CN116560099A - Beam splitting integrated device and laser beam splitting equipment - Google Patents
Beam splitting integrated device and laser beam splitting equipment Download PDFInfo
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- CN116560099A CN116560099A CN202210102380.4A CN202210102380A CN116560099A CN 116560099 A CN116560099 A CN 116560099A CN 202210102380 A CN202210102380 A CN 202210102380A CN 116560099 A CN116560099 A CN 116560099A
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/12—Beam splitting or combining systems operating by refraction only
- G02B27/126—The splitting element being a prism or prismatic array, including systems based on total internal reflection
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/106—Beam splitting or combining systems for splitting or combining a plurality of identical beams or images, e.g. image replication
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/12—Beam splitting or combining systems operating by refraction only
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
Abstract
The embodiment of the application provides a beam splitting and integrating device and laser beam splitting equipment. The beam splitting and integrating device comprises at least one beam splitter, each beam splitter comprising: a half slide for changing the polarization direction of incident light, the incident light propagating along a first direction; the polarization beam splitter prism is used for splitting incident light passing through the half glass slide into first polarized light and second polarized light, wherein the first polarized light propagates along a first direction, and the second polarized light propagates along a second direction perpendicular to the first direction; and the first driving mechanism is used for driving the half slide to rotate around the first direction so as to adjust the polarization direction of the incident light changed by the half slide, and further change the power of each of the first polarized light and the second polarized light divided by the polarization splitting prism. According to the embodiment of the application, multiple paths of light beams can be emitted, the power of each path of light beam can be independently regulated, the purpose of parallel processing of multiple workpieces to be processed is achieved, the processing efficiency is greatly improved, meanwhile, the output power of a laser can be fully utilized, and the utilization efficiency of energy sources is improved.
Description
Technical Field
The application relates to the technical field of laser processing, in particular to a beam splitting and integrating device and laser beam splitting equipment.
Background
The compound semiconductor is a semiconductor material composed of two or more elements, and GaAs, gaN, siC, and the like are the most commonly used materials at present. As a main representative of the second and third generation semiconductors, these compound materials are finally formed into devices, which are subjected to a series of processes such as MOCVD (metal-organic chemical vapor deposition, metal organic chemical vapor deposition) epitaxy, cleaning, PECVD (plasma enhanced chemical vapor deposition ) film growth, exposure and development, ICP (inductively coupled plasma ) etching, strong acid etching, passivation, metal deposition, annealing, and the like, and then device patterns are formed on the wafer (wafer) surface, and among these processes, a laser process is used multiple times. For example, a laser is used as a light source, the output laser beam is subjected to a series of spatial modulations and finally acts on the surface of a workpiece to be processed such as a wafer, the moving table carries the workpiece to be processed to perform translational movement, the laser spot and the workpiece to be processed are subjected to relative displacement, and scanning marks are left on the surface of the laser spot and the workpiece to be processed.
In the prior art, laser single-point scanning is generally adopted. Because only one path of laser exists, the motion speed of the motion platform needs to be improved in the improvement of the efficiency, and therefore the processing efficiency is limited by the limit speed of the motion platform. The ultra-high-speed moving platform has high cost, and has larger acceleration in an ultra-high-speed moving state, and the edge area is easy to be distorted due to large speed change. In addition, the power stability of part of lasers can be guaranteed under the state of large current, however, the power under the large current is far greater than the power actually required by the users, so that the lasers can be normally used after being attenuated, and energy waste can be caused for laser single-point scanning.
Disclosure of Invention
The embodiment of the application provides a beam splitting integrated device and laser beam splitting equipment, can send multichannel light beam, and can independently adjust the power of each light beam, realized the purpose of parallel processing a plurality of work pieces of waiting, can satisfy different power requirements simultaneously to improve machining efficiency greatly, further, can make full use of the output of laser instrument, promoted the utilization efficiency of the energy.
For this purpose, the following technical solutions are adopted in the embodiments of the present application:
in a first aspect, embodiments of the present application provide a beam splitting and integrating device including at least one beam splitter, each beam splitter including: a half slide for changing the polarization direction of incident light propagating in a first direction; a polarization beam splitter prism for splitting the incident light passing through the half glass slide into first polarized light and second polarized light, wherein the first polarized light propagates along the first direction, and the second polarized light propagates along a second direction perpendicular to the first direction; the first driving mechanism is used for driving the half glass slide to rotate around the first direction so as to adjust the polarization direction of incident light changed by the half glass slide, and further change the power of each of the first polarized light and the second polarized light divided by the polarization splitting prism.
In the embodiment of the application, when the beam splitting and integrating device only comprises one beam splitter, the beam splitting and integrating device can emit two paths of polarized light at most; when the beam splitting device comprises more than two beam splitters, the beam splitting integrated device can emit more than two paths of polarized light, and for each beam splitter, the first driving mechanism can drive the half glass slide to rotate around the first direction so as to adjust the polarization direction of incident light changed by the half glass slide, and further change the respective powers of the first polarized light and the second polarized light divided by the polarization splitting prism. That is, the polarization direction of the incident light can be changed by the half-slope sheet, and when the half-slide is driven by the first driving mechanism to rotate, the polarization direction of the incident light is further adjusted, and at this time, the power of the first polarized light and the power of the second polarized light divided by the polarization splitting prism correspondingly change, that is, after the polarization direction of the incident light is changed, the components in the first direction and the second direction after passing through the polarization splitting prism correspondingly change. Therefore, the multi-path light beam can be sent out, the power of each path of light beam can be independently regulated, the purpose of parallel processing a plurality of workpieces to be processed is achieved, meanwhile, different power requirements can be met, and therefore processing efficiency is greatly improved. Further, the first driving mechanism can drive the half slide to continuously rotate around the first direction, so that stepless adjustment of power can be realized, namely, the power can continuously change, and the requirements of users can be better met. In addition, the embodiment of the application can split the high-power light beam into a plurality of low-power light beams, so that each low-power light beam meets the power required by work, the output power of the laser can be fully utilized, the energy waste is reduced, and the energy utilization efficiency is improved.
In one possible implementation, each beam splitter further comprises a base; the first driving mechanism includes: the first annular wheel body is arranged on the base; the second annular wheel body is rotatably connected with the first annular wheel body, the hollow part of the second annular wheel body corresponds to the hollow part of the first annular wheel body, the half slide is arranged at the hollow part of the second annular wheel body on the side surface of the second annular wheel body, which is far away from the first annular wheel body, and the incident light is incident from one side of the first annular wheel body, which is far away from the second annular wheel body; and the driving part is used for driving the second annular wheel body and the half slide to rotate around the first direction relative to the first annular wheel body. That is, in this implementation, the half slide may be provided at the hollow portion of the second annular wheel, and in order to avoid the first annular wheel from blocking the incident light incident to the half slide, the hollow portion of the second annular wheel may be provided corresponding to the hollow portion of the first annular wheel. In addition, the second annular wheel body is rotatably arranged on the first annular wheel body, for example, through a bearing, so that the position of the second annular wheel body can be kept, the second annular wheel body is not influenced to drive the half slide to rotate under the drive of the driving part, the polarization direction of incident light changed by the half slide is adjusted, and the power of each of the first polarized light and the second polarized light divided by the polarization splitting prism is changed.
In one possible implementation, the driving part includes: the driving wheel is arranged at intervals with the second annular wheel body; the belt is sleeved outside the driving wheel and the second annular wheel body; and the motor is used for driving the driving wheel to rotate and driving the second annular wheel body and the half slide to rotate under the action of the belt. That is, in this implementation, the second annular wheel body may act as a large pulley and the drive wheel may act as a small pulley. The driving force is provided by the motor through the large belt wheel and the synchronous belt, so that the large belt wheel, namely the second annular wheel body, drives the half slide to rotate, and the polarization direction of incident light is changed.
In one possible implementation, each beam splitter further comprises: the radiator and the polarization splitting prism are arranged at intervals along the second direction and are arranged on the base of the beam splitting integrated device; the second driving mechanism is used for driving the polarization beam splitter prism to rotate around a third direction so as to enable the polarization beam splitter prism to be switched between a first state and a second state, and the third direction is perpendicular to the first direction and the second direction, wherein: in the first state, the second polarized light propagates in a direction away from the heat sink; in the second state, the second polarized light propagates toward the heat sink, the heat sink being capable of absorbing energy of the second polarized light. That is, in this implementation, each beam splitter may be switched between two states, in a first state, the beam splitter may emit two beams of light, a first polarized light propagating in a first direction and a second polarized light propagating in a second direction away from the heat sink; in the second state, the beam splitter may actually emit a light beam, i.e. the first polarized light propagating along the first direction, and the second polarized light propagating along the second direction propagates towards the heat sink, and its energy is absorbed by the heat sink and is no longer output. In addition, no matter the radiator is in the first state or the second state, the first driving mechanism can drive the half glass slide to rotate so as to adjust the polarization direction of incident light changed by the half glass slide, and further change the respective powers of the first polarized light and the second polarized light divided by the polarization splitting prism, namely the beam splitters can independently adjust the powers of all paths of light beams in the two states.
In one possible implementation, the beam splitting and integrating device includes a plurality of the beam splitters, the plurality of beam splitters including a first set of beam splitters, the beam splitters in the first set of beam splitters being in the first state or the second state and arranged along the first direction, the beam splitter located downstream being capable of receiving the first polarized light emitted by the beam splitter located upstream. That is, in this implementation, a plurality of beam splitters may be disposed in a first direction, and may be in a first state or a second state, respectively, and by controlling the plurality of beam splitters to be in different states, the amount of polarized light emitted by the beam splitting and integrating device may be controlled, while also controlling the power of each path of polarized light. In addition, the number of the beam splitters arranged along the first direction can be set according to the needs, so that the output light beams can be arbitrarily expanded, and the working needs under different conditions are met.
In one possible implementation, the beam splitting and integrating device further includes a first reflecting component located downstream of the first set of beam splitters, the first reflecting component being capable of reflecting the first polarized light emitted by the first set of beam splitters propagating along the first direction to propagate along the second direction. That is, in this implementation, in order to make the propagation directions of the polarized light of the respective paths emitted from the beam splitting and integrating device uniform, the first polarized light propagating in the first direction emitted from the beam splitter that receives the incident light last among the first group of beam splitters may be reflected by the first reflecting member to propagate in the second direction so as to be kept uniform with the propagation direction of the second polarized light propagating in the second direction emitted from the beam splitter among the first group of beam splitters.
In one possible implementation, the beam splitting integration device further comprises a first movement mechanism capable of moving at least one of the plurality of beam splitters of the first set of beam splitters and/or moving the first reflective component in the first direction. That is, in this implementation, at least one of the plurality of beam splitters may be moved in the first direction by the first moving mechanism, and the first reflecting member may be moved in the first direction by the first moving mechanism, thereby achieving the purpose of adjusting the pitch of the adjacent beams in the first direction.
In one possible implementation manner, the beam splitting and integrating device further includes a plurality of second reflecting components, where the number of the second reflecting components is equal to and corresponding to the number of beam splitters in the first set of beam splitters, and each second reflecting component is capable of reflecting, by the corresponding beam splitter in the first set of beam splitters, second polarized light propagating along the second direction to propagate along the first direction. That is, in this implementation, the second polarized light emitted from each beam splitter in the first group of beam splitters and propagating in the second direction may be reflected by the respective corresponding second reflecting members to propagate in the first direction so as to be consistent with the propagation direction of the first polarized light emitted from the beam splitter that receives the input light last in the first group of beam splitters and propagating in the first direction, so that the propagation directions of the polarized light of each path emitted from the beam splitting and integrating device are consistent.
In one possible implementation, the plurality of beam splitters includes a second set of beam splitters, the beam splitters of the second set of beam splitters being in a second state and aligned along the second direction, the second set of beam splitters including a first beam splitter and at least one second beam splitter; the first beam splitter is capable of receiving the first polarized light emitted by the first group of beam splitters; the number of the second beam splitters is equal to that of the second reflecting components and the second beam splitters are correspondingly arranged, and the second beam splitters can respectively receive second polarized light emitted by the corresponding beam splitters in the first group of beam splitters through the corresponding second reflecting components. That is, in this implementation, in order to further adjust the power of the polarized light emitted by each beam splitter of the first group of beam splitters, a second group of beam splitters may be provided, where the first beam splitter of the second group of beam splitters is located downstream of the beam splitter that receives the incident light last among the first group of beam splitters, so that the power of the first polarized light emitted by the beam splitter that receives the incident light last among the first group of beam splitters and propagating along the first direction can be adjusted, specifically, the first driving mechanism in the first beam splitter drives the half glass to rotate so as to change the polarization direction of the incident light, and then, the component in the first direction and the component in the second direction of the input light after changing the polarization direction will change correspondingly, so that the power of the output first polarized light changes, and the second polarized light is absorbed by the heat sink and no longer output; the second polarized light emitted by the beam splitters in the first group of beam splitters and propagating along the second direction is reflected by the second reflecting component to propagate towards the second beam splitters in the second group of beam splitters, the power of the second polarized light can be adjusted through the second beam splitters, specifically, the first driving mechanism in the second beam splitters can drive the half glass to rotate so as to change the polarization direction of incident light, then, the input light with changed polarization direction passes through the polarization splitting prism in the second beam splitters, the components in the first direction and the second direction correspondingly change, so that the power of the output first polarized light changes, and the second polarized light is absorbed by the radiator and is no longer output.
In one possible implementation, the beam splitting integration device further includes a second moving mechanism capable of moving the second beam splitter and a second reflecting component corresponding to the second beam splitter together along the second direction. That is, in this implementation, in order to adjust the pitch of adjacent light beams in the second direction, the second beam splitter and the second reflecting member corresponding to the second beam splitter may be simultaneously moved in the second direction by the second moving mechanism.
In one possible implementation, the beam splitting integration device further includes a control mechanism, and the at least one beam splitter includes two or more beam splitters, and the control mechanism is capable of individually controlling the rotation angles of the first driving mechanism and the second driving mechanism of each of the two or more beam splitters. That is, in this implementation, the first drive mechanism in each beam splitter may be controlled by the control mechanism to achieve more accurate power adjustment, and the second drive mechanism may be controlled by the control mechanism to control the angle of rotation of the beam splitter to switch between the first state and the second state.
In a second aspect, embodiments of the present application provide a laser beam splitting apparatus, including: a laser for emitting incident light; the beam splitting and integrating device provided in the first aspect is configured to split the incident light into at least two polarized light paths; and each motion platform is used for placing a to-be-machined piece, and the to-be-machined piece can receive at least one path of polarized light.
In one possible implementation, the laser beam splitting device further includes: the third reflection component is used for enabling one polarized light of at least two polarized lights emitted by the beam splitting and integrating device to spread towards the motion platform, and the focusing component is used for converging the lights reflected by the third reflection component; and/or a spatial modulation component, which is located between the laser and the beam splitting and integrating device, and is used for spatially shaping the incident light emitted by the laser and sending the shaped incident light to the beam splitting and integrating device.
Additional features and advantages of the invention will be set forth in the detailed description which follows.
Drawings
The drawings that accompany the detailed description can be briefly described as follows.
FIG. 1 is a schematic diagram of a laser beam splitting apparatus;
fig. 2 is a schematic structural diagram of a laser beam splitting apparatus according to an embodiment of the present application;
fig. 3 is a schematic structural diagram of a beam splitting and integrating device according to a first embodiment of the present application;
FIG. 4 is a top view of a beam splitter in a beam splitting and integrating device of an embodiment of the present application in two states;
Fig. 5 is a schematic structural diagram of a beam splitting and integrating device according to a second embodiment of the present application;
fig. 6 is a schematic structural diagram of a beam splitting and integrating device according to a third embodiment of the present application;
fig. 7 is a schematic structural diagram of a beam splitting and integrating device according to a fourth embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application.
In the description of the present application, the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate an orientation or positional relationship based on that shown in the drawings, merely for convenience of description and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or an contradictory or integral connection; the specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.
In the description of the present specification, a particular feature, structure, material, or characteristic may be combined in any suitable manner in one or more embodiments or examples.
Fig. 1 is a schematic structural diagram of a laser beam splitting apparatus. As shown in fig. 1, the laser beam splitting apparatus includes a laser 10', a moving stage 30', a reflecting mirror 40', a focusing mirror 50', and a spatial modulation part 60'. The laser 10 'serves as a light source, and the output laser beam is subjected to a series of spatial modulations by the spatial modulation section 60', reflection by the reflecting mirror 40', convergence by the focusing mirror 50', and the like, to finally act on the surface of the workpiece W to be machined. The surface piece W to be processed is carried by the motion platform 30' to perform translational motion, the laser spot and the workpiece W to be processed are relatively displaced, and scanning marks are left on the surface of the workpiece W to be processed.
In the above-mentioned laser beam splitting apparatus, the output beam of the laser 10' only acts on a single station, and cannot be processed in parallel at multiple stations, so that it is not easy to ensure that the power conditions are consistent in processing different batches. In addition, the laser beam splitting equipment does not have a power adjusting function and cannot adapt to different power requirements in processing of different batches. In addition, the processing mode of single-point scanning is low in efficiency and is mainly limited by the speed of the moving platform, in order to improve the efficiency, the high-speed moving platform is selected, the cost is extremely high, the speed of the high-speed moving platform is uneven in the acceleration and deceleration process, and the appearance of light spots in the process is easily distorted.
In view of this, the embodiment of the application provides a beam splitting and integrating device and a laser beam splitting device, which can emit multiple paths of light beams, and can independently adjust the power of each path of light beam, thereby realizing the purpose of parallel processing a plurality of workpieces to be processed, and greatly improving the processing efficiency; compared with multi-light source multi-point parallel processing, multiple lasers are not needed, and processing cost is greatly reduced; compared with single-point processing of a single light source, the processing efficiency can be improved by several times under the condition of increasing a small amount of cost. Furthermore, each beam splitter has the functions of mutually independent and noninterfere power adjustment, can meet different power requirements, and is beneficial to expanding the application range; in addition, the power stability of part of lasers can be guaranteed under the state of large current, however, the power under the large current is far greater than the power actually required by the users, so that the lasers can be normally used after being attenuated, and energy waste can be caused for laser single-point scanning. According to the embodiment of the application, the high-power light beam can be split into the plurality of low-power light beams, so that each low-power light beam meets the power required by work, the output power of the laser can be fully utilized, the energy waste is reduced, and the utilization efficiency of energy is improved.
Fig. 2 is a schematic structural diagram of a laser beam splitting apparatus according to an embodiment of the present application. As shown in fig. 2, the laser beam splitting apparatus includes a laser 10, a beam splitting integration device 20, and a plurality of moving stages 30. Wherein the laser 10 is arranged to emit incident light. The laser source wavelength may be long and short. The laser pulse width may be femtoseconds, picoseconds, and nanoseconds.
The beam splitting and integrating device 20 is used for dividing the incident light into at least two polarized light paths. Each motion stage 30 is configured to place a workpiece W that is capable of receiving at least one polarization. In fig. 2, the beam splitting and integrating device 20 divides the incident light into three polarized light, and three moving stages 30 may be provided at this time, and each moving stage 30 may receive one polarized light. The motion stage 30 carries the workpiece W to be processed to perform translational motion, the laser spot and the workpiece W are relatively displaced, and a scanning trace is left on the surface of the workpiece W to be processed.
In addition, the laser beam splitting apparatus may further include a spatial modulation part 60, and a third reflection part 40 and a focusing part 50 provided corresponding to each of the moving stages 30. The spatial modulation component 60 is located between the laser 10 and the beam splitting and integrating device 20, and the spatial modulation component 60 is configured to spatially shape the incident light emitted by the laser 10 and send the shaped incident light to the beam splitting and integrating device 20. Herein, "spatially shaping" may refer to processing incident light comprising multiple polarization directions into input light of a single polarization direction. The third reflective member 40 may be a mirror and the focusing member 50 may be a focusing mirror. The third reflecting component 40 is configured to propagate one polarized light of at least two polarized lights emitted by the beam splitting and integrating device 20 toward the motion platform 30, and the focusing component 50 is configured to collect the light reflected by the third reflecting component 40.
Specifically, after the output beam of the laser 10 is spatially modulated by the spatial modulation component 60, beam splitting is started by the beam splitting and integrating device 20, and the power of the split beam can be adjusted, so that the split beam can meet the requirements of different stations. The power of each beam after beam splitting is adjusted, and then the beam reaches the surface of the workpiece W through the action of a third reflecting component 40, such as a reflecting mirror, and a focusing component 50, such as a focusing mirror, so that the motion platform 30 moves together with the workpiece W to scan different areas of the workpiece W.
The specific structure of the beam splitting and integrating device 20 according to the embodiment of the present application will be described below with reference to fig. 3 to 7.
Fig. 3 is a schematic structural diagram of a beam splitting and integrating device according to a first embodiment of the present application. As shown in fig. 3, the beam splitting integration apparatus includes at least one beam splitter 1, and each beam splitter 1 includes a half slide 11, a polarization beam splitting prism (polarizating beam splitter, PBS) 12, and a first driving mechanism 13. The half slide 11 is used to change the polarization direction of incident light, which propagates in a first direction X. The polarization splitting prism 12 is used for splitting incident light passing through the half glass 11 into first polarized light propagating in a first direction X and second polarized light propagating in a second direction Y perpendicular to the first direction X. The first driving mechanism 13 is used for driving the half slide 11 to rotate around the first direction X to adjust the polarization direction of the incident light changed by the half slide 11, thereby changing the respective powers of the first polarized light and the second polarized light divided by the polarization splitting prism 12. Wherein the polarization directions of the first polarized light and the second polarized light are perpendicular. In one example, as shown in fig. 3, the first polarization may be vertically polarized light and the second polarization may be horizontally polarized light.
In the embodiment of the application, when the beam splitting and integrating device only comprises one beam splitter 1, the beam splitting and integrating device can emit two paths of polarized light at most; when the beam splitting device includes more than two beam splitters 1, the beam splitting and integrating device may emit more than two polarized light beams, and each beam splitter has a function of adjusting power independently and not interfering with each other, specifically, for each beam splitter 1, the first driving mechanism 13 may drive the half glass 11 to rotate around the first direction X, so as to adjust the polarization direction of the incident light changed by the half glass 11, and further change the respective powers of the first polarized light and the second polarized light divided by the polarization splitting prism 12, that is, after the polarization direction of the incident light is changed, the components in the first direction X and the second direction Y will be correspondingly changed after passing through the polarization splitting prism 12. Therefore, the embodiment of the application can emit multiple paths of light beams, and can independently adjust the power of each path of light beam, so that the aim of parallel processing of a plurality of workpieces to be processed is fulfilled, and meanwhile, different power requirements can be met, so that the processing efficiency is greatly improved. In addition, the beam splitting and integrating device can split the received high-power incident light into a plurality of low-power light beams, so that each low-power light beam meets the power required by work, the output power of the laser can be fully utilized, the energy waste is reduced, and the energy utilization efficiency is improved.
With continued reference to fig. 3, each beam splitter 1 may also include a base 14. The first drive mechanism 13 includes a first annular wheel 131, a second annular wheel 132, and a drive member 133. The first annular wheel 131 is disposed on the base 14. The second annular wheel 132 is rotatably connected to the first annular wheel 131, for example, the second annular wheel 132 is connected to the first annular wheel 131 through a bearing Z, and the first annular wheel 131 can be used to maintain the position of the second annular wheel 132 without affecting the rotation of the second annular wheel 132. Moreover, in order to avoid that the first annular wheel body 131 shields the incident light from propagating to the half slide 11, the hollow portion of the second annular wheel body 132 corresponds to the hollow portion of the first annular wheel body 131, the half slide 11 is disposed at the hollow portion of the second annular wheel body 132 at a side surface of the second annular wheel body 132 away from the first annular wheel body 131, and the incident light is incident from a side of the first annular wheel body 131 away from the second annular wheel body 132. The driving part 133 is used for driving the second annular wheel 132 and the half slide 11 to rotate around the first direction X relative to the first annular wheel 131.
Specifically, the incident light received by the beam splitting and integrating device is light having a single polarization direction, and after passing through the hollow portion of the first annular wheel 131, reaches the half slide 11 at the middle portion of the second annular wheel 132, the polarization direction is changed. Then, the light passes through the polarization splitting prism 12, and is split into a first polarized light propagating in the first direction X and a second polarized light propagating in the second direction Y.
Further, to avoid obscuring the slide half 11 when the drive member 133 drives the second ring wheel 132 to rotate, the drive member 133 may include a drive wheel 1331, a belt 1332, and a motor 1333. The driving wheel 1331 is spaced apart from the second annular wheel 132. The belt 1332 is sleeved outside the driving wheel 1331 and the second annular wheel 132. The motor 1333 is used for driving the driving wheel 1331 to rotate, and the second annular wheel 132 and the half slide 11 are driven to rotate under the action of the belt 1332. Wherein the motor 1333 may be a stepper motor.
The driving member 133 drives the second annular wheel 132 and the half slide 11 to rotate around the first direction X relative to the first annular wheel 131, so as to adjust the polarization direction, thereby changing the power of each of the first polarized light and the second polarized light divided by the polarization splitting prism 12. Specifically, the second annular wheel 132 may act as a large pulley and the drive wheel 1331 may act as a small pulley. The driving force is provided by the motor 1333 by the large belt wheel and the synchronous belt, namely the belt 1332, the large belt wheel, namely the second annular wheel body 132 drives the half glass slide 11 to rotate, the half glass slide 11 can change the direction of incident polarized light, and the power of the first polarized light and the second polarized light is determined by the included angle between the polarized direction of the incident light passing through the half glass slide 11 and the PBS.
In addition, as shown in fig. 3, each beam splitter 1 may further include a heat sink 15 and a second drive mechanism 16. Wherein the second driving mechanism 16 may be a stepper motor. The heat sink 15 and the polarization beam splitter prism 12 are arranged at intervals along the second direction Y, and are disposed on the base 14 of the beam splitter integrated device, that is, the position of the heat sink 15 is relatively fixed. The second driving mechanism 16 is configured to drive the polarization splitting prism 12 to rotate around a third direction Z, so that the polarization splitting prism 12 is switched between the first state and the second state, and the third direction Z is perpendicular to the first direction X and the second direction Y. That is, the polarizing beam splitter prism 12 rotates around the third direction Z, so that the angle of the reflecting surface of the polarizing beam splitter prism 12 can be changed, and the direction of the second polarized light can be changed, so that the beam splitter 1 can be switched between different states. Specifically, the beam splitter 1 can be switched from the first state to the second state or from the second state to the first state by rotating the polarization splitting prism 12/PBS by 90 ° about the third direction Z by the second driving mechanism 16. The PBS may receive polarized light deflected by the half slide 11 and may separate light of a first polarization, such as vertically polarized light, and light of a second polarization, such as horizontally polarized light.
In addition, the beam splitting and integrating device may further include a control mechanism (not shown in the figure) capable of individually controlling the rotation angles of the first driving mechanism 13 and the second driving mechanism 16 of each of the plurality of beam splitters 1, respectively.
Fig. 4 is a top view of a beam splitter in a beam splitting and integrating device of an embodiment of the present application in two states. As shown in the left-hand view of fig. 4, in the first state, the second polarized light in the second direction Y propagates away from the heat sink 15, and at this time, the beam splitter 1 can emit two polarized light beams, i.e., the first polarized light propagating in the first direction X and the second polarized light propagating in the second direction Y. As shown in the right side view of fig. 4, in the second state, the second polarized light along the second direction Y propagates toward the heat sink 15, i.e. the second polarized light will impinge on the heat sink 15 and no longer be output, the heat sink 15 may absorb the energy of the second polarized light, while the first polarized light propagating along the first direction X is not affected and may continue to be output, and the beam splitter 1 may only emit one beam of polarized light, i.e. the first polarized light. In addition, the first driving mechanism 13 can drive the half glass 11 to rotate to change the polarization direction of the incident light, so that the power of the first polarized light and the power of the second polarized light divided when the incident light with changed polarization direction passes through the polarization splitting prism 12 are changed, and therefore, the beam splitter 1 can independently adjust the power of each path of light beam in both states without disturbing the output of other paths.
Fig. 5 is a schematic structural diagram of a beam splitting and integrating device according to a second embodiment of the present application. As shown in fig. 5, the beam splitting and integrating device may include a plurality of beam splitters 1, the plurality of beam splitters 1 including a first group of beam splitters a, the beam splitters 1 in the first group of beam splitters a being in a first state or a second state and being arranged along a first direction X, the beam splitter 1 located downstream being capable of receiving the first polarized light emitted by the beam splitter 1 located upstream.
Since the beam splitter 1 in the first state can emit two polarized light beams, the beam splitter 1 in the second state can emit one polarized light beam, and the beam splitters 1 in the first group of beam splitters a can be in the first state or the second state, and the rotation angles of the first driving mechanism 13 and the second driving mechanism 16 in each beam splitter 1 are respectively and independently controlled, the first group of beam splitters a can not only control the number of emitted branch light beams, but also independently adjust the power of the branch light beams.
With continued reference to fig. 5, the beam splitting integrated device may further include a first reflecting member F1, the first reflecting member F1 being located downstream of the first set of beam splitters a, the first reflecting member F1 being capable of reflecting the first polarized light emitted by the first set of beam splitters a propagating along the first direction X into propagating along the second direction Y. The first reflecting component F1 may be a total reflection mirror, and may form an angle of 45 ° with the incidence direction of the branched beam propagating along the first direction X, i.e., the first polarized light, sent by the first group beam splitter a. That is, in the first group of beam splitters a, the beam splitter 1 that receives the incident light finally may emit two polarized light beams, one of which is along the first direction X and the other of which is along the second direction Y, and the first polarized light emitted by the beam splitter 1 located upstream may be used as the incident light of the beam splitter 1 adjacent downstream, so that only one of the polarized light beams emitted by the other beam splitters 1 may be used as the working laser. The first reflection component F1 reflects the first polarized light transmitted along the first direction X and sent by the beam splitter 1 which finally receives the incident light to transmit along the second direction Y, so that all light beams sent by the beam splitting and integrating device can transmit along the second direction Y, uniform distribution is convenient, and different workpieces to be processed are processed.
Further, the beam splitting and integrating device may further include a first moving mechanism (not shown in the figure). The first movement mechanism is capable of moving at least one of the plurality of beam splitters 1 of the first set of beam splitters a and/or the first reflective member F1 in the first direction X, i.e. at least one of the plurality of beam splitters 1 can be moved in the first direction X by the first movement mechanism; the first reflecting member F1 may also be moved in the first direction X by the first moving mechanism, thereby achieving adjustment of the spacing between adjacent light beams in the first direction X.
Fig. 6 is a schematic structural diagram of a beam splitting and integrating device according to a third embodiment of the present application. The difference from the beam splitting integration device shown in fig. 5 is that in fig. 6, the beam splitting integration device is not provided with the first reflecting member F1, but the beam splitting integration device further includes a plurality of second reflecting members F2, the number of which is equal to and corresponding to the number of beam splitters 1 in the first group of beam splitters a, each of the second reflecting members F2 being capable of reflecting the second polarized light emitted by the corresponding beam splitter 1 in the first group of beam splitters a and propagating in the second direction Y as propagating in the first direction X. The second reflecting component F2 may be a total reflection mirror, and may form an angle of 45 ° with the incidence direction of the second polarized light, which is a branch beam emitted by the corresponding beam splitter 1 in the first group of beam splitters a and propagating along the second direction Y.
That is, the beam splitter 1 in the second state may split the input light into two directions, which are directed to the next beam splitter 1 and the corresponding second reflecting member F2, respectively. By providing a plurality of second reflecting members F2, the second polarized light propagating in the second direction Y emitted by all the beam splitters 1 (including the beam splitter that receives the incident light last) in the first group of beam splitters a can be reflected to propagate in the first direction X, so as to be consistent with the propagation direction of the first polarized light emitted by the beam splitter 1 that receives the incident light last (i.e., propagate in the first direction X), thereby facilitating uniform distribution for processing different workpieces to be processed.
Also, in fig. 6, a first moving mechanism (not shown in the drawing) may simultaneously move at least one of the plurality of beam splitters 1 in the first group of beam splitters a and its corresponding second reflecting member F2 in the first direction X so as to adjust the pitch between adjacent light beams in the first direction X. In addition, the beam splitting and integrating device may further include a second moving mechanism (not shown in the figure). The second moving mechanism may move at least one of the plurality of second reflecting members F2 in the second direction Y so as to adjust the spacing between adjacent light beams in the second direction Y. The distance between the output light beams is adjusted through the first moving mechanism and the second moving mechanism, so that different position requirements can be met, and the operation is more flexible.
Fig. 7 is a schematic structural diagram of a beam splitting and integrating device according to a fourth embodiment of the present application. The beam splitting integrated device shown in fig. 6 is different in that in fig. 7, the plurality of beam splitters 1 may further include a second group of beam splitters b, the beam splitters 1 in the second group of beam splitters b being in a second state and being arranged in a second direction Y, the second group of beam splitters b including a first beam splitter b1 and at least one second beam splitter b2; the first beam splitter b1 is capable of receiving the first polarized light emitted by the first group of beam splitters a; the number of the second beam splitters b2 is equal to that of the plurality of second reflecting components F2 and is correspondingly arranged, and the second beam splitters b2 can respectively receive the second polarized light emitted by the corresponding beam splitters 1 in the first group of beam splitters a through the corresponding second reflecting components F2. I.e. the second set of beam splitters b may be located downstream of the first set of beam splitters a. Each of the second reflecting members F2 is provided corresponding to one of the beam splitters 1 of the first group of beam splitters a and one of the second beam splitters b2 of the second group of beam splitters b, and the second reflecting member F2 may reflect the second polarized light received from one of the beam splitters 1 of the first group of beam splitters a toward one of the second beam splitters b2 of the second group of beam splitters b as incident light of the second beam splitter b 2.
As shown in fig. 7, in the first group of beam splitters a, when the beam splitter 1 is in the first state, the beam splitter 1 may split the incident light into two, one beam, i.e., the first polarized light is output to the next beam splitter 1, and the other beam, i.e., the second polarized light is output to the second reflecting component F2 corresponding to the beam splitter 1; when the beam splitter 1 is in the second state, one beam, i.e. the first polarized light, is output to the next beam splitter 1, and the other beam, i.e. the second polarized light, is absorbed by the heat sink 15 of the beam splitter and is no longer output. Thus, the first group of beam splitters a has the function of controlling the number of light beams emitted by the beam integrating device. The beam splitter 1 has a function of controlling the beam splitting size/power in both the first state and the second state. In addition, the first driving mechanism 13 can drive the half glass 11 to continuously rotate around the first direction X, so that the stepless adjustment of power/continuous change of power can be realized, and the requirements of users can be better met.
In the second group of beam splitters b, the beam splitters 1 are in the second state and therefore only emit light of the first polarization propagating in the first direction X, and the rotation angle of the first driving mechanism in each beam splitter 1 is controlled independently, respectively, and therefore the beam splitters 1 in the second group of beam splitters b can independently adjust the power of the branch beam, although the number of emitted light beams cannot be changed. That is, the beam splitter 1 in the second state of the second group beam splitter b can function as an auxiliary power adjustment, and is individually adjusted without interfering with the output results of other light beams.
Thus, by adjusting the state of the beam splitter 1 in the first set of beam splitters a, the number of beams can be adjusted to operate the beam splitting integrated device in different modes. And, the position and the quantity of the light beams emitted by each working mode can be different, and the power of each light beam can be adjusted according to the needs.
Several possible modes of operation of the beam splitting integrated device are described below, taking as an example a first set of beam splitters a comprising three beam splitters 1 and a second set of beam splitters b comprising four beam splitters 1, see in particular table one below.
List one
As shown in table one, the beam splitting and integrating device can send out a beam through any beam splitter 1 in the second group of beam splitters b; two paths of light beams can be emitted through any two beam splitters 1 in the second group of beam splitters b; three paths of light beams can be emitted through any three beam splitters 1 in the second group of beam splitters b; and, the beam-splitting integrated device can emit four-way light beams through at most four beam splitters 1 in the second group of beam splitters b. It will be appreciated that the first set of beam splitters a may include more beam splitters 1 and the second set of beam splitters b may include more beam splitters 1, if desired, to expand the number of beams emitted by the beam splitting integration device to more. In addition, the operation modes of the beam splitting and integrating device may be, but not limited to, several operation modes shown in table one, for example, in other operation modes, the beam splitter 1 in the first group of beam splitters a may be 1/5, etc.
Further, in fig. 7, a first moving mechanism (not shown) may move at least one of the plurality of beam splitters 1 in the first group of beam splitters a and its corresponding second reflecting member F2 simultaneously in the first direction X so as to adjust the pitch between adjacent beams in the first direction X, and a second moving mechanism (not shown) may move the second beam splitter b2 and the second reflecting member F2 corresponding to the second beam splitter b2 together in the second direction Y so as to adjust the pitch between adjacent beams in the second direction Y. Wherein the first beam splitter b1 may be fixed. Through first moving mechanism and second moving mechanism, adjust the distance between the output light beam, adaptable different position demands for the operation is more nimble.
In the beam splitting integration device of the embodiment of the application, the number of the laser beams can be adjusted by adjusting the states of the plurality of beam splitters 1 in the first group of beam splitters a, and the beam splitters 1 in the first group of beam splitters a, the second reflecting component F2 and the second beam splitter b2 in the second group of beam splitters b can be expanded in number, so that arbitrary expansion of beam output is realized. The plurality of beam splitters 1 in the first group of beam splitters a can independently adjust the power of each beam, and the first beam splitter b1 and the second beam splitter b2 in the second group of beam splitters b can again adjust the power of each branch beam received from the plurality of beam splitters 1 in the first group of beam splitters a through the second reflecting member F2. In addition, the second reflecting member F2 may change the direction of the branched light beam so that the output light beam is maintained in the same direction. The first beam splitter b1 may be a fixed unit, and the second reflecting member F2 and the second beam splitter b2 form a movable unit, which can translate relative to the fixed unit, so as to realize the adjustable beam pitch.
In summary, the laser beam splitting device and the beam splitting integrated device with adjustable power provided by the embodiments of the application can realize single-light-source multi-point parallel processing, and can independently adjust the power of each path of light beam, and each beam splitter has the functions of mutually independent power adjustment and mutually noninterfere, can meet different power requirements, and is beneficial to expanding the application range. Compared with multi-light source multi-point parallel processing, multiple lasers are not needed, and processing cost is greatly reduced; compared with single-point processing of a single light source, the processing efficiency can be improved by several times under the condition of increasing a small amount of cost. In addition, the interval of the multiple light beams is flexible and adjustable, the number of the light beams is flexible and selectable, and the method is suitable for scenes needing to change the light beams frequently.
Furthermore, since the power stability of part of lasers can be guaranteed under the state of high current, the power under the state of high current is far greater than the power actually required by us, so that the laser beams must be attenuated for normal use, and energy waste can be caused for laser single-point scanning. According to the embodiment of the application, the high-power light beam can be split into the plurality of low-power light beams, so that each low-power light beam meets the power required by work, the output power of the laser can be fully utilized, the energy can be greatly fully utilized, the energy waste is reduced, and the utilization efficiency of the energy is improved.
The last explanation is: the above embodiments are only for illustrating the technical solution of the present application, but are not limited thereto; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application.
Claims (13)
1. A beam splitting and integrating device comprising at least one beam splitter, each beam splitter comprising:
a half slide for changing the polarization direction of incident light propagating in a first direction;
a polarization beam splitter prism for splitting the incident light passing through the half glass slide into first polarized light and second polarized light, wherein the first polarized light propagates along the first direction, and the second polarized light propagates along a second direction perpendicular to the first direction;
the first driving mechanism is used for driving the half glass slide to rotate around the first direction so as to adjust the polarization direction of incident light changed by the half glass slide, and further change the power of each of the first polarized light and the second polarized light divided by the polarization splitting prism.
2. The beam-splitting integrated device of claim 1, wherein each beam splitter further comprises a base; the first driving mechanism includes:
the first annular wheel body is arranged on the base;
the second annular wheel body is rotatably connected with the first annular wheel body, the hollow part of the second annular wheel body corresponds to the hollow part of the first annular wheel body, the half slide is arranged at the hollow part of the second annular wheel body on the side surface of the second annular wheel body, which is far away from the first annular wheel body, and the incident light is incident from one side of the first annular wheel body, which is far away from the second annular wheel body;
and the driving part is used for driving the second annular wheel body and the half slide to rotate around the first direction relative to the first annular wheel body.
3. The beam splitting and integrating device according to claim 2, wherein the driving means comprises:
the driving wheel is arranged at intervals with the second annular wheel body;
the belt is sleeved outside the driving wheel and the second annular wheel body;
and the motor is used for driving the driving wheel to rotate and driving the second annular wheel body and the half slide to rotate under the action of the belt.
4. The beam-splitting integrated device of any of claims 1-3, wherein each beam splitter further comprises:
the radiator and the polarization splitting prism are arranged at intervals along the second direction and are arranged on the base of the beam splitting integrated device;
the second driving mechanism is used for driving the polarization beam splitter prism to rotate around a third direction so as to enable the polarization beam splitter prism to be switched between a first state and a second state, and the third direction is perpendicular to the first direction and the second direction, wherein:
in the first state, the second polarized light propagates in a direction away from the heat sink;
in the second state, the second polarized light propagates toward the heat sink, the heat sink being capable of absorbing energy of the second polarized light.
5. The beam-splitting integrated device of claim 4, comprising a plurality of the beam splitters, the plurality of beam splitters comprising a first set of beam splitters, the beam splitters of the first set of beam splitters being in the first state or the second state and aligned along the first direction, a downstream beam splitter being capable of receiving a first polarized light emitted by an upstream beam splitter.
6. The beam-splitting integrated device of claim 5, further comprising a first reflective component downstream of the first set of beam splitters, the first reflective component capable of reflecting first polarized light emitted by the first set of beam splitters propagating along the first direction to propagate along the second direction.
7. The beam splitting integrated device of claim 6, further comprising a first movement mechanism capable of moving at least one of the plurality of beam splitters of the first set of beam splitters and/or moving the first reflective component in the first direction.
8. The beam splitting and integrating device of claim 5 further comprising a plurality of second reflective elements equal in number to and disposed in correspondence with the number of beam splitters in the first set of beam splitters, each second reflective element capable of reflecting second polarized light emitted by a corresponding beam splitter in the first set of beam splitters propagating in the second direction as propagating in the first direction.
9. The beam-splitting integrated device of claim 8, wherein a plurality of the beam splitters comprise a second set of beam splitters, the beam splitters of the second set of beam splitters being in a second state and aligned along the second direction, the second set of beam splitters comprising a first beam splitter and at least one second beam splitter; the first beam splitter is capable of receiving the first polarized light emitted by the first group of beam splitters; the number of the second beam splitters is equal to that of the second reflecting components and the second beam splitters are correspondingly arranged, and the second beam splitters can respectively receive second polarized light emitted by the corresponding beam splitters in the first group of beam splitters through the corresponding second reflecting components.
10. The beam splitting integrated device of claim 9, further comprising a second moving mechanism capable of moving at least one second beam splitter and a second reflective component corresponding to the at least one second beam splitter together in the second direction.
11. The beam splitting and integrating device of any of claims 1-10 further comprising a control mechanism, the at least one beam splitter comprising two or more beam splitters, the control mechanism being capable of independently controlling the angle of rotation of the respective first and second drive mechanisms of the two or more beam splitters.
12. A laser beam splitting apparatus, characterized in that the laser beam splitting apparatus comprises:
a laser for emitting incident light;
the beam splitting and integrating device of any of claims 1-11 for dividing the incident light into at least two paths of polarized light;
and each motion platform is used for placing a to-be-machined piece, and the to-be-machined piece can receive at least one path of polarized light.
13. The laser beam splitting device of claim 12, further comprising:
The third reflection component is used for enabling one polarized light of at least two polarized lights emitted by the beam splitting and integrating device to spread towards the motion platform, and the focusing component is used for converging the lights reflected by the third reflection component; and/or the number of the groups of groups,
the spatial modulation component is positioned between the laser and the beam splitting and integrating device and is used for spatially shaping the incident light emitted by the laser and transmitting the shaped incident light to the beam splitting and integrating device.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210102380.4A CN116560099A (en) | 2022-01-27 | 2022-01-27 | Beam splitting integrated device and laser beam splitting equipment |
| PCT/CN2022/114672 WO2023142470A1 (en) | 2022-01-27 | 2022-08-25 | Beam-splitting integrated apparatus and laser beam splitting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210102380.4A CN116560099A (en) | 2022-01-27 | 2022-01-27 | Beam splitting integrated device and laser beam splitting equipment |
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| CN116560099A true CN116560099A (en) | 2023-08-08 |
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| CN202210102380.4A Pending CN116560099A (en) | 2022-01-27 | 2022-01-27 | Beam splitting integrated device and laser beam splitting equipment |
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| WO (1) | WO2023142470A1 (en) |
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| JP4736633B2 (en) * | 2005-08-31 | 2011-07-27 | セイコーエプソン株式会社 | Laser irradiation device |
| US8519298B2 (en) * | 2010-03-25 | 2013-08-27 | Veeco Instruments, Inc. | Split laser scribe |
| CN202600257U (en) * | 2012-06-07 | 2012-12-12 | 保定天威薄膜光伏有限公司 | Full automatic continuous laser power adjusting device |
| CN103837995B (en) * | 2014-03-24 | 2015-12-30 | 电子科技大学 | A kind of multichannel equal difference light delayed time system |
| CN105005149A (en) * | 2015-08-10 | 2015-10-28 | 武汉华工激光工程有限责任公司 | Apparatus for carrying out light splitting on linear polarization laser and marking control |
| CN209417416U (en) * | 2018-12-26 | 2019-09-20 | 大族激光科技产业集团股份有限公司 | A kind of laser splitting device and processing unit (plant) |
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- 2022-01-27 CN CN202210102380.4A patent/CN116560099A/en active Pending
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