Incoming optical coupler, optical beam splitter, first outgoing optical coupler and second outgoing optical coupler; where,
所述进光耦合器用于接收入射光束;The incoming optical coupler is used to receive the incident light beam;
所述光分束器,与所述进光耦合器连接,并具有第一分光端及第二分光端,用于将所述入射光束分束成第一分光光束及第二分光光束,所述第一分光光束与所述第二分光光束具有固定的光功率比例,并且,所述第一分光端与所述发射光栅连接;The optical beam splitter is connected to the optical coupler and has a first splitting end and a second splitting end for splitting the incident beam into a first splitting beam and a second splitting beam, the The first split beam and the second split beam have a fixed optical power ratio, and the first split end is connected to the emission grating;
所述第一出光耦合器与所述发射光栅连接,用于将经所述发射光栅衰减后的所述第一分光光束出射为第一出射光束;The first output coupler is connected to the emission grating, and is used to output the first split light beam attenuated by the emission grating as a first output light beam;
所述第二出光耦合器与所述第二分光端连接,用于将所述第二分光光束出射为第二出射光束。The second output coupler is connected to the second light splitting end, and is used to output the second split light beam into a second output light beam.
可选地,所述进光耦合器、所述第一出光耦合器及所述第二出光耦合器采用光栅耦合器。Optionally, the input optical coupler, the first output optical coupler and the second output optical coupler are grating couplers.
可选地,所述测量系统还包括:光源、入射光纤;其中,所述光源与所述入射光纤连接,所述入射光纤与所述进光耦合器耦合连接。Optionally, the measurement system further includes: a light source and an incident optical fiber; wherein, the light source is connected to the incident optical fiber, and the incident optical fiber is coupled to the optical input coupler.
可选地,所述测量系统还包括:第一出射光纤、第二出射光纤及光功率测量装置;其中,Optionally, the measurement system further includes: a first outgoing optical fiber, a second outgoing optical fiber, and an optical power measurement device; wherein,
所述第一出射光纤与所述第一出光耦合器耦合连接;The first output optical fiber is coupled to the first output coupler;
所述第二出射光纤与所述第二出光耦合器耦合连接;The second output optical fiber is coupled to the second output coupler;
所述光功率测量装置与所述第一出射光纤及所述第二出射光纤连接,测量所述第一出射光束及所述第二出射光束的光功率。The optical power measuring device is connected with the first outgoing optical fiber and the second outgoing optical fiber, and measures the optical power of the first outgoing light beam and the second outgoing light beam.
可选地,所述光功率测量装置采用光功率计或光谱仪。Optionally, the optical power measuring device adopts an optical power meter or a spectrometer.
可选地,所述第一分光光束的光功率与所述第二分光光束的光功率比例为1:1。Optionally, the ratio of the optical power of the first split beam to the optical power of the second split beam is 1:1.
本发明还提供一种发射光栅有效发射长度的测量方法,其特征在于,所述测量方法包括:The present invention also provides a method for measuring the effective emission length of the emission grating, characterized in that the measurement method includes:
搭建如前任一项所述的测量系统,入射光束经所述光分束器分束形成第一分光光束及第二分光光束,其中,所述第一分光光束与所述第二分光光束具有固定的光功率比例;Building the measurement system as described in any one of the preceding items, the incident light beam is split by the optical beam splitter to form a first split beam and a second split beam, wherein the first split beam and the second split beam have a fixed The ratio of optical power;
将所述第一分光端与所述发射光栅连接,并将所述第一出光耦合器与所述发射光栅连接,测量第一出射光束的光功率;同时将所述第二分光端与所述第二出光耦合器连接,测量第二出射光束的光功率;Connect the first light splitting end to the emission grating, and connect the first optical coupler to the emission grating to measure the optical power of the first outgoing light beam; simultaneously connect the second light splitting end to the emission grating The second outgoing optical coupler is connected to measure the optical power of the second outgoing light beam;
基于所述第一分光光束与所述第二分光光束的光功率比例、所述第一出射光束的光功率、所述第二出射光束的光功率及所述发射光栅的长度计算得到所述发射光栅的有效发射长度The emission is calculated based on the optical power ratio of the first split beam to the second split beam, the optical power of the first outgoing beam, the optical power of the second outgoing beam, and the length of the emitting grating. Effective launch length of the grating
可选地,获得所述第一分光光束与所述第二分光光束的光功率比例的方法包括:Optionally, the method for obtaining the optical power ratio of the first split beam to the second split beam includes:
将所述第一分光端与所述第一出光耦合器连接,并将所述第二分光端与所述第二出光耦合器连接;Connecting the first light splitting end to the first light output coupler, and connecting the second light splitting end to the second light output coupler;
测量所述第一出光耦合器出射光的光功率得到所述第一分光光束的光功率,测量所述第二出光耦合器出射光的光功率得到所述第二分光光束的光功率。measuring the optical power of the light emitted by the first optical coupler to obtain the optical power of the first split beam, and measuring the optical power of the light emitted by the second optical coupler to obtain the optical power of the second split beam.
可选地,基于下述式1计算得到所述发射光栅的有效发射长度Lneff,Optionally, the effective emission length L neff of the emission grating is calculated based on the following formula 1,
其中,Pout1表示为所述第一出射光束的光功率,Pout2表示为所述第二出射光束的光功率,Pbs1表示为所述第一分光光束的光功率,Pbs2表示为所述第二分光光束的光功率,L表示为所述发射光栅的长度,Lneff表示为所述发射光栅的有效发射长度。Wherein, P out1 represents the optical power of the first outgoing light beam, P out2 represents the optical power of the second outgoing light beam, P bs1 represents the optical power of the first split light beam, and P bs2 represents the optical power of the first split light beam. The optical power of the second split light beam, L represents the length of the emission grating, and L neff represents the effective emission length of the emission grating.
如上所述,本发明的发射光栅有效发射长度的测量系统及测量方法,设置有光分束器,将入射光分束有固定光功率比例的第一分光光束及第二分光光束,第一分光光束射入发射光栅,其光强会沿传播方向呈指数衰减,出射为第一出射光束,第二分光光束不经过发射光栅出射为第二出射光束,由第一出射光束与第二出射光束的光功率比例可以计算得到发射光栅的有效发射长度,符合实际应用情况。As mentioned above, the measurement system and measurement method of the effective emission length of emission gratings of the present invention are provided with an optical beam splitter, which splits the incident light into a first split beam and a second split beam with a fixed optical power ratio, the first split beam When the light beam enters the emission grating, its light intensity will decay exponentially along the direction of propagation, and it emerges as the first outgoing beam, and the second split beam exits as the second outgoing beam without passing through the emission grating. The difference between the first outgoing beam and the second outgoing beam The optical power ratio can be calculated to obtain the effective emission length of the emission grating, which is in line with the actual application situation.
附图说明Description of drawings
图1显示为本发明所述发射光栅有效发射长度测量系统的结构示意图。FIG. 1 is a schematic structural diagram of a system for measuring the effective emission length of an emission grating according to the present invention.
图2显示为本发明所述测量第一分光光束与第二分光光束的光功率比例的结构示意图。FIG. 2 is a schematic structural diagram of measuring the optical power ratio of the first split beam and the second split beam according to the present invention.
组件标号说明Component designation description
10 发射光栅有效发射长度测量系统10 Measuring system for effective emission length of emission grating
100 进光耦合器100 into optocoupler
200 光分束器200 beam splitter
210 第一分光端210 The first split end
220 第二分光端220 The second splitter end
300 发射光栅300 emission grating
400 第一出光耦合器400 First out optocoupler
500 第二出光耦合器500 2nd output optocoupler
具体实施方式Detailed ways
以下通过特定的具体实例说明本发明的实施方式,本领域技术人员可由本说明书所揭露的内容轻易地了解本发明的其他优点与功效。本发明还可以通过另外不同的具体实施方式加以实施或应用,本说明书中的各项细节也可以基于不同观点与应用,在没有背离本发明的精神下进行各种修饰或改变。Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.
请参阅图1至图2需要说明的是,本实施例中所提供的图示仅以示意方式说明本发明的基本构想,遂图式中仅显示与本发明中有关的组件而非按照实际实施时的组件数目、形状及尺寸绘制,其实际实施时各组件的型态、数量及比例可为一种随意的改变,且其组件布局型态也可能更为复杂。Please refer to Figures 1 to 2. It should be noted that the illustrations provided in this embodiment are only schematically illustrating the basic idea of the present invention, and only the components related to the present invention are shown in the drawings rather than according to actual implementation. The number, shape, and size of the components are drawn, and the type, quantity, and proportion of each component can be changed at will during actual implementation, and the layout of the components may also be more complicated.
实施例一Embodiment one
本实施例提供一发射光栅有效发射长度测量系统10,与发射光栅300连接,用于测量发射光栅300的有效发射长度,如图1所示,测量系统10包括进光耦合器100、光分束器200、第一出光耦合器400及第二出光耦合器500。The present embodiment provides a transmission grating effective emission length measurement system 10, connected with the emission grating 300, for measuring the effective emission length of the emission grating 300, as shown in Figure 1, the measurement system 10 includes an optical coupler 100, an optical beam splitter 200, the first output coupler 400 and the second output coupler 500.
本实施例中,发射光栅300在设计制作之前使用光学仿真方法已经预设了其长度L,按照仿真预设,光功率为Pbs1的第一出射光束Iout1入射到发射光栅300,并从发射光栅300出射时(光束的光程为L),出射光功率Pout1会衰减为Pbs1*e-2;但是由于工艺制备导致的刻蚀深度误差、掩膜对准误差、波导侧壁粗糙等原因,会造成第一出射光束Iout1从发射光栅300出射时其光功率不等于Pbs1*e-2(通常情况下比Pbs1*e-2小),因此,需要通过本实施例所述测量系统得到第一出射光束Iout1入射到发射光栅300后,光功率衰减为Pbs1*e-2的准确位置,也即需要得到发射光栅300的实际有效发射长度Lneff(有效发射长度定义为入射光光功率衰减到初始值的e-2处的长度)。其测试原理如下:In this embodiment, the length L of the emission grating 300 has been preset using an optical simulation method before design and manufacture. According to the simulation preset, the first outgoing light beam I out1 with an optical power of P bs1 is incident on the emission grating 300, and is transmitted from the emission When the grating 300 exits (the optical path of the beam is L), the outgoing light power P out1 will be attenuated to P bs1 *e -2 ; however, the etching depth error, mask alignment error, waveguide side wall roughness, etc. The reason is that the optical power of the first outgoing light beam I out1 is not equal to P bs1 *e -2 (usually smaller than P bs1 *e -2 ) when it emerges from the emission grating 300, therefore, it needs to be described in this embodiment The measurement system obtains the exact position where the optical power attenuation is P bs1 *e −2 after the first outgoing light beam I out1 is incident on the emission grating 300, that is, the actual effective emission length L neff of the emission grating 300 needs to be obtained (the effective emission length is defined as The length at which the optical power of the incident light decays to e -2 of the initial value). The test principle is as follows:
将发射光栅300视为一个具有均匀衍射结构的光栅,则其微扰强度为一常数α0,一束光功率为Pbs1的光束在沿发射光栅传播的行程x,与在x位置处剩余的光功率P(x)的关系可以表示为:Considering the emission grating 300 as a grating with a uniform diffraction structure, its perturbation intensity is a constant α 0 , a light beam with optical power P bs1 travels x along the emission grating, and the rest at position x The relationship of optical power P(x) can be expressed as:
其中,假设在x=Lneff的位置处可以使第一出射光束Iout1的光功率衰减为Pbs1*e-2,因此将P(x)=P0*e-2代入式2可得:Wherein, it is assumed that the optical power of the first outgoing light beam I out1 can be attenuated to P bs1 *e -2 at the position of x=L neff , so substituting P(x)=P 0 *e -2 into Equation 2 can be obtained:
Lneff=1/α0···[式3];L neff =1/α 0 ···[Formula 3];
并且,如图2所示,将第一分光端210与第一光耦合器400连接,并将第二分光端220与第二光耦合器500连接,可以测得第一分光光束Ibs1的光功率Pbs1与第二分光光束Ibs2的光功率Pbs2。And, as shown in Figure 2, the first splitting end 210 is connected with the first optical coupler 400, and the second splitting end 220 is connected with the second optical coupler 500, the light of the first splitting light beam I bs1 can be measured The power P bs1 and the optical power P bs2 of the second split light beam I bs2 .
同时,如图2所示,将第一分光端210与发射光栅300的入光端连接,将发射光栅300的出光端与第一光耦合器400连接,并将第二分光端220与第二光耦合器500连接,可以测得第一出射光束Iout1的光功率Pout1与第二出射光束Iout2的光功率Pout2,其中,Pout2=Pbs2,且可知,Simultaneously, as shown in Figure 2, connect the first light splitting end 210 with the light entrance end of the emission grating 300, connect the light output end of the emission grating 300 with the first optical coupler 400, and connect the second light splitting end 220 with the second light splitting end 220. The optical coupler 500 is connected, and the optical power P out1 of the first outgoing light beam I out1 and the optical power P out2 of the second outgoing light beam I out2 can be measured, wherein, P out2 =P bs2 , and it can be seen that,
将式3代入式4可得下述式1:Substituting Equation 3 into Equation 4, the following Equation 1 can be obtained:
由式1可以计算得到发射光栅300的有效发射长度Lneff,以符合发射光栅300的实际应用情况。The effective emission length L neff of the emission grating 300 can be calculated from Equation 1, so as to meet the actual application of the emission grating 300 .
在一些实施例中,发射光栅有效发射长度的测量系统10集成设置在硅光器件中,此时,进光耦合器100可以采用光栅耦合器,硅光器件外的光源(激光器)发射的入射光束Iin由入射光纤的出光口入射至光栅耦合器的进光口,能够有效的提高耦合效率,适用于晶圆级参数测试;In some embodiments, the measurement system 10 of the effective emission length of the emission grating is integrated in the silicon optical device. At this time, the incoming optical coupler 100 can be a grating coupler, and the incident light beam emitted by the light source (laser) outside the silicon optical device I in is incident from the light exit of the incident fiber to the light entrance of the grating coupler, which can effectively improve the coupling efficiency and is suitable for wafer-level parameter testing;
基于同样的设置,第一出光耦合器400及第二出光耦合器500也采用光栅耦合器,第一出射光束Iout1及第二出射光束Iout2由光栅耦合器的出光口出射,被后续分别设置的两条出射光纤接收,并进入后续的光功率测量装置中测量光功率,其中光功率测量装置可以采用光功率计或光谱仪。Based on the same setting, the first outgoing optical coupler 400 and the second outgoing optical coupler 500 also use a grating coupler, and the first outgoing light beam I out1 and the second outgoing light beam I out2 are emitted from the light exit of the grating coupler, and are respectively set up subsequently The two outgoing optical fibers are received and enter the subsequent optical power measuring device to measure the optical power, wherein the optical power measuring device can use an optical power meter or a spectrometer.
在一些实施例中,光分束器200可以采用多模干涉耦合器、Y型分路器或定向耦合器,并且,其至少具有两个分光端(第一分光端210及第二分光端220),用于将所述入射光束Iin分束成两个具有固定光功率比例的第一分光光束Ibs1及第二分光光束Ibs2,其中,第一分光光束Ibs1的光功率为Pbs1,第二分光光束Ibs2的光功率为Pbs2,两者光功率的比例为K=Pbs1/Pbs2,在一些优选的实施例中,K=1,也即光分束器200采用功率比0.5:0.5的1×2光分束器,此时Pout2=Pbs2=Pbs1。In some embodiments, the optical beam splitter 200 can adopt a multimode interference coupler, a Y-type splitter or a directional coupler, and it has at least two split ends (the first split end 210 and the second split end 220 ), for splitting the incident beam I in into two first split beams I bs1 and second split beams I bs2 with a fixed optical power ratio, wherein the optical power of the first split beam I bs1 is P bs1 , the optical power of the second split light beam I bs2 is P bs2 , the ratio of the two optical powers is K=P bs1 /P bs2 , in some preferred embodiments, K=1, that is, the optical beam splitter 200 uses power Ratio 0.5: 0.5 1×2 optical beam splitter, at this time P out2 =P bs2 =P bs1 .
实施例二Embodiment two
本实施例提供一种发射光栅有效发射长度的测量方法,本测量方法能在因制备工艺(波导侧壁粗糙度等因素造成的传输损耗)因素导致发射光栅长度与实际有效发射长度不符时,计算得到精确地的有效发射长度以符合实际应用情况,所述测量方法的步骤包括步骤S1)~步骤S3)。This embodiment provides a method for measuring the effective emission length of the emission grating. This measurement method can calculate To obtain an accurate effective emission length to meet actual application conditions, the steps of the measurement method include steps S1) to S3).
步骤S1),提供如实施例一所述的测量系统10,入射光束Iin经所述光分束器200束形成第一分光光束Ibs1及第二分光光束Ibs2,其中,所述第一分光光束Ibs1与所述第二分光光束Ibs2具有固定的光功率比例。Step S1), providing the measurement system 10 as described in Embodiment 1, the incident light beam I in passes through the optical beam splitter 200 to form a first split light beam I bs1 and a second split light beam I bs2 , wherein the first The split beam I bs1 and the second split beam I bs2 have a fixed optical power ratio.
本实施例中,首先提供光源、入射光纤、出射光纤、光功率测量装置及实施例一所述的测量系统10,若已知制备的光分束器200的固定分光比例(第一分光光束Ibs1与第二分光光束Ibs2的光功率比例,譬如为1:1),则不再需要测试光分束器200的固定分光比例,否则,还需采用下述步骤S11)~步骤S2)的方式得到光分束器200的固定分光比例:In this embodiment, first provide a light source, an incident optical fiber, an outgoing optical fiber, an optical power measurement device, and the measurement system 10 described in Embodiment 1. If the fixed splitting ratio of the prepared optical beam splitter 200 is known (the first split beam The optical power ratio between bs1 and the second split light beam I bs2 is, for example, 1:1), then it is no longer necessary to test the fixed split ratio of the optical beam splitter 200, otherwise, the following steps S11) to S2) need to be adopted. The fixed beam splitting ratio of the optical beam splitter 200 is obtained in the following way:
步骤S11),将第一分光端210直接与第一出光耦合器400连接,将第二分光端220与第二出光耦合器500连接。Step S11 ), connect the first light splitting end 210 directly to the first light output coupler 400 , and connect the second light splitting end 220 to the second light output coupler 500 .
步骤S12),测量第一出光耦合器400出射光的光功率得到第一分光光束的光功率Pbs1,测量第二出光耦合器出射光的光功率得到第二分光光束的光功率Pbs2,并以此得到光分束器200的固定分光比例。Step S12), measuring the optical power of the light emitted by the first optical coupler 400 to obtain the optical power P bs1 of the first split beam, measuring the optical power of the emitted light of the second optical coupler to obtain the optical power P bs2 of the second split beam, and In this way, a fixed beam splitting ratio of the beam splitter 200 is obtained.
步骤S2),将所述第一分光端210与所述发射光栅300连接,并将所述第一出光耦合器400与所述发射光栅300连接,测量第一出射光束Iout1的光功率Pout1;同时将所述第二分光端220与所述第二出光耦合器500连接,测量第二出射光束Iout2的光功率Pout2。Step S2), connecting the first light splitting end 210 to the emission grating 300, and connecting the first optical output coupler 400 to the emission grating 300, and measuring the optical power P out1 of the first outgoing light beam I out1 ; Simultaneously connect the second optical splitter 220 to the second output optical coupler 500, and measure the optical power P out2 of the second output light beam I out2 .
本实施例中,由于光分束器200的分光比例固定,因此,第二出射光束的光功率Pout2的大小与第二分光光束的光功率Pbs2的大小相同。In this embodiment, since the splitting ratio of the optical beam splitter 200 is fixed, the magnitude of the optical power P out2 of the second outgoing beam is the same as the magnitude of the optical power P bs2 of the second split beam.
步骤S3),基于所述第一分光光束的光功率Pbs1与所述第二分光光束的光功率Pbs2的比例Pbs1/Pbs2、所述第一出射光束的光功率Pout1、所述第二出射光束的光功率Pout2及所述发射光栅的长度为L计算得到所述发射光栅的有效发射长度Lneff。Step S3), based on the ratio P bs1 /P bs2 of the optical power P bs1 of the first split beam to the optical power P bs2 of the second split beam, the optical power P out1 of the first outgoing beam, the The optical power P out2 of the second outgoing light beam and the length L of the emission grating are calculated to obtain the effective emission length L neff of the emission grating.
本实施例中,由实施例一所述测量系统10的测试原理可以得到:In this embodiment, the test principle of the measurement system 10 described in Embodiment 1 can be obtained:
其中,所述Pout1表示为所述第一出射光束的光功率,所述Pout2表示为所述第二出射光束的光功率,所述Pbs1表示为所述第一分光光束的光功率,所述Pbs2表示为所述第二分光光束的光功率,所述L表示为所述发射光栅的长度,所述Lneff表示为所述发射光栅的有效发射长度。Wherein, the P out1 represents the optical power of the first outgoing light beam, the P out2 represents the optical power of the second outgoing light beam, and the P bs1 represents the optical power of the first split light beam, The P bs2 represents the optical power of the second split light beam, the L represents the length of the emission grating, and the L neff represents the effective emission length of the emission grating.
在已知Pbs1、Pbs2、Pout1、Pout2及L的数值大小的情况下,由式1可以计算得到所述发射光栅的有效发射长度Lneff。In the case of known values of P bs1 , P bs2 , P out1 , P out2 and L, the effective emission length L neff of the emission grating can be calculated from formula 1.
综上所述,本发明的发射光栅有效发射长度的测量系统及测量方法,设置有光分束器,将入射光分束有固定光功率比例的第一分光光束及第二分光光束,第一分光光束射入发射光栅,其光强会沿传播方向呈指数衰减,出射为第一出射光束,第二分光光束不经过发射光栅出射为第二出射光束,由第一出射光束与第二出射光束的光功率比例可以计算得到发射光栅的有效发射长度,符合实际应用情况。In summary, the measuring system and measuring method of the effective emission length of the emission grating of the present invention are provided with an optical beam splitter, which splits the incident light into a first split beam and a second split beam with a fixed optical power ratio, the first When the split beam enters the emission grating, its light intensity will decay exponentially along the direction of propagation, and it exits as the first outgoing beam, and the second split beam exits as the second outgoing beam without passing through the emission grating. The first outgoing beam and the second outgoing beam The effective emission length of the emission grating can be calculated by the optical power ratio of , which is in line with the actual application situation.
上述实施例仅例示性说明本发明的原理及其功效,而非用于限制本发明。任何熟悉此技术的人士皆可在不违背本发明的精神及范畴下,对上述实施例进行修饰或改变。因此,举凡所属技术领域中具有通常知识者在未脱离本发明所揭示的精神与技术思想下所完成的一切等效修饰或改变,仍应由本发明的权利要求所涵盖。The above-mentioned embodiments only illustrate the principles and effects of the present invention, but are not intended to limit the present invention. Anyone skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by those skilled in the art without departing from the spirit and technical ideas disclosed in the present invention should still be covered by the claims of the present invention.
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