CN116555718A

CN116555718A - Battery piece coating equipment and method

Info

Publication number: CN116555718A
Application number: CN202310554264.0A
Authority: CN
Inventors: 请求不公布姓名
Original assignee: Guangdong Lyric Robot Intelligent Automation Co Ltd
Current assignee: Guangdong Lyric Robot Automation Co Ltd
Priority date: 2023-05-16
Filing date: 2023-05-16
Publication date: 2023-08-08

Abstract

The application relates to the technical field of battery piece processing, in particular to battery piece coating equipment and a battery piece coating method, wherein the battery piece coating equipment comprises: the working chambers comprise coating process chambers; the coating assembly is arranged in the coating process cavity; the coating assembly comprises a magnet assembly and a target; the magnet assembly is provided with a strong magnetic area and a weak magnetic area, and the magnetic field intensity of the strong magnetic area is larger than that of the weak magnetic area; the portion of the target corresponding to the strong magnetic region has a first sputtering rate, and the portion of the target corresponding to the weak magnetic region has a second sputtering rate different from the first sputtering rate. The battery piece coating equipment provided by the application reduces the magnetic field intensity of the area with high target sputtering rate, reduces the constraint of the area to charged particles, reduces the sputtering rate of the area, reduces the thickness of the coating film layer of the battery piece in the corresponding area, improves the consistency of the thickness of the battery piece film layer in each area on the carrier plate, and effectively improves the performance and yield of the battery piece.

Description

Battery piece coating equipment and method

Technical Field

The application relates to the technical field of battery piece processing, in particular to battery piece coating equipment and a battery piece coating method.

Background

The PVD equipment is used for preparing the transparent conductive film on the battery piece. PVD (physical vapor deposition) adopts a magnetron sputtering technology, argon ions are generated by glow discharge to continuously bombard a cathode target, and components corresponding to the cathode target are bombarded and sputtered to deposit on the surface of a battery piece, so that sputtering coating is realized. The problem that the film thickness of the film layer is uneven in the film coating areas at the two ends and the middle of the cathode target often occurs in the existing film coating equipment, so that the film coating quality is affected, and the yield of the battery piece is also affected.

Disclosure of Invention

The purpose of the application is to provide a battery piece coating equipment and a battery piece coating method, so as to solve the technical problem that the prior coating equipment in the prior art is easy to cause uneven thickness of a battery piece coating layer at different positions on a carrier plate to a certain extent.

The application provides a battery piece coating equipment, include: the working chambers comprise coating process chambers;

the coating assembly is arranged in the coating process cavity; the coating assembly comprises a magnet assembly and a target;

the magnet assembly is provided with a strong magnetic area and a weak magnetic area, and the magnetic field intensity of the strong magnetic area is larger than that of the weak magnetic area;

The part of the target corresponding to the strong magnetic region has a first sputtering rate, and the part of the target corresponding to the weak magnetic region has a second sputtering rate different from the first sputtering rate.

In the above technical solution, further, the magnet assembly is in a strip shape, the target is in a column shape, and the magnet assembly is parallel to the target;

one end of the magnet assembly forms a first weak magnetic area, the other end of the magnet assembly forms a second weak magnetic area, and a part between the first weak magnetic area and the second weak magnetic area forms a strong magnetic area;

the first weak magnetic region corresponds to part of the target at one end of the target, and the second weak magnetic region corresponds to part of the target at the other end of the target.

In any of the foregoing solutions, further, the magnet assembly includes:

the supporting body is in a strip shape and is fixed with the coating process cavity or the target;

the magnetic core is arranged in the bearing body; the magnetic core comprises a plurality of first magnets and at least two end-capping magnets;

the plurality of first magnets are arranged in a multi-layer manner, each layer comprises a plurality of first magnets, and any two layers of first magnets are arranged in parallel;

Each end-capping magnet abuts against the first magnet on the top layer and the first magnet on the bottom layer in the multiple layers, and the end-capping magnets and the first magnets form a closed structure together.

In any of the above technical solutions, further, a plurality of the first magnets and at least one of the end-capped magnets are disposed in the first weak magnetic region; a plurality of first magnets and at least one end-capped magnet are arranged in the second weak magnetic region; a plurality of first magnets are arranged in the strong magnetic region; the number of the first magnets in the strong magnetic region is greater than the number of the first magnets in the first weak magnetic region and is also greater than the number of the first magnets in the second weak magnetic region.

In any of the above technical solutions, further, a portion of the target corresponding to the first weak magnetic region forms a first sputtering region, a portion of the target corresponding to the strong magnetic region forms a second sputtering region, and a portion of the target corresponding to the second weak magnetic region forms a third sputtering region;

each time the magnetic field intensity of the first weak magnetic region is 100GS different from the magnetic field intensity of the strong magnetic region, the film thickness of the battery piece corresponding to the first sputtering region is reduced by 2nm compared with the film thickness of the battery piece corresponding to the second sputtering region;

And each time the magnetic field intensity of the second weak magnetic region is 100GS different from that of the strong magnetic region, the film thickness of the battery piece corresponding to the third sputtering region is reduced by 2nm compared with that of the battery piece corresponding to the second sputtering region.

In any of the above solutions, further, the first magnet has a rectangular sheet structure or a cuboid structure;

the end-capping magnet has an arcuate planar structure with the end-capping magnet protruding toward the exterior of the closure structure.

In any of the above technical solutions, further, a water inlet is provided at one end of the carrier, a water outlet is provided at the other end of the carrier, a waterway channel is provided on a side wall of the carrier, and the waterway channel is communicated with the water inlet and the water outlet.

In any of the foregoing solutions, further, the plurality of working chambers includes: the coating process cavity is arranged between the transportation cavity and the second buffer cavity;

each working cavity is provided with a carrier plate inlet and a carrier plate outlet, and each carrier plate inlet and each carrier plate outlet are provided with a turning plate assembly.

In any of the above technical solutions, further, the battery piece film plating device further includes a water, electricity and gas integration corridor, where the water, electricity and gas integration corridor is disposed on one side of the working chambers, and is used for providing water, electricity or vacuum pipeline for the working chambers.

The application also provides a battery piece coating method, which comprises the battery piece coating equipment according to any one of the technical schemes, so that the battery piece coating equipment has all the beneficial technical effects, and the detailed description is omitted.

The battery piece coating method comprises the following steps:

s1, loading a battery piece on a carrier plate; a plurality of mounting positions are distributed on the carrier plate in a matrix manner, and battery pieces are arranged on each mounting position;

s2, opening a turnover plate assembly of the input cavity to enable the carrier plate to enter the input cavity, and starting the air extractor;

s3, starting a heating piece of the first buffer cavity, opening a turnover plate assembly at a carrier plate inlet of the first buffer cavity, enabling the carrier plate to enter the first buffer cavity, and starting an air extractor;

s4, starting a heating piece of the transportation cavity, opening a turnover plate assembly at the inlet of a carrier plate of the transportation cavity, and starting an air extractor;

s5, opening a turnover plate assembly of the coating process chamber, starting the coating assembly of the coating process chamber, and performing coating operation on the battery piece;

S6, opening a turnover plate assembly of the second buffer cavity, and starting the cooling device;

s7, starting a cooling device and an air supply system of the output cavity, and opening a turnover plate assembly of the output cavity;

s8, placing the carrier plate full of the battery piece with the film coating on a conveying device, and conveying the carrier plate and the battery piece to a specified position by the conveying device.

Compared with the prior art, the beneficial effects of this application are:

the battery piece coating equipment that this application provided includes: the working chambers comprise coating process chambers; the coating assembly is arranged in the coating process cavity; the coating assembly comprises a magnet assembly and a target; the magnet assembly is provided with a strong magnetic area and a weak magnetic area, and the magnetic field intensity of the strong magnetic area is larger than that of the weak magnetic area; the portion of the target corresponding to the strong magnetic region has a first sputtering rate, and the portion of the target corresponding to the weak magnetic region has a second sputtering rate different from the first sputtering rate.

The battery piece coating equipment provided by the application reduces the magnetic field intensity of the area with high sputtering rate of the target material, reduces the binding of the area to charged particles, reduces the probability of collision ionization, reduces the bombardment probability of the charged particles to the target material in the area, reduces the sputtering rate of the area, reduces the thickness of the coating film layer of the battery piece in the corresponding area, improves the consistency of the thickness of the film layer of the battery piece in each area on the carrier plate, and further effectively improves the performance and yield of the battery piece.

The battery piece coating method comprises the battery piece coating equipment, so that the battery piece can be subjected to high-efficiency and high-quality coating processing through the battery piece coating equipment, and the quality of a film layer and the yield are remarkably improved.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural diagram of a magnet assembly of a battery piece coating device according to an embodiment of the present application;

fig. 2 is a schematic structural diagram of a battery slice coating apparatus according to an embodiment of the present disclosure;

fig. 3 is a schematic diagram of a closed state of a flip door panel of a battery piece double-sided coating device according to an embodiment of the present application;

fig. 4 is a schematic structural diagram of a flip door panel of the battery piece double-sided coating apparatus provided in the embodiment of the present application;

FIG. 5 is an enlarged schematic view of FIG. 4 at A;

Fig. 6 is a schematic structural diagram of a fixing bearing of a battery piece double-sided film plating apparatus according to an embodiment of the present application.

Reference numerals:

1-input chamber, 2-first buffer chamber, 3-transport chamber, 4-coating process chamber, 5-second buffer chamber, 6-output chamber, 7-water-electricity-gas integration corridor, 8-gas supply pump, 9-gas supply system, 10-magnet assembly, 11-first magnet, 12-first end-capped magnet, 13-second end-capped magnet, 14-carrier, 1401-water inlet, 1402-water outlet, 15-flap assembly, 1501-closing plate, 1502-spindle, 1503-driving member, 1504-spacer block portion, 1505-connecting portion, 1506-pre-pressing portion, 1507-buffer spring, 1508-buffer plate, 1509-cam portion, 1510-joint bearing, 1511-sensing portion, 1512-speed regulating member, 1513-fixed ring, 16-fixed bearing, 1601-bearing portion, 1602-housing body, 1603-sealing ring, 1604-clamp spring, 1605-holding ring.

Detailed Description

The following description of the embodiments of the present application will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown.

The components of the embodiments of the present application, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, as provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application.

All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.

In the description of the present application, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of description of the present application and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art in a specific context.

A battery sheet plating apparatus and a battery sheet plating method according to embodiments of the present application are described below with reference to fig. 1 to 6.

Referring to fig. 1 to 6, an embodiment of the present application provides a battery piece coating apparatus, where the battery piece coating apparatus includes a plurality of working cavities, the plurality of working cavities are sequentially arranged, a carrier plate sequentially passes through each working cavity, and the plurality of working cavities can respectively perform corresponding processing operations on the carrier plate and a battery piece carried by the carrier plate. The plurality of working chambers include a plating process chamber 4, a magnet assembly 10 and a plating assembly are arranged in the plating process chamber 4, the magnet assembly 10 is used for forming a magnetic field so as to ensure that the plating assembly can perform plating on a battery piece entering the plating process chamber 4, the plating assembly comprises a target, a power supply, a vacuumizing pump and other parts capable of realizing plating, and reaction gas can be introduced into the plating process chamber 4 so as to ensure that plating operation can be performed smoothly, and it is required that the parts included in the plating assembly are necessary components capable of realizing the principle of a plating technology and are mature technologies, and the parts can be fully understood by a person skilled in the art and are not repeated herein. The magnet assembly 10 in the application forms areas with different magnetic field intensities, reduces the local sputtering rate of the target by changing the magnetic field intensity, and improves the uneven thickness of the film coating layer of the battery piece under different sputtering areas of the target.

Further, the coating process chambers 4 have a box structure, and it should be noted that, in the battery piece coating device provided in this embodiment, at least one coating process chamber 4 is included, and a corresponding number of coating process chambers 4 may be set according to specific coating requirements, such as requirements of a film thickness, a film layer number, and the like.

One of the two side walls of the structure of the box body, which are arranged facing each other, is provided with a carrier plate inlet, and the other side wall is provided with a carrier plate outlet, so that the carrier plate can bear the battery piece to enter the coating process cavity 4 for coating operation, and after the coating is finished, the battery piece bearing the coating is separated from the coating process cavity 4 through the carrier plate outlet.

Further, the plurality of working chambers further includes: the device comprises an input cavity 1, a first buffer cavity 2, a transportation cavity 3, a second buffer cavity 5, an output cavity 6 and a water, electricity and gas integration corridor 7, wherein a coating process cavity 4 is arranged between the transportation cavity 3 and the second buffer cavity 5. Preferably, the number of the first buffer cavities 2 is at least one, and when the number of the first buffer cavities 2 is more than one, all the first buffer cavities 2 are arranged next to each other in sequence along the conveying direction of the carrier plate. Preferably, the number of the second buffer chambers 5 is also at least one, preferably, in the application, the number of the second buffer chambers 5 is specifically three, namely, a second buffer chamber a, a second buffer chamber b and a second buffer chamber c, along the conveying direction of the carrier plate, the input chamber 1, the first buffer chamber 2, the conveying chamber 3, the coating process chamber 4, the second buffer chamber a, the second buffer chamber b, the second buffer chamber c and the output chamber 6 are sequentially and closely arranged, the water, electricity and gas integration corridor 7 is arranged at one side of the coating process chamber 4, and is used for providing the requirements of water, electricity, gas and vacuum pipelines for the coating process chamber 4, and the air outlet of each air extracting device is connected with the vacuum pipeline of the water, electricity and gas integration corridor 7 so as to ensure that the whole battery piece coating equipment of the battery piece is smoothly coated.

Further, a conveying device (not shown in the figure) is disposed in each working cavity, or the battery piece coating device includes a conveying device, the conveying device penetrates through each working cavity, and the conveying device is used for conveying the carrier plates, so that the carrier plates can flow from the previous working cavity to the next working cavity one by one.

After the carrier plate carrying the battery pieces is put into the input cavity 1, the carrier plate starts to be conveyed towards the first buffer cavity 2. Preferably, one side of the input cavity 1 is provided with an air extracting device and an air supply system 9, and the air extracting device can be a vacuum pump set specifically and is used for extracting air in the inner space of the input cavity 1, and at least pumping the input cavity 1 to rough vacuum, so that the cooling effect can be achieved on the inner space of the input cavity 1, and pollutants such as impurities on a carrier plate, a battery piece and a wall plate and between plate seams of the input cavity 1 can be removed in the process of vacuumizing, so that the cleanliness of the battery piece is ensured, and the coating quality of the battery piece is ensured subsequently.

The air supply system 9 includes: the air supply pump 8 is specifically a common mechanical pump and is used for pumping air in the air storage tank to the air supply pipe group. The air supply pipe group includes the connecting pipe, first branch pipe and second branch pipe, the one end and the outlet duct of connecting pipe are connected, the other end of connecting pipe is provided with the branch joint that has two interfaces, input chamber 1 has the box structure, including a plurality of sidewall plates, bottom plate and apron, the one end of first branch pipe is connected with a joint of branch joint, the other end of first branch pipe is linked together with the inner space that wears to locate the apron and be linked together with input chamber 1, the one end and the other joint of branch pipe are connected, the other end of second branch pipe wears to locate the apron and be linked together with the inner space of input chamber 1. Preferably, the gas stored in the gas storage tank is nitrogen or argon, which is not limited to this, but can be other inert gases, and the gas enters the input cavity 1 through the first branch pipe and the second branch pipe and fills the internal space of the input cavity 1, so that oxidation or other chemical reactions on the surface of the battery piece can be avoided, and the quality of the subsequent coating film is ensured.

Preferably, the first branch pipe, the second branch pipe and the connecting pipe are distributed in a Y shape, and the first branch pipe and the second branch pipe simultaneously convey gas into the input cavity 1, so that the stability and uniformity of conveying gas into the input cavity 1 can be ensured.

Further, the first buffer chamber 2 is provided with a lifting device (not shown in the figure), preferably, the first buffer chamber 2 has a box structure, the lifting device is arranged at the bottom of the first buffer chamber 2, the lifting device at least comprises a driving device, a driving rod and a supporting plate, one end of the driving rod is connected with the driving device, the other end of the driving rod is connected with the supporting plate, preferably, the driving device can be a hydraulic cylinder, but not limited to, the driving device can drive the driving rod and the supporting plate to ascend or descend, so that one or more supporting plates can be stored in the first buffer chamber 2, a certain number of supporting plates can be stored in the first buffer chamber 2 when the coating operation is not performed in the coating process chamber 4, the collision and the crowding of the supporting plates can be avoided, and the battery piece coating equipment can continuously operate without stopping.

Preferably, the heating element is preferably an infrared heating device, and the heating element is arranged on the inner wall surface of the top plate of the first buffer cavity 2, so that the internal environment of the first buffer cavity 2 can be properly warmed, the battery piece can be dried, the carrier plate and the battery piece on the carrier plate can be preheated, the heating time period of the carrier plate after entering the coating process cavity 4 can be reduced, and the coating efficiency can be improved.

Further, another air extraction device is further arranged on one side of the first buffer cavity 2 and is used for extracting air in the first buffer cavity 2, and at least extracting the inner space of the first buffer cavity 2 to a rough vacuum state, so that the pressure difference between the pressure in the first buffer cavity 2 and the pressure in the input cavity 1 is prevented from being too large.

Preferably, the air extractor is further provided with a cold trap, and the water vapor in the first buffer cavity 2 can be captured through cold trap refrigeration, so that the water vapor residue in the first buffer cavity 2 is avoided.

Further, along the conveying direction of the carrier plate, the conveying cavity 3 is arranged next to the first buffer cavity 2, the coating process cavity 4 is arranged next to the conveying cavity 3, the conveying cavity 3 is arranged between the first buffer cavity 2 and the coating process cavity 4, the carrier plate in the first buffer cavity 2 can be conveyed into the coating process cavity 4 one by one through the conveying cavity 3, and the carrier plate can be ensured to orderly enter the coating process cavity 4 through the conveying cavity 3, so that the conditions of jamming, congestion and the like are avoided.

Preferably, the transportation chamber 3 also has a box structure, the transportation chamber 3 comprises a top plate, and the inner wall surface of the top plate is provided with another heating element, and the heating element can raise the temperature in the transportation chamber 3, so that the temperature of the battery piece can be raised to the process temperature required by coating before entering the coating process chamber 4.

One side of the transportation cavity 3 is provided with another air extractor for carrying out vacuumizing operation on the transportation cavity 3, a vacuum environment is required to be formed in the coating process cavity 4 when coating is carried out, the internal space of the transportation cavity 3 is vacuumized to ensure that the pressure of the transportation cavity 3 and the pressure of the coating process cavity 4 are kept balanced, and the vacuum degree of the coating process cavity 4 is obviously reduced due to the fact that the carrier plate is prevented from flowing from the transportation cavity 3 to the coating process cavity 4. Preferably, the suction device is also provided with a cold trap.

It should be noted that, the carrier plate carries a plurality of battery pieces, and the plurality of battery pieces are arranged in a matrix form in a plurality of rows and a plurality of columns, that is, the plurality of battery pieces are distributed on the carrier plate along the length direction of the carrier plate (also the conveying direction of the carrier plate), and the plurality of battery pieces are also distributed along the width direction of the carrier plate (also the width direction of the film plating process chamber 4).

Further, in the film plating process chamber 4, the magnet assembly 10 is disposed on the back of the target opposite to the battery plate, and the magnetic field strength formed by the magnet assembly 10 can influence the sputtering rate of the target, thereby influencing the thickness of the film plating layer on the battery plate.

Preferably, the target and the magnet assembly 10 are both in a strip shape, the target and the magnet assembly 10 extend along the width direction of the coating process chamber 4, and the width direction of the coating process chamber 4 is perpendicular to the conveying direction of the carrier plate. In the conventional coating equipment, magnets with the same magnetic field intensity are generally adopted for the arrangement of the magnetic field, so that the situation that the thicknesses of the coating layers of the battery pieces in the coating areas corresponding to the two ends of the target and the battery pieces in the coating areas corresponding to the middle part of the target are different easily occurs, and the situation that the thicknesses of the coating layers of the battery pieces near the two ends of the plurality of battery pieces distributed along the width direction of the coating process cavity 4 on the same carrier plate are different from those of the battery pieces in the middle part of the battery pieces is caused.

In this application, the magnet assembly 10 includes a carrier 14 and a magnetic core, the magnetic core is disposed in the carrier 14, the carrier 14 has a long strip shape, and preferably, the carrier 14 may have a cylindrical or rectangular structure. The core comprises in particular a first magnet 11 and a blocking magnet.

The number of the first magnets 11 is plural, the plurality of first magnets 11 are arranged in a plurality of rows, each row includes a plurality of first magnets 11, preferably, in this embodiment, the plurality of first magnets 11 are arranged in three rows (or three layers), namely, a first magnet 11 group, a second magnet group and a third magnet group, and the three rows of magnets are arranged in parallel, specifically, as shown in fig. 1, the first magnet group, the second magnet group and the third magnet group are arranged in parallel, and the second magnet group is located between the first magnet 11 group and the third magnet group.

The number of end-capping magnets may be two, namely a first end-capping magnet 12 and a second end-capping magnet 13, respectively, the first end-capping magnet 12 is disposed near one end of the carrier 14, and the first end-capping magnet 12 is simultaneously abutted with the first magnet 11 set and the third magnet set, the second end-capping magnet 13 is disposed near the other end of the carrier 14, and the second end-capping magnet 13 is simultaneously abutted with the first magnet 11 set and the third magnet set, such that the first magnet 11 set, the first end-capping magnet 12, the third magnet set and the second end-capping magnet 13 together form a closed structure, and the second magnet set is disposed within the closed structure.

Further, taking the first magnet 11 set as an example, the first magnet 11 set includes a plurality of first magnets 11 with the same structure, preferably, the first magnets 11 are in a cuboid shape or a flat plate shape, the plurality of first magnets 11 are sequentially arranged along the length direction of the carrier 14, and any two adjacent first magnets 11 are closely adjacent to each other. Preferably, each first magnet 11 has a size of: 100mm x 10mm (corresponding to length, width, height of the first magnet 11).

The arrangement of the first magnets 11 in the second magnet group and the arrangement of the first magnets 11 in the third magnet group are the same as described above, and will not be described again.

The first end-capping magnet 12 and the second end-capping magnet 13 have the same structure, preferably, the first end-capping magnet 12 and the second end-capping magnet 13 are arc-shaped, and taking the first end-capping magnet 12 as an example, both side surfaces of the first end-capping magnet 12 are arc-shaped surfaces, and the radians of the two arc-shaped surfaces are the same, more preferably, both inner and outer side wall surfaces of the first end-capping magnet 12 are raised towards the outer part of the closed structure. The structure, shape and arrangement of the second end-capping magnet 13 are the same as those of the first end-capping magnet 12, and will not be described again.

Further, a strong magnetic area and a weak magnetic area are formed along the length direction of the carrier 14, that is, the length direction of the magnetic core, and the magnetic field strength of the strong magnetic area is greater than that of the weak magnetic area. Specifically, after the film plating is finished, the film thickness of part of the battery piece under the corresponding area of the two ends of the target is often thicker than that of part of the battery piece under the corresponding area of the middle part of the target.

Preferably, the first weak magnetic region, the strong magnetic region and the second weak magnetic region are sequentially formed along the length direction of the magnetic core, and preferably, the magnetic field strengths of the first weak magnetic region and the second weak magnetic region are the same and are smaller than the magnetic field strength of the strong magnetic region. More preferably, the first and second field weakening regions have the same length or range of radiation.

More preferably, the first and second field-weakening regions each occupy a length of the core, which may be, but is not limited to, 20cm.

The following provides specific embodiments for forming the magnetic field intensity distribution:

the number of the first magnets 11 in the second magnet group is smaller than that of the first magnets 11 in the first magnet group 11 and smaller than that of the first magnets 11 in the third magnet group, a gap is formed between the first magnet 11 and the first end-capped magnet 12, and a gap is formed between the last first magnet 11 and the second end-capped magnet 13, so that the magnet density of the first weak magnetic area and the magnet density of the second weak magnetic area are smaller than that of the strong magnetic area, and the magnetic field strength partitioning is realized.

And (II) the magnetic field intensity of the first magnets 11 distributed in the first weak magnetic region and the magnetic field intensity of the first end-capped magnets 12 are smaller than the magnetic field intensity of the first magnets 11 distributed in the strong magnetic region, so that the magnetic field intensity division is realized. The second field weakening region is the same. Preferably, the battery piece film plating equipment provided in this embodiment selects the two modes at the same time.

Preferably, the magnetic field strength of the first weak magnetic region and the magnetic field strength of the second weak magnetic region are smaller than those of the strong magnetic region by 200GS, and certainly, the magnetic field strengths of the first weak magnetic region and the second weak magnetic region are not limited to those of the strong magnetic region, and compared with the case that each strong magnetic region is reduced by 100GS, the thickness of a film coating layer of a battery piece under the corresponding region is reduced by 2nm, so that the magnets in the first weak magnetic region, the second weak magnetic region and the strong magnetic region can be properly adjusted according to the rule.

Further, a water inlet 1401 is provided at one end of the carrier 14, a water outlet 1402 is provided at the other end of the carrier 14, a water channel is formed on the side wall of the carrier 14, the water channel is communicated with the water inlet 1401 and the water outlet 1402, water or other cooling liquid can be introduced into the water channel through the water inlet 1401 to cool the carrier 14, and the water outlet 1402 is used for releasing the cooling liquid so as to realize continuous flow of the cooling liquid and ensure the cooling effect.

Further, the structures of the second buffer cavity a, the second buffer cavity b and the second buffer cavity c are the same as those of the first buffer cavity 2, and the function of buffering a certain number of carrier plates is also achieved, so that those skilled in the art can fully understand the structure and will not be repeated.

Preferably, the second buffer cavity a is internally provided with a cooling device, which can be, but not limited to, a water-cooled pipe, preferably, the cooling device is arranged on the inner wall surface of the top plate of the second buffer cavity a, and can cool down the inner space of the second buffer cavity, and simultaneously cool down and cool down the carrier plate and the battery pieces.

The second buffer cavity b is internally provided with another cooling device, and the carrier plate is further cooled after entering the second buffer cavity b.

The inside of the second buffer cavity c is also provided with a cooling device, and the carrier plate enters the second buffer cavity c to be cooled further, so that the carrier plate and the battery piece after coating are prevented from being too high in temperature.

Further, the output cavity 6 is also provided with a box structure, another cooling device is arranged on the inner wall surface of the top plate of the box structure to cool the carrier plate and the battery piece, and further, another air supply system is further arranged on one side of the output cavity 6, and the air supply system is the same as the air supply system 9, and the specific structure and the connection mode are not repeated.

The gas supply system can convey gas into the output cavity 6, the conveyed gas can be nitrogen or argon, after the conveyed gas is conveyed into the output cavity 6, on one hand, the pressurizing of the output cavity 6 can be gradually close to the atmospheric pressure, on the other hand, the gas can also be used as cooling gas to be matched with a cooling device, and the cooling speed of the carrier plate and the battery piece is accelerated.

Further, this battery piece coating film equipment still includes turns over board assembly 15, and every working chamber of this battery piece coating film equipment all is provided with carrier plate import and carrier plate export, and every carrier plate import and every carrier plate export all are provided with turns over board assembly 15, turns over board assembly 15 and can play the effect of the door body, seals carrier plate import and carrier plate export after the carrier plate gets into the working chamber to carry out the evacuation operation to the working chamber that needs to carry out the evacuation.

Specifically, the flap assembly 15 includes at least: the number of the sealing plates 1501, the rotating shafts 1502 and the driving members 1503 is preferably two, the driving members 1503 can be, but not limited to, cylinders, the two driving members 1503 are fixed with the wall plates of the working cavity, the two driving members 1503 are provided with driving shafts, the two driving shafts are arranged in parallel and are respectively connected with the rotating shafts 1502 vertically, the two driving members 1503 are respectively arranged near two ends of the rotating shafts 1502, the two driving shafts extend or retract simultaneously, the rotating shafts 1502 are driven to drive the sealing plates 1501 to rotate, in the rotating process, the sealing plates 1501 can be opened or closed relative to the inlets or outlets of the carrier plates, so that the carrier plates can smoothly enter the working cavity, and the sealing plates 1501 are closed after the carrier plates enter the working cavity, so that a closed space is formed inside the working cavity. The shaft 1502 is disposed above or below the inlet and outlet, and the shaft 1502 is disposed parallel to the inlet and outlet, so as to ensure that the door panel can be opened or closed relative to the inlet or outlet when the sealing plate 1501 rotates along with the shaft 1502. A plurality of fixed rings 1513 are arranged on the outer wall surface of the wall plate of the processing cavity, the rotating shaft 1502 is arranged on the plurality of fixed rings 1513 in a penetrating mode, the rotating shaft 1502 can rotate relative to the fixed rings 1513, the plurality of fixed rings 1513 can play a supporting role on the rotating shaft 1502, stability when the rotating shaft 1502 drives the door plate to rotate can be guaranteed, and overlarge local movement amplitude of the rotating shaft 1502 is avoided.

The roll-over assembly further includes a roll-over connection assembly through which the closure plate 1501 is connected to the shaft 1502. The upset coupling assembling specifically includes: cushion portion 1504 and connecting portion 1505, cushion portion 1504 sets up on the external face of shrouding 1501, connecting portion 1505 are rectangular shape, the one end and the pivot 1502 of connecting portion 1505 are connected, the other end and the cushion portion 1504 of connecting portion 1505 are connected, the connected mode is articulated preferably, thereby realize shrouding 1501 is connected with pivot 1502, and form the settling gap between pivot 1502 and shrouding 1501, preferably, be provided with pre-compaction portion 1506 in the settling gap, pre-compaction portion 1506 specifically can be compressed pressure spring, the one end of pre-compaction portion 1506 is connected with connecting portion 1505, the other end and the shrouding 1501 of pre-compaction portion 1506 are connected, pre-compaction portion 1506 can last to exert thrust to shrouding 1501, when shrouding 1501 is in the state of closing relatively above-mentioned import (and/or export), under the effect of pre-compaction portion 1506, shrouding 1501 has the trend of keeping away from connecting portion 1505 all the time, thereby be close towards the import as far as possible, avoid shrouding 1501 to take place to stick up, the seam, bad phenomenon of gas tightness such as leakage, in order to ensure the sealed effect to the import. It should be noted that, the number of the overturning connecting components is multiple, and the overturning connecting components are arranged at intervals along the length direction of the rotating shaft 1502, and of course, the number of the pre-pressing portions 1506 is also multiple, so that the connection strength between the sealing plate 1501 and the rotating shaft 1502 and the stability of the sealing plate 1501 in the overturning process are effectively enhanced, and the sealing effect of the processing cavity and the two coating cavities after the sealing plate 1501 is closed is further enhanced.

The overturning connecting piece further comprises a buffer part, the buffer part is arranged on one side, opposite to the sealing plate 1501, of the connecting part 1505, preferably, the buffer part comprises buffer springs 1507 and buffer plates 1508, the buffer plates 1508 and the connecting part 1505 are arranged at intervals in parallel, the buffer springs 1507 are arranged between the buffer plates 1508 and the connecting part 1505, one end of each buffer spring 1507 is connected with the buffer plates 1508, the other end of each buffer spring 1507 is connected with the connecting part 1505, when the sealing plate 1501 is interfered or collided with other structures and components in the overturning process, the buffer springs 1507 are compressed, kinetic energy subjected to extrusion is converted into potential energy of the springs, and if other structures collide with the side edges of the buffer plates 1508, the springs can bend so as to avoid collision of other structures.

Further, the flipping assembly further comprises a driving connection assembly, and the driving member 1503 is connected to the rotating shaft 1502 through the driving connection assembly. The drive connection assembly comprises a cam portion 1509, the cam portion 1509 is arranged at the end of the rotating shaft 1502, the cam portion 1509 is coaxially arranged with the rotating shaft 1502, a driving shaft of the driving piece 1503 is hinged with the cam portion 1509, preferably, the drive connection assembly further comprises a joint bearing 1510, the driving shaft is hinged with the cam portion 1509 through the joint bearing 1510, and therefore the sealing plate 1501 from the driving piece 1503 to the sealing plate 1501 is turned over through the driving shaft and the joint bearing 1510, the rotating shaft 1502 and the connecting portion 1505, and the connecting portion 1505 and the cushion block portion 1504 through three-level transmission, the accuracy of the transmission process is improved, and the turning freedom degree of the sealing plate 1501 is also improved. Through the above-mentioned transmission process, the overturning angle of the sealing plate 1501 can be 0 ° to 180 °, and preferably, in this embodiment, the overturning angle of the sealing plate 1501 is set to 60 ° to 120 ° so as to adapt to each processing cavity and coating cavity.

The drive connection assembly further includes a sensing portion 1511, where the sensing portion 1511 may be, but is not limited to, a ranging sensor, and the sensing portion 1511 is disposed on the driving member 1503 and located on a side portion of the driving member 1503, and is capable of detecting a telescopic stroke of the driving shaft, so that the overturning accuracy of the sealing plate 1501 can be significantly improved. The drive connection assembly also includes a governor member 1512, which can be, but is not limited to, a governor valve, the governor member 1512 being coupled to the drive member 1503 for controlling the drive speed of the drive shaft and thereby the roll-over speed of the closure plate 1501.

Preferably, the fixed bearings 16 are respectively disposed at two ends of the rotating shaft 1502, more preferably, the fixed bearings 16 include a bearing portion 1601, a housing body 1602 and a sealing portion, the sealing portion and the surrounding portion are both disposed coaxially with the rotating shaft 1502, the housing body 1602 is disposed outside both the sealing portion and the bearing portion 1601, the sealing portion is disposed at one side of the bearing portion 1601 near the sealing plate 1501, and the sealing portion is pressed between the rotating shaft 1502 and the housing body 1602, so as to improve the air tightness of the fixed bearings 16, and when the plate turnover device is disposed in a film plating apparatus via the fixed bearings 16, air leakage of a processing cavity or a film plating cavity via the fixed bearings 16 is effectively avoided. The sealing portion may be, but is not limited to, a sealing ring 1603, and preferably the number of sealing rings 1603 is plural.

Preferably, a clamp spring 1604 is provided on the side of the sealing ring 1603 facing away from the bearing portion 1601, the clamp spring 1604 being used for fixing a plurality of sealing rings 1603.

Preferably, the housing body 1602 is connected with a clasping ring 1605, and the clasping ring 1605 is disposed on a side of the bearing portion 1601 facing away from the seal ring 1603 to define the position of the bearing portion 1601. Preferably, the bearing portion 1601 may be a spherical bearing.

Further, this battery piece coating film equipment still includes conveyer, and rotary device includes the conveyer at least, and preferably, the conveyer sets up in the below of a plurality of working chambers, and the support plate that exports through output chamber 6 bears the battery piece that a plurality of coating films are accomplished, and after the coating film was accomplished, places the support plate on conveyer and returns the support plate.

In summary, the battery piece coating equipment provided by the application reduces the magnetic field intensity of the area with high sputtering rate of the target material, reduces the binding of the area to the charged particles, and reduces the probability of collision ionization, so that the bombardment probability of the charged particles in the area to the target material is reduced, the sputtering rate of the area is reduced, the thickness of the coating film layer of the battery piece under the corresponding area is reduced, the consistency of the thickness of the battery piece film layer in each area on the carrier plate is improved, and the performance and the yield of the battery piece are effectively improved.

The embodiment of the application also provides a battery piece coating method, which is suitable for the battery piece coating equipment described in any embodiment, so that the battery piece coating equipment has all the beneficial technical effects and is not described herein.

Specifically, the battery piece coating method comprises the following steps:

s1, loading a battery piece on a carrier plate; a plurality of mounting positions are distributed on the carrier plate in a matrix mode, and battery pieces are arranged on each mounting position.

S2, opening the turnover plate assembly 15 of the input cavity 1 to enable the carrier plate to enter the input cavity 1, and starting the air extractor.

Specifically, the flap plate assembly 15 at the inlet of the carrier plate is opened, so that the carrier plate enters the input cavity 1, then the flap plate assembly 15 at the inlet of the carrier plate is closed, the air extractor is started to pump the internal environment of the input cavity 1 to a rough vacuum state, and in the process, impurities on the input cavity 1, the carrier plate and the surface of the battery piece can be removed, so that the quality of subsequent coating films is ensured.

After the vacuum level meets the expectation, the flap assembly 15 at the outlet of the carrier plate is opened so that the carrier plate can be conveyed to the next working cavity.

S3, starting a heating piece of the first buffer cavity 2, opening a turnover plate assembly 15 at the inlet of the carrier plate of the first buffer cavity 2, enabling the carrier plate to enter the first buffer cavity 2, and starting an air extractor.

Specifically, firstly, a heating element of the first buffer cavity 2 is started to raise the temperature in the first buffer cavity 2 so as to dry and preheat the battery piece; then opening the turnover plate assembly 15 at the inlet of the carrier plate to enable the carrier plate leaving from the input cavity 1 to enter the first buffer cavity 2, then closing the turnover plate assembly 15 at the inlet of the carrier plate, and starting the air extractor of the first buffer cavity 2. The temperature of the battery piece in the first buffer cavity 2 is raised to the process temperature required by the coating operation, the air extractor extracts the first buffer cavity 2 to the process pressure required by the coating after being started, and impurities on the inner wall of the first buffer cavity 2, slits and the surface of the battery piece can be effectively removed in the process. Finally, the flap plate assembly 15 of the carrier plate outlet of the first buffer cavity 2 is opened so that the carrier plate can be conveyed to the next working cavity.

S4, starting a heating part of the transportation cavity 3, opening a turnover plate assembly 15 at the inlet of the carrier plate of the transportation cavity 3, and starting an air extractor.

Specifically, firstly, a heating element of the transportation cavity 3 is started, the internal space of the transportation cavity 3 is heated, a turnover plate assembly 15 at the inlet of a carrier plate is opened, so that the carrier plate flowing out of the first buffer cavity 2 enters the transportation cavity 3, then the turnover plate assembly 15 at the inlet of the carrier plate is closed, an air extractor is started, the vacuum degree in the transportation cavity 3 is kept consistent with the vacuum degree of the first buffer cavity 2 and the coating process cavity 4, the temperature of a battery piece in the transportation cavity 3 is raised to the process temperature required by coating operation, and then the turnover plate assembly 15 at the outlet of the carrier plate of the transportation cavity 3 is opened.

S5, opening the turnover plate assembly 15 of the coating process chamber 4, starting the coating assembly of the coating process chamber 4, and performing coating operation on the battery piece.

Specifically, firstly, the turnover plate assembly 15 at the inlet of the carrier plate of the coating process chamber 4 is opened, so that the carrier plate leaving from the transport chamber 3 enters the coating process chamber 4, the coating assembly is started, the temperature in the coating process chamber 4 is maintained at the process temperature required by coating, and the pressure in the coating process chamber 4 is also maintained at the process pressure required by coating, so that the coating operation on the battery piece is realized. Preferably, in the present embodiment, the thin film deposited on the battery sheet is specifically an ITO (indium tin oxide) film.

S6, opening the turnover plate assembly 15 of the second buffer cavity, and starting the cooling device.

Specifically, the flap plate assembly 15 at the carrier plate inlet of the second buffer cavity a is opened first, so that the coated carrier plate enters the second buffer cavity a, preferably, the pressure in the second buffer cavity a is the same as the pressure in the coating process cavity 4, and the pressure in the coating process cavity 4 is prevented from changing in the carrier plate transmission process.

And starting a cooling device to cool the carrier plate and the battery piece, and then opening a turnover plate assembly 15 at the outlet of the carrier plate of the second buffer cavity a to convey the carrier plate to the second buffer cavity b.

Further, the cooling device of the second buffer cavity b is opened to pre-cool the internal environment of the second buffer cavity b, then the turnover plate assembly 15 at the inlet of the carrier plate is opened to enable the carrier plate to enter the second buffer cavity b, the carrier plate and the battery piece are further cooled in the second buffer cavity b, it is required to say that the second buffer cavity b is not subjected to air suction operation any more, the pressure in the second buffer cavity b is naturally changed relative to the pressure in the second buffer cavity a, and the second buffer cavity b can be moderately inflated to reduce the difference value between the pressure in the second buffer cavity b and the pressure in the output cavity 6. Then, the flap plate assembly 15 at the carrier plate outlet of the second buffer cavity b is opened, so that the carrier plate subjected to preliminary cooling can enter the second buffer cavity c.

According to the same operation, the second buffer chamber c is pre-cooled, the carrier plate enters the second buffer chamber c and is further cooled, and then the carrier plate is conveyed into the output chamber 6.

S7, starting a cooling device and an air supply system of the output cavity 6, and opening a turnover plate assembly 15 of the output cavity 6.

Specifically, the flap plate assembly 15 at the inlet of the carrier plate of the output cavity 6 is opened firstly, so that the carrier plate leaving through the second buffer cavity c enters the output cavity 6, the battery piece is cooled to the expected temperature in the output cavity 6, and the cooling time of the carrier plate and the battery piece in the output cavity 6 can be obviously shortened through multi-step cooling of the carrier plate and the battery piece, so that the overall operation efficiency of the battery piece coating equipment is improved.

The air supply system can charge air into the output cavity 6, so that on one hand, the cooling of the carrier plate and the battery piece is accelerated, and on the other hand, the internal and external pressures of the output cavity 6 can be kept balanced, and the stability of the battery piece when the carrier plate leaves the output cavity 6 is ensured.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A battery piece coating apparatus, characterized by comprising:

the working chambers comprise coating process chambers;

2. The battery piece coating equipment according to claim 1, wherein the magnet assembly is in a strip shape, the target material is in a column shape, and the magnet assembly is arranged in parallel with the target material;

3. The battery plate coating apparatus according to claim 2, wherein the magnet assembly comprises:

4. The battery plate coating apparatus according to claim 3, wherein a plurality of the first magnets and at least one of the end-capped magnets are disposed in the first field weakening region; a plurality of first magnets and at least one end-capped magnet are arranged in the second weak magnetic region; a plurality of first magnets are arranged in the strong magnetic region; the number of the first magnets in the strong magnetic region is greater than the number of the first magnets in the first weak magnetic region and is also greater than the number of the first magnets in the second weak magnetic region.

5. The battery piece coating equipment according to claim 2, wherein a portion of the target corresponding to the first weak magnetic region forms a first sputtering region, a portion of the target corresponding to the strong magnetic region forms a second sputtering region, and a portion of the target corresponding to the second weak magnetic region forms a third sputtering region;

6. The battery plate coating apparatus according to claim 3, wherein the first magnet has a rectangular sheet structure or a cuboid structure;

7. The battery piece coating equipment according to claim 3, wherein a water inlet is formed in one end of the supporting body, a water outlet is formed in the other end of the supporting body, a water path channel is formed in the side wall of the supporting body, and the water path channel is communicated with the water inlet and the water outlet.

8. The battery sheet plating apparatus according to any one of claims 1 to 7, wherein a plurality of the working chambers include: the coating process cavity is arranged between the transportation cavity and the second buffer cavity;

9. The battery plate plating apparatus according to any one of claims 1 to 7, further comprising a water-electricity-gas integration corridor provided at one side of a plurality of the working chambers for providing water or electricity or vacuum piping to the working chambers.

10. The battery piece coating method is characterized by comprising the following steps of: