CN116542417A - Control system and method for semiconductor production line conveying system - Google Patents

Control system and method for semiconductor production line conveying system Download PDF

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CN116542417A
CN116542417A CN202310814068.2A CN202310814068A CN116542417A CN 116542417 A CN116542417 A CN 116542417A CN 202310814068 A CN202310814068 A CN 202310814068A CN 116542417 A CN116542417 A CN 116542417A
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carrying
crown block
route
point
novel crown
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CN116542417B (en
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林坚
王彭
董蕖
银春
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Honghu Suzhou Semiconductor Technology Co ltd
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06QINFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/40Business processes related to the transportation industry
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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Abstract

The invention relates to the technical field of intelligent crown block control, and discloses a control system and a method for a conveying system of a semiconductor production line, wherein the control system comprises the steps of selecting a target novel crown block, and determining an optimal conveying route and a shortest conveying route of the target novel crown block; calculating a first carrying time length required by adopting an optimal carrying route in a preset time span, calculating a second carrying time length required by adopting a shortest carrying route in the preset time span, and comparing the first carrying time length with the second carrying time length; if the first carrying time length is longer than or equal to the second carrying time length, controlling the target novel crown block to reach the destination point based on the shortest carrying route; if the first carrying time is shorter than the second carrying time, controlling the target novel crown block to reach the destination point based on the optimal carrying route; in addition, the invention also discloses a novel crown block system, which can realize cooperative control among crown blocks, improve the crown block utilization rate and further improve the carrying efficiency of the crown block system.

Description

Control system and method for semiconductor production line conveying system
Technical Field
The invention relates to the technical field of intelligent crown block control, in particular to a control system and method for a semiconductor production line conveying system.
Background
With the rapid development of the semiconductor industry, crown blocks (also called travelling cranes) in semiconductor production lines play a vital role in material transportation and equipment layout; crown block systems are widely used in automated material handling in the integrated circuit industry, typically for transporting raw materials, semi-finished products and finished products on a production line, and for performing material transfer tasks between equipment; the traditional crown block system adopts a single track as a crown block operation carrier, for example, china patent with an authorized bulletin number of CN104678915B discloses a multi-crown block coordinated scheduling method for a carrying system of a semiconductor production line, and the method adopts a carrying mode of the single track, however, the method is not only easy to cause low crown block utilization rate, but also has lower overall carrying efficiency, and although the invention improves the single track scheduling efficiency through design, under the condition of limiting the system, the invention also plays a role of cup and water firewood, so the multi-track crown block system is gradually applied, however, the environment faced by the multi-track crown block system is relatively more complex, the conditions of collision, overlong carrying line and the like are easy to exist, so how to carry out efficient control on the crown block system becomes the focus of current research.
At present, most of the existing control systems and methods for the conveying system of the semiconductor production line are designed according to a single crown block track, and of course, some methods for adding a turnout on a single track and performing control design exist, for example, the China patent with the authority notice number of CN104555743B discloses a coordinated control method for the track and crown block of the conveying system of the semiconductor production line, and for example, the China patent with the application publication number of CN104567854A discloses a crown block route planning method for the conveying system of the semiconductor production line; although the invention improves the dispatching efficiency of the crown block in multiple tracks by designing a temporary storage area or utilizing graph theory and other modes; however, the track structure of the crown block and the functions executed by the crown block are relatively simple, the carrying efficiency of the crown block system is difficult to play across, and the cooperative control on the crown blocks in the multi-track is lacking in the method disclosed by the invention, so that the crown block utilization rate is not high; in addition, the existing crown block generally carries out carrying control according to a specific route of a specific task, and if an unspecified task occurs, effective carrying is difficult to realize by adopting the method; in addition, as crown block systems continue to refine (e.g., crown block rails continue to increase), the above-described methods are also difficult to accommodate.
In view of the above, the present invention provides a control system and method for a semiconductor production line handling system to solve the above-mentioned problems.
Disclosure of Invention
In order to overcome the above-mentioned drawbacks of the prior art, embodiments of the present invention provide a control system and method for a semiconductor production line handling system.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the method is applied to a novel crown block system, the novel crown block system comprises a plurality of special track areas, each special track area comprises a plurality of novel crown blocks, and each novel crown block is in communication connection with a cloud computing center in a wireless mode, and the method comprises the following steps:
selecting a target novel crown block in a target special track area, and determining an optimal carrying route and a shortest carrying route of the target novel crown block from a carrying point to a destination point through the cloud computing center;
calculating a first carrying time length required by adopting the optimal carrying route in a preset time span, calculating a second carrying time length required by adopting the shortest carrying route in the preset time span, and comparing the first carrying time length with the second carrying time length;
If the first conveying time length is longer than or equal to the second conveying time length, controlling the target novel crown block to directly convey the semiconductor product to the destination point based on the shortest conveying route; and if the first carrying time length is smaller than the second carrying time length, controlling the target novel crown block to indirectly and cooperatively transfer the semiconductor product to the destination point based on the optimal carrying route.
In a preferred embodiment, each of said unique rail regions is comprised of a peripheral stem rail and an inner stem rail;
the novel target crown block in the selected target specific track area comprises:
positioning the special track area of the carrying point, and taking the special track area as a target special track area; acquiring carrying states of a plurality of novel crown blocks in the target specific track area within a preset time span; the carrying state comprises carrying and idle;
constructing a special track area of the carrying point into a local track map based on a graph theory, marking positions of a plurality of idle novel crown blocks and the carrying point in the local track map, and acquiring the idle novel crown blocks of the shortest path based on a graph theory algorithm;
and taking the idle novel crown block with the shortest path as a target novel crown block.
In a preferred embodiment, determining, by the cloud computing center, an optimal transportation route and a shortest transportation route of the target new crown block from a transportation point to a destination point, includes:
a1: constructing a global grid track map based on a plurality of special track areas, wherein a plurality of crossing points exist in the global grid track map;
a2: determining coordinates of a plurality of crossing points, carrying points and destination points in the global grid track map according to the global grid track map;
a3: determining M optimal adjacent intersecting points of the carrying points according to the coordinates of the intersecting points, the carrying points and the destination points, wherein M is a positive integer greater than or equal to 1;
a4: taking M optimal adjacent crossing points as key points, determining Q optimal adjacent crossing points of the key points, wherein Q is a positive integer greater than or equal to 1;
a5: repeating the step a4 until the key point is a carrying point, and ending the cycle;
a6: and connecting the key points, the carrying points and the destination points, and obtaining a plurality of carrying routes and the lengths of the carrying routes according to the lengths of the prestored peripheral trunk track and the prestored internal trunk track.
In a preferred embodiment, determining M optimal adjacent intersection points of the handling points comprises:
D nearest adjacent crossing points of the carrying point are obtained, D is a positive integer greater than or equal to 1;
calculating the distance between each nearest adjacent intersection point and the carrying point to obtain a plurality of adjacent point distances;
setting an adjacent distance threshold, comparing the distances of a plurality of adjacent points with the adjacent distance threshold, taking the corresponding nearest adjacent crossing point as the optimal adjacent crossing point if the distance of the adjacent points is smaller than or equal to the adjacent distance threshold, and eliminating the corresponding nearest adjacent crossing point if the distance of the adjacent points is larger than the adjacent distance threshold.
In a preferred embodiment, determining, by the cloud computing center, an optimal transportation route and a shortest transportation route of the target new crown block from a transportation point to a destination point, further includes:
sequencing the plurality of carrying routes according to the lengths of the plurality of carrying routes, and taking the corresponding carrying route with the first sequencing as the shortest carrying route;
extracting the number of idle novel crown blocks in a specific track area penetrated by a plurality of carrying routes according to a preset time span;
calculating and analyzing according to the lengths of a plurality of carrying routes and the number of idle novel crown blocks in the penetrated special track area to obtain the line coefficient of each carrying route;
And extracting a carrying route corresponding to the maximum line coefficient, and taking the carrying route corresponding to the maximum line coefficient as an optimal carrying route.
In a preferred embodiment, calculating the first length of travel required to take the optimal travel route over a predetermined time span includes:
acquiring first calculation parameters required by adopting the optimal carrying route, wherein the first calculation parameters comprise the optimal carrying route length, the novel crown block speed, the cooperative transportation time length and the first carrying influence time length;
and carrying out formula calculation based on the first calculation parameters to obtain a first carrying duration.
In a preferred embodiment, controlling the target new crown block to co-transport semiconductor products to the destination point based on the optimal handling route comprises:
b1: moving the idle target novel crown block of the shortest path to the carrying point to load the semiconductor product;
b2: extracting a plurality of key points in the optimal carrying route, acquiring the nearest idle novel crown block in the track area of each key point, and taking the nearest idle novel crown block in the track area of each key point as an idle non-target novel crown block;
b3: controlling the nearest idle non-target novel crown block to move to the key point;
b4: controlling the idle target novel crown block to move to the first key point, and cooperatively transferring the semiconductor product on the idle target novel crown block to the idle non-target novel crown block positioned at the first key point;
b5: the controlled idle non-target novel crown block moves to the next key point, and the semiconductor products on the idle non-target novel crown block are cooperatively transferred to the idle non-target novel crown block positioned at the next key point;
b6: repeating the step b5 until the next key point is the destination point, and co-transferring the semiconductor product to the destination point.
A control system for a semiconductor production line handling system, comprising:
the route generation module is used for selecting a target novel crown block in a target special track area and determining an optimal carrying route and a shortest carrying route of the target novel crown block from a carrying point to a destination point through a cloud computing center;
the calculation judging module is used for calculating a first carrying duration required by adopting the optimal carrying route in a preset time span, calculating a second carrying duration required by adopting the shortest carrying route in the preset time span and comparing the first carrying duration with the second carrying duration;
The control scheduling module is used for controlling the target novel crown block to directly convey the semiconductor product to the destination point based on the shortest conveying route if the first conveying time length is longer than or equal to the second conveying time length; and if the first carrying time length is smaller than the second carrying time length, controlling the target novel crown block to indirectly and cooperatively transfer the semiconductor product to the destination point based on the optimal carrying route.
The novel overhead travelling crane system comprises a peripheral trunk track and an inner branch track, wherein the peripheral trunk track or the inner branch track is in sliding connection with the novel overhead travelling crane through a sliding block;
the novel crown block comprises a U-shaped vehicle body, the U-shaped vehicle body is movably connected with the sliding block through a steering mechanism, a carrying assembly is arranged at the top end of the interior of the U-shaped vehicle body, a bearing disc is arranged right below the carrying assembly, and a first motor is arranged at the lower end of the left side wall of the U-shaped vehicle body close to the edge; and a motor II is arranged at one end inside the bearing plate.
In a preferred embodiment, a plurality of conveying rollers are embedded on the surface of the bearing plate, the conveying rollers are connected with a motor II through a transmission shaft, and the conveying rollers are connected with the transmission shaft through tracks; the conveying rollers are equidistantly distributed;
The first motor is connected with the bearing disc through a movable shaft; the U-shaped car body is characterized in that a plurality of peripheral trunk tracks and internal branch tracks are in a grid structure, and a power supply, a communication device and a control device are arranged in the U-shaped car body.
An electronic device comprising a memory, a processor, and a computer program stored on the memory and executable on the processor, the processor implementing the method of controlling a semiconductor line handling system according to any one of the preceding claims when the computer program is executed.
A computer readable storage medium having stored thereon a computer program which, when executed by a processor, implements the method of controlling a semiconductor production line handling system of any of the above.
Compared with the prior art, the invention has the beneficial effects that:
1. the application discloses a control system and a method for a conveying system of a semiconductor production line, wherein a target novel crown block is selected at first, and an optimal conveying route and a shortest conveying route of the target novel crown block are determined; then calculating a first carrying time length required by adopting an optimal carrying route in a preset time span, calculating a second carrying time length required by adopting a shortest carrying route in the preset time span, and comparing the first carrying time length with the second carrying time length; finally, if the first carrying time length is longer than or equal to the second carrying time length, controlling the target novel crown block to reach the target point based on the shortest carrying route; if the first carrying duration is smaller than the second carrying duration, the target novel crown block is controlled to reach the destination point based on the optimal carrying route, and the method and the device can realize cooperative control among crown blocks when a non-specific task occurs, so that low carrying efficiency caused by overlong carrying routes is avoided, and meanwhile, the idle novel crown block in a preset time span is called; in addition, as the crown block system is continuously thinned (such as the crown block track is continuously increased), the invention can also adapt to the crown block system, thereby playing the carrying efficiency of the crown block system.
2. The application discloses control system and method for a semiconductor production line conveying system, through disclosing a novel crown block system, the crown block running track structure of a novel structure is provided, and along with the continuous deepening of the structure (such as continuous increase of crown block tracks), the conveying efficiency of the crown block system can be exponentially improved.
Drawings
FIG. 1 is a schematic diagram of a control method for a handling system of a semiconductor manufacturing line according to the present invention;
FIG. 2 is a schematic diagram of a control system for a semiconductor processing line handling system according to the present invention;
FIG. 3 is a schematic diagram of a peripheral trunk track in a novel crown block system according to the present invention;
FIG. 4 is a schematic diagram of a peripheral trunk track and an inner trunk track in a novel crown block system according to the present invention;
FIG. 5 is a schematic front view of a novel crown block system according to the present invention;
FIG. 6 is a schematic side view of a novel crown block system according to the present invention;
FIG. 7 is a schematic diagram of a carrier tray in a novel crown block system according to the present invention;
FIG. 8 is a schematic diagram of a conveyor roller, drive shaft and track in a novel crown block system of the present invention;
FIG. 9 is a schematic diagram of an idle novel crown block (or a novel crown block before transfer) in a novel crown block system according to the present invention;
FIG. 10 is a schematic diagram of a new crown block (or a new crown block after transportation) for carrying in a new crown block system according to the present invention;
fig. 11 is a schematic diagram of a global grid track map according to the present invention.
In the figure: 1. peripheral backbone track, 2, internal branch track, 3, sliding block, 4, novel crown block, 401, U-shaped car body, 402, steering mechanism, 403, carrying assembly, 404, carrying tray, 405, motor one, 406, motor two, 407, transport roller, 408, transmission shaft, 409, caterpillar track, 410, movable shaft.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
Referring to fig. 1 and 11, the present embodiment discloses a control method for a semiconductor production line handling system, where the method is applied to a novel crown block system, the novel crown block system includes a plurality of special track areas, each special track area includes a plurality of novel crown blocks, and each novel crown block is in communication connection with a cloud computing center in a wireless manner; the method comprises the following steps:
step 1: selecting a target novel crown block in a target special track area, and determining an optimal carrying route and a shortest carrying route of the target novel crown block from a carrying point to a destination point through the cloud computing center;
specifically, each special track area is composed of a peripheral trunk track and an inner branch track;
it should be noted that: the specific track areas are specific task activity areas of the novel crown block, and further explanation is that: the special track area is provided with a plurality of novel crown blocks which move around the special track area which is subordinate to the novel crown blocks when the specific task is executed, and the following needs to be further explained: the invention mainly surrounds the design of the control method carried out when the novel crown block executes the non-specific task, and the control of the novel crown block which moves around the self-subordinate specific track area when executing the specific task is not a solution object of the invention, and can be realized through conventional preset line planning control, and the application is not repeated;
Specifically, a novel target crown block in a target specific track area is selected, which comprises the following steps:
positioning the special track area of the carrying point, and taking the special track area as a target special track area; acquiring carrying states of a plurality of novel crown blocks in the target specific track area within a preset time span; the carrying state comprises carrying and idle;
it should be understood that: the carrying means that the novel crown block is loaded with the semiconductor product, and conversely, the idling means that the novel crown block is not loaded with the semiconductor product;
constructing a special track area of the carrying point into a local track map based on a graph theory, marking positions of a plurality of idle novel crown blocks and the carrying point in the local track map, and acquiring the idle novel crown blocks of the shortest path based on a graph theory algorithm;
it should be noted that: the local track graph can be one of an undirected graph or a directed graph, and the graph theory algorithm is Dijkstra algorithm or A * One of the algorithms, the construction process of the local orbit diagram is as follows: establishing a local track graph, determining a set of nodes or vertexes (such as carrying points, position points of idle novel crown blocks and the like) to be represented in the graph, determining edges (which are peripheral trunk tracks and internal trunk tracks) in the graph, namely line segments or arrows connecting the nodes, wherein for an undirected graph, the edges have no direction, can represent a bidirectional relationship between two nodes, for a directed graph, the edges have directions, represent a relationship pointing from one node to the other node, and determining weights (optional) of the edges;
Taking the idle novel crown block with the shortest path as a target novel crown block;
for the selection of a target novel crown block, for example, the following are: as shown in fig. 11, assuming point a is a carrying point, point B is a destination point, point a falls in the (4) special track area, and C1 and C2 are idle new crown blocks in the (4) special track area, and the idle new crown block with C2 as the shortest path can be determined by using the graph theory algorithm in a preset time span, so C2 is taken as the target new crown block;
specifically, determining, by the cloud computing center, an optimal handling route and a shortest handling route of the target novel crown block from a handling point to a destination point, including:
a1: constructing a global grid track map based on a plurality of special track areas, wherein a plurality of crossing points exist in the global grid track map;
it should be noted that: the global grid track map is generated based on the splicing of a plurality of special track areas, as shown in fig. 11, the global grid track map comprises N special track areas, N is a positive integer greater than or equal to 1, a plurality of crossing points exist in the global grid track map, and each crossing point is formed by crossing peripheral trunk tracks or internal branch tracks;
a2: determining coordinates of a plurality of crossing points, carrying points and destination points in the global grid track map according to the global grid track map;
a3: determining M optimal adjacent intersecting points of the carrying points according to the coordinates of the intersecting points, the carrying points and the destination points, wherein M is a positive integer greater than or equal to 1;
specifically, determining M optimal adjacent intersection points of the handling points includes:
d nearest adjacent crossing points of the carrying point are obtained, D is a positive integer greater than or equal to 1;
calculating the distance between each nearest adjacent intersection point and the carrying point to obtain a plurality of adjacent point distances;
setting an adjacent distance threshold, comparing the distances of a plurality of adjacent points with the adjacent distance threshold, taking the corresponding nearest adjacent crossing point as an optimal adjacent crossing point if the distance of the adjacent points is smaller than or equal to the adjacent distance threshold, and eliminating the corresponding nearest adjacent crossing point if the distance of the adjacent points is larger than the adjacent distance threshold;
a4: taking M optimal adjacent crossing points as key points, determining Q optimal adjacent crossing points of the key points, wherein Q is a positive integer greater than or equal to 1;
it should be noted that: the implementation principle of the Q optimal adjacent crossing points of the key points is consistent with that of the M optimal adjacent crossing points of the carrying points, and the details can be described above;
a5: repeating the step a4 until the key point is a carrying point, and ending the cycle;
a6: connecting a plurality of key points, carrying points and destination points, and obtaining a plurality of carrying routes and the lengths of the carrying routes according to the lengths of pre-stored peripheral trunk tracks and internal trunk tracks;
specifically, determining, by the cloud computing center, an optimal carrying route and a shortest carrying route of the target novel crown block from a carrying point to a destination point, further comprising:
sequencing the plurality of carrying routes according to the lengths of the plurality of carrying routes, and taking the corresponding carrying route with the first sequencing as the shortest carrying route;
it should be noted that: the sorting logic sorts the numerical values from small to large, namely, the corresponding carrying route with the shortest carrying route length is used as the shortest carrying route;
extracting the number of idle novel crown blocks in a specific track area penetrated by a plurality of carrying routes according to a preset time span;
calculating and analyzing according to the lengths of a plurality of carrying routes and the number of idle novel crown blocks in the penetrated special track area to obtain the line coefficient of each carrying route; the calculation formula is as follows: The method comprises the steps of carrying out a first treatment on the surface of the Wherein:for the line coefficient of each of said carrying routes, < > for each of said carrying routes>The number of idle novel crown blocks in the special track area is penetrated by each carrying route; />A length for each of the carrying routes;
extracting a carrying route corresponding to the maximum line coefficient, and taking the carrying route corresponding to the maximum line coefficient as an optimal carrying route;
it should be noted that: at least one idle novel crown block is included in the special track area penetrated by the optimal carrying route within a preset time span, and if the idle novel crown block does not exist in the special track area penetrated by the optimal carrying route within the preset time span, the intersection point falling in the special track area is not used as an optimal adjacent intersection point (or key point) to determine the category;
for the determination of the optimal handling route, the following are illustrated: as shown in fig. 11, if 3 alternative routes with the same distance (the shortest transport route with the same distance or the non-shortest transport route with the same distance) are obtained through calculation, the 3 alternative routes with the same distance are respectively marked as K1, K2 and K3, assuming that the point a is the transport point and the point B is the destination point; at this time, the number of idle novel crown blocks in the special track areas penetrated by K1, K2 and K3 is required to be screened, as shown in fig. 11, K1 penetrates (4), (8), (7), ⑪ and the special track areas and K2 penetrates (4), (7) and the special track areas and K3 penetrates (4), (3), (7), (6) and the special track areas, then the number of idle novel crown blocks in the special track areas penetrated by K1, K2 and K3 is input into the above formula, a plurality of line coefficients are calculated, a carrying route corresponding to the maximum line coefficient is used as an optimal carrying route, and if the line coefficient obtained by the K1 carrying route is used as the optimal carrying route;
Step 2: calculating a first carrying time length required by adopting the optimal carrying route in a preset time span, calculating a second carrying time length required by adopting the shortest carrying route in the preset time span, and comparing the first carrying time length with the second carrying time length;
specifically, calculating a first conveyance time length required to adopt the optimal conveyance route within a preset time span includes:
acquiring first calculation parameters required by adopting the optimal carrying route, wherein the first calculation parameters comprise the optimal carrying route length, the novel crown block speed, the cooperative transportation time length and the first carrying influence time length;
carrying out formula calculation based on the first calculation parameters to obtain a first carrying duration; the calculation formula is as follows:the method comprises the steps of carrying out a first treatment on the surface of the Wherein: />For the first carrying time length, < > for>For the optimal transport path length->Novel crown block speed->For cotransporter duration,/->For a first handling influence period;
it should be noted that: when the optimal carrying route is adopted, a co-transportation task is executed, so that a co-transportation time loss is generated, the co-transportation time length represents the time length consumed by a plurality of novel crown blocks adopting the optimal carrying route when the co-transportation is carried out, and the carrying influence time length is the time generated by the influence of the carrying environment (such as avoidance time generated for preventing collision and the like) in the carrying process; it should be further described that; the cotransport duration and the transport influence duration are obtained through experimental simulation, and the novel crown block speed is pre-stored in a database;
Specifically, calculating a second conveyance time length required to take the shortest conveyance route within a preset time span includes:
acquiring a second calculation parameter required by adopting the shortest carrying route, wherein the second calculation parameter comprises the shortest carrying route length, the novel crown block speed and a second carrying influence time length;
carrying out formula calculation based on the second calculation parameters to obtain a second carrying duration; the calculation formula is as follows:the method comprises the steps of carrying out a first treatment on the surface of the Wherein: />For the second carrying time length, < > for>For the shortest transport path length->Novel crown block speed->For a second handling influence period;
it should be noted that: the first handling influencing time period and the second handling influencing time period are in different modes (i.e. handling routes), so that the first handling influencing time period and the second handling influencing time period may also be different;
step 3: if the first conveying time length is longer than or equal to the second conveying time length, controlling the target novel crown block to directly convey the semiconductor product to the destination point based on the shortest conveying route; if the first carrying time length is smaller than the second carrying time length, controlling the target novel crown block to indirectly and cooperatively transfer the semiconductor product to the destination point based on the optimal carrying route;
Specifically, controlling the target novel crown block to co-transport the semiconductor product to the destination point based on the optimal handling route includes:
b1: moving the idle target novel crown block of the shortest path to the carrying point to load the semiconductor product;
b2: extracting a plurality of key points in the optimal carrying route, acquiring the nearest idle novel crown block in the track area of each key point, and taking the nearest idle novel crown block in the track area of each key point as an idle non-target novel crown block;
it should be noted that: the principle that the nearest idle novel crown block in the special track area of each key point is obtained is consistent with the principle of the target novel crown block in the selected target special track area can be referred to above for details;
b3: controlling the nearest idle non-target novel crown block to move to the key point;
it should be noted that: consistent with the principle of the target novel crown block in the selected target special track area, after obtaining the shortest path of the idle non-target novel crown block and the key point, controlling the nearest idle non-target novel crown block to move to the key point according to the shortest path of the idle non-target novel crown block and the key point;
b4: controlling the idle target novel crown block to move to the first key point, and cooperatively transferring the semiconductor product on the idle target novel crown block to the idle non-target novel crown block positioned at the first key point;
it should be noted that: the first key point is the key point closest to the carrying point in the optimal carrying route; also to be described is: the specific transfer process of cooperatively transferring the semiconductor products on the idle target novel crown block to the idle non-target novel crown block positioned at the first key point is described below for the novel crown block, and redundant description is omitted herein;
b5: the controlled idle non-target novel crown block moves to the next key point, and the semiconductor products on the idle non-target novel crown block are cooperatively transferred to the idle non-target novel crown block positioned at the next key point;
it should be noted that: the reference to the next keypoint is defined as the previous keypoint, for example: if the next key point of the carrying point is the first key point, the next key point of the first key point is the second key point, the next key point of the third key point is the fourth key point, and so on until the next key point is the destination point;
b6: repeating the step b5 until the next key point is the destination point, and cooperatively transferring the semiconductor product to the destination point; the semiconductor products are cooperatively transported to the destination point, so that the novel crown block is beneficial to realizing effective transportation when a non-specific task occurs;
it should be noted that: the semiconductor product comprises, but is not limited to, semiconductor raw materials, semiconductor semi-finished products and semiconductor finished products, wherein the unspecified task refers to the situation of carrying the semiconductor raw materials, the semiconductor finished products and the like in a long distance, and the like, and the specified task generally refers to the situation of carrying the semiconductor semi-finished products in adjacent or similar environments;
determining an optimal carrying route and a shortest carrying route of the target novel crown block by selecting the target novel crown block; calculating a first carrying time length required by adopting an optimal carrying route in a preset time span, calculating a second carrying time length required by adopting a shortest carrying route in the preset time span, and comparing the first carrying time length with the second carrying time length; if the first carrying time length is longer than or equal to the second carrying time length, controlling the target novel crown block to reach the destination point based on the shortest carrying route; if the first carrying time length is smaller than the second carrying time length, the target novel crown block is controlled to reach the destination point based on the optimal carrying route, and the method is beneficial to realizing cooperative control among crown blocks, so that the crown block utilization rate is improved, and effective carrying of the novel crown block when an unspecified task occurs is realized.
Example 2
Referring to fig. 2 and 11, the disclosure of the present embodiment provides a control system for a semiconductor production line handling system, which includes:
a route generation module 201, configured to select a target new type crown block within a target specific track area, and determine an optimal carrying route and a shortest carrying route of the target new type crown block from a carrying point to a destination point through the cloud computing center;
specifically, each special track area is composed of a peripheral trunk track and an inner branch track;
it should be noted that: the specific track areas are specific task activity areas of the novel crown block, and further explanation is that: the special track area is provided with a plurality of novel crown blocks which move around the special track area which is subordinate to the novel crown blocks when the specific task is executed, and the following needs to be further explained: the invention mainly surrounds the design of the control method carried out when the novel crown block executes the non-specific task, and the control of the novel crown block which moves around the self-subordinate specific track area when executing the specific task is not a solution object of the invention, and can be realized through conventional preset line planning control, and the application is not repeated;
Specifically, a novel target crown block in a target specific track area is selected, which comprises the following steps:
positioning the special track area of the carrying point, and taking the special track area as a target special track area; acquiring carrying states of a plurality of novel crown blocks in the target specific track area within a preset time span; the carrying state comprises carrying and idle;
it should be understood that: the carrying means that the novel crown block is loaded with the semiconductor product, and conversely, the idling means that the novel crown block is not loaded with the semiconductor product;
constructing a special track area of the carrying point into a local track map based on a graph theory, marking positions of a plurality of idle novel crown blocks and the carrying point in the local track map, and acquiring the idle novel crown blocks of the shortest path based on a graph theory algorithm;
it should be noted that: the local track graph can be one of an undirected graph or a directed graph, and the graph theory algorithm is Dijkstra algorithm or A * One of the algorithms, the construction process of the local orbit diagram is as follows: establishing a local track graph, determining a set of nodes or vertexes (such as carrying points, position points of idle novel crown blocks and the like) to be represented in the graph, determining edges (which are peripheral trunk tracks and internal trunk tracks) in the graph, namely line segments or arrows connecting the nodes, wherein for an undirected graph, the edges have no direction, can represent a bidirectional relationship between two nodes, for a directed graph, the edges have directions, represent a relationship pointing from one node to the other node, and determining weights (optional) of the edges;
Taking the idle novel crown block with the shortest path as a target novel crown block;
for the selection of a target novel crown block, for example, the following are: as shown in fig. 11, assuming point a is a carrying point, point B is a destination point, point a falls in the (4) special track area, and C1 and C2 are idle new crown blocks in the (4) special track area, and the idle new crown block with C2 as the shortest path can be determined by using the graph theory algorithm in a preset time span, so C2 is taken as the target new crown block;
specifically, determining, by the cloud computing center, an optimal handling route and a shortest handling route of the target novel crown block from a handling point to a destination point, including:
a1: constructing a global grid track map based on a plurality of special track areas, wherein a plurality of crossing points exist in the global grid track map;
it should be noted that: the global grid track map is generated based on the splicing of a plurality of special track areas, as shown in fig. 11, the global grid track map comprises N special track areas, N is a positive integer greater than or equal to 1, a plurality of crossing points exist in the global grid track map, and each crossing point is formed by crossing peripheral trunk tracks or internal branch tracks;
a2: determining coordinates of a plurality of crossing points, carrying points and destination points in the global grid track map according to the global grid track map;
a3: determining M optimal adjacent intersecting points of the carrying points according to the coordinates of the intersecting points, the carrying points and the destination points, wherein M is a positive integer greater than or equal to 1;
specifically, determining M optimal adjacent intersection points of the handling points includes:
d nearest adjacent crossing points of the carrying point are obtained, D is a positive integer greater than or equal to 1;
calculating the distance between each nearest adjacent intersection point and the carrying point to obtain a plurality of adjacent point distances;
setting an adjacent distance threshold, comparing the distances of a plurality of adjacent points with the adjacent distance threshold, taking the corresponding nearest adjacent crossing point as an optimal adjacent crossing point if the distance of the adjacent points is smaller than or equal to the adjacent distance threshold, and eliminating the corresponding nearest adjacent crossing point if the distance of the adjacent points is larger than the adjacent distance threshold;
a4: taking M optimal adjacent crossing points as key points, determining Q optimal adjacent crossing points of the key points, wherein Q is a positive integer greater than or equal to 1;
it should be noted that: the implementation principle of the Q optimal adjacent crossing points of the key points is consistent with that of the M optimal adjacent crossing points of the carrying points, and the details can be described above;
a5: repeating the step a4 until the key point is a carrying point, and ending the cycle;
a6: connecting a plurality of key points, carrying points and destination points, and obtaining a plurality of carrying routes and the lengths of the carrying routes according to the lengths of pre-stored peripheral trunk tracks and internal trunk tracks;
specifically, determining, by the cloud computing center, an optimal carrying route and a shortest carrying route of the target novel crown block from a carrying point to a destination point, further comprising:
sequencing the plurality of carrying routes according to the lengths of the plurality of carrying routes, and taking the corresponding carrying route with the first sequencing as the shortest carrying route;
it should be noted that: the sorting logic sorts the numerical values from small to large, namely, the corresponding carrying route with the shortest carrying route length is used as the shortest carrying route;
extracting the number of idle novel crown blocks in a specific track area penetrated by a plurality of carrying routes according to a preset time span;
calculating and analyzing according to the lengths of a plurality of carrying routes and the number of idle novel crown blocks in the penetrated special track area to obtain the line coefficient of each carrying route; the calculation formula is as follows: The method comprises the steps of carrying out a first treatment on the surface of the Wherein:for the line coefficient of each of said carrying routes, < > for each of said carrying routes>The number of idle novel crown blocks in the special track area is penetrated by each carrying route; />A length for each of the carrying routes; />
Extracting a carrying route corresponding to the maximum line coefficient, and taking the carrying route corresponding to the maximum line coefficient as an optimal carrying route;
it should be noted that: at least one idle novel crown block is included in the special track area penetrated by the optimal carrying route within a preset time span, and if the idle novel crown block does not exist in the special track area penetrated by the optimal carrying route within the preset time span, the intersection point falling in the special track area is not used as an optimal adjacent intersection point (or key point) to determine the category;
for the determination of the optimal handling route, the following are illustrated: as shown in fig. 11, if 3 alternative routes with the same distance (the shortest transport route with the same distance or the non-shortest transport route with the same distance) are obtained through calculation, the 3 alternative routes with the same distance are respectively marked as K1, K2 and K3, assuming that the point a is the transport point and the point B is the destination point; at this time, the number of idle novel crown blocks in the special track areas penetrated by K1, K2 and K3 is required to be screened, as shown in fig. 11, K1 penetrates (4), (8), (7), ⑪ and the special track areas and K2 penetrates (4), (7) and the special track areas and K3 penetrates (4), (3), (7), (6) and the special track areas, then the number of idle novel crown blocks in the special track areas penetrated by K1, K2 and K3 is input into the above formula, a plurality of line coefficients are calculated, a carrying route corresponding to the maximum line coefficient is used as an optimal carrying route, and if the line coefficient obtained by the K1 carrying route is used as the optimal carrying route;
A calculation and judgment module 202, configured to calculate a first conveyance time length required to adopt the optimal conveyance route in a preset time span, and calculate a second conveyance time length required to adopt the shortest conveyance route in the preset time span, and compare the first conveyance time length with the second conveyance time length;
specifically, calculating a first conveyance time length required to adopt the optimal conveyance route within a preset time span includes:
acquiring first calculation parameters required by adopting the optimal carrying route, wherein the first calculation parameters comprise the optimal carrying route length, the novel crown block speed, the cooperative transportation time length and the first carrying influence time length;
carrying out formula calculation based on the first calculation parameters to obtain a first carrying duration; the calculation formula is as follows:the method comprises the steps of carrying out a first treatment on the surface of the Wherein: />For the first carrying time length, < > for>For the optimal transport path length->Novel crown block speed->For cotransporter duration,/->For a first handling influence period;
it should be noted that: when the optimal carrying route is adopted, a co-transportation task is executed, so that a co-transportation time loss is generated, the co-transportation time length represents the time length consumed by a plurality of novel crown blocks adopting the optimal carrying route when the co-transportation is carried out, and the carrying influence time length is the time generated by the influence of the carrying environment (such as avoidance time generated for preventing collision and the like) in the carrying process; it should be further described that; the cotransport duration and the transport influence duration are obtained through experimental simulation, and the novel crown block speed is pre-stored in a database;
Specifically, calculating a second conveyance time length required to take the shortest conveyance route within a preset time span includes:
acquiring a second calculation parameter required by adopting the shortest carrying route, wherein the second calculation parameter comprises the shortest carrying route length, the novel crown block speed and a second carrying influence time length;
carrying out formula calculation based on the second calculation parameters to obtain a second carrying duration; the calculation formula is as follows:the method comprises the steps of carrying out a first treatment on the surface of the Wherein: />For the second carrying time length, < > for>For the shortest transport path length->Novel crown block speed->For a second handling influence period;
it should be noted that: the first handling influencing time period and the second handling influencing time period are in different modes (i.e. handling routes), so that the first handling influencing time period and the second handling influencing time period may also be different;
the control scheduling module 203 is configured to control the target novel crown block to directly send the semiconductor product to the destination point based on the shortest transfer route if the first transfer time length is greater than or equal to the second transfer time length; if the first carrying time length is smaller than the second carrying time length, controlling the target novel crown block to indirectly and cooperatively transfer the semiconductor product to the destination point based on the optimal carrying route;
Specifically, controlling the target novel crown block to co-transport the semiconductor product to the destination point based on the optimal handling route includes:
b1: moving the idle target novel crown block of the shortest path to the carrying point to load the semiconductor product;
b2: extracting a plurality of key points in the optimal carrying route, acquiring the nearest idle novel crown block in the track area of each key point, and taking the nearest idle novel crown block in the track area of each key point as an idle non-target novel crown block;
it should be noted that: the principle that the nearest idle novel crown block in the special track area of each key point is obtained is consistent with the principle of the target novel crown block in the selected target special track area can be referred to above for details;
b3: controlling the nearest idle non-target novel crown block to move to the key point;
it should be noted that: consistent with the principle of the target novel crown block in the selected target special track area, after obtaining the shortest path of the idle non-target novel crown block and the key point, controlling the nearest idle non-target novel crown block to move to the key point according to the shortest path of the idle non-target novel crown block and the key point;
b4: controlling the idle target novel crown block to move to the first key point, and cooperatively transferring the semiconductor product on the idle target novel crown block to the idle non-target novel crown block positioned at the first key point;
it should be noted that: the first key point is the key point closest to the carrying point in the optimal carrying route; also to be described is: the specific transfer process of cooperatively transferring the semiconductor products on the idle target novel crown block to the idle non-target novel crown block positioned at the first key point is described below for the novel crown block, and redundant description is omitted herein;
b5: the controlled idle non-target novel crown block moves to the next key point, and the semiconductor products on the idle non-target novel crown block are cooperatively transferred to the idle non-target novel crown block positioned at the next key point;
it should be noted that: the reference to the next keypoint is defined as the previous keypoint, for example: if the next key point of the carrying point is the first key point, the next key point of the first key point is the second key point, the next key point of the third key point is the fourth key point, and so on until the next key point is the destination point;
b6: repeating the step b5 until the next key point is the destination point, and cooperatively transferring the semiconductor product to the destination point; through with the semiconductor product cotransporter to the destination point, be favorable to realizing the effective transport of novel overhead traveling crane when the unspecified task appears.
Example 3
Referring to fig. 3-10, the disclosure of the present embodiment provides a novel crown block system, where the system includes a peripheral trunk track 1 and an inner branch track 2, and the peripheral trunk track 1 or the inner branch track 2 is slidably connected with a novel crown block 4 through a sliding block 3;
the novel crown block 4 comprises a U-shaped vehicle body 401, the U-shaped vehicle body 401 is movably connected with the sliding block 3 through a steering mechanism 402, a carrying assembly 403 is arranged at the top end of the interior of the U-shaped vehicle body 401, a bearing disc 404 is arranged right below the carrying assembly 403, and a motor I405 is arranged at the lower end of the left side wall of the U-shaped vehicle body 401 close to the edge; a second motor 406 is disposed at one end inside the carrying tray 404;
specifically, the surface of the carrying tray 404 is embedded with a plurality of transport rollers 407, the transport rollers 407 are connected with a second motor 406 through a transmission shaft 408, and the transport rollers 407 are connected with the transmission shaft 408 through tracks 409; the transport rollers 407 are equidistantly distributed;
Specifically, the first motor 405 is connected to the carrier plate 404 through a movable shaft 410; the peripheral trunk tracks 1 and the internal branch tracks 2 are in a grid structure, and a power supply, a communication device and a control device are arranged in the U-shaped vehicle body 401;
it should be noted that, this embodiment provides a novel crown block system for performing indirect cotransporter, and its specific logic or principle is as follows:
when two new crown blocks 4 reach a preset key point during the execution of indirect cotransport, the communication devices in the two new crown blocks 4 are utilized to receive corresponding control instructions sent by a cloud computing center and respectively send the corresponding control instructions to the corresponding control devices, then the two new crown blocks 4 respectively turn 90 degrees through the steering mechanism 402, then the two new crown blocks 4 respectively start the motor II 406, the motor II 406 and the transmission shaft 408 drive the tracks 409 to operate, and the plurality of transport rollers 407 on the carrying disc 404 are driven to rotate under the action of the tracks 409, so that the semiconductor products carried on the new crown blocks 4 are transferred to the carrying disc 404 of the idle new crown blocks 4;
according to the novel crown block system designed by the invention, the semiconductor products on the carrying novel crown block 4 can be transferred to the idle novel crown block 4 carrying disc 404, so that collaborative operation among crown blocks in multiple tracks can be realized, further, the crown block utilization rate is improved, and the carrying efficiency of the crown block system is brought into play in a crossing manner.
Example 4
In one embodiment, the invention further provides an electronic device, including a memory, a processor, and a computer program stored on the memory and executable on the processor, where the processor executes the computer program to implement any one of the control methods for a semiconductor production line handling system provided by the methods above.
Example 5
In one embodiment, the present invention further provides a computer readable storage medium, including a memory, a processor, and a computer program stored on the memory and executable on the processor, where the processor executes the computer program to implement the control method for a semiconductor production line handling system according to any one of the methods provided above.
The above formulas are all formulas with dimensionality removed and numerical calculation, the formulas are formulas with the latest real situation obtained by software simulation through collecting a large amount of data, and preset parameters and threshold selection in the formulas are set by those skilled in the art according to the actual situation.
The above embodiments may be implemented in whole or in part by software, hardware, firmware, or any other combination. When implemented in software, the above-described embodiments may be implemented in whole or in part in the form of a computer program product. The computer program product comprises one or more computer instructions or computer programs. When the computer instructions or computer program are loaded or executed on a computer, the processes or functions described in accordance with embodiments of the present invention are produced in whole or in part. The computer may be a general purpose computer, a special purpose computer, a computer network, or other programmable apparatus. The computer instructions may be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another computer-readable storage medium, for example, the computer instructions may be transmitted from one website site, computer, server, or data center to another website site, computer, server, or data center over a wired network or a wireless network. The computer readable storage medium may be any available medium that can be accessed by a computer or a data storage device such as a server, data center, etc. that contains one or more sets of available media. The usable medium may be a magnetic medium (e.g., floppy disk, hard disk, magnetic tape), an optical medium (e.g., DVD), or a semiconductor medium. The semiconductor medium may be a solid state disk.
Those of ordinary skill in the art will appreciate that the various illustrative elements and algorithm steps described in connection with the embodiments disclosed herein may be implemented as electronic hardware, or combinations of computer software and electronic hardware. Whether such functionality is implemented as hardware or software depends upon the particular application and design constraints imposed on the solution. Skilled artisans may implement the described functionality in varying ways for each particular application, but such implementation decisions should not be interpreted as causing a departure from the scope of the present invention.
It will be clear to those skilled in the art that, for convenience and brevity of description, specific working procedures of the above-described systems, apparatuses and units may refer to corresponding procedures in the foregoing method embodiments, and are not repeated herein.
In the several embodiments provided in the present invention, it should be understood that the disclosed system, apparatus and method may be implemented in other manners. For example, the apparatus embodiments described above are merely illustrative, e.g., the division of the units is merely one, and there may be additional divisions in actual implementation, e.g., multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be an indirect coupling or communication connection via some interfaces, devices or units, which may be in electrical, mechanical or other forms.
The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
In addition, each functional unit in the embodiments of the present invention may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Finally: the foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.

Claims (12)

1. The method is applied to a novel crown block system, the novel crown block system comprises a plurality of special track areas, each special track area comprises a plurality of novel crown blocks, and each novel crown block is in communication connection with a cloud computing center in a wireless mode, and the method is characterized by comprising the following steps:
selecting a target novel crown block in a target special track area, and determining an optimal carrying route and a shortest carrying route of the target novel crown block from a carrying point to a destination point through the cloud computing center;
calculating a first carrying time length required by adopting the optimal carrying route in a preset time span, calculating a second carrying time length required by adopting the shortest carrying route in the preset time span, and comparing the first carrying time length with the second carrying time length;
if the first conveying time length is longer than or equal to the second conveying time length, controlling the target novel crown block to directly convey the semiconductor product to the destination point based on the shortest conveying route; and if the first carrying time length is smaller than the second carrying time length, controlling the target novel crown block to indirectly and cooperatively transfer the semiconductor product to the destination point based on the optimal carrying route.
2. The method of claim 1, wherein each of the specific track areas is composed of a peripheral trunk track and an inner trunk track;
the novel target crown block in the selected target specific track area comprises:
positioning the special track area of the carrying point, and taking the special track area as a target special track area; acquiring carrying states of a plurality of novel crown blocks in the target specific track area within a preset time span; the carrying state comprises carrying and idle;
constructing a special track area of the carrying point into a local track map based on a graph theory, marking positions of a plurality of idle novel crown blocks and the carrying point in the local track map, and acquiring the idle novel crown blocks of the shortest path based on a graph theory algorithm;
and taking the idle novel crown block with the shortest path as a target novel crown block.
3. The method for controlling a handling system for a semiconductor production line according to claim 2, wherein determining, by the cloud computing center, an optimal handling route and a shortest handling route of the target new crown block from a handling point to a destination point, comprises:
a1: constructing a global grid track map based on a plurality of special track areas, wherein a plurality of crossing points exist in the global grid track map;
a2: determining coordinates of a plurality of crossing points, carrying points and destination points in the global grid track map according to the global grid track map;
a3: determining M optimal adjacent intersecting points of the carrying points according to the coordinates of the intersecting points, the carrying points and the destination points, wherein M is a positive integer greater than or equal to 1;
a4: taking M optimal adjacent crossing points as key points, determining Q optimal adjacent crossing points of the key points, wherein Q is a positive integer greater than or equal to 1;
a5: repeating the step a4 until the key point is a carrying point, and ending the cycle;
a6: and connecting the key points, the carrying points and the destination points, and obtaining a plurality of carrying routes and the lengths of the carrying routes according to the lengths of the prestored peripheral trunk track and the prestored internal trunk track.
4. A method of controlling a semiconductor processing line handling system as recited in claim 3, wherein determining M optimal adjacent intersections of the handling points comprises:
d nearest adjacent crossing points of the carrying point are obtained, D is a positive integer greater than or equal to 1;
Calculating the distance between each nearest adjacent intersection point and the carrying point to obtain a plurality of adjacent point distances;
setting an adjacent distance threshold, comparing the distances of a plurality of adjacent points with the adjacent distance threshold, taking the corresponding nearest adjacent crossing point as the optimal adjacent crossing point if the distance of the adjacent points is smaller than or equal to the adjacent distance threshold, and eliminating the corresponding nearest adjacent crossing point if the distance of the adjacent points is larger than the adjacent distance threshold.
5. The method for controlling a handling system for a semiconductor manufacturing line according to claim 4, wherein determining, by the cloud computing center, an optimal handling route and a shortest handling route of the target new crown block from a handling point to a destination point, further comprises:
sequencing the plurality of carrying routes according to the lengths of the plurality of carrying routes, and taking the corresponding carrying route with the first sequencing as the shortest carrying route;
extracting the number of idle novel crown blocks in a specific track area penetrated by a plurality of carrying routes according to a preset time span;
calculating and analyzing according to the lengths of a plurality of carrying routes and the number of idle novel crown blocks in the penetrated special track area to obtain the line coefficient of each carrying route;
And extracting a carrying route corresponding to the maximum line coefficient, and taking the carrying route corresponding to the maximum line coefficient as an optimal carrying route.
6. The method for controlling a semiconductor manufacturing line handling system according to claim 5, wherein calculating the first handling duration required to take the optimal handling route within a predetermined time span comprises:
acquiring first calculation parameters required by adopting the optimal carrying route, wherein the first calculation parameters comprise the optimal carrying route length, the novel crown block speed, the cooperative transportation time length and the first carrying influence time length;
and carrying out formula calculation based on the first calculation parameters to obtain a first carrying duration.
7. The method of claim 6, wherein controlling the target new crown block to co-transport semiconductor products to the destination point based on the optimal transport route comprises:
b1: moving the idle target novel crown block of the shortest path to the carrying point to load the semiconductor product;
b2: extracting a plurality of key points in the optimal carrying route, acquiring the nearest idle novel crown block in the track area of each key point, and taking the nearest idle novel crown block in the track area of each key point as an idle non-target novel crown block;
b3: controlling the nearest idle non-target novel crown block to move to the key point;
b4: controlling the idle target novel crown block to move to the first key point, and cooperatively transferring the semiconductor product on the idle target novel crown block to the idle non-target novel crown block positioned at the first key point;
b5: the controlled idle non-target novel crown block moves to the next key point, and the semiconductor products on the idle non-target novel crown block are cooperatively transferred to the idle non-target novel crown block positioned at the next key point;
b6: repeating the step b5 until the next key point is the destination point, and co-transferring the semiconductor product to the destination point.
8. A control system for a semiconductor production line handling system, comprising:
the route generation module is used for selecting a target novel crown block in a target special track area and determining an optimal carrying route and a shortest carrying route of the target novel crown block from a carrying point to a destination point through a cloud computing center;
the calculation judging module is used for calculating a first carrying duration required by adopting the optimal carrying route in a preset time span, calculating a second carrying duration required by adopting the shortest carrying route in the preset time span and comparing the first carrying duration with the second carrying duration;
The control scheduling module is used for controlling the target novel crown block to directly convey the semiconductor product to the destination point based on the shortest conveying route if the first conveying time length is longer than or equal to the second conveying time length; and if the first carrying time length is smaller than the second carrying time length, controlling the target novel crown block to indirectly and cooperatively transfer the semiconductor product to the destination point based on the optimal carrying route.
9. The novel crown block system comprises a peripheral trunk track (1) and an inner branch track (2), and is characterized in that the peripheral trunk track (1) or the inner branch track (2) is in sliding connection with a novel crown block (4) through a sliding block (3);
the novel crown block (4) comprises a U-shaped vehicle body (401), the U-shaped vehicle body (401) is movably connected with the sliding block (3) through a steering mechanism (402), a carrying assembly (403) is arranged at the top end of the interior of the U-shaped vehicle body (401), a bearing disc (404) is arranged under the carrying assembly (403), and a motor I (405) is arranged at the lower end of the left side wall of the U-shaped vehicle body (401) close to the edge; one end inside the bearing disc (404) is provided with a motor II (406).
10. The novel crown block system according to claim 9, wherein a plurality of transport rollers (407) are embedded on the surface of the bearing disc (404), the plurality of transport rollers (407) are connected with a motor two (406) through a transmission shaft (408), and the plurality of transport rollers (407) are connected with the transmission shaft (408) through tracks (409); the conveying rollers (407) are equidistantly distributed;
the motor I (405) is connected with the bearing disc (404) through a movable shaft (410); the U-shaped car body (401) is characterized in that a plurality of peripheral main tracks (1) and internal branch tracks (2) are in a grid structure, and a power supply, a communication device and a control device are arranged in the U-shaped car body (401).
11. An electronic device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, characterized in that the processor implements a method for controlling a semiconductor production line handling system according to any of claims 1 to 7 when executing the computer program.
12. A computer-readable storage medium, wherein a computer program is stored on the computer-readable storage medium, which when executed by a processor, implements a method for controlling a semiconductor production line handling system according to any one of claims 1 to 7.
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