CN117735414B - Speed control system and method for wafer carrying system - Google Patents

Abstract

The invention belongs to the technical field of crown block control, and discloses a speed control system and method for a wafer carrying system; comprising the following steps: receiving operation data acquired by an overhead travelling crane end, wherein the operation data comprises overhead travelling crane positions and overhead travelling crane data; analyzing the crown block data, obtaining a braking distance corresponding to the crown block, and judging the type of the running track where the crown block is located; according to the position of the crown block, m crown blocks are obtained, the sections which the m crown blocks reach next are all the same section, are all in different sections at present, are all marked as rear crown blocks, and the priority coefficients corresponding to the m rear crown blocks are calculated; judging the running sequence of m rear crown blocks according to the priority coefficient; calculating the arrival time and the following distance of m rear crown blocks, judging whether to generate a control instruction, and controlling the corresponding rear crown blocks according to the control instruction; the invention realizes accurate multi-vehicle linkage speed control and improves the running safety and efficiency of the crown block.

Description

Speed control system and method for wafer carrying system

Technical Field

The invention relates to the technical field of crown block control, in particular to a speed control system and method for a wafer carrying system.

Background

In the wafer process flow, a crown block is required to be used for transferring a wafer transport box loaded with a wafer from one processing device to another device so as to realize unmanned transport of the wafer among different working procedures; as the wafer transportation scale is larger and larger, the number and turnover amount of wafer transportation boxes are increased, and the crown block is easy to collide due to too high speed or too close distance, so that potential safety hazard and economic loss are brought to production; at present, the crown block mainly depends on setting a fixed maximum safety speed to prevent collision; however, because the crown block has different braking difficulty in different track sections, simply setting a speed limit tends to be low in efficiency; in addition, the relative distance and the position among the plurality of wafer transport cassettes cannot be known in real time, and secondary accidents are easy to occur due to the fault crown block.

Of course, an intelligent crown block control method also exists, and the speed of the crown block can be controlled according to the specific position of the crown block so as to avoid collision accidents; for example, chinese patent publication CN117284939B discloses a system and method for controlling the speed of an intelligent automatic wafer handling device; comprising the following steps: collecting data information in the running process of the crown block; carrying out data processing on the data information to obtain path information of the crown blocks and the distance between two adjacent crown blocks; comparing the distance between two adjacent crown blocks with a preset safety distance threshold range according to the path information, and judging whether to generate a control instruction according to the comparison result; according to the invention, the distance between two adjacent crown blocks on the travelling track is acquired in real time, and the safety distances of the crown blocks under different paths are accurately formulated according to the path information of the crown blocks, so that the crown blocks can be controlled to carry out deceleration alarm or parking alarm according to the specific safety distances under different paths, and the running efficiency of the crown blocks is improved;

However, the technology only considers the reading time of the labels of the front car and the rear car, and does not consider the difference of the actual running speeds of the two cars, so that the calculation accuracy of the distance is affected; the speed control is carried out only based on the distance between two workshops, other influencing factors such as the radius of a track curve, the load of the overhead travelling crane and the like are not fully considered, the speed control of the rear overhead travelling crane cannot be accurately carried out, and the probability of collision between the rear overhead travelling crane and the front overhead travelling crane exists; in addition, the technology only controls the distance between two workshops, and does not consider the control requirement under the multi-vehicle linkage scene, so that when the front crown block fails, the speed control cannot be effectively performed by the plurality of rear crown blocks, and even if the rear crown blocks do not collide with the front crown block, the plurality of rear crown blocks collide with each other;

In view of the above, the present invention provides a speed control system and method for a wafer handling system to solve the above-mentioned problems.

Disclosure of Invention

In order to overcome the defects in the prior art, the invention provides the following technical scheme for achieving the purposes: a speed control method for a wafer handling system is applied to a cloud platform and comprises the following steps:

receiving operation data acquired by an overhead travelling crane end, wherein the operation data comprise overhead travelling crane positions and overhead travelling crane data, and the overhead travelling crane data comprise overhead travelling crane speeds, turning radii, transport quality and maximum braking force;

Analyzing the crown block data, obtaining a braking distance corresponding to the crown block, and judging the type of the running track where the crown block is located;

according to the position of the crown block, obtaining m crown blocks, wherein the sections which the m crown blocks reach next are the same section, the m crown blocks are all positioned in different sections currently, marking the m crown blocks as rear crown blocks, and calculating the corresponding priority coefficients of the m rear crown blocks; judging the running sequence of m rear crown blocks according to the priority coefficient;

And calculating the arrival time and the following distance of the m rear-mounted crown blocks, presetting a distance threshold, respectively judging whether to generate a control instruction according to the arrival time, the following distance and the distance threshold, and controlling the corresponding rear-mounted crown blocks according to the control instruction.

Further, the position of the crown block is a section corresponding to the crown block on the running track; the method for acquiring the position of the crown block comprises the following steps: dividing the running track into n sections, wherein the length of each section is equal, sequentially increasing the number of the n sections to obtain the number i of the ith section,; Marking the junction of every two sections as junction areas, arranging RFID labels in each junction area, and installing RFID readers on each crown block, wherein the RFID labels correspond to the sections one by one; when the crown block passes through different sections, the RFID reader-writer on the crown block reads the RFID tag on the corresponding section, and the position of the crown block is obtained according to the RFID tag.

Further, the speed of the crown block is the speed of the crown block during running; the turning radius is the radius of a curve when the crown block turns; the method for acquiring the turning radius comprises the following steps: acquiring a roll angular velocity, wherein the roll angular velocity is the angular velocity of the crown block when the crown block turns, and calculating the turning radius according to the roll angular velocity and the crown block velocity; the turning radius is expressed as: ; wherein r is the turning radius, v is the crown block speed,/> Is the roll angular velocity.

Further, the transport mass is the weight of the whole crown block when the crown block operates; the method for acquiring the transportation quality comprises the following steps: the method comprises the steps of obtaining the mass of a wafer and the mass of a crown block, wherein the mass of the wafer is the weight of a wafer transported by the crown block, and the mass of the crown block is the weight of the crown block when the crown block is empty; calculating transport quality according to the mass of the wafer and the mass of the crown block; the expression of the transport quality is: ; in the/> For the transportation quality/>Is the wafer quality,/>The mass of the crown block is the mass of the crown block;

the maximum braking force is the maximum braking force which can be generated by the braking system of the crown block.

Further, inputting the crown block data into a trained distance analysis model, and predicting a corresponding braking distance;

The training process of the distance analysis model comprises the following steps:

The braking distance corresponding to the Q groups of crown block data is collected in advance, and the crown block data and the corresponding braking distance are converted into a corresponding group of characteristic vectors;

Taking each group of feature vectors as input of a distance analysis model, taking a group of predicted braking distances corresponding to each group of crown block data as output, and taking an actual braking distance corresponding to each group of crown block data as a predicted target, wherein the actual braking distance is the braking distance which is collected in advance and corresponds to the crown block data; taking the sum of the prediction errors of the minimized all crown block data as a training target; training the distance analysis model until the sum of the prediction errors reaches convergence, and stopping training; the distance analysis model is a deep neural network model.

Further, the method for judging the type of the running track where the crown block is located comprises the following steps:

The running track type includes a straight track and a curved track;

If it is Judging that the crown block is positioned on a linear track; if/>And judging that the crown block is in the curve track.

Further, the method for calculating the priority coefficients corresponding to the m rear crown blocks includes:

Calculating the zone distance corresponding to m rear crown blocks, wherein the zone distance is the distance between the current position of the rear crown block and the next junction area; the calculation method of the distance between the corresponding sections of the m rear-mounted crown blocks comprises the following steps: ; in the/> For the section distance of the j-th rear crown block,/>For section length,/>For the section time of the j-th rear crown block,/>For the speed of the j-th rear crown block,/>; The section time is the time from the last passing junction zone to the current position of the rear crown block;

calculating priority coefficients corresponding to the m rear crown blocks according to the section distances, the transport quality, the running track type values and the braking distances corresponding to the m rear crown blocks; the expression of the priority coefficient is: ; in the/> For the priority coefficient of the j-th rear crown block,/>For the transportation quality of the j-th crown block,/>For the number of the type of the running track of the j-th rear crown block,/>For the braking distance of the j-th rear crown block,/>、/>、/>、/>Is a preset proportionality coefficient and/>、/>、/>、/>Are all greater than 0;

and sequencing the priority coefficients corresponding to the m rear crown blocks from large to small, wherein the sequencing order is the operation order of the m rear crown blocks.

Further, the method for judging whether to generate the control instruction according to the arrival time comprises the following steps:

Marking the rear crown block with the largest priority coefficient among the m rear crown blocks as a priority crown block, and marking the previous crown block of the priority crown block as a front crown block; sequentially increasing the number of the m rear crown blocks according to the running sequence of the m rear crown blocks, wherein the number of the j-th rear crown block is j;

The arrival time is the time that the current position of the rear crown block has elapsed until reaching the next junction region, and the expression of the arrival time is: ; in the/> The arrival time of the j-th rear crown block;

the control instruction comprises a deceleration instruction, a deceleration alarm instruction, a parking instruction and a parking alarm instruction;

Sequentially sequencing the arrival times of the m rear crown blocks according to the running sequence of the m rear crown blocks, comparing every two adjacent arrival times according to the running sequence, marking the arrival time ranked at the rear as the subsequent time, and marking the arrival time ranked at the front as the lead time; if the subsequent time in the two adjacent arrival times is greater than the preamble time, no control instruction is generated; if the subsequent time in the two adjacent arrival times is smaller than or equal to the preamble time, generating a deceleration instruction until the subsequent time is larger than the preamble time; if the crown block speed of the rear crown block is reduced to zero, changing the speed reducing instruction into a parking instruction; and generating a parking instruction for the rear crown blocks arranged behind the rear crown block replaced by the parking instruction in the operation sequence.

Further, the method for judging whether to generate the control instruction according to the following distance comprises the following steps:

Marking the next section of the m rear crown blocks to be accessed as a vehicle meeting section;

When the rear crown block enters the meeting section, the rear crown block which just enters the meeting section and the front rear crown block are used as a group of analysis sets, the numbers of two adjacent rear crown blocks in the analysis sets are compared, the rear crown block with the large number is marked as a front crown block, the rear crown block with the small number is marked as a rear crown block, and the priority crown block and the front crown block are also used as a group of analysis sets;

The following distance is the distance between the front crown block and the rear crown block in each analysis set; the following distance is expressed as: ; in the/> For the following distance of the j-th rear crown block,/>For the section time of the preamble crown block,/>The speed of the crown block is the speed of the crown block of the preamble crown block,/>For the section time of the subsequent crown block,/>For the crown block speed of the subsequent crown block,/>Is the crown block position of the preface crown block,/>The position of the crown block is the crown block position of the subsequent crown block;

Preset safety threshold Wherein/>，/>，/>，/>A real number greater than 1; the safety threshold value corresponds to the rear crown block one by one;

Comparing the following distances corresponding to the m rear crown blocks with the safety threshold values corresponding to the m rear crown blocks;

If it is No control instruction is generated;

If it is Generating a deceleration instruction;

If it is And/>Generating a deceleration alarm instruction;

If it is And/>And generating a parking alarm instruction.

Further, the method for judging whether to generate the control instruction according to the distance threshold value comprises the following steps:

When the j-th rear crown block enters the meeting section, the corresponding section distance is obtained, if And/>，If the distance is the distance threshold value, a parking instruction is generated for the rear crown block which does not enter the vehicle meeting section; if/>And/>No control instruction is generated.

A speed control system for a wafer handling system, implementing a speed control method for a wafer handling system, comprising:

The data receiving module is used for receiving operation data acquired by the crown block end, wherein the operation data comprises crown block positions and crown block data, and the crown block data comprises crown block speeds, turning radiuses, transport quality and maximum braking force;

The data analysis module is used for analyzing the data of the crown block, acquiring a braking distance corresponding to the crown block, and judging the type of the running track where the crown block is located;

The multi-vehicle linkage module is used for acquiring m crown blocks which are in the same section in the next section and are in different sections currently according to the positions of the crown blocks, marking the m crown blocks as rear crown blocks, and calculating the priority coefficients corresponding to the m rear crown blocks; judging the running sequence of m rear crown blocks according to the priority coefficient;

The speed control module is used for calculating the arrival time of the m rear-mounted crown blocks, judging whether to generate a control instruction according to the arrival time, calculating the following distance of the m rear-mounted crown blocks, judging whether to generate the control instruction according to the following distance, and controlling the corresponding rear-mounted crown blocks according to the control instruction.

An electronic device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, the processor implementing a speed control method for a wafer handling system when executing the computer program.

A computer readable storage medium having a computer program stored thereon, the computer program when executed implementing the method of speed control for a wafer handling system.

The invention discloses a speed control system and a speed control method for a wafer carrying system, which have the technical effects and advantages that:

The section and the junction area are arranged on the running track, and the position information of each crown block is acquired in real time by utilizing an RFID technology, so that the section where the crown block is positioned can be accurately identified; meanwhile, the operation data of the crown block are collected through various sensors, so that the current operation state of the crown block and the difficulty degree of braking can be reflected; the cloud platform processes and analyzes the crown block data in the operation data, trains a deep learning model to predict the braking distance of the crown block, and can effectively acquire the corresponding braking distance under different crown block data conditions; in addition, the priority of the rear overhead travelling crane is calculated by considering a plurality of influencing factors such as transportation quality and running track type, and a control instruction is generated in real time according to the priority and the running state of the plurality of travelling cranes, so that the accurate multi-crane linkage control is realized; the speed control can be personalized, and the running safety and efficiency of the crown block are greatly improved.

Drawings

FIG. 1 is a schematic diagram of a speed control system for a wafer handling system according to embodiment 1 of the present invention;

FIG. 2 is a schematic view of a running track segment division according to embodiment 1 of the present invention;

FIG. 3 is a schematic view of a rear crown block in accordance with embodiment 1 of the present invention;

Fig. 4 is a schematic diagram illustrating connection between an antenna end and a cloud control platform according to embodiment 1 of the present invention;

FIG. 5 is a flow chart of a speed control method for a wafer handling system according to embodiment 2 of the present invention;

Fig. 6 is a schematic diagram of an electronic device according to embodiment 3 of the present invention;

fig. 7 is a schematic diagram of a storage medium according to embodiment 4 of the present invention.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

Example 1:

referring to fig. 1, a speed control system for a wafer handling system according to the present embodiment includes a data receiving module, a data analyzing module, a multi-vehicle linkage module, and a speed control module; each module is connected in a wired and/or wireless mode, so that data transmission among the modules is realized;

The cloud control platform receives operation data acquired by an overhead traveling crane end, wherein the operation data comprises overhead traveling crane positions and overhead traveling crane data, and the overhead traveling crane data comprises overhead traveling crane speeds, turning radii, transport quality and maximum braking force;

The cloud control platform is an intelligent network connection cloud control platform, and each crown block is an crown block end;

The position of the crown block is a section corresponding to the crown block on the running track; the method for acquiring the position of the crown block comprises the following steps:

Referring to fig. 2, the running track is divided into n sections, each of which has an equal length, the n sections are sequentially provided with numbers, i.e. i, ; Marking the junction of every two sections as junction areas, arranging RFID labels in each junction area, and installing RFID readers on each crown block, wherein the RFID labels correspond to the sections one by one; when the crown block passes through different sections, the RFID reader-writer on the crown block reads the RFID tag on the corresponding section, and the position of the crown block is obtained according to the RFID tag; the segment length is preset by a person skilled in the art according to the overall length of the running track;

The speed of the crown block is the speed of the crown block during running; the speed of the crown block is obtained by a speed sensor arranged on the crown block; the faster the crown block speed is, the larger the corresponding inertia is, and more braking time and braking distance are needed to reduce the speed and eliminate the momentum, otherwise, the opposite is the case;

The turning radius is the radius of a curve when the crown block turns; the method for acquiring the turning radius comprises the following steps: acquiring a roll angular velocity, wherein the roll angular velocity is the angular velocity of the crown block when the crown block turns, and calculating the turning radius according to the roll angular velocity and the crown block velocity; the turning radius is expressed as: ; wherein r is the turning radius, v is the crown block speed,/> Is the roll angular velocity; the rolling angular velocity is obtained by a triaxial gyroscope sensor arranged on the crown block; the smaller the turning radius is, the larger the change of the turning curvature is, the larger the centrifugal force is, the larger the crown block needs to resist the larger transverse inertia force, and more braking time and longer braking distance are needed;

The transportation quality is the weight of the whole crown block when the crown block runs; the method for acquiring the transportation quality comprises the following steps: the method comprises the steps of obtaining the mass of a wafer and the mass of a crown block, wherein the mass of the wafer is the weight of a wafer transported by the crown block, and the mass of the crown block is the weight of the crown block when the crown block is empty; calculating transport quality according to the mass of the wafer and the mass of the crown block; the expression of the transport quality is: ; in the/> For the transportation quality/>Is the wafer quality,/>The mass of the crown block is the mass of the crown block; the mass of the wafer is obtained by a load sensor arranged on the crown block, the mass of the crown block is obtained by weighing the crown block by a person skilled in the art when the crown block is produced, and the mass of the crown block does not change in the running process of the crown block, so that the mass of the crown block can be obtained by only carrying out one-time weighing by the person skilled in the art; according to Newton's second law, the larger the transport mass, the larger the inertia of the crown block, and when the same magnitude of deceleration force is applied, the smaller the corresponding acceleration, the more braking time and longer braking distance are required, and vice versa;

the maximum braking force is the maximum braking force which can be generated by the braking system of the crown block; the maximum braking force is obtained by technical parameters of a crown block braking system; the larger the maximum braking force is, the better the braking effect of the crown block is, so that the crown block can complete braking in a shorter time and a shorter distance, and the opposite is the case;

The data analysis module is used for analyzing the data of the crown block by the cloud platform, acquiring a braking distance corresponding to the crown block and judging the type of the running track where the crown block is located;

inputting crown block data into a trained distance analysis model, and predicting a corresponding braking distance;

the specific training process of the distance analysis model comprises the following steps:

The braking distance corresponding to the Q groups of crown block data is collected in advance, and the crown block data and the corresponding braking distance are converted into a corresponding group of characteristic vectors;

Taking each group of feature vectors as input of a distance analysis model, taking a group of predicted braking distances corresponding to each group of crown block data as output, and taking an actual braking distance corresponding to each group of crown block data as a predicted target, wherein the actual braking distance is the braking distance corresponding to the crown block data collected in advance; taking the sum of the prediction errors of the minimized all crown block data as a training target; wherein, the calculation formula of the prediction error is as follows Wherein/>For prediction error,/>Group number of feature vector corresponding to crown block data,/>For/>Predicted braking distance corresponding to group crown block data,/>For/>The actual braking distance corresponding to the data of the crown block; training the distance analysis model until the sum of the prediction errors reaches convergence, and stopping training;

The distance analysis model is specifically a deep neural network model;

It should be noted that, in the running process of the historical crown block, the braking distance corresponding to the crown block data is obtained by a person skilled in the art, multiple groups of different crown block data are collected, the crown block corresponding to each group of crown block data is braked for multiple times, the braking distance corresponding to the multiple times of braking is collected, the average value of the multiple braking distances is used as the braking distance corresponding to the group of crown block data, and multiple groups of braking distances corresponding to different crown block data are obtained by pushing the average value of the multiple braking distances;

the method for judging the type of the running track where the crown block is located comprises the following steps:

The running track type includes a straight track and a curved track;

If it is Judging that the crown block is in a linear track, and indicating that the turning radius does not exist, wherein the crown block does not turn; if it isJudging that the crown block is in a curve track, and indicating that the turning radius exists, wherein the crown block is turning;

the multi-vehicle linkage module is used for acquiring m crown blocks according to the positions of the crown blocks, wherein the sections where the m crown blocks arrive next are all the same section, the m crown blocks are all in different sections currently, and the m crown blocks are all marked as rear crown blocks, and the scheme is shown in fig. 3; calculating priority coefficients corresponding to m rear crown blocks; judging the running sequence of m rear crown blocks according to the priority coefficient; wherein the method comprises the steps of ；

The method for calculating the priority coefficient corresponding to the m rear crown blocks comprises the following steps:

Calculating the zone distance corresponding to m rear crown blocks, wherein the zone distance is the distance between the current position of the rear crown block and the next junction area; the calculation method of the distance between the corresponding sections of the m rear-mounted crown blocks comprises the following steps: ; in the/> For the section distance of the j-th rear crown block,/>For section length,/>For the section time of the j-th rear crown block,/>For the speed of the j-th rear crown block,/>; The section time is the time from the last passing junction zone to the current position of the rear crown block; the section time is acquired by a time sensor arranged on the crown block, when an RFID reader-writer on the crown block reads an RFID tag, the time sensor starts to count, the data acquired by the time sensor is the section time, and when the RFID reader-writer reads the RFID tag again, the time sensor starts to count again;

calculating priority coefficients corresponding to the m rear crown blocks according to the section distances, the transport quality, the running track type values and the braking distances corresponding to the m rear crown blocks; the expression of the priority coefficient is: ; in the/> For the priority coefficient of the j-th rear crown block,/>For the transportation quality of the j-th crown block,/>For the number of the type of the running track of the j-th rear crown block,/>For the braking distance of the j-th rear crown block,/>、/>、/>、/>Is a preset proportionality coefficient、/>、/>、/>Are all greater than 0;

The specific numerical value of the proportionality coefficient in the formula can be set according to actual conditions, the proportionality coefficient reflects the influence degree of the section distance, the transportation quality, the type of the running track and the braking distance on the running priority degree of the crown block, and a person skilled in the art can preset the corresponding proportionality coefficient according to the influence degree of the section distance, the transportation quality, the type of the running track and the braking distance on the running priority degree of the crown block so as to accurately evaluate the running priority degrees of different crown blocks;

It should be noted that, the value of the type of the running track is assigned to different running track types in advance by a person skilled in the art, because the speed of the crown block corresponding to the crown block in the curve track is slower, if the crown block in the curve track is not released preferentially, the crown block is accumulated in the curve track, and the track utilization rate is reduced, so that a larger value is assigned to the curve track and a smaller value is assigned to the linear track; illustratively, a curve track is assigned 100 and a straight track is assigned 10;

it should be understood that the priority coefficient is the priority degree of the operation of each rear-mounted crown block, and the higher the priority coefficient is, the higher the corresponding rear-mounted crown block should be operated preferentially, whereas the lower the priority coefficient is, the higher the corresponding rear-mounted crown block should be operated preferentially; the section distance, the transportation quality, the number of the type of the running track and the braking distance are the influence factors of the priority coefficient, and the smaller the section distance is, the closer the rear overhead travelling crane is to the next junction area, the priority operation is required, namely the larger the priority coefficient is, and the opposite is the opposite; the larger the transportation quality is, the larger the weight of the wafers transported by the rear crown block is, the more the transported wafers are, and in order to improve the production progress, the higher the operation coefficient is, and the opposite is the case; the larger the number of the type of the running track is, the lower the speed of the overhead travelling crane in the curve track is, so that the overhead travelling crane is easily piled up, and the higher the priority running is, namely the higher the priority coefficient is, and the opposite is the opposite; the larger the braking distance is, the longer the rear crown block needs to be, the lower the safety is, and the priority operation is needed, namely the larger the priority coefficient is, and the opposite is the case; the calculation of the priority coefficient is dimensionality removal calculation;

sequencing the priority coefficients corresponding to the m rear crown blocks from large to small, wherein the sequencing order is the operation order of the m rear crown blocks;

The speed control module is used for calculating the arrival time and the following distance of the m rear-mounted crown blocks, presetting a distance threshold, respectively judging whether to generate a control instruction according to the arrival time, the following distance and the distance threshold, and controlling the corresponding rear-mounted crown blocks according to the control instruction;

the method for judging whether to generate the control instruction according to the arrival time comprises the following steps:

Marking the rear crown block with the largest priority coefficient among the m rear crown blocks as a priority crown block, and marking the previous crown block of the priority crown block as a front crown block; sequentially increasing the number of the m rear crown blocks according to the running sequence of the m rear crown blocks, wherein the number of the j rear crown block is j, namely the number of the priority crown block is 1;

The arrival time is the time that the current position of the rear crown block has elapsed until reaching the next junction region, and the expression of the arrival time is: ; in the/> The arrival time of the j-th rear crown block;

the control instruction comprises a deceleration instruction, a deceleration alarm instruction, a parking instruction and a parking alarm instruction;

According to the running sequence of m rear crown blocks, the arrival times of the m rear crown blocks are sequenced in sequence, every two adjacent arrival times are compared according to the running sequence, the arrival time arranged at the rear is marked as the subsequent time, the arrival time arranged at the front is marked as the lead time, and one arrival time can be compared with the two front and rear arrival times, so that the arrival time can be the lead time or the subsequent time; if the subsequent time in the two adjacent arrival times is greater than the preamble time, no control instruction is generated; if the subsequent time in the two adjacent arrival times is smaller than or equal to the preamble time, generating a deceleration instruction until the subsequent time is larger than the preamble time; if the crown block speed of the rear crown block is reduced to zero, changing the speed reducing instruction into a parking instruction; generating a parking instruction for a rear crown block arranged behind the rear crown block replaced by the parking instruction in the operation sequence;

the purpose of judging whether to generate the control command according to the arrival time is to ensure the sequence of the m rear crown blocks entering the meeting section, which is the operation sequence of the m rear crown blocks obtained above;

The method for judging whether to generate the control instruction according to the following distance comprises the following steps:

Marking the next section of the m rear crown blocks to be accessed as a vehicle meeting section;

When the rear crown block enters the meeting section, the rear crown block which just enters the meeting section and the front rear crown block are used as a group of analysis sets, the numbers of two adjacent rear crown blocks in the analysis sets are compared, the rear crown block with the large number is marked as a front crown block, the rear crown block with the small number is marked as a rear crown block, wherein the priority crown block and the front crown block are also used as a group of analysis sets, and one rear crown block can be the front crown block or the rear crown block;

The following distance is the distance between the front crown block and the rear crown block in each analysis set; the following distance is expressed as: ; in the/> For the following distance of the j-th rear crown block,/>For the section time of the preamble crown block,/>The speed of the crown block is the speed of the crown block of the preamble crown block,/>For the section time of the subsequent crown block,/>For the crown block speed of the subsequent crown block,/>Is the crown block position of the preface crown block,/>The position of the crown block is the crown block position of the subsequent crown block;

Preset safety threshold Wherein/>，/>，/>，/>A real number greater than 1; b is preset by a person skilled in the art according to actual conditions; the safety threshold value corresponds to the rear crown block one by one;

comparing the following distance corresponding to the m rear crown blocks with the safety threshold corresponding to the m rear crown blocks, if The control command is not generated, and the corresponding rear crown block is far away from the previous crown block, so that the speed control is not needed; if/>Generating a deceleration command, wherein the distance between the rear crown block corresponding to the deceleration command and the previous crown block is relatively short, and the rear crown block corresponding to the deceleration command needs to be subjected to deceleration operation; if/>And/>Generating a deceleration alarm instruction, namely, indicating that a front crown block of a rear crown block corresponding to the deceleration alarm instruction is in a static state, and the front crown block fails, wherein the rear crown block corresponding to the deceleration alarm instruction is closer to the front crown block, the rear crown block corresponding to the deceleration alarm instruction needs to be subjected to deceleration operation, and simultaneously, alarming and reminding a worker to restart or overhaul the front crown block; if it isAnd/>The following distance of the corresponding rear crown block approaches to the braking distance of the corresponding rear crown block infinitely, a parking alarm instruction is generated, the fault of the front crown block is not relieved, the distance between the rear crown block corresponding to the parking alarm instruction and the front crown block is too close, the rear crown block corresponding to the parking alarm instruction collides with the front crown block if the rear crown block continues to run, parking operation needs to be carried out on the rear crown block corresponding to the parking alarm instruction, and meanwhile, an alarm prompts a worker to fail to restart the front crown block and overhaul the front crown block;

The aim of judging whether to generate the control command according to the following distance is to ensure that the rear crown block cannot collide with the previous crown block after entering the meeting section, so that the running safety of the crown block is improved;

The method for judging whether to generate the control instruction according to the distance threshold value comprises the following steps:

When the j-th rear crown block enters the meeting section, the corresponding section distance is obtained, if And/>Generating a parking instruction for all rear crown blocks which do not enter the meeting section,/>, andIs a distance threshold; the j-th rear overhead travelling crane is stopped in the meeting section and is closer to the rear overhead travelling crane which does not enter the meeting section, if the control command is still judged according to the following distance, the rear overhead travelling crane which does not enter the meeting section cannot be effectively braked after entering the meeting section, and therefore the j-th rear overhead travelling crane which is stopped in front collides with the j-th rear overhead travelling crane; if/>And/>No control instruction is generated; the j-th rear overhead travelling crane is stopped in the vehicle-meeting section, but is far away from the rear overhead travelling crane which does not enter the vehicle-meeting section, and whether a control instruction is generated or not can be judged according to the following distance;

It should be noted that, in the running process of the historical crown block, a person skilled in the art parks one crown block at different positions of the meeting section in sequence, the crown block is operated at each position to enter the meeting section, a corresponding following distance is calculated, a corresponding control instruction is generated according to the following distance, the crown block which can collide with the crown block entering the meeting section and is in a static state is marked as a collision crown block, the distances between the positions of the plurality of collision crown blocks and the next junction area are obtained, the distances are marked as collision distances, and the collision distance with the largest value in the plurality of collision distances is used as a distance threshold;

The connection manner of the crown block end and the cloud control platform is shown in fig. 4;

According to the embodiment, the sections and the junction areas are arranged on the running track, and the position information of each crown block is acquired in real time by utilizing the RFID technology, so that the section where the crown block is located can be accurately identified; meanwhile, the operation data of the crown block are collected through various sensors, so that the current operation state of the crown block and the difficulty degree of braking can be reflected; the cloud platform processes and analyzes the crown block data in the operation data, trains a deep learning model to predict the braking distance of the crown block, and can effectively acquire the corresponding braking distance under different crown block data conditions; in addition, the priority of the rear overhead travelling crane is calculated by considering a plurality of influencing factors such as transportation quality and running track type, and a control instruction is generated in real time according to the priority and the running state of the plurality of travelling cranes, so that the accurate multi-crane linkage control is realized; the speed control can be personalized, and the running safety and efficiency of the crown block are greatly improved.

Example 2:

Referring to fig. 5, the embodiment is not described in detail in embodiment 1, and a speed control method for a wafer handling system is provided, which is applied to a cloud platform, and includes:

receiving operation data acquired by an overhead travelling crane end, wherein the operation data comprise overhead travelling crane positions and overhead travelling crane data, and the overhead travelling crane data comprise overhead travelling crane speeds, turning radii, transport quality and maximum braking force;

Analyzing the crown block data, obtaining a braking distance corresponding to the crown block, and judging the type of the running track where the crown block is located;

according to the position of the crown block, obtaining m crown blocks, wherein the sections which the m crown blocks reach next are the same section, the m crown blocks are all positioned in different sections currently, marking the m crown blocks as rear crown blocks, and calculating the corresponding priority coefficients of the m rear crown blocks; judging the running sequence of m rear crown blocks according to the priority coefficient;

And calculating the arrival time and the following distance of the m rear-mounted crown blocks, presetting a distance threshold, respectively judging whether to generate a control instruction according to the arrival time, the following distance and the distance threshold, and controlling the corresponding rear-mounted crown blocks according to the control instruction.

Further, the position of the crown block is a section corresponding to the crown block on the running track; the method for acquiring the position of the crown block comprises the following steps: dividing the running track into n sections, wherein the length of each section is equal, sequentially increasing the number of the n sections to obtain the number i of the ith section,; Marking the junction of every two sections as junction areas, arranging RFID labels in each junction area, and installing RFID readers on each crown block, wherein the RFID labels correspond to the sections one by one; when the crown block passes through different sections, the RFID reader-writer on the crown block reads the RFID tag on the corresponding section, and the position of the crown block is obtained according to the RFID tag.

Further, the speed of the crown block is the speed of the crown block during running; the turning radius is the radius of a curve when the crown block turns; the method for acquiring the turning radius comprises the following steps: acquiring a roll angular velocity, wherein the roll angular velocity is the angular velocity of the crown block when the crown block turns, and calculating the turning radius according to the roll angular velocity and the crown block velocity; the turning radius is expressed as: ; wherein r is the turning radius, v is the crown block speed,/> Is the roll angular velocity.

Further, the transport mass is the weight of the whole crown block when the crown block operates; the method for acquiring the transportation quality comprises the following steps: the method comprises the steps of obtaining the mass of a wafer and the mass of a crown block, wherein the mass of the wafer is the weight of a wafer transported by the crown block, and the mass of the crown block is the weight of the crown block when the crown block is empty; calculating transport quality according to the mass of the wafer and the mass of the crown block; the expression of the transport quality is: ; in the/> For the transportation quality/>Is the wafer quality,/>The mass of the crown block is the mass of the crown block;

the maximum braking force is the maximum braking force which can be generated by the braking system of the crown block.

Further, inputting the crown block data into a trained distance analysis model, and predicting a corresponding braking distance;

The training process of the distance analysis model comprises the following steps:

The braking distance corresponding to the Q groups of crown block data is collected in advance, and the crown block data and the corresponding braking distance are converted into a corresponding group of characteristic vectors;

Taking each group of feature vectors as input of a distance analysis model, taking a group of predicted braking distances corresponding to each group of crown block data as output, and taking an actual braking distance corresponding to each group of crown block data as a predicted target, wherein the actual braking distance is the braking distance which is collected in advance and corresponds to the crown block data; taking the sum of the prediction errors of the minimized all crown block data as a training target; training the distance analysis model until the sum of the prediction errors reaches convergence, and stopping training; the distance analysis model is a deep neural network model.

Further, the method for judging the type of the running track where the crown block is located comprises the following steps:

The running track type includes a straight track and a curved track;

If it is Judging that the crown block is positioned on a linear track; if/>And judging that the crown block is in the curve track.

Further, the method for calculating the priority coefficients corresponding to the m rear crown blocks includes:

Calculating the zone distance corresponding to m rear crown blocks, wherein the zone distance is the distance between the current position of the rear crown block and the next junction area; the calculation method of the distance between the corresponding sections of the m rear-mounted crown blocks comprises the following steps: ; in the/> For the section distance of the j-th rear crown block,/>For section length,/>For the section time of the j-th rear crown block,/>For the speed of the j-th rear crown block,/>; The section time is the time from the last passing junction zone to the current position of the rear crown block;

calculating priority coefficients corresponding to the m rear crown blocks according to the section distances, the transport quality, the running track type values and the braking distances corresponding to the m rear crown blocks; the expression of the priority coefficient is: ; in the/> For the priority coefficient of the j-th rear crown block,/>For the transportation quality of the j-th crown block,/>For the number of the type of the running track of the j-th rear crown block,/>For the braking distance of the j-th rear crown block,/>、/>、/>、/>Is a preset proportionality coefficient and/>、/>、/>、/>Are all greater than 0;

and sequencing the priority coefficients corresponding to the m rear crown blocks from large to small, wherein the sequencing order is the operation order of the m rear crown blocks.

Further, the method for judging whether to generate the control instruction according to the arrival time comprises the following steps:

Marking the rear crown block with the largest priority coefficient among the m rear crown blocks as a priority crown block, and marking the previous crown block of the priority crown block as a front crown block; sequentially increasing the number of the m rear crown blocks according to the running sequence of the m rear crown blocks, wherein the number of the j-th rear crown block is j;

The arrival time is the time that the current position of the rear crown block has elapsed until reaching the next junction region, and the expression of the arrival time is: ; in the/> The arrival time of the j-th rear crown block;

the control instruction comprises a deceleration instruction, a deceleration alarm instruction, a parking instruction and a parking alarm instruction;

Sequentially sequencing the arrival times of the m rear crown blocks according to the running sequence of the m rear crown blocks, comparing every two adjacent arrival times according to the running sequence, marking the arrival time ranked at the rear as the subsequent time, and marking the arrival time ranked at the front as the lead time; if the subsequent time in the two adjacent arrival times is greater than the preamble time, no control instruction is generated; if the subsequent time in the two adjacent arrival times is smaller than or equal to the preamble time, generating a deceleration instruction until the subsequent time is larger than the preamble time; if the crown block speed of the rear crown block is reduced to zero, changing the speed reducing instruction into a parking instruction; and generating a parking instruction for the rear crown blocks arranged behind the rear crown block replaced by the parking instruction in the operation sequence.

Further, the method for judging whether to generate the control instruction according to the following distance comprises the following steps:

Marking the next section of the m rear crown blocks to be accessed as a vehicle meeting section;

When the rear crown block enters the meeting section, the rear crown block which just enters the meeting section and the front rear crown block are used as a group of analysis sets, the numbers of two adjacent rear crown blocks in the analysis sets are compared, the rear crown block with the large number is marked as a front crown block, the rear crown block with the small number is marked as a rear crown block, and the priority crown block and the front crown block are also used as a group of analysis sets;

The following distance is the distance between the front crown block and the rear crown block in each analysis set; the following distance is expressed as: ; in the/> For the following distance of the j-th rear crown block,/>For the section time of the preamble crown block,/>The speed of the crown block is the speed of the crown block of the preamble crown block,/>For the section time of the subsequent crown block,/>For the crown block speed of the subsequent crown block,/>Is the crown block position of the preface crown block,/>The position of the crown block is the crown block position of the subsequent crown block;

Preset safety threshold Wherein/>，/>，/>，/>A real number greater than 1; the safety threshold value corresponds to the rear crown block one by one;

Comparing the following distances corresponding to the m rear crown blocks with the safety threshold values corresponding to the m rear crown blocks;

If it is No control instruction is generated;

If it is Generating a deceleration instruction;

If it is And/>Generating a deceleration alarm instruction;

If it is And/>And generating a parking alarm instruction.

Further, the method for judging whether to generate the control instruction according to the distance threshold value comprises the following steps:

When the j-th rear crown block enters the meeting section, the corresponding section distance is obtained, if And/>，If the distance is the distance threshold value, a parking instruction is generated for the rear crown block which does not enter the vehicle meeting section; if/>And/>No control instruction is generated.

Example 3:

referring to fig. 6, an electronic device 500 is also provided in accordance with yet another aspect of the present application. The electronic device 500 may include one or more processors and one or more memories. Wherein the memory has stored therein computer readable code which, when executed by the one or more processors, can perform a method of speed control for a wafer handling system as described above.

The method or system according to an embodiment of the application may also be implemented by means of the architecture of the electronic device shown in fig. 6. As shown in fig. 6, the electronic device 500 may include a bus 501, one or more CPUs 502, a ROM503, a RAM504, a communication port 505 connected to a network, an input/output 506, a hard disk 507, and the like. A storage device in the electronic device 500, such as a ROM503 or a hard disk 507, may store a speed control method for a wafer handling system provided by the present application. Further, the electronic device 500 may also include a user interface 508. Of course, the architecture shown in fig. 6 is merely exemplary, and one or more components of the electronic device shown in fig. 6 may be omitted as may be desired in implementing different devices.

Example 4:

Referring to FIG. 7, a computer readable storage medium 600 according to one embodiment of the application is shown. Computer readable storage medium 600 has stored thereon computer readable instructions. When the computer readable instructions are executed by the processor, a method of controlling speed for a wafer handling system according to an embodiment of the present application described with reference to the above figures may be performed. Storage medium 600 includes, but is not limited to, for example, volatile memory and/or nonvolatile memory. Volatile memory can include, for example, random Access Memory (RAM), cache memory (cache), and the like. The non-volatile memory may include, for example, read Only Memory (ROM), hard disk, flash memory, and the like.

In addition, according to embodiments of the present application, the processes described above with reference to flowcharts may be implemented as computer software programs. For example, the present application provides a non-transitory machine-readable storage medium storing machine-readable instructions executable by a processor to perform instructions corresponding to the method steps provided by the present application, such as: a speed control method for a wafer handling system. The above-described functions defined in the method of the present application are performed when the computer program is executed by a Central Processing Unit (CPU).

The above embodiments may be implemented in whole or in part by software, hardware, firmware, or any other combination. When implemented in software, the above-described embodiments may be implemented in whole or in part in the form of a computer program product. The computer program product comprises one or more computer instructions or computer programs. When the computer instructions or computer program are loaded or executed on a computer, the processes or functions described in accordance with embodiments of the present invention are produced in whole or in part. The computer may be a general purpose computer, a special purpose computer, a computer network, or other programmable apparatus. The computer instructions may be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another computer-readable storage medium, for example, the computer instructions may be transmitted from one website site, computer, server, or data center to another website site, computer, server, or data center over a wired network or a wireless network. The computer readable storage medium may be any available medium that can be accessed by a computer or a data storage device such as a server, data center, etc. that contains one or more sets of available media. The usable medium may be a magnetic medium (e.g., floppy disk, hard disk, magnetic tape), an optical medium (e.g., DVD), or a semiconductor medium. The semiconductor medium may be a solid state disk.

Those of ordinary skill in the art will appreciate that the various illustrative elements and algorithm steps described in connection with the embodiments disclosed herein may be implemented as electronic hardware, or combinations of computer software and electronic hardware. Whether such functionality is implemented as hardware or software depends upon the particular application and design constraints imposed on the solution. Skilled artisans may implement the described functionality in varying ways for each particular application, but such implementation decisions should not be interpreted as causing a departure from the scope of the present invention.

It will be clear to those skilled in the art that, for convenience and brevity of description, specific working procedures of the above-described systems, apparatuses and units may refer to corresponding procedures in the foregoing method embodiments, and are not repeated herein.

In the several embodiments provided by the present invention, it should be understood that the disclosed systems, devices, and methods may be implemented in other manners. For example, the apparatus embodiments described above are merely illustrative, e.g., the division of the units is merely one, and there may be additional divisions in actual implementation, e.g., multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be an indirect coupling or communication connection via some interfaces, devices or units, which may be in electrical, mechanical or other form.

The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

In addition, each functional unit in the embodiments of the present invention may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit.

The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Finally: the foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.

Claims (13)

1. The speed control method for the wafer carrying system is characterized by being applied to a cloud platform and comprising the following steps of:

the first step: receiving operation data acquired by an overhead travelling crane end, wherein the operation data comprise overhead travelling crane positions and overhead travelling crane data, and the overhead travelling crane data comprise overhead travelling crane speeds, turning radii, transport quality and maximum braking force;

the speed of the crown block is the speed of the crown block during running; the turning radius is the radius of a curve when the crown block turns; the transportation quality is the weight of the whole crown block when the crown block runs; the maximum braking force is the maximum braking force which can be generated by a braking system of the crown block; dividing the running track into n sections, wherein the length of each section is equal, sequentially increasing the number of the n sections to obtain the number i of the ith section, ; The position of the crown block is a section corresponding to the crown block on the running track; marking the junction of every two sections as a junction area;

And a second step of: analyzing the crown block data, obtaining a braking distance corresponding to the crown block, and judging the type of the running track where the crown block is located;

And a third step of: according to the position of the overhead travelling crane, obtaining m overhead travelling cranes, wherein the sections which the m overhead travelling cranes reach next are the same section, the m overhead travelling cranes are in different sections, marking the m overhead travelling cranes as rear overhead travelling cranes, and calculating the priority coefficient corresponding to the m rear overhead travelling cranes according to the section distance, the transportation quality, the running track type value and the braking distance corresponding to the m rear overhead travelling cranes; judging the running sequence of m rear crown blocks according to the priority coefficient; marking the rear crown block with the largest priority coefficient among the m rear crown blocks as a priority crown block, and marking the previous crown block of the priority crown block as a front crown block;

The section distance is the distance between the current position of the rear overhead travelling crane and the next junction area; the running track type value is preset according to different types of running tracks;

fourth step: calculating the arrival time and the following distance of m rear-mounted crown blocks, presetting a distance threshold, respectively judging whether to generate a control instruction according to the arrival time, the following distance and the distance threshold, and controlling the corresponding rear-mounted crown blocks according to the control instruction; the control instruction comprises a deceleration instruction, a deceleration alarm instruction, a parking instruction and a parking alarm instruction;

The arrival time is the time for the current position of the rear crown block to reach the next junction area; the method for judging whether to generate the control instruction according to the arrival time comprises the following steps: sequentially increasing the number of the m rear crown blocks according to the running sequence of the m rear crown blocks, wherein the number of the j-th rear crown block is j; sequentially sequencing the arrival times of the m rear crown blocks according to the running sequence of the m rear crown blocks, comparing every two adjacent arrival times according to the running sequence, marking the arrival time ranked at the rear as the subsequent time, and marking the arrival time ranked at the front as the lead time; if the subsequent time in the two adjacent arrival times is greater than the preamble time, no control instruction is generated; if the subsequent time in the two adjacent arrival times is smaller than or equal to the preamble time, generating a deceleration instruction until the subsequent time is larger than the preamble time; if the crown block speed of the rear crown block is reduced to zero, changing the speed reducing instruction into a parking instruction; generating a parking instruction for a rear crown block arranged behind the rear crown block replaced by the parking instruction in the operation sequence;

The following distance is the distance between the front crown block and the rear crown block in each analysis set; marking the next section of the m rear crown blocks to be accessed as a vehicle meeting section; when the rear crown block enters the meeting section, the rear crown block which just enters the meeting section and the front rear crown block are used as a group of analysis sets, the numbers of two adjacent rear crown blocks in the analysis sets are compared, the rear crown block with the large number is marked as the front crown block, the rear crown block with the small number is marked as the rear crown block, and the priority crown block and the front crown block are also used as a group of analysis sets.

2. The method for speed control of a wafer handling system according to claim 1, wherein the method for acquiring the crown block position comprises: an RFID tag is arranged in each junction area, an RFID reader-writer is arranged on each crown block, and the RFID tags correspond to the sections one by one; when the crown block passes through different sections, the RFID reader-writer on the crown block reads the RFID tag on the corresponding section, and the position of the crown block is obtained according to the RFID tag.

3. The method for speed control of a wafer handling system according to claim 2, wherein the method for obtaining the turning radius comprises: acquiring a roll angular velocity, wherein the roll angular velocity is the angular velocity of the crown block when the crown block turns, and calculating the turning radius according to the roll angular velocity and the crown block velocity; the turning radius is expressed as: ; wherein r is the turning radius, v is the crown block speed,/> Is the roll angular velocity.

4. A speed control method for a wafer handling system according to claim 3, wherein the transport quality acquisition method comprises: the method comprises the steps of obtaining the mass of a wafer and the mass of a crown block, wherein the mass of the wafer is the weight of a wafer transported by the crown block, and the mass of the crown block is the weight of the crown block when the crown block is empty; calculating transport quality according to the mass of the wafer and the mass of the crown block; the expression of the transport quality is: ; in the/> For the transportation quality/>Is the wafer quality,/>The mass of the crown block is the mass of the crown block.

5. The method of claim 4, wherein the crown block data is input into a trained distance analysis model to predict a corresponding braking distance;

The training process of the distance analysis model comprises the following steps:

The braking distance corresponding to the Q groups of crown block data is collected in advance, and the crown block data and the corresponding braking distance are converted into a corresponding group of characteristic vectors;

Taking each group of feature vectors as input of a distance analysis model, taking a group of predicted braking distances corresponding to each group of crown block data as output, and taking an actual braking distance corresponding to each group of crown block data as a predicted target, wherein the actual braking distance is the braking distance which is collected in advance and corresponds to the crown block data; taking the sum of the prediction errors of the minimized all crown block data as a training target; training the distance analysis model until the sum of the prediction errors reaches convergence, and stopping training; the distance analysis model is a deep neural network model.

6. The method for speed control of a wafer handling system of claim 5, wherein the method for determining the type of track in which the crown block is positioned comprises:

The running track type includes a straight track and a curved track;

If it is Judging that the crown block is positioned on a linear track; if/>And judging that the crown block is in the curve track.

7. The method of claim 6, wherein the calculating the priority coefficients for the m rear crown blocks comprises:

The method for calculating the zone distances corresponding to the m rear-mounted crown blocks comprises the following steps of: ; in the/> For the section distance of the j-th rear crown block,/>For section length,/>For the section time of the j-th rear crown block,/>For the speed of the j-th rear crown block,/>; The section time is the time from the last passing junction zone to the current position of the rear crown block;

The expression of the priority coefficient is: ；

In the method, in the process of the invention, For the priority coefficient of the j-th rear crown block,/>For the transportation quality of the j-th crown block,/>For the number of the type of the running track of the j-th rear crown block,/>For the braking distance of the j-th rear crown block,/>、/>、/>、/>Is a preset proportionality coefficient and/>、/>、/>、/>Are all greater than 0;

and sequencing the priority coefficients corresponding to the m rear crown blocks from large to small, wherein the sequencing order is the operation order of the m rear crown blocks.

8. The method of claim 7, wherein the arrival time is expressed as: ; in the/> The arrival time of the j-th rear crown block.

9. The method of claim 8, wherein the step of determining whether to generate the control command based on the following distance comprises:

The following distance is expressed as:

；

In the method, in the process of the invention, For the following distance of the j-th rear crown block,/>For the section time of the preamble crown block,/>The speed of the crown block is the speed of the crown block of the preamble crown block,/>For the section time of the subsequent crown block,/>For the crown block speed of the subsequent crown block,/>Is the crown block position of the preface crown block,/>The position of the crown block is the crown block position of the subsequent crown block;

Preset safety threshold Wherein/>，/>，/>，/>A real number greater than 1; the safety threshold value corresponds to the rear crown block one by one;

Comparing the following distances corresponding to the m rear crown blocks with the safety threshold values corresponding to the m rear crown blocks;

If it is No control instruction is generated;

If it is Generating a deceleration instruction;

If it is And/>Generating a deceleration alarm instruction;

If it is And/>And generating a parking alarm instruction.

10. The method of claim 9, wherein the step of determining whether to generate the control command based on the distance threshold comprises:

When the j-th rear crown block enters the meeting section, the corresponding section distance is obtained, if And/>，/>If the distance is the distance threshold value, a parking instruction is generated for the rear crown block which does not enter the vehicle meeting section; if/>And/>No control instruction is generated.

11. A speed control system for a wafer handling system implementing a speed control method for a wafer handling system according to any one of claims 1-10, comprising:

The data receiving module is used for receiving operation data acquired by the crown block end, wherein the operation data comprises crown block positions and crown block data, and the crown block data comprises crown block speeds, turning radiuses, transport quality and maximum braking force;

The data analysis module is used for analyzing the data of the crown block, acquiring a braking distance corresponding to the crown block, and judging the type of the running track where the crown block is located;

The multi-vehicle linkage module is used for acquiring m crown blocks which are in the same section in the next section and are in different sections currently according to the positions of the crown blocks, marking the m crown blocks as rear crown blocks, and calculating the priority coefficients corresponding to the m rear crown blocks; judging the running sequence of m rear crown blocks according to the priority coefficient;

The speed control module is used for calculating the arrival time of the m rear-mounted crown blocks, judging whether to generate a control instruction according to the arrival time, calculating the following distance of the m rear-mounted crown blocks, judging whether to generate the control instruction according to the following distance, and controlling the corresponding rear-mounted crown blocks according to the control instruction.

12. An electronic device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, wherein the processor implements a speed control method for a wafer handling system according to any one of claims 1-10 when the computer program is executed by the processor.

13. A computer readable storage medium, characterized in that the computer readable storage medium has stored thereon a computer program which, when executed, implements a speed control method for a wafer handling system according to any of claims 1-10.